PickRoutine.cs 19 KB

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  1. using Aitex.Core.Common;
  2. using Aitex.Core.RT.Device;
  3. using Aitex.Core.RT.Device.Unit;
  4. using Aitex.Core.RT.Event;
  5. using Aitex.Core.RT.Routine;
  6. using Aitex.Core.RT.SCCore;
  7. using Aitex.Core.Util;
  8. using Aitex.Sorter.Common;
  9. using MECF.Framework.Common.Equipment;
  10. using MECF.Framework.Common.SubstrateTrackings;
  11. using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.LoadPorts;
  12. using SciChart.Core.AttachedProperties;
  13. using System;
  14. namespace EFEM.RT.Routines
  15. {
  16. public class PickRoutine : CommonRoutine, IRoutine, IEfemPickRoutine
  17. {
  18. private enum Pick
  19. {
  20. ReserveRobot,
  21. WaitForPick,
  22. QueryState,
  23. OpenLoadLockDoor,
  24. CoolBufferMoveUP,
  25. WaitCoolBufferMoveUP,
  26. CheckBeforePick,
  27. QueryRobotParameter,
  28. RobotServoOff,
  29. WaitRobotServoOff,
  30. SetWaferSizeParameter0000,
  31. SetWaferSizeParameter0114,
  32. RobotServoOn,
  33. WaitRobotServoOn,
  34. PickWafer,
  35. WaitPick,
  36. XMove,
  37. CloseLoadLockDoor,
  38. CoolBufferMoveDown,
  39. WaitCoolBufferMoveDown,
  40. CheckAfterPick,
  41. PostMessage,
  42. RobotBusytoSimifOn,
  43. RobotBusytoSimifOff,
  44. CheckWaferPrecense,
  45. WaitCheckWaferPrecense,
  46. CheckWaferPrecenseAfterPick,
  47. QuerySignalStatus,
  48. RobotBladeUnGrip,
  49. NotifyFlipperPrepare,
  50. NotifyFlipperOver
  51. }
  52. protected bool MultiWaferSize = DeviceDefineManager.Instance.GetValue<bool>("MultiWaferSize") ?? false;
  53. private SCConfigItem _scPickTimeout = null;
  54. private int _timeout = 0;
  55. private int _axisTimeout = 0;
  56. private int _axisSpeed = 0;
  57. public double WaitForPickTime = 0.00;
  58. public PickRoutine(string module, string name)
  59. {
  60. Module = module;
  61. Name = name;
  62. _scPickTimeout = SC.GetConfigItem(SorterCommon.ScPathName.Robot_TimeLimitForPickWafer);
  63. if (HaveMotionAxis)
  64. {
  65. _axisTimeout = SC.GetValue<int>("MotionAxis.MoveTimeout");
  66. _axisSpeed = SC.GetValue<int>("MotionAxis.AutoSpeed");
  67. }
  68. }
  69. public bool Initalize()
  70. {
  71. IsStopped = true;
  72. return true;
  73. }
  74. public ModuleName Source { get; set; }
  75. public int Slot { get; set; }
  76. public Hand Blade { get; set; }
  77. private LoadPort _lpDevice;
  78. private bool _skipWait;
  79. public Result Start(params object[] objs)
  80. {
  81. IsStopped = false;
  82. Reset();
  83. _timeout = robot.RobotCommandTimeout;
  84. Reset();
  85. EV.PostMessage(ModuleName.System.ToString(), EventEnum.PickingWaferFromChamberBegins, string.Format("{0}{1:D2} by {2}", Source.ToString(), Slot + 1, Blade.ToString()));
  86. //robot.IsBusy = true;
  87. return Result.RUN;
  88. }
  89. public Result Monitor()
  90. {
  91. try
  92. {
  93. if (IsStopped) return Result.DONE;
  94. if (WaitForPickTime > 0.0)
  95. Wait((int)Pick.WaitForPick, "Wait", WaitForPickTime, Notify, Stop);
  96. //if (ModuleHelper.IsLoadPort(Source))
  97. // QueryLoadportState((int)Pick.QueryState, Source.ToString(), _timeout);
  98. if (ModuleHelper.IsCoolingBuffer(Source) || ModuleHelper.IsAligner(Source))
  99. {
  100. var dev = GetCoolBuffer(Source);
  101. if (dev != null)
  102. {
  103. CoolBufferMoveUP((int)Pick.CoolBufferMoveUP, GetCoolBuffer(Source), WaferManager.Instance.GetWaferSize(Source, Slot), _timeout, Notify, Stop);
  104. WaitCoolBufferMoveUp((int)Pick.WaitCoolBufferMoveUP, GetCoolBuffer(Source), "Wait CoolingBuffer Move Up...", _timeout, Notify, Stop);
  105. }
  106. }
  107. else if (ModuleHelper.IsFlipper(Source))
  108. {
  109. FlipperPrepare((int)Pick.NotifyFlipperPrepare, GetFlipper(), "Flipper Prepare Transfer...", _timeout, Notify, Stop);
  110. }
  111. //RobotSignalStatus((int)Pick.QuerySignalStatus, robot, _timeout);
  112. CheckBladeWaferIsExist((int)Pick.CheckWaferPrecense, robot, Blade, _timeout);
  113. WaitRobotMotion((int)Pick.WaitCheckWaferPrecense, robot, "Wait finish check wafer", _timeout, Notify, Stop);
  114. CheckBeforePick((int)Pick.CheckBeforePick, "Check wafer information", Source, Slot, Blade, Notify, Stop);
  115. if (!ModuleHelper.IsLoadLock(Source))
  116. {
  117. PickWafer((int)Pick.PickWafer, "Pick wafer", Source, Slot, Blade, OffsetX, OffsetY, OffsetZ, Notify, Stop);
  118. this.WaitRobotMotion((int)Pick.WaitPick, robot, "Wait picked", _timeout, Notify, Stop);
  119. }
  120. //UnGripRobotBlade((int)Pick.RobotBladeUnGrip, Blade, robot, _timeout);
  121. //if (ModuleHelper.IsCoolingBuffer(Source) || ModuleHelper.IsAligner(Source))
  122. //{
  123. // CoolBufferMoveDown((int)Pick.CoolBufferMoveDown, GetCoolBuffer(Source), WaferManager.Instance.GetWaferSize(Source, Slot), _timeout, Notify, Stop);
  124. // WaitCoolBufferMoveDown((int)Pick.WaitCoolBufferMoveDown, GetCoolBuffer(Source), "Wait CoolingBuffer Move Down...", _timeout, Notify, Stop);
  125. //}
  126. PostMessage((int)Pick.PostMessage, string.Format("{0}{1:D2} by {2}.", Source.ToString(), Slot + 1, Blade.ToString()));
  127. //CheckBladeWaferIsExist((int)Pick.CheckWaferPrecenseAfterPick, robot, Blade, _timeout);
  128. if (ModuleHelper.IsFlipper(Source))
  129. {
  130. FlipperComplete((int)Pick.NotifyFlipperOver, GetFlipper(), "Flipper Complete Transfer...", _timeout, Notify, Stop);
  131. }
  132. CheckAfterPick((int)Pick.CheckAfterPick, "Check wafer information after wafer picked", Source, Slot, Blade, Notify, Stop);
  133. }
  134. catch (RoutineBreakException)
  135. {
  136. if (!IsActived(TokenId) && !_skipWait)
  137. {
  138. _skipWait = true;
  139. return Monitor();
  140. }
  141. return Result.RUN;
  142. }
  143. catch (RoutineFaildException)
  144. {
  145. IsStopped = true;
  146. return Result.FAIL;
  147. }
  148. IsStopped = true;
  149. return Result.DONE;
  150. }
  151. public void CheckBeforePick(int id, string name, ModuleName chamber, int slot, Hand blade, Action<string> notify, Action<string> error)
  152. {
  153. Tuple<bool, Result> ret = Execute(id, () =>
  154. {
  155. notify(name);
  156. string reason = string.Empty;
  157. if (!CheckRobotMotionInterlock(chamber, slot, out reason))
  158. {
  159. EV.PostMessage(ModuleName.System.ToString(), EventEnum.TransferPrepareFailed, String.Format("target {0}{1:D2},{2}", chamber.ToString(), slot + 1, reason));
  160. return false;
  161. }
  162. notify(String.Format("Check {0}{1:D2} wafer information", chamber.ToString(), slot));
  163. if (blade == Hand.Blade1)
  164. {
  165. if (ModuleHelper.IsLoadLock(chamber) && Singleton<EfemEntity>.Instance.IsOnlineMode)
  166. {
  167. //online mode, CreateWafer in LoadLock
  168. //WaferManager.Instance.CreateWafer(chamber, slot, WaferStatus.Normal);
  169. }
  170. else if (ModuleHelper.IsBuffer(chamber) && Singleton<EfemEntity>.Instance.IsOnlineMode)
  171. {
  172. //online mode, CreateWafer in LoadLock
  173. //WaferManager.Instance.CreateWafer(chamber, slot, WaferStatus.Normal);
  174. if (chamber.ToString() == "Buffer")
  175. WaferManager.Instance.UpdateWaferSize(chamber, slot, bf.Size);
  176. if (chamber.ToString() == "Buffer1")
  177. WaferManager.Instance.UpdateWaferSize(chamber, slot, bf1.Size);
  178. if (chamber.ToString() == "Buffer2")
  179. WaferManager.Instance.UpdateWaferSize(chamber, slot, bf2.Size);
  180. }
  181. else
  182. {
  183. bool bHasWafer = WaferManager.Instance.CheckWafer(chamber, slot, WaferStatus.Normal);
  184. if (!bHasWafer)
  185. {
  186. EV.PostMessage(ModuleName.System.ToString(), EventEnum.WaferAbsentWithoutRecord, String.Format("target {0}{1:D2}", chamber.ToString(), slot + 1));
  187. return false;
  188. }
  189. }
  190. bool bNoWafer = WaferManager.Instance.CheckWafer(ModuleName.Robot, 0, WaferStatus.Empty);
  191. if (!bNoWafer)
  192. {
  193. EV.PostMessage(ModuleName.System.ToString(), EventEnum.WaferDetectedBeforePick);
  194. return false;
  195. }
  196. bNoWafer = CheckSensorNoWafer(ModuleName.Robot, 0); //check sensor
  197. if (!bNoWafer)
  198. {
  199. EV.PostMessage(ModuleName.System.ToString(), EventEnum.WaferDetectedBeforePick);
  200. return false;
  201. }
  202. if (ModuleHelper.IsBuffer(chamber))
  203. {
  204. bool bHasWafer = CheckSeneorHasWafer(chamber, slot); //check sensor
  205. if (!bHasWafer)
  206. {
  207. EV.PostWarningLog(chamber.ToString(), "Can not pick wafer from buffer, Buffer slot has no wafer.");
  208. return false;
  209. }
  210. }
  211. }
  212. else if (blade == Hand.Blade2)
  213. {
  214. bool bHasWafer = true;
  215. for (int i = 0; i < robot.Blade2Slots; i++)
  216. {
  217. if (ModuleHelper.IsLoadLock(chamber) && Singleton<EfemEntity>.Instance.IsOnlineMode)
  218. {
  219. //online mode, CreateWafer in LoadLock
  220. //WaferManager.Instance.CreateWafer(chamber, slot, WaferStatus.Normal);
  221. }
  222. else if (ModuleHelper.IsBuffer(chamber) && Singleton<EfemEntity>.Instance.IsOnlineMode)
  223. {
  224. //online mode, CreateWafer in LoadLock
  225. //WaferManager.Instance.CreateWafer(chamber, slot, WaferStatus.Normal);
  226. if (chamber.ToString() == "Buffer")
  227. WaferManager.Instance.UpdateWaferSize(chamber, slot, bf.Size);
  228. if (chamber.ToString() == "Buffer1")
  229. WaferManager.Instance.UpdateWaferSize(chamber, slot, bf1.Size);
  230. if (chamber.ToString() == "Buffer2")
  231. WaferManager.Instance.UpdateWaferSize(chamber, slot, bf2.Size);
  232. }
  233. else
  234. bHasWafer = WaferManager.Instance.CheckWafer(chamber, slot + i, WaferStatus.Normal);
  235. bool bNoWafer = WaferManager.Instance.CheckWafer(ModuleName.Robot, (int)blade + i, WaferStatus.Empty);
  236. if (!bNoWafer)
  237. {
  238. EV.PostMessage(ModuleName.System.ToString(), EventEnum.WaferDetectedBeforePick);
  239. return false;
  240. }
  241. bNoWafer = CheckSensorNoWafer(ModuleName.Robot, (int)blade + i); //check sensor
  242. if (!bNoWafer)
  243. {
  244. EV.PostMessage(ModuleName.System.ToString(), EventEnum.WaferDetectedBeforePick);
  245. return false;
  246. }
  247. if (ModuleHelper.IsBuffer(chamber))
  248. {
  249. bHasWafer = CheckSeneorHasWafer(chamber, slot + i); //check sensor
  250. if (!bHasWafer)
  251. {
  252. EV.PostWarningLog(chamber.ToString(), "Can not pick wafer from buffer, Buffer slot has no wafer.");
  253. return false;
  254. }
  255. }
  256. }
  257. if (!bHasWafer)
  258. {
  259. EV.PostMessage(ModuleName.System.ToString(), EventEnum.WaferAbsentWithoutRecord, String.Format("target {0}{1:D2}", chamber.ToString(), slot + 1));
  260. return false;
  261. }
  262. }
  263. else
  264. {
  265. bool bHasWafer = true;
  266. for (int i = 0; i < robot.Blade2Slots + 1; i++)
  267. {
  268. if (ModuleHelper.IsLoadLock(chamber) && Singleton<EfemEntity>.Instance.IsOnlineMode)
  269. {
  270. //online mode, CreateWafer in LoadLock
  271. //WaferManager.Instance.CreateWafer(chamber, slot, WaferStatus.Normal);
  272. }
  273. else if (ModuleHelper.IsBuffer(chamber) && Singleton<EfemEntity>.Instance.IsOnlineMode)
  274. {
  275. //online mode, CreateWafer in LoadLock
  276. //WaferManager.Instance.CreateWafer(chamber, slot, WaferStatus.Normal);
  277. if (chamber.ToString() == "Buffer")
  278. WaferManager.Instance.UpdateWaferSize(chamber, slot, bf.Size);
  279. if (chamber.ToString() == "Buffer1")
  280. WaferManager.Instance.UpdateWaferSize(chamber, slot, bf1.Size);
  281. if (chamber.ToString() == "Buffer2")
  282. WaferManager.Instance.UpdateWaferSize(chamber, slot, bf2.Size);
  283. }
  284. else
  285. bHasWafer = WaferManager.Instance.CheckWafer(chamber, slot, WaferStatus.Normal);
  286. bool bNoWafer = WaferManager.Instance.CheckWafer(ModuleName.Robot, (int)Hand.Blade1 + i, WaferStatus.Empty);
  287. if (!bNoWafer)
  288. {
  289. EV.PostMessage(ModuleName.System.ToString(), EventEnum.WaferDetectedBeforePick);
  290. return false;
  291. }
  292. bNoWafer = CheckSensorNoWafer(ModuleName.Robot, (int)Hand.Blade1 + i); //check sensor
  293. if (!bNoWafer)
  294. {
  295. EV.PostMessage(ModuleName.System.ToString(), EventEnum.WaferDetectedBeforePick);
  296. return false;
  297. }
  298. if (ModuleHelper.IsBuffer(chamber) && blade == Hand.Both)
  299. {
  300. bHasWafer &= CheckSeneorHasWafer(chamber, slot + i); //check sensor
  301. if (!bHasWafer)
  302. {
  303. EV.PostWarningLog(chamber.ToString(), "Can not pick wafer from buffer, Buffer slot has no wafer.");
  304. return false;
  305. }
  306. }
  307. }
  308. if (!bHasWafer)
  309. {
  310. EV.PostMessage(ModuleName.System.ToString(), EventEnum.WaferAbsentWithoutRecord, String.Format("target {0}{1:D2}", chamber.ToString(), slot));
  311. return false;
  312. }
  313. }
  314. if (ModuleHelper.IsCoolingBuffer(chamber))
  315. {
  316. IoCoolingBuffer buffer = DEVICE.GetDevice<IoCoolingBuffer>(chamber.ToString());
  317. if (buffer == null)
  318. {
  319. EV.PostWarningLog("System", String.Format("{0} Device is Null", chamber.ToString()));
  320. return false;
  321. }
  322. if (!buffer.CheckPinUp())
  323. {
  324. EV.PostWarningLog(chamber.ToString(), "Can not pick wafer from buffer, buffer isn't pick position.");
  325. return false;
  326. }
  327. }
  328. return true;
  329. });
  330. if (ret.Item1)
  331. {
  332. if (ret.Item2 == Result.FAIL)
  333. {
  334. //error(String.Format("Failed to check wafer information."));
  335. throw (new RoutineFaildException());
  336. }
  337. }
  338. }
  339. public void CheckAfterPick(int id, string name, ModuleName chamber, int slot, Hand blade, Action<string> notify, Action<string> error)
  340. {
  341. Tuple<bool, Result> ret = Execute(id, () =>
  342. {
  343. notify(name);
  344. if (blade == Hand.Blade1)
  345. {
  346. bool bHasWafer = CheckSeneorHasWafer(ModuleName.Robot, (int)blade);
  347. if (!bHasWafer)
  348. {
  349. EV.PostMessage(ModuleName.System.ToString(), EventEnum.WaferNotDetectedAfterPick);
  350. return false;
  351. }
  352. }
  353. else if (blade == Hand.Blade2)
  354. {
  355. for (int i = 0; i < robot.Blade2Slots; i++)
  356. {
  357. bool bHasWafer = CheckSeneorHasWafer(ModuleName.Robot, (int)Hand.Blade2 + i);
  358. if (!bHasWafer)
  359. {
  360. EV.PostMessage(ModuleName.System.ToString(), EventEnum.WaferNotDetectedAfterPick);
  361. return false;
  362. }
  363. }
  364. }
  365. else
  366. {
  367. for (int i = 0; i < robot.Blade2Slots + 1; i++)
  368. {
  369. bool bHasWafer = CheckSeneorHasWafer(ModuleName.Robot, (int)Hand.Blade1 + i);
  370. if (!bHasWafer)
  371. {
  372. EV.PostMessage(ModuleName.System.ToString(), EventEnum.WaferNotDetectedAfterPick);
  373. return false;
  374. }
  375. }
  376. }
  377. return true;
  378. });
  379. if (ret.Item1)
  380. {
  381. if (ret.Item2 == Result.FAIL)
  382. {
  383. //error(String.Format("Failed to check wafer information."));
  384. throw (new RoutineFaildException());
  385. }
  386. }
  387. }
  388. }
  389. }