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- using Aitex.Core.Common;
- using Aitex.Core.RT.Device;
- using Aitex.Core.RT.Device.Unit;
- using Aitex.Core.RT.Event;
- using Aitex.Core.RT.Routine;
- using Aitex.Core.RT.SCCore;
- using Aitex.Core.Util;
- using Aitex.Sorter.Common;
- using MECF.Framework.Common.Equipment;
- using MECF.Framework.Common.SubstrateTrackings;
- using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.LoadPorts;
- using SciChart.Core.AttachedProperties;
- using System;
- namespace EFEM.RT.Routines
- {
- public class PickRoutine : CommonRoutine, IRoutine, IEfemPickRoutine
- {
- private enum Pick
- {
- ReserveRobot,
- WaitForPick,
- QueryState,
- OpenLoadLockDoor,
- CoolBufferMoveUP,
- WaitCoolBufferMoveUP,
- CheckBeforePick,
- QueryRobotParameter,
- RobotServoOff,
- WaitRobotServoOff,
- SetWaferSizeParameter0000,
- SetWaferSizeParameter0114,
- RobotServoOn,
- WaitRobotServoOn,
- PickWafer,
- WaitPick,
- XMove,
- CloseLoadLockDoor,
- CoolBufferMoveDown,
- WaitCoolBufferMoveDown,
- CheckAfterPick,
- PostMessage,
- RobotBusytoSimifOn,
- RobotBusytoSimifOff,
- CheckWaferPrecense,
- WaitCheckWaferPrecense,
- CheckWaferPrecenseAfterPick,
- QuerySignalStatus,
- RobotBladeUnGrip,
- NotifyFlipperPrepare,
- NotifyFlipperOver
- }
- protected bool MultiWaferSize = DeviceDefineManager.Instance.GetValue<bool>("MultiWaferSize") ?? false;
- private SCConfigItem _scPickTimeout = null;
- private int _timeout = 0;
- private int _axisTimeout = 0;
- private int _axisSpeed = 0;
- public double WaitForPickTime = 0.00;
- public PickRoutine(string module, string name)
- {
- Module = module;
- Name = name;
- _scPickTimeout = SC.GetConfigItem(SorterCommon.ScPathName.Robot_TimeLimitForPickWafer);
- if (HaveMotionAxis)
- {
- _axisTimeout = SC.GetValue<int>("MotionAxis.MoveTimeout");
- _axisSpeed = SC.GetValue<int>("MotionAxis.AutoSpeed");
- }
- }
- public bool Initalize()
- {
- IsStopped = true;
- return true;
- }
- public ModuleName Source { get; set; }
- public int Slot { get; set; }
- public Hand Blade { get; set; }
- private LoadPort _lpDevice;
- private bool _skipWait;
- public Result Start(params object[] objs)
- {
- IsStopped = false;
- Reset();
- _timeout = robot.RobotCommandTimeout;
- Reset();
- EV.PostMessage(ModuleName.System.ToString(), EventEnum.PickingWaferFromChamberBegins, string.Format("{0}{1:D2} by {2}", Source.ToString(), Slot + 1, Blade.ToString()));
- //robot.IsBusy = true;
- return Result.RUN;
- }
- public Result Monitor()
- {
- try
- {
- if (IsStopped) return Result.DONE;
- if (WaitForPickTime > 0.0)
- Wait((int)Pick.WaitForPick, "Wait", WaitForPickTime, Notify, Stop);
- //if (ModuleHelper.IsLoadPort(Source))
- // QueryLoadportState((int)Pick.QueryState, Source.ToString(), _timeout);
- if (ModuleHelper.IsCoolingBuffer(Source) || ModuleHelper.IsAligner(Source))
- {
- var dev = GetCoolBuffer(Source);
- if (dev != null)
- {
- CoolBufferMoveUP((int)Pick.CoolBufferMoveUP, GetCoolBuffer(Source), WaferManager.Instance.GetWaferSize(Source, Slot), _timeout, Notify, Stop);
- WaitCoolBufferMoveUp((int)Pick.WaitCoolBufferMoveUP, GetCoolBuffer(Source), "Wait CoolingBuffer Move Up...", _timeout, Notify, Stop);
- }
- }
- else if (ModuleHelper.IsFlipper(Source))
- {
- FlipperPrepare((int)Pick.NotifyFlipperPrepare, GetFlipper(), "Flipper Prepare Transfer...", _timeout, Notify, Stop);
- }
- //RobotSignalStatus((int)Pick.QuerySignalStatus, robot, _timeout);
- CheckBladeWaferIsExist((int)Pick.CheckWaferPrecense, robot, Blade, _timeout);
- WaitRobotMotion((int)Pick.WaitCheckWaferPrecense, robot, "Wait finish check wafer", _timeout, Notify, Stop);
- CheckBeforePick((int)Pick.CheckBeforePick, "Check wafer information", Source, Slot, Blade, Notify, Stop);
- if (!ModuleHelper.IsLoadLock(Source))
- {
- PickWafer((int)Pick.PickWafer, "Pick wafer", Source, Slot, Blade, OffsetX, OffsetY, OffsetZ, Notify, Stop);
- this.WaitRobotMotion((int)Pick.WaitPick, robot, "Wait picked", _timeout, Notify, Stop);
- }
- //UnGripRobotBlade((int)Pick.RobotBladeUnGrip, Blade, robot, _timeout);
- //if (ModuleHelper.IsCoolingBuffer(Source) || ModuleHelper.IsAligner(Source))
- //{
- // CoolBufferMoveDown((int)Pick.CoolBufferMoveDown, GetCoolBuffer(Source), WaferManager.Instance.GetWaferSize(Source, Slot), _timeout, Notify, Stop);
- // WaitCoolBufferMoveDown((int)Pick.WaitCoolBufferMoveDown, GetCoolBuffer(Source), "Wait CoolingBuffer Move Down...", _timeout, Notify, Stop);
- //}
- PostMessage((int)Pick.PostMessage, string.Format("{0}{1:D2} by {2}.", Source.ToString(), Slot + 1, Blade.ToString()));
- //CheckBladeWaferIsExist((int)Pick.CheckWaferPrecenseAfterPick, robot, Blade, _timeout);
- if (ModuleHelper.IsFlipper(Source))
- {
- FlipperComplete((int)Pick.NotifyFlipperOver, GetFlipper(), "Flipper Complete Transfer...", _timeout, Notify, Stop);
- }
- CheckAfterPick((int)Pick.CheckAfterPick, "Check wafer information after wafer picked", Source, Slot, Blade, Notify, Stop);
- }
- catch (RoutineBreakException)
- {
- if (!IsActived(TokenId) && !_skipWait)
- {
- _skipWait = true;
- return Monitor();
- }
- return Result.RUN;
- }
- catch (RoutineFaildException)
- {
- IsStopped = true;
- return Result.FAIL;
- }
- IsStopped = true;
- return Result.DONE;
- }
- public void CheckBeforePick(int id, string name, ModuleName chamber, int slot, Hand blade, Action<string> notify, Action<string> error)
- {
- Tuple<bool, Result> ret = Execute(id, () =>
- {
- notify(name);
- string reason = string.Empty;
- if (!CheckRobotMotionInterlock(chamber, slot, out reason))
- {
- EV.PostMessage(ModuleName.System.ToString(), EventEnum.TransferPrepareFailed, String.Format("target {0}{1:D2},{2}", chamber.ToString(), slot + 1, reason));
- return false;
- }
- notify(String.Format("Check {0}{1:D2} wafer information", chamber.ToString(), slot));
- if (blade == Hand.Blade1)
- {
- if (ModuleHelper.IsLoadLock(chamber) && Singleton<EfemEntity>.Instance.IsOnlineMode)
- {
- //online mode, CreateWafer in LoadLock
- //WaferManager.Instance.CreateWafer(chamber, slot, WaferStatus.Normal);
- }
- else if (ModuleHelper.IsBuffer(chamber) && Singleton<EfemEntity>.Instance.IsOnlineMode)
- {
- //online mode, CreateWafer in LoadLock
- //WaferManager.Instance.CreateWafer(chamber, slot, WaferStatus.Normal);
- if (chamber.ToString() == "Buffer")
- WaferManager.Instance.UpdateWaferSize(chamber, slot, bf.Size);
- if (chamber.ToString() == "Buffer1")
- WaferManager.Instance.UpdateWaferSize(chamber, slot, bf1.Size);
- if (chamber.ToString() == "Buffer2")
- WaferManager.Instance.UpdateWaferSize(chamber, slot, bf2.Size);
- }
- else
- {
- bool bHasWafer = WaferManager.Instance.CheckWafer(chamber, slot, WaferStatus.Normal);
- if (!bHasWafer)
- {
- EV.PostMessage(ModuleName.System.ToString(), EventEnum.WaferAbsentWithoutRecord, String.Format("target {0}{1:D2}", chamber.ToString(), slot + 1));
- return false;
- }
- }
- bool bNoWafer = WaferManager.Instance.CheckWafer(ModuleName.Robot, 0, WaferStatus.Empty);
- if (!bNoWafer)
- {
- EV.PostMessage(ModuleName.System.ToString(), EventEnum.WaferDetectedBeforePick);
- return false;
- }
- bNoWafer = CheckSensorNoWafer(ModuleName.Robot, 0); //check sensor
- if (!bNoWafer)
- {
- EV.PostMessage(ModuleName.System.ToString(), EventEnum.WaferDetectedBeforePick);
- return false;
- }
- if (ModuleHelper.IsBuffer(chamber))
- {
- bool bHasWafer = CheckSeneorHasWafer(chamber, slot); //check sensor
- if (!bHasWafer)
- {
- EV.PostWarningLog(chamber.ToString(), "Can not pick wafer from buffer, Buffer slot has no wafer.");
- return false;
- }
- }
- }
- else if (blade == Hand.Blade2)
- {
- bool bHasWafer = true;
- for (int i = 0; i < robot.Blade2Slots; i++)
- {
- if (ModuleHelper.IsLoadLock(chamber) && Singleton<EfemEntity>.Instance.IsOnlineMode)
- {
- //online mode, CreateWafer in LoadLock
- //WaferManager.Instance.CreateWafer(chamber, slot, WaferStatus.Normal);
- }
- else if (ModuleHelper.IsBuffer(chamber) && Singleton<EfemEntity>.Instance.IsOnlineMode)
- {
- //online mode, CreateWafer in LoadLock
- //WaferManager.Instance.CreateWafer(chamber, slot, WaferStatus.Normal);
- if (chamber.ToString() == "Buffer")
- WaferManager.Instance.UpdateWaferSize(chamber, slot, bf.Size);
- if (chamber.ToString() == "Buffer1")
- WaferManager.Instance.UpdateWaferSize(chamber, slot, bf1.Size);
- if (chamber.ToString() == "Buffer2")
- WaferManager.Instance.UpdateWaferSize(chamber, slot, bf2.Size);
- }
- else
- bHasWafer = WaferManager.Instance.CheckWafer(chamber, slot + i, WaferStatus.Normal);
- bool bNoWafer = WaferManager.Instance.CheckWafer(ModuleName.Robot, (int)blade + i, WaferStatus.Empty);
- if (!bNoWafer)
- {
- EV.PostMessage(ModuleName.System.ToString(), EventEnum.WaferDetectedBeforePick);
- return false;
- }
- bNoWafer = CheckSensorNoWafer(ModuleName.Robot, (int)blade + i); //check sensor
- if (!bNoWafer)
- {
- EV.PostMessage(ModuleName.System.ToString(), EventEnum.WaferDetectedBeforePick);
- return false;
- }
- if (ModuleHelper.IsBuffer(chamber))
- {
- bHasWafer = CheckSeneorHasWafer(chamber, slot + i); //check sensor
- if (!bHasWafer)
- {
- EV.PostWarningLog(chamber.ToString(), "Can not pick wafer from buffer, Buffer slot has no wafer.");
- return false;
- }
- }
- }
- if (!bHasWafer)
- {
- EV.PostMessage(ModuleName.System.ToString(), EventEnum.WaferAbsentWithoutRecord, String.Format("target {0}{1:D2}", chamber.ToString(), slot + 1));
- return false;
- }
- }
- else
- {
- bool bHasWafer = true;
- for (int i = 0; i < robot.Blade2Slots + 1; i++)
- {
- if (ModuleHelper.IsLoadLock(chamber) && Singleton<EfemEntity>.Instance.IsOnlineMode)
- {
- //online mode, CreateWafer in LoadLock
- //WaferManager.Instance.CreateWafer(chamber, slot, WaferStatus.Normal);
- }
- else if (ModuleHelper.IsBuffer(chamber) && Singleton<EfemEntity>.Instance.IsOnlineMode)
- {
- //online mode, CreateWafer in LoadLock
- //WaferManager.Instance.CreateWafer(chamber, slot, WaferStatus.Normal);
- if (chamber.ToString() == "Buffer")
- WaferManager.Instance.UpdateWaferSize(chamber, slot, bf.Size);
- if (chamber.ToString() == "Buffer1")
- WaferManager.Instance.UpdateWaferSize(chamber, slot, bf1.Size);
- if (chamber.ToString() == "Buffer2")
- WaferManager.Instance.UpdateWaferSize(chamber, slot, bf2.Size);
- }
- else
- bHasWafer = WaferManager.Instance.CheckWafer(chamber, slot, WaferStatus.Normal);
- bool bNoWafer = WaferManager.Instance.CheckWafer(ModuleName.Robot, (int)Hand.Blade1 + i, WaferStatus.Empty);
- if (!bNoWafer)
- {
- EV.PostMessage(ModuleName.System.ToString(), EventEnum.WaferDetectedBeforePick);
- return false;
- }
- bNoWafer = CheckSensorNoWafer(ModuleName.Robot, (int)Hand.Blade1 + i); //check sensor
- if (!bNoWafer)
- {
- EV.PostMessage(ModuleName.System.ToString(), EventEnum.WaferDetectedBeforePick);
- return false;
- }
- if (ModuleHelper.IsBuffer(chamber) && blade == Hand.Both)
- {
- bHasWafer &= CheckSeneorHasWafer(chamber, slot + i); //check sensor
- if (!bHasWafer)
- {
- EV.PostWarningLog(chamber.ToString(), "Can not pick wafer from buffer, Buffer slot has no wafer.");
- return false;
- }
- }
- }
- if (!bHasWafer)
- {
- EV.PostMessage(ModuleName.System.ToString(), EventEnum.WaferAbsentWithoutRecord, String.Format("target {0}{1:D2}", chamber.ToString(), slot));
- return false;
- }
- }
- if (ModuleHelper.IsCoolingBuffer(chamber))
- {
- IoCoolingBuffer buffer = DEVICE.GetDevice<IoCoolingBuffer>(chamber.ToString());
- if (buffer == null)
- {
- EV.PostWarningLog("System", String.Format("{0} Device is Null", chamber.ToString()));
- return false;
- }
- if (!buffer.CheckPinUp())
- {
- EV.PostWarningLog(chamber.ToString(), "Can not pick wafer from buffer, buffer isn't pick position.");
- return false;
- }
- }
- return true;
- });
- if (ret.Item1)
- {
- if (ret.Item2 == Result.FAIL)
- {
- //error(String.Format("Failed to check wafer information."));
- throw (new RoutineFaildException());
- }
- }
- }
- public void CheckAfterPick(int id, string name, ModuleName chamber, int slot, Hand blade, Action<string> notify, Action<string> error)
- {
- Tuple<bool, Result> ret = Execute(id, () =>
- {
- notify(name);
- if (blade == Hand.Blade1)
- {
- bool bHasWafer = CheckSeneorHasWafer(ModuleName.Robot, (int)blade);
- if (!bHasWafer)
- {
- EV.PostMessage(ModuleName.System.ToString(), EventEnum.WaferNotDetectedAfterPick);
- return false;
- }
- }
- else if (blade == Hand.Blade2)
- {
- for (int i = 0; i < robot.Blade2Slots; i++)
- {
- bool bHasWafer = CheckSeneorHasWafer(ModuleName.Robot, (int)Hand.Blade2 + i);
- if (!bHasWafer)
- {
- EV.PostMessage(ModuleName.System.ToString(), EventEnum.WaferNotDetectedAfterPick);
- return false;
- }
- }
- }
- else
- {
- for (int i = 0; i < robot.Blade2Slots + 1; i++)
- {
- bool bHasWafer = CheckSeneorHasWafer(ModuleName.Robot, (int)Hand.Blade1 + i);
- if (!bHasWafer)
- {
- EV.PostMessage(ModuleName.System.ToString(), EventEnum.WaferNotDetectedAfterPick);
- return false;
- }
- }
- }
- return true;
- });
- if (ret.Item1)
- {
- if (ret.Item2 == Result.FAIL)
- {
- //error(String.Format("Failed to check wafer information."));
- throw (new RoutineFaildException());
- }
- }
- }
- }
- }
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