using Aitex.Core.Common; using Aitex.Core.RT.Device; using Aitex.Core.RT.Device.Unit; using Aitex.Core.RT.Event; using Aitex.Core.RT.Routine; using Aitex.Core.RT.SCCore; using Aitex.Core.Util; using Aitex.Sorter.Common; using MECF.Framework.Common.Equipment; using MECF.Framework.Common.SubstrateTrackings; using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.LoadPorts; using SciChart.Core.AttachedProperties; using System; namespace EFEM.RT.Routines { public class PickRoutine : CommonRoutine, IRoutine, IEfemPickRoutine { private enum Pick { ReserveRobot, WaitForPick, QueryState, OpenLoadLockDoor, CoolBufferMoveUP, WaitCoolBufferMoveUP, CheckBeforePick, QueryRobotParameter, RobotServoOff, WaitRobotServoOff, SetWaferSizeParameter0000, SetWaferSizeParameter0114, RobotServoOn, WaitRobotServoOn, PickWafer, WaitPick, XMove, CloseLoadLockDoor, CoolBufferMoveDown, WaitCoolBufferMoveDown, CheckAfterPick, PostMessage, RobotBusytoSimifOn, RobotBusytoSimifOff, CheckWaferPrecense, WaitCheckWaferPrecense, CheckWaferPrecenseAfterPick, QuerySignalStatus, RobotBladeUnGrip, NotifyFlipperPrepare, NotifyFlipperOver } protected bool MultiWaferSize = DeviceDefineManager.Instance.GetValue("MultiWaferSize") ?? false; private SCConfigItem _scPickTimeout = null; private int _timeout = 0; private int _axisTimeout = 0; private int _axisSpeed = 0; public double WaitForPickTime = 0.00; public PickRoutine(string module, string name) { Module = module; Name = name; _scPickTimeout = SC.GetConfigItem(SorterCommon.ScPathName.Robot_TimeLimitForPickWafer); if (HaveMotionAxis) { _axisTimeout = SC.GetValue("MotionAxis.MoveTimeout"); _axisSpeed = SC.GetValue("MotionAxis.AutoSpeed"); } } public bool Initalize() { IsStopped = true; return true; } public ModuleName Source { get; set; } public int Slot { get; set; } public Hand Blade { get; set; } private LoadPort _lpDevice; private bool _skipWait; public Result Start(params object[] objs) { IsStopped = false; Reset(); _timeout = robot.RobotCommandTimeout; Reset(); EV.PostMessage(ModuleName.System.ToString(), EventEnum.PickingWaferFromChamberBegins, string.Format("{0}{1:D2} by {2}", Source.ToString(), Slot + 1, Blade.ToString())); //robot.IsBusy = true; return Result.RUN; } public Result Monitor() { try { if (IsStopped) return Result.DONE; if (WaitForPickTime > 0.0) Wait((int)Pick.WaitForPick, "Wait", WaitForPickTime, Notify, Stop); //if (ModuleHelper.IsLoadPort(Source)) // QueryLoadportState((int)Pick.QueryState, Source.ToString(), _timeout); if (ModuleHelper.IsCoolingBuffer(Source) || ModuleHelper.IsAligner(Source)) { var dev = GetCoolBuffer(Source); if (dev != null) { CoolBufferMoveUP((int)Pick.CoolBufferMoveUP, GetCoolBuffer(Source), WaferManager.Instance.GetWaferSize(Source, Slot), _timeout, Notify, Stop); WaitCoolBufferMoveUp((int)Pick.WaitCoolBufferMoveUP, GetCoolBuffer(Source), "Wait CoolingBuffer Move Up...", _timeout, Notify, Stop); } } else if (ModuleHelper.IsFlipper(Source)) { FlipperPrepare((int)Pick.NotifyFlipperPrepare, GetFlipper(), "Flipper Prepare Transfer...", _timeout, Notify, Stop); } //RobotSignalStatus((int)Pick.QuerySignalStatus, robot, _timeout); CheckBladeWaferIsExist((int)Pick.CheckWaferPrecense, robot, Blade, _timeout); WaitRobotMotion((int)Pick.WaitCheckWaferPrecense, robot, "Wait finish check wafer", _timeout, Notify, Stop); CheckBeforePick((int)Pick.CheckBeforePick, "Check wafer information", Source, Slot, Blade, Notify, Stop); if (!ModuleHelper.IsLoadLock(Source)) { PickWafer((int)Pick.PickWafer, "Pick wafer", Source, Slot, Blade, OffsetX, OffsetY, OffsetZ, Notify, Stop); this.WaitRobotMotion((int)Pick.WaitPick, robot, "Wait picked", _timeout, Notify, Stop); } //UnGripRobotBlade((int)Pick.RobotBladeUnGrip, Blade, robot, _timeout); //if (ModuleHelper.IsCoolingBuffer(Source) || ModuleHelper.IsAligner(Source)) //{ // CoolBufferMoveDown((int)Pick.CoolBufferMoveDown, GetCoolBuffer(Source), WaferManager.Instance.GetWaferSize(Source, Slot), _timeout, Notify, Stop); // WaitCoolBufferMoveDown((int)Pick.WaitCoolBufferMoveDown, GetCoolBuffer(Source), "Wait CoolingBuffer Move Down...", _timeout, Notify, Stop); //} PostMessage((int)Pick.PostMessage, string.Format("{0}{1:D2} by {2}.", Source.ToString(), Slot + 1, Blade.ToString())); //CheckBladeWaferIsExist((int)Pick.CheckWaferPrecenseAfterPick, robot, Blade, _timeout); if (ModuleHelper.IsFlipper(Source)) { FlipperComplete((int)Pick.NotifyFlipperOver, GetFlipper(), "Flipper Complete Transfer...", _timeout, Notify, Stop); } CheckAfterPick((int)Pick.CheckAfterPick, "Check wafer information after wafer picked", Source, Slot, Blade, Notify, Stop); } catch (RoutineBreakException) { if (!IsActived(TokenId) && !_skipWait) { _skipWait = true; return Monitor(); } return Result.RUN; } catch (RoutineFaildException) { IsStopped = true; return Result.FAIL; } IsStopped = true; return Result.DONE; } public void CheckBeforePick(int id, string name, ModuleName chamber, int slot, Hand blade, Action notify, Action error) { Tuple ret = Execute(id, () => { notify(name); string reason = string.Empty; if (!CheckRobotMotionInterlock(chamber, slot, out reason)) { EV.PostMessage(ModuleName.System.ToString(), EventEnum.TransferPrepareFailed, String.Format("target {0}{1:D2},{2}", chamber.ToString(), slot + 1, reason)); return false; } notify(String.Format("Check {0}{1:D2} wafer information", chamber.ToString(), slot)); if (blade == Hand.Blade1) { if (ModuleHelper.IsLoadLock(chamber) && Singleton.Instance.IsOnlineMode) { //online mode, CreateWafer in LoadLock //WaferManager.Instance.CreateWafer(chamber, slot, WaferStatus.Normal); } else if (ModuleHelper.IsBuffer(chamber) && Singleton.Instance.IsOnlineMode) { //online mode, CreateWafer in LoadLock //WaferManager.Instance.CreateWafer(chamber, slot, WaferStatus.Normal); if (chamber.ToString() == "Buffer") WaferManager.Instance.UpdateWaferSize(chamber, slot, bf.Size); if (chamber.ToString() == "Buffer1") WaferManager.Instance.UpdateWaferSize(chamber, slot, bf1.Size); if (chamber.ToString() == "Buffer2") WaferManager.Instance.UpdateWaferSize(chamber, slot, bf2.Size); } else { bool bHasWafer = WaferManager.Instance.CheckWafer(chamber, slot, WaferStatus.Normal); if (!bHasWafer) { EV.PostMessage(ModuleName.System.ToString(), EventEnum.WaferAbsentWithoutRecord, String.Format("target {0}{1:D2}", chamber.ToString(), slot + 1)); return false; } } bool bNoWafer = WaferManager.Instance.CheckWafer(ModuleName.Robot, 0, WaferStatus.Empty); if (!bNoWafer) { EV.PostMessage(ModuleName.System.ToString(), EventEnum.WaferDetectedBeforePick); return false; } bNoWafer = CheckSensorNoWafer(ModuleName.Robot, 0); //check sensor if (!bNoWafer) { EV.PostMessage(ModuleName.System.ToString(), EventEnum.WaferDetectedBeforePick); return false; } if (ModuleHelper.IsBuffer(chamber)) { bool bHasWafer = CheckSeneorHasWafer(chamber, slot); //check sensor if (!bHasWafer) { EV.PostWarningLog(chamber.ToString(), "Can not pick wafer from buffer, Buffer slot has no wafer."); return false; } } } else if (blade == Hand.Blade2) { bool bHasWafer = true; for (int i = 0; i < robot.Blade2Slots; i++) { if (ModuleHelper.IsLoadLock(chamber) && Singleton.Instance.IsOnlineMode) { //online mode, CreateWafer in LoadLock //WaferManager.Instance.CreateWafer(chamber, slot, WaferStatus.Normal); } else if (ModuleHelper.IsBuffer(chamber) && Singleton.Instance.IsOnlineMode) { //online mode, CreateWafer in LoadLock //WaferManager.Instance.CreateWafer(chamber, slot, WaferStatus.Normal); if (chamber.ToString() == "Buffer") WaferManager.Instance.UpdateWaferSize(chamber, slot, bf.Size); if (chamber.ToString() == "Buffer1") WaferManager.Instance.UpdateWaferSize(chamber, slot, bf1.Size); if (chamber.ToString() == "Buffer2") WaferManager.Instance.UpdateWaferSize(chamber, slot, bf2.Size); } else bHasWafer = WaferManager.Instance.CheckWafer(chamber, slot + i, WaferStatus.Normal); bool bNoWafer = WaferManager.Instance.CheckWafer(ModuleName.Robot, (int)blade + i, WaferStatus.Empty); if (!bNoWafer) { EV.PostMessage(ModuleName.System.ToString(), EventEnum.WaferDetectedBeforePick); return false; } bNoWafer = CheckSensorNoWafer(ModuleName.Robot, (int)blade + i); //check sensor if (!bNoWafer) { EV.PostMessage(ModuleName.System.ToString(), EventEnum.WaferDetectedBeforePick); return false; } if (ModuleHelper.IsBuffer(chamber)) { bHasWafer = CheckSeneorHasWafer(chamber, slot + i); //check sensor if (!bHasWafer) { EV.PostWarningLog(chamber.ToString(), "Can not pick wafer from buffer, Buffer slot has no wafer."); return false; } } } if (!bHasWafer) { EV.PostMessage(ModuleName.System.ToString(), EventEnum.WaferAbsentWithoutRecord, String.Format("target {0}{1:D2}", chamber.ToString(), slot + 1)); return false; } } else { bool bHasWafer = true; for (int i = 0; i < robot.Blade2Slots + 1; i++) { if (ModuleHelper.IsLoadLock(chamber) && Singleton.Instance.IsOnlineMode) { //online mode, CreateWafer in LoadLock //WaferManager.Instance.CreateWafer(chamber, slot, WaferStatus.Normal); } else if (ModuleHelper.IsBuffer(chamber) && Singleton.Instance.IsOnlineMode) { //online mode, CreateWafer in LoadLock //WaferManager.Instance.CreateWafer(chamber, slot, WaferStatus.Normal); if (chamber.ToString() == "Buffer") WaferManager.Instance.UpdateWaferSize(chamber, slot, bf.Size); if (chamber.ToString() == "Buffer1") WaferManager.Instance.UpdateWaferSize(chamber, slot, bf1.Size); if (chamber.ToString() == "Buffer2") WaferManager.Instance.UpdateWaferSize(chamber, slot, bf2.Size); } else bHasWafer = WaferManager.Instance.CheckWafer(chamber, slot, WaferStatus.Normal); bool bNoWafer = WaferManager.Instance.CheckWafer(ModuleName.Robot, (int)Hand.Blade1 + i, WaferStatus.Empty); if (!bNoWafer) { EV.PostMessage(ModuleName.System.ToString(), EventEnum.WaferDetectedBeforePick); return false; } bNoWafer = CheckSensorNoWafer(ModuleName.Robot, (int)Hand.Blade1 + i); //check sensor if (!bNoWafer) { EV.PostMessage(ModuleName.System.ToString(), EventEnum.WaferDetectedBeforePick); return false; } if (ModuleHelper.IsBuffer(chamber) && blade == Hand.Both) { bHasWafer &= CheckSeneorHasWafer(chamber, slot + i); //check sensor if (!bHasWafer) { EV.PostWarningLog(chamber.ToString(), "Can not pick wafer from buffer, Buffer slot has no wafer."); return false; } } } if (!bHasWafer) { EV.PostMessage(ModuleName.System.ToString(), EventEnum.WaferAbsentWithoutRecord, String.Format("target {0}{1:D2}", chamber.ToString(), slot)); return false; } } if (ModuleHelper.IsCoolingBuffer(chamber)) { IoCoolingBuffer buffer = DEVICE.GetDevice(chamber.ToString()); if (buffer == null) { EV.PostWarningLog("System", String.Format("{0} Device is Null", chamber.ToString())); return false; } if (!buffer.CheckPinUp()) { EV.PostWarningLog(chamber.ToString(), "Can not pick wafer from buffer, buffer isn't pick position."); return false; } } return true; }); if (ret.Item1) { if (ret.Item2 == Result.FAIL) { //error(String.Format("Failed to check wafer information.")); throw (new RoutineFaildException()); } } } public void CheckAfterPick(int id, string name, ModuleName chamber, int slot, Hand blade, Action notify, Action error) { Tuple ret = Execute(id, () => { notify(name); if (blade == Hand.Blade1) { bool bHasWafer = CheckSeneorHasWafer(ModuleName.Robot, (int)blade); if (!bHasWafer) { EV.PostMessage(ModuleName.System.ToString(), EventEnum.WaferNotDetectedAfterPick); return false; } } else if (blade == Hand.Blade2) { for (int i = 0; i < robot.Blade2Slots; i++) { bool bHasWafer = CheckSeneorHasWafer(ModuleName.Robot, (int)Hand.Blade2 + i); if (!bHasWafer) { EV.PostMessage(ModuleName.System.ToString(), EventEnum.WaferNotDetectedAfterPick); return false; } } } else { for (int i = 0; i < robot.Blade2Slots + 1; i++) { bool bHasWafer = CheckSeneorHasWafer(ModuleName.Robot, (int)Hand.Blade1 + i); if (!bHasWafer) { EV.PostMessage(ModuleName.System.ToString(), EventEnum.WaferNotDetectedAfterPick); return false; } } } return true; }); if (ret.Item1) { if (ret.Item2 == Result.FAIL) { //error(String.Format("Failed to check wafer information.")); throw (new RoutineFaildException()); } } } } }