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- namespace Aitex.Sorter.RT.EFEMs.Servers
- {
- public enum ErrorCodel
- {
- VAC, //Insufficient vacuum source pressure
- AIR, //Insufficient compressed air source pressure
- STALL, //Stall
- TIMEOUT, //Motion timeout
- LIMIT, //Limit error
- SENSOR, //Sensor abnormal
- POSITION, //Position error
- EMS, //Emergency stop
- COMM, //Communication error between controllers
- COMM2, //Communication error between modules
-
- VACON, //Chucking on error
- VACOFF, //Chucking off error
- CLAMPON, //Clamp on error Enabled
- CLAMPOF, //Clamp off error
- RRTWAF, //Wafer protrusion
- CRSWAF, //Cross wafer detection
- THICKWAF, //Abnormal thickness wafer detection (thick)
- THINWAF, //Abnormal thickness wafer detection (thin)
- DBLWAF, //Dual wafers detection
- BAOWAF, //Front bow wafer detection
- COMMAND, //Command error
- PODNG, //Pod abnormal load error
- PODMISMATCH, //Pod type mismatch
- VAC_S, //Chucking sensor abnormal
- CLAMP_S, //Clamp sensor abnormal
- SAFTY, //Hand/finger pinch sensor reaction
- LOCKNG, //FOUP lock
- UNLOCKNG, //FOUP unlock
- L_KEY_LK, //Latch key lock failure
- L_KEY_UL, //Latch key unlock failure
- MAP_S, //Mapping sensor abnormal
- MAP_S1, //Mapping sensor preparation
- MAP_S2, //Mapping sensor containing
- WAFLOST, //Wafer fall
- ALIGNNG, //Alignment failure
- DRIVER, //Driver abnormal
- DRPOWERDOWN, //Drive power off
- HARDWARE, //Hardware failure
- INTERNAL, //Internal error
- E84_TIMEOUTx, //E84 timeout
- E84_CS_VALID, //E84CS_0, CS_1, VALIDerror
- READFAIL, //Reading error
- UNDEFINITION, //Undefined error
- }
- }
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