namespace Aitex.Sorter.RT.EFEMs.Servers { public enum ErrorCodel { VAC, //Insufficient vacuum source pressure AIR, //Insufficient compressed air source pressure STALL, //Stall TIMEOUT, //Motion timeout LIMIT, //Limit error SENSOR, //Sensor abnormal POSITION, //Position error EMS, //Emergency stop COMM, //Communication error between controllers COMM2, //Communication error between modules VACON, //Chucking on error VACOFF, //Chucking off error CLAMPON, //Clamp on error Enabled CLAMPOF, //Clamp off error RRTWAF, //Wafer protrusion CRSWAF, //Cross wafer detection THICKWAF, //Abnormal thickness wafer detection (thick) THINWAF, //Abnormal thickness wafer detection (thin) DBLWAF, //Dual wafers detection BAOWAF, //Front bow wafer detection COMMAND, //Command error PODNG, //Pod abnormal load error PODMISMATCH, //Pod type mismatch VAC_S, //Chucking sensor abnormal CLAMP_S, //Clamp sensor abnormal SAFTY, //Hand/finger pinch sensor reaction LOCKNG, //FOUP lock UNLOCKNG, //FOUP unlock L_KEY_LK, //Latch key lock failure L_KEY_UL, //Latch key unlock failure MAP_S, //Mapping sensor abnormal MAP_S1, //Mapping sensor preparation MAP_S2, //Mapping sensor containing WAFLOST, //Wafer fall ALIGNNG, //Alignment failure DRIVER, //Driver abnormal DRPOWERDOWN, //Drive power off HARDWARE, //Hardware failure INTERNAL, //Internal error E84_TIMEOUTx, //E84 timeout E84_CS_VALID, //E84CS_0, CS_1, VALIDerror READFAIL, //Reading error UNDEFINITION, //Undefined error } }