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- VirgoST 系统更新历史记录
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- 2025-01-02 version 2.0.0.6
- 1.Water Leak 触发 Chiller OFF.
- 2024-11-30 version 2.0.0.5
- 1.修改 SmallGuidePinEnable 和 MediumGuidePinEnable 配置默认为true.
- 2023-11-29 version 2.0.0.4
- 1.map时,Loadport 第一片根据配置是否支持(不支持,红色显示)
- 2023-11-28 version 2.0.0.3
- 1.增加SmallGuidePinInstalled,MediumGuidePinInstalled.
- 2023-08-14 version 2.0.0.2
- 1.修改创建计划,LP slot 1 wafer size根据配置(一个或多个尺寸)是否报警.
- 2.增加SmallGuidePinInstalled.增加MediumGuidePinInstalled.
- 2023-06-20 version 2.0.0.1
- 1.cooling/robot/chamber,有wafer,切换自动模式去create job。实际不能成功create job,没有任何提示信息
- 2.保存recipe菜单删掉PMB
- 3.ATM模式不用做工艺,sequence带有温度的recipe不要判断进行加热
- 4.当efem已经接收到错误信息时,由原来的Post ActionDone 修改为 Post Error.
- 2023-02-05 version 1.0.96.8
- 1.修改RF 误报警Turn On failed的问题
- 2022-12-15 version 1.0.96.7
- 1.修改因Sequence中使用单一手臂造成PM和Aligner上wafer互锁
- 2.加强PM放的优先级
- 3.完善手动拖片时禁用手臂的功能
- 2022-11-30 version 1.0.96.6
- 1.auto cooling or aligner
- 2.EAP-F2S35指令启用。
- 2022-11-28 version 1.0.96.5
- 1.警用手臂与指定路径功能升级优化。
- 2.增加recipesplit配置项,对process文件夹添加config配置,设置为true时使用,设置为false时不使用。
- 3.DataLog ->Wafer History页面里面的搜索框,输入需要搜索的LotName,点击搜索不能精准查找,
- 搜索按钮只会按照开始时间,结束时间来查找对应时间段内所有的LotName。
- 4.针对Virgo A/Virgo-B/Virgo-AB软件,我们UI界面Robot 手指的显示和实际停留位置有一定的偏差,
- 易对客户使用造成一定的误解,修复动画错位问题。
- 2022-10-21 version 1.0.96.4
- 1.在Virgo软件overview->EFEM页面添加一个SMIF设备Reset按钮,并能正常使smif进行reset动作,同步增加ERRORCLEAR指令
- 2.add lift up/down。
- 3.home all can not complete system intialization
- 2022-10-08 version 1.0.96.3
- 1.update 去除放片到ALigner、Cooling的优先级
- 2.页面增加GAS备注信息。
- 3.优化调度逻辑,减少chamber在大气中曝露的时间。
- 4.新增A+B机台,调用datalog文件有误,若单调用VigroA的配置文件,则缺少了B腔Bias 信息,需添加配置文件。
- 2022-9-27 version 1.0.96.2
- 1.优化调度逻辑
- 2.兼容升级后,没有Process和Clean文件夹的查询
- 3.自制EFEM模式下tolerance 误报的问题
- 2022-9-20 version 1.0.96.1
- 1. 增加Kashiyama 干泵
- 2. 优化开关门的时间,避免提前开门导致的工艺问题
- 3.KashiyamaPump add some trace log.
- 4.使用 BaseDevice::_SetRealFloat() 解决浮点数rounding的问题.
- 5.remove unnessesary messsage, recipe file not found
- 2022-8-27 version 1.0.96
- 1. 兼容Open Stage和SMIF
- 2. 升级双臂版功能
- 3. 增加统计相关的SVID
- 2022-8-11 version 1.0.95
- 1.当前软件支持的pre-job和post-job功能,无法基于idle时间来定义是否需要启用pre-job,
- 需支持可以根据idle的时间长短来定义是否需要启用pre-job(类似于可以根据idle时间的长短来定义是否启用idle-clean)
- 2.在recipe setting中分别增加pump和vent的pin up和pin down 功能, Pumping 和 Venting时LiftPin的位置分别可设。
- 2022-8-9 version 1.0.94
- 1. 状态机里面不可以 Sleep.
- 2022-8-4 version 1.0.93
- 1. SkyPump 兼容 JGM-1000A, 二代泵读数据时, 返回数据包多一个字符。
- 2022-5-7 version 1.0.92
- 1. enhancement:Add size WS150 & WS159
- 2. add recipe step svid
- 2022-4-7 version 1.0.91
- 1. enhancement:FA save previous status
- 2. feature:enable blue signaltower
- 3. enhancement:robot continuous run pick/place after put wafer on lift
- 4. feature:EFEM cooling water alarm is configurable by SC
- 5. enhancement:FA alarm add text
- 2022-4-7 version 1.0.90
- 1. fix:post process delay OpenCloseSlitValveTimeout
- 2022-3-30 version 1.0.89
- 1. feature:enable lift pin up/down before pump
- 2. feature:heater temperature set to 0 if do not want to change chamber temperature before process
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- 2022-3-23 version 1.0.88
- 1. feature:fa smart tag read/write
- 2. enhancement:enable/disable load/unload according smif status
- 3. fix:recipe file invalid issue
- 2022-3-20 version 1.0.87
- 1. feature:configurable whether pop job complete dialog when job done
- 2. enhancement: disalbe load/unload when job running
- 3. fa:add writeID function
- 4. enhancement: mfc verification enhancement
- 2022-3-10 version 1.0.86
- 1. feature:FA 增加SMIF相关控制
- 2022-3-6 version 1.0.85
- 1. enhancement:EFEM 兼容自研和广川两种型号
- 1. enhancement:对Jet EFEM:增加读Carrier ID的功能
- 1. enhancement:对Jet EFEM:禁止设置Wafer Size
- 2022-2-28 version 1.0.83
- 1. enhancement:EFEM connect retry
- 2021-12-28 version 1.0.82
- 1. fix: "system is in autorunning stage , can not do cassette leave" warning
- 2021-12-22 version 1.0.81
- 1. add: LP status display on overview area
- 2. enhancement: Wafer status description improved
- 2021-12-17 version 1.0.80
- 1. enhancement: Mapping button disable when cassette door opened
- 2. enhancement: Cassette door display improved
- 2021-12-16 version 1.0.79
- 1. enhancement: UI process history compatible with only 1 PM
- 2021-12-09 version 1.0.78
- 1. fix: Job complete info - wafer size incorrect
- 2. add: Wafer size in simulator can be chosen
- 2021-11-24 version 1.0.77
- 1. fix: Gas valve turn on/off failed
- 2021-11-20 version 1.0.76
- 1. fix: 初始化的时候关闭腔体门
- 2. enhancement:map条件不满足的时候不进入mapping状态
- 3. enhancement:clear error as background
- 2021-11-11 1.0.75
- 1.add: 优化lot结束弹出的对话框
- 2021-11-04 1.0.73
- 1.add: FA mapping cmd return 03 when LP is not ready
- 2.fix: LotID and recipe select info(by FA) display
- 2021-11-03 1.0.72
- 1.fix: Can not switch to cycle mode afer once non-cycle job
- 2021-10-26 1.0.71
- 1.add: SMC chiller Modbus LRC check
- 2021-10-20 1.0.70
- 1.add: LP wafer count display
- 2.enhance: Change efem state to error when protrusion
- 2021-10-20 1.0.69
- 1.fix: Wafer status always show "InProcess"
- 2.add: Post pop dialog message when any job done
- 3.enhance: Check if chamber has wafer before run recipe
- 4.enhance: Delete alarm view
- 5.add: Main view alarm combobox
- 6.enhance: Wafer history display format change
- 7.add: Signal tower strategy can be config
- 8.fix: Parallel mode switch
- 2021-10-09 1.0.68
- 1.feature: add wafer history FDC function
- 2.feature: add process history step line
- 2021-09-10 1.0.67
- 1.fix: IsTemperatureReady never true when chiller enable
- 2.fix: UI robot arm movement start&end position incorrect
- 3.enhance: display different color according pm online and offline
- 2021-08-09 1.0.66
- 1.fix:EFEM SIGSTAT alarm & event post
- 2.fix:EFEM top view
- 2021-07-31 1.0.65
- 1.add:Heater temp offset by temp point
- 2.feature:MFC calibration
- 3.feature:RF calibartion
- 4.feature:wafer history by lot
- 5.fix:hide EPD inforamtion if not installed
- 2021-07-30 1.0.64
- 1.fix:Skip current recipe step
- 2021-07-29 1.0.63
- 1.add:Slitdoor auto close before clean sequence
- 2021-07-23 1.0.62
- 1.fix:EPD connection parameters
- 2.fix:SC unit
- 2021-07-21 1.0.61
- 1.add:BiasRF enable state to PLC
- 2.fix:Wafer protrusion message : Warning change to Alarm
- 3.fix:Coolant Inlet/Outlet TC Broken message : Warning change to Alarm
- 2021-07-20 1.0.60
- 1.fix:single wafer auto running, two chamber open the door
- 2021-07-16 1.0.59
- 1.fix:Transfer stuck when job end
- 2021-07-11 1.0.58
- 1.fix:PM "Source Generator Safety Lock" warning change level to info
- 2021-07-09 1.0.57
- 1.add:Recipe config:keep vacuum afer process
- 2.add:RF ignition failed alarm
- 3.fix:Signal tower light status
- 2021-06-29 1.0.56
- 1.fix:CycleModeUI显示跟系统状态不吻合的问题
- 2.fix:简化部分SC显示
- 3.add:UI根据RT SC配置自动选择配置文件
- 2021-06-29 1.0.55
- 1. fix: 并发模式下有一个腔体空闲的问题
- 2. fix:one possible deadlock during scheduler
- 2021-06-19 1.0.53
- 1. 增加SVID
- 2021-06-09 1.0.52
- 1. S7F25 return recipe/sequence body per user suggestion
- 2021-06-08 1.0.51
- 1. improvement:epd config ui remove unnecessary items
- 2021-06-06 1.0.50
- 1. fix:epd not install cause issue
- 2021-06-05 1.0.49
- 1. EPD improvement,add log
- 2. add lot id information to wafer history
- 3. FA:S7F26 gave sequence data to eap
- 2021-06-04 1.0.48
- 1. link port id/slot to more CEID
- 2021-05-29 1.0.47
- 1. FA增加S2F25指令
- 2. FA增加Cassette Door open/close事件
- 3. FA增加LP Slotmap数据变量
- 2021-05-28 1.0.46
- 1. Configuration-Role中项目设置为只读,实际权限为读写
- 2021-05-25 1.0.45
- 1. 增加EPD功能
- 2021-05-19 1.0.43
- 1. FA、Clean界面微调
- 2. fix:自动登录admin账号
- 2021-05-17 1.0.42
- 1. SC项目+设定值导出
- 2021-05-16 1.0.41
- 1. fix:GasLine不能跳号启用的问题
- 2021-05-16 1.0.40
- 1. 功能:激活FA功能
- 2021-05-12 1.0.39
- 1. 功能:增加Idle Clean, Pre-job, Post-job clean功能
- 2. 功能:增加输入Lot Name
- 2021-05-12 1.0.38
- 1. fix:UI Cycle数量显示 更新不实时的问题
- 2021-05-11 1.0.37
- 1. fix:调度的时候混跑死锁的问题
- 2021-05-11 1.0.36
- 1. Virgo系列增加GB Pressure SW、GB Door SW、LE OT SW
- 2. SC项目+设定值导出功能
- 2021-05-10 version 1.0.35
- 1. 新增首页ATM Mode显示
- 2. 调整Slow Pump Valve图形显示
- 2021-05-08 version 1.0.34
- 1. 新增PM Place & Pick的Delay功能
- 2021-04-27 version 1.0.33
- 1. 解决4',6'混合跑的时候,停在手臂上的问题
- 2021-04-12 version 1.0.29
- 1. 解决4',6'混合跑的时候,会报参数错的问题
- 2. return wafer 上手臂没法传送的问题
- 2021-04-10 version 1.0.28
- 1. 解决单片会停住的问题
- 2. 解决4寸,6寸混合跑,会停住的问题
- 2021-01-31 version 1.0.0.17
- 1: EFEM 信息没处理的问题,导致伸进去PM,不动了
- 2:Cylinder报错 PLC Kept
- 2021-01-28 version 1.0.0.15
- 1:Cylinder报错 PLC Kept
- 2021-01-16 version 1.0.0.8
- 1:支持并行调度
- 2021-01-14 version 1.0.0.7
- 1:调度优化
- 2021-01-12 version 1.0.0.6
- 1:准备传片的过程中,会报超时错,而且报错之后,继续传片
- 2: return wafer, 弹出对话框可选是否cooling,参考Transfer wafer
- 3:sequence文件里面的cooling时间没生效
- 4:自动模式下,map不work
- 5:create job之后,禁止set/remove
- 6:auto runing-》auto idle
- 7:数据库没保存carrier信息
- 8: 提示3寸第一片不能跑货的问题
- 9:robot动画在Aligner位置有偏差
- 2020-12-20 version 1.0.0.1
- 1. 初始版本
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