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- using System;
- using System.Collections.Generic;
- using System.Diagnostics;
- using System.Linq;
- using System.Text;
- using System.Threading.Tasks;
- using Aitex.Core.Common;
- using Aitex.Core.RT.DataCenter;
- using Aitex.Core.RT.Device;
- using Aitex.Core.RT.Event;
- using Aitex.Core.RT.Fsm;
- using Aitex.Core.RT.Log;
- using Aitex.Core.RT.SCCore;
- using Aitex.Core.Util;
- using Aitex.Sorter.Common;
- using VirgoRT.Module;
- using VirgoRT.Modules;
- using MECF.Framework.Common.Equipment;
- using MECF.Framework.Common.Schedulers;
- using MECF.Framework.Common.SubstrateTrackings;
- using VirgoRT.Devices;
- namespace VirgoRT.Scheduler
- {
- public class SchedulerPM : SchedulerModule
- {
- public override bool IsAvailable
- {
- get
- {
- if (!SC.GetValue<bool>("System.IsATMMode"))
- return _entity.IsIdle && _entity.IsOnline && CheckTaskDone() && !_waitCompletejobClean;
- return _entity.IsIdle && _entity.IsOnline && CheckTaskDone();
- }
- }
- public override bool IsOnline
- {
- get { return _entity != null && _entity.IsOnline; }
- }
- public override bool IsError
- {
- get { return _entity.IsError; }
- }
- public bool IsIdle
- {
- get { return _entity.IsIdle && _entity.IsOnline && CheckTaskDone() ; }
- }
- public TaskType Task => _task;
- private PMEntity _entity = null;
- private ModuleName _taskRobot;
- private EnumTransferType _taskTransferType;
- private Hand _taskBlade;
- private int _taskSlot;
- private int _entityTaskToken = (int)FSM_MSG.NONE;
- private DeviceTimer _timerProcess = new DeviceTimer();
- private JetPM _pm;
- private float _paramTemp;
- public float Temperature
- {
- get
- {
- if (SC.GetValue<bool>($"{Module}.Chiller.EnableChiller"))
- {
- return _pm.CoolantOutletTempFB;
- }
- return _pm.SubstrateTempFB;
- }
- }
- public RD_TRIG IdlePurgeTrig { get; set; }
- public Stopwatch IdlePurgeTimer { get; set; }
- public int IdlePurgeTime { get; set; }
- public int IdlePurgeNextRunTime { get; set; }
- public RD_TRIG IdleCleanTrig { get; set; }
- public Stopwatch IdleCleanTimer { get; set; }
- public int IdleCleanTime { get; set; }
- public int IdleCleanNextRunTime { get; set; }
- private bool _waitPreJobClean;
- private bool _waitCompletejobClean;
- private R_TRIG _trigIdleCleanFailed = new R_TRIG();
- private R_TRIG _trigIdlePurgeFailed = new R_TRIG();
- public RD_TRIG PreJobCleanTrig { get; set; }
- public Stopwatch PreJobCleanTimer { get; set; }
- public int PreJobCleanTime { get; set; }
- public SchedulerPM(ModuleName chamber) : base(chamber.ToString())
- {
- switch (chamber)
- {
- case ModuleName.PMA:
- _entity = Singleton<RouteManager>.Instance.PMA;
- break;
- case ModuleName.PMB:
- _entity = Singleton<RouteManager>.Instance.PMB;
- break;
- }
- _pm = DEVICE.GetDevice<JetPM>(Module.ToString());
- IdlePurgeTrig = new RD_TRIG();
- IdlePurgeTimer = new Stopwatch();
- IdleCleanTrig = new RD_TRIG();
- IdleCleanTimer = new Stopwatch();
- PreJobCleanTrig = new RD_TRIG();
- PreJobCleanTimer = new Stopwatch();
- }
- public void InitClean()
- {
- DATA.Subscribe($"{Module}.IdlePurgeNextRunTime", () => IdlePurgeNextRunTime);
- DATA.Subscribe($"{Module}.IdleCleanNextRunTime", () => IdleCleanNextRunTime);
- }
- public override bool IsReadyForPick(ModuleName robot, int slot, Hand blade)
- {
- return _entity.IsPrepareTransferReady(robot, EnumTransferType.Pick, slot, blade)
- && WaferManager.Instance.CheckHasWafer(ModuleHelper.Converter(_module), slot);
- }
- public override bool IsReadyForPlace(ModuleName robot, int slot, Hand blade)
- {
- return _entity.IsPrepareTransferReady(robot, EnumTransferType.Place, slot, blade)
- && WaferManager.Instance.CheckNoWafer(ModuleHelper.Converter(_module), slot);
- }
- public bool CheckSlitDoorDown()
- {
- return _pm.CheckSlitDoorClose();
- }
- public bool IsTemperatureReady(float temp)
- {
- return Math.Abs(Temperature - temp) < SC.GetValue<double>("System.MaxTemperatureToleranceTransferWafer");
- }
- public bool IsPrepareTransfer(ModuleName robot, EnumTransferType type, int slot)
- {
- return _task == TaskType.PrepareTransfer && _taskRobot == robot && _taskSlot == slot &&
- _taskTransferType == type;
- }
- public override bool PrepareTransfer(ModuleName robot, EnumTransferType type, int slot)
- {
- _task = TaskType.PrepareTransfer;
- _taskRobot = robot;
- _taskSlot = slot;
- _taskTransferType = type;
- _entityTaskToken = _entity.InvokePrepareTransfer(robot, type, slot);
- LogTaskStart(_task, $"{robot} {type} slot {slot + 1}");
- return _entityTaskToken != (int)FSM_MSG.NONE;
- }
- public bool PrepareTransfer(ModuleName robot, EnumTransferType type, int slot, float temp, Hand blade)
- {
- _task = TaskType.PrepareTransfer;
- _taskRobot = robot;
- _taskSlot = slot;
- _taskBlade = blade;
- _taskTransferType = type;
- _entityTaskToken = _entity.InvokePrepareTransfer(robot, type, slot, temp);
- LogTaskStart(_task, $"{robot} {type} slot {slot + 1}");
- return _entityTaskToken != (int)FSM_MSG.NONE;
- }
- public bool PrepareTransfer(ModuleName robot, EnumTransferType type, int slot, float temp, Hand blade, WaferSize size)
- {
- _task = TaskType.PrepareTransfer;
- _taskRobot = robot;
- _taskSlot = slot;
- _taskBlade = blade;
- _taskTransferType = type;
- _entityTaskToken = _entity.InvokePrepareTransfer(robot, type, slot, temp, size);
- LogTaskStart(_task, $"{robot} {type} slot {slot + 1}, {size}");
- return _entityTaskToken != (int)FSM_MSG.NONE;
- }
- public override bool PostTransfer(ModuleName robot, EnumTransferType type, int slot)
- {
- StopWaitTransfer(robot);
- _task = TaskType.PostTransfer;
- _taskRobot = robot;
- _taskSlot = slot;
- _taskTransferType = type;
- _entityTaskToken = _entity.InvokePostTransfer(robot, type, slot);
- LogTaskStart(_task, $"{robot} {type} slot {slot + 1}");
- return _entityTaskToken != (int)FSM_MSG.NONE;
- }
- public override bool PostTransfer(ModuleName robot)
- {
- StopWaitTransfer(robot);
- _task = TaskType.PostTransfer;
- _taskRobot = robot;
- _taskSlot = _inTransferSlot;
- _taskTransferType = _inTransferType;
- _entityTaskToken = _entity.InvokePostTransfer(robot, _inTransferType, _inTransferSlot);
- LogTaskStart(_task, $"{robot} {_inTransferType} slot {_inTransferSlot + 1}");
- return _entityTaskToken != (int)FSM_MSG.NONE;
- }
- public override bool Process(string recipeName, bool isCleanRecipe, bool withWafer, WaferInfo wafer)
- {
- _task = TaskType.Process;
- LogTaskStart(_task, $"recipe: {recipeName}, clean: {isCleanRecipe}, with wafer: {withWafer}");
- if (SC.GetValue<bool>("System.IsATMMode"))
- {
- int time = SC.GetValue<int>("System.ATMCyclePMDelayTime");
- _timerProcess.Start(time * 1000);
- EV.PostInfoLog("Scheduler", $"System run in ATM mode, process skipped, delay {time} seconds");
- _pm.SetLiftPin(VirgoCommon.MovementPosition.Down, out _);
- _entityTaskToken = (int)PMEntity.MSG.MoveLiftPin;
- WaferManager.Instance.UpdateWaferProcessStatus(Module, 0, EnumWaferProcessStatus.InProcess);
- return true;
- }
- else
- {
- _entityTaskToken = _entity.InvokeProcess(recipeName, wafer.WaferOrigin, withWafer);
- return _entityTaskToken != (int)FSM_MSG.NONE;
- }
- }
- public override bool Preheating(float temperature)
- {
- _task = TaskType.Heating;
- _paramTemp = temperature;
- _entityTaskToken = _entity.InvokePreHeat(temperature);
- LogTaskStart(_task, $"preheat to {temperature}");
- return _entityTaskToken != (int)FSM_MSG.NONE;
- }
- public bool CheckTaskDone()
- {
- bool ret = false;
- switch (_task)
- {
- case TaskType.None:
- ret = true;
- break;
- case TaskType.PrepareTransfer:
- ret = _entity.CheckAcked(_entityTaskToken) && _entity.IsPrepareTransferReady(_taskRobot, _taskTransferType, _taskSlot, _taskBlade);
- break;
- case TaskType.PostTransfer:
- ret = _entity.CheckAcked(_entityTaskToken) && _pm.CheckSlitDoorClose();
- break;
- case TaskType.Heating:
- ret = _entity.CheckAcked(_entityTaskToken) && IsTemperatureReady(_paramTemp);
- break;
- case TaskType.Process:
- case TaskType.IdlePurgeProcess:
- case TaskType.IdleCleanProcess:
- case TaskType.PreJobProcess:
- case TaskType.CompleteJobProcess:
- if (SC.GetValue<bool>("System.IsATMMode"))
- {
- ret = _timerProcess.IsTimeout() && _entity.IsIdle && (_entityTaskToken != (int)PMEntity.MSG.MoveLiftPin || _pm.CheckLiftDown());
- if (ret)
- WaferManager.Instance.UpdateWaferProcessStatus(Module, 0, EnumWaferProcessStatus.Completed);
- }
- else
- {
- ret = _entity.CheckAcked(_entityTaskToken) && _entity.IsProcessed();
- }
- break;
- }
- if (ret && _task != TaskType.None)
- {
- LogTaskDone(_task, "");
- _task = TaskType.None;
- }
- return ret;
- }
- public bool Monitor()
- {
- return true;
- }
- public void SetPMAuto()
- {
- _entity.SetAuto();
- }
- public bool IdlePurgeProcess(string recipeName)
- {
- _task = TaskType.IdlePurgeProcess;
- _entityTaskToken = _entity.InvokeClean(recipeName, "", false);
- LogTaskStart(_task, $"recipe: {recipeName}, clean: {false}, with wafer: {false}");
- return _entityTaskToken != (int)FSM_MSG.NONE;
- }
- public bool IdleCleanProcess(string recipeName)
- {
- _task = TaskType.IdleCleanProcess;
- _entityTaskToken = _entity.InvokeClean(recipeName, "", false);
- LogTaskStart(_task, $"recipe: {recipeName}, clean: {true}, with wafer: {false}");
- return _entityTaskToken != (int)FSM_MSG.NONE;
- }
- public void PreJobClean()
- {
- var enableJobClean = SC.GetValue<bool>($"{Module}.JobClean.IsEnabled");
- var enablePreJobClean = SC.GetValue<bool>($"{Module}.JobClean.EnablePreJobClean");
- _waitPreJobClean = enableJobClean && enablePreJobClean;
- }
- public bool PreJobProcess(string recipeName)
- {
- _task = TaskType.PreJobProcess;
- _entityTaskToken = _entity.InvokeClean(recipeName, "", false);
- LogTaskStart(_task, $"recipe: {recipeName}, clean: {true}, with wafer: {false}");
- return _entityTaskToken != (int)FSM_MSG.NONE;
- }
- public void CompleteJobClean()
- {
- var enableJobClean = SC.GetValue<bool>($"{Module}.JobClean.IsEnabled");
- var enableCompleteJobClean = SC.GetValue<bool>($"{Module}.JobClean.EnableCompleteJobClean");
- _waitCompletejobClean = enableJobClean && enableCompleteJobClean;
- }
- public bool CompleteJobProcess(string recipeName)
- {
- _task = TaskType.CompleteJobProcess;
- _entityTaskToken = _entity.InvokeClean(recipeName, "", false);
- LogTaskStart(_task, $"recipe: {recipeName}, clean: {true}, with wafer: {false}");
- return _entityTaskToken != (int)FSM_MSG.NONE;
- }
- #region clean task
- internal void ResetIdlePurgeTime()
- {
- IdlePurgeTimer.Restart();
- }
- internal void ResetIdleCleanTime()
- {
- IdleCleanTimer.Restart();
- }
- public bool ResetClean(bool resetPurge, bool resetClean, bool jobClean)
- {
- if (resetPurge)
- {
- IdlePurgeTrig.RST = true;
- IdlePurgeTimer.Stop();
- IdlePurgeTime = 0;
- }
- if (resetClean)
- {
- IdleCleanTrig.RST = true;
- IdleCleanTimer.Stop();
- IdleCleanTime = 0;
- }
- if (jobClean)
- {
- _waitPreJobClean = false;
- _waitCompletejobClean = false;
- PreJobCleanTrig.RST = true;
- PreJobCleanTimer.Stop();
- }
- return true;
- }
- public void MonitorCleanTasks()
- {
- if(SC.GetValue<bool>("System.IsATMMode"))
- return;
- var hasWafer = WaferManager.Instance.CheckHasWafer(Module, 0);
- var enablePurge = false;//SC.GetValue<bool>($"{Module}.IdlePurge.IsEnabled");
- var enableClean = SC.GetValue<bool>($"{Module}.IdleClean.IsEnabled");
- #region Idle Purge
- IdlePurgeTrig.CLK = (IsIdle || _task != TaskType.IdlePurgeProcess) && enablePurge && !hasWafer;
- if (IdlePurgeTrig.R)
- {
- LOG.Write($"{Module} idle purge start calc elapse time");
- IdlePurgeTimer.Restart();
- }
- if (IdlePurgeTrig.T)
- {
- LOG.Write($"{Module} idle purge stopped calc elapse time");
- ResetClean(true, false, false);
- }
- if (IdlePurgeTimer.IsRunning)
- {
- IdlePurgeTime = (int)IdlePurgeTimer.ElapsedMilliseconds / 1000;
- int idlePurgeTimeSetPoint = SC.GetValue<int>($"{Module}.IdlePurge.IdlePurgeTime");
- var nextRunTime = idlePurgeTimeSetPoint - IdlePurgeTime;
- if (nextRunTime < 0)
- nextRunTime = 0;
- if (enablePurge)
- {
- if (nextRunTime <= 0 && IsAvailable)
- {
- var recipe = SC.GetStringValue($"{Module}.IdlePurge.IdlePurgeRecipe");
- if (string.IsNullOrEmpty(recipe))
- {
- _trigIdlePurgeFailed.CLK = true;
- LOG.Write($"{Module} Idle purge can not run, recipe is empty");
- ResetClean(true, false, false);
- }
- else if (hasWafer)
- {
- _trigIdlePurgeFailed.CLK = true;
- LOG.Write($"{Module} Idle purge can not run, has wafer");
- ResetClean(true, false, false);
- }
- else
- {
- _trigIdlePurgeFailed.CLK = false;
- LOG.Write($"{Module} Start run idle purge recipe {recipe}");
- IdlePurgeProcess("ALD\\Process\\" + recipe);
- }
- if (_trigIdlePurgeFailed.Q)
- {
- EV.PostWarningLog(Module.ToString(), "Can not run idle purge recipe");
- }
- }
- }
- else
- {
- nextRunTime = 0;
- }
- IdlePurgeNextRunTime = nextRunTime;
- }
- else
- {
- IdlePurgeNextRunTime = 0;
- }
- #endregion
- #region Idle Clean
- IdleCleanTrig.CLK = (IsIdle || _task != TaskType.IdleCleanProcess) && enableClean && !hasWafer;
- if (IdleCleanTrig.R)
- {
- LOG.Write($"{Module} idle clean start calc elapse time");
- IdleCleanTimer.Restart();
- }
- if (IdleCleanTrig.T)
- {
- LOG.Write($"{Module} idle clean stopped calc elapse time");
- ResetClean(false, true, false);
- }
- if (IdleCleanTimer.IsRunning)
- {
- IdleCleanTime = (int)IdleCleanTimer.ElapsedMilliseconds / 1000;
- int idleCleanTimeSetPoint = SC.GetValue<int>($"{Module}.IdleClean.IdleCleanTime");
- var nextRunTime = idleCleanTimeSetPoint - IdleCleanTime;
- if (nextRunTime < 0)
- nextRunTime = 0;
- if (enableClean)
- {
- if (nextRunTime <= 0 && IsAvailable)
- {
- var recipe = SC.GetStringValue($"{Module}.IdleClean.IdleCleanRecipe");
- if (string.IsNullOrEmpty(recipe))
- {
- _trigIdleCleanFailed.CLK = true;
- LOG.Write($"{Module} Idle clean can not run, recipe is empty");
- ResetClean(false, true, false);
- }
- else if (hasWafer)
- {
- _trigIdleCleanFailed.CLK = true;
- LOG.Write($"{Module} Idle clean can not run, has wafer");
- ResetClean(false, true, false);
- }
- else
- {
- _trigIdleCleanFailed.CLK = false;
- LOG.Write($"{Module} Start run idle Clean recipe {recipe}");
- IdleCleanProcess($"{Module}\\" + recipe);
- }
- if (_trigIdleCleanFailed.Q)
- {
- EV.PostWarningLog(Module.ToString(), "Can not run idle clean recipe");
- }
- }
- }
- else
- {
- nextRunTime = 0;
- }
- IdleCleanNextRunTime = nextRunTime;
- }
- else
- {
- IdleCleanNextRunTime = 0;
- }
- #endregion
- #region PreJob Clean
- var enableJobClean = SC.GetValue<bool>($"{Module}.JobClean.IsEnabled");
- var enablePreJobClean = SC.GetValue<bool>($"{Module}.JobClean.EnablePreJobClean");
- var enableCompleteJobClean = SC.GetValue<bool>($"{Module}.JobClean.EnableCompleteJobClean");
- if (enableJobClean && enableCompleteJobClean && _waitCompletejobClean && IsIdle)
- {
- var recipe = SC.GetStringValue($"{Module}.JobClean.CompleteJobCleanRecipe");
- if (string.IsNullOrEmpty(recipe))
- {
- EV.PostWarningLog(Module.ToString(), "complete job clean can not run, recipe is empty");
- }
- else if (hasWafer)
- {
- EV.PostWarningLog(Module.ToString(), "complete job clean can not run, has wafer");
- }
- else
- {
- EV.PostInfoLog(Module.ToString(), $"Start run complete job clean recipe {recipe}");
- CompleteJobProcess($"{Module}\\" + recipe);
- }
- _waitCompletejobClean = false;
- }
- PreJobCleanTrig.CLK = enableJobClean && enablePreJobClean && IsIdle;
- if (PreJobCleanTrig.R)
- {
- PreJobCleanTimer.Restart();
- }
- if(PreJobCleanTrig.T)
- {
- ResetClean(false, false, true);
- }
- if (PreJobCleanTimer.IsRunning && _waitPreJobClean)
- {
- PreJobCleanTime = (int)PreJobCleanTimer.ElapsedMilliseconds / 1000;
- int PreJobCleanIdleTimeSP = SC.GetValue<int>($"{Module}.JobClean.IdleCleanTime");
- if(PreJobCleanTime >= PreJobCleanIdleTimeSP)
- {
- var recipe = SC.GetStringValue($"{Module}.JobClean.PreJobCleanRecipe");
- if (string.IsNullOrEmpty(recipe))
- {
- EV.PostWarningLog(Module.ToString(), "pre job clean can not run, recipe is empty");
- }
- else if (hasWafer)
- {
- EV.PostWarningLog(Module.ToString(), "pre job clean can not run, has wafer");
- }
- else
- {
- EV.PostInfoLog(Module.ToString(), $"Start run pre job clean recipe {recipe}");
- PreJobProcess($"{Module}\\" + recipe);
- }
- }
- }
- #endregion
- }
- #endregion
- }
- }
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