SchedulerPM.cs 22 KB

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  1. using System;
  2. using System.Collections.Generic;
  3. using System.Diagnostics;
  4. using System.Linq;
  5. using System.Text;
  6. using System.Threading.Tasks;
  7. using Aitex.Core.Common;
  8. using Aitex.Core.RT.DataCenter;
  9. using Aitex.Core.RT.Device;
  10. using Aitex.Core.RT.Event;
  11. using Aitex.Core.RT.Fsm;
  12. using Aitex.Core.RT.Log;
  13. using Aitex.Core.RT.SCCore;
  14. using Aitex.Core.Util;
  15. using Aitex.Sorter.Common;
  16. using VirgoRT.Module;
  17. using VirgoRT.Modules;
  18. using MECF.Framework.Common.Equipment;
  19. using MECF.Framework.Common.Schedulers;
  20. using MECF.Framework.Common.SubstrateTrackings;
  21. using VirgoRT.Devices;
  22. namespace VirgoRT.Scheduler
  23. {
  24. public class SchedulerPM : SchedulerModule
  25. {
  26. public override bool IsAvailable
  27. {
  28. get
  29. {
  30. if (!SC.GetValue<bool>("System.IsATMMode"))
  31. return _entity.IsIdle && _entity.IsOnline && CheckTaskDone() && !_waitCompletejobClean;
  32. return _entity.IsIdle && _entity.IsOnline && CheckTaskDone();
  33. }
  34. }
  35. public override bool IsOnline
  36. {
  37. get { return _entity != null && _entity.IsOnline; }
  38. }
  39. public override bool IsError
  40. {
  41. get { return _entity.IsError; }
  42. }
  43. public bool IsIdle
  44. {
  45. get { return _entity.IsIdle && _entity.IsOnline && CheckTaskDone() ; }
  46. }
  47. public TaskType Task => _task;
  48. private PMEntity _entity = null;
  49. private ModuleName _taskRobot;
  50. private EnumTransferType _taskTransferType;
  51. private Hand _taskBlade;
  52. private int _taskSlot;
  53. private int _entityTaskToken = (int)FSM_MSG.NONE;
  54. private DeviceTimer _timerProcess = new DeviceTimer();
  55. private JetPM _pm;
  56. private float _paramTemp;
  57. public float Temperature
  58. {
  59. get
  60. {
  61. if (SC.GetValue<bool>($"{Module}.Chiller.EnableChiller"))
  62. {
  63. return _pm.CoolantOutletTempFB;
  64. }
  65. return _pm.SubstrateTempFB;
  66. }
  67. }
  68. public RD_TRIG IdlePurgeTrig { get; set; }
  69. public Stopwatch IdlePurgeTimer { get; set; }
  70. public int IdlePurgeTime { get; set; }
  71. public int IdlePurgeNextRunTime { get; set; }
  72. public RD_TRIG IdleCleanTrig { get; set; }
  73. public Stopwatch IdleCleanTimer { get; set; }
  74. public int IdleCleanTime { get; set; }
  75. public int IdleCleanNextRunTime { get; set; }
  76. private bool _waitPreJobClean;
  77. private bool _waitCompletejobClean;
  78. private R_TRIG _trigIdleCleanFailed = new R_TRIG();
  79. private R_TRIG _trigIdlePurgeFailed = new R_TRIG();
  80. public RD_TRIG PreJobCleanTrig { get; set; }
  81. public Stopwatch PreJobCleanTimer { get; set; }
  82. public int PreJobCleanTime { get; set; }
  83. public SchedulerPM(ModuleName chamber) : base(chamber.ToString())
  84. {
  85. switch (chamber)
  86. {
  87. case ModuleName.PMA:
  88. _entity = Singleton<RouteManager>.Instance.PMA;
  89. break;
  90. case ModuleName.PMB:
  91. _entity = Singleton<RouteManager>.Instance.PMB;
  92. break;
  93. }
  94. _pm = DEVICE.GetDevice<JetPM>(Module.ToString());
  95. IdlePurgeTrig = new RD_TRIG();
  96. IdlePurgeTimer = new Stopwatch();
  97. IdleCleanTrig = new RD_TRIG();
  98. IdleCleanTimer = new Stopwatch();
  99. PreJobCleanTrig = new RD_TRIG();
  100. PreJobCleanTimer = new Stopwatch();
  101. }
  102. public void InitClean()
  103. {
  104. DATA.Subscribe($"{Module}.IdlePurgeNextRunTime", () => IdlePurgeNextRunTime);
  105. DATA.Subscribe($"{Module}.IdleCleanNextRunTime", () => IdleCleanNextRunTime);
  106. }
  107. public override bool IsReadyForPick(ModuleName robot, int slot, Hand blade)
  108. {
  109. return _entity.IsPrepareTransferReady(robot, EnumTransferType.Pick, slot, blade)
  110. && WaferManager.Instance.CheckHasWafer(ModuleHelper.Converter(_module), slot);
  111. }
  112. public override bool IsReadyForPlace(ModuleName robot, int slot, Hand blade)
  113. {
  114. return _entity.IsPrepareTransferReady(robot, EnumTransferType.Place, slot, blade)
  115. && WaferManager.Instance.CheckNoWafer(ModuleHelper.Converter(_module), slot);
  116. }
  117. public bool CheckSlitDoorDown()
  118. {
  119. return _pm.CheckSlitDoorClose();
  120. }
  121. public bool IsTemperatureReady(float temp)
  122. {
  123. return Math.Abs(Temperature - temp) < SC.GetValue<double>("System.MaxTemperatureToleranceTransferWafer");
  124. }
  125. public bool IsPrepareTransfer(ModuleName robot, EnumTransferType type, int slot)
  126. {
  127. return _task == TaskType.PrepareTransfer && _taskRobot == robot && _taskSlot == slot &&
  128. _taskTransferType == type;
  129. }
  130. public override bool PrepareTransfer(ModuleName robot, EnumTransferType type, int slot)
  131. {
  132. _task = TaskType.PrepareTransfer;
  133. _taskRobot = robot;
  134. _taskSlot = slot;
  135. _taskTransferType = type;
  136. _entityTaskToken = _entity.InvokePrepareTransfer(robot, type, slot);
  137. LogTaskStart(_task, $"{robot} {type} slot {slot + 1}");
  138. return _entityTaskToken != (int)FSM_MSG.NONE;
  139. }
  140. public bool PrepareTransfer(ModuleName robot, EnumTransferType type, int slot, float temp, Hand blade)
  141. {
  142. _task = TaskType.PrepareTransfer;
  143. _taskRobot = robot;
  144. _taskSlot = slot;
  145. _taskBlade = blade;
  146. _taskTransferType = type;
  147. _entityTaskToken = _entity.InvokePrepareTransfer(robot, type, slot, temp);
  148. LogTaskStart(_task, $"{robot} {type} slot {slot + 1}");
  149. return _entityTaskToken != (int)FSM_MSG.NONE;
  150. }
  151. public bool PrepareTransfer(ModuleName robot, EnumTransferType type, int slot, float temp, Hand blade, WaferSize size)
  152. {
  153. _task = TaskType.PrepareTransfer;
  154. _taskRobot = robot;
  155. _taskSlot = slot;
  156. _taskBlade = blade;
  157. _taskTransferType = type;
  158. _entityTaskToken = _entity.InvokePrepareTransfer(robot, type, slot, temp, size);
  159. LogTaskStart(_task, $"{robot} {type} slot {slot + 1}, {size}");
  160. return _entityTaskToken != (int)FSM_MSG.NONE;
  161. }
  162. public override bool PostTransfer(ModuleName robot, EnumTransferType type, int slot)
  163. {
  164. StopWaitTransfer(robot);
  165. _task = TaskType.PostTransfer;
  166. _taskRobot = robot;
  167. _taskSlot = slot;
  168. _taskTransferType = type;
  169. _entityTaskToken = _entity.InvokePostTransfer(robot, type, slot);
  170. LogTaskStart(_task, $"{robot} {type} slot {slot + 1}");
  171. return _entityTaskToken != (int)FSM_MSG.NONE;
  172. }
  173. public override bool PostTransfer(ModuleName robot)
  174. {
  175. StopWaitTransfer(robot);
  176. _task = TaskType.PostTransfer;
  177. _taskRobot = robot;
  178. _taskSlot = _inTransferSlot;
  179. _taskTransferType = _inTransferType;
  180. _entityTaskToken = _entity.InvokePostTransfer(robot, _inTransferType, _inTransferSlot);
  181. LogTaskStart(_task, $"{robot} {_inTransferType} slot {_inTransferSlot + 1}");
  182. return _entityTaskToken != (int)FSM_MSG.NONE;
  183. }
  184. public override bool Process(string recipeName, bool isCleanRecipe, bool withWafer, WaferInfo wafer)
  185. {
  186. _task = TaskType.Process;
  187. LogTaskStart(_task, $"recipe: {recipeName}, clean: {isCleanRecipe}, with wafer: {withWafer}");
  188. if (SC.GetValue<bool>("System.IsATMMode"))
  189. {
  190. int time = SC.GetValue<int>("System.ATMCyclePMDelayTime");
  191. _timerProcess.Start(time * 1000);
  192. EV.PostInfoLog("Scheduler", $"System run in ATM mode, process skipped, delay {time} seconds");
  193. _pm.SetLiftPin(VirgoCommon.MovementPosition.Down, out _);
  194. _entityTaskToken = (int)PMEntity.MSG.MoveLiftPin;
  195. WaferManager.Instance.UpdateWaferProcessStatus(Module, 0, EnumWaferProcessStatus.InProcess);
  196. return true;
  197. }
  198. else
  199. {
  200. _entityTaskToken = _entity.InvokeProcess(recipeName, wafer.WaferOrigin, withWafer);
  201. return _entityTaskToken != (int)FSM_MSG.NONE;
  202. }
  203. }
  204. public override bool Preheating(float temperature)
  205. {
  206. _task = TaskType.Heating;
  207. _paramTemp = temperature;
  208. _entityTaskToken = _entity.InvokePreHeat(temperature);
  209. LogTaskStart(_task, $"preheat to {temperature}");
  210. return _entityTaskToken != (int)FSM_MSG.NONE;
  211. }
  212. public bool CheckTaskDone()
  213. {
  214. bool ret = false;
  215. switch (_task)
  216. {
  217. case TaskType.None:
  218. ret = true;
  219. break;
  220. case TaskType.PrepareTransfer:
  221. ret = _entity.CheckAcked(_entityTaskToken) && _entity.IsPrepareTransferReady(_taskRobot, _taskTransferType, _taskSlot, _taskBlade);
  222. break;
  223. case TaskType.PostTransfer:
  224. ret = _entity.CheckAcked(_entityTaskToken) && _pm.CheckSlitDoorClose();
  225. break;
  226. case TaskType.Heating:
  227. ret = _entity.CheckAcked(_entityTaskToken) && IsTemperatureReady(_paramTemp);
  228. break;
  229. case TaskType.Process:
  230. case TaskType.IdlePurgeProcess:
  231. case TaskType.IdleCleanProcess:
  232. case TaskType.PreJobProcess:
  233. case TaskType.CompleteJobProcess:
  234. if (SC.GetValue<bool>("System.IsATMMode"))
  235. {
  236. ret = _timerProcess.IsTimeout() && _entity.IsIdle && (_entityTaskToken != (int)PMEntity.MSG.MoveLiftPin || _pm.CheckLiftDown());
  237. if (ret)
  238. WaferManager.Instance.UpdateWaferProcessStatus(Module, 0, EnumWaferProcessStatus.Completed);
  239. }
  240. else
  241. {
  242. ret = _entity.CheckAcked(_entityTaskToken) && _entity.IsProcessed();
  243. }
  244. break;
  245. }
  246. if (ret && _task != TaskType.None)
  247. {
  248. LogTaskDone(_task, "");
  249. _task = TaskType.None;
  250. }
  251. return ret;
  252. }
  253. public bool Monitor()
  254. {
  255. return true;
  256. }
  257. public void SetPMAuto()
  258. {
  259. _entity.SetAuto();
  260. }
  261. public bool IdlePurgeProcess(string recipeName)
  262. {
  263. _task = TaskType.IdlePurgeProcess;
  264. _entityTaskToken = _entity.InvokeClean(recipeName, "", false);
  265. LogTaskStart(_task, $"recipe: {recipeName}, clean: {false}, with wafer: {false}");
  266. return _entityTaskToken != (int)FSM_MSG.NONE;
  267. }
  268. public bool IdleCleanProcess(string recipeName)
  269. {
  270. _task = TaskType.IdleCleanProcess;
  271. _entityTaskToken = _entity.InvokeClean(recipeName, "", false);
  272. LogTaskStart(_task, $"recipe: {recipeName}, clean: {true}, with wafer: {false}");
  273. return _entityTaskToken != (int)FSM_MSG.NONE;
  274. }
  275. public void PreJobClean()
  276. {
  277. var enableJobClean = SC.GetValue<bool>($"{Module}.JobClean.IsEnabled");
  278. var enablePreJobClean = SC.GetValue<bool>($"{Module}.JobClean.EnablePreJobClean");
  279. _waitPreJobClean = enableJobClean && enablePreJobClean;
  280. }
  281. public bool PreJobProcess(string recipeName)
  282. {
  283. _task = TaskType.PreJobProcess;
  284. _entityTaskToken = _entity.InvokeClean(recipeName, "", false);
  285. LogTaskStart(_task, $"recipe: {recipeName}, clean: {true}, with wafer: {false}");
  286. return _entityTaskToken != (int)FSM_MSG.NONE;
  287. }
  288. public void CompleteJobClean()
  289. {
  290. var enableJobClean = SC.GetValue<bool>($"{Module}.JobClean.IsEnabled");
  291. var enableCompleteJobClean = SC.GetValue<bool>($"{Module}.JobClean.EnableCompleteJobClean");
  292. _waitCompletejobClean = enableJobClean && enableCompleteJobClean;
  293. }
  294. public bool CompleteJobProcess(string recipeName)
  295. {
  296. _task = TaskType.CompleteJobProcess;
  297. _entityTaskToken = _entity.InvokeClean(recipeName, "", false);
  298. LogTaskStart(_task, $"recipe: {recipeName}, clean: {true}, with wafer: {false}");
  299. return _entityTaskToken != (int)FSM_MSG.NONE;
  300. }
  301. #region clean task
  302. internal void ResetIdlePurgeTime()
  303. {
  304. IdlePurgeTimer.Restart();
  305. }
  306. internal void ResetIdleCleanTime()
  307. {
  308. IdleCleanTimer.Restart();
  309. }
  310. public bool ResetClean(bool resetPurge, bool resetClean, bool jobClean)
  311. {
  312. if (resetPurge)
  313. {
  314. IdlePurgeTrig.RST = true;
  315. IdlePurgeTimer.Stop();
  316. IdlePurgeTime = 0;
  317. }
  318. if (resetClean)
  319. {
  320. IdleCleanTrig.RST = true;
  321. IdleCleanTimer.Stop();
  322. IdleCleanTime = 0;
  323. }
  324. if (jobClean)
  325. {
  326. _waitPreJobClean = false;
  327. _waitCompletejobClean = false;
  328. PreJobCleanTrig.RST = true;
  329. PreJobCleanTimer.Stop();
  330. }
  331. return true;
  332. }
  333. public void MonitorCleanTasks()
  334. {
  335. if(SC.GetValue<bool>("System.IsATMMode"))
  336. return;
  337. var hasWafer = WaferManager.Instance.CheckHasWafer(Module, 0);
  338. var enablePurge = false;//SC.GetValue<bool>($"{Module}.IdlePurge.IsEnabled");
  339. var enableClean = SC.GetValue<bool>($"{Module}.IdleClean.IsEnabled");
  340. #region Idle Purge
  341. IdlePurgeTrig.CLK = (IsIdle || _task != TaskType.IdlePurgeProcess) && enablePurge && !hasWafer;
  342. if (IdlePurgeTrig.R)
  343. {
  344. LOG.Write($"{Module} idle purge start calc elapse time");
  345. IdlePurgeTimer.Restart();
  346. }
  347. if (IdlePurgeTrig.T)
  348. {
  349. LOG.Write($"{Module} idle purge stopped calc elapse time");
  350. ResetClean(true, false, false);
  351. }
  352. if (IdlePurgeTimer.IsRunning)
  353. {
  354. IdlePurgeTime = (int)IdlePurgeTimer.ElapsedMilliseconds / 1000;
  355. int idlePurgeTimeSetPoint = SC.GetValue<int>($"{Module}.IdlePurge.IdlePurgeTime");
  356. var nextRunTime = idlePurgeTimeSetPoint - IdlePurgeTime;
  357. if (nextRunTime < 0)
  358. nextRunTime = 0;
  359. if (enablePurge)
  360. {
  361. if (nextRunTime <= 0 && IsAvailable)
  362. {
  363. var recipe = SC.GetStringValue($"{Module}.IdlePurge.IdlePurgeRecipe");
  364. if (string.IsNullOrEmpty(recipe))
  365. {
  366. _trigIdlePurgeFailed.CLK = true;
  367. LOG.Write($"{Module} Idle purge can not run, recipe is empty");
  368. ResetClean(true, false, false);
  369. }
  370. else if (hasWafer)
  371. {
  372. _trigIdlePurgeFailed.CLK = true;
  373. LOG.Write($"{Module} Idle purge can not run, has wafer");
  374. ResetClean(true, false, false);
  375. }
  376. else
  377. {
  378. _trigIdlePurgeFailed.CLK = false;
  379. LOG.Write($"{Module} Start run idle purge recipe {recipe}");
  380. IdlePurgeProcess("ALD\\Process\\" + recipe);
  381. }
  382. if (_trigIdlePurgeFailed.Q)
  383. {
  384. EV.PostWarningLog(Module.ToString(), "Can not run idle purge recipe");
  385. }
  386. }
  387. }
  388. else
  389. {
  390. nextRunTime = 0;
  391. }
  392. IdlePurgeNextRunTime = nextRunTime;
  393. }
  394. else
  395. {
  396. IdlePurgeNextRunTime = 0;
  397. }
  398. #endregion
  399. #region Idle Clean
  400. IdleCleanTrig.CLK = (IsIdle || _task != TaskType.IdleCleanProcess) && enableClean && !hasWafer;
  401. if (IdleCleanTrig.R)
  402. {
  403. LOG.Write($"{Module} idle clean start calc elapse time");
  404. IdleCleanTimer.Restart();
  405. }
  406. if (IdleCleanTrig.T)
  407. {
  408. LOG.Write($"{Module} idle clean stopped calc elapse time");
  409. ResetClean(false, true, false);
  410. }
  411. if (IdleCleanTimer.IsRunning)
  412. {
  413. IdleCleanTime = (int)IdleCleanTimer.ElapsedMilliseconds / 1000;
  414. int idleCleanTimeSetPoint = SC.GetValue<int>($"{Module}.IdleClean.IdleCleanTime");
  415. var nextRunTime = idleCleanTimeSetPoint - IdleCleanTime;
  416. if (nextRunTime < 0)
  417. nextRunTime = 0;
  418. if (enableClean)
  419. {
  420. if (nextRunTime <= 0 && IsAvailable)
  421. {
  422. var recipe = SC.GetStringValue($"{Module}.IdleClean.IdleCleanRecipe");
  423. if (string.IsNullOrEmpty(recipe))
  424. {
  425. _trigIdleCleanFailed.CLK = true;
  426. LOG.Write($"{Module} Idle clean can not run, recipe is empty");
  427. ResetClean(false, true, false);
  428. }
  429. else if (hasWafer)
  430. {
  431. _trigIdleCleanFailed.CLK = true;
  432. LOG.Write($"{Module} Idle clean can not run, has wafer");
  433. ResetClean(false, true, false);
  434. }
  435. else
  436. {
  437. _trigIdleCleanFailed.CLK = false;
  438. LOG.Write($"{Module} Start run idle Clean recipe {recipe}");
  439. IdleCleanProcess($"{Module}\\" + recipe);
  440. }
  441. if (_trigIdleCleanFailed.Q)
  442. {
  443. EV.PostWarningLog(Module.ToString(), "Can not run idle clean recipe");
  444. }
  445. }
  446. }
  447. else
  448. {
  449. nextRunTime = 0;
  450. }
  451. IdleCleanNextRunTime = nextRunTime;
  452. }
  453. else
  454. {
  455. IdleCleanNextRunTime = 0;
  456. }
  457. #endregion
  458. #region PreJob Clean
  459. var enableJobClean = SC.GetValue<bool>($"{Module}.JobClean.IsEnabled");
  460. var enablePreJobClean = SC.GetValue<bool>($"{Module}.JobClean.EnablePreJobClean");
  461. var enableCompleteJobClean = SC.GetValue<bool>($"{Module}.JobClean.EnableCompleteJobClean");
  462. if (enableJobClean && enableCompleteJobClean && _waitCompletejobClean && IsIdle)
  463. {
  464. var recipe = SC.GetStringValue($"{Module}.JobClean.CompleteJobCleanRecipe");
  465. if (string.IsNullOrEmpty(recipe))
  466. {
  467. EV.PostWarningLog(Module.ToString(), "complete job clean can not run, recipe is empty");
  468. }
  469. else if (hasWafer)
  470. {
  471. EV.PostWarningLog(Module.ToString(), "complete job clean can not run, has wafer");
  472. }
  473. else
  474. {
  475. EV.PostInfoLog(Module.ToString(), $"Start run complete job clean recipe {recipe}");
  476. CompleteJobProcess($"{Module}\\" + recipe);
  477. }
  478. _waitCompletejobClean = false;
  479. }
  480. PreJobCleanTrig.CLK = enableJobClean && enablePreJobClean && IsIdle;
  481. if (PreJobCleanTrig.R)
  482. {
  483. PreJobCleanTimer.Restart();
  484. }
  485. if(PreJobCleanTrig.T)
  486. {
  487. ResetClean(false, false, true);
  488. }
  489. if (PreJobCleanTimer.IsRunning && _waitPreJobClean)
  490. {
  491. PreJobCleanTime = (int)PreJobCleanTimer.ElapsedMilliseconds / 1000;
  492. int PreJobCleanIdleTimeSP = SC.GetValue<int>($"{Module}.JobClean.IdleCleanTime");
  493. if(PreJobCleanTime >= PreJobCleanIdleTimeSP)
  494. {
  495. var recipe = SC.GetStringValue($"{Module}.JobClean.PreJobCleanRecipe");
  496. if (string.IsNullOrEmpty(recipe))
  497. {
  498. EV.PostWarningLog(Module.ToString(), "pre job clean can not run, recipe is empty");
  499. }
  500. else if (hasWafer)
  501. {
  502. EV.PostWarningLog(Module.ToString(), "pre job clean can not run, has wafer");
  503. }
  504. else
  505. {
  506. EV.PostInfoLog(Module.ToString(), $"Start run pre job clean recipe {recipe}");
  507. PreJobProcess($"{Module}\\" + recipe);
  508. }
  509. }
  510. }
  511. #endregion
  512. }
  513. #endregion
  514. }
  515. }