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Virgo_ST
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VirgoRT
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Config
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System.sccfg

System.sccfg 114 KB
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  1. <?xml version="1.0" encoding="utf-8"?>
    2. 

  2. <root system="Virgo">
    3. 

  3. 	<configs name="System" nameView="System">
    4. 

  4. 		<config default="true" name="IsSimulatorMode" nameView="Simulator Mode" description="仿真模式" max="" min="" paramter="" tag="" unit="" type="Bool" visible="false"/>
    5. 

  5. 		<config default="false" name="IsATMMode" nameView="ATM Mode" description="大气压传送测试模式" max="" min="" paramter="" tag="" unit="" type="Bool" />
    6. 

  6. 		<config default="false" name="IsCycleMode" nameView="Cycle Mode" description="循环跑片模式" max="" min="" paramter="" tag="" unit="" type="Bool" />
    7. 

  7. 		<config default="3" name="CycleCount" nameView="Cycle Count" description="循环次数" max="999999" min="1" paramter="" tag="" unit="" type="Integer" />
    8. 

  8. 		<config default="true" name="PMAIsInstalled" nameView="PMA Is Installed" description="PMA已安装" max="" min="" paramter="" tag="" unit="" type="Bool" visible="false"/>
    9. 

  9. 		<config default="false" name="PMBIsInstalled" nameView="PMB Is Installed" description="PMB已安装" max="" min="" paramter="" tag="" unit="" type="Bool" visible="false"/>
    10. 

  10. 		<config default="5" name="ATMCyclePMDelayTime" nameView="ATM Cycle PM Delay Time" description="ATM循环测试取片延时时间" max="9999" min="1" paramter="" tag="" unit="s" type="Integer" visible="false"/>
    11. 

  11. 		<config default="25" name="MaxTemperatureToleranceTransferWafer" nameView="Max Temperature Tolerance Transfer Wafer" description="传片最大温度差" max="100" min="1" paramter="" tag="" unit="℃" type="Double" />
    12. 

  12. 		<config default="1" name="MaxTemperatureToleranceToTarget" nameView="Max Temperature Tolerance To Target" description="工艺最大温度差" max="100" min="1" paramter="" tag="" unit="℃" type="Double" />
    13. 

  13. 		<config default="true" name="SmallGuidePinEnable" nameView="SmallGuidePinEnable" description="是否支持控制SmallGuidePin（否：使用限位环）" max="" min="" paramter="" tag="" unit="" type="Bool" visible="false" />
    14. 

  14.     <config default="true" name="MediumGuidePinEnable" nameView="MediumGuidePinEnable" description="是否支持控制MediumGuidePin（否：使用限位环）" max="" min="" paramter="" tag="" unit="" type="Bool" visible="false" />
    15. 

  15. 		<config default="false" name="EnableTransferFromWS3Slot1" nameView="EnableTransferFromWS3Slot1" description="是否支持从3寸的料盒中取放第一片wafer" max="" min="" paramter="" tag="" unit="" type="Bool" />
    16. 

  16. 		<config default="3" name="SmallWafer" nameView="Small Wafer" description="小晶圆尺寸" max="200" min="0" paramter="" tag="" unit="" visible="false" type="Integer" />
    17. 

  17. 		<config default="4" name="MidWafer" nameView="Mid Wafer" description="中晶圆尺寸" max="200" min="0" paramter="" tag="" unit="" visible="false" type="Integer" />
    18. 

  18. 		<config default="6" name="BigWafer" nameView="Big Wafer" description="大晶圆尺寸" max="200" min="0" paramter="" tag="" unit="" visible="false" type="Integer" />
    19. 

  19. 		<!--<config default="30" name="DefaultCoolingTime" nameView="Default Cooling Time" description="晶圆默认冷却时间" max="300" min="1" paramter="" tag="" unit="s" type="Integer" />-->
    20. 

  20. 		<config default="true" name="DisplayPopDialogWhenJobComplete" nameView="Pop Dialog When Job Complete" description="是否弹出Job结束对话框" max="" min="" paramter="" tag="" unit="" type="Bool" />
    21. 

  21. 

  22. 		<config default="false" name="RecipeSplit" nameView="RecipeSplit" description="是否拆分process与Clean recipe" max="" min="" paramter="" tag="" unit="" type="Bool" />
    23. 

  23. 

  24. 		<config default="2" name="CoolingTimeLimit" nameView="CoolingTimeLimit" description="" max="200" min="0" paramter="" tag="" unit="s" visible="false" type="Integer" />
    25. 

  25. 

  26.     <config default="true" name="EnableDataClean" nameView="启用数据库自动删除n天前记录" description="启用数据库自动删除n天前记录" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    27. 

  27.     <config default="90" name="DataKeepDays" nameView="数据库数据保留天数" description="数据库数据保留天数" max="365" min="10" paramter="" tag="" unit="" type="Integer" />
    28. 

  28.     <config default="90" name="LogsSaveDays" nameView="Log文件保留天数" description="Log文件保留天数" max="365" min="10" paramter="" tag="" unit="" type="Integer" />
    29. 

  29.     <config default="false" name="IsEnableCompressLogFileFunc" nameView="启用压缩log文件功能" description="启用压缩log文件功能" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    30. 

  30.     <config default="200" name="SingleLogFileMaxSize" nameView="单个log文件最大字节数(MB),大于将被压缩" description="单个log文件最大字节数(MB),大于将被压缩" max="100" min="5" paramter="" tag="" unit="" type="Integer" />
    31. 

  31.     <config default="" name="LPSlot1UnSupportedWaferSize" nameView="LP slot 1 is not supported wafer size" description="LP slot 1 is not supported wafer size" max="" min="" paramter="" tag="" unit="" type="String" />
    32. 

  32. 

  33. 

  34.     <!--FA-->
    35. 

  35. 		<configs name="FA" nameView="FA" visible="false">
    36. 

  36. 			<config default="Passive" name="ConnectionMode" nameView="Connection Mode" description="Passive  Active" max="0" min="0" paramter="" tag="" unit="" type="String" />
    37. 

  37. 			<config default="127.0.0.1" name="LocalIpAddress" nameView="Local Ip Address" description=" " max="0" min="0" paramter="" tag="" unit="" type="String" />
    38. 

  38. 			<config default="5000" name="LocalPortNumber" nameView="Local Port Number" description="LocalPortNumber" max="99999" min="0" paramter="" tag="" unit="" type="Integer" />
    39. 

  39. 			<config default="127.0.0.1" name="RemoteIpAddress" nameView="Remote Ip Address" description=" " max="0" min="0" paramter="" tag="" unit="" type="String" />
    40. 

  40. 			<config default="5001" name="RemotePortNumber" nameView="Remote Port Number" description=" " max="99999" min="0" paramter="" tag="" unit="" type="Integer" />
    41. 

  41. 			<config default="45" name="T3Timeout" nameView="T3 Timeout" description=" " max="999" min="0" paramter="" tag="" unit="s" type="Integer" />
    42. 

  42. 			<config default="10" name="T5Timeout" nameView="T5 Timeout" description=" " max="999" min="0" paramter="" tag="" unit="s" type="Integer" />
    43. 

  43. 			<config default="5" name="T6Timeout" nameView="T6 Timeout" description=" " max="999" min="0" paramter="" tag="" unit="s" type="Integer" />
    44. 

  44. 			<config default="10" name="T7Timeout" nameView="T7 Timeout" description=" " max="999" min="0" paramter="" tag="" unit="s" type="Integer" />
    45. 

  45. 			<config default="5" name="T8Timeout" nameView="T8 Timeout" description=" " max="999" min="0" paramter="" tag="" unit="s" type="Integer" />
    46. 

  46. 			<config default="false" name="EnableSpooling" nameView="Enable Spooling" description="EnableSpooling" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    47. 

  47. 			<config default="30" name="LinkTestInterval" nameView="Link Test Interval" description="LinkTestInterval" max="999" min="0" paramter="" tag="" unit="s" type="Integer" />
    48. 

  48. 			<config default="0" name="DeviceId" nameView="Device Id" description="DeviceId" max="0" min="0" paramter="" tag="" unit="" type="String" />
    49. 

  49. 

  50. 			<config default="true" name="DefaultToOnline" nameView="Change to online when FA connected" description="Change to online when FA connected" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    51. 

  51. 			<config default="true" name="DefaultToRemote" nameView="Change to remote when FA connected" description="Change to remote when FA connected" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    52. 

  52. 		</configs>
    53. 

  53. 

  54. 		<configs name="SetUp" nameView="Set Up" visible="false">
    55. 

  55. 			<config default="true" name="EPDInstalled" nameView="Is EPD installed" description="EPD是否安装" max="" min="" paramter="" tag="" unit="" type="Bool" />
    56. 

  56. 		</configs>
    57. 

  57. 

  58. 		<configs name="EndPoint" nameView="EndPoint" visible="false">
    59. 

  59. 			<config default="ExposureTime=222;WaveLengthA=2;BinningA=3;WaveLengthB=4;BinningB=6;WaveLengthC=5;BinningC=8;WaveLengthD=7;BinningD=9;Fd=1;PrefilterTime=2;PostfilterTime=3;AlgorithmType=Valley;Criteria=4;DelayTime=5;ValidationTime=6;ValidationValue=7;TimeWindow=8;MinimalTime=9;PostponeTime=10;Control=True;Normalization=True;EnablePostponePercent=True;EnableCriterialPercent=True;EnableEventTrigger=True;IsFaultIfNoTrigger=True;" name="EndPointDefaultValue" nameView="EndPoint Default Value" description="EndPoint Default Value" max="" min="" paramter="" tag="" unit="" type="String" visible="false" />
    60. 

  60. 		</configs>
    61. 

  61. 

  62. 

  63. 		<configs name="FDC" nameView="FDC">
    64. 

  64. 			<config default="Fdc" name="DataGroupName"  nameView="FDC Data group" description="FDC data group, defined in DataGroup.xml" max="" min="" paramter="" tag="" visible="false" unit="" type="String" />
    65. 

  65. 			<config default="1000" name="DelayTime"  nameView="FDC Sample Delay Time" description="Step Delay time before collection FDC data" max="10000" min="0" paramter="" tag="" unit="ms" type="Integer" />
    66. 

  66. 			<config default="100" name="SampleInterval" nameView="FDC Sample Interval" description="interval time collection FDC sample data" max="10000" min="0" paramter="" tag="" unit="ms" type="Integer" />
    67. 

  67. 		</configs>
    68. 

  68. 

  69. 		<configs name="WaferThickness" nameView="WaferThickness" visible="false">
    70. 

  70. 			<config default="false" name="EnableThickness" nameView="Is active thickness functions" description="是否有厚片薄片功能" max="" min="" paramter="" tag="" unit="" type="Bool" />
    71. 

  71. 

  72. 			<config default="Thin" name="LP1WaferThicknessType" nameView="LP1 wafer thickness type" description="Thin；Thick" max="" min="" paramter="" tag="" unit="0" type="String" />
    73. 

  73. 			<config default="Thick" name="LP2WaferThicknessType" nameView="LP2 wafer thickness type" description="Thin；Thick" max="" min="" paramter="" tag="" unit="0" type="String" />
    74. 

  74. 		</configs>
    75. 

  75. 

  76. 		<configs name="Job" nameView="Job"  >
    77. 

  77. 			<config default="10" name="BuzzerTimeWhenJobDone" nameView="Buzzer Time When Job Done"  description="buzzer time after job done, -1=never stop, 0=silent,xxx=buzzer time" max="86400" min="-1" paramter="" tag="" unit="s" type="Integer" />
    78. 

  78. 		</configs>
    79. 

  79. 	</configs>
    80. 

  80. 

  81. 	<!--EFEM-->
    82. 

  82. 	<configs name="EFEM" nameView="EFEM" >
    83. 

  83. 		<config default="30" name="HomeTimeout" nameView="Home Timeout" description="EFEM初始化超时" max="300" min="1" paramter="" tag="" unit="s" type="Integer" />
    84. 

  84. 		<config default="60" name="MotionTimeout" nameView="Motion Timeout" description="motion time out" max="600" min="1" paramter="" tag="" unit="s" type="Integer" />
    85. 

  85. 		<config default="100" name="AlignTimeout" nameView="Align Timeout" description="Align time out" max="600" min="10" paramter="" tag="" unit="s" type="Integer" />
    86. 

  86. 		<config default="127.0.0.1:13000" name="IPAddress" nameView="IP Address" description="EFEM IP、端口设置;default 10.0.0.100:13000" max="" min="" paramter="" tag="" unit="" type="String" />
    87. 

  87. 		<config default="true" name="CheckSideDoorOnEAPMap" nameView="CheckSideDoorOnEAPMap" description="在自动跑货的时候检查侧门是否关闭" max="" min="" paramter="" tag="" unit="" type="Bool" visible="false"/>
    88. 

  88. 		<config default="true" name="CheckCassetteDoorOnEAPMap" nameView="CheckCassetteDoorOnEAPMap" description="在自动跑货的时候检查EFEM正门是否关闭" max="" min="" paramter="" tag="" unit="" type="Bool" visible="false"/>
    89. 

  89. 

  90. 		<config default="true" name="EnableGrip" nameView="Is active grip functions" description="机械手是否真空吸附" max="" min="" paramter="" tag="" unit="" type="Bool" />
    91. 

  91. 

  92. 		<config default="1" name="EfemType" nameView="EFEM Type" description="EFEM类型，1=Future广川 2=Jet自制" max="300" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
    93. 

  93. 

  94. 		<config default="true" name="IsOpenCST" nameView="Is openCST" description="机械手是否为OpenCST类型" max="" min="" paramter="" tag="" unit="" type="Bool" visible="false"/>
    95. 

  95. 

  96. 		<config default="false" name="AutoUnlockAfterUnload" nameView="auto unlock after unload" description="是否自动解锁" max="" min="" paramter="" tag="" unit="" type="Bool" visible="false"/>
    97. 

  97. 

  98. 		<config default="false" name="IgnoreWaterFlowError" nameView="Ignore water flow alarm" description="是否忽略冷却水报警" max="" min="" paramter="" tag="" unit="" type="Bool" visible="false"/>
    99. 

  99. 

  100. 		<config default="false" name="IgnoreIonizerError" nameView="Ignore Ionizer alarm" description="是否忽略离子发生器报警" max="" min="" paramter="" tag="" unit="" type="Bool" visible="false"/>
    101. 

  101. 

  102. 		<config default="1" name="DelayTimeBeforeLiftDown" nameView="Delay Time before lift down" description="冷却前，lift pin停留多久再落下" max="600" min="0" paramter="" tag="" unit="second" type="Integer" />
    103. 

  103.     
    104. 

  104.     <configs name="EfemRobot" nameView="EfemRobot" >
    105. 

  105.       <config default="true" name="UpperBladeEnable" nameView="UpperBladeEnable"  description="Upper Blade Enable" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    106. 

  106.       <config default="true" name="LowerBladeEnable" nameView="LowerBladeEnable" description="Lower Blade Enable" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    107. 

  107.     </configs>
    108. 

  108. 

  109. 		<configs name="LoadPort" nameView="LoadPort" >
    110. 

  110. 			<config default="30" name="MotionTimeout" nameView="Motion Timeout"  description="Motion Timeout" max="60" min="1" paramter="" tag="" unit="s" type="Integer" />
    111. 

  111. 			<config default="30" name="HomeTimeout" nameView="Home Timeout"  description="LoadPort初始化超时时间" max="60" min="1" paramter="" tag="" unit="s" type="Integer" />
    112. 

  112. 		</configs>
    113. 

  113. 	</configs>
    114. 

  114. 

  115. 	<!--Router-->
    116. 

  116. 	<configs name="Scheduler" nameView="Scheduler" >
    117. 

  117. 		<config default="true" name="GroupWaferBySequence" nameView="Group Wafer By Sequence" description="GroupWaferBySequence" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    118. 

  118. 		<config default="true" name="IsRunInParallelMode" nameView="Is Run In Parallel Mode" description="并行模式1对1，串行模式按顺序" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    119. 

  119. 	</configs>
    120. 

  120. 

  121. 	<!--PMA-->
    122. 

  122. 	<configs name="PMA" nameView="PMA" >
    123. 

  123.     <config default="3,4,6,8" name="SupportedWaferSize" nameView="腔体支持的Wafer尺寸" description=" " max="0" min="0" paramter="" tag="" unit="" type="String" visible="false"/>
    124. 

  124.     <config default="3,4,6,8" name="SupportedGuidePinSize" nameView="腔体Guide Pin尺寸" description=" " max="0" min="0" paramter="" tag="" unit="" type="String" visible="false"/>
    125. 

  125. 		<config default="120" name="PrepareTransferTimeout" nameView="Prepare Transfer Timeout" description="prepare transfer time out" max="99999" min="1" paramter="" tag="" unit="s" type="Integer" />
    126. 

  126. 		<config default="1" name="OpenGasValveTimeout" nameView="Open Gas Valve Timeout" description="开阀超时" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
    127. 

  127. 		<config default="1" name="TimeLimitOfCloseGasValve" nameView="Time Limit Of Close Gas Valve" description="" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    128. 

  128. 		<config default="1" name="OpenCloseSlitValveTimeout" nameView="Open Close Slit Valve Timeout" description="" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    129. 

  129. 		<config default="180" name="VentTime" nameView="Vent Time" description="" max="600" min="0" paramter="" tag="" unit="second" type="Integer" />
    130. 

  130. 		<config default="100" name="GasFlowPressureAlarmRange" nameView="Process Pressure Alarm Range" description="" max="760000" min="0" paramter="" tag="" unit="mtorr" type="Double" />
    131. 

  131. 		<config default="60" name="GasFlowPressureAlarmTime" nameView="Process Pressure Alarm Time" description="" max="3600" min="0" paramter="" tag="" unit="second" type="Double" />
    132. 

  132. 		<config default="100" name="GasFlowPressureWarningRange" nameView="Process Pressure Warning Range" description="" max="760000" min="0" paramter="" tag="" unit="mtorr" type="Double" />
    133. 

  133. 		<config default="60" name="GasFlowPressureWarningTime" nameView="Process Pressure Warning Time" description="" max="3600" min="0" paramter="" tag="" unit="second" type="Double" />
    134. 

  134. 		<config default="true" name="EnableThrottleValve" nameView="Enable Throttle Valve" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
    135. 

  135. 		<config default="150" name="ChamberHeaterSetPointLimit" nameView="Chamber Heater Set Point Limit" description="" max="500" min="0" paramter="" tag="" unit="" type="Integer" />
    136. 

  136. 		<config default="140" name="ForeLineHeaterSetPointLimit" nameView="ForeLine Heater Set Point Limit" description="" max="500" min="0" paramter="" tag="" unit="" type="Integer" />
    137. 

  137. 		<config default="120" name="CheckSubstrateTempTimeout" nameView="Check Substrate Temp Timeout" description="" max="3600" min="0" paramter="" tag="" unit="" type="Integer" />
    138. 

  138. 		<config default="90" name="CheckATMTimeout" nameView="Check ATM Timeout" description="" max="3000" min="0" paramter="" tag="" unit="s" type="Integer" />
    139. 

  139. 		<config default="1" name="VentTimeDelay" nameView="Vent Time Delay" description="" max="3000" min="0" paramter="" tag="" unit="s" type="Integer" />
    140. 

  140. 		<config default="780000" name="ChamberBasePressureThreshold" nameView="Chamber Base Pressure Threshold" description="" max="1000000" min="0" paramter="" tag="" unit="mtorr" type="Double" />
    141. 

  141. 		<config default="120" name="ChamberBaseTemperatureThreshold" nameView="Chamber Base Temperature Threshold" description="" max="1000" min="0" paramter="" tag="" unit="°C" type="Double" />
    142. 

  142. 		<config default="10" name="ProcessPressureOffset" nameView="Process Pressure Offset" description="" max="100" min="0" paramter="" tag="" unit="mtorr" type="Double" />
    143. 

  143. 		<config default="7500" name="ChamberVolume" nameView="Chamber Volume" max="100000" min="0" paramter="" tag="" unit="mL" visible="false" type="Double" />
    144. 

  144. 		<config default="25" name="GasTemperature" nameView="Gas Temperature" max="1000" min="-1000" paramter="" tag="" unit="℃" visible="false" type="Double" />
    145. 

  145. 		<config default="9" name="TargetPressureInMFCVerification" nameView="MFC verification中的目标压力" max="100" min="0" paramter="" tag="" unit="Torr" visible="false" type="Double" />
    146. 

  146. 		<config default="180" name="GasFlowTimeInMFCVerification" nameView="MFC verification中的目标时间" max="1000" min="0" paramter="" tag="" unit="second" visible="false" type="Double" />
    147. 

  147. 		<config default="0" name="PinDownDelayTimePick" nameView="Pick Delay Time before pin down" description="" max="120" min="0" paramter="" tag="" unit="s" type="Integer" />
    148. 

  148. 		<config default="0" name="PinDownDelayTimePlace" nameView="Place Delay Time before pin down" description="" max="120" min="0" paramter="" tag="" unit="s" type="Integer" />
    149. 

  149. 		<config default="Strip" name="ChamberLabel"  nameView="Chamber Label" description="Chamber名称" max="" min="" paramter="" tag=""  unit="" type="String" />
    150. 

  150. 		<config default="30" name="MaxDeviationInMFCVerification" nameView="MFC verification允许的最大偏差值（%）" max="100000" min="0" paramter="" tag="" unit="%" visible="false" type="Double" />
    151. 

  151. 		<config default="150" name="WallHeaterSetPointLimit" nameView="Wall Heater Set Point Limit" description="" max="500" min="0" paramter="" tag="" unit="" type="Integer" />
    152. 

  152. 		<config default="false" name="EnableWallHeater" nameView="Enable Chamber Wall Heater" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
    153. 

  153. 		<config default="false" name="EnableGridHeater" nameView="Enable Chamber Grid Heater" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
    154. 

  154. 		<config default="5" name="RecipeToleranceIgnoreTime" nameView="Ignore Time Before Check Recipe Step Tolerance" description="" max="60" min="0" paramter="" tag="" unit="s" type="Integer" />
    155. 

  155. 

  156. 		<configs name="MFCVerification" nameView="MFC Verification" >
    157. 

  157. 			<config default="7500" name="ChamberVolume" nameView="Chamber Volume" max="100000" min="0" paramter="" tag="" unit="mL"  visible="false" type="Double" />
    158. 

  158. 			<config default="25" name="GasTemperature" nameView="Gas Temperature" max="1000" min="-1000" paramter="" tag="" unit="℃" visible="false" type="Double" />
    159. 

  159. 			<config default="9" name="TargetPressure" nameView="结束条件：腔体压力达到的最大值" max="100" min="0" paramter="" tag="" unit="Torr" visible="true" type="Double" />
    160. 

  160. 			<config default="180" name="GasFlowTime" nameView="结束条件：流气多长时间" max="1000" min="0" paramter="" tag="" unit="second" visible="true" type="Double" />
    161. 

  161. 			<config default="30" name="MaxDeviation" nameView="结果检查：最大偏差，超过该值报警" max="100000" min="0" paramter="" tag="" unit="%" visible="true" type="Double" />
    162. 

  162. 			<config default="20" name="PressureStableTolerance" nameView="稳定条件：压力1秒内的最大变化范围" max="100000" min="0" paramter="" tag="" unit="mTorr" visible="true" type="Double" />
    163. 

  163. 			<config default="20" name="FlowStableTolerance" nameView="稳定条件：流量设定值和反馈值允许的最大偏差" max="100" min="0" paramter="" tag="" unit="%" visible="true" type="Double" />
    164. 

  164. 			<config default="5" name="CheckStableTimeout" nameView="稳定条件：在多长时间内处于稳定状态" max="100" min="0" paramter="" tag="" unit="%" visible="false" type="Double" />
    165. 

  165. 		</configs>
    166. 

  166. 

  167. 		<configs name="Chiller" nameView="Chiller" >
    168. 

  168. 			<config default="true" name="EnableChiller" nameView="Enable Chiller" description="enable chiller or not" max="1" min="0" tag="" unit="" type="Bool" />
    169. 

  169. 			<!--<config default="false" name="ChillerSameWithPMB" nameView="Chiller Same With PMB" description="enable chiller same with PMB or not" max="1" min="0" tag="" unit="" type="Bool" />-->
    170. 

  170. 			<config default="1" name="MFG" nameView="MFG" description="厂商, 1:SMC;" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    171. 

  171. 			<config default="1" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    172. 

  172. 			<config default="COM12" name="Port" nameView="Port" description="serial port name of pump" max="" min="" paramter="" tag="" unit="" type="String" />
    173. 

  173. 			<config default="10" name="ChillerTemperatureOffset" nameView="Chiller Temperature Offset" description="" max="100" min="0" paramter="" tag="" unit="degree" type="Double" />
    174. 

  174. 			<config default="300" name="SetPointLimitMax" nameView="Chiller Set Point Limit Max" description="" max="500" min="0" paramter="" tag="" unit="degree" type="Double" />
    175. 

  175. 			<config default="0" name="SetPointLimitMin" nameView="Chiller Set Point Limit Min" description="" max="500" min="0" paramter="" tag="" unit="degree" type="Double" />
    176. 

  176. 			<config default="true" name="EnableToleranceAlarm" nameView="Enable Tolerance Alarm" description="Enable Tolerance Alarm" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
    177. 

  177. 			<config default="20" name="ToleranceAlarmRange" nameView="Tolerance Alarm Range" description="Tolerance Alarm Range" max="200" min="0" paramter="" tag="" unit="℃" type="Integer" />
    178. 

  178. 			<config default="60" name="ToleranceAlarmTime" nameView="Tolerance Alarm Time" description="Tolerance Alarm Time" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
    179. 

  179. 		</configs>
    180. 

  180. 				<configs name="GridChiller" nameView="Grid Chiller" >
    181. 

  181. 			<config default="true" name="EnableChiller" nameView="Enable Chiller" description="enable chiller or not" max="1" min="0" tag="" unit="" type="Bool" />
    182. 

  182. 			<!--<config default="false" name="ChillerSameWithPMB" nameView="Chiller Same With PMB" description="enable chiller same with PMB or not" max="1" min="0" tag="" unit="" type="Bool" />-->
    183. 

  183. 			<config default="1" name="MFG" nameView="MFG" description="厂商, 1:SMC;" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    184. 

  184. 			<config default="1" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    185. 

  185. 			<config default="COM12" name="Port" nameView="Port" description="serial port name of pump" max="" min="" paramter="" tag="" unit="" type="String" />
    186. 

  186. 			<config default="10" name="ChillerTemperatureOffset" nameView="Chiller Temperature Offset" description="" max="10" min="-10" paramter="" tag="" unit="degree" type="Double" />
    187. 

  187. 			<config default="300" name="SetPointLimitMax" nameView="Chiller Set Point Limit Max" description="" max="500" min="0" paramter="" tag="" unit="degree" type="Double" />
    188. 

  188. 			<config default="0" name="SetPointLimitMin" nameView="Chiller Set Point Limit Min" description="" max="500" min="0" paramter="" tag="" unit="degree" type="Double" />
    189. 

  189. 		</configs>
    190. 

  190. 		<configs name="DryPump" nameView="Dry Pump" >
    191. 

  191. 			<config default="1" name="MFG" nameView="MFG" description="厂商, 1:Sky; 2:Edwards; 3:Kashiyama" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    192. 

  192. 			<config default="1" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    193. 

  193. 			<config default="COM13" name="Port" nameView="Port" description="serial port name of pump" max="" min="" paramter="" tag="" unit="" type="String" />
    194. 

  194. 			<config default="1000" name="ChamberForelinePressureThreshold" nameView="Chamber Foreline Pressure Threshold" description="" max="10000" min="0" paramter="" tag="" unit="mtorr" type="Double" />
    195. 

  195. 			<config default="20" name="ChamberForelinePressureTimeout" nameView="Chamber Foreline Pressure Timeout" description="" max="3000" min="0" paramter="" tag="" unit="s" type="Integer" />
    196. 

  196. 		</configs>
    197. 

  197. 		<configs name="Rf" nameView="Source RF" >
    198. 

  198. 			<config default="1" name="MFG" nameView="MFG" description="厂商, 1:AdTec; 2:Comet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    199. 

  199. 			<config default="1" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    200. 

  200. 			<config default="COM14" name="Port" nameView="Port" description="serial port name of RFG" max="" min="" paramter="" tag="" unit="" type="String" />
    201. 

  201. 			<config default="192.168.10.21:502" name="IPAddress" nameView="IP Address" description="EFEM IP,default 127.0.0.1:502" max="" min="" paramter="" tag="" unit="" type="String" />
    202. 

  202. 			<config default="500" name="PowerAlarmRange" nameView="Power Alarm Range" description="" max="1000" min="0" paramter="" tag="" unit="" type="Double" />
    203. 

  203. 			<config default="10" name="PowerAlarmTime" nameView="Power Alarm Time" description="" max="10" min="0" paramter="" tag="" unit="" type="Double" />
    204. 

  204. 			<config default="500" name="PowerWarningRange" nameView="Power Warning Range" description="" max="1000" min="0" paramter="" tag="" unit="" type="Double" />
    205. 

  205. 			<config default="10" name="PowerWarningTime" nameView="Power Warning Time" description="" max="10" min="0" paramter="" tag="" unit="" type="Double" />
    206. 

  206. 			<config default="1" name="ReflectPowerAlarmRange" nameView="Reflect Power Alarm Range" description="" max="1000" min="0" paramter="" tag="" unit="" type="Double" />
    207. 

  207. 			<config default="1" name="ReflectPowerAlarmTime" nameView="Reflect Power Alarm Time" description="" max="10" min="0" paramter="" tag="" unit="" type="Double" />
    208. 

  208. 			<config default="3000" name="PowerRange" nameView="Power Range" description="" max="30000" min="0" paramter="" tag="" unit="" type="Double" />
    209. 

  209. 			<config default="1" name="Coefficient" nameView="Coefficient" description="" max="10" min="0" paramter="" tag="" unit="" type="Double" />
    210. 

  210. 			<config default="false" name="EnablePulsingFunction" nameView="Enable Pulsing Function" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
    211. 

  211. 			<config default="false" name="EnableReflectPower" nameView="Enable Reflect Power" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
    212. 

  212. 			<config default="false" name="EnableVoltageCurrent" nameView="Enable Voltage Current" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
    213. 

  213. 			<config default="1" name="PowerRegulationFactor" nameView="Power Regulation Factor" description="" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    214. 

  214. 			<config default="1000" name="RfPowerAlarmRange" nameView="RF Power Alarm Range" description="" max="10000" min="0" paramter="" tag="" unit="" type="Integer" />
    215. 

  215. 			<config default="3000" name="RfPowerAlarmTime" nameView="RF Power Alarm Time" description="" max="10000" min="0" paramter="" tag="" unit="" type="Integer" />
    216. 

  216. 			<config default="3" name="RFTurnOnTimeout" nameView="RF Turn On Timeout" description="" max="10" min="0" paramter="" tag="" unit="S" type="Integer" />
    217. 

  217. 

  218.       <config default="" name="GeneratorSerialNumber" nameView="RF电源序列号" max="" min="0" paramter="" tag="" unit="" type="String" />
    219. 

  219.       <config default="" name="SensorSerialNumber" nameView="SensorHead序列号" max="" min="0" paramter="" tag="" unit="" type="String" />
    220. 

  220.       <config default="2000" name="RFPhysicalMaxPower" nameView="RF Physical Max Power" description="" max="9999" min="0" paramter="" tag="" unit="" type="Double"  visible="false"/>
    221. 

  221.       <config default="2000" name="CurrentRFMaxPower" nameView="Current RF Max Power" description="" max="2200" min="1800" paramter="" tag="" unit="" type="Double" />
    222. 

  222.       <config default="2000" name="RFCalibratedMaxPower" nameView="RF Calibrated Max Power" description="" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
    223. 

  223.       <config default="false" name="EnableCalibration" nameView="是否校准" max="" min="" paramter="" tag="" unit="" visible="true" type="Bool" />
    224. 

  224.       <config default="100#100;200#200;" name="CalibrationTable" nameView="校准表" max="" min="0" paramter="" tag="" unit="" visible="false" type="String" />
    225. 

  225.       <config default="" name="CalibrationTableDetail" nameView="详细校准表" max="" min="0" paramter="" tag="" unit="" visible="false" type="String" />
    226. 

  226. 

  227.     </configs>
    228. 

  228. 		<configs name="match" nameView="Source Match" >
    229. 

  229. 			<config default="false" name="EnableMatch" nameView="Enable Source Match" description="enable match or not" max="1" min="0" tag="" unit="" type="Bool" />
    230. 

  230. 			<config default="1" name="MFG" nameView="MFG" description="厂商, 1:AdTec; 2:Comet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    231. 

  231. 			<config default="1" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    232. 

  232. 			<config default="COM15" name="Port" nameView="Port" description="serial port name of match" max="" min="" paramter="" tag="" unit="" type="String" />
    233. 

  233. 			<config default="192.168.10.21:502" name="IPAddress" nameView="IP Address" description="EFEM IP,default 127.0.0.1:502" max="" min="" paramter="" tag="" unit="" type="String" />
    234. 

  234. 			<config default="1" name="MatchMode" nameView="Match Mode" description="" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    235. 

  235. 			<config default="false" name="EnableC1C2Position" nameView="Enable Source C1 C2 Position" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
    236. 

  236. 			<!--<config default="10" name="MatchPositionC1" nameView="CycleCount" description="" max="100" min="0" paramter="" tag="" unit="" type="Double" />
    237. 

  237.       <config default="10" name="MatchPositionC2" nameView="CycleCount" description="" max="100" min="0" paramter="" tag="" unit="" type="Double" />-->
    238. 

  238. 		</configs>
    239. 

  239. 

  240. 		<configs name="BiasRf" nameView="Bias RF" >
    241. 

  241. 			<config default="true" name="EnableBiasRF" nameView="Enable Bias RF" description="enable bias RF or not" max="1" min="0" tag="" unit="" type="Bool" />
    242. 

  242. 			<config default="2" name="MFG" nameView="MFG" description="厂商, 1:AdTec; 2:Comet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    243. 

  243. 			<config default="2" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    244. 

  244. 			<config default="COM14" name="Port" nameView="Port" description="serial port name of RFG" max="" min="" paramter="" tag="" unit="" type="String" />
    245. 

  245. 			<config default="127.0.0.1:502" name="IPAddress" nameView="IP Address" description="EFEM IP,default 127.0.0.1:502" max="" min="" paramter="" tag="" unit="" type="String" />
    246. 

  246. 			<config default="500" name="PowerAlarmRange" nameView="Power Alarm Range" description="" max="1000" min="0" paramter="" tag="" unit="" type="Double" />
    247. 

  247. 			<config default="10" name="PowerAlarmTime" nameView="Power Alarm Time" description="" max="10" min="0" paramter="" tag="" unit="" type="Double" />
    248. 

  248. 			<config default="500" name="PowerWarningRange" nameView="Power Warning Range" description="" max="1000" min="0" paramter="" tag="" unit="" type="Double" />
    249. 

  249. 			<config default="10" name="PowerWarningTime" nameView="Power Warning Time" description="" max="10" min="0" paramter="" tag="" unit="" type="Double" />
    250. 

  250. 			<config default="1" name="ReflectPowerAlarmRange" nameView="Reflect Power Alarm Range" description="" max="1000" min="0" paramter="" tag="" unit="" type="Double" />
    251. 

  251. 			<config default="1" name="ReflectPowerAlarmTime" nameView="Reflect Power Alarm Time" description="" max="10" min="0" paramter="" tag="" unit="" type="Double" />
    252. 

  252. 			<config default="3000" name="PowerRange" nameView="Power Range" description="" max="30000" min="0" paramter="" tag="" unit="" type="Double" />
    253. 

  253. 			<config default="1" name="Coefficient" nameView="Coefficient" description="" max="10" min="0" paramter="" tag="" unit="" type="Double" />
    254. 

  254. 			<config default="false" name="EnablePulsingFunction" nameView="Enable Pulsing Function" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
    255. 

  255. 			<config default="false" name="EnableReflectPower" nameView="Enable Reflect Power" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
    256. 

  256. 			<config default="false" name="EnableVoltageCurrent" nameView="Enable Voltage Current" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
    257. 

  257. 			<config default="1" name="PowerRegulationFactor" nameView="Power Regulation Factor" description="" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    258. 

  258. 			<config default="1000" name="RfPowerAlarmRange" nameView="RF Power Alarm Range" description="" max="10000" min="0" paramter="" tag="" unit="" type="Integer" />
    259. 

  259. 			<config default="3000" name="RfPowerAlarmTime" nameView="RF Power Alarm Time" description="" max="10000" min="0" paramter="" tag="" unit="" type="Integer" />
    260. 

  260. 

  261.       <config default="" name="GeneratorSerialNumber" nameView="RF电源序列号" max="" min="0" paramter="" tag="" unit="" type="String" />
    262. 

  262.       <config default="" name="SensorSerialNumber" nameView="SensorHead序列号" max="" min="0" paramter="" tag="" unit="" type="String" />
    263. 

  263.       <config default="600" name="RFPhysicalMaxPower" nameView="RF Physical Max Power" description="" max="9999" min="0" paramter="" tag="" unit="" type="Double"  visible="false"/>
    264. 

  264.       <config default="600" name="CurrentRFMaxPower" nameView="Current RF Max Power" description="" max="660" min="540" paramter="" tag="" unit="" type="Double" />
    265. 

  265.       <config default="600" name="RFCalibratedMaxPower" nameView="RF Calibrated Max Power" description="" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
    266. 

  266.       <config default="false" name="EnableCalibration" nameView="是否校准" max="" min="" paramter="" tag="" unit="" visible="true" type="Bool" />
    267. 

  267.       <config default="100#100;200#200;" name="CalibrationTable" nameView="校准表" max="" min="0" paramter="" tag="" unit="" visible="false" type="String" />
    268. 

  268.       <config default="" name="CalibrationTableDetail" nameView="详细校准表" max="" min="0" paramter="" tag="" unit="" visible="false" type="String" />
    269. 

  269. 		</configs>
    270. 

  270. 		<configs name="BiasMatch" nameView="Bias Match" >
    271. 

  271. 			<config default="false" name="EnableBiasMatch" nameView="Enable Bias Match" description="enable bias match or not" max="1" min="0" tag="" unit="" type="Bool" />
    272. 

  272. 			<config default="2" name="MFG" nameView="MFG" description="厂商, 1:AdTec; 2:Comet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    273. 

  273. 			<config default="2" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    274. 

  274. 			<config default="COM15" name="Port" nameView="Port" description="serial port name of match" max="" min="" paramter="" tag="" unit="" type="String" />
    275. 

  275. 			<config default="127.0.0.1:502" name="IPAddress" nameView="IP Address" description="EFEM IP,default 127.0.0.1:502" max="" min="" paramter="" tag="" unit="" type="String" />
    276. 

  276. 			<config default="1" name="MatchMode" nameView="Match Mode" description="" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    277. 

  277. 			<config default="false" name="EnableBiasC1C2Position" nameView="Enable Bias C1 C2 Position" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
    278. 

  278. 		</configs>
    279. 

  279. 		<configs name="MfcGas1" nameView="MFC Gas1" >
    280. 

  280. 			<config default="true" name="Enable" nameView="Enable" description="Enable gas 1 or not" tag="" unit="" type="Bool" />
    281. 

  281. 			<config default="O2" name="GasName" nameView="Gas Name" description="Name of NO.1 gas stick" tag="" unit="" type="String" />
    282. 

  282. 			<config default="100" name="MfcN2Scale" nameView="MFC N2 Scale" description="Max scale by N2 tuning" max="10000" min="0" tag="" unit="sccm" type="Integer" />
    283. 

  283. 			<config default="1" name="MfcScaleFactor" nameView="MFC Scale Factor" description="Scale factor" max="10" min="0" tag="" unit="sccm" type="Double" />
    284. 

  284. 			<config default="100" name="DefaultSetPoint" nameView="Default Set Point" description="default setpoint" max="1000" min="0" tag="" unit="sccm" type="Integer" />
    285. 

  285. 			<config default="1" name="FlowRegulationFactor" nameView="Flow Regulation Factor" description="flow regulation factor" max="10" min="0" tag="" unit="sccm" type="Integer" />
    286. 

  286. 			<config default="true" name="MfcEnableAlarm" nameView="MFC Enable Alarm" description="" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
    287. 

  287. 			<config default="10" name="MfcAlarmRange" nameView="MFC Alarm Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
    288. 

  288. 			<config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
    289. 

  289. 			<config default="10" name="MfcWarningRange" nameView="MFC Warning Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
    290. 

  290. 			<config default="10" name="MfcWarningTime" nameView="MFC Warning Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
    291. 

  291. 		</configs>
    292. 

  292. 		<configs name="MfcGas2" nameView="MFC Gas2" >
    293. 

  293. 			<config default="true" name="Enable" nameView="Enable" description="Enable gas 2 or not" tag="" unit="" type="Bool" />
    294. 

  294. 			<config default="N2" name="GasName" nameView="Gas Name" description="Name of NO.2 gas stick" tag="" unit="" type="String" />
    295. 

  295. 			<config default="100" name="MfcN2Scale" nameView="MFC N2 Scale" description="Max scale by N2 tuning" max="10000" min="0" tag="" unit="sccm" type="Integer" />
    296. 

  296. 			<config default="1" name="MfcScaleFactor" nameView="MFC Scale Factor" description="Scale factor" max="10" min="0" tag="" unit="sccm" type="Double" />
    297. 

  297. 			<config default="100" name="DefaultSetPoint" nameView="Default Set Point" description="default setpoint" max="1000" min="0" tag="" unit="sccm" type="Integer" />
    298. 

  298. 			<config default="1" name="FlowRegulationFactor" nameView="Flow Regulation Factor" description="flow regulation factor" max="10" min="0" tag="" unit="sccm" type="Integer" />
    299. 

  299. 			<config default="true" name="MfcEnableAlarm" nameView="MFC Enable Alarm" description="" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
    300. 

  300. 			<config default="10" name="MfcAlarmRange" nameView="MFC Alarm Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
    301. 

  301. 			<config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
    302. 

  302. 			<config default="10" name="MfcWarningRange" nameView="MFC Warning Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
    303. 

  303. 			<config default="10" name="MfcWarningTime" nameView="MFC Warning Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
    304. 

  304. 		</configs>
    305. 

  305. 		<configs name="MfcGas3" nameView="MFC Gas3" >
    306. 

  306. 			<config default="true" name="Enable" nameView="Enable" description="Enable gas 3 or not" tag="" unit="" type="Bool" />
    307. 

  307. 			<config default="AR" name="GasName" nameView="Gas Name" description="Name of NO.3 gas stick" tag="" unit="" type="String" />
    308. 

  308. 			<config default="100" name="MfcN2Scale" nameView="MFC N2 Scale" description="Max scale by N2 tuning" max="10000" min="0" tag="" unit="sccm" type="Integer" />
    309. 

  309. 			<config default="1" name="MfcScaleFactor" nameView="MFC Scale Factor" description="Scale factor" max="10" min="0" tag="" unit="sccm" type="Double" />
    310. 

  310. 			<config default="100" name="DefaultSetPoint" nameView="Default Set Point" description="default setpoint" max="1000" min="0" tag="" unit="sccm" type="Integer" />
    311. 

  311. 			<config default="1" name="FlowRegulationFactor" nameView="Flow Regulation Factor" description="flow regulation factor" max="10" min="0" tag="" unit="sccm" type="Integer" />
    312. 

  312. 			<config default="true" name="MfcEnableAlarm" nameView="MFC Enable Alarm" description="" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
    313. 

  313. 			<config default="10" name="MfcAlarmRange" nameView="MFC Alarm Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
    314. 

  314. 			<config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
    315. 

  315. 			<config default="10" name="MfcWarningRange" nameView="MFC Warning Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
    316. 

  316. 			<config default="10" name="MfcWarningTime" nameView="MFC Warning Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
    317. 

  317. 		</configs>
    318. 

  318. 		<configs name="MfcGas4" nameView="MFC Gas4" >
    319. 

  319. 			<config default="true" name="Enable" nameView="Enable" description="Enable gas 4 or not" tag="" unit="" type="Bool" />
    320. 

  320. 			<config default="Gas4" name="GasName" nameView="Gas Name" description="Name of NO.4 gas stick" tag="" unit="" type="String" />
    321. 

  321. 			<config default="100" name="MfcN2Scale" nameView="MFC N2 Scale" description="Max scale by N2 tuning" max="10000" min="0" tag="" unit="sccm" type="Integer" />
    322. 

  322. 			<config default="1" name="MfcScaleFactor" nameView="MFC Scale Factor" description="Scale factor" max="10" min="0" tag="" unit="sccm" type="Double" />
    323. 

  323. 			<config default="100" name="DefaultSetPoint" nameView="Default Set Point" description="default setpoint" max="1000" min="0" tag="" unit="sccm" type="Integer" />
    324. 

  324. 			<config default="1" name="FlowRegulationFactor" nameView="Flow Regulation Factor" description="flow regulation factor" max="10" min="0" tag="" unit="sccm" type="Integer" />
    325. 

  325. 			<config default="true" name="MfcEnableAlarm" nameView="MFC Enable Alarm" description="Mfc Enable Alarm" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
    326. 

  326. 			<config default="10" name="MfcAlarmRange" nameView="MFC Alarm Range" description="Mfc Alarm Range" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
    327. 

  327. 			<config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="Mfc Alarm Time" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
    328. 

  328. 			<config default="10" name="MfcWarningRange" nameView="MFC Warning Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
    329. 

  329. 			<config default="10" name="MfcWarningTime" nameView="MFC Warning Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
    330. 

  330. 		</configs>
    331. 

  331. 		<configs name="MfcGas5" nameView="MFC Gas5" >
    332. 

  332. 			<config default="true" name="Enable" nameView="Enable" description="Enable gas 5 or not" tag="" unit="" type="Bool" />
    333. 

  333. 			<config default="Gas5" name="GasName" nameView="Gas Name" description="Name of NO.5 gas stick" tag="" unit="" type="String" />
    334. 

  334. 			<config default="100" name="MfcN2Scale" nameView="MFC N2 Scale" description="Max scale by N2 tuning" max="10000" min="0" tag="" unit="sccm" type="Integer" />
    335. 

  335. 			<config default="1" name="MfcScaleFactor" nameView="MFC Scale Factor" description="Scale factor" max="10" min="0" tag="" unit="sccm" type="Double" />
    336. 

  336. 			<config default="100" name="DefaultSetPoint" nameView="Default Set Point" description="default setpoint" max="1000" min="0" tag="" unit="sccm" type="Integer" />
    337. 

  337. 			<config default="1" name="FlowRegulationFactor" nameView="Flow Regulation Factor" description="flow regulation factor" max="10" min="0" tag="" unit="sccm" type="Integer" />
    338. 

  338. 			<config default="true" name="MfcEnableAlarm" nameView="MFC Enable Alarm" description="Mfc Enable Alarm" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
    339. 

  339. 			<config default="10" name="MfcAlarmRange" nameView="MFC Alarm Range" description="Mfc Alarm Range" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
    340. 

  340. 			<config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="Mfc Alarm Time" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
    341. 

  341. 			<config default="10" name="MfcWarningRange" nameView="MFC Warning Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
    342. 

  342. 			<config default="10" name="MfcWarningTime" nameView="MFC Warning Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
    343. 

  343. 		</configs>
    344. 

  344. 		<configs name="Pump" nameView="Pump" >
    345. 

  345. 			<config default="30" name="LeakRate" nameView="Leak Rate" description="" max="756000" min="0" paramter="" tag="" unit="mTorrPerMin" type="Double" />
    346. 

  346. 			<config default="180" name="LeakCheckPumpingTime" nameView="Leak Check Pumping Time" description="" max="3000" min="0" paramter="" tag="" unit="" type="Integer" />
    347. 

  347. 			<config default="180" name="LeakCheckWaitTime" nameView="Leak Check Wait Time" description="" max="3000" min="0" paramter="" tag="" unit="" type="Integer" />
    348. 

  348. 			<config default="150" name="PumpBasePressure" nameView="Pump Base Pressure" description="" max="756000" min="0" paramter="" tag="" unit="mTorr" type="Integer" />
    349. 

  349. 			<config default="120" name="PumpTimeLimit" nameView="Pump Time Limit" description="" max="3000" min="0" paramter="" tag="" unit="" type="Double" />
    350. 

  350. 			<config default="5" name="PumpValveDelay" nameView="Pump Valve Delay" description="" max="3000" min="0" paramter="" tag="" unit="s" type="Integer" />
    351. 

  351. 		</configs>
    352. 

  352. 		<configs name="Purge" nameView="Purge" >
    353. 

  353. 			<config default="3" name="PurgeCycleCount" nameView="Purge Cycle Count" description="" max="30" min="0" paramter="" tag="" unit="times" type="Double" />
    354. 

  354. 			<config default="700000" name="PurgeVentPressure" nameView="Purge Vent Pressure" description="" max="760000" min="0" paramter="" tag="" unit="mtorr" type="Double" />
    355. 

  355. 			<config default="10" name="PurgePumpPressure" nameView="Purge Pump Pressure" description="" max="760000" min="0" paramter="" tag="" unit="mtorr" type="Double" />
    356. 

  356. 			<config default="60" name="PurgeVentTimeLimit" nameView="Purge Vent Time Limit" description="" max="3600" min="0" paramter="" tag="" unit="second" type="Double" />
    357. 

  357. 			<config default="60" name="PurgePumpTimeLimit" nameView="Purge Pump Time Limit" description="" max="3600" min="0" paramter="" tag="" unit="second" type="Double" />
    358. 

  358. 			<config default="10" name="PurgeVentStableTime" nameView="Purge Vent Stable Time" description="" max="600" min="0" paramter="" tag="" unit="second" type="Double" />
    359. 

  359. 			<config default="10" name="PurgePumpStableTime" nameView="Purge Pump Stable Time" description="" max="600" min="0" paramter="" tag="" unit="second" type="Double" />
    360. 

  360. 		</configs>
    361. 

  361. 		<configs name="HeaterChamber" nameView="Heater Substrate" >
    362. 

  362. 			<config default="false" name="HeaterEnableTolerance" nameView="Enable Heater Deviation Check" description="" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    363. 

  363. 			<config default="200" name="HeaterAlarmRange" nameView="Heater deviation Alarm Range" description="" max="200" min="0" paramter="" tag="" unit="℃" type="Integer" />
    364. 

  364. 			<config default="10" name="HeaterAlarmTime" nameView="Heater deviation Alarm Time" description="" max="3600" min="0" paramter="" tag="" unit="second" type="Integer" />
    365. 

  365. 			<config default="100" name="HeaterWarningRange" nameView="Heater deviation Warning Range" description="" max="200" min="0" paramter="" tag="" unit="℃" type="Integer" />
    366. 

  366. 			<config default="10" name="HeaterWarningTime" nameView="Heater deviation Warning Time" description="" max="3600" min="0" paramter="" tag="" unit="second" type="Integer" />
    367. 

  367.       <config default="0" name="MonitorTcFeedbackOffset" nameView="Monitor Tc Feedback Offset" description="" max="5" min="-5" paramter="" tag="" unit="℃" type="Double" />
    368. 

  368.       <config default="0" name="ControlTcFeedbackOffset" nameView="Control Tc Feedback Offset" description="" max="5" min="-5" paramter="" tag="" unit="℃" type="Double" />
    369. 

  369. 

  370. 			<config name="TempOffsetPoint_1" nameView="Temp Offset Point 1" description="温度补偿点 1" unit="degree" type="Integer" max="300" min="0" />
    371. 

  371. 			<config name="OffsetValue_1" nameView="Offset Value 1" description="补偿值 1" unit="degree" type="Double" max="300" min="0" />
    372. 

  372. 			<config name="TempOffsetPoint_2" nameView="Temp Offset Point 2" description="温度补偿点 2" unit="degree" type="Integer" max="300" min="0" />
    373. 

  373. 			<config name="OffsetValue_2" nameView="Offset Value 2" description="补偿值 2" unit="degree" type="Double" max="300" min="0" />
    374. 

  374. 			<config name="TempOffsetPoint_3" nameView="Temp Offset Point 3" description="温度补偿点 3" unit="degree" type="Integer" max="300" min="0" />
    375. 

  375. 			<config name="OffsetValue_3" nameView="Offset Value 3" description="补偿值 3" unit="degree" type="Double" max="300" min="0" />
    376. 

  376. 			<config name="TempOffsetPoint_4" nameView="Temp Offset Point 4" description="温度补偿点 4" unit="degree" type="Integer" max="300" min="0" />
    377. 

  377. 			<config name="OffsetValue_4" nameView="Offset Value 4" description="补偿值 4" unit="degree" type="Double" max="300" min="0" />
    378. 

  378. 			<config name="TempOffsetPoint_5" nameView="Temp Offset Point 5" description="温度补偿点 5" unit="degree" type="Integer" max="300" min="0" />
    379. 

  379. 			<config name="OffsetValue_5" nameView="Offset Value 5" description="补偿值 5" unit="degree" type="Double" max="300" min="0" />
    380. 

  380. 			<config name="TempOffsetPoint_6" nameView="Temp Offset Point 6" description="温度补偿点 6" unit="degree" type="Integer" max="300" min="0" />
    381. 

  381. 			<config name="OffsetValue_6" nameView="Offset Value 6" description="补偿值 6" unit="degree" type="Double" max="300" min="0" />
    382. 

  382. 			<config name="TempOffsetPoint_7" nameView="Temp Offset Point 7" description="温度补偿点 7" unit="degree" type="Integer" max="300" min="0" />
    383. 

  383. 			<config name="OffsetValue_7" nameView="Offset Value 7" description="补偿值 7" unit="degree" type="Double" max="300" min="0" />
    384. 

  384. 			<config name="TempOffsetPoint_8" nameView="Temp Offset Point 8" description="温度补偿点 8" unit="degree" type="Integer" max="300" min="0" />
    385. 

  385. 			<config name="OffsetValue_8" nameView="Offset Value 8" description="补偿值 8" unit="degree" type="Double" max="300" min="0" />
    386. 

  386. 			<config name="TempOffsetPoint_9" nameView="Temp Offset Point 9" description="温度补偿点 9" unit="degree" type="Integer" max="300" min="0" />
    387. 

  387. 			<config name="OffsetValue_9" nameView="Offset Value 9" description="补偿值 9" unit="degree" type="Double" max="300" min="0" />
    388. 

  388. 		</configs>
    389. 

  389. 

  390. 		<configs name="WallHeater" nameView="Heater Wall" >
    391. 

  391. 			<config default="false" name="HeaterEnableTolerance" nameView="Enable Heater Deviation Check" description="" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    392. 

  392. 			<config default="200" name="HeaterAlarmRange" nameView="Heater deviation Alarm Range" description="" max="200" min="0" paramter="" tag="" unit="℃" type="Integer" />
    393. 

  393. 			<config default="10" name="HeaterAlarmTime" nameView="Heater deviation Alarm Time" description="" max="3600" min="0" paramter="" tag="" unit="second" type="Integer" />
    394. 

  394. 			<config default="100" name="HeaterWarningRange" nameView="Heater deviation Warning Range" description="" max="200" min="0" paramter="" tag="" unit="℃" type="Integer" />
    395. 

  395. 			<config default="10" name="HeaterWarningTime" nameView="Heater deviation Warning Time" description="" max="3600" min="0" paramter="" tag="" unit="second" type="Integer" />
    396. 

  396.       <config default="0" name="MonitorTcFeedbackOffset" nameView="Monitor Tc Feedback Offset" description="" max="5" min="-5" paramter="" tag="" unit="℃" type="Double" />
    397. 

  397.       <config default="0" name="ControlTcFeedbackOffset" nameView="Control Tc Feedback Offset" description="" max="5" min="-5" paramter="" tag="" unit="℃" type="Double" />
    398. 

  398. 

  399. 			<config name="TempOffsetPoint_1" nameView="Temp Offset Point 1" description="温度补偿点 1" unit="degree" type="Integer" max="300" min="0" />
    400. 

  400. 			<config name="OffsetValue_1" nameView="Offset Value 1" description="补偿值 1" unit="degree" type="Double" max="300" min="0" />
    401. 

  401. 			<config name="TempOffsetPoint_2" nameView="Temp Offset Point 2" description="温度补偿点 2" unit="degree" type="Integer" max="300" min="0" />
    402. 

  402. 			<config name="OffsetValue_2" nameView="Offset Value 2" description="补偿值 2" unit="degree" type="Double" max="300" min="0" />
    403. 

  403. 			<config name="TempOffsetPoint_3" nameView="Temp Offset Point 3" description="温度补偿点 3" unit="degree" type="Integer" max="300" min="0" />
    404. 

  404. 			<config name="OffsetValue_3" nameView="Offset Value 3" description="补偿值 3" unit="degree" type="Double" max="300" min="0" />
    405. 

  405. 			<config name="TempOffsetPoint_4" nameView="Temp Offset Point 4" description="温度补偿点 4" unit="degree" type="Integer" max="300" min="0" />
    406. 

  406. 			<config name="OffsetValue_4" nameView="Offset Value 4" description="补偿值 4" unit="degree" type="Double" max="300" min="0" />
    407. 

  407. 			<config name="TempOffsetPoint_5" nameView="Temp Offset Point 5" description="温度补偿点 5" unit="degree" type="Integer" max="300" min="0" />
    408. 

  408. 			<config name="OffsetValue_5" nameView="Offset Value 5" description="补偿值 5" unit="degree" type="Double" max="300" min="0" />
    409. 

  409. 			<config name="TempOffsetPoint_6" nameView="Temp Offset Point 6" description="温度补偿点 6" unit="degree" type="Integer" max="300" min="0" />
    410. 

  410. 			<config name="OffsetValue_6" nameView="Offset Value 6" description="补偿值 6" unit="degree" type="Double" max="300" min="0" />
    411. 

  411. 			<config name="TempOffsetPoint_7" nameView="Temp Offset Point 7" description="温度补偿点 7" unit="degree" type="Integer" max="300" min="0" />
    412. 

  412. 			<config name="OffsetValue_7" nameView="Offset Value 7" description="补偿值 7" unit="degree" type="Double" max="300" min="0" />
    413. 

  413. 			<config name="TempOffsetPoint_8" nameView="Temp Offset Point 8" description="温度补偿点 8" unit="degree" type="Integer" max="300" min="0" />
    414. 

  414. 			<config name="OffsetValue_8" nameView="Offset Value 8" description="补偿值 8" unit="degree" type="Double" max="300" min="0" />
    415. 

  415. 			<config name="TempOffsetPoint_9" nameView="Temp Offset Point 9" description="温度补偿点 9" unit="degree" type="Integer" max="300" min="0" />
    416. 

  416. 			<config name="OffsetValue_9" nameView="Offset Value 9" description="补偿值 9" unit="degree" type="Double" max="300" min="0" />
    417. 

  417. 		</configs>
    418. 

  418. 

  419. 		<configs name="ForelineHeater" nameView="Heater Foreline" >
    420. 

  420. 			<config default="false" name="HeaterEnableTolerance" nameView="Enable Heater Deviation Check" description="" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    421. 

  421. 			<config default="200" name="HeaterAlarmRange" nameView="Heater deviation Alarm Range" description="" max="200" min="0" paramter="" tag="" unit="℃" type="Integer" />
    422. 

  422. 			<config default="10" name="HeaterAlarmTime" nameView="Heater deviation Alarm Time" description="" max="3600" min="0" paramter="" tag="" unit="second" type="Integer" />
    423. 

  423. 			<config default="100" name="HeaterWarningRange" nameView="Heater deviation Warning Range" description="" max="200" min="0" paramter="" tag="" unit="℃" type="Integer" />
    424. 

  424. 			<config default="10" name="HeaterWarningTime" nameView="Heater deviation Warning Time" description="" max="3600" min="0" paramter="" tag="" unit="second" type="Integer" />
    425. 

  425.       <config default="0" name="MonitorTcFeedbackOffset" nameView="Monitor Tc Feedback Offset" description="" max="5" min="-5" paramter="" tag="" unit="℃" type="Double" />
    426. 

  426.       <config default="0" name="ControlTcFeedbackOffset" nameView="Control Tc Feedback Offset" description="" max="5" min="-5" paramter="" tag="" unit="℃" type="Double" />
    427. 

  427. 

  428. 			<config name="TempOffsetPoint_1" nameView="Temp Offset Point 1" description="温度补偿点 1" unit="degree" type="Integer" max="300" min="0" />
    429. 

  429. 			<config name="OffsetValue_1" nameView="Offset Value 1" description="补偿值 1" unit="degree" type="Double" max="300" min="0" />
    430. 

  430. 			<config name="TempOffsetPoint_2" nameView="Temp Offset Point 2" description="温度补偿点 2" unit="degree" type="Integer" max="300" min="0" />
    431. 

  431. 			<config name="OffsetValue_2" nameView="Offset Value 2" description="补偿值 2" unit="degree" type="Double" max="300" min="0" />
    432. 

  432. 			<config name="TempOffsetPoint_3" nameView="Temp Offset Point 3" description="温度补偿点 3" unit="degree" type="Integer" max="300" min="0" />
    433. 

  433. 			<config name="OffsetValue_3" nameView="Offset Value 3" description="补偿值 3" unit="degree" type="Double" max="300" min="0" />
    434. 

  434. 			<config name="TempOffsetPoint_4" nameView="Temp Offset Point 4" description="温度补偿点 4" unit="degree" type="Integer" max="300" min="0" />
    435. 

  435. 			<config name="OffsetValue_4" nameView="Offset Value 4" description="补偿值 4" unit="degree" type="Double" max="300" min="0" />
    436. 

  436. 			<config name="TempOffsetPoint_5" nameView="Temp Offset Point 5" description="温度补偿点 5" unit="degree" type="Integer" max="300" min="0" />
    437. 

  437. 			<config name="OffsetValue_5" nameView="Offset Value 5" description="补偿值 5" unit="degree" type="Double" max="300" min="0" />
    438. 

  438. 			<config name="TempOffsetPoint_6" nameView="Temp Offset Point 6" description="温度补偿点 6" unit="degree" type="Integer" max="300" min="0" />
    439. 

  439. 			<config name="OffsetValue_6" nameView="Offset Value 6" description="补偿值 6" unit="degree" type="Double" max="300" min="0" />
    440. 

  440. 			<config name="TempOffsetPoint_7" nameView="Temp Offset Point 7" description="温度补偿点 7" unit="degree" type="Integer" max="300" min="0" />
    441. 

  441. 			<config name="OffsetValue_7" nameView="Offset Value 7" description="补偿值 7" unit="degree" type="Double" max="300" min="0" />
    442. 

  442. 			<config name="TempOffsetPoint_8" nameView="Temp Offset Point 8" description="温度补偿点 8" unit="degree" type="Integer" max="300" min="0" />
    443. 

  443. 			<config name="OffsetValue_8" nameView="Offset Value 8" description="补偿值 8" unit="degree" type="Double" max="300" min="0" />
    444. 

  444. 			<config name="TempOffsetPoint_9" nameView="Temp Offset Point 9" description="温度补偿点 9" unit="degree" type="Integer" max="300" min="0" />
    445. 

  445. 			<config name="OffsetValue_9" nameView="Offset Value 9" description="补偿值 9" unit="degree" type="Double" max="300" min="0" />
    446. 

  446. 		</configs>
    447. 

  447. 

  448. 		<configs name="GridHeater" nameView="Heater Grid" >
    449. 

  449. 			<config default="false" name="HeaterEnableTolerance" nameView="Enable Heater Deviation Check" description="" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    450. 

  450. 			<config default="200" name="HeaterAlarmRange" nameView="Heater deviation Alarm Range" description="" max="200" min="0" paramter="" tag="" unit="℃" type="Integer" />
    451. 

  451. 			<config default="10" name="HeaterAlarmTime" nameView="Heater deviation Alarm Time" description="" max="3600" min="0" paramter="" tag="" unit="second" type="Integer" />
    452. 

  452. 			<config default="100" name="HeaterWarningRange" nameView="Heater deviation Warning Range" description="" max="200" min="0" paramter="" tag="" unit="℃" type="Integer" />
    453. 

  453. 			<config default="10" name="HeaterWarningTime" nameView="Heater deviation Warning Time" description="" max="3600" min="0" paramter="" tag="" unit="second" type="Integer" />
    454. 

  454.       <config default="0" name="MonitorTcFeedbackOffset" nameView="Monitor Tc Feedback Offset" description="" max="5" min="-5" paramter="" tag="" unit="℃" type="Double" />
    455. 

  455.       <config default="0" name="ControlTcFeedbackOffset" nameView="Control Tc Feedback Offset" description="" max="5" min="-5" paramter="" tag="" unit="℃" type="Double" />
    456. 

  456. 

  457. 			<config name="TempOffsetPoint_1" nameView="Temp Offset Point 1" description="温度补偿点 1" unit="degree" type="Integer" max="300" min="0" />
    458. 

  458. 			<config name="OffsetValue_1" nameView="Offset Value 1" description="补偿值 1" unit="degree" type="Double" max="300" min="0" />
    459. 

  459. 			<config name="TempOffsetPoint_2" nameView="Temp Offset Point 2" description="温度补偿点 2" unit="degree" type="Integer" max="300" min="0" />
    460. 

  460. 			<config name="OffsetValue_2" nameView="Offset Value 2" description="补偿值 2" unit="degree" type="Double" max="300" min="0" />
    461. 

  461. 			<config name="TempOffsetPoint_3" nameView="Temp Offset Point 3" description="温度补偿点 3" unit="degree" type="Integer" max="300" min="0" />
    462. 

  462. 			<config name="OffsetValue_3" nameView="Offset Value 3" description="补偿值 3" unit="degree" type="Double" max="300" min="0" />
    463. 

  463. 			<config name="TempOffsetPoint_4" nameView="Temp Offset Point 4" description="温度补偿点 4" unit="degree" type="Integer" max="300" min="0" />
    464. 

  464. 			<config name="OffsetValue_4" nameView="Offset Value 4" description="补偿值 4" unit="degree" type="Double" max="300" min="0" />
    465. 

  465. 			<config name="TempOffsetPoint_5" nameView="Temp Offset Point 5" description="温度补偿点 5" unit="degree" type="Integer" max="300" min="0" />
    466. 

  466. 			<config name="OffsetValue_5" nameView="Offset Value 5" description="补偿值 5" unit="degree" type="Double" max="300" min="0" />
    467. 

  467. 			<config name="TempOffsetPoint_6" nameView="Temp Offset Point 6" description="温度补偿点 6" unit="degree" type="Integer" max="300" min="0" />
    468. 

  468. 			<config name="OffsetValue_6" nameView="Offset Value 6" description="补偿值 6" unit="degree" type="Double" max="300" min="0" />
    469. 

  469. 			<config name="TempOffsetPoint_7" nameView="Temp Offset Point 7" description="温度补偿点 7" unit="degree" type="Integer" max="300" min="0" />
    470. 

  470. 			<config name="OffsetValue_7" nameView="Offset Value 7" description="补偿值 7" unit="degree" type="Double" max="300" min="0" />
    471. 

  471. 			<config name="TempOffsetPoint_8" nameView="Temp Offset Point 8" description="温度补偿点 8" unit="degree" type="Integer" max="300" min="0" />
    472. 

  472. 			<config name="OffsetValue_8" nameView="Offset Value 8" description="补偿值 8" unit="degree" type="Double" max="300" min="0" />
    473. 

  473. 			<config name="TempOffsetPoint_9" nameView="Temp Offset Point 9" description="温度补偿点 9" unit="degree" type="Integer" max="300" min="0" />
    474. 

  474. 			<config name="OffsetValue_9" nameView="Offset Value 9" description="补偿值 9" unit="degree" type="Double" max="300" min="0" />
    475. 

  475. 		</configs>
    476. 

  476. 		
    477. 

  477. 

  478. 		<!--Clean-->
    479. 

  479. 

  480. 		<configs name="IdleClean" nameView="Idle Clean" visible="false">
    481. 

  481. 			<config default="false" name="IsEnabled" nameView="Is Enabled" description="IsEnabled" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    482. 

  482. 			<config default="" name="IdleCleanRecipe" nameView="Idle Clean Recipe" description="Purge recipe name" max="" min="" paramter="" tag="" unit="" type="String" />
    483. 

  483. 			<config default="3000" name="IdleCleanTime" nameView="Idle Clean Time" description="Idle seconds after which run purge" max="99999" min="1" paramter="" tag="" unit="s" type="Integer" />
    484. 

  484. 		</configs>
    485. 

  485. 

  486. 		<configs name="JobClean" nameView="Job Clean" visible="false">
    487. 

  487. 			<config default="false" name="IsEnabled" nameView="Is Enabled" description="IsEnabled" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    488. 

  488. 			<config default="" name="PreJobCleanRecipe" nameView="PreJob Clean Recipe" description="pre job clean recipe name" max="" min="" paramter="" tag="" unit="" type="String" />
    489. 

  489. 			<config default="" name="CompleteJobCleanRecipe" nameView="CompleteJob Clean Recipe" description="complete job clean recipe name" max="" min="" paramter="" tag="" unit="" type="String" />
    490. 

  490. 			<config default="false" name="EnablePreJobClean" nameView="Enable PreJob Clean" description="Enable PreJob Clean" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    491. 

  491. 			<config default="false" name="EnableCompleteJobClean" nameView="Enable Complete Job Clean" description="Enable Complete Job Clean" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    492. 

  492. 

  493. 			<config default="3000" name="IdleCleanTime" nameView="Idle Clean Time" description="Idle seconds after which run purge" max="864000" min="0" paramter="" tag="" unit="s" type="Integer" />
    494. 

  494. 

  495. 		</configs>
    496. 

  496. 

  497. 

  498. 		<configs name="EPD" nameView="EPD Setting">
    499. 

  499. 			<config default="true" name="IsEnabled" nameView="Is Enabled" description="IsEnabled" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    500. 

  500. 			<config default="0" name="ChannelNumber" nameView="EPD Channel Number" description="channel number" max="32" min="0" paramter="" tag="" unit="" type="Integer" />
    501. 

  501. 		</configs>
    502. 

  502. 

  503. 	</configs>
    504. 

  504. 

  505. 	<!--PMB-->
    506. 

  506. 	<configs name="PMB" nameView="PMB" visible="false">
    507. 

  507.     <config default="3,4,6,8" name="SupportedWaferSize" nameView="腔体支持的Wafer尺寸" description=" " max="0" min="0" paramter="" tag="" unit="" type="String"  visible="false"/>
    508. 

  508.     <config default="3,4,6,8" name="SupportedGuidePinSize" nameView="腔体Guide Pin尺寸" description=" " max="0" min="0" paramter="" tag="" unit="" type="String" visible="false"/>
    509. 

  509. 		<config default="120" name="PrepareTransferTimeout" nameView="Prepare Transfer Timeout" description="prepare transfer time out" max="99999" min="1" paramter="" tag="" unit="s" type="Integer" />
    510. 

  510. 		<config default="1" name="OpenGasValveTimeout" nameView="Open Gas Valve Timeout" description="开阀超时" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
    511. 

  511. 		<config default="1" name="TimeLimitOfCloseGasValve" nameView="Time Limit Of Close Gas Valve" description="" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    512. 

  512. 		<config default="1" name="OpenCloseSlitValveTimeout" nameView="Open Close Slit Valve Timeout" description="" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    513. 

  513. 		<config default="180" name="VentTime" nameView="Vent Time" description="" max="600" min="0" paramter="" tag="" unit="second" type="Integer" />
    514. 

  514. 		<config default="100" name="GasFlowPressureAlarmRange" nameView="Process Pressure Alarm Range" description="" max="760000" min="0" paramter="" tag="" unit="mtorr" type="Double" />
    515. 

  515. 		<config default="60" name="GasFlowPressureAlarmTime" nameView="Process Pressure Alarm Time" description="" max="3600" min="0" paramter="" tag="" unit="second" type="Double" />
    516. 

  516. 		<config default="100" name="GasFlowPressureWarningRange" nameView="Process Pressure Warning Range" description="" max="760000" min="0" paramter="" tag="" unit="mtorr" type="Double" />
    517. 

  517. 		<config default="60" name="GasFlowPressureWarningTime" nameView="Process Pressure Warning Time" description="" max="3600" min="0" paramter="" tag="" unit="second" type="Double" />
    518. 

  518. 		<config default="true" name="EnableThrottleValve" nameView="Enable Throttle Valve" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
    519. 

  519. 		<config default="150" name="ChamberHeaterSetPointLimit" nameView="Chamber Heater Set Point Limit" description="" max="500" min="0" paramter="" tag="" unit="" type="Integer" />
    520. 

  520. 		<config default="140" name="ForeLineHeaterSetPointLimit" nameView="ForeLine Heater Set Point Limit" description="" max="500" min="0" paramter="" tag="" unit="" type="Integer" />
    521. 

  521. 		<config default="120" name="CheckSubstrateTempTimeout" nameView="Check Substrate Temp Timeout" description="" max="3600" min="0" paramter="" tag="" unit="" type="Integer" />
    522. 

  522. 		<config default="90" name="CheckATMTimeout" nameView="Check ATM Timeout" description="" max="3000" min="0" paramter="" tag="" unit="s" type="Integer" />
    523. 

  523. 		<config default="1" name="VentTimeDelay" nameView="Vent Time Delay" description="" max="3000" min="0" paramter="" tag="" unit="s" type="Integer" />
    524. 

  524. 		<config default="780000" name="ChamberBasePressureThreshold" nameView="Chamber Base Pressure Threshold" description="" max="1000000" min="0" paramter="" tag="" unit="mtorr" type="Double" />
    525. 

  525. 		<config default="120" name="ChamberBaseTemperatureThreshold" nameView="Chamber Base Temperature Threshold" description="" max="1000" min="0" paramter="" tag="" unit="°C" type="Double" />
    526. 

  526. 		<config default="10" name="ProcessPressureOffset" nameView="Process Pressure Offset" description="" max="100" min="0" paramter="" tag="" unit="mtorr" type="Double" />
    527. 

  527. 		<config default="7500" name="ChamberVolume" nameView="Chamber Volume" max="100000" min="0" paramter="" tag="" unit="mL" visible="false" type="Double" />
    528. 

  528. 		<config default="25" name="GasTemperature" nameView="Gas Temperature" max="1000" min="-1000" paramter="" tag="" unit="℃" visible="false" type="Double" />
    529. 

  529. 		<config default="9" name="TargetPressureInMFCVerification" nameView="MFC verification中的目标压力" max="100" min="0" paramter="" tag="" unit="Torr" visible="false" type="Double" />
    530. 

  530. 		<config default="180" name="GasFlowTimeInMFCVerification" nameView="MFC verification中的目标时间" max="1000" min="0" paramter="" tag="" unit="second" visible="false" type="Double" />
    531. 

  531. 		<config default="0" name="PinDownDelayTimePick" nameView="Pick Delay Time before pin down" description="" max="120" min="0" paramter="" tag="" unit="s" type="Integer" />
    532. 

  532. 		<config default="0" name="PinDownDelayTimePlace" nameView="Place Delay Time before pin down" description="" max="120" min="0" paramter="" tag="" unit="s" type="Integer" />
    533. 

  533. 		<config default="Strip" name="ChamberLabel"  nameView="Chamber Label" description="Chamber名称" max="" min="" paramter="" tag=""  unit="" type="String" />
    534. 

  534. 		<config default="30" name="MaxDeviationInMFCVerification" nameView="MFC verification允许的最大偏差值（%）" max="100000" min="0" paramter="" tag="" unit="%" visible="false" type="Double" />
    535. 

  535. 		<config default="150" name="WallHeaterSetPointLimit" nameView="Wall Heater Set Point Limit" description="" max="500" min="0" paramter="" tag="" unit="" type="Integer" />
    536. 

  536. 		<config default="false" name="EnableWallHeater" nameView="Enable Chamber Wall Heater" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
    537. 

  537. 		<config default="false" name="EnableGridHeater" nameView="Enable Chamber Grid Heater" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
    538. 

  538. 

  539. 		<config default="5" name="RecipeToleranceIgnoreTime" nameView="Ignore Time Before Check Recipe Step Tolerance" description="" max="60" min="0" paramter="" tag="" unit="s" type="Integer" />
    540. 

  540. 

  541. 		<configs name="MFCVerification" nameView="MFC Verification" >
    542. 

  542. 			<config default="7500" name="ChamberVolume" nameView="Chamber Volume" max="100000" min="0" paramter="" tag="" unit="mL"  visible="false" type="Double" />
    543. 

  543. 			<config default="25" name="GasTemperature" nameView="Gas Temperature" max="1000" min="-1000" paramter="" tag="" unit="℃" visible="false" type="Double" />
    544. 

  544. 			<config default="9" name="TargetPressure" nameView="结束条件：腔体压力达到的最大值" max="100" min="0" paramter="" tag="" unit="Torr" visible="true" type="Double" />
    545. 

  545. 			<config default="180" name="GasFlowTime" nameView="结束条件：流气多长时间" max="1000" min="0" paramter="" tag="" unit="second" visible="true" type="Double" />
    546. 

  546. 			<config default="30" name="MaxDeviation" nameView="结果检查：最大偏差，超过该值报警" max="100000" min="0" paramter="" tag="" unit="%" visible="true" type="Double" />
    547. 

  547. 			<config default="20" name="PressureStableTolerance" nameView="稳定条件：压力1秒内的最大变化范围" max="100000" min="0" paramter="" tag="" unit="mTorr" visible="true" type="Double" />
    548. 

  548. 			<config default="20" name="FlowStableTolerance" nameView="稳定条件：流量设定值和反馈值允许的最大偏差" max="100" min="0" paramter="" tag="" unit="%" visible="true" type="Double" />
    549. 

  549. 			<config default="5" name="CheckStableTimeout" nameView="稳定条件：在多长时间内处于稳定状态" max="100" min="0" paramter="" tag="" unit="%" visible="false" type="Double" />
    550. 

  550. 		</configs>
    551. 

  551. 

  552. 		<configs name="Chiller" nameView="Chiller" >
    553. 

  553. 			<config default="false" name="ChillerSameWithPMA" nameView="Chiller Same With PMA" description="enable chiller same with PMA or not" max="1" min="0" tag="" unit="" type="Bool" />
    554. 

  554. 			<config default="true" name="EnableChiller" nameView="Enable Chiller" description="enable chiller or not" max="1" min="0" tag="" unit="" type="Bool" />
    555. 

  555. 			<config default="1" name="MFG" nameView="MFG" description="厂商, 1:SMC;" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    556. 

  556. 			<config default="1" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    557. 

  557. 			<config default="COM22" name="Port" nameView="Port" description="serial port name of pump" max="" min="" paramter="" tag="" unit="" type="String" />
    558. 

  558. 			<config default="10" name="ChillerTemperatureOffset" nameView="Chiller Temperature Offset" description="" max="100" min="0" paramter="" tag="" unit="degree" type="Double" />
    559. 

  559. 			<config default="300" name="SetPointLimitMax" nameView="Chiller Set Point Limit Max" description="" max="500" min="0" paramter="" tag="" unit="degree" type="Double" />
    560. 

  560. 			<config default="0" name="SetPointLimitMin" nameView="Chiller Set Point Limit Min" description="" max="500" min="0" paramter="" tag="" unit="degree" type="Double" />
    561. 

  561. 			<config default="true" name="EnableToleranceAlarm" nameView="Enable Tolerance Alarm" description="Enable Tolerance Alarm" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
    562. 

  562. 			<config default="20" name="ToleranceAlarmRange" nameView="Tolerance Alarm Range" description="Tolerance Alarm Range" max="200" min="0" paramter="" tag="" unit="℃" type="Integer" />
    563. 

  563. 			<config default="60" name="ToleranceAlarmTime" nameView="Tolerance Alarm Time" description="Tolerance Alarm Time" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
    564. 

  564. 		</configs>
    565. 

  565. 		<configs name="GridChiller" nameView="Grid Chiller" >
    566. 

  566. 			<config default="true" name="EnableChiller" nameView="Enable Chiller" description="enable chiller or not" max="1" min="0" tag="" unit="" type="Bool" />
    567. 

  567. 			<!--<config default="false" name="ChillerSameWithPMB" nameView="Chiller Same With PMB" description="enable chiller same with PMB or not" max="1" min="0" tag="" unit="" type="Bool" />-->
    568. 

  568. 			<config default="1" name="MFG" nameView="MFG" description="厂商, 1:SMC;" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    569. 

  569. 			<config default="1" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    570. 

  570. 			<config default="COM12" name="Port" nameView="Port" description="serial port name of pump" max="" min="" paramter="" tag="" unit="" type="String" />
    571. 

  571. 			<config default="10" name="ChillerTemperatureOffset" nameView="Chiller Temperature Offset" description="" max="10" min="-10" paramter="" tag="" unit="degree" type="Double" />
    572. 

  572. 			<config default="300" name="SetPointLimitMax" nameView="Chiller Set Point Limit Max" description="" max="500" min="0" paramter="" tag="" unit="degree" type="Double" />
    573. 

  573. 			<config default="0" name="SetPointLimitMin" nameView="Chiller Set Point Limit Min" description="" max="500" min="0" paramter="" tag="" unit="degree" type="Double" />
    574. 

  574. 		</configs>
    575. 

  575. 		<configs name="DryPump" nameView="Dry Pump" >
    576. 

  576. 			<config default="1" name="MFG" nameView="MFG" description="厂商, 1:Sky; 2:Edwards; 3:Kashiyama" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    577. 

  577. 			<config default="1" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    578. 

  578. 			<config default="COM23" name="Port" nameView="Port" description="serial port name of pump" max="" min="" paramter="" tag="" unit="" type="String" />
    579. 

  579. 			<config default="1000" name="ChamberForelinePressureThreshold" nameView="Chamber Foreline Pressure Threshold" description="" max="10000" min="0" paramter="" tag="" unit="mtorr" type="Double" />
    580. 

  580. 			<config default="20" name="ChamberForelinePressureTimeout" nameView="Chamber Foreline Pressure Timeout" description="" max="3000" min="0" paramter="" tag="" unit="s" type="Integer" />
    581. 

  581. 		</configs>
    582. 

  582. 		<configs name="Rf" nameView="Source RF" >
    583. 

  583. 			<config default="1" name="MFG" nameView="MFG" description="厂商, 1:AdTec; 2:Comet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    584. 

  584. 			<config default="1" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    585. 

  585. 			<config default="COM24" name="Port" nameView="Port" description="serial port name of RFG" max="" min="" paramter="" tag="" unit="" type="String" />
    586. 

  586. 			<config default="127.0.0.1:502" name="IPAddress" nameView="IP Address" description="EFEM IP,default 127.0.0.1:502" max="" min="" paramter="" tag="" unit="" type="String" />
    587. 

  587. 			<config default="500" name="PowerAlarmRange" nameView="Power Alarm Range" description="" max="1000" min="0" paramter="" tag="" unit="" type="Double" />
    588. 

  588. 			<config default="10" name="PowerAlarmTime" nameView="Power Alarm Time" description="" max="10" min="0" paramter="" tag="" unit="" type="Double" />
    589. 

  589. 			<config default="500" name="PowerWarningRange" nameView="Power Warning Range" description="" max="1000" min="0" paramter="" tag="" unit="" type="Double" />
    590. 

  590. 			<config default="10" name="PowerWarningTime" nameView="Power Warning Time" description="" max="10" min="0" paramter="" tag="" unit="" type="Double" />
    591. 

  591. 			<config default="1" name="ReflectPowerAlarmRange" nameView="Reflect Power Alarm Range" description="" max="1000" min="0" paramter="" tag="" unit="" type="Double" />
    592. 

  592. 			<config default="1" name="ReflectPowerAlarmTime" nameView="Reflect Power Alarm Time" description="" max="10" min="0" paramter="" tag="" unit="" type="Double" />
    593. 

  593. 			<config default="3000" name="PowerRange" nameView="Power Range" description="" max="30000" min="0" paramter="" tag="" unit="" type="Double" />
    594. 

  594. 			<config default="1" name="Coefficient" nameView="Coefficient" description="" max="10" min="0" paramter="" tag="" unit="" type="Double" />
    595. 

  595. 			<config default="false" name="EnablePulsingFunction" nameView="Enable Pulsing Function" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
    596. 

  596. 			<config default="false" name="EnableReflectPower" nameView="Enable Reflect Power" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
    597. 

  597. 			<config default="false" name="EnableVoltageCurrent" nameView="Enable Voltage Current" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
    598. 

  598. 			<config default="1" name="PowerRegulationFactor" nameView="Power Regulation Factor" description="" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    599. 

  599. 			<config default="1000" name="RfPowerAlarmRange" nameView="RF Power Alarm Range" description="" max="10000" min="0" paramter="" tag="" unit="" type="Integer" />
    600. 

  600. 			<config default="3000" name="RfPowerAlarmTime" nameView="RF Power Alarm Time" description="" max="10000" min="0" paramter="" tag="" unit="" type="Integer" />
    601. 

  601. 			<config default="3" name="RFTurnOnTimeout" nameView="RF Turn On Timeout" description="" max="10" min="0" paramter="" tag="" unit="S" type="Integer" />
    602. 

  602. 

  603.       <config default="" name="GeneratorSerialNumber" nameView="RF电源序列号" max="" min="0" paramter="" tag="" unit="" type="String" />
    604. 

  604.       <config default="" name="SensorSerialNumber" nameView="SensorHead序列号" max="" min="0" paramter="" tag="" unit="" type="String" />
    605. 

  605.       <config default="2000" name="RFPhysicalMaxPower" nameView="RF Physical Max Power" description="" max="9999" min="0" paramter="" tag="" unit="" type="Double"  visible="false"/>
    606. 

  606.       <config default="2000" name="CurrentRFMaxPower" nameView="Current RF Max Power" description="" max="2200" min="1800" paramter="" tag="" unit="" type="Double" />
    607. 

  607.       <config default="2000" name="RFCalibratedMaxPower" nameView="RF Calibrated Max Power" description="" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
    608. 

  608.       <config default="false" name="EnableCalibration" nameView="是否校准" max="" min="" paramter="" tag="" unit="" visible="true" type="Bool" />
    609. 

  609.       <config default="100#100;200#200;" name="CalibrationTable" nameView="校准表" max="" min="0" paramter="" tag="" unit="" visible="false" type="String" />
    610. 

  610.       <config default="" name="CalibrationTableDetail" nameView="详细校准表" max="" min="0" paramter="" tag="" unit="" visible="false" type="String" />
    611. 

  611. 		</configs>
    612. 

  612. 		<configs name="match" nameView="Source Match" >
    613. 

  613. 			<config default="false" name="EnableMatch" nameView="Enable Source Match" description="enable match or not" max="1" min="0" tag="" unit="" type="Bool" />
    614. 

  614. 			<config default="1" name="MFG" nameView="MFG" description="厂商, 1:AdTec; 2:Comet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    615. 

  615. 			<config default="1" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    616. 

  616. 			<config default="COM25" name="Port" nameView="Port" description="serial port name of match" max="" min="" paramter="" tag="" unit="" type="String" />
    617. 

  617. 			<config default="127.0.0.1:502" name="IPAddress" nameView="IP Address" description="EFEM IP,default 127.0.0.1:502" max="" min="" paramter="" tag="" unit="" type="String" />
    618. 

  618. 			<config default="1" name="MatchMode" nameView="Match Mode" description="" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    619. 

  619. 			<config default="false" name="EnableC1C2Position" nameView="Enable Source C1 C2 Position" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
    620. 

  620. 			<!--<config default="10" name="MatchPositionC1" nameView="Match Position C1" description="" max="100" min="0" paramter="" tag="" unit="" type="Double" />
    621. 

  621.       <config default="10" name="MatchPositionC2" nameView="Match Position C2" description="" max="100" min="0" paramter="" tag="" unit="" type="Double" />-->
    622. 

  622. 		</configs>
    623. 

  623. 		<configs name="BiasRf" nameView="Bias RF" >
    624. 

  624. 			<config default="true" name="EnableBiasRF" nameView="Enable Bias RF" description="enable bias RF or not" max="1" min="0" tag="" unit="" type="Bool" />
    625. 

  625. 			<config default="2" name="MFG" nameView="MFG" description="厂商, 1:AdTec; 2:Comet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    626. 

  626. 			<config default="2" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    627. 

  627. 			<config default="COM14" name="Port" nameView="Port" description="serial port name of RFG" max="" min="" paramter="" tag="" unit="" type="String" />
    628. 

  628. 			<config default="192.168.10.22:502" name="IPAddress" nameView="IP Address" description="EFEM IP,default 127.0.0.1:502" max="" min="" paramter="" tag="" unit="" type="String" />
    629. 

  629. 			<config default="500" name="PowerAlarmRange" nameView="Power Alarm Range" description="" max="1000" min="0" paramter="" tag="" unit="" type="Double" />
    630. 

  630. 			<config default="10" name="PowerAlarmTime" nameView="Power Alarm Time" description="" max="10" min="0" paramter="" tag="" unit="" type="Double" />
    631. 

  631. 			<config default="500" name="PowerWarningRange" nameView="Power Warning Range" description="" max="1000" min="0" paramter="" tag="" unit="" type="Double" />
    632. 

  632. 			<config default="10" name="PowerWarningTime" nameView="Power Warning Time" description="" max="10" min="0" paramter="" tag="" unit="" type="Double" />
    633. 

  633. 			<config default="1" name="ReflectPowerAlarmRange" nameView="Reflect Power Alarm Range" description="" max="1000" min="0" paramter="" tag="" unit="" type="Double" />
    634. 

  634. 			<config default="1" name="ReflectPowerAlarmTime" nameView="Reflect Power Alarm Time" description="" max="10" min="0" paramter="" tag="" unit="" type="Double" />
    635. 

  635. 			<config default="3000" name="PowerRange" nameView="Power Range" description="" max="30000" min="0" paramter="" tag="" unit="" type="Double" />
    636. 

  636. 			<config default="1" name="Coefficient" nameView="Coefficient" description="" max="10" min="0" paramter="" tag="" unit="" type="Double" />
    637. 

  637. 			<config default="false" name="EnablePulsingFunction" nameView="Enable Pulsing Function" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
    638. 

  638. 			<config default="false" name="EnableReflectPower" nameView="Enable Reflect Power" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
    639. 

  639. 			<config default="false" name="EnableVoltageCurrent" nameView="Enable Voltage Current" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
    640. 

  640. 			<config default="1" name="PowerRegulationFactor" nameView="Power Regulation Factor" description="" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    641. 

  641. 			<config default="1000" name="RfPowerAlarmRange" nameView="RF Power Alarm Range" description="" max="10000" min="0" paramter="" tag="" unit="" type="Integer" />
    642. 

  642. 			<config default="3000" name="RfPowerAlarmTime" nameView="RF Power Alarm Time" description="" max="10000" min="0" paramter="" tag="" unit="" type="Integer" />
    643. 

  643. 

  644.       <config default="" name="GeneratorSerialNumber" nameView="RF电源序列号" max="" min="0" paramter="" tag="" unit="" type="String" />
    645. 

  645.       <config default="" name="SensorSerialNumber" nameView="SensorHead序列号" max="" min="0" paramter="" tag="" unit="" type="String" />
    646. 

  646.       <config default="600" name="RFPhysicalMaxPower" nameView="RF Physical Max Power" description="" max="9999" min="0" paramter="" tag="" unit="" type="Double"  visible="false"/>
    647. 

  647.       <config default="600" name="CurrentRFMaxPower" nameView="Current RF Max Power" description="" max="660" min="540" paramter="" tag="" unit="" type="Double" />
    648. 

  648.       <config default="600" name="RFCalibratedMaxPower" nameView="RF Calibrated Max Power" description="" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
    649. 

  649.       <config default="false" name="EnableCalibration" nameView="是否校准" max="" min="" paramter="" tag="" unit="" visible="true" type="Bool" />
    650. 

  650.       <config default="100#100;200#200;" name="CalibrationTable" nameView="校准表" max="" min="0" paramter="" tag="" unit="" visible="false" type="String" />
    651. 

  651.       <config default="" name="CalibrationTableDetail" nameView="详细校准表" max="" min="0" paramter="" tag="" unit="" visible="false" type="String" />
    652. 

  652. 		</configs>
    653. 

  653. 		<configs name="BiasMatch" nameView="Bias Match" >
    654. 

  654. 			<config default="false" name="EnableBiasMatch" nameView="Enable Bias Match" description="enable bias match or not" max="1" min="0" tag="" unit="" type="Bool" />
    655. 

  655. 			<config default="2" name="MFG" nameView="MFG" description="厂商, 1:AdTec; 2:Comet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    656. 

  656. 			<config default="2" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    657. 

  657. 			<config default="COM15" name="Port" nameView="Port" description="serial port name of match" max="" min="" paramter="" tag="" unit="" type="String" />
    658. 

  658. 			<config default="192.168.10.22:502" name="IPAddress" nameView="IP Address" description="EFEM IP,default 127.0.0.1:502" max="" min="" paramter="" tag="" unit="" type="String" />
    659. 

  659. 			<config default="1" name="MatchMode" nameView="Match Mode" description="" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    660. 

  660. 			<config default="false" name="EnableBiasC1C2Position" nameView="Enable Bias C1 C2 Position" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
    661. 

  661. 		</configs>
    662. 

  662. 		<configs name="MfcGas1" nameView="MFC Gas1" >
    663. 

  663. 			<config default="true" name="Enable" nameView="Enable" description="Enable gas 1 or not" tag="" unit="" type="Bool" />
    664. 

  664. 			<config default="O2" name="GasName" nameView="Gas Name" description="Name of NO.1 gas stick" tag="" unit="" type="String" />
    665. 

  665. 			<config default="100" name="MfcN2Scale" nameView="MFC N2 Scale" description="Max scale by N2 tuning" max="10000" min="0" tag="" unit="sccm" type="Integer" />
    666. 

  666. 			<config default="1" name="MfcScaleFactor" nameView="MFC Scale Factor" description="Scale factor" max="10" min="0" tag="" unit="sccm" type="Double" />
    667. 

  667. 			<config default="100" name="DefaultSetPoint" nameView="Default Set Point" description="default setpoint" max="1000" min="0" tag="" unit="sccm" type="Integer" />
    668. 

  668. 			<config default="1" name="FlowRegulationFactor" nameView="Flow Regulation Factor" description="flow regulation factor" max="10" min="0" tag="" unit="sccm" type="Integer" />
    669. 

  669. 			<config default="true" name="MfcEnableAlarm" nameView="MFC Enable Alarm" description="" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
    670. 

  670. 			<config default="10" name="MfcAlarmRange" nameView="MFC Alarm Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
    671. 

  671. 			<config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
    672. 

  672. 			<config default="10" name="MfcWarningRange" nameView="MFC Warning Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
    673. 

  673. 			<config default="10" name="MfcWarningTime" nameView="MFC Warning Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
    674. 

  674. 		</configs>
    675. 

  675. 		<configs name="MfcGas2" nameView="MFC Gas2" >
    676. 

  676. 			<config default="true" name="Enable" nameView="Enable" description="Enable gas 2 or not" tag="" unit="" type="Bool" />
    677. 

  677. 			<config default="N2" name="GasName" nameView="Gas Name" description="Name of NO.2 gas stick" tag="" unit="" type="String" />
    678. 

  678. 			<config default="100" name="MfcN2Scale" nameView="MFC N2 Scale" description="Max scale by N2 tuning" max="10000" min="0" tag="" unit="sccm" type="Integer" />
    679. 

  679. 			<config default="1" name="MfcScaleFactor" nameView="MFC Scale Factor" description="Scale factor" max="10" min="0" tag="" unit="sccm" type="Double" />
    680. 

  680. 			<config default="100" name="DefaultSetPoint" nameView="Default Set Point" description="default setpoint" max="1000" min="0" tag="" unit="sccm" type="Integer" />
    681. 

  681. 			<config default="1" name="FlowRegulationFactor" nameView="Flow Regulation Factor" description="flow regulation factor" max="10" min="0" tag="" unit="sccm" type="Integer" />
    682. 

  682. 			<config default="true" name="MfcEnableAlarm" nameView="MFC Enable Alarm" description="" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
    683. 

  683. 			<config default="10" name="MfcAlarmRange" nameView="MFC Alarm Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
    684. 

  684. 			<config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
    685. 

  685. 			<config default="10" name="MfcWarningRange" nameView="MFC Warning Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
    686. 

  686. 			<config default="10" name="MfcWarningTime" nameView="MFC Warning Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
    687. 

  687. 		</configs>
    688. 

  688. 		<configs name="MfcGas3" nameView="MFC Gas3" >
    689. 

  689. 			<config default="true" name="Enable" nameView="Enable" description="Enable gas 3 or not" tag="" unit="" type="Bool" />
    690. 

  690. 			<config default="AR" name="GasName" nameView="Gas Name" description="Name of NO.3 gas stick" tag="" unit="" type="String" />
    691. 

  691. 			<config default="100" name="MfcN2Scale" nameView="MFC N2 Scale" description="Max scale by N2 tuning" max="10000" min="0" tag="" unit="sccm" type="Integer" />
    692. 

  692. 			<config default="1" name="MfcScaleFactor" nameView="MFC Scale Factor" description="Scale factor" max="10" min="0" tag="" unit="sccm" type="Double" />
    693. 

  693. 			<config default="100" name="DefaultSetPoint" nameView="Default Set Point" description="default setpoint" max="1000" min="0" tag="" unit="sccm" type="Integer" />
    694. 

  694. 			<config default="1" name="FlowRegulationFactor" nameView="Flow Regulation Factor" description="flow regulation factor" max="10" min="0" tag="" unit="sccm" type="Integer" />
    695. 

  695. 			<config default="true" name="MfcEnableAlarm" nameView="MFC Enable Alarm" description="" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
    696. 

  696. 			<config default="10" name="MfcAlarmRange" nameView="MFC Alarm Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
    697. 

  697. 			<config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
    698. 

  698. 			<config default="10" name="MfcWarningRange" nameView="MFC Warning Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
    699. 

  699. 			<config default="10" name="MfcWarningTime" nameView="MFC Warning Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
    700. 

  700. 		</configs>
    701. 

  701. 		<configs name="MfcGas4" nameView="MFC Gas4" >
    702. 

  702. 			<config default="true" name="Enable" nameView="Enable" description="Enable gas 4 or not" tag="" unit="" type="Bool" />
    703. 

  703. 			<config default="Gas4" name="GasName" nameView="Gas Name" description="Name of NO.4 gas stick" tag="" unit="" type="String" />
    704. 

  704. 			<config default="100" name="MfcN2Scale" nameView="MFC N2 Scale" description="Max scale by N2 tuning" max="10000" min="0" tag="" unit="sccm" type="Integer" />
    705. 

  705. 			<config default="1" name="MfcScaleFactor" nameView="MFC Scale Factor" description="Scale factor" max="10" min="0" tag="" unit="sccm" type="Double" />
    706. 

  706. 			<config default="100" name="DefaultSetPoint" nameView="Default Set Point" description="default setpoint" max="1000" min="0" tag="" unit="sccm" type="Integer" />
    707. 

  707. 			<config default="1" name="FlowRegulationFactor" nameView="Flow Regulation Factor" description="flow regulation factor" max="10" min="0" tag="" unit="sccm" type="Integer" />
    708. 

  708. 			<config default="true" name="MfcEnableAlarm" nameView="MFC Enable Alarm" description="MFC Enable Alarm" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
    709. 

  709. 			<config default="10" name="MfcAlarmRange" nameView="MFC Alarm Range" description="MFC Alarm Range" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
    710. 

  710. 			<config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="MFC Alarm Time" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
    711. 

  711. 			<config default="10" name="MfcWarningRange" nameView="MFC Warning Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
    712. 

  712. 			<config default="10" name="MfcWarningTime" nameView="MFC Warning Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
    713. 

  713. 		</configs>
    714. 

  714. 		<configs name="MfcGas5" nameView="MFC Gas5" >
    715. 

  715. 			<config default="true" name="Enable" nameView="Enable" description="Enable gas 5 or not" tag="" unit="" type="Bool" />
    716. 

  716. 			<config default="Gas5" name="GasName" nameView="Gas Name" description="Name of NO.5 gas stick" tag="" unit="" type="String" />
    717. 

  717. 			<config default="100" name="MfcN2Scale" nameView="MFC N2 Scale" description="Max scale by N2 tuning" max="10000" min="0" tag="" unit="sccm" type="Integer" />
    718. 

  718. 			<config default="1" name="MfcScaleFactor" nameView="MFC Scale Factor" description="Scale factor" max="10" min="0" tag="" unit="sccm" type="Double" />
    719. 

  719. 			<config default="100" name="DefaultSetPoint" nameView="Default Set Point" description="default setpoint" max="1000" min="0" tag="" unit="sccm" type="Integer" />
    720. 

  720. 			<config default="1" name="FlowRegulationFactor" nameView="Flow Regulation Factor" description="flow regulation factor" max="10" min="0" tag="" unit="sccm" type="Integer" />
    721. 

  721. 			<config default="true" name="MfcEnableAlarm" nameView="MFC Enable Alarm" description="MFC Enable Alarm" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
    722. 

  722. 			<config default="10" name="MfcAlarmRange" nameView="MFC Alarm Range" description="MFC Alarm Range" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
    723. 

  723. 			<config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="MFC Alarm Time" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
    724. 

  724. 			<config default="10" name="MfcWarningRange" nameView="MFC Warning Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
    725. 

  725. 			<config default="10" name="MfcWarningTime" nameView="MFC Warning Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
    726. 

  726. 		</configs>
    727. 

  727. 		<configs name="Pump" nameView="Pump" >
    728. 

  728. 			<config default="30" name="LeakRate" nameView="Leak Rate" description="" max="756000" min="0" paramter="" tag="" unit="mTorrPerMin" type="Double" />
    729. 

  729. 			<config default="180" name="LeakCheckPumpingTime" nameView="Leak Check Pumping Time" description="" max="3000" min="0" paramter="" tag="" unit="" type="Integer" />
    730. 

  730. 			<config default="180" name="LeakCheckWaitTime" nameView="Leak Check Wait Time" description="" max="3000" min="0" paramter="" tag="" unit="" type="Integer" />
    731. 

  731. 			<config default="150" name="PumpBasePressure" nameView="Pump Base Pressure" description="" max="756000" min="0" paramter="" tag="" unit="mTorr" type="Integer" />
    732. 

  732. 			<config default="120" name="PumpTimeLimit" nameView="Pump Time Limit" description="" max="3000" min="0" paramter="" tag="" unit="" type="Double" />
    733. 

  733. 			<config default="5" name="PumpValveDelay" nameView="Pump Valve Delay" description="" max="3000" min="0" paramter="" tag="" unit="s" type="Integer" />
    734. 

  734. 		</configs>
    735. 

  735. 		<configs name="Purge" nameView="Purge" >
    736. 

  736. 			<config default="3" name="PurgeCycleCount" nameView="Purge Cycle Count" description="" max="30" min="0" paramter="" tag="" unit="times" type="Double" />
    737. 

  737. 			<config default="700000" name="PurgeVentPressure" nameView="Purge Vent Pressure" description="" max="760000" min="0" paramter="" tag="" unit="mtorr" type="Double" />
    738. 

  738. 			<config default="10" name="PurgePumpPressure" nameView="Purge Pump Pressure" description="" max="760000" min="0" paramter="" tag="" unit="mtorr" type="Double" />
    739. 

  739. 			<config default="60" name="PurgeVentTimeLimit" nameView="Purge Vent Time Limit" description="" max="3600" min="0" paramter="" tag="" unit="second" type="Double" />
    740. 

  740. 			<config default="60" name="PurgePumpTimeLimit" nameView="Purge Pump Time Limit" description="" max="3600" min="0" paramter="" tag="" unit="second" type="Double" />
    741. 

  741. 			<config default="10" name="PurgeVentStableTime" nameView="Purge Vent Stable Time" description="" max="600" min="0" paramter="" tag="" unit="second" type="Double" />
    742. 

  742. 			<config default="10" name="PurgePumpStableTime" nameView="Purge Pump Stable Time" description="" max="600" min="0" paramter="" tag="" unit="second" type="Double" />
    743. 

  743. 		</configs>
    744. 

  744. 		<configs name="HeaterChamber" nameView="Heater Substrate" >
    745. 

  745. 			<config default="false" name="HeaterEnableTolerance" nameView="Enable Heater Deviation Check" description="" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    746. 

  746. 			<config default="200" name="HeaterAlarmRange" nameView="Heater deviation Alarm Range" description="" max="200" min="0" paramter="" tag="" unit="℃" type="Integer" />
    747. 

  747. 			<config default="10" name="HeaterAlarmTime" nameView="Heater deviation Alarm Time" description="" max="3600" min="0" paramter="" tag="" unit="second" type="Integer" />
    748. 

  748. 			<config default="100" name="HeaterWarningRange" nameView="Heater deviation Warning Range" description="" max="200" min="0" paramter="" tag="" unit="℃" type="Integer" />
    749. 

  749. 			<config default="10" name="HeaterWarningTime" nameView="Heater deviation Warning Time" description="" max="3600" min="0" paramter="" tag="" unit="second" type="Integer" />
    750. 

  750.       <config default="0" name="MonitorTcFeedbackOffset" nameView="Monitor Tc Feedback Offset" description="" max="5" min="-5" paramter="" tag="" unit="℃" type="Double" />
    751. 

  751.       <config default="0" name="ControlTcFeedbackOffset" nameView="Control Tc Feedback Offset" description="" max="5" min="-5" paramter="" tag="" unit="℃" type="Double" />
    752. 

  752. 

  753. 			<config name="TempOffsetPoint_1" nameView="Temp Offset Point 1" description="温度补偿点 1" unit="degree" type="Integer" max="300" min="0" />
    754. 

  754. 			<config name="OffsetValue_1" nameView="Offset Value 1" description="补偿值 1" unit="degree" type="Double" max="300" min="0" />
    755. 

  755. 			<config name="TempOffsetPoint_2" nameView="Temp Offset Point 2" description="温度补偿点 2" unit="degree" type="Integer" max="300" min="0" />
    756. 

  756. 			<config name="OffsetValue_2" nameView="Offset Value 2" description="补偿值 2" unit="degree" type="Double" max="300" min="0" />
    757. 

  757. 			<config name="TempOffsetPoint_3" nameView="Temp Offset Point 3" description="温度补偿点 3" unit="degree" type="Integer" max="300" min="0" />
    758. 

  758. 			<config name="OffsetValue_3" nameView="Offset Value 3" description="补偿值 3" unit="degree" type="Double" max="300" min="0" />
    759. 

  759. 			<config name="TempOffsetPoint_4" nameView="Temp Offset Point 4" description="温度补偿点 4" unit="degree" type="Integer" max="300" min="0" />
    760. 

  760. 			<config name="OffsetValue_4" nameView="Offset Value 4" description="补偿值 4" unit="degree" type="Double" max="300" min="0" />
    761. 

  761. 			<config name="TempOffsetPoint_5" nameView="Temp Offset Point 5" description="温度补偿点 5" unit="degree" type="Integer" max="300" min="0" />
    762. 

  762. 			<config name="OffsetValue_5" nameView="Offset Value 5" description="补偿值 5" unit="degree" type="Double" max="300" min="0" />
    763. 

  763. 			<config name="TempOffsetPoint_6" nameView="Temp Offset Point 6" description="温度补偿点 6" unit="degree" type="Integer" max="300" min="0" />
    764. 

  764. 			<config name="OffsetValue_6" nameView="Offset Value 6" description="补偿值 6" unit="degree" type="Double" max="300" min="0" />
    765. 

  765. 			<config name="TempOffsetPoint_7" nameView="Temp Offset Point 7" description="温度补偿点 7" unit="degree" type="Integer" max="300" min="0" />
    766. 

  766. 			<config name="OffsetValue_7" nameView="Offset Value 7" description="补偿值 7" unit="degree" type="Double" max="300" min="0" />
    767. 

  767. 			<config name="TempOffsetPoint_8" nameView="Temp Offset Point 8" description="温度补偿点 8" unit="degree" type="Integer" max="300" min="0" />
    768. 

  768. 			<config name="OffsetValue_8" nameView="Offset Value 8" description="补偿值 8" unit="degree" type="Double" max="300" min="0" />
    769. 

  769. 			<config name="TempOffsetPoint_9" nameView="Temp Offset Point 9" description="温度补偿点 9" unit="degree" type="Integer" max="300" min="0" />
    770. 

  770. 			<config name="OffsetValue_9" nameView="Offset Value 9" description="补偿值 9" unit="degree" type="Double" max="300" min="0" />
    771. 

  771. 		</configs>
    772. 

  772. 

  773. 		<configs name="WallHeater" nameView="Heater Wall" >
    774. 

  774. 			<config default="false" name="HeaterEnableTolerance" nameView="Enable Heater Deviation Check" description="" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    775. 

  775. 			<config default="200" name="HeaterAlarmRange" nameView="Heater deviation Alarm Range" description="" max="200" min="0" paramter="" tag="" unit="℃" type="Integer" />
    776. 

  776. 			<config default="10" name="HeaterAlarmTime" nameView="Heater deviation Alarm Time" description="" max="3600" min="0" paramter="" tag="" unit="second" type="Integer" />
    777. 

  777. 			<config default="100" name="HeaterWarningRange" nameView="Heater deviation Warning Range" description="" max="200" min="0" paramter="" tag="" unit="℃" type="Integer" />
    778. 

  778. 			<config default="10" name="HeaterWarningTime" nameView="Heater deviation Warning Time" description="" max="3600" min="0" paramter="" tag="" unit="second" type="Integer" />
    779. 

  779.       <config default="0" name="MonitorTcFeedbackOffset" nameView="Monitor Tc Feedback Offset" description="" max="5" min="-5" paramter="" tag="" unit="℃" type="Double" />
    780. 

  780.       <config default="0" name="ControlTcFeedbackOffset" nameView="Control Tc Feedback Offset" description="" max="5" min="-5" paramter="" tag="" unit="℃" type="Double" />
    781. 

  781. 

  782. 			<config name="TempOffsetPoint_1" nameView="Temp Offset Point 1" description="温度补偿点 1" unit="degree" type="Integer" max="300" min="0" />
    783. 

  783. 			<config name="OffsetValue_1" nameView="Offset Value 1" description="补偿值 1" unit="degree" type="Double" max="300" min="0" />
    784. 

  784. 			<config name="TempOffsetPoint_2" nameView="Temp Offset Point 2" description="温度补偿点 2" unit="degree" type="Integer" max="300" min="0" />
    785. 

  785. 			<config name="OffsetValue_2" nameView="Offset Value 2" description="补偿值 2" unit="degree" type="Double" max="300" min="0" />
    786. 

  786. 			<config name="TempOffsetPoint_3" nameView="Temp Offset Point 3" description="温度补偿点 3" unit="degree" type="Integer" max="300" min="0" />
    787. 

  787. 			<config name="OffsetValue_3" nameView="Offset Value 3" description="补偿值 3" unit="degree" type="Double" max="300" min="0" />
    788. 

  788. 			<config name="TempOffsetPoint_4" nameView="Temp Offset Point 4" description="温度补偿点 4" unit="degree" type="Integer" max="300" min="0" />
    789. 

  789. 			<config name="OffsetValue_4" nameView="Offset Value 4" description="补偿值 4" unit="degree" type="Double" max="300" min="0" />
    790. 

  790. 			<config name="TempOffsetPoint_5" nameView="Temp Offset Point 5" description="温度补偿点 5" unit="degree" type="Integer" max="300" min="0" />
    791. 

  791. 			<config name="OffsetValue_5" nameView="Offset Value 5" description="补偿值 5" unit="degree" type="Double" max="300" min="0" />
    792. 

  792. 			<config name="TempOffsetPoint_6" nameView="Temp Offset Point 6" description="温度补偿点 6" unit="degree" type="Integer" max="300" min="0" />
    793. 

  793. 			<config name="OffsetValue_6" nameView="Offset Value 6" description="补偿值 6" unit="degree" type="Double" max="300" min="0" />
    794. 

  794. 			<config name="TempOffsetPoint_7" nameView="Temp Offset Point 7" description="温度补偿点 7" unit="degree" type="Integer" max="300" min="0" />
    795. 

  795. 			<config name="OffsetValue_7" nameView="Offset Value 7" description="补偿值 7" unit="degree" type="Double" max="300" min="0" />
    796. 

  796. 			<config name="TempOffsetPoint_8" nameView="Temp Offset Point 8" description="温度补偿点 8" unit="degree" type="Integer" max="300" min="0" />
    797. 

  797. 			<config name="OffsetValue_8" nameView="Offset Value 8" description="补偿值 8" unit="degree" type="Double" max="300" min="0" />
    798. 

  798. 			<config name="TempOffsetPoint_9" nameView="Temp Offset Point 9" description="温度补偿点 9" unit="degree" type="Integer" max="300" min="0" />
    799. 

  799. 			<config name="OffsetValue_9" nameView="Offset Value 9" description="补偿值 9" unit="degree" type="Double" max="300" min="0" />
    800. 

  800. 		</configs>
    801. 

  801. 

  802. 		<configs name="ForelineHeater" nameView="Heater Foreline" >
    803. 

  803. 			<config default="false" name="HeaterEnableTolerance" nameView="Enable Heater Deviation Check" description="" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    804. 

  804. 			<config default="200" name="HeaterAlarmRange" nameView="Heater deviation Alarm Range" description="" max="200" min="0" paramter="" tag="" unit="℃" type="Integer" />
    805. 

  805. 			<config default="10" name="HeaterAlarmTime" nameView="Heater deviation Alarm Time" description="" max="3600" min="0" paramter="" tag="" unit="second" type="Integer" />
    806. 

  806. 			<config default="100" name="HeaterWarningRange" nameView="Heater deviation Warning Range" description="" max="200" min="0" paramter="" tag="" unit="℃" type="Integer" />
    807. 

  807. 			<config default="10" name="HeaterWarningTime" nameView="Heater deviation Warning Time" description="" max="3600" min="0" paramter="" tag="" unit="second" type="Integer" />
    808. 

  808. 			<config default="10" name="HeaterWarningTime" nameView="Heater deviation Warning Time" description="" max="3600" min="0" paramter="" tag="" unit="second" type="Integer" />
    809. 

  809.       <config default="0" name="MonitorTcFeedbackOffset" nameView="Monitor Tc Feedback Offset" description="" max="5" min="-5" paramter="" tag="" unit="℃" type="Double" />
    810. 

  810.       <config default="0" name="ControlTcFeedbackOffset" nameView="Control Tc Feedback Offset" description="" max="5" min="-5" paramter="" tag="" unit="℃" type="Double" />
    811. 

  811. 

  812. 			<config name="TempOffsetPoint_1" nameView="Temp Offset Point 1" description="温度补偿点 1" unit="degree" type="Integer" max="300" min="0" />
    813. 

  813. 			<config name="OffsetValue_1" nameView="Offset Value 1" description="补偿值 1" unit="degree" type="Double" max="300" min="0" />
    814. 

  814. 			<config name="TempOffsetPoint_2" nameView="Temp Offset Point 2" description="温度补偿点 2" unit="degree" type="Integer" max="300" min="0" />
    815. 

  815. 			<config name="OffsetValue_2" nameView="Offset Value 2" description="补偿值 2" unit="degree" type="Double" max="300" min="0" />
    816. 

  816. 			<config name="TempOffsetPoint_3" nameView="Temp Offset Point 3" description="温度补偿点 3" unit="degree" type="Integer" max="300" min="0" />
    817. 

  817. 			<config name="OffsetValue_3" nameView="Offset Value 3" description="补偿值 3" unit="degree" type="Double" max="300" min="0" />
    818. 

  818. 			<config name="TempOffsetPoint_4" nameView="Temp Offset Point 4" description="温度补偿点 4" unit="degree" type="Integer" max="300" min="0" />
    819. 

  819. 			<config name="OffsetValue_4" nameView="Offset Value 4" description="补偿值 4" unit="degree" type="Double" max="300" min="0" />
    820. 

  820. 			<config name="TempOffsetPoint_5" nameView="Temp Offset Point 5" description="温度补偿点 5" unit="degree" type="Integer" max="300" min="0" />
    821. 

  821. 			<config name="OffsetValue_5" nameView="Offset Value 5" description="补偿值 5" unit="degree" type="Double" max="300" min="0" />
    822. 

  822. 			<config name="TempOffsetPoint_6" nameView="Temp Offset Point 6" description="温度补偿点 6" unit="degree" type="Integer" max="300" min="0" />
    823. 

  823. 			<config name="OffsetValue_6" nameView="Offset Value 6" description="补偿值 6" unit="degree" type="Double" max="300" min="0" />
    824. 

  824. 			<config name="TempOffsetPoint_7" nameView="Temp Offset Point 7" description="温度补偿点 7" unit="degree" type="Integer" max="300" min="0" />
    825. 

  825. 			<config name="OffsetValue_7" nameView="Offset Value 7" description="补偿值 7" unit="degree" type="Double" max="300" min="0" />
    826. 

  826. 			<config name="TempOffsetPoint_8" nameView="Temp Offset Point 8" description="温度补偿点 8" unit="degree" type="Integer" max="300" min="0" />
    827. 

  827. 			<config name="OffsetValue_8" nameView="Offset Value 8" description="补偿值 8" unit="degree" type="Double" max="300" min="0" />
    828. 

  828. 			<config name="TempOffsetPoint_9" nameView="Temp Offset Point 9" description="温度补偿点 9" unit="degree" type="Integer" max="300" min="0" />
    829. 

  829. 			<config name="OffsetValue_9" nameView="Offset Value 9" description="补偿值 9" unit="degree" type="Double" max="300" min="0" />
    830. 

  830. 		</configs>
    831. 

  831. 

  832. 		<configs name="GridHeater" nameView="Heater Grid" >
    833. 

  833. 			<config default="false" name="HeaterEnableTolerance" nameView="Enable Heater deviation Check" description="" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    834. 

  834. 			<config default="200" name="HeaterAlarmRange" nameView="Heater deviation Alarm Range" description="" max="200" min="0" paramter="" tag="" unit="℃" type="Integer" />
    835. 

  835. 			<config default="10" name="HeaterAlarmTime" nameView="Heater deviation Alarm Time" description="" max="3600" min="0" paramter="" tag="" unit="second" type="Integer" />
    836. 

  836. 			<config default="100" name="HeaterWarningRange" nameView="Heater deviation Warning Range" description="" max="200" min="0" paramter="" tag="" unit="℃" type="Integer" />
    837. 

  837. 			<config default="10" name="HeaterWarningTime" nameView="Heater deviation Warning Time" description="" max="3600" min="0" paramter="" tag="" unit="second" type="Integer" />
    838. 

  838.       <config default="0" name="MonitorTcFeedbackOffset" nameView="Monitor Tc Feedback Offset" description="" max="5" min="-5" paramter="" tag="" unit="℃" type="Double" />
    839. 

  839.       <config default="0" name="ControlTcFeedbackOffset" nameView="Control Tc Feedback Offset" description="" max="5" min="-5" paramter="" tag="" unit="℃" type="Double" />
    840. 

  840. 

  841. 			<config name="TempOffsetPoint_1" nameView="Temp Offset Point 1" description="温度补偿点 1" unit="degree" type="Integer" max="300" min="0" />
    842. 

  842. 			<config name="OffsetValue_1" nameView="Offset Value 1" description="补偿值 1" unit="degree" type="Double" max="300" min="0" />
    843. 

  843. 			<config name="TempOffsetPoint_2" nameView="Temp Offset Point 2" description="温度补偿点 2" unit="degree" type="Integer" max="300" min="0" />
    844. 

  844. 			<config name="OffsetValue_2" nameView="Offset Value 2" description="补偿值 2" unit="degree" type="Double" max="300" min="0" />
    845. 

  845. 			<config name="TempOffsetPoint_3" nameView="Temp Offset Point 3" description="温度补偿点 3" unit="degree" type="Integer" max="300" min="0" />
    846. 

  846. 			<config name="OffsetValue_3" nameView="Offset Value 3" description="补偿值 3" unit="degree" type="Double" max="300" min="0" />
    847. 

  847. 			<config name="TempOffsetPoint_4" nameView="Temp Offset Point 4" description="温度补偿点 4" unit="degree" type="Integer" max="300" min="0" />
    848. 

  848. 			<config name="OffsetValue_4" nameView="Offset Value 4" description="补偿值 4" unit="degree" type="Double" max="300" min="0" />
    849. 

  849. 			<config name="TempOffsetPoint_5" nameView="Temp Offset Point 5" description="温度补偿点 5" unit="degree" type="Integer" max="300" min="0" />
    850. 

  850. 			<config name="OffsetValue_5" nameView="Offset Value 5" description="补偿值 5" unit="degree" type="Double" max="300" min="0" />
    851. 

  851. 			<config name="TempOffsetPoint_6" nameView="Temp Offset Point 6" description="温度补偿点 6" unit="degree" type="Integer" max="300" min="0" />
    852. 

  852. 			<config name="OffsetValue_6" nameView="Offset Value 6" description="补偿值 6" unit="degree" type="Double" max="300" min="0" />
    853. 

  853. 			<config name="TempOffsetPoint_7" nameView="Temp Offset Point 7" description="温度补偿点 7" unit="degree" type="Integer" max="300" min="0" />
    854. 

  854. 			<config name="OffsetValue_7" nameView="Offset Value 7" description="补偿值 7" unit="degree" type="Double" max="300" min="0" />
    855. 

  855. 			<config name="TempOffsetPoint_8" nameView="Temp Offset Point 8" description="温度补偿点 8" unit="degree" type="Integer" max="300" min="0" />
    856. 

  856. 			<config name="OffsetValue_8" nameView="Offset Value 8" description="补偿值 8" unit="degree" type="Double" max="300" min="0" />
    857. 

  857. 			<config name="TempOffsetPoint_9" nameView="Temp Offset Point 9" description="温度补偿点 9" unit="degree" type="Integer" max="300" min="0" />
    858. 

  858. 			<config name="OffsetValue_9" nameView="Offset Value 9" description="补偿值 9" unit="degree" type="Double" max="300" min="0" />
    859. 

  859. 		</configs>
    860. 

  860. 

  861. 

  862. 

  863. 		<!--Clean-->
    864. 

  864. 

  865. 		<configs name="IdleClean" nameView="Idle Clean" visible="false">
    866. 

  866. 			<config default="false" name="IsEnabled" nameView="Is Enabled" description="IsEnabled" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    867. 

  867. 			<config default="" name="IdleCleanRecipe" nameView="Idle Clean Recipe" description="Purge recipe name" max="" min="" paramter="" tag="" unit="" type="String" />
    868. 

  868. 			<config default="3000" name="IdleCleanTime" nameView="Idle Clean Time" description="Idle seconds after which run purge" max="99999" min="1" paramter="" tag="" unit="s" type="Integer" />
    869. 

  869. 		</configs>
    870. 

  870. 

  871. 		<configs name="JobClean" nameView="Job Clean" visible="false">
    872. 

  872. 			<config default="false" name="IsEnabled" nameView="Is Enabled" description="IsEnabled" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    873. 

  873. 			<config default="" name="PreJobCleanRecipe" nameView="PreJob Clean Recipe" description="pre job clean recipe name" max="" min="" paramter="" tag="" unit="" type="String" />
    874. 

  874. 			<config default="" name="CompleteJobCleanRecipe" nameView="CompleteJob Clean Recipe" description="complete job clean recipe name" max="" min="" paramter="" tag="" unit="" type="String" />
    875. 

  875. 			<config default="false" name="EnablePreJobClean" nameView="Enable PreJob Clean" description="Enable PreJob Clean" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    876. 

  876. 			<config default="false" name="EnableCompleteJobClean" nameView="Enable Complete Job Clean" description="Enable Complete Job Clean" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    877. 

  877. 			<config default="3000" name="IdleCleanTime" nameView="Idle Clean Time" description="Idle seconds after which run purge" max="864000" min="0" paramter="" tag="" unit="s" type="Integer" />
    878. 

  878. 		</configs>
    879. 

  879. 

  880. 		<configs name="EPD" nameView="EPD Setting">
    881. 

  881. 			<config default="true" name="IsEnabled" nameView="Is Enabled" description="IsEnabled" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    882. 

  882. 			<config default="1" name="ChannelNumber" nameView="EPD Channel Number" description="channel number" max="32" min="0" paramter="" tag="" unit="" type="Integer" />
    883. 

  883. 		</configs>
    884. 

  884. 	</configs>
    885. 

  885. </root>
    886.