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Virgo_ST
/
VirgoRT
/
Config
/
RecipeFormat.xml

RecipeFormat.xml 17 KB
永久链接 文件历史 原始文件

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  1. <?xml version="1.0" encoding="utf-8"?>
    2. 

  2. <Aitex>
    3. 

  3. 	<TableRecipeFormat RecipeVersion="Virgo">
    4. 

  4. 		<!--###########################################-->
    5. 

  5. 		<Catalog DisplayName="StepInfo">
    6. 

  6. 			<Group DisplayName="Set">
    7. 

  7. 				<Step ModuleName="" DeviceType="" DisplayName="No." ControlName="StepNo" InputType="ReadOnly" />
    8. 

  8. 				<Step ModuleName="" DeviceType="" DisplayName="Name" ControlName="Name" InputType="TextInput" />
    9. 

  9. 				<Step ModuleName="" DeviceType="" DisplayName="Loop" ControlName="Loop" InputType="EditableSelection" Description="Loop set：set as  Loop Num ... LoopEnd">
    10. 

  10. 					<Item DisplayName=" " ControlName="None" />
    11. 

  11. 					<Item DisplayName="Loop 10" ControlName="LoopStart" />
    12. 

  12. 					<Item DisplayName="Loop End" ControlName="LoopEnd" />
    13. 

  13. 				</Step>
    14. 

  14. 

  15. 				<Step ModuleName="" DeviceType="" DisplayName="Step Mode" ControlName="EndBy" InputType="ReadOnlySelection" Description="End by step time or RF time">
    16. 

  16. 					<Item DisplayName="Step Time" ControlName="EndByStepTime" />
    17. 

  17. 					<Item DisplayName="RF Time" ControlName="EndByRfTime" />
    18. 

  18. 					<Item DisplayName="EndPoint Mode" ControlName="EndByEndPoint" />
    19. 

  19. 				</Step>
    20. 

  20. 				<Step ModuleName="" DeviceType="" DisplayName="Step Time" ControlName="Time" InputType="NumInput" Min="0" Max="600" />
    21. 

  21. 			</Group>
    22. 

  22. 		</Catalog>
    23. 

  23. 		<!--###########################################-->
    24. 

  24. 		<Catalog DisplayName="Chamber Pressure Setting">
    25. 

  25. 			<Group DisplayName="Chamber Pressure">
    26. 

  26. 				<Step ModuleName="Pressure" DeviceType="PressureControl" DisplayName="控压模式" ControlName="PressureControl.SetTVMode" InputType="ReadOnlySelection" Description="Throttle Mode">
    27. 

  27. 					<Item DisplayName="压力模式" ControlName="TVPressureCtrl" />
    28. 

  28. 					<Item DisplayName="位置模式" ControlName="TVPositionCtrl" />
    29. 

  29. 				</Step>
    30. 

  30. 				<Step ModuleName="Pressure" DeviceType="PressureControl" DisplayName="蝶阀位置" ControlName="PressureControl.SetTVPosition" InputType="NumInput" Min="0" Max="100" Description="Throttle valve position" />
    31. 

  31. 				<Step ModuleName="Pressure" DeviceType="PressureControl" DisplayName="蝶阀压力" ControlName="PressureControl.SetTVPressure" InputType="NumInput" Min="0" Max="760000" Description="Throttle valve pressure" />
    32. 

  32. 			</Group>
    33. 

  33. 		</Catalog>
    34. 

  34. 		<!--###########################################-->
    35. 

  35. 		<Catalog DisplayName="LiftPin State Setting">
    36. 

  36. 			<Group DisplayName="LiftPin State">
    37. 

  37. 				<Step ModuleName="Pin" DeviceType="PinControl" DisplayName="LiftPin State" ControlName="LiftPin.SetState" InputType="ReadOnlySelection" Description="LiftPin State">
    38. 

  38. 					<Item DisplayName="Up" ControlName="Up" />
    39. 

  39. 					<Item DisplayName="Down" ControlName="Down" />
    40. 

  40. 				</Step>
    41. 

  41. 			</Group>
    42. 

  42. 		</Catalog>
    43. 

  43. 		<!--###########################################-->
    44. 

  44. 		<Catalog DisplayName="RF Setting">
    45. 

  45. 			<Group DisplayName="RF">
    46. 

  46. 				<Step ModuleName="RF" DeviceType="RF" DisplayName="RF Time" ControlName="Rf.SetPowerOnTime" InputType="NumInput" Min="0" Max="100000" Description="RF Power On Time" />
    47. 

  47. 				<Step ModuleName="RF" DeviceType="RF" DisplayName="Source RF Power" ControlName="Rf.SetPower" InputType="NumInput" Min="0" Max="1000" Description="Source RF Power value" />
    48. 

  48. 				<Step ModuleName="RF" DeviceType="RF" DisplayName="Bias RF Power" ControlName="BiasRf.SetPower" InputType="NumInput" Min="0" Max="1000" Description="Bias RF Power value" />
    49. 

  49. 				<Step ModuleName="RF" DeviceType="RF" DisplayName="Bias RF Mode" ControlName="BiasRf.SetMatchProcessMode" InputType="ReadOnlySelection" Description="RF Match Mode">
    50. 

  50. 					<Item DisplayName="Preset Mode"  ControlName="Preset" />
    51. 

  51. 					<Item DisplayName="Hold Mode" ControlName="Hold" />
    52. 

  52. 				</Step>
    53. 

  53. 

  54. 				<Step ModuleName="RF" DeviceType="RF" DisplayName="Bias RF Match C1"   ControlName="BiasRf.SetMatchPositionC1" InputType="NumInput" Min="0" Max="100" Description="Set RF match position C1 value" />
    55. 

  55. 				<Step ModuleName="RF" DeviceType="RF" DisplayName="Bias RF Match C2"   ControlName="BiasRf.SetMatchPositionC2" InputType="NumInput" Min="0" Max="100" Description="Set RF match position C2 value" />
    56. 

  56. 

  57. 			</Group>
    58. 

  58. 		</Catalog>
    59. 

  59. 		<!--###########################################-->
    60. 

  60. 		<Catalog DisplayName="GasFlow">
    61. 

  61. 			<Group DisplayName="MFC">
    62. 

  62. 				<Step ModuleName="Mfc" DeviceType="MFC" DisplayName="O2" ControlName="MfcGas1" InputType="NumInput" Min="0" Max="5000" Description="M202" />
    63. 

  63. 				<Step ModuleName="Mfc" DeviceType="MFC" DisplayName="AR" ControlName="MfcGas2" InputType="NumInput" Min="0" Max="2000" Description="M204" />
    64. 

  64. 				<Step ModuleName="Mfc" DeviceType="MFC" DisplayName="N2" ControlName="MfcGas3" InputType="NumInput" Min="0" Max="1000" Description="M203" />
    65. 

  65. 				<Step ModuleName="Mfc" DeviceType="MFC" DisplayName="Gas4" ControlName="MfcGas4" InputType="NumInput" Min="0" Max="2000" Description="M204" />
    66. 

  66. 				<Step ModuleName="Mfc" DeviceType="MFC" DisplayName="Gas5" ControlName="MfcGas5" InputType="NumInput" Min="0" Max="2000" Description="M203" />
    67. 

  67. 			</Group>
    68. 

  68. 		</Catalog>
    69. 

  69. 

  70. 		<!--###########################################-->
    71. 

  71. 		<Catalog DisplayName="Soft Tolerance">
    72. 

  72. 			<Group DisplayName="SoftTolerance">
    73. 

  73. 				<Step ModuleName="SoftTolerance" DeviceType="SoftTolerance" DisplayName="O2(Soft)(%)" ControlName="MfcGas1.SoftTolerance" InputType="NumInput" Min="0" Max="100" Description="warning tolerance" />
    74. 

  74. 				<Step ModuleName="SoftTolerance" DeviceType="SoftTolerance" DisplayName="AR(Soft)(%)" ControlName="MfcGas2.SoftTolerance" InputType="NumInput" Min="0" Max="100" Description="warning tolerance" />
    75. 

  75. 				<Step ModuleName="SoftTolerance" DeviceType="SoftTolerance" DisplayName="N2(Soft)(%)" ControlName="MfcGas3.SoftTolerance" InputType="NumInput" Min="0" Max="100" Description="warning tolerance" />
    76. 

  76. 				<Step ModuleName="SoftTolerance" DeviceType="SoftTolerance" DisplayName="Gas4(Soft)(%)" ControlName="MfcGas4.SoftTolerance" InputType="NumInput" Min="0" Max="100" Description="warning tolerance" />
    77. 

  77. 				<Step ModuleName="SoftTolerance" DeviceType="SoftTolerance" DisplayName="Gas5(Soft)(%)" ControlName="MfcGas5.SoftTolerance" InputType="NumInput" Min="0" Max="100" Description="warning tolerance" />
    78. 

  78. 								  				 
    79. 

  79. 				<Step ModuleName="SoftTolerance" DeviceType="SoftTolerance" DisplayName="Pressure(Soft)(%)" ControlName="PressureControl.SoftTolerance" InputType="NumInput" Min="0" Max="100" Description="warning tolerance" />
    80. 

  80. 				<Step ModuleName="SoftTolerance" DeviceType="SoftTolerance" DisplayName="RF(Soft)(%)" ControlName="Rf.SoftTolerance" InputType="NumInput" Min="0" Max="100" Description="warning tolerance" />
    81. 

  81. 				<Step ModuleName="SoftTolerance" DeviceType="SoftTolerance" DisplayName="Bias RF(Soft)(%)" ControlName="BiasRf.SoftTolerance" InputType="NumInput" Min="0" Max="100" Description="warning tolerance" />
    82. 

  82. 			</Group>
    83. 

  83. 		</Catalog>
    84. 

  84. 

  85. 		<!--###########################################-->
    86. 

  86. 		<Catalog DisplayName="Hard Tolerance">
    87. 

  87. 			<Group DisplayName="HardTolerance">
    88. 

  88. 				<Step ModuleName="HardTolerance" DeviceType="HardTolerance" DisplayName="O2(Hard)(%)" ControlName="MfcGas1.HardTolerance" InputType="NumInput" Min="0" Max="100" Description="warning tolerance" />
    89. 

  89. 				<Step ModuleName="HardTolerance" DeviceType="HardTolerance" DisplayName="AR(Hard)(%)" ControlName="MfcGas2.HardTolerance" InputType="NumInput" Min="0" Max="100" Description="warning tolerance" />
    90. 

  90. 				<Step ModuleName="HardTolerance" DeviceType="HardTolerance" DisplayName="N2(Hard)(%)" ControlName="MfcGas3.HardTolerance" InputType="NumInput" Min="0" Max="100" Description="warning tolerance" />
    91. 

  91. 				<Step ModuleName="HardTolerance" DeviceType="HardTolerance" DisplayName="Gas4(Hard)(%)" ControlName="MfcGas4.HardTolerance" InputType="NumInput" Min="0" Max="100" Description="warning tolerance" />
    92. 

  92. 				<Step ModuleName="HardTolerance" DeviceType="HardTolerance" DisplayName="Gas5(Hard)(%)" ControlName="MfcGas5.HardTolerance" InputType="NumInput" Min="0" Max="100" Description="warning tolerance" />
    93. 

  93. 								  				 
    94. 

  94. 				<Step ModuleName="HardTolerance" DeviceType="HardTolerance" DisplayName="Pressure(Hard)(%)" ControlName="PressureControl.HardTolerance" InputType="NumInput" Min="0" Max="100" Description="warning tolerance" />
    95. 

  95. 				<Step ModuleName="HardTolerance" DeviceType="HardTolerance" DisplayName="RF(Hard)(%)" ControlName="Rf.HardTolerance" InputType="NumInput" Min="0" Max="100" Description="warning tolerance" />
    96. 

  96. 				<Step ModuleName="HardTolerance" DeviceType="HardTolerance" DisplayName="Bias RF(Hard)(%)" ControlName="BiasRf.HardTolerance" InputType="NumInput" Min="0" Max="100" Description="warning tolerance" />
    97. 

  97. 			</Group>
    98. 

  98. 		</Catalog>
    99. 

  99. 

  100. 		<!--###########################################-->
    101. 

  101. 		<Catalog DisplayName="EndPoint">
    102. 

  102. 			<Group DisplayName="EndPoint">
    103. 

  103. 				<Step ModuleName="EndPoint" DeviceType="EndPoint" DisplayName="EndPoint"  ControlName="EPD.SetConfig" InputType="EndPointSetting" Min="0" Max="0" Description="End Point Setting" />
    104. 

  104. 			</Group>
    105. 

  105. 		</Catalog>
    106. 

  106. 

  107. 		<!--###########################################-->
    108. 

  108. 		<Validation>
    109. 

  109. 			<Predefine>
    110. 

  110. 				<Item VarName="EndTime" Value="20" />
    111. 

  111. 			</Predefine>
    112. 

  112. 			<CheckVariable>
    113. 

  113. 				<Var Name="Time" />
    114. 

  114. 			</CheckVariable>
    115. 

  115. 			<Restriction>
    116. 

  116. 			</Restriction>
    117. 

  117. 		</Validation>
    118. 

  118. 	</TableRecipeFormat>
    119. 

  119. 	<TableRecipeData RecipeVersion="Virgo" Barcode="" CreatedBy="System" CreationTime="2016-05-13T13:56:44" LastRevisedBy="admin" LastRevisionTime="2015-10-13T13:56:44" PressureMode="TV" BasePressure="0.0" SubstrateTemp="50" PumpingPinState="Down" PumpDownLimit="120" PurgeActive="false" Description="（Empty）" NotToPurgeOrVent="false" VentingPinState="Down" PinDownPressure="1000">
    120. 

  120. 		<Step StepNo="Step 1" Name="initial" Loop=" " Time="0" EndBy="EndByStepTime">
    121. 

  121. 			<Pressure PressureControl.SetTVMode="TVPressureCtrl" PressureControl.SetTVPosition="0" PressureControl.SetTVPressure="50" PressureControl.SetBoostPressure="100" PressureControl.SetChamberPressure="100" />
    122. 

  122. 			<Pin LiftPin.SetState="Down"/>
    123. 

  123. 			<RF Rf.SetPowerOnTime ="0" Rf.SetMode ="ContinuousWaveMode" Match.SetMatchProcessMode="PresetMode" Rf.SetPower="0" BiasRf.SetPower="0" BiasRf.SetMatchProcessMode="Preset" BiasRf.SetMatchPositionC1="50" BiasRf.SetMatchPositionC2="50" Rf.SetPulsingDuty="0" Rf.SetPulsingFrequency="0" Match.SetMatchPositionC1="50" Match.SetMatchPositionC2="50" />
    124. 

  124. 			<Mfc MfcGas1 ="0" MfcGas2="0" MfcGas3="0" MfcGas4="0" MfcGas5="0" />
    125. 

  125. 			<EndPoint EPD.SetConfig=""/>
    126. 

  126. 			<SoftTolerance MfcGas1.SoftTolerance ="5" MfcGas2.SoftTolerance="5" MfcGas3.SoftTolerance="5" MfcGas4.SoftTolerance="5" MfcGas5.SoftTolerance="5" Pressure.SoftTolerance="5" Rf.SoftTolerance="5" BiasRf.SoftTolerance="5" />
    127. 

  127. 			<HardTolerance MfcGas1.HardTolerance ="10" MfcGas2.HardTolerance="10" MfcGas3.HardTolerance="10" MfcGas4.HardTolerance="10" MfcGas5.HardTolerance="10"  Pressure.HardTolerance="10" Rf.HardTolerance="10" BiasRf.HardTolerance="10" />
    128. 

  128. 		</Step>
    129. 

  129. 	</TableRecipeData>
    130. 

  130. 	<TableRecipeSchema>
    131. 

  131. 		<xs:schema attributeFormDefault="unqualified" elementFormDefault="qualified" xmlns:xs="http://www.w3.org/2001/XMLSchema">
    132. 

  132. 			<xs:simpleType name="pressureMode">
    133. 

  133. 				<xs:restriction base="xs:string">
    134. 

  134. 					<xs:enumeration value="TV" />
    135. 

  135. 					<xs:enumeration value="N2Flow" />
    136. 

  136. 				</xs:restriction>
    137. 

  137. 			</xs:simpleType>
    138. 

  138. 			<xs:simpleType name="booleanType">
    139. 

  139. 				<xs:restriction base="xs:string">
    140. 

  140. 					<xs:enumeration value="0" />
    141. 

  141. 					<xs:enumeration value="1" />
    142. 

  142. 					<xs:enumeration value="False" />
    143. 

  143. 					<xs:enumeration value="True" />
    144. 

  144. 					<xs:enumeration value="false" />
    145. 

  145. 					<xs:enumeration value="true" />
    146. 

  146. 				</xs:restriction>
    147. 

  147. 			</xs:simpleType>
    148. 

  148. 			<xs:element name="TableRecipeData">
    149. 

  149. 				<xs:complexType>
    150. 

  150. 					<xs:sequence>
    151. 

  151. 						<xs:element maxOccurs="unbounded" name="Step">
    152. 

  152. 							<xs:complexType>
    153. 

  153. 								<xs:sequence>
    154. 

  154. 									<xs:element name="Pressure">
    155. 

  155. 										<xs:complexType>
    156. 

  156. 											<xs:attribute name="PressureControl.SetTVMode" type="xs:string" use="optional" />
    157. 

  157. 											<xs:attribute name="PressureControl.SetTVPosition" type="xs:double" use="optional" />
    158. 

  158. 											<xs:attribute name="PressureControl.SetTVPressure" type="xs:double" use="optional" />
    159. 

  159. 											<xs:attribute name="PressureControl.SetBoostPressure" type="xs:double" use="optional" />
    160. 

  160. 											<xs:attribute name="PressureControl.SetChamberPressure" type="xs:double" use="optional" />
    161. 

  161. 										</xs:complexType>
    162. 

  162. 									</xs:element>
    163. 

  163. 									<xs:element name="Pin">
    164. 

  164. 										<xs:complexType>
    165. 

  165. 											<xs:attribute name="LiftPin.SetState" type="xs:string" use="optional" />
    166. 

  166. 										</xs:complexType>
    167. 

  167. 									</xs:element>
    168. 

  168. 									<xs:element name="RF">
    169. 

  169. 										<xs:complexType>
    170. 

  170. 											<xs:attribute name="Rf.SetPowerOnTime" type="xs:double" use="required" />
    171. 

  171. 											<xs:attribute name="Rf.SetMode" type="xs:string" use="required" />
    172. 

  172. 											<xs:attribute name="Rf.SetPulsingFrequency" type="xs:double" use="optional" />
    173. 

  173. 											<xs:attribute name="Rf.SetPulsingDuty" type="xs:double" use="optional" />
    174. 

  174. 											<xs:attribute name="Rf.SetPower" type="xs:double" use="required" />
    175. 

  175. 											<xs:attribute name="BiasRf.SetPower" type="xs:double" use="required" />
    176. 

  176. 											<xs:attribute name="BiasRf.SetMatchProcessMode" type="xs:string" use="required" />
    177. 

  177. 											<xs:attribute name="BiasRf.SetMatchPositionC1" type="xs:double" use="required" />
    178. 

  178. 											<xs:attribute name="BiasRf.SetMatchPositionC2" type="xs:double" use="required" />
    179. 

  179. 											<xs:attribute name="Match.SetMatchProcessMode" type="xs:string" use="required" />
    180. 

  180. 											<xs:attribute name="Match.SetMatchPositionC1" type="xs:double" use="required" />
    181. 

  181. 											<xs:attribute name="Match.SetMatchPositionC2" type="xs:double" use="required" />
    182. 

  182. 										</xs:complexType>
    183. 

  183. 									</xs:element>
    184. 

  184. 									<xs:element name="Mfc">
    185. 

  185. 										<xs:complexType>
    186. 

  186. 											<xs:attribute name="MfcGas1" type="xs:double" use="optional" />
    187. 

  187. 											<xs:attribute name="MfcGas2" type="xs:double" use="optional" />
    188. 

  188. 											<xs:attribute name="MfcGas3" type="xs:double" use="optional" />
    189. 

  189. 											<xs:attribute name="MfcGas4" type="xs:double" use="optional" />
    190. 

  190. 											<xs:attribute name="MfcGas5" type="xs:double" use="optional" />
    191. 

  191. 										</xs:complexType>
    192. 

  192. 									</xs:element>
    193. 

  193. 									<xs:element name="EndPoint">
    194. 

  194. 										<xs:complexType>
    195. 

  195. 											<xs:attribute name="EPD.SetConfig"   type="xs:string" use="required" />
    196. 

  196. 										</xs:complexType>
    197. 

  197. 									</xs:element>
    198. 

  198. 									<xs:element name="SoftTolerance">
    199. 

  199. 										<xs:complexType>
    200. 

  200. 											<xs:attribute name="MfcGas1.SoftTolerance" type="xs:double" use="optional" />
    201. 

  201. 											<xs:attribute name="MfcGas2.SoftTolerance" type="xs:double" use="optional" />
    202. 

  202. 											<xs:attribute name="MfcGas3.SoftTolerance" type="xs:double" use="optional" />
    203. 

  203. 											<xs:attribute name="MfcGas4.SoftTolerance" type="xs:double" use="optional" />
    204. 

  204. 											<xs:attribute name="MfcGas5.SoftTolerance" type="xs:double" use="optional" />
    205. 

  205. 											<xs:attribute name="Pressure.SoftTolerance" type="xs:double" use="optional" />
    206. 

  206. 											<xs:attribute name="Rf.SoftTolerance" type="xs:double" use="optional" />
    207. 

  207. 											<xs:attribute name="BiasRf.SoftTolerance" type="xs:double" use="optional" />
    208. 

  208. 										</xs:complexType>
    209. 

  209. 									</xs:element>
    210. 

  210. 									<xs:element name="HardTolerance">
    211. 

  211. 										<xs:complexType>
    212. 

  212. 											<xs:attribute name="MfcGas1.HardTolerance" type="xs:double" use="optional" />
    213. 

  213. 											<xs:attribute name="MfcGas2.HardTolerance" type="xs:double" use="optional" />
    214. 

  214. 											<xs:attribute name="MfcGas3.HardTolerance" type="xs:double" use="optional" />
    215. 

  215. 											<xs:attribute name="MfcGas4.HardTolerance" type="xs:double" use="optional" />
    216. 

  216. 											<xs:attribute name="MfcGas5.HardTolerance" type="xs:double" use="optional" />
    217. 

  217. 											<xs:attribute name="Pressure.HardTolerance" type="xs:double" use="optional" />
    218. 

  218. 											<xs:attribute name="Rf.HardTolerance" type="xs:double" use="optional" />
    219. 

  219. 											<xs:attribute name="BiasRf.HardTolerance" type="xs:double" use="optional" />
    220. 

  220. 										</xs:complexType>
    221. 

  221. 									</xs:element>
    222. 

  222. 								</xs:sequence>
    223. 

  223. 								<xs:attribute name="StepNo" type="xs:string" use="required" />
    224. 

  224. 								<xs:attribute name="Name" type="xs:string" use="required" />
    225. 

  225. 								<xs:attribute name="Loop" type="xs:string" use="required" />
    226. 

  226. 								<xs:attribute name="Time" type="xs:double" use="required" />
    227. 

  227. 								<xs:attribute name="EndBy" type="xs:string" use="required" />
    228. 

  228. 							</xs:complexType>
    229. 

  229. 						</xs:element>
    230. 

  230. 					</xs:sequence>
    231. 

  231. 					<xs:attribute name="RecipeVersion" type="xs:string" fixed="Virgo" use="required" />
    232. 

  232. 					<xs:attribute name="CreatedBy" type="xs:string" use="required" />
    233. 

  233. 					<xs:attribute name="CreationTime" type="xs:dateTime" use="required" />
    234. 

  234. 					<xs:attribute name="LastRevisedBy" type="xs:string" use="required" />
    235. 

  235. 					<xs:attribute name="LastRevisionTime" type="xs:dateTime" use="required" />
    236. 

  236. 					<xs:attribute name="PressureMode" type="xs:string" use="required" />
    237. 

  237. 					<xs:attribute name="BasePressure" type="xs:string" use="required" />
    238. 

  238. 					<xs:attribute name="PumpDownLimit" type="xs:string" use="required" />
    239. 

  239. 					<xs:attribute name="PurgeActive" type="xs:string" use="required" />
    240. 

  240. 					<xs:attribute name="Barcode" type="xs:string" use="required" />
    241. 

  241. 					<xs:attribute name="Description" type="xs:string" use="required" />
    242. 

  242. 					<xs:attribute name="SubstrateTemp" type="xs:string" use="required" />
    243. 

  243. 					<xs:attribute name="PumpingPinState" type="xs:string" use="required" />
    244. 

  244. 					<xs:attribute name="NotToPurgeOrVent" type="xs:string" use="required" />
    245. 

  245. 					<xs:attribute name="VentingPinState" type="xs:string" use="optional" />
    246. 

  246. 					<xs:attribute name="PinDownPressure" type="xs:string" use="optional" />
    247. 

  247. 				</xs:complexType>
    248. 

  248. 			</xs:element>
    249. 

  249. 		</xs:schema>
    250. 

  250. 	</TableRecipeSchema>
    251. 

  251. 	<Signature>axPPcBt+girefGdBoafkJf+pBhY=</Signature>
    252. 

  252. </Aitex>
    253.