Virgo_ST/VirgoRT/Config/RecipeFormat.xml

<?xml version="1.0" encoding="utf-8"?>
<Aitex>
	<TableRecipeFormat RecipeVersion="Virgo">
		<!--###########################################-->
		<Catalog DisplayName="StepInfo">
			<Group DisplayName="Set">
				<Step ModuleName="" DeviceType="" DisplayName="No." ControlName="StepNo" InputType="ReadOnly" />
				<Step ModuleName="" DeviceType="" DisplayName="Name" ControlName="Name" InputType="TextInput" />
				<Step ModuleName="" DeviceType="" DisplayName="Loop" ControlName="Loop" InputType="EditableSelection" Description="Loop set：set as  Loop Num ... LoopEnd">
					<Item DisplayName=" " ControlName="None" />
					<Item DisplayName="Loop 10" ControlName="LoopStart" />
					<Item DisplayName="Loop End" ControlName="LoopEnd" />
				</Step>

				<Step ModuleName="" DeviceType="" DisplayName="Step Mode" ControlName="EndBy" InputType="ReadOnlySelection" Description="End by step time or RF time">
					<Item DisplayName="Step Time" ControlName="EndByStepTime" />
					<Item DisplayName="RF Time" ControlName="EndByRfTime" />
					<Item DisplayName="EndPoint Mode" ControlName="EndByEndPoint" />
				</Step>
				<Step ModuleName="" DeviceType="" DisplayName="Step Time" ControlName="Time" InputType="NumInput" Min="0" Max="600" />
			</Group>
		</Catalog>
		<!--###########################################-->
		<Catalog DisplayName="Chamber Pressure Setting">
			<Group DisplayName="Chamber Pressure">
				<Step ModuleName="Pressure" DeviceType="PressureControl" DisplayName="控压模式" ControlName="PressureControl.SetTVMode" InputType="ReadOnlySelection" Description="Throttle Mode">
					<Item DisplayName="压力模式" ControlName="TVPressureCtrl" />
					<Item DisplayName="位置模式" ControlName="TVPositionCtrl" />
				</Step>
				<Step ModuleName="Pressure" DeviceType="PressureControl" DisplayName="蝶阀位置" ControlName="PressureControl.SetTVPosition" InputType="NumInput" Min="0" Max="100" Description="Throttle valve position" />
				<Step ModuleName="Pressure" DeviceType="PressureControl" DisplayName="蝶阀压力" ControlName="PressureControl.SetTVPressure" InputType="NumInput" Min="0" Max="760000" Description="Throttle valve pressure" />
			</Group>
		</Catalog>
		<!--###########################################-->
		<Catalog DisplayName="LiftPin State Setting">
			<Group DisplayName="LiftPin State">
				<Step ModuleName="Pin" DeviceType="PinControl" DisplayName="LiftPin State" ControlName="LiftPin.SetState" InputType="ReadOnlySelection" Description="LiftPin State">
					<Item DisplayName="Up" ControlName="Up" />
					<Item DisplayName="Down" ControlName="Down" />
				</Step>
			</Group>
		</Catalog>
		<!--###########################################-->
		<Catalog DisplayName="RF Setting">
			<Group DisplayName="RF">
				<Step ModuleName="RF" DeviceType="RF" DisplayName="RF Time" ControlName="Rf.SetPowerOnTime" InputType="NumInput" Min="0" Max="100000" Description="RF Power On Time" />
				<Step ModuleName="RF" DeviceType="RF" DisplayName="Source RF Power" ControlName="Rf.SetPower" InputType="NumInput" Min="0" Max="1000" Description="Source RF Power value" />
				<Step ModuleName="RF" DeviceType="RF" DisplayName="Bias RF Power" ControlName="BiasRf.SetPower" InputType="NumInput" Min="0" Max="1000" Description="Bias RF Power value" />
				<Step ModuleName="RF" DeviceType="RF" DisplayName="Bias RF Mode" ControlName="BiasRf.SetMatchProcessMode" InputType="ReadOnlySelection" Description="RF Match Mode">
					<Item DisplayName="Preset Mode"  ControlName="Preset" />
					<Item DisplayName="Hold Mode" ControlName="Hold" />
				</Step>

				<Step ModuleName="RF" DeviceType="RF" DisplayName="Bias RF Match C1"   ControlName="BiasRf.SetMatchPositionC1" InputType="NumInput" Min="0" Max="100" Description="Set RF match position C1 value" />
				<Step ModuleName="RF" DeviceType="RF" DisplayName="Bias RF Match C2"   ControlName="BiasRf.SetMatchPositionC2" InputType="NumInput" Min="0" Max="100" Description="Set RF match position C2 value" />

			</Group>
		</Catalog>
		<!--###########################################-->
		<Catalog DisplayName="GasFlow">
			<Group DisplayName="MFC">
				<Step ModuleName="Mfc" DeviceType="MFC" DisplayName="O2" ControlName="MfcGas1" InputType="NumInput" Min="0" Max="5000" Description="M202" />
				<Step ModuleName="Mfc" DeviceType="MFC" DisplayName="AR" ControlName="MfcGas2" InputType="NumInput" Min="0" Max="2000" Description="M204" />
				<Step ModuleName="Mfc" DeviceType="MFC" DisplayName="N2" ControlName="MfcGas3" InputType="NumInput" Min="0" Max="1000" Description="M203" />
				<Step ModuleName="Mfc" DeviceType="MFC" DisplayName="Gas4" ControlName="MfcGas4" InputType="NumInput" Min="0" Max="2000" Description="M204" />
				<Step ModuleName="Mfc" DeviceType="MFC" DisplayName="Gas5" ControlName="MfcGas5" InputType="NumInput" Min="0" Max="2000" Description="M203" />
			</Group>
		</Catalog>

		<!--###########################################-->
		<Catalog DisplayName="Soft Tolerance">
			<Group DisplayName="SoftTolerance">
				<Step ModuleName="SoftTolerance" DeviceType="SoftTolerance" DisplayName="O2(Soft)(%)" ControlName="MfcGas1.SoftTolerance" InputType="NumInput" Min="0" Max="100" Description="warning tolerance" />
				<Step ModuleName="SoftTolerance" DeviceType="SoftTolerance" DisplayName="AR(Soft)(%)" ControlName="MfcGas2.SoftTolerance" InputType="NumInput" Min="0" Max="100" Description="warning tolerance" />
				<Step ModuleName="SoftTolerance" DeviceType="SoftTolerance" DisplayName="N2(Soft)(%)" ControlName="MfcGas3.SoftTolerance" InputType="NumInput" Min="0" Max="100" Description="warning tolerance" />
				<Step ModuleName="SoftTolerance" DeviceType="SoftTolerance" DisplayName="Gas4(Soft)(%)" ControlName="MfcGas4.SoftTolerance" InputType="NumInput" Min="0" Max="100" Description="warning tolerance" />
				<Step ModuleName="SoftTolerance" DeviceType="SoftTolerance" DisplayName="Gas5(Soft)(%)" ControlName="MfcGas5.SoftTolerance" InputType="NumInput" Min="0" Max="100" Description="warning tolerance" />
								  				 
				<Step ModuleName="SoftTolerance" DeviceType="SoftTolerance" DisplayName="Pressure(Soft)(%)" ControlName="PressureControl.SoftTolerance" InputType="NumInput" Min="0" Max="100" Description="warning tolerance" />
				<Step ModuleName="SoftTolerance" DeviceType="SoftTolerance" DisplayName="RF(Soft)(%)" ControlName="Rf.SoftTolerance" InputType="NumInput" Min="0" Max="100" Description="warning tolerance" />
				<Step ModuleName="SoftTolerance" DeviceType="SoftTolerance" DisplayName="Bias RF(Soft)(%)" ControlName="BiasRf.SoftTolerance" InputType="NumInput" Min="0" Max="100" Description="warning tolerance" />
			</Group>
		</Catalog>

		<!--###########################################-->
		<Catalog DisplayName="Hard Tolerance">
			<Group DisplayName="HardTolerance">
				<Step ModuleName="HardTolerance" DeviceType="HardTolerance" DisplayName="O2(Hard)(%)" ControlName="MfcGas1.HardTolerance" InputType="NumInput" Min="0" Max="100" Description="warning tolerance" />
				<Step ModuleName="HardTolerance" DeviceType="HardTolerance" DisplayName="AR(Hard)(%)" ControlName="MfcGas2.HardTolerance" InputType="NumInput" Min="0" Max="100" Description="warning tolerance" />
				<Step ModuleName="HardTolerance" DeviceType="HardTolerance" DisplayName="N2(Hard)(%)" ControlName="MfcGas3.HardTolerance" InputType="NumInput" Min="0" Max="100" Description="warning tolerance" />
				<Step ModuleName="HardTolerance" DeviceType="HardTolerance" DisplayName="Gas4(Hard)(%)" ControlName="MfcGas4.HardTolerance" InputType="NumInput" Min="0" Max="100" Description="warning tolerance" />
				<Step ModuleName="HardTolerance" DeviceType="HardTolerance" DisplayName="Gas5(Hard)(%)" ControlName="MfcGas5.HardTolerance" InputType="NumInput" Min="0" Max="100" Description="warning tolerance" />
								  				 
				<Step ModuleName="HardTolerance" DeviceType="HardTolerance" DisplayName="Pressure(Hard)(%)" ControlName="PressureControl.HardTolerance" InputType="NumInput" Min="0" Max="100" Description="warning tolerance" />
				<Step ModuleName="HardTolerance" DeviceType="HardTolerance" DisplayName="RF(Hard)(%)" ControlName="Rf.HardTolerance" InputType="NumInput" Min="0" Max="100" Description="warning tolerance" />
				<Step ModuleName="HardTolerance" DeviceType="HardTolerance" DisplayName="Bias RF(Hard)(%)" ControlName="BiasRf.HardTolerance" InputType="NumInput" Min="0" Max="100" Description="warning tolerance" />
			</Group>
		</Catalog>

		<!--###########################################-->
		<Catalog DisplayName="EndPoint">
			<Group DisplayName="EndPoint">
				<Step ModuleName="EndPoint" DeviceType="EndPoint" DisplayName="EndPoint"  ControlName="EPD.SetConfig" InputType="EndPointSetting" Min="0" Max="0" Description="End Point Setting" />
			</Group>
		</Catalog>

		<!--###########################################-->
		<Validation>
			<Predefine>
				<Item VarName="EndTime" Value="20" />
			</Predefine>
			<CheckVariable>
				<Var Name="Time" />
			</CheckVariable>
			<Restriction>
			</Restriction>
		</Validation>
	</TableRecipeFormat>
	<TableRecipeData RecipeVersion="Virgo" Barcode="" CreatedBy="System" CreationTime="2016-05-13T13:56:44" LastRevisedBy="admin" LastRevisionTime="2015-10-13T13:56:44" PressureMode="TV" BasePressure="0.0" SubstrateTemp="50" PumpingPinState="Down" PumpDownLimit="120" PurgeActive="false" Description="（Empty）" NotToPurgeOrVent="false" VentingPinState="Down" PinDownPressure="1000">
		<Step StepNo="Step 1" Name="initial" Loop=" " Time="0" EndBy="EndByStepTime">
			<Pressure PressureControl.SetTVMode="TVPressureCtrl" PressureControl.SetTVPosition="0" PressureControl.SetTVPressure="50" PressureControl.SetBoostPressure="100" PressureControl.SetChamberPressure="100" />
			<Pin LiftPin.SetState="Down"/>
			<RF Rf.SetPowerOnTime ="0" Rf.SetMode ="ContinuousWaveMode" Match.SetMatchProcessMode="PresetMode" Rf.SetPower="0" BiasRf.SetPower="0" BiasRf.SetMatchProcessMode="Preset" BiasRf.SetMatchPositionC1="50" BiasRf.SetMatchPositionC2="50" Rf.SetPulsingDuty="0" Rf.SetPulsingFrequency="0" Match.SetMatchPositionC1="50" Match.SetMatchPositionC2="50" />
			<Mfc MfcGas1 ="0" MfcGas2="0" MfcGas3="0" MfcGas4="0" MfcGas5="0" />
			<EndPoint EPD.SetConfig=""/>
			<SoftTolerance MfcGas1.SoftTolerance ="5" MfcGas2.SoftTolerance="5" MfcGas3.SoftTolerance="5" MfcGas4.SoftTolerance="5" MfcGas5.SoftTolerance="5" Pressure.SoftTolerance="5" Rf.SoftTolerance="5" BiasRf.SoftTolerance="5" />
			<HardTolerance MfcGas1.HardTolerance ="10" MfcGas2.HardTolerance="10" MfcGas3.HardTolerance="10" MfcGas4.HardTolerance="10" MfcGas5.HardTolerance="10"  Pressure.HardTolerance="10" Rf.HardTolerance="10" BiasRf.HardTolerance="10" />
		</Step>
	</TableRecipeData>
	<TableRecipeSchema>
		<xs:schema attributeFormDefault="unqualified" elementFormDefault="qualified" xmlns:xs="http://www.w3.org/2001/XMLSchema">
			<xs:simpleType name="pressureMode">
				<xs:restriction base="xs:string">
					<xs:enumeration value="TV" />
					<xs:enumeration value="N2Flow" />
				</xs:restriction>
			</xs:simpleType>
			<xs:simpleType name="booleanType">
				<xs:restriction base="xs:string">
					<xs:enumeration value="0" />
					<xs:enumeration value="1" />
					<xs:enumeration value="False" />
					<xs:enumeration value="True" />
					<xs:enumeration value="false" />
					<xs:enumeration value="true" />
				</xs:restriction>
			</xs:simpleType>
			<xs:element name="TableRecipeData">
				<xs:complexType>
					<xs:sequence>
						<xs:element maxOccurs="unbounded" name="Step">
							<xs:complexType>
								<xs:sequence>
									<xs:element name="Pressure">
										<xs:complexType>
											<xs:attribute name="PressureControl.SetTVMode" type="xs:string" use="optional" />
											<xs:attribute name="PressureControl.SetTVPosition" type="xs:double" use="optional" />
											<xs:attribute name="PressureControl.SetTVPressure" type="xs:double" use="optional" />
											<xs:attribute name="PressureControl.SetBoostPressure" type="xs:double" use="optional" />
											<xs:attribute name="PressureControl.SetChamberPressure" type="xs:double" use="optional" />
										</xs:complexType>
									</xs:element>
									<xs:element name="Pin">
										<xs:complexType>
											<xs:attribute name="LiftPin.SetState" type="xs:string" use="optional" />
										</xs:complexType>
									</xs:element>
									<xs:element name="RF">
										<xs:complexType>
											<xs:attribute name="Rf.SetPowerOnTime" type="xs:double" use="required" />
											<xs:attribute name="Rf.SetMode" type="xs:string" use="required" />
											<xs:attribute name="Rf.SetPulsingFrequency" type="xs:double" use="optional" />
											<xs:attribute name="Rf.SetPulsingDuty" type="xs:double" use="optional" />
											<xs:attribute name="Rf.SetPower" type="xs:double" use="required" />
											<xs:attribute name="BiasRf.SetPower" type="xs:double" use="required" />
											<xs:attribute name="BiasRf.SetMatchProcessMode" type="xs:string" use="required" />
											<xs:attribute name="BiasRf.SetMatchPositionC1" type="xs:double" use="required" />
											<xs:attribute name="BiasRf.SetMatchPositionC2" type="xs:double" use="required" />
											<xs:attribute name="Match.SetMatchProcessMode" type="xs:string" use="required" />
											<xs:attribute name="Match.SetMatchPositionC1" type="xs:double" use="required" />
											<xs:attribute name="Match.SetMatchPositionC2" type="xs:double" use="required" />
										</xs:complexType>
									</xs:element>
									<xs:element name="Mfc">
										<xs:complexType>
											<xs:attribute name="MfcGas1" type="xs:double" use="optional" />
											<xs:attribute name="MfcGas2" type="xs:double" use="optional" />
											<xs:attribute name="MfcGas3" type="xs:double" use="optional" />
											<xs:attribute name="MfcGas4" type="xs:double" use="optional" />
											<xs:attribute name="MfcGas5" type="xs:double" use="optional" />
										</xs:complexType>
									</xs:element>
									<xs:element name="EndPoint">
										<xs:complexType>
											<xs:attribute name="EPD.SetConfig"   type="xs:string" use="required" />
										</xs:complexType>
									</xs:element>
									<xs:element name="SoftTolerance">
										<xs:complexType>
											<xs:attribute name="MfcGas1.SoftTolerance" type="xs:double" use="optional" />
											<xs:attribute name="MfcGas2.SoftTolerance" type="xs:double" use="optional" />
											<xs:attribute name="MfcGas3.SoftTolerance" type="xs:double" use="optional" />
											<xs:attribute name="MfcGas4.SoftTolerance" type="xs:double" use="optional" />
											<xs:attribute name="MfcGas5.SoftTolerance" type="xs:double" use="optional" />
											<xs:attribute name="Pressure.SoftTolerance" type="xs:double" use="optional" />
											<xs:attribute name="Rf.SoftTolerance" type="xs:double" use="optional" />
											<xs:attribute name="BiasRf.SoftTolerance" type="xs:double" use="optional" />
										</xs:complexType>
									</xs:element>
									<xs:element name="HardTolerance">
										<xs:complexType>
											<xs:attribute name="MfcGas1.HardTolerance" type="xs:double" use="optional" />
											<xs:attribute name="MfcGas2.HardTolerance" type="xs:double" use="optional" />
											<xs:attribute name="MfcGas3.HardTolerance" type="xs:double" use="optional" />
											<xs:attribute name="MfcGas4.HardTolerance" type="xs:double" use="optional" />
											<xs:attribute name="MfcGas5.HardTolerance" type="xs:double" use="optional" />
											<xs:attribute name="Pressure.HardTolerance" type="xs:double" use="optional" />
											<xs:attribute name="Rf.HardTolerance" type="xs:double" use="optional" />
											<xs:attribute name="BiasRf.HardTolerance" type="xs:double" use="optional" />
										</xs:complexType>
									</xs:element>
								</xs:sequence>
								<xs:attribute name="StepNo" type="xs:string" use="required" />
								<xs:attribute name="Name" type="xs:string" use="required" />
								<xs:attribute name="Loop" type="xs:string" use="required" />
								<xs:attribute name="Time" type="xs:double" use="required" />
								<xs:attribute name="EndBy" type="xs:string" use="required" />
							</xs:complexType>
						</xs:element>
					</xs:sequence>
					<xs:attribute name="RecipeVersion" type="xs:string" fixed="Virgo" use="required" />
					<xs:attribute name="CreatedBy" type="xs:string" use="required" />
					<xs:attribute name="CreationTime" type="xs:dateTime" use="required" />
					<xs:attribute name="LastRevisedBy" type="xs:string" use="required" />
					<xs:attribute name="LastRevisionTime" type="xs:dateTime" use="required" />
					<xs:attribute name="PressureMode" type="xs:string" use="required" />
					<xs:attribute name="BasePressure" type="xs:string" use="required" />
					<xs:attribute name="PumpDownLimit" type="xs:string" use="required" />
					<xs:attribute name="PurgeActive" type="xs:string" use="required" />
					<xs:attribute name="Barcode" type="xs:string" use="required" />
					<xs:attribute name="Description" type="xs:string" use="required" />
					<xs:attribute name="SubstrateTemp" type="xs:string" use="required" />
					<xs:attribute name="PumpingPinState" type="xs:string" use="required" />
					<xs:attribute name="NotToPurgeOrVent" type="xs:string" use="required" />
					<xs:attribute name="VentingPinState" type="xs:string" use="optional" />
					<xs:attribute name="PinDownPressure" type="xs:string" use="optional" />
				</xs:complexType>
			</xs:element>
		</xs:schema>
	</TableRecipeSchema>
	<Signature>axPPcBt+girefGdBoafkJf+pBhY=</Signature>
</Aitex>