DeviceModelVirgo.xml 41 KB

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  1. <?xml version="1.0" encoding="utf-16"?>
  2. <DeviceModelDefine type="Virgo" xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance" xsi:noNamespaceSchemaLocation="DeviceModel.xsd">
  3. <IoValves>
  4. <IoValve id="ValveMfc1" display="MFC1 Valve" schematicId="SV1" unit="" isNc="true"
  5. isDefaultOpen="false" diOpen="" doOpen="DO_MFC1_Valve" diCloseSensor="" diOpenSensor="" />
  6. <IoValve id="ValveMfc2" display="MFC2 Valve" schematicId="SV2" unit="" isNc="true"
  7. isDefaultOpen="false" diOpen="" doOpen="DO_MFC2_Valve" diCloseSensor="" diOpenSensor="" />
  8. <IoValve id="ValveMfc3" display="MFC3 Valve" schematicId="SV3" unit="" isNc="true"
  9. isDefaultOpen="false" diOpen="" doOpen="DO_MFC3_Valve" diCloseSensor="" diOpenSensor="" />
  10. <IoValve id="ValveMfc4" display="MFC4 Valve" schematicId="SV13" unit="" isNc="true"
  11. isDefaultOpen="false" diOpen="" doOpen="DO_MFC4_Valve" diCloseSensor="" diOpenSensor="" />
  12. <IoValve id="ValveMfc5" display="MFC5 Valve" schematicId="SV14" unit="" isNc="true"
  13. isDefaultOpen="false" diOpen="" doOpen="DO_MFC5_Valve" diCloseSensor="" diOpenSensor="" />
  14. <IoValve id="ValveChamberPurge" display="Purge valve" schematicId="SV6"
  15. unit="" isNc="true" isDefaultOpen="false" diOpen="" doOpen="DO_Chamber_purge_valve" diCloseSensor="" diOpenSensor="" />
  16. <IoValve id="ValveProcess" display="Process gas final valve" schematicId=""
  17. unit="" isNc="true" isDefaultOpen="false" diOpen="" doOpen="DO_Process_gas_final_valve"
  18. diCloseSensor="" diOpenSensor="" />
  19. <IoValve id="ValveSoftPumping" display="Soft pumping valve" schematicId=""
  20. unit="" isNc="true" isDefaultOpen="false" diOpen="" doOpen="DO_Soft_Pumping_Valve"
  21. diCloseSensor="" diOpenSensor="" />
  22. <IoValve id="ValveFastPumping" display="Fast pumping valve" schematicId=""
  23. unit="" isNc="true" isDefaultOpen="false" diOpen="" doOpen="DO_Fast_Pumping_Valve"
  24. diCloseSensor="" diOpenSensor="" />
  25. <IoValve id="ValveFastVent" display="Fast vent valve" schematicId=""
  26. unit="" isNc="true" isDefaultOpen="false" diOpen="" doOpen="DO_Chamber_vent_valve"
  27. diCloseSensor="" diOpenSensor="" />
  28. </IoValves>
  29. <IoMfcs assembly="VirgoRT" classType="VirgoRT.Devices.IODevices.IoMfc">
  30. <IoMfc id="MfcGas1" display="Gas1" schematicId="MFC1" unit="sccm"
  31. aiFlow="AI_MFC1_Flow" aoFlow="AO_MFC1_Flow_Setpoint" diOffline="" aoRange=""
  32. diPressureAlarm="DI_MFC1_Pressure"
  33. scGasName="Gas1Name"
  34. scEnable="Gas1Enable"
  35. scN2Scale="Gas1MfcN2Scale"
  36. scScaleFactor="Gas1MfcScaleFactor"
  37. scAlarmRange="Gas1MfcAlarmRange"
  38. scEnableAlarm="Gas1MfcEnableAlarm"
  39. scAlarmTime="Gas1MfcAlarmTime"
  40. scFlowRegulationFactor="Gas1MfcFlowRegulationFactor"
  41. scDefaultSetPoint="" />
  42. <IoMfc id="MfcGas2" display="Gas2" schematicId="MFC2" unit="sccm"
  43. aiFlow="AI_MFC2_Flow" aoFlow="AO_MFC2_Flow_Setpoint" diOffline="" aoRange=""
  44. diPressureAlarm="DI_MFC2_Pressure"
  45. scGasName="Gas2Name"
  46. scEnable="Gas2Enable"
  47. scN2Scale="Gas2MfcN2Scale"
  48. scScaleFactor="Gas2MfcScaleFactor"
  49. scAlarmRange="Gas2MfcAlarmRange"
  50. scEnableAlarm="Gas2MfcEnableAlarm"
  51. scAlarmTime="Gas2MfcAlarmTime"
  52. scFlowRegulationFactor="Gas2MfcFlowRegulationFactor"
  53. scDefaultSetPoint="" />
  54. <IoMfc id="MfcGas3" display="Gas3" schematicId="MFC3" unit="sccm"
  55. aiFlow="AI_MFC3_Flow" aoFlow="AO_MFC3_Flow_Setpoint" diOffline="" aoRange=""
  56. diPressureAlarm="DI_MFC3_Pressure"
  57. scGasName="Gas3Name"
  58. scEnable="Gas3Enable"
  59. scN2Scale="Gas3MfcN2Scale"
  60. scScaleFactor="Gas3MfcScaleFactor"
  61. scAlarmRange="Gas3MfcAlarmRange"
  62. scEnableAlarm="Gas3MfcEnableAlarm"
  63. scAlarmTime="Gas3MfcAlarmTime"
  64. scFlowRegulationFactor="Gas3MfcFlowRegulationFactor"
  65. scDefaultSetPoint="" />
  66. <IoMfc id="MfcGas4" display="Gas4" schematicId="MFC4" unit="sccm"
  67. aiFlow="AI_MFC4_Flow" aoFlow="AO_MFC4_Flow_Setpoint" diOffline="" aoRange=""
  68. diPressureAlarm="DI_MFC4_Pressure"
  69. scGasName="Gas4Name"
  70. scEnable="Gas4Enable"
  71. scN2Scale="Gas4MfcN2Scale"
  72. scScaleFactor="Gas4MfcScaleFactor"
  73. scAlarmRange="Gas4MfcAlarmRange"
  74. scEnableAlarm="Gas4MfcEnableAlarm"
  75. scAlarmTime="Gas4MfcAlarmTime"
  76. scFlowRegulationFactor="Gas4MfcFlowRegulationFactor"
  77. scDefaultSetPoint="" />
  78. <IoMfc id="MfcGas5" display="Gas5" schematicId="MFC5" unit="sccm"
  79. aiFlow="AI_MFC5_Flow" aoFlow="AO_MFC5_Flow_Setpoint" diOffline="" aoRange=""
  80. diPressureAlarm="DI_MFC5_Pressure"
  81. scGasName="Gas5Name"
  82. scEnable="Gas5Enable"
  83. scN2Scale="Gas5MfcN2Scale"
  84. scScaleFactor="Gas5MfcScaleFactor"
  85. scAlarmRange="Gas5MfcAlarmRange"
  86. scEnableAlarm="Gas5MfcEnableAlarm"
  87. scAlarmTime="Gas5MfcAlarmTime"
  88. scFlowRegulationFactor="Gas5MfcFlowRegulationFactor"
  89. scDefaultSetPoint="" />
  90. </IoMfcs>
  91. <IoGasSticks assembly="VirgoRT" classType="VirgoRT.Devices.IoGasStick">
  92. <IoGasStick id="GasStick1" display="" mfc ="MfcGas1" downvalve="ValveMfc1" />
  93. <IoGasStick id="GasStick2" display="" mfc ="MfcGas2" downvalve="ValveMfc2" />
  94. <IoGasStick id="GasStick3" display="" mfc ="MfcGas3" downvalve="ValveMfc3" />
  95. <IoGasStick id="GasStick4" display="" mfc ="MfcGas4" downvalve="ValveMfc4" />
  96. <IoGasStick id="GasStick5" display="" mfc ="MfcGas5" downvalve="ValveMfc5" />
  97. </IoGasSticks>
  98. <IoSensors>
  99. <IoSensor id="SensorATMSwitch" display="ATM Switch" schematicId="" unit="" di="DI_PM_ATM_SW" isLowAsNormal="" textOutTrigValue="true" infoText="" warningText="" alarmText="" />
  100. <IoSensor id="SensorVacSwitch" display="VAC Switch" schematicId="" unit="" di="DI_PM_VAC_SW" isLowAsNormal="" textOutTrigValue="true" infoText="" warningText="" alarmText="" />
  101. <IoSensor id="SensorWaterFlowOk" display="Water Flow OK" schematicId="" unit="" di="DI_Cooling_Water_Flow_SW" isLowAsNormal="" textOutTrigValue="false" infoText="" warningText="sensor water flow abnormal" alarmText="" />
  102. <IoSensor id="SensorCoolantInletTCOK" display="Coolant Inlet TC OK" schematicId="" unit="" di="DI_Coolant_Inlet_TC_Broken_Alarm" isLowAsNormal="" textOutTrigValue="true" infoText="" warningText="" alarmText="Coolant Inlet TC Broken Alarm" />
  103. <IoSensor id="SensorCoolantOutletTCOK" display="Coolant Outlet TC OK" schematicId="" unit="" di="DI_Coolant_Outlet_TC_Broken_Alarm" isLowAsNormal="" textOutTrigValue="true" infoText="" warningText="" alarmText="Coolant Outlet TC Broken Alarm" />
  104. <IoSensor id="SensorWaterLeakOk" display="Water Leak Ok" schematicId="" unit="" di="DI_Water_Leak" isLowAsNormal="" textOutTrigValue="false" infoText="" warningText="" alarmText="Sensor water leak" />
  105. <IoSensor id="N2PressureOk" display="N2 Pressure OK" schematicId="" unit="" di="DI_N2_Pressure" isLowAsNormal="" textOutTrigValue="false" infoText="" warningText="" alarmText="N2 Pressure Alarm" />
  106. <IoSensor id="LE_OT" display="LE OT" schematicId="" unit="" di="DI_LE_OT_SW_Alarm" isLowAsNormal="" textOutTrigValue="true" infoText="" warningText="" alarmText="LE OT SW Alarm" />
  107. <IoSensor id="GB_Pressure" display="GB Pressure" schematicId="" unit="" di="DI_GB_Pressure_SW_Alarm" isLowAsNormal="" textOutTrigValue="true" infoText="" warningText="" alarmText="GB Pressure SW Alarm" />
  108. <IoSensor id="GB_Door" display="GB Door" schematicId="" unit="" di="DI_GB_Door_SW_Alarm" isLowAsNormal="" textOutTrigValue="true" infoText="" warningText="" alarmText="GB Door SW Alarm" />
  109. <IoSensor id="SensorCDAPressureOk" display="CDA pressure OK" schematicId="" unit="" di="DI_CDA_Pressure" isLowAsNormal="" textOutTrigValue="false" infoText="" warningText="" alarmText="Sensor CDA pressure abnormal" />
  110. <IoSensor id="SensorArmNotExtend" display="Arm not Extend" schematicId="" unit="" di="DI_ARM_Not_Extend_to_PM" isLowAsNormal="" textOutTrigValue="true" infoText="Sensor arm extended" warningText="" alarmText="" />
  111. <IoSensor id="SourceFan1" display="Source Fan1" schematicId="" unit="" di="DI_SourceFan1" isLowAsNormal="" textOutTrigValue="false" infoText="" warningText="" alarmText="Source Fan1 Alarm" />
  112. <IoSensor id="SourceFan2" display="Source Fan2" schematicId="" unit="" di="DI_SourceFan2" isLowAsNormal="" textOutTrigValue="false" infoText="" warningText="" alarmText="Source Fan2 Alarm" />
  113. <IoSensor id="GeneratorInterlock" display="RF hardware interlock" di="DI_Generator_Hardware_Interlock" isLowAsNormal="" infoText="Generator interlock" warningText="" alarmText="" />
  114. </IoSensors>
  115. <IoPumps assembly="VirgoRT" classType="VirgoRT.Devices.IoPump" IsEnabled = "False">
  116. <IoPump id="MainPump" display="Main Pump" schematicId="MainPump" unit="mTorr"
  117. diBreakerState=""
  118. diRunning="DI_Pump_Running"
  119. diStart=""
  120. diStop=""
  121. diAlarm="DI_Pump_Alarm"
  122. diWarning="DI_Pump_Warning"
  123. diPumpTempAlarm=""
  124. diN2Alarm="DI_Pump_N2_Purge_Alarm"
  125. diWaterFlowAlarm="DI_Pump_Cool_Water_Flow_Alarm"
  126. diExhaustPressureAlarm="DI_Pump_Exhaust_Pressure_Alarm"
  127. doStart="DO_Pump_Start"
  128. doStop="DO_Pump_Stop"
  129. doWaterFlowAlarm=""
  130. doN2PressureAlarm=""
  131. aiWaterFlow=""
  132. aiN2Pressure=""
  133. aoN2PressureAlarmMaxValue=""
  134. aoN2PressureAlarmMinValue=""
  135. aoWaterFlowAlarmMaxValue=""
  136. aoWaterFlowAlarmMinValue=""
  137. scEnableDryPump="EnableDryPump"
  138. scEnableWaterFlow="PumpEnableWaterFlow"
  139. scWaterFlowMinValue="PumpWaterFlowMinValue"
  140. scWaterFlowMaxValue="PumpWaterFlowMaxValue"
  141. scWaterFlowOutOfToleranceWarningTime="PumpWaterFlowOutOfToleranceWarningTime"
  142. scWaterFlowOutOfToleranceAlarmTime="PumpWaterFlowOutOfToleranceAlarmTime"
  143. scEnableN2Pressure="PumpEnableN2Pressure"
  144. scN2PressureMinValue="PumpN2PressureMinValue"
  145. scN2PressureMaxValue="PumpN2PressureMaxValue"
  146. scN2PressureOutOfToleranceWarningTime="PumpN2PressureOutOfToleranceWarningTime"
  147. scN2PressureOutOfToleranceAlarmTime="PumpN2PressureOutOfToleranceAlarmTime" />
  148. </IoPumps>
  149. <IoPressureMeters assembly="VirgoRT" classType="VirgoRT.Devices.IODevices.IoPressureMeter">
  150. <IoPressureMeter id="ProcessGauge" display="process Pressure" schematicId="" unit="mTorr"
  151. aiValue="AI_Process_pressure" diGaugeFail="DI_Process_pressure_Alarm" scPrecision="" scOffset=""/>
  152. <IoPressureMeter id="PressureGauge" display="Chamber Pressure" schematicId="" unit="mTorr"
  153. aiValue="AI_Chamber_pressure"
  154. diGaugeFail="DI_Chamber_pressure_Alarm"
  155. scPrecision="ChamberPressureGaugePrecision"
  156. scOffset=""/>
  157. <IoPressureMeter id="ForelineGauge" display="Foreline Pressure" schematicId="" unit="mTorr"
  158. aiValue="AI_Foreline_pressure" diGaugeFail="DI_Foreline_pressure_Alarm" scPrecision="" scOffset=""/>
  159. </IoPressureMeters>
  160. <IoThrottleValves assembly="VirgoRT" classType="VirgoRT.Devices.IoThrottleValve">
  161. <IoThrottleValve id="ThrottleValve" display="" schematicId="" unit=""
  162. aiPositionFeedback="AI_Throttle_Valve_Real_Position"
  163. aiPressureFeedback="AI_Throttle_Valve_Real_Pressure"
  164. aiState=""
  165. aoPositionSetPoint="AO_Throttle_Valve_Position_Setpoint"
  166. aoPressureSetPoint="AO_Throttle_Valve_Pressure_Setpoint"
  167. aoPressureMode="AO_Throttle_Valve_Work_Mode" />
  168. </IoThrottleValves>
  169. <IoPressureControls assembly="VirgoRT" classType="VirgoRT.Devices.IoPressureControl">
  170. <IoPressureControl id="PressureControl" display="PressureControl" schematicId="PressureControl" unit="mTorr"
  171. diLogicProcessGasFlowing=""
  172. scGasFlowPressureAlarmRange="GasFlowPressureAlarmRange"
  173. scGasFlowPressureAlarmTime="GasFlowPressureAlarmTime"
  174. scIsIndependentControl="IsIndependentControl"
  175. scIsBoostPumpInstalled="EnableBoosterPump"
  176. scTvInstalled="EnableThrottleValve"
  177. boost="" tv="ThrottleValve" drypump="MainPump"
  178. pressureMeter ="PressureGauge" processMeter="ProcessGauge" forelineMeter="ForelineGauge" />
  179. </IoPressureControls>
  180. <IoRfs assembly="VirgoRT" classType="VirgoRT.Devices.IoRf" IsEnabled = "False">
  181. <IoRf id="Rf"
  182. display="RF Generator"
  183. schematicId=""
  184. unit=""
  185. doOnOff="DO_Generator_Power_ON"
  186. diOnOffFeedback="DI_Generator_Power_Status"
  187. diInterlock="DI_Generator_Hardware_Interlock"
  188. diOverTemp ="DI_Generator_Over_Temp"
  189. aiCurrent=""
  190. aiVoltage=""
  191. diBreakerState=""
  192. diIArc=""
  193. diOffline=""
  194. diVArc=""
  195. doWaterFlowAlarm=""
  196. doWaterFlowWarning=""
  197. aoMatchMode=""
  198. aoMatchPositionC1=""
  199. aoMatchPositionC2=""
  200. aoWorkMode=""
  201. aoFrequency=""
  202. aoDuty=""
  203. aoPower="AO_Generator_Power_Setpoint"
  204. aoCoefficient=""
  205. aiWaterFlow=""
  206. aiForwardPower="AI_Generator_Forward_Power"
  207. aiReflectPower="AI_Generator_Reflect_Power"
  208. aiMatchMode =""
  209. aiMatchPositionC1=""
  210. aiMatchPositionC2=""
  211. scMatchMode="MatchMode"
  212. scMatchPositionC1="MatchPositionC1"
  213. scMatchPositionC2="MatchPositionC2"
  214. scPowerAlarmRange="RfPowerAlarmRange"
  215. scPowerAlarmTime="RfPowerAlarmTime"
  216. scReflectPowerAlarmRange="RfReflectPowerAlarmRange"
  217. scReflectPowerAlarmTime="RfReflectPowerAlarmTime"
  218. scPowerRange="PowerRange"
  219. scCoefficient="Coefficient"
  220. scEnablePulsingFunction="EnablePulsingFunction"
  221. scEnableC1C2Position="EnableC1C2Position"
  222. scEnableReflectPower="EnableReflectPower"
  223. scEnableVoltageCurrent="EnableVoltageCurrent"
  224. scPowerRegulationFactor="PowerRegulationFactor" />
  225. </IoRfs>
  226. <IoHeaters assembly="VirgoRT" classType="VirgoRT.Devices.IoHeater">
  227. <IoHeater id="HeaterChamber" display="Chamber Heater" schematicId="VCHTR" unit="℃"
  228. doPowerOn="DO_Substrate_Heater_On"
  229. diDeviation="DI_Substrate_TC_Deviation_out_of_range"
  230. diPowerOnFeedback="DI_Substrate_Heater_On_FB"
  231. diControlTcBroken="DI_Substrate_Control_TC_Broken_Alarm"
  232. diMonitorTcBroken="DI_Substrate_Monitor_TC_Broken_Alarm"
  233. aoSetPoint="AO_Substrate_Temperature_Setpoint"
  234. aoSetPointLimit="AO_Substrate_Temp_Limit_Setpoint"
  235. aiFeedback="AI_Substrate_Control_TC_Temp"
  236. aiMonitor="AI_Substrate_Monitor_TC_Temp"
  237. aiCoolantInletTemp="AI_Coolant_Inlet_Temp"
  238. aiCoolantOutletTemp="AI_Coolant_Outlet_Temp"
  239. scSetPointLimit="ChamberHeaterSetPointLimit" />
  240. <IoHeater id="ForelineHeater" display="Foreline Heater" schematicId="" unit="℃"
  241. doPowerOn="DO_Forline_Heater_On"
  242. diDeviation="DI_Foreline_TC_Deviation_out_of_range"
  243. diPowerOnFeedback="DI_Foreline_Heater_On_FB"
  244. diControlTcBroken="DI_Foreline_Control_TC_Broken_Alarm"
  245. diMonitorTcBroken="DI_Foreline_Monitor_TC_Broken_Alarm"
  246. aoSetPoint="AO_Foreline_Temperature_Setpoint"
  247. aoSetPointLimit="AO_Foreline_Temp_Limit_Setpoint"
  248. aiFeedback="AI_Foreline_Control_TC_Temp"
  249. aiMonitor="AI_Foreline_Monitor_TC_Temp"
  250. scSetPointLimit="ForeLineHeaterSetPointLimit" />
  251. <IoHeater id="WallHeater" display="Wall Heater" schematicId="" unit="℃"
  252. doPowerOn="DO_CHB_Wall_Heater_On"
  253. diDeviation="DI_CHB_Wall_TC_Deviation_out_of_range"
  254. diPowerOnFeedback="DI_CHB_Wall_Heater_On_FB"
  255. diControlTcBroken="DI_CHB_Wall_Control_TC_Broken_Alarm"
  256. diMonitorTcBroken="DI_CHB_Wall_Monitor_TC_Broken_Alarm"
  257. aoSetPoint="AO_CHB_Wall_Temperature_Setpoint"
  258. aoSetPointLimit="AO_CHB_Wall_Temp_Limit_Setpoint"
  259. aiFeedback="AI_CHB_Wall_Control_TC_Temp"
  260. aiMonitor="AI_CHB_Wall_Monitor_TC_Temp"
  261. scSetPointLimit="WallHeaterSetPointLimit" />
  262. <IoHeater id="GridHeater" display="Grid Heater" schematicId="" unit="℃"
  263. doPowerOn=""
  264. diDeviation=""
  265. diPowerOnFeedback=""
  266. diControlTcBroken="DI_Grid_TC_Broken_Alarm"
  267. diMonitorTcBroken=""
  268. aoSetPoint=""
  269. aoSetPointLimit=""
  270. aiFeedback="AI_Grid_TC_Temp"
  271. aiMonitor=""
  272. scSetPointLimit="" />
  273. </IoHeaters>
  274. <IoHeartbeats assembly="VirgoRT" classType=" VirgoRT.Devices.IODevices.IoHeartbeat">
  275. <IoHeartbeat id="Heartbeat" display="" schematicId="" unit="" ao="AO_Heartbeat" ai="AI_Heartbeat_FB" />
  276. </IoHeartbeats>
  277. <IoResets>
  278. <IoReset id="ResetPlcSignal" display="" schematicId="" unit="" doReset="DO_Reset_Signal" />
  279. </IoResets>
  280. <IoSetConfigs>
  281. <IoSetConfig id="SetProcessPressureOffset" display="" schematicId="" unit="" aoPressureOffset="AO_Process_Pressure_Offset_Value" />
  282. </IoSetConfigs>
  283. <IoStatisticss>
  284. <IoStatistics id="StatisticsRfOnTime" display="RF On Statistics" schematicId="" unit=""
  285. diMonitorSignal="DI_Generator_Power_Status"
  286. scLastPMTime="RfOnTimeLastPMTime"
  287. scTimeFromLastPM="RfOnTimeFromLastPM"
  288. scTimeTotal="RfOnTimeTotal"
  289. scEnableAlarm="RfOnTimeEnableAlarm"
  290. scPMInterval="RfOnTimePMInterval" />
  291. <IoStatistics id="StatisticsPumpOnTime" display="Pump On Statistics" schematicId="" unit=""
  292. diMonitorSignal="DI_Pump_Running"
  293. scLastPMTime="PumpOnTimeLastPMTime"
  294. scTimeFromLastPM="PumpOnTimeFromLastPM"
  295. scTimeTotal="PumpOnTimeTotal"
  296. scEnableAlarm="PumpOnTimeEnableAlarm"
  297. scPMInterval="PumpOnTimePMInterval" />
  298. </IoStatisticss>
  299. <IoPlcDateTimes>
  300. <IoPlcDateTime id="PlcDateTime" display="PlcDateTime" schematicId="" unit=""
  301. aiYear="AI_Year" aiMonth="AI_Month" aiDay="AI_Day" aiHour="AI_Time" aiMinute="AI_Minute" aiSecond="AI_Second" />
  302. </IoPlcDateTimes>
  303. <IoCylinders assembly="VirgoRT" classType="VirgoRT.Devices.IoCylinder">
  304. <IoCylinder id="LiftPin" display="lifter Pin" schematicId="" unit="" doMotorRelay=""
  305. doON="DO_Lift_Pin_Up" doOFF="DO_Lift_Pin_Down" diON="DI_Lift_Pin_Up" diOFF="DI_Lift_Pin_Down" />
  306. <IoCylinder id="SlitDoor" display="Slit door" schematicId="" unit="" doMotorRelay=""
  307. doON="DO_Slit_Door_Open" doOFF="DO_Slit_Door_Close" diON="DI_Slit_Door_Open_Pos" diOFF="DI_Slit_Door_Close_Pos" />
  308. <IoCylinder id="SmallPin" display="Small Pin" schematicId="" unit=""
  309. doON="DO_Guide_Pin_Small_Lifter_Up" doOFF="DO_Guide_Pin_Small_Lifter_Down"
  310. diON="DI_Guide_Pin_Small_Lifter_Up_Pos" diOFF="DI_Guide_Pin_Small_Lifter_Down_Pos" />
  311. <IoCylinder id="MediumPin" display="Medium Pin" schematicId="" unit=""
  312. doON="DO_Guide_Pin_Medium_Lifter_Up" doOFF="DO_Guide_Pin_Medium_Lifter_Down"
  313. diON="DI_Guide_Pin_Medium_Lifter_Up_Pos" diOFF="DI_Guide_Pin_Medium_Lifter_Down_Pos" />
  314. </IoCylinders>
  315. <IoLids assembly="VirgoRT" classType=" VirgoRT.Devices.IODevices.IoLid">
  316. <IoLid id="Lid" display="Lid" schematicId="" unit="" doMotorRelay="" doON="" doOFF="" diON="" diOFF="DI_Lid_Closed" />
  317. </IoLids>
  318. <IoMessage assembly="VirgoRT" classType=" VirgoRT.Devices.IODevices.IoMessage">
  319. <IoMessage id="Messager" display="Messager" schematicId="" unit="" doMotorRelay="" ai="" ao="AO_BaisRF_Enable" />
  320. </IoMessage>
  321. <IoPumpCtrls assembly="VirgoRT" classType="VirgoRT.Devices.IODevices.IoPumpCtrl">
  322. <IoPumpCtrl id="PumpCtrl" display="Lid" schematicId="" unit="" aoPumpIOCTRLEnable="AO_Pump_IO_CTRL_Enable" doPumpRun="DO_Pump_Run" doPumpStop="DO_Pump_Stop" diDryPumpRunning="DI_Dry_Pump_Running" diBoosterPumpRunning="" diPumpRemoteStatus="DI_Pump_Remote_Status" diPumpAlarm="DI_Pump_Alarm"/>
  323. </IoPumpCtrls>
  324. </DeviceModelDefine>