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- <?xml version="1.0" encoding="utf-16"?>
- <DeviceModelDefine type="Virgo" xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance" xsi:noNamespaceSchemaLocation="DeviceModel.xsd">
- <IoValves>
- <IoValve id="ValveMfc1" display="MFC1 Valve" schematicId="SV1" unit="" isNc="true"
- isDefaultOpen="false" diOpen="" doOpen="DO_MFC1_Valve" diCloseSensor="" diOpenSensor="" />
- <IoValve id="ValveMfc2" display="MFC2 Valve" schematicId="SV2" unit="" isNc="true"
- isDefaultOpen="false" diOpen="" doOpen="DO_MFC2_Valve" diCloseSensor="" diOpenSensor="" />
- <IoValve id="ValveMfc3" display="MFC3 Valve" schematicId="SV3" unit="" isNc="true"
- isDefaultOpen="false" diOpen="" doOpen="DO_MFC3_Valve" diCloseSensor="" diOpenSensor="" />
- <IoValve id="ValveMfc4" display="MFC4 Valve" schematicId="SV13" unit="" isNc="true"
- isDefaultOpen="false" diOpen="" doOpen="DO_MFC4_Valve" diCloseSensor="" diOpenSensor="" />
- <IoValve id="ValveMfc5" display="MFC5 Valve" schematicId="SV14" unit="" isNc="true"
- isDefaultOpen="false" diOpen="" doOpen="DO_MFC5_Valve" diCloseSensor="" diOpenSensor="" />
-
- <IoValve id="ValveChamberPurge" display="Purge valve" schematicId="SV6"
- unit="" isNc="true" isDefaultOpen="false" diOpen="" doOpen="DO_Chamber_purge_valve" diCloseSensor="" diOpenSensor="" />
- <IoValve id="ValveProcess" display="Process gas final valve" schematicId=""
- unit="" isNc="true" isDefaultOpen="false" diOpen="" doOpen="DO_Process_gas_final_valve"
- diCloseSensor="" diOpenSensor="" />
- <IoValve id="ValveSoftPumping" display="Soft pumping valve" schematicId=""
- unit="" isNc="true" isDefaultOpen="false" diOpen="" doOpen="DO_Soft_Pumping_Valve"
- diCloseSensor="" diOpenSensor="" />
- <IoValve id="ValveFastPumping" display="Fast pumping valve" schematicId=""
- unit="" isNc="true" isDefaultOpen="false" diOpen="" doOpen="DO_Fast_Pumping_Valve"
- diCloseSensor="" diOpenSensor="" />
- <IoValve id="ValveFastVent" display="Fast vent valve" schematicId=""
- unit="" isNc="true" isDefaultOpen="false" diOpen="" doOpen="DO_Chamber_vent_valve"
- diCloseSensor="" diOpenSensor="" />
- </IoValves>
- <IoMfcs assembly="VirgoRT" classType="VirgoRT.Devices.IODevices.IoMfc">
- <IoMfc id="MfcGas1" display="Gas1" schematicId="MFC1" unit="sccm"
- aiFlow="AI_MFC1_Flow" aoFlow="AO_MFC1_Flow_Setpoint" diOffline="" aoRange=""
- diPressureAlarm="DI_MFC1_Pressure"
- scGasName="Gas1Name"
- scEnable="Gas1Enable"
- scN2Scale="Gas1MfcN2Scale"
- scScaleFactor="Gas1MfcScaleFactor"
- scAlarmRange="Gas1MfcAlarmRange"
- scEnableAlarm="Gas1MfcEnableAlarm"
- scAlarmTime="Gas1MfcAlarmTime"
- scFlowRegulationFactor="Gas1MfcFlowRegulationFactor"
- scDefaultSetPoint="" />
- <IoMfc id="MfcGas2" display="Gas2" schematicId="MFC2" unit="sccm"
- aiFlow="AI_MFC2_Flow" aoFlow="AO_MFC2_Flow_Setpoint" diOffline="" aoRange=""
- diPressureAlarm="DI_MFC2_Pressure"
- scGasName="Gas2Name"
- scEnable="Gas2Enable"
- scN2Scale="Gas2MfcN2Scale"
- scScaleFactor="Gas2MfcScaleFactor"
- scAlarmRange="Gas2MfcAlarmRange"
- scEnableAlarm="Gas2MfcEnableAlarm"
- scAlarmTime="Gas2MfcAlarmTime"
- scFlowRegulationFactor="Gas2MfcFlowRegulationFactor"
- scDefaultSetPoint="" />
- <IoMfc id="MfcGas3" display="Gas3" schematicId="MFC3" unit="sccm"
- aiFlow="AI_MFC3_Flow" aoFlow="AO_MFC3_Flow_Setpoint" diOffline="" aoRange=""
- diPressureAlarm="DI_MFC3_Pressure"
- scGasName="Gas3Name"
- scEnable="Gas3Enable"
- scN2Scale="Gas3MfcN2Scale"
- scScaleFactor="Gas3MfcScaleFactor"
- scAlarmRange="Gas3MfcAlarmRange"
- scEnableAlarm="Gas3MfcEnableAlarm"
- scAlarmTime="Gas3MfcAlarmTime"
- scFlowRegulationFactor="Gas3MfcFlowRegulationFactor"
- scDefaultSetPoint="" />
- <IoMfc id="MfcGas4" display="Gas4" schematicId="MFC4" unit="sccm"
- aiFlow="AI_MFC4_Flow" aoFlow="AO_MFC4_Flow_Setpoint" diOffline="" aoRange=""
- diPressureAlarm="DI_MFC4_Pressure"
- scGasName="Gas4Name"
- scEnable="Gas4Enable"
- scN2Scale="Gas4MfcN2Scale"
- scScaleFactor="Gas4MfcScaleFactor"
- scAlarmRange="Gas4MfcAlarmRange"
- scEnableAlarm="Gas4MfcEnableAlarm"
- scAlarmTime="Gas4MfcAlarmTime"
- scFlowRegulationFactor="Gas4MfcFlowRegulationFactor"
- scDefaultSetPoint="" />
- <IoMfc id="MfcGas5" display="Gas5" schematicId="MFC5" unit="sccm"
- aiFlow="AI_MFC5_Flow" aoFlow="AO_MFC5_Flow_Setpoint" diOffline="" aoRange=""
- diPressureAlarm="DI_MFC5_Pressure"
- scGasName="Gas5Name"
- scEnable="Gas5Enable"
- scN2Scale="Gas5MfcN2Scale"
- scScaleFactor="Gas5MfcScaleFactor"
- scAlarmRange="Gas5MfcAlarmRange"
- scEnableAlarm="Gas5MfcEnableAlarm"
- scAlarmTime="Gas5MfcAlarmTime"
- scFlowRegulationFactor="Gas5MfcFlowRegulationFactor"
- scDefaultSetPoint="" />
- </IoMfcs>
- <IoGasSticks assembly="VirgoRT" classType="VirgoRT.Devices.IoGasStick">
- <IoGasStick id="GasStick1" display="" mfc ="MfcGas1" downvalve="ValveMfc1" />
- <IoGasStick id="GasStick2" display="" mfc ="MfcGas2" downvalve="ValveMfc2" />
- <IoGasStick id="GasStick3" display="" mfc ="MfcGas3" downvalve="ValveMfc3" />
- <IoGasStick id="GasStick4" display="" mfc ="MfcGas4" downvalve="ValveMfc4" />
- <IoGasStick id="GasStick5" display="" mfc ="MfcGas5" downvalve="ValveMfc5" />
- </IoGasSticks>
- <IoSensors>
- <IoSensor id="SensorATMSwitch" display="ATM Switch" schematicId="" unit="" di="DI_PM_ATM_SW" isLowAsNormal="" textOutTrigValue="true" infoText="" warningText="" alarmText="" />
- <IoSensor id="SensorVacSwitch" display="VAC Switch" schematicId="" unit="" di="DI_PM_VAC_SW" isLowAsNormal="" textOutTrigValue="true" infoText="" warningText="" alarmText="" />
- <IoSensor id="SensorWaterFlowOk" display="Water Flow OK" schematicId="" unit="" di="DI_Cooling_Water_Flow_SW" isLowAsNormal="" textOutTrigValue="false" infoText="" warningText="sensor water flow abnormal" alarmText="" />
- <IoSensor id="SensorCoolantInletTCOK" display="Coolant Inlet TC OK" schematicId="" unit="" di="DI_Coolant_Inlet_TC_Broken_Alarm" isLowAsNormal="" textOutTrigValue="true" infoText="" warningText="" alarmText="Coolant Inlet TC Broken Alarm" />
- <IoSensor id="SensorCoolantOutletTCOK" display="Coolant Outlet TC OK" schematicId="" unit="" di="DI_Coolant_Outlet_TC_Broken_Alarm" isLowAsNormal="" textOutTrigValue="true" infoText="" warningText="" alarmText="Coolant Outlet TC Broken Alarm" />
- <IoSensor id="SensorWaterLeakOk" display="Water Leak Ok" schematicId="" unit="" di="DI_Water_Leak" isLowAsNormal="" textOutTrigValue="false" infoText="" warningText="" alarmText="Sensor water leak" />
- <IoSensor id="N2PressureOk" display="N2 Pressure OK" schematicId="" unit="" di="DI_N2_Pressure" isLowAsNormal="" textOutTrigValue="false" infoText="" warningText="" alarmText="N2 Pressure Alarm" />
-
- <IoSensor id="LE_OT" display="LE OT" schematicId="" unit="" di="DI_LE_OT_SW_Alarm" isLowAsNormal="" textOutTrigValue="true" infoText="" warningText="" alarmText="LE OT SW Alarm" />
- <IoSensor id="GB_Pressure" display="GB Pressure" schematicId="" unit="" di="DI_GB_Pressure_SW_Alarm" isLowAsNormal="" textOutTrigValue="true" infoText="" warningText="" alarmText="GB Pressure SW Alarm" />
- <IoSensor id="GB_Door" display="GB Door" schematicId="" unit="" di="DI_GB_Door_SW_Alarm" isLowAsNormal="" textOutTrigValue="true" infoText="" warningText="" alarmText="GB Door SW Alarm" />
- <IoSensor id="SensorCDAPressureOk" display="CDA pressure OK" schematicId="" unit="" di="DI_CDA_Pressure" isLowAsNormal="" textOutTrigValue="false" infoText="" warningText="" alarmText="Sensor CDA pressure abnormal" />
- <IoSensor id="SensorArmNotExtend" display="Arm not Extend" schematicId="" unit="" di="DI_ARM_Not_Extend_to_PM" isLowAsNormal="" textOutTrigValue="true" infoText="Sensor arm extended" warningText="" alarmText="" />
- <IoSensor id="SourceFan1" display="Source Fan1" schematicId="" unit="" di="DI_SourceFan1" isLowAsNormal="" textOutTrigValue="false" infoText="" warningText="" alarmText="Source Fan1 Alarm" />
- <IoSensor id="SourceFan2" display="Source Fan2" schematicId="" unit="" di="DI_SourceFan2" isLowAsNormal="" textOutTrigValue="false" infoText="" warningText="" alarmText="Source Fan2 Alarm" />
- <IoSensor id="GeneratorInterlock" display="RF hardware interlock" di="DI_Generator_Hardware_Interlock" isLowAsNormal="" infoText="Generator interlock" warningText="" alarmText="" />
- </IoSensors>
- <IoPumps assembly="VirgoRT" classType="VirgoRT.Devices.IoPump" IsEnabled = "False">
- <IoPump id="MainPump" display="Main Pump" schematicId="MainPump" unit="mTorr"
- diBreakerState=""
- diRunning="DI_Pump_Running"
- diStart=""
- diStop=""
- diAlarm="DI_Pump_Alarm"
- diWarning="DI_Pump_Warning"
- diPumpTempAlarm=""
- diN2Alarm="DI_Pump_N2_Purge_Alarm"
- diWaterFlowAlarm="DI_Pump_Cool_Water_Flow_Alarm"
- diExhaustPressureAlarm="DI_Pump_Exhaust_Pressure_Alarm"
- doStart="DO_Pump_Start"
- doStop="DO_Pump_Stop"
- doWaterFlowAlarm=""
- doN2PressureAlarm=""
- aiWaterFlow=""
- aiN2Pressure=""
- aoN2PressureAlarmMaxValue=""
- aoN2PressureAlarmMinValue=""
- aoWaterFlowAlarmMaxValue=""
- aoWaterFlowAlarmMinValue=""
- scEnableDryPump="EnableDryPump"
- scEnableWaterFlow="PumpEnableWaterFlow"
- scWaterFlowMinValue="PumpWaterFlowMinValue"
- scWaterFlowMaxValue="PumpWaterFlowMaxValue"
- scWaterFlowOutOfToleranceWarningTime="PumpWaterFlowOutOfToleranceWarningTime"
- scWaterFlowOutOfToleranceAlarmTime="PumpWaterFlowOutOfToleranceAlarmTime"
- scEnableN2Pressure="PumpEnableN2Pressure"
- scN2PressureMinValue="PumpN2PressureMinValue"
- scN2PressureMaxValue="PumpN2PressureMaxValue"
- scN2PressureOutOfToleranceWarningTime="PumpN2PressureOutOfToleranceWarningTime"
- scN2PressureOutOfToleranceAlarmTime="PumpN2PressureOutOfToleranceAlarmTime" />
- </IoPumps>
- <IoPressureMeters assembly="VirgoRT" classType="VirgoRT.Devices.IODevices.IoPressureMeter">
- <IoPressureMeter id="ProcessGauge" display="process Pressure" schematicId="" unit="mTorr"
- aiValue="AI_Process_pressure" diGaugeFail="DI_Process_pressure_Alarm" scPrecision="" scOffset=""/>
- <IoPressureMeter id="PressureGauge" display="Chamber Pressure" schematicId="" unit="mTorr"
- aiValue="AI_Chamber_pressure"
- diGaugeFail="DI_Chamber_pressure_Alarm"
- scPrecision="ChamberPressureGaugePrecision"
- scOffset=""/>
- <IoPressureMeter id="ForelineGauge" display="Foreline Pressure" schematicId="" unit="mTorr"
- aiValue="AI_Foreline_pressure" diGaugeFail="DI_Foreline_pressure_Alarm" scPrecision="" scOffset=""/>
- </IoPressureMeters>
- <IoThrottleValves assembly="VirgoRT" classType="VirgoRT.Devices.IoThrottleValve">
- <IoThrottleValve id="ThrottleValve" display="" schematicId="" unit=""
- aiPositionFeedback="AI_Throttle_Valve_Real_Position"
- aiPressureFeedback="AI_Throttle_Valve_Real_Pressure"
- aiState=""
- aoPositionSetPoint="AO_Throttle_Valve_Position_Setpoint"
- aoPressureSetPoint="AO_Throttle_Valve_Pressure_Setpoint"
- aoPressureMode="AO_Throttle_Valve_Work_Mode" />
- </IoThrottleValves>
- <IoPressureControls assembly="VirgoRT" classType="VirgoRT.Devices.IoPressureControl">
- <IoPressureControl id="PressureControl" display="PressureControl" schematicId="PressureControl" unit="mTorr"
- diLogicProcessGasFlowing=""
- scGasFlowPressureAlarmRange="GasFlowPressureAlarmRange"
- scGasFlowPressureAlarmTime="GasFlowPressureAlarmTime"
- scIsIndependentControl="IsIndependentControl"
- scIsBoostPumpInstalled="EnableBoosterPump"
- scTvInstalled="EnableThrottleValve"
- boost="" tv="ThrottleValve" drypump="MainPump"
- pressureMeter ="PressureGauge" processMeter="ProcessGauge" forelineMeter="ForelineGauge" />
- </IoPressureControls>
- <IoRfs assembly="VirgoRT" classType="VirgoRT.Devices.IoRf" IsEnabled = "False">
- <IoRf id="Rf"
- display="RF Generator"
- schematicId=""
- unit=""
- doOnOff="DO_Generator_Power_ON"
- diOnOffFeedback="DI_Generator_Power_Status"
- diInterlock="DI_Generator_Hardware_Interlock"
- diOverTemp ="DI_Generator_Over_Temp"
- aiCurrent=""
- aiVoltage=""
- diBreakerState=""
- diIArc=""
- diOffline=""
- diVArc=""
- doWaterFlowAlarm=""
- doWaterFlowWarning=""
- aoMatchMode=""
- aoMatchPositionC1=""
- aoMatchPositionC2=""
- aoWorkMode=""
- aoFrequency=""
- aoDuty=""
- aoPower="AO_Generator_Power_Setpoint"
- aoCoefficient=""
- aiWaterFlow=""
- aiForwardPower="AI_Generator_Forward_Power"
- aiReflectPower="AI_Generator_Reflect_Power"
- aiMatchMode =""
- aiMatchPositionC1=""
- aiMatchPositionC2=""
- scMatchMode="MatchMode"
- scMatchPositionC1="MatchPositionC1"
- scMatchPositionC2="MatchPositionC2"
- scPowerAlarmRange="RfPowerAlarmRange"
- scPowerAlarmTime="RfPowerAlarmTime"
- scReflectPowerAlarmRange="RfReflectPowerAlarmRange"
- scReflectPowerAlarmTime="RfReflectPowerAlarmTime"
- scPowerRange="PowerRange"
- scCoefficient="Coefficient"
- scEnablePulsingFunction="EnablePulsingFunction"
- scEnableC1C2Position="EnableC1C2Position"
- scEnableReflectPower="EnableReflectPower"
- scEnableVoltageCurrent="EnableVoltageCurrent"
- scPowerRegulationFactor="PowerRegulationFactor" />
- </IoRfs>
- <IoHeaters assembly="VirgoRT" classType="VirgoRT.Devices.IoHeater">
- <IoHeater id="HeaterChamber" display="Chamber Heater" schematicId="VCHTR" unit="℃"
- doPowerOn="DO_Substrate_Heater_On"
- diDeviation="DI_Substrate_TC_Deviation_out_of_range"
- diPowerOnFeedback="DI_Substrate_Heater_On_FB"
- diControlTcBroken="DI_Substrate_Control_TC_Broken_Alarm"
- diMonitorTcBroken="DI_Substrate_Monitor_TC_Broken_Alarm"
- aoSetPoint="AO_Substrate_Temperature_Setpoint"
- aoSetPointLimit="AO_Substrate_Temp_Limit_Setpoint"
- aiFeedback="AI_Substrate_Control_TC_Temp"
- aiMonitor="AI_Substrate_Monitor_TC_Temp"
- aiCoolantInletTemp="AI_Coolant_Inlet_Temp"
- aiCoolantOutletTemp="AI_Coolant_Outlet_Temp"
- scSetPointLimit="ChamberHeaterSetPointLimit" />
- <IoHeater id="ForelineHeater" display="Foreline Heater" schematicId="" unit="℃"
- doPowerOn="DO_Forline_Heater_On"
- diDeviation="DI_Foreline_TC_Deviation_out_of_range"
- diPowerOnFeedback="DI_Foreline_Heater_On_FB"
- diControlTcBroken="DI_Foreline_Control_TC_Broken_Alarm"
- diMonitorTcBroken="DI_Foreline_Monitor_TC_Broken_Alarm"
- aoSetPoint="AO_Foreline_Temperature_Setpoint"
- aoSetPointLimit="AO_Foreline_Temp_Limit_Setpoint"
- aiFeedback="AI_Foreline_Control_TC_Temp"
- aiMonitor="AI_Foreline_Monitor_TC_Temp"
- scSetPointLimit="ForeLineHeaterSetPointLimit" />
- <IoHeater id="WallHeater" display="Wall Heater" schematicId="" unit="℃"
- doPowerOn="DO_CHB_Wall_Heater_On"
- diDeviation="DI_CHB_Wall_TC_Deviation_out_of_range"
- diPowerOnFeedback="DI_CHB_Wall_Heater_On_FB"
- diControlTcBroken="DI_CHB_Wall_Control_TC_Broken_Alarm"
- diMonitorTcBroken="DI_CHB_Wall_Monitor_TC_Broken_Alarm"
- aoSetPoint="AO_CHB_Wall_Temperature_Setpoint"
- aoSetPointLimit="AO_CHB_Wall_Temp_Limit_Setpoint"
- aiFeedback="AI_CHB_Wall_Control_TC_Temp"
- aiMonitor="AI_CHB_Wall_Monitor_TC_Temp"
- scSetPointLimit="WallHeaterSetPointLimit" />
- <IoHeater id="GridHeater" display="Grid Heater" schematicId="" unit="℃"
- doPowerOn=""
- diDeviation=""
- diPowerOnFeedback=""
- diControlTcBroken="DI_Grid_TC_Broken_Alarm"
- diMonitorTcBroken=""
- aoSetPoint=""
- aoSetPointLimit=""
- aiFeedback="AI_Grid_TC_Temp"
- aiMonitor=""
- scSetPointLimit="" />
- </IoHeaters>
- <IoHeartbeats assembly="VirgoRT" classType=" VirgoRT.Devices.IODevices.IoHeartbeat">
- <IoHeartbeat id="Heartbeat" display="" schematicId="" unit="" ao="AO_Heartbeat" ai="AI_Heartbeat_FB" />
- </IoHeartbeats>
- <IoResets>
- <IoReset id="ResetPlcSignal" display="" schematicId="" unit="" doReset="DO_Reset_Signal" />
- </IoResets>
- <IoSetConfigs>
- <IoSetConfig id="SetProcessPressureOffset" display="" schematicId="" unit="" aoPressureOffset="AO_Process_Pressure_Offset_Value" />
- </IoSetConfigs>
- <IoStatisticss>
- <IoStatistics id="StatisticsRfOnTime" display="RF On Statistics" schematicId="" unit=""
- diMonitorSignal="DI_Generator_Power_Status"
- scLastPMTime="RfOnTimeLastPMTime"
- scTimeFromLastPM="RfOnTimeFromLastPM"
- scTimeTotal="RfOnTimeTotal"
- scEnableAlarm="RfOnTimeEnableAlarm"
- scPMInterval="RfOnTimePMInterval" />
- <IoStatistics id="StatisticsPumpOnTime" display="Pump On Statistics" schematicId="" unit=""
- diMonitorSignal="DI_Pump_Running"
- scLastPMTime="PumpOnTimeLastPMTime"
- scTimeFromLastPM="PumpOnTimeFromLastPM"
- scTimeTotal="PumpOnTimeTotal"
- scEnableAlarm="PumpOnTimeEnableAlarm"
- scPMInterval="PumpOnTimePMInterval" />
- </IoStatisticss>
- <IoPlcDateTimes>
- <IoPlcDateTime id="PlcDateTime" display="PlcDateTime" schematicId="" unit=""
- aiYear="AI_Year" aiMonth="AI_Month" aiDay="AI_Day" aiHour="AI_Time" aiMinute="AI_Minute" aiSecond="AI_Second" />
- </IoPlcDateTimes>
- <IoCylinders assembly="VirgoRT" classType="VirgoRT.Devices.IoCylinder">
- <IoCylinder id="LiftPin" display="lifter Pin" schematicId="" unit="" doMotorRelay=""
- doON="DO_Lift_Pin_Up" doOFF="DO_Lift_Pin_Down" diON="DI_Lift_Pin_Up" diOFF="DI_Lift_Pin_Down" />
- <IoCylinder id="SlitDoor" display="Slit door" schematicId="" unit="" doMotorRelay=""
- doON="DO_Slit_Door_Open" doOFF="DO_Slit_Door_Close" diON="DI_Slit_Door_Open_Pos" diOFF="DI_Slit_Door_Close_Pos" />
- <IoCylinder id="SmallPin" display="Small Pin" schematicId="" unit=""
- doON="DO_Guide_Pin_Small_Lifter_Up" doOFF="DO_Guide_Pin_Small_Lifter_Down"
- diON="DI_Guide_Pin_Small_Lifter_Up_Pos" diOFF="DI_Guide_Pin_Small_Lifter_Down_Pos" />
- <IoCylinder id="MediumPin" display="Medium Pin" schematicId="" unit=""
- doON="DO_Guide_Pin_Medium_Lifter_Up" doOFF="DO_Guide_Pin_Medium_Lifter_Down"
- diON="DI_Guide_Pin_Medium_Lifter_Up_Pos" diOFF="DI_Guide_Pin_Medium_Lifter_Down_Pos" />
- </IoCylinders>
- <IoLids assembly="VirgoRT" classType=" VirgoRT.Devices.IODevices.IoLid">
- <IoLid id="Lid" display="Lid" schematicId="" unit="" doMotorRelay="" doON="" doOFF="" diON="" diOFF="DI_Lid_Closed" />
- </IoLids>
-
- <IoMessage assembly="VirgoRT" classType=" VirgoRT.Devices.IODevices.IoMessage">
- <IoMessage id="Messager" display="Messager" schematicId="" unit="" doMotorRelay="" ai="" ao="AO_BaisRF_Enable" />
- </IoMessage>
-
- <IoPumpCtrls assembly="VirgoRT" classType="VirgoRT.Devices.IODevices.IoPumpCtrl">
- <IoPumpCtrl id="PumpCtrl" display="Lid" schematicId="" unit="" aoPumpIOCTRLEnable="AO_Pump_IO_CTRL_Enable" doPumpRun="DO_Pump_Run" doPumpStop="DO_Pump_Stop" diDryPumpRunning="DI_Dry_Pump_Running" diBoosterPumpRunning="" diPumpRemoteStatus="DI_Pump_Remote_Status" diPumpAlarm="DI_Pump_Alarm"/>
- </IoPumpCtrls>
-
- </DeviceModelDefine>
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