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- namespace VirgoCommon
- {
- public enum VirgoDevice
- {
- ValveMfc1,
- ValveMfc2,
- ValveMfc3,
- ValveMfc4,
- ValveMfc5,
- ValveChamberPurge,
- ValveProcess,
- ValveSoftPumping,
- ValveFastPumping,
- ValveFastVent,
- ValveN2Supply,
- MfcGas1,
- MfcGas2,
- MfcGas3,
- MfcGas4,
- MfcGas5,
- GasStick1,
- GasStick2,
- GasStick3,
- TemperatureControl,
- ChamberLid,
- ATM_SW,
- VAC_SW,
- WaterFlow_SW,
- N2_Pressure,
- ProcessGauge,
- PressureGauge,
- ForelineGauge,
- MainPump,
- Chiller,
- Rf,
- BiasRf,
- Match,
- BiasMatch,
- PressureControl,
- ThrottleValve,
- HeaterChamber,
- ForelineHeater,
- Heartbeat,
- ResetPlcSignal,
- LiftPin,
- SlitDoor,
- SmallPin,
- MediumPin,
- StatisticsRfOnTime,
- StatisticsPumpOnTime,
- PlcDateTime,
- Lid,
- LidLocker,
- PumpCtrl
- }
- public enum StateData
- {
- RecipeProcessTime,
- RecipeStepNo,
- RecipeStepMode,
- RecipeName,
- RecipeBaseName,
- RecipeStepTimeElapsed,
- RecipeStepTimeSetPoint,
- RecipeStepRfTimeSetPoint,
- RecipeStepElectrodeTemp,
- SmallWafer,
- MidWafer,
- BigWafer,
- RfTimeElapsed,
- PumpTime,
- PMState,
- TMState,
- IsAutoMode,
- IsPmOnline,
- IsTmOnline,
- PMJobState,
- TMJobState,
- PmPlatformState,
- JobState,
- JobTmRecipe,
- JobPmRecipe,
- JobStartTime,
- JobStopTime,
- JobProcessCount,
- IsPumpingOkForProcess,
- IsCoolingOkForProcess,
- IsGasFlowingOkForProcess,
- IsRfPowering,
- TotalCycle,
- ProcessStatus,
- AlarmEvent,
- LeakCheckElapseTime,
- DataLogName,
- LotName,
- CurrentMagazineType,
- SchedulerRecipe,
- SchedulerState,
- SchedulerLoadStationInSubstrate,
- SchedulerRailInSubstrate,
- SchedulerPmSubstrate,
- SchedulerRailOutSubstrate,
- SchedulerLoadStationOutSubstrate,
- }
- public enum RtOperation
- {
- DeviceOperation,
- LockLid,
- UnlockLid,
- StartPump,
- Pump,
- StopPump,
- GasFlow,
- StopGasFlow,
- Cooling,
- StopCooling,
- /// <summary>
- ///
- /// 0:Step mode
- /// 1:Power on time
- /// 2:Electrode temperature
- /// 3:Electrode Critical temperature
- /// </summary>
- RfPower,
- Vent,
- Purge,
- Abort,
- Heat,
- SetConfig,
- SetPMBChillerState,
- SetHardwareConfig,
- RunRecipe,
- SkipCurrentStep,
- ResumeRecipe,
- AbortRecipe,
- Reset,
- LeakCheck,
- DeleteLeakCheck,
- MFCVerification,
- AllMFCVerification,
- SwitchOffBuzzer,
- // Lift pin & Guide pin
- MoveLiftPin,
- MoveGuidePin,
- StartAutoRun,
- StopAutoRun,
- PauseAutoRun,
- ResumeAutoRun,
- InitAll,
- AckError,
- TmRun,
- TmStop,
- PmAuto,
- PmManual,
- PmOnline,
- PmOffline,
- JobAuto,
- JobManual,
- JobRun,
- JobStop,
- JobAbort,
- JobPmLoadRecipe,
- JobTmLoadRecipe,
- JobTmRun,
- JobTmStop,
- JobPmOnline,
- JobPmOffline,
- JobPmProcessDone,
- JobTmRecovered,
- }
- public enum MovementPosition
- {
- Unknown, Down, Up, Left, Right, Middle
- }
- }
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