namespace VirgoCommon { public enum VirgoDevice { ValveMfc1, ValveMfc2, ValveMfc3, ValveMfc4, ValveMfc5, ValveChamberPurge, ValveProcess, ValveSoftPumping, ValveFastPumping, ValveFastVent, ValveN2Supply, MfcGas1, MfcGas2, MfcGas3, MfcGas4, MfcGas5, GasStick1, GasStick2, GasStick3, TemperatureControl, ChamberLid, ATM_SW, VAC_SW, WaterFlow_SW, N2_Pressure, ProcessGauge, PressureGauge, ForelineGauge, MainPump, Chiller, Rf, BiasRf, Match, BiasMatch, PressureControl, ThrottleValve, HeaterChamber, ForelineHeater, Heartbeat, ResetPlcSignal, LiftPin, SlitDoor, SmallPin, MediumPin, StatisticsRfOnTime, StatisticsPumpOnTime, PlcDateTime, Lid, LidLocker, PumpCtrl } public enum StateData { RecipeProcessTime, RecipeStepNo, RecipeStepMode, RecipeName, RecipeBaseName, RecipeStepTimeElapsed, RecipeStepTimeSetPoint, RecipeStepRfTimeSetPoint, RecipeStepElectrodeTemp, SmallWafer, MidWafer, BigWafer, RfTimeElapsed, PumpTime, PMState, TMState, IsAutoMode, IsPmOnline, IsTmOnline, PMJobState, TMJobState, PmPlatformState, JobState, JobTmRecipe, JobPmRecipe, JobStartTime, JobStopTime, JobProcessCount, IsPumpingOkForProcess, IsCoolingOkForProcess, IsGasFlowingOkForProcess, IsRfPowering, TotalCycle, ProcessStatus, AlarmEvent, LeakCheckElapseTime, DataLogName, LotName, CurrentMagazineType, SchedulerRecipe, SchedulerState, SchedulerLoadStationInSubstrate, SchedulerRailInSubstrate, SchedulerPmSubstrate, SchedulerRailOutSubstrate, SchedulerLoadStationOutSubstrate, } public enum RtOperation { DeviceOperation, LockLid, UnlockLid, StartPump, Pump, StopPump, GasFlow, StopGasFlow, Cooling, StopCooling, /// /// /// 0:Step mode /// 1:Power on time /// 2:Electrode temperature /// 3:Electrode Critical temperature /// RfPower, Vent, Purge, Abort, Heat, SetConfig, SetPMBChillerState, SetHardwareConfig, RunRecipe, SkipCurrentStep, ResumeRecipe, AbortRecipe, Reset, LeakCheck, DeleteLeakCheck, MFCVerification, AllMFCVerification, SwitchOffBuzzer, // Lift pin & Guide pin MoveLiftPin, MoveGuidePin, StartAutoRun, StopAutoRun, PauseAutoRun, ResumeAutoRun, InitAll, AckError, TmRun, TmStop, PmAuto, PmManual, PmOnline, PmOffline, JobAuto, JobManual, JobRun, JobStop, JobAbort, JobPmLoadRecipe, JobTmLoadRecipe, JobTmRun, JobTmStop, JobPmOnline, JobPmOffline, JobPmProcessDone, JobTmRecovered, } public enum MovementPosition { Unknown, Down, Up, Left, Right, Middle } }