VIDMap.cs 2.7 KB

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  1. using System.Collections.Generic;
  2. namespace VirgoRT.HostWrapper
  3. {
  4. public static class VIDMap
  5. {
  6. public static Dictionary<string, string> SVID = new Dictionary<string, string>()
  7. {
  8. };
  9. }
  10. public static class SVIDName
  11. {
  12. }
  13. public static class DVIDName
  14. {
  15. public const string EventName = "EventName";
  16. public const string LotID = "LotID";
  17. public const string RecipeID = "RecipeID";
  18. public const string JobID = "JobID";
  19. public const string PortID = "PortID";
  20. public const string SlotMap = "SlotMap";
  21. public const string SequenceID = "SequenceID";
  22. public const string StationName = "StationName";
  23. public const string RecipeStepNumber = "RecipeStepNumber";
  24. public const string SlotID = "SlotID";
  25. public const string ProcessedWaferCount = "ProcessedWaferCount";
  26. public const string CarrierID = "CarrierID";
  27. public const string TagData = "TagData";
  28. public const string RecipeStepEndDataSummary = "RecipeStepEndDataSummary";
  29. public const string WaferProcessResult = "WaferProcessResult";
  30. }
  31. public static class ALIDName
  32. {
  33. public const string EMOPressed = "EMOPressed";
  34. public const string LidError = "LidError";
  35. public const string MFCOffline = "MFCOffline";
  36. public const string VacuumGaugeError = "VacuumGaugeError";
  37. public const string PressureOutOfTolerance = "PressureOutOfTolerance";
  38. public const string PumpError = "PumpError";
  39. public const string RFGeneratorOffline = "RFGeneratorOffline";
  40. public const string RFHighReflect = "RFHighReflect";
  41. public const string RFHardwareInterlock = "RFHardwareInterlock";
  42. public const string GasFlowOutOfTolerance = "GasFlowOutOfTolerance";
  43. public const string RFOutOfTolerance = "RFOutOfTolerance";
  44. public const string WaferProtrude = "WaferProtrude";
  45. public const string EFEMSideDoorOpen = "EFEMSideDoorOpen";
  46. public const string EFEMVacuumPressureError = "EFEMVacuumPressureError";
  47. public const string EFEMCDAError = "EFEMCDAError";
  48. public const string EFEMFlowGaugeSensorError = "EFEMFlowGaugeSensorError";
  49. public const string EFEMLeakageAlarm = "EFEMLeakageAlarm";
  50. public const string EFEMIonizerAlarm = "EFEMIonizerAlarm";
  51. public const string EFEMFFUAlarm = "EFEMFFUAlarm";
  52. public const string EFEMOffline = "EFEMOffline";
  53. public const string EFEMCommunicationError = "EFEMCommunicationError";
  54. public const string WaferTransferFailed = "WaferTransferFailed";
  55. public const string EFEMError = "EFEMError";
  56. }
  57. }