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- using System.Collections.Generic;
- namespace VirgoRT.HostWrapper
- {
- public static class VIDMap
- {
- public static Dictionary<string, string> SVID = new Dictionary<string, string>()
- {
- };
-
- }
- public static class SVIDName
- {
- }
- public static class DVIDName
- {
- public const string EventName = "EventName";
- public const string LotID = "LotID";
- public const string RecipeID = "RecipeID";
- public const string JobID = "JobID";
- public const string PortID = "PortID";
- public const string SlotMap = "SlotMap";
- public const string SequenceID = "SequenceID";
- public const string StationName = "StationName";
- public const string RecipeStepNumber = "RecipeStepNumber";
- public const string SlotID = "SlotID";
- public const string ProcessedWaferCount = "ProcessedWaferCount";
- public const string CarrierID = "CarrierID";
- public const string TagData = "TagData";
- public const string RecipeStepEndDataSummary = "RecipeStepEndDataSummary";
- public const string WaferProcessResult = "WaferProcessResult";
- }
- public static class ALIDName
- {
- public const string EMOPressed = "EMOPressed";
- public const string LidError = "LidError";
- public const string MFCOffline = "MFCOffline";
- public const string VacuumGaugeError = "VacuumGaugeError";
- public const string PressureOutOfTolerance = "PressureOutOfTolerance";
- public const string PumpError = "PumpError";
- public const string RFGeneratorOffline = "RFGeneratorOffline";
- public const string RFHighReflect = "RFHighReflect";
- public const string RFHardwareInterlock = "RFHardwareInterlock";
- public const string GasFlowOutOfTolerance = "GasFlowOutOfTolerance";
- public const string RFOutOfTolerance = "RFOutOfTolerance";
- public const string WaferProtrude = "WaferProtrude";
- public const string EFEMSideDoorOpen = "EFEMSideDoorOpen";
- public const string EFEMVacuumPressureError = "EFEMVacuumPressureError";
- public const string EFEMCDAError = "EFEMCDAError";
- public const string EFEMFlowGaugeSensorError = "EFEMFlowGaugeSensorError";
- public const string EFEMLeakageAlarm = "EFEMLeakageAlarm";
- public const string EFEMIonizerAlarm = "EFEMIonizerAlarm";
- public const string EFEMFFUAlarm = "EFEMFFUAlarm";
- public const string EFEMOffline = "EFEMOffline";
- public const string EFEMCommunicationError = "EFEMCommunicationError";
- public const string WaferTransferFailed = "WaferTransferFailed";
- public const string EFEMError = "EFEMError";
-
- }
- }
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