JET-YDB\JET-YANGDB
ef6f73344e
1.增加单臂，双臂，Ignore Ionizer error， gas1~5 warning range and time ，双轴伺服pos diff 配置
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1 mese fa | |
|---|---|---|
| .. | ||
| EFEMs | 3 mesi fa | |
| Interlocks | 3 mesi fa | |
| LPs | 3 mesi fa | |
| PMs | 1 mese fa | |
| Schedulers | 3 mesi fa | |
| AutoTransfer.cs | 3 mesi fa | |
| AutoTransferClean.cs | 3 mesi fa | |
| AutoTransfer_FA.cs | 3 mesi fa | |
| AutoTransfer_T.cs | 1 mese fa | |
| EntityTaskBase.cs | 3 mesi fa | |
| HomeAll.cs | 3 mesi fa | |
| IMoveManager.cs | 3 mesi fa | |
| ManualTransfer.cs | 1 mese fa | |
| ReturnAllWafer.cs | 1 mese fa | |
| RouteManager.cs | 1 mese fa | |