JetPlasma
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Virgo_Mask


			
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1. Robort  在chamber中，Pick & Place wafer delay time 不可以单独设置，只能同时设置delay time，现需增加单独设置功能。（有时会有放片延时，改善PR baking均匀性，但pick不需要延时
2. Process data log中，温度显示要求为补偿后的实际温度，现在显示温度为补偿前温度；
3. 需要LP 的 Overview 界面加上醒目的提示或者颜色变换，来提醒此LP的job 是否已完成；【右上角的LP*改成绿色，表示完成】
4. wafer history : FDC 中无工艺压力数据,【加上Pressure】
5. 在EAP自动run货时，EFEM 门未关好，但EAP会下达指令给机台跑货，但由于EFEM门未关好，不会进行Mapping动作，设备不做任何动作；
   实际应该是EAP下达开始run货前，需要检查硬件条件是否满足，如果不满足，需要报警提示；
6. 主页overview里面工艺腔需要有可编辑腔体工艺提示，方便用户端工艺卡控，例如PMA (ashing-250-SIC）PMB(discum-90-GaAs）
7. wafer history : FDC气体流量显示栏为 MFC Gas 1\2\3 feedback,需进行调整为 MFC Gas O2\N2\CF4feedback,以实际气路名称命名，以便客户查看数据
8. 当前job作业完成后，有提示对话框弹出、但需要手动关闭，希望升级为：提示对话框关闭时间可设定，同时支持对应完成的cassette被取走时，提示框就自动关闭

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					 Virgo T 定义版本号从 2.00 开始

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2024-07-31 version 2.0.1.16
1. Enhance the EFEM module design for handling load foup issue while wafer on robot arm 

2024-02-29 version 2.0.1.14
1. Add the functionality for home Brooks EFEM single axis.

2023-11-27 version 2.0.1.12
1. Force PM to Error state while home lift pin failed.

2023-8-17 version 2.0.1.10
1. fix: FA carrier ID not correct

2023-2-21 version 2.0.1.8
1. fix: EAP read recipe failed caused by path
2. fix: EAP creat job not support 26 slot
3. feature: support configurable scanner reader 

2023-2-16 version 2.0.1.7
1. fix: wafer still there if manually remove wafer

2023-2-15 version 2.0.1.6
1. eap add lot VID

2023-2-13 version 2.0.1.5
1. carrier slot为26片
2. slot 1在最上面

2022-11-07 version 2.0.00.0
1. 初始版本

2022-6-20 version 1.0.82.6
1. Jet Virgo软件升级需求汇总 New 20220606.xls => Item 38:
	当前软件支持的pre-job和post-job功能，无法基于idle时间来定义是否需要启用pre-job，需支持可以根据idle的时间长短来定义是否需要启用pre-job（类似于可以根据idle时间的长短来定义是否启用idle-clean）


2022-6-10 version 1.0.82.5
1. fix:svid data delay several seconds to update data
2. fix:RecipeProcessTime data format is incorrect 

2022-6-10 version 1.0.82.3
1. feature:add recipe related DVID, recipe step end FDC summary data
2. feature: 在recipe setting中分别增加pump和vent的pin up和pin down 功能， Pumping 和 Venting时LiftPin的位置分别可设
3. fix:1) To chart 跳转到 Process History  中 没有End  Time。
       2) Cycle模式-LOT ID内容中时间显示不正确, LOT ID 内产生内容完全相同（时间状态应为不同，第二循环产生LOT ID 内容时间应偏后）

2022-5-23 version 1.0.82.2
1. feature:add recipe related SVID

2022-5-4 version 1.0.82.1
1. fix: 两个LP跑货，第一批跑完，蜂鸣器不响
2. fix:工艺之前检测chiller状态
3. fix: 腔体初始化的时候，检查有wafer，guidepin不下降

2021-12-28 version 1.0.82
1. fix: "system is in autorunning stage , can not do cassette leave" warning

2021-12-22 version 1.0.81
1. add: LP status display on overview area
2. enhancement: Wafer status description improved

2021-12-17 version 1.0.80
1. enhancement: Mapping button disable when cassette door opened
2. enhancement: Cassette door display improved

2021-12-16 version 1.0.79
1. enhancement: UI process history compatible with only 1 PM

2021-12-09 version 1.0.78
1. fix: Job complete info - wafer size incorrect
2. add: Wafer size in simulator can be chosen

2021-11-24 version 1.0.77
1. fix: Gas valve turn on/off failed

2021-11-20 version 1.0.76
1. fix: 初始化的时候关闭腔体门
2. enhancement：map条件不满足的时候不进入mapping状态
3. enhancement：clear error as background

2021-11-11 1.0.75
1.add: 优化lot结束弹出的对话框

2021-11-04 1.0.73
1.add: FA mapping cmd return 03 when LP is not ready
2.fix: LotID and recipe select info(by FA) display

2021-11-03 1.0.72
1.fix: Can not switch to cycle mode afer once non-cycle job

2021-10-26 1.0.71
1.add: SMC chiller Modbus LRC check

2021-10-20 1.0.70
1.add: LP wafer count display
2.enhance: Change efem state to error when protrusion

2021-10-20 1.0.69
1.fix: Wafer status always show "InProcess"
2.add: Post pop dialog message when any job done
3.enhance: Check if chamber has wafer before run recipe
4.enhance: Delete alarm view
5.add: Main view alarm combobox
6.enhance: Wafer history display format change
7.add: Signal tower strategy can be config
8.fix: Parallel mode switch

2021-10-09 1.0.68
1.feature: add wafer history FDC function
2.feature: add process history step line

2021-09-10 1.0.67
1.fix: IsTemperatureReady never true when chiller enable
2.fix: UI robot arm movement start&end position incorrect
3.enhance: display different color according pm online and offline

2021-08-09 1.0.66
1.fix:EFEM SIGSTAT alarm & event post
2.fix:EFEM top view

2021-07-31 1.0.65
1.add:Heater temp offset by temp point
2.feature:MFC calibration
3.feature:RF calibartion
4.feature:wafer history by lot
5.fix:hide EPD inforamtion if not installed

2021-07-30 1.0.64
1.fix:Skip current recipe step

2021-07-29 1.0.63
1.add:Slitdoor auto close before clean sequence

2021-07-23 1.0.62
1.fix:EPD connection parameters
2.fix:SC unit

2021-07-21 1.0.61
1.add:BiasRF enable state to PLC
2.fix:Wafer protrusion message : Warning change to Alarm
3.fix:Coolant Inlet/Outlet TC Broken message : Warning change to Alarm

2021-07-20 1.0.60
1.fix:single wafer auto running, two chamber open the door

2021-07-16 1.0.59
1.fix:Transfer stuck when job end

2021-07-11 1.0.58
1.fix:PM "Source Generator Safety Lock" warning change level to info

2021-07-09 1.0.57
1.add:Recipe config:keep vacuum afer process
2.add:RF ignition failed alarm
3.fix:Signal tower light status

2021-06-29 1.0.56
1.fix:CycleModeUI显示跟系统状态不吻合的问题
2.fix:简化部分SC显示
3.add:UI根据RT SC配置自动选择配置文件

2021-06-29 1.0.55
1. fix: 并发模式下有一个腔体空闲的问题
2. fix：one possible deadlock during scheduler

2021-06-19 1.0.53
1. 增加SVID

2021-06-09 1.0.52
1. S7F25 return recipe/sequence body per user suggestion

2021-06-08 1.0.51
1. improvement:epd config ui remove unnecessary items

2021-06-06 1.0.50
1. fix:epd not install cause issue

2021-06-05 1.0.49
1. EPD improvement,add log
2. add lot id information to wafer history
3. FA:S7F26 gave sequence data to eap

2021-06-04 1.0.48
1. link port id/slot to more CEID

2021-05-29 1.0.47
1. FA增加S2F25指令
2. FA增加Cassette Door open/close事件
3. FA增加LP Slotmap数据变量

2021-05-28 1.0.46
1. Configuration-Role中项目设置为只读，实际权限为读写

2021-05-25 1.0.45
1. 增加EPD功能

2021-05-19 1.0.43
1. FA、Clean界面微调
2. fix:自动登录admin账号

2021-05-17 1.0.42
1. SC项目+设定值导出

2021-05-16 1.0.41
1. fix:GasLine不能跳号启用的问题

2021-05-16 1.0.40
1. 功能:激活FA功能

2021-05-12 1.0.39
1. 功能:增加Idle Clean， Pre-job， Post-job clean功能
2. 功能：增加输入Lot Name

2021-05-12 1.0.38
1. fix:UI Cycle数量显示 更新不实时的问题

2021-05-11 1.0.37
1. fix:调度的时候混跑死锁的问题

2021-05-11 1.0.36
1. Virgo系列增加GB Pressure SW、GB Door SW、LE OT SW
2. SC项目+设定值导出功能

2021-05-10 version 1.0.35
1. 新增首页ATM Mode显示
2. 调整Slow Pump Valve图形显示

2021-05-08 version 1.0.34
1. 新增PM Place & Pick的Delay功能

2021-04-27 version 1.0.33
1. 解决4'，6'混合跑的时候，停在手臂上的问题

2021-04-12 version 1.0.29
1. 解决4'，6'混合跑的时候，会报参数错的问题
2. return wafer 上手臂没法传送的问题

2021-04-10 version 1.0.28
1. 解决单片会停住的问题
2. 解决4寸，6寸混合跑，会停住的问题

2021-01-31 version 1.0.0.17
1: EFEM 信息没处理的问题，导致伸进去PM，不动了
2：Cylinder报错 PLC Kept

2021-01-28 version 1.0.0.15
1：Cylinder报错 PLC Kept

2021-01-16 version 1.0.0.8
1：支持并行调度

2021-01-14 version 1.0.0.7
1：调度优化

2021-01-12 version 1.0.0.6

1：准备传片的过程中，会报超时错，而且报错之后，继续传片
2: return wafer， 弹出对话框可选是否cooling，参考Transfer wafer
3：sequence文件里面的cooling时间没生效
4：自动模式下，map不work
5：create job之后，禁止set/remove
6：auto runing-》auto idle
7：数据库没保存carrier信息
8: 提示3寸第一片不能跑货的问题
9：robot动画在Aligner位置有偏差


2020-12-20 version 1.0.0.1
1. 初始版本