SimulatorSystem.cs 35 KB

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  1. using Aitex.Core.RT.DataCenter;
  2. using Aitex.Core.RT.IOCore;
  3. using Aitex.Core.RT.Log;
  4. using Aitex.Core.Util;
  5. using MECF.Framework.Common.Equipment;
  6. using MECF.Framework.Simulator.Core.Driver;
  7. using System;
  8. using System.Collections.Generic;
  9. using VirgoSimulator.Devices;
  10. namespace VirgoSimulator.Instances
  11. {
  12. public class SimulatorSystem : Singleton<SimulatorSystem>
  13. {
  14. private PeriodicJob _thread;
  15. private Random _rd = new Random();
  16. private RD_TRIG _trigATM = new RD_TRIG();
  17. private RD_TRIG _trigVAC = new RD_TRIG();
  18. private readonly float ATM_THRESHOLD = 750000;
  19. private readonly float ATM_PRESSURE = 760000;
  20. private readonly uint VAC_SW_PRESSURE = 9500;
  21. private readonly uint PROCESS_GAUGE = 10000;
  22. private Dictionary<ModuleName, DeviceSimulator> _MockDevices = new Dictionary<ModuleName, DeviceSimulator>();
  23. public SimulatorSystem()
  24. {
  25. //_MockDevices.Add(ModuleName.PMB, new SkyPumpMock());
  26. //_MockDevices.Add(ModuleName.PMB, new AdTecGeneratorMock());
  27. //_MockDevices.Add(ModuleName.PMB, new AdTecMatchMock());
  28. // TODO
  29. }
  30. ~SimulatorSystem()
  31. {
  32. _thread?.Stop();
  33. }
  34. public void Initialize()
  35. {
  36. SetDefaultValue(ModuleName.PMA);
  37. SetDefaultValue(ModuleName.PMB);
  38. Singleton<DataManager>.Instance.Initialize(false);
  39. _thread = new PeriodicJob(500, OnMonitor, nameof(SimulatorSystem), true);
  40. }
  41. private void SetDefaultValue(ModuleName mod)
  42. {
  43. // chamber
  44. IO.DI[$"{mod}.DI_Lid_Closed"].Value = true;
  45. IO.DI[$"{mod}.DI_PM_ATM_SW"].Value = true;
  46. IO.DI[$"{mod}.DI_CDA_Pressure"].Value = true;
  47. IO.DI[$"{mod}.DI_CDA_Pressure_Switch_Out_2"].Value = true;
  48. IO.DI[$"{mod}.DI_SourceFan1"].Value = true;
  49. IO.DI[$"{mod}.DI_Cooling_Water_Flow_SW"].Value = true;
  50. IO.DI[$"{mod}.DI_Coolant_Inlet_TC_Broken_Alarm"].Value = false;
  51. IO.DI[$"{mod}.DI_Coolant_Outlet_TC_Broken_Alarm"].Value = false;
  52. IO.DI[$"{mod}.DI_Water_Leak"].Value = true;
  53. IO.DI[$"{mod}.DI_ARM_Not_Extend_to_PM"].Value = true;
  54. IO.DI[$"{mod}.DI_MFC1_Pressure"].Value = true;
  55. IO.DI[$"{mod}.DI_MFC2_Pressure"].Value = true;
  56. IO.DI[$"{mod}.DI_MFC3_Pressure"].Value = true;
  57. IO.DI[$"{mod}.DI_MFC4_Pressure"].Value = true;
  58. IO.DI[$"{mod}.DI_MFC5_Pressure"].Value = true;
  59. IO.DI[$"{mod}.DI_EFEM_Side_Panel_Closed"].Value = true;
  60. IO.DI[$"{mod}.DI_Generator_Hardware_Interlock"].Value = true;
  61. IO.DI[$"{mod}.DI_N2_Pressure"].Value = true;
  62. // slit door
  63. IO.DI[$"{mod}.DI_Slit_Door_Open_Pos"].Value = false;
  64. IO.DI[$"{mod}.DI_Slit_Door_Close_Pos"].Value = true;
  65. // lift pin
  66. IO.DI[$"{mod}.DI_Lift_Pin_Up"].Value = false;
  67. IO.DI[$"{mod}.DI_Lift_Pin_Down"].Value = true;
  68. //
  69. IO.DI[$"{mod}.DI_LE_OT_SW_Alarm"].Value = false;
  70. IO.DI[$"{mod}.DI_GB_Interlock_Alarm"].Value = false;
  71. //Guide pin
  72. IO.DI[$"{mod}.DI_Guide_Pin_Small_Lifter_Up_Pos"].Value = false;
  73. IO.DI[$"{mod}.DI_Guide_Pin_Small_Lifter_Down_Pos"].Value = true;
  74. IO.DI[$"{mod}.DI_Guide_Pin_Medium_Lifter_Up_Pos"].Value = false;
  75. IO.DI[$"{mod}.DI_Guide_Pin_Medium_Lifter_Down_Pos"].Value = true;
  76. // pressure
  77. SetAiValue($"{mod}.AI_Foreline_pressure", 5000);
  78. SetAiValue($"{mod}.AI_Chamber_pressure", ATM_PRESSURE);
  79. SetAiValue($"{mod}.AI_Process_pressure", PROCESS_GAUGE);
  80. //SetAiValue($"{mod}.AI_Throttle_Valve_State", 1);
  81. IO.AI[$"{mod}.AI_Throttle_Valve_State"].Value = 1;
  82. IO.AI[$"{mod}.AI_Throttle_Valve_Real_Position"].Value = 10;
  83. // Temperature
  84. SetAiValue($"{mod}.AI_Substrate_Control_TC_Temp", 28);
  85. SetAiValue($"{mod}.AI_Substrate_Monitor_TC_Temp", 27);
  86. SetAiValue($"{mod}.AI_Foreline_Control_TC_Temp", 28);
  87. SetAiValue($"{mod}.AI_Foreline_Monitor_TC_Temp", 27);
  88. SetAiValue($"{mod}.AI_Coolant_Inlet_Temp", 28);
  89. //SetAiValue($"{mod}.AI_CHB_Wall_Control_TC_Temp", 28);
  90. //SetAiValue($"{mod}.AI_CHB_Wall_Monitor_TC_Temp", 27);
  91. //SetAiValue($"{mod}.AI_Grid_TC_Temp", 28);
  92. if (mod == ModuleName.PMA)
  93. {
  94. SetAiValue($"{mod}.AI_Coolant_Outlet_Temp", 29);
  95. }
  96. else if (mod == ModuleName.PMB)
  97. {
  98. SetAiValue($"{mod}.AI_Coolant_Outlet_Temp", 30);
  99. }
  100. // Datetime
  101. SetAiValue($"{mod}.AI_Year", DateTime.Today.Year);
  102. SetAiValue($"{mod}.AI_Month", DateTime.Today.Month);
  103. SetAiValue($"{mod}.AI_Day", DateTime.Today.Day);
  104. }
  105. private bool OnMonitor()
  106. {
  107. try
  108. {
  109. // PMA
  110. MonitorSlitDoor(ModuleName.PMA);
  111. MonitorPin(ModuleName.PMA);
  112. MonitorPressure(ModuleName.PMA);
  113. MonitorTemperature(ModuleName.PMA);
  114. MonitorGas(ModuleName.PMA);
  115. MonitorRF(ModuleName.PMA);
  116. ChangeTime(ModuleName.PMA);
  117. // PMB
  118. MonitorSlitDoor(ModuleName.PMB);
  119. MonitorPin(ModuleName.PMB);
  120. MonitorPressure(ModuleName.PMB);
  121. MonitorTemperature(ModuleName.PMB);
  122. MonitorGas(ModuleName.PMB);
  123. MonitorRF(ModuleName.PMB);
  124. ChangeTime(ModuleName.PMB);
  125. }
  126. catch (Exception e)
  127. {
  128. LOG.Write(e);
  129. }
  130. return true;
  131. }
  132. private void ChangeTime(ModuleName mod)
  133. {
  134. // Heartbeat with PLC
  135. SetAiValue($"{mod}.AI_Heartbeat_FB", GetAoValue($"{mod}.AO_Heartbeat"));
  136. SetAiValue($"{mod}.AI_Time", DateTime.Now.Hour);
  137. SetAiValue($"{mod}.AI_Minute", DateTime.Now.Minute);
  138. SetAiValue($"{mod}.AI_Second", DateTime.Now.Second);
  139. }
  140. void MonitorSlitDoor(ModuleName mod)
  141. {
  142. // slit door open
  143. if (IO.DO[$"{mod}.DO_Slit_Door_Open"].Value)
  144. {
  145. IO.DI[$"{mod}.DI_Slit_Door_Open_Pos"].Value = true;
  146. IO.DI[$"{mod}.DI_Slit_Door_Close_Pos"].Value = false;
  147. }
  148. // slit door close
  149. if (IO.DO[$"{mod}.DO_Slit_Door_Close"].Value)
  150. {
  151. IO.DI[$"{mod}.DI_Slit_Door_Open_Pos"].Value = false;
  152. IO.DI[$"{mod}.DI_Slit_Door_Close_Pos"].Value = true;
  153. }
  154. }
  155. void MonitorPin(ModuleName mod)
  156. {
  157. // lift pin up
  158. if (IO.DO[$"{mod}.DO_Lift_Pin_Up"].Value != IO.DO[$"{mod}.DO_Lift_Pin_Down"].Value)
  159. {
  160. IO.DI[$"{mod}.DI_Lift_Pin_Up"].Value = IO.DO[$"{mod}.DO_Lift_Pin_Up"].Value;
  161. IO.DI[$"{mod}.DI_Lift_Pin_Down"].Value = IO.DO[$"{mod}.DO_Lift_Pin_Down"].Value;
  162. }
  163. // upper guide pin up
  164. if (IO.DO[$"{mod}.DO_Guide_Pin_Small_Lifter_Up"].Value)
  165. {
  166. IO.DI[$"{mod}.DI_Guide_Pin_Small_Lifter_Up_Pos"].Value = true;
  167. IO.DI[$"{mod}.DI_Guide_Pin_Small_Lifter_Down_Pos"].Value = false;
  168. }
  169. // upper guide pin down
  170. if (IO.DO[$"{mod}.DO_Guide_Pin_Small_Lifter_Down"].Value)
  171. {
  172. IO.DI[$"{mod}.DI_Guide_Pin_Small_Lifter_Up_Pos"].Value = false;
  173. IO.DI[$"{mod}.DI_Guide_Pin_Small_Lifter_Down_Pos"].Value = true;
  174. }
  175. // lower guide pin up
  176. if (IO.DO[$"{mod}.DO_Guide_Pin_Medium_Lifter_Up"].Value)
  177. {
  178. IO.DI[$"{mod}.DI_Guide_Pin_Medium_Lifter_Up_Pos"].Value = true;
  179. IO.DI[$"{mod}.DI_Guide_Pin_Medium_Lifter_Down_Pos"].Value = false;
  180. }
  181. // lower guide pin down
  182. if (IO.DO[$"{mod}.DO_Guide_Pin_Medium_Lifter_Down"].Value)
  183. {
  184. IO.DI[$"{mod}.DI_Guide_Pin_Medium_Lifter_Up_Pos"].Value = false;
  185. IO.DI[$"{mod}.DI_Guide_Pin_Medium_Lifter_Down_Pos"].Value = true;
  186. }
  187. //IoTriStateLift
  188. IO.DI[$"{mod}.DI_Lift_Servo_ABS_fail_alarm"].Value = false;
  189. if (IO.DO[$"{mod}.DO_Lift_Servo_Go_Position1"].Value)
  190. {
  191. IO.DI[$"{mod}.DI_Lift_Servo_with_origin"].Value = false;
  192. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position1_Complete"].Value = true;
  193. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position2_Complete"].Value = false;
  194. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position3_Complete"].Value = false;
  195. }
  196. if (IO.DO[$"{mod}.DO_Lift_Servo_Go_Position2"].Value)
  197. {
  198. IO.DI[$"{mod}.DI_Lift_Servo_with_origin"].Value = false;
  199. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position1_Complete"].Value = false;
  200. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position2_Complete"].Value = true;
  201. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position3_Complete"].Value = false;
  202. }
  203. if (IO.DO[$"{mod}.DO_Lift_Servo_Go_Position3"].Value)
  204. {
  205. IO.DI[$"{mod}.DI_Lift_Servo_with_origin"].Value = false;
  206. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position1_Complete"].Value = false;
  207. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position2_Complete"].Value = false;
  208. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position3_Complete"].Value = true;
  209. }
  210. if (IO.DO[$"{mod}.DO_Lift_Servo_origin"].Value)
  211. {
  212. IO.DI[$"{mod}.DI_Lift_Servo_with_origin"].Value = true;
  213. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position1_Complete"].Value = false;
  214. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position2_Complete"].Value = false;
  215. IO.DI[$"{mod}.DI_Lift_Servo_Go_Position3_Complete"].Value = false;
  216. }
  217. if (IO.DO[$"{mod}.DO_Lift_Servo_manaul_UP"].Value)
  218. {
  219. _SetRealFloat(IO.AI[$"{mod}.AI_Lift_Servo_current_value"], _GetRealFloat(IO.AI[$"{mod}.AI_Lift_Servo_current_value"]) + 0.3f);
  220. }
  221. else if (IO.DO[$"{mod}.DO_Lift_Servo_manaul_DOWN"].Value)
  222. {
  223. _SetRealFloat(IO.AI[$"{mod}.AI_Lift_Servo_current_value"], _GetRealFloat(IO.AI[$"{mod}.AI_Lift_Servo_current_value"]) - 0.3f);
  224. }
  225. MonitorGroupServoPin(mod);
  226. }
  227. void MonitorGroupServoPin(ModuleName mod)
  228. {
  229. //IoTriStateLift
  230. IO.DI[$"{mod}.DI_YAS_Servo_Controler_COMM_Alarm"].Value = false;
  231. IO.DI[$"{mod}.DI_YAS_Servo_Controler_Battery_Low_Alarm"].Value = false;
  232. if (IO.DO[$"{mod}.DO_Lift_Servo_Group_Go_Position1"].Value)
  233. {
  234. IO.DI[$"{mod}.DI_Lift_Virtual_Servo_Origin_Complete"].Value = false;
  235. IO.DI[$"{mod}.DI_Lift_Servo_1_Servo_Origin_Complete"].Value = false;
  236. IO.DI[$"{mod}.DI_Lift_Servo_2_Servo_Origin_Complete"].Value = false;
  237. IO.DI[$"{mod}.DI_Lift_Servo_Group_Go_Pos_1_Complete"].Value = true;
  238. IO.DI[$"{mod}.DI_Lift_Servo_Group_Go_Pos_2_Complete"].Value = false;
  239. IO.DI[$"{mod}.DI_Lift_Servo_Group_Go_Pos_3_Complete"].Value = false;
  240. }
  241. if (IO.DO[$"{mod}.DO_Lift_Servo_Group_Go_Position2"].Value)
  242. {
  243. IO.DI[$"{mod}.DI_Lift_Virtual_Servo_Origin_Complete"].Value = false;
  244. IO.DI[$"{mod}.DI_Lift_Servo_1_Servo_Origin_Complete"].Value = false;
  245. IO.DI[$"{mod}.DI_Lift_Servo_2_Servo_Origin_Complete"].Value = false;
  246. IO.DI[$"{mod}.DI_Lift_Servo_Group_Go_Pos_1_Complete"].Value = false;
  247. IO.DI[$"{mod}.DI_Lift_Servo_Group_Go_Pos_2_Complete"].Value = true;
  248. IO.DI[$"{mod}.DI_Lift_Servo_Group_Go_Pos_3_Complete"].Value = false;
  249. }
  250. if (IO.DO[$"{mod}.DO_Lift_Servo_Group_Go_Position3"].Value)
  251. {
  252. IO.DI[$"{mod}.DI_Lift_Virtual_Servo_Origin_Complete"].Value = false;
  253. IO.DI[$"{mod}.DI_Lift_Servo_1_Servo_Origin_Complete"].Value = false;
  254. IO.DI[$"{mod}.DI_Lift_Servo_2_Servo_Origin_Complete"].Value = false;
  255. IO.DI[$"{mod}.DI_Lift_Servo_Group_Go_Pos_1_Complete"].Value = false;
  256. IO.DI[$"{mod}.DI_Lift_Servo_Group_Go_Pos_2_Complete"].Value = false;
  257. IO.DI[$"{mod}.DI_Lift_Servo_Group_Go_Pos_3_Complete"].Value = true;
  258. }
  259. if (IO.DO[$"{mod}.DO_Lift_Servo_Group_Origin"].Value)
  260. {
  261. IO.DI[$"{mod}.DI_Lift_Virtual_Servo_Origin_Complete"].Value = true;
  262. IO.DI[$"{mod}.DI_Lift_Servo_1_Servo_Origin_Complete"].Value = true;
  263. IO.DI[$"{mod}.DI_Lift_Servo_2_Servo_Origin_Complete"].Value = true;
  264. IO.DI[$"{mod}.DI_Lift_Servo_Group_Go_Pos_1_Complete"].Value = false;
  265. IO.DI[$"{mod}.DI_Lift_Servo_Group_Go_Pos_2_Complete"].Value = false;
  266. IO.DI[$"{mod}.DI_Lift_Servo_Group_Go_Pos_3_Complete"].Value = false;
  267. }
  268. if (IO.DO[$"{mod}.DO_Lift_Servo_Group_Manual_Up"].Value)
  269. {
  270. _SetRealFloat(IO.AI[$"{mod}.AI_Lift_Virtual_Servo_Current_Position"], _GetRealFloat(IO.AI[$"{mod}.AI_Lift_Virtual_Servo_Current_Position"]) + 0.3f);
  271. }
  272. else if (IO.DO[$"{mod}.DO_Lift_Servo_Group_Manual_Down"].Value)
  273. {
  274. _SetRealFloat(IO.AI[$"{mod}.AI_Lift_Virtual_Servo_Current_Position"], _GetRealFloat(IO.AI[$"{mod}.AI_Lift_Virtual_Servo_Current_Position"]) - 0.3f);
  275. }
  276. }
  277. void MonitorPressure(ModuleName mod)
  278. {
  279. // pressure
  280. string sAI_Foreline = "AI_Foreline_pressure";
  281. // Foreline
  282. if (SkyPumpMockPMA._simPumpStatus == SkyPumpMockPMA.SimPumpStatus.Open || EdwardsPumpMockPMA._simPumpStatus == EdwardsPumpMockPMA.SimEdwardsPumpStatus.Open)
  283. {
  284. SetAiValue($"{mod}.{sAI_Foreline}", GetAiValue($"{mod}.{sAI_Foreline}") - _rd.Next(500, 600));
  285. }
  286. else
  287. {
  288. SetAiValue($"{mod}.{sAI_Foreline}", GetAiValue($"{mod}.{sAI_Foreline}") + _rd.Next(500, 600));
  289. }
  290. // PLC 模拟量范围[0,4000], 电压[0, 10V], 压力[0, 760Torr]
  291. string sAI_ChamberPressure = "AI_Chamber_pressure";
  292. string sAI_ProcessPressure = "AI_Process_pressure";
  293. //float chamber_pressure = GetMockChamberPressure(mod);
  294. //float process_pressure = GetAiValue($"{mod}.AI_Process_pressure");
  295. // soft pump & fast pump
  296. DOAccessor fast_pump_vlv = IO.DO[$"{mod}.DO_Fast_Pumping_Valve"];
  297. DOAccessor soft_pump_vlv = IO.DO[$"{mod}.DO_Soft_Pumping_Valve"];
  298. if (fast_pump_vlv.Value || soft_pump_vlv.Value)
  299. {
  300. if (fast_pump_vlv.Value && soft_pump_vlv.Value)
  301. {
  302. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  303. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  304. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  305. {
  306. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - 30000);
  307. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  308. }
  309. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  310. {
  311. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  312. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 1500);
  313. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 1500);
  314. }
  315. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - _rd.Next(15000, 16000));
  316. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - _rd.Next(150, 160));
  317. }
  318. else if (fast_pump_vlv.Value)
  319. {
  320. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  321. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  322. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  323. {
  324. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - 25000);
  325. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  326. }
  327. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  328. {
  329. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  330. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 1300);
  331. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 1300);
  332. }
  333. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - _rd.Next(12000, 13000));
  334. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - _rd.Next(120, 130));
  335. }
  336. else if (soft_pump_vlv.Value)
  337. {
  338. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  339. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  340. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  341. {
  342. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - 22000);
  343. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  344. }
  345. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  346. {
  347. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  348. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 1100);
  349. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 1100);
  350. }
  351. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") - _rd.Next(13000, 14000));
  352. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - _rd.Next(100, 110));
  353. }
  354. }
  355. // fast vent & purge
  356. DOAccessor vent_vlv = IO.DO[$"{mod}.DO_Chamber_vent_valve"];
  357. DOAccessor purge_vlv = IO.DO[$"{mod}.DO_Chamber_purge_valve"];
  358. if (vent_vlv.Value || purge_vlv.Value)
  359. {
  360. if (vent_vlv.Value && purge_vlv.Value)
  361. {
  362. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  363. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  364. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  365. {
  366. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 30000);
  367. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  368. }
  369. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  370. {
  371. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  372. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1500);
  373. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1500);
  374. }
  375. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + _rd.Next(45000, 50000));
  376. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + _rd.Next(150, 160));
  377. }
  378. else if (vent_vlv.Value)
  379. {
  380. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  381. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  382. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  383. {
  384. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 25000);
  385. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  386. }
  387. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  388. {
  389. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  390. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1300);
  391. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 1300);
  392. }
  393. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + _rd.Next(25000, 30000));
  394. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + _rd.Next(130, 150));
  395. }
  396. else if (purge_vlv.Value)
  397. {
  398. float getAiValue_ChamberPressure = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  399. float getAiValue_ProcessPressure = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  400. if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure > 10000)
  401. {
  402. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + 30000);
  403. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") - 150);
  404. }
  405. else if (getAiValue_ProcessPressure <= 10000 && getAiValue_ChamberPressure <= 10000)
  406. {
  407. getAiValue_ProcessPressure = getAiValue_ChamberPressure;
  408. SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 3100);
  409. SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + 3100);
  410. }
  411. //SetAiValue($"{mod}.{sAI_ChamberPressure}", GetAiValue($"{mod}.{sAI_ChamberPressure}") + _rd.Next(15000, 20000));
  412. //SetAiValue($"{mod}.{sAI_ProcessPressure}", GetAiValue($"{mod}.{sAI_ProcessPressure}") + _rd.Next(100, 120));
  413. }
  414. }
  415. // 压力值越界,复位
  416. float chamber_pressure1 = GetAiValue($"{mod}.{sAI_ChamberPressure}");
  417. if (chamber_pressure1 > ATM_PRESSURE)
  418. {
  419. SetAiValue($"{mod}.AI_Chamber_pressure", ATM_PRESSURE);
  420. }
  421. else if (chamber_pressure1 < 20)
  422. {
  423. SetAiValue($"{mod}.AI_Chamber_pressure", 20);
  424. }
  425. float process_pressure1 = GetAiValue($"{mod}.{sAI_ProcessPressure}");
  426. if (process_pressure1 > PROCESS_GAUGE)
  427. {
  428. SetAiValue($"{mod}.AI_Process_pressure", PROCESS_GAUGE);
  429. }
  430. else if (process_pressure1 < 20)
  431. {
  432. SetAiValue($"{mod}.AI_Process_pressure", 20);
  433. }
  434. float foreline_pressure = GetAiValue($"{mod}.{sAI_Foreline}");
  435. if (foreline_pressure > 10000)
  436. {
  437. SetAiValue($"{mod}.AI_Foreline_pressure", 10000);
  438. }
  439. else if (foreline_pressure < 150)
  440. {
  441. SetAiValue($"{mod}.AI_Foreline_pressure", 150);
  442. }
  443. // 模拟压力计漂移
  444. //int p1 = (int)GetMockChamberPressure(mod);
  445. //int new_p1 = _rd.Next(p1 - 2, p1 + 2);
  446. //SetAiValue($"{mod}.AI_Chamber_pressure", new_p1);
  447. //int p2 = (int)GetAiValue($"{mod}.AI_Foreline_pressure");
  448. //int new_p2 = _rd.Next(p2 - 1, p2 + 1);
  449. //SetAiValue($"{mod}.AI_Foreline_pressure", new_p2);
  450. //int p3 = (int)GetAiValue($"{mod}.AI_Process_pressure");
  451. //int new_p3 = _rd.Next(p3 - 1, p3 + 1);
  452. //SetAiValue($"{mod}.AI_Process_pressure", new_p3);
  453. // 根据当前压力值设定信号
  454. //float chamber_pressure2 = GetMockChamberPressure(mod);
  455. // ATM switch
  456. IO.DI[$"{mod}.DI_PM_ATM_SW"].Value = GetAiValue($"{mod}.{sAI_ChamberPressure}") > ATM_THRESHOLD;
  457. // VAC switch
  458. IO.DI[$"{mod}.DI_PM_VAC_SW"].Value = GetAiValue($"{mod}.{sAI_ChamberPressure}") < VAC_SW_PRESSURE;
  459. // Throttle valve
  460. //var pos_sp = IO.AO[$"{mod}.AO_Throttle_Valve_Pressure_Setpoint"].Value;
  461. //var mock_pos_fb = _rd.Next(pos_sp - 2, pos_sp + 2);
  462. ////IO.AI[$"{mod}.AI_Throttle_Valve_Real_Pressure"].Value = (short)mock_pos_fb;
  463. //SetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure", mock_pos_fb);
  464. // 压力值
  465. if (GetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure") < GetAoValue($"{mod}.AO_Throttle_Valve_Pressure_Setpoint"))
  466. {
  467. short increase = (short)_rd.Next(20, 30);
  468. SetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure", GetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure") + increase);
  469. if (GetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure") > GetAoValue($"{mod}.AO_Throttle_Valve_Pressure_Setpoint"))
  470. {
  471. SetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure", GetAoValue($"{mod}.AO_Throttle_Valve_Pressure_Setpoint"));
  472. }
  473. }
  474. else
  475. {
  476. short increase = (short)_rd.Next(20, 30);
  477. SetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure", GetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure") - increase);
  478. if (GetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure") < GetAoValue($"{mod}.AO_Throttle_Valve_Pressure_Setpoint"))
  479. {
  480. SetAiValue($"{mod}.AI_Throttle_Valve_Real_Pressure", GetAoValue($"{mod}.AO_Throttle_Valve_Pressure_Setpoint"));
  481. }
  482. }
  483. // 位置值
  484. if (GetAiValue($"{mod}.AI_Throttle_Valve_Real_Position") < GetAoValue($"{mod}.AO_Throttle_Valve_Position_Setpoint"))
  485. {
  486. short increase = (short)_rd.Next(20, 30);
  487. SetAiValue($"{mod}.AI_Throttle_Valve_Real_Position", GetAiValue($"{mod}.AI_Throttle_Valve_Real_Position") + increase);
  488. if (GetAiValue($"{mod}.AI_Throttle_Valve_Real_Position") > GetAoValue($"{mod}.AO_Throttle_Valve_Position_Setpoint"))
  489. {
  490. SetAiValue($"{mod}.AI_Throttle_Valve_Real_Position", GetAoValue($"{mod}.AO_Throttle_Valve_Position_Setpoint"));
  491. }
  492. }
  493. else
  494. {
  495. short increase = (short)_rd.Next(20, 30);
  496. SetAiValue($"{mod}.AI_Throttle_Valve_Real_Position", GetAiValue($"{mod}.AI_Throttle_Valve_Real_Position") - increase);
  497. if (GetAiValue($"{mod}.AI_Throttle_Valve_Real_Position") < GetAoValue($"{mod}.AO_Throttle_Valve_Position_Setpoint"))
  498. {
  499. SetAiValue($"{mod}.AI_Throttle_Valve_Real_Position", GetAoValue($"{mod}.AO_Throttle_Valve_Position_Setpoint"));
  500. }
  501. }
  502. }
  503. //float GetMockChamberPressure(ModuleName mod)
  504. //{
  505. // return GetAiValue($"{mod}.AI_Chamber_pressure");
  506. //}
  507. //void SetMockChamberPressure(ModuleName mod, float val)
  508. //{
  509. // SetAiValue($"{mod}.AI_Chamber_pressure", val);
  510. //}
  511. void SetAiValue(string name, float value)
  512. {
  513. byte[] flow = BitConverter.GetBytes(value);
  514. short high1 = BitConverter.ToInt16(flow, 0);
  515. short low1 = BitConverter.ToInt16(flow, 2);
  516. IO.AI[name].Buffer[IO.AI[name].Index] = BitConverter.ToInt16(flow, 0);
  517. IO.AI[name].Buffer[IO.AI[name].Index + 1] = BitConverter.ToInt16(flow, 2);
  518. byte[] high = BitConverter.GetBytes(IO.AI[name].Buffer[IO.AI[name].Index]);
  519. byte[] low = BitConverter.GetBytes(IO.AI[name].Buffer[IO.AI[name].Index + 1]);
  520. float readback = BitConverter.ToSingle(new[] { high[0], high[1], low[0], low[1] }, 0);
  521. }
  522. float GetAiValue(string name)
  523. {
  524. byte[] high = BitConverter.GetBytes(IO.AI[name].Buffer[IO.AI[name].Index]);
  525. byte[] low = BitConverter.GetBytes(IO.AI[name].Buffer[IO.AI[name].Index + 1]);
  526. float flow = BitConverter.ToSingle(new[] { high[0], high[1], low[0], low[1] }, 0);
  527. return flow;
  528. }
  529. float GetAoValue(string name)
  530. {
  531. byte[] high = BitConverter.GetBytes(IO.AO[name].Buffer[IO.AO[name].Index]);
  532. byte[] low = BitConverter.GetBytes(IO.AO[name].Buffer[IO.AO[name].Index + 1]);
  533. float flow = BitConverter.ToSingle(new[] { high[0], high[1], low[0], low[1] }, 0);
  534. return flow;
  535. }
  536. protected float _GetRealFloat(IOAccessor<short> accessor)
  537. {
  538. byte[] low = BitConverter.GetBytes(accessor.Buffer[accessor.Index]);
  539. byte[] high = BitConverter.GetBytes(accessor.Buffer[accessor.Index + 1]);
  540. float res = BitConverter.ToSingle(new[] { low[0], low[1], high[0], high[1] }, 0);
  541. return res;
  542. }
  543. protected void _SetRealFloat(IOAccessor<short> accessor, float val)
  544. {
  545. byte[] val2 = BitConverter.GetBytes(val);
  546. accessor.Buffer[accessor.Index] = BitConverter.ToInt16(val2, 0);
  547. accessor.Buffer[accessor.Index + 1] = BitConverter.ToInt16(val2, 2);
  548. }
  549. void MonitorTemperature(ModuleName mod)
  550. {
  551. IO.DI[$"{mod}.DI_Substrate_Heater_On_FB"].Value = IO.DO[$"{mod}.DO_Substrate_Heater_On"].Value;
  552. IO.DI[$"{mod}.DI_Foreline_Heater_On_FB"].Value = IO.DO[$"{mod}.DO_Forline_Heater_On"].Value;
  553. //IO.DI[$"{mod}.DI_CHB_Wall_Heater_On_FB"].Value = IO.DO[$"{mod}.DO_CHB_Wall_Heater_On"].Value;
  554. IO.DI[$"{mod}.DI_Foreline_TC_Deviation_out_of_range"].Value = false;
  555. IO.DI[$"{mod}.DI_Substrate_TC_Deviation_out_of_range"].Value = false;
  556. // 底座
  557. if (IO.DO[$"{mod}.DO_Substrate_Heater_On"].Value &&
  558. GetAiValue($"{mod}.AI_Substrate_Control_TC_Temp") < GetAoValue($"{mod}.AO_Substrate_Temperature_Setpoint"))
  559. {
  560. SetAiValue($"{mod}.AI_Substrate_Control_TC_Temp", GetAiValue($"{mod}.AI_Substrate_Control_TC_Temp") + _rd.Next(1, 2));
  561. SetAiValue($"{mod}.AI_Substrate_Monitor_TC_Temp", GetAiValue($"{mod}.AI_Substrate_Monitor_TC_Temp") + _rd.Next(1, 2));
  562. }
  563. else if (IO.DO[$"{mod}.DO_Substrate_Heater_On"].Value &&
  564. GetAiValue($"{mod}.AI_Substrate_Control_TC_Temp") > GetAoValue($"{mod}.AO_Substrate_Temperature_Setpoint"))
  565. {
  566. SetAiValue($"{mod}.AI_Substrate_Control_TC_Temp", GetAiValue($"{mod}.AI_Substrate_Control_TC_Temp") - _rd.Next(1, 2));
  567. SetAiValue($"{mod}.AI_Substrate_Monitor_TC_Temp", GetAiValue($"{mod}.AI_Substrate_Monitor_TC_Temp") - _rd.Next(1, 2));
  568. }
  569. // Foreline
  570. if (IO.DO[$"{mod}.DO_Forline_Heater_On"].Value &&
  571. GetAiValue($"{mod}.AI_Foreline_Control_TC_Temp") < GetAoValue($"{mod}.AO_Foreline_Temperature_Setpoint"))
  572. {
  573. SetAiValue($"{mod}.AI_Foreline_Control_TC_Temp", GetAiValue($"{mod}.AI_Foreline_Control_TC_Temp") + _rd.Next(1, 2));
  574. SetAiValue($"{mod}.AI_Foreline_Monitor_TC_Temp", GetAiValue($"{mod}.AI_Foreline_Monitor_TC_Temp") + _rd.Next(1, 2));
  575. }
  576. else if (IO.DO[$"{mod}.DO_Forline_Heater_On"].Value &&
  577. GetAiValue($"{mod}.AI_Foreline_Control_TC_Temp") > GetAoValue($"{mod}.AO_Foreline_Temperature_Setpoint"))
  578. {
  579. SetAiValue($"{mod}.AI_Foreline_Control_TC_Temp", GetAiValue($"{mod}.AI_Foreline_Control_TC_Temp") - _rd.Next(1, 2));
  580. SetAiValue($"{mod}.AI_Foreline_Monitor_TC_Temp", GetAiValue($"{mod}.AI_Foreline_Monitor_TC_Temp") - _rd.Next(1, 2));
  581. }
  582. // Wall
  583. //if (IO.DO[$"{mod}.DO_CHB_Wall_Heater_On"].Value &&
  584. // GetAiValue($"{mod}.AI_CHB_Wall_Control_TC_Temp") < GetAoValue($"{mod}.AO_CHB_Wall_Temperature_Setpoint"))
  585. //{
  586. // SetAiValue($"{mod}.AI_CHB_Wall_Control_TC_Temp", GetAiValue($"{mod}.AI_CHB_Wall_Control_TC_Temp") + _rd.Next(1, 2));
  587. // SetAiValue($"{mod}.AI_CHB_Wall_Monitor_TC_Temp", GetAiValue($"{mod}.AI_CHB_Wall_Monitor_TC_Temp") + _rd.Next(1, 2));
  588. //}
  589. //else if (IO.DO[$"{mod}.DO_CHB_Wall_Heater_On"].Value &&
  590. // GetAiValue($"{mod}.AI_Substrate_Control_TC_Temp") > GetAoValue($"{mod}.AO_CHB_Wall_Temperature_Setpoint"))
  591. //{
  592. // SetAiValue($"{mod}.AI_CHB_Wall_Control_TC_Temp", GetAiValue($"{mod}.AI_CHB_Wall_Control_TC_Temp") - _rd.Next(1, 2));
  593. // SetAiValue($"{mod}.AI_CHB_Wall_Monitor_TC_Temp", GetAiValue($"{mod}.AI_CHB_Wall_Monitor_TC_Temp") - _rd.Next(1, 2));
  594. //}
  595. }
  596. void MonitorGas(ModuleName mod)
  597. {
  598. // gas
  599. this.SimulateMFC(ModuleName.PMA, 1);
  600. this.SimulateMFC(ModuleName.PMA, 2);
  601. this.SimulateMFC(ModuleName.PMA, 3);
  602. this.SimulateMFC(ModuleName.PMA, 4);
  603. this.SimulateMFC(ModuleName.PMA, 5);
  604. this.SimulateMFC(ModuleName.PMB, 1);
  605. this.SimulateMFC(ModuleName.PMB, 2);
  606. this.SimulateMFC(ModuleName.PMB, 3);
  607. this.SimulateMFC(ModuleName.PMB, 4);
  608. this.SimulateMFC(ModuleName.PMB, 5);
  609. }
  610. private void SimulateMFC(ModuleName mod, byte gasNum)
  611. {
  612. var sp = GetAoValue($"{mod}.AO_MFC{gasNum}_Flow_Setpoint");
  613. var mock_fb = _rd.Next((int)sp - 3, (int)sp + 3) + _rd.NextDouble();
  614. SetAiValue($"{mod}.AI_MFC{gasNum}_Flow", (float)mock_fb);
  615. }
  616. void MonitorRF(ModuleName mod)
  617. {
  618. // RF generator
  619. var sp = GetAoValue($"{mod}.AO_Generator_Power_Setpoint");
  620. var mock_fb = _rd.Next((int)sp - 3, (int)sp + 3) + _rd.NextDouble();
  621. //var mock_sp = _rd.Next(sp - 3, sp + 3);
  622. SetAiValue($"{mod}.AI_Generator_Forward_Power", (float)mock_fb);
  623. //IO.DI[$"{mod}.DI_Generator_Power_Status"].Value = IO.DO[$"{mod}.DO_Generator_Power_ON"].Value;
  624. }
  625. public void Terminate()
  626. {
  627. _thread.Stop();
  628. }
  629. }
  630. }