ReleaseNotes.txt 6.7 KB

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  1. 
  2. ---------------------------------------------------------------------------------
  3. VirgoB 系统更新历史记录
  4. ---------------------------------------------------------------------------------
  5. 2023-2-12 version 1.0.82.6
  6. 1. fix:wafer can not be picked out from chamber
  7. 2. fix:system keep in intializing status if EFEM failed
  8. 2022-6-10 version 1.0.82.5
  9. 1. fix:svid data delay several seconds to update data
  10. 2. fix:RecipeProcessTime data format is incorrect
  11. 2022-6-10 version 1.0.82.3
  12. 1. feature:add recipe related DVID, recipe step end FDC summary data
  13. 2. feature: 在recipe setting中分别增加pump和vent的pin up和pin down 功能, Pumping 和 Venting时LiftPin的位置分别可设
  14. 3. fix:1) To chart 跳转到 Process History 中 没有End Time。
  15. 2) Cycle模式-LOT ID内容中时间显示不正确, LOT ID 内产生内容完全相同(时间状态应为不同,第二循环产生LOT ID 内容时间应偏后)
  16. 2022-5-23 version 1.0.82.2
  17. 1. feature:add recipe related SVID
  18. 2022-5-4 version 1.0.82.1
  19. 1. fix: 两个LP跑货,第一批跑完,蜂鸣器不响
  20. 2. fix:工艺之前检测chiller状态
  21. 3. fix: 腔体初始化的时候,检查有wafer,guidepin不下降
  22. 2021-12-28 version 1.0.82
  23. 1. fix: "system is in autorunning stage , can not do cassette leave" warning
  24. 2021-12-22 version 1.0.81
  25. 1. add: LP status display on overview area
  26. 2. enhancement: Wafer status description improved
  27. 2021-12-17 version 1.0.80
  28. 1. enhancement: Mapping button disable when cassette door opened
  29. 2. enhancement: Cassette door display improved
  30. 2021-12-16 version 1.0.79
  31. 1. enhancement: UI process history compatible with only 1 PM
  32. 2021-12-09 version 1.0.78
  33. 1. fix: Job complete info - wafer size incorrect
  34. 2. add: Wafer size in simulator can be chosen
  35. 2021-11-24 version 1.0.77
  36. 1. fix: Gas valve turn on/off failed
  37. 2021-11-20 version 1.0.76
  38. 1. fix: 初始化的时候关闭腔体门
  39. 2. enhancement:map条件不满足的时候不进入mapping状态
  40. 3. enhancement:clear error as background
  41. 2021-11-11 1.0.75
  42. 1.add: 优化lot结束弹出的对话框
  43. 2021-11-04 1.0.73
  44. 1.add: FA mapping cmd return 03 when LP is not ready
  45. 2.fix: LotID and recipe select info(by FA) display
  46. 2021-11-03 1.0.72
  47. 1.fix: Can not switch to cycle mode afer once non-cycle job
  48. 2021-10-26 1.0.71
  49. 1.add: SMC chiller Modbus LRC check
  50. 2021-10-20 1.0.70
  51. 1.add: LP wafer count display
  52. 2.enhance: Change efem state to error when protrusion
  53. 2021-10-20 1.0.69
  54. 1.fix: Wafer status always show "InProcess"
  55. 2.add: Post pop dialog message when any job done
  56. 3.enhance: Check if chamber has wafer before run recipe
  57. 4.enhance: Delete alarm view
  58. 5.add: Main view alarm combobox
  59. 6.enhance: Wafer history display format change
  60. 7.add: Signal tower strategy can be config
  61. 8.fix: Parallel mode switch
  62. 2021-10-09 1.0.68
  63. 1.feature: add wafer history FDC function
  64. 2.feature: add process history step line
  65. 2021-09-10 1.0.67
  66. 1.fix: IsTemperatureReady never true when chiller enable
  67. 2.fix: UI robot arm movement start&end position incorrect
  68. 3.enhance: display different color according pm online and offline
  69. 2021-08-09 1.0.66
  70. 1.fix:EFEM SIGSTAT alarm & event post
  71. 2.fix:EFEM top view
  72. 2021-07-31 1.0.65
  73. 1.add:Heater temp offset by temp point
  74. 2.feature:MFC calibration
  75. 3.feature:RF calibartion
  76. 4.feature:wafer history by lot
  77. 5.fix:hide EPD inforamtion if not installed
  78. 2021-07-30 1.0.64
  79. 1.fix:Skip current recipe step
  80. 2021-07-29 1.0.63
  81. 1.add:Slitdoor auto close before clean sequence
  82. 2021-07-23 1.0.62
  83. 1.fix:EPD connection parameters
  84. 2.fix:SC unit
  85. 2021-07-21 1.0.61
  86. 1.add:BiasRF enable state to PLC
  87. 2.fix:Wafer protrusion message : Warning change to Alarm
  88. 3.fix:Coolant Inlet/Outlet TC Broken message : Warning change to Alarm
  89. 2021-07-20 1.0.60
  90. 1.fix:single wafer auto running, two chamber open the door
  91. 2021-07-16 1.0.59
  92. 1.fix:Transfer stuck when job end
  93. 2021-07-11 1.0.58
  94. 1.fix:PM "Source Generator Safety Lock" warning change level to info
  95. 2021-07-09 1.0.57
  96. 1.add:Recipe config:keep vacuum afer process
  97. 2.add:RF ignition failed alarm
  98. 3.fix:Signal tower light status
  99. 2021-06-29 1.0.56
  100. 1.fix:CycleModeUI显示跟系统状态不吻合的问题
  101. 2.fix:简化部分SC显示
  102. 3.add:UI根据RT SC配置自动选择配置文件
  103. 2021-06-29 1.0.55
  104. 1. fix: 并发模式下有一个腔体空闲的问题
  105. 2. fix:one possible deadlock during scheduler
  106. 2021-06-19 1.0.53
  107. 1. 增加SVID
  108. 2021-06-09 1.0.52
  109. 1. S7F25 return recipe/sequence body per user suggestion
  110. 2021-06-08 1.0.51
  111. 1. improvement:epd config ui remove unnecessary items
  112. 2021-06-06 1.0.50
  113. 1. fix:epd not install cause issue
  114. 2021-06-05 1.0.49
  115. 1. EPD improvement,add log
  116. 2. add lot id information to wafer history
  117. 3. FA:S7F26 gave sequence data to eap
  118. 2021-06-04 1.0.48
  119. 1. link port id/slot to more CEID
  120. 2021-05-29 1.0.47
  121. 1. FA增加S2F25指令
  122. 2. FA增加Cassette Door open/close事件
  123. 3. FA增加LP Slotmap数据变量
  124. 2021-05-28 1.0.46
  125. 1. Configuration-Role中项目设置为只读,实际权限为读写
  126. 2021-05-25 1.0.45
  127. 1. 增加EPD功能
  128. 2021-05-19 1.0.43
  129. 1. FA、Clean界面微调
  130. 2. fix:自动登录admin账号
  131. 2021-05-17 1.0.42
  132. 1. SC项目+设定值导出
  133. 2021-05-16 1.0.41
  134. 1. fix:GasLine不能跳号启用的问题
  135. 2021-05-16 1.0.40
  136. 1. 功能:激活FA功能
  137. 2021-05-12 1.0.39
  138. 1. 功能:增加Idle Clean, Pre-job, Post-job clean功能
  139. 2. 功能:增加输入Lot Name
  140. 2021-05-12 1.0.38
  141. 1. fix:UI Cycle数量显示 更新不实时的问题
  142. 2021-05-11 1.0.37
  143. 1. fix:调度的时候混跑死锁的问题
  144. 2021-05-11 1.0.36
  145. 1. Virgo系列增加GB Pressure SW、GB Door SW、LE OT SW
  146. 2. SC项目+设定值导出功能
  147. 2021-05-10 version 1.0.35
  148. 1. 新增首页ATM Mode显示
  149. 2. 调整Slow Pump Valve图形显示
  150. 2021-05-08 version 1.0.34
  151. 1. 新增PM Place & Pick的Delay功能
  152. 2021-04-27 version 1.0.33
  153. 1. 解决4',6'混合跑的时候,停在手臂上的问题
  154. 2021-04-12 version 1.0.29
  155. 1. 解决4',6'混合跑的时候,会报参数错的问题
  156. 2. return wafer 上手臂没法传送的问题
  157. 2021-04-10 version 1.0.28
  158. 1. 解决单片会停住的问题
  159. 2. 解决4寸,6寸混合跑,会停住的问题
  160. 2021-01-31 version 1.0.0.17
  161. 1: EFEM 信息没处理的问题,导致伸进去PM,不动了
  162. 2:Cylinder报错 PLC Kept
  163. 2021-01-28 version 1.0.0.15
  164. 1:Cylinder报错 PLC Kept
  165. 2021-01-16 version 1.0.0.8
  166. 1:支持并行调度
  167. 2021-01-14 version 1.0.0.7
  168. 1:调度优化
  169. 2021-01-12 version 1.0.0.6
  170. 1:准备传片的过程中,会报超时错,而且报错之后,继续传片
  171. 2: return wafer, 弹出对话框可选是否cooling,参考Transfer wafer
  172. 3:sequence文件里面的cooling时间没生效
  173. 4:自动模式下,map不work
  174. 5:create job之后,禁止set/remove
  175. 6:auto runing-》auto idle
  176. 7:数据库没保存carrier信息
  177. 8: 提示3寸第一片不能跑货的问题
  178. 9:robot动画在Aligner位置有偏差
  179. 2020-12-20 version 1.0.0.1
  180. 1. 初始版本