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- VirgoB 系统更新历史记录
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- 2023-2-12 version 1.0.82.6
- 1. fix:wafer can not be picked out from chamber
- 2. fix:system keep in intializing status if EFEM failed
- 2022-6-10 version 1.0.82.5
- 1. fix:svid data delay several seconds to update data
- 2. fix:RecipeProcessTime data format is incorrect
- 2022-6-10 version 1.0.82.3
- 1. feature:add recipe related DVID, recipe step end FDC summary data
- 2. feature: 在recipe setting中分别增加pump和vent的pin up和pin down 功能, Pumping 和 Venting时LiftPin的位置分别可设
- 3. fix:1) To chart 跳转到 Process History 中 没有End Time。
- 2) Cycle模式-LOT ID内容中时间显示不正确, LOT ID 内产生内容完全相同(时间状态应为不同,第二循环产生LOT ID 内容时间应偏后)
- 2022-5-23 version 1.0.82.2
- 1. feature:add recipe related SVID
- 2022-5-4 version 1.0.82.1
- 1. fix: 两个LP跑货,第一批跑完,蜂鸣器不响
- 2. fix:工艺之前检测chiller状态
- 3. fix: 腔体初始化的时候,检查有wafer,guidepin不下降
- 2021-12-28 version 1.0.82
- 1. fix: "system is in autorunning stage , can not do cassette leave" warning
- 2021-12-22 version 1.0.81
- 1. add: LP status display on overview area
- 2. enhancement: Wafer status description improved
- 2021-12-17 version 1.0.80
- 1. enhancement: Mapping button disable when cassette door opened
- 2. enhancement: Cassette door display improved
- 2021-12-16 version 1.0.79
- 1. enhancement: UI process history compatible with only 1 PM
- 2021-12-09 version 1.0.78
- 1. fix: Job complete info - wafer size incorrect
- 2. add: Wafer size in simulator can be chosen
- 2021-11-24 version 1.0.77
- 1. fix: Gas valve turn on/off failed
- 2021-11-20 version 1.0.76
- 1. fix: 初始化的时候关闭腔体门
- 2. enhancement:map条件不满足的时候不进入mapping状态
- 3. enhancement:clear error as background
- 2021-11-11 1.0.75
- 1.add: 优化lot结束弹出的对话框
- 2021-11-04 1.0.73
- 1.add: FA mapping cmd return 03 when LP is not ready
- 2.fix: LotID and recipe select info(by FA) display
- 2021-11-03 1.0.72
- 1.fix: Can not switch to cycle mode afer once non-cycle job
- 2021-10-26 1.0.71
- 1.add: SMC chiller Modbus LRC check
- 2021-10-20 1.0.70
- 1.add: LP wafer count display
- 2.enhance: Change efem state to error when protrusion
- 2021-10-20 1.0.69
- 1.fix: Wafer status always show "InProcess"
- 2.add: Post pop dialog message when any job done
- 3.enhance: Check if chamber has wafer before run recipe
- 4.enhance: Delete alarm view
- 5.add: Main view alarm combobox
- 6.enhance: Wafer history display format change
- 7.add: Signal tower strategy can be config
- 8.fix: Parallel mode switch
- 2021-10-09 1.0.68
- 1.feature: add wafer history FDC function
- 2.feature: add process history step line
- 2021-09-10 1.0.67
- 1.fix: IsTemperatureReady never true when chiller enable
- 2.fix: UI robot arm movement start&end position incorrect
- 3.enhance: display different color according pm online and offline
- 2021-08-09 1.0.66
- 1.fix:EFEM SIGSTAT alarm & event post
- 2.fix:EFEM top view
- 2021-07-31 1.0.65
- 1.add:Heater temp offset by temp point
- 2.feature:MFC calibration
- 3.feature:RF calibartion
- 4.feature:wafer history by lot
- 5.fix:hide EPD inforamtion if not installed
- 2021-07-30 1.0.64
- 1.fix:Skip current recipe step
- 2021-07-29 1.0.63
- 1.add:Slitdoor auto close before clean sequence
- 2021-07-23 1.0.62
- 1.fix:EPD connection parameters
- 2.fix:SC unit
- 2021-07-21 1.0.61
- 1.add:BiasRF enable state to PLC
- 2.fix:Wafer protrusion message : Warning change to Alarm
- 3.fix:Coolant Inlet/Outlet TC Broken message : Warning change to Alarm
- 2021-07-20 1.0.60
- 1.fix:single wafer auto running, two chamber open the door
- 2021-07-16 1.0.59
- 1.fix:Transfer stuck when job end
- 2021-07-11 1.0.58
- 1.fix:PM "Source Generator Safety Lock" warning change level to info
- 2021-07-09 1.0.57
- 1.add:Recipe config:keep vacuum afer process
- 2.add:RF ignition failed alarm
- 3.fix:Signal tower light status
- 2021-06-29 1.0.56
- 1.fix:CycleModeUI显示跟系统状态不吻合的问题
- 2.fix:简化部分SC显示
- 3.add:UI根据RT SC配置自动选择配置文件
- 2021-06-29 1.0.55
- 1. fix: 并发模式下有一个腔体空闲的问题
- 2. fix:one possible deadlock during scheduler
- 2021-06-19 1.0.53
- 1. 增加SVID
- 2021-06-09 1.0.52
- 1. S7F25 return recipe/sequence body per user suggestion
- 2021-06-08 1.0.51
- 1. improvement:epd config ui remove unnecessary items
- 2021-06-06 1.0.50
- 1. fix:epd not install cause issue
- 2021-06-05 1.0.49
- 1. EPD improvement,add log
- 2. add lot id information to wafer history
- 3. FA:S7F26 gave sequence data to eap
- 2021-06-04 1.0.48
- 1. link port id/slot to more CEID
- 2021-05-29 1.0.47
- 1. FA增加S2F25指令
- 2. FA增加Cassette Door open/close事件
- 3. FA增加LP Slotmap数据变量
- 2021-05-28 1.0.46
- 1. Configuration-Role中项目设置为只读,实际权限为读写
- 2021-05-25 1.0.45
- 1. 增加EPD功能
- 2021-05-19 1.0.43
- 1. FA、Clean界面微调
- 2. fix:自动登录admin账号
- 2021-05-17 1.0.42
- 1. SC项目+设定值导出
- 2021-05-16 1.0.41
- 1. fix:GasLine不能跳号启用的问题
- 2021-05-16 1.0.40
- 1. 功能:激活FA功能
- 2021-05-12 1.0.39
- 1. 功能:增加Idle Clean, Pre-job, Post-job clean功能
- 2. 功能:增加输入Lot Name
- 2021-05-12 1.0.38
- 1. fix:UI Cycle数量显示 更新不实时的问题
- 2021-05-11 1.0.37
- 1. fix:调度的时候混跑死锁的问题
- 2021-05-11 1.0.36
- 1. Virgo系列增加GB Pressure SW、GB Door SW、LE OT SW
- 2. SC项目+设定值导出功能
- 2021-05-10 version 1.0.35
- 1. 新增首页ATM Mode显示
- 2. 调整Slow Pump Valve图形显示
- 2021-05-08 version 1.0.34
- 1. 新增PM Place & Pick的Delay功能
- 2021-04-27 version 1.0.33
- 1. 解决4',6'混合跑的时候,停在手臂上的问题
- 2021-04-12 version 1.0.29
- 1. 解决4',6'混合跑的时候,会报参数错的问题
- 2. return wafer 上手臂没法传送的问题
- 2021-04-10 version 1.0.28
- 1. 解决单片会停住的问题
- 2. 解决4寸,6寸混合跑,会停住的问题
- 2021-01-31 version 1.0.0.17
- 1: EFEM 信息没处理的问题,导致伸进去PM,不动了
- 2:Cylinder报错 PLC Kept
- 2021-01-28 version 1.0.0.15
- 1:Cylinder报错 PLC Kept
- 2021-01-16 version 1.0.0.8
- 1:支持并行调度
- 2021-01-14 version 1.0.0.7
- 1:调度优化
- 2021-01-12 version 1.0.0.6
- 1:准备传片的过程中,会报超时错,而且报错之后,继续传片
- 2: return wafer, 弹出对话框可选是否cooling,参考Transfer wafer
- 3:sequence文件里面的cooling时间没生效
- 4:自动模式下,map不work
- 5:create job之后,禁止set/remove
- 6:auto runing-》auto idle
- 7:数据库没保存carrier信息
- 8: 提示3寸第一片不能跑货的问题
- 9:robot动画在Aligner位置有偏差
- 2020-12-20 version 1.0.0.1
- 1. 初始版本
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