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appLog20241024.txt

appLog20241024.txt 152 KB
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  1. --------------------------------[Header Log]----------------------------------------- [Save Log Job] 2024-10-24 09:35:29.853 LOG.INFO UiEvent.cs Line:51 Event() - System Information
    2. 

  2. [Save Log Job] 2024-10-24 09:35:29.853 LOG.INFO UiEvent.cs Line:51 Event() - recipe file  123  save completed
    3. 

  3. [Save Log Job] 2024-10-24 09:36:04.045 LOG.INFO UiEvent.cs Line:51 Event() - Chamber is in Init，can not do SetAutoMode。
    4. 

  4. [Save Log Job] 2024-10-24 09:36:04.045 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetAutoMode()
    5. 

  5. [Save Log Job] 2024-10-24 09:36:28.912 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetAutoMode()
    6. 

  6. [Save Log Job] 2024-10-24 09:36:28.912 LOG.INFO UiEvent.cs Line:51 Event() - Chamber is in Init，can not do SetAutoMode。
    7. 

  7. --------------------------------[Header Log]----------------------------------------- [Save Log Job] 2024-10-24 09:37:37.500 LOG.INFO UiEvent.cs Line:58 Event() - 已经连接上设备实时控制系统
    8. 

  8. [Save Log Job] 2024-10-24 09:37:37.501 LOG.INFO UiEvent.cs Line:57 Event() - 已经连接上设备实时控制系统
    9. 

  9. [Save Log Job] 2024-10-24 09:37:45.982 LOG.INFO UiEvent.cs Line:51 Event() - User admin login
    10. 

  10. [Save Log Job] 2024-10-24 09:39:17.351 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetAutoMode()
    11. 

  11. [Save Log Job] 2024-10-24 09:39:17.351 LOG.INFO UiEvent.cs Line:51 Event() - Chamber is in Init，can not do SetAutoMode。
    12. 

  12. [Save Log Job] 2024-10-24 09:39:39.009 LOG.INFO UiEvent.cs Line:51 Event() - recipe file  123  save completed
    13. 

  13. [Save Log Job] 2024-10-24 09:39:39.010 LOG.INFO UiEvent.cs Line:51 Event() - System Information
    14. 

  14. --------------------------------[Header Log]----------------------------------------- [Save Log Job] 2024-10-24 09:41:49.341 LOG.INFO UiEvent.cs Line:57 Event() - 已经连接上设备实时控制系统
    15. 

  15. [Save Log Job] 2024-10-24 09:41:49.343 LOG.INFO UiEvent.cs Line:58 Event() - 已经连接上设备实时控制系统
    16. 

  16. [Save Log Job] 2024-10-24 09:41:50.664 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    17. 

  17. [Save Log Job] 2024-10-24 09:41:54.224 LOG.INFO UiEvent.cs Line:51 Event() - Software will be expired in 0 days, at 2024/10/24 0:00:00 。
    18. 

  18. [Save Log Job] 2024-10-24 09:41:56.862 LOG.INFO UiEvent.cs Line:51 Event() - User admin login
    19. 

  19. [Save Log Job] 2024-10-24 09:42:05.265 LOG.INFO UiEvent.cs Line:51 Event() - 手动操作 SetConfig(System_Language, 1)
    20. 

  20. [Save Log Job] 2024-10-24 09:42:12.383 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetAutoMode()
    21. 

  21. [Save Log Job] 2024-10-24 09:42:12.384 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentModeChanged
    22. 

  22. [Save Log Job] 2024-10-24 09:42:12.384 LOG.INFO UiEvent.cs Line:51 Event() - System running mode changed to Auto Mode
    23. 

  23. [Save Log Job] 2024-10-24 09:42:30.145 LOG.INFO UiEvent.cs Line:51 Event() - Operation RunRecipe(123, )
    24. 

  24. [Save Log Job] 2024-10-24 09:42:30.146 LOG.INFO UiEvent.cs Line:51 Event() - EventLotStart
    25. 

  25. [Save Log Job] 2024-10-24 09:42:30.246 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    26. 

  26. [Save Log Job] 2024-10-24 09:42:30.246 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check door status。
    27. 

  27. [Save Log Job] 2024-10-24 09:42:30.246 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check chamber door。
    28. 

  28. [Save Log Job] 2024-10-24 09:42:30.247 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check backpanel door。
    29. 

  29. [Save Log Job] 2024-10-24 09:42:30.247 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check pump status。
    30. 

  30. [Save Log Job] 2024-10-24 09:42:30.247 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Close all the valves。
    31. 

  31. [Save Log Job] 2024-10-24 09:42:30.346 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Open pumping valve。
    32. 

  32. [Save Log Job] 2024-10-24 09:42:32.355 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门Chamber pumping valveOpen失败，原因：Valve keep closed 。
    33. 

  33. [Save Log Job] 2024-10-24 09:42:34.161 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check chamber pressure。
    34. 

  34. [Save Log Job] 2024-10-24 09:43:09.109 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Pump below 100mTorr。
    35. 

  35. [Save Log Job] 2024-10-24 09:43:09.109 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：PreProcess Finished in 0.6 minitues。
    36. 

  36. [Save Log Job] 2024-10-24 09:43:09.109 LOG.INFO UiEvent.cs Line:51 Event() - System complete run 'PreProcess'.
    37. 

  37. [Save Log Job] 2024-10-24 09:43:09.110 LOG.INFO UiEvent.cs Line:51 Event() - Run Recipe 20241024094230-123
    38. 

  38. [Save Log Job] 2024-10-24 09:43:09.112 LOG.INFO UiEvent.cs Line:51 Event() - System recipe start run'20241024094230-123'
    39. 

  39. [Save Log Job] 2024-10-24 09:43:09.209 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241024094230-123' start run step 1：initial。
    40. 

  40. [Save Log Job] 2024-10-24 09:43:09.210 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。
    41. 

  41. [Save Log Job] 2024-10-24 09:43:09.210 LOG.INFO UiEvent.cs Line:51 Event() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。
    42. 

  42. [Save Log Job] 2024-10-24 09:43:09.210 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。
    43. 

  43. [Save Log Job] 2024-10-24 09:43:09.211 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。
    44. 

  44. [Save Log Job] 2024-10-24 09:43:09.211 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。
    45. 

  45. [Save Log Job] 2024-10-24 09:43:09.211 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。
    46. 

  46. [Save Log Job] 2024-10-24 09:43:09.212 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。
    47. 

  47. [Save Log Job] 2024-10-24 09:43:09.212 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPower，RF set Power:0。
    48. 

  48. [Save Log Job] 2024-10-24 09:43:09.212 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。
    49. 

  49. [Save Log Job] 2024-10-24 09:43:09.213 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。
    50. 

  50. [Save Log Job] 2024-10-24 09:43:09.213 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。
    51. 

  51. [Save Log Job] 2024-10-24 09:43:09.214 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas1， ramp to 45sccm。
    52. 

  52. [Save Log Job] 2024-10-24 09:43:09.214 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas2， ramp to 56sccm。
    53. 

  53. [Save Log Job] 2024-10-24 09:43:09.214 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas3， ramp to 66sccm。
    54. 

  54. [Save Log Job] 2024-10-24 09:43:09.214 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas4， ramp to 76sccm。
    55. 

  55. [Save Log Job] 2024-10-24 09:43:09.215 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas5， ramp to 86sccm。
    56. 

  56. [Save Log Job] 2024-10-24 09:43:09.215 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPowerOnOff，Set RF power Off。
    57. 

  57. [Save Log Job] 2024-10-24 09:43:09.311 LOG.INFO UiEvent.cs Line:51 Event() - Start monitor pressure stability
    58. 

  58. [Save Log Job] 2024-10-24 09:43:12.021 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(System_Language, 2)
    59. 

  59. [Save Log Job] 2024-10-24 09:43:39.310 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241024094230-123' end step 1
    60. 

  60. [Save Log Job] 2024-10-24 09:43:39.310 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241024094230-123' start run step 2：initial。
    61. 

  61. [Save Log Job] 2024-10-24 09:43:39.310 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。
    62. 

  62. [Save Log Job] 2024-10-24 09:43:39.311 LOG.INFO UiEvent.cs Line:51 Event() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。
    63. 

  63. [Save Log Job] 2024-10-24 09:43:39.311 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。
    64. 

  64. [Save Log Job] 2024-10-24 09:43:39.311 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。
    65. 

  65. [Save Log Job] 2024-10-24 09:43:39.312 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。
    66. 

  66. [Save Log Job] 2024-10-24 09:43:39.313 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。
    67. 

  67. [Save Log Job] 2024-10-24 09:43:39.313 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。
    68. 

  68. [Save Log Job] 2024-10-24 09:43:39.313 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPower，RF set Power:150。
    69. 

  69. [Save Log Job] 2024-10-24 09:43:39.313 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。
    70. 

  70. [Save Log Job] 2024-10-24 09:43:39.314 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。
    71. 

  71. [Save Log Job] 2024-10-24 09:43:39.314 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。
    72. 

  72. [Save Log Job] 2024-10-24 09:43:39.314 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas1， ramp to 45sccm。
    73. 

  73. [Save Log Job] 2024-10-24 09:43:39.315 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas2， ramp to 56sccm。
    74. 

  74. [Save Log Job] 2024-10-24 09:43:39.315 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas3， ramp to 66sccm。
    75. 

  75. [Save Log Job] 2024-10-24 09:43:39.316 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas4， ramp to 76sccm。
    76. 

  76. [Save Log Job] 2024-10-24 09:43:39.316 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas5， ramp to 86sccm。
    77. 

  77. [Save Log Job] 2024-10-24 09:43:39.316 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPowerOnOff，Set RF power On。
    78. 

  78. [Save Log Job] 2024-10-24 09:44:09.403 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241024094230-123' end step 2
    79. 

  79. [Save Log Job] 2024-10-24 09:44:09.504 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241024094230-123' start run step 3：initial。
    80. 

  80. [Save Log Job] 2024-10-24 09:44:09.504 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。
    81. 

  81. [Save Log Job] 2024-10-24 09:44:09.504 LOG.INFO UiEvent.cs Line:51 Event() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。
    82. 

  82. [Save Log Job] 2024-10-24 09:44:09.505 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。
    83. 

  83. [Save Log Job] 2024-10-24 09:44:09.505 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。
    84. 

  84. [Save Log Job] 2024-10-24 09:44:09.505 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。
    85. 

  85. [Save Log Job] 2024-10-24 09:44:09.506 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。
    86. 

  86. [Save Log Job] 2024-10-24 09:44:09.506 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。
    87. 

  87. [Save Log Job] 2024-10-24 09:44:09.507 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPower，RF set Power:0。
    88. 

  88. [Save Log Job] 2024-10-24 09:44:09.507 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。
    89. 

  89. [Save Log Job] 2024-10-24 09:44:09.507 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。
    90. 

  90. [Save Log Job] 2024-10-24 09:44:09.508 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。
    91. 

  91. [Save Log Job] 2024-10-24 09:44:09.508 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas1， ramp to 45sccm。
    92. 

  92. [Save Log Job] 2024-10-24 09:44:09.508 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas2， ramp to 56sccm。
    93. 

  93. [Save Log Job] 2024-10-24 09:44:09.509 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas3， ramp to 66sccm。
    94. 

  94. [Save Log Job] 2024-10-24 09:44:09.509 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas4， ramp to 76sccm。
    95. 

  95. [Save Log Job] 2024-10-24 09:44:09.509 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas5， ramp to 86sccm。
    96. 

  96. [Save Log Job] 2024-10-24 09:44:09.509 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPowerOnOff，Set RF power Off。
    97. 

  97. [Save Log Job] 2024-10-24 09:44:18.230 LOG.INFO UiEvent.cs Line:51 Event() - 手动操作 SetConfig(System_RfPowerAlarmRange, 20)
    98. 

  98. [Save Log Job] 2024-10-24 09:44:19.133 LOG.INFO UiEvent.cs Line:51 Event() - 手动操作 SetConfig(System_RfPowerAlarmRange, 20)
    99. 

  99. [Save Log Job] 2024-10-24 09:44:27.258 LOG.INFO UiEvent.cs Line:51 Event() - 手动操作 SetConfig(System_RfPowerAlarmTime, 10)
    100. 

  100. [Save Log Job] 2024-10-24 09:44:39.593 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241024094230-123' end step 3
    101. 

  101. [Save Log Job] 2024-10-24 09:44:39.593 LOG.INFO UiEvent.cs Line:51 Event() - Stop monitor pressure stability
    102. 

  102. [Save Log Job] 2024-10-24 09:44:39.594 LOG.INFO UiEvent.cs Line:51 Event() - System Recipe run completed，菜单文件：20241024094230-123
    103. 

  103. 开始时间：2024/10/24 09:43:09
    104. 

  104. 结束时间：2024/10/24 09:44:39
    105. 

  105. 总时间：0:1:30
    106. 

  106. [Save Log Job] 2024-10-24 09:44:39.594 LOG.INFO UiEvent.cs Line:51 Event() - System 工艺运行结束
    107. 

  107. [Save Log Job] 2024-10-24 09:44:39.595 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, 等待10秒钟
    108. 

  108. [Save Log Job] 2024-10-24 09:44:41.606 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC1 ValveClose失败，原因：Valve keep open。
    109. 

  109. [Save Log Job] 2024-10-24 09:44:41.606 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC2 ValveClose失败，原因：Valve keep open。
    110. 

  110. [Save Log Job] 2024-10-24 09:44:44.320 LOG.INFO UiEvent.cs Line:51 Event() - 手动操作 AbortRecipe()
    111. 

  111. [Save Log Job] 2024-10-24 09:44:44.320 LOG.INFO UiEvent.cs Line:51 Event() - EventLotFinished
    112. 

  112. [Save Log Job] 2024-10-24 09:44:44.320 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    113. 

  113. [Save Log Job] 2024-10-24 09:45:12.501 LOG.INFO UiEvent.cs Line:51 Event() - 手动操作 RunRecipe(123, )
    114. 

  114. [Save Log Job] 2024-10-24 09:45:12.502 LOG.INFO UiEvent.cs Line:51 Event() - EventLotStart
    115. 

  115. [Save Log Job] 2024-10-24 09:45:12.602 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：检查门的状态。
    116. 

  116. [Save Log Job] 2024-10-24 09:45:12.602 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：检查腔体门是否关闭。
    117. 

  117. [Save Log Job] 2024-10-24 09:45:12.602 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：检查背板门是否关闭。
    118. 

  118. [Save Log Job] 2024-10-24 09:45:12.602 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：检查泵的状态。
    119. 

  119. [Save Log Job] 2024-10-24 09:45:12.603 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：关闭所有阀门。
    120. 

  120. [Save Log Job] 2024-10-24 09:45:12.603 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：打开抽气阀门。
    121. 

  121. [Save Log Job] 2024-10-24 09:45:12.603 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    122. 

  122. [Save Log Job] 2024-10-24 09:45:12.702 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：检查腔体压力。
    123. 

  123. [Save Log Job] 2024-10-24 09:45:19.730 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：抽气到100毫托。
    124. 

  124. [Save Log Job] 2024-10-24 09:45:19.831 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：PreProcess 操作完成，用时0.1分钟。
    125. 

  125. [Save Log Job] 2024-10-24 09:45:19.831 LOG.INFO UiEvent.cs Line:51 Event() - System complete run 'PreProcess'.
    126. 

  126. [Save Log Job] 2024-10-24 09:45:19.831 LOG.INFO UiEvent.cs Line:51 Event() - Run Recipe 20241024094512-123
    127. 

  127. [Save Log Job] 2024-10-24 09:45:19.832 LOG.INFO UiEvent.cs Line:51 Event() - System recipe start run'20241024094512-123'
    128. 

  128. [Save Log Job] 2024-10-24 09:45:19.832 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241024094512-123' start run step 1：initial。
    129. 

  129. [Save Log Job] 2024-10-24 09:45:19.833 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。
    130. 

  130. [Save Log Job] 2024-10-24 09:45:19.833 LOG.INFO UiEvent.cs Line:51 Event() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。
    131. 

  131. [Save Log Job] 2024-10-24 09:45:19.833 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。
    132. 

  132. [Save Log Job] 2024-10-24 09:45:19.835 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。
    133. 

  133. [Save Log Job] 2024-10-24 09:45:19.835 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。
    134. 

  134. [Save Log Job] 2024-10-24 09:45:19.835 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。
    135. 

  135. [Save Log Job] 2024-10-24 09:45:19.836 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。
    136. 

  136. [Save Log Job] 2024-10-24 09:45:19.836 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。
    137. 

  137. [Save Log Job] 2024-10-24 09:45:19.837 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPower，RF set Power:0。
    138. 

  138. [Save Log Job] 2024-10-24 09:45:19.840 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。
    139. 

  139. [Save Log Job] 2024-10-24 09:45:19.841 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。
    140. 

  140. [Save Log Job] 2024-10-24 09:45:19.841 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas4， ramp to 76sccm。
    141. 

  141. [Save Log Job] 2024-10-24 09:45:19.841 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas3， ramp to 66sccm。
    142. 

  142. [Save Log Job] 2024-10-24 09:45:19.841 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas5， ramp to 86sccm。
    143. 

  143. [Save Log Job] 2024-10-24 09:45:19.842 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas2， ramp to 56sccm。
    144. 

  144. [Save Log Job] 2024-10-24 09:45:19.842 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPowerOnOff，Set RF power Off。
    145. 

  145. [Save Log Job] 2024-10-24 09:45:19.862 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas1， ramp to 45sccm。
    146. 

  146. [Save Log Job] 2024-10-24 09:45:19.931 LOG.INFO UiEvent.cs Line:51 Event() - Start monitor pressure stability
    147. 

  147. [Save Log Job] 2024-10-24 09:45:50.021 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241024094512-123' end step 1
    148. 

  148. [Save Log Job] 2024-10-24 09:45:50.021 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241024094512-123' start run step 2：initial。
    149. 

  149. [Save Log Job] 2024-10-24 09:45:50.021 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。
    150. 

  150. [Save Log Job] 2024-10-24 09:45:50.021 LOG.INFO UiEvent.cs Line:51 Event() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。
    151. 

  151. [Save Log Job] 2024-10-24 09:45:50.022 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。
    152. 

  152. [Save Log Job] 2024-10-24 09:45:50.022 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。
    153. 

  153. [Save Log Job] 2024-10-24 09:45:50.023 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。
    154. 

  154. [Save Log Job] 2024-10-24 09:45:50.023 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。
    155. 

  155. [Save Log Job] 2024-10-24 09:45:50.023 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。
    156. 

  156. [Save Log Job] 2024-10-24 09:45:50.024 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPower，RF set Power:150。
    157. 

  157. [Save Log Job] 2024-10-24 09:45:50.025 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。
    158. 

  158. [Save Log Job] 2024-10-24 09:45:50.025 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。
    159. 

  159. [Save Log Job] 2024-10-24 09:45:50.025 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。
    160. 

  160. [Save Log Job] 2024-10-24 09:45:50.026 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas1， ramp to 45sccm。
    161. 

  161. [Save Log Job] 2024-10-24 09:45:50.026 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas2， ramp to 56sccm。
    162. 

  162. [Save Log Job] 2024-10-24 09:45:50.026 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas3， ramp to 66sccm。
    163. 

  163. [Save Log Job] 2024-10-24 09:45:50.027 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas4， ramp to 76sccm。
    164. 

  164. [Save Log Job] 2024-10-24 09:45:50.027 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas5， ramp to 86sccm。
    165. 

  165. [Save Log Job] 2024-10-24 09:45:50.028 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPowerOnOff，Set RF power On。
    166. 

  166. [Save Log Job] 2024-10-24 09:46:00.451 LOG.INFO UiEvent.cs Line:51 Event() - System RF GeneratorTolerance alarm：Forward power 54 out of range[130,170] in 10 seconds.
    167. 

  167. [Save Log Job] 2024-10-24 09:46:00.451 LOG.INFO UiEvent.cs Line:51 Event() - System recipe was aborted: 工艺终止运行
    168. 

  168. [Save Log Job] 2024-10-24 09:46:00.452 LOG.INFO UiEvent.cs Line:51 Event() - Stop monitor pressure stability
    169. 

  169. [Save Log Job] 2024-10-24 09:46:00.452 LOG.INFO UiEvent.cs Line:51 Event() - System Recipe run completed，菜单文件：20241024094512-123
    170. 

  170. 开始时间：2024/10/24 09:45:19
    171. 

  171. 结束时间：2024/10/24 09:46:00
    172. 

  172. 总时间：0:0:40
    173. 

  173. [Save Log Job] 2024-10-24 09:46:00.452 LOG.INFO UiEvent.cs Line:51 Event() - System 工艺运行结束
    174. 

  174. [Save Log Job] 2024-10-24 09:46:00.554 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    175. 

  175. [Save Log Job] 2024-10-24 09:46:02.457 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC1 ValveClose失败，原因：Valve keep open。
    176. 

  176. [Save Log Job] 2024-10-24 09:46:02.457 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC2 ValveClose失败，原因：Valve keep open。
    177. 

  177. [Save Log Job] 2024-10-24 09:46:02.457 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC3 ValveClose失败，原因：Valve keep open。
    178. 

  178. [Save Log Job] 2024-10-24 09:46:02.458 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC4 ValveClose失败，原因：Valve keep open。
    179. 

  179. [Save Log Job] 2024-10-24 10:08:11.987 LOG.INFO UiEvent.cs Line:51 Event() - 手动操作 SetConfig(System_Language, 1)
    180. 

  180. [Save Log Job] 2024-10-24 10:08:21.812 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetManualMode()
    181. 

  181. [Save Log Job] 2024-10-24 10:08:21.812 LOG.INFO UiEvent.cs Line:51 Event() - Chamber is in Error，can not do SetManualMode。
    182. 

  182. [Save Log Job] 2024-10-24 10:09:55.363 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetManualMode()
    183. 

  183. [Save Log Job] 2024-10-24 10:09:55.364 LOG.INFO UiEvent.cs Line:51 Event() - Chamber is in Error，can not do SetManualMode。
    184. 

  184. [Save Log Job] 2024-10-24 10:10:08.299 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetManualMode()
    185. 

  185. [Save Log Job] 2024-10-24 10:10:08.299 LOG.INFO UiEvent.cs Line:51 Event() - Chamber is in Error，can not do SetManualMode。
    186. 

  186. [Save Log Job] 2024-10-24 10:10:12.912 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    187. 

  187. [Save Log Job] 2024-10-24 10:14:38.615 LOG.INFO UiEvent.cs Line:51 Event() - Operation RunRecipe(123, )
    188. 

  188. [Save Log Job] 2024-10-24 10:14:38.714 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check door status。
    189. 

  189. [Save Log Job] 2024-10-24 10:14:38.714 LOG.INFO UiEvent.cs Line:51 Event() - EventLotStart
    190. 

  190. [Save Log Job] 2024-10-24 10:14:38.714 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check chamber door。
    191. 

  191. [Save Log Job] 2024-10-24 10:14:38.715 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check backpanel door。
    192. 

  192. [Save Log Job] 2024-10-24 10:14:38.715 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check pump status。
    193. 

  193. [Save Log Job] 2024-10-24 10:14:38.715 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Close all the valves。
    194. 

  194. [Save Log Job] 2024-10-24 10:14:38.816 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Open pumping valve。
    195. 

  195. [Save Log Job] 2024-10-24 10:14:38.818 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check chamber pressure。
    196. 

  196. [Save Log Job] 2024-10-24 10:14:38.818 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    197. 

  197. [Save Log Job] 2024-10-24 10:14:38.818 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Pump below 100mTorr。
    198. 

  198. [Save Log Job] 2024-10-24 10:14:46.711 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：PreProcess Finished in 0.0 minitues。
    199. 

  199. [Save Log Job] 2024-10-24 10:14:46.711 LOG.INFO UiEvent.cs Line:51 Event() - System complete run 'PreProcess'.
    200. 

  200. [Save Log Job] 2024-10-24 10:14:46.711 LOG.INFO UiEvent.cs Line:51 Event() - Run Recipe 20241024101438-123
    201. 

  201. [Save Log Job] 2024-10-24 10:14:46.712 LOG.INFO UiEvent.cs Line:51 Event() - System recipe start run'20241024101438-123'
    202. 

  202. [Save Log Job] 2024-10-24 10:14:51.194 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241024101438-123' start run step 1：initial。
    203. 

  203. [Save Log Job] 2024-10-24 10:14:51.195 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。
    204. 

  204. [Save Log Job] 2024-10-24 10:14:51.195 LOG.INFO UiEvent.cs Line:51 Event() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。
    205. 

  205. [Save Log Job] 2024-10-24 10:14:51.195 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。
    206. 

  206. [Save Log Job] 2024-10-24 10:14:51.196 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。
    207. 

  207. [Save Log Job] 2024-10-24 10:14:51.196 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。
    208. 

  208. [Save Log Job] 2024-10-24 10:14:51.196 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。
    209. 

  209. [Save Log Job] 2024-10-24 10:14:51.196 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。
    210. 

  210. [Save Log Job] 2024-10-24 10:15:09.329 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。
    211. 

  211. [Save Log Job] 2024-10-24 10:15:09.329 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPower，RF set Power:0。
    212. 

  212. [Save Log Job] 2024-10-24 10:15:09.329 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。
    213. 

  213. [Save Log Job] 2024-10-24 10:15:09.329 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas1， ramp to 45sccm。
    214. 

  214. [Save Log Job] 2024-10-24 10:15:09.329 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。
    215. 

  215. [Save Log Job] 2024-10-24 10:15:09.330 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas2， ramp to 56sccm。
    216. 

  216. [Save Log Job] 2024-10-24 10:15:09.330 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas3， ramp to 66sccm。
    217. 

  217. [Save Log Job] 2024-10-24 10:15:09.331 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas5， ramp to 86sccm。
    218. 

  218. [Save Log Job] 2024-10-24 10:15:09.331 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPowerOnOff，Set RF power Off。
    219. 

  219. [Save Log Job] 2024-10-24 10:15:09.331 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas4， ramp to 76sccm。
    220. 

  220. [Save Log Job] 2024-10-24 10:15:15.918 LOG.INFO UiEvent.cs Line:51 Event() - Start monitor pressure stability
    221. 

  221. [Save Log Job] 2024-10-24 10:15:19.119 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC1 ValveOpen失败，原因：Valve keep closed 。
    222. 

  222. [Save Log Job] 2024-10-24 10:15:19.640 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC2 ValveOpen失败，原因：Valve keep closed 。
    223. 

  223. [Save Log Job] 2024-10-24 10:15:24.296 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC3 ValveOpen失败，原因：Valve keep closed 。
    224. 

  224. [Save Log Job] 2024-10-24 10:15:24.296 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC4 ValveOpen失败，原因：Valve keep closed 。
    225. 

  225. [Save Log Job] 2024-10-24 10:15:24.296 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门Process gas final valveOpen失败，原因：Valve keep closed 。
    226. 

  226. [Save Log Job] 2024-10-24 10:16:23.259 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241024101438-123' end step 1
    227. 

  227. [Save Log Job] 2024-10-24 10:16:49.041 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241024101438-123' start run step 2：initial。
    228. 

  228. [Save Log Job] 2024-10-24 10:16:50.144 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。
    229. 

  229. [Save Log Job] 2024-10-24 10:16:51.818 LOG.INFO UiEvent.cs Line:51 Event() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。
    230. 

  230. [Save Log Job] 2024-10-24 10:16:52.939 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。
    231. 

  231. [Save Log Job] 2024-10-24 10:16:52.944 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。
    232. 

  232. [Save Log Job] 2024-10-24 10:16:54.306 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。
    233. 

  233. [Save Log Job] 2024-10-24 10:16:54.978 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。
    234. 

  234. [Save Log Job] 2024-10-24 10:16:54.979 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。
    235. 

  235. [Save Log Job] 2024-10-24 10:16:54.979 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPower，RF set Power:150。
    236. 

  236. [Save Log Job] 2024-10-24 10:16:54.979 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。
    237. 

  237. [Save Log Job] 2024-10-24 10:16:54.979 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。
    238. 

  238. [Save Log Job] 2024-10-24 10:16:54.980 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。
    239. 

  239. [Save Log Job] 2024-10-24 10:16:54.980 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas1， ramp to 45sccm。
    240. 

  240. [Save Log Job] 2024-10-24 10:16:54.981 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas2， ramp to 56sccm。
    241. 

  241. [Save Log Job] 2024-10-24 10:16:54.986 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas3， ramp to 66sccm。
    242. 

  242. [Save Log Job] 2024-10-24 10:16:56.168 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas4， ramp to 76sccm。
    243. 

  243. [Save Log Job] 2024-10-24 10:16:56.606 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas5， ramp to 86sccm。
    244. 

  244. [Save Log Job] 2024-10-24 10:16:56.609 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPowerOnOff，Set RF power On。
    245. 

  245. [Save Log Job] 2024-10-24 10:16:56.613 LOG.INFO UiEvent.cs Line:51 Event() - Alarm event:The RF generator is offline.
    246. 

  246. [Save Log Job] 2024-10-24 10:17:13.206 LOG.INFO UiEvent.cs Line:51 Event() - System recipe was aborted: user aborted recipe
    247. 

  247. [Save Log Job] 2024-10-24 10:17:14.539 LOG.INFO UiEvent.cs Line:51 Event() - System Recipe run completed，Recipe：20241024101438-123
    248. 

  248. Start time：2024/10/24 10:14:38
    249. 

  249. End time：2024/10/24 10:17:13
    250. 

  250. Total time：0:2:35
    251. 

  251. [Save Log Job] 2024-10-24 10:17:14.539 LOG.INFO UiEvent.cs Line:51 Event() - Stop monitor pressure stability
    252. 

  252. [Save Log Job] 2024-10-24 10:17:14.548 LOG.INFO UiEvent.cs Line:51 Event() - System Recipe completely run
    253. 

  253. [Save Log Job] 2024-10-24 10:17:15.760 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    254. 

  254. [Save Log Job] 2024-10-24 10:17:15.760 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    255. 

  255. [Save Log Job] 2024-10-24 10:17:20.334 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC1 ValveClose失败，原因：Valve keep open。
    256. 

  256. [Save Log Job] 2024-10-24 10:17:20.334 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC2 ValveClose失败，原因：Valve keep open。
    257. 

  257. [Save Log Job] 2024-10-24 10:17:33.446 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC3 ValveClose失败，原因：Valve keep open。
    258. 

  258. [Save Log Job] 2024-10-24 10:23:18.996 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    259. 

  259. [Save Log Job] 2024-10-24 10:24:24.578 LOG.INFO UiEvent.cs Line:51 Event() - Operation RunRecipe(123, )
    260. 

  260. [Save Log Job] 2024-10-24 10:24:24.578 LOG.INFO UiEvent.cs Line:51 Event() - EventLotStart
    261. 

  261. [Save Log Job] 2024-10-24 10:24:24.679 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check door status。
    262. 

  262. [Save Log Job] 2024-10-24 10:24:24.679 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check chamber door。
    263. 

  263. [Save Log Job] 2024-10-24 10:24:24.680 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check backpanel door。
    264. 

  264. [Save Log Job] 2024-10-24 10:24:24.680 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check pump status。
    265. 

  265. [Save Log Job] 2024-10-24 10:24:24.680 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Close all the valves。
    266. 

  266. [Save Log Job] 2024-10-24 10:24:24.680 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Open pumping valve。
    267. 

  267. [Save Log Job] 2024-10-24 10:24:24.779 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check chamber pressure。
    268. 

  268. [Save Log Job] 2024-10-24 10:24:24.779 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    269. 

  269. [Save Log Job] 2024-10-24 10:24:34.817 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Pump below 100mTorr。
    270. 

  270. [Save Log Job] 2024-10-24 10:24:34.817 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：PreProcess Finished in 0.2 minitues。
    271. 

  271. [Save Log Job] 2024-10-24 10:24:34.817 LOG.INFO UiEvent.cs Line:51 Event() - System complete run 'PreProcess'.
    272. 

  272. [Save Log Job] 2024-10-24 10:24:34.817 LOG.INFO UiEvent.cs Line:51 Event() - System recipe start run'20241024102424-123'
    273. 

  273. [Save Log Job] 2024-10-24 10:24:34.817 LOG.INFO UiEvent.cs Line:51 Event() - Run Recipe 20241024102424-123
    274. 

  274. [Save Log Job] 2024-10-24 10:24:34.917 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241024102424-123' start run step 1：initial。
    275. 

  275. [Save Log Job] 2024-10-24 10:24:34.917 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。
    276. 

  276. [Save Log Job] 2024-10-24 10:24:34.917 LOG.INFO UiEvent.cs Line:51 Event() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。
    277. 

  277. [Save Log Job] 2024-10-24 10:24:34.917 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。
    278. 

  278. [Save Log Job] 2024-10-24 10:24:34.918 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。
    279. 

  279. [Save Log Job] 2024-10-24 10:24:34.918 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。
    280. 

  280. [Save Log Job] 2024-10-24 10:24:34.918 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。
    281. 

  281. [Save Log Job] 2024-10-24 10:24:34.918 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。
    282. 

  282. [Save Log Job] 2024-10-24 10:24:34.918 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPower，RF set Power:0。
    283. 

  283. [Save Log Job] 2024-10-24 10:24:34.919 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。
    284. 

  284. [Save Log Job] 2024-10-24 10:24:34.919 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。
    285. 

  285. [Save Log Job] 2024-10-24 10:24:34.919 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。
    286. 

  286. [Save Log Job] 2024-10-24 10:24:34.919 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas1， ramp to 45sccm。
    287. 

  287. [Save Log Job] 2024-10-24 10:24:34.919 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas2， ramp to 56sccm。
    288. 

  288. [Save Log Job] 2024-10-24 10:24:34.919 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas3， ramp to 66sccm。
    289. 

  289. [Save Log Job] 2024-10-24 10:24:34.919 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas4， ramp to 76sccm。
    290. 

  290. [Save Log Job] 2024-10-24 10:24:34.920 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas5， ramp to 86sccm。
    291. 

  291. [Save Log Job] 2024-10-24 10:24:34.920 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPowerOnOff，Set RF power Off。
    292. 

  292. [Save Log Job] 2024-10-24 10:24:34.920 LOG.INFO UiEvent.cs Line:51 Event() - Start monitor pressure stability
    293. 

  293. [Save Log Job] 2024-10-24 10:25:05.006 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241024102424-123' start run step 2：initial。
    294. 

  294. [Save Log Job] 2024-10-24 10:25:05.006 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241024102424-123' end step 1
    295. 

  295. [Save Log Job] 2024-10-24 10:25:05.006 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。
    296. 

  296. [Save Log Job] 2024-10-24 10:25:05.006 LOG.INFO UiEvent.cs Line:51 Event() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。
    297. 

  297. [Save Log Job] 2024-10-24 10:25:05.007 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。
    298. 

  298. [Save Log Job] 2024-10-24 10:25:05.007 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。
    299. 

  299. [Save Log Job] 2024-10-24 10:25:05.007 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。
    300. 

  300. [Save Log Job] 2024-10-24 10:25:05.007 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。
    301. 

  301. [Save Log Job] 2024-10-24 10:25:05.007 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。
    302. 

  302. [Save Log Job] 2024-10-24 10:25:05.007 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPower，RF set Power:150。
    303. 

  303. [Save Log Job] 2024-10-24 10:25:05.009 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。
    304. 

  304. [Save Log Job] 2024-10-24 10:25:05.010 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。
    305. 

  305. [Save Log Job] 2024-10-24 10:25:05.010 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。
    306. 

  306. [Save Log Job] 2024-10-24 10:25:05.012 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas2， ramp to 56sccm。
    307. 

  307. [Save Log Job] 2024-10-24 10:25:05.012 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas3， ramp to 66sccm。
    308. 

  308. [Save Log Job] 2024-10-24 10:25:05.012 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas1， ramp to 45sccm。
    309. 

  309. [Save Log Job] 2024-10-24 10:25:05.012 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas5， ramp to 86sccm。
    310. 

  310. [Save Log Job] 2024-10-24 10:25:05.012 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas4， ramp to 76sccm。
    311. 

  311. [Save Log Job] 2024-10-24 10:25:05.012 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPowerOnOff，Set RF power On。
    312. 

  312. [Save Log Job] 2024-10-24 10:25:15.433 LOG.INFO UiEvent.cs Line:51 Event() - System RF GeneratorTolerance alarm：Forward power 54 out of range[130,170] in 10 seconds.
    313. 

  313. [Save Log Job] 2024-10-24 10:25:15.433 LOG.INFO UiEvent.cs Line:51 Event() - System recipe was aborted: user aborted recipe
    314. 

  314. [Save Log Job] 2024-10-24 10:25:15.433 LOG.INFO UiEvent.cs Line:51 Event() - Stop monitor pressure stability
    315. 

  315. [Save Log Job] 2024-10-24 10:25:15.433 LOG.INFO UiEvent.cs Line:51 Event() - System Recipe run completed，Recipe：20241024102424-123
    316. 

  316. Start time：2024/10/24 10:24:34
    317. 

  317. End time：2024/10/24 10:25:15
    318. 

  318. Total time：0:0:40
    319. 

  319. [Save Log Job] 2024-10-24 10:25:15.433 LOG.INFO UiEvent.cs Line:51 Event() - System Recipe completely run
    320. 

  320. [Save Log Job] 2024-10-24 10:25:15.533 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    321. 

  321. [Save Log Job] 2024-10-24 10:25:17.437 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC2 ValveClose失败，原因：Valve keep open。
    322. 

  322. [Save Log Job] 2024-10-24 10:25:17.437 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC1 ValveClose失败，原因：Valve keep open。
    323. 

  323. [Save Log Job] 2024-10-24 10:25:17.437 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC3 ValveClose失败，原因：Valve keep open。
    324. 

  324. [Save Log Job] 2024-10-24 10:25:17.438 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC4 ValveClose失败，原因：Valve keep open。
    325. 

  325. [Save Log Job] 2024-10-24 11:12:59.866 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    326. 

  326. [Save Log Job] 2024-10-24 11:13:08.890 LOG.INFO UiEvent.cs Line:51 Event() - Operation RunRecipe(123, )
    327. 

  327. [Save Log Job] 2024-10-24 11:13:08.890 LOG.INFO UiEvent.cs Line:51 Event() - EventLotStart
    328. 

  328. [Save Log Job] 2024-10-24 11:13:08.989 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check door status。
    329. 

  329. [Save Log Job] 2024-10-24 11:13:08.989 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check chamber door。
    330. 

  330. [Save Log Job] 2024-10-24 11:13:08.990 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check backpanel door。
    331. 

  331. [Save Log Job] 2024-10-24 11:13:08.990 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check pump status。
    332. 

  332. [Save Log Job] 2024-10-24 11:13:08.990 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Close all the valves。
    333. 

  333. [Save Log Job] 2024-10-24 11:13:08.992 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Open pumping valve。
    334. 

  334. [Save Log Job] 2024-10-24 11:13:09.092 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    335. 

  335. [Save Log Job] 2024-10-24 11:13:09.092 LOG.INFO UiEvent.cs Line:51 Event() - System complete run 'PreProcess'.
    336. 

  336. [Save Log Job] 2024-10-24 11:13:09.093 LOG.INFO UiEvent.cs Line:51 Event() - Run Recipe 20241024111308-123
    337. 

  337. [Save Log Job] 2024-10-24 11:13:09.093 LOG.INFO UiEvent.cs Line:51 Event() - System recipe start run'20241024111308-123'
    338. 

  338. [Save Log Job] 2024-10-24 11:13:09.114 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Pump below 100mTorr。
    339. 

  339. [Save Log Job] 2024-10-24 11:13:09.114 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：PreProcess Finished in 0.0 minitues。
    340. 

  340. [Save Log Job] 2024-10-24 11:13:09.114 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check chamber pressure。
    341. 

  341. [Save Log Job] 2024-10-24 11:13:09.191 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241024111308-123' start run step 1：initial。
    342. 

  342. [Save Log Job] 2024-10-24 11:13:09.191 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。
    343. 

  343. [Save Log Job] 2024-10-24 11:13:09.191 LOG.INFO UiEvent.cs Line:51 Event() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。
    344. 

  344. [Save Log Job] 2024-10-24 11:13:09.191 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。
    345. 

  345. [Save Log Job] 2024-10-24 11:13:09.191 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。
    346. 

  346. [Save Log Job] 2024-10-24 11:13:09.191 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。
    347. 

  347. [Save Log Job] 2024-10-24 11:13:09.191 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。
    348. 

  348. [Save Log Job] 2024-10-24 11:13:09.192 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。
    349. 

  349. [Save Log Job] 2024-10-24 11:13:09.192 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPower，RF set Power:0。
    350. 

  350. [Save Log Job] 2024-10-24 11:13:09.192 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。
    351. 

  351. [Save Log Job] 2024-10-24 11:13:09.192 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。
    352. 

  352. [Save Log Job] 2024-10-24 11:13:09.192 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。
    353. 

  353. [Save Log Job] 2024-10-24 11:13:09.193 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas1， ramp to 45sccm。
    354. 

  354. [Save Log Job] 2024-10-24 11:13:09.193 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas2， ramp to 56sccm。
    355. 

  355. [Save Log Job] 2024-10-24 11:13:09.193 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas3， ramp to 66sccm。
    356. 

  356. [Save Log Job] 2024-10-24 11:13:09.193 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas4， ramp to 76sccm。
    357. 

  357. [Save Log Job] 2024-10-24 11:13:09.193 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas5， ramp to 86sccm。
    358. 

  358. [Save Log Job] 2024-10-24 11:13:09.194 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPowerOnOff，Set RF power Off。
    359. 

  359. [Save Log Job] 2024-10-24 11:13:09.194 LOG.INFO UiEvent.cs Line:51 Event() - Start monitor pressure stability
    360. 

  360. [Save Log Job] 2024-10-24 11:13:39.271 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241024111308-123' start run step 2：initial。
    361. 

  361. [Save Log Job] 2024-10-24 11:13:39.271 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241024111308-123' end step 1
    362. 

  362. [Save Log Job] 2024-10-24 11:13:39.271 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。
    363. 

  363. [Save Log Job] 2024-10-24 11:13:39.273 LOG.INFO UiEvent.cs Line:51 Event() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。
    364. 

  364. [Save Log Job] 2024-10-24 11:13:39.273 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。
    365. 

  365. [Save Log Job] 2024-10-24 11:13:39.273 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。
    366. 

  366. [Save Log Job] 2024-10-24 11:13:39.273 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。
    367. 

  367. [Save Log Job] 2024-10-24 11:13:39.274 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。
    368. 

  368. [Save Log Job] 2024-10-24 11:13:39.274 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。
    369. 

  369. [Save Log Job] 2024-10-24 11:13:39.274 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPower，RF set Power:150。
    370. 

  370. [Save Log Job] 2024-10-24 11:13:39.274 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。
    371. 

  371. [Save Log Job] 2024-10-24 11:13:39.274 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。
    372. 

  372. [Save Log Job] 2024-10-24 11:13:39.274 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。
    373. 

  373. [Save Log Job] 2024-10-24 11:13:39.274 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas1， ramp to 45sccm。
    374. 

  374. [Save Log Job] 2024-10-24 11:13:39.274 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas2， ramp to 56sccm。
    375. 

  375. [Save Log Job] 2024-10-24 11:13:39.277 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas3， ramp to 66sccm。
    376. 

  376. [Save Log Job] 2024-10-24 11:13:39.277 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas4， ramp to 76sccm。
    377. 

  377. [Save Log Job] 2024-10-24 11:13:39.277 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas5， ramp to 86sccm。
    378. 

  378. [Save Log Job] 2024-10-24 11:13:39.277 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPowerOnOff，Set RF power On。
    379. 

  379. [Save Log Job] 2024-10-24 11:45:05.044 LOG.INFO UiEvent.cs Line:51 Event() - System RF GeneratorTolerance alarm：Forward power 54 out of range[130,170] in 10 seconds.
    380. 

  380. [Save Log Job] 2024-10-24 11:45:05.044 LOG.INFO UiEvent.cs Line:51 Event() - System recipe was aborted: user aborted recipe
    381. 

  381. [Save Log Job] 2024-10-24 11:45:05.069 LOG.INFO UiEvent.cs Line:51 Event() - Stop monitor pressure stability
    382. 

  382. [Save Log Job] 2024-10-24 11:45:05.069 LOG.INFO UiEvent.cs Line:51 Event() - System Recipe run completed，Recipe：20241024111308-123
    383. 

  383. Start time：2024/10/24 11:13:09
    384. 

  384. End time：2024/10/24 11:31:50
    385. 

  385. Total time：0:18:41
    386. 

  386. [Save Log Job] 2024-10-24 11:45:05.069 LOG.INFO UiEvent.cs Line:51 Event() - System Recipe completely run
    387. 

  387. [Save Log Job] 2024-10-24 11:45:05.069 LOG.INFO UiEvent.cs Line:51 Event() - System PLC heart beat check failed，please confirm PLC still running
    388. 

  388. [Save Log Job] 2024-10-24 11:45:05.093 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    389. 

  389. [Save Log Job] 2024-10-24 11:45:05.093 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    390. 

  390. [Save Log Job] 2024-10-24 11:45:07.606 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC1 ValveClose失败，原因：Valve keep open。
    391. 

  391. [Save Log Job] 2024-10-24 11:45:07.607 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC2 ValveClose失败，原因：Valve keep open。
    392. 

  392. [Save Log Job] 2024-10-24 11:45:08.021 LOG.ERROR ServiceClientWrapper.cs Line:113 Do() - QueryDataService 服务异常
    393. 

  393. System.ServiceModel.CommunicationException: 服务器未提供有意义的回复；这可能是由协定不匹配、会话过早关闭或内部服务器错误引起的。
    394. 

  394. 

  395. Server stack trace: 
    396. 

  396.    在 System.ServiceModel.Channels.ServiceChannel.Call(String action, Boolean oneway, ProxyOperationRuntime operation, Object[] ins, Object[] outs, TimeSpan timeout)
    397. 

  397.    在 System.ServiceModel.Channels.ServiceChannelProxy.InvokeService(IMethodCallMessage methodCall, ProxyOperationRuntime operation)
    398. 

  398.    在 System.ServiceModel.Channels.ServiceChannelProxy.Invoke(IMessage message)
    399. 

  399. 

  400. Exception rethrown at [0]: 
    401. 

  401.    在 System.Runtime.Remoting.Proxies.RealProxy.HandleReturnMessage(IMessage reqMsg, IMessage retMsg)
    402. 

  402.    在 System.Runtime.Remoting.Proxies.RealProxy.PrivateInvoke(MessageData& msgData, Int32 type)
    403. 

  403.    在 Aitex.Triton160.Common.Interface.IQueryDataService.PollConfig(IEnumerable`1 keys)
    404. 

  404.    在 Aitex.Triton160.UI.WCF.QueryDataServiceClient.<>c__DisplayClass3_0.<PollConfig>b__0(IQueryDataService svc) 位置 D:\jet.plasma\trunk\Triton160\Triton160UI\Wcf\QueryDataServiceClient.cs:行号 36
    405. 

  405.    在 Aitex.Core.WCF.ServiceClientWrapper`1.Do(Action`1 action) 位置 D:\jet.plasma\trunk\Triton160\Common\Core\WCF\ServiceClientWrapper.cs:行号 82
    406. 

  406. [Save Log Job] 2024-10-24 11:45:08.552 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC3 ValveClose失败，原因：Valve keep open。
    407. 

  407. [Save Log Job] 2024-10-24 11:45:08.729 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC4 ValveClose失败，原因：Valve keep open。
    408. 

  408. [Save Log Job] 2024-10-24 11:45:08.733 LOG.INFO ServiceClientWrapper.cs Line:87 Do() - QueryDataService 服务恢复
    409. 

  409. [Save Log Job] 2024-10-24 11:45:08.741 LOG.ERROR SubscriptionViewModelBase.cs Line:96 Poll() - 获取RT数据失败
    410. 

  410. [Save Log Job] 2024-10-24 11:45:13.843 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    411. 

  411. [Save Log Job] 2024-10-24 11:46:07.726 LOG.INFO UiEvent.cs Line:51 Event() - Operation RunRecipe(123, )
    412. 

  412. [Save Log Job] 2024-10-24 11:47:02.986 LOG.INFO UiEvent.cs Line:51 Event() - EventLotStart
    413. 

  413. [Save Log Job] 2024-10-24 11:47:03.502 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    414. 

  414. [Save Log Job] 2024-10-24 11:47:03.504 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    415. 

  415. [Save Log Job] 2024-10-24 11:47:03.505 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check door status。
    416. 

  416. [Save Log Job] 2024-10-24 11:47:03.509 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check chamber door。
    417. 

  417. [Save Log Job] 2024-10-24 11:47:04.104 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check backpanel door。
    418. 

  418. [Save Log Job] 2024-10-24 11:47:04.107 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check pump status。
    419. 

  419. [Save Log Job] 2024-10-24 11:47:04.682 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Close all the valves。
    420. 

  420. [Save Log Job] 2024-10-24 11:47:05.141 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Open pumping valve。
    421. 

  421. [Save Log Job] 2024-10-24 11:47:05.142 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check chamber pressure。
    422. 

  422. [Save Log Job] 2024-10-24 11:47:05.705 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Pump below 100mTorr。
    423. 

  423. [Save Log Job] 2024-10-24 11:47:06.122 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：PreProcess Finished in 0.2 minitues。
    424. 

  424. [Save Log Job] 2024-10-24 11:47:06.643 LOG.INFO UiEvent.cs Line:51 Event() - Run Recipe 20241024114654-123
    425. 

  425. [Save Log Job] 2024-10-24 11:47:06.643 LOG.INFO UiEvent.cs Line:51 Event() - System complete run 'PreProcess'.
    426. 

  426. [Save Log Job] 2024-10-24 11:47:06.645 LOG.INFO UiEvent.cs Line:51 Event() - System recipe start run'20241024114654-123'
    427. 

  427. [Save Log Job] 2024-10-24 11:47:07.158 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241024114654-123' start run step 1：initial。
    428. 

  428. [Save Log Job] 2024-10-24 11:47:07.669 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。
    429. 

  429. [Save Log Job] 2024-10-24 11:47:08.157 LOG.INFO UiEvent.cs Line:51 Event() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。
    430. 

  430. [Save Log Job] 2024-10-24 11:47:08.158 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。
    431. 

  431. [Save Log Job] 2024-10-24 11:47:08.637 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。
    432. 

  432. [Save Log Job] 2024-10-24 11:47:08.640 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。
    433. 

  433. [Save Log Job] 2024-10-24 11:47:09.239 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。
    434. 

  434. [Save Log Job] 2024-10-24 11:47:09.793 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。
    435. 

  435. [Save Log Job] 2024-10-24 11:47:10.460 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPower，RF set Power:0。
    436. 

  436. [Save Log Job] 2024-10-24 11:47:10.460 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。
    437. 

  437. [Save Log Job] 2024-10-24 11:47:10.656 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。
    438. 

  438. [Save Log Job] 2024-10-24 11:47:11.138 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。
    439. 

  439. [Save Log Job] 2024-10-24 11:47:11.718 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas1， ramp to 45sccm。
    440. 

  440. [Save Log Job] 2024-10-24 11:47:11.720 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas2， ramp to 56sccm。
    441. 

  441. [Save Log Job] 2024-10-24 11:47:12.245 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas3， ramp to 66sccm。
    442. 

  442. [Save Log Job] 2024-10-24 11:47:12.760 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas4， ramp to 76sccm。
    443. 

  443. [Save Log Job] 2024-10-24 11:47:13.519 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas5， ramp to 86sccm。
    444. 

  444. [Save Log Job] 2024-10-24 11:47:14.220 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPowerOnOff，Set RF power Off。
    445. 

  445. [Save Log Job] 2024-10-24 11:47:14.222 LOG.INFO UiEvent.cs Line:51 Event() - Start monitor pressure stability
    446. 

  446. [Save Log Job] 2024-10-24 11:47:59.414 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241024114654-123' end step 1
    447. 

  447. [Save Log Job] 2024-10-24 11:48:00.812 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241024114654-123' start run step 2：initial。
    448. 

  448. [Save Log Job] 2024-10-24 11:48:01.487 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。
    449. 

  449. [Save Log Job] 2024-10-24 11:48:02.088 LOG.INFO UiEvent.cs Line:51 Event() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。
    450. 

  450. [Save Log Job] 2024-10-24 11:48:03.678 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。
    451. 

  451. [Save Log Job] 2024-10-24 11:48:05.417 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。
    452. 

  452. [Save Log Job] 2024-10-24 11:48:06.298 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。
    453. 

  453. [Save Log Job] 2024-10-24 11:48:16.141 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。
    454. 

  454. [Save Log Job] 2024-10-24 11:48:16.686 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。
    455. 

  455. [Save Log Job] 2024-10-24 11:48:17.227 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPower，RF set Power:150。
    456. 

  456. [Save Log Job] 2024-10-24 11:48:17.229 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。
    457. 

  457. [Save Log Job] 2024-10-24 11:48:17.745 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。
    458. 

  458. [Save Log Job] 2024-10-24 11:48:19.018 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。
    459. 

  459. [Save Log Job] 2024-10-24 11:48:19.021 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas1， ramp to 45sccm。
    460. 

  460. [Save Log Job] 2024-10-24 11:48:19.530 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas2， ramp to 56sccm。
    461. 

  461. [Save Log Job] 2024-10-24 11:48:20.146 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas3， ramp to 66sccm。
    462. 

  462. [Save Log Job] 2024-10-24 11:48:33.520 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas4， ramp to 76sccm。
    463. 

  463. [Save Log Job] 2024-10-24 11:48:37.061 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas5， ramp to 86sccm。
    464. 

  464. [Save Log Job] 2024-10-24 11:48:41.460 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPowerOnOff，Set RF power On。
    465. 

  465. [Save Log Job] 2024-10-24 11:48:42.321 LOG.INFO UiEvent.cs Line:51 Event() - System recipe was aborted: user aborted recipe
    466. 

  466. [Save Log Job] 2024-10-24 11:48:42.321 LOG.INFO UiEvent.cs Line:51 Event() - Alarm event:The RF generator is offline.
    467. 

  467. [Save Log Job] 2024-10-24 11:48:42.840 LOG.INFO UiEvent.cs Line:51 Event() - Stop monitor pressure stability
    468. 

  468. [Save Log Job] 2024-10-24 11:48:43.258 LOG.INFO UiEvent.cs Line:51 Event() - System Recipe run completed，Recipe：20241024114654-123
    469. 

  469. Start time：2024/10/24 11:47:06
    470. 

  470. End time：2024/10/24 11:48:42
    471. 

  471. Total time：0:1:36
    472. 

  472. [Save Log Job] 2024-10-24 11:48:43.259 LOG.INFO UiEvent.cs Line:51 Event() - System Recipe completely run
    473. 

  473. [Save Log Job] 2024-10-24 11:48:43.307 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    474. 

  474. [Save Log Job] 2024-10-24 11:49:00.979 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC1 ValveClose失败，原因：Valve keep open。
    475. 

  475. [Save Log Job] 2024-10-24 11:49:13.645 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC2 ValveClose失败，原因：Valve keep open。
    476. 

  476. [Save Log Job] 2024-10-24 11:49:14.255 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC3 ValveClose失败，原因：Valve keep open。
    477. 

  477. [Save Log Job] 2024-10-24 11:49:19.171 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC5 ValveClose失败，原因：Valve keep open。
    478. 

  478. [Save Log Job] 2024-10-24 11:55:18.341 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    479. 

  479. [Save Log Job] 2024-10-24 11:55:43.309 LOG.INFO UiEvent.cs Line:51 Event() - Operation RunRecipe(123, )
    480. 

  480. [Save Log Job] 2024-10-24 11:55:43.309 LOG.INFO UiEvent.cs Line:51 Event() - EventLotStart
    481. 

  481. [Save Log Job] 2024-10-24 11:55:43.409 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check chamber door。
    482. 

  482. [Save Log Job] 2024-10-24 11:55:43.409 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check door status。
    483. 

  483. [Save Log Job] 2024-10-24 11:55:43.409 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check backpanel door。
    484. 

  484. [Save Log Job] 2024-10-24 11:55:43.409 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check pump status。
    485. 

  485. [Save Log Job] 2024-10-24 11:55:43.409 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Close all the valves。
    486. 

  486. [Save Log Job] 2024-10-24 11:55:43.410 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    487. 

  487. [Save Log Job] 2024-10-24 11:55:43.509 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check chamber pressure。
    488. 

  488. [Save Log Job] 2024-10-24 11:55:43.509 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Open pumping valve。
    489. 

  489. [Save Log Job] 2024-10-24 11:55:44.111 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Pump below 100mTorr。
    490. 

  490. [Save Log Job] 2024-10-24 11:55:44.111 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：PreProcess Finished in 0.0 minitues。
    491. 

  491. [Save Log Job] 2024-10-24 11:55:44.111 LOG.INFO UiEvent.cs Line:51 Event() - System complete run 'PreProcess'.
    492. 

  492. [Save Log Job] 2024-10-24 11:55:44.111 LOG.INFO UiEvent.cs Line:51 Event() - Run Recipe 20241024115543-123
    493. 

  493. [Save Log Job] 2024-10-24 11:55:44.111 LOG.INFO UiEvent.cs Line:51 Event() - System recipe start run'20241024115543-123'
    494. 

  494. [Save Log Job] 2024-10-24 11:55:44.212 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241024115543-123' start run step 1：initial。
    495. 

  495. [Save Log Job] 2024-10-24 11:55:44.212 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。
    496. 

  496. [Save Log Job] 2024-10-24 11:55:44.212 LOG.INFO UiEvent.cs Line:51 Event() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。
    497. 

  497. [Save Log Job] 2024-10-24 11:55:44.212 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。
    498. 

  498. [Save Log Job] 2024-10-24 11:55:44.212 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。
    499. 

  499. [Save Log Job] 2024-10-24 11:55:44.213 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。
    500. 

  500. [Save Log Job] 2024-10-24 11:55:44.213 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。
    501. 

  501. [Save Log Job] 2024-10-24 11:55:44.213 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。
    502. 

  502. [Save Log Job] 2024-10-24 11:55:44.213 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPower，RF set Power:0。
    503. 

  503. [Save Log Job] 2024-10-24 11:55:44.213 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。
    504. 

  504. [Save Log Job] 2024-10-24 11:55:44.213 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。
    505. 

  505. [Save Log Job] 2024-10-24 11:55:44.214 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。
    506. 

  506. [Save Log Job] 2024-10-24 11:55:44.214 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas1， ramp to 45sccm。
    507. 

  507. [Save Log Job] 2024-10-24 11:55:44.214 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas2， ramp to 56sccm。
    508. 

  508. [Save Log Job] 2024-10-24 11:55:44.214 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas3， ramp to 66sccm。
    509. 

  509. [Save Log Job] 2024-10-24 11:55:44.214 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas4， ramp to 76sccm。
    510. 

  510. [Save Log Job] 2024-10-24 11:55:44.214 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas5， ramp to 86sccm。
    511. 

  511. [Save Log Job] 2024-10-24 11:55:44.215 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPowerOnOff，Set RF power Off。
    512. 

  512. [Save Log Job] 2024-10-24 11:55:44.215 LOG.INFO UiEvent.cs Line:51 Event() - Start monitor pressure stability
    513. 

  513. [Save Log Job] 2024-10-24 11:56:14.294 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241024115543-123' end step 1
    514. 

  514. [Save Log Job] 2024-10-24 11:56:14.294 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241024115543-123' start run step 2：initial。
    515. 

  515. [Save Log Job] 2024-10-24 11:56:14.294 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。
    516. 

  516. [Save Log Job] 2024-10-24 11:56:14.294 LOG.INFO UiEvent.cs Line:51 Event() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。
    517. 

  517. [Save Log Job] 2024-10-24 11:56:14.294 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。
    518. 

  518. [Save Log Job] 2024-10-24 11:56:14.294 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。
    519. 

  519. [Save Log Job] 2024-10-24 11:56:14.294 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。
    520. 

  520. [Save Log Job] 2024-10-24 11:56:14.295 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。
    521. 

  521. [Save Log Job] 2024-10-24 11:56:14.295 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。
    522. 

  522. [Save Log Job] 2024-10-24 11:56:14.295 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPower，RF set Power:150。
    523. 

  523. [Save Log Job] 2024-10-24 11:56:14.295 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。
    524. 

  524. [Save Log Job] 2024-10-24 11:56:14.295 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。
    525. 

  525. [Save Log Job] 2024-10-24 11:56:14.295 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas1， ramp to 45sccm。
    526. 

  526. [Save Log Job] 2024-10-24 11:56:14.295 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas2， ramp to 56sccm。
    527. 

  527. [Save Log Job] 2024-10-24 11:56:14.295 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas3， ramp to 66sccm。
    528. 

  528. [Save Log Job] 2024-10-24 11:56:14.295 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas4， ramp to 76sccm。
    529. 

  529. [Save Log Job] 2024-10-24 11:56:14.295 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas5， ramp to 86sccm。
    530. 

  530. [Save Log Job] 2024-10-24 11:56:14.297 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。
    531. 

  531. [Save Log Job] 2024-10-24 11:56:14.297 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPowerOnOff，Set RF power On。
    532. 

  532. [Save Log Job] 2024-10-24 11:58:35.487 LOG.INFO UiEvent.cs Line:51 Event() - Stop monitor pressure stability
    533. 

  533. [Save Log Job] 2024-10-24 11:58:35.487 LOG.INFO UiEvent.cs Line:51 Event() - System RF GeneratorTolerance alarm：Forward power 54 out of range[130,170] in 10 seconds.
    534. 

  534. [Save Log Job] 2024-10-24 11:58:35.487 LOG.INFO UiEvent.cs Line:51 Event() - System recipe was aborted: user aborted recipe
    535. 

  535. [Save Log Job] 2024-10-24 11:58:35.487 LOG.INFO UiEvent.cs Line:51 Event() - System Recipe run completed，Recipe：20241024115543-123
    536. 

  536. Start time：2024/10/24 11:55:44
    537. 

  537. End time：2024/10/24 11:58:35
    538. 

  538. Total time：0:2:51
    539. 

  539. [Save Log Job] 2024-10-24 11:58:35.487 LOG.INFO UiEvent.cs Line:51 Event() - System Recipe completely run
    540. 

  540. [Save Log Job] 2024-10-24 12:10:19.340 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    541. 

  541. [Save Log Job] 2024-10-24 12:10:19.341 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    542. 

  542. [Save Log Job] 2024-10-24 12:10:19.341 LOG.INFO UiEvent.cs Line:51 Event() - System PLC heart beat check failed，please confirm PLC still running
    543. 

  543. [Save Log Job] 2024-10-24 12:10:19.341 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC1 ValveClose失败，原因：Valve keep open。
    544. 

  544. [Save Log Job] 2024-10-24 12:10:19.347 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC3 ValveClose失败，原因：Valve keep open。
    545. 

  545. [Save Log Job] 2024-10-24 12:10:19.347 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC2 ValveClose失败，原因：Valve keep open。
    546. 

  546. [Save Log Job] 2024-10-24 12:10:19.347 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC4 ValveClose失败，原因：Valve keep open。
    547. 

  547. [Save Log Job] 2024-10-24 12:10:19.347 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC5 ValveClose失败，原因：Valve keep open。
    548. 

  548. [Save Log Job] 2024-10-24 12:10:19.348 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门Process gas final valveClose失败，原因：Valve keep open。
    549. 

  549. [Save Log Job] 2024-10-24 12:10:38.864 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    550. 

  550. [Save Log Job] 2024-10-24 12:10:40.870 LOG.INFO UiEvent.cs Line:51 Event() - Operation RunRecipe(123, )
    551. 

  551. [Save Log Job] 2024-10-24 12:10:40.870 LOG.INFO UiEvent.cs Line:51 Event() - EventLotStart
    552. 

  552. [Save Log Job] 2024-10-24 12:10:40.870 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check door status。
    553. 

  553. [Save Log Job] 2024-10-24 12:10:40.870 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check chamber door。
    554. 

  554. [Save Log Job] 2024-10-24 12:10:40.870 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check backpanel door。
    555. 

  555. [Save Log Job] 2024-10-24 12:10:40.870 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check pump status。
    556. 

  556. [Save Log Job] 2024-10-24 12:10:40.871 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Close all the valves。
    557. 

  557. [Save Log Job] 2024-10-24 12:10:40.975 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Open pumping valve。
    558. 

  558. [Save Log Job] 2024-10-24 12:10:40.975 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check chamber pressure。
    559. 

  559. [Save Log Job] 2024-10-24 12:10:41.073 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    560. 

  560. [Save Log Job] 2024-10-24 12:10:43.085 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Pump below 100mTorr。
    561. 

  561. [Save Log Job] 2024-10-24 12:10:43.184 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：PreProcess Finished in 0.0 minitues。
    562. 

  562. [Save Log Job] 2024-10-24 12:10:43.184 LOG.INFO UiEvent.cs Line:51 Event() - System complete run 'PreProcess'.
    563. 

  563. [Save Log Job] 2024-10-24 12:10:43.184 LOG.INFO UiEvent.cs Line:51 Event() - Run Recipe 20241024121040-123
    564. 

  564. [Save Log Job] 2024-10-24 12:10:43.184 LOG.INFO UiEvent.cs Line:51 Event() - System recipe start run'20241024121040-123'
    565. 

  565. [Save Log Job] 2024-10-24 12:10:43.284 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。
    566. 

  566. [Save Log Job] 2024-10-24 12:10:43.284 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241024121040-123' start run step 1：initial。
    567. 

  567. [Save Log Job] 2024-10-24 12:10:43.284 LOG.INFO UiEvent.cs Line:51 Event() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。
    568. 

  568. [Save Log Job] 2024-10-24 12:10:43.286 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。
    569. 

  569. [Save Log Job] 2024-10-24 12:10:43.287 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。
    570. 

  570. [Save Log Job] 2024-10-24 12:10:43.287 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。
    571. 

  571. [Save Log Job] 2024-10-24 12:10:43.287 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。
    572. 

  572. [Save Log Job] 2024-10-24 12:10:43.287 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。
    573. 

  573. [Save Log Job] 2024-10-24 12:10:43.287 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPower，RF set Power:0。
    574. 

  574. [Save Log Job] 2024-10-24 12:10:43.287 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。
    575. 

  575. [Save Log Job] 2024-10-24 12:10:43.287 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas2， ramp to 56sccm。
    576. 

  576. [Save Log Job] 2024-10-24 12:10:43.287 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。
    577. 

  577. [Save Log Job] 2024-10-24 12:10:43.287 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas3， ramp to 66sccm。
    578. 

  578. [Save Log Job] 2024-10-24 12:10:43.287 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas5， ramp to 86sccm。
    579. 

  579. [Save Log Job] 2024-10-24 12:10:43.287 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。
    580. 

  580. [Save Log Job] 2024-10-24 12:10:43.287 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPowerOnOff，Set RF power Off。
    581. 

  581. [Save Log Job] 2024-10-24 12:10:43.287 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas4， ramp to 76sccm。
    582. 

  582. [Save Log Job] 2024-10-24 12:10:43.287 LOG.INFO UiEvent.cs Line:51 Event() - Start monitor pressure stability
    583. 

  583. [Save Log Job] 2024-10-24 12:10:43.287 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas1， ramp to 45sccm。
    584. 

  584. [Save Log Job] 2024-10-24 12:11:13.362 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241024121040-123' end step 1
    585. 

  585. [Save Log Job] 2024-10-24 12:11:13.362 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241024121040-123' start run step 2：initial。
    586. 

  586. [Save Log Job] 2024-10-24 12:11:13.363 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。
    587. 

  587. [Save Log Job] 2024-10-24 12:11:13.363 LOG.INFO UiEvent.cs Line:51 Event() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。
    588. 

  588. [Save Log Job] 2024-10-24 12:11:13.363 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。
    589. 

  589. [Save Log Job] 2024-10-24 12:11:13.363 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。
    590. 

  590. [Save Log Job] 2024-10-24 12:11:13.364 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。
    591. 

  591. [Save Log Job] 2024-10-24 12:11:13.364 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。
    592. 

  592. [Save Log Job] 2024-10-24 12:11:13.364 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。
    593. 

  593. [Save Log Job] 2024-10-24 12:11:13.364 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPower，RF set Power:150。
    594. 

  594. [Save Log Job] 2024-10-24 12:11:13.364 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。
    595. 

  595. [Save Log Job] 2024-10-24 12:11:13.364 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。
    596. 

  596. [Save Log Job] 2024-10-24 12:11:13.365 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。
    597. 

  597. [Save Log Job] 2024-10-24 12:11:13.365 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas1， ramp to 45sccm。
    598. 

  598. [Save Log Job] 2024-10-24 12:11:13.365 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas2， ramp to 56sccm。
    599. 

  599. [Save Log Job] 2024-10-24 12:11:13.365 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas3， ramp to 66sccm。
    600. 

  600. [Save Log Job] 2024-10-24 12:11:13.365 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas4， ramp to 76sccm。
    601. 

  601. [Save Log Job] 2024-10-24 12:11:13.365 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas5， ramp to 86sccm。
    602. 

  602. [Save Log Job] 2024-10-24 12:11:13.366 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPowerOnOff，Set RF power On。
    603. 

  603. [Save Log Job] 2024-10-24 12:12:20.554 LOG.INFO UiEvent.cs Line:51 Event() - System RF GeneratorTolerance alarm：Forward power 54 out of range[130,170] in 10 seconds.
    604. 

  604. --------------------------------[Header Log]----------------------------------------- [Save Log Job] 2024-10-24 13:35:23.364 LOG.INFO UiEvent.cs Line:58 Event() - 已经连接上设备实时控制系统
    605. 

  605. [Save Log Job] 2024-10-24 13:35:23.366 LOG.INFO UiEvent.cs Line:57 Event() - 已经连接上设备实时控制系统
    606. 

  606. [Save Log Job] 2024-10-24 13:35:24.699 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    607. 

  607. [Save Log Job] 2024-10-24 13:35:28.352 LOG.INFO UiEvent.cs Line:51 Event() - Software will be expired in 0 days, at 10/24/2024 12:00:00 AM 。
    608. 

  608. [Save Log Job] 2024-10-24 13:35:44.215 LOG.INFO UiEvent.cs Line:51 Event() - User admin login
    609. 

  609. [Save Log Job] 2024-10-24 13:36:20.629 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetAutoMode()
    610. 

  610. [Save Log Job] 2024-10-24 13:36:20.629 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentModeChanged
    611. 

  611. [Save Log Job] 2024-10-24 13:36:20.629 LOG.INFO UiEvent.cs Line:51 Event() - System running mode changed to Auto Mode
    612. 

  612. [Save Log Job] 2024-10-24 13:36:50.024 LOG.INFO UiEvent.cs Line:51 Event() - Operation RunRecipe(123, )
    613. 

  613. [Save Log Job] 2024-10-24 13:36:50.124 LOG.INFO UiEvent.cs Line:51 Event() - EventLotStart
    614. 

  614. [Save Log Job] 2024-10-24 13:36:50.124 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check door status。
    615. 

  615. [Save Log Job] 2024-10-24 13:36:50.124 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check chamber door。
    616. 

  616. [Save Log Job] 2024-10-24 13:36:50.125 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check backpanel door。
    617. 

  617. [Save Log Job] 2024-10-24 13:36:50.125 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check pump status。
    618. 

  618. [Save Log Job] 2024-10-24 13:36:50.126 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Close all the valves。
    619. 

  619. [Save Log Job] 2024-10-24 13:36:50.225 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Open pumping valve。
    620. 

  620. [Save Log Job] 2024-10-24 13:36:50.325 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    621. 

  621. [Save Log Job] 2024-10-24 13:36:52.232 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门Chamber pumping valveOpen失败，原因：Valve keep closed 。
    622. 

  622. [Save Log Job] 2024-10-24 13:36:54.340 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check chamber pressure。
    623. 

  623. [Save Log Job] 2024-10-24 13:37:33.128 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Pump below 100mTorr。
    624. 

  624. [Save Log Job] 2024-10-24 13:37:33.128 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：PreProcess Finished in 0.7 minitues。
    625. 

  625. [Save Log Job] 2024-10-24 13:37:33.128 LOG.INFO UiEvent.cs Line:51 Event() - System complete run 'PreProcess'.
    626. 

  626. [Save Log Job] 2024-10-24 13:37:33.129 LOG.INFO UiEvent.cs Line:51 Event() - Run Recipe 20241024133650-123
    627. 

  627. [Save Log Job] 2024-10-24 13:37:33.129 LOG.INFO UiEvent.cs Line:51 Event() - System recipe start run'20241024133650-123'
    628. 

  628. [Save Log Job] 2024-10-24 13:37:33.228 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241024133650-123' start run step 1：initial。
    629. 

  629. [Save Log Job] 2024-10-24 13:37:33.229 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。
    630. 

  630. [Save Log Job] 2024-10-24 13:37:33.229 LOG.INFO UiEvent.cs Line:51 Event() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。
    631. 

  631. [Save Log Job] 2024-10-24 13:37:33.229 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。
    632. 

  632. [Save Log Job] 2024-10-24 13:37:33.230 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。
    633. 

  633. [Save Log Job] 2024-10-24 13:37:33.230 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。
    634. 

  634. [Save Log Job] 2024-10-24 13:37:33.230 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。
    635. 

  635. [Save Log Job] 2024-10-24 13:37:33.231 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。
    636. 

  636. [Save Log Job] 2024-10-24 13:37:33.231 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPower，RF set Power:0。
    637. 

  637. [Save Log Job] 2024-10-24 13:37:33.232 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。
    638. 

  638. [Save Log Job] 2024-10-24 13:37:33.232 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。
    639. 

  639. [Save Log Job] 2024-10-24 13:37:33.232 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。
    640. 

  640. [Save Log Job] 2024-10-24 13:37:33.233 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas1， ramp to 45sccm。
    641. 

  641. [Save Log Job] 2024-10-24 13:37:33.233 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas2， ramp to 56sccm。
    642. 

  642. [Save Log Job] 2024-10-24 13:37:33.233 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas3， ramp to 66sccm。
    643. 

  643. [Save Log Job] 2024-10-24 13:37:33.233 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas4， ramp to 76sccm。
    644. 

  644. [Save Log Job] 2024-10-24 13:37:33.234 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas5， ramp to 86sccm。
    645. 

  645. [Save Log Job] 2024-10-24 13:37:33.234 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPowerOnOff，Set RF power Off。
    646. 

  646. [Save Log Job] 2024-10-24 13:37:33.234 LOG.INFO UiEvent.cs Line:51 Event() - Start monitor pressure stability
    647. 

  647. [Save Log Job] 2024-10-24 13:38:03.324 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241024133650-123' end step 1
    648. 

  648. [Save Log Job] 2024-10-24 13:38:03.324 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241024133650-123' start run step 2：initial。
    649. 

  649. [Save Log Job] 2024-10-24 13:38:03.325 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。
    650. 

  650. [Save Log Job] 2024-10-24 13:38:03.325 LOG.INFO UiEvent.cs Line:51 Event() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。
    651. 

  651. [Save Log Job] 2024-10-24 13:38:03.325 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。
    652. 

  652. [Save Log Job] 2024-10-24 13:38:03.327 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。
    653. 

  653. [Save Log Job] 2024-10-24 13:38:03.328 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。
    654. 

  654. [Save Log Job] 2024-10-24 13:38:03.328 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。
    655. 

  655. [Save Log Job] 2024-10-24 13:38:03.328 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。
    656. 

  656. [Save Log Job] 2024-10-24 13:38:03.328 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPower，RF set Power:150。
    657. 

  657. [Save Log Job] 2024-10-24 13:38:03.328 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。
    658. 

  658. [Save Log Job] 2024-10-24 13:38:03.330 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。
    659. 

  659. [Save Log Job] 2024-10-24 13:38:03.330 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。
    660. 

  660. [Save Log Job] 2024-10-24 13:38:03.330 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas1， ramp to 45sccm。
    661. 

  661. [Save Log Job] 2024-10-24 13:38:03.336 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas4， ramp to 76sccm。
    662. 

  662. [Save Log Job] 2024-10-24 13:38:03.336 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas2， ramp to 56sccm。
    663. 

  663. [Save Log Job] 2024-10-24 13:38:03.336 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas5， ramp to 86sccm。
    664. 

  664. [Save Log Job] 2024-10-24 13:38:03.337 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPowerOnOff，Set RF power On。
    665. 

  665. [Save Log Job] 2024-10-24 13:38:03.337 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas3， ramp to 66sccm。
    666. 

  666. [Save Log Job] 2024-10-24 13:38:21.325 LOG.INFO UiEvent.cs Line:51 Event() - System RF GeneratorTolerance alarm：Forward power 54 out of range[130,170] in 10 seconds.
    667. 

  667. [Save Log Job] 2024-10-24 13:39:31.209 LOG.INFO UiEvent.cs Line:51 Event() - System recipe was aborted: user aborted recipe
    668. 

  668. [Save Log Job] 2024-10-24 13:39:31.213 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC1 ValveClose失败，原因：Valve keep open。
    669. 

  669. [Save Log Job] 2024-10-24 13:39:32.007 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC2 ValveClose失败，原因：Valve keep open。
    670. 

  670. [Save Log Job] 2024-10-24 13:39:43.429 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC3 ValveClose失败，原因：Valve keep open。
    671. 

  671. [Save Log Job] 2024-10-24 13:39:48.142 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC4 ValveClose失败，原因：Valve keep open。
    672. 

  672. [Save Log Job] 2024-10-24 13:39:50.995 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC5 ValveClose失败，原因：Valve keep open。
    673. 

  673. [Save Log Job] 2024-10-24 13:39:50.998 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门Process gas final valveClose失败，原因：Valve keep open。
    674. 

  674. [Save Log Job] 2024-10-24 13:39:51.550 LOG.INFO UiEvent.cs Line:51 Event() - Stop monitor pressure stability
    675. 

  675. [Save Log Job] 2024-10-24 13:39:51.550 LOG.INFO UiEvent.cs Line:51 Event() - System Recipe run completed，Recipe：20241024133650-123
    676. 

  676. Start time：2024/10/24 13:37:33
    677. 

  677. End time：2024/10/24 13:39:28
    678. 

  678. Total time：0:1:51
    679. 

  679. [Save Log Job] 2024-10-24 13:39:51.550 LOG.INFO UiEvent.cs Line:51 Event() - System Recipe completely run
    680. 

  680. [Save Log Job] 2024-10-24 13:39:51.551 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    681. 

  681. [Save Log Job] 2024-10-24 13:39:51.551 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC2 ValveClose失败，原因：Valve keep open。
    682. 

  682. [Save Log Job] 2024-10-24 13:39:56.201 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC3 ValveClose失败，原因：Valve keep open。
    683. 

  683. --------------------------------[Header Log]----------------------------------------- [Save Log Job] 2024-10-24 13:44:49.204 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    684. 

  684. [Save Log Job] 2024-10-24 13:44:52.752 LOG.INFO UiEvent.cs Line:51 Event() - Software will be expired in 0 days, at 10/24/2024 12:00:00 AM 。
    685. 

  685. [Save Log Job] 2024-10-24 13:45:01.477 LOG.INFO UiEvent.cs Line:51 Event() - User admin login
    686. 

  686. [Save Log Job] 2024-10-24 13:45:04.688 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetAutoMode()
    687. 

  687. [Save Log Job] 2024-10-24 13:45:04.688 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentModeChanged
    688. 

  688. [Save Log Job] 2024-10-24 13:45:04.688 LOG.INFO UiEvent.cs Line:51 Event() - System running mode changed to Auto Mode
    689. 

  689. [Save Log Job] 2024-10-24 13:45:32.779 LOG.INFO UiEvent.cs Line:51 Event() - Operation RunRecipe(123, )
    690. 

  690. [Save Log Job] 2024-10-24 13:45:32.779 LOG.INFO UiEvent.cs Line:51 Event() - EventLotStart
    691. 

  691. [Save Log Job] 2024-10-24 13:45:32.880 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check door status。
    692. 

  692. [Save Log Job] 2024-10-24 13:45:32.880 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check chamber door。
    693. 

  693. [Save Log Job] 2024-10-24 13:45:32.880 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check backpanel door。
    694. 

  694. [Save Log Job] 2024-10-24 13:45:32.881 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check pump status。
    695. 

  695. [Save Log Job] 2024-10-24 13:45:32.881 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Close all the valves。
    696. 

  696. [Save Log Job] 2024-10-24 13:45:32.882 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    697. 

  697. [Save Log Job] 2024-10-24 13:45:32.882 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Open pumping valve。
    698. 

  698. [Save Log Job] 2024-10-24 13:45:34.987 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门Chamber pumping valveOpen失败，原因：Valve keep closed 。
    699. 

  699. [Save Log Job] 2024-10-24 13:45:36.592 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check chamber pressure。
    700. 

  700. [Save Log Job] 2024-10-24 13:46:11.432 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Pump below 100mTorr。
    701. 

  701. [Save Log Job] 2024-10-24 13:46:11.432 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：PreProcess Finished in 0.6 minitues。
    702. 

  702. [Save Log Job] 2024-10-24 13:46:11.432 LOG.INFO UiEvent.cs Line:51 Event() - System complete run 'PreProcess'.
    703. 

  703. [Save Log Job] 2024-10-24 13:46:11.433 LOG.INFO UiEvent.cs Line:51 Event() - Run Recipe 20241024134532-123
    704. 

  704. [Save Log Job] 2024-10-24 13:46:11.433 LOG.INFO UiEvent.cs Line:51 Event() - System recipe start run'20241024134532-123'
    705. 

  705. [Save Log Job] 2024-10-24 13:46:11.533 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241024134532-123' start run step 1：initial。
    706. 

  706. [Save Log Job] 2024-10-24 13:46:11.533 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。
    707. 

  707. [Save Log Job] 2024-10-24 13:46:11.533 LOG.INFO UiEvent.cs Line:51 Event() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。
    708. 

  708. [Save Log Job] 2024-10-24 13:46:11.534 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。
    709. 

  709. [Save Log Job] 2024-10-24 13:46:11.535 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。
    710. 

  710. [Save Log Job] 2024-10-24 13:46:11.535 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。
    711. 

  711. [Save Log Job] 2024-10-24 13:46:11.535 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。
    712. 

  712. [Save Log Job] 2024-10-24 13:46:11.535 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。
    713. 

  713. [Save Log Job] 2024-10-24 13:46:11.536 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPower，RF set Power:0。
    714. 

  714. [Save Log Job] 2024-10-24 13:46:11.536 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。
    715. 

  715. [Save Log Job] 2024-10-24 13:46:11.536 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。
    716. 

  716. [Save Log Job] 2024-10-24 13:46:11.537 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。
    717. 

  717. [Save Log Job] 2024-10-24 13:46:11.537 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas1， ramp to 45sccm。
    718. 

  718. [Save Log Job] 2024-10-24 13:46:11.537 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas2， ramp to 56sccm。
    719. 

  719. [Save Log Job] 2024-10-24 13:46:11.538 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas3， ramp to 66sccm。
    720. 

  720. [Save Log Job] 2024-10-24 13:46:11.539 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas4， ramp to 76sccm。
    721. 

  721. [Save Log Job] 2024-10-24 13:46:11.539 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas5， ramp to 86sccm。
    722. 

  722. [Save Log Job] 2024-10-24 13:46:11.540 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPowerOnOff，Set RF power Off。
    723. 

  723. [Save Log Job] 2024-10-24 13:46:11.540 LOG.INFO UiEvent.cs Line:51 Event() - Start monitor pressure stability
    724. 

  724. [Save Log Job] 2024-10-24 13:46:41.627 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241024134532-123' end step 1
    725. 

  725. [Save Log Job] 2024-10-24 13:46:41.627 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241024134532-123' start run step 2：initial。
    726. 

  726. [Save Log Job] 2024-10-24 13:46:41.627 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。
    727. 

  727. [Save Log Job] 2024-10-24 13:46:41.628 LOG.INFO UiEvent.cs Line:51 Event() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。
    728. 

  728. [Save Log Job] 2024-10-24 13:46:41.628 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。
    729. 

  729. [Save Log Job] 2024-10-24 13:46:41.628 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。
    730. 

  730. [Save Log Job] 2024-10-24 13:46:41.629 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。
    731. 

  731. [Save Log Job] 2024-10-24 13:46:41.629 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。
    732. 

  732. [Save Log Job] 2024-10-24 13:46:41.629 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。
    733. 

  733. [Save Log Job] 2024-10-24 13:46:41.630 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPower，RF set Power:150。
    734. 

  734. [Save Log Job] 2024-10-24 13:46:41.630 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。
    735. 

  735. [Save Log Job] 2024-10-24 13:46:41.630 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。
    736. 

  736. [Save Log Job] 2024-10-24 13:46:41.631 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。
    737. 

  737. [Save Log Job] 2024-10-24 13:46:41.631 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas1， ramp to 45sccm。
    738. 

  738. [Save Log Job] 2024-10-24 13:46:41.631 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas2， ramp to 56sccm。
    739. 

  739. [Save Log Job] 2024-10-24 13:46:41.632 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas3， ramp to 66sccm。
    740. 

  740. [Save Log Job] 2024-10-24 13:46:41.632 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas4， ramp to 76sccm。
    741. 

  741. [Save Log Job] 2024-10-24 13:46:41.632 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas5， ramp to 86sccm。
    742. 

  742. [Save Log Job] 2024-10-24 13:46:41.632 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPowerOnOff，Set RF power On。
    743. 

  743. [Save Log Job] 2024-10-24 13:46:56.548 LOG.INFO UiEvent.cs Line:51 Event() - System RF GeneratorTolerance alarm：Forward power 54 out of range[130,170] in 10 seconds.
    744. 

  744. [Save Log Job] 2024-10-24 13:46:56.572 LOG.INFO UiEvent.cs Line:51 Event() - System recipe was aborted: user aborted recipe
    745. 

  745. [Save Log Job] 2024-10-24 13:47:14.184 LOG.INFO UiEvent.cs Line:51 Event() - Stop monitor pressure stability
    746. 

  746. [Save Log Job] 2024-10-24 13:47:14.215 LOG.INFO UiEvent.cs Line:51 Event() - System Recipe completely run
    747. 

  747. [Save Log Job] 2024-10-24 13:47:14.215 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC1 ValveClose失败，原因：Valve keep open。
    748. 

  748. [Save Log Job] 2024-10-24 13:47:14.215 LOG.INFO UiEvent.cs Line:51 Event() - System Recipe run completed，Recipe：20241024134532-123
    749. 

  749. Start time：2024/10/24 13:46:11
    750. 

  750. End time：2024/10/24 13:46:56
    751. 

  751. Total time：0:0:45
    752. 

  752. [Save Log Job] 2024-10-24 13:47:14.427 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    753. 

  753. [Save Log Job] 2024-10-24 13:47:16.234 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC1 ValveClose失败，原因：Valve keep open。
    754. 

  754. [Save Log Job] 2024-10-24 13:47:16.236 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC2 ValveClose失败，原因：Valve keep open。
    755. 

  755. [Save Log Job] 2024-10-24 13:47:16.238 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC4 ValveClose失败，原因：Valve keep open。
    756. 

  756. [Save Log Job] 2024-10-24 13:47:16.238 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC5 ValveClose失败，原因：Valve keep open。
    757. 

  757. [Save Log Job] 2024-10-24 13:47:16.238 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC3 ValveClose失败，原因：Valve keep open。
    758. 

  758. --------------------------------[Footer Log]----------------------------------------- --------------------------------[Header Log]----------------------------------------- [Save Log Job] 2024-10-24 13:49:31.214 LOG.INFO UiEvent.cs Line:57 Event() - 已经连接上设备实时控制系统
    759. 

  759. [Save Log Job] 2024-10-24 13:49:31.216 LOG.INFO UiEvent.cs Line:58 Event() - 已经连接上设备实时控制系统
    760. 

  760. [Save Log Job] 2024-10-24 13:49:32.552 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    761. 

  761. [Save Log Job] 2024-10-24 13:49:36.111 LOG.INFO UiEvent.cs Line:51 Event() - Software will be expired in 0 days, at 10/24/2024 12:00:00 AM 。
    762. 

  762. [Save Log Job] 2024-10-24 13:49:40.831 LOG.INFO UiEvent.cs Line:51 Event() - User admin login
    763. 

  763. [Save Log Job] 2024-10-24 13:49:51.157 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetAutoMode()
    764. 

  764. [Save Log Job] 2024-10-24 13:49:51.157 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentModeChanged
    765. 

  765. [Save Log Job] 2024-10-24 13:49:51.157 LOG.INFO UiEvent.cs Line:51 Event() - System running mode changed to Auto Mode
    766. 

  766. [Save Log Job] 2024-10-24 13:50:01.590 LOG.INFO UiEvent.cs Line:51 Event() - Operation RunRecipe(123, )
    767. 

  767. [Save Log Job] 2024-10-24 13:50:01.590 LOG.INFO UiEvent.cs Line:51 Event() - EventLotStart
    768. 

  768. [Save Log Job] 2024-10-24 13:50:01.691 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check door status。
    769. 

  769. [Save Log Job] 2024-10-24 13:50:01.691 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check chamber door。
    770. 

  770. [Save Log Job] 2024-10-24 13:50:01.691 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check backpanel door。
    771. 

  771. [Save Log Job] 2024-10-24 13:50:01.692 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check pump status。
    772. 

  772. [Save Log Job] 2024-10-24 13:50:01.692 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Close all the valves。
    773. 

  773. [Save Log Job] 2024-10-24 13:50:01.692 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Open pumping valve。
    774. 

  774. [Save Log Job] 2024-10-24 13:50:01.791 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    775. 

  775. [Save Log Job] 2024-10-24 13:50:03.805 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门Chamber pumping valveOpen失败，原因：Valve keep closed 。
    776. 

  776. [Save Log Job] 2024-10-24 13:50:04.407 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check chamber pressure。
    777. 

  777. [Save Log Job] 2024-10-24 13:50:47.116 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Pump below 100mTorr。
    778. 

  778. [Save Log Job] 2024-10-24 13:50:47.116 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：PreProcess Finished in 0.8 minitues。
    779. 

  779. [Save Log Job] 2024-10-24 13:50:47.117 LOG.INFO UiEvent.cs Line:51 Event() - System complete run 'PreProcess'.
    780. 

  780. [Save Log Job] 2024-10-24 13:50:47.117 LOG.INFO UiEvent.cs Line:51 Event() - Run Recipe 20241024135001-123
    781. 

  781. [Save Log Job] 2024-10-24 13:50:47.117 LOG.INFO UiEvent.cs Line:51 Event() - System recipe start run'20241024135001-123'
    782. 

  782. [Save Log Job] 2024-10-24 13:50:47.216 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241024135001-123' start run step 1：initial。
    783. 

  783. [Save Log Job] 2024-10-24 13:50:47.216 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。
    784. 

  784. [Save Log Job] 2024-10-24 13:50:47.217 LOG.INFO UiEvent.cs Line:51 Event() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。
    785. 

  785. [Save Log Job] 2024-10-24 13:50:47.217 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。
    786. 

  786. [Save Log Job] 2024-10-24 13:50:47.217 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。
    787. 

  787. [Save Log Job] 2024-10-24 13:50:47.218 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。
    788. 

  788. [Save Log Job] 2024-10-24 13:50:47.218 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。
    789. 

  789. [Save Log Job] 2024-10-24 13:50:47.218 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。
    790. 

  790. [Save Log Job] 2024-10-24 13:50:47.219 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPower，RF set Power:0。
    791. 

  791. [Save Log Job] 2024-10-24 13:50:47.219 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。
    792. 

  792. [Save Log Job] 2024-10-24 13:50:47.219 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。
    793. 

  793. [Save Log Job] 2024-10-24 13:50:47.220 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。
    794. 

  794. [Save Log Job] 2024-10-24 13:50:47.220 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas1， ramp to 45sccm。
    795. 

  795. [Save Log Job] 2024-10-24 13:50:47.220 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas2， ramp to 56sccm。
    796. 

  796. [Save Log Job] 2024-10-24 13:50:47.221 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas3， ramp to 66sccm。
    797. 

  797. [Save Log Job] 2024-10-24 13:50:47.221 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas4， ramp to 76sccm。
    798. 

  798. [Save Log Job] 2024-10-24 13:50:47.221 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas5， ramp to 86sccm。
    799. 

  799. [Save Log Job] 2024-10-24 13:50:47.222 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPowerOnOff，Set RF power Off。
    800. 

  800. [Save Log Job] 2024-10-24 13:50:47.222 LOG.INFO UiEvent.cs Line:51 Event() - Start monitor pressure stability
    801. 

  801. [Save Log Job] 2024-10-24 13:51:17.210 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241024135001-123' end step 1
    802. 

  802. [Save Log Job] 2024-10-24 13:51:17.311 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241024135001-123' start run step 2：initial。
    803. 

  803. [Save Log Job] 2024-10-24 13:51:17.311 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。
    804. 

  804. [Save Log Job] 2024-10-24 13:51:17.312 LOG.INFO UiEvent.cs Line:51 Event() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。
    805. 

  805. [Save Log Job] 2024-10-24 13:51:17.312 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。
    806. 

  806. [Save Log Job] 2024-10-24 13:51:17.312 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。
    807. 

  807. [Save Log Job] 2024-10-24 13:51:17.313 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。
    808. 

  808. [Save Log Job] 2024-10-24 13:51:17.313 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。
    809. 

  809. [Save Log Job] 2024-10-24 13:51:17.313 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。
    810. 

  810. [Save Log Job] 2024-10-24 13:51:17.314 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPower，RF set Power:150。
    811. 

  811. [Save Log Job] 2024-10-24 13:51:17.314 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。
    812. 

  812. [Save Log Job] 2024-10-24 13:51:17.315 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。
    813. 

  813. [Save Log Job] 2024-10-24 13:51:17.315 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。
    814. 

  814. [Save Log Job] 2024-10-24 13:51:17.316 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas1， ramp to 45sccm。
    815. 

  815. [Save Log Job] 2024-10-24 13:51:17.317 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas2， ramp to 56sccm。
    816. 

  816. [Save Log Job] 2024-10-24 13:51:17.317 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas3， ramp to 66sccm。
    817. 

  817. [Save Log Job] 2024-10-24 13:51:17.318 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas4， ramp to 76sccm。
    818. 

  818. [Save Log Job] 2024-10-24 13:51:17.318 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas5， ramp to 86sccm。
    819. 

  819. [Save Log Job] 2024-10-24 13:51:17.318 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPowerOnOff，Set RF power On。
    820. 

  820. [Save Log Job] 2024-10-24 13:51:37.443 LOG.INFO UiEvent.cs Line:51 Event() - System RF GeneratorTolerance alarm：Forward power 54 out of range[130,170] in 10 seconds.
    821. 

  821. [Save Log Job] 2024-10-24 13:51:37.447 LOG.INFO UiEvent.cs Line:51 Event() - System recipe was aborted: user aborted recipe
    822. 

  822. [Save Log Job] 2024-10-24 13:51:38.890 LOG.INFO UiEvent.cs Line:51 Event() - Stop monitor pressure stability
    823. 

  823. [Save Log Job] 2024-10-24 13:51:50.647 LOG.INFO UiEvent.cs Line:51 Event() - System Recipe run completed，Recipe：20241024135001-123
    824. 

  824. Start time：2024/10/24 13:50:47
    825. 

  825. End time：2024/10/24 13:51:37
    826. 

  826. Total time：0:0:50
    827. 

  827. [Save Log Job] 2024-10-24 13:51:59.881 LOG.INFO UiEvent.cs Line:51 Event() - System Recipe completely run
    828. 

  828. [Save Log Job] 2024-10-24 13:51:59.883 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC1 ValveClose失败，原因：Valve keep open。
    829. 

  829. [Save Log Job] 2024-10-24 13:51:59.883 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC2 ValveClose失败，原因：Valve keep open。
    830. 

  830. [Save Log Job] 2024-10-24 13:51:59.883 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC3 ValveClose失败，原因：Valve keep open。
    831. 

  831. [Save Log Job] 2024-10-24 13:51:59.883 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    832. 

  832. [Save Log Job] 2024-10-24 13:51:59.888 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC4 ValveClose失败，原因：Valve keep open。
    833. 

  833. [Save Log Job] 2024-10-24 13:52:02.926 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门Process gas final valveClose失败，原因：Valve keep open。
    834. 

  834. --------------------------------[Header Log]----------------------------------------- [Save Log Job] 2024-10-24 14:34:01.962 LOG.INFO UiEvent.cs Line:58 Event() - 已经连接上设备实时控制系统
    835. 

  835. [Save Log Job] 2024-10-24 14:34:01.964 LOG.INFO UiEvent.cs Line:57 Event() - 已经连接上设备实时控制系统
    836. 

  836. [Save Log Job] 2024-10-24 14:34:03.222 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    837. 

  837. [Save Log Job] 2024-10-24 14:34:06.873 LOG.INFO UiEvent.cs Line:51 Event() - Software will be expired in 0 days, at 10/24/2024 12:00:00 AM 。
    838. 

  838. [Save Log Job] 2024-10-24 14:34:10.115 LOG.INFO UiEvent.cs Line:51 Event() - User admin login
    839. 

  839. [Save Log Job] 2024-10-24 14:34:13.997 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetAutoMode()
    840. 

  840. [Save Log Job] 2024-10-24 14:34:13.998 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentModeChanged
    841. 

  841. [Save Log Job] 2024-10-24 14:34:13.998 LOG.INFO UiEvent.cs Line:51 Event() - System running mode changed to Auto Mode
    842. 

  842. [Save Log Job] 2024-10-24 14:34:19.519 LOG.INFO UiEvent.cs Line:51 Event() - Operation RunRecipe(123, )
    843. 

  843. [Save Log Job] 2024-10-24 14:34:19.619 LOG.INFO UiEvent.cs Line:51 Event() - EventLotStart
    844. 

  844. [Save Log Job] 2024-10-24 14:34:19.619 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check door status。
    845. 

  845. [Save Log Job] 2024-10-24 14:34:19.619 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check chamber door。
    846. 

  846. [Save Log Job] 2024-10-24 14:34:19.620 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check backpanel door。
    847. 

  847. [Save Log Job] 2024-10-24 14:34:19.620 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check pump status。
    848. 

  848. [Save Log Job] 2024-10-24 14:34:19.621 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Close all the valves。
    849. 

  849. [Save Log Job] 2024-10-24 14:34:19.621 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    850. 

  850. [Save Log Job] 2024-10-24 14:34:19.720 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Open pumping valve。
    851. 

  851. [Save Log Job] 2024-10-24 14:34:21.732 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门Chamber pumping valveOpen失败，原因：Valve keep closed 。
    852. 

  852. [Save Log Job] 2024-10-24 14:34:23.639 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check chamber pressure。
    853. 

  853. [Save Log Job] 2024-10-24 14:35:14.097 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Pump below 100mTorr。
    854. 

  854. [Save Log Job] 2024-10-24 14:35:14.097 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：PreProcess Finished in 0.9 minitues。
    855. 

  855. [Save Log Job] 2024-10-24 14:35:14.097 LOG.INFO UiEvent.cs Line:51 Event() - System complete run 'PreProcess'.
    856. 

  856. [Save Log Job] 2024-10-24 14:35:14.097 LOG.INFO UiEvent.cs Line:51 Event() - Run Recipe 20241024143419-123
    857. 

  857. [Save Log Job] 2024-10-24 14:35:14.098 LOG.INFO UiEvent.cs Line:51 Event() - System recipe start run'20241024143419-123'
    858. 

  858. [Save Log Job] 2024-10-24 14:35:14.197 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241024143419-123' start run step 1：initial。
    859. 

  859. [Save Log Job] 2024-10-24 14:35:14.197 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。
    860. 

  860. [Save Log Job] 2024-10-24 14:35:14.198 LOG.INFO UiEvent.cs Line:51 Event() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。
    861. 

  861. [Save Log Job] 2024-10-24 14:35:14.198 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。
    862. 

  862. [Save Log Job] 2024-10-24 14:35:14.198 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。
    863. 

  863. [Save Log Job] 2024-10-24 14:35:14.199 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。
    864. 

  864. [Save Log Job] 2024-10-24 14:35:14.199 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。
    865. 

  865. [Save Log Job] 2024-10-24 14:35:14.199 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。
    866. 

  866. [Save Log Job] 2024-10-24 14:35:14.200 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPower，RF set Power:0。
    867. 

  867. [Save Log Job] 2024-10-24 14:35:14.200 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。
    868. 

  868. [Save Log Job] 2024-10-24 14:35:14.200 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。
    869. 

  869. [Save Log Job] 2024-10-24 14:35:14.201 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。
    870. 

  870. [Save Log Job] 2024-10-24 14:35:14.201 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas1， ramp to 45sccm。
    871. 

  871. [Save Log Job] 2024-10-24 14:35:14.201 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas2， ramp to 56sccm。
    872. 

  872. [Save Log Job] 2024-10-24 14:35:14.202 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas3， ramp to 66sccm。
    873. 

  873. [Save Log Job] 2024-10-24 14:35:14.203 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas4， ramp to 76sccm。
    874. 

  874. [Save Log Job] 2024-10-24 14:35:14.203 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas5， ramp to 86sccm。
    875. 

  875. [Save Log Job] 2024-10-24 14:35:14.204 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPowerOnOff，Set RF power Off。
    876. 

  876. [Save Log Job] 2024-10-24 14:35:14.204 LOG.INFO UiEvent.cs Line:51 Event() - Start monitor pressure stability
    877. 

  877. [Save Log Job] 2024-10-24 14:35:44.201 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241024143419-123' end step 1
    878. 

  878. [Save Log Job] 2024-10-24 14:35:44.301 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241024143419-123' start run step 2：initial。
    879. 

  879. [Save Log Job] 2024-10-24 14:35:44.302 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。
    880. 

  880. [Save Log Job] 2024-10-24 14:35:44.304 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。
    881. 

  881. [Save Log Job] 2024-10-24 14:35:44.304 LOG.INFO UiEvent.cs Line:51 Event() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。
    882. 

  882. [Save Log Job] 2024-10-24 14:35:44.304 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。
    883. 

  883. [Save Log Job] 2024-10-24 14:35:44.304 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。
    884. 

  884. [Save Log Job] 2024-10-24 14:35:44.304 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。
    885. 

  885. [Save Log Job] 2024-10-24 14:35:44.309 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPower，RF set Power:150。
    886. 

  886. [Save Log Job] 2024-10-24 14:35:44.309 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。
    887. 

  887. [Save Log Job] 2024-10-24 14:35:44.309 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。
    888. 

  888. [Save Log Job] 2024-10-24 14:35:44.309 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。
    889. 

  889. [Save Log Job] 2024-10-24 14:35:44.309 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas1， ramp to 45sccm。
    890. 

  890. [Save Log Job] 2024-10-24 14:35:44.309 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。
    891. 

  891. [Save Log Job] 2024-10-24 14:35:44.309 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas2， ramp to 56sccm。
    892. 

  892. [Save Log Job] 2024-10-24 14:35:44.309 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas3， ramp to 66sccm。
    893. 

  893. [Save Log Job] 2024-10-24 14:35:44.309 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas4， ramp to 76sccm。
    894. 

  894. [Save Log Job] 2024-10-24 14:35:44.309 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas5， ramp to 86sccm。
    895. 

  895. [Save Log Job] 2024-10-24 14:35:44.309 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPowerOnOff，Set RF power On。
    896. 

  896. [Save Log Job] 2024-10-24 14:36:04.338 LOG.INFO UiEvent.cs Line:51 Event() - System RF GeneratorTolerance alarm：Forward power 54 out of range[130,170] in 10 seconds.
    897. 

  897. --------------------------------[Header Log]----------------------------------------- [Save Log Job] 2024-10-24 15:20:07.593 LOG.INFO UiEvent.cs Line:58 Event() - 已经连接上设备实时控制系统
    898. 

  898. [Save Log Job] 2024-10-24 15:20:07.595 LOG.INFO UiEvent.cs Line:57 Event() - 已经连接上设备实时控制系统
    899. 

  899. [Save Log Job] 2024-10-24 15:20:09.260 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    900. 

  900. [Save Log Job] 2024-10-24 15:20:12.906 LOG.INFO UiEvent.cs Line:51 Event() - Software will be expired in 0 days, at 10/24/2024 12:00:00 AM 。
    901. 

  901. [Save Log Job] 2024-10-24 15:20:23.859 LOG.INFO UiEvent.cs Line:51 Event() - User admin login
    902. 

  902. [Save Log Job] 2024-10-24 15:20:34.972 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetAutoMode()
    903. 

  903. [Save Log Job] 2024-10-24 15:20:34.974 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentModeChanged
    904. 

  904. [Save Log Job] 2024-10-24 15:20:34.974 LOG.INFO UiEvent.cs Line:51 Event() - System running mode changed to Auto Mode
    905. 

  905. [Save Log Job] 2024-10-24 15:20:43.297 LOG.INFO UiEvent.cs Line:51 Event() - Operation RunRecipe(123, )
    906. 

  906. [Save Log Job] 2024-10-24 15:20:43.297 LOG.INFO UiEvent.cs Line:51 Event() - EventLotStart
    907. 

  907. [Save Log Job] 2024-10-24 15:20:43.297 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check door status。
    908. 

  908. [Save Log Job] 2024-10-24 15:20:43.398 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check chamber door。
    909. 

  909. [Save Log Job] 2024-10-24 15:20:43.398 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check backpanel door。
    910. 

  910. [Save Log Job] 2024-10-24 15:20:43.399 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check pump status。
    911. 

  911. [Save Log Job] 2024-10-24 15:20:43.399 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Close all the valves。
    912. 

  912. [Save Log Job] 2024-10-24 15:20:43.399 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Open pumping valve。
    913. 

  913. [Save Log Job] 2024-10-24 15:20:43.499 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    914. 

  914. [Save Log Job] 2024-10-24 15:20:45.106 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check chamber pressure。
    915. 

  915. [Save Log Job] 2024-10-24 15:21:20.002 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Pump below 100mTorr。
    916. 

  916. [Save Log Job] 2024-10-24 15:21:20.104 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：PreProcess Finished in 0.6 minitues。
    917. 

  917. [Save Log Job] 2024-10-24 15:21:20.104 LOG.INFO UiEvent.cs Line:51 Event() - System complete run 'PreProcess'.
    918. 

  918. [Save Log Job] 2024-10-24 15:21:20.104 LOG.INFO UiEvent.cs Line:51 Event() - Run Recipe 20241024152043-123
    919. 

  919. [Save Log Job] 2024-10-24 15:21:20.105 LOG.INFO UiEvent.cs Line:51 Event() - System recipe start run'20241024152043-123'
    920. 

  920. [Save Log Job] 2024-10-24 15:21:20.204 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241024152043-123' start run step 1：initial。
    921. 

  921. [Save Log Job] 2024-10-24 15:21:20.204 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。
    922. 

  922. [Save Log Job] 2024-10-24 15:21:20.205 LOG.INFO UiEvent.cs Line:51 Event() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。
    923. 

  923. [Save Log Job] 2024-10-24 15:21:20.205 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。
    924. 

  924. [Save Log Job] 2024-10-24 15:21:20.205 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。
    925. 

  925. [Save Log Job] 2024-10-24 15:21:20.206 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。
    926. 

  926. [Save Log Job] 2024-10-24 15:21:20.206 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。
    927. 

  927. [Save Log Job] 2024-10-24 15:21:20.206 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。
    928. 

  928. [Save Log Job] 2024-10-24 15:21:20.207 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPower，RF set Power:0。
    929. 

  929. [Save Log Job] 2024-10-24 15:21:20.207 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。
    930. 

  930. [Save Log Job] 2024-10-24 15:21:20.208 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。
    931. 

  931. [Save Log Job] 2024-10-24 15:21:20.208 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。
    932. 

  932. [Save Log Job] 2024-10-24 15:21:20.208 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas1， ramp to 45sccm。
    933. 

  933. [Save Log Job] 2024-10-24 15:21:20.208 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas2， ramp to 56sccm。
    934. 

  934. [Save Log Job] 2024-10-24 15:21:20.209 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas3， ramp to 66sccm。
    935. 

  935. [Save Log Job] 2024-10-24 15:21:20.209 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas4， ramp to 76sccm。
    936. 

  936. [Save Log Job] 2024-10-24 15:21:20.210 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas5， ramp to 86sccm。
    937. 

  937. [Save Log Job] 2024-10-24 15:21:20.210 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPowerOnOff，Set RF power Off。
    938. 

  938. [Save Log Job] 2024-10-24 15:21:20.211 LOG.INFO UiEvent.cs Line:51 Event() - Start monitor pressure stability
    939. 

  939. [Save Log Job] 2024-10-24 15:21:50.196 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241024152043-123' end step 1
    940. 

  940. [Save Log Job] 2024-10-24 15:21:50.296 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241024152043-123' start run step 2：initial。
    941. 

  941. [Save Log Job] 2024-10-24 15:21:50.296 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。
    942. 

  942. [Save Log Job] 2024-10-24 15:21:50.297 LOG.INFO UiEvent.cs Line:51 Event() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。
    943. 

  943. [Save Log Job] 2024-10-24 15:21:50.297 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。
    944. 

  944. [Save Log Job] 2024-10-24 15:21:50.297 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。
    945. 

  945. [Save Log Job] 2024-10-24 15:21:50.298 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。
    946. 

  946. [Save Log Job] 2024-10-24 15:21:50.298 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。
    947. 

  947. [Save Log Job] 2024-10-24 15:21:50.298 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。
    948. 

  948. [Save Log Job] 2024-10-24 15:21:50.299 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPower，RF set Power:150。
    949. 

  949. [Save Log Job] 2024-10-24 15:21:50.300 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。
    950. 

  950. [Save Log Job] 2024-10-24 15:21:50.300 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。
    951. 

  951. [Save Log Job] 2024-10-24 15:21:50.300 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。
    952. 

  952. [Save Log Job] 2024-10-24 15:21:50.301 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas1， ramp to 45sccm。
    953. 

  953. [Save Log Job] 2024-10-24 15:21:50.301 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas2， ramp to 56sccm。
    954. 

  954. [Save Log Job] 2024-10-24 15:21:50.301 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas3， ramp to 66sccm。
    955. 

  955. [Save Log Job] 2024-10-24 15:21:50.302 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas4， ramp to 76sccm。
    956. 

  956. [Save Log Job] 2024-10-24 15:21:50.302 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas5， ramp to 86sccm。
    957. 

  957. [Save Log Job] 2024-10-24 15:21:50.302 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPowerOnOff，Set RF power On。
    958. 

  958. [Save Log Job] 2024-10-24 15:22:05.883 LOG.INFO UiEvent.cs Line:51 Event() - System RF GeneratorTolerance alarm：Forward power 54 out of range[130,170] in 10 seconds.
    959. 

  959. [Save Log Job] 2024-10-24 15:22:08.885 LOG.INFO UiEvent.cs Line:51 Event() - System recipe was aborted: user aborted recipe
    960. 

  960. [Save Log Job] 2024-10-24 15:22:08.885 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC1 ValveClose失败，原因：Valve keep open。
    961. 

  961. [Save Log Job] 2024-10-24 15:22:08.885 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC2 ValveClose失败，原因：Valve keep open。
    962. 

  962. [Save Log Job] 2024-10-24 15:22:08.890 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC4 ValveClose失败，原因：Valve keep open。
    963. 

  963. [Save Log Job] 2024-10-24 15:22:08.890 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC3 ValveClose失败，原因：Valve keep open。
    964. 

  964. [Save Log Job] 2024-10-24 15:22:08.893 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门Process gas final valveClose失败，原因：Valve keep open。
    965. 

  965. [Save Log Job] 2024-10-24 15:22:08.893 LOG.INFO UiEvent.cs Line:51 Event() - Stop monitor pressure stability
    966. 

  966. [Save Log Job] 2024-10-24 15:22:08.894 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC5 ValveClose失败，原因：Valve keep open。
    967. 

  967. [Save Log Job] 2024-10-24 15:22:08.900 LOG.INFO UiEvent.cs Line:51 Event() - System Recipe completely run
    968. 

  968. [Save Log Job] 2024-10-24 15:22:08.900 LOG.INFO UiEvent.cs Line:51 Event() - System Recipe run completed，Recipe：20241024152043-123
    969. 

  969. Start time：2024/10/24 15:21:20
    970. 

  970. End time：2024/10/24 15:22:08
    971. 

  971. Total time：0:0:48
    972. 

  972. [Save Log Job] 2024-10-24 15:22:11.161 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    973. 

  973. [Save Log Job] 2024-10-24 15:22:34.898 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    974. 

  974. [Save Log Job] 2024-10-24 15:22:35.387 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC1 ValveClose失败，原因：Valve keep open。
    975. 

  975. [Save Log Job] 2024-10-24 15:22:35.393 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC2 ValveClose失败，原因：Valve keep open。
    976. 

  976. [Save Log Job] 2024-10-24 15:22:35.394 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC3 ValveClose失败，原因：Valve keep open。
    977. 

  977. [Save Log Job] 2024-10-24 15:22:35.415 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC4 ValveClose失败，原因：Valve keep open。
    978. 

  978. [Save Log Job] 2024-10-24 15:22:35.416 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门Process gas final valveClose失败，原因：Valve keep open。
    979. 

  979. --------------------------------[Header Log]----------------------------------------- [Save Log Job] 2024-10-24 15:26:07.710 LOG.INFO UiEvent.cs Line:57 Event() - 已经连接上设备实时控制系统
    980. 

  980. [Save Log Job] 2024-10-24 15:26:07.712 LOG.INFO UiEvent.cs Line:58 Event() - 已经连接上设备实时控制系统
    981. 

  981. [Save Log Job] 2024-10-24 15:26:08.884 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    982. 

  982. [Save Log Job] 2024-10-24 15:26:12.642 LOG.INFO UiEvent.cs Line:51 Event() - Software will be expired in 0 days, at 10/24/2024 12:00:00 AM 。
    983. 

  983. [Save Log Job] 2024-10-24 15:26:15.150 LOG.INFO UiEvent.cs Line:51 Event() - User admin login
    984. 

  984. [Save Log Job] 2024-10-24 15:26:28.793 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetAutoMode()
    985. 

  985. [Save Log Job] 2024-10-24 15:26:28.794 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentModeChanged
    986. 

  986. [Save Log Job] 2024-10-24 15:26:28.794 LOG.INFO UiEvent.cs Line:51 Event() - System running mode changed to Auto Mode
    987. 

  987. [Save Log Job] 2024-10-24 15:26:30.298 LOG.INFO UiEvent.cs Line:51 Event() - Operation RunRecipe(123, )
    988. 

  988. [Save Log Job] 2024-10-24 15:26:30.299 LOG.INFO UiEvent.cs Line:51 Event() - EventLotStart
    989. 

  989. [Save Log Job] 2024-10-24 15:26:30.399 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check door status。
    990. 

  990. [Save Log Job] 2024-10-24 15:26:30.399 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check chamber door。
    991. 

  991. [Save Log Job] 2024-10-24 15:26:30.400 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check backpanel door。
    992. 

  992. [Save Log Job] 2024-10-24 15:26:30.401 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check pump status。
    993. 

  993. [Save Log Job] 2024-10-24 15:26:30.401 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Close all the valves。
    994. 

  994. [Save Log Job] 2024-10-24 15:26:30.401 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    995. 

  995. [Save Log Job] 2024-10-24 15:26:30.499 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Open pumping valve。
    996. 

  996. [Save Log Job] 2024-10-24 15:26:32.511 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门Chamber pumping valveOpen失败，原因：Valve keep closed 。
    997. 

  997. [Save Log Job] 2024-10-24 15:26:33.314 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check chamber pressure。
    998. 

  998. [Save Log Job] 2024-10-24 15:27:12.091 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Pump below 100mTorr。
    999. 

  999. [Save Log Job] 2024-10-24 15:27:12.091 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：PreProcess Finished in 0.7 minitues。
    1000. 

  1000. [Save Log Job] 2024-10-24 15:27:12.091 LOG.INFO UiEvent.cs Line:51 Event() - System complete run 'PreProcess'.
    1001. 

  1001. [Save Log Job] 2024-10-24 15:27:12.092 LOG.INFO UiEvent.cs Line:51 Event() - Run Recipe 20241024152630-123
    1002. 

  1002. [Save Log Job] 2024-10-24 15:27:12.092 LOG.INFO UiEvent.cs Line:51 Event() - System recipe start run'20241024152630-123'
    1003. 

  1003. [Save Log Job] 2024-10-24 15:27:12.191 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241024152630-123' start run step 1：initial。
    1004. 

  1004. [Save Log Job] 2024-10-24 15:27:12.191 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。
    1005. 

  1005. [Save Log Job] 2024-10-24 15:27:12.192 LOG.INFO UiEvent.cs Line:51 Event() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。
    1006. 

  1006. [Save Log Job] 2024-10-24 15:27:12.192 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。
    1007. 

  1007. [Save Log Job] 2024-10-24 15:27:12.192 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。
    1008. 

  1008. [Save Log Job] 2024-10-24 15:27:12.193 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。
    1009. 

  1009. [Save Log Job] 2024-10-24 15:27:12.195 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。
    1010. 

  1010. [Save Log Job] 2024-10-24 15:27:12.195 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。
    1011. 

  1011. [Save Log Job] 2024-10-24 15:27:12.196 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPower，RF set Power:0。
    1012. 

  1012. [Save Log Job] 2024-10-24 15:27:12.196 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。
    1013. 

  1013. [Save Log Job] 2024-10-24 15:27:12.197 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。
    1014. 

  1014. [Save Log Job] 2024-10-24 15:27:12.197 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。
    1015. 

  1015. [Save Log Job] 2024-10-24 15:27:12.197 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas1， ramp to 45sccm。
    1016. 

  1016. [Save Log Job] 2024-10-24 15:27:12.197 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas2， ramp to 56sccm。
    1017. 

  1017. [Save Log Job] 2024-10-24 15:27:12.198 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas3， ramp to 66sccm。
    1018. 

  1018. [Save Log Job] 2024-10-24 15:27:12.198 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas4， ramp to 76sccm。
    1019. 

  1019. [Save Log Job] 2024-10-24 15:27:12.198 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas5， ramp to 86sccm。
    1020. 

  1020. [Save Log Job] 2024-10-24 15:27:12.199 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPowerOnOff，Set RF power Off。
    1021. 

  1021. [Save Log Job] 2024-10-24 15:27:12.199 LOG.INFO UiEvent.cs Line:51 Event() - Start monitor pressure stability
    1022. 

  1022. [Save Log Job] 2024-10-24 15:27:42.184 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241024152630-123' end step 1
    1023. 

  1023. [Save Log Job] 2024-10-24 15:27:42.284 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241024152630-123' start run step 2：initial。
    1024. 

  1024. [Save Log Job] 2024-10-24 15:27:42.284 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。
    1025. 

  1025. [Save Log Job] 2024-10-24 15:27:42.284 LOG.INFO UiEvent.cs Line:51 Event() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。
    1026. 

  1026. [Save Log Job] 2024-10-24 15:27:42.285 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。
    1027. 

  1027. [Save Log Job] 2024-10-24 15:27:42.285 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。
    1028. 

  1028. [Save Log Job] 2024-10-24 15:27:42.285 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。
    1029. 

  1029. [Save Log Job] 2024-10-24 15:27:42.286 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。
    1030. 

  1030. [Save Log Job] 2024-10-24 15:27:42.286 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。
    1031. 

  1031. [Save Log Job] 2024-10-24 15:27:42.286 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPower，RF set Power:150。
    1032. 

  1032. [Save Log Job] 2024-10-24 15:27:42.287 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。
    1033. 

  1033. [Save Log Job] 2024-10-24 15:27:42.287 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。
    1034. 

  1034. [Save Log Job] 2024-10-24 15:27:42.288 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。
    1035. 

  1035. [Save Log Job] 2024-10-24 15:27:42.289 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas1， ramp to 45sccm。
    1036. 

  1036. [Save Log Job] 2024-10-24 15:27:42.289 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas2， ramp to 56sccm。
    1037. 

  1037. [Save Log Job] 2024-10-24 15:27:42.289 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas3， ramp to 66sccm。
    1038. 

  1038. [Save Log Job] 2024-10-24 15:27:42.290 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas4， ramp to 76sccm。
    1039. 

  1039. [Save Log Job] 2024-10-24 15:27:42.290 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas5， ramp to 86sccm。
    1040. 

  1040. [Save Log Job] 2024-10-24 15:27:42.290 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPowerOnOff，Set RF power On。
    1041. 

  1041. [Save Log Job] 2024-10-24 15:28:02.537 LOG.INFO UiEvent.cs Line:51 Event() - System RF GeneratorTolerance alarm：Forward power 54 out of range[130,170] in 10 seconds.
    1042. 

  1042. [Save Log Job] 2024-10-24 15:28:10.528 LOG.INFO UiEvent.cs Line:51 Event() - System recipe was aborted: user aborted recipe
    1043. 

  1043. [Save Log Job] 2024-10-24 15:28:10.535 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC1 ValveClose失败，原因：Valve keep open。
    1044. 

  1044. [Save Log Job] 2024-10-24 15:28:10.536 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC2 ValveClose失败，原因：Valve keep open。
    1045. 

  1045. [Save Log Job] 2024-10-24 15:28:10.539 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC3 ValveClose失败，原因：Valve keep open。
    1046. 

  1046. [Save Log Job] 2024-10-24 15:28:11.790 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC4 ValveClose失败，原因：Valve keep open。
    1047. 

  1047. [Save Log Job] 2024-10-24 15:28:11.790 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC5 ValveClose失败，原因：Valve keep open。
    1048. 

  1048. [Save Log Job] 2024-10-24 15:28:11.791 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门Process gas final valveClose失败，原因：Valve keep open。
    1049. 

  1049. [Save Log Job] 2024-10-24 15:28:11.791 LOG.INFO UiEvent.cs Line:51 Event() - Stop monitor pressure stability
    1050. 

  1050. [Save Log Job] 2024-10-24 15:28:11.791 LOG.INFO UiEvent.cs Line:51 Event() - System Recipe run completed，Recipe：20241024152630-123
    1051. 

  1051. Start time：2024/10/24 15:27:12
    1052. 

  1052. End time：2024/10/24 15:28:05
    1053. 

  1053. Total time：0:0:53
    1054. 

  1054. [Save Log Job] 2024-10-24 15:28:11.792 LOG.INFO UiEvent.cs Line:51 Event() - System Recipe completely run
    1055. 

  1055. [Save Log Job] 2024-10-24 15:28:11.799 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    1056. 

  1056. [Save Log Job] 2024-10-24 15:28:13.701 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC1 ValveClose失败，原因：Valve keep open。
    1057. 

  1057. [Save Log Job] 2024-10-24 15:28:13.703 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC2 ValveClose失败，原因：Valve keep open。
    1058. 

  1058. [Save Log Job] 2024-10-24 15:28:15.356 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC3 ValveClose失败，原因：Valve keep open。
    1059. 

  1059. [Save Log Job] 2024-10-24 15:28:15.360 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC4 ValveClose失败，原因：Valve keep open。
    1060. 

  1060. [Save Log Job] 2024-10-24 15:28:17.826 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC5 ValveClose失败，原因：Valve keep open。
    1061. 

  1061. --------------------------------[Header Log]----------------------------------------- [Save Log Job] 2024-10-24 16:25:13.539 LOG.INFO UiEvent.cs Line:57 Event() - 已经连接上设备实时控制系统
    1062. 

  1062. [Save Log Job] 2024-10-24 16:25:13.541 LOG.INFO UiEvent.cs Line:58 Event() - 已经连接上设备实时控制系统
    1063. 

  1063. [Save Log Job] 2024-10-24 16:25:15.254 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    1064. 

  1064. [Save Log Job] 2024-10-24 16:25:18.798 LOG.INFO UiEvent.cs Line:51 Event() - Software will be expired in 0 days, at 10/24/2024 12:00:00 AM 。
    1065. 

  1065. [Save Log Job] 2024-10-24 16:25:23.627 LOG.INFO UiEvent.cs Line:51 Event() - User admin login
    1066. 

  1066. [Save Log Job] 2024-10-24 16:25:31.253 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetAutoMode()
    1067. 

  1067. [Save Log Job] 2024-10-24 16:25:31.253 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentModeChanged
    1068. 

  1068. [Save Log Job] 2024-10-24 16:25:31.253 LOG.INFO UiEvent.cs Line:51 Event() - System running mode changed to Auto Mode
    1069. 

  1069. [Save Log Job] 2024-10-24 16:25:33.366 LOG.INFO UiEvent.cs Line:51 Event() - Operation RunRecipe(123, )
    1070. 

  1070. [Save Log Job] 2024-10-24 16:25:33.366 LOG.INFO UiEvent.cs Line:51 Event() - EventLotStart
    1071. 

  1071. [Save Log Job] 2024-10-24 16:25:33.367 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    1072. 

  1072. [Save Log Job] 2024-10-24 16:25:33.367 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check door status。
    1073. 

  1073. [Save Log Job] 2024-10-24 16:25:33.367 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check chamber door。
    1074. 

  1074. [Save Log Job] 2024-10-24 16:25:33.368 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check backpanel door。
    1075. 

  1075. [Save Log Job] 2024-10-24 16:25:33.368 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check pump status。
    1076. 

  1076. [Save Log Job] 2024-10-24 16:25:33.368 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Close all the valves。
    1077. 

  1077. [Save Log Job] 2024-10-24 16:25:33.463 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Open pumping valve。
    1078. 

  1078. [Save Log Job] 2024-10-24 16:25:35.596 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check chamber pressure。
    1079. 

  1079. [Save Log Job] 2024-10-24 16:26:10.583 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Pump below 100mTorr。
    1080. 

  1080. [Save Log Job] 2024-10-24 16:26:10.681 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：PreProcess Finished in 0.6 minitues。
    1081. 

  1081. [Save Log Job] 2024-10-24 16:26:10.681 LOG.INFO UiEvent.cs Line:51 Event() - System complete run 'PreProcess'.
    1082. 

  1082. [Save Log Job] 2024-10-24 16:26:10.682 LOG.INFO UiEvent.cs Line:51 Event() - Run Recipe 20241024162533-123
    1083. 

  1083. [Save Log Job] 2024-10-24 16:26:10.682 LOG.INFO UiEvent.cs Line:51 Event() - System recipe start run'20241024162533-123'
    1084. 

  1084. [Save Log Job] 2024-10-24 16:26:10.683 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241024162533-123' start run step 1：initial。
    1085. 

  1085. [Save Log Job] 2024-10-24 16:26:10.683 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。
    1086. 

  1086. [Save Log Job] 2024-10-24 16:26:10.683 LOG.INFO UiEvent.cs Line:51 Event() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。
    1087. 

  1087. [Save Log Job] 2024-10-24 16:26:10.684 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。
    1088. 

  1088. [Save Log Job] 2024-10-24 16:26:10.684 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。
    1089. 

  1089. [Save Log Job] 2024-10-24 16:26:10.684 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。
    1090. 

  1090. [Save Log Job] 2024-10-24 16:26:10.685 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。
    1091. 

  1091. [Save Log Job] 2024-10-24 16:26:10.685 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。
    1092. 

  1092. [Save Log Job] 2024-10-24 16:26:10.686 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPower，RF set Power:0。
    1093. 

  1093. [Save Log Job] 2024-10-24 16:26:10.686 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。
    1094. 

  1094. [Save Log Job] 2024-10-24 16:26:10.686 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。
    1095. 

  1095. [Save Log Job] 2024-10-24 16:26:10.687 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。
    1096. 

  1096. [Save Log Job] 2024-10-24 16:26:10.687 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas1， ramp to 45sccm。
    1097. 

  1097. [Save Log Job] 2024-10-24 16:26:10.687 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas2， ramp to 56sccm。
    1098. 

  1098. [Save Log Job] 2024-10-24 16:26:10.688 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas3， ramp to 66sccm。
    1099. 

  1099. [Save Log Job] 2024-10-24 16:26:10.688 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas4， ramp to 76sccm。
    1100. 

  1100. [Save Log Job] 2024-10-24 16:26:10.688 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas5， ramp to 86sccm。
    1101. 

  1101. [Save Log Job] 2024-10-24 16:26:10.688 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPowerOnOff，Set RF power Off。
    1102. 

  1102. [Save Log Job] 2024-10-24 16:26:10.781 LOG.INFO UiEvent.cs Line:51 Event() - Start monitor pressure stability
    1103. 

  1103. [Save Log Job] 2024-10-24 16:26:40.774 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241024162533-123' end step 1
    1104. 

  1104. [Save Log Job] 2024-10-24 16:26:40.875 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241024162533-123' start run step 2：initial。
    1105. 

  1105. [Save Log Job] 2024-10-24 16:26:40.875 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。
    1106. 

  1106. [Save Log Job] 2024-10-24 16:26:40.876 LOG.INFO UiEvent.cs Line:51 Event() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。
    1107. 

  1107. [Save Log Job] 2024-10-24 16:26:40.876 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。
    1108. 

  1108. [Save Log Job] 2024-10-24 16:26:40.876 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。
    1109. 

  1109. [Save Log Job] 2024-10-24 16:26:40.877 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。
    1110. 

  1110. [Save Log Job] 2024-10-24 16:26:40.877 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。
    1111. 

  1111. [Save Log Job] 2024-10-24 16:26:40.877 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。
    1112. 

  1112. [Save Log Job] 2024-10-24 16:26:40.878 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPower，RF set Power:150。
    1113. 

  1113. [Save Log Job] 2024-10-24 16:26:40.878 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。
    1114. 

  1114. [Save Log Job] 2024-10-24 16:26:40.879 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。
    1115. 

  1115. [Save Log Job] 2024-10-24 16:26:40.879 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。
    1116. 

  1116. [Save Log Job] 2024-10-24 16:26:40.880 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas1， ramp to 45sccm。
    1117. 

  1117. [Save Log Job] 2024-10-24 16:26:40.880 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas2， ramp to 56sccm。
    1118. 

  1118. [Save Log Job] 2024-10-24 16:26:40.881 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas3， ramp to 66sccm。
    1119. 

  1119. [Save Log Job] 2024-10-24 16:26:40.881 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas4， ramp to 76sccm。
    1120. 

  1120. [Save Log Job] 2024-10-24 16:26:40.881 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas5， ramp to 86sccm。
    1121. 

  1121. [Save Log Job] 2024-10-24 16:26:40.882 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPowerOnOff，Set RF power On。
    1122. 

  1122. [Save Log Job] 2024-10-24 16:26:56.425 LOG.INFO UiEvent.cs Line:51 Event() - System RF GeneratorTolerance alarm：Forward power 54 out of range[130,170] in 10 seconds.
    1123. 

  1123. [Save Log Job] 2024-10-24 16:26:56.890 LOG.INFO UiEvent.cs Line:51 Event() - System recipe was aborted: user aborted recipe
    1124. 

  1124. [Save Log Job] 2024-10-24 16:26:57.757 LOG.INFO UiEvent.cs Line:51 Event() - Stop monitor pressure stability
    1125. 

  1125. [Save Log Job] 2024-10-24 16:26:57.765 LOG.INFO UiEvent.cs Line:51 Event() - System Recipe run completed，Recipe：20241024162533-123
    1126. 

  1126. Start time：2024/10/24 16:26:10
    1127. 

  1127. End time：2024/10/24 16:26:56
    1128. 

  1128. Total time：0:0:46
    1129. 

  1129. [Save Log Job] 2024-10-24 16:26:57.768 LOG.INFO UiEvent.cs Line:51 Event() - System Recipe completely run
    1130. 

  1130. [Save Log Job] 2024-10-24 16:26:57.769 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    1131. 

  1131. [Save Log Job] 2024-10-24 16:26:58.960 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC1 ValveClose失败，原因：Valve keep open。
    1132. 

  1132. [Save Log Job] 2024-10-24 16:26:58.960 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC2 ValveClose失败，原因：Valve keep open。
    1133. 

  1133. [Save Log Job] 2024-10-24 16:26:58.960 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC3 ValveClose失败，原因：Valve keep open。
    1134. 

  1134. [Save Log Job] 2024-10-24 16:26:58.961 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC4 ValveClose失败，原因：Valve keep open。
    1135. 

  1135. [Save Log Job] 2024-10-24 16:26:58.961 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC5 ValveClose失败，原因：Valve keep open。
    1136. 

  1136. --------------------------------[Footer Log]----------------------------------------- --------------------------------[Header Log]----------------------------------------- [Save Log Job] 2024-10-24 17:02:49.301 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    1137. 

  1137. [Save Log Job] 2024-10-24 17:02:53.036 LOG.INFO UiEvent.cs Line:51 Event() - Software will be expired in 0 days, at 10/24/2024 12:00:00 AM 。
    1138. 

  1138. [Save Log Job] 2024-10-24 17:05:03.510 LOG.INFO UiEvent.cs Line:51 Event() - User admin login
    1139. 

  1139. [Save Log Job] 2024-10-24 17:05:10.727 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetAutoMode()
    1140. 

  1140. [Save Log Job] 2024-10-24 17:05:10.727 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentModeChanged
    1141. 

  1141. [Save Log Job] 2024-10-24 17:05:10.729 LOG.INFO UiEvent.cs Line:51 Event() - System running mode changed to Auto Mode
    1142. 

  1142. [Save Log Job] 2024-10-24 17:05:17.650 LOG.INFO UiEvent.cs Line:51 Event() - Operation RunRecipe(123, )
    1143. 

  1143. [Save Log Job] 2024-10-24 17:05:17.650 LOG.INFO UiEvent.cs Line:51 Event() - EventLotStart
    1144. 

  1144. [Save Log Job] 2024-10-24 17:05:17.650 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check door status。
    1145. 

  1145. [Save Log Job] 2024-10-24 17:05:17.651 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    1146. 

  1146. [Save Log Job] 2024-10-24 17:05:17.651 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check chamber door。
    1147. 

  1147. [Save Log Job] 2024-10-24 17:05:17.651 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check backpanel door。
    1148. 

  1148. [Save Log Job] 2024-10-24 17:05:17.653 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check pump status。
    1149. 

  1149. [Save Log Job] 2024-10-24 17:05:17.656 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Close all the valves。
    1150. 

  1150. [Save Log Job] 2024-10-24 17:05:17.750 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Open pumping valve。
    1151. 

  1151. [Save Log Job] 2024-10-24 17:05:19.758 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门Chamber pumping valveOpen失败，原因：Valve keep closed 。
    1152. 

  1152. [Save Log Job] 2024-10-24 17:05:20.460 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check chamber pressure。
    1153. 

  1153. [Save Log Job] 2024-10-24 17:05:55.389 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Pump below 100mTorr。
    1154. 

  1154. [Save Log Job] 2024-10-24 17:05:55.389 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：PreProcess Finished in 0.6 minitues。
    1155. 

  1155. [Save Log Job] 2024-10-24 17:05:55.389 LOG.INFO UiEvent.cs Line:51 Event() - System complete run 'PreProcess'.
    1156. 

  1156. [Save Log Job] 2024-10-24 17:05:55.390 LOG.INFO UiEvent.cs Line:51 Event() - Run Recipe 20241024170517-123
    1157. 

  1157. [Save Log Job] 2024-10-24 17:05:55.390 LOG.INFO UiEvent.cs Line:51 Event() - System recipe start run'20241024170517-123'
    1158. 

  1158. [Save Log Job] 2024-10-24 17:05:55.489 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241024170517-123' start run step 1：initial。
    1159. 

  1159. [Save Log Job] 2024-10-24 17:05:55.489 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。
    1160. 

  1160. [Save Log Job] 2024-10-24 17:05:55.489 LOG.INFO UiEvent.cs Line:51 Event() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。
    1161. 

  1161. [Save Log Job] 2024-10-24 17:05:55.490 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。
    1162. 

  1162. [Save Log Job] 2024-10-24 17:05:55.490 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。
    1163. 

  1163. [Save Log Job] 2024-10-24 17:05:55.490 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。
    1164. 

  1164. [Save Log Job] 2024-10-24 17:05:55.491 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。
    1165. 

  1165. [Save Log Job] 2024-10-24 17:05:55.491 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。
    1166. 

  1166. [Save Log Job] 2024-10-24 17:05:55.492 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPower，RF set Power:0。
    1167. 

  1167. [Save Log Job] 2024-10-24 17:05:55.492 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。
    1168. 

  1168. [Save Log Job] 2024-10-24 17:05:55.492 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。
    1169. 

  1169. [Save Log Job] 2024-10-24 17:05:55.493 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。
    1170. 

  1170. [Save Log Job] 2024-10-24 17:05:55.493 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas1， ramp to 45sccm。
    1171. 

  1171. [Save Log Job] 2024-10-24 17:05:55.493 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas2， ramp to 56sccm。
    1172. 

  1172. [Save Log Job] 2024-10-24 17:05:55.494 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas3， ramp to 66sccm。
    1173. 

  1173. [Save Log Job] 2024-10-24 17:05:55.494 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas4， ramp to 76sccm。
    1174. 

  1174. [Save Log Job] 2024-10-24 17:05:55.494 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas5， ramp to 86sccm。
    1175. 

  1175. [Save Log Job] 2024-10-24 17:05:55.495 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPowerOnOff，Set RF power Off。
    1176. 

  1176. [Save Log Job] 2024-10-24 17:05:55.495 LOG.INFO UiEvent.cs Line:51 Event() - Start monitor pressure stability
    1177. 

  1177. [Save Log Job] 2024-10-24 17:06:25.578 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241024170517-123' end step 1
    1178. 

  1178. [Save Log Job] 2024-10-24 17:06:25.578 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241024170517-123' start run step 2：initial。
    1179. 

  1179. [Save Log Job] 2024-10-24 17:06:25.580 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。
    1180. 

  1180. [Save Log Job] 2024-10-24 17:06:25.580 LOG.INFO UiEvent.cs Line:51 Event() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。
    1181. 

  1181. [Save Log Job] 2024-10-24 17:06:25.581 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。
    1182. 

  1182. [Save Log Job] 2024-10-24 17:06:25.581 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。
    1183. 

  1183. [Save Log Job] 2024-10-24 17:06:25.581 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。
    1184. 

  1184. [Save Log Job] 2024-10-24 17:06:25.585 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。
    1185. 

  1185. [Save Log Job] 2024-10-24 17:06:25.585 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPower，RF set Power:150。
    1186. 

  1186. [Save Log Job] 2024-10-24 17:06:25.585 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。
    1187. 

  1187. [Save Log Job] 2024-10-24 17:06:25.585 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。
    1188. 

  1188. [Save Log Job] 2024-10-24 17:06:25.585 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。
    1189. 

  1189. [Save Log Job] 2024-10-24 17:06:25.585 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas1， ramp to 45sccm。
    1190. 

  1190. [Save Log Job] 2024-10-24 17:06:25.585 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas2， ramp to 56sccm。
    1191. 

  1191. [Save Log Job] 2024-10-24 17:06:25.585 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas3， ramp to 66sccm。
    1192. 

  1192. [Save Log Job] 2024-10-24 17:06:25.585 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas4， ramp to 76sccm。
    1193. 

  1193. [Save Log Job] 2024-10-24 17:06:25.585 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas5， ramp to 86sccm。
    1194. 

  1194. [Save Log Job] 2024-10-24 17:06:25.585 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPowerOnOff，Set RF power On。
    1195. 

  1195. [Save Log Job] 2024-10-24 17:06:25.586 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。
    1196. 

  1196. [Save Log Job] 2024-10-24 17:06:40.603 LOG.INFO UiEvent.cs Line:51 Event() - System RF GeneratorTolerance alarm：Forward power 54 out of range[130,170] in 10 seconds.
    1197. 

  1197. [Save Log Job] 2024-10-24 17:06:42.865 LOG.INFO UiEvent.cs Line:51 Event() - System recipe was aborted: user aborted recipe
    1198. 

  1198. [Save Log Job] 2024-10-24 17:06:43.785 LOG.INFO UiEvent.cs Line:51 Event() - Stop monitor pressure stability
    1199. 

  1199. [Save Log Job] 2024-10-24 17:06:43.787 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC1 ValveClose失败，原因：Valve keep open。
    1200. 

  1200. [Save Log Job] 2024-10-24 17:06:43.793 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC2 ValveClose失败，原因：Valve keep open。
    1201. 

  1201. [Save Log Job] 2024-10-24 17:06:43.794 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC3 ValveClose失败，原因：Valve keep open。
    1202. 

  1202. [Save Log Job] 2024-10-24 17:06:43.797 LOG.INFO UiEvent.cs Line:51 Event() - System Recipe run completed，Recipe：20241024170517-123
    1203. 

  1203. Start time：2024/10/24 17:05:55
    1204. 

  1204. End time：2024/10/24 17:06:43
    1205. 

  1205. Total time：0:0:47
    1206. 

  1206. [Save Log Job] 2024-10-24 17:06:43.800 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC4 ValveClose失败，原因：Valve keep open。
    1207. 

  1207. [Save Log Job] 2024-10-24 17:06:44.913 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC5 ValveClose失败，原因：Valve keep open。
    1208. 

  1208. [Save Log Job] 2024-10-24 17:06:44.919 LOG.INFO UiEvent.cs Line:51 Event() - System Recipe completely run
    1209. 

  1209. [Save Log Job] 2024-10-24 17:06:44.919 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    1210. 

  1210. [Save Log Job] 2024-10-24 17:06:46.403 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC1 ValveClose失败，原因：Valve keep open。
    1211. 

  1211. [Save Log Job] 2024-10-24 17:06:52.165 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC2 ValveClose失败，原因：Valve keep open。
    1212. 

  1212. [Save Log Job] 2024-10-24 17:06:52.165 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC3 ValveClose失败，原因：Valve keep open。
    1213. 

  1213. [Save Log Job] 2024-10-24 17:06:52.166 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC4 ValveClose失败，原因：Valve keep open。
    1214. 

  1214. [Save Log Job] 2024-10-24 17:06:52.170 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC5 ValveClose失败，原因：Valve keep open。
    1215. 

  1215. [Save Log Job] 2024-10-24 17:10:50.453 LOG.INFO UiEvent.cs Line:51 Event() - System PLC heart beat check failed，please confirm PLC still running
    1216. 

  1216.