--------------------------------[Header Log]----------------------------------------- [Save Log Job] 2024-10-24 09:35:29.853 LOG.INFO UiEvent.cs Line:51 Event() - System Information
[Save Log Job] 2024-10-24 09:35:29.853 LOG.INFO UiEvent.cs Line:51 Event() - recipe file  123  save completed
[Save Log Job] 2024-10-24 09:36:04.045 LOG.INFO UiEvent.cs Line:51 Event() - Chamber is in Init，can not do SetAutoMode。
[Save Log Job] 2024-10-24 09:36:04.045 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetAutoMode()
[Save Log Job] 2024-10-24 09:36:28.912 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetAutoMode()
[Save Log Job] 2024-10-24 09:36:28.912 LOG.INFO UiEvent.cs Line:51 Event() - Chamber is in Init，can not do SetAutoMode。
--------------------------------[Header Log]----------------------------------------- [Save Log Job] 2024-10-24 09:37:37.500 LOG.INFO UiEvent.cs Line:58 Event() - 已经连接上设备实时控制系统
[Save Log Job] 2024-10-24 09:37:37.501 LOG.INFO UiEvent.cs Line:57 Event() - 已经连接上设备实时控制系统
[Save Log Job] 2024-10-24 09:37:45.982 LOG.INFO UiEvent.cs Line:51 Event() - User admin login
[Save Log Job] 2024-10-24 09:39:17.351 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetAutoMode()
[Save Log Job] 2024-10-24 09:39:17.351 LOG.INFO UiEvent.cs Line:51 Event() - Chamber is in Init，can not do SetAutoMode。
[Save Log Job] 2024-10-24 09:39:39.009 LOG.INFO UiEvent.cs Line:51 Event() - recipe file  123  save completed
[Save Log Job] 2024-10-24 09:39:39.010 LOG.INFO UiEvent.cs Line:51 Event() - System Information
--------------------------------[Header Log]----------------------------------------- [Save Log Job] 2024-10-24 09:41:49.341 LOG.INFO UiEvent.cs Line:57 Event() - 已经连接上设备实时控制系统
[Save Log Job] 2024-10-24 09:41:49.343 LOG.INFO UiEvent.cs Line:58 Event() - 已经连接上设备实时控制系统
[Save Log Job] 2024-10-24 09:41:50.664 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-10-24 09:41:54.224 LOG.INFO UiEvent.cs Line:51 Event() - Software will be expired in 0 days, at 2024/10/24 0:00:00 。
[Save Log Job] 2024-10-24 09:41:56.862 LOG.INFO UiEvent.cs Line:51 Event() - User admin login
[Save Log Job] 2024-10-24 09:42:05.265 LOG.INFO UiEvent.cs Line:51 Event() - 手动操作 SetConfig(System_Language, 1)
[Save Log Job] 2024-10-24 09:42:12.383 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetAutoMode()
[Save Log Job] 2024-10-24 09:42:12.384 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentModeChanged
[Save Log Job] 2024-10-24 09:42:12.384 LOG.INFO UiEvent.cs Line:51 Event() - System running mode changed to Auto Mode
[Save Log Job] 2024-10-24 09:42:30.145 LOG.INFO UiEvent.cs Line:51 Event() - Operation RunRecipe(123, )
[Save Log Job] 2024-10-24 09:42:30.146 LOG.INFO UiEvent.cs Line:51 Event() - EventLotStart
[Save Log Job] 2024-10-24 09:42:30.246 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-10-24 09:42:30.246 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check door status。
[Save Log Job] 2024-10-24 09:42:30.246 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check chamber door。
[Save Log Job] 2024-10-24 09:42:30.247 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check backpanel door。
[Save Log Job] 2024-10-24 09:42:30.247 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check pump status。
[Save Log Job] 2024-10-24 09:42:30.247 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Close all the valves。
[Save Log Job] 2024-10-24 09:42:30.346 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Open pumping valve。
[Save Log Job] 2024-10-24 09:42:32.355 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门Chamber pumping valveOpen失败，原因：Valve keep closed 。
[Save Log Job] 2024-10-24 09:42:34.161 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check chamber pressure。
[Save Log Job] 2024-10-24 09:43:09.109 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Pump below 100mTorr。
[Save Log Job] 2024-10-24 09:43:09.109 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：PreProcess Finished in 0.6 minitues。
[Save Log Job] 2024-10-24 09:43:09.109 LOG.INFO UiEvent.cs Line:51 Event() - System complete run 'PreProcess'.
[Save Log Job] 2024-10-24 09:43:09.110 LOG.INFO UiEvent.cs Line:51 Event() - Run Recipe 20241024094230-123
[Save Log Job] 2024-10-24 09:43:09.112 LOG.INFO UiEvent.cs Line:51 Event() - System recipe start run'20241024094230-123'
[Save Log Job] 2024-10-24 09:43:09.209 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241024094230-123' start run step 1：initial。
[Save Log Job] 2024-10-24 09:43:09.210 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。
[Save Log Job] 2024-10-24 09:43:09.210 LOG.INFO UiEvent.cs Line:51 Event() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。
[Save Log Job] 2024-10-24 09:43:09.210 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。
[Save Log Job] 2024-10-24 09:43:09.211 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。
[Save Log Job] 2024-10-24 09:43:09.211 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。
[Save Log Job] 2024-10-24 09:43:09.211 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。
[Save Log Job] 2024-10-24 09:43:09.212 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。
[Save Log Job] 2024-10-24 09:43:09.212 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPower，RF set Power:0。
[Save Log Job] 2024-10-24 09:43:09.212 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。
[Save Log Job] 2024-10-24 09:43:09.213 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。
[Save Log Job] 2024-10-24 09:43:09.213 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。
[Save Log Job] 2024-10-24 09:43:09.214 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas1， ramp to 45sccm。
[Save Log Job] 2024-10-24 09:43:09.214 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas2， ramp to 56sccm。
[Save Log Job] 2024-10-24 09:43:09.214 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas3， ramp to 66sccm。
[Save Log Job] 2024-10-24 09:43:09.214 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas4， ramp to 76sccm。
[Save Log Job] 2024-10-24 09:43:09.215 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas5， ramp to 86sccm。
[Save Log Job] 2024-10-24 09:43:09.215 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPowerOnOff，Set RF power Off。
[Save Log Job] 2024-10-24 09:43:09.311 LOG.INFO UiEvent.cs Line:51 Event() - Start monitor pressure stability
[Save Log Job] 2024-10-24 09:43:12.021 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(System_Language, 2)
[Save Log Job] 2024-10-24 09:43:39.310 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241024094230-123' end step 1
[Save Log Job] 2024-10-24 09:43:39.310 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241024094230-123' start run step 2：initial。
[Save Log Job] 2024-10-24 09:43:39.310 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。
[Save Log Job] 2024-10-24 09:43:39.311 LOG.INFO UiEvent.cs Line:51 Event() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。
[Save Log Job] 2024-10-24 09:43:39.311 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。
[Save Log Job] 2024-10-24 09:43:39.311 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。
[Save Log Job] 2024-10-24 09:43:39.312 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。
[Save Log Job] 2024-10-24 09:43:39.313 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。
[Save Log Job] 2024-10-24 09:43:39.313 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。
[Save Log Job] 2024-10-24 09:43:39.313 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPower，RF set Power:150。
[Save Log Job] 2024-10-24 09:43:39.313 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。
[Save Log Job] 2024-10-24 09:43:39.314 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。
[Save Log Job] 2024-10-24 09:43:39.314 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。
[Save Log Job] 2024-10-24 09:43:39.314 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas1， ramp to 45sccm。
[Save Log Job] 2024-10-24 09:43:39.315 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas2， ramp to 56sccm。
[Save Log Job] 2024-10-24 09:43:39.315 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas3， ramp to 66sccm。
[Save Log Job] 2024-10-24 09:43:39.316 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas4， ramp to 76sccm。
[Save Log Job] 2024-10-24 09:43:39.316 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas5， ramp to 86sccm。
[Save Log Job] 2024-10-24 09:43:39.316 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPowerOnOff，Set RF power On。
[Save Log Job] 2024-10-24 09:44:09.403 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241024094230-123' end step 2
[Save Log Job] 2024-10-24 09:44:09.504 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241024094230-123' start run step 3：initial。
[Save Log Job] 2024-10-24 09:44:09.504 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。
[Save Log Job] 2024-10-24 09:44:09.504 LOG.INFO UiEvent.cs Line:51 Event() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。
[Save Log Job] 2024-10-24 09:44:09.505 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。
[Save Log Job] 2024-10-24 09:44:09.505 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。
[Save Log Job] 2024-10-24 09:44:09.505 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。
[Save Log Job] 2024-10-24 09:44:09.506 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。
[Save Log Job] 2024-10-24 09:44:09.506 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。
[Save Log Job] 2024-10-24 09:44:09.507 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPower，RF set Power:0。
[Save Log Job] 2024-10-24 09:44:09.507 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。
[Save Log Job] 2024-10-24 09:44:09.507 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。
[Save Log Job] 2024-10-24 09:44:09.508 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。
[Save Log Job] 2024-10-24 09:44:09.508 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas1， ramp to 45sccm。
[Save Log Job] 2024-10-24 09:44:09.508 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas2， ramp to 56sccm。
[Save Log Job] 2024-10-24 09:44:09.509 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas3， ramp to 66sccm。
[Save Log Job] 2024-10-24 09:44:09.509 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas4， ramp to 76sccm。
[Save Log Job] 2024-10-24 09:44:09.509 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas5， ramp to 86sccm。
[Save Log Job] 2024-10-24 09:44:09.509 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPowerOnOff，Set RF power Off。
[Save Log Job] 2024-10-24 09:44:18.230 LOG.INFO UiEvent.cs Line:51 Event() - 手动操作 SetConfig(System_RfPowerAlarmRange, 20)
[Save Log Job] 2024-10-24 09:44:19.133 LOG.INFO UiEvent.cs Line:51 Event() - 手动操作 SetConfig(System_RfPowerAlarmRange, 20)
[Save Log Job] 2024-10-24 09:44:27.258 LOG.INFO UiEvent.cs Line:51 Event() - 手动操作 SetConfig(System_RfPowerAlarmTime, 10)
[Save Log Job] 2024-10-24 09:44:39.593 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241024094230-123' end step 3
[Save Log Job] 2024-10-24 09:44:39.593 LOG.INFO UiEvent.cs Line:51 Event() - Stop monitor pressure stability
[Save Log Job] 2024-10-24 09:44:39.594 LOG.INFO UiEvent.cs Line:51 Event() - System Recipe run completed，菜单文件：20241024094230-123
开始时间：2024/10/24 09:43:09
结束时间：2024/10/24 09:44:39
总时间：0:1:30
[Save Log Job] 2024-10-24 09:44:39.594 LOG.INFO UiEvent.cs Line:51 Event() - System 工艺运行结束
[Save Log Job] 2024-10-24 09:44:39.595 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, 等待10秒钟
[Save Log Job] 2024-10-24 09:44:41.606 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC1 ValveClose失败，原因：Valve keep open。
[Save Log Job] 2024-10-24 09:44:41.606 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC2 ValveClose失败，原因：Valve keep open。
[Save Log Job] 2024-10-24 09:44:44.320 LOG.INFO UiEvent.cs Line:51 Event() - 手动操作 AbortRecipe()
[Save Log Job] 2024-10-24 09:44:44.320 LOG.INFO UiEvent.cs Line:51 Event() - EventLotFinished
[Save Log Job] 2024-10-24 09:44:44.320 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-10-24 09:45:12.501 LOG.INFO UiEvent.cs Line:51 Event() - 手动操作 RunRecipe(123, )
[Save Log Job] 2024-10-24 09:45:12.502 LOG.INFO UiEvent.cs Line:51 Event() - EventLotStart
[Save Log Job] 2024-10-24 09:45:12.602 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：检查门的状态。
[Save Log Job] 2024-10-24 09:45:12.602 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：检查腔体门是否关闭。
[Save Log Job] 2024-10-24 09:45:12.602 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：检查背板门是否关闭。
[Save Log Job] 2024-10-24 09:45:12.602 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：检查泵的状态。
[Save Log Job] 2024-10-24 09:45:12.603 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：关闭所有阀门。
[Save Log Job] 2024-10-24 09:45:12.603 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：打开抽气阀门。
[Save Log Job] 2024-10-24 09:45:12.603 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-10-24 09:45:12.702 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：检查腔体压力。
[Save Log Job] 2024-10-24 09:45:19.730 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：抽气到100毫托。
[Save Log Job] 2024-10-24 09:45:19.831 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：PreProcess 操作完成，用时0.1分钟。
[Save Log Job] 2024-10-24 09:45:19.831 LOG.INFO UiEvent.cs Line:51 Event() - System complete run 'PreProcess'.
[Save Log Job] 2024-10-24 09:45:19.831 LOG.INFO UiEvent.cs Line:51 Event() - Run Recipe 20241024094512-123
[Save Log Job] 2024-10-24 09:45:19.832 LOG.INFO UiEvent.cs Line:51 Event() - System recipe start run'20241024094512-123'
[Save Log Job] 2024-10-24 09:45:19.832 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241024094512-123' start run step 1：initial。
[Save Log Job] 2024-10-24 09:45:19.833 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。
[Save Log Job] 2024-10-24 09:45:19.833 LOG.INFO UiEvent.cs Line:51 Event() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。
[Save Log Job] 2024-10-24 09:45:19.833 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。
[Save Log Job] 2024-10-24 09:45:19.835 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。
[Save Log Job] 2024-10-24 09:45:19.835 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。
[Save Log Job] 2024-10-24 09:45:19.835 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。
[Save Log Job] 2024-10-24 09:45:19.836 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。
[Save Log Job] 2024-10-24 09:45:19.836 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。
[Save Log Job] 2024-10-24 09:45:19.837 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPower，RF set Power:0。
[Save Log Job] 2024-10-24 09:45:19.840 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。
[Save Log Job] 2024-10-24 09:45:19.841 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。
[Save Log Job] 2024-10-24 09:45:19.841 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas4， ramp to 76sccm。
[Save Log Job] 2024-10-24 09:45:19.841 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas3， ramp to 66sccm。
[Save Log Job] 2024-10-24 09:45:19.841 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas5， ramp to 86sccm。
[Save Log Job] 2024-10-24 09:45:19.842 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas2， ramp to 56sccm。
[Save Log Job] 2024-10-24 09:45:19.842 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPowerOnOff，Set RF power Off。
[Save Log Job] 2024-10-24 09:45:19.862 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas1， ramp to 45sccm。
[Save Log Job] 2024-10-24 09:45:19.931 LOG.INFO UiEvent.cs Line:51 Event() - Start monitor pressure stability
[Save Log Job] 2024-10-24 09:45:50.021 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241024094512-123' end step 1
[Save Log Job] 2024-10-24 09:45:50.021 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241024094512-123' start run step 2：initial。
[Save Log Job] 2024-10-24 09:45:50.021 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。
[Save Log Job] 2024-10-24 09:45:50.021 LOG.INFO UiEvent.cs Line:51 Event() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。
[Save Log Job] 2024-10-24 09:45:50.022 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。
[Save Log Job] 2024-10-24 09:45:50.022 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。
[Save Log Job] 2024-10-24 09:45:50.023 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。
[Save Log Job] 2024-10-24 09:45:50.023 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。
[Save Log Job] 2024-10-24 09:45:50.023 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。
[Save Log Job] 2024-10-24 09:45:50.024 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPower，RF set Power:150。
[Save Log Job] 2024-10-24 09:45:50.025 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。
[Save Log Job] 2024-10-24 09:45:50.025 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。
[Save Log Job] 2024-10-24 09:45:50.025 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。
[Save Log Job] 2024-10-24 09:45:50.026 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas1， ramp to 45sccm。
[Save Log Job] 2024-10-24 09:45:50.026 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas2， ramp to 56sccm。
[Save Log Job] 2024-10-24 09:45:50.026 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas3， ramp to 66sccm。
[Save Log Job] 2024-10-24 09:45:50.027 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas4， ramp to 76sccm。
[Save Log Job] 2024-10-24 09:45:50.027 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas5， ramp to 86sccm。
[Save Log Job] 2024-10-24 09:45:50.028 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPowerOnOff，Set RF power On。
[Save Log Job] 2024-10-24 09:46:00.451 LOG.INFO UiEvent.cs Line:51 Event() - System RF GeneratorTolerance alarm：Forward power 54 out of range[130,170] in 10 seconds.
[Save Log Job] 2024-10-24 09:46:00.451 LOG.INFO UiEvent.cs Line:51 Event() - System recipe was aborted: 工艺终止运行
[Save Log Job] 2024-10-24 09:46:00.452 LOG.INFO UiEvent.cs Line:51 Event() - Stop monitor pressure stability
[Save Log Job] 2024-10-24 09:46:00.452 LOG.INFO UiEvent.cs Line:51 Event() - System Recipe run completed，菜单文件：20241024094512-123
开始时间：2024/10/24 09:45:19
结束时间：2024/10/24 09:46:00
总时间：0:0:40
[Save Log Job] 2024-10-24 09:46:00.452 LOG.INFO UiEvent.cs Line:51 Event() - System 工艺运行结束
[Save Log Job] 2024-10-24 09:46:00.554 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-10-24 09:46:02.457 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC1 ValveClose失败，原因：Valve keep open。
[Save Log Job] 2024-10-24 09:46:02.457 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC2 ValveClose失败，原因：Valve keep open。
[Save Log Job] 2024-10-24 09:46:02.457 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC3 ValveClose失败，原因：Valve keep open。
[Save Log Job] 2024-10-24 09:46:02.458 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC4 ValveClose失败，原因：Valve keep open。
[Save Log Job] 2024-10-24 10:08:11.987 LOG.INFO UiEvent.cs Line:51 Event() - 手动操作 SetConfig(System_Language, 1)
[Save Log Job] 2024-10-24 10:08:21.812 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetManualMode()
[Save Log Job] 2024-10-24 10:08:21.812 LOG.INFO UiEvent.cs Line:51 Event() - Chamber is in Error，can not do SetManualMode。
[Save Log Job] 2024-10-24 10:09:55.363 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetManualMode()
[Save Log Job] 2024-10-24 10:09:55.364 LOG.INFO UiEvent.cs Line:51 Event() - Chamber is in Error，can not do SetManualMode。
[Save Log Job] 2024-10-24 10:10:08.299 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetManualMode()
[Save Log Job] 2024-10-24 10:10:08.299 LOG.INFO UiEvent.cs Line:51 Event() - Chamber is in Error，can not do SetManualMode。
[Save Log Job] 2024-10-24 10:10:12.912 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-10-24 10:14:38.615 LOG.INFO UiEvent.cs Line:51 Event() - Operation RunRecipe(123, )
[Save Log Job] 2024-10-24 10:14:38.714 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check door status。
[Save Log Job] 2024-10-24 10:14:38.714 LOG.INFO UiEvent.cs Line:51 Event() - EventLotStart
[Save Log Job] 2024-10-24 10:14:38.714 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check chamber door。
[Save Log Job] 2024-10-24 10:14:38.715 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check backpanel door。
[Save Log Job] 2024-10-24 10:14:38.715 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check pump status。
[Save Log Job] 2024-10-24 10:14:38.715 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Close all the valves。
[Save Log Job] 2024-10-24 10:14:38.816 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Open pumping valve。
[Save Log Job] 2024-10-24 10:14:38.818 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check chamber pressure。
[Save Log Job] 2024-10-24 10:14:38.818 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-10-24 10:14:38.818 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Pump below 100mTorr。
[Save Log Job] 2024-10-24 10:14:46.711 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：PreProcess Finished in 0.0 minitues。
[Save Log Job] 2024-10-24 10:14:46.711 LOG.INFO UiEvent.cs Line:51 Event() - System complete run 'PreProcess'.
[Save Log Job] 2024-10-24 10:14:46.711 LOG.INFO UiEvent.cs Line:51 Event() - Run Recipe 20241024101438-123
[Save Log Job] 2024-10-24 10:14:46.712 LOG.INFO UiEvent.cs Line:51 Event() - System recipe start run'20241024101438-123'
[Save Log Job] 2024-10-24 10:14:51.194 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241024101438-123' start run step 1：initial。
[Save Log Job] 2024-10-24 10:14:51.195 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。
[Save Log Job] 2024-10-24 10:14:51.195 LOG.INFO UiEvent.cs Line:51 Event() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。
[Save Log Job] 2024-10-24 10:14:51.195 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。
[Save Log Job] 2024-10-24 10:14:51.196 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。
[Save Log Job] 2024-10-24 10:14:51.196 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。
[Save Log Job] 2024-10-24 10:14:51.196 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。
[Save Log Job] 2024-10-24 10:14:51.196 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。
[Save Log Job] 2024-10-24 10:15:09.329 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。
[Save Log Job] 2024-10-24 10:15:09.329 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPower，RF set Power:0。
[Save Log Job] 2024-10-24 10:15:09.329 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。
[Save Log Job] 2024-10-24 10:15:09.329 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas1， ramp to 45sccm。
[Save Log Job] 2024-10-24 10:15:09.329 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。
[Save Log Job] 2024-10-24 10:15:09.330 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas2， ramp to 56sccm。
[Save Log Job] 2024-10-24 10:15:09.330 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas3， ramp to 66sccm。
[Save Log Job] 2024-10-24 10:15:09.331 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas5， ramp to 86sccm。
[Save Log Job] 2024-10-24 10:15:09.331 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPowerOnOff，Set RF power Off。
[Save Log Job] 2024-10-24 10:15:09.331 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas4， ramp to 76sccm。
[Save Log Job] 2024-10-24 10:15:15.918 LOG.INFO UiEvent.cs Line:51 Event() - Start monitor pressure stability
[Save Log Job] 2024-10-24 10:15:19.119 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC1 ValveOpen失败，原因：Valve keep closed 。
[Save Log Job] 2024-10-24 10:15:19.640 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC2 ValveOpen失败，原因：Valve keep closed 。
[Save Log Job] 2024-10-24 10:15:24.296 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC3 ValveOpen失败，原因：Valve keep closed 。
[Save Log Job] 2024-10-24 10:15:24.296 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC4 ValveOpen失败，原因：Valve keep closed 。
[Save Log Job] 2024-10-24 10:15:24.296 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门Process gas final valveOpen失败，原因：Valve keep closed 。
[Save Log Job] 2024-10-24 10:16:23.259 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241024101438-123' end step 1
[Save Log Job] 2024-10-24 10:16:49.041 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241024101438-123' start run step 2：initial。
[Save Log Job] 2024-10-24 10:16:50.144 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。
[Save Log Job] 2024-10-24 10:16:51.818 LOG.INFO UiEvent.cs Line:51 Event() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。
[Save Log Job] 2024-10-24 10:16:52.939 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。
[Save Log Job] 2024-10-24 10:16:52.944 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。
[Save Log Job] 2024-10-24 10:16:54.306 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。
[Save Log Job] 2024-10-24 10:16:54.978 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。
[Save Log Job] 2024-10-24 10:16:54.979 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。
[Save Log Job] 2024-10-24 10:16:54.979 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPower，RF set Power:150。
[Save Log Job] 2024-10-24 10:16:54.979 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。
[Save Log Job] 2024-10-24 10:16:54.979 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。
[Save Log Job] 2024-10-24 10:16:54.980 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。
[Save Log Job] 2024-10-24 10:16:54.980 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas1， ramp to 45sccm。
[Save Log Job] 2024-10-24 10:16:54.981 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas2， ramp to 56sccm。
[Save Log Job] 2024-10-24 10:16:54.986 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas3， ramp to 66sccm。
[Save Log Job] 2024-10-24 10:16:56.168 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas4， ramp to 76sccm。
[Save Log Job] 2024-10-24 10:16:56.606 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas5， ramp to 86sccm。
[Save Log Job] 2024-10-24 10:16:56.609 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPowerOnOff，Set RF power On。
[Save Log Job] 2024-10-24 10:16:56.613 LOG.INFO UiEvent.cs Line:51 Event() - Alarm event:The RF generator is offline.
[Save Log Job] 2024-10-24 10:17:13.206 LOG.INFO UiEvent.cs Line:51 Event() - System recipe was aborted: user aborted recipe
[Save Log Job] 2024-10-24 10:17:14.539 LOG.INFO UiEvent.cs Line:51 Event() - System Recipe run completed，Recipe：20241024101438-123
Start time：2024/10/24 10:14:38
End time：2024/10/24 10:17:13
Total time：0:2:35
[Save Log Job] 2024-10-24 10:17:14.539 LOG.INFO UiEvent.cs Line:51 Event() - Stop monitor pressure stability
[Save Log Job] 2024-10-24 10:17:14.548 LOG.INFO UiEvent.cs Line:51 Event() - System Recipe completely run
[Save Log Job] 2024-10-24 10:17:15.760 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-10-24 10:17:15.760 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-10-24 10:17:20.334 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC1 ValveClose失败，原因：Valve keep open。
[Save Log Job] 2024-10-24 10:17:20.334 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC2 ValveClose失败，原因：Valve keep open。
[Save Log Job] 2024-10-24 10:17:33.446 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC3 ValveClose失败，原因：Valve keep open。
[Save Log Job] 2024-10-24 10:23:18.996 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-10-24 10:24:24.578 LOG.INFO UiEvent.cs Line:51 Event() - Operation RunRecipe(123, )
[Save Log Job] 2024-10-24 10:24:24.578 LOG.INFO UiEvent.cs Line:51 Event() - EventLotStart
[Save Log Job] 2024-10-24 10:24:24.679 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check door status。
[Save Log Job] 2024-10-24 10:24:24.679 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check chamber door。
[Save Log Job] 2024-10-24 10:24:24.680 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check backpanel door。
[Save Log Job] 2024-10-24 10:24:24.680 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check pump status。
[Save Log Job] 2024-10-24 10:24:24.680 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Close all the valves。
[Save Log Job] 2024-10-24 10:24:24.680 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Open pumping valve。
[Save Log Job] 2024-10-24 10:24:24.779 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check chamber pressure。
[Save Log Job] 2024-10-24 10:24:24.779 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-10-24 10:24:34.817 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Pump below 100mTorr。
[Save Log Job] 2024-10-24 10:24:34.817 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：PreProcess Finished in 0.2 minitues。
[Save Log Job] 2024-10-24 10:24:34.817 LOG.INFO UiEvent.cs Line:51 Event() - System complete run 'PreProcess'.
[Save Log Job] 2024-10-24 10:24:34.817 LOG.INFO UiEvent.cs Line:51 Event() - System recipe start run'20241024102424-123'
[Save Log Job] 2024-10-24 10:24:34.817 LOG.INFO UiEvent.cs Line:51 Event() - Run Recipe 20241024102424-123
[Save Log Job] 2024-10-24 10:24:34.917 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241024102424-123' start run step 1：initial。
[Save Log Job] 2024-10-24 10:24:34.917 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。
[Save Log Job] 2024-10-24 10:24:34.917 LOG.INFO UiEvent.cs Line:51 Event() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。
[Save Log Job] 2024-10-24 10:24:34.917 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。
[Save Log Job] 2024-10-24 10:24:34.918 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。
[Save Log Job] 2024-10-24 10:24:34.918 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。
[Save Log Job] 2024-10-24 10:24:34.918 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。
[Save Log Job] 2024-10-24 10:24:34.918 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。
[Save Log Job] 2024-10-24 10:24:34.918 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPower，RF set Power:0。
[Save Log Job] 2024-10-24 10:24:34.919 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。
[Save Log Job] 2024-10-24 10:24:34.919 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。
[Save Log Job] 2024-10-24 10:24:34.919 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。
[Save Log Job] 2024-10-24 10:24:34.919 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas1， ramp to 45sccm。
[Save Log Job] 2024-10-24 10:24:34.919 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas2， ramp to 56sccm。
[Save Log Job] 2024-10-24 10:24:34.919 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas3， ramp to 66sccm。
[Save Log Job] 2024-10-24 10:24:34.919 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas4， ramp to 76sccm。
[Save Log Job] 2024-10-24 10:24:34.920 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas5， ramp to 86sccm。
[Save Log Job] 2024-10-24 10:24:34.920 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPowerOnOff，Set RF power Off。
[Save Log Job] 2024-10-24 10:24:34.920 LOG.INFO UiEvent.cs Line:51 Event() - Start monitor pressure stability
[Save Log Job] 2024-10-24 10:25:05.006 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241024102424-123' start run step 2：initial。
[Save Log Job] 2024-10-24 10:25:05.006 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241024102424-123' end step 1
[Save Log Job] 2024-10-24 10:25:05.006 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。
[Save Log Job] 2024-10-24 10:25:05.006 LOG.INFO UiEvent.cs Line:51 Event() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。
[Save Log Job] 2024-10-24 10:25:05.007 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。
[Save Log Job] 2024-10-24 10:25:05.007 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。
[Save Log Job] 2024-10-24 10:25:05.007 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。
[Save Log Job] 2024-10-24 10:25:05.007 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。
[Save Log Job] 2024-10-24 10:25:05.007 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。
[Save Log Job] 2024-10-24 10:25:05.007 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPower，RF set Power:150。
[Save Log Job] 2024-10-24 10:25:05.009 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。
[Save Log Job] 2024-10-24 10:25:05.010 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。
[Save Log Job] 2024-10-24 10:25:05.010 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。
[Save Log Job] 2024-10-24 10:25:05.012 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas2， ramp to 56sccm。
[Save Log Job] 2024-10-24 10:25:05.012 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas3， ramp to 66sccm。
[Save Log Job] 2024-10-24 10:25:05.012 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas1， ramp to 45sccm。
[Save Log Job] 2024-10-24 10:25:05.012 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas5， ramp to 86sccm。
[Save Log Job] 2024-10-24 10:25:05.012 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas4， ramp to 76sccm。
[Save Log Job] 2024-10-24 10:25:05.012 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPowerOnOff，Set RF power On。
[Save Log Job] 2024-10-24 10:25:15.433 LOG.INFO UiEvent.cs Line:51 Event() - System RF GeneratorTolerance alarm：Forward power 54 out of range[130,170] in 10 seconds.
[Save Log Job] 2024-10-24 10:25:15.433 LOG.INFO UiEvent.cs Line:51 Event() - System recipe was aborted: user aborted recipe
[Save Log Job] 2024-10-24 10:25:15.433 LOG.INFO UiEvent.cs Line:51 Event() - Stop monitor pressure stability
[Save Log Job] 2024-10-24 10:25:15.433 LOG.INFO UiEvent.cs Line:51 Event() - System Recipe run completed，Recipe：20241024102424-123
Start time：2024/10/24 10:24:34
End time：2024/10/24 10:25:15
Total time：0:0:40
[Save Log Job] 2024-10-24 10:25:15.433 LOG.INFO UiEvent.cs Line:51 Event() - System Recipe completely run
[Save Log Job] 2024-10-24 10:25:15.533 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-10-24 10:25:17.437 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC2 ValveClose失败，原因：Valve keep open。
[Save Log Job] 2024-10-24 10:25:17.437 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC1 ValveClose失败，原因：Valve keep open。
[Save Log Job] 2024-10-24 10:25:17.437 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC3 ValveClose失败，原因：Valve keep open。
[Save Log Job] 2024-10-24 10:25:17.438 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC4 ValveClose失败，原因：Valve keep open。
[Save Log Job] 2024-10-24 11:12:59.866 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-10-24 11:13:08.890 LOG.INFO UiEvent.cs Line:51 Event() - Operation RunRecipe(123, )
[Save Log Job] 2024-10-24 11:13:08.890 LOG.INFO UiEvent.cs Line:51 Event() - EventLotStart
[Save Log Job] 2024-10-24 11:13:08.989 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check door status。
[Save Log Job] 2024-10-24 11:13:08.989 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check chamber door。
[Save Log Job] 2024-10-24 11:13:08.990 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check backpanel door。
[Save Log Job] 2024-10-24 11:13:08.990 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check pump status。
[Save Log Job] 2024-10-24 11:13:08.990 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Close all the valves。
[Save Log Job] 2024-10-24 11:13:08.992 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Open pumping valve。
[Save Log Job] 2024-10-24 11:13:09.092 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-10-24 11:13:09.092 LOG.INFO UiEvent.cs Line:51 Event() - System complete run 'PreProcess'.
[Save Log Job] 2024-10-24 11:13:09.093 LOG.INFO UiEvent.cs Line:51 Event() - Run Recipe 20241024111308-123
[Save Log Job] 2024-10-24 11:13:09.093 LOG.INFO UiEvent.cs Line:51 Event() - System recipe start run'20241024111308-123'
[Save Log Job] 2024-10-24 11:13:09.114 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Pump below 100mTorr。
[Save Log Job] 2024-10-24 11:13:09.114 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：PreProcess Finished in 0.0 minitues。
[Save Log Job] 2024-10-24 11:13:09.114 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check chamber pressure。
[Save Log Job] 2024-10-24 11:13:09.191 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241024111308-123' start run step 1：initial。
[Save Log Job] 2024-10-24 11:13:09.191 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。
[Save Log Job] 2024-10-24 11:13:09.191 LOG.INFO UiEvent.cs Line:51 Event() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。
[Save Log Job] 2024-10-24 11:13:09.191 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。
[Save Log Job] 2024-10-24 11:13:09.191 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。
[Save Log Job] 2024-10-24 11:13:09.191 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。
[Save Log Job] 2024-10-24 11:13:09.191 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。
[Save Log Job] 2024-10-24 11:13:09.192 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。
[Save Log Job] 2024-10-24 11:13:09.192 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPower，RF set Power:0。
[Save Log Job] 2024-10-24 11:13:09.192 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。
[Save Log Job] 2024-10-24 11:13:09.192 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。
[Save Log Job] 2024-10-24 11:13:09.192 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。
[Save Log Job] 2024-10-24 11:13:09.193 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas1， ramp to 45sccm。
[Save Log Job] 2024-10-24 11:13:09.193 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas2， ramp to 56sccm。
[Save Log Job] 2024-10-24 11:13:09.193 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas3， ramp to 66sccm。
[Save Log Job] 2024-10-24 11:13:09.193 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas4， ramp to 76sccm。
[Save Log Job] 2024-10-24 11:13:09.193 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas5， ramp to 86sccm。
[Save Log Job] 2024-10-24 11:13:09.194 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPowerOnOff，Set RF power Off。
[Save Log Job] 2024-10-24 11:13:09.194 LOG.INFO UiEvent.cs Line:51 Event() - Start monitor pressure stability
[Save Log Job] 2024-10-24 11:13:39.271 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241024111308-123' start run step 2：initial。
[Save Log Job] 2024-10-24 11:13:39.271 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241024111308-123' end step 1
[Save Log Job] 2024-10-24 11:13:39.271 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。
[Save Log Job] 2024-10-24 11:13:39.273 LOG.INFO UiEvent.cs Line:51 Event() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。
[Save Log Job] 2024-10-24 11:13:39.273 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。
[Save Log Job] 2024-10-24 11:13:39.273 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。
[Save Log Job] 2024-10-24 11:13:39.273 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。
[Save Log Job] 2024-10-24 11:13:39.274 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。
[Save Log Job] 2024-10-24 11:13:39.274 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。
[Save Log Job] 2024-10-24 11:13:39.274 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPower，RF set Power:150。
[Save Log Job] 2024-10-24 11:13:39.274 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。
[Save Log Job] 2024-10-24 11:13:39.274 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。
[Save Log Job] 2024-10-24 11:13:39.274 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。
[Save Log Job] 2024-10-24 11:13:39.274 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas1， ramp to 45sccm。
[Save Log Job] 2024-10-24 11:13:39.274 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas2， ramp to 56sccm。
[Save Log Job] 2024-10-24 11:13:39.277 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas3， ramp to 66sccm。
[Save Log Job] 2024-10-24 11:13:39.277 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas4， ramp to 76sccm。
[Save Log Job] 2024-10-24 11:13:39.277 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas5， ramp to 86sccm。
[Save Log Job] 2024-10-24 11:13:39.277 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPowerOnOff，Set RF power On。
[Save Log Job] 2024-10-24 11:45:05.044 LOG.INFO UiEvent.cs Line:51 Event() - System RF GeneratorTolerance alarm：Forward power 54 out of range[130,170] in 10 seconds.
[Save Log Job] 2024-10-24 11:45:05.044 LOG.INFO UiEvent.cs Line:51 Event() - System recipe was aborted: user aborted recipe
[Save Log Job] 2024-10-24 11:45:05.069 LOG.INFO UiEvent.cs Line:51 Event() - Stop monitor pressure stability
[Save Log Job] 2024-10-24 11:45:05.069 LOG.INFO UiEvent.cs Line:51 Event() - System Recipe run completed，Recipe：20241024111308-123
Start time：2024/10/24 11:13:09
End time：2024/10/24 11:31:50
Total time：0:18:41
[Save Log Job] 2024-10-24 11:45:05.069 LOG.INFO UiEvent.cs Line:51 Event() - System Recipe completely run
[Save Log Job] 2024-10-24 11:45:05.069 LOG.INFO UiEvent.cs Line:51 Event() - System PLC heart beat check failed，please confirm PLC still running
[Save Log Job] 2024-10-24 11:45:05.093 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-10-24 11:45:05.093 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-10-24 11:45:07.606 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC1 ValveClose失败，原因：Valve keep open。
[Save Log Job] 2024-10-24 11:45:07.607 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC2 ValveClose失败，原因：Valve keep open。
[Save Log Job] 2024-10-24 11:45:08.021 LOG.ERROR ServiceClientWrapper.cs Line:113 Do() - QueryDataService 服务异常
System.ServiceModel.CommunicationException: 服务器未提供有意义的回复；这可能是由协定不匹配、会话过早关闭或内部服务器错误引起的。

Server stack trace: 
   在 System.ServiceModel.Channels.ServiceChannel.Call(String action, Boolean oneway, ProxyOperationRuntime operation, Object[] ins, Object[] outs, TimeSpan timeout)
   在 System.ServiceModel.Channels.ServiceChannelProxy.InvokeService(IMethodCallMessage methodCall, ProxyOperationRuntime operation)
   在 System.ServiceModel.Channels.ServiceChannelProxy.Invoke(IMessage message)

Exception rethrown at [0]: 
   在 System.Runtime.Remoting.Proxies.RealProxy.HandleReturnMessage(IMessage reqMsg, IMessage retMsg)
   在 System.Runtime.Remoting.Proxies.RealProxy.PrivateInvoke(MessageData& msgData, Int32 type)
   在 Aitex.Triton160.Common.Interface.IQueryDataService.PollConfig(IEnumerable`1 keys)
   在 Aitex.Triton160.UI.WCF.QueryDataServiceClient.<>c__DisplayClass3_0.<PollConfig>b__0(IQueryDataService svc) 位置 D:\jet.plasma\trunk\Triton160\Triton160UI\Wcf\QueryDataServiceClient.cs:行号 36
   在 Aitex.Core.WCF.ServiceClientWrapper`1.Do(Action`1 action) 位置 D:\jet.plasma\trunk\Triton160\Common\Core\WCF\ServiceClientWrapper.cs:行号 82
[Save Log Job] 2024-10-24 11:45:08.552 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC3 ValveClose失败，原因：Valve keep open。
[Save Log Job] 2024-10-24 11:45:08.729 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC4 ValveClose失败，原因：Valve keep open。
[Save Log Job] 2024-10-24 11:45:08.733 LOG.INFO ServiceClientWrapper.cs Line:87 Do() - QueryDataService 服务恢复
[Save Log Job] 2024-10-24 11:45:08.741 LOG.ERROR SubscriptionViewModelBase.cs Line:96 Poll() - 获取RT数据失败
[Save Log Job] 2024-10-24 11:45:13.843 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-10-24 11:46:07.726 LOG.INFO UiEvent.cs Line:51 Event() - Operation RunRecipe(123, )
[Save Log Job] 2024-10-24 11:47:02.986 LOG.INFO UiEvent.cs Line:51 Event() - EventLotStart
[Save Log Job] 2024-10-24 11:47:03.502 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-10-24 11:47:03.504 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-10-24 11:47:03.505 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check door status。
[Save Log Job] 2024-10-24 11:47:03.509 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check chamber door。
[Save Log Job] 2024-10-24 11:47:04.104 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check backpanel door。
[Save Log Job] 2024-10-24 11:47:04.107 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check pump status。
[Save Log Job] 2024-10-24 11:47:04.682 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Close all the valves。
[Save Log Job] 2024-10-24 11:47:05.141 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Open pumping valve。
[Save Log Job] 2024-10-24 11:47:05.142 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check chamber pressure。
[Save Log Job] 2024-10-24 11:47:05.705 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Pump below 100mTorr。
[Save Log Job] 2024-10-24 11:47:06.122 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：PreProcess Finished in 0.2 minitues。
[Save Log Job] 2024-10-24 11:47:06.643 LOG.INFO UiEvent.cs Line:51 Event() - Run Recipe 20241024114654-123
[Save Log Job] 2024-10-24 11:47:06.643 LOG.INFO UiEvent.cs Line:51 Event() - System complete run 'PreProcess'.
[Save Log Job] 2024-10-24 11:47:06.645 LOG.INFO UiEvent.cs Line:51 Event() - System recipe start run'20241024114654-123'
[Save Log Job] 2024-10-24 11:47:07.158 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241024114654-123' start run step 1：initial。
[Save Log Job] 2024-10-24 11:47:07.669 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。
[Save Log Job] 2024-10-24 11:47:08.157 LOG.INFO UiEvent.cs Line:51 Event() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。
[Save Log Job] 2024-10-24 11:47:08.158 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。
[Save Log Job] 2024-10-24 11:47:08.637 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。
[Save Log Job] 2024-10-24 11:47:08.640 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。
[Save Log Job] 2024-10-24 11:47:09.239 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。
[Save Log Job] 2024-10-24 11:47:09.793 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。
[Save Log Job] 2024-10-24 11:47:10.460 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPower，RF set Power:0。
[Save Log Job] 2024-10-24 11:47:10.460 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。
[Save Log Job] 2024-10-24 11:47:10.656 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。
[Save Log Job] 2024-10-24 11:47:11.138 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。
[Save Log Job] 2024-10-24 11:47:11.718 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas1， ramp to 45sccm。
[Save Log Job] 2024-10-24 11:47:11.720 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas2， ramp to 56sccm。
[Save Log Job] 2024-10-24 11:47:12.245 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas3， ramp to 66sccm。
[Save Log Job] 2024-10-24 11:47:12.760 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas4， ramp to 76sccm。
[Save Log Job] 2024-10-24 11:47:13.519 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas5， ramp to 86sccm。
[Save Log Job] 2024-10-24 11:47:14.220 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPowerOnOff，Set RF power Off。
[Save Log Job] 2024-10-24 11:47:14.222 LOG.INFO UiEvent.cs Line:51 Event() - Start monitor pressure stability
[Save Log Job] 2024-10-24 11:47:59.414 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241024114654-123' end step 1
[Save Log Job] 2024-10-24 11:48:00.812 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241024114654-123' start run step 2：initial。
[Save Log Job] 2024-10-24 11:48:01.487 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。
[Save Log Job] 2024-10-24 11:48:02.088 LOG.INFO UiEvent.cs Line:51 Event() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。
[Save Log Job] 2024-10-24 11:48:03.678 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。
[Save Log Job] 2024-10-24 11:48:05.417 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。
[Save Log Job] 2024-10-24 11:48:06.298 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。
[Save Log Job] 2024-10-24 11:48:16.141 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。
[Save Log Job] 2024-10-24 11:48:16.686 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。
[Save Log Job] 2024-10-24 11:48:17.227 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPower，RF set Power:150。
[Save Log Job] 2024-10-24 11:48:17.229 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。
[Save Log Job] 2024-10-24 11:48:17.745 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。
[Save Log Job] 2024-10-24 11:48:19.018 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。
[Save Log Job] 2024-10-24 11:48:19.021 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas1， ramp to 45sccm。
[Save Log Job] 2024-10-24 11:48:19.530 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas2， ramp to 56sccm。
[Save Log Job] 2024-10-24 11:48:20.146 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas3， ramp to 66sccm。
[Save Log Job] 2024-10-24 11:48:33.520 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas4， ramp to 76sccm。
[Save Log Job] 2024-10-24 11:48:37.061 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas5， ramp to 86sccm。
[Save Log Job] 2024-10-24 11:48:41.460 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPowerOnOff，Set RF power On。
[Save Log Job] 2024-10-24 11:48:42.321 LOG.INFO UiEvent.cs Line:51 Event() - System recipe was aborted: user aborted recipe
[Save Log Job] 2024-10-24 11:48:42.321 LOG.INFO UiEvent.cs Line:51 Event() - Alarm event:The RF generator is offline.
[Save Log Job] 2024-10-24 11:48:42.840 LOG.INFO UiEvent.cs Line:51 Event() - Stop monitor pressure stability
[Save Log Job] 2024-10-24 11:48:43.258 LOG.INFO UiEvent.cs Line:51 Event() - System Recipe run completed，Recipe：20241024114654-123
Start time：2024/10/24 11:47:06
End time：2024/10/24 11:48:42
Total time：0:1:36
[Save Log Job] 2024-10-24 11:48:43.259 LOG.INFO UiEvent.cs Line:51 Event() - System Recipe completely run
[Save Log Job] 2024-10-24 11:48:43.307 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-10-24 11:49:00.979 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC1 ValveClose失败，原因：Valve keep open。
[Save Log Job] 2024-10-24 11:49:13.645 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC2 ValveClose失败，原因：Valve keep open。
[Save Log Job] 2024-10-24 11:49:14.255 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC3 ValveClose失败，原因：Valve keep open。
[Save Log Job] 2024-10-24 11:49:19.171 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC5 ValveClose失败，原因：Valve keep open。
[Save Log Job] 2024-10-24 11:55:18.341 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-10-24 11:55:43.309 LOG.INFO UiEvent.cs Line:51 Event() - Operation RunRecipe(123, )
[Save Log Job] 2024-10-24 11:55:43.309 LOG.INFO UiEvent.cs Line:51 Event() - EventLotStart
[Save Log Job] 2024-10-24 11:55:43.409 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check chamber door。
[Save Log Job] 2024-10-24 11:55:43.409 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check door status。
[Save Log Job] 2024-10-24 11:55:43.409 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check backpanel door。
[Save Log Job] 2024-10-24 11:55:43.409 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check pump status。
[Save Log Job] 2024-10-24 11:55:43.409 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Close all the valves。
[Save Log Job] 2024-10-24 11:55:43.410 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-10-24 11:55:43.509 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check chamber pressure。
[Save Log Job] 2024-10-24 11:55:43.509 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Open pumping valve。
[Save Log Job] 2024-10-24 11:55:44.111 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Pump below 100mTorr。
[Save Log Job] 2024-10-24 11:55:44.111 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：PreProcess Finished in 0.0 minitues。
[Save Log Job] 2024-10-24 11:55:44.111 LOG.INFO UiEvent.cs Line:51 Event() - System complete run 'PreProcess'.
[Save Log Job] 2024-10-24 11:55:44.111 LOG.INFO UiEvent.cs Line:51 Event() - Run Recipe 20241024115543-123
[Save Log Job] 2024-10-24 11:55:44.111 LOG.INFO UiEvent.cs Line:51 Event() - System recipe start run'20241024115543-123'
[Save Log Job] 2024-10-24 11:55:44.212 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241024115543-123' start run step 1：initial。
[Save Log Job] 2024-10-24 11:55:44.212 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。
[Save Log Job] 2024-10-24 11:55:44.212 LOG.INFO UiEvent.cs Line:51 Event() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。
[Save Log Job] 2024-10-24 11:55:44.212 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。
[Save Log Job] 2024-10-24 11:55:44.212 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。
[Save Log Job] 2024-10-24 11:55:44.213 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。
[Save Log Job] 2024-10-24 11:55:44.213 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。
[Save Log Job] 2024-10-24 11:55:44.213 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。
[Save Log Job] 2024-10-24 11:55:44.213 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPower，RF set Power:0。
[Save Log Job] 2024-10-24 11:55:44.213 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。
[Save Log Job] 2024-10-24 11:55:44.213 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。
[Save Log Job] 2024-10-24 11:55:44.214 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。
[Save Log Job] 2024-10-24 11:55:44.214 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas1， ramp to 45sccm。
[Save Log Job] 2024-10-24 11:55:44.214 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas2， ramp to 56sccm。
[Save Log Job] 2024-10-24 11:55:44.214 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas3， ramp to 66sccm。
[Save Log Job] 2024-10-24 11:55:44.214 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas4， ramp to 76sccm。
[Save Log Job] 2024-10-24 11:55:44.214 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas5， ramp to 86sccm。
[Save Log Job] 2024-10-24 11:55:44.215 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPowerOnOff，Set RF power Off。
[Save Log Job] 2024-10-24 11:55:44.215 LOG.INFO UiEvent.cs Line:51 Event() - Start monitor pressure stability
[Save Log Job] 2024-10-24 11:56:14.294 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241024115543-123' end step 1
[Save Log Job] 2024-10-24 11:56:14.294 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241024115543-123' start run step 2：initial。
[Save Log Job] 2024-10-24 11:56:14.294 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。
[Save Log Job] 2024-10-24 11:56:14.294 LOG.INFO UiEvent.cs Line:51 Event() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。
[Save Log Job] 2024-10-24 11:56:14.294 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。
[Save Log Job] 2024-10-24 11:56:14.294 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。
[Save Log Job] 2024-10-24 11:56:14.294 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。
[Save Log Job] 2024-10-24 11:56:14.295 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。
[Save Log Job] 2024-10-24 11:56:14.295 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。
[Save Log Job] 2024-10-24 11:56:14.295 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPower，RF set Power:150。
[Save Log Job] 2024-10-24 11:56:14.295 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。
[Save Log Job] 2024-10-24 11:56:14.295 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。
[Save Log Job] 2024-10-24 11:56:14.295 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas1， ramp to 45sccm。
[Save Log Job] 2024-10-24 11:56:14.295 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas2， ramp to 56sccm。
[Save Log Job] 2024-10-24 11:56:14.295 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas3， ramp to 66sccm。
[Save Log Job] 2024-10-24 11:56:14.295 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas4， ramp to 76sccm。
[Save Log Job] 2024-10-24 11:56:14.295 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas5， ramp to 86sccm。
[Save Log Job] 2024-10-24 11:56:14.297 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。
[Save Log Job] 2024-10-24 11:56:14.297 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPowerOnOff，Set RF power On。
[Save Log Job] 2024-10-24 11:58:35.487 LOG.INFO UiEvent.cs Line:51 Event() - Stop monitor pressure stability
[Save Log Job] 2024-10-24 11:58:35.487 LOG.INFO UiEvent.cs Line:51 Event() - System RF GeneratorTolerance alarm：Forward power 54 out of range[130,170] in 10 seconds.
[Save Log Job] 2024-10-24 11:58:35.487 LOG.INFO UiEvent.cs Line:51 Event() - System recipe was aborted: user aborted recipe
[Save Log Job] 2024-10-24 11:58:35.487 LOG.INFO UiEvent.cs Line:51 Event() - System Recipe run completed，Recipe：20241024115543-123
Start time：2024/10/24 11:55:44
End time：2024/10/24 11:58:35
Total time：0:2:51
[Save Log Job] 2024-10-24 11:58:35.487 LOG.INFO UiEvent.cs Line:51 Event() - System Recipe completely run
[Save Log Job] 2024-10-24 12:10:19.340 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-10-24 12:10:19.341 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-10-24 12:10:19.341 LOG.INFO UiEvent.cs Line:51 Event() - System PLC heart beat check failed，please confirm PLC still running
[Save Log Job] 2024-10-24 12:10:19.341 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC1 ValveClose失败，原因：Valve keep open。
[Save Log Job] 2024-10-24 12:10:19.347 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC3 ValveClose失败，原因：Valve keep open。
[Save Log Job] 2024-10-24 12:10:19.347 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC2 ValveClose失败，原因：Valve keep open。
[Save Log Job] 2024-10-24 12:10:19.347 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC4 ValveClose失败，原因：Valve keep open。
[Save Log Job] 2024-10-24 12:10:19.347 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC5 ValveClose失败，原因：Valve keep open。
[Save Log Job] 2024-10-24 12:10:19.348 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门Process gas final valveClose失败，原因：Valve keep open。
[Save Log Job] 2024-10-24 12:10:38.864 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-10-24 12:10:40.870 LOG.INFO UiEvent.cs Line:51 Event() - Operation RunRecipe(123, )
[Save Log Job] 2024-10-24 12:10:40.870 LOG.INFO UiEvent.cs Line:51 Event() - EventLotStart
[Save Log Job] 2024-10-24 12:10:40.870 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check door status。
[Save Log Job] 2024-10-24 12:10:40.870 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check chamber door。
[Save Log Job] 2024-10-24 12:10:40.870 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check backpanel door。
[Save Log Job] 2024-10-24 12:10:40.870 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check pump status。
[Save Log Job] 2024-10-24 12:10:40.871 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Close all the valves。
[Save Log Job] 2024-10-24 12:10:40.975 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Open pumping valve。
[Save Log Job] 2024-10-24 12:10:40.975 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check chamber pressure。
[Save Log Job] 2024-10-24 12:10:41.073 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-10-24 12:10:43.085 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Pump below 100mTorr。
[Save Log Job] 2024-10-24 12:10:43.184 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：PreProcess Finished in 0.0 minitues。
[Save Log Job] 2024-10-24 12:10:43.184 LOG.INFO UiEvent.cs Line:51 Event() - System complete run 'PreProcess'.
[Save Log Job] 2024-10-24 12:10:43.184 LOG.INFO UiEvent.cs Line:51 Event() - Run Recipe 20241024121040-123
[Save Log Job] 2024-10-24 12:10:43.184 LOG.INFO UiEvent.cs Line:51 Event() - System recipe start run'20241024121040-123'
[Save Log Job] 2024-10-24 12:10:43.284 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。
[Save Log Job] 2024-10-24 12:10:43.284 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241024121040-123' start run step 1：initial。
[Save Log Job] 2024-10-24 12:10:43.284 LOG.INFO UiEvent.cs Line:51 Event() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。
[Save Log Job] 2024-10-24 12:10:43.286 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。
[Save Log Job] 2024-10-24 12:10:43.287 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。
[Save Log Job] 2024-10-24 12:10:43.287 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。
[Save Log Job] 2024-10-24 12:10:43.287 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。
[Save Log Job] 2024-10-24 12:10:43.287 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。
[Save Log Job] 2024-10-24 12:10:43.287 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPower，RF set Power:0。
[Save Log Job] 2024-10-24 12:10:43.287 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。
[Save Log Job] 2024-10-24 12:10:43.287 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas2， ramp to 56sccm。
[Save Log Job] 2024-10-24 12:10:43.287 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。
[Save Log Job] 2024-10-24 12:10:43.287 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas3， ramp to 66sccm。
[Save Log Job] 2024-10-24 12:10:43.287 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas5， ramp to 86sccm。
[Save Log Job] 2024-10-24 12:10:43.287 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。
[Save Log Job] 2024-10-24 12:10:43.287 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPowerOnOff，Set RF power Off。
[Save Log Job] 2024-10-24 12:10:43.287 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas4， ramp to 76sccm。
[Save Log Job] 2024-10-24 12:10:43.287 LOG.INFO UiEvent.cs Line:51 Event() - Start monitor pressure stability
[Save Log Job] 2024-10-24 12:10:43.287 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas1， ramp to 45sccm。
[Save Log Job] 2024-10-24 12:11:13.362 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241024121040-123' end step 1
[Save Log Job] 2024-10-24 12:11:13.362 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241024121040-123' start run step 2：initial。
[Save Log Job] 2024-10-24 12:11:13.363 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。
[Save Log Job] 2024-10-24 12:11:13.363 LOG.INFO UiEvent.cs Line:51 Event() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。
[Save Log Job] 2024-10-24 12:11:13.363 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。
[Save Log Job] 2024-10-24 12:11:13.363 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。
[Save Log Job] 2024-10-24 12:11:13.364 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。
[Save Log Job] 2024-10-24 12:11:13.364 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。
[Save Log Job] 2024-10-24 12:11:13.364 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。
[Save Log Job] 2024-10-24 12:11:13.364 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPower，RF set Power:150。
[Save Log Job] 2024-10-24 12:11:13.364 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。
[Save Log Job] 2024-10-24 12:11:13.364 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。
[Save Log Job] 2024-10-24 12:11:13.365 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。
[Save Log Job] 2024-10-24 12:11:13.365 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas1， ramp to 45sccm。
[Save Log Job] 2024-10-24 12:11:13.365 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas2， ramp to 56sccm。
[Save Log Job] 2024-10-24 12:11:13.365 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas3， ramp to 66sccm。
[Save Log Job] 2024-10-24 12:11:13.365 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas4， ramp to 76sccm。
[Save Log Job] 2024-10-24 12:11:13.365 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas5， ramp to 86sccm。
[Save Log Job] 2024-10-24 12:11:13.366 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPowerOnOff，Set RF power On。
[Save Log Job] 2024-10-24 12:12:20.554 LOG.INFO UiEvent.cs Line:51 Event() - System RF GeneratorTolerance alarm：Forward power 54 out of range[130,170] in 10 seconds.
--------------------------------[Header Log]----------------------------------------- [Save Log Job] 2024-10-24 13:35:23.364 LOG.INFO UiEvent.cs Line:58 Event() - 已经连接上设备实时控制系统
[Save Log Job] 2024-10-24 13:35:23.366 LOG.INFO UiEvent.cs Line:57 Event() - 已经连接上设备实时控制系统
[Save Log Job] 2024-10-24 13:35:24.699 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-10-24 13:35:28.352 LOG.INFO UiEvent.cs Line:51 Event() - Software will be expired in 0 days, at 10/24/2024 12:00:00 AM 。
[Save Log Job] 2024-10-24 13:35:44.215 LOG.INFO UiEvent.cs Line:51 Event() - User admin login
[Save Log Job] 2024-10-24 13:36:20.629 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetAutoMode()
[Save Log Job] 2024-10-24 13:36:20.629 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentModeChanged
[Save Log Job] 2024-10-24 13:36:20.629 LOG.INFO UiEvent.cs Line:51 Event() - System running mode changed to Auto Mode
[Save Log Job] 2024-10-24 13:36:50.024 LOG.INFO UiEvent.cs Line:51 Event() - Operation RunRecipe(123, )
[Save Log Job] 2024-10-24 13:36:50.124 LOG.INFO UiEvent.cs Line:51 Event() - EventLotStart
[Save Log Job] 2024-10-24 13:36:50.124 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check door status。
[Save Log Job] 2024-10-24 13:36:50.124 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check chamber door。
[Save Log Job] 2024-10-24 13:36:50.125 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check backpanel door。
[Save Log Job] 2024-10-24 13:36:50.125 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check pump status。
[Save Log Job] 2024-10-24 13:36:50.126 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Close all the valves。
[Save Log Job] 2024-10-24 13:36:50.225 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Open pumping valve。
[Save Log Job] 2024-10-24 13:36:50.325 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-10-24 13:36:52.232 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门Chamber pumping valveOpen失败，原因：Valve keep closed 。
[Save Log Job] 2024-10-24 13:36:54.340 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check chamber pressure。
[Save Log Job] 2024-10-24 13:37:33.128 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Pump below 100mTorr。
[Save Log Job] 2024-10-24 13:37:33.128 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：PreProcess Finished in 0.7 minitues。
[Save Log Job] 2024-10-24 13:37:33.128 LOG.INFO UiEvent.cs Line:51 Event() - System complete run 'PreProcess'.
[Save Log Job] 2024-10-24 13:37:33.129 LOG.INFO UiEvent.cs Line:51 Event() - Run Recipe 20241024133650-123
[Save Log Job] 2024-10-24 13:37:33.129 LOG.INFO UiEvent.cs Line:51 Event() - System recipe start run'20241024133650-123'
[Save Log Job] 2024-10-24 13:37:33.228 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241024133650-123' start run step 1：initial。
[Save Log Job] 2024-10-24 13:37:33.229 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。
[Save Log Job] 2024-10-24 13:37:33.229 LOG.INFO UiEvent.cs Line:51 Event() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。
[Save Log Job] 2024-10-24 13:37:33.229 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。
[Save Log Job] 2024-10-24 13:37:33.230 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。
[Save Log Job] 2024-10-24 13:37:33.230 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。
[Save Log Job] 2024-10-24 13:37:33.230 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。
[Save Log Job] 2024-10-24 13:37:33.231 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。
[Save Log Job] 2024-10-24 13:37:33.231 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPower，RF set Power:0。
[Save Log Job] 2024-10-24 13:37:33.232 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。
[Save Log Job] 2024-10-24 13:37:33.232 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。
[Save Log Job] 2024-10-24 13:37:33.232 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。
[Save Log Job] 2024-10-24 13:37:33.233 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas1， ramp to 45sccm。
[Save Log Job] 2024-10-24 13:37:33.233 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas2， ramp to 56sccm。
[Save Log Job] 2024-10-24 13:37:33.233 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas3， ramp to 66sccm。
[Save Log Job] 2024-10-24 13:37:33.233 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas4， ramp to 76sccm。
[Save Log Job] 2024-10-24 13:37:33.234 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas5， ramp to 86sccm。
[Save Log Job] 2024-10-24 13:37:33.234 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPowerOnOff，Set RF power Off。
[Save Log Job] 2024-10-24 13:37:33.234 LOG.INFO UiEvent.cs Line:51 Event() - Start monitor pressure stability
[Save Log Job] 2024-10-24 13:38:03.324 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241024133650-123' end step 1
[Save Log Job] 2024-10-24 13:38:03.324 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241024133650-123' start run step 2：initial。
[Save Log Job] 2024-10-24 13:38:03.325 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。
[Save Log Job] 2024-10-24 13:38:03.325 LOG.INFO UiEvent.cs Line:51 Event() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。
[Save Log Job] 2024-10-24 13:38:03.325 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。
[Save Log Job] 2024-10-24 13:38:03.327 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。
[Save Log Job] 2024-10-24 13:38:03.328 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。
[Save Log Job] 2024-10-24 13:38:03.328 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。
[Save Log Job] 2024-10-24 13:38:03.328 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。
[Save Log Job] 2024-10-24 13:38:03.328 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPower，RF set Power:150。
[Save Log Job] 2024-10-24 13:38:03.328 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。
[Save Log Job] 2024-10-24 13:38:03.330 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。
[Save Log Job] 2024-10-24 13:38:03.330 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。
[Save Log Job] 2024-10-24 13:38:03.330 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas1， ramp to 45sccm。
[Save Log Job] 2024-10-24 13:38:03.336 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas4， ramp to 76sccm。
[Save Log Job] 2024-10-24 13:38:03.336 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas2， ramp to 56sccm。
[Save Log Job] 2024-10-24 13:38:03.336 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas5， ramp to 86sccm。
[Save Log Job] 2024-10-24 13:38:03.337 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPowerOnOff，Set RF power On。
[Save Log Job] 2024-10-24 13:38:03.337 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas3， ramp to 66sccm。
[Save Log Job] 2024-10-24 13:38:21.325 LOG.INFO UiEvent.cs Line:51 Event() - System RF GeneratorTolerance alarm：Forward power 54 out of range[130,170] in 10 seconds.
[Save Log Job] 2024-10-24 13:39:31.209 LOG.INFO UiEvent.cs Line:51 Event() - System recipe was aborted: user aborted recipe
[Save Log Job] 2024-10-24 13:39:31.213 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC1 ValveClose失败，原因：Valve keep open。
[Save Log Job] 2024-10-24 13:39:32.007 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC2 ValveClose失败，原因：Valve keep open。
[Save Log Job] 2024-10-24 13:39:43.429 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC3 ValveClose失败，原因：Valve keep open。
[Save Log Job] 2024-10-24 13:39:48.142 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC4 ValveClose失败，原因：Valve keep open。
[Save Log Job] 2024-10-24 13:39:50.995 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC5 ValveClose失败，原因：Valve keep open。
[Save Log Job] 2024-10-24 13:39:50.998 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门Process gas final valveClose失败，原因：Valve keep open。
[Save Log Job] 2024-10-24 13:39:51.550 LOG.INFO UiEvent.cs Line:51 Event() - Stop monitor pressure stability
[Save Log Job] 2024-10-24 13:39:51.550 LOG.INFO UiEvent.cs Line:51 Event() - System Recipe run completed，Recipe：20241024133650-123
Start time：2024/10/24 13:37:33
End time：2024/10/24 13:39:28
Total time：0:1:51
[Save Log Job] 2024-10-24 13:39:51.550 LOG.INFO UiEvent.cs Line:51 Event() - System Recipe completely run
[Save Log Job] 2024-10-24 13:39:51.551 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-10-24 13:39:51.551 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC2 ValveClose失败，原因：Valve keep open。
[Save Log Job] 2024-10-24 13:39:56.201 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC3 ValveClose失败，原因：Valve keep open。
--------------------------------[Header Log]----------------------------------------- [Save Log Job] 2024-10-24 13:44:49.204 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-10-24 13:44:52.752 LOG.INFO UiEvent.cs Line:51 Event() - Software will be expired in 0 days, at 10/24/2024 12:00:00 AM 。
[Save Log Job] 2024-10-24 13:45:01.477 LOG.INFO UiEvent.cs Line:51 Event() - User admin login
[Save Log Job] 2024-10-24 13:45:04.688 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetAutoMode()
[Save Log Job] 2024-10-24 13:45:04.688 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentModeChanged
[Save Log Job] 2024-10-24 13:45:04.688 LOG.INFO UiEvent.cs Line:51 Event() - System running mode changed to Auto Mode
[Save Log Job] 2024-10-24 13:45:32.779 LOG.INFO UiEvent.cs Line:51 Event() - Operation RunRecipe(123, )
[Save Log Job] 2024-10-24 13:45:32.779 LOG.INFO UiEvent.cs Line:51 Event() - EventLotStart
[Save Log Job] 2024-10-24 13:45:32.880 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check door status。
[Save Log Job] 2024-10-24 13:45:32.880 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check chamber door。
[Save Log Job] 2024-10-24 13:45:32.880 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check backpanel door。
[Save Log Job] 2024-10-24 13:45:32.881 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check pump status。
[Save Log Job] 2024-10-24 13:45:32.881 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Close all the valves。
[Save Log Job] 2024-10-24 13:45:32.882 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-10-24 13:45:32.882 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Open pumping valve。
[Save Log Job] 2024-10-24 13:45:34.987 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门Chamber pumping valveOpen失败，原因：Valve keep closed 。
[Save Log Job] 2024-10-24 13:45:36.592 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check chamber pressure。
[Save Log Job] 2024-10-24 13:46:11.432 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Pump below 100mTorr。
[Save Log Job] 2024-10-24 13:46:11.432 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：PreProcess Finished in 0.6 minitues。
[Save Log Job] 2024-10-24 13:46:11.432 LOG.INFO UiEvent.cs Line:51 Event() - System complete run 'PreProcess'.
[Save Log Job] 2024-10-24 13:46:11.433 LOG.INFO UiEvent.cs Line:51 Event() - Run Recipe 20241024134532-123
[Save Log Job] 2024-10-24 13:46:11.433 LOG.INFO UiEvent.cs Line:51 Event() - System recipe start run'20241024134532-123'
[Save Log Job] 2024-10-24 13:46:11.533 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241024134532-123' start run step 1：initial。
[Save Log Job] 2024-10-24 13:46:11.533 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。
[Save Log Job] 2024-10-24 13:46:11.533 LOG.INFO UiEvent.cs Line:51 Event() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。
[Save Log Job] 2024-10-24 13:46:11.534 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。
[Save Log Job] 2024-10-24 13:46:11.535 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。
[Save Log Job] 2024-10-24 13:46:11.535 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。
[Save Log Job] 2024-10-24 13:46:11.535 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。
[Save Log Job] 2024-10-24 13:46:11.535 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。
[Save Log Job] 2024-10-24 13:46:11.536 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPower，RF set Power:0。
[Save Log Job] 2024-10-24 13:46:11.536 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。
[Save Log Job] 2024-10-24 13:46:11.536 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。
[Save Log Job] 2024-10-24 13:46:11.537 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。
[Save Log Job] 2024-10-24 13:46:11.537 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas1， ramp to 45sccm。
[Save Log Job] 2024-10-24 13:46:11.537 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas2， ramp to 56sccm。
[Save Log Job] 2024-10-24 13:46:11.538 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas3， ramp to 66sccm。
[Save Log Job] 2024-10-24 13:46:11.539 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas4， ramp to 76sccm。
[Save Log Job] 2024-10-24 13:46:11.539 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas5， ramp to 86sccm。
[Save Log Job] 2024-10-24 13:46:11.540 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPowerOnOff，Set RF power Off。
[Save Log Job] 2024-10-24 13:46:11.540 LOG.INFO UiEvent.cs Line:51 Event() - Start monitor pressure stability
[Save Log Job] 2024-10-24 13:46:41.627 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241024134532-123' end step 1
[Save Log Job] 2024-10-24 13:46:41.627 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241024134532-123' start run step 2：initial。
[Save Log Job] 2024-10-24 13:46:41.627 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。
[Save Log Job] 2024-10-24 13:46:41.628 LOG.INFO UiEvent.cs Line:51 Event() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。
[Save Log Job] 2024-10-24 13:46:41.628 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。
[Save Log Job] 2024-10-24 13:46:41.628 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。
[Save Log Job] 2024-10-24 13:46:41.629 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。
[Save Log Job] 2024-10-24 13:46:41.629 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。
[Save Log Job] 2024-10-24 13:46:41.629 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。
[Save Log Job] 2024-10-24 13:46:41.630 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPower，RF set Power:150。
[Save Log Job] 2024-10-24 13:46:41.630 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。
[Save Log Job] 2024-10-24 13:46:41.630 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。
[Save Log Job] 2024-10-24 13:46:41.631 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。
[Save Log Job] 2024-10-24 13:46:41.631 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas1， ramp to 45sccm。
[Save Log Job] 2024-10-24 13:46:41.631 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas2， ramp to 56sccm。
[Save Log Job] 2024-10-24 13:46:41.632 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas3， ramp to 66sccm。
[Save Log Job] 2024-10-24 13:46:41.632 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas4， ramp to 76sccm。
[Save Log Job] 2024-10-24 13:46:41.632 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas5， ramp to 86sccm。
[Save Log Job] 2024-10-24 13:46:41.632 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPowerOnOff，Set RF power On。
[Save Log Job] 2024-10-24 13:46:56.548 LOG.INFO UiEvent.cs Line:51 Event() - System RF GeneratorTolerance alarm：Forward power 54 out of range[130,170] in 10 seconds.
[Save Log Job] 2024-10-24 13:46:56.572 LOG.INFO UiEvent.cs Line:51 Event() - System recipe was aborted: user aborted recipe
[Save Log Job] 2024-10-24 13:47:14.184 LOG.INFO UiEvent.cs Line:51 Event() - Stop monitor pressure stability
[Save Log Job] 2024-10-24 13:47:14.215 LOG.INFO UiEvent.cs Line:51 Event() - System Recipe completely run
[Save Log Job] 2024-10-24 13:47:14.215 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC1 ValveClose失败，原因：Valve keep open。
[Save Log Job] 2024-10-24 13:47:14.215 LOG.INFO UiEvent.cs Line:51 Event() - System Recipe run completed，Recipe：20241024134532-123
Start time：2024/10/24 13:46:11
End time：2024/10/24 13:46:56
Total time：0:0:45
[Save Log Job] 2024-10-24 13:47:14.427 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-10-24 13:47:16.234 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC1 ValveClose失败，原因：Valve keep open。
[Save Log Job] 2024-10-24 13:47:16.236 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC2 ValveClose失败，原因：Valve keep open。
[Save Log Job] 2024-10-24 13:47:16.238 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC4 ValveClose失败，原因：Valve keep open。
[Save Log Job] 2024-10-24 13:47:16.238 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC5 ValveClose失败，原因：Valve keep open。
[Save Log Job] 2024-10-24 13:47:16.238 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC3 ValveClose失败，原因：Valve keep open。
--------------------------------[Footer Log]----------------------------------------- --------------------------------[Header Log]----------------------------------------- [Save Log Job] 2024-10-24 13:49:31.214 LOG.INFO UiEvent.cs Line:57 Event() - 已经连接上设备实时控制系统
[Save Log Job] 2024-10-24 13:49:31.216 LOG.INFO UiEvent.cs Line:58 Event() - 已经连接上设备实时控制系统
[Save Log Job] 2024-10-24 13:49:32.552 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-10-24 13:49:36.111 LOG.INFO UiEvent.cs Line:51 Event() - Software will be expired in 0 days, at 10/24/2024 12:00:00 AM 。
[Save Log Job] 2024-10-24 13:49:40.831 LOG.INFO UiEvent.cs Line:51 Event() - User admin login
[Save Log Job] 2024-10-24 13:49:51.157 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetAutoMode()
[Save Log Job] 2024-10-24 13:49:51.157 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentModeChanged
[Save Log Job] 2024-10-24 13:49:51.157 LOG.INFO UiEvent.cs Line:51 Event() - System running mode changed to Auto Mode
[Save Log Job] 2024-10-24 13:50:01.590 LOG.INFO UiEvent.cs Line:51 Event() - Operation RunRecipe(123, )
[Save Log Job] 2024-10-24 13:50:01.590 LOG.INFO UiEvent.cs Line:51 Event() - EventLotStart
[Save Log Job] 2024-10-24 13:50:01.691 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check door status。
[Save Log Job] 2024-10-24 13:50:01.691 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check chamber door。
[Save Log Job] 2024-10-24 13:50:01.691 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check backpanel door。
[Save Log Job] 2024-10-24 13:50:01.692 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check pump status。
[Save Log Job] 2024-10-24 13:50:01.692 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Close all the valves。
[Save Log Job] 2024-10-24 13:50:01.692 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Open pumping valve。
[Save Log Job] 2024-10-24 13:50:01.791 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-10-24 13:50:03.805 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门Chamber pumping valveOpen失败，原因：Valve keep closed 。
[Save Log Job] 2024-10-24 13:50:04.407 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check chamber pressure。
[Save Log Job] 2024-10-24 13:50:47.116 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Pump below 100mTorr。
[Save Log Job] 2024-10-24 13:50:47.116 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：PreProcess Finished in 0.8 minitues。
[Save Log Job] 2024-10-24 13:50:47.117 LOG.INFO UiEvent.cs Line:51 Event() - System complete run 'PreProcess'.
[Save Log Job] 2024-10-24 13:50:47.117 LOG.INFO UiEvent.cs Line:51 Event() - Run Recipe 20241024135001-123
[Save Log Job] 2024-10-24 13:50:47.117 LOG.INFO UiEvent.cs Line:51 Event() - System recipe start run'20241024135001-123'
[Save Log Job] 2024-10-24 13:50:47.216 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241024135001-123' start run step 1：initial。
[Save Log Job] 2024-10-24 13:50:47.216 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。
[Save Log Job] 2024-10-24 13:50:47.217 LOG.INFO UiEvent.cs Line:51 Event() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。
[Save Log Job] 2024-10-24 13:50:47.217 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。
[Save Log Job] 2024-10-24 13:50:47.217 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。
[Save Log Job] 2024-10-24 13:50:47.218 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。
[Save Log Job] 2024-10-24 13:50:47.218 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。
[Save Log Job] 2024-10-24 13:50:47.218 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。
[Save Log Job] 2024-10-24 13:50:47.219 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPower，RF set Power:0。
[Save Log Job] 2024-10-24 13:50:47.219 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。
[Save Log Job] 2024-10-24 13:50:47.219 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。
[Save Log Job] 2024-10-24 13:50:47.220 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。
[Save Log Job] 2024-10-24 13:50:47.220 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas1， ramp to 45sccm。
[Save Log Job] 2024-10-24 13:50:47.220 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas2， ramp to 56sccm。
[Save Log Job] 2024-10-24 13:50:47.221 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas3， ramp to 66sccm。
[Save Log Job] 2024-10-24 13:50:47.221 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas4， ramp to 76sccm。
[Save Log Job] 2024-10-24 13:50:47.221 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas5， ramp to 86sccm。
[Save Log Job] 2024-10-24 13:50:47.222 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPowerOnOff，Set RF power Off。
[Save Log Job] 2024-10-24 13:50:47.222 LOG.INFO UiEvent.cs Line:51 Event() - Start monitor pressure stability
[Save Log Job] 2024-10-24 13:51:17.210 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241024135001-123' end step 1
[Save Log Job] 2024-10-24 13:51:17.311 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241024135001-123' start run step 2：initial。
[Save Log Job] 2024-10-24 13:51:17.311 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。
[Save Log Job] 2024-10-24 13:51:17.312 LOG.INFO UiEvent.cs Line:51 Event() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。
[Save Log Job] 2024-10-24 13:51:17.312 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。
[Save Log Job] 2024-10-24 13:51:17.312 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。
[Save Log Job] 2024-10-24 13:51:17.313 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。
[Save Log Job] 2024-10-24 13:51:17.313 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。
[Save Log Job] 2024-10-24 13:51:17.313 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。
[Save Log Job] 2024-10-24 13:51:17.314 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPower，RF set Power:150。
[Save Log Job] 2024-10-24 13:51:17.314 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。
[Save Log Job] 2024-10-24 13:51:17.315 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。
[Save Log Job] 2024-10-24 13:51:17.315 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。
[Save Log Job] 2024-10-24 13:51:17.316 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas1， ramp to 45sccm。
[Save Log Job] 2024-10-24 13:51:17.317 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas2， ramp to 56sccm。
[Save Log Job] 2024-10-24 13:51:17.317 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas3， ramp to 66sccm。
[Save Log Job] 2024-10-24 13:51:17.318 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas4， ramp to 76sccm。
[Save Log Job] 2024-10-24 13:51:17.318 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas5， ramp to 86sccm。
[Save Log Job] 2024-10-24 13:51:17.318 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPowerOnOff，Set RF power On。
[Save Log Job] 2024-10-24 13:51:37.443 LOG.INFO UiEvent.cs Line:51 Event() - System RF GeneratorTolerance alarm：Forward power 54 out of range[130,170] in 10 seconds.
[Save Log Job] 2024-10-24 13:51:37.447 LOG.INFO UiEvent.cs Line:51 Event() - System recipe was aborted: user aborted recipe
[Save Log Job] 2024-10-24 13:51:38.890 LOG.INFO UiEvent.cs Line:51 Event() - Stop monitor pressure stability
[Save Log Job] 2024-10-24 13:51:50.647 LOG.INFO UiEvent.cs Line:51 Event() - System Recipe run completed，Recipe：20241024135001-123
Start time：2024/10/24 13:50:47
End time：2024/10/24 13:51:37
Total time：0:0:50
[Save Log Job] 2024-10-24 13:51:59.881 LOG.INFO UiEvent.cs Line:51 Event() - System Recipe completely run
[Save Log Job] 2024-10-24 13:51:59.883 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC1 ValveClose失败，原因：Valve keep open。
[Save Log Job] 2024-10-24 13:51:59.883 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC2 ValveClose失败，原因：Valve keep open。
[Save Log Job] 2024-10-24 13:51:59.883 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC3 ValveClose失败，原因：Valve keep open。
[Save Log Job] 2024-10-24 13:51:59.883 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-10-24 13:51:59.888 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC4 ValveClose失败，原因：Valve keep open。
[Save Log Job] 2024-10-24 13:52:02.926 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门Process gas final valveClose失败，原因：Valve keep open。
--------------------------------[Header Log]----------------------------------------- [Save Log Job] 2024-10-24 14:34:01.962 LOG.INFO UiEvent.cs Line:58 Event() - 已经连接上设备实时控制系统
[Save Log Job] 2024-10-24 14:34:01.964 LOG.INFO UiEvent.cs Line:57 Event() - 已经连接上设备实时控制系统
[Save Log Job] 2024-10-24 14:34:03.222 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-10-24 14:34:06.873 LOG.INFO UiEvent.cs Line:51 Event() - Software will be expired in 0 days, at 10/24/2024 12:00:00 AM 。
[Save Log Job] 2024-10-24 14:34:10.115 LOG.INFO UiEvent.cs Line:51 Event() - User admin login
[Save Log Job] 2024-10-24 14:34:13.997 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetAutoMode()
[Save Log Job] 2024-10-24 14:34:13.998 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentModeChanged
[Save Log Job] 2024-10-24 14:34:13.998 LOG.INFO UiEvent.cs Line:51 Event() - System running mode changed to Auto Mode
[Save Log Job] 2024-10-24 14:34:19.519 LOG.INFO UiEvent.cs Line:51 Event() - Operation RunRecipe(123, )
[Save Log Job] 2024-10-24 14:34:19.619 LOG.INFO UiEvent.cs Line:51 Event() - EventLotStart
[Save Log Job] 2024-10-24 14:34:19.619 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check door status。
[Save Log Job] 2024-10-24 14:34:19.619 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check chamber door。
[Save Log Job] 2024-10-24 14:34:19.620 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check backpanel door。
[Save Log Job] 2024-10-24 14:34:19.620 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check pump status。
[Save Log Job] 2024-10-24 14:34:19.621 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Close all the valves。
[Save Log Job] 2024-10-24 14:34:19.621 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-10-24 14:34:19.720 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Open pumping valve。
[Save Log Job] 2024-10-24 14:34:21.732 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门Chamber pumping valveOpen失败，原因：Valve keep closed 。
[Save Log Job] 2024-10-24 14:34:23.639 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check chamber pressure。
[Save Log Job] 2024-10-24 14:35:14.097 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Pump below 100mTorr。
[Save Log Job] 2024-10-24 14:35:14.097 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：PreProcess Finished in 0.9 minitues。
[Save Log Job] 2024-10-24 14:35:14.097 LOG.INFO UiEvent.cs Line:51 Event() - System complete run 'PreProcess'.
[Save Log Job] 2024-10-24 14:35:14.097 LOG.INFO UiEvent.cs Line:51 Event() - Run Recipe 20241024143419-123
[Save Log Job] 2024-10-24 14:35:14.098 LOG.INFO UiEvent.cs Line:51 Event() - System recipe start run'20241024143419-123'
[Save Log Job] 2024-10-24 14:35:14.197 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241024143419-123' start run step 1：initial。
[Save Log Job] 2024-10-24 14:35:14.197 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。
[Save Log Job] 2024-10-24 14:35:14.198 LOG.INFO UiEvent.cs Line:51 Event() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。
[Save Log Job] 2024-10-24 14:35:14.198 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。
[Save Log Job] 2024-10-24 14:35:14.198 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。
[Save Log Job] 2024-10-24 14:35:14.199 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。
[Save Log Job] 2024-10-24 14:35:14.199 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。
[Save Log Job] 2024-10-24 14:35:14.199 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。
[Save Log Job] 2024-10-24 14:35:14.200 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPower，RF set Power:0。
[Save Log Job] 2024-10-24 14:35:14.200 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。
[Save Log Job] 2024-10-24 14:35:14.200 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。
[Save Log Job] 2024-10-24 14:35:14.201 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。
[Save Log Job] 2024-10-24 14:35:14.201 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas1， ramp to 45sccm。
[Save Log Job] 2024-10-24 14:35:14.201 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas2， ramp to 56sccm。
[Save Log Job] 2024-10-24 14:35:14.202 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas3， ramp to 66sccm。
[Save Log Job] 2024-10-24 14:35:14.203 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas4， ramp to 76sccm。
[Save Log Job] 2024-10-24 14:35:14.203 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas5， ramp to 86sccm。
[Save Log Job] 2024-10-24 14:35:14.204 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPowerOnOff，Set RF power Off。
[Save Log Job] 2024-10-24 14:35:14.204 LOG.INFO UiEvent.cs Line:51 Event() - Start monitor pressure stability
[Save Log Job] 2024-10-24 14:35:44.201 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241024143419-123' end step 1
[Save Log Job] 2024-10-24 14:35:44.301 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241024143419-123' start run step 2：initial。
[Save Log Job] 2024-10-24 14:35:44.302 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。
[Save Log Job] 2024-10-24 14:35:44.304 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。
[Save Log Job] 2024-10-24 14:35:44.304 LOG.INFO UiEvent.cs Line:51 Event() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。
[Save Log Job] 2024-10-24 14:35:44.304 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。
[Save Log Job] 2024-10-24 14:35:44.304 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。
[Save Log Job] 2024-10-24 14:35:44.304 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。
[Save Log Job] 2024-10-24 14:35:44.309 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPower，RF set Power:150。
[Save Log Job] 2024-10-24 14:35:44.309 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。
[Save Log Job] 2024-10-24 14:35:44.309 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。
[Save Log Job] 2024-10-24 14:35:44.309 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。
[Save Log Job] 2024-10-24 14:35:44.309 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas1， ramp to 45sccm。
[Save Log Job] 2024-10-24 14:35:44.309 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。
[Save Log Job] 2024-10-24 14:35:44.309 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas2， ramp to 56sccm。
[Save Log Job] 2024-10-24 14:35:44.309 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas3， ramp to 66sccm。
[Save Log Job] 2024-10-24 14:35:44.309 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas4， ramp to 76sccm。
[Save Log Job] 2024-10-24 14:35:44.309 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas5， ramp to 86sccm。
[Save Log Job] 2024-10-24 14:35:44.309 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPowerOnOff，Set RF power On。
[Save Log Job] 2024-10-24 14:36:04.338 LOG.INFO UiEvent.cs Line:51 Event() - System RF GeneratorTolerance alarm：Forward power 54 out of range[130,170] in 10 seconds.
--------------------------------[Header Log]----------------------------------------- [Save Log Job] 2024-10-24 15:20:07.593 LOG.INFO UiEvent.cs Line:58 Event() - 已经连接上设备实时控制系统
[Save Log Job] 2024-10-24 15:20:07.595 LOG.INFO UiEvent.cs Line:57 Event() - 已经连接上设备实时控制系统
[Save Log Job] 2024-10-24 15:20:09.260 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-10-24 15:20:12.906 LOG.INFO UiEvent.cs Line:51 Event() - Software will be expired in 0 days, at 10/24/2024 12:00:00 AM 。
[Save Log Job] 2024-10-24 15:20:23.859 LOG.INFO UiEvent.cs Line:51 Event() - User admin login
[Save Log Job] 2024-10-24 15:20:34.972 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetAutoMode()
[Save Log Job] 2024-10-24 15:20:34.974 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentModeChanged
[Save Log Job] 2024-10-24 15:20:34.974 LOG.INFO UiEvent.cs Line:51 Event() - System running mode changed to Auto Mode
[Save Log Job] 2024-10-24 15:20:43.297 LOG.INFO UiEvent.cs Line:51 Event() - Operation RunRecipe(123, )
[Save Log Job] 2024-10-24 15:20:43.297 LOG.INFO UiEvent.cs Line:51 Event() - EventLotStart
[Save Log Job] 2024-10-24 15:20:43.297 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check door status。
[Save Log Job] 2024-10-24 15:20:43.398 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check chamber door。
[Save Log Job] 2024-10-24 15:20:43.398 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check backpanel door。
[Save Log Job] 2024-10-24 15:20:43.399 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check pump status。
[Save Log Job] 2024-10-24 15:20:43.399 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Close all the valves。
[Save Log Job] 2024-10-24 15:20:43.399 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Open pumping valve。
[Save Log Job] 2024-10-24 15:20:43.499 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-10-24 15:20:45.106 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check chamber pressure。
[Save Log Job] 2024-10-24 15:21:20.002 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Pump below 100mTorr。
[Save Log Job] 2024-10-24 15:21:20.104 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：PreProcess Finished in 0.6 minitues。
[Save Log Job] 2024-10-24 15:21:20.104 LOG.INFO UiEvent.cs Line:51 Event() - System complete run 'PreProcess'.
[Save Log Job] 2024-10-24 15:21:20.104 LOG.INFO UiEvent.cs Line:51 Event() - Run Recipe 20241024152043-123
[Save Log Job] 2024-10-24 15:21:20.105 LOG.INFO UiEvent.cs Line:51 Event() - System recipe start run'20241024152043-123'
[Save Log Job] 2024-10-24 15:21:20.204 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241024152043-123' start run step 1：initial。
[Save Log Job] 2024-10-24 15:21:20.204 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。
[Save Log Job] 2024-10-24 15:21:20.205 LOG.INFO UiEvent.cs Line:51 Event() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。
[Save Log Job] 2024-10-24 15:21:20.205 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。
[Save Log Job] 2024-10-24 15:21:20.205 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。
[Save Log Job] 2024-10-24 15:21:20.206 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。
[Save Log Job] 2024-10-24 15:21:20.206 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。
[Save Log Job] 2024-10-24 15:21:20.206 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。
[Save Log Job] 2024-10-24 15:21:20.207 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPower，RF set Power:0。
[Save Log Job] 2024-10-24 15:21:20.207 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。
[Save Log Job] 2024-10-24 15:21:20.208 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。
[Save Log Job] 2024-10-24 15:21:20.208 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。
[Save Log Job] 2024-10-24 15:21:20.208 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas1， ramp to 45sccm。
[Save Log Job] 2024-10-24 15:21:20.208 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas2， ramp to 56sccm。
[Save Log Job] 2024-10-24 15:21:20.209 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas3， ramp to 66sccm。
[Save Log Job] 2024-10-24 15:21:20.209 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas4， ramp to 76sccm。
[Save Log Job] 2024-10-24 15:21:20.210 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas5， ramp to 86sccm。
[Save Log Job] 2024-10-24 15:21:20.210 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPowerOnOff，Set RF power Off。
[Save Log Job] 2024-10-24 15:21:20.211 LOG.INFO UiEvent.cs Line:51 Event() - Start monitor pressure stability
[Save Log Job] 2024-10-24 15:21:50.196 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241024152043-123' end step 1
[Save Log Job] 2024-10-24 15:21:50.296 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241024152043-123' start run step 2：initial。
[Save Log Job] 2024-10-24 15:21:50.296 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。
[Save Log Job] 2024-10-24 15:21:50.297 LOG.INFO UiEvent.cs Line:51 Event() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。
[Save Log Job] 2024-10-24 15:21:50.297 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。
[Save Log Job] 2024-10-24 15:21:50.297 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。
[Save Log Job] 2024-10-24 15:21:50.298 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。
[Save Log Job] 2024-10-24 15:21:50.298 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。
[Save Log Job] 2024-10-24 15:21:50.298 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。
[Save Log Job] 2024-10-24 15:21:50.299 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPower，RF set Power:150。
[Save Log Job] 2024-10-24 15:21:50.300 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。
[Save Log Job] 2024-10-24 15:21:50.300 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。
[Save Log Job] 2024-10-24 15:21:50.300 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。
[Save Log Job] 2024-10-24 15:21:50.301 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas1， ramp to 45sccm。
[Save Log Job] 2024-10-24 15:21:50.301 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas2， ramp to 56sccm。
[Save Log Job] 2024-10-24 15:21:50.301 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas3， ramp to 66sccm。
[Save Log Job] 2024-10-24 15:21:50.302 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas4， ramp to 76sccm。
[Save Log Job] 2024-10-24 15:21:50.302 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas5， ramp to 86sccm。
[Save Log Job] 2024-10-24 15:21:50.302 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPowerOnOff，Set RF power On。
[Save Log Job] 2024-10-24 15:22:05.883 LOG.INFO UiEvent.cs Line:51 Event() - System RF GeneratorTolerance alarm：Forward power 54 out of range[130,170] in 10 seconds.
[Save Log Job] 2024-10-24 15:22:08.885 LOG.INFO UiEvent.cs Line:51 Event() - System recipe was aborted: user aborted recipe
[Save Log Job] 2024-10-24 15:22:08.885 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC1 ValveClose失败，原因：Valve keep open。
[Save Log Job] 2024-10-24 15:22:08.885 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC2 ValveClose失败，原因：Valve keep open。
[Save Log Job] 2024-10-24 15:22:08.890 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC4 ValveClose失败，原因：Valve keep open。
[Save Log Job] 2024-10-24 15:22:08.890 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC3 ValveClose失败，原因：Valve keep open。
[Save Log Job] 2024-10-24 15:22:08.893 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门Process gas final valveClose失败，原因：Valve keep open。
[Save Log Job] 2024-10-24 15:22:08.893 LOG.INFO UiEvent.cs Line:51 Event() - Stop monitor pressure stability
[Save Log Job] 2024-10-24 15:22:08.894 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC5 ValveClose失败，原因：Valve keep open。
[Save Log Job] 2024-10-24 15:22:08.900 LOG.INFO UiEvent.cs Line:51 Event() - System Recipe completely run
[Save Log Job] 2024-10-24 15:22:08.900 LOG.INFO UiEvent.cs Line:51 Event() - System Recipe run completed，Recipe：20241024152043-123
Start time：2024/10/24 15:21:20
End time：2024/10/24 15:22:08
Total time：0:0:48
[Save Log Job] 2024-10-24 15:22:11.161 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-10-24 15:22:34.898 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-10-24 15:22:35.387 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC1 ValveClose失败，原因：Valve keep open。
[Save Log Job] 2024-10-24 15:22:35.393 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC2 ValveClose失败，原因：Valve keep open。
[Save Log Job] 2024-10-24 15:22:35.394 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC3 ValveClose失败，原因：Valve keep open。
[Save Log Job] 2024-10-24 15:22:35.415 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC4 ValveClose失败，原因：Valve keep open。
[Save Log Job] 2024-10-24 15:22:35.416 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门Process gas final valveClose失败，原因：Valve keep open。
--------------------------------[Header Log]----------------------------------------- [Save Log Job] 2024-10-24 15:26:07.710 LOG.INFO UiEvent.cs Line:57 Event() - 已经连接上设备实时控制系统
[Save Log Job] 2024-10-24 15:26:07.712 LOG.INFO UiEvent.cs Line:58 Event() - 已经连接上设备实时控制系统
[Save Log Job] 2024-10-24 15:26:08.884 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-10-24 15:26:12.642 LOG.INFO UiEvent.cs Line:51 Event() - Software will be expired in 0 days, at 10/24/2024 12:00:00 AM 。
[Save Log Job] 2024-10-24 15:26:15.150 LOG.INFO UiEvent.cs Line:51 Event() - User admin login
[Save Log Job] 2024-10-24 15:26:28.793 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetAutoMode()
[Save Log Job] 2024-10-24 15:26:28.794 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentModeChanged
[Save Log Job] 2024-10-24 15:26:28.794 LOG.INFO UiEvent.cs Line:51 Event() - System running mode changed to Auto Mode
[Save Log Job] 2024-10-24 15:26:30.298 LOG.INFO UiEvent.cs Line:51 Event() - Operation RunRecipe(123, )
[Save Log Job] 2024-10-24 15:26:30.299 LOG.INFO UiEvent.cs Line:51 Event() - EventLotStart
[Save Log Job] 2024-10-24 15:26:30.399 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check door status。
[Save Log Job] 2024-10-24 15:26:30.399 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check chamber door。
[Save Log Job] 2024-10-24 15:26:30.400 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check backpanel door。
[Save Log Job] 2024-10-24 15:26:30.401 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check pump status。
[Save Log Job] 2024-10-24 15:26:30.401 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Close all the valves。
[Save Log Job] 2024-10-24 15:26:30.401 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-10-24 15:26:30.499 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Open pumping valve。
[Save Log Job] 2024-10-24 15:26:32.511 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门Chamber pumping valveOpen失败，原因：Valve keep closed 。
[Save Log Job] 2024-10-24 15:26:33.314 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check chamber pressure。
[Save Log Job] 2024-10-24 15:27:12.091 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Pump below 100mTorr。
[Save Log Job] 2024-10-24 15:27:12.091 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：PreProcess Finished in 0.7 minitues。
[Save Log Job] 2024-10-24 15:27:12.091 LOG.INFO UiEvent.cs Line:51 Event() - System complete run 'PreProcess'.
[Save Log Job] 2024-10-24 15:27:12.092 LOG.INFO UiEvent.cs Line:51 Event() - Run Recipe 20241024152630-123
[Save Log Job] 2024-10-24 15:27:12.092 LOG.INFO UiEvent.cs Line:51 Event() - System recipe start run'20241024152630-123'
[Save Log Job] 2024-10-24 15:27:12.191 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241024152630-123' start run step 1：initial。
[Save Log Job] 2024-10-24 15:27:12.191 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。
[Save Log Job] 2024-10-24 15:27:12.192 LOG.INFO UiEvent.cs Line:51 Event() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。
[Save Log Job] 2024-10-24 15:27:12.192 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。
[Save Log Job] 2024-10-24 15:27:12.192 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。
[Save Log Job] 2024-10-24 15:27:12.193 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。
[Save Log Job] 2024-10-24 15:27:12.195 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。
[Save Log Job] 2024-10-24 15:27:12.195 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。
[Save Log Job] 2024-10-24 15:27:12.196 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPower，RF set Power:0。
[Save Log Job] 2024-10-24 15:27:12.196 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。
[Save Log Job] 2024-10-24 15:27:12.197 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。
[Save Log Job] 2024-10-24 15:27:12.197 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。
[Save Log Job] 2024-10-24 15:27:12.197 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas1， ramp to 45sccm。
[Save Log Job] 2024-10-24 15:27:12.197 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas2， ramp to 56sccm。
[Save Log Job] 2024-10-24 15:27:12.198 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas3， ramp to 66sccm。
[Save Log Job] 2024-10-24 15:27:12.198 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas4， ramp to 76sccm。
[Save Log Job] 2024-10-24 15:27:12.198 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas5， ramp to 86sccm。
[Save Log Job] 2024-10-24 15:27:12.199 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPowerOnOff，Set RF power Off。
[Save Log Job] 2024-10-24 15:27:12.199 LOG.INFO UiEvent.cs Line:51 Event() - Start monitor pressure stability
[Save Log Job] 2024-10-24 15:27:42.184 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241024152630-123' end step 1
[Save Log Job] 2024-10-24 15:27:42.284 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241024152630-123' start run step 2：initial。
[Save Log Job] 2024-10-24 15:27:42.284 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。
[Save Log Job] 2024-10-24 15:27:42.284 LOG.INFO UiEvent.cs Line:51 Event() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。
[Save Log Job] 2024-10-24 15:27:42.285 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。
[Save Log Job] 2024-10-24 15:27:42.285 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。
[Save Log Job] 2024-10-24 15:27:42.285 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。
[Save Log Job] 2024-10-24 15:27:42.286 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。
[Save Log Job] 2024-10-24 15:27:42.286 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。
[Save Log Job] 2024-10-24 15:27:42.286 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPower，RF set Power:150。
[Save Log Job] 2024-10-24 15:27:42.287 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。
[Save Log Job] 2024-10-24 15:27:42.287 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。
[Save Log Job] 2024-10-24 15:27:42.288 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。
[Save Log Job] 2024-10-24 15:27:42.289 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas1， ramp to 45sccm。
[Save Log Job] 2024-10-24 15:27:42.289 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas2， ramp to 56sccm。
[Save Log Job] 2024-10-24 15:27:42.289 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas3， ramp to 66sccm。
[Save Log Job] 2024-10-24 15:27:42.290 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas4， ramp to 76sccm。
[Save Log Job] 2024-10-24 15:27:42.290 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas5， ramp to 86sccm。
[Save Log Job] 2024-10-24 15:27:42.290 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPowerOnOff，Set RF power On。
[Save Log Job] 2024-10-24 15:28:02.537 LOG.INFO UiEvent.cs Line:51 Event() - System RF GeneratorTolerance alarm：Forward power 54 out of range[130,170] in 10 seconds.
[Save Log Job] 2024-10-24 15:28:10.528 LOG.INFO UiEvent.cs Line:51 Event() - System recipe was aborted: user aborted recipe
[Save Log Job] 2024-10-24 15:28:10.535 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC1 ValveClose失败，原因：Valve keep open。
[Save Log Job] 2024-10-24 15:28:10.536 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC2 ValveClose失败，原因：Valve keep open。
[Save Log Job] 2024-10-24 15:28:10.539 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC3 ValveClose失败，原因：Valve keep open。
[Save Log Job] 2024-10-24 15:28:11.790 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC4 ValveClose失败，原因：Valve keep open。
[Save Log Job] 2024-10-24 15:28:11.790 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC5 ValveClose失败，原因：Valve keep open。
[Save Log Job] 2024-10-24 15:28:11.791 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门Process gas final valveClose失败，原因：Valve keep open。
[Save Log Job] 2024-10-24 15:28:11.791 LOG.INFO UiEvent.cs Line:51 Event() - Stop monitor pressure stability
[Save Log Job] 2024-10-24 15:28:11.791 LOG.INFO UiEvent.cs Line:51 Event() - System Recipe run completed，Recipe：20241024152630-123
Start time：2024/10/24 15:27:12
End time：2024/10/24 15:28:05
Total time：0:0:53
[Save Log Job] 2024-10-24 15:28:11.792 LOG.INFO UiEvent.cs Line:51 Event() - System Recipe completely run
[Save Log Job] 2024-10-24 15:28:11.799 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-10-24 15:28:13.701 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC1 ValveClose失败，原因：Valve keep open。
[Save Log Job] 2024-10-24 15:28:13.703 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC2 ValveClose失败，原因：Valve keep open。
[Save Log Job] 2024-10-24 15:28:15.356 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC3 ValveClose失败，原因：Valve keep open。
[Save Log Job] 2024-10-24 15:28:15.360 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC4 ValveClose失败，原因：Valve keep open。
[Save Log Job] 2024-10-24 15:28:17.826 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC5 ValveClose失败，原因：Valve keep open。
--------------------------------[Header Log]----------------------------------------- [Save Log Job] 2024-10-24 16:25:13.539 LOG.INFO UiEvent.cs Line:57 Event() - 已经连接上设备实时控制系统
[Save Log Job] 2024-10-24 16:25:13.541 LOG.INFO UiEvent.cs Line:58 Event() - 已经连接上设备实时控制系统
[Save Log Job] 2024-10-24 16:25:15.254 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-10-24 16:25:18.798 LOG.INFO UiEvent.cs Line:51 Event() - Software will be expired in 0 days, at 10/24/2024 12:00:00 AM 。
[Save Log Job] 2024-10-24 16:25:23.627 LOG.INFO UiEvent.cs Line:51 Event() - User admin login
[Save Log Job] 2024-10-24 16:25:31.253 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetAutoMode()
[Save Log Job] 2024-10-24 16:25:31.253 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentModeChanged
[Save Log Job] 2024-10-24 16:25:31.253 LOG.INFO UiEvent.cs Line:51 Event() - System running mode changed to Auto Mode
[Save Log Job] 2024-10-24 16:25:33.366 LOG.INFO UiEvent.cs Line:51 Event() - Operation RunRecipe(123, )
[Save Log Job] 2024-10-24 16:25:33.366 LOG.INFO UiEvent.cs Line:51 Event() - EventLotStart
[Save Log Job] 2024-10-24 16:25:33.367 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-10-24 16:25:33.367 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check door status。
[Save Log Job] 2024-10-24 16:25:33.367 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check chamber door。
[Save Log Job] 2024-10-24 16:25:33.368 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check backpanel door。
[Save Log Job] 2024-10-24 16:25:33.368 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check pump status。
[Save Log Job] 2024-10-24 16:25:33.368 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Close all the valves。
[Save Log Job] 2024-10-24 16:25:33.463 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Open pumping valve。
[Save Log Job] 2024-10-24 16:25:35.596 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check chamber pressure。
[Save Log Job] 2024-10-24 16:26:10.583 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Pump below 100mTorr。
[Save Log Job] 2024-10-24 16:26:10.681 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：PreProcess Finished in 0.6 minitues。
[Save Log Job] 2024-10-24 16:26:10.681 LOG.INFO UiEvent.cs Line:51 Event() - System complete run 'PreProcess'.
[Save Log Job] 2024-10-24 16:26:10.682 LOG.INFO UiEvent.cs Line:51 Event() - Run Recipe 20241024162533-123
[Save Log Job] 2024-10-24 16:26:10.682 LOG.INFO UiEvent.cs Line:51 Event() - System recipe start run'20241024162533-123'
[Save Log Job] 2024-10-24 16:26:10.683 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241024162533-123' start run step 1：initial。
[Save Log Job] 2024-10-24 16:26:10.683 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。
[Save Log Job] 2024-10-24 16:26:10.683 LOG.INFO UiEvent.cs Line:51 Event() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。
[Save Log Job] 2024-10-24 16:26:10.684 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。
[Save Log Job] 2024-10-24 16:26:10.684 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。
[Save Log Job] 2024-10-24 16:26:10.684 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。
[Save Log Job] 2024-10-24 16:26:10.685 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。
[Save Log Job] 2024-10-24 16:26:10.685 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。
[Save Log Job] 2024-10-24 16:26:10.686 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPower，RF set Power:0。
[Save Log Job] 2024-10-24 16:26:10.686 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。
[Save Log Job] 2024-10-24 16:26:10.686 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。
[Save Log Job] 2024-10-24 16:26:10.687 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。
[Save Log Job] 2024-10-24 16:26:10.687 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas1， ramp to 45sccm。
[Save Log Job] 2024-10-24 16:26:10.687 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas2， ramp to 56sccm。
[Save Log Job] 2024-10-24 16:26:10.688 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas3， ramp to 66sccm。
[Save Log Job] 2024-10-24 16:26:10.688 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas4， ramp to 76sccm。
[Save Log Job] 2024-10-24 16:26:10.688 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas5， ramp to 86sccm。
[Save Log Job] 2024-10-24 16:26:10.688 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPowerOnOff，Set RF power Off。
[Save Log Job] 2024-10-24 16:26:10.781 LOG.INFO UiEvent.cs Line:51 Event() - Start monitor pressure stability
[Save Log Job] 2024-10-24 16:26:40.774 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241024162533-123' end step 1
[Save Log Job] 2024-10-24 16:26:40.875 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241024162533-123' start run step 2：initial。
[Save Log Job] 2024-10-24 16:26:40.875 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。
[Save Log Job] 2024-10-24 16:26:40.876 LOG.INFO UiEvent.cs Line:51 Event() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。
[Save Log Job] 2024-10-24 16:26:40.876 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。
[Save Log Job] 2024-10-24 16:26:40.876 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。
[Save Log Job] 2024-10-24 16:26:40.877 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。
[Save Log Job] 2024-10-24 16:26:40.877 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。
[Save Log Job] 2024-10-24 16:26:40.877 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。
[Save Log Job] 2024-10-24 16:26:40.878 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPower，RF set Power:150。
[Save Log Job] 2024-10-24 16:26:40.878 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。
[Save Log Job] 2024-10-24 16:26:40.879 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。
[Save Log Job] 2024-10-24 16:26:40.879 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。
[Save Log Job] 2024-10-24 16:26:40.880 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas1， ramp to 45sccm。
[Save Log Job] 2024-10-24 16:26:40.880 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas2， ramp to 56sccm。
[Save Log Job] 2024-10-24 16:26:40.881 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas3， ramp to 66sccm。
[Save Log Job] 2024-10-24 16:26:40.881 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas4， ramp to 76sccm。
[Save Log Job] 2024-10-24 16:26:40.881 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas5， ramp to 86sccm。
[Save Log Job] 2024-10-24 16:26:40.882 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPowerOnOff，Set RF power On。
[Save Log Job] 2024-10-24 16:26:56.425 LOG.INFO UiEvent.cs Line:51 Event() - System RF GeneratorTolerance alarm：Forward power 54 out of range[130,170] in 10 seconds.
[Save Log Job] 2024-10-24 16:26:56.890 LOG.INFO UiEvent.cs Line:51 Event() - System recipe was aborted: user aborted recipe
[Save Log Job] 2024-10-24 16:26:57.757 LOG.INFO UiEvent.cs Line:51 Event() - Stop monitor pressure stability
[Save Log Job] 2024-10-24 16:26:57.765 LOG.INFO UiEvent.cs Line:51 Event() - System Recipe run completed，Recipe：20241024162533-123
Start time：2024/10/24 16:26:10
End time：2024/10/24 16:26:56
Total time：0:0:46
[Save Log Job] 2024-10-24 16:26:57.768 LOG.INFO UiEvent.cs Line:51 Event() - System Recipe completely run
[Save Log Job] 2024-10-24 16:26:57.769 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-10-24 16:26:58.960 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC1 ValveClose失败，原因：Valve keep open。
[Save Log Job] 2024-10-24 16:26:58.960 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC2 ValveClose失败，原因：Valve keep open。
[Save Log Job] 2024-10-24 16:26:58.960 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC3 ValveClose失败，原因：Valve keep open。
[Save Log Job] 2024-10-24 16:26:58.961 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC4 ValveClose失败，原因：Valve keep open。
[Save Log Job] 2024-10-24 16:26:58.961 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC5 ValveClose失败，原因：Valve keep open。
--------------------------------[Footer Log]----------------------------------------- --------------------------------[Header Log]----------------------------------------- [Save Log Job] 2024-10-24 17:02:49.301 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-10-24 17:02:53.036 LOG.INFO UiEvent.cs Line:51 Event() - Software will be expired in 0 days, at 10/24/2024 12:00:00 AM 。
[Save Log Job] 2024-10-24 17:05:03.510 LOG.INFO UiEvent.cs Line:51 Event() - User admin login
[Save Log Job] 2024-10-24 17:05:10.727 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetAutoMode()
[Save Log Job] 2024-10-24 17:05:10.727 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentModeChanged
[Save Log Job] 2024-10-24 17:05:10.729 LOG.INFO UiEvent.cs Line:51 Event() - System running mode changed to Auto Mode
[Save Log Job] 2024-10-24 17:05:17.650 LOG.INFO UiEvent.cs Line:51 Event() - Operation RunRecipe(123, )
[Save Log Job] 2024-10-24 17:05:17.650 LOG.INFO UiEvent.cs Line:51 Event() - EventLotStart
[Save Log Job] 2024-10-24 17:05:17.650 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check door status。
[Save Log Job] 2024-10-24 17:05:17.651 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-10-24 17:05:17.651 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check chamber door。
[Save Log Job] 2024-10-24 17:05:17.651 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check backpanel door。
[Save Log Job] 2024-10-24 17:05:17.653 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check pump status。
[Save Log Job] 2024-10-24 17:05:17.656 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Close all the valves。
[Save Log Job] 2024-10-24 17:05:17.750 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Open pumping valve。
[Save Log Job] 2024-10-24 17:05:19.758 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门Chamber pumping valveOpen失败，原因：Valve keep closed 。
[Save Log Job] 2024-10-24 17:05:20.460 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check chamber pressure。
[Save Log Job] 2024-10-24 17:05:55.389 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Pump below 100mTorr。
[Save Log Job] 2024-10-24 17:05:55.389 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：PreProcess Finished in 0.6 minitues。
[Save Log Job] 2024-10-24 17:05:55.389 LOG.INFO UiEvent.cs Line:51 Event() - System complete run 'PreProcess'.
[Save Log Job] 2024-10-24 17:05:55.390 LOG.INFO UiEvent.cs Line:51 Event() - Run Recipe 20241024170517-123
[Save Log Job] 2024-10-24 17:05:55.390 LOG.INFO UiEvent.cs Line:51 Event() - System recipe start run'20241024170517-123'
[Save Log Job] 2024-10-24 17:05:55.489 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241024170517-123' start run step 1：initial。
[Save Log Job] 2024-10-24 17:05:55.489 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。
[Save Log Job] 2024-10-24 17:05:55.489 LOG.INFO UiEvent.cs Line:51 Event() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。
[Save Log Job] 2024-10-24 17:05:55.490 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。
[Save Log Job] 2024-10-24 17:05:55.490 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。
[Save Log Job] 2024-10-24 17:05:55.490 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。
[Save Log Job] 2024-10-24 17:05:55.491 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。
[Save Log Job] 2024-10-24 17:05:55.491 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。
[Save Log Job] 2024-10-24 17:05:55.492 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPower，RF set Power:0。
[Save Log Job] 2024-10-24 17:05:55.492 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。
[Save Log Job] 2024-10-24 17:05:55.492 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。
[Save Log Job] 2024-10-24 17:05:55.493 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。
[Save Log Job] 2024-10-24 17:05:55.493 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas1， ramp to 45sccm。
[Save Log Job] 2024-10-24 17:05:55.493 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas2， ramp to 56sccm。
[Save Log Job] 2024-10-24 17:05:55.494 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas3， ramp to 66sccm。
[Save Log Job] 2024-10-24 17:05:55.494 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas4， ramp to 76sccm。
[Save Log Job] 2024-10-24 17:05:55.494 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas5， ramp to 86sccm。
[Save Log Job] 2024-10-24 17:05:55.495 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPowerOnOff，Set RF power Off。
[Save Log Job] 2024-10-24 17:05:55.495 LOG.INFO UiEvent.cs Line:51 Event() - Start monitor pressure stability
[Save Log Job] 2024-10-24 17:06:25.578 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241024170517-123' end step 1
[Save Log Job] 2024-10-24 17:06:25.578 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241024170517-123' start run step 2：initial。
[Save Log Job] 2024-10-24 17:06:25.580 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。
[Save Log Job] 2024-10-24 17:06:25.580 LOG.INFO UiEvent.cs Line:51 Event() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。
[Save Log Job] 2024-10-24 17:06:25.581 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。
[Save Log Job] 2024-10-24 17:06:25.581 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。
[Save Log Job] 2024-10-24 17:06:25.581 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。
[Save Log Job] 2024-10-24 17:06:25.585 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。
[Save Log Job] 2024-10-24 17:06:25.585 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPower，RF set Power:150。
[Save Log Job] 2024-10-24 17:06:25.585 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。
[Save Log Job] 2024-10-24 17:06:25.585 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。
[Save Log Job] 2024-10-24 17:06:25.585 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。
[Save Log Job] 2024-10-24 17:06:25.585 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas1， ramp to 45sccm。
[Save Log Job] 2024-10-24 17:06:25.585 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas2， ramp to 56sccm。
[Save Log Job] 2024-10-24 17:06:25.585 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas3， ramp to 66sccm。
[Save Log Job] 2024-10-24 17:06:25.585 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas4， ramp to 76sccm。
[Save Log Job] 2024-10-24 17:06:25.585 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas5， ramp to 86sccm。
[Save Log Job] 2024-10-24 17:06:25.585 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPowerOnOff，Set RF power On。
[Save Log Job] 2024-10-24 17:06:25.586 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。
[Save Log Job] 2024-10-24 17:06:40.603 LOG.INFO UiEvent.cs Line:51 Event() - System RF GeneratorTolerance alarm：Forward power 54 out of range[130,170] in 10 seconds.
[Save Log Job] 2024-10-24 17:06:42.865 LOG.INFO UiEvent.cs Line:51 Event() - System recipe was aborted: user aborted recipe
[Save Log Job] 2024-10-24 17:06:43.785 LOG.INFO UiEvent.cs Line:51 Event() - Stop monitor pressure stability
[Save Log Job] 2024-10-24 17:06:43.787 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC1 ValveClose失败，原因：Valve keep open。
[Save Log Job] 2024-10-24 17:06:43.793 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC2 ValveClose失败，原因：Valve keep open。
[Save Log Job] 2024-10-24 17:06:43.794 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC3 ValveClose失败，原因：Valve keep open。
[Save Log Job] 2024-10-24 17:06:43.797 LOG.INFO UiEvent.cs Line:51 Event() - System Recipe run completed，Recipe：20241024170517-123
Start time：2024/10/24 17:05:55
End time：2024/10/24 17:06:43
Total time：0:0:47
[Save Log Job] 2024-10-24 17:06:43.800 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC4 ValveClose失败，原因：Valve keep open。
[Save Log Job] 2024-10-24 17:06:44.913 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC5 ValveClose失败，原因：Valve keep open。
[Save Log Job] 2024-10-24 17:06:44.919 LOG.INFO UiEvent.cs Line:51 Event() - System Recipe completely run
[Save Log Job] 2024-10-24 17:06:44.919 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-10-24 17:06:46.403 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC1 ValveClose失败，原因：Valve keep open。
[Save Log Job] 2024-10-24 17:06:52.165 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC2 ValveClose失败，原因：Valve keep open。
[Save Log Job] 2024-10-24 17:06:52.165 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC3 ValveClose失败，原因：Valve keep open。
[Save Log Job] 2024-10-24 17:06:52.166 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC4 ValveClose失败，原因：Valve keep open。
[Save Log Job] 2024-10-24 17:06:52.170 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC5 ValveClose失败，原因：Valve keep open。
[Save Log Job] 2024-10-24 17:10:50.453 LOG.INFO UiEvent.cs Line:51 Event() - System PLC heart beat check failed，please confirm PLC still running