Triton_160/Triton160RT/Config/_ioDefineTriton160.xml

<?xml version='1.0'?>
<IO_DEFINE xmlns:xsi='http://www.w3.org/2001/XMLSchema-instance' xmlns:xsd='http://www.w3.org/2001/XMLSchema'>
  <!--文件根据C:\Luyun\Project\Jet\code_plasma\trunk\Triton160\Document\Triton_160_IO_list for sofeware_V2.00.xlsx生成-->
  <!--生成时间：2019/7/8 11:14:23-->

  <Dig_In>
    <DI_ITEM Index="0" Expected="1" Name="DI_EMG_stop_botton" NeedLatch="0" LatchWhen="0" NeedNoiseFilter="0" FilterTime_Ms="0" IsSoftwareDI="0" Addr="w20.00"   />
    <DI_ITEM Index="1" Expected="1" Name="DI_EMO_relay" NeedLatch="0" LatchWhen="0" NeedNoiseFilter="0" FilterTime_Ms="0" IsSoftwareDI="0" Addr="w20.01"   />
    <DI_ITEM Index="2" Expected="1" Name="DI_Main_conctactor" NeedLatch="0" LatchWhen="0" NeedNoiseFilter="0" FilterTime_Ms="0" IsSoftwareDI="0" Addr="w20.02"   />
    <DI_ITEM Index="3" Expected="1" Name="DI_Booster_Alarm" NeedLatch="0" LatchWhen="0" NeedNoiseFilter="0" FilterTime_Ms="0" IsSoftwareDI="0" Addr="w20.03"   />
    <DI_ITEM Index="4" Expected="1" Name="DI_Booster_Running" NeedLatch="0" LatchWhen="0" NeedNoiseFilter="0" FilterTime_Ms="0" IsSoftwareDI="0" Addr="w20.04"   />
    <DI_ITEM Index="5" Expected="1" Name="DI_Syetem_reset_button" NeedLatch="0" LatchWhen="0" NeedNoiseFilter="0" FilterTime_Ms="0" IsSoftwareDI="0" Addr="w20.05"   />
    <DI_ITEM Index="6" Expected="1" Name="DI_Lever1_pump_temp_warnning" NeedLatch="0" LatchWhen="0" NeedNoiseFilter="0" FilterTime_Ms="0" IsSoftwareDI="0" Addr="w20.06"   />
    <DI_ITEM Index="7" Expected="1" Name="DI_Lever1_pump_temp_alarm" NeedLatch="0" LatchWhen="0" NeedNoiseFilter="0" FilterTime_Ms="0" IsSoftwareDI="0" Addr="w20.07"   />
    <DI_ITEM Index="8" Expected="1" Name="" NeedLatch="0" LatchWhen="0" NeedNoiseFilter="0" FilterTime_Ms="0" IsSoftwareDI="0" Addr="" />
    <DI_ITEM Index="9" Expected="1"  Name="DI_RF_CB_alarm" NeedLatch="0" LatchWhen="0" NeedNoiseFilter="0" FilterTime_Ms="0" IsSoftwareDI="0" Addr="w20.09" />
    <DI_ITEM Index="10" Expected="1" Name="DI_RF_hardware_interlock" NeedLatch="0" LatchWhen="0" NeedNoiseFilter="0" FilterTime_Ms="0" IsSoftwareDI="0" Addr="w20.10"   />
    <DI_ITEM Index="11" Expected="1" Name="DI_Chamber_door_sw" NeedLatch="0" LatchWhen="0" NeedNoiseFilter="0" FilterTime_Ms="0" IsSoftwareDI="0" Addr="w20.11"   />
	<!--<DI_ITEM Index="12" Expected="1" Name="DI_back_panle_door_sw" NeedLatch="0" LatchWhen="0" NeedNoiseFilter="0" FilterTime_Ms="0" IsSoftwareDI="1" Addr="w20.12"   />-->
	<DI_ITEM Index="13" Expected="1" Name="" NeedLatch="0" LatchWhen="0" NeedNoiseFilter="0" FilterTime_Ms="0" IsSoftwareDI="0" Addr="" />
	<!--<DI_ITEM Index="14" Expected="1" Name="DI_pump_door_sw" NeedLatch="0" LatchWhen="0" NeedNoiseFilter="0" FilterTime_Ms="0" IsSoftwareDI="1" Addr="w20.14"   />-->
    <DI_ITEM Index="15" Expected="1" Name="DI_RF_power_state_fb" NeedLatch="0" LatchWhen="0" NeedNoiseFilter="0" FilterTime_Ms="0" IsSoftwareDI="0" Addr="w20.15"   />
    <DI_ITEM Index="16" Expected="1" Name="DI_N2_in__range" NeedLatch="0" LatchWhen="0" NeedNoiseFilter="0" FilterTime_Ms="0" IsSoftwareDI="0" Addr="w21.00"   />
    <DI_ITEM Index="17" Expected="1" Name="DI_Water_flow_in_range" NeedLatch="0" LatchWhen="0" NeedNoiseFilter="0" FilterTime_Ms="0" IsSoftwareDI="0" Addr="w21.01"   />
    <DI_ITEM Index="18" Expected="1" Name="DI_Water_flow_over_range" NeedLatch="0" LatchWhen="0" NeedNoiseFilter="0" FilterTime_Ms="0" IsSoftwareDI="0" Addr="w21.02"   />
    <DI_ITEM Index="19" Expected="1" Name="" NeedLatch="0" LatchWhen="0" NeedNoiseFilter="0" FilterTime_Ms="0" IsSoftwareDI="0" Addr="" />
    <DI_ITEM Index="20" Expected="1" Name="" NeedLatch="0" LatchWhen="0" NeedNoiseFilter="0" FilterTime_Ms="0" IsSoftwareDI="0" Addr="" />
    <DI_ITEM Index="21" Expected="1" Name="DI_Lever1_pump_running" NeedLatch="0" LatchWhen="0" NeedNoiseFilter="0" FilterTime_Ms="0" IsSoftwareDI="0" Addr="w21.05"   />
    <DI_ITEM Index="22" Expected="1" Name="DI_Booster_pump_power_on_" NeedLatch="0" LatchWhen="0" NeedNoiseFilter="0" FilterTime_Ms="0" IsSoftwareDI="0" Addr="w21.06"   />
    <DI_ITEM Index="23" Expected="1" Name="" NeedLatch="0" LatchWhen="0" NeedNoiseFilter="0" FilterTime_Ms="0" IsSoftwareDI="0" Addr="" />
    <DI_ITEM Index="24" Expected="1" Name="DI_Lever1_pump_stop_bt" NeedLatch="0" LatchWhen="0" NeedNoiseFilter="0" FilterTime_Ms="0" IsSoftwareDI="0" Addr="w21.08"   />
    <DI_ITEM Index="25" Expected="1" Name="DI_Lever1_pump_overload" NeedLatch="0" LatchWhen="0" NeedNoiseFilter="0" FilterTime_Ms="0" IsSoftwareDI="0" Addr="w21.09"   />
    <DI_ITEM Index="26" Expected="1" Name="" NeedLatch="0" LatchWhen="0" NeedNoiseFilter="0" FilterTime_Ms="0" IsSoftwareDI="0" Addr="" />
    <DI_ITEM Index="27" Expected="1" Name="DI_RF_over_temp_" NeedLatch="0" LatchWhen="0" NeedNoiseFilter="0" FilterTime_Ms="0" IsSoftwareDI="0" Addr="w21.11"   />
    <DI_ITEM Index="28" Expected="1" Name="DI_Lever1_pump_CB_alarm" NeedLatch="0" LatchWhen="0" NeedNoiseFilter="0" FilterTime_Ms="0" IsSoftwareDI="0" Addr="w21.12" />
    <DI_ITEM Index="29" Expected="1" Name="DI_ROOTS_pump_CB_alarm" NeedLatch="0" LatchWhen="0" NeedNoiseFilter="0" FilterTime_Ms="0" IsSoftwareDI="0" Addr="w21.13" />
    <DI_ITEM Index="30" Expected="1" Name="" NeedLatch="0" LatchWhen="0" NeedNoiseFilter="0" FilterTime_Ms="0" IsSoftwareDI="0" Addr="" />
    <DI_ITEM Index="31" Expected="1" Name="DI_Lever1_pump_start_bt" NeedLatch="0" LatchWhen="0" NeedNoiseFilter="0" FilterTime_Ms="0" IsSoftwareDI="0" Addr="w21.15"   />
    <DI_ITEM Index="32" Expected="1" Name="DI_Pump_N2_pressure_alam" NeedLatch="0" LatchWhen="0" NeedNoiseFilter="0" FilterTime_Ms="0" IsSoftwareDI="0" Addr="w22.00"   />
    <DI_ITEM Index="33" Expected="1" Name="DI_Pump_water_flow_alam" NeedLatch="0" LatchWhen="0" NeedNoiseFilter="0" FilterTime_Ms="0" IsSoftwareDI="0" Addr="w22.01"   />
    <DI_ITEM Index="34" Expected="1" Name="" NeedLatch="0" LatchWhen="0" NeedNoiseFilter="0" FilterTime_Ms="0" IsSoftwareDI="0" Addr="" />
    <DI_ITEM Index="35" Expected="1" Name="" NeedLatch="0" LatchWhen="0" NeedNoiseFilter="0" FilterTime_Ms="0" IsSoftwareDI="0" Addr="" />
    <DI_ITEM Index="36" Expected="1" Name="" NeedLatch="0" LatchWhen="0" NeedNoiseFilter="0" FilterTime_Ms="0" IsSoftwareDI="0" Addr="" />
    <DI_ITEM Index="37" Expected="1" Name="" NeedLatch="0" LatchWhen="0" NeedNoiseFilter="0" FilterTime_Ms="0" IsSoftwareDI="0" Addr="" />
    <DI_ITEM Index="38" Expected="1" Name="" NeedLatch="0" LatchWhen="0" NeedNoiseFilter="0" FilterTime_Ms="0" IsSoftwareDI="0" Addr="" />
    <DI_ITEM Index="39" Expected="1" Name="" NeedLatch="0" LatchWhen="0" NeedNoiseFilter="0" FilterTime_Ms="0" IsSoftwareDI="0" Addr="" />
    <DI_ITEM Index="40" Expected="1" Name="" NeedLatch="0" LatchWhen="0" NeedNoiseFilter="0" FilterTime_Ms="0" IsSoftwareDI="0" Addr="" />
    <DI_ITEM Index="41" Expected="1" Name="" NeedLatch="0" LatchWhen="0" NeedNoiseFilter="0" FilterTime_Ms="0" IsSoftwareDI="0" Addr="" />
    <DI_ITEM Index="42" Expected="1" Name="" NeedLatch="0" LatchWhen="0" NeedNoiseFilter="0" FilterTime_Ms="0" IsSoftwareDI="0" Addr="" />
    <DI_ITEM Index="43" Expected="1" Name="" NeedLatch="0" LatchWhen="0" NeedNoiseFilter="0" FilterTime_Ms="0" IsSoftwareDI="0" Addr="" />
    <DI_ITEM Index="44" Expected="1" Name="" NeedLatch="0" LatchWhen="0" NeedNoiseFilter="0" FilterTime_Ms="0" IsSoftwareDI="0" Addr="" />
    <DI_ITEM Index="45" Expected="1" Name="" NeedLatch="0" LatchWhen="0" NeedNoiseFilter="0" FilterTime_Ms="0" IsSoftwareDI="0" Addr="" />
    <DI_ITEM Index="46" Expected="1" Name="" NeedLatch="0" LatchWhen="0" NeedNoiseFilter="0" FilterTime_Ms="0" IsSoftwareDI="0" Addr="" />
    <DI_ITEM Index="47" Expected="1" Name="" NeedLatch="0" LatchWhen="0" NeedNoiseFilter="0" FilterTime_Ms="0" IsSoftwareDI="0" Addr="" />
    <DI_ITEM Index="48" Expected="1" Name="" NeedLatch="0" LatchWhen="0" NeedNoiseFilter="0" FilterTime_Ms="0" IsSoftwareDI="0" Addr="" />
    <DI_ITEM Index="49" Expected="1" Name="" NeedLatch="0" LatchWhen="0" NeedNoiseFilter="0" FilterTime_Ms="0" IsSoftwareDI="0" Addr="" />
    <DI_ITEM Index="50" Expected="1" Name="" NeedLatch="0" LatchWhen="0" NeedNoiseFilter="0" FilterTime_Ms="0" IsSoftwareDI="0" Addr="" />
    <DI_ITEM Index="51" Expected="1" Name="" NeedLatch="0" LatchWhen="0" NeedNoiseFilter="0" FilterTime_Ms="0" IsSoftwareDI="0" Addr="" />
    <DI_ITEM Index="52" Expected="1" Name="" NeedLatch="0" LatchWhen="0" NeedNoiseFilter="0" FilterTime_Ms="0" IsSoftwareDI="0" Addr="" />
    <DI_ITEM Index="53" Expected="1" Name="" NeedLatch="0" LatchWhen="0" NeedNoiseFilter="0" FilterTime_Ms="0" IsSoftwareDI="0" Addr="" />
    <DI_ITEM Index="54" Expected="1" Name="" NeedLatch="0" LatchWhen="0" NeedNoiseFilter="0" FilterTime_Ms="0" IsSoftwareDI="0" Addr="" />
    <DI_ITEM Index="55" Expected="1" Name="" NeedLatch="0" LatchWhen="0" NeedNoiseFilter="0" FilterTime_Ms="0" IsSoftwareDI="0" Addr="" />
    <DI_ITEM Index="56" Expected="1" Name="DI_Process_gas_final_valve_state_fb" NeedLatch="0" LatchWhen="0" NeedNoiseFilter="0" FilterTime_Ms="0" IsSoftwareDI="0" Addr="w23.08"   />
    <DI_ITEM Index="57" Expected="1" Name="DI_Pumping_valve_state_fb" NeedLatch="0" LatchWhen="0" NeedNoiseFilter="0" FilterTime_Ms="0" IsSoftwareDI="0" Addr="w23.09"   />
    <DI_ITEM Index="58" Expected="1" Name="DI_Chamber_vent_valve_state_fb" NeedLatch="0" LatchWhen="0" NeedNoiseFilter="0" FilterTime_Ms="0" IsSoftwareDI="0" Addr="w23.10"   />
    <DI_ITEM Index="59" Expected="1" Name="" NeedLatch="0" LatchWhen="0" NeedNoiseFilter="0" FilterTime_Ms="0" IsSoftwareDI="0" Addr="" />
    <DI_ITEM Index="60" Expected="1" Name="" NeedLatch="0" LatchWhen="0" NeedNoiseFilter="0" FilterTime_Ms="0" IsSoftwareDI="0" Addr="" />
    <DI_ITEM Index="61" Expected="1" Name="" NeedLatch="0" LatchWhen="0" NeedNoiseFilter="0" FilterTime_Ms="0" IsSoftwareDI="0" Addr="" />
    <DI_ITEM Index="62" Expected="1" Name="" NeedLatch="0" LatchWhen="0" NeedNoiseFilter="0" FilterTime_Ms="0" IsSoftwareDI="0" Addr="" />
    <DI_ITEM Index="63" Expected="1" Name="" NeedLatch="0" LatchWhen="0" NeedNoiseFilter="0" FilterTime_Ms="0" IsSoftwareDI="0" Addr="" />
    <DI_ITEM Index="64" Expected="1" Name="DI_MFC1_valve_state_fb" NeedLatch="0" LatchWhen="0" NeedNoiseFilter="0" FilterTime_Ms="0" IsSoftwareDI="0" Addr="w24.00"   />
    <DI_ITEM Index="65" Expected="1" Name="DI_MFC2_valve_state_fb" NeedLatch="0" LatchWhen="0" NeedNoiseFilter="0" FilterTime_Ms="0" IsSoftwareDI="0" Addr="w24.01"   />
    <DI_ITEM Index="66" Expected="1" Name="DI_MFC3_valve_state_fb" NeedLatch="0" LatchWhen="0" NeedNoiseFilter="0" FilterTime_Ms="0" IsSoftwareDI="0" Addr="w24.02"   />
    <DI_ITEM Index="67" Expected="1" Name="DI_MFC4_valve_state_fb" NeedLatch="0" LatchWhen="0" NeedNoiseFilter="0" FilterTime_Ms="0" IsSoftwareDI="0" Addr="w24.03"   />
    <DI_ITEM Index="68" Expected="1" Name="DI_MFC5_valve_state_fb" NeedLatch="0" LatchWhen="0" NeedNoiseFilter="0" FilterTime_Ms="0" IsSoftwareDI="0" Addr="w24.04"   />
    <DI_ITEM Index="69" Expected="1" Name="DI_Chamber_purge_valve_state_fb" NeedLatch="0" LatchWhen="0" NeedNoiseFilter="0" FilterTime_Ms="0" IsSoftwareDI="0" Addr="w24.05"   />
    <DI_ITEM Index="70" Expected="1" Name="" NeedLatch="0" LatchWhen="0" NeedNoiseFilter="0" FilterTime_Ms="0" IsSoftwareDI="0" Addr="" />
    <DI_ITEM Index="71" Expected="1" Name="" NeedLatch="0" LatchWhen="0" NeedNoiseFilter="0" FilterTime_Ms="0" IsSoftwareDI="0" Addr="" />
    <DI_ITEM Index="72" Expected="1" Name="" NeedLatch="0" LatchWhen="0" NeedNoiseFilter="0" FilterTime_Ms="0" IsSoftwareDI="0" Addr="" />
    <DI_ITEM Index="73" Expected="1" Name="" NeedLatch="0" LatchWhen="0" NeedNoiseFilter="0" FilterTime_Ms="0" IsSoftwareDI="0" Addr="" />
    <DI_ITEM Index="74" Expected="1" Name="DI_Yellow_light_fb" NeedLatch="0" LatchWhen="0" NeedNoiseFilter="0" FilterTime_Ms="0" IsSoftwareDI="0" Addr="w24.10"   />
    <DI_ITEM Index="75" Expected="1" Name="DI_Green_light_fb" NeedLatch="0" LatchWhen="0" NeedNoiseFilter="0" FilterTime_Ms="0" IsSoftwareDI="0" Addr="w24.11"   />
    <DI_ITEM Index="76" Expected="1" Name="DI_Red_light_fb" NeedLatch="0" LatchWhen="0" NeedNoiseFilter="0" FilterTime_Ms="0" IsSoftwareDI="0" Addr="w24.12"   />
    <DI_ITEM Index="77" Expected="1" Name="DI_Buzzer_fb" NeedLatch="0" LatchWhen="0" NeedNoiseFilter="0" FilterTime_Ms="0" IsSoftwareDI="0" Addr="w24.13"   />
    <DI_ITEM Index="78" Expected="1" Name="" NeedLatch="0" LatchWhen="0" NeedNoiseFilter="0" FilterTime_Ms="0" IsSoftwareDI="0" Addr="" />
    <DI_ITEM Index="79" Expected="1" Name="" NeedLatch="0" LatchWhen="0" NeedNoiseFilter="0" FilterTime_Ms="0" IsSoftwareDI="0" Addr="" />
    <DI_ITEM Index="80" Expected="1" Name="" NeedLatch="0" LatchWhen="0" NeedNoiseFilter="0" FilterTime_Ms="0" IsSoftwareDI="0" Addr="" />
    <DI_ITEM Index="81" Expected="1" Name="" NeedLatch="0" LatchWhen="0" NeedNoiseFilter="0" FilterTime_Ms="0" IsSoftwareDI="0" Addr="" />
    <DI_ITEM Index="82" Expected="1" Name="" NeedLatch="0" LatchWhen="0" NeedNoiseFilter="0" FilterTime_Ms="0" IsSoftwareDI="0" Addr="" />
    <DI_ITEM Index="83" Expected="1" Name="" NeedLatch="0" LatchWhen="0" NeedNoiseFilter="0" FilterTime_Ms="0" IsSoftwareDI="0" Addr="" />
    <DI_ITEM Index="84" Expected="1" Name="" NeedLatch="0" LatchWhen="0" NeedNoiseFilter="0" FilterTime_Ms="0" IsSoftwareDI="0" Addr="" />
    <DI_ITEM Index="85" Expected="1" Name="" NeedLatch="0" LatchWhen="0" NeedNoiseFilter="0" FilterTime_Ms="0" IsSoftwareDI="0" Addr="" />
    <DI_ITEM Index="86" Expected="1" Name="" NeedLatch="0" LatchWhen="0" NeedNoiseFilter="0" FilterTime_Ms="0" IsSoftwareDI="0" Addr="" />
    <DI_ITEM Index="87" Expected="1" Name="" NeedLatch="0" LatchWhen="0" NeedNoiseFilter="0" FilterTime_Ms="0" IsSoftwareDI="0" Addr="" />
    <DI_ITEM Index="88" Expected="1" Name="" NeedLatch="0" LatchWhen="0" NeedNoiseFilter="0" FilterTime_Ms="0" IsSoftwareDI="0" Addr="" />
    <DI_ITEM Index="89" Expected="1" Name="" NeedLatch="0" LatchWhen="0" NeedNoiseFilter="0" FilterTime_Ms="0" IsSoftwareDI="0" Addr="" />
    <DI_ITEM Index="90" Expected="1" Name="" NeedLatch="0" LatchWhen="0" NeedNoiseFilter="0" FilterTime_Ms="0" IsSoftwareDI="0" Addr="" />
    <DI_ITEM Index="91" Expected="1" Name="" NeedLatch="0" LatchWhen="0" NeedNoiseFilter="0" FilterTime_Ms="0" IsSoftwareDI="0" Addr="" />
    <DI_ITEM Index="92" Expected="1" Name="" NeedLatch="0" LatchWhen="0" NeedNoiseFilter="0" FilterTime_Ms="0" IsSoftwareDI="0" Addr="" />
    <DI_ITEM Index="93" Expected="1" Name="" NeedLatch="0" LatchWhen="0" NeedNoiseFilter="0" FilterTime_Ms="0" IsSoftwareDI="0" Addr="" />
    <DI_ITEM Index="94" Expected="1" Name="" NeedLatch="0" LatchWhen="0" NeedNoiseFilter="0" FilterTime_Ms="0" IsSoftwareDI="0" Addr="" />
    <DI_ITEM Index="95" Expected="1" Name="" NeedLatch="0" LatchWhen="0" NeedNoiseFilter="0" FilterTime_Ms="0" IsSoftwareDI="0" Addr="" />
    <DI_ITEM Index="96" Expected="1" Name="" NeedLatch="0" LatchWhen="0" NeedNoiseFilter="0" FilterTime_Ms="0" IsSoftwareDI="0" Addr="" />
    <DI_ITEM Index="97" Expected="1" Name="" NeedLatch="0" LatchWhen="0" NeedNoiseFilter="0" FilterTime_Ms="0" IsSoftwareDI="0" Addr="" />
    <DI_ITEM Index="98" Expected="1" Name="" NeedLatch="0" LatchWhen="0" NeedNoiseFilter="0" FilterTime_Ms="0" IsSoftwareDI="0" Addr="" />
  </Dig_In>
  <Dig_Out>
    <DO_ITEM Index="0" Name="DO_N2_pressure_alarm" Safe_Feedback_Index="-1"  Addr="w4.00" />
    <DO_ITEM Index="1" Name="DO_Pump_water_flow_alarm_" Safe_Feedback_Index="-1"  Addr="w4.01" />
    <DO_ITEM Index="2" Name="" Safe_Feedback_Index="0"  Addr="" />
    <DO_ITEM Index="3" Name="" Safe_Feedback_Index="0"  Addr="" />
    <DO_ITEM Index="4" Name="" Safe_Feedback_Index="0"  Addr="" />
    <DO_ITEM Index="5" Name="" Safe_Feedback_Index="0"  Addr="" />
    <DO_ITEM Index="6" Name="" Safe_Feedback_Index="0"  Addr="" />
    <DO_ITEM Index="7" Name="" Safe_Feedback_Index="0"  Addr="" />
    <DO_ITEM Index="8" Name="" Safe_Feedback_Index="0"  Addr="" />
    <DO_ITEM Index="9" Name="" Safe_Feedback_Index="0"  Addr="" />
    <DO_ITEM Index="10" Name="" Safe_Feedback_Index="0"  Addr="" />
    <DO_ITEM Index="11" Name="" Safe_Feedback_Index="0"  Addr="" />
    <DO_ITEM Index="12" Name="" Safe_Feedback_Index="0"  Addr="" />
    <DO_ITEM Index="13" Name="" Safe_Feedback_Index="0"  Addr="" />
    <DO_ITEM Index="14" Name="" Safe_Feedback_Index="0"  Addr="" />
    <DO_ITEM Index="15" Name="" Safe_Feedback_Index="0"  Addr="" />
    <DO_ITEM Index="16" Name="DO_RF_on_off" Safe_Feedback_Index="-1"  Addr="w5.00" />
    <DO_ITEM Index="17" Name="DO_reset_signal" Safe_Feedback_Index="-1"  Addr="w5.01" />
    <DO_ITEM Index="18" Name="" Safe_Feedback_Index="0"  Addr="" />
    <DO_ITEM Index="19" Name="" Safe_Feedback_Index="0"  Addr="" />
    <DO_ITEM Index="20" Name="" Safe_Feedback_Index="0"  Addr="" />
    <DO_ITEM Index="21" Name="" Safe_Feedback_Index="0"  Addr="" />
    <DO_ITEM Index="22" Name="" Safe_Feedback_Index="0"  Addr="" />
    <DO_ITEM Index="23" Name="" Safe_Feedback_Index="0"  Addr="" />
    <DO_ITEM Index="24" Name="" Safe_Feedback_Index="0"  Addr="" />
    <DO_ITEM Index="25" Name="" Safe_Feedback_Index="0"  Addr="" />
    <DO_ITEM Index="26" Name="" Safe_Feedback_Index="0"  Addr="" />
    <DO_ITEM Index="27" Name="" Safe_Feedback_Index="0"  Addr="" />
    <DO_ITEM Index="28" Name="" Safe_Feedback_Index="0"  Addr="" />
    <DO_ITEM Index="29" Name="" Safe_Feedback_Index="0"  Addr="" />
    <DO_ITEM Index="30" Name="" Safe_Feedback_Index="0"  Addr="" />
    <DO_ITEM Index="31" Name="" Safe_Feedback_Index="0"  Addr="" />
    <DO_ITEM Index="32" Name="DO_MFC1_valve__" Safe_Feedback_Index="-1"  Addr="w6.00" />
    <DO_ITEM Index="33" Name="DO_MFC2_valve" Safe_Feedback_Index="-1"  Addr="w6.01" />
    <DO_ITEM Index="34" Name="DO_MFC3_valve" Safe_Feedback_Index="-1"  Addr="w6.02" />
    <DO_ITEM Index="35" Name="DO_MFC4_valve" Safe_Feedback_Index="-1"  Addr="w6.03" />
    <DO_ITEM Index="36" Name="DO_MFC5_valve" Safe_Feedback_Index="-1"  Addr="w6.04" />
    <DO_ITEM Index="37" Name="DO_Chamber_purge_valve" Safe_Feedback_Index="-1"  Addr="w6.05" />
    <DO_ITEM Index="38" Name="" Safe_Feedback_Index="0"  Addr="" />
    <DO_ITEM Index="39" Name="" Safe_Feedback_Index="0"  Addr="" />
    <DO_ITEM Index="40" Name="" Safe_Feedback_Index="0"  Addr="" />
    <DO_ITEM Index="41" Name="" Safe_Feedback_Index="0"  Addr="" />
    <DO_ITEM Index="42" Name="DO_Yellow_light" Safe_Feedback_Index="-1"  Addr="w6.10" />
    <DO_ITEM Index="43" Name="DO_Green_light" Safe_Feedback_Index="-1"  Addr="w6.11" />
    <DO_ITEM Index="44" Name="DO_Red_light" Safe_Feedback_Index="-1"  Addr="w6.12" />
    <DO_ITEM Index="45" Name="DO_Buzzer" Safe_Feedback_Index="-1"  Addr="w6.13" />
    <DO_ITEM Index="46" Name="" Safe_Feedback_Index="0"  Addr="" />
    <DO_ITEM Index="47" Name="" Safe_Feedback_Index="0"  Addr="" />
    <DO_ITEM Index="48" Name="DO_Process_gas_final_valve" Safe_Feedback_Index="-1"  Addr="w0.00" />
    <DO_ITEM Index="49" Name="DO_Pumping_valve_" Safe_Feedback_Index="-1"  Addr="w0.01" />
    <DO_ITEM Index="50" Name="DO_Chamber_vent_valve" Safe_Feedback_Index="-1"  Addr="w0.02" />
    <DO_ITEM Index="51" Name="" Safe_Feedback_Index="0"  Addr="" />
    <DO_ITEM Index="52" Name="" Safe_Feedback_Index="0"  Addr="" />
    <DO_ITEM Index="53" Name="" Safe_Feedback_Index="0"  Addr="" />
    <DO_ITEM Index="54" Name="" Safe_Feedback_Index="0"  Addr="" />
    <DO_ITEM Index="55" Name="" Safe_Feedback_Index="0"  Addr="" />
    <DO_ITEM Index="56" Name="" Safe_Feedback_Index="0"  Addr="" />
    <DO_ITEM Index="57" Name="" Safe_Feedback_Index="0"  Addr="" />
    <DO_ITEM Index="58" Name="" Safe_Feedback_Index="0"  Addr="" />
    <DO_ITEM Index="59" Name="" Safe_Feedback_Index="0"  Addr="" />
    <DO_ITEM Index="60" Name="" Safe_Feedback_Index="0"  Addr="" />
    <DO_ITEM Index="61" Name="" Safe_Feedback_Index="0"  Addr="" />
    <DO_ITEM Index="62" Name="" Safe_Feedback_Index="0"  Addr="" />
    <DO_ITEM Index="63" Name="" Safe_Feedback_Index="0"  Addr="" />
    <DO_ITEM Index="64" Name="" Safe_Feedback_Index="0"  Addr="" />
    <DO_ITEM Index="65" Name="" Safe_Feedback_Index="0"  Addr="" />
    <DO_ITEM Index="66" Name="" Safe_Feedback_Index="0"  Addr="" />
    <DO_ITEM Index="67" Name="" Safe_Feedback_Index="0"  Addr="" />
    <DO_ITEM Index="68" Name="" Safe_Feedback_Index="0"  Addr="" />
    <DO_ITEM Index="69" Name="" Safe_Feedback_Index="0"  Addr="" />
    <DO_ITEM Index="70" Name="" Safe_Feedback_Index="0"  Addr="" />
  </Dig_Out>
  <Ana_Out>
    <AO_ITEM Index="0" Name="AO_match_C1_position_setpoint"   Addr="d1000"/>
    <AO_ITEM Index="1" Name="AO_match_C2_position_setpoint"   Addr="d1002"/>
    <AO_ITEM Index="2" Name="AO_match_work_mode_setpoint"   Addr="d1004"/>
    <AO_ITEM Index="3" Name="AO_match_hold_or_preset_setpoint"   Addr="d1006"/>
    <AO_ITEM Index="4" Name=""  Addr="" />
    <AO_ITEM Index="5" Name=""  Addr="" />
    <AO_ITEM Index="6" Name=""  Addr="" />
    <AO_ITEM Index="7" Name=""  Addr="" />
    <AO_ITEM Index="8" Name="AO_RF_work_mode_set"   Addr="d1016"/>
    <AO_ITEM Index="9" Name="AO_RF_power_setpoint"   Addr="d1018"/>
    <AO_ITEM Index="10" Name="AO_RF_Pulsing_Frequency_setpoint"   Addr="d1020"/>
    <AO_ITEM Index="11" Name="AO_RF_Pulsing_duty_cycle_setpoint"   Addr="d1022"/>
    <AO_ITEM Index="12" Name="AO_MFC1_flow_setpoint"   Addr="d1024"/>
    <AO_ITEM Index="13" Name="AO_MFC2_flow_setpoint"   Addr="d1026"/>
    <AO_ITEM Index="14" Name="AO_MFC3_flow_setpoint"   Addr="d1028"/>
    <AO_ITEM Index="15" Name="AO_MFC4_flow_setpoint"   Addr="d1030"/>
    <AO_ITEM Index="16" Name="AO_MFC5_flow_setpoint"   Addr="d1032"/>
    <AO_ITEM Index="17" Name="AO_Throttle_valve_work_mode"   Addr="d1034"/>
    <AO_ITEM Index="18" Name="AO_Throttle_valve_pressure_setpoint"   Addr="d1036"/>
    <AO_ITEM Index="19" Name="AO_Throttle_valve_position_setpoint"   Addr="d1038"/>
    <AO_ITEM Index="20" Name=""  Addr="" />
    <AO_ITEM Index="21" Name=""  Addr="" />
    <AO_ITEM Index="22" Name=""  Addr="" />
    <AO_ITEM Index="23" Name=""  Addr="" />
    <AO_ITEM Index="24" Name=""  Addr="" />
    <AO_ITEM Index="25" Name=""  Addr="" />
    <AO_ITEM Index="26" Name=""  Addr="" />
    <AO_ITEM Index="27" Name=""  Addr="" />
    <AO_ITEM Index="28" Name=""  Addr="" />
    <AO_ITEM Index="29" Name=""  Addr="" />
    <AO_ITEM Index="30" Name="AO_heartbeat"   Addr="d1060"/>
    <AO_ITEM Index="31" Name=""  Addr="" />
    <AO_ITEM Index="32" Name="AO_MFC1_actual_range"   Addr="d1064"/>
    <AO_ITEM Index="33" Name="AO_MFC2_actual_range"   Addr="d1066"/>
    <AO_ITEM Index="34" Name="AO_MFC3_actual_range"   Addr="d1068"/>
    <AO_ITEM Index="35" Name="AO_MFC4_actual_range"   Addr="d1070"/>
    <AO_ITEM Index="36" Name="AO_MFC5_actual_range"   Addr="d1072"/>
    <AO_ITEM Index="37" Name=""  Addr="" />
    <AO_ITEM Index="38" Name=""  Addr="" />
    <AO_ITEM Index="39" Name=""  Addr="" />
    <AO_ITEM Index="40" Name="AO_booster_pressure_control_enable"   Addr="d1080"/>
    <AO_ITEM Index="41" Name="AO_booster_pressure_control_setpoint"   Addr="d1082"/>
    <AO_ITEM Index="42" Name="AO_RF_match_coefficient"   Addr="d1084"/>
    <AO_ITEM Index="43" Name="AO_N2_pressure_alarm_setpoint_Min_"   Addr="d1086"/>
    <AO_ITEM Index="44" Name="AO_N2_pressure_alarm_setpoint_Max_"   Addr="d1088"/>
    <AO_ITEM Index="45" Name="AO_Water_flow_alarm_setpoint_Min_"   Addr="d1090"/>
    <AO_ITEM Index="46" Name="AO_Water_flow_alarm_setpoint_Max_"   Addr="d1092"/>
    <AO_ITEM Index="47" Name=""  Addr="" />
    <AO_ITEM Index="48" Name=""  Addr="" />
    <AO_ITEM Index="49" Name=""  Addr="" />
    <AO_ITEM Index="50" Name=""  Addr="" />
    <AO_ITEM Index="51" Name=""  Addr="" />
    <AO_ITEM Index="52" Name=""  Addr="" />
    <AO_ITEM Index="53" Name=""  Addr="" />
    <AO_ITEM Index="54" Name=""  Addr="" />
    <AO_ITEM Index="55" Name=""  Addr="" />
    <AO_ITEM Index="56" Name=""  Addr="" />
    <AO_ITEM Index="57" Name=""  Addr="" />
    <AO_ITEM Index="58" Name=""  Addr="" />
    <AO_ITEM Index="59" Name=""  Addr="" />
    <AO_ITEM Index="60" Name=""  Addr="" />
  </Ana_Out>
  <Ana_In>
    <AI_ITEM Index="0" Name="AI_Chamber_real_pressure_fb_"   Addr="d2000"/>
    <AI_ITEM Index="1" Name=""  Addr="" />
    <AI_ITEM Index="2" Name="AI_MFC1_real_flow__fb"   Addr="d2004"/>
    <AI_ITEM Index="3" Name="AI_MFC2_real_flow_fb"   Addr="d2006"/>
    <AI_ITEM Index="4" Name="AI_MFC3_real_flow_fb"   Addr="d2008"/>
    <AI_ITEM Index="5" Name="AI_MFC4_real_flow_fb"   Addr="d2010"/>
    <AI_ITEM Index="6" Name="AI_MFC5_real_flow_fb"   Addr="d2012"/>
    <AI_ITEM Index="7" Name=""  Addr="" />
    <AI_ITEM Index="8" Name="AI_RF_forward_power_fb"   Addr="d2016"/>
    <AI_ITEM Index="9" Name="AI_RF_reflect_power_fb"   Addr="d2018"/>
    <AI_ITEM Index="10" Name=""  Addr="" />
    <AI_ITEM Index="11" Name=""  Addr="" />
    <AI_ITEM Index="12" Name=""  Addr="" />
    <AI_ITEM Index="13" Name=""  Addr="" />
    <AI_ITEM Index="14" Name=""  Addr="" />
    <AI_ITEM Index="15" Name=""  Addr="" />
    <AI_ITEM Index="16" Name=""  Addr="" />
    <AI_ITEM Index="17" Name=""  Addr="" />
    <AI_ITEM Index="18" Name=""  Addr="" />
    <AI_ITEM Index="19" Name=""  Addr="" />
    <AI_ITEM Index="20" Name="AI_Thorttle_valve_real_position_fb"   Addr="d2040"/>
    <AI_ITEM Index="21" Name="AI_Thorttle_valve_real_pressure_fb"   Addr="d2042"/>
    <AI_ITEM Index="22" Name="AI_thorttle_valve_state"   Addr="d2044"/>
    <AI_ITEM Index="23" Name=""  Addr="" />
    <AI_ITEM Index="24" Name=""  Addr="" />
    <AI_ITEM Index="25" Name="AI_heartbeat_fb"   Addr="d2050"/>
    <AI_ITEM Index="26" Name=""  Addr="" />
    <AI_ITEM Index="27" Name="AI_match_c1_positon_fb"   Addr="d2054"/>
    <AI_ITEM Index="28" Name="AI_match_c2_positon_fb"   Addr="d2056"/>
    <AI_ITEM Index="29" Name="AI_match_work_mode_fb"   Addr="d2058"/>
    <AI_ITEM Index="30" Name="AI_match_hold_or_preset_fb"   Addr="d2060"/>
    <AI_ITEM Index="31" Name=""  Addr="" />
    <AI_ITEM Index="32" Name=""  Addr="" />
    <AI_ITEM Index="33" Name=""  Addr="" />
    <AI_ITEM Index="34" Name=""  Addr="" />
    <AI_ITEM Index="35" Name=""  Addr="" />
    <AI_ITEM Index="36" Name=""  Addr="" />
    <AI_ITEM Index="37" Name=""  Addr="" />
    <AI_ITEM Index="38" Name=""  Addr="" />
    <AI_ITEM Index="39" Name=""  Addr="" />
    <AI_ITEM Index="40" Name=""  Addr="" />
    <AI_ITEM Index="41" Name=""  Addr="" />
    <AI_ITEM Index="42" Name=""  Addr="" />
    <AI_ITEM Index="43" Name=""  Addr="" />
    <AI_ITEM Index="44" Name="AI_Second"   Addr="d2088"/>
    <AI_ITEM Index="45" Name="AI_Minute"   Addr="d2090"/>
    <AI_ITEM Index="46" Name="AI_Time"   Addr="d2092"/>
    <AI_ITEM Index="47" Name="AI_Day"   Addr="d2094"/>
    <AI_ITEM Index="48" Name="AI_Month"   Addr="d2096"/>
    <AI_ITEM Index="49" Name="AI_Year"   Addr="d2098"/>
    <AI_ITEM Index="50" Name=""  Addr="" />
    <AI_ITEM Index="51" Name=""  Addr="" />
    <AI_ITEM Index="52" Name=""  Addr="" />
    <AI_ITEM Index="53" Name=""  Addr="" />
    <AI_ITEM Index="54" Name=""  Addr="" />
    <AI_ITEM Index="55" Name=""  Addr="" />
    <AI_ITEM Index="56" Name=""  Addr="" />
    <AI_ITEM Index="57" Name=""  Addr="" />
    <AI_ITEM Index="58" Name=""  Addr="" />
    <AI_ITEM Index="59" Name=""  Addr="" />
    <AI_ITEM Index="60" Name=""  Addr="" />
  </Ana_In>
</IO_DEFINE>