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- <?xml version='1.0'?>
- <IO_DEFINE xmlns:xsi='http://www.w3.org/2001/XMLSchema-instance' xmlns:xsd='http://www.w3.org/2001/XMLSchema'>
- <!--文件根据C:\Luyun\Project\Jet\code_plasma\trunk\Triton160\Document\Triton_160_IO_list for sofeware_V2.00.xlsx生成-->
- <!--生成时间:2019/7/8 11:14:23-->
- <Dig_In>
- <DI_ITEM Index="0" Expected="1" Name="DI_EMG_stop_botton" NeedLatch="0" LatchWhen="0" NeedNoiseFilter="0" FilterTime_Ms="0" IsSoftwareDI="0" Addr="w20.00" />
- <DI_ITEM Index="1" Expected="1" Name="DI_EMO_relay" NeedLatch="0" LatchWhen="0" NeedNoiseFilter="0" FilterTime_Ms="0" IsSoftwareDI="0" Addr="w20.01" />
- <DI_ITEM Index="2" Expected="1" Name="DI_Main_conctactor" NeedLatch="0" LatchWhen="0" NeedNoiseFilter="0" FilterTime_Ms="0" IsSoftwareDI="0" Addr="w20.02" />
- <DI_ITEM Index="3" Expected="1" Name="DI_Booster_Alarm" NeedLatch="0" LatchWhen="0" NeedNoiseFilter="0" FilterTime_Ms="0" IsSoftwareDI="0" Addr="w20.03" />
- <DI_ITEM Index="4" Expected="1" Name="DI_Booster_Running" NeedLatch="0" LatchWhen="0" NeedNoiseFilter="0" FilterTime_Ms="0" IsSoftwareDI="0" Addr="w20.04" />
- <DI_ITEM Index="5" Expected="1" Name="DI_Syetem_reset_button" NeedLatch="0" LatchWhen="0" NeedNoiseFilter="0" FilterTime_Ms="0" IsSoftwareDI="0" Addr="w20.05" />
- <DI_ITEM Index="6" Expected="1" Name="DI_Lever1_pump_temp_warnning" NeedLatch="0" LatchWhen="0" NeedNoiseFilter="0" FilterTime_Ms="0" IsSoftwareDI="0" Addr="w20.06" />
- <DI_ITEM Index="7" Expected="1" Name="DI_Lever1_pump_temp_alarm" NeedLatch="0" LatchWhen="0" NeedNoiseFilter="0" FilterTime_Ms="0" IsSoftwareDI="0" Addr="w20.07" />
- <DI_ITEM Index="8" Expected="1" Name="" NeedLatch="0" LatchWhen="0" NeedNoiseFilter="0" FilterTime_Ms="0" IsSoftwareDI="0" Addr="" />
- <DI_ITEM Index="9" Expected="1" Name="DI_RF_CB_alarm" NeedLatch="0" LatchWhen="0" NeedNoiseFilter="0" FilterTime_Ms="0" IsSoftwareDI="0" Addr="w20.09" />
- <DI_ITEM Index="10" Expected="1" Name="DI_RF_hardware_interlock" NeedLatch="0" LatchWhen="0" NeedNoiseFilter="0" FilterTime_Ms="0" IsSoftwareDI="0" Addr="w20.10" />
- <DI_ITEM Index="11" Expected="1" Name="DI_Chamber_door_sw" NeedLatch="0" LatchWhen="0" NeedNoiseFilter="0" FilterTime_Ms="0" IsSoftwareDI="0" Addr="w20.11" />
- <!--<DI_ITEM Index="12" Expected="1" Name="DI_back_panle_door_sw" NeedLatch="0" LatchWhen="0" NeedNoiseFilter="0" FilterTime_Ms="0" IsSoftwareDI="1" Addr="w20.12" />-->
- <DI_ITEM Index="13" Expected="1" Name="" NeedLatch="0" LatchWhen="0" NeedNoiseFilter="0" FilterTime_Ms="0" IsSoftwareDI="0" Addr="" />
- <!--<DI_ITEM Index="14" Expected="1" Name="DI_pump_door_sw" NeedLatch="0" LatchWhen="0" NeedNoiseFilter="0" FilterTime_Ms="0" IsSoftwareDI="1" Addr="w20.14" />-->
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- <DI_ITEM Index="17" Expected="1" Name="DI_Water_flow_in_range" NeedLatch="0" LatchWhen="0" NeedNoiseFilter="0" FilterTime_Ms="0" IsSoftwareDI="0" Addr="w21.01" />
- <DI_ITEM Index="18" Expected="1" Name="DI_Water_flow_over_range" NeedLatch="0" LatchWhen="0" NeedNoiseFilter="0" FilterTime_Ms="0" IsSoftwareDI="0" Addr="w21.02" />
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- <DI_ITEM Index="20" Expected="1" Name="" NeedLatch="0" LatchWhen="0" NeedNoiseFilter="0" FilterTime_Ms="0" IsSoftwareDI="0" Addr="" />
- <DI_ITEM Index="21" Expected="1" Name="DI_Lever1_pump_running" NeedLatch="0" LatchWhen="0" NeedNoiseFilter="0" FilterTime_Ms="0" IsSoftwareDI="0" Addr="w21.05" />
- <DI_ITEM Index="22" Expected="1" Name="DI_Booster_pump_power_on_" NeedLatch="0" LatchWhen="0" NeedNoiseFilter="0" FilterTime_Ms="0" IsSoftwareDI="0" Addr="w21.06" />
- <DI_ITEM Index="23" Expected="1" Name="" NeedLatch="0" LatchWhen="0" NeedNoiseFilter="0" FilterTime_Ms="0" IsSoftwareDI="0" Addr="" />
- <DI_ITEM Index="24" Expected="1" Name="DI_Lever1_pump_stop_bt" NeedLatch="0" LatchWhen="0" NeedNoiseFilter="0" FilterTime_Ms="0" IsSoftwareDI="0" Addr="w21.08" />
- <DI_ITEM Index="25" Expected="1" Name="DI_Lever1_pump_overload" NeedLatch="0" LatchWhen="0" NeedNoiseFilter="0" FilterTime_Ms="0" IsSoftwareDI="0" Addr="w21.09" />
- <DI_ITEM Index="26" Expected="1" Name="" NeedLatch="0" LatchWhen="0" NeedNoiseFilter="0" FilterTime_Ms="0" IsSoftwareDI="0" Addr="" />
- <DI_ITEM Index="27" Expected="1" Name="DI_RF_over_temp_" NeedLatch="0" LatchWhen="0" NeedNoiseFilter="0" FilterTime_Ms="0" IsSoftwareDI="0" Addr="w21.11" />
- <DI_ITEM Index="28" Expected="1" Name="DI_Lever1_pump_CB_alarm" NeedLatch="0" LatchWhen="0" NeedNoiseFilter="0" FilterTime_Ms="0" IsSoftwareDI="0" Addr="w21.12" />
- <DI_ITEM Index="29" Expected="1" Name="DI_ROOTS_pump_CB_alarm" NeedLatch="0" LatchWhen="0" NeedNoiseFilter="0" FilterTime_Ms="0" IsSoftwareDI="0" Addr="w21.13" />
- <DI_ITEM Index="30" Expected="1" Name="" NeedLatch="0" LatchWhen="0" NeedNoiseFilter="0" FilterTime_Ms="0" IsSoftwareDI="0" Addr="" />
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- <DI_ITEM Index="32" Expected="1" Name="DI_Pump_N2_pressure_alam" NeedLatch="0" LatchWhen="0" NeedNoiseFilter="0" FilterTime_Ms="0" IsSoftwareDI="0" Addr="w22.00" />
- <DI_ITEM Index="33" Expected="1" Name="DI_Pump_water_flow_alam" NeedLatch="0" LatchWhen="0" NeedNoiseFilter="0" FilterTime_Ms="0" IsSoftwareDI="0" Addr="w22.01" />
- <DI_ITEM Index="34" Expected="1" Name="" NeedLatch="0" LatchWhen="0" NeedNoiseFilter="0" FilterTime_Ms="0" IsSoftwareDI="0" Addr="" />
- <DI_ITEM Index="35" Expected="1" Name="" NeedLatch="0" LatchWhen="0" NeedNoiseFilter="0" FilterTime_Ms="0" IsSoftwareDI="0" Addr="" />
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- <DI_ITEM Index="56" Expected="1" Name="DI_Process_gas_final_valve_state_fb" NeedLatch="0" LatchWhen="0" NeedNoiseFilter="0" FilterTime_Ms="0" IsSoftwareDI="0" Addr="w23.08" />
- <DI_ITEM Index="57" Expected="1" Name="DI_Pumping_valve_state_fb" NeedLatch="0" LatchWhen="0" NeedNoiseFilter="0" FilterTime_Ms="0" IsSoftwareDI="0" Addr="w23.09" />
- <DI_ITEM Index="58" Expected="1" Name="DI_Chamber_vent_valve_state_fb" NeedLatch="0" LatchWhen="0" NeedNoiseFilter="0" FilterTime_Ms="0" IsSoftwareDI="0" Addr="w23.10" />
- <DI_ITEM Index="59" Expected="1" Name="" NeedLatch="0" LatchWhen="0" NeedNoiseFilter="0" FilterTime_Ms="0" IsSoftwareDI="0" Addr="" />
- <DI_ITEM Index="60" Expected="1" Name="" NeedLatch="0" LatchWhen="0" NeedNoiseFilter="0" FilterTime_Ms="0" IsSoftwareDI="0" Addr="" />
- <DI_ITEM Index="61" Expected="1" Name="" NeedLatch="0" LatchWhen="0" NeedNoiseFilter="0" FilterTime_Ms="0" IsSoftwareDI="0" Addr="" />
- <DI_ITEM Index="62" Expected="1" Name="" NeedLatch="0" LatchWhen="0" NeedNoiseFilter="0" FilterTime_Ms="0" IsSoftwareDI="0" Addr="" />
- <DI_ITEM Index="63" Expected="1" Name="" NeedLatch="0" LatchWhen="0" NeedNoiseFilter="0" FilterTime_Ms="0" IsSoftwareDI="0" Addr="" />
- <DI_ITEM Index="64" Expected="1" Name="DI_MFC1_valve_state_fb" NeedLatch="0" LatchWhen="0" NeedNoiseFilter="0" FilterTime_Ms="0" IsSoftwareDI="0" Addr="w24.00" />
- <DI_ITEM Index="65" Expected="1" Name="DI_MFC2_valve_state_fb" NeedLatch="0" LatchWhen="0" NeedNoiseFilter="0" FilterTime_Ms="0" IsSoftwareDI="0" Addr="w24.01" />
- <DI_ITEM Index="66" Expected="1" Name="DI_MFC3_valve_state_fb" NeedLatch="0" LatchWhen="0" NeedNoiseFilter="0" FilterTime_Ms="0" IsSoftwareDI="0" Addr="w24.02" />
- <DI_ITEM Index="67" Expected="1" Name="DI_MFC4_valve_state_fb" NeedLatch="0" LatchWhen="0" NeedNoiseFilter="0" FilterTime_Ms="0" IsSoftwareDI="0" Addr="w24.03" />
- <DI_ITEM Index="68" Expected="1" Name="DI_MFC5_valve_state_fb" NeedLatch="0" LatchWhen="0" NeedNoiseFilter="0" FilterTime_Ms="0" IsSoftwareDI="0" Addr="w24.04" />
- <DI_ITEM Index="69" Expected="1" Name="DI_Chamber_purge_valve_state_fb" NeedLatch="0" LatchWhen="0" NeedNoiseFilter="0" FilterTime_Ms="0" IsSoftwareDI="0" Addr="w24.05" />
- <DI_ITEM Index="70" Expected="1" Name="" NeedLatch="0" LatchWhen="0" NeedNoiseFilter="0" FilterTime_Ms="0" IsSoftwareDI="0" Addr="" />
- <DI_ITEM Index="71" Expected="1" Name="" NeedLatch="0" LatchWhen="0" NeedNoiseFilter="0" FilterTime_Ms="0" IsSoftwareDI="0" Addr="" />
- <DI_ITEM Index="72" Expected="1" Name="" NeedLatch="0" LatchWhen="0" NeedNoiseFilter="0" FilterTime_Ms="0" IsSoftwareDI="0" Addr="" />
- <DI_ITEM Index="73" Expected="1" Name="" NeedLatch="0" LatchWhen="0" NeedNoiseFilter="0" FilterTime_Ms="0" IsSoftwareDI="0" Addr="" />
- <DI_ITEM Index="74" Expected="1" Name="DI_Yellow_light_fb" NeedLatch="0" LatchWhen="0" NeedNoiseFilter="0" FilterTime_Ms="0" IsSoftwareDI="0" Addr="w24.10" />
- <DI_ITEM Index="75" Expected="1" Name="DI_Green_light_fb" NeedLatch="0" LatchWhen="0" NeedNoiseFilter="0" FilterTime_Ms="0" IsSoftwareDI="0" Addr="w24.11" />
- <DI_ITEM Index="76" Expected="1" Name="DI_Red_light_fb" NeedLatch="0" LatchWhen="0" NeedNoiseFilter="0" FilterTime_Ms="0" IsSoftwareDI="0" Addr="w24.12" />
- <DI_ITEM Index="77" Expected="1" Name="DI_Buzzer_fb" NeedLatch="0" LatchWhen="0" NeedNoiseFilter="0" FilterTime_Ms="0" IsSoftwareDI="0" Addr="w24.13" />
- <DI_ITEM Index="78" Expected="1" Name="" NeedLatch="0" LatchWhen="0" NeedNoiseFilter="0" FilterTime_Ms="0" IsSoftwareDI="0" Addr="" />
- <DI_ITEM Index="79" Expected="1" Name="" NeedLatch="0" LatchWhen="0" NeedNoiseFilter="0" FilterTime_Ms="0" IsSoftwareDI="0" Addr="" />
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- <DI_ITEM Index="97" Expected="1" Name="" NeedLatch="0" LatchWhen="0" NeedNoiseFilter="0" FilterTime_Ms="0" IsSoftwareDI="0" Addr="" />
- <DI_ITEM Index="98" Expected="1" Name="" NeedLatch="0" LatchWhen="0" NeedNoiseFilter="0" FilterTime_Ms="0" IsSoftwareDI="0" Addr="" />
- </Dig_In>
- <Dig_Out>
- <DO_ITEM Index="0" Name="DO_N2_pressure_alarm" Safe_Feedback_Index="-1" Addr="w4.00" />
- <DO_ITEM Index="1" Name="DO_Pump_water_flow_alarm_" Safe_Feedback_Index="-1" Addr="w4.01" />
- <DO_ITEM Index="2" Name="" Safe_Feedback_Index="0" Addr="" />
- <DO_ITEM Index="3" Name="" Safe_Feedback_Index="0" Addr="" />
- <DO_ITEM Index="4" Name="" Safe_Feedback_Index="0" Addr="" />
- <DO_ITEM Index="5" Name="" Safe_Feedback_Index="0" Addr="" />
- <DO_ITEM Index="6" Name="" Safe_Feedback_Index="0" Addr="" />
- <DO_ITEM Index="7" Name="" Safe_Feedback_Index="0" Addr="" />
- <DO_ITEM Index="8" Name="" Safe_Feedback_Index="0" Addr="" />
- <DO_ITEM Index="9" Name="" Safe_Feedback_Index="0" Addr="" />
- <DO_ITEM Index="10" Name="" Safe_Feedback_Index="0" Addr="" />
- <DO_ITEM Index="11" Name="" Safe_Feedback_Index="0" Addr="" />
- <DO_ITEM Index="12" Name="" Safe_Feedback_Index="0" Addr="" />
- <DO_ITEM Index="13" Name="" Safe_Feedback_Index="0" Addr="" />
- <DO_ITEM Index="14" Name="" Safe_Feedback_Index="0" Addr="" />
- <DO_ITEM Index="15" Name="" Safe_Feedback_Index="0" Addr="" />
- <DO_ITEM Index="16" Name="DO_RF_on_off" Safe_Feedback_Index="-1" Addr="w5.00" />
- <DO_ITEM Index="17" Name="DO_reset_signal" Safe_Feedback_Index="-1" Addr="w5.01" />
- <DO_ITEM Index="18" Name="" Safe_Feedback_Index="0" Addr="" />
- <DO_ITEM Index="19" Name="" Safe_Feedback_Index="0" Addr="" />
- <DO_ITEM Index="20" Name="" Safe_Feedback_Index="0" Addr="" />
- <DO_ITEM Index="21" Name="" Safe_Feedback_Index="0" Addr="" />
- <DO_ITEM Index="22" Name="" Safe_Feedback_Index="0" Addr="" />
- <DO_ITEM Index="23" Name="" Safe_Feedback_Index="0" Addr="" />
- <DO_ITEM Index="24" Name="" Safe_Feedback_Index="0" Addr="" />
- <DO_ITEM Index="25" Name="" Safe_Feedback_Index="0" Addr="" />
- <DO_ITEM Index="26" Name="" Safe_Feedback_Index="0" Addr="" />
- <DO_ITEM Index="27" Name="" Safe_Feedback_Index="0" Addr="" />
- <DO_ITEM Index="28" Name="" Safe_Feedback_Index="0" Addr="" />
- <DO_ITEM Index="29" Name="" Safe_Feedback_Index="0" Addr="" />
- <DO_ITEM Index="30" Name="" Safe_Feedback_Index="0" Addr="" />
- <DO_ITEM Index="31" Name="" Safe_Feedback_Index="0" Addr="" />
- <DO_ITEM Index="32" Name="DO_MFC1_valve__" Safe_Feedback_Index="-1" Addr="w6.00" />
- <DO_ITEM Index="33" Name="DO_MFC2_valve" Safe_Feedback_Index="-1" Addr="w6.01" />
- <DO_ITEM Index="34" Name="DO_MFC3_valve" Safe_Feedback_Index="-1" Addr="w6.02" />
- <DO_ITEM Index="35" Name="DO_MFC4_valve" Safe_Feedback_Index="-1" Addr="w6.03" />
- <DO_ITEM Index="36" Name="DO_MFC5_valve" Safe_Feedback_Index="-1" Addr="w6.04" />
- <DO_ITEM Index="37" Name="DO_Chamber_purge_valve" Safe_Feedback_Index="-1" Addr="w6.05" />
- <DO_ITEM Index="38" Name="" Safe_Feedback_Index="0" Addr="" />
- <DO_ITEM Index="39" Name="" Safe_Feedback_Index="0" Addr="" />
- <DO_ITEM Index="40" Name="" Safe_Feedback_Index="0" Addr="" />
- <DO_ITEM Index="41" Name="" Safe_Feedback_Index="0" Addr="" />
- <DO_ITEM Index="42" Name="DO_Yellow_light" Safe_Feedback_Index="-1" Addr="w6.10" />
- <DO_ITEM Index="43" Name="DO_Green_light" Safe_Feedback_Index="-1" Addr="w6.11" />
- <DO_ITEM Index="44" Name="DO_Red_light" Safe_Feedback_Index="-1" Addr="w6.12" />
- <DO_ITEM Index="45" Name="DO_Buzzer" Safe_Feedback_Index="-1" Addr="w6.13" />
- <DO_ITEM Index="46" Name="" Safe_Feedback_Index="0" Addr="" />
- <DO_ITEM Index="47" Name="" Safe_Feedback_Index="0" Addr="" />
- <DO_ITEM Index="48" Name="DO_Process_gas_final_valve" Safe_Feedback_Index="-1" Addr="w0.00" />
- <DO_ITEM Index="49" Name="DO_Pumping_valve_" Safe_Feedback_Index="-1" Addr="w0.01" />
- <DO_ITEM Index="50" Name="DO_Chamber_vent_valve" Safe_Feedback_Index="-1" Addr="w0.02" />
- <DO_ITEM Index="51" Name="" Safe_Feedback_Index="0" Addr="" />
- <DO_ITEM Index="52" Name="" Safe_Feedback_Index="0" Addr="" />
- <DO_ITEM Index="53" Name="" Safe_Feedback_Index="0" Addr="" />
- <DO_ITEM Index="54" Name="" Safe_Feedback_Index="0" Addr="" />
- <DO_ITEM Index="55" Name="" Safe_Feedback_Index="0" Addr="" />
- <DO_ITEM Index="56" Name="" Safe_Feedback_Index="0" Addr="" />
- <DO_ITEM Index="57" Name="" Safe_Feedback_Index="0" Addr="" />
- <DO_ITEM Index="58" Name="" Safe_Feedback_Index="0" Addr="" />
- <DO_ITEM Index="59" Name="" Safe_Feedback_Index="0" Addr="" />
- <DO_ITEM Index="60" Name="" Safe_Feedback_Index="0" Addr="" />
- <DO_ITEM Index="61" Name="" Safe_Feedback_Index="0" Addr="" />
- <DO_ITEM Index="62" Name="" Safe_Feedback_Index="0" Addr="" />
- <DO_ITEM Index="63" Name="" Safe_Feedback_Index="0" Addr="" />
- <DO_ITEM Index="64" Name="" Safe_Feedback_Index="0" Addr="" />
- <DO_ITEM Index="65" Name="" Safe_Feedback_Index="0" Addr="" />
- <DO_ITEM Index="66" Name="" Safe_Feedback_Index="0" Addr="" />
- <DO_ITEM Index="67" Name="" Safe_Feedback_Index="0" Addr="" />
- <DO_ITEM Index="68" Name="" Safe_Feedback_Index="0" Addr="" />
- <DO_ITEM Index="69" Name="" Safe_Feedback_Index="0" Addr="" />
- <DO_ITEM Index="70" Name="" Safe_Feedback_Index="0" Addr="" />
- </Dig_Out>
- <Ana_Out>
- <AO_ITEM Index="0" Name="AO_match_C1_position_setpoint" Addr="d1000"/>
- <AO_ITEM Index="1" Name="AO_match_C2_position_setpoint" Addr="d1002"/>
- <AO_ITEM Index="2" Name="AO_match_work_mode_setpoint" Addr="d1004"/>
- <AO_ITEM Index="3" Name="AO_match_hold_or_preset_setpoint" Addr="d1006"/>
- <AO_ITEM Index="4" Name="" Addr="" />
- <AO_ITEM Index="5" Name="" Addr="" />
- <AO_ITEM Index="6" Name="" Addr="" />
- <AO_ITEM Index="7" Name="" Addr="" />
- <AO_ITEM Index="8" Name="AO_RF_work_mode_set" Addr="d1016"/>
- <AO_ITEM Index="9" Name="AO_RF_power_setpoint" Addr="d1018"/>
- <AO_ITEM Index="10" Name="AO_RF_Pulsing_Frequency_setpoint" Addr="d1020"/>
- <AO_ITEM Index="11" Name="AO_RF_Pulsing_duty_cycle_setpoint" Addr="d1022"/>
- <AO_ITEM Index="12" Name="AO_MFC1_flow_setpoint" Addr="d1024"/>
- <AO_ITEM Index="13" Name="AO_MFC2_flow_setpoint" Addr="d1026"/>
- <AO_ITEM Index="14" Name="AO_MFC3_flow_setpoint" Addr="d1028"/>
- <AO_ITEM Index="15" Name="AO_MFC4_flow_setpoint" Addr="d1030"/>
- <AO_ITEM Index="16" Name="AO_MFC5_flow_setpoint" Addr="d1032"/>
- <AO_ITEM Index="17" Name="AO_Throttle_valve_work_mode" Addr="d1034"/>
- <AO_ITEM Index="18" Name="AO_Throttle_valve_pressure_setpoint" Addr="d1036"/>
- <AO_ITEM Index="19" Name="AO_Throttle_valve_position_setpoint" Addr="d1038"/>
- <AO_ITEM Index="20" Name="" Addr="" />
- <AO_ITEM Index="21" Name="" Addr="" />
- <AO_ITEM Index="22" Name="" Addr="" />
- <AO_ITEM Index="23" Name="" Addr="" />
- <AO_ITEM Index="24" Name="" Addr="" />
- <AO_ITEM Index="25" Name="" Addr="" />
- <AO_ITEM Index="26" Name="" Addr="" />
- <AO_ITEM Index="27" Name="" Addr="" />
- <AO_ITEM Index="28" Name="" Addr="" />
- <AO_ITEM Index="29" Name="" Addr="" />
- <AO_ITEM Index="30" Name="AO_heartbeat" Addr="d1060"/>
- <AO_ITEM Index="31" Name="" Addr="" />
- <AO_ITEM Index="32" Name="AO_MFC1_actual_range" Addr="d1064"/>
- <AO_ITEM Index="33" Name="AO_MFC2_actual_range" Addr="d1066"/>
- <AO_ITEM Index="34" Name="AO_MFC3_actual_range" Addr="d1068"/>
- <AO_ITEM Index="35" Name="AO_MFC4_actual_range" Addr="d1070"/>
- <AO_ITEM Index="36" Name="AO_MFC5_actual_range" Addr="d1072"/>
- <AO_ITEM Index="37" Name="" Addr="" />
- <AO_ITEM Index="38" Name="" Addr="" />
- <AO_ITEM Index="39" Name="" Addr="" />
- <AO_ITEM Index="40" Name="AO_booster_pressure_control_enable" Addr="d1080"/>
- <AO_ITEM Index="41" Name="AO_booster_pressure_control_setpoint" Addr="d1082"/>
- <AO_ITEM Index="42" Name="AO_RF_match_coefficient" Addr="d1084"/>
- <AO_ITEM Index="43" Name="AO_N2_pressure_alarm_setpoint_Min_" Addr="d1086"/>
- <AO_ITEM Index="44" Name="AO_N2_pressure_alarm_setpoint_Max_" Addr="d1088"/>
- <AO_ITEM Index="45" Name="AO_Water_flow_alarm_setpoint_Min_" Addr="d1090"/>
- <AO_ITEM Index="46" Name="AO_Water_flow_alarm_setpoint_Max_" Addr="d1092"/>
- <AO_ITEM Index="47" Name="" Addr="" />
- <AO_ITEM Index="48" Name="" Addr="" />
- <AO_ITEM Index="49" Name="" Addr="" />
- <AO_ITEM Index="50" Name="" Addr="" />
- <AO_ITEM Index="51" Name="" Addr="" />
- <AO_ITEM Index="52" Name="" Addr="" />
- <AO_ITEM Index="53" Name="" Addr="" />
- <AO_ITEM Index="54" Name="" Addr="" />
- <AO_ITEM Index="55" Name="" Addr="" />
- <AO_ITEM Index="56" Name="" Addr="" />
- <AO_ITEM Index="57" Name="" Addr="" />
- <AO_ITEM Index="58" Name="" Addr="" />
- <AO_ITEM Index="59" Name="" Addr="" />
- <AO_ITEM Index="60" Name="" Addr="" />
- </Ana_Out>
- <Ana_In>
- <AI_ITEM Index="0" Name="AI_Chamber_real_pressure_fb_" Addr="d2000"/>
- <AI_ITEM Index="1" Name="" Addr="" />
- <AI_ITEM Index="2" Name="AI_MFC1_real_flow__fb" Addr="d2004"/>
- <AI_ITEM Index="3" Name="AI_MFC2_real_flow_fb" Addr="d2006"/>
- <AI_ITEM Index="4" Name="AI_MFC3_real_flow_fb" Addr="d2008"/>
- <AI_ITEM Index="5" Name="AI_MFC4_real_flow_fb" Addr="d2010"/>
- <AI_ITEM Index="6" Name="AI_MFC5_real_flow_fb" Addr="d2012"/>
- <AI_ITEM Index="7" Name="" Addr="" />
- <AI_ITEM Index="8" Name="AI_RF_forward_power_fb" Addr="d2016"/>
- <AI_ITEM Index="9" Name="AI_RF_reflect_power_fb" Addr="d2018"/>
- <AI_ITEM Index="10" Name="" Addr="" />
- <AI_ITEM Index="11" Name="" Addr="" />
- <AI_ITEM Index="12" Name="" Addr="" />
- <AI_ITEM Index="13" Name="" Addr="" />
- <AI_ITEM Index="14" Name="" Addr="" />
- <AI_ITEM Index="15" Name="" Addr="" />
- <AI_ITEM Index="16" Name="" Addr="" />
- <AI_ITEM Index="17" Name="" Addr="" />
- <AI_ITEM Index="18" Name="" Addr="" />
- <AI_ITEM Index="19" Name="" Addr="" />
- <AI_ITEM Index="20" Name="AI_Thorttle_valve_real_position_fb" Addr="d2040"/>
- <AI_ITEM Index="21" Name="AI_Thorttle_valve_real_pressure_fb" Addr="d2042"/>
- <AI_ITEM Index="22" Name="AI_thorttle_valve_state" Addr="d2044"/>
- <AI_ITEM Index="23" Name="" Addr="" />
- <AI_ITEM Index="24" Name="" Addr="" />
- <AI_ITEM Index="25" Name="AI_heartbeat_fb" Addr="d2050"/>
- <AI_ITEM Index="26" Name="" Addr="" />
- <AI_ITEM Index="27" Name="AI_match_c1_positon_fb" Addr="d2054"/>
- <AI_ITEM Index="28" Name="AI_match_c2_positon_fb" Addr="d2056"/>
- <AI_ITEM Index="29" Name="AI_match_work_mode_fb" Addr="d2058"/>
- <AI_ITEM Index="30" Name="AI_match_hold_or_preset_fb" Addr="d2060"/>
- <AI_ITEM Index="31" Name="" Addr="" />
- <AI_ITEM Index="32" Name="" Addr="" />
- <AI_ITEM Index="33" Name="" Addr="" />
- <AI_ITEM Index="34" Name="" Addr="" />
- <AI_ITEM Index="35" Name="" Addr="" />
- <AI_ITEM Index="36" Name="" Addr="" />
- <AI_ITEM Index="37" Name="" Addr="" />
- <AI_ITEM Index="38" Name="" Addr="" />
- <AI_ITEM Index="39" Name="" Addr="" />
- <AI_ITEM Index="40" Name="" Addr="" />
- <AI_ITEM Index="41" Name="" Addr="" />
- <AI_ITEM Index="42" Name="" Addr="" />
- <AI_ITEM Index="43" Name="" Addr="" />
- <AI_ITEM Index="44" Name="AI_Second" Addr="d2088"/>
- <AI_ITEM Index="45" Name="AI_Minute" Addr="d2090"/>
- <AI_ITEM Index="46" Name="AI_Time" Addr="d2092"/>
- <AI_ITEM Index="47" Name="AI_Day" Addr="d2094"/>
- <AI_ITEM Index="48" Name="AI_Month" Addr="d2096"/>
- <AI_ITEM Index="49" Name="AI_Year" Addr="d2098"/>
- <AI_ITEM Index="50" Name="" Addr="" />
- <AI_ITEM Index="51" Name="" Addr="" />
- <AI_ITEM Index="52" Name="" Addr="" />
- <AI_ITEM Index="53" Name="" Addr="" />
- <AI_ITEM Index="54" Name="" Addr="" />
- <AI_ITEM Index="55" Name="" Addr="" />
- <AI_ITEM Index="56" Name="" Addr="" />
- <AI_ITEM Index="57" Name="" Addr="" />
- <AI_ITEM Index="58" Name="" Addr="" />
- <AI_ITEM Index="59" Name="" Addr="" />
- <AI_ITEM Index="60" Name="" Addr="" />
- </Ana_In>
- </IO_DEFINE>
|