Gloabals.cs 3.8 KB

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  1. using System;
  2. using System.Collections.Generic;
  3. using System.Linq;
  4. using System.Text;
  5. using System.Runtime.Serialization;
  6. using System.Xml;
  7. using System.Xml.Serialization;
  8. using System.Xml.Schema;
  9. using Aitex.Core.Util;
  10. namespace Aitex.Platform
  11. {
  12. /// <summary>
  13. /// Defines sequencer running mode.
  14. /// </summary>
  15. [Serializable]
  16. [DataContract]
  17. public enum SystemMode
  18. {
  19. /// <summary>
  20. /// In Auto mode, operators cannot manually create, delete, and move susceptors; instead,
  21. /// operators can only run sequences.
  22. /// </summary>
  23. [EnumMember]
  24. Auto = 0,
  25. /// <summary>
  26. /// In Manual mode, operators can manually create, delete, and move susceptors, but cannot
  27. /// run sequences.
  28. /// </summary>
  29. [EnumMember]
  30. Manual,
  31. /// <summary>
  32. /// In AtmCycle mode, the sequencer moves susceptor from chamber to chamber without checking
  33. /// any interlocks: chambers can be at atmosphere condition, and can be online or offline.
  34. /// It moves susceptor from Loadlock to the buffer first, and the moves it to the first reactor,
  35. /// and then moves the susceptor from that reactor to the next one one by one. After all reactors
  36. /// are traversed, it moves susceptor to the cooldown. And finally moves the susceptor from
  37. /// cooldown to the loadlock. At this point, the cycle is completed.
  38. /// </summary>
  39. [EnumMember]
  40. Cycle
  41. }
  42. /// <summary>
  43. /// Tower light status define
  44. /// </summary>
  45. [Serializable]
  46. [DataContract]
  47. public enum TowerLightStatus
  48. {
  49. /// <summary>
  50. /// Light steady on
  51. /// </summary>
  52. [EnumMember]
  53. On,
  54. /// <summary>
  55. /// Light steady off
  56. /// </summary>
  57. [EnumMember]
  58. Off,
  59. /// <summary>
  60. /// Light blinking
  61. /// </summary>
  62. [EnumMember]
  63. Blinking,
  64. /// <summary>
  65. /// Unknow state
  66. /// </summary>
  67. [EnumMember]
  68. Unknow,
  69. }
  70. [Serializable]
  71. [DataContract]
  72. public enum PressureCtrlMode
  73. {
  74. [EnumMember]
  75. TVPressureCtrl = 1,
  76. [EnumMember]
  77. TVPositionCtrl = 2,
  78. }
  79. [Serializable]
  80. [DataContract]
  81. public enum RfMode
  82. {
  83. [EnumMember]
  84. ContinuousWaveMode = 1,
  85. [EnumMember]
  86. PulsingMode = 2,
  87. }
  88. [Serializable]
  89. [DataContract]
  90. public enum CarrierDataType
  91. {
  92. [EnumMember]
  93. NONE,
  94. [EnumMember]
  95. Created,
  96. [EnumMember]
  97. Deleted,
  98. [EnumMember]
  99. SusceptorMove,
  100. [EnumMember]
  101. ProcessStart,
  102. [EnumMember]
  103. ProcessNormalEnd,
  104. [EnumMember]
  105. ProcessErrStop,
  106. [EnumMember]
  107. ProcessManualAbort,
  108. [EnumMember]
  109. RecipeStepStart,
  110. [EnumMember]
  111. RecipeStepNormalEnd,
  112. [EnumMember]
  113. RecipeStepPaused,
  114. [EnumMember]
  115. RecipeStepResume,
  116. [EnumMember]
  117. RecipeStepJump,
  118. [EnumMember]
  119. RecipeUpdated,
  120. [EnumMember]
  121. PreProcessStart,
  122. [EnumMember]
  123. PreProcessStep,
  124. [EnumMember]
  125. PreProcessNormalEnd,
  126. [EnumMember]
  127. PreProcessErrorEnd,
  128. [EnumMember]
  129. PostProcessStart,
  130. [EnumMember]
  131. PostProcessStep,
  132. [EnumMember]
  133. PostProcessNormalEnd,
  134. [EnumMember]
  135. PostProcessErrorEnd,
  136. [EnumMember]
  137. MoUsedWeight,
  138. }
  139. [Serializable]
  140. [DataContract]
  141. public enum EndByCondition
  142. {
  143. [EnumMember]
  144. EndByRfTime,
  145. [EnumMember]
  146. EndByStepTime,
  147. [EnumMember]
  148. EndByHeatUp,
  149. }
  150. }