using System; using System.Collections.Generic; using System.Linq; using System.Text; using System.Runtime.Serialization; using System.Xml; using System.Xml.Serialization; using System.Xml.Schema; using Aitex.Core.Util; namespace Aitex.Platform { /// /// Defines sequencer running mode. /// [Serializable] [DataContract] public enum SystemMode { /// /// In Auto mode, operators cannot manually create, delete, and move susceptors; instead, /// operators can only run sequences. /// [EnumMember] Auto = 0, /// /// In Manual mode, operators can manually create, delete, and move susceptors, but cannot /// run sequences. /// [EnumMember] Manual, /// /// In AtmCycle mode, the sequencer moves susceptor from chamber to chamber without checking /// any interlocks: chambers can be at atmosphere condition, and can be online or offline. /// It moves susceptor from Loadlock to the buffer first, and the moves it to the first reactor, /// and then moves the susceptor from that reactor to the next one one by one. After all reactors /// are traversed, it moves susceptor to the cooldown. And finally moves the susceptor from /// cooldown to the loadlock. At this point, the cycle is completed. /// [EnumMember] Cycle } /// /// Tower light status define /// [Serializable] [DataContract] public enum TowerLightStatus { /// /// Light steady on /// [EnumMember] On, /// /// Light steady off /// [EnumMember] Off, /// /// Light blinking /// [EnumMember] Blinking, /// /// Unknow state /// [EnumMember] Unknow, } [Serializable] [DataContract] public enum PressureCtrlMode { [EnumMember] TVPressureCtrl = 1, [EnumMember] TVPositionCtrl = 2, } [Serializable] [DataContract] public enum RfMode { [EnumMember] ContinuousWaveMode = 1, [EnumMember] PulsingMode = 2, } [Serializable] [DataContract] public enum CarrierDataType { [EnumMember] NONE, [EnumMember] Created, [EnumMember] Deleted, [EnumMember] SusceptorMove, [EnumMember] ProcessStart, [EnumMember] ProcessNormalEnd, [EnumMember] ProcessErrStop, [EnumMember] ProcessManualAbort, [EnumMember] RecipeStepStart, [EnumMember] RecipeStepNormalEnd, [EnumMember] RecipeStepPaused, [EnumMember] RecipeStepResume, [EnumMember] RecipeStepJump, [EnumMember] RecipeUpdated, [EnumMember] PreProcessStart, [EnumMember] PreProcessStep, [EnumMember] PreProcessNormalEnd, [EnumMember] PreProcessErrorEnd, [EnumMember] PostProcessStart, [EnumMember] PostProcessStep, [EnumMember] PostProcessNormalEnd, [EnumMember] PostProcessErrorEnd, [EnumMember] MoUsedWeight, } [Serializable] [DataContract] public enum EndByCondition { [EnumMember] EndByRfTime, [EnumMember] EndByStepTime, [EnumMember] EndByHeatUp, } }