using System;
using System.Collections.Generic;
using System.Linq;
using System.Text;
using System.Runtime.Serialization;
using System.Xml;
using System.Xml.Serialization;
using System.Xml.Schema;
using Aitex.Core.Util;
namespace Aitex.Platform
{
///
/// Defines sequencer running mode.
///
[Serializable]
[DataContract]
public enum SystemMode
{
///
/// In Auto mode, operators cannot manually create, delete, and move susceptors; instead,
/// operators can only run sequences.
///
[EnumMember]
Auto = 0,
///
/// In Manual mode, operators can manually create, delete, and move susceptors, but cannot
/// run sequences.
///
[EnumMember]
Manual,
///
/// In AtmCycle mode, the sequencer moves susceptor from chamber to chamber without checking
/// any interlocks: chambers can be at atmosphere condition, and can be online or offline.
/// It moves susceptor from Loadlock to the buffer first, and the moves it to the first reactor,
/// and then moves the susceptor from that reactor to the next one one by one. After all reactors
/// are traversed, it moves susceptor to the cooldown. And finally moves the susceptor from
/// cooldown to the loadlock. At this point, the cycle is completed.
///
[EnumMember]
Cycle
}
///
/// Tower light status define
///
[Serializable]
[DataContract]
public enum TowerLightStatus
{
///
/// Light steady on
///
[EnumMember]
On,
///
/// Light steady off
///
[EnumMember]
Off,
///
/// Light blinking
///
[EnumMember]
Blinking,
///
/// Unknow state
///
[EnumMember]
Unknow,
}
[Serializable]
[DataContract]
public enum PressureCtrlMode
{
[EnumMember]
TVPressureCtrl = 1,
[EnumMember]
TVPositionCtrl = 2,
}
[Serializable]
[DataContract]
public enum RfMode
{
[EnumMember]
ContinuousWaveMode = 1,
[EnumMember]
PulsingMode = 2,
}
[Serializable]
[DataContract]
public enum CarrierDataType
{
[EnumMember]
NONE,
[EnumMember]
Created,
[EnumMember]
Deleted,
[EnumMember]
SusceptorMove,
[EnumMember]
ProcessStart,
[EnumMember]
ProcessNormalEnd,
[EnumMember]
ProcessErrStop,
[EnumMember]
ProcessManualAbort,
[EnumMember]
RecipeStepStart,
[EnumMember]
RecipeStepNormalEnd,
[EnumMember]
RecipeStepPaused,
[EnumMember]
RecipeStepResume,
[EnumMember]
RecipeStepJump,
[EnumMember]
RecipeUpdated,
[EnumMember]
PreProcessStart,
[EnumMember]
PreProcessStep,
[EnumMember]
PreProcessNormalEnd,
[EnumMember]
PreProcessErrorEnd,
[EnumMember]
PostProcessStart,
[EnumMember]
PostProcessStep,
[EnumMember]
PostProcessNormalEnd,
[EnumMember]
PostProcessErrorEnd,
[EnumMember]
MoUsedWeight,
}
[Serializable]
[DataContract]
public enum EndByCondition
{
[EnumMember]
EndByRfTime,
[EnumMember]
EndByStepTime,
[EnumMember]
EndByHeatUp,
}
}