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appLog20241223.txt

appLog20241223.txt 64 KB
Cronologia Originale

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  1. --------------------------------[Header Log]----------------------------------------- [Save Log Job] 2024-12-23 09:13:36.700 LOG.INFO UiEvent.cs Line:57 Event() - 已经连接上设备实时控制系统
    2. 

  2. [Save Log Job] 2024-12-23 09:13:36.701 LOG.INFO UiEvent.cs Line:58 Event() - 已经连接上设备实时控制系统
    3. 

  3. [Save Log Job] 2024-12-23 09:13:38.326 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    4. 

  4. [Save Log Job] 2024-12-23 09:13:38.670 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(System_IsMesMode, True)
    5. 

  5. [Save Log Job] 2024-12-23 09:13:41.990 LOG.INFO UiEvent.cs Line:51 Event() - Software will be expired in -60 days, at 10/24/2024 12:00:00 AM 。
    6. 

  6. [Save Log Job] 2024-12-23 09:13:52.863 LOG.INFO UiEvent.cs Line:51 Event() - User admin login
    7. 

  7. [Save Log Job] 2024-12-23 09:14:07.853 LOG.INFO UiEvent.cs Line:51 Event() - Operation Vent()
    8. 

  8. [Save Log Job] 2024-12-23 09:14:07.954 LOG.INFO UiEvent.cs Line:51 Event() - System Vent：check sensor。
    9. 

  9. [Save Log Job] 2024-12-23 09:14:07.954 LOG.INFO UiEvent.cs Line:51 Event() - System Vent：Close pumping open valve。
    10. 

  10. [Save Log Job] 2024-12-23 09:14:07.954 LOG.INFO UiEvent.cs Line:51 Event() - System Vent：close all the valve。
    11. 

  11. [Save Log Job] 2024-12-23 09:14:08.054 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    12. 

  12. [Save Log Job] 2024-12-23 09:14:08.054 LOG.INFO UiEvent.cs Line:51 Event() - System Vent：vent delay 2 seconds before open vent valve。
    13. 

  13. [Save Log Job] 2024-12-23 09:14:10.172 LOG.INFO UiEvent.cs Line:51 Event() - System Vent：Open vent valve。
    14. 

  14. [Save Log Job] 2024-12-23 09:14:10.574 LOG.INFO UiEvent.cs Line:51 Event() - System Vent：vent 50 seconds。
    15. 

  15. [Save Log Job] 2024-12-23 09:14:29.934 LOG.INFO UiEvent.cs Line:51 Event() - Operation Abort()
    16. 

  16. [Save Log Job] 2024-12-23 09:14:29.934 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    17. 

  17. [Save Log Job] 2024-12-23 09:14:31.946 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门Chamber vent valveClose失败，原因：Valve keep open。
    18. 

  18. [Save Log Job] 2024-12-23 09:14:38.984 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetAutoMode()
    19. 

  19. [Save Log Job] 2024-12-23 09:14:38.984 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentModeChanged
    20. 

  20. [Save Log Job] 2024-12-23 09:14:38.985 LOG.INFO UiEvent.cs Line:51 Event() - System running mode changed to Auto Mode
    21. 

  21. [Save Log Job] 2024-12-23 09:14:42.405 LOG.INFO UiEvent.cs Line:51 Event() - Operation RunRecipe(CACB, , , )
    22. 

  22. [Save Log Job] 2024-12-23 09:14:42.504 LOG.INFO UiEvent.cs Line:51 Event() - EventLotStart
    23. 

  23. [Save Log Job] 2024-12-23 09:14:42.504 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    24. 

  24. [Save Log Job] 2024-12-23 09:14:42.506 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check door status。
    25. 

  25. [Save Log Job] 2024-12-23 09:14:42.506 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check chamber door。
    26. 

  26. [Save Log Job] 2024-12-23 09:14:42.507 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check backpanel door。
    27. 

  27. [Save Log Job] 2024-12-23 09:14:42.507 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check pump status。
    28. 

  28. [Save Log Job] 2024-12-23 09:14:42.507 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Close all the valves。
    29. 

  29. [Save Log Job] 2024-12-23 09:14:42.605 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Open pumping valve。
    30. 

  30. [Save Log Job] 2024-12-23 09:14:44.623 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门Chamber pumping valveOpen失败，原因：Valve keep closed 。
    31. 

  31. [Save Log Job] 2024-12-23 09:14:44.927 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check chamber pressure。
    32. 

  32. [Save Log Job] 2024-12-23 09:14:48.758 LOG.INFO UiEvent.cs Line:51 Event() - Operation AbortRecipe()
    33. 

  33. [Save Log Job] 2024-12-23 09:14:48.858 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    34. 

  34. [Save Log Job] 2024-12-23 09:15:07.864 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetManualMode()
    35. 

  35. [Save Log Job] 2024-12-23 09:15:07.864 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentModeChanged
    36. 

  36. [Save Log Job] 2024-12-23 09:15:07.865 LOG.INFO UiEvent.cs Line:51 Event() - System running mode changed to Manual Mode
    37. 

  37. [Save Log Job] 2024-12-23 09:15:12.995 LOG.INFO UiEvent.cs Line:51 Event() - Operation StopPump()
    38. 

  38. [Save Log Job] 2024-12-23 09:15:13.097 LOG.INFO UiEvent.cs Line:51 Event() - System Stop pump：Check if the rf is on。
    39. 

  39. [Save Log Job] 2024-12-23 09:15:13.097 LOG.INFO UiEvent.cs Line:51 Event() - System Stop pump：Check if the gas stopped flowing。
    40. 

  40. [Save Log Job] 2024-12-23 09:15:13.196 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    41. 

  41. [Save Log Job] 2024-12-23 09:15:13.196 LOG.INFO UiEvent.cs Line:51 Event() - System Stop pump：Close close pump valve。
    42. 

  42. [Save Log Job] 2024-12-23 09:15:15.212 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门Chamber pumping valveClose失败，原因：Valve keep open。
    43. 

  43. [Save Log Job] 2024-12-23 09:15:15.617 LOG.INFO UiEvent.cs Line:51 Event() - System Stop pump：Stop Pump Finished in 0.0 minitues。
    44. 

  44. [Save Log Job] 2024-12-23 09:15:15.617 LOG.INFO UiEvent.cs Line:51 Event() - System complete run 'Stop Pump'.
    45. 

  45. [Save Log Job] 2024-12-23 09:15:15.618 LOG.INFO UiEvent.cs Line:51 Event() - Stop Pump
    46. 

  46. [Save Log Job] 2024-12-23 09:15:15.717 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    47. 

  47. [Save Log Job] 2024-12-23 09:15:20.444 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetAutoMode()
    48. 

  48. [Save Log Job] 2024-12-23 09:15:20.444 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentModeChanged
    49. 

  49. [Save Log Job] 2024-12-23 09:15:20.445 LOG.INFO UiEvent.cs Line:51 Event() - System running mode changed to Auto Mode
    50. 

  50. [Save Log Job] 2024-12-23 09:15:26.379 LOG.INFO UiEvent.cs Line:51 Event() - Operation RunRecipe(CACB, , , )
    51. 

  51. [Save Log Job] 2024-12-23 09:15:26.379 LOG.INFO UiEvent.cs Line:51 Event() - EventLotStart
    52. 

  52. [Save Log Job] 2024-12-23 09:15:26.379 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check door status。
    53. 

  53. [Save Log Job] 2024-12-23 09:15:26.379 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check chamber door。
    54. 

  54. [Save Log Job] 2024-12-23 09:15:26.380 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check backpanel door。
    55. 

  55. [Save Log Job] 2024-12-23 09:15:26.380 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check pump status。
    56. 

  56. [Save Log Job] 2024-12-23 09:15:26.380 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Close all the valves。
    57. 

  57. [Save Log Job] 2024-12-23 09:15:26.381 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    58. 

  58. [Save Log Job] 2024-12-23 09:15:26.479 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Open pumping valve。
    59. 

  59. [Save Log Job] 2024-12-23 09:15:27.184 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check chamber pressure。
    60. 

  60. [Save Log Job] 2024-12-23 09:15:47.630 LOG.INFO UiEvent.cs Line:51 Event() - Operation AbortRecipe()
    61. 

  61. [Save Log Job] 2024-12-23 09:15:47.630 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    62. 

  62. [Save Log Job] 2024-12-23 09:50:52.987 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetManualMode()
    63. 

  63. [Save Log Job] 2024-12-23 09:50:52.987 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentModeChanged
    64. 

  64. [Save Log Job] 2024-12-23 09:50:52.987 LOG.INFO UiEvent.cs Line:51 Event() - System running mode changed to Manual Mode
    65. 

  65. [Save Log Job] 2024-12-23 09:50:56.606 LOG.INFO UiEvent.cs Line:51 Event() - Operation StopPump()
    66. 

  66. [Save Log Job] 2024-12-23 09:50:56.606 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    67. 

  67. [Save Log Job] 2024-12-23 09:50:56.607 LOG.INFO UiEvent.cs Line:51 Event() - System Stop pump：Check if the rf is on。
    68. 

  68. [Save Log Job] 2024-12-23 09:50:56.706 LOG.INFO UiEvent.cs Line:51 Event() - System Stop pump：Check if the gas stopped flowing。
    69. 

  69. [Save Log Job] 2024-12-23 09:50:56.706 LOG.INFO UiEvent.cs Line:51 Event() - System Stop pump：Close close pump valve。
    70. 

  70. [Save Log Job] 2024-12-23 09:50:58.723 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门Chamber pumping valveClose失败，原因：Valve keep open。
    71. 

  71. [Save Log Job] 2024-12-23 09:51:00.637 LOG.INFO UiEvent.cs Line:51 Event() - System Stop pump：Stop Pump Finished in 0.1 minitues。
    72. 

  72. [Save Log Job] 2024-12-23 09:51:00.637 LOG.INFO UiEvent.cs Line:51 Event() - System complete run 'Stop Pump'.
    73. 

  73. [Save Log Job] 2024-12-23 09:51:00.637 LOG.INFO UiEvent.cs Line:51 Event() - Stop Pump
    74. 

  74. [Save Log Job] 2024-12-23 09:51:00.637 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    75. 

  75. [Save Log Job] 2024-12-23 09:51:06.872 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：BoostPump.SetPressure，。
    76. 

  76. [Save Log Job] 2024-12-23 09:51:06.872 LOG.INFO UiEvent.cs Line:51 Event() - Operation DeviceOperation(BoostPump, SetPressure, 0)
    77. 

  77. [Save Log Job] 2024-12-23 09:51:06.872 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(System_PumpBasePressure, 500)
    78. 

  78. [Save Log Job] 2024-12-23 09:51:06.872 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(System_PumpTimeLimit, 120)
    79. 

  79. [Save Log Job] 2024-12-23 09:51:06.873 LOG.INFO UiEvent.cs Line:51 Event() - Operation Pump()
    80. 

  80. [Save Log Job] 2024-12-23 09:51:06.973 LOG.INFO UiEvent.cs Line:51 Event() - System Pumping Down：Check door status。
    81. 

  81. [Save Log Job] 2024-12-23 09:51:06.973 LOG.INFO UiEvent.cs Line:51 Event() - System Pumping Down：check chamber door。
    82. 

  82. [Save Log Job] 2024-12-23 09:51:06.973 LOG.INFO UiEvent.cs Line:51 Event() - System Pumping Down：check backpanel door。
    83. 

  83. [Save Log Job] 2024-12-23 09:51:06.973 LOG.INFO UiEvent.cs Line:51 Event() - System Pumping Down：Check pump status。
    84. 

  84. [Save Log Job] 2024-12-23 09:51:06.973 LOG.INFO UiEvent.cs Line:51 Event() - System Pumping Down：Close all the valves。
    85. 

  85. [Save Log Job] 2024-12-23 09:51:07.075 LOG.INFO UiEvent.cs Line:51 Event() - System Pumping Down：Open pumping valve。
    86. 

  86. [Save Log Job] 2024-12-23 09:51:07.075 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    87. 

  87. [Save Log Job] 2024-12-23 09:51:08.384 LOG.INFO UiEvent.cs Line:51 Event() - System Pumping Down：Wait chamber pressure until below 500。
    88. 

  88. [Save Log Job] 2024-12-23 09:51:08.384 LOG.INFO UiEvent.cs Line:51 Event() - System Pumping Down：Pump below 500mTorr。
    89. 

  89. [Save Log Job] 2024-12-23 09:51:08.384 LOG.INFO UiEvent.cs Line:51 Event() - System Pumping Down：Pump Finished in 0.0 minitues。
    90. 

  90. [Save Log Job] 2024-12-23 09:51:08.385 LOG.INFO UiEvent.cs Line:51 Event() - System complete run 'Pump'.
    91. 

  91. [Save Log Job] 2024-12-23 09:51:08.385 LOG.INFO UiEvent.cs Line:51 Event() - Pump
    92. 

  92. [Save Log Job] 2024-12-23 09:51:08.484 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    93. 

  93. [Save Log Job] 2024-12-23 09:51:12.706 LOG.INFO UiEvent.cs Line:51 Event() - Operation StopPump()
    94. 

  94. [Save Log Job] 2024-12-23 09:51:12.706 LOG.INFO UiEvent.cs Line:51 Event() - System Stop pump：Check if the rf is on。
    95. 

  95. [Save Log Job] 2024-12-23 09:51:12.807 LOG.INFO UiEvent.cs Line:51 Event() - System Stop pump：Close close pump valve。
    96. 

  96. [Save Log Job] 2024-12-23 09:51:12.807 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    97. 

  97. [Save Log Job] 2024-12-23 09:51:12.808 LOG.INFO UiEvent.cs Line:51 Event() - System Stop pump：Check if the gas stopped flowing。
    98. 

  98. [Save Log Job] 2024-12-23 09:51:14.820 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门Chamber pumping valveClose失败，原因：Valve keep open。
    99. 

  99. [Save Log Job] 2024-12-23 09:51:16.025 LOG.INFO UiEvent.cs Line:51 Event() - System Stop pump：Stop Pump Finished in 0.1 minitues。
    100. 

  100. [Save Log Job] 2024-12-23 09:51:16.026 LOG.INFO UiEvent.cs Line:51 Event() - System complete run 'Stop Pump'.
    101. 

  101. [Save Log Job] 2024-12-23 09:51:16.028 LOG.INFO UiEvent.cs Line:51 Event() - Stop Pump
    102. 

  102. [Save Log Job] 2024-12-23 09:51:16.028 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    103. 

  103. [Save Log Job] 2024-12-23 11:04:03.118 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetAutoMode()
    104. 

  104. [Save Log Job] 2024-12-23 11:04:03.118 LOG.INFO UiEvent.cs Line:51 Event() - System running mode changed to Auto Mode
    105. 

  105. [Save Log Job] 2024-12-23 11:04:03.118 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentModeChanged
    106. 

  106. [Save Log Job] 2024-12-23 12:13:41.897 LOG.INFO UiEvent.cs Line:51 Event() - Software will be expired in -60 days, at 10/24/2024 12:00:00 AM。
    107. 

  107. --------------------------------[Header Log]----------------------------------------- [Save Log Job] 2024-12-23 13:16:20.078 LOG.INFO UiEvent.cs Line:57 Event() - 已经连接上设备实时控制系统
    108. 

  108. [Save Log Job] 2024-12-23 13:16:20.079 LOG.INFO UiEvent.cs Line:58 Event() - 已经连接上设备实时控制系统
    109. 

  109. [Save Log Job] 2024-12-23 13:16:21.527 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(System_IsMesMode, True)
    110. 

  110. [Save Log Job] 2024-12-23 13:16:21.586 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    111. 

  111. [Save Log Job] 2024-12-23 13:16:25.301 LOG.INFO UiEvent.cs Line:51 Event() - Software will be expired in -60 days, at 10/24/2024 12:00:00 AM 。
    112. 

  112. [Save Log Job] 2024-12-23 13:16:34.554 LOG.INFO UiEvent.cs Line:51 Event() - User admin login
    113. 

  113. [Save Log Job] 2024-12-23 16:16:26.415 LOG.INFO UiEvent.cs Line:51 Event() - Software will be expired in -60 days, at 10/24/2024 12:00:00 AM。
    114. 

  114. [Save Log Job] 2024-12-23 17:12:39.473 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetAutoMode()
    115. 

  115. [Save Log Job] 2024-12-23 17:12:39.474 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentModeChanged
    116. 

  116. [Save Log Job] 2024-12-23 17:12:39.474 LOG.INFO UiEvent.cs Line:51 Event() - System running mode changed to Auto Mode
    117. 

  117. [Save Log Job] 2024-12-23 17:12:47.718 LOG.INFO UiEvent.cs Line:51 Event() - Operation RunRecipe(CACB, , , )
    118. 

  118. [Save Log Job] 2024-12-23 17:12:47.820 LOG.INFO UiEvent.cs Line:51 Event() - EventLotStart
    119. 

  119. [Save Log Job] 2024-12-23 17:12:47.820 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check door status。
    120. 

  120. [Save Log Job] 2024-12-23 17:12:47.820 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check chamber door。
    121. 

  121. [Save Log Job] 2024-12-23 17:12:47.820 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check backpanel door。
    122. 

  122. [Save Log Job] 2024-12-23 17:12:47.820 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check pump status。
    123. 

  123. [Save Log Job] 2024-12-23 17:12:47.820 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Close all the valves。
    124. 

  124. [Save Log Job] 2024-12-23 17:12:47.924 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Open pumping valve。
    125. 

  125. [Save Log Job] 2024-12-23 17:12:47.924 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    126. 

  126. [Save Log Job] 2024-12-23 17:12:49.938 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门Chamber pumping valveOpen失败，原因：Valve keep closed 。
    127. 

  127. [Save Log Job] 2024-12-23 17:12:51.242 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check chamber pressure。
    128. 

  128. [Save Log Job] 2024-12-23 17:12:56.173 LOG.INFO UiEvent.cs Line:51 Event() - Operation AbortRecipe()
    129. 

  129. [Save Log Job] 2024-12-23 17:12:56.273 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    130. 

  130. [Save Log Job] 2024-12-23 17:13:04.920 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentModeChanged
    131. 

  131. [Save Log Job] 2024-12-23 17:13:04.920 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetManualMode()
    132. 

  132. [Save Log Job] 2024-12-23 17:13:04.921 LOG.INFO UiEvent.cs Line:51 Event() - System running mode changed to Manual Mode
    133. 

  133. [Save Log Job] 2024-12-23 17:20:42.711 LOG.INFO UiEvent.cs Line:51 Event() - System PLC heart beat check failed，please confirm PLC still running
    134. 

  134. [Save Log Job] 2024-12-23 17:20:45.642 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    135. 

  135. [Save Log Job] 2024-12-23 17:20:45.643 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    136. 

  136. [Save Log Job] 2024-12-23 17:24:04.014 LOG.INFO UiEvent.cs Line:51 Event() - System PLC heart beat check failed，please confirm PLC still running
    137. 

  137. [Save Log Job] 2024-12-23 17:30:00.726 LOG.INFO UiEvent.cs Line:51 Event() - Operation StopPump()
    138. 

  138. [Save Log Job] 2024-12-23 17:31:08.147 LOG.INFO UiEvent.cs Line:51 Event() - Chamber is in Error，can not do StopPumpDown。
    139. 

  139. [Save Log Job] 2024-12-23 17:31:34.303 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    140. 

  140. [Save Log Job] 2024-12-23 17:31:46.153 LOG.INFO UiEvent.cs Line:51 Event() - Operation StopPump()
    141. 

  141. [Save Log Job] 2024-12-23 17:31:56.835 LOG.INFO UiEvent.cs Line:51 Event() - System Stop pump：Check if the rf is on。
    142. 

  142. [Save Log Job] 2024-12-23 17:31:56.937 LOG.INFO UiEvent.cs Line:51 Event() - System Stop pump：Check if the gas stopped flowing。
    143. 

  143. [Save Log Job] 2024-12-23 17:31:56.937 LOG.INFO UiEvent.cs Line:51 Event() - System Stop pump：Close close pump valve。
    144. 

  144. [Save Log Job] 2024-12-23 17:31:56.937 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    145. 

  145. [Save Log Job] 2024-12-23 17:31:58.647 LOG.INFO UiEvent.cs Line:51 Event() - System Stop pump：Stop Pump Finished in 0.2 minitues。
    146. 

  146. [Save Log Job] 2024-12-23 17:31:58.648 LOG.INFO UiEvent.cs Line:51 Event() - System complete run 'Stop Pump'.
    147. 

  147. [Save Log Job] 2024-12-23 17:31:58.648 LOG.INFO UiEvent.cs Line:51 Event() - Stop Pump
    148. 

  148. [Save Log Job] 2024-12-23 17:31:58.747 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    149. 

  149. [Save Log Job] 2024-12-23 17:32:24.386 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetAutoMode()
    150. 

  150. [Save Log Job] 2024-12-23 17:32:24.387 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentModeChanged
    151. 

  151. [Save Log Job] 2024-12-23 17:32:24.387 LOG.INFO UiEvent.cs Line:51 Event() - System running mode changed to Auto Mode
    152. 

  152. [Save Log Job] 2024-12-23 17:32:33.231 LOG.INFO UiEvent.cs Line:51 Event() - Operation RunRecipe(CACB, , , )
    153. 

  153. [Save Log Job] 2024-12-23 17:32:33.232 LOG.INFO UiEvent.cs Line:51 Event() - EventLotStart
    154. 

  154. [Save Log Job] 2024-12-23 17:32:33.232 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check door status。
    155. 

  155. [Save Log Job] 2024-12-23 17:32:33.232 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check chamber door。
    156. 

  156. [Save Log Job] 2024-12-23 17:32:33.232 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check backpanel door。
    157. 

  157. [Save Log Job] 2024-12-23 17:32:33.232 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check pump status。
    158. 

  158. [Save Log Job] 2024-12-23 17:32:33.233 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Close all the valves。
    159. 

  159. [Save Log Job] 2024-12-23 17:32:33.233 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    160. 

  160. [Save Log Job] 2024-12-23 17:32:33.333 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Open pumping valve。
    161. 

  161. [Save Log Job] 2024-12-23 17:32:35.342 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门Chamber pumping valveOpen失败，原因：Valve keep closed 。
    162. 

  162. [Save Log Job] 2024-12-23 17:32:36.853 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check chamber pressure。
    163. 

  163. [Save Log Job] 2024-12-23 17:32:45.000 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：PreProcess Finished in 0.2 minitues。
    164. 

  164. [Save Log Job] 2024-12-23 17:32:45.000 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Pump below 100mTorr。
    165. 

  165. [Save Log Job] 2024-12-23 17:32:45.001 LOG.INFO UiEvent.cs Line:51 Event() - System complete run 'PreProcess'.
    166. 

  166. [Save Log Job] 2024-12-23 17:32:45.001 LOG.INFO UiEvent.cs Line:51 Event() - Run Recipe 20241223173233-CACB
    167. 

  167. [Save Log Job] 2024-12-23 17:32:45.001 LOG.INFO UiEvent.cs Line:51 Event() - System recipe start run'20241223173233-CACB'
    168. 

  168. [Save Log Job] 2024-12-23 17:32:45.101 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241223173233-CACB' start run step 1：initial。
    169. 

  169. [Save Log Job] 2024-12-23 17:32:45.103 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。
    170. 

  170. [Save Log Job] 2024-12-23 17:32:45.103 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。
    171. 

  171. [Save Log Job] 2024-12-23 17:32:45.103 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。
    172. 

  172. [Save Log Job] 2024-12-23 17:32:45.103 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。
    173. 

  173. [Save Log Job] 2024-12-23 17:32:45.103 LOG.INFO UiEvent.cs Line:51 Event() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。
    174. 

  174. [Save Log Job] 2024-12-23 17:32:45.103 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。
    175. 

  175. [Save Log Job] 2024-12-23 17:32:45.103 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。
    176. 

  176. [Save Log Job] 2024-12-23 17:32:45.104 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPower，RF set Power:0。
    177. 

  177. [Save Log Job] 2024-12-23 17:32:45.104 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。
    178. 

  178. [Save Log Job] 2024-12-23 17:32:45.104 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。
    179. 

  179. [Save Log Job] 2024-12-23 17:32:45.104 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。
    180. 

  180. [Save Log Job] 2024-12-23 17:32:45.105 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas1， ramp to 45sccm。
    181. 

  181. [Save Log Job] 2024-12-23 17:32:45.105 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas2， ramp to 56sccm。
    182. 

  182. [Save Log Job] 2024-12-23 17:32:45.105 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas3， ramp to 66sccm。
    183. 

  183. [Save Log Job] 2024-12-23 17:32:45.105 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPowerOnOff，Set RF power Off。
    184. 

  184. [Save Log Job] 2024-12-23 17:32:45.105 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas4， ramp to 76sccm。
    185. 

  185. [Save Log Job] 2024-12-23 17:32:45.105 LOG.INFO UiEvent.cs Line:51 Event() - Start monitor pressure stability
    186. 

  186. [Save Log Job] 2024-12-23 17:32:45.105 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas5， ramp to 86sccm。
    187. 

  187. [Save Log Job] 2024-12-23 17:32:48.017 LOG.INFO UiEvent.cs Line:51 Event() - System recipe was aborted: user aborted recipe
    188. 

  188. [Save Log Job] 2024-12-23 17:32:48.017 LOG.INFO UiEvent.cs Line:51 Event() - Operation AbortRecipe()
    189. 

  189. [Save Log Job] 2024-12-23 17:32:48.017 LOG.INFO UiEvent.cs Line:51 Event() - Stop monitor pressure stability
    190. 

  190. [Save Log Job] 2024-12-23 17:32:48.017 LOG.INFO UiEvent.cs Line:51 Event() - System Recipe run completed，Recipe：20241223173233-CACB
    191. 

  191. Start time：2024/12/23 17:32:44
    192. 

  192. End time：2024/12/23 17:32:47
    193. 

  193. Total time：0:0:3
    194. 

  194. [Save Log Job] 2024-12-23 17:32:48.018 LOG.INFO UiEvent.cs Line:51 Event() - System Recipe completely run
    195. 

  195. [Save Log Job] 2024-12-23 17:32:48.120 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, wait for 10 seconds
    196. 

  196. [Save Log Job] 2024-12-23 17:32:50.030 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC1 ValveClose失败，原因：Valve keep open。
    197. 

  197. [Save Log Job] 2024-12-23 17:32:50.031 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC2 ValveClose失败，原因：Valve keep open。
    198. 

  198. [Save Log Job] 2024-12-23 17:32:50.031 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC3 ValveClose失败，原因：Valve keep open。
    199. 

  199. [Save Log Job] 2024-12-23 17:32:50.031 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC4 ValveClose失败，原因：Valve keep open。
    200. 

  200. [Save Log Job] 2024-12-23 17:32:50.032 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC5 ValveClose失败，原因：Valve keep open。
    201. 

  201. [Save Log Job] 2024-12-23 17:32:50.032 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门Process gas final valveClose失败，原因：Valve keep open。
    202. 

  202. [Save Log Job] 2024-12-23 17:32:58.177 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, RF Power Off
    203. 

  203. [Save Log Job] 2024-12-23 17:32:58.277 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, Close all the valves
    204. 

  204. [Save Log Job] 2024-12-23 17:32:58.277 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, Stop all the gas flow
    205. 

  205. [Save Log Job] 2024-12-23 17:32:58.378 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, close pump valve
    206. 

  206. [Save Log Job] 2024-12-23 17:32:59.887 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, delay 3 seconds
    207. 

  207. [Save Log Job] 2024-12-23 17:33:03.008 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, vent 50 seconds
    208. 

  208. [Save Log Job] 2024-12-23 17:33:28.187 LOG.INFO UiEvent.cs Line:51 Event() - Operation AbortRecipe()
    209. 

  209. [Save Log Job] 2024-12-23 17:33:28.187 LOG.INFO UiEvent.cs Line:51 Event() - EventLotFinished
    210. 

  210. [Save Log Job] 2024-12-23 17:33:28.187 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    211. 

  211. [Save Log Job] 2024-12-23 17:33:30.196 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门Chamber vent valveClose失败，原因：Valve keep open。
    212. 

  212. [Save Log Job] 2024-12-23 17:33:43.567 LOG.INFO UiEvent.cs Line:51 Event() - Operation RunRecipe(CACB, , , )
    213. 

  213. [Save Log Job] 2024-12-23 17:33:43.570 LOG.INFO UiEvent.cs Line:51 Event() - EventLotStart
    214. 

  214. [Save Log Job] 2024-12-23 17:33:43.570 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check door status。
    215. 

  215. [Save Log Job] 2024-12-23 17:33:43.570 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check chamber door。
    216. 

  216. [Save Log Job] 2024-12-23 17:33:43.570 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check backpanel door。
    217. 

  217. [Save Log Job] 2024-12-23 17:33:43.571 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check pump status。
    218. 

  218. [Save Log Job] 2024-12-23 17:33:43.571 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Close all the valves。
    219. 

  219. [Save Log Job] 2024-12-23 17:33:43.666 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    220. 

  220. [Save Log Job] 2024-12-23 17:33:43.666 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Open pumping valve。
    221. 

  221. [Save Log Job] 2024-12-23 17:33:45.679 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门Chamber pumping valveOpen失败，原因：Valve keep closed 。
    222. 

  222. [Save Log Job] 2024-12-23 17:33:46.081 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check chamber pressure。
    223. 

  223. [Save Log Job] 2024-12-23 17:33:48.798 LOG.INFO UiEvent.cs Line:51 Event() - Operation AbortRecipe()
    224. 

  224. [Save Log Job] 2024-12-23 17:33:48.897 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    225. 

  225. [Save Log Job] 2024-12-23 17:34:01.464 LOG.INFO UiEvent.cs Line:51 Event() - Operation RunRecipe(CACB, , , )
    226. 

  226. [Save Log Job] 2024-12-23 17:34:01.465 LOG.INFO UiEvent.cs Line:51 Event() - EventLotStart
    227. 

  227. [Save Log Job] 2024-12-23 17:34:01.465 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    228. 

  228. [Save Log Job] 2024-12-23 17:34:01.465 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check door status。
    229. 

  229. [Save Log Job] 2024-12-23 17:34:01.465 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check chamber door。
    230. 

  230. [Save Log Job] 2024-12-23 17:34:01.465 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check backpanel door。
    231. 

  231. [Save Log Job] 2024-12-23 17:34:01.465 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check pump status。
    232. 

  232. [Save Log Job] 2024-12-23 17:34:01.466 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Close all the valves。
    233. 

  233. [Save Log Job] 2024-12-23 17:34:01.562 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Open pumping valve。
    234. 

  234. [Save Log Job] 2024-12-23 17:34:01.662 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check chamber pressure。
    235. 

  235. [Save Log Job] 2024-12-23 17:34:24.805 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：PreProcess Finished in 0.4 minitues。
    236. 

  236. [Save Log Job] 2024-12-23 17:34:24.805 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Pump below 100mTorr。
    237. 

  237. [Save Log Job] 2024-12-23 17:34:24.805 LOG.INFO UiEvent.cs Line:51 Event() - System complete run 'PreProcess'.
    238. 

  238. [Save Log Job] 2024-12-23 17:34:24.805 LOG.INFO UiEvent.cs Line:51 Event() - Run Recipe 20241223173401-CACB
    239. 

  239. [Save Log Job] 2024-12-23 17:34:24.806 LOG.INFO UiEvent.cs Line:51 Event() - System recipe start run'20241223173401-CACB'
    240. 

  240. [Save Log Job] 2024-12-23 17:34:24.904 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241223173401-CACB' start run step 1：initial。
    241. 

  241. [Save Log Job] 2024-12-23 17:34:24.906 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。
    242. 

  242. [Save Log Job] 2024-12-23 17:34:24.906 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。
    243. 

  243. [Save Log Job] 2024-12-23 17:34:24.906 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。
    244. 

  244. [Save Log Job] 2024-12-23 17:34:24.906 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。
    245. 

  245. [Save Log Job] 2024-12-23 17:34:24.907 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。
    246. 

  246. [Save Log Job] 2024-12-23 17:34:24.907 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。
    247. 

  247. [Save Log Job] 2024-12-23 17:34:24.907 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPower，RF set Power:0。
    248. 

  248. [Save Log Job] 2024-12-23 17:34:24.907 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。
    249. 

  249. [Save Log Job] 2024-12-23 17:34:24.907 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。
    250. 

  250. [Save Log Job] 2024-12-23 17:34:24.907 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。
    251. 

  251. [Save Log Job] 2024-12-23 17:34:24.928 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas2， ramp to 56sccm。
    252. 

  252. [Save Log Job] 2024-12-23 17:34:24.928 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas1， ramp to 45sccm。
    253. 

  253. [Save Log Job] 2024-12-23 17:34:24.928 LOG.INFO UiEvent.cs Line:51 Event() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。
    254. 

  254. [Save Log Job] 2024-12-23 17:34:24.928 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas3， ramp to 66sccm。
    255. 

  255. [Save Log Job] 2024-12-23 17:34:24.928 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas5， ramp to 86sccm。
    256. 

  256. [Save Log Job] 2024-12-23 17:34:24.928 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas4， ramp to 76sccm。
    257. 

  257. [Save Log Job] 2024-12-23 17:34:24.928 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPowerOnOff，Set RF power Off。
    258. 

  258. [Save Log Job] 2024-12-23 17:34:24.928 LOG.INFO UiEvent.cs Line:51 Event() - Start monitor pressure stability
    259. 

  259. [Save Log Job] 2024-12-23 17:34:29.933 LOG.INFO UiEvent.cs Line:51 Event() - Operation AbortRecipe()
    260. 

  260. [Save Log Job] 2024-12-23 17:34:29.933 LOG.INFO UiEvent.cs Line:51 Event() - System recipe was aborted: user aborted recipe
    261. 

  261. [Save Log Job] 2024-12-23 17:34:29.933 LOG.INFO UiEvent.cs Line:51 Event() - Stop monitor pressure stability
    262. 

  262. [Save Log Job] 2024-12-23 17:34:29.934 LOG.INFO UiEvent.cs Line:51 Event() - System Recipe run completed，Recipe：20241223173401-CACB
    263. 

  263. Start time：2024/12/23 17:34:24
    264. 

  264. End time：2024/12/23 17:34:29
    265. 

  265. Total time：0:0:5
    266. 

  266. [Save Log Job] 2024-12-23 17:34:29.934 LOG.INFO UiEvent.cs Line:51 Event() - System Recipe completely run
    267. 

  267. [Save Log Job] 2024-12-23 17:34:30.034 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, wait for 10 seconds
    268. 

  268. [Save Log Job] 2024-12-23 17:34:40.100 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, RF Power Off
    269. 

  269. [Save Log Job] 2024-12-23 17:34:40.203 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, Close all the valves
    270. 

  270. [Save Log Job] 2024-12-23 17:34:40.203 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, Stop all the gas flow
    271. 

  271. [Save Log Job] 2024-12-23 17:34:40.304 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, close pump valve
    272. 

  272. [Save Log Job] 2024-12-23 17:34:42.317 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门Chamber pumping valveClose失败，原因：Valve keep open。
    273. 

  273. [Save Log Job] 2024-12-23 17:34:43.626 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, delay 3 seconds
    274. 

  274. [Save Log Job] 2024-12-23 17:34:46.646 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, vent 50 seconds
    275. 

  275. [Save Log Job] 2024-12-23 17:35:16.234 LOG.INFO UiEvent.cs Line:51 Event() - Operation AbortRecipe()
    276. 

  276. [Save Log Job] 2024-12-23 17:35:16.234 LOG.INFO UiEvent.cs Line:51 Event() - EventLotFinished
    277. 

  277. [Save Log Job] 2024-12-23 17:35:16.334 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    278. 

  278. [Save Log Job] 2024-12-23 17:35:18.244 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门Chamber vent valveClose失败，原因：Valve keep open。
    279. 

  279. [Save Log Job] 2024-12-23 17:35:49.095 LOG.INFO UiEvent.cs Line:51 Event() - Operation RunRecipe(CACB, , , )
    280. 

  280. [Save Log Job] 2024-12-23 17:35:49.095 LOG.INFO UiEvent.cs Line:51 Event() - EventLotStart
    281. 

  281. [Save Log Job] 2024-12-23 17:35:49.197 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check door status。
    282. 

  282. [Save Log Job] 2024-12-23 17:35:49.197 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    283. 

  283. [Save Log Job] 2024-12-23 17:35:49.197 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check chamber door。
    284. 

  284. [Save Log Job] 2024-12-23 17:35:49.197 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check backpanel door。
    285. 

  285. [Save Log Job] 2024-12-23 17:35:49.197 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check pump status。
    286. 

  286. [Save Log Job] 2024-12-23 17:35:49.197 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Close all the valves。
    287. 

  287. [Save Log Job] 2024-12-23 17:35:49.296 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Open pumping valve。
    288. 

  288. [Save Log Job] 2024-12-23 17:35:51.208 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门Chamber pumping valveOpen失败，原因：Valve keep closed 。
    289. 

  289. [Save Log Job] 2024-12-23 17:35:52.817 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check chamber pressure。
    290. 

  290. [Save Log Job] 2024-12-23 17:35:55.133 LOG.INFO UiEvent.cs Line:51 Event() - Operation AbortRecipe()
    291. 

  291. [Save Log Job] 2024-12-23 17:35:55.233 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    292. 

  292. [Save Log Job] 2024-12-23 17:36:18.357 LOG.INFO UiEvent.cs Line:51 Event() - Operation RunRecipe(CACB, , , )
    293. 

  293. [Save Log Job] 2024-12-23 17:36:18.357 LOG.INFO UiEvent.cs Line:51 Event() - EventLotStart
    294. 

  294. [Save Log Job] 2024-12-23 17:36:18.457 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    295. 

  295. [Save Log Job] 2024-12-23 17:36:18.457 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check door status。
    296. 

  296. [Save Log Job] 2024-12-23 17:36:18.458 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check chamber door。
    297. 

  297. [Save Log Job] 2024-12-23 17:36:18.458 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check backpanel door。
    298. 

  298. [Save Log Job] 2024-12-23 17:36:18.458 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check pump status。
    299. 

  299. [Save Log Job] 2024-12-23 17:36:18.459 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Open pumping valve。
    300. 

  300. [Save Log Job] 2024-12-23 17:36:18.459 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Close all the valves。
    301. 

  301. [Save Log Job] 2024-12-23 17:36:18.559 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check chamber pressure。
    302. 

  302. [Save Log Job] 2024-12-23 17:36:50.669 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Pump below 100mTorr。
    303. 

  303. [Save Log Job] 2024-12-23 17:36:50.770 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：PreProcess Finished in 0.5 minitues。
    304. 

  304. [Save Log Job] 2024-12-23 17:36:50.770 LOG.INFO UiEvent.cs Line:51 Event() - System complete run 'PreProcess'.
    305. 

  305. [Save Log Job] 2024-12-23 17:36:50.771 LOG.INFO UiEvent.cs Line:51 Event() - Run Recipe 20241223173618-CACB
    306. 

  306. [Save Log Job] 2024-12-23 17:36:50.771 LOG.INFO UiEvent.cs Line:51 Event() - System recipe start run'20241223173618-CACB'
    307. 

  307. [Save Log Job] 2024-12-23 17:36:50.771 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241223173618-CACB' start run step 1：initial。
    308. 

  308. [Save Log Job] 2024-12-23 17:36:50.771 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。
    309. 

  309. [Save Log Job] 2024-12-23 17:36:50.771 LOG.INFO UiEvent.cs Line:51 Event() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。
    310. 

  310. [Save Log Job] 2024-12-23 17:36:50.772 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。
    311. 

  311. [Save Log Job] 2024-12-23 17:36:50.772 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。
    312. 

  312. [Save Log Job] 2024-12-23 17:36:50.772 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。
    313. 

  313. [Save Log Job] 2024-12-23 17:36:50.772 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。
    314. 

  314. [Save Log Job] 2024-12-23 17:36:50.772 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。
    315. 

  315. [Save Log Job] 2024-12-23 17:36:50.772 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPower，RF set Power:0。
    316. 

  316. [Save Log Job] 2024-12-23 17:36:50.773 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。
    317. 

  317. [Save Log Job] 2024-12-23 17:36:50.773 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。
    318. 

  318. [Save Log Job] 2024-12-23 17:36:50.773 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。
    319. 

  319. [Save Log Job] 2024-12-23 17:36:50.774 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas1， ramp to 45sccm。
    320. 

  320. [Save Log Job] 2024-12-23 17:36:50.774 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas2， ramp to 56sccm。
    321. 

  321. [Save Log Job] 2024-12-23 17:36:50.774 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas3， ramp to 66sccm。
    322. 

  322. [Save Log Job] 2024-12-23 17:36:50.774 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas4， ramp to 76sccm。
    323. 

  323. [Save Log Job] 2024-12-23 17:36:50.774 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas5， ramp to 86sccm。
    324. 

  324. [Save Log Job] 2024-12-23 17:36:50.774 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPowerOnOff，Set RF power Off。
    325. 

  325. [Save Log Job] 2024-12-23 17:36:50.870 LOG.INFO UiEvent.cs Line:51 Event() - Start monitor pressure stability
    326. 

  326. [Save Log Job] 2024-12-23 17:37:01.026 LOG.INFO UiEvent.cs Line:51 Event() - System recipe was aborted: user aborted recipe
    327. 

  327. [Save Log Job] 2024-12-23 17:37:01.026 LOG.INFO UiEvent.cs Line:51 Event() - Operation AbortRecipe()
    328. 

  328. [Save Log Job] 2024-12-23 17:37:01.026 LOG.INFO UiEvent.cs Line:51 Event() - Stop monitor pressure stability
    329. 

  329. [Save Log Job] 2024-12-23 17:37:01.026 LOG.INFO UiEvent.cs Line:51 Event() - System Recipe run completed，Recipe：20241223173618-CACB
    330. 

  330. Start time：2024/12/23 17:36:50
    331. 

  331. End time：2024/12/23 17:37:00
    332. 

  332. Total time：0:0:10
    333. 

  333. [Save Log Job] 2024-12-23 17:37:01.026 LOG.INFO UiEvent.cs Line:51 Event() - System Recipe completely run
    334. 

  334. [Save Log Job] 2024-12-23 17:37:01.125 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, wait for 10 seconds
    335. 

  335. [Save Log Job] 2024-12-23 17:37:03.041 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC1 ValveClose失败，原因：Valve keep open。
    336. 

  336. [Save Log Job] 2024-12-23 17:37:03.041 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC2 ValveClose失败，原因：Valve keep open。
    337. 

  337. [Save Log Job] 2024-12-23 17:37:03.041 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC3 ValveClose失败，原因：Valve keep open。
    338. 

  338. [Save Log Job] 2024-12-23 17:37:03.042 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC4 ValveClose失败，原因：Valve keep open。
    339. 

  339. [Save Log Job] 2024-12-23 17:37:03.042 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC5 ValveClose失败，原因：Valve keep open。
    340. 

  340. [Save Log Job] 2024-12-23 17:37:11.195 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, RF Power Off
    341. 

  341. [Save Log Job] 2024-12-23 17:37:11.195 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, Stop all the gas flow
    342. 

  342. [Save Log Job] 2024-12-23 17:37:11.300 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, Close all the valves
    343. 

  343. [Save Log Job] 2024-12-23 17:37:11.300 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, close pump valve
    344. 

  344. [Save Log Job] 2024-12-23 17:37:13.411 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, delay 3 seconds
    345. 

  345. [Save Log Job] 2024-12-23 17:37:16.530 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, vent 50 seconds
    346. 

  346. [Save Log Job] 2024-12-23 17:38:06.567 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, Close vent valve
    347. 

  347. [Save Log Job] 2024-12-23 17:38:07.370 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, PostProcess Finished in 1.1 minitues
    348. 

  348. [Save Log Job] 2024-12-23 17:38:07.371 LOG.INFO UiEvent.cs Line:51 Event() - System complete run 'PostProcess'.
    349. 

  349. [Save Log Job] 2024-12-23 17:38:07.372 LOG.INFO UiEvent.cs Line:51 Event() - EventLotFinished
    350. 

  350. [Save Log Job] 2024-12-23 17:38:07.473 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    351. 

  351. --------------------------------[Header Log]----------------------------------------- [Save Log Job] 2024-12-23 17:40:38.783 LOG.INFO UiEvent.cs Line:57 Event() - 已经连接上设备实时控制系统
    352. 

  352. [Save Log Job] 2024-12-23 17:40:38.784 LOG.INFO UiEvent.cs Line:58 Event() - 已经连接上设备实时控制系统
    353. 

  353. [Save Log Job] 2024-12-23 17:40:40.374 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    354. 

  354. [Save Log Job] 2024-12-23 17:40:40.517 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(System_IsMesMode, True)
    355. 

  355. [Save Log Job] 2024-12-23 17:40:43.939 LOG.INFO UiEvent.cs Line:51 Event() - Software will be expired in -60 days, at 10/24/2024 12:00:00 AM 。
    356. 

  356. [Save Log Job] 2024-12-23 17:40:46.380 LOG.INFO UiEvent.cs Line:51 Event() - User admin login
    357. 

  357. [Save Log Job] 2024-12-23 17:40:52.382 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetAutoMode()
    358. 

  358. [Save Log Job] 2024-12-23 17:40:52.382 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentModeChanged
    359. 

  359. [Save Log Job] 2024-12-23 17:40:52.383 LOG.INFO UiEvent.cs Line:51 Event() - System running mode changed to Auto Mode
    360. 

  360. [Save Log Job] 2024-12-23 17:40:58.515 LOG.INFO UiEvent.cs Line:51 Event() - Operation RunRecipe(CACB, , , )
    361. 

  361. [Save Log Job] 2024-12-23 17:40:58.515 LOG.INFO UiEvent.cs Line:51 Event() - EventLotStart
    362. 

  362. [Save Log Job] 2024-12-23 17:40:58.515 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    363. 

  363. [Save Log Job] 2024-12-23 17:40:58.516 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check door status。
    364. 

  364. [Save Log Job] 2024-12-23 17:40:58.516 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check chamber door。
    365. 

  365. [Save Log Job] 2024-12-23 17:40:58.516 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check backpanel door。
    366. 

  366. [Save Log Job] 2024-12-23 17:40:58.517 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check pump status。
    367. 

  367. [Save Log Job] 2024-12-23 17:40:58.517 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Close all the valves。
    368. 

  368. [Save Log Job] 2024-12-23 17:40:58.616 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Open pumping valve。
    369. 

  369. [Save Log Job] 2024-12-23 17:41:00.631 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门Chamber pumping valveOpen失败，原因：Valve keep closed 。
    370. 

  370. [Save Log Job] 2024-12-23 17:41:00.830 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check chamber pressure。
    371. 

  371. [Save Log Job] 2024-12-23 17:45:59.301 LOG.INFO UiEvent.cs Line:51 Event() - System PLC heart beat check failed，please confirm PLC still running
    372. 

  372. [Save Log Job] 2024-12-23 17:45:59.302 LOG.INFO UiEvent.cs Line:51 Event() - Operation AbortRecipe()
    373. 

  373. [Save Log Job] 2024-12-23 17:45:59.302 LOG.INFO UiEvent.cs Line:51 Event() - Can not pump to base pressure 100 in 120 seconds。
    374. 

  374. [Save Log Job] 2024-12-23 17:45:59.501 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    375. 

  375. [Save Log Job] 2024-12-23 17:46:04.227 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    376. 

  376. [Save Log Job] 2024-12-23 17:46:09.964 LOG.INFO UiEvent.cs Line:51 Event() - EventLotStart
    377. 

  377. [Save Log Job] 2024-12-23 17:46:09.964 LOG.INFO UiEvent.cs Line:51 Event() - Operation RunRecipe(CACB, , , )
    378. 

  378. [Save Log Job] 2024-12-23 17:46:09.966 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check door status。
    379. 

  379. [Save Log Job] 2024-12-23 17:46:09.966 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check chamber door。
    380. 

  380. [Save Log Job] 2024-12-23 17:46:09.966 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check backpanel door。
    381. 

  381. [Save Log Job] 2024-12-23 17:46:09.967 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check pump status。
    382. 

  382. [Save Log Job] 2024-12-23 17:46:09.967 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Close all the valves。
    383. 

  383. [Save Log Job] 2024-12-23 17:46:10.062 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Open pumping valve。
    384. 

  384. [Save Log Job] 2024-12-23 17:46:10.062 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    385. 

  385. [Save Log Job] 2024-12-23 17:46:10.062 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check chamber pressure。
    386. 

  386. [Save Log Job] 2024-12-23 17:46:18.906 LOG.INFO UiEvent.cs Line:51 Event() - Operation AbortRecipe()
    387. 

  387. [Save Log Job] 2024-12-23 17:46:19.209 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    388. 

  388. --------------------------------[Header Log]----------------------------------------- [Save Log Job] 2024-12-23 17:51:14.121 LOG.INFO UiEvent.cs Line:58 Event() - 已经连接上设备实时控制系统
    389. 

  389. [Save Log Job] 2024-12-23 17:51:14.122 LOG.INFO UiEvent.cs Line:57 Event() - 已经连接上设备实时控制系统
    390. 

  390. [Save Log Job] 2024-12-23 17:51:15.805 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    391. 

  391. [Save Log Job] 2024-12-23 17:51:16.044 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(System_IsMesMode, True)
    392. 

  392. [Save Log Job] 2024-12-23 17:51:19.461 LOG.INFO UiEvent.cs Line:51 Event() - Software will be expired in -60 days, at 10/24/2024 12:00:00 AM 。
    393. 

  393. [Save Log Job] 2024-12-23 17:51:27.604 LOG.INFO UiEvent.cs Line:51 Event() - User admin login
    394. 

  394. [Save Log Job] 2024-12-23 17:51:40.587 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetAutoMode()
    395. 

  395. [Save Log Job] 2024-12-23 17:51:40.587 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentModeChanged
    396. 

  396. [Save Log Job] 2024-12-23 17:51:40.587 LOG.INFO UiEvent.cs Line:51 Event() - System running mode changed to Auto Mode
    397. 

  397. [Save Log Job] 2024-12-23 17:51:46.216 LOG.INFO UiEvent.cs Line:51 Event() - Operation RunRecipe(CACB, , , )
    398. 

  398. [Save Log Job] 2024-12-23 17:51:46.216 LOG.INFO UiEvent.cs Line:51 Event() - EventLotStart
    399. 

  399. [Save Log Job] 2024-12-23 17:51:46.317 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check door status。
    400. 

  400. [Save Log Job] 2024-12-23 17:51:46.317 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check chamber door。
    401. 

  401. [Save Log Job] 2024-12-23 17:51:46.317 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check backpanel door。
    402. 

  402. [Save Log Job] 2024-12-23 17:51:46.318 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check pump status。
    403. 

  403. [Save Log Job] 2024-12-23 17:51:46.318 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Close all the valves。
    404. 

  404. [Save Log Job] 2024-12-23 17:51:46.318 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    405. 

  405. [Save Log Job] 2024-12-23 17:51:46.319 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Open pumping valve。
    406. 

  406. [Save Log Job] 2024-12-23 17:51:47.827 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check chamber pressure。
    407. 

  407. [Save Log Job] 2024-12-23 17:51:55.643 LOG.INFO UiEvent.cs Line:51 Event() - Operation AbortRecipe()
    408. 

  408. [Save Log Job] 2024-12-23 17:51:55.743 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    409. 

  409. --------------------------------[Header Log]----------------------------------------- [Save Log Job] 2024-12-23 17:52:39.490 LOG.INFO UiEvent.cs Line:57 Event() - 已经连接上设备实时控制系统
    410. 

  410. [Save Log Job] 2024-12-23 17:52:39.490 LOG.INFO UiEvent.cs Line:58 Event() - 已经连接上设备实时控制系统
    411. 

  411. [Save Log Job] 2024-12-23 17:52:41.085 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    412. 

  412. [Save Log Job] 2024-12-23 17:52:41.332 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(System_IsMesMode, True)
    413. 

  413. [Save Log Job] 2024-12-23 17:52:44.747 LOG.INFO UiEvent.cs Line:51 Event() - Software will be expired in -60 days, at 10/24/2024 12:00:00 AM 。
    414. 

  414. [Save Log Job] 2024-12-23 17:52:46.856 LOG.INFO UiEvent.cs Line:51 Event() - User admin login
    415. 

  415. [Save Log Job] 2024-12-23 17:52:55.103 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetAutoMode()
    416. 

  416. [Save Log Job] 2024-12-23 17:52:55.103 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentModeChanged
    417. 

  417. [Save Log Job] 2024-12-23 17:52:55.103 LOG.INFO UiEvent.cs Line:51 Event() - System running mode changed to Auto Mode
    418. 

  418. [Save Log Job] 2024-12-23 17:52:57.220 LOG.INFO UiEvent.cs Line:51 Event() - Operation RunRecipe(CACB, , , )
    419. 

  419. [Save Log Job] 2024-12-23 17:52:57.222 LOG.INFO UiEvent.cs Line:51 Event() - EventLotStart
    420. 

  420. [Save Log Job] 2024-12-23 17:52:57.223 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check door status。
    421. 

  421. [Save Log Job] 2024-12-23 17:52:57.223 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check chamber door。
    422. 

  422. [Save Log Job] 2024-12-23 17:52:57.223 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check backpanel door。
    423. 

  423. [Save Log Job] 2024-12-23 17:52:57.223 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check pump status。
    424. 

  424. [Save Log Job] 2024-12-23 17:52:57.225 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Close all the valves。
    425. 

  425. [Save Log Job] 2024-12-23 17:52:57.225 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    426. 

  426. [Save Log Job] 2024-12-23 17:52:57.319 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Open pumping valve。
    427. 

  427. [Save Log Job] 2024-12-23 17:52:57.722 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check chamber pressure。
    428. 

  428. [Save Log Job] 2024-12-23 17:53:06.096 LOG.INFO UiEvent.cs Line:51 Event() - Operation AbortRecipe()
    429. 

  429. [Save Log Job] 2024-12-23 17:53:06.096 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    430. 

  430. [Save Log Job] 2024-12-23 17:53:42.193 LOG.INFO UiEvent.cs Line:51 Event() - Operation RunRecipe(CACB, , , )
    431. 

  431. [Save Log Job] 2024-12-23 17:53:42.193 LOG.INFO UiEvent.cs Line:51 Event() - EventLotStart
    432. 

  432. [Save Log Job] 2024-12-23 17:53:42.193 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check door status。
    433. 

  433. [Save Log Job] 2024-12-23 17:53:42.193 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check chamber door。
    434. 

  434. [Save Log Job] 2024-12-23 17:53:42.194 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check backpanel door。
    435. 

  435. [Save Log Job] 2024-12-23 17:53:42.194 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check pump status。
    436. 

  436. [Save Log Job] 2024-12-23 17:53:42.195 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Close all the valves。
    437. 

  437. [Save Log Job] 2024-12-23 17:53:42.293 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Open pumping valve。
    438. 

  438. [Save Log Job] 2024-12-23 17:53:42.394 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check chamber pressure。
    439. 

  439. [Save Log Job] 2024-12-23 17:53:42.394 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Pump below 100mTorr。
    440. 

  440. [Save Log Job] 2024-12-23 17:53:42.395 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    441. 

  441. [Save Log Job] 2024-12-23 17:53:42.395 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：PreProcess Finished in 0.0 minitues。
    442. 

  442. [Save Log Job] 2024-12-23 17:53:42.396 LOG.INFO UiEvent.cs Line:51 Event() - System complete run 'PreProcess'.
    443. 

  443. [Save Log Job] 2024-12-23 17:53:42.396 LOG.INFO UiEvent.cs Line:51 Event() - Run Recipe 20241223175342-CACB
    444. 

  444. [Save Log Job] 2024-12-23 17:53:42.396 LOG.INFO UiEvent.cs Line:51 Event() - System recipe start run'20241223175342-CACB'
    445. 

  445. [Save Log Job] 2024-12-23 17:53:42.495 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241223175342-CACB' start run step 1：initial。
    446. 

  446. [Save Log Job] 2024-12-23 17:53:42.495 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。
    447. 

  447. [Save Log Job] 2024-12-23 17:53:42.495 LOG.INFO UiEvent.cs Line:51 Event() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。
    448. 

  448. [Save Log Job] 2024-12-23 17:53:42.496 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。
    449. 

  449. [Save Log Job] 2024-12-23 17:53:42.496 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。
    450. 

  450. [Save Log Job] 2024-12-23 17:53:42.496 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。
    451. 

  451. [Save Log Job] 2024-12-23 17:53:42.498 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。
    452. 

  452. [Save Log Job] 2024-12-23 17:53:42.498 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。
    453. 

  453. [Save Log Job] 2024-12-23 17:53:42.498 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPower，RF set Power:0。
    454. 

  454. [Save Log Job] 2024-12-23 17:53:42.499 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。
    455. 

  455. [Save Log Job] 2024-12-23 17:53:42.499 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。
    456. 

  456. [Save Log Job] 2024-12-23 17:53:42.499 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。
    457. 

  457. [Save Log Job] 2024-12-23 17:53:42.500 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas1， ramp to 45sccm。
    458. 

  458. [Save Log Job] 2024-12-23 17:53:42.500 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas2， ramp to 56sccm。
    459. 

  459. [Save Log Job] 2024-12-23 17:53:42.501 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas3， ramp to 66sccm。
    460. 

  460. [Save Log Job] 2024-12-23 17:53:42.501 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas4， ramp to 76sccm。
    461. 

  461. [Save Log Job] 2024-12-23 17:53:42.501 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas5， ramp to 86sccm。
    462. 

  462. [Save Log Job] 2024-12-23 17:53:42.502 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPowerOnOff，Set RF power Off。
    463. 

  463. [Save Log Job] 2024-12-23 17:53:42.502 LOG.INFO UiEvent.cs Line:51 Event() - Start monitor pressure stability
    464. 

  464. [Save Log Job] 2024-12-23 17:54:00.587 LOG.INFO UiEvent.cs Line:51 Event() - Operation AbortRecipe()
    465. 

  465. [Save Log Job] 2024-12-23 17:54:00.587 LOG.INFO UiEvent.cs Line:51 Event() - System recipe was aborted: user aborted recipe
    466. 

  466. [Save Log Job] 2024-12-23 17:54:00.589 LOG.INFO UiEvent.cs Line:51 Event() - Stop monitor pressure stability
    467. 

  467. [Save Log Job] 2024-12-23 17:54:00.589 LOG.INFO UiEvent.cs Line:51 Event() - System Recipe run completed，Recipe：20241223175342-CACB
    468. 

  468. Start time：2024/12/23 17:53:42
    469. 

  469. End time：2024/12/23 17:54:00
    470. 

  470. Total time：0:0:17
    471. 

  471. [Save Log Job] 2024-12-23 17:54:00.589 LOG.INFO UiEvent.cs Line:51 Event() - System Recipe completely run
    472. 

  472. [Save Log Job] 2024-12-23 17:54:00.589 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, wait for 10 seconds
    473. 

  473. [Save Log Job] 2024-12-23 17:54:02.309 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC5 ValveClose失败，原因：Valve keep open。
    474. 

  474. [Save Log Job] 2024-12-23 17:54:02.309 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门Process gas final valveClose失败，原因：Valve keep open。
    475. 

  475. [Save Log Job] 2024-12-23 17:54:10.471 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, RF Power Off
    476. 

  476. [Save Log Job] 2024-12-23 17:54:10.570 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, Stop all the gas flow
    477. 

  477. [Save Log Job] 2024-12-23 17:54:16.103 LOG.INFO UiEvent.cs Line:51 Event() - Operation AbortRecipe()
    478. 

  478. [Save Log Job] 2024-12-23 17:54:16.103 LOG.INFO UiEvent.cs Line:51 Event() - EventLotFinished
    479. 

  479. [Save Log Job] 2024-12-23 17:54:16.205 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    480. 

  480. [Save Log Job] 2024-12-23 17:54:39.233 LOG.INFO UiEvent.cs Line:51 Event() - Operation RunRecipe(CACB, , , )
    481. 

  481. [Save Log Job] 2024-12-23 17:54:39.234 LOG.INFO UiEvent.cs Line:51 Event() - EventLotStart
    482. 

  482. [Save Log Job] 2024-12-23 17:54:39.239 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check door status。
    483. 

  483. [Save Log Job] 2024-12-23 17:54:39.240 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check chamber door。
    484. 

  484. [Save Log Job] 2024-12-23 17:54:39.240 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check backpanel door。
    485. 

  485. [Save Log Job] 2024-12-23 17:54:39.240 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check pump status。
    486. 

  486. [Save Log Job] 2024-12-23 17:54:39.241 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Close all the valves。
    487. 

  487. [Save Log Job] 2024-12-23 17:54:39.334 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    488. 

  488. [Save Log Job] 2024-12-23 17:54:39.334 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Open pumping valve。
    489. 

  489. [Save Log Job] 2024-12-23 17:54:39.435 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check chamber pressure。
    490. 

  490. [Save Log Job] 2024-12-23 17:54:39.436 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Pump below 100mTorr。
    491. 

  491. [Save Log Job] 2024-12-23 17:54:39.437 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：PreProcess Finished in 0.0 minitues。
    492. 

  492. [Save Log Job] 2024-12-23 17:54:39.437 LOG.INFO UiEvent.cs Line:51 Event() - System complete run 'PreProcess'.
    493. 

  493. [Save Log Job] 2024-12-23 17:54:39.437 LOG.INFO UiEvent.cs Line:51 Event() - Run Recipe 20241223175439-CACB
    494. 

  494. [Save Log Job] 2024-12-23 17:54:39.438 LOG.INFO UiEvent.cs Line:51 Event() - System recipe start run'20241223175439-CACB'
    495. 

  495. [Save Log Job] 2024-12-23 17:54:39.536 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241223175439-CACB' start run step 1：initial。
    496. 

  496. [Save Log Job] 2024-12-23 17:54:39.536 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。
    497. 

  497. [Save Log Job] 2024-12-23 17:54:39.536 LOG.INFO UiEvent.cs Line:51 Event() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。
    498. 

  498. [Save Log Job] 2024-12-23 17:54:39.537 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。
    499. 

  499. [Save Log Job] 2024-12-23 17:54:39.537 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。
    500. 

  500. [Save Log Job] 2024-12-23 17:54:39.537 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。
    501. 

  501. [Save Log Job] 2024-12-23 17:54:39.538 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。
    502. 

  502. [Save Log Job] 2024-12-23 17:54:39.538 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。
    503. 

  503. [Save Log Job] 2024-12-23 17:54:39.538 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPower，RF set Power:0。
    504. 

  504. [Save Log Job] 2024-12-23 17:54:39.539 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。
    505. 

  505. [Save Log Job] 2024-12-23 17:54:39.539 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。
    506. 

  506. [Save Log Job] 2024-12-23 17:54:39.539 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。
    507. 

  507. [Save Log Job] 2024-12-23 17:54:39.539 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas1， ramp to 45sccm。
    508. 

  508. [Save Log Job] 2024-12-23 17:54:39.540 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas2， ramp to 56sccm。
    509. 

  509. [Save Log Job] 2024-12-23 17:54:39.540 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas3， ramp to 66sccm。
    510. 

  510. [Save Log Job] 2024-12-23 17:54:39.540 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas4， ramp to 76sccm。
    511. 

  511. [Save Log Job] 2024-12-23 17:54:39.541 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas5， ramp to 86sccm。
    512. 

  512. [Save Log Job] 2024-12-23 17:54:39.541 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPowerOnOff，Set RF power Off。
    513. 

  513. [Save Log Job] 2024-12-23 17:54:39.541 LOG.INFO UiEvent.cs Line:51 Event() - Start monitor pressure stability
    514. 

  514. --------------------------------[Header Log]----------------------------------------- [Save Log Job] 2024-12-23 17:54:58.514 LOG.INFO UiEvent.cs Line:57 Event() - 已经连接上设备实时控制系统
    515. 

  515. [Save Log Job] 2024-12-23 17:54:58.514 LOG.INFO UiEvent.cs Line:58 Event() - 已经连接上设备实时控制系统
    516. 

  516. [Save Log Job] 2024-12-23 17:54:59.763 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    517. 

  517. [Save Log Job] 2024-12-23 17:54:59.811 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(System_IsMesMode, True)
    518. 

  518. [Save Log Job] 2024-12-23 17:55:03.432 LOG.INFO UiEvent.cs Line:51 Event() - Software will be expired in -60 days, at 10/24/2024 12:00:00 AM 。
    519. 

  519. [Save Log Job] 2024-12-23 17:55:06.466 LOG.INFO UiEvent.cs Line:51 Event() - User admin login
    520. 

  520. [Save Log Job] 2024-12-23 17:55:14.115 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetAutoMode()
    521. 

  521. [Save Log Job] 2024-12-23 17:55:14.115 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentModeChanged
    522. 

  522. [Save Log Job] 2024-12-23 17:55:14.116 LOG.INFO UiEvent.cs Line:51 Event() - System running mode changed to Auto Mode
    523. 

  523. [Save Log Job] 2024-12-23 17:55:16.831 LOG.INFO UiEvent.cs Line:51 Event() - Operation RunRecipe(CACB, , , )
    524. 

  524. [Save Log Job] 2024-12-23 17:55:16.831 LOG.INFO UiEvent.cs Line:51 Event() - EventLotStart
    525. 

  525. [Save Log Job] 2024-12-23 17:55:16.937 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check door status。
    526. 

  526. [Save Log Job] 2024-12-23 17:55:16.937 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check chamber door。
    527. 

  527. [Save Log Job] 2024-12-23 17:55:16.938 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check backpanel door。
    528. 

  528. [Save Log Job] 2024-12-23 17:55:16.938 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check pump status。
    529. 

  529. [Save Log Job] 2024-12-23 17:55:16.938 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Close all the valves。
    530. 

  530. [Save Log Job] 2024-12-23 17:55:16.939 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Open pumping valve。
    531. 

  531. [Save Log Job] 2024-12-23 17:55:17.032 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    532. 

  532. [Save Log Job] 2024-12-23 17:55:18.957 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门Chamber pumping valveOpen失败，原因：Valve keep closed 。
    533. 

  533. [Save Log Job] 2024-12-23 17:55:20.265 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check chamber pressure。
    534. 

  534. [Save Log Job] 2024-12-23 17:55:43.032 LOG.INFO UiEvent.cs Line:51 Event() - Operation AbortRecipe()
    535. 

  535. [Save Log Job] 2024-12-23 17:57:04.806 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    536. 

  536. [Save Log Job] 2024-12-23 20:55:06.000 LOG.INFO UiEvent.cs Line:51 Event() - Software will be expired in -60 days, at 10/24/2024 12:00:00 AM。
    537. 

  537. [Save Log Job] 2024-12-23 23:55:07.078 LOG.INFO UiEvent.cs Line:51 Event() - Software will be expired in -60 days, at 10/24/2024 12:00:00 AM。
    538. 

  538. --------------------------------[Footer Log]----------------------------------------- 
    539.