--------------------------------[Header Log]----------------------------------------- [Save Log Job] 2024-12-23 09:13:36.700 LOG.INFO UiEvent.cs Line:57 Event() - 已经连接上设备实时控制系统
[Save Log Job] 2024-12-23 09:13:36.701 LOG.INFO UiEvent.cs Line:58 Event() - 已经连接上设备实时控制系统
[Save Log Job] 2024-12-23 09:13:38.326 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-12-23 09:13:38.670 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(System_IsMesMode, True)
[Save Log Job] 2024-12-23 09:13:41.990 LOG.INFO UiEvent.cs Line:51 Event() - Software will be expired in -60 days, at 10/24/2024 12:00:00 AM 。
[Save Log Job] 2024-12-23 09:13:52.863 LOG.INFO UiEvent.cs Line:51 Event() - User admin login
[Save Log Job] 2024-12-23 09:14:07.853 LOG.INFO UiEvent.cs Line:51 Event() - Operation Vent()
[Save Log Job] 2024-12-23 09:14:07.954 LOG.INFO UiEvent.cs Line:51 Event() - System Vent：check sensor。
[Save Log Job] 2024-12-23 09:14:07.954 LOG.INFO UiEvent.cs Line:51 Event() - System Vent：Close pumping open valve。
[Save Log Job] 2024-12-23 09:14:07.954 LOG.INFO UiEvent.cs Line:51 Event() - System Vent：close all the valve。
[Save Log Job] 2024-12-23 09:14:08.054 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-12-23 09:14:08.054 LOG.INFO UiEvent.cs Line:51 Event() - System Vent：vent delay 2 seconds before open vent valve。
[Save Log Job] 2024-12-23 09:14:10.172 LOG.INFO UiEvent.cs Line:51 Event() - System Vent：Open vent valve。
[Save Log Job] 2024-12-23 09:14:10.574 LOG.INFO UiEvent.cs Line:51 Event() - System Vent：vent 50 seconds。
[Save Log Job] 2024-12-23 09:14:29.934 LOG.INFO UiEvent.cs Line:51 Event() - Operation Abort()
[Save Log Job] 2024-12-23 09:14:29.934 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-12-23 09:14:31.946 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门Chamber vent valveClose失败，原因：Valve keep open。
[Save Log Job] 2024-12-23 09:14:38.984 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetAutoMode()
[Save Log Job] 2024-12-23 09:14:38.984 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentModeChanged
[Save Log Job] 2024-12-23 09:14:38.985 LOG.INFO UiEvent.cs Line:51 Event() - System running mode changed to Auto Mode
[Save Log Job] 2024-12-23 09:14:42.405 LOG.INFO UiEvent.cs Line:51 Event() - Operation RunRecipe(CACB, , , )
[Save Log Job] 2024-12-23 09:14:42.504 LOG.INFO UiEvent.cs Line:51 Event() - EventLotStart
[Save Log Job] 2024-12-23 09:14:42.504 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-12-23 09:14:42.506 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check door status。
[Save Log Job] 2024-12-23 09:14:42.506 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check chamber door。
[Save Log Job] 2024-12-23 09:14:42.507 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check backpanel door。
[Save Log Job] 2024-12-23 09:14:42.507 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check pump status。
[Save Log Job] 2024-12-23 09:14:42.507 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Close all the valves。
[Save Log Job] 2024-12-23 09:14:42.605 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Open pumping valve。
[Save Log Job] 2024-12-23 09:14:44.623 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门Chamber pumping valveOpen失败，原因：Valve keep closed 。
[Save Log Job] 2024-12-23 09:14:44.927 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check chamber pressure。
[Save Log Job] 2024-12-23 09:14:48.758 LOG.INFO UiEvent.cs Line:51 Event() - Operation AbortRecipe()
[Save Log Job] 2024-12-23 09:14:48.858 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-12-23 09:15:07.864 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetManualMode()
[Save Log Job] 2024-12-23 09:15:07.864 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentModeChanged
[Save Log Job] 2024-12-23 09:15:07.865 LOG.INFO UiEvent.cs Line:51 Event() - System running mode changed to Manual Mode
[Save Log Job] 2024-12-23 09:15:12.995 LOG.INFO UiEvent.cs Line:51 Event() - Operation StopPump()
[Save Log Job] 2024-12-23 09:15:13.097 LOG.INFO UiEvent.cs Line:51 Event() - System Stop pump：Check if the rf is on。
[Save Log Job] 2024-12-23 09:15:13.097 LOG.INFO UiEvent.cs Line:51 Event() - System Stop pump：Check if the gas stopped flowing。
[Save Log Job] 2024-12-23 09:15:13.196 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-12-23 09:15:13.196 LOG.INFO UiEvent.cs Line:51 Event() - System Stop pump：Close close pump valve。
[Save Log Job] 2024-12-23 09:15:15.212 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门Chamber pumping valveClose失败，原因：Valve keep open。
[Save Log Job] 2024-12-23 09:15:15.617 LOG.INFO UiEvent.cs Line:51 Event() - System Stop pump：Stop Pump Finished in 0.0 minitues。
[Save Log Job] 2024-12-23 09:15:15.617 LOG.INFO UiEvent.cs Line:51 Event() - System complete run 'Stop Pump'.
[Save Log Job] 2024-12-23 09:15:15.618 LOG.INFO UiEvent.cs Line:51 Event() - Stop Pump
[Save Log Job] 2024-12-23 09:15:15.717 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-12-23 09:15:20.444 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetAutoMode()
[Save Log Job] 2024-12-23 09:15:20.444 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentModeChanged
[Save Log Job] 2024-12-23 09:15:20.445 LOG.INFO UiEvent.cs Line:51 Event() - System running mode changed to Auto Mode
[Save Log Job] 2024-12-23 09:15:26.379 LOG.INFO UiEvent.cs Line:51 Event() - Operation RunRecipe(CACB, , , )
[Save Log Job] 2024-12-23 09:15:26.379 LOG.INFO UiEvent.cs Line:51 Event() - EventLotStart
[Save Log Job] 2024-12-23 09:15:26.379 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check door status。
[Save Log Job] 2024-12-23 09:15:26.379 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check chamber door。
[Save Log Job] 2024-12-23 09:15:26.380 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check backpanel door。
[Save Log Job] 2024-12-23 09:15:26.380 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check pump status。
[Save Log Job] 2024-12-23 09:15:26.380 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Close all the valves。
[Save Log Job] 2024-12-23 09:15:26.381 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-12-23 09:15:26.479 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Open pumping valve。
[Save Log Job] 2024-12-23 09:15:27.184 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check chamber pressure。
[Save Log Job] 2024-12-23 09:15:47.630 LOG.INFO UiEvent.cs Line:51 Event() - Operation AbortRecipe()
[Save Log Job] 2024-12-23 09:15:47.630 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-12-23 09:50:52.987 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetManualMode()
[Save Log Job] 2024-12-23 09:50:52.987 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentModeChanged
[Save Log Job] 2024-12-23 09:50:52.987 LOG.INFO UiEvent.cs Line:51 Event() - System running mode changed to Manual Mode
[Save Log Job] 2024-12-23 09:50:56.606 LOG.INFO UiEvent.cs Line:51 Event() - Operation StopPump()
[Save Log Job] 2024-12-23 09:50:56.606 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-12-23 09:50:56.607 LOG.INFO UiEvent.cs Line:51 Event() - System Stop pump：Check if the rf is on。
[Save Log Job] 2024-12-23 09:50:56.706 LOG.INFO UiEvent.cs Line:51 Event() - System Stop pump：Check if the gas stopped flowing。
[Save Log Job] 2024-12-23 09:50:56.706 LOG.INFO UiEvent.cs Line:51 Event() - System Stop pump：Close close pump valve。
[Save Log Job] 2024-12-23 09:50:58.723 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门Chamber pumping valveClose失败，原因：Valve keep open。
[Save Log Job] 2024-12-23 09:51:00.637 LOG.INFO UiEvent.cs Line:51 Event() - System Stop pump：Stop Pump Finished in 0.1 minitues。
[Save Log Job] 2024-12-23 09:51:00.637 LOG.INFO UiEvent.cs Line:51 Event() - System complete run 'Stop Pump'.
[Save Log Job] 2024-12-23 09:51:00.637 LOG.INFO UiEvent.cs Line:51 Event() - Stop Pump
[Save Log Job] 2024-12-23 09:51:00.637 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-12-23 09:51:06.872 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：BoostPump.SetPressure，。
[Save Log Job] 2024-12-23 09:51:06.872 LOG.INFO UiEvent.cs Line:51 Event() - Operation DeviceOperation(BoostPump, SetPressure, 0)
[Save Log Job] 2024-12-23 09:51:06.872 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(System_PumpBasePressure, 500)
[Save Log Job] 2024-12-23 09:51:06.872 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(System_PumpTimeLimit, 120)
[Save Log Job] 2024-12-23 09:51:06.873 LOG.INFO UiEvent.cs Line:51 Event() - Operation Pump()
[Save Log Job] 2024-12-23 09:51:06.973 LOG.INFO UiEvent.cs Line:51 Event() - System Pumping Down：Check door status。
[Save Log Job] 2024-12-23 09:51:06.973 LOG.INFO UiEvent.cs Line:51 Event() - System Pumping Down：check chamber door。
[Save Log Job] 2024-12-23 09:51:06.973 LOG.INFO UiEvent.cs Line:51 Event() - System Pumping Down：check backpanel door。
[Save Log Job] 2024-12-23 09:51:06.973 LOG.INFO UiEvent.cs Line:51 Event() - System Pumping Down：Check pump status。
[Save Log Job] 2024-12-23 09:51:06.973 LOG.INFO UiEvent.cs Line:51 Event() - System Pumping Down：Close all the valves。
[Save Log Job] 2024-12-23 09:51:07.075 LOG.INFO UiEvent.cs Line:51 Event() - System Pumping Down：Open pumping valve。
[Save Log Job] 2024-12-23 09:51:07.075 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-12-23 09:51:08.384 LOG.INFO UiEvent.cs Line:51 Event() - System Pumping Down：Wait chamber pressure until below 500。
[Save Log Job] 2024-12-23 09:51:08.384 LOG.INFO UiEvent.cs Line:51 Event() - System Pumping Down：Pump below 500mTorr。
[Save Log Job] 2024-12-23 09:51:08.384 LOG.INFO UiEvent.cs Line:51 Event() - System Pumping Down：Pump Finished in 0.0 minitues。
[Save Log Job] 2024-12-23 09:51:08.385 LOG.INFO UiEvent.cs Line:51 Event() - System complete run 'Pump'.
[Save Log Job] 2024-12-23 09:51:08.385 LOG.INFO UiEvent.cs Line:51 Event() - Pump
[Save Log Job] 2024-12-23 09:51:08.484 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-12-23 09:51:12.706 LOG.INFO UiEvent.cs Line:51 Event() - Operation StopPump()
[Save Log Job] 2024-12-23 09:51:12.706 LOG.INFO UiEvent.cs Line:51 Event() - System Stop pump：Check if the rf is on。
[Save Log Job] 2024-12-23 09:51:12.807 LOG.INFO UiEvent.cs Line:51 Event() - System Stop pump：Close close pump valve。
[Save Log Job] 2024-12-23 09:51:12.807 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-12-23 09:51:12.808 LOG.INFO UiEvent.cs Line:51 Event() - System Stop pump：Check if the gas stopped flowing。
[Save Log Job] 2024-12-23 09:51:14.820 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门Chamber pumping valveClose失败，原因：Valve keep open。
[Save Log Job] 2024-12-23 09:51:16.025 LOG.INFO UiEvent.cs Line:51 Event() - System Stop pump：Stop Pump Finished in 0.1 minitues。
[Save Log Job] 2024-12-23 09:51:16.026 LOG.INFO UiEvent.cs Line:51 Event() - System complete run 'Stop Pump'.
[Save Log Job] 2024-12-23 09:51:16.028 LOG.INFO UiEvent.cs Line:51 Event() - Stop Pump
[Save Log Job] 2024-12-23 09:51:16.028 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-12-23 11:04:03.118 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetAutoMode()
[Save Log Job] 2024-12-23 11:04:03.118 LOG.INFO UiEvent.cs Line:51 Event() - System running mode changed to Auto Mode
[Save Log Job] 2024-12-23 11:04:03.118 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentModeChanged
[Save Log Job] 2024-12-23 12:13:41.897 LOG.INFO UiEvent.cs Line:51 Event() - Software will be expired in -60 days, at 10/24/2024 12:00:00 AM。
--------------------------------[Header Log]----------------------------------------- [Save Log Job] 2024-12-23 13:16:20.078 LOG.INFO UiEvent.cs Line:57 Event() - 已经连接上设备实时控制系统
[Save Log Job] 2024-12-23 13:16:20.079 LOG.INFO UiEvent.cs Line:58 Event() - 已经连接上设备实时控制系统
[Save Log Job] 2024-12-23 13:16:21.527 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(System_IsMesMode, True)
[Save Log Job] 2024-12-23 13:16:21.586 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-12-23 13:16:25.301 LOG.INFO UiEvent.cs Line:51 Event() - Software will be expired in -60 days, at 10/24/2024 12:00:00 AM 。
[Save Log Job] 2024-12-23 13:16:34.554 LOG.INFO UiEvent.cs Line:51 Event() - User admin login
[Save Log Job] 2024-12-23 16:16:26.415 LOG.INFO UiEvent.cs Line:51 Event() - Software will be expired in -60 days, at 10/24/2024 12:00:00 AM。
[Save Log Job] 2024-12-23 17:12:39.473 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetAutoMode()
[Save Log Job] 2024-12-23 17:12:39.474 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentModeChanged
[Save Log Job] 2024-12-23 17:12:39.474 LOG.INFO UiEvent.cs Line:51 Event() - System running mode changed to Auto Mode
[Save Log Job] 2024-12-23 17:12:47.718 LOG.INFO UiEvent.cs Line:51 Event() - Operation RunRecipe(CACB, , , )
[Save Log Job] 2024-12-23 17:12:47.820 LOG.INFO UiEvent.cs Line:51 Event() - EventLotStart
[Save Log Job] 2024-12-23 17:12:47.820 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check door status。
[Save Log Job] 2024-12-23 17:12:47.820 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check chamber door。
[Save Log Job] 2024-12-23 17:12:47.820 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check backpanel door。
[Save Log Job] 2024-12-23 17:12:47.820 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check pump status。
[Save Log Job] 2024-12-23 17:12:47.820 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Close all the valves。
[Save Log Job] 2024-12-23 17:12:47.924 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Open pumping valve。
[Save Log Job] 2024-12-23 17:12:47.924 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-12-23 17:12:49.938 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门Chamber pumping valveOpen失败，原因：Valve keep closed 。
[Save Log Job] 2024-12-23 17:12:51.242 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check chamber pressure。
[Save Log Job] 2024-12-23 17:12:56.173 LOG.INFO UiEvent.cs Line:51 Event() - Operation AbortRecipe()
[Save Log Job] 2024-12-23 17:12:56.273 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-12-23 17:13:04.920 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentModeChanged
[Save Log Job] 2024-12-23 17:13:04.920 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetManualMode()
[Save Log Job] 2024-12-23 17:13:04.921 LOG.INFO UiEvent.cs Line:51 Event() - System running mode changed to Manual Mode
[Save Log Job] 2024-12-23 17:20:42.711 LOG.INFO UiEvent.cs Line:51 Event() - System PLC heart beat check failed，please confirm PLC still running
[Save Log Job] 2024-12-23 17:20:45.642 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-12-23 17:20:45.643 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-12-23 17:24:04.014 LOG.INFO UiEvent.cs Line:51 Event() - System PLC heart beat check failed，please confirm PLC still running
[Save Log Job] 2024-12-23 17:30:00.726 LOG.INFO UiEvent.cs Line:51 Event() - Operation StopPump()
[Save Log Job] 2024-12-23 17:31:08.147 LOG.INFO UiEvent.cs Line:51 Event() - Chamber is in Error，can not do StopPumpDown。
[Save Log Job] 2024-12-23 17:31:34.303 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-12-23 17:31:46.153 LOG.INFO UiEvent.cs Line:51 Event() - Operation StopPump()
[Save Log Job] 2024-12-23 17:31:56.835 LOG.INFO UiEvent.cs Line:51 Event() - System Stop pump：Check if the rf is on。
[Save Log Job] 2024-12-23 17:31:56.937 LOG.INFO UiEvent.cs Line:51 Event() - System Stop pump：Check if the gas stopped flowing。
[Save Log Job] 2024-12-23 17:31:56.937 LOG.INFO UiEvent.cs Line:51 Event() - System Stop pump：Close close pump valve。
[Save Log Job] 2024-12-23 17:31:56.937 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-12-23 17:31:58.647 LOG.INFO UiEvent.cs Line:51 Event() - System Stop pump：Stop Pump Finished in 0.2 minitues。
[Save Log Job] 2024-12-23 17:31:58.648 LOG.INFO UiEvent.cs Line:51 Event() - System complete run 'Stop Pump'.
[Save Log Job] 2024-12-23 17:31:58.648 LOG.INFO UiEvent.cs Line:51 Event() - Stop Pump
[Save Log Job] 2024-12-23 17:31:58.747 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-12-23 17:32:24.386 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetAutoMode()
[Save Log Job] 2024-12-23 17:32:24.387 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentModeChanged
[Save Log Job] 2024-12-23 17:32:24.387 LOG.INFO UiEvent.cs Line:51 Event() - System running mode changed to Auto Mode
[Save Log Job] 2024-12-23 17:32:33.231 LOG.INFO UiEvent.cs Line:51 Event() - Operation RunRecipe(CACB, , , )
[Save Log Job] 2024-12-23 17:32:33.232 LOG.INFO UiEvent.cs Line:51 Event() - EventLotStart
[Save Log Job] 2024-12-23 17:32:33.232 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check door status。
[Save Log Job] 2024-12-23 17:32:33.232 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check chamber door。
[Save Log Job] 2024-12-23 17:32:33.232 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check backpanel door。
[Save Log Job] 2024-12-23 17:32:33.232 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check pump status。
[Save Log Job] 2024-12-23 17:32:33.233 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Close all the valves。
[Save Log Job] 2024-12-23 17:32:33.233 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-12-23 17:32:33.333 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Open pumping valve。
[Save Log Job] 2024-12-23 17:32:35.342 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门Chamber pumping valveOpen失败，原因：Valve keep closed 。
[Save Log Job] 2024-12-23 17:32:36.853 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check chamber pressure。
[Save Log Job] 2024-12-23 17:32:45.000 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：PreProcess Finished in 0.2 minitues。
[Save Log Job] 2024-12-23 17:32:45.000 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Pump below 100mTorr。
[Save Log Job] 2024-12-23 17:32:45.001 LOG.INFO UiEvent.cs Line:51 Event() - System complete run 'PreProcess'.
[Save Log Job] 2024-12-23 17:32:45.001 LOG.INFO UiEvent.cs Line:51 Event() - Run Recipe 20241223173233-CACB
[Save Log Job] 2024-12-23 17:32:45.001 LOG.INFO UiEvent.cs Line:51 Event() - System recipe start run'20241223173233-CACB'
[Save Log Job] 2024-12-23 17:32:45.101 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241223173233-CACB' start run step 1：initial。
[Save Log Job] 2024-12-23 17:32:45.103 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。
[Save Log Job] 2024-12-23 17:32:45.103 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。
[Save Log Job] 2024-12-23 17:32:45.103 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。
[Save Log Job] 2024-12-23 17:32:45.103 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。
[Save Log Job] 2024-12-23 17:32:45.103 LOG.INFO UiEvent.cs Line:51 Event() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。
[Save Log Job] 2024-12-23 17:32:45.103 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。
[Save Log Job] 2024-12-23 17:32:45.103 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。
[Save Log Job] 2024-12-23 17:32:45.104 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPower，RF set Power:0。
[Save Log Job] 2024-12-23 17:32:45.104 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。
[Save Log Job] 2024-12-23 17:32:45.104 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。
[Save Log Job] 2024-12-23 17:32:45.104 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。
[Save Log Job] 2024-12-23 17:32:45.105 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas1， ramp to 45sccm。
[Save Log Job] 2024-12-23 17:32:45.105 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas2， ramp to 56sccm。
[Save Log Job] 2024-12-23 17:32:45.105 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas3， ramp to 66sccm。
[Save Log Job] 2024-12-23 17:32:45.105 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPowerOnOff，Set RF power Off。
[Save Log Job] 2024-12-23 17:32:45.105 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas4， ramp to 76sccm。
[Save Log Job] 2024-12-23 17:32:45.105 LOG.INFO UiEvent.cs Line:51 Event() - Start monitor pressure stability
[Save Log Job] 2024-12-23 17:32:45.105 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas5， ramp to 86sccm。
[Save Log Job] 2024-12-23 17:32:48.017 LOG.INFO UiEvent.cs Line:51 Event() - System recipe was aborted: user aborted recipe
[Save Log Job] 2024-12-23 17:32:48.017 LOG.INFO UiEvent.cs Line:51 Event() - Operation AbortRecipe()
[Save Log Job] 2024-12-23 17:32:48.017 LOG.INFO UiEvent.cs Line:51 Event() - Stop monitor pressure stability
[Save Log Job] 2024-12-23 17:32:48.017 LOG.INFO UiEvent.cs Line:51 Event() - System Recipe run completed，Recipe：20241223173233-CACB
Start time：2024/12/23 17:32:44
End time：2024/12/23 17:32:47
Total time：0:0:3
[Save Log Job] 2024-12-23 17:32:48.018 LOG.INFO UiEvent.cs Line:51 Event() - System Recipe completely run
[Save Log Job] 2024-12-23 17:32:48.120 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, wait for 10 seconds
[Save Log Job] 2024-12-23 17:32:50.030 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC1 ValveClose失败，原因：Valve keep open。
[Save Log Job] 2024-12-23 17:32:50.031 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC2 ValveClose失败，原因：Valve keep open。
[Save Log Job] 2024-12-23 17:32:50.031 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC3 ValveClose失败，原因：Valve keep open。
[Save Log Job] 2024-12-23 17:32:50.031 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC4 ValveClose失败，原因：Valve keep open。
[Save Log Job] 2024-12-23 17:32:50.032 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC5 ValveClose失败，原因：Valve keep open。
[Save Log Job] 2024-12-23 17:32:50.032 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门Process gas final valveClose失败，原因：Valve keep open。
[Save Log Job] 2024-12-23 17:32:58.177 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, RF Power Off
[Save Log Job] 2024-12-23 17:32:58.277 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, Close all the valves
[Save Log Job] 2024-12-23 17:32:58.277 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, Stop all the gas flow
[Save Log Job] 2024-12-23 17:32:58.378 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, close pump valve
[Save Log Job] 2024-12-23 17:32:59.887 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, delay 3 seconds
[Save Log Job] 2024-12-23 17:33:03.008 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, vent 50 seconds
[Save Log Job] 2024-12-23 17:33:28.187 LOG.INFO UiEvent.cs Line:51 Event() - Operation AbortRecipe()
[Save Log Job] 2024-12-23 17:33:28.187 LOG.INFO UiEvent.cs Line:51 Event() - EventLotFinished
[Save Log Job] 2024-12-23 17:33:28.187 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-12-23 17:33:30.196 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门Chamber vent valveClose失败，原因：Valve keep open。
[Save Log Job] 2024-12-23 17:33:43.567 LOG.INFO UiEvent.cs Line:51 Event() - Operation RunRecipe(CACB, , , )
[Save Log Job] 2024-12-23 17:33:43.570 LOG.INFO UiEvent.cs Line:51 Event() - EventLotStart
[Save Log Job] 2024-12-23 17:33:43.570 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check door status。
[Save Log Job] 2024-12-23 17:33:43.570 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check chamber door。
[Save Log Job] 2024-12-23 17:33:43.570 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check backpanel door。
[Save Log Job] 2024-12-23 17:33:43.571 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check pump status。
[Save Log Job] 2024-12-23 17:33:43.571 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Close all the valves。
[Save Log Job] 2024-12-23 17:33:43.666 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-12-23 17:33:43.666 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Open pumping valve。
[Save Log Job] 2024-12-23 17:33:45.679 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门Chamber pumping valveOpen失败，原因：Valve keep closed 。
[Save Log Job] 2024-12-23 17:33:46.081 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check chamber pressure。
[Save Log Job] 2024-12-23 17:33:48.798 LOG.INFO UiEvent.cs Line:51 Event() - Operation AbortRecipe()
[Save Log Job] 2024-12-23 17:33:48.897 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-12-23 17:34:01.464 LOG.INFO UiEvent.cs Line:51 Event() - Operation RunRecipe(CACB, , , )
[Save Log Job] 2024-12-23 17:34:01.465 LOG.INFO UiEvent.cs Line:51 Event() - EventLotStart
[Save Log Job] 2024-12-23 17:34:01.465 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-12-23 17:34:01.465 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check door status。
[Save Log Job] 2024-12-23 17:34:01.465 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check chamber door。
[Save Log Job] 2024-12-23 17:34:01.465 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check backpanel door。
[Save Log Job] 2024-12-23 17:34:01.465 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check pump status。
[Save Log Job] 2024-12-23 17:34:01.466 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Close all the valves。
[Save Log Job] 2024-12-23 17:34:01.562 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Open pumping valve。
[Save Log Job] 2024-12-23 17:34:01.662 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check chamber pressure。
[Save Log Job] 2024-12-23 17:34:24.805 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：PreProcess Finished in 0.4 minitues。
[Save Log Job] 2024-12-23 17:34:24.805 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Pump below 100mTorr。
[Save Log Job] 2024-12-23 17:34:24.805 LOG.INFO UiEvent.cs Line:51 Event() - System complete run 'PreProcess'.
[Save Log Job] 2024-12-23 17:34:24.805 LOG.INFO UiEvent.cs Line:51 Event() - Run Recipe 20241223173401-CACB
[Save Log Job] 2024-12-23 17:34:24.806 LOG.INFO UiEvent.cs Line:51 Event() - System recipe start run'20241223173401-CACB'
[Save Log Job] 2024-12-23 17:34:24.904 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241223173401-CACB' start run step 1：initial。
[Save Log Job] 2024-12-23 17:34:24.906 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。
[Save Log Job] 2024-12-23 17:34:24.906 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。
[Save Log Job] 2024-12-23 17:34:24.906 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。
[Save Log Job] 2024-12-23 17:34:24.906 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。
[Save Log Job] 2024-12-23 17:34:24.907 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。
[Save Log Job] 2024-12-23 17:34:24.907 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。
[Save Log Job] 2024-12-23 17:34:24.907 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPower，RF set Power:0。
[Save Log Job] 2024-12-23 17:34:24.907 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。
[Save Log Job] 2024-12-23 17:34:24.907 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。
[Save Log Job] 2024-12-23 17:34:24.907 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。
[Save Log Job] 2024-12-23 17:34:24.928 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas2， ramp to 56sccm。
[Save Log Job] 2024-12-23 17:34:24.928 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas1， ramp to 45sccm。
[Save Log Job] 2024-12-23 17:34:24.928 LOG.INFO UiEvent.cs Line:51 Event() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。
[Save Log Job] 2024-12-23 17:34:24.928 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas3， ramp to 66sccm。
[Save Log Job] 2024-12-23 17:34:24.928 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas5， ramp to 86sccm。
[Save Log Job] 2024-12-23 17:34:24.928 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas4， ramp to 76sccm。
[Save Log Job] 2024-12-23 17:34:24.928 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPowerOnOff，Set RF power Off。
[Save Log Job] 2024-12-23 17:34:24.928 LOG.INFO UiEvent.cs Line:51 Event() - Start monitor pressure stability
[Save Log Job] 2024-12-23 17:34:29.933 LOG.INFO UiEvent.cs Line:51 Event() - Operation AbortRecipe()
[Save Log Job] 2024-12-23 17:34:29.933 LOG.INFO UiEvent.cs Line:51 Event() - System recipe was aborted: user aborted recipe
[Save Log Job] 2024-12-23 17:34:29.933 LOG.INFO UiEvent.cs Line:51 Event() - Stop monitor pressure stability
[Save Log Job] 2024-12-23 17:34:29.934 LOG.INFO UiEvent.cs Line:51 Event() - System Recipe run completed，Recipe：20241223173401-CACB
Start time：2024/12/23 17:34:24
End time：2024/12/23 17:34:29
Total time：0:0:5
[Save Log Job] 2024-12-23 17:34:29.934 LOG.INFO UiEvent.cs Line:51 Event() - System Recipe completely run
[Save Log Job] 2024-12-23 17:34:30.034 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, wait for 10 seconds
[Save Log Job] 2024-12-23 17:34:40.100 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, RF Power Off
[Save Log Job] 2024-12-23 17:34:40.203 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, Close all the valves
[Save Log Job] 2024-12-23 17:34:40.203 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, Stop all the gas flow
[Save Log Job] 2024-12-23 17:34:40.304 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, close pump valve
[Save Log Job] 2024-12-23 17:34:42.317 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门Chamber pumping valveClose失败，原因：Valve keep open。
[Save Log Job] 2024-12-23 17:34:43.626 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, delay 3 seconds
[Save Log Job] 2024-12-23 17:34:46.646 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, vent 50 seconds
[Save Log Job] 2024-12-23 17:35:16.234 LOG.INFO UiEvent.cs Line:51 Event() - Operation AbortRecipe()
[Save Log Job] 2024-12-23 17:35:16.234 LOG.INFO UiEvent.cs Line:51 Event() - EventLotFinished
[Save Log Job] 2024-12-23 17:35:16.334 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-12-23 17:35:18.244 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门Chamber vent valveClose失败，原因：Valve keep open。
[Save Log Job] 2024-12-23 17:35:49.095 LOG.INFO UiEvent.cs Line:51 Event() - Operation RunRecipe(CACB, , , )
[Save Log Job] 2024-12-23 17:35:49.095 LOG.INFO UiEvent.cs Line:51 Event() - EventLotStart
[Save Log Job] 2024-12-23 17:35:49.197 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check door status。
[Save Log Job] 2024-12-23 17:35:49.197 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-12-23 17:35:49.197 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check chamber door。
[Save Log Job] 2024-12-23 17:35:49.197 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check backpanel door。
[Save Log Job] 2024-12-23 17:35:49.197 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check pump status。
[Save Log Job] 2024-12-23 17:35:49.197 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Close all the valves。
[Save Log Job] 2024-12-23 17:35:49.296 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Open pumping valve。
[Save Log Job] 2024-12-23 17:35:51.208 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门Chamber pumping valveOpen失败，原因：Valve keep closed 。
[Save Log Job] 2024-12-23 17:35:52.817 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check chamber pressure。
[Save Log Job] 2024-12-23 17:35:55.133 LOG.INFO UiEvent.cs Line:51 Event() - Operation AbortRecipe()
[Save Log Job] 2024-12-23 17:35:55.233 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-12-23 17:36:18.357 LOG.INFO UiEvent.cs Line:51 Event() - Operation RunRecipe(CACB, , , )
[Save Log Job] 2024-12-23 17:36:18.357 LOG.INFO UiEvent.cs Line:51 Event() - EventLotStart
[Save Log Job] 2024-12-23 17:36:18.457 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-12-23 17:36:18.457 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check door status。
[Save Log Job] 2024-12-23 17:36:18.458 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check chamber door。
[Save Log Job] 2024-12-23 17:36:18.458 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check backpanel door。
[Save Log Job] 2024-12-23 17:36:18.458 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check pump status。
[Save Log Job] 2024-12-23 17:36:18.459 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Open pumping valve。
[Save Log Job] 2024-12-23 17:36:18.459 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Close all the valves。
[Save Log Job] 2024-12-23 17:36:18.559 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check chamber pressure。
[Save Log Job] 2024-12-23 17:36:50.669 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Pump below 100mTorr。
[Save Log Job] 2024-12-23 17:36:50.770 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：PreProcess Finished in 0.5 minitues。
[Save Log Job] 2024-12-23 17:36:50.770 LOG.INFO UiEvent.cs Line:51 Event() - System complete run 'PreProcess'.
[Save Log Job] 2024-12-23 17:36:50.771 LOG.INFO UiEvent.cs Line:51 Event() - Run Recipe 20241223173618-CACB
[Save Log Job] 2024-12-23 17:36:50.771 LOG.INFO UiEvent.cs Line:51 Event() - System recipe start run'20241223173618-CACB'
[Save Log Job] 2024-12-23 17:36:50.771 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241223173618-CACB' start run step 1：initial。
[Save Log Job] 2024-12-23 17:36:50.771 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。
[Save Log Job] 2024-12-23 17:36:50.771 LOG.INFO UiEvent.cs Line:51 Event() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。
[Save Log Job] 2024-12-23 17:36:50.772 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。
[Save Log Job] 2024-12-23 17:36:50.772 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。
[Save Log Job] 2024-12-23 17:36:50.772 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。
[Save Log Job] 2024-12-23 17:36:50.772 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。
[Save Log Job] 2024-12-23 17:36:50.772 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。
[Save Log Job] 2024-12-23 17:36:50.772 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPower，RF set Power:0。
[Save Log Job] 2024-12-23 17:36:50.773 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。
[Save Log Job] 2024-12-23 17:36:50.773 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。
[Save Log Job] 2024-12-23 17:36:50.773 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。
[Save Log Job] 2024-12-23 17:36:50.774 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas1， ramp to 45sccm。
[Save Log Job] 2024-12-23 17:36:50.774 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas2， ramp to 56sccm。
[Save Log Job] 2024-12-23 17:36:50.774 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas3， ramp to 66sccm。
[Save Log Job] 2024-12-23 17:36:50.774 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas4， ramp to 76sccm。
[Save Log Job] 2024-12-23 17:36:50.774 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas5， ramp to 86sccm。
[Save Log Job] 2024-12-23 17:36:50.774 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPowerOnOff，Set RF power Off。
[Save Log Job] 2024-12-23 17:36:50.870 LOG.INFO UiEvent.cs Line:51 Event() - Start monitor pressure stability
[Save Log Job] 2024-12-23 17:37:01.026 LOG.INFO UiEvent.cs Line:51 Event() - System recipe was aborted: user aborted recipe
[Save Log Job] 2024-12-23 17:37:01.026 LOG.INFO UiEvent.cs Line:51 Event() - Operation AbortRecipe()
[Save Log Job] 2024-12-23 17:37:01.026 LOG.INFO UiEvent.cs Line:51 Event() - Stop monitor pressure stability
[Save Log Job] 2024-12-23 17:37:01.026 LOG.INFO UiEvent.cs Line:51 Event() - System Recipe run completed，Recipe：20241223173618-CACB
Start time：2024/12/23 17:36:50
End time：2024/12/23 17:37:00
Total time：0:0:10
[Save Log Job] 2024-12-23 17:37:01.026 LOG.INFO UiEvent.cs Line:51 Event() - System Recipe completely run
[Save Log Job] 2024-12-23 17:37:01.125 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, wait for 10 seconds
[Save Log Job] 2024-12-23 17:37:03.041 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC1 ValveClose失败，原因：Valve keep open。
[Save Log Job] 2024-12-23 17:37:03.041 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC2 ValveClose失败，原因：Valve keep open。
[Save Log Job] 2024-12-23 17:37:03.041 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC3 ValveClose失败，原因：Valve keep open。
[Save Log Job] 2024-12-23 17:37:03.042 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC4 ValveClose失败，原因：Valve keep open。
[Save Log Job] 2024-12-23 17:37:03.042 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC5 ValveClose失败，原因：Valve keep open。
[Save Log Job] 2024-12-23 17:37:11.195 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, RF Power Off
[Save Log Job] 2024-12-23 17:37:11.195 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, Stop all the gas flow
[Save Log Job] 2024-12-23 17:37:11.300 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, Close all the valves
[Save Log Job] 2024-12-23 17:37:11.300 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, close pump valve
[Save Log Job] 2024-12-23 17:37:13.411 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, delay 3 seconds
[Save Log Job] 2024-12-23 17:37:16.530 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, vent 50 seconds
[Save Log Job] 2024-12-23 17:38:06.567 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, Close vent valve
[Save Log Job] 2024-12-23 17:38:07.370 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, PostProcess Finished in 1.1 minitues
[Save Log Job] 2024-12-23 17:38:07.371 LOG.INFO UiEvent.cs Line:51 Event() - System complete run 'PostProcess'.
[Save Log Job] 2024-12-23 17:38:07.372 LOG.INFO UiEvent.cs Line:51 Event() - EventLotFinished
[Save Log Job] 2024-12-23 17:38:07.473 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
--------------------------------[Header Log]----------------------------------------- [Save Log Job] 2024-12-23 17:40:38.783 LOG.INFO UiEvent.cs Line:57 Event() - 已经连接上设备实时控制系统
[Save Log Job] 2024-12-23 17:40:38.784 LOG.INFO UiEvent.cs Line:58 Event() - 已经连接上设备实时控制系统
[Save Log Job] 2024-12-23 17:40:40.374 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-12-23 17:40:40.517 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(System_IsMesMode, True)
[Save Log Job] 2024-12-23 17:40:43.939 LOG.INFO UiEvent.cs Line:51 Event() - Software will be expired in -60 days, at 10/24/2024 12:00:00 AM 。
[Save Log Job] 2024-12-23 17:40:46.380 LOG.INFO UiEvent.cs Line:51 Event() - User admin login
[Save Log Job] 2024-12-23 17:40:52.382 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetAutoMode()
[Save Log Job] 2024-12-23 17:40:52.382 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentModeChanged
[Save Log Job] 2024-12-23 17:40:52.383 LOG.INFO UiEvent.cs Line:51 Event() - System running mode changed to Auto Mode
[Save Log Job] 2024-12-23 17:40:58.515 LOG.INFO UiEvent.cs Line:51 Event() - Operation RunRecipe(CACB, , , )
[Save Log Job] 2024-12-23 17:40:58.515 LOG.INFO UiEvent.cs Line:51 Event() - EventLotStart
[Save Log Job] 2024-12-23 17:40:58.515 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-12-23 17:40:58.516 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check door status。
[Save Log Job] 2024-12-23 17:40:58.516 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check chamber door。
[Save Log Job] 2024-12-23 17:40:58.516 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check backpanel door。
[Save Log Job] 2024-12-23 17:40:58.517 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check pump status。
[Save Log Job] 2024-12-23 17:40:58.517 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Close all the valves。
[Save Log Job] 2024-12-23 17:40:58.616 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Open pumping valve。
[Save Log Job] 2024-12-23 17:41:00.631 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门Chamber pumping valveOpen失败，原因：Valve keep closed 。
[Save Log Job] 2024-12-23 17:41:00.830 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check chamber pressure。
[Save Log Job] 2024-12-23 17:45:59.301 LOG.INFO UiEvent.cs Line:51 Event() - System PLC heart beat check failed，please confirm PLC still running
[Save Log Job] 2024-12-23 17:45:59.302 LOG.INFO UiEvent.cs Line:51 Event() - Operation AbortRecipe()
[Save Log Job] 2024-12-23 17:45:59.302 LOG.INFO UiEvent.cs Line:51 Event() - Can not pump to base pressure 100 in 120 seconds。
[Save Log Job] 2024-12-23 17:45:59.501 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-12-23 17:46:04.227 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-12-23 17:46:09.964 LOG.INFO UiEvent.cs Line:51 Event() - EventLotStart
[Save Log Job] 2024-12-23 17:46:09.964 LOG.INFO UiEvent.cs Line:51 Event() - Operation RunRecipe(CACB, , , )
[Save Log Job] 2024-12-23 17:46:09.966 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check door status。
[Save Log Job] 2024-12-23 17:46:09.966 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check chamber door。
[Save Log Job] 2024-12-23 17:46:09.966 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check backpanel door。
[Save Log Job] 2024-12-23 17:46:09.967 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check pump status。
[Save Log Job] 2024-12-23 17:46:09.967 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Close all the valves。
[Save Log Job] 2024-12-23 17:46:10.062 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Open pumping valve。
[Save Log Job] 2024-12-23 17:46:10.062 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-12-23 17:46:10.062 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check chamber pressure。
[Save Log Job] 2024-12-23 17:46:18.906 LOG.INFO UiEvent.cs Line:51 Event() - Operation AbortRecipe()
[Save Log Job] 2024-12-23 17:46:19.209 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
--------------------------------[Header Log]----------------------------------------- [Save Log Job] 2024-12-23 17:51:14.121 LOG.INFO UiEvent.cs Line:58 Event() - 已经连接上设备实时控制系统
[Save Log Job] 2024-12-23 17:51:14.122 LOG.INFO UiEvent.cs Line:57 Event() - 已经连接上设备实时控制系统
[Save Log Job] 2024-12-23 17:51:15.805 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-12-23 17:51:16.044 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(System_IsMesMode, True)
[Save Log Job] 2024-12-23 17:51:19.461 LOG.INFO UiEvent.cs Line:51 Event() - Software will be expired in -60 days, at 10/24/2024 12:00:00 AM 。
[Save Log Job] 2024-12-23 17:51:27.604 LOG.INFO UiEvent.cs Line:51 Event() - User admin login
[Save Log Job] 2024-12-23 17:51:40.587 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetAutoMode()
[Save Log Job] 2024-12-23 17:51:40.587 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentModeChanged
[Save Log Job] 2024-12-23 17:51:40.587 LOG.INFO UiEvent.cs Line:51 Event() - System running mode changed to Auto Mode
[Save Log Job] 2024-12-23 17:51:46.216 LOG.INFO UiEvent.cs Line:51 Event() - Operation RunRecipe(CACB, , , )
[Save Log Job] 2024-12-23 17:51:46.216 LOG.INFO UiEvent.cs Line:51 Event() - EventLotStart
[Save Log Job] 2024-12-23 17:51:46.317 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check door status。
[Save Log Job] 2024-12-23 17:51:46.317 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check chamber door。
[Save Log Job] 2024-12-23 17:51:46.317 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check backpanel door。
[Save Log Job] 2024-12-23 17:51:46.318 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check pump status。
[Save Log Job] 2024-12-23 17:51:46.318 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Close all the valves。
[Save Log Job] 2024-12-23 17:51:46.318 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-12-23 17:51:46.319 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Open pumping valve。
[Save Log Job] 2024-12-23 17:51:47.827 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check chamber pressure。
[Save Log Job] 2024-12-23 17:51:55.643 LOG.INFO UiEvent.cs Line:51 Event() - Operation AbortRecipe()
[Save Log Job] 2024-12-23 17:51:55.743 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
--------------------------------[Header Log]----------------------------------------- [Save Log Job] 2024-12-23 17:52:39.490 LOG.INFO UiEvent.cs Line:57 Event() - 已经连接上设备实时控制系统
[Save Log Job] 2024-12-23 17:52:39.490 LOG.INFO UiEvent.cs Line:58 Event() - 已经连接上设备实时控制系统
[Save Log Job] 2024-12-23 17:52:41.085 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-12-23 17:52:41.332 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(System_IsMesMode, True)
[Save Log Job] 2024-12-23 17:52:44.747 LOG.INFO UiEvent.cs Line:51 Event() - Software will be expired in -60 days, at 10/24/2024 12:00:00 AM 。
[Save Log Job] 2024-12-23 17:52:46.856 LOG.INFO UiEvent.cs Line:51 Event() - User admin login
[Save Log Job] 2024-12-23 17:52:55.103 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetAutoMode()
[Save Log Job] 2024-12-23 17:52:55.103 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentModeChanged
[Save Log Job] 2024-12-23 17:52:55.103 LOG.INFO UiEvent.cs Line:51 Event() - System running mode changed to Auto Mode
[Save Log Job] 2024-12-23 17:52:57.220 LOG.INFO UiEvent.cs Line:51 Event() - Operation RunRecipe(CACB, , , )
[Save Log Job] 2024-12-23 17:52:57.222 LOG.INFO UiEvent.cs Line:51 Event() - EventLotStart
[Save Log Job] 2024-12-23 17:52:57.223 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check door status。
[Save Log Job] 2024-12-23 17:52:57.223 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check chamber door。
[Save Log Job] 2024-12-23 17:52:57.223 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check backpanel door。
[Save Log Job] 2024-12-23 17:52:57.223 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check pump status。
[Save Log Job] 2024-12-23 17:52:57.225 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Close all the valves。
[Save Log Job] 2024-12-23 17:52:57.225 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-12-23 17:52:57.319 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Open pumping valve。
[Save Log Job] 2024-12-23 17:52:57.722 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check chamber pressure。
[Save Log Job] 2024-12-23 17:53:06.096 LOG.INFO UiEvent.cs Line:51 Event() - Operation AbortRecipe()
[Save Log Job] 2024-12-23 17:53:06.096 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-12-23 17:53:42.193 LOG.INFO UiEvent.cs Line:51 Event() - Operation RunRecipe(CACB, , , )
[Save Log Job] 2024-12-23 17:53:42.193 LOG.INFO UiEvent.cs Line:51 Event() - EventLotStart
[Save Log Job] 2024-12-23 17:53:42.193 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check door status。
[Save Log Job] 2024-12-23 17:53:42.193 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check chamber door。
[Save Log Job] 2024-12-23 17:53:42.194 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check backpanel door。
[Save Log Job] 2024-12-23 17:53:42.194 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check pump status。
[Save Log Job] 2024-12-23 17:53:42.195 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Close all the valves。
[Save Log Job] 2024-12-23 17:53:42.293 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Open pumping valve。
[Save Log Job] 2024-12-23 17:53:42.394 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check chamber pressure。
[Save Log Job] 2024-12-23 17:53:42.394 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Pump below 100mTorr。
[Save Log Job] 2024-12-23 17:53:42.395 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-12-23 17:53:42.395 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：PreProcess Finished in 0.0 minitues。
[Save Log Job] 2024-12-23 17:53:42.396 LOG.INFO UiEvent.cs Line:51 Event() - System complete run 'PreProcess'.
[Save Log Job] 2024-12-23 17:53:42.396 LOG.INFO UiEvent.cs Line:51 Event() - Run Recipe 20241223175342-CACB
[Save Log Job] 2024-12-23 17:53:42.396 LOG.INFO UiEvent.cs Line:51 Event() - System recipe start run'20241223175342-CACB'
[Save Log Job] 2024-12-23 17:53:42.495 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241223175342-CACB' start run step 1：initial。
[Save Log Job] 2024-12-23 17:53:42.495 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。
[Save Log Job] 2024-12-23 17:53:42.495 LOG.INFO UiEvent.cs Line:51 Event() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。
[Save Log Job] 2024-12-23 17:53:42.496 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。
[Save Log Job] 2024-12-23 17:53:42.496 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。
[Save Log Job] 2024-12-23 17:53:42.496 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。
[Save Log Job] 2024-12-23 17:53:42.498 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。
[Save Log Job] 2024-12-23 17:53:42.498 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。
[Save Log Job] 2024-12-23 17:53:42.498 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPower，RF set Power:0。
[Save Log Job] 2024-12-23 17:53:42.499 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。
[Save Log Job] 2024-12-23 17:53:42.499 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。
[Save Log Job] 2024-12-23 17:53:42.499 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。
[Save Log Job] 2024-12-23 17:53:42.500 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas1， ramp to 45sccm。
[Save Log Job] 2024-12-23 17:53:42.500 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas2， ramp to 56sccm。
[Save Log Job] 2024-12-23 17:53:42.501 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas3， ramp to 66sccm。
[Save Log Job] 2024-12-23 17:53:42.501 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas4， ramp to 76sccm。
[Save Log Job] 2024-12-23 17:53:42.501 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas5， ramp to 86sccm。
[Save Log Job] 2024-12-23 17:53:42.502 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPowerOnOff，Set RF power Off。
[Save Log Job] 2024-12-23 17:53:42.502 LOG.INFO UiEvent.cs Line:51 Event() - Start monitor pressure stability
[Save Log Job] 2024-12-23 17:54:00.587 LOG.INFO UiEvent.cs Line:51 Event() - Operation AbortRecipe()
[Save Log Job] 2024-12-23 17:54:00.587 LOG.INFO UiEvent.cs Line:51 Event() - System recipe was aborted: user aborted recipe
[Save Log Job] 2024-12-23 17:54:00.589 LOG.INFO UiEvent.cs Line:51 Event() - Stop monitor pressure stability
[Save Log Job] 2024-12-23 17:54:00.589 LOG.INFO UiEvent.cs Line:51 Event() - System Recipe run completed，Recipe：20241223175342-CACB
Start time：2024/12/23 17:53:42
End time：2024/12/23 17:54:00
Total time：0:0:17
[Save Log Job] 2024-12-23 17:54:00.589 LOG.INFO UiEvent.cs Line:51 Event() - System Recipe completely run
[Save Log Job] 2024-12-23 17:54:00.589 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, wait for 10 seconds
[Save Log Job] 2024-12-23 17:54:02.309 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC5 ValveClose失败，原因：Valve keep open。
[Save Log Job] 2024-12-23 17:54:02.309 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门Process gas final valveClose失败，原因：Valve keep open。
[Save Log Job] 2024-12-23 17:54:10.471 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, RF Power Off
[Save Log Job] 2024-12-23 17:54:10.570 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, Stop all the gas flow
[Save Log Job] 2024-12-23 17:54:16.103 LOG.INFO UiEvent.cs Line:51 Event() - Operation AbortRecipe()
[Save Log Job] 2024-12-23 17:54:16.103 LOG.INFO UiEvent.cs Line:51 Event() - EventLotFinished
[Save Log Job] 2024-12-23 17:54:16.205 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-12-23 17:54:39.233 LOG.INFO UiEvent.cs Line:51 Event() - Operation RunRecipe(CACB, , , )
[Save Log Job] 2024-12-23 17:54:39.234 LOG.INFO UiEvent.cs Line:51 Event() - EventLotStart
[Save Log Job] 2024-12-23 17:54:39.239 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check door status。
[Save Log Job] 2024-12-23 17:54:39.240 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check chamber door。
[Save Log Job] 2024-12-23 17:54:39.240 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check backpanel door。
[Save Log Job] 2024-12-23 17:54:39.240 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check pump status。
[Save Log Job] 2024-12-23 17:54:39.241 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Close all the valves。
[Save Log Job] 2024-12-23 17:54:39.334 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-12-23 17:54:39.334 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Open pumping valve。
[Save Log Job] 2024-12-23 17:54:39.435 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check chamber pressure。
[Save Log Job] 2024-12-23 17:54:39.436 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Pump below 100mTorr。
[Save Log Job] 2024-12-23 17:54:39.437 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：PreProcess Finished in 0.0 minitues。
[Save Log Job] 2024-12-23 17:54:39.437 LOG.INFO UiEvent.cs Line:51 Event() - System complete run 'PreProcess'.
[Save Log Job] 2024-12-23 17:54:39.437 LOG.INFO UiEvent.cs Line:51 Event() - Run Recipe 20241223175439-CACB
[Save Log Job] 2024-12-23 17:54:39.438 LOG.INFO UiEvent.cs Line:51 Event() - System recipe start run'20241223175439-CACB'
[Save Log Job] 2024-12-23 17:54:39.536 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241223175439-CACB' start run step 1：initial。
[Save Log Job] 2024-12-23 17:54:39.536 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。
[Save Log Job] 2024-12-23 17:54:39.536 LOG.INFO UiEvent.cs Line:51 Event() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。
[Save Log Job] 2024-12-23 17:54:39.537 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。
[Save Log Job] 2024-12-23 17:54:39.537 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。
[Save Log Job] 2024-12-23 17:54:39.537 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。
[Save Log Job] 2024-12-23 17:54:39.538 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。
[Save Log Job] 2024-12-23 17:54:39.538 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。
[Save Log Job] 2024-12-23 17:54:39.538 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPower，RF set Power:0。
[Save Log Job] 2024-12-23 17:54:39.539 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。
[Save Log Job] 2024-12-23 17:54:39.539 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。
[Save Log Job] 2024-12-23 17:54:39.539 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。
[Save Log Job] 2024-12-23 17:54:39.539 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas1， ramp to 45sccm。
[Save Log Job] 2024-12-23 17:54:39.540 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas2， ramp to 56sccm。
[Save Log Job] 2024-12-23 17:54:39.540 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas3， ramp to 66sccm。
[Save Log Job] 2024-12-23 17:54:39.540 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas4， ramp to 76sccm。
[Save Log Job] 2024-12-23 17:54:39.541 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas5， ramp to 86sccm。
[Save Log Job] 2024-12-23 17:54:39.541 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPowerOnOff，Set RF power Off。
[Save Log Job] 2024-12-23 17:54:39.541 LOG.INFO UiEvent.cs Line:51 Event() - Start monitor pressure stability
--------------------------------[Header Log]----------------------------------------- [Save Log Job] 2024-12-23 17:54:58.514 LOG.INFO UiEvent.cs Line:57 Event() - 已经连接上设备实时控制系统
[Save Log Job] 2024-12-23 17:54:58.514 LOG.INFO UiEvent.cs Line:58 Event() - 已经连接上设备实时控制系统
[Save Log Job] 2024-12-23 17:54:59.763 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-12-23 17:54:59.811 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(System_IsMesMode, True)
[Save Log Job] 2024-12-23 17:55:03.432 LOG.INFO UiEvent.cs Line:51 Event() - Software will be expired in -60 days, at 10/24/2024 12:00:00 AM 。
[Save Log Job] 2024-12-23 17:55:06.466 LOG.INFO UiEvent.cs Line:51 Event() - User admin login
[Save Log Job] 2024-12-23 17:55:14.115 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetAutoMode()
[Save Log Job] 2024-12-23 17:55:14.115 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentModeChanged
[Save Log Job] 2024-12-23 17:55:14.116 LOG.INFO UiEvent.cs Line:51 Event() - System running mode changed to Auto Mode
[Save Log Job] 2024-12-23 17:55:16.831 LOG.INFO UiEvent.cs Line:51 Event() - Operation RunRecipe(CACB, , , )
[Save Log Job] 2024-12-23 17:55:16.831 LOG.INFO UiEvent.cs Line:51 Event() - EventLotStart
[Save Log Job] 2024-12-23 17:55:16.937 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check door status。
[Save Log Job] 2024-12-23 17:55:16.937 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check chamber door。
[Save Log Job] 2024-12-23 17:55:16.938 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check backpanel door。
[Save Log Job] 2024-12-23 17:55:16.938 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check pump status。
[Save Log Job] 2024-12-23 17:55:16.938 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Close all the valves。
[Save Log Job] 2024-12-23 17:55:16.939 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Open pumping valve。
[Save Log Job] 2024-12-23 17:55:17.032 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-12-23 17:55:18.957 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门Chamber pumping valveOpen失败，原因：Valve keep closed 。
[Save Log Job] 2024-12-23 17:55:20.265 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check chamber pressure。
[Save Log Job] 2024-12-23 17:55:43.032 LOG.INFO UiEvent.cs Line:51 Event() - Operation AbortRecipe()
[Save Log Job] 2024-12-23 17:57:04.806 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-12-23 20:55:06.000 LOG.INFO UiEvent.cs Line:51 Event() - Software will be expired in -60 days, at 10/24/2024 12:00:00 AM。
[Save Log Job] 2024-12-23 23:55:07.078 LOG.INFO UiEvent.cs Line:51 Event() - Software will be expired in -60 days, at 10/24/2024 12:00:00 AM。
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