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Triton160UI
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appLog20241121.txt

appLog20241121.txt 61 KB
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  1. --------------------------------[Header Log]----------------------------------------- [Save Log Job] 2024-11-21 13:10:27.767 LOG.INFO UiEvent.cs Line:57 Event() - 已经连接上设备实时控制系统
    2. 

  2. [Save Log Job] 2024-11-21 13:10:27.768 LOG.INFO UiEvent.cs Line:58 Event() - 已经连接上设备实时控制系统
    3. 

  3. [Save Log Job] 2024-11-21 13:10:29.181 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    4. 

  4. [Save Log Job] 2024-11-21 13:10:32.834 LOG.INFO UiEvent.cs Line:51 Event() - Software will be expired in -28 days, at 10/24/2024 12:00:00 AM 。
    5. 

  5. [Save Log Job] 2024-11-21 13:10:35.791 LOG.INFO UiEvent.cs Line:51 Event() - User admin login
    6. 

  6. [Save Log Job] 2024-11-21 13:10:40.878 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetAutoMode()
    7. 

  7. [Save Log Job] 2024-11-21 13:10:40.878 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentModeChanged
    8. 

  8. [Save Log Job] 2024-11-21 13:10:40.878 LOG.INFO UiEvent.cs Line:51 Event() - System running mode changed to Auto Mode
    9. 

  9. [Save Log Job] 2024-11-21 13:10:51.938 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(BarcodeConfig_EnableBarcode, True)
    10. 

  10. [Save Log Job] 2024-11-21 13:10:51.939 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(BarcodeConfig_EnableSelectRecipeInAutoRun, True)
    11. 

  11. [Save Log Job] 2024-11-21 13:10:53.548 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(BarcodeConfig_EnableBarcode, True)
    12. 

  12. [Save Log Job] 2024-11-21 13:10:53.548 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(BarcodeConfig_EnableSelectRecipeInAutoRun, True)
    13. 

  13. [Save Log Job] 2024-11-21 13:10:53.750 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(BarcodeConfig_EnableBarcode, True)
    14. 

  14. [Save Log Job] 2024-11-21 13:10:53.750 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(BarcodeConfig_EnableSelectRecipeInAutoRun, True)
    15. 

  15. --------------------------------[Footer Log]----------------------------------------- --------------------------------[Header Log]----------------------------------------- [Save Log Job] 2024-11-21 13:11:07.017 LOG.INFO UiEvent.cs Line:58 Event() - 已经连接上设备实时控制系统
    16. 

  16. [Save Log Job] 2024-11-21 13:11:08.700 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    17. 

  17. [Save Log Job] 2024-11-21 13:11:12.249 LOG.INFO UiEvent.cs Line:51 Event() - Software will be expired in -28 days, at 10/24/2024 12:00:00 AM 。
    18. 

  18. [Save Log Job] 2024-11-21 13:11:14.967 LOG.INFO UiEvent.cs Line:51 Event() - User admin login
    19. 

  19. [Save Log Job] 2024-11-21 13:11:20.997 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetAutoMode()
    20. 

  20. [Save Log Job] 2024-11-21 13:11:20.997 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentModeChanged
    21. 

  21. [Save Log Job] 2024-11-21 13:11:20.997 LOG.INFO UiEvent.cs Line:51 Event() - System running mode changed to Auto Mode
    22. 

  22. [Save Log Job] 2024-11-21 13:11:36.701 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(BarcodeConfig_EnableBarcode, True)
    23. 

  23. [Save Log Job] 2024-11-21 13:11:36.701 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(BarcodeConfig_EnableSelectRecipeInAutoRun, True)
    24. 

  24. [Save Log Job] 2024-11-21 13:11:36.902 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(BarcodeConfig_EnableBarcode, True)
    25. 

  25. [Save Log Job] 2024-11-21 13:11:36.903 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(BarcodeConfig_EnableSelectRecipeInAutoRun, True)
    26. 

  26. [Save Log Job] 2024-11-21 13:11:37.103 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(BarcodeConfig_EnableBarcode, True)
    27. 

  27. [Save Log Job] 2024-11-21 13:11:37.103 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(BarcodeConfig_EnableSelectRecipeInAutoRun, True)
    28. 

  28. [Save Log Job] 2024-11-21 13:11:37.205 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(BarcodeConfig_EnableBarcode, True)
    29. 

  29. [Save Log Job] 2024-11-21 13:11:37.205 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(BarcodeConfig_EnableSelectRecipeInAutoRun, True)
    30. 

  30. [Save Log Job] 2024-11-21 13:11:37.406 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(BarcodeConfig_EnableBarcode, True)
    31. 

  31. [Save Log Job] 2024-11-21 13:11:37.406 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(BarcodeConfig_EnableSelectRecipeInAutoRun, True)
    32. 

  32. [Save Log Job] 2024-11-21 13:11:37.608 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(BarcodeConfig_EnableBarcode, True)
    33. 

  33. [Save Log Job] 2024-11-21 13:11:37.608 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(BarcodeConfig_EnableSelectRecipeInAutoRun, True)
    34. 

  34. [Save Log Job] 2024-11-21 13:11:37.710 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(BarcodeConfig_EnableBarcode, True)
    35. 

  35. [Save Log Job] 2024-11-21 13:11:37.710 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(BarcodeConfig_EnableSelectRecipeInAutoRun, True)
    36. 

  36. [Save Log Job] 2024-11-21 13:11:37.909 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(BarcodeConfig_EnableBarcode, True)
    37. 

  37. [Save Log Job] 2024-11-21 13:11:37.909 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(BarcodeConfig_EnableSelectRecipeInAutoRun, True)
    38. 

  38. [Save Log Job] 2024-11-21 13:11:38.110 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(BarcodeConfig_EnableBarcode, True)
    39. 

  39. [Save Log Job] 2024-11-21 13:11:38.110 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(BarcodeConfig_EnableSelectRecipeInAutoRun, True)
    40. 

  40. [Save Log Job] 2024-11-21 13:11:38.211 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(BarcodeConfig_EnableBarcode, True)
    41. 

  41. [Save Log Job] 2024-11-21 13:11:38.212 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(BarcodeConfig_EnableSelectRecipeInAutoRun, True)
    42. 

  42. [Save Log Job] 2024-11-21 13:11:38.512 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(BarcodeConfig_EnableBarcode, True)
    43. 

  43. [Save Log Job] 2024-11-21 13:11:38.513 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(BarcodeConfig_EnableSelectRecipeInAutoRun, True)
    44. 

  44. [Save Log Job] 2024-11-21 13:11:38.715 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(BarcodeConfig_EnableBarcode, True)
    45. 

  45. [Save Log Job] 2024-11-21 13:11:38.715 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(BarcodeConfig_EnableSelectRecipeInAutoRun, True)
    46. 

  46. [Save Log Job] 2024-11-21 13:11:38.816 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(BarcodeConfig_EnableBarcode, True)
    47. 

  47. [Save Log Job] 2024-11-21 13:11:38.817 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(BarcodeConfig_EnableSelectRecipeInAutoRun, True)
    48. 

  48. [Save Log Job] 2024-11-21 13:11:39.017 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(BarcodeConfig_EnableBarcode, True)
    49. 

  49. [Save Log Job] 2024-11-21 13:11:39.017 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(BarcodeConfig_EnableSelectRecipeInAutoRun, True)
    50. 

  50. [Save Log Job] 2024-11-21 13:11:39.218 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(BarcodeConfig_EnableBarcode, True)
    51. 

  51. [Save Log Job] 2024-11-21 13:11:39.218 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(BarcodeConfig_EnableSelectRecipeInAutoRun, True)
    52. 

  52. [Save Log Job] 2024-11-21 13:11:39.318 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(BarcodeConfig_EnableBarcode, True)
    53. 

  53. [Save Log Job] 2024-11-21 13:11:39.318 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(BarcodeConfig_EnableSelectRecipeInAutoRun, True)
    54. 

  54. [Save Log Job] 2024-11-21 13:11:39.519 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(BarcodeConfig_EnableBarcode, True)
    55. 

  55. [Save Log Job] 2024-11-21 13:11:39.519 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(BarcodeConfig_EnableSelectRecipeInAutoRun, True)
    56. 

  56. [Save Log Job] 2024-11-21 13:11:39.620 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(BarcodeConfig_EnableBarcode, True)
    57. 

  57. [Save Log Job] 2024-11-21 13:11:39.620 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(BarcodeConfig_EnableSelectRecipeInAutoRun, True)
    58. 

  58. --------------------------------[Footer Log]----------------------------------------- --------------------------------[Header Log]----------------------------------------- [Save Log Job] 2024-11-21 13:11:55.307 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    59. 

  59. [Save Log Job] 2024-11-21 13:11:58.861 LOG.INFO UiEvent.cs Line:51 Event() - Software will be expired in -28 days, at 10/24/2024 12:00:00 AM 。
    60. 

  60. [Save Log Job] 2024-11-21 13:12:01.698 LOG.INFO UiEvent.cs Line:51 Event() - User admin login
    61. 

  61. [Save Log Job] 2024-11-21 13:12:05.114 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetAutoMode()
    62. 

  62. [Save Log Job] 2024-11-21 13:12:05.114 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentModeChanged
    63. 

  63. [Save Log Job] 2024-11-21 13:12:05.114 LOG.INFO UiEvent.cs Line:51 Event() - System running mode changed to Auto Mode
    64. 

  64. --------------------------------[Header Log]----------------------------------------- [Save Log Job] 2024-11-21 13:22:15.022 LOG.INFO UiEvent.cs Line:57 Event() - 已经连接上设备实时控制系统
    65. 

  65. [Save Log Job] 2024-11-21 13:22:15.022 LOG.INFO UiEvent.cs Line:58 Event() - 已经连接上设备实时控制系统
    66. 

  66. [Save Log Job] 2024-11-21 13:22:24.090 LOG.INFO UiEvent.cs Line:51 Event() - Software will be expired in -28 days, at 10/24/2024 12:00:00 AM 。
    67. 

  67. [Save Log Job] 2024-11-21 13:22:25.095 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    68. 

  68. [Save Log Job] 2024-11-21 13:22:30.542 LOG.INFO UiEvent.cs Line:51 Event() - User admin login
    69. 

  69. [Save Log Job] 2024-11-21 13:22:40.303 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetAutoMode()
    70. 

  70. [Save Log Job] 2024-11-21 13:22:40.304 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentModeChanged
    71. 

  71. [Save Log Job] 2024-11-21 13:22:40.304 LOG.INFO UiEvent.cs Line:51 Event() - System running mode changed to Auto Mode
    72. 

  72. [Save Log Job] 2024-11-21 13:23:38.851 LOG.INFO UiEvent.cs Line:51 Event() - Operation RunRecipe(CACB, )
    73. 

  73. [Save Log Job] 2024-11-21 13:23:38.887 LOG.INFO UiEvent.cs Line:51 Event() - EventLotStart
    74. 

  74. [Save Log Job] 2024-11-21 13:23:38.994 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check door status。
    75. 

  75. [Save Log Job] 2024-11-21 13:23:38.995 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check chamber door。
    76. 

  76. [Save Log Job] 2024-11-21 13:23:38.996 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check backpanel door。
    77. 

  77. [Save Log Job] 2024-11-21 13:23:38.996 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Close all the valves。
    78. 

  78. [Save Log Job] 2024-11-21 13:23:38.996 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check pump status。
    79. 

  79. [Save Log Job] 2024-11-21 13:23:38.996 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Open pumping valve。
    80. 

  80. [Save Log Job] 2024-11-21 13:23:39.083 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    81. 

  81. [Save Log Job] 2024-11-21 13:23:39.789 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check chamber pressure。
    82. 

  82. --------------------------------[Header Log]----------------------------------------- [Save Log Job] 2024-11-21 13:24:12.056 LOG.INFO UiEvent.cs Line:58 Event() - 已经连接上设备实时控制系统
    83. 

  83. [Save Log Job] 2024-11-21 13:24:12.057 LOG.INFO UiEvent.cs Line:58 Event() - 已经连接上设备实时控制系统
    84. 

  84. [Save Log Job] 2024-11-21 13:24:13.710 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    85. 

  85. [Save Log Job] 2024-11-21 13:24:17.370 LOG.INFO UiEvent.cs Line:51 Event() - Software will be expired in -28 days, at 10/24/2024 12:00:00 AM 。
    86. 

  86. [Save Log Job] 2024-11-21 13:24:36.468 LOG.INFO UiEvent.cs Line:51 Event() - User admin login
    87. 

  87. [Save Log Job] 2024-11-21 13:24:40.890 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetAutoMode()
    88. 

  88. [Save Log Job] 2024-11-21 13:24:40.890 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentModeChanged
    89. 

  89. [Save Log Job] 2024-11-21 13:24:40.890 LOG.INFO UiEvent.cs Line:51 Event() - System running mode changed to Auto Mode
    90. 

  90. [Save Log Job] 2024-11-21 13:25:06.404 LOG.INFO UiEvent.cs Line:51 Event() - Operation RunRecipe(CACB, )
    91. 

  91. [Save Log Job] 2024-11-21 13:25:08.394 LOG.INFO UiEvent.cs Line:51 Event() - EventLotStart
    92. 

  92. [Save Log Job] 2024-11-21 13:25:08.495 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check door status。
    93. 

  93. [Save Log Job] 2024-11-21 13:25:08.495 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check chamber door。
    94. 

  94. [Save Log Job] 2024-11-21 13:25:08.496 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check backpanel door。
    95. 

  95. [Save Log Job] 2024-11-21 13:25:08.496 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check pump status。
    96. 

  96. [Save Log Job] 2024-11-21 13:25:08.496 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Close all the valves。
    97. 

  97. [Save Log Job] 2024-11-21 13:25:08.497 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Open pumping valve。
    98. 

  98. [Save Log Job] 2024-11-21 13:25:08.596 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    99. 

  99. [Save Log Job] 2024-11-21 13:25:10.512 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门Chamber pumping valveOpen失败，原因：Valve keep closed 。
    100. 

  100. [Save Log Job] 2024-11-21 13:25:11.621 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check chamber pressure。
    101. 

  101. [Save Log Job] 2024-11-21 13:25:46.555 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Pump below 100mTorr。
    102. 

  102. [Save Log Job] 2024-11-21 13:25:46.555 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：PreProcess Finished in 0.6 minitues。
    103. 

  103. [Save Log Job] 2024-11-21 13:25:46.556 LOG.INFO UiEvent.cs Line:51 Event() - System complete run 'PreProcess'.
    104. 

  104. [Save Log Job] 2024-11-21 13:25:46.556 LOG.INFO UiEvent.cs Line:51 Event() - Run Recipe 20241121132508-CACB
    105. 

  105. [Save Log Job] 2024-11-21 13:25:46.556 LOG.INFO UiEvent.cs Line:51 Event() - System recipe start run'20241121132508-CACB'
    106. 

  106. [Save Log Job] 2024-11-21 13:25:46.656 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241121132508-CACB' start run step 1：initial。
    107. 

  107. [Save Log Job] 2024-11-21 13:25:46.657 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。
    108. 

  108. [Save Log Job] 2024-11-21 13:25:46.657 LOG.INFO UiEvent.cs Line:51 Event() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。
    109. 

  109. [Save Log Job] 2024-11-21 13:25:46.658 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。
    110. 

  110. [Save Log Job] 2024-11-21 13:25:46.658 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。
    111. 

  111. [Save Log Job] 2024-11-21 13:25:46.658 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。
    112. 

  112. [Save Log Job] 2024-11-21 13:25:46.659 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。
    113. 

  113. [Save Log Job] 2024-11-21 13:25:46.659 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。
    114. 

  114. [Save Log Job] 2024-11-21 13:25:46.659 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPower，RF set Power:0。
    115. 

  115. [Save Log Job] 2024-11-21 13:25:46.660 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。
    116. 

  116. [Save Log Job] 2024-11-21 13:25:46.660 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。
    117. 

  117. [Save Log Job] 2024-11-21 13:25:46.660 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。
    118. 

  118. [Save Log Job] 2024-11-21 13:25:46.660 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas1， ramp to 45sccm。
    119. 

  119. [Save Log Job] 2024-11-21 13:25:46.661 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas2， ramp to 56sccm。
    120. 

  120. [Save Log Job] 2024-11-21 13:25:46.661 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas3， ramp to 66sccm。
    121. 

  121. [Save Log Job] 2024-11-21 13:25:46.661 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas4， ramp to 76sccm。
    122. 

  122. [Save Log Job] 2024-11-21 13:25:46.663 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas5， ramp to 86sccm。
    123. 

  123. [Save Log Job] 2024-11-21 13:25:46.663 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPowerOnOff，Set RF power Off。
    124. 

  124. [Save Log Job] 2024-11-21 13:25:46.663 LOG.INFO UiEvent.cs Line:51 Event() - Start monitor pressure stability
    125. 

  125. [Save Log Job] 2024-11-21 13:26:00.239 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(System_IsMesMode, True)
    126. 

  126. --------------------------------[Footer Log]----------------------------------------- --------------------------------[Header Log]----------------------------------------- [Save Log Job] 2024-11-21 13:26:18.081 LOG.INFO UiEvent.cs Line:58 Event() - 已经连接上设备实时控制系统
    127. 

  127. [Save Log Job] 2024-11-21 13:26:18.083 LOG.INFO UiEvent.cs Line:57 Event() - 已经连接上设备实时控制系统
    128. 

  128. [Save Log Job] 2024-11-21 13:26:19.538 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    129. 

  129. [Save Log Job] 2024-11-21 13:26:23.292 LOG.INFO UiEvent.cs Line:51 Event() - Software will be expired in -28 days, at 10/24/2024 12:00:00 AM 。
    130. 

  130. [Save Log Job] 2024-11-21 13:26:29.740 LOG.INFO UiEvent.cs Line:51 Event() - User admin login
    131. 

  131. [Save Log Job] 2024-11-21 13:26:40.388 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetAutoMode()
    132. 

  132. [Save Log Job] 2024-11-21 13:26:40.388 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentModeChanged
    133. 

  133. [Save Log Job] 2024-11-21 13:26:40.388 LOG.INFO UiEvent.cs Line:51 Event() - System running mode changed to Auto Mode
    134. 

  134. --------------------------------[Header Log]----------------------------------------- [Save Log Job] 2024-11-21 13:30:07.273 LOG.INFO UiEvent.cs Line:57 Event() - 已经连接上设备实时控制系统
    135. 

  135. [Save Log Job] 2024-11-21 13:30:07.274 LOG.INFO UiEvent.cs Line:58 Event() - 已经连接上设备实时控制系统
    136. 

  136. [Save Log Job] 2024-11-21 13:30:08.869 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    137. 

  137. [Save Log Job] 2024-11-21 13:30:12.517 LOG.INFO UiEvent.cs Line:51 Event() - Software will be expired in -28 days, at 10/24/2024 12:00:00 AM 。
    138. 

  138. [Save Log Job] 2024-11-21 13:30:14.159 LOG.INFO UiEvent.cs Line:51 Event() - User admin login
    139. 

  139. [Save Log Job] 2024-11-21 13:30:20.765 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetAutoMode()
    140. 

  140. [Save Log Job] 2024-11-21 13:30:20.765 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentModeChanged
    141. 

  141. [Save Log Job] 2024-11-21 13:30:20.766 LOG.INFO UiEvent.cs Line:51 Event() - System running mode changed to Auto Mode
    142. 

  142. [Save Log Job] 2024-11-21 13:31:40.030 LOG.INFO UiEvent.cs Line:51 Event() - Operation RunRecipe(CACB, 123, jerry)
    143. 

  143. [Save Log Job] 2024-11-21 13:31:40.128 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check door status。
    144. 

  144. [Save Log Job] 2024-11-21 13:31:40.128 LOG.INFO UiEvent.cs Line:51 Event() - EventLotStart
    145. 

  145. [Save Log Job] 2024-11-21 13:31:40.129 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check pump status。
    146. 

  146. [Save Log Job] 2024-11-21 13:31:40.129 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check backpanel door。
    147. 

  147. [Save Log Job] 2024-11-21 13:31:40.129 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check chamber door。
    148. 

  148. [Save Log Job] 2024-11-21 13:31:40.130 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Close all the valves。
    149. 

  149. [Save Log Job] 2024-11-21 13:31:40.218 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Open pumping valve。
    150. 

  150. [Save Log Job] 2024-11-21 13:31:40.218 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    151. 

  151. [Save Log Job] 2024-11-21 13:31:42.235 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门Chamber pumping valveOpen失败，原因：Valve keep closed 。
    152. 

  152. [Save Log Job] 2024-11-21 13:31:42.839 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check chamber pressure。
    153. 

  153. [Save Log Job] 2024-11-21 13:31:52.429 LOG.INFO UiEvent.cs Line:51 Event() - Operation AbortRecipe()
    154. 

  154. [Save Log Job] 2024-11-21 13:31:52.530 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    155. 

  155. [Save Log Job] 2024-11-21 13:38:22.445 LOG.INFO UiEvent.cs Line:51 Event() - System PLC heart beat check failed，please confirm PLC still running
    156. 

  156. [Save Log Job] 2024-11-21 13:38:26.155 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    157. 

  157. [Save Log Job] 2024-11-21 13:38:26.156 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    158. 

  158. [Save Log Job] 2024-11-21 13:38:26.157 LOG.INFO UiEvent.cs Line:51 Event() - Operation RunRecipe(CACB, 123, jerry)
    159. 

  159. [Save Log Job] 2024-11-21 13:39:11.883 LOG.INFO UiEvent.cs Line:51 Event() - Chamber is in Error，can not do RunRecipe。
    160. 

  160. [Save Log Job] 2024-11-21 13:42:26.620 LOG.INFO UiEvent.cs Line:51 Event() - System PLC heart beat check failed，please confirm PLC still running
    161. 

  161. [Save Log Job] 2024-11-21 13:49:11.934 LOG.INFO UiEvent.cs Line:51 Event() - System PLC heart beat check failed，please confirm PLC still running
    162. 

  162. [Save Log Job] 2024-11-21 13:51:42.962 LOG.INFO UiEvent.cs Line:51 Event() - Operation RunRecipe(CACB, 123, jerry)
    163. 

  163. [Save Log Job] 2024-11-21 13:51:42.963 LOG.INFO UiEvent.cs Line:51 Event() - System PLC heart beat check failed，please confirm PLC still running
    164. 

  164. [Save Log Job] 2024-11-21 13:55:22.091 LOG.INFO UiEvent.cs Line:51 Event() - System PLC heart beat check failed，please confirm PLC still running
    165. 

  165. --------------------------------[Header Log]----------------------------------------- [Save Log Job] 2024-11-21 13:58:25.029 LOG.INFO UiEvent.cs Line:58 Event() - 已经连接上设备实时控制系统
    166. 

  166. [Save Log Job] 2024-11-21 13:58:25.030 LOG.INFO UiEvent.cs Line:57 Event() - 已经连接上设备实时控制系统
    167. 

  167. [Save Log Job] 2024-11-21 13:58:26.775 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    168. 

  168. [Save Log Job] 2024-11-21 13:58:30.420 LOG.INFO UiEvent.cs Line:51 Event() - Software will be expired in -28 days, at 10/24/2024 12:00:00 AM 。
    169. 

  169. [Save Log Job] 2024-11-21 13:58:33.259 LOG.INFO UiEvent.cs Line:51 Event() - User admin login
    170. 

  170. [Save Log Job] 2024-11-21 13:58:45.040 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetAutoMode()
    171. 

  171. [Save Log Job] 2024-11-21 13:58:45.040 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentModeChanged
    172. 

  172. [Save Log Job] 2024-11-21 13:58:45.041 LOG.INFO UiEvent.cs Line:51 Event() - System running mode changed to Auto Mode
    173. 

  173. [Save Log Job] 2024-11-21 13:59:01.597 LOG.INFO UiEvent.cs Line:51 Event() - Operation RunRecipe(CACB, 123, jerry)
    174. 

  174. --------------------------------[Header Log]----------------------------------------- [Save Log Job] 2024-11-21 15:08:08.772 LOG.INFO UiEvent.cs Line:58 Event() - 已经连接上设备实时控制系统
    175. 

  175. [Save Log Job] 2024-11-21 15:08:10.251 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    176. 

  176. [Save Log Job] 2024-11-21 15:08:14.017 LOG.INFO UiEvent.cs Line:51 Event() - Software will be expired in -28 days, at 10/24/2024 12:00:00 AM 。
    177. 

  177. [Save Log Job] 2024-11-21 15:08:32.430 LOG.INFO UiEvent.cs Line:51 Event() - User admin login
    178. 

  178. [Save Log Job] 2024-11-21 15:08:39.319 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetAutoMode()
    179. 

  179. [Save Log Job] 2024-11-21 15:08:39.319 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentModeChanged
    180. 

  180. [Save Log Job] 2024-11-21 15:08:39.320 LOG.INFO UiEvent.cs Line:51 Event() - System running mode changed to Auto Mode
    181. 

  181. [Save Log Job] 2024-11-21 15:09:41.073 LOG.INFO UiEvent.cs Line:51 Event() - Operation RunRecipe(CACB, 1222222222/)
    182. 

  182. [Save Log Job] 2024-11-21 15:10:34.746 LOG.INFO UiEvent.cs Line:51 Event() - EventLotStart
    183. 

  183. [Save Log Job] 2024-11-21 15:10:34.865 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check chamber door。
    184. 

  184. [Save Log Job] 2024-11-21 15:10:34.865 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check door status。
    185. 

  185. [Save Log Job] 2024-11-21 15:10:34.866 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check backpanel door。
    186. 

  186. [Save Log Job] 2024-11-21 15:10:34.867 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check pump status。
    187. 

  187. [Save Log Job] 2024-11-21 15:10:34.869 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Close all the valves。
    188. 

  188. [Save Log Job] 2024-11-21 15:10:34.869 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Open pumping valve。
    189. 

  189. [Save Log Job] 2024-11-21 15:10:34.869 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    190. 

  190. [Save Log Job] 2024-11-21 15:10:36.455 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check chamber pressure。
    191. 

  191. [Save Log Job] 2024-11-21 15:10:39.383 LOG.INFO UiEvent.cs Line:51 Event() - Operation AbortRecipe()
    192. 

  192. [Save Log Job] 2024-11-21 15:10:39.452 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    193. 

  193. [Save Log Job] 2024-11-21 15:13:08.966 LOG.INFO UiEvent.cs Line:51 Event() - Operation RunRecipe(CACB, 33333333545/)
    194. 

  194. [Save Log Job] 2024-11-21 15:13:09.997 LOG.INFO UiEvent.cs Line:51 Event() - EventLotStart
    195. 

  195. [Save Log Job] 2024-11-21 15:13:09.997 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check door status。
    196. 

  196. [Save Log Job] 2024-11-21 15:13:09.997 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check chamber door。
    197. 

  197. [Save Log Job] 2024-11-21 15:13:09.998 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check backpanel door。
    198. 

  198. [Save Log Job] 2024-11-21 15:13:09.998 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check pump status。
    199. 

  199. [Save Log Job] 2024-11-21 15:13:09.998 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Close all the valves。
    200. 

  200. [Save Log Job] 2024-11-21 15:13:10.098 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Open pumping valve。
    201. 

  201. [Save Log Job] 2024-11-21 15:13:10.099 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check chamber pressure。
    202. 

  202. [Save Log Job] 2024-11-21 15:13:10.099 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    203. 

  203. [Save Log Job] 2024-11-21 15:13:15.335 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Pump below 100mTorr。
    204. 

  204. [Save Log Job] 2024-11-21 15:13:15.435 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：PreProcess Finished in 0.1 minitues。
    205. 

  205. [Save Log Job] 2024-11-21 15:13:15.437 LOG.INFO UiEvent.cs Line:51 Event() - System complete run 'PreProcess'.
    206. 

  206. [Save Log Job] 2024-11-21 15:13:15.437 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241121151309-CACB' start run step 1：initial。
    207. 

  207. [Save Log Job] 2024-11-21 15:13:15.437 LOG.INFO UiEvent.cs Line:51 Event() - Run Recipe 20241121151309-CACB
    208. 

  208. [Save Log Job] 2024-11-21 15:13:15.437 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。
    209. 

  209. [Save Log Job] 2024-11-21 15:13:15.437 LOG.INFO UiEvent.cs Line:51 Event() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。
    210. 

  210. [Save Log Job] 2024-11-21 15:13:15.438 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。
    211. 

  211. [Save Log Job] 2024-11-21 15:13:15.438 LOG.INFO UiEvent.cs Line:51 Event() - System recipe start run'20241121151309-CACB'
    212. 

  212. [Save Log Job] 2024-11-21 15:13:15.438 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。
    213. 

  213. [Save Log Job] 2024-11-21 15:13:15.439 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。
    214. 

  214. [Save Log Job] 2024-11-21 15:13:15.439 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。
    215. 

  215. [Save Log Job] 2024-11-21 15:13:15.440 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。
    216. 

  216. [Save Log Job] 2024-11-21 15:13:15.440 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPower，RF set Power:0。
    217. 

  217. [Save Log Job] 2024-11-21 15:13:15.441 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。
    218. 

  218. [Save Log Job] 2024-11-21 15:13:15.441 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。
    219. 

  219. [Save Log Job] 2024-11-21 15:13:15.442 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。
    220. 

  220. [Save Log Job] 2024-11-21 15:13:15.442 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas1， ramp to 45sccm。
    221. 

  221. [Save Log Job] 2024-11-21 15:13:15.443 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas2， ramp to 56sccm。
    222. 

  222. [Save Log Job] 2024-11-21 15:13:15.443 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas3， ramp to 66sccm。
    223. 

  223. [Save Log Job] 2024-11-21 15:13:15.443 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas4， ramp to 76sccm。
    224. 

  224. [Save Log Job] 2024-11-21 15:13:15.444 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas5， ramp to 86sccm。
    225. 

  225. [Save Log Job] 2024-11-21 15:13:15.444 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPowerOnOff，Set RF power Off。
    226. 

  226. [Save Log Job] 2024-11-21 15:13:15.536 LOG.INFO UiEvent.cs Line:51 Event() - Start monitor pressure stability
    227. 

  227. [Save Log Job] 2024-11-21 15:13:23.778 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(System_IsMesMode, True)
    228. 

  228. [Save Log Job] 2024-11-21 15:13:34.251 LOG.INFO UiEvent.cs Line:51 Event() - Operation AbortRecipe()
    229. 

  229. [Save Log Job] 2024-11-21 15:13:34.251 LOG.INFO UiEvent.cs Line:51 Event() - System recipe was aborted: user aborted recipe
    230. 

  230. [Save Log Job] 2024-11-21 15:13:34.251 LOG.INFO UiEvent.cs Line:51 Event() - Stop monitor pressure stability
    231. 

  231. [Save Log Job] 2024-11-21 15:13:34.252 LOG.INFO UiEvent.cs Line:51 Event() - System Recipe run completed，Recipe：20241121151309-CACB
    232. 

  232. Start time：2024/11/21 15:13:15
    233. 

  233. End time：2024/11/21 15:13:34
    234. 

  234. Total time：0:0:18
    235. 

  235. [Save Log Job] 2024-11-21 15:13:34.252 LOG.INFO UiEvent.cs Line:51 Event() - System Recipe completely run
    236. 

  236. [Save Log Job] 2024-11-21 15:13:34.253 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, wait for 10 seconds
    237. 

  237. [Save Log Job] 2024-11-21 15:13:36.264 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC1 ValveClose失败，原因：Valve keep open。
    238. 

  238. [Save Log Job] 2024-11-21 15:13:36.264 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC2 ValveClose失败，原因：Valve keep open。
    239. 

  239. [Save Log Job] 2024-11-21 15:13:36.264 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC3 ValveClose失败，原因：Valve keep open。
    240. 

  240. [Save Log Job] 2024-11-21 15:13:36.268 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC4 ValveClose失败，原因：Valve keep open。
    241. 

  241. [Save Log Job] 2024-11-21 15:13:36.269 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC5 ValveClose失败，原因：Valve keep open。
    242. 

  242. [Save Log Job] 2024-11-21 15:13:36.269 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门Process gas final valveClose失败，原因：Valve keep open。
    243. 

  243. [Save Log Job] 2024-11-21 15:13:44.330 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, RF Power Off
    244. 

  244. [Save Log Job] 2024-11-21 15:13:44.429 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, Stop all the gas flow
    245. 

  245. [Save Log Job] 2024-11-21 15:13:46.039 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, Close all the valves
    246. 

  246. [Save Log Job] 2024-11-21 15:13:46.139 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, close pump valve
    247. 

  247. [Save Log Job] 2024-11-21 15:13:48.839 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门Chamber pumping valveClose失败，原因：Valve keep open。
    248. 

  248. [Save Log Job] 2024-11-21 15:13:48.839 LOG.INFO UiEvent.cs Line:51 Event() - Operation AbortRecipe()
    249. 

  249. [Save Log Job] 2024-11-21 15:13:48.839 LOG.INFO UiEvent.cs Line:51 Event() - EventLotFinished
    250. 

  250. [Save Log Job] 2024-11-21 15:13:48.873 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    251. 

  251. --------------------------------[Header Log]----------------------------------------- [Save Log Job] 2024-11-21 15:22:45.109 LOG.INFO UiEvent.cs Line:58 Event() - 已经连接上设备实时控制系统
    252. 

  252. [Save Log Job] 2024-11-21 15:22:49.541 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    253. 

  253. [Save Log Job] 2024-11-21 15:22:49.541 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(System_IsMesMode, True)
    254. 

  254. [Save Log Job] 2024-11-21 15:22:50.386 LOG.INFO UiEvent.cs Line:51 Event() - Software will be expired in -28 days, at 10/24/2024 12:00:00 AM 。
    255. 

  255. [Save Log Job] 2024-11-21 15:22:54.730 LOG.INFO UiEvent.cs Line:51 Event() - User admin login
    256. 

  256. [Save Log Job] 2024-11-21 15:23:01.955 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetAutoMode()
    257. 

  257. [Save Log Job] 2024-11-21 15:23:01.956 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentModeChanged
    258. 

  258. [Save Log Job] 2024-11-21 15:23:01.956 LOG.INFO UiEvent.cs Line:51 Event() - System running mode changed to Auto Mode
    259. 

  259. [Save Log Job] 2024-11-21 15:24:33.227 LOG.INFO UiEvent.cs Line:51 Event() - Operation RunRecipe(CACB, 11111111111/, 12333, jerrry)
    260. 

  260. --------------------------------[Header Log]----------------------------------------- [Save Log Job] 2024-11-21 15:37:01.282 LOG.INFO UiEvent.cs Line:58 Event() - 已经连接上设备实时控制系统
    261. 

  261. [Save Log Job] 2024-11-21 15:37:09.748 LOG.INFO UiEvent.cs Line:50 Event() - Operation SetConfig(System_IsMesMode, True)
    262. 

  262. [Save Log Job] 2024-11-21 15:37:09.749 LOG.INFO UiEvent.cs Line:51 Event() - Software will be expired in -28 days, at 10/24/2024 12:00:00 AM 。
    263. 

  263. [Save Log Job] 2024-11-21 15:37:09.749 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    264. 

  264. [Save Log Job] 2024-11-21 15:37:17.392 LOG.INFO UiEvent.cs Line:51 Event() - User admin login
    265. 

  265. [Save Log Job] 2024-11-21 15:37:26.862 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetAutoMode()
    266. 

  266. [Save Log Job] 2024-11-21 15:37:26.863 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentModeChanged
    267. 

  267. [Save Log Job] 2024-11-21 15:37:26.863 LOG.INFO UiEvent.cs Line:51 Event() - System running mode changed to Auto Mode
    268. 

  268. [Save Log Job] 2024-11-21 15:37:49.659 LOG.INFO UiEvent.cs Line:51 Event() - Operation RunRecipe(CACB, 111111111111/, 12333, jerrry)
    269. 

  269. [Save Log Job] 2024-11-21 15:37:49.759 LOG.INFO UiEvent.cs Line:51 Event() - EventLotStart
    270. 

  270. [Save Log Job] 2024-11-21 15:37:49.759 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    271. 

  271. [Save Log Job] 2024-11-21 15:37:49.759 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check door status。
    272. 

  272. [Save Log Job] 2024-11-21 15:37:49.760 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check chamber door。
    273. 

  273. [Save Log Job] 2024-11-21 15:37:49.760 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check backpanel door。
    274. 

  274. [Save Log Job] 2024-11-21 15:37:49.761 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check pump status。
    275. 

  275. [Save Log Job] 2024-11-21 15:37:49.761 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Close all the valves。
    276. 

  276. [Save Log Job] 2024-11-21 15:37:49.860 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Open pumping valve。
    277. 

  277. [Save Log Job] 2024-11-21 15:37:50.262 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check chamber pressure。
    278. 

  278. [Save Log Job] 2024-11-21 15:38:29.138 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Pump below 100mTorr。
    279. 

  279. [Save Log Job] 2024-11-21 15:38:29.138 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：PreProcess Finished in 0.7 minitues。
    280. 

  280. [Save Log Job] 2024-11-21 15:38:29.139 LOG.INFO UiEvent.cs Line:51 Event() - System complete run 'PreProcess'.
    281. 

  281. [Save Log Job] 2024-11-21 15:38:29.139 LOG.INFO UiEvent.cs Line:51 Event() - Run Recipe 20241121153749-CACB
    282. 

  282. [Save Log Job] 2024-11-21 15:38:29.140 LOG.INFO UiEvent.cs Line:51 Event() - System recipe start run'20241121153749-CACB'
    283. 

  283. [Save Log Job] 2024-11-21 15:38:29.238 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241121153749-CACB' start run step 1：initial。
    284. 

  284. [Save Log Job] 2024-11-21 15:38:29.238 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。
    285. 

  285. [Save Log Job] 2024-11-21 15:38:29.238 LOG.INFO UiEvent.cs Line:51 Event() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。
    286. 

  286. [Save Log Job] 2024-11-21 15:38:29.239 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。
    287. 

  287. [Save Log Job] 2024-11-21 15:38:29.239 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。
    288. 

  288. [Save Log Job] 2024-11-21 15:38:29.239 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。
    289. 

  289. [Save Log Job] 2024-11-21 15:38:29.240 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。
    290. 

  290. [Save Log Job] 2024-11-21 15:38:29.240 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。
    291. 

  291. [Save Log Job] 2024-11-21 15:38:29.241 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPower，RF set Power:0。
    292. 

  292. [Save Log Job] 2024-11-21 15:38:29.241 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。
    293. 

  293. [Save Log Job] 2024-11-21 15:38:29.241 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。
    294. 

  294. [Save Log Job] 2024-11-21 15:38:29.242 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。
    295. 

  295. [Save Log Job] 2024-11-21 15:38:29.242 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas1， ramp to 45sccm。
    296. 

  296. [Save Log Job] 2024-11-21 15:38:29.242 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas2， ramp to 56sccm。
    297. 

  297. [Save Log Job] 2024-11-21 15:38:29.243 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas3， ramp to 66sccm。
    298. 

  298. [Save Log Job] 2024-11-21 15:38:29.243 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas4， ramp to 76sccm。
    299. 

  299. [Save Log Job] 2024-11-21 15:38:29.243 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas5， ramp to 86sccm。
    300. 

  300. [Save Log Job] 2024-11-21 15:38:29.244 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPowerOnOff，Set RF power Off。
    301. 

  301. [Save Log Job] 2024-11-21 15:38:29.244 LOG.INFO UiEvent.cs Line:51 Event() - Start monitor pressure stability
    302. 

  302. [Save Log Job] 2024-11-21 15:38:59.302 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241121153749-CACB' end step 1
    303. 

  303. [Save Log Job] 2024-11-21 15:38:59.302 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241121153749-CACB' start run step 2：initial。
    304. 

  304. [Save Log Job] 2024-11-21 15:38:59.303 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。
    305. 

  305. [Save Log Job] 2024-11-21 15:38:59.303 LOG.INFO UiEvent.cs Line:51 Event() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。
    306. 

  306. [Save Log Job] 2024-11-21 15:38:59.303 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。
    307. 

  307. [Save Log Job] 2024-11-21 15:38:59.304 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。
    308. 

  308. [Save Log Job] 2024-11-21 15:38:59.304 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。
    309. 

  309. [Save Log Job] 2024-11-21 15:38:59.304 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。
    310. 

  310. [Save Log Job] 2024-11-21 15:38:59.305 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。
    311. 

  311. [Save Log Job] 2024-11-21 15:38:59.305 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPower，RF set Power:150。
    312. 

  312. [Save Log Job] 2024-11-21 15:38:59.306 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。
    313. 

  313. [Save Log Job] 2024-11-21 15:38:59.306 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。
    314. 

  314. [Save Log Job] 2024-11-21 15:38:59.306 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。
    315. 

  315. [Save Log Job] 2024-11-21 15:38:59.307 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas1， ramp to 45sccm。
    316. 

  316. [Save Log Job] 2024-11-21 15:38:59.307 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas2， ramp to 56sccm。
    317. 

  317. [Save Log Job] 2024-11-21 15:38:59.307 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas3， ramp to 66sccm。
    318. 

  318. [Save Log Job] 2024-11-21 15:38:59.308 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas4， ramp to 76sccm。
    319. 

  319. [Save Log Job] 2024-11-21 15:38:59.308 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas5， ramp to 86sccm。
    320. 

  320. [Save Log Job] 2024-11-21 15:38:59.309 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPowerOnOff，Set RF power On。
    321. 

  321. [Save Log Job] 2024-11-21 15:39:08.003 LOG.INFO UiEvent.cs Line:51 Event() - System RF GeneratorTolerance alarm：Forward power 18 out of range[149,151] in 1 seconds.
    322. 

  322. [Save Log Job] 2024-11-21 15:39:08.005 LOG.INFO UiEvent.cs Line:51 Event() - System recipe was aborted: user aborted recipe
    323. 

  323. [Save Log Job] 2024-11-21 15:39:08.006 LOG.INFO UiEvent.cs Line:51 Event() - Stop monitor pressure stability
    324. 

  324. [Save Log Job] 2024-11-21 15:39:08.006 LOG.INFO UiEvent.cs Line:51 Event() - System Recipe run completed，Recipe：20241121153749-CACB
    325. 

  325. Start time：2024/11/21 15:38:29
    326. 

  326. End time：2024/11/21 15:39:00
    327. 

  327. Total time：0:0:31
    328. 

  328. [Save Log Job] 2024-11-21 15:39:08.010 LOG.INFO UiEvent.cs Line:51 Event() - System Recipe completely run
    329. 

  329. [Save Log Job] 2024-11-21 15:39:08.011 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC2 ValveClose失败，原因：Valve keep open。
    330. 

  330. [Save Log Job] 2024-11-21 15:39:08.011 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    331. 

  331. [Save Log Job] 2024-11-21 15:39:08.011 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    332. 

  332. [Save Log Job] 2024-11-21 15:39:08.011 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC4 ValveClose失败，原因：Valve keep open。
    333. 

  333. [Save Log Job] 2024-11-21 15:39:08.011 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC3 ValveClose失败，原因：Valve keep open。
    334. 

  334. [Save Log Job] 2024-11-21 15:39:08.011 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC5 ValveClose失败，原因：Valve keep open。
    335. 

  335. [Save Log Job] 2024-11-21 15:39:08.011 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门Process gas final valveClose失败，原因：Valve keep open。
    336. 

  336. [Save Log Job] 2024-11-21 15:39:08.012 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC1 ValveClose失败，原因：Valve keep open。
    337. 

  337. --------------------------------[Header Log]----------------------------------------- [Save Log Job] 2024-11-21 15:43:33.390 LOG.INFO UiEvent.cs Line:58 Event() - 已经连接上设备实时控制系统
    338. 

  338. [Save Log Job] 2024-11-21 15:43:33.392 LOG.INFO UiEvent.cs Line:57 Event() - 已经连接上设备实时控制系统
    339. 

  339. [Save Log Job] 2024-11-21 15:43:38.900 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    340. 

  340. [Save Log Job] 2024-11-21 15:43:39.159 LOG.INFO UiEvent.cs Line:51 Event() - Software will be expired in -28 days, at 10/24/2024 12:00:00 AM 。
    341. 

  341. [Save Log Job] 2024-11-21 15:43:39.600 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(System_IsMesMode, True)
    342. 

  342. [Save Log Job] 2024-11-21 15:43:53.876 LOG.INFO UiEvent.cs Line:51 Event() - User admin login
    343. 

  343. [Save Log Job] 2024-11-21 15:44:02.233 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetAutoMode()
    344. 

  344. [Save Log Job] 2024-11-21 15:44:02.233 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentModeChanged
    345. 

  345. [Save Log Job] 2024-11-21 15:44:02.233 LOG.INFO UiEvent.cs Line:51 Event() - System running mode changed to Auto Mode
    346. 

  346. [Save Log Job] 2024-11-21 15:44:32.472 LOG.INFO UiEvent.cs Line:51 Event() - Operation RunRecipe(CACB, 111111111111/, 12333, jerry)
    347. 

  347. [Save Log Job] 2024-11-21 15:44:32.897 LOG.INFO UiEvent.cs Line:51 Event() - EventLotStart
    348. 

  348. [Save Log Job] 2024-11-21 15:44:32.900 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check door status。
    349. 

  349. [Save Log Job] 2024-11-21 15:44:32.900 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check backpanel door。
    350. 

  350. [Save Log Job] 2024-11-21 15:44:32.900 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check chamber door。
    351. 

  351. [Save Log Job] 2024-11-21 15:44:32.900 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Close all the valves。
    352. 

  352. [Save Log Job] 2024-11-21 15:44:32.900 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check pump status。
    353. 

  353. [Save Log Job] 2024-11-21 15:44:32.959 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Open pumping valve。
    354. 

  354. [Save Log Job] 2024-11-21 15:44:32.959 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    355. 

  355. [Save Log Job] 2024-11-21 15:44:34.271 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check chamber pressure。
    356. 

  356. [Save Log Job] 2024-11-21 15:45:13.154 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Pump below 100mTorr。
    357. 

  357. [Save Log Job] 2024-11-21 15:45:13.155 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：PreProcess Finished in 0.7 minitues。
    358. 

  358. [Save Log Job] 2024-11-21 15:45:13.155 LOG.INFO UiEvent.cs Line:51 Event() - System complete run 'PreProcess'.
    359. 

  359. [Save Log Job] 2024-11-21 15:45:13.155 LOG.INFO UiEvent.cs Line:51 Event() - Run Recipe 20241121154432-CACB
    360. 

  360. [Save Log Job] 2024-11-21 15:45:13.156 LOG.INFO UiEvent.cs Line:51 Event() - System recipe start run'20241121154432-CACB'
    361. 

  361. [Save Log Job] 2024-11-21 15:45:13.255 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241121154432-CACB' start run step 1：initial。
    362. 

  362. [Save Log Job] 2024-11-21 15:45:13.256 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。
    363. 

  363. [Save Log Job] 2024-11-21 15:45:13.256 LOG.INFO UiEvent.cs Line:51 Event() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。
    364. 

  364. [Save Log Job] 2024-11-21 15:45:13.257 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。
    365. 

  365. [Save Log Job] 2024-11-21 15:45:13.257 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。
    366. 

  366. [Save Log Job] 2024-11-21 15:45:13.258 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。
    367. 

  367. [Save Log Job] 2024-11-21 15:45:13.258 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。
    368. 

  368. [Save Log Job] 2024-11-21 15:45:13.258 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。
    369. 

  369. [Save Log Job] 2024-11-21 15:45:13.259 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPower，RF set Power:0。
    370. 

  370. [Save Log Job] 2024-11-21 15:45:13.259 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。
    371. 

  371. [Save Log Job] 2024-11-21 15:45:13.259 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。
    372. 

  372. [Save Log Job] 2024-11-21 15:45:13.260 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。
    373. 

  373. [Save Log Job] 2024-11-21 15:45:13.261 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas1， ramp to 45sccm。
    374. 

  374. [Save Log Job] 2024-11-21 15:45:13.261 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas2， ramp to 56sccm。
    375. 

  375. [Save Log Job] 2024-11-21 15:45:13.261 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas3， ramp to 66sccm。
    376. 

  376. [Save Log Job] 2024-11-21 15:45:13.262 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas4， ramp to 76sccm。
    377. 

  377. [Save Log Job] 2024-11-21 15:45:13.262 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas5， ramp to 86sccm。
    378. 

  378. [Save Log Job] 2024-11-21 15:45:13.262 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPowerOnOff，Set RF power Off。
    379. 

  379. [Save Log Job] 2024-11-21 15:45:13.263 LOG.INFO UiEvent.cs Line:51 Event() - Start monitor pressure stability
    380. 

  380. [Save Log Job] 2024-11-21 15:45:43.320 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241121154432-CACB' end step 1
    381. 

  381. [Save Log Job] 2024-11-21 15:45:43.320 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241121154432-CACB' start run step 2：initial。
    382. 

  382. [Save Log Job] 2024-11-21 15:45:43.321 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。
    383. 

  383. [Save Log Job] 2024-11-21 15:45:43.321 LOG.INFO UiEvent.cs Line:51 Event() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。
    384. 

  384. [Save Log Job] 2024-11-21 15:45:43.321 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。
    385. 

  385. [Save Log Job] 2024-11-21 15:45:43.322 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。
    386. 

  386. [Save Log Job] 2024-11-21 15:45:43.322 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。
    387. 

  387. [Save Log Job] 2024-11-21 15:45:43.322 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。
    388. 

  388. [Save Log Job] 2024-11-21 15:45:43.323 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。
    389. 

  389. [Save Log Job] 2024-11-21 15:45:43.323 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPower，RF set Power:150。
    390. 

  390. [Save Log Job] 2024-11-21 15:45:43.324 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。
    391. 

  391. [Save Log Job] 2024-11-21 15:45:43.324 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。
    392. 

  392. [Save Log Job] 2024-11-21 15:45:43.324 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。
    393. 

  393. [Save Log Job] 2024-11-21 15:45:43.325 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas1， ramp to 45sccm。
    394. 

  394. [Save Log Job] 2024-11-21 15:45:43.325 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas2， ramp to 56sccm。
    395. 

  395. [Save Log Job] 2024-11-21 15:45:43.325 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas3， ramp to 66sccm。
    396. 

  396. [Save Log Job] 2024-11-21 15:45:43.326 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas4， ramp to 76sccm。
    397. 

  397. [Save Log Job] 2024-11-21 15:45:43.326 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas5， ramp to 86sccm。
    398. 

  398. [Save Log Job] 2024-11-21 15:45:43.327 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPowerOnOff，Set RF power On。
    399. 

  399. [Save Log Job] 2024-11-21 15:45:44.829 LOG.INFO UiEvent.cs Line:51 Event() - System RF GeneratorTolerance alarm：Forward power 18 out of range[149,151] in 1 seconds.
    400. 

  400. [Save Log Job] 2024-11-21 15:45:44.830 LOG.INFO UiEvent.cs Line:51 Event() - System recipe was aborted: user aborted recipe
    401. 

  401. [Save Log Job] 2024-11-21 15:45:44.830 LOG.INFO UiEvent.cs Line:51 Event() - Stop monitor pressure stability
    402. 

  402. [Save Log Job] 2024-11-21 15:45:44.831 LOG.INFO UiEvent.cs Line:51 Event() - System Recipe run completed，Recipe：20241121154432-CACB
    403. 

  403. Start time：2024/11/21 15:45:13
    404. 

  404. End time：2024/11/21 15:45:44
    405. 

  405. Total time：0:0:31
    406. 

  406. [Save Log Job] 2024-11-21 15:45:44.831 LOG.INFO UiEvent.cs Line:51 Event() - System Recipe completely run
    407. 

  407. [Save Log Job] 2024-11-21 15:45:45.031 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    408. 

  408. [Save Log Job] 2024-11-21 15:45:46.843 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门Process gas final valveClose失败，原因：Valve keep open。
    409. 

  409. --------------------------------[Header Log]----------------------------------------- [Save Log Job] 2024-11-21 15:52:03.856 LOG.INFO UiEvent.cs Line:58 Event() - 已经连接上设备实时控制系统
    410. 

  410. [Save Log Job] 2024-11-21 15:52:03.858 LOG.INFO UiEvent.cs Line:58 Event() - 已经连接上设备实时控制系统
    411. 

  411. [Save Log Job] 2024-11-21 15:52:08.365 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(System_IsMesMode, True)
    412. 

  412. [Save Log Job] 2024-11-21 15:52:08.365 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    413. 

  413. [Save Log Job] 2024-11-21 15:52:09.156 LOG.INFO UiEvent.cs Line:51 Event() - Software will be expired in -28 days, at 10/24/2024 12:00:00 AM 。
    414. 

  414. [Save Log Job] 2024-11-21 15:52:18.002 LOG.INFO UiEvent.cs Line:51 Event() - User admin login
    415. 

  415. [Save Log Job] 2024-11-21 15:52:22.911 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetAutoMode()
    416. 

  416. [Save Log Job] 2024-11-21 15:52:22.911 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentModeChanged
    417. 

  417. [Save Log Job] 2024-11-21 15:52:22.911 LOG.INFO UiEvent.cs Line:51 Event() - System running mode changed to Auto Mode
    418. 

  418. [Save Log Job] 2024-11-21 15:53:00.289 LOG.INFO UiEvent.cs Line:51 Event() - Operation RunRecipe(CACB, CA111111111/CA2222222222/, 12333, jerry)
    419. 

  419. [Save Log Job] 2024-11-21 15:53:00.375 LOG.INFO UiEvent.cs Line:51 Event() - EventLotStart
    420. 

  420. [Save Log Job] 2024-11-21 15:53:00.375 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check door status。
    421. 

  421. [Save Log Job] 2024-11-21 15:53:00.375 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check chamber door。
    422. 

  422. [Save Log Job] 2024-11-21 15:53:00.375 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check backpanel door。
    423. 

  423. [Save Log Job] 2024-11-21 15:53:00.376 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check pump status。
    424. 

  424. [Save Log Job] 2024-11-21 15:53:00.376 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Close all the valves。
    425. 

  425. [Save Log Job] 2024-11-21 15:53:00.475 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Open pumping valve。
    426. 

  426. [Save Log Job] 2024-11-21 15:53:00.475 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    427. 

  427. [Save Log Job] 2024-11-21 15:53:02.488 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门Chamber pumping valveOpen失败，原因：Valve keep closed 。
    428. 

  428. [Save Log Job] 2024-11-21 15:53:03.503 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check chamber pressure。
    429. 

  429. [Save Log Job] 2024-11-21 15:53:38.455 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Pump below 100mTorr。
    430. 

  430. [Save Log Job] 2024-11-21 15:53:38.557 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：PreProcess Finished in 0.6 minitues。
    431. 

  431. [Save Log Job] 2024-11-21 15:53:38.557 LOG.INFO UiEvent.cs Line:51 Event() - System complete run 'PreProcess'.
    432. 

  432. [Save Log Job] 2024-11-21 15:53:38.558 LOG.INFO UiEvent.cs Line:51 Event() - Run Recipe 20241121155300-CACB
    433. 

  433. [Save Log Job] 2024-11-21 15:53:38.559 LOG.INFO UiEvent.cs Line:51 Event() - System recipe start run'20241121155300-CACB'
    434. 

  434. [Save Log Job] 2024-11-21 15:53:38.559 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241121155300-CACB' start run step 1：initial。
    435. 

  435. [Save Log Job] 2024-11-21 15:53:38.559 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。
    436. 

  436. [Save Log Job] 2024-11-21 15:53:38.560 LOG.INFO UiEvent.cs Line:51 Event() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。
    437. 

  437. [Save Log Job] 2024-11-21 15:53:38.560 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。
    438. 

  438. [Save Log Job] 2024-11-21 15:53:38.560 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。
    439. 

  439. [Save Log Job] 2024-11-21 15:53:38.561 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。
    440. 

  440. [Save Log Job] 2024-11-21 15:53:38.561 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。
    441. 

  441. [Save Log Job] 2024-11-21 15:53:38.561 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。
    442. 

  442. [Save Log Job] 2024-11-21 15:53:38.561 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPower，RF set Power:0。
    443. 

  443. [Save Log Job] 2024-11-21 15:53:38.563 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。
    444. 

  444. [Save Log Job] 2024-11-21 15:53:38.563 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。
    445. 

  445. [Save Log Job] 2024-11-21 15:53:38.563 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。
    446. 

  446. [Save Log Job] 2024-11-21 15:53:38.564 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas1， ramp to 45sccm。
    447. 

  447. [Save Log Job] 2024-11-21 15:53:38.564 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas2， ramp to 56sccm。
    448. 

  448. [Save Log Job] 2024-11-21 15:53:38.564 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas3， ramp to 66sccm。
    449. 

  449. [Save Log Job] 2024-11-21 15:53:38.565 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas4， ramp to 76sccm。
    450. 

  450. [Save Log Job] 2024-11-21 15:53:38.565 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas5， ramp to 86sccm。
    451. 

  451. [Save Log Job] 2024-11-21 15:53:38.565 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPowerOnOff，Set RF power Off。
    452. 

  452. [Save Log Job] 2024-11-21 15:53:38.657 LOG.INFO UiEvent.cs Line:51 Event() - Start monitor pressure stability
    453. 

  453. [Save Log Job] 2024-11-21 15:54:08.721 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241121155300-CACB' end step 1
    454. 

  454. [Save Log Job] 2024-11-21 15:54:08.722 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241121155300-CACB' start run step 2：initial。
    455. 

  455. [Save Log Job] 2024-11-21 15:54:08.722 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。
    456. 

  456. [Save Log Job] 2024-11-21 15:54:08.723 LOG.INFO UiEvent.cs Line:51 Event() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。
    457. 

  457. [Save Log Job] 2024-11-21 15:54:08.723 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。
    458. 

  458. [Save Log Job] 2024-11-21 15:54:08.724 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。
    459. 

  459. [Save Log Job] 2024-11-21 15:54:08.724 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。
    460. 

  460. [Save Log Job] 2024-11-21 15:54:08.724 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。
    461. 

  461. [Save Log Job] 2024-11-21 15:54:08.727 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。
    462. 

  462. [Save Log Job] 2024-11-21 15:54:08.727 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPower，RF set Power:150。
    463. 

  463. [Save Log Job] 2024-11-21 15:54:08.727 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。
    464. 

  464. [Save Log Job] 2024-11-21 15:54:08.728 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。
    465. 

  465. [Save Log Job] 2024-11-21 15:54:08.728 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。
    466. 

  466. [Save Log Job] 2024-11-21 15:54:08.729 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas1， ramp to 45sccm。
    467. 

  467. [Save Log Job] 2024-11-21 15:54:08.729 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas5， ramp to 86sccm。
    468. 

  468. [Save Log Job] 2024-11-21 15:54:08.729 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas3， ramp to 66sccm。
    469. 

  469. [Save Log Job] 2024-11-21 15:54:08.729 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas2， ramp to 56sccm。
    470. 

  470. [Save Log Job] 2024-11-21 15:54:08.729 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas4， ramp to 76sccm。
    471. 

  471. [Save Log Job] 2024-11-21 15:54:08.729 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPowerOnOff，Set RF power On。
    472. 

  472. [Save Log Job] 2024-11-21 15:54:10.129 LOG.INFO UiEvent.cs Line:51 Event() - System RF GeneratorTolerance alarm：Forward power 18 out of range[149,151] in 1 seconds.
    473. 

  473. [Save Log Job] 2024-11-21 15:54:10.129 LOG.INFO UiEvent.cs Line:51 Event() - System recipe was aborted: user aborted recipe
    474. 

  474. [Save Log Job] 2024-11-21 15:54:10.130 LOG.INFO UiEvent.cs Line:51 Event() - Stop monitor pressure stability
    475. 

  475. [Save Log Job] 2024-11-21 15:54:10.130 LOG.INFO UiEvent.cs Line:51 Event() - System Recipe run completed，Recipe：20241121155300-CACB
    476. 

  476. Start time：2024/11/21 15:53:38
    477. 

  477. End time：2024/11/21 15:54:10
    478. 

  478. Total time：0:0:31
    479. 

  479. [Save Log Job] 2024-11-21 15:54:10.130 LOG.INFO UiEvent.cs Line:51 Event() - System Recipe completely run
    480. 

  480. [Save Log Job] 2024-11-21 15:54:10.331 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    481. 

  481. [Save Log Job] 2024-11-21 15:54:12.139 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门Process gas final valveClose失败，原因：Valve keep open。
    482. 

  482. --------------------------------[Header Log]----------------------------------------- [Save Log Job] 2024-11-21 16:08:04.642 LOG.INFO UiEvent.cs Line:58 Event() - 已经连接上设备实时控制系统
    483. 

  483. [Save Log Job] 2024-11-21 16:08:04.644 LOG.INFO UiEvent.cs Line:58 Event() - 已经连接上设备实时控制系统
    484. 

  484. [Save Log Job] 2024-11-21 16:08:09.865 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(System_IsMesMode, True)
    485. 

  485. [Save Log Job] 2024-11-21 16:08:09.904 LOG.INFO UiEvent.cs Line:51 Event() - Software will be expired in -28 days, at 10/24/2024 12:00:00 AM 。
    486. 

  486. [Save Log Job] 2024-11-21 16:08:09.905 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    487. 

  487. [Save Log Job] 2024-11-21 16:08:15.548 LOG.INFO UiEvent.cs Line:51 Event() - User admin login
    488. 

  488. [Save Log Job] 2024-11-21 16:57:00.474 LOG.INFO UiEvent.cs Line:51 Event() - System PLC heart beat check failed，please confirm PLC still running
    489. 

  489. [Save Log Job] 2024-11-21 16:57:00.574 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    490. 

  490. --------------------------------[Footer Log]----------------------------------------- 
    491.