--------------------------------[Header Log]----------------------------------------- [Save Log Job] 2024-11-21 13:10:27.767 LOG.INFO UiEvent.cs Line:57 Event() - 已经连接上设备实时控制系统
[Save Log Job] 2024-11-21 13:10:27.768 LOG.INFO UiEvent.cs Line:58 Event() - 已经连接上设备实时控制系统
[Save Log Job] 2024-11-21 13:10:29.181 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-11-21 13:10:32.834 LOG.INFO UiEvent.cs Line:51 Event() - Software will be expired in -28 days, at 10/24/2024 12:00:00 AM 。
[Save Log Job] 2024-11-21 13:10:35.791 LOG.INFO UiEvent.cs Line:51 Event() - User admin login
[Save Log Job] 2024-11-21 13:10:40.878 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetAutoMode()
[Save Log Job] 2024-11-21 13:10:40.878 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentModeChanged
[Save Log Job] 2024-11-21 13:10:40.878 LOG.INFO UiEvent.cs Line:51 Event() - System running mode changed to Auto Mode
[Save Log Job] 2024-11-21 13:10:51.938 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(BarcodeConfig_EnableBarcode, True)
[Save Log Job] 2024-11-21 13:10:51.939 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(BarcodeConfig_EnableSelectRecipeInAutoRun, True)
[Save Log Job] 2024-11-21 13:10:53.548 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(BarcodeConfig_EnableBarcode, True)
[Save Log Job] 2024-11-21 13:10:53.548 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(BarcodeConfig_EnableSelectRecipeInAutoRun, True)
[Save Log Job] 2024-11-21 13:10:53.750 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(BarcodeConfig_EnableBarcode, True)
[Save Log Job] 2024-11-21 13:10:53.750 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(BarcodeConfig_EnableSelectRecipeInAutoRun, True)
--------------------------------[Footer Log]----------------------------------------- --------------------------------[Header Log]----------------------------------------- [Save Log Job] 2024-11-21 13:11:07.017 LOG.INFO UiEvent.cs Line:58 Event() - 已经连接上设备实时控制系统
[Save Log Job] 2024-11-21 13:11:08.700 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-11-21 13:11:12.249 LOG.INFO UiEvent.cs Line:51 Event() - Software will be expired in -28 days, at 10/24/2024 12:00:00 AM 。
[Save Log Job] 2024-11-21 13:11:14.967 LOG.INFO UiEvent.cs Line:51 Event() - User admin login
[Save Log Job] 2024-11-21 13:11:20.997 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetAutoMode()
[Save Log Job] 2024-11-21 13:11:20.997 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentModeChanged
[Save Log Job] 2024-11-21 13:11:20.997 LOG.INFO UiEvent.cs Line:51 Event() - System running mode changed to Auto Mode
[Save Log Job] 2024-11-21 13:11:36.701 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(BarcodeConfig_EnableBarcode, True)
[Save Log Job] 2024-11-21 13:11:36.701 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(BarcodeConfig_EnableSelectRecipeInAutoRun, True)
[Save Log Job] 2024-11-21 13:11:36.902 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(BarcodeConfig_EnableBarcode, True)
[Save Log Job] 2024-11-21 13:11:36.903 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(BarcodeConfig_EnableSelectRecipeInAutoRun, True)
[Save Log Job] 2024-11-21 13:11:37.103 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(BarcodeConfig_EnableBarcode, True)
[Save Log Job] 2024-11-21 13:11:37.103 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(BarcodeConfig_EnableSelectRecipeInAutoRun, True)
[Save Log Job] 2024-11-21 13:11:37.205 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(BarcodeConfig_EnableBarcode, True)
[Save Log Job] 2024-11-21 13:11:37.205 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(BarcodeConfig_EnableSelectRecipeInAutoRun, True)
[Save Log Job] 2024-11-21 13:11:37.406 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(BarcodeConfig_EnableBarcode, True)
[Save Log Job] 2024-11-21 13:11:37.406 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(BarcodeConfig_EnableSelectRecipeInAutoRun, True)
[Save Log Job] 2024-11-21 13:11:37.608 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(BarcodeConfig_EnableBarcode, True)
[Save Log Job] 2024-11-21 13:11:37.608 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(BarcodeConfig_EnableSelectRecipeInAutoRun, True)
[Save Log Job] 2024-11-21 13:11:37.710 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(BarcodeConfig_EnableBarcode, True)
[Save Log Job] 2024-11-21 13:11:37.710 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(BarcodeConfig_EnableSelectRecipeInAutoRun, True)
[Save Log Job] 2024-11-21 13:11:37.909 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(BarcodeConfig_EnableBarcode, True)
[Save Log Job] 2024-11-21 13:11:37.909 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(BarcodeConfig_EnableSelectRecipeInAutoRun, True)
[Save Log Job] 2024-11-21 13:11:38.110 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(BarcodeConfig_EnableBarcode, True)
[Save Log Job] 2024-11-21 13:11:38.110 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(BarcodeConfig_EnableSelectRecipeInAutoRun, True)
[Save Log Job] 2024-11-21 13:11:38.211 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(BarcodeConfig_EnableBarcode, True)
[Save Log Job] 2024-11-21 13:11:38.212 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(BarcodeConfig_EnableSelectRecipeInAutoRun, True)
[Save Log Job] 2024-11-21 13:11:38.512 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(BarcodeConfig_EnableBarcode, True)
[Save Log Job] 2024-11-21 13:11:38.513 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(BarcodeConfig_EnableSelectRecipeInAutoRun, True)
[Save Log Job] 2024-11-21 13:11:38.715 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(BarcodeConfig_EnableBarcode, True)
[Save Log Job] 2024-11-21 13:11:38.715 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(BarcodeConfig_EnableSelectRecipeInAutoRun, True)
[Save Log Job] 2024-11-21 13:11:38.816 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(BarcodeConfig_EnableBarcode, True)
[Save Log Job] 2024-11-21 13:11:38.817 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(BarcodeConfig_EnableSelectRecipeInAutoRun, True)
[Save Log Job] 2024-11-21 13:11:39.017 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(BarcodeConfig_EnableBarcode, True)
[Save Log Job] 2024-11-21 13:11:39.017 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(BarcodeConfig_EnableSelectRecipeInAutoRun, True)
[Save Log Job] 2024-11-21 13:11:39.218 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(BarcodeConfig_EnableBarcode, True)
[Save Log Job] 2024-11-21 13:11:39.218 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(BarcodeConfig_EnableSelectRecipeInAutoRun, True)
[Save Log Job] 2024-11-21 13:11:39.318 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(BarcodeConfig_EnableBarcode, True)
[Save Log Job] 2024-11-21 13:11:39.318 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(BarcodeConfig_EnableSelectRecipeInAutoRun, True)
[Save Log Job] 2024-11-21 13:11:39.519 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(BarcodeConfig_EnableBarcode, True)
[Save Log Job] 2024-11-21 13:11:39.519 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(BarcodeConfig_EnableSelectRecipeInAutoRun, True)
[Save Log Job] 2024-11-21 13:11:39.620 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(BarcodeConfig_EnableBarcode, True)
[Save Log Job] 2024-11-21 13:11:39.620 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(BarcodeConfig_EnableSelectRecipeInAutoRun, True)
--------------------------------[Footer Log]----------------------------------------- --------------------------------[Header Log]----------------------------------------- [Save Log Job] 2024-11-21 13:11:55.307 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-11-21 13:11:58.861 LOG.INFO UiEvent.cs Line:51 Event() - Software will be expired in -28 days, at 10/24/2024 12:00:00 AM 。
[Save Log Job] 2024-11-21 13:12:01.698 LOG.INFO UiEvent.cs Line:51 Event() - User admin login
[Save Log Job] 2024-11-21 13:12:05.114 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetAutoMode()
[Save Log Job] 2024-11-21 13:12:05.114 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentModeChanged
[Save Log Job] 2024-11-21 13:12:05.114 LOG.INFO UiEvent.cs Line:51 Event() - System running mode changed to Auto Mode
--------------------------------[Header Log]----------------------------------------- [Save Log Job] 2024-11-21 13:22:15.022 LOG.INFO UiEvent.cs Line:57 Event() - 已经连接上设备实时控制系统
[Save Log Job] 2024-11-21 13:22:15.022 LOG.INFO UiEvent.cs Line:58 Event() - 已经连接上设备实时控制系统
[Save Log Job] 2024-11-21 13:22:24.090 LOG.INFO UiEvent.cs Line:51 Event() - Software will be expired in -28 days, at 10/24/2024 12:00:00 AM 。
[Save Log Job] 2024-11-21 13:22:25.095 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-11-21 13:22:30.542 LOG.INFO UiEvent.cs Line:51 Event() - User admin login
[Save Log Job] 2024-11-21 13:22:40.303 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetAutoMode()
[Save Log Job] 2024-11-21 13:22:40.304 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentModeChanged
[Save Log Job] 2024-11-21 13:22:40.304 LOG.INFO UiEvent.cs Line:51 Event() - System running mode changed to Auto Mode
[Save Log Job] 2024-11-21 13:23:38.851 LOG.INFO UiEvent.cs Line:51 Event() - Operation RunRecipe(CACB, )
[Save Log Job] 2024-11-21 13:23:38.887 LOG.INFO UiEvent.cs Line:51 Event() - EventLotStart
[Save Log Job] 2024-11-21 13:23:38.994 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check door status。
[Save Log Job] 2024-11-21 13:23:38.995 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check chamber door。
[Save Log Job] 2024-11-21 13:23:38.996 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check backpanel door。
[Save Log Job] 2024-11-21 13:23:38.996 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Close all the valves。
[Save Log Job] 2024-11-21 13:23:38.996 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check pump status。
[Save Log Job] 2024-11-21 13:23:38.996 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Open pumping valve。
[Save Log Job] 2024-11-21 13:23:39.083 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-11-21 13:23:39.789 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check chamber pressure。
--------------------------------[Header Log]----------------------------------------- [Save Log Job] 2024-11-21 13:24:12.056 LOG.INFO UiEvent.cs Line:58 Event() - 已经连接上设备实时控制系统
[Save Log Job] 2024-11-21 13:24:12.057 LOG.INFO UiEvent.cs Line:58 Event() - 已经连接上设备实时控制系统
[Save Log Job] 2024-11-21 13:24:13.710 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-11-21 13:24:17.370 LOG.INFO UiEvent.cs Line:51 Event() - Software will be expired in -28 days, at 10/24/2024 12:00:00 AM 。
[Save Log Job] 2024-11-21 13:24:36.468 LOG.INFO UiEvent.cs Line:51 Event() - User admin login
[Save Log Job] 2024-11-21 13:24:40.890 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetAutoMode()
[Save Log Job] 2024-11-21 13:24:40.890 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentModeChanged
[Save Log Job] 2024-11-21 13:24:40.890 LOG.INFO UiEvent.cs Line:51 Event() - System running mode changed to Auto Mode
[Save Log Job] 2024-11-21 13:25:06.404 LOG.INFO UiEvent.cs Line:51 Event() - Operation RunRecipe(CACB, )
[Save Log Job] 2024-11-21 13:25:08.394 LOG.INFO UiEvent.cs Line:51 Event() - EventLotStart
[Save Log Job] 2024-11-21 13:25:08.495 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check door status。
[Save Log Job] 2024-11-21 13:25:08.495 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check chamber door。
[Save Log Job] 2024-11-21 13:25:08.496 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check backpanel door。
[Save Log Job] 2024-11-21 13:25:08.496 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check pump status。
[Save Log Job] 2024-11-21 13:25:08.496 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Close all the valves。
[Save Log Job] 2024-11-21 13:25:08.497 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Open pumping valve。
[Save Log Job] 2024-11-21 13:25:08.596 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-11-21 13:25:10.512 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门Chamber pumping valveOpen失败，原因：Valve keep closed 。
[Save Log Job] 2024-11-21 13:25:11.621 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check chamber pressure。
[Save Log Job] 2024-11-21 13:25:46.555 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Pump below 100mTorr。
[Save Log Job] 2024-11-21 13:25:46.555 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：PreProcess Finished in 0.6 minitues。
[Save Log Job] 2024-11-21 13:25:46.556 LOG.INFO UiEvent.cs Line:51 Event() - System complete run 'PreProcess'.
[Save Log Job] 2024-11-21 13:25:46.556 LOG.INFO UiEvent.cs Line:51 Event() - Run Recipe 20241121132508-CACB
[Save Log Job] 2024-11-21 13:25:46.556 LOG.INFO UiEvent.cs Line:51 Event() - System recipe start run'20241121132508-CACB'
[Save Log Job] 2024-11-21 13:25:46.656 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241121132508-CACB' start run step 1：initial。
[Save Log Job] 2024-11-21 13:25:46.657 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。
[Save Log Job] 2024-11-21 13:25:46.657 LOG.INFO UiEvent.cs Line:51 Event() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。
[Save Log Job] 2024-11-21 13:25:46.658 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。
[Save Log Job] 2024-11-21 13:25:46.658 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。
[Save Log Job] 2024-11-21 13:25:46.658 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。
[Save Log Job] 2024-11-21 13:25:46.659 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。
[Save Log Job] 2024-11-21 13:25:46.659 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。
[Save Log Job] 2024-11-21 13:25:46.659 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPower，RF set Power:0。
[Save Log Job] 2024-11-21 13:25:46.660 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。
[Save Log Job] 2024-11-21 13:25:46.660 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。
[Save Log Job] 2024-11-21 13:25:46.660 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。
[Save Log Job] 2024-11-21 13:25:46.660 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas1， ramp to 45sccm。
[Save Log Job] 2024-11-21 13:25:46.661 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas2， ramp to 56sccm。
[Save Log Job] 2024-11-21 13:25:46.661 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas3， ramp to 66sccm。
[Save Log Job] 2024-11-21 13:25:46.661 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas4， ramp to 76sccm。
[Save Log Job] 2024-11-21 13:25:46.663 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas5， ramp to 86sccm。
[Save Log Job] 2024-11-21 13:25:46.663 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPowerOnOff，Set RF power Off。
[Save Log Job] 2024-11-21 13:25:46.663 LOG.INFO UiEvent.cs Line:51 Event() - Start monitor pressure stability
[Save Log Job] 2024-11-21 13:26:00.239 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(System_IsMesMode, True)
--------------------------------[Footer Log]----------------------------------------- --------------------------------[Header Log]----------------------------------------- [Save Log Job] 2024-11-21 13:26:18.081 LOG.INFO UiEvent.cs Line:58 Event() - 已经连接上设备实时控制系统
[Save Log Job] 2024-11-21 13:26:18.083 LOG.INFO UiEvent.cs Line:57 Event() - 已经连接上设备实时控制系统
[Save Log Job] 2024-11-21 13:26:19.538 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-11-21 13:26:23.292 LOG.INFO UiEvent.cs Line:51 Event() - Software will be expired in -28 days, at 10/24/2024 12:00:00 AM 。
[Save Log Job] 2024-11-21 13:26:29.740 LOG.INFO UiEvent.cs Line:51 Event() - User admin login
[Save Log Job] 2024-11-21 13:26:40.388 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetAutoMode()
[Save Log Job] 2024-11-21 13:26:40.388 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentModeChanged
[Save Log Job] 2024-11-21 13:26:40.388 LOG.INFO UiEvent.cs Line:51 Event() - System running mode changed to Auto Mode
--------------------------------[Header Log]----------------------------------------- [Save Log Job] 2024-11-21 13:30:07.273 LOG.INFO UiEvent.cs Line:57 Event() - 已经连接上设备实时控制系统
[Save Log Job] 2024-11-21 13:30:07.274 LOG.INFO UiEvent.cs Line:58 Event() - 已经连接上设备实时控制系统
[Save Log Job] 2024-11-21 13:30:08.869 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-11-21 13:30:12.517 LOG.INFO UiEvent.cs Line:51 Event() - Software will be expired in -28 days, at 10/24/2024 12:00:00 AM 。
[Save Log Job] 2024-11-21 13:30:14.159 LOG.INFO UiEvent.cs Line:51 Event() - User admin login
[Save Log Job] 2024-11-21 13:30:20.765 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetAutoMode()
[Save Log Job] 2024-11-21 13:30:20.765 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentModeChanged
[Save Log Job] 2024-11-21 13:30:20.766 LOG.INFO UiEvent.cs Line:51 Event() - System running mode changed to Auto Mode
[Save Log Job] 2024-11-21 13:31:40.030 LOG.INFO UiEvent.cs Line:51 Event() - Operation RunRecipe(CACB, 123, jerry)
[Save Log Job] 2024-11-21 13:31:40.128 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check door status。
[Save Log Job] 2024-11-21 13:31:40.128 LOG.INFO UiEvent.cs Line:51 Event() - EventLotStart
[Save Log Job] 2024-11-21 13:31:40.129 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check pump status。
[Save Log Job] 2024-11-21 13:31:40.129 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check backpanel door。
[Save Log Job] 2024-11-21 13:31:40.129 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check chamber door。
[Save Log Job] 2024-11-21 13:31:40.130 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Close all the valves。
[Save Log Job] 2024-11-21 13:31:40.218 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Open pumping valve。
[Save Log Job] 2024-11-21 13:31:40.218 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-11-21 13:31:42.235 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门Chamber pumping valveOpen失败，原因：Valve keep closed 。
[Save Log Job] 2024-11-21 13:31:42.839 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check chamber pressure。
[Save Log Job] 2024-11-21 13:31:52.429 LOG.INFO UiEvent.cs Line:51 Event() - Operation AbortRecipe()
[Save Log Job] 2024-11-21 13:31:52.530 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-11-21 13:38:22.445 LOG.INFO UiEvent.cs Line:51 Event() - System PLC heart beat check failed，please confirm PLC still running
[Save Log Job] 2024-11-21 13:38:26.155 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-11-21 13:38:26.156 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-11-21 13:38:26.157 LOG.INFO UiEvent.cs Line:51 Event() - Operation RunRecipe(CACB, 123, jerry)
[Save Log Job] 2024-11-21 13:39:11.883 LOG.INFO UiEvent.cs Line:51 Event() - Chamber is in Error，can not do RunRecipe。
[Save Log Job] 2024-11-21 13:42:26.620 LOG.INFO UiEvent.cs Line:51 Event() - System PLC heart beat check failed，please confirm PLC still running
[Save Log Job] 2024-11-21 13:49:11.934 LOG.INFO UiEvent.cs Line:51 Event() - System PLC heart beat check failed，please confirm PLC still running
[Save Log Job] 2024-11-21 13:51:42.962 LOG.INFO UiEvent.cs Line:51 Event() - Operation RunRecipe(CACB, 123, jerry)
[Save Log Job] 2024-11-21 13:51:42.963 LOG.INFO UiEvent.cs Line:51 Event() - System PLC heart beat check failed，please confirm PLC still running
[Save Log Job] 2024-11-21 13:55:22.091 LOG.INFO UiEvent.cs Line:51 Event() - System PLC heart beat check failed，please confirm PLC still running
--------------------------------[Header Log]----------------------------------------- [Save Log Job] 2024-11-21 13:58:25.029 LOG.INFO UiEvent.cs Line:58 Event() - 已经连接上设备实时控制系统
[Save Log Job] 2024-11-21 13:58:25.030 LOG.INFO UiEvent.cs Line:57 Event() - 已经连接上设备实时控制系统
[Save Log Job] 2024-11-21 13:58:26.775 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-11-21 13:58:30.420 LOG.INFO UiEvent.cs Line:51 Event() - Software will be expired in -28 days, at 10/24/2024 12:00:00 AM 。
[Save Log Job] 2024-11-21 13:58:33.259 LOG.INFO UiEvent.cs Line:51 Event() - User admin login
[Save Log Job] 2024-11-21 13:58:45.040 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetAutoMode()
[Save Log Job] 2024-11-21 13:58:45.040 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentModeChanged
[Save Log Job] 2024-11-21 13:58:45.041 LOG.INFO UiEvent.cs Line:51 Event() - System running mode changed to Auto Mode
[Save Log Job] 2024-11-21 13:59:01.597 LOG.INFO UiEvent.cs Line:51 Event() - Operation RunRecipe(CACB, 123, jerry)
--------------------------------[Header Log]----------------------------------------- [Save Log Job] 2024-11-21 15:08:08.772 LOG.INFO UiEvent.cs Line:58 Event() - 已经连接上设备实时控制系统
[Save Log Job] 2024-11-21 15:08:10.251 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-11-21 15:08:14.017 LOG.INFO UiEvent.cs Line:51 Event() - Software will be expired in -28 days, at 10/24/2024 12:00:00 AM 。
[Save Log Job] 2024-11-21 15:08:32.430 LOG.INFO UiEvent.cs Line:51 Event() - User admin login
[Save Log Job] 2024-11-21 15:08:39.319 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetAutoMode()
[Save Log Job] 2024-11-21 15:08:39.319 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentModeChanged
[Save Log Job] 2024-11-21 15:08:39.320 LOG.INFO UiEvent.cs Line:51 Event() - System running mode changed to Auto Mode
[Save Log Job] 2024-11-21 15:09:41.073 LOG.INFO UiEvent.cs Line:51 Event() - Operation RunRecipe(CACB, 1222222222/)
[Save Log Job] 2024-11-21 15:10:34.746 LOG.INFO UiEvent.cs Line:51 Event() - EventLotStart
[Save Log Job] 2024-11-21 15:10:34.865 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check chamber door。
[Save Log Job] 2024-11-21 15:10:34.865 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check door status。
[Save Log Job] 2024-11-21 15:10:34.866 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check backpanel door。
[Save Log Job] 2024-11-21 15:10:34.867 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check pump status。
[Save Log Job] 2024-11-21 15:10:34.869 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Close all the valves。
[Save Log Job] 2024-11-21 15:10:34.869 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Open pumping valve。
[Save Log Job] 2024-11-21 15:10:34.869 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-11-21 15:10:36.455 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check chamber pressure。
[Save Log Job] 2024-11-21 15:10:39.383 LOG.INFO UiEvent.cs Line:51 Event() - Operation AbortRecipe()
[Save Log Job] 2024-11-21 15:10:39.452 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-11-21 15:13:08.966 LOG.INFO UiEvent.cs Line:51 Event() - Operation RunRecipe(CACB, 33333333545/)
[Save Log Job] 2024-11-21 15:13:09.997 LOG.INFO UiEvent.cs Line:51 Event() - EventLotStart
[Save Log Job] 2024-11-21 15:13:09.997 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check door status。
[Save Log Job] 2024-11-21 15:13:09.997 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check chamber door。
[Save Log Job] 2024-11-21 15:13:09.998 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check backpanel door。
[Save Log Job] 2024-11-21 15:13:09.998 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check pump status。
[Save Log Job] 2024-11-21 15:13:09.998 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Close all the valves。
[Save Log Job] 2024-11-21 15:13:10.098 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Open pumping valve。
[Save Log Job] 2024-11-21 15:13:10.099 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check chamber pressure。
[Save Log Job] 2024-11-21 15:13:10.099 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-11-21 15:13:15.335 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Pump below 100mTorr。
[Save Log Job] 2024-11-21 15:13:15.435 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：PreProcess Finished in 0.1 minitues。
[Save Log Job] 2024-11-21 15:13:15.437 LOG.INFO UiEvent.cs Line:51 Event() - System complete run 'PreProcess'.
[Save Log Job] 2024-11-21 15:13:15.437 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241121151309-CACB' start run step 1：initial。
[Save Log Job] 2024-11-21 15:13:15.437 LOG.INFO UiEvent.cs Line:51 Event() - Run Recipe 20241121151309-CACB
[Save Log Job] 2024-11-21 15:13:15.437 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。
[Save Log Job] 2024-11-21 15:13:15.437 LOG.INFO UiEvent.cs Line:51 Event() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。
[Save Log Job] 2024-11-21 15:13:15.438 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。
[Save Log Job] 2024-11-21 15:13:15.438 LOG.INFO UiEvent.cs Line:51 Event() - System recipe start run'20241121151309-CACB'
[Save Log Job] 2024-11-21 15:13:15.438 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。
[Save Log Job] 2024-11-21 15:13:15.439 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。
[Save Log Job] 2024-11-21 15:13:15.439 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。
[Save Log Job] 2024-11-21 15:13:15.440 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。
[Save Log Job] 2024-11-21 15:13:15.440 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPower，RF set Power:0。
[Save Log Job] 2024-11-21 15:13:15.441 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。
[Save Log Job] 2024-11-21 15:13:15.441 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。
[Save Log Job] 2024-11-21 15:13:15.442 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。
[Save Log Job] 2024-11-21 15:13:15.442 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas1， ramp to 45sccm。
[Save Log Job] 2024-11-21 15:13:15.443 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas2， ramp to 56sccm。
[Save Log Job] 2024-11-21 15:13:15.443 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas3， ramp to 66sccm。
[Save Log Job] 2024-11-21 15:13:15.443 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas4， ramp to 76sccm。
[Save Log Job] 2024-11-21 15:13:15.444 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas5， ramp to 86sccm。
[Save Log Job] 2024-11-21 15:13:15.444 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPowerOnOff，Set RF power Off。
[Save Log Job] 2024-11-21 15:13:15.536 LOG.INFO UiEvent.cs Line:51 Event() - Start monitor pressure stability
[Save Log Job] 2024-11-21 15:13:23.778 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(System_IsMesMode, True)
[Save Log Job] 2024-11-21 15:13:34.251 LOG.INFO UiEvent.cs Line:51 Event() - Operation AbortRecipe()
[Save Log Job] 2024-11-21 15:13:34.251 LOG.INFO UiEvent.cs Line:51 Event() - System recipe was aborted: user aborted recipe
[Save Log Job] 2024-11-21 15:13:34.251 LOG.INFO UiEvent.cs Line:51 Event() - Stop monitor pressure stability
[Save Log Job] 2024-11-21 15:13:34.252 LOG.INFO UiEvent.cs Line:51 Event() - System Recipe run completed，Recipe：20241121151309-CACB
Start time：2024/11/21 15:13:15
End time：2024/11/21 15:13:34
Total time：0:0:18
[Save Log Job] 2024-11-21 15:13:34.252 LOG.INFO UiEvent.cs Line:51 Event() - System Recipe completely run
[Save Log Job] 2024-11-21 15:13:34.253 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, wait for 10 seconds
[Save Log Job] 2024-11-21 15:13:36.264 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC1 ValveClose失败，原因：Valve keep open。
[Save Log Job] 2024-11-21 15:13:36.264 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC2 ValveClose失败，原因：Valve keep open。
[Save Log Job] 2024-11-21 15:13:36.264 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC3 ValveClose失败，原因：Valve keep open。
[Save Log Job] 2024-11-21 15:13:36.268 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC4 ValveClose失败，原因：Valve keep open。
[Save Log Job] 2024-11-21 15:13:36.269 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC5 ValveClose失败，原因：Valve keep open。
[Save Log Job] 2024-11-21 15:13:36.269 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门Process gas final valveClose失败，原因：Valve keep open。
[Save Log Job] 2024-11-21 15:13:44.330 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, RF Power Off
[Save Log Job] 2024-11-21 15:13:44.429 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, Stop all the gas flow
[Save Log Job] 2024-11-21 15:13:46.039 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, Close all the valves
[Save Log Job] 2024-11-21 15:13:46.139 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, close pump valve
[Save Log Job] 2024-11-21 15:13:48.839 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门Chamber pumping valveClose失败，原因：Valve keep open。
[Save Log Job] 2024-11-21 15:13:48.839 LOG.INFO UiEvent.cs Line:51 Event() - Operation AbortRecipe()
[Save Log Job] 2024-11-21 15:13:48.839 LOG.INFO UiEvent.cs Line:51 Event() - EventLotFinished
[Save Log Job] 2024-11-21 15:13:48.873 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
--------------------------------[Header Log]----------------------------------------- [Save Log Job] 2024-11-21 15:22:45.109 LOG.INFO UiEvent.cs Line:58 Event() - 已经连接上设备实时控制系统
[Save Log Job] 2024-11-21 15:22:49.541 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-11-21 15:22:49.541 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(System_IsMesMode, True)
[Save Log Job] 2024-11-21 15:22:50.386 LOG.INFO UiEvent.cs Line:51 Event() - Software will be expired in -28 days, at 10/24/2024 12:00:00 AM 。
[Save Log Job] 2024-11-21 15:22:54.730 LOG.INFO UiEvent.cs Line:51 Event() - User admin login
[Save Log Job] 2024-11-21 15:23:01.955 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetAutoMode()
[Save Log Job] 2024-11-21 15:23:01.956 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentModeChanged
[Save Log Job] 2024-11-21 15:23:01.956 LOG.INFO UiEvent.cs Line:51 Event() - System running mode changed to Auto Mode
[Save Log Job] 2024-11-21 15:24:33.227 LOG.INFO UiEvent.cs Line:51 Event() - Operation RunRecipe(CACB, 11111111111/, 12333, jerrry)
--------------------------------[Header Log]----------------------------------------- [Save Log Job] 2024-11-21 15:37:01.282 LOG.INFO UiEvent.cs Line:58 Event() - 已经连接上设备实时控制系统
[Save Log Job] 2024-11-21 15:37:09.748 LOG.INFO UiEvent.cs Line:50 Event() - Operation SetConfig(System_IsMesMode, True)
[Save Log Job] 2024-11-21 15:37:09.749 LOG.INFO UiEvent.cs Line:51 Event() - Software will be expired in -28 days, at 10/24/2024 12:00:00 AM 。
[Save Log Job] 2024-11-21 15:37:09.749 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-11-21 15:37:17.392 LOG.INFO UiEvent.cs Line:51 Event() - User admin login
[Save Log Job] 2024-11-21 15:37:26.862 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetAutoMode()
[Save Log Job] 2024-11-21 15:37:26.863 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentModeChanged
[Save Log Job] 2024-11-21 15:37:26.863 LOG.INFO UiEvent.cs Line:51 Event() - System running mode changed to Auto Mode
[Save Log Job] 2024-11-21 15:37:49.659 LOG.INFO UiEvent.cs Line:51 Event() - Operation RunRecipe(CACB, 111111111111/, 12333, jerrry)
[Save Log Job] 2024-11-21 15:37:49.759 LOG.INFO UiEvent.cs Line:51 Event() - EventLotStart
[Save Log Job] 2024-11-21 15:37:49.759 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-11-21 15:37:49.759 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check door status。
[Save Log Job] 2024-11-21 15:37:49.760 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check chamber door。
[Save Log Job] 2024-11-21 15:37:49.760 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check backpanel door。
[Save Log Job] 2024-11-21 15:37:49.761 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check pump status。
[Save Log Job] 2024-11-21 15:37:49.761 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Close all the valves。
[Save Log Job] 2024-11-21 15:37:49.860 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Open pumping valve。
[Save Log Job] 2024-11-21 15:37:50.262 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check chamber pressure。
[Save Log Job] 2024-11-21 15:38:29.138 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Pump below 100mTorr。
[Save Log Job] 2024-11-21 15:38:29.138 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：PreProcess Finished in 0.7 minitues。
[Save Log Job] 2024-11-21 15:38:29.139 LOG.INFO UiEvent.cs Line:51 Event() - System complete run 'PreProcess'.
[Save Log Job] 2024-11-21 15:38:29.139 LOG.INFO UiEvent.cs Line:51 Event() - Run Recipe 20241121153749-CACB
[Save Log Job] 2024-11-21 15:38:29.140 LOG.INFO UiEvent.cs Line:51 Event() - System recipe start run'20241121153749-CACB'
[Save Log Job] 2024-11-21 15:38:29.238 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241121153749-CACB' start run step 1：initial。
[Save Log Job] 2024-11-21 15:38:29.238 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。
[Save Log Job] 2024-11-21 15:38:29.238 LOG.INFO UiEvent.cs Line:51 Event() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。
[Save Log Job] 2024-11-21 15:38:29.239 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。
[Save Log Job] 2024-11-21 15:38:29.239 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。
[Save Log Job] 2024-11-21 15:38:29.239 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。
[Save Log Job] 2024-11-21 15:38:29.240 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。
[Save Log Job] 2024-11-21 15:38:29.240 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。
[Save Log Job] 2024-11-21 15:38:29.241 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPower，RF set Power:0。
[Save Log Job] 2024-11-21 15:38:29.241 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。
[Save Log Job] 2024-11-21 15:38:29.241 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。
[Save Log Job] 2024-11-21 15:38:29.242 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。
[Save Log Job] 2024-11-21 15:38:29.242 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas1， ramp to 45sccm。
[Save Log Job] 2024-11-21 15:38:29.242 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas2， ramp to 56sccm。
[Save Log Job] 2024-11-21 15:38:29.243 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas3， ramp to 66sccm。
[Save Log Job] 2024-11-21 15:38:29.243 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas4， ramp to 76sccm。
[Save Log Job] 2024-11-21 15:38:29.243 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas5， ramp to 86sccm。
[Save Log Job] 2024-11-21 15:38:29.244 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPowerOnOff，Set RF power Off。
[Save Log Job] 2024-11-21 15:38:29.244 LOG.INFO UiEvent.cs Line:51 Event() - Start monitor pressure stability
[Save Log Job] 2024-11-21 15:38:59.302 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241121153749-CACB' end step 1
[Save Log Job] 2024-11-21 15:38:59.302 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241121153749-CACB' start run step 2：initial。
[Save Log Job] 2024-11-21 15:38:59.303 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。
[Save Log Job] 2024-11-21 15:38:59.303 LOG.INFO UiEvent.cs Line:51 Event() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。
[Save Log Job] 2024-11-21 15:38:59.303 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。
[Save Log Job] 2024-11-21 15:38:59.304 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。
[Save Log Job] 2024-11-21 15:38:59.304 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。
[Save Log Job] 2024-11-21 15:38:59.304 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。
[Save Log Job] 2024-11-21 15:38:59.305 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。
[Save Log Job] 2024-11-21 15:38:59.305 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPower，RF set Power:150。
[Save Log Job] 2024-11-21 15:38:59.306 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。
[Save Log Job] 2024-11-21 15:38:59.306 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。
[Save Log Job] 2024-11-21 15:38:59.306 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。
[Save Log Job] 2024-11-21 15:38:59.307 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas1， ramp to 45sccm。
[Save Log Job] 2024-11-21 15:38:59.307 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas2， ramp to 56sccm。
[Save Log Job] 2024-11-21 15:38:59.307 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas3， ramp to 66sccm。
[Save Log Job] 2024-11-21 15:38:59.308 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas4， ramp to 76sccm。
[Save Log Job] 2024-11-21 15:38:59.308 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas5， ramp to 86sccm。
[Save Log Job] 2024-11-21 15:38:59.309 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPowerOnOff，Set RF power On。
[Save Log Job] 2024-11-21 15:39:08.003 LOG.INFO UiEvent.cs Line:51 Event() - System RF GeneratorTolerance alarm：Forward power 18 out of range[149,151] in 1 seconds.
[Save Log Job] 2024-11-21 15:39:08.005 LOG.INFO UiEvent.cs Line:51 Event() - System recipe was aborted: user aborted recipe
[Save Log Job] 2024-11-21 15:39:08.006 LOG.INFO UiEvent.cs Line:51 Event() - Stop monitor pressure stability
[Save Log Job] 2024-11-21 15:39:08.006 LOG.INFO UiEvent.cs Line:51 Event() - System Recipe run completed，Recipe：20241121153749-CACB
Start time：2024/11/21 15:38:29
End time：2024/11/21 15:39:00
Total time：0:0:31
[Save Log Job] 2024-11-21 15:39:08.010 LOG.INFO UiEvent.cs Line:51 Event() - System Recipe completely run
[Save Log Job] 2024-11-21 15:39:08.011 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC2 ValveClose失败，原因：Valve keep open。
[Save Log Job] 2024-11-21 15:39:08.011 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-11-21 15:39:08.011 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-11-21 15:39:08.011 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC4 ValveClose失败，原因：Valve keep open。
[Save Log Job] 2024-11-21 15:39:08.011 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC3 ValveClose失败，原因：Valve keep open。
[Save Log Job] 2024-11-21 15:39:08.011 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC5 ValveClose失败，原因：Valve keep open。
[Save Log Job] 2024-11-21 15:39:08.011 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门Process gas final valveClose失败，原因：Valve keep open。
[Save Log Job] 2024-11-21 15:39:08.012 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC1 ValveClose失败，原因：Valve keep open。
--------------------------------[Header Log]----------------------------------------- [Save Log Job] 2024-11-21 15:43:33.390 LOG.INFO UiEvent.cs Line:58 Event() - 已经连接上设备实时控制系统
[Save Log Job] 2024-11-21 15:43:33.392 LOG.INFO UiEvent.cs Line:57 Event() - 已经连接上设备实时控制系统
[Save Log Job] 2024-11-21 15:43:38.900 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-11-21 15:43:39.159 LOG.INFO UiEvent.cs Line:51 Event() - Software will be expired in -28 days, at 10/24/2024 12:00:00 AM 。
[Save Log Job] 2024-11-21 15:43:39.600 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(System_IsMesMode, True)
[Save Log Job] 2024-11-21 15:43:53.876 LOG.INFO UiEvent.cs Line:51 Event() - User admin login
[Save Log Job] 2024-11-21 15:44:02.233 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetAutoMode()
[Save Log Job] 2024-11-21 15:44:02.233 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentModeChanged
[Save Log Job] 2024-11-21 15:44:02.233 LOG.INFO UiEvent.cs Line:51 Event() - System running mode changed to Auto Mode
[Save Log Job] 2024-11-21 15:44:32.472 LOG.INFO UiEvent.cs Line:51 Event() - Operation RunRecipe(CACB, 111111111111/, 12333, jerry)
[Save Log Job] 2024-11-21 15:44:32.897 LOG.INFO UiEvent.cs Line:51 Event() - EventLotStart
[Save Log Job] 2024-11-21 15:44:32.900 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check door status。
[Save Log Job] 2024-11-21 15:44:32.900 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check backpanel door。
[Save Log Job] 2024-11-21 15:44:32.900 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check chamber door。
[Save Log Job] 2024-11-21 15:44:32.900 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Close all the valves。
[Save Log Job] 2024-11-21 15:44:32.900 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check pump status。
[Save Log Job] 2024-11-21 15:44:32.959 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Open pumping valve。
[Save Log Job] 2024-11-21 15:44:32.959 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-11-21 15:44:34.271 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check chamber pressure。
[Save Log Job] 2024-11-21 15:45:13.154 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Pump below 100mTorr。
[Save Log Job] 2024-11-21 15:45:13.155 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：PreProcess Finished in 0.7 minitues。
[Save Log Job] 2024-11-21 15:45:13.155 LOG.INFO UiEvent.cs Line:51 Event() - System complete run 'PreProcess'.
[Save Log Job] 2024-11-21 15:45:13.155 LOG.INFO UiEvent.cs Line:51 Event() - Run Recipe 20241121154432-CACB
[Save Log Job] 2024-11-21 15:45:13.156 LOG.INFO UiEvent.cs Line:51 Event() - System recipe start run'20241121154432-CACB'
[Save Log Job] 2024-11-21 15:45:13.255 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241121154432-CACB' start run step 1：initial。
[Save Log Job] 2024-11-21 15:45:13.256 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。
[Save Log Job] 2024-11-21 15:45:13.256 LOG.INFO UiEvent.cs Line:51 Event() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。
[Save Log Job] 2024-11-21 15:45:13.257 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。
[Save Log Job] 2024-11-21 15:45:13.257 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。
[Save Log Job] 2024-11-21 15:45:13.258 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。
[Save Log Job] 2024-11-21 15:45:13.258 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。
[Save Log Job] 2024-11-21 15:45:13.258 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。
[Save Log Job] 2024-11-21 15:45:13.259 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPower，RF set Power:0。
[Save Log Job] 2024-11-21 15:45:13.259 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。
[Save Log Job] 2024-11-21 15:45:13.259 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。
[Save Log Job] 2024-11-21 15:45:13.260 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。
[Save Log Job] 2024-11-21 15:45:13.261 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas1， ramp to 45sccm。
[Save Log Job] 2024-11-21 15:45:13.261 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas2， ramp to 56sccm。
[Save Log Job] 2024-11-21 15:45:13.261 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas3， ramp to 66sccm。
[Save Log Job] 2024-11-21 15:45:13.262 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas4， ramp to 76sccm。
[Save Log Job] 2024-11-21 15:45:13.262 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas5， ramp to 86sccm。
[Save Log Job] 2024-11-21 15:45:13.262 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPowerOnOff，Set RF power Off。
[Save Log Job] 2024-11-21 15:45:13.263 LOG.INFO UiEvent.cs Line:51 Event() - Start monitor pressure stability
[Save Log Job] 2024-11-21 15:45:43.320 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241121154432-CACB' end step 1
[Save Log Job] 2024-11-21 15:45:43.320 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241121154432-CACB' start run step 2：initial。
[Save Log Job] 2024-11-21 15:45:43.321 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。
[Save Log Job] 2024-11-21 15:45:43.321 LOG.INFO UiEvent.cs Line:51 Event() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。
[Save Log Job] 2024-11-21 15:45:43.321 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。
[Save Log Job] 2024-11-21 15:45:43.322 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。
[Save Log Job] 2024-11-21 15:45:43.322 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。
[Save Log Job] 2024-11-21 15:45:43.322 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。
[Save Log Job] 2024-11-21 15:45:43.323 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。
[Save Log Job] 2024-11-21 15:45:43.323 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPower，RF set Power:150。
[Save Log Job] 2024-11-21 15:45:43.324 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。
[Save Log Job] 2024-11-21 15:45:43.324 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。
[Save Log Job] 2024-11-21 15:45:43.324 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。
[Save Log Job] 2024-11-21 15:45:43.325 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas1， ramp to 45sccm。
[Save Log Job] 2024-11-21 15:45:43.325 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas2， ramp to 56sccm。
[Save Log Job] 2024-11-21 15:45:43.325 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas3， ramp to 66sccm。
[Save Log Job] 2024-11-21 15:45:43.326 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas4， ramp to 76sccm。
[Save Log Job] 2024-11-21 15:45:43.326 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas5， ramp to 86sccm。
[Save Log Job] 2024-11-21 15:45:43.327 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPowerOnOff，Set RF power On。
[Save Log Job] 2024-11-21 15:45:44.829 LOG.INFO UiEvent.cs Line:51 Event() - System RF GeneratorTolerance alarm：Forward power 18 out of range[149,151] in 1 seconds.
[Save Log Job] 2024-11-21 15:45:44.830 LOG.INFO UiEvent.cs Line:51 Event() - System recipe was aborted: user aborted recipe
[Save Log Job] 2024-11-21 15:45:44.830 LOG.INFO UiEvent.cs Line:51 Event() - Stop monitor pressure stability
[Save Log Job] 2024-11-21 15:45:44.831 LOG.INFO UiEvent.cs Line:51 Event() - System Recipe run completed，Recipe：20241121154432-CACB
Start time：2024/11/21 15:45:13
End time：2024/11/21 15:45:44
Total time：0:0:31
[Save Log Job] 2024-11-21 15:45:44.831 LOG.INFO UiEvent.cs Line:51 Event() - System Recipe completely run
[Save Log Job] 2024-11-21 15:45:45.031 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-11-21 15:45:46.843 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门Process gas final valveClose失败，原因：Valve keep open。
--------------------------------[Header Log]----------------------------------------- [Save Log Job] 2024-11-21 15:52:03.856 LOG.INFO UiEvent.cs Line:58 Event() - 已经连接上设备实时控制系统
[Save Log Job] 2024-11-21 15:52:03.858 LOG.INFO UiEvent.cs Line:58 Event() - 已经连接上设备实时控制系统
[Save Log Job] 2024-11-21 15:52:08.365 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(System_IsMesMode, True)
[Save Log Job] 2024-11-21 15:52:08.365 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-11-21 15:52:09.156 LOG.INFO UiEvent.cs Line:51 Event() - Software will be expired in -28 days, at 10/24/2024 12:00:00 AM 。
[Save Log Job] 2024-11-21 15:52:18.002 LOG.INFO UiEvent.cs Line:51 Event() - User admin login
[Save Log Job] 2024-11-21 15:52:22.911 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetAutoMode()
[Save Log Job] 2024-11-21 15:52:22.911 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentModeChanged
[Save Log Job] 2024-11-21 15:52:22.911 LOG.INFO UiEvent.cs Line:51 Event() - System running mode changed to Auto Mode
[Save Log Job] 2024-11-21 15:53:00.289 LOG.INFO UiEvent.cs Line:51 Event() - Operation RunRecipe(CACB, CA111111111/CA2222222222/, 12333, jerry)
[Save Log Job] 2024-11-21 15:53:00.375 LOG.INFO UiEvent.cs Line:51 Event() - EventLotStart
[Save Log Job] 2024-11-21 15:53:00.375 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check door status。
[Save Log Job] 2024-11-21 15:53:00.375 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check chamber door。
[Save Log Job] 2024-11-21 15:53:00.375 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check backpanel door。
[Save Log Job] 2024-11-21 15:53:00.376 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check pump status。
[Save Log Job] 2024-11-21 15:53:00.376 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Close all the valves。
[Save Log Job] 2024-11-21 15:53:00.475 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Open pumping valve。
[Save Log Job] 2024-11-21 15:53:00.475 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-11-21 15:53:02.488 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门Chamber pumping valveOpen失败，原因：Valve keep closed 。
[Save Log Job] 2024-11-21 15:53:03.503 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check chamber pressure。
[Save Log Job] 2024-11-21 15:53:38.455 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Pump below 100mTorr。
[Save Log Job] 2024-11-21 15:53:38.557 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：PreProcess Finished in 0.6 minitues。
[Save Log Job] 2024-11-21 15:53:38.557 LOG.INFO UiEvent.cs Line:51 Event() - System complete run 'PreProcess'.
[Save Log Job] 2024-11-21 15:53:38.558 LOG.INFO UiEvent.cs Line:51 Event() - Run Recipe 20241121155300-CACB
[Save Log Job] 2024-11-21 15:53:38.559 LOG.INFO UiEvent.cs Line:51 Event() - System recipe start run'20241121155300-CACB'
[Save Log Job] 2024-11-21 15:53:38.559 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241121155300-CACB' start run step 1：initial。
[Save Log Job] 2024-11-21 15:53:38.559 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。
[Save Log Job] 2024-11-21 15:53:38.560 LOG.INFO UiEvent.cs Line:51 Event() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。
[Save Log Job] 2024-11-21 15:53:38.560 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。
[Save Log Job] 2024-11-21 15:53:38.560 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。
[Save Log Job] 2024-11-21 15:53:38.561 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。
[Save Log Job] 2024-11-21 15:53:38.561 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。
[Save Log Job] 2024-11-21 15:53:38.561 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。
[Save Log Job] 2024-11-21 15:53:38.561 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPower，RF set Power:0。
[Save Log Job] 2024-11-21 15:53:38.563 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。
[Save Log Job] 2024-11-21 15:53:38.563 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。
[Save Log Job] 2024-11-21 15:53:38.563 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。
[Save Log Job] 2024-11-21 15:53:38.564 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas1， ramp to 45sccm。
[Save Log Job] 2024-11-21 15:53:38.564 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas2， ramp to 56sccm。
[Save Log Job] 2024-11-21 15:53:38.564 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas3， ramp to 66sccm。
[Save Log Job] 2024-11-21 15:53:38.565 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas4， ramp to 76sccm。
[Save Log Job] 2024-11-21 15:53:38.565 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas5， ramp to 86sccm。
[Save Log Job] 2024-11-21 15:53:38.565 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPowerOnOff，Set RF power Off。
[Save Log Job] 2024-11-21 15:53:38.657 LOG.INFO UiEvent.cs Line:51 Event() - Start monitor pressure stability
[Save Log Job] 2024-11-21 15:54:08.721 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241121155300-CACB' end step 1
[Save Log Job] 2024-11-21 15:54:08.722 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241121155300-CACB' start run step 2：initial。
[Save Log Job] 2024-11-21 15:54:08.722 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。
[Save Log Job] 2024-11-21 15:54:08.723 LOG.INFO UiEvent.cs Line:51 Event() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。
[Save Log Job] 2024-11-21 15:54:08.723 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。
[Save Log Job] 2024-11-21 15:54:08.724 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。
[Save Log Job] 2024-11-21 15:54:08.724 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。
[Save Log Job] 2024-11-21 15:54:08.724 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。
[Save Log Job] 2024-11-21 15:54:08.727 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。
[Save Log Job] 2024-11-21 15:54:08.727 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPower，RF set Power:150。
[Save Log Job] 2024-11-21 15:54:08.727 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。
[Save Log Job] 2024-11-21 15:54:08.728 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。
[Save Log Job] 2024-11-21 15:54:08.728 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。
[Save Log Job] 2024-11-21 15:54:08.729 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas1， ramp to 45sccm。
[Save Log Job] 2024-11-21 15:54:08.729 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas5， ramp to 86sccm。
[Save Log Job] 2024-11-21 15:54:08.729 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas3， ramp to 66sccm。
[Save Log Job] 2024-11-21 15:54:08.729 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas2， ramp to 56sccm。
[Save Log Job] 2024-11-21 15:54:08.729 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas4， ramp to 76sccm。
[Save Log Job] 2024-11-21 15:54:08.729 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPowerOnOff，Set RF power On。
[Save Log Job] 2024-11-21 15:54:10.129 LOG.INFO UiEvent.cs Line:51 Event() - System RF GeneratorTolerance alarm：Forward power 18 out of range[149,151] in 1 seconds.
[Save Log Job] 2024-11-21 15:54:10.129 LOG.INFO UiEvent.cs Line:51 Event() - System recipe was aborted: user aborted recipe
[Save Log Job] 2024-11-21 15:54:10.130 LOG.INFO UiEvent.cs Line:51 Event() - Stop monitor pressure stability
[Save Log Job] 2024-11-21 15:54:10.130 LOG.INFO UiEvent.cs Line:51 Event() - System Recipe run completed，Recipe：20241121155300-CACB
Start time：2024/11/21 15:53:38
End time：2024/11/21 15:54:10
Total time：0:0:31
[Save Log Job] 2024-11-21 15:54:10.130 LOG.INFO UiEvent.cs Line:51 Event() - System Recipe completely run
[Save Log Job] 2024-11-21 15:54:10.331 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-11-21 15:54:12.139 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门Process gas final valveClose失败，原因：Valve keep open。
--------------------------------[Header Log]----------------------------------------- [Save Log Job] 2024-11-21 16:08:04.642 LOG.INFO UiEvent.cs Line:58 Event() - 已经连接上设备实时控制系统
[Save Log Job] 2024-11-21 16:08:04.644 LOG.INFO UiEvent.cs Line:58 Event() - 已经连接上设备实时控制系统
[Save Log Job] 2024-11-21 16:08:09.865 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(System_IsMesMode, True)
[Save Log Job] 2024-11-21 16:08:09.904 LOG.INFO UiEvent.cs Line:51 Event() - Software will be expired in -28 days, at 10/24/2024 12:00:00 AM 。
[Save Log Job] 2024-11-21 16:08:09.905 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-11-21 16:08:15.548 LOG.INFO UiEvent.cs Line:51 Event() - User admin login
[Save Log Job] 2024-11-21 16:57:00.474 LOG.INFO UiEvent.cs Line:51 Event() - System PLC heart beat check failed，please confirm PLC still running
[Save Log Job] 2024-11-21 16:57:00.574 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
--------------------------------[Footer Log]-----------------------------------------