Почетна Преглед Помоћ
Регистрација Пријавите Се
JetPlasma
/
Triton_160
Прати 2
Волим 0
Креирај огранак 0
Датотеке Дискусије 0 Захтеви за спајање 0 Вики
Дрво: 11453a84b7
Гране Ознаке
Triton_160
/
Triton160UI
/
bin
/
Debug
/
Logs
/
appLog20241031.txt

appLog20241031.txt 210 KB
Историја Датотека

123456789101112131415161718192021222324252627282930313233343536373839404142434445464748495051525354555657585960616263646566676869707172737475767778798081828384858687888990919293949596979899100101102103104105106107108109110111112113114115116117118119120121122123124125126127128129130131132133134135136137138139140141142143144145146147148149150151152153154155156157158159160161162163164165166167168169170171172173174175176177178179180181182183184185186187188189190191192193194195196197198199200201202203204205206207208209210211212213214215216217218219220221222223224225226227228229230231232233234235236237238239240241242243244245246247248249250251252253254255256257258259260261262263264265266267268269270271272273274275276277278279280281282283284285286287288289290291292293294295296297298299300301302303304305306307308309310311312313314315316317318319320321322323324325326327328329330331332333334335336337338339340341342343344345346347348349350351352353354355356357358359360361362363364365366367368369370371372373374375376377378379380381382383384385386387388389390391392393394395396397398399400401402403404405406407408409410411412413414415416417418419420421422423424425426427428429430431432433434435436437438439440441442443444445446447448449450451452453454455456457458459460461462463464465466467468469470471472473474475476477478479480481482483484485486487488489490491492493494495496497498499500501502503504505506507508509510511512513514515516517518519520521522523524525526527528529530531532533534535536537538539540541542543544545546547548549550551552553554555556557558559560561562563564565566567568569570571572573574575576577578579580581582583584585586587588589590591592593594595596597598599600601602603604605606607608609610611612613614615616617618619620621622623624625626627628629630631632633634635636637638639640641642643644645646647648649650651652653654655656657658659660661662663664665666667668669670671672673674675676677678679680681682683684685686687688689690691692693694695696697698699700701702703704705706707708709710711712713714715716717718719720721722723724725726727728729730731732733734735736737738739740741742743744745746747748749750751752753754755756757758759760761762763764765766767768769770771772773774775776777778779780781782783784785786787788789790791792793794795796797798799800801802803804805806807808809810811812813814815816817818819820821822823824825826827828829830831832833834835836837838839840841842843844845846847848849850851852853854855856857858859860861862863864865866867868869870871872873874875876877878879880881882883884885886887888889890891892893894895896897898899900901902903904905906907908909910911912913914915916917918919920921922923924925926927928929930931932933934935936937938939940941942943944945946947948949950951952953954955956957958959960961962963964965966967968969970971972973974975976977978979980981982983984985986987988989990991992993994995996997998999100010011002100310041005100610071008100910101011101210131014101510161017101810191020102110221023102410251026102710281029103010311032103310341035103610371038103910401041104210431044104510461047104810491050105110521053105410551056105710581059106010611062106310641065106610671068106910701071107210731074107510761077107810791080108110821083108410851086108710881089109010911092109310941095109610971098109911001101110211031104110511061107110811091110111111121113111411151116111711181119112011211122112311241125112611271128112911301131113211331134113511361137113811391140114111421143114411451146114711481149115011511152115311541155115611571158115911601161116211631164116511661167116811691170117111721173117411751176117711781179118011811182118311841185118611871188118911901191119211931194119511961197119811991200120112021203120412051206120712081209121012111212121312141215121612171218121912201221122212231224122512261227122812291230123112321233123412351236123712381239124012411242124312441245124612471248124912501251125212531254125512561257125812591260126112621263126412651266126712681269127012711272127312741275127612771278127912801281128212831284128512861287128812891290129112921293129412951296129712981299130013011302130313041305130613071308130913101311131213131314131513161317131813191320132113221323132413251326132713281329133013311332133313341335133613371338133913401341134213431344134513461347134813491350135113521353135413551356135713581359136013611362136313641365136613671368136913701371137213731374137513761377137813791380138113821383138413851386138713881389139013911392139313941395139613971398139914001401140214031404140514061407140814091410141114121413141414151416141714181419142014211422142314241425142614271428142914301431143214331434143514361437143814391440144114421443144414451446144714481449145014511452145314541455145614571458145914601461146214631464146514661467146814691470147114721473147414751476147714781479148014811482148314841485148614871488148914901491149214931494149514961497149814991500150115021503150415051506150715081509151015111512151315141515151615171518151915201521152215231524152515261527152815291530153115321533153415351536153715381539154015411542154315441545154615471548154915501551155215531554155515561557155815591560156115621563156415651566156715681569157015711572157315741575157615771578157915801581158215831584158515861587158815891590159115921593159415951596159715981599160016011602160316041605160616071608160916101611161216131614161516161617161816191620162116221623162416251626162716281629163016311632163316341635163616371638163916401641164216431644164516461647164816491650165116521653165416551656165716581659 
  1. --------------------------------[Header Log]----------------------------------------- [Save Log Job] 2024-10-31 07:00:53.597 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    2. 

  2. [Save Log Job] 2024-10-31 07:00:53.902 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(System_IsMesMode, True)
    3. 

  3. [Save Log Job] 2024-10-31 07:00:57.043 LOG.INFO UiEvent.cs Line:51 Event() - Software will be expired in -7 days, at 10/24/2024 12:00:00 AM 。
    4. 

  4. [Save Log Job] 2024-10-31 07:01:22.107 LOG.INFO UiEvent.cs Line:51 Event() - User admin login
    5. 

  5. --------------------------------[Footer Log]----------------------------------------- --------------------------------[Header Log]----------------------------------------- [Save Log Job] 2024-10-31 07:02:49.282 LOG.INFO UiEvent.cs Line:58 Event() - 已经连接上设备实时控制系统
    6. 

  6. [Save Log Job] 2024-10-31 07:02:49.291 LOG.INFO UiEvent.cs Line:57 Event() - 已经连接上设备实时控制系统
    7. 

  7. [Save Log Job] 2024-10-31 07:02:51.043 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    8. 

  8. [Save Log Job] 2024-10-31 07:02:51.375 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(System_IsMesMode, True)
    9. 

  9. [Save Log Job] 2024-10-31 07:02:54.507 LOG.INFO UiEvent.cs Line:51 Event() - Software will be expired in -7 days, at 10/24/2024 12:00:00 AM 。
    10. 

  10. [Save Log Job] 2024-10-31 07:03:00.140 LOG.INFO UiEvent.cs Line:51 Event() - User admin login
    11. 

  11. [Save Log Job] 2024-10-31 07:03:05.072 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetAutoMode()
    12. 

  12. [Save Log Job] 2024-10-31 07:03:05.072 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentModeChanged
    13. 

  13. [Save Log Job] 2024-10-31 07:03:05.072 LOG.INFO UiEvent.cs Line:51 Event() - System running mode changed to Auto Mode
    14. 

  14. --------------------------------[Header Log]----------------------------------------- [Save Log Job] 2024-10-31 07:08:28.101 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    15. 

  15. [Save Log Job] 2024-10-31 07:08:28.317 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(System_IsMesMode, True)
    16. 

  16. [Save Log Job] 2024-10-31 07:08:31.736 LOG.INFO UiEvent.cs Line:51 Event() - Software will be expired in -7 days, at 10/24/2024 12:00:00 AM 。
    17. 

  17. [Save Log Job] 2024-10-31 07:08:34.972 LOG.INFO UiEvent.cs Line:51 Event() - User admin login
    18. 

  18. [Save Log Job] 2024-10-31 07:08:37.485 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetAutoMode()
    19. 

  19. [Save Log Job] 2024-10-31 07:08:37.485 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentModeChanged
    20. 

  20. [Save Log Job] 2024-10-31 07:08:37.486 LOG.INFO UiEvent.cs Line:51 Event() - System running mode changed to Auto Mode
    21. 

  21. [Save Log Job] 2024-10-31 07:11:34.113 LOG.INFO UiEvent.cs Line:51 Event() - System PLC heart beat check failed，please confirm PLC still running
    22. 

  22. [Save Log Job] 2024-10-31 07:11:34.645 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    23. 

  23. [Save Log Job] 2024-10-31 07:11:34.646 LOG.ERROR LOG.cs Line:56 Write() - UI exception
    24. 

  24. Newtonsoft.Json.JsonReaderException: Unexpected character encountered while parsing value: <. Path '', line 0, position 0.
    25. 

  25.    在 Newtonsoft.Json.JsonTextReader.ParseValue()
    26. 

  26.    在 Newtonsoft.Json.JsonTextReader.Read()
    27. 

  27.    在 Newtonsoft.Json.JsonReader.ReadForType(JsonContract contract, Boolean hasConverter)
    28. 

  28.    在 Newtonsoft.Json.Serialization.JsonSerializerInternalReader.Deserialize(JsonReader reader, Type objectType, Boolean checkAdditionalContent)
    29. 

  29.    在 Newtonsoft.Json.JsonSerializer.DeserializeInternal(JsonReader reader, Type objectType)
    30. 

  30.    在 Newtonsoft.Json.JsonConvert.DeserializeObject(String value, Type type, JsonSerializerSettings settings)
    31. 

  31.    在 Newtonsoft.Json.JsonConvert.DeserializeObject[T](String value, JsonSerializerSettings settings)
    32. 

  32.    在 Newtonsoft.Json.JsonConvert.DeserializeObject[T](String value)
    33. 

  33.    在 Aitex.Core.MES.JC.JCFabAuto.<GetRecipeByLot>b__6_0(String x) 位置 D:\jet.plasma\trunk\Triton160\Common\Core\MES\JC\JCFabAuto.cs:行号 44
    34. 

  34.    在 System.Collections.Generic.List`1.ForEach(Action`1 action)
    35. 

  35.    在 Aitex.Core.MES.JC.JCFabAuto.GetRecipeByLot(List`1 list) 位置 D:\jet.plasma\trunk\Triton160\Common\Core\MES\JC\JCFabAuto.cs:行号 36
    36. 

  36.    在 Triton160.UI.ViewModel.OverviewViewModel.GetRecipeByMES(Object obj) 位置 D:\jet.plasma\trunk\Triton160\Triton160UI\ViewModel\OverviewViewModel.cs:行号 2268
    37. 

  37.    在 Aitex.Core.UI.MVVM.DelegateCommand`1.Execute(Object parameter) 位置 D:\jet.plasma\trunk\Triton160\Common\Core\UI\MVVM\DelegateCommand.cs:行号 46
    38. 

  38.    在 MS.Internal.Commands.CommandHelpers.CriticalExecuteCommandSource(ICommandSource commandSource, Boolean userInitiated)
    39. 

  39.    在 System.Windows.Controls.Primitives.ButtonBase.OnClick()
    40. 

  40.    在 System.Windows.Controls.Button.OnClick()
    41. 

  41.    在 System.Windows.Controls.Primitives.ButtonBase.OnMouseLeftButtonUp(MouseButtonEventArgs e)
    42. 

  42.    在 System.Windows.UIElement.OnMouseLeftButtonUpThunk(Object sender, MouseButtonEventArgs e)
    43. 

  43.    在 System.Windows.Input.MouseButtonEventArgs.InvokeEventHandler(Delegate genericHandler, Object genericTarget)
    44. 

  44.    在 System.Windows.RoutedEventArgs.InvokeHandler(Delegate handler, Object target)
    45. 

  45.    在 System.Windows.RoutedEventHandlerInfo.InvokeHandler(Object target, RoutedEventArgs routedEventArgs)
    46. 

  46.    在 System.Windows.EventRoute.InvokeHandlersImpl(Object source, RoutedEventArgs args, Boolean reRaised)
    47. 

  47.    在 System.Windows.UIElement.ReRaiseEventAs(DependencyObject sender, RoutedEventArgs args, RoutedEvent newEvent)
    48. 

  48.    在 System.Windows.UIElement.OnMouseUpThunk(Object sender, MouseButtonEventArgs e)
    49. 

  49.    在 System.Windows.Input.MouseButtonEventArgs.InvokeEventHandler(Delegate genericHandler, Object genericTarget)
    50. 

  50.    在 System.Windows.RoutedEventArgs.InvokeHandler(Delegate handler, Object target)
    51. 

  51.    在 System.Windows.RoutedEventHandlerInfo.InvokeHandler(Object target, RoutedEventArgs routedEventArgs)
    52. 

  52.    在 System.Windows.EventRoute.InvokeHandlersImpl(Object source, RoutedEventArgs args, Boolean reRaised)
    53. 

  53.    在 System.Windows.UIElement.RaiseEventImpl(DependencyObject sender, RoutedEventArgs args)
    54. 

  54.    在 System.Windows.UIElement.RaiseTrustedEvent(RoutedEventArgs args)
    55. 

  55.    在 System.Windows.UIElement.RaiseEvent(RoutedEventArgs args, Boolean trusted)
    56. 

  56.    在 System.Windows.Input.InputManager.ProcessStagingArea()
    57. 

  57.    在 System.Windows.Input.InputManager.ProcessInput(InputEventArgs input)
    58. 

  58.    在 System.Windows.Input.InputProviderSite.ReportInput(InputReport inputReport)
    59. 

  59.    在 System.Windows.Interop.HwndMouseInputProvider.ReportInput(IntPtr hwnd, InputMode mode, Int32 timestamp, RawMouseActions actions, Int32 x, Int32 y, Int32 wheel)
    60. 

  60.    在 System.Windows.Interop.HwndMouseInputProvider.FilterMessage(IntPtr hwnd, WindowMessage msg, IntPtr wParam, IntPtr lParam, Boolean& handled)
    61. 

  61.    在 System.Windows.Interop.HwndSource.InputFilterMessage(IntPtr hwnd, Int32 msg, IntPtr wParam, IntPtr lParam, Boolean& handled)
    62. 

  62.    在 MS.Win32.HwndWrapper.WndProc(IntPtr hwnd, Int32 msg, IntPtr wParam, IntPtr lParam, Boolean& handled)
    63. 

  63.    在 MS.Win32.HwndSubclass.DispatcherCallbackOperation(Object o)
    64. 

  64.    在 System.Windows.Threading.ExceptionWrapper.InternalRealCall(Delegate callback, Object args, Int32 numArgs)
    65. 

  65.    在 System.Windows.Threading.ExceptionWrapper.TryCatchWhen(Object source, Delegate callback, Object args, Int32 numArgs, Delegate catchHandler)
    66. 

  66. --------------------------------[Footer Log]----------------------------------------- --------------------------------[Header Log]----------------------------------------- [Save Log Job] 2024-10-31 07:13:07.421 LOG.INFO UiEvent.cs Line:58 Event() - 已经连接上设备实时控制系统
    67. 

  67. [Save Log Job] 2024-10-31 07:13:07.423 LOG.INFO UiEvent.cs Line:58 Event() - 已经连接上设备实时控制系统
    68. 

  68. [Save Log Job] 2024-10-31 07:13:08.927 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(System_IsMesMode, True)
    69. 

  69. [Save Log Job] 2024-10-31 07:13:08.927 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    70. 

  70. [Save Log Job] 2024-10-31 07:13:12.481 LOG.INFO UiEvent.cs Line:51 Event() - Software will be expired in -7 days, at 10/24/2024 12:00:00 AM 。
    71. 

  71. [Save Log Job] 2024-10-31 07:13:15.919 LOG.INFO UiEvent.cs Line:51 Event() - User admin login
    72. 

  72. [Save Log Job] 2024-10-31 07:13:18.332 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetAutoMode()
    73. 

  73. [Save Log Job] 2024-10-31 07:13:18.332 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentModeChanged
    74. 

  74. [Save Log Job] 2024-10-31 07:13:18.333 LOG.INFO UiEvent.cs Line:51 Event() - System running mode changed to Auto Mode
    75. 

  75. --------------------------------[Header Log]----------------------------------------- [Save Log Job] 2024-10-31 07:15:38.169 LOG.INFO UiEvent.cs Line:58 Event() - 已经连接上设备实时控制系统
    76. 

  76. [Save Log Job] 2024-10-31 07:15:38.171 LOG.INFO UiEvent.cs Line:57 Event() - 已经连接上设备实时控制系统
    77. 

  77. [Save Log Job] 2024-10-31 07:15:39.669 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(System_IsMesMode, True)
    78. 

  78. [Save Log Job] 2024-10-31 07:15:39.712 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    79. 

  79. [Save Log Job] 2024-10-31 07:15:43.332 LOG.INFO UiEvent.cs Line:51 Event() - Software will be expired in -7 days, at 10/24/2024 12:00:00 AM 。
    80. 

  80. [Save Log Job] 2024-10-31 07:15:48.191 LOG.INFO UiEvent.cs Line:51 Event() - User admin login
    81. 

  81. [Save Log Job] 2024-10-31 07:15:50.605 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetAutoMode()
    82. 

  82. [Save Log Job] 2024-10-31 07:15:50.606 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentModeChanged
    83. 

  83. [Save Log Job] 2024-10-31 07:15:50.606 LOG.INFO UiEvent.cs Line:51 Event() - System running mode changed to Auto Mode
    84. 

  84. --------------------------------[Header Log]----------------------------------------- [Save Log Job] 2024-10-31 07:17:35.186 LOG.INFO UiEvent.cs Line:58 Event() - 已经连接上设备实时控制系统
    85. 

  85. [Save Log Job] 2024-10-31 07:17:35.186 LOG.INFO UiEvent.cs Line:57 Event() - 已经连接上设备实时控制系统
    86. 

  86. [Save Log Job] 2024-10-31 07:17:36.681 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    87. 

  87. [Save Log Job] 2024-10-31 07:17:36.681 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(System_IsMesMode, True)
    88. 

  88. [Save Log Job] 2024-10-31 07:17:40.247 LOG.INFO UiEvent.cs Line:51 Event() - Software will be expired in -7 days, at 10/24/2024 12:00:00 AM 。
    89. 

  89. [Save Log Job] 2024-10-31 07:17:43.705 LOG.INFO UiEvent.cs Line:51 Event() - User admin login
    90. 

  90. [Save Log Job] 2024-10-31 07:17:55.240 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetAutoMode()
    91. 

  91. [Save Log Job] 2024-10-31 07:17:55.240 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentModeChanged
    92. 

  92. [Save Log Job] 2024-10-31 07:17:55.244 LOG.INFO UiEvent.cs Line:51 Event() - System running mode changed to Auto Mode
    93. 

  93. --------------------------------[Header Log]----------------------------------------- [Save Log Job] 2024-10-31 07:19:14.060 LOG.INFO UiEvent.cs Line:57 Event() - 已经连接上设备实时控制系统
    94. 

  94. [Save Log Job] 2024-10-31 07:19:14.061 LOG.INFO UiEvent.cs Line:58 Event() - 已经连接上设备实时控制系统
    95. 

  95. [Save Log Job] 2024-10-31 07:19:15.591 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(System_IsMesMode, True)
    96. 

  96. [Save Log Job] 2024-10-31 07:19:15.617 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    97. 

  97. [Save Log Job] 2024-10-31 07:19:19.233 LOG.INFO UiEvent.cs Line:51 Event() - Software will be expired in -7 days, at 10/24/2024 12:00:00 AM 。
    98. 

  98. [Save Log Job] 2024-10-31 07:19:25.874 LOG.INFO UiEvent.cs Line:51 Event() - User admin login
    99. 

  99. [Save Log Job] 2024-10-31 07:19:28.588 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetAutoMode()
    100. 

  100. [Save Log Job] 2024-10-31 07:19:28.588 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentModeChanged
    101. 

  101. [Save Log Job] 2024-10-31 07:19:28.589 LOG.INFO UiEvent.cs Line:51 Event() - System running mode changed to Auto Mode
    102. 

  102. [Save Log Job] 2024-10-31 07:29:50.030 LOG.INFO UiEvent.cs Line:51 Event() - System PLC heart beat check failed，please confirm PLC still running
    103. 

  103. [Save Log Job] 2024-10-31 07:29:50.032 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    104. 

  104. --------------------------------[Header Log]----------------------------------------- [Save Log Job] 2024-10-31 07:58:08.809 LOG.INFO UiEvent.cs Line:58 Event() - 已经连接上设备实时控制系统
    105. 

  105. [Save Log Job] 2024-10-31 07:58:10.321 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    106. 

  106. [Save Log Job] 2024-10-31 07:58:10.436 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(System_IsMesMode, True)
    107. 

  107. [Save Log Job] 2024-10-31 07:58:13.853 LOG.INFO UiEvent.cs Line:51 Event() - Software will be expired in -7 days, at 10/24/2024 12:00:00 AM 。
    108. 

  108. [Save Log Job] 2024-10-31 07:58:15.560 LOG.INFO UiEvent.cs Line:51 Event() - User admin login
    109. 

  109. --------------------------------[Footer Log]----------------------------------------- --------------------------------[Header Log]----------------------------------------- [Save Log Job] 2024-10-31 08:21:04.809 LOG.INFO UiEvent.cs Line:57 Event() - 已经连接上设备实时控制系统
    110. 

  110. [Save Log Job] 2024-10-31 08:21:04.811 LOG.INFO UiEvent.cs Line:58 Event() - 已经连接上设备实时控制系统
    111. 

  111. [Save Log Job] 2024-10-31 08:21:06.285 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(System_IsMesMode, True)
    112. 

  112. [Save Log Job] 2024-10-31 08:21:16.800 LOG.INFO UiEvent.cs Line:51 Event() - 'admin' 退出系统。
    113. 

  113. [Save Log Job] 2024-10-31 08:21:16.800 LOG.INFO UiEvent.cs Line:51 Event() - 用户admin强制注销登录,账号admin在其他地点登录
    114. 

  114. [Save Log Job] 2024-10-31 08:21:17.894 LOG.INFO UiEvent.cs Line:51 Event() - User admin login
    115. 

  115. [Save Log Job] 2024-10-31 08:21:24.032 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetAutoMode()
    116. 

  116. [Save Log Job] 2024-10-31 08:21:24.034 LOG.INFO UiEvent.cs Line:51 Event() - System running mode changed to Auto Mode
    117. 

  117. [Save Log Job] 2024-10-31 08:21:24.035 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentModeChanged
    118. 

  118. --------------------------------[Header Log]----------------------------------------- [Save Log Job] 2024-10-31 08:22:34.384 LOG.INFO UiEvent.cs Line:57 Event() - 已经连接上设备实时控制系统
    119. 

  119. [Save Log Job] 2024-10-31 08:22:34.387 LOG.INFO UiEvent.cs Line:58 Event() - 已经连接上设备实时控制系统
    120. 

  120. [Save Log Job] 2024-10-31 08:22:53.818 LOG.INFO UiEvent.cs Line:51 Event() - Software will be expired in -7 days, at 10/24/2024 12:00:00 AM 。
    121. 

  121. [Save Log Job] 2024-10-31 08:23:35.707 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(System_IsMesMode, True)
    122. 

  122. [Save Log Job] 2024-10-31 08:23:47.574 LOG.INFO UiEvent.cs Line:51 Event() - User admin login
    123. 

  123. [Save Log Job] 2024-10-31 08:24:04.986 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetAutoMode()
    124. 

  124. [Save Log Job] 2024-10-31 08:24:04.986 LOG.INFO UiEvent.cs Line:51 Event() - Chamber is in Init，can not do SetAutoMode。
    125. 

  125. [Save Log Job] 2024-10-31 08:24:17.062 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetAutoMode()
    126. 

  126. [Save Log Job] 2024-10-31 08:24:17.062 LOG.INFO UiEvent.cs Line:51 Event() - Chamber is in Init，can not do SetAutoMode。
    127. 

  127. [Save Log Job] 2024-10-31 08:24:26.021 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetAutoMode()
    128. 

  128. [Save Log Job] 2024-10-31 08:24:26.021 LOG.INFO UiEvent.cs Line:51 Event() - Chamber is in Init，can not do SetAutoMode。
    129. 

  129. [Save Log Job] 2024-10-31 08:24:26.624 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetAutoMode()
    130. 

  130. [Save Log Job] 2024-10-31 08:24:26.624 LOG.INFO UiEvent.cs Line:51 Event() - Chamber is in Init，can not do SetAutoMode。
    131. 

  131. [Save Log Job] 2024-10-31 08:24:26.826 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetAutoMode()
    132. 

  132. [Save Log Job] 2024-10-31 08:24:26.826 LOG.INFO UiEvent.cs Line:51 Event() - Chamber is in Init，can not do SetAutoMode。
    133. 

  133. [Save Log Job] 2024-10-31 08:24:27.029 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetAutoMode()
    134. 

  134. [Save Log Job] 2024-10-31 08:24:27.029 LOG.INFO UiEvent.cs Line:51 Event() - Chamber is in Init，can not do SetAutoMode。
    135. 

  135. [Save Log Job] 2024-10-31 08:24:27.230 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetAutoMode()
    136. 

  136. [Save Log Job] 2024-10-31 08:24:27.230 LOG.INFO UiEvent.cs Line:51 Event() - Chamber is in Init，can not do SetAutoMode。
    137. 

  137. [Save Log Job] 2024-10-31 08:24:27.431 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetAutoMode()
    138. 

  138. [Save Log Job] 2024-10-31 08:24:27.431 LOG.INFO UiEvent.cs Line:51 Event() - Chamber is in Init，can not do SetAutoMode。
    139. 

  139. [Save Log Job] 2024-10-31 08:24:27.633 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetAutoMode()
    140. 

  140. [Save Log Job] 2024-10-31 08:24:27.634 LOG.INFO UiEvent.cs Line:51 Event() - Chamber is in Init，can not do SetAutoMode。
    141. 

  141. [Save Log Job] 2024-10-31 08:24:27.834 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetAutoMode()
    142. 

  142. [Save Log Job] 2024-10-31 08:24:27.834 LOG.INFO UiEvent.cs Line:51 Event() - Chamber is in Init，can not do SetAutoMode。
    143. 

  143. [Save Log Job] 2024-10-31 08:25:03.659 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetAutoMode()
    144. 

  144. [Save Log Job] 2024-10-31 08:25:03.661 LOG.INFO UiEvent.cs Line:51 Event() - Chamber is in Init，can not do SetAutoMode。
    145. 

  145. --------------------------------[Footer Log]----------------------------------------- --------------------------------[Header Log]----------------------------------------- [Save Log Job] 2024-10-31 08:25:29.115 LOG.INFO UiEvent.cs Line:58 Event() - 已经连接上设备实时控制系统
    146. 

  146. [Save Log Job] 2024-10-31 08:25:30.587 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(System_IsMesMode, True)
    147. 

  147. [Save Log Job] 2024-10-31 08:25:30.632 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    148. 

  148. [Save Log Job] 2024-10-31 08:25:34.247 LOG.INFO UiEvent.cs Line:51 Event() - Software will be expired in -7 days, at 10/24/2024 12:00:00 AM 。
    149. 

  149. [Save Log Job] 2024-10-31 08:25:39.439 LOG.INFO UiEvent.cs Line:51 Event() - User admin login
    150. 

  150. [Save Log Job] 2024-10-31 08:26:00.341 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetAutoMode()
    151. 

  151. [Save Log Job] 2024-10-31 08:26:00.342 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentModeChanged
    152. 

  152. [Save Log Job] 2024-10-31 08:26:00.342 LOG.INFO UiEvent.cs Line:51 Event() - System running mode changed to Auto Mode
    153. 

  153. [Save Log Job] 2024-10-31 08:26:25.554 LOG.INFO UiEvent.cs Line:51 Event() - Operation RunRecipe(123, )
    154. 

  154. [Save Log Job] 2024-10-31 08:26:25.557 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    155. 

  155. [Save Log Job] 2024-10-31 08:27:07.007 LOG.INFO UiEvent.cs Line:51 Event() - EventLotStart
    156. 

  156. [Save Log Job] 2024-10-31 08:27:27.469 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check door status。
    157. 

  157. [Save Log Job] 2024-10-31 08:27:27.470 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check backpanel door。
    158. 

  158. [Save Log Job] 2024-10-31 08:27:27.470 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check chamber door。
    159. 

  159. [Save Log Job] 2024-10-31 08:27:27.472 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check pump status。
    160. 

  160. [Save Log Job] 2024-10-31 08:27:27.472 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Close all the valves。
    161. 

  161. [Save Log Job] 2024-10-31 08:27:27.570 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Open pumping valve。
    162. 

  162. [Save Log Job] 2024-10-31 08:27:28.685 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check chamber pressure。
    163. 

  163. [Save Log Job] 2024-10-31 08:28:03.668 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Pump below 100mTorr。
    164. 

  164. [Save Log Job] 2024-10-31 08:28:09.953 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：PreProcess Finished in 1.0 minitues。
    165. 

  165. [Save Log Job] 2024-10-31 08:28:34.216 LOG.INFO UiEvent.cs Line:51 Event() - System complete run 'PreProcess'.
    166. 

  166. [Save Log Job] 2024-10-31 08:28:35.092 LOG.INFO UiEvent.cs Line:51 Event() - Run Recipe 20241031082614-123
    167. 

  167. [Save Log Job] 2024-10-31 08:28:35.096 LOG.INFO UiEvent.cs Line:51 Event() - System recipe start run'20241031082614-123'
    168. 

  168. [Save Log Job] 2024-10-31 08:28:59.145 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241031082614-123' start run step 1：initial。
    169. 

  169. [Save Log Job] 2024-10-31 08:28:59.145 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。
    170. 

  170. [Save Log Job] 2024-10-31 08:28:59.145 LOG.INFO UiEvent.cs Line:51 Event() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。
    171. 

  171. [Save Log Job] 2024-10-31 08:28:59.146 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。
    172. 

  172. [Save Log Job] 2024-10-31 08:28:59.147 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。
    173. 

  173. [Save Log Job] 2024-10-31 08:28:59.147 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。
    174. 

  174. [Save Log Job] 2024-10-31 08:28:59.148 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。
    175. 

  175. [Save Log Job] 2024-10-31 08:28:59.148 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。
    176. 

  176. [Save Log Job] 2024-10-31 08:28:59.149 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPower，RF set Power:0。
    177. 

  177. [Save Log Job] 2024-10-31 08:28:59.149 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。
    178. 

  178. [Save Log Job] 2024-10-31 08:28:59.150 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。
    179. 

  179. [Save Log Job] 2024-10-31 08:28:59.150 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。
    180. 

  180. [Save Log Job] 2024-10-31 08:28:59.151 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas1， ramp to 45sccm。
    181. 

  181. [Save Log Job] 2024-10-31 08:28:59.152 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas2， ramp to 56sccm。
    182. 

  182. [Save Log Job] 2024-10-31 08:28:59.153 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas3， ramp to 66sccm。
    183. 

  183. [Save Log Job] 2024-10-31 08:28:59.154 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas4， ramp to 76sccm。
    184. 

  184. [Save Log Job] 2024-10-31 08:28:59.154 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas5， ramp to 86sccm。
    185. 

  185. [Save Log Job] 2024-10-31 08:28:59.155 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPowerOnOff，Set RF power Off。
    186. 

  186. [Save Log Job] 2024-10-31 08:28:59.155 LOG.INFO UiEvent.cs Line:51 Event() - Start monitor pressure stability
    187. 

  187. --------------------------------[Header Log]----------------------------------------- [Save Log Job] 2024-10-31 09:29:19.100 LOG.INFO UiEvent.cs Line:58 Event() - 已经连接上设备实时控制系统
    188. 

  188. [Save Log Job] 2024-10-31 09:29:19.101 LOG.INFO UiEvent.cs Line:57 Event() - 已经连接上设备实时控制系统
    189. 

  189. [Save Log Job] 2024-10-31 09:29:26.125 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(System_IsMesMode, True)
    190. 

  190. [Save Log Job] 2024-10-31 09:29:26.149 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    191. 

  191. [Save Log Job] 2024-10-31 09:29:26.850 LOG.INFO UiEvent.cs Line:51 Event() - Software will be expired in -7 days, at 10/24/2024 12:00:00 AM 。
    192. 

  192. --------------------------------[Header Log]----------------------------------------- [Save Log Job] 2024-10-31 10:25:19.964 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    193. 

  193. [Save Log Job] 2024-10-31 10:25:20.718 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(System_IsMesMode, True)
    194. 

  194. [Save Log Job] 2024-10-31 10:25:23.642 LOG.INFO UiEvent.cs Line:51 Event() - Software will be expired in -7 days, at 10/24/2024 12:00:00 AM 。
    195. 

  195. [Save Log Job] 2024-10-31 10:25:32.918 LOG.INFO UiEvent.cs Line:51 Event() - User admin login
    196. 

  196. [Save Log Job] 2024-10-31 10:25:53.026 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetAutoMode()
    197. 

  197. [Save Log Job] 2024-10-31 10:25:53.026 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentModeChanged
    198. 

  198. [Save Log Job] 2024-10-31 10:25:53.027 LOG.INFO UiEvent.cs Line:51 Event() - System running mode changed to Auto Mode
    199. 

  199. --------------------------------[Header Log]----------------------------------------- [Save Log Job] 2024-10-31 10:39:01.211 LOG.INFO UiEvent.cs Line:58 Event() - 已经连接上设备实时控制系统
    200. 

  200. [Save Log Job] 2024-10-31 10:39:01.212 LOG.INFO UiEvent.cs Line:57 Event() - 已经连接上设备实时控制系统
    201. 

  201. [Save Log Job] 2024-10-31 10:39:02.503 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    202. 

  202. [Save Log Job] 2024-10-31 10:39:02.854 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(System_IsMesMode, True)
    203. 

  203. [Save Log Job] 2024-10-31 10:39:06.065 LOG.INFO UiEvent.cs Line:51 Event() - Software will be expired in -7 days, at 10/24/2024 12:00:00 AM 。
    204. 

  204. [Save Log Job] 2024-10-31 10:39:08.207 LOG.INFO UiEvent.cs Line:51 Event() - User admin login
    205. 

  205. [Save Log Job] 2024-10-31 10:39:21.521 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetAutoMode()
    206. 

  206. [Save Log Job] 2024-10-31 10:39:21.521 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentModeChanged
    207. 

  207. [Save Log Job] 2024-10-31 10:39:21.521 LOG.INFO UiEvent.cs Line:51 Event() - System running mode changed to Auto Mode
    208. 

  208. [Save Log Job] 2024-10-31 10:40:22.545 LOG.INFO YZQZFabAuto.cs Line:95 GetRecipeByMultipleLot() - GetRecipeByMultipleLot|http://192.168.1.207:86/api/mes/GetRecipeByMultipleLot?strQuery=[{"LotId":"EFC241014689","MachineNumber":"22","MachineType":"稷以打胶机"}]
    209. 

  209. [Save Log Job] 2024-10-31 10:40:35.717 LOG.INFO YZQZFabAuto.cs Line:97 GetRecipeByMultipleLot() - GetRecipeByMultipleLot|{"Status":200,"Message":"查询成功","Data":[{"LotId":"EFC241014689","DeviceName":"CPX4BCAYG606L400HNA","RecipeName":"CACB","ComponentQty":11,"Operation":"P极光刻"}]}
    210. 

  210. --------------------------------[Header Log]----------------------------------------- [Save Log Job] 2024-10-31 10:55:41.507 LOG.INFO UiEvent.cs Line:58 Event() - 已经连接上设备实时控制系统
    211. 

  211. [Save Log Job] 2024-10-31 10:55:41.509 LOG.INFO UiEvent.cs Line:57 Event() - 已经连接上设备实时控制系统
    212. 

  212. [Save Log Job] 2024-10-31 10:55:42.545 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    213. 

  213. [Save Log Job] 2024-10-31 10:55:43.005 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(System_IsMesMode, True)
    214. 

  214. [Save Log Job] 2024-10-31 10:55:46.315 LOG.INFO UiEvent.cs Line:51 Event() - Software will be expired in -7 days, at 10/24/2024 12:00:00 AM 。
    215. 

  215. [Save Log Job] 2024-10-31 11:07:10.303 LOG.ERROR LOG.cs Line:51 Write() - 
    216. 

  216. System.NullReferenceException: Object reference not set to an instance of an object.
    217. 

  217.    在 Aitex.Triton160.UI.UiEvent.Stop() 位置 D:\jet.plasma\trunk\Triton160\Triton160UI\UiEvent.cs:行号 32
    218. 

  218.    在 Aitex.Triton160.UI.Triton160UiSystem.Terminate() 位置 D:\jet.plasma\trunk\Triton160\Triton160UI\Triton160UiSystem.cs:行号 134
    219. 

  219. --------------------------------[Footer Log]----------------------------------------- --------------------------------[Header Log]----------------------------------------- [Save Log Job] 2024-10-31 11:35:30.936 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    220. 

  220. [Save Log Job] 2024-10-31 11:35:31.272 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(System_IsMesMode, True)
    221. 

  221. [Save Log Job] 2024-10-31 11:35:34.490 LOG.INFO UiEvent.cs Line:51 Event() - Software will be expired in -7 days, at 10/24/2024 12:00:00 AM 。
    222. 

  222. [Save Log Job] 2024-10-31 11:35:37.815 LOG.INFO UiEvent.cs Line:51 Event() - User admin login
    223. 

  223. [Save Log Job] 2024-10-31 11:35:40.729 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetAutoMode()
    224. 

  224. [Save Log Job] 2024-10-31 11:35:40.729 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentModeChanged
    225. 

  225. [Save Log Job] 2024-10-31 11:35:40.730 LOG.INFO UiEvent.cs Line:51 Event() - System running mode changed to Auto Mode
    226. 

  226. [Save Log Job] 2024-10-31 11:36:24.591 LOG.INFO UiEvent.cs Line:51 Event() - recipe file  123  renamed CACB
    227. 

  227. [Save Log Job] 2024-10-31 11:36:24.591 LOG.INFO UiEvent.cs Line:51 Event() - System Information
    228. 

  228. --------------------------------[Footer Log]----------------------------------------- --------------------------------[Header Log]----------------------------------------- [Save Log Job] 2024-10-31 11:36:37.953 LOG.INFO UiEvent.cs Line:58 Event() - 已经连接上设备实时控制系统
    229. 

  229. [Save Log Job] 2024-10-31 11:36:37.954 LOG.INFO UiEvent.cs Line:57 Event() - 已经连接上设备实时控制系统
    230. 

  230. [Save Log Job] 2024-10-31 11:36:39.272 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(System_IsMesMode, True)
    231. 

  231. [Save Log Job] 2024-10-31 11:36:39.522 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    232. 

  232. [Save Log Job] 2024-10-31 11:36:43.140 LOG.INFO UiEvent.cs Line:51 Event() - Software will be expired in -7 days, at 10/24/2024 12:00:00 AM 。
    233. 

  233. [Save Log Job] 2024-10-31 11:36:44.748 LOG.INFO UiEvent.cs Line:51 Event() - User admin login
    234. 

  234. [Save Log Job] 2024-10-31 11:36:59.527 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetAutoMode()
    235. 

  235. [Save Log Job] 2024-10-31 11:36:59.528 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentModeChanged
    236. 

  236. [Save Log Job] 2024-10-31 11:36:59.528 LOG.INFO UiEvent.cs Line:51 Event() - System running mode changed to Auto Mode
    237. 

  237. [Save Log Job] 2024-10-31 11:37:33.396 LOG.INFO YZQZFabAuto.cs Line:95 GetRecipeByMultipleLot() - GetRecipeByMultipleLot|http://192.168.1.207:86/api/mes/GetRecipeByMultipleLot?strQuery=[{"LotId":"SFC240912810","MachineNumber":"22","MachineType":"稷以打胶机"}]
    238. 

  238. [Save Log Job] 2024-10-31 11:37:33.457 LOG.INFO YZQZFabAuto.cs Line:97 GetRecipeByMultipleLot() - GetRecipeByMultipleLot|{"Status":200,"Message":"查询成功","Data":[{"LotId":"SFC240912810","DeviceName":"CPO4BCALO708U600HNA","RecipeName":"CACB","ComponentQty":13,"Operation":"P极光刻"}]}
    239. 

  239. [Save Log Job] 2024-10-31 11:37:37.346 LOG.INFO UiEvent.cs Line:51 Event() - Operation RunRecipe(CACB, SFC240912810/)
    240. 

  240. [Save Log Job] 2024-10-31 11:37:37.347 LOG.INFO UiEvent.cs Line:51 Event() - EventLotStart
    241. 

  241. [Save Log Job] 2024-10-31 11:37:37.348 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    242. 

  242. [Save Log Job] 2024-10-31 11:37:37.348 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check door status。
    243. 

  243. [Save Log Job] 2024-10-31 11:37:37.348 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check chamber door。
    244. 

  244. [Save Log Job] 2024-10-31 11:37:37.349 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check backpanel door。
    245. 

  245. [Save Log Job] 2024-10-31 11:37:37.349 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check pump status。
    246. 

  246. [Save Log Job] 2024-10-31 11:37:37.349 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Close all the valves。
    247. 

  247. [Save Log Job] 2024-10-31 11:37:37.452 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Open pumping valve。
    248. 

  248. [Save Log Job] 2024-10-31 11:37:38.355 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check chamber pressure。
    249. 

  249. [Save Log Job] 2024-10-31 11:38:13.317 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Pump below 100mTorr。
    250. 

  250. [Save Log Job] 2024-10-31 11:38:13.317 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：PreProcess Finished in 0.6 minitues。
    251. 

  251. [Save Log Job] 2024-10-31 11:38:13.319 LOG.INFO UiEvent.cs Line:51 Event() - System complete run 'PreProcess'.
    252. 

  252. [Save Log Job] 2024-10-31 11:38:13.320 LOG.INFO UiEvent.cs Line:51 Event() - Run Recipe 20241031113737-CACB
    253. 

  253. [Save Log Job] 2024-10-31 11:38:13.320 LOG.INFO UiEvent.cs Line:51 Event() - System recipe start run'20241031113737-CACB'
    254. 

  254. [Save Log Job] 2024-10-31 11:38:13.416 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241031113737-CACB' start run step 1：initial。
    255. 

  255. [Save Log Job] 2024-10-31 11:38:13.416 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。
    256. 

  256. [Save Log Job] 2024-10-31 11:38:13.417 LOG.INFO UiEvent.cs Line:51 Event() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。
    257. 

  257. [Save Log Job] 2024-10-31 11:38:13.417 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。
    258. 

  258. [Save Log Job] 2024-10-31 11:38:13.417 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。
    259. 

  259. [Save Log Job] 2024-10-31 11:38:13.418 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。
    260. 

  260. [Save Log Job] 2024-10-31 11:38:13.418 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。
    261. 

  261. [Save Log Job] 2024-10-31 11:38:13.419 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。
    262. 

  262. [Save Log Job] 2024-10-31 11:38:13.419 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPower，RF set Power:0。
    263. 

  263. [Save Log Job] 2024-10-31 11:38:13.420 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。
    264. 

  264. [Save Log Job] 2024-10-31 11:38:13.420 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。
    265. 

  265. [Save Log Job] 2024-10-31 11:38:13.421 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。
    266. 

  266. [Save Log Job] 2024-10-31 11:38:13.421 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas1， ramp to 45sccm。
    267. 

  267. [Save Log Job] 2024-10-31 11:38:13.421 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas2， ramp to 56sccm。
    268. 

  268. [Save Log Job] 2024-10-31 11:38:13.422 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas3， ramp to 66sccm。
    269. 

  269. [Save Log Job] 2024-10-31 11:38:13.422 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas4， ramp to 76sccm。
    270. 

  270. [Save Log Job] 2024-10-31 11:38:13.423 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas5， ramp to 86sccm。
    271. 

  271. [Save Log Job] 2024-10-31 11:38:13.423 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPowerOnOff，Set RF power Off。
    272. 

  272. [Save Log Job] 2024-10-31 11:38:13.423 LOG.INFO UiEvent.cs Line:51 Event() - Start monitor pressure stability
    273. 

  273. [Save Log Job] 2024-10-31 11:38:43.491 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241031113737-CACB' end step 1
    274. 

  274. [Save Log Job] 2024-10-31 11:38:43.491 LOG.INFO UiEvent.cs Line:51 Event() - Stop monitor pressure stability
    275. 

  275. [Save Log Job] 2024-10-31 11:38:43.491 LOG.INFO UiEvent.cs Line:51 Event() - System Recipe run completed，Recipe：20241031113737-CACB
    276. 

  276. Start time：2024/10/31 11:38:13
    277. 

  277. End time：2024/10/31 11:38:43
    278. 

  278. Total time：0:0:30
    279. 

  279. [Save Log Job] 2024-10-31 11:38:43.492 LOG.INFO UiEvent.cs Line:51 Event() - System Recipe completely run
    280. 

  280. [Save Log Job] 2024-10-31 11:38:43.492 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, wait for 10 seconds
    281. 

  281. [Save Log Job] 2024-10-31 11:38:45.503 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC1 ValveClose失败，原因：Valve keep open。
    282. 

  282. [Save Log Job] 2024-10-31 11:38:45.503 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC2 ValveClose失败，原因：Valve keep open。
    283. 

  283. [Save Log Job] 2024-10-31 11:38:45.504 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC3 ValveClose失败，原因：Valve keep open。
    284. 

  284. [Save Log Job] 2024-10-31 11:38:45.505 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC4 ValveClose失败，原因：Valve keep open。
    285. 

  285. [Save Log Job] 2024-10-31 11:38:45.505 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC5 ValveClose失败，原因：Valve keep open。
    286. 

  286. [Save Log Job] 2024-10-31 11:38:45.505 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门Process gas final valveClose失败，原因：Valve keep open。
    287. 

  287. [Save Log Job] 2024-10-31 11:38:53.574 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, RF Power Off
    288. 

  288. [Save Log Job] 2024-10-31 11:38:53.668 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, Stop all the gas flow
    289. 

  289. [Save Log Job] 2024-10-31 11:38:59.505 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, Close all the valves
    290. 

  290. [Save Log Job] 2024-10-31 11:38:59.605 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, close pump valve
    291. 

  291. [Save Log Job] 2024-10-31 11:39:01.618 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门Chamber pumping valveClose失败，原因：Valve keep open。
    292. 

  292. [Save Log Job] 2024-10-31 11:39:02.933 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, delay 3 seconds
    293. 

  293. [Save Log Job] 2024-10-31 11:39:06.059 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, vent 50 seconds
    294. 

  294. [Save Log Job] 2024-10-31 11:39:56.169 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, Close vent valve
    295. 

  295. [Save Log Job] 2024-10-31 11:39:56.974 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, PostProcess Finished in 1.2 minitues
    296. 

  296. [Save Log Job] 2024-10-31 11:39:56.974 LOG.INFO UiEvent.cs Line:51 Event() - System complete run 'PostProcess'.
    297. 

  297. [Save Log Job] 2024-10-31 11:39:56.975 LOG.INFO UiEvent.cs Line:51 Event() - EventLotFinished
    298. 

  298. [Save Log Job] 2024-10-31 11:39:57.075 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    299. 

  299. --------------------------------[Header Log]----------------------------------------- [Save Log Job] 2024-10-31 11:49:40.138 LOG.INFO UiEvent.cs Line:58 Event() - 已经连接上设备实时控制系统
    300. 

  300. [Save Log Job] 2024-10-31 11:49:40.139 LOG.INFO UiEvent.cs Line:57 Event() - 已经连接上设备实时控制系统
    301. 

  301. [Save Log Job] 2024-10-31 11:49:41.487 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    302. 

  302. [Save Log Job] 2024-10-31 11:49:41.916 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(System_IsMesMode, True)
    303. 

  303. [Save Log Job] 2024-10-31 11:49:45.133 LOG.INFO UiEvent.cs Line:51 Event() - Software will be expired in -7 days, at 10/24/2024 12:00:00 AM 。
    304. 

  304. [Save Log Job] 2024-10-31 11:49:51.594 LOG.INFO UiEvent.cs Line:51 Event() - User admin login
    305. 

  305. [Save Log Job] 2024-10-31 11:50:04.346 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetAutoMode()
    306. 

  306. [Save Log Job] 2024-10-31 11:50:04.346 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentModeChanged
    307. 

  307. [Save Log Job] 2024-10-31 11:50:04.346 LOG.INFO UiEvent.cs Line:51 Event() - System running mode changed to Auto Mode
    308. 

  308. [Save Log Job] 2024-10-31 11:50:15.108 LOG.INFO YZQZFabAuto.cs Line:95 GetRecipeByMultipleLot() - GetRecipeByMultipleLot|http://192.168.1.207:86/api/mes/GetRecipeByMultipleLot?strQuery=[{"LotId":"SFC240912810","MachineNumber":"22","MachineType":"稷以打胶机"}]
    309. 

  309. [Save Log Job] 2024-10-31 11:50:15.163 LOG.INFO YZQZFabAuto.cs Line:97 GetRecipeByMultipleLot() - GetRecipeByMultipleLot|{"Status":200,"Message":"查询成功","Data":[{"LotId":"SFC240912810","DeviceName":"CPO4BCALO708U600HNA","RecipeName":"CACB","ComponentQty":13,"Operation":"P极光刻"}]}
    310. 

  310. [Save Log Job] 2024-10-31 11:50:17.426 LOG.INFO UiEvent.cs Line:51 Event() - Operation RunRecipe(CACB, SFC240912810/)
    311. 

  311. [Save Log Job] 2024-10-31 11:50:17.426 LOG.INFO UiEvent.cs Line:51 Event() - EventLotStart
    312. 

  312. [Save Log Job] 2024-10-31 11:50:17.526 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check door status。
    313. 

  313. [Save Log Job] 2024-10-31 11:50:17.526 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check chamber door。
    314. 

  314. [Save Log Job] 2024-10-31 11:50:17.526 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check backpanel door。
    315. 

  315. [Save Log Job] 2024-10-31 11:50:17.530 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check pump status。
    316. 

  316. [Save Log Job] 2024-10-31 11:50:17.530 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Close all the valves。
    317. 

  317. [Save Log Job] 2024-10-31 11:50:17.530 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    318. 

  318. [Save Log Job] 2024-10-31 11:50:17.530 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Open pumping valve。
    319. 

  319. [Save Log Job] 2024-10-31 11:50:19.544 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门Chamber pumping valveOpen失败，原因：Valve keep closed 。
    320. 

  320. [Save Log Job] 2024-10-31 11:50:21.161 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check chamber pressure。
    321. 

  321. [Save Log Job] 2024-10-31 11:51:03.770 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Pump below 100mTorr。
    322. 

  322. [Save Log Job] 2024-10-31 11:51:03.871 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：PreProcess Finished in 0.8 minitues。
    323. 

  323. [Save Log Job] 2024-10-31 11:51:03.871 LOG.INFO UiEvent.cs Line:51 Event() - System complete run 'PreProcess'.
    324. 

  324. [Save Log Job] 2024-10-31 11:51:03.871 LOG.INFO UiEvent.cs Line:51 Event() - Run Recipe 20241031115017-CACB
    325. 

  325. [Save Log Job] 2024-10-31 11:51:03.872 LOG.INFO UiEvent.cs Line:51 Event() - System recipe start run'20241031115017-CACB'
    326. 

  326. [Save Log Job] 2024-10-31 11:51:03.872 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241031115017-CACB' start run step 1：initial。
    327. 

  327. [Save Log Job] 2024-10-31 11:51:03.873 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。
    328. 

  328. [Save Log Job] 2024-10-31 11:51:03.873 LOG.INFO UiEvent.cs Line:51 Event() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。
    329. 

  329. [Save Log Job] 2024-10-31 11:51:03.874 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。
    330. 

  330. [Save Log Job] 2024-10-31 11:51:03.874 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。
    331. 

  331. [Save Log Job] 2024-10-31 11:51:03.874 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。
    332. 

  332. [Save Log Job] 2024-10-31 11:51:03.875 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。
    333. 

  333. [Save Log Job] 2024-10-31 11:51:03.875 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。
    334. 

  334. [Save Log Job] 2024-10-31 11:51:03.875 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPower，RF set Power:0。
    335. 

  335. [Save Log Job] 2024-10-31 11:51:03.875 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。
    336. 

  336. [Save Log Job] 2024-10-31 11:51:03.876 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。
    337. 

  337. [Save Log Job] 2024-10-31 11:51:03.876 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。
    338. 

  338. [Save Log Job] 2024-10-31 11:51:03.877 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas1， ramp to 45sccm。
    339. 

  339. [Save Log Job] 2024-10-31 11:51:03.877 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas2， ramp to 56sccm。
    340. 

  340. [Save Log Job] 2024-10-31 11:51:03.877 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas3， ramp to 66sccm。
    341. 

  341. [Save Log Job] 2024-10-31 11:51:03.878 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas4， ramp to 76sccm。
    342. 

  342. [Save Log Job] 2024-10-31 11:51:03.878 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas5， ramp to 86sccm。
    343. 

  343. [Save Log Job] 2024-10-31 11:51:03.878 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPowerOnOff，Set RF power Off。
    344. 

  344. [Save Log Job] 2024-10-31 11:51:03.972 LOG.INFO UiEvent.cs Line:51 Event() - Start monitor pressure stability
    345. 

  345. [Save Log Job] 2024-10-31 11:51:33.942 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241031115017-CACB' end step 1
    346. 

  346. [Save Log Job] 2024-10-31 11:51:33.942 LOG.INFO UiEvent.cs Line:51 Event() - Stop monitor pressure stability
    347. 

  347. [Save Log Job] 2024-10-31 11:51:33.943 LOG.INFO UiEvent.cs Line:51 Event() - System Recipe run completed，Recipe：20241031115017-CACB
    348. 

  348. Start time：2024/10/31 11:51:03
    349. 

  349. End time：2024/10/31 11:51:33
    350. 

  350. Total time：0:0:30
    351. 

  351. [Save Log Job] 2024-10-31 11:51:33.943 LOG.INFO UiEvent.cs Line:51 Event() - System Recipe completely run
    352. 

  352. [Save Log Job] 2024-10-31 11:51:34.043 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, wait for 10 seconds
    353. 

  353. [Save Log Job] 2024-10-31 11:51:35.959 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC1 ValveClose失败，原因：Valve keep open。
    354. 

  354. [Save Log Job] 2024-10-31 11:51:35.959 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC2 ValveClose失败，原因：Valve keep open。
    355. 

  355. [Save Log Job] 2024-10-31 11:51:35.959 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC3 ValveClose失败，原因：Valve keep open。
    356. 

  356. [Save Log Job] 2024-10-31 11:51:35.960 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC4 ValveClose失败，原因：Valve keep open。
    357. 

  357. [Save Log Job] 2024-10-31 11:51:35.960 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC5 ValveClose失败，原因：Valve keep open。
    358. 

  358. [Save Log Job] 2024-10-31 11:51:35.960 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门Process gas final valveClose失败，原因：Valve keep open。
    359. 

  359. [Save Log Job] 2024-10-31 11:51:44.114 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, RF Power Off
    360. 

  360. [Save Log Job] 2024-10-31 11:51:44.116 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, Stop all the gas flow
    361. 

  361. [Save Log Job] 2024-10-31 11:51:49.953 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, Close all the valves
    362. 

  362. [Save Log Job] 2024-10-31 11:51:49.953 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, close pump valve
    363. 

  363. [Save Log Job] 2024-10-31 11:51:51.967 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门Chamber pumping valveClose失败，原因：Valve keep open。
    364. 

  364. [Save Log Job] 2024-10-31 11:51:53.274 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, delay 3 seconds
    365. 

  365. [Save Log Job] 2024-10-31 11:51:56.397 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, vent 50 seconds
    366. 

  366. [Save Log Job] 2024-10-31 11:52:46.476 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, Close vent valve
    367. 

  367. --------------------------------[Header Log]----------------------------------------- [Save Log Job] 2024-10-31 11:54:04.079 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(System_IsMesMode, True)
    368. 

  368. [Save Log Job] 2024-10-31 11:54:04.079 LOG.INFO UiEvent.cs Line:50 Event() - EventEquipmentStatusChanged
    369. 

  369. [Save Log Job] 2024-10-31 11:54:07.742 LOG.INFO UiEvent.cs Line:51 Event() - Software will be expired in -7 days, at 10/24/2024 12:00:00 AM 。
    370. 

  370. [Save Log Job] 2024-10-31 11:54:11.903 LOG.INFO UiEvent.cs Line:51 Event() - User admin login
    371. 

  371. [Save Log Job] 2024-10-31 11:54:16.499 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetAutoMode()
    372. 

  372. [Save Log Job] 2024-10-31 11:54:16.500 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentModeChanged
    373. 

  373. [Save Log Job] 2024-10-31 11:54:16.500 LOG.INFO UiEvent.cs Line:51 Event() - System running mode changed to Auto Mode
    374. 

  374. [Save Log Job] 2024-10-31 11:54:24.717 LOG.INFO YZQZFabAuto.cs Line:95 GetRecipeByMultipleLot() - GetRecipeByMultipleLot|http://192.168.1.207:86/api/mes/GetRecipeByMultipleLot?strQuery=[{"LotId":"SFC240912810","MachineNumber":"22","MachineType":"稷以打胶机"}]
    375. 

  375. [Save Log Job] 2024-10-31 11:54:24.782 LOG.INFO YZQZFabAuto.cs Line:97 GetRecipeByMultipleLot() - GetRecipeByMultipleLot|{"Status":200,"Message":"查询成功","Data":[{"LotId":"SFC240912810","DeviceName":"CPO4BCALO708U600HNA","RecipeName":"CACB","ComponentQty":13,"Operation":"P极光刻"}]}
    376. 

  376. [Save Log Job] 2024-10-31 11:54:26.366 LOG.INFO UiEvent.cs Line:51 Event() - Operation RunRecipe(CACB, SFC240912810/)
    377. 

  377. [Save Log Job] 2024-10-31 11:54:26.366 LOG.INFO UiEvent.cs Line:51 Event() - EventLotStart
    378. 

  378. [Save Log Job] 2024-10-31 11:54:26.466 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check door status。
    379. 

  379. [Save Log Job] 2024-10-31 11:54:26.466 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check chamber door。
    380. 

  380. [Save Log Job] 2024-10-31 11:54:26.466 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check backpanel door。
    381. 

  381. [Save Log Job] 2024-10-31 11:54:26.467 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check pump status。
    382. 

  382. [Save Log Job] 2024-10-31 11:54:26.467 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Close all the valves。
    383. 

  383. [Save Log Job] 2024-10-31 11:54:26.468 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Open pumping valve。
    384. 

  384. [Save Log Job] 2024-10-31 11:54:26.567 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    385. 

  385. [Save Log Job] 2024-10-31 11:54:28.480 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check chamber pressure。
    386. 

  386. [Save Log Job] 2024-10-31 11:55:07.151 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Pump below 100mTorr。
    387. 

  387. [Save Log Job] 2024-10-31 11:55:07.251 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：PreProcess Finished in 0.7 minitues。
    388. 

  388. [Save Log Job] 2024-10-31 11:55:07.251 LOG.INFO UiEvent.cs Line:51 Event() - System complete run 'PreProcess'.
    389. 

  389. [Save Log Job] 2024-10-31 11:55:07.253 LOG.INFO UiEvent.cs Line:51 Event() - System recipe start run'20241031115426-CACB'
    390. 

  390. [Save Log Job] 2024-10-31 11:55:07.253 LOG.INFO UiEvent.cs Line:51 Event() - Run Recipe 20241031115426-CACB
    391. 

  391. [Save Log Job] 2024-10-31 11:55:07.254 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241031115426-CACB' start run step 1：initial。
    392. 

  392. [Save Log Job] 2024-10-31 11:55:07.255 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。
    393. 

  393. [Save Log Job] 2024-10-31 11:55:07.255 LOG.INFO UiEvent.cs Line:51 Event() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。
    394. 

  394. [Save Log Job] 2024-10-31 11:55:07.257 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。
    395. 

  395. [Save Log Job] 2024-10-31 11:55:07.257 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。
    396. 

  396. [Save Log Job] 2024-10-31 11:55:07.257 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。
    397. 

  397. [Save Log Job] 2024-10-31 11:55:07.257 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。
    398. 

  398. [Save Log Job] 2024-10-31 11:55:07.259 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。
    399. 

  399. [Save Log Job] 2024-10-31 11:55:07.259 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。
    400. 

  400. [Save Log Job] 2024-10-31 11:55:07.259 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。
    401. 

  401. [Save Log Job] 2024-10-31 11:55:07.259 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPower，RF set Power:0。
    402. 

  402. [Save Log Job] 2024-10-31 11:55:07.259 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas1， ramp to 45sccm。
    403. 

  403. [Save Log Job] 2024-10-31 11:55:07.259 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。
    404. 

  404. [Save Log Job] 2024-10-31 11:55:07.259 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas2， ramp to 56sccm。
    405. 

  405. [Save Log Job] 2024-10-31 11:55:07.259 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas3， ramp to 66sccm。
    406. 

  406. [Save Log Job] 2024-10-31 11:55:07.260 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas4， ramp to 76sccm。
    407. 

  407. [Save Log Job] 2024-10-31 11:55:07.260 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas5， ramp to 86sccm。
    408. 

  408. [Save Log Job] 2024-10-31 11:55:07.260 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPowerOnOff，Set RF power Off。
    409. 

  409. [Save Log Job] 2024-10-31 11:55:07.354 LOG.INFO UiEvent.cs Line:51 Event() - Start monitor pressure stability
    410. 

  410. [Save Log Job] 2024-10-31 11:55:37.343 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241031115426-CACB' end step 1
    411. 

  411. [Save Log Job] 2024-10-31 11:55:37.343 LOG.INFO UiEvent.cs Line:51 Event() - Stop monitor pressure stability
    412. 

  412. [Save Log Job] 2024-10-31 11:55:37.344 LOG.INFO UiEvent.cs Line:51 Event() - System Recipe run completed，Recipe：20241031115426-CACB
    413. 

  413. Start time：2024/10/31 11:55:07
    414. 

  414. End time：2024/10/31 11:55:37
    415. 

  415. Total time：0:0:30
    416. 

  416. [Save Log Job] 2024-10-31 11:55:37.344 LOG.INFO UiEvent.cs Line:51 Event() - System Recipe completely run
    417. 

  417. [Save Log Job] 2024-10-31 11:55:37.444 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, wait for 10 seconds
    418. 

  418. [Save Log Job] 2024-10-31 11:55:39.377 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC1 ValveClose失败，原因：Valve keep open。
    419. 

  419. [Save Log Job] 2024-10-31 11:55:39.378 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC2 ValveClose失败，原因：Valve keep open。
    420. 

  420. [Save Log Job] 2024-10-31 11:55:39.380 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC4 ValveClose失败，原因：Valve keep open。
    421. 

  421. [Save Log Job] 2024-10-31 11:55:39.380 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC3 ValveClose失败，原因：Valve keep open。
    422. 

  422. [Save Log Job] 2024-10-31 11:55:39.380 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC5 ValveClose失败，原因：Valve keep open。
    423. 

  423. [Save Log Job] 2024-10-31 11:55:39.380 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门Process gas final valveClose失败，原因：Valve keep open。
    424. 

  424. [Save Log Job] 2024-10-31 11:55:47.544 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, RF Power Off
    425. 

  425. [Save Log Job] 2024-10-31 11:55:47.544 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, Stop all the gas flow
    426. 

  426. [Save Log Job] 2024-10-31 11:55:53.390 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, Close all the valves
    427. 

  427. [Save Log Job] 2024-10-31 11:55:53.390 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, close pump valve
    428. 

  428. [Save Log Job] 2024-10-31 11:55:55.412 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门Chamber pumping valveClose失败，原因：Valve keep open。
    429. 

  429. [Save Log Job] 2024-10-31 11:55:56.714 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, delay 3 seconds
    430. 

  430. [Save Log Job] 2024-10-31 11:55:59.840 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, vent 50 seconds
    431. 

  431. [Save Log Job] 2024-10-31 11:56:49.933 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, Close vent valve
    432. 

  432. [Save Log Job] 2024-10-31 11:56:55.245 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, PostProcess Finished in 1.2 minitues
    433. 

  433. --------------------------------[Header Log]----------------------------------------- [Save Log Job] 2024-10-31 12:31:07.371 LOG.INFO UiEvent.cs Line:57 Event() - 已经连接上设备实时控制系统
    434. 

  434. [Save Log Job] 2024-10-31 12:31:07.372 LOG.INFO UiEvent.cs Line:58 Event() - 已经连接上设备实时控制系统
    435. 

  435. [Save Log Job] 2024-10-31 12:31:08.640 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    436. 

  436. [Save Log Job] 2024-10-31 12:31:09.089 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(System_IsMesMode, True)
    437. 

  437. [Save Log Job] 2024-10-31 12:31:12.310 LOG.INFO UiEvent.cs Line:51 Event() - Software will be expired in -7 days, at 10/24/2024 12:00:00 AM 。
    438. 

  438. [Save Log Job] 2024-10-31 12:31:15.944 LOG.INFO UiEvent.cs Line:51 Event() - User admin login
    439. 

  439. [Save Log Job] 2024-10-31 12:31:27.422 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetAutoMode()
    440. 

  440. [Save Log Job] 2024-10-31 12:31:27.422 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentModeChanged
    441. 

  441. [Save Log Job] 2024-10-31 12:31:27.422 LOG.INFO UiEvent.cs Line:51 Event() - System running mode changed to Auto Mode
    442. 

  442. [Save Log Job] 2024-10-31 12:31:51.887 LOG.INFO YZQZFabAuto.cs Line:95 GetRecipeByMultipleLot() - GetRecipeByMultipleLot|http://192.168.1.207:86/api/mes/GetRecipeByMultipleLot?strQuery=[{"LotId":"SFC240912810","MachineNumber":"22","MachineType":"稷以打胶机"}]
    443. 

  443. [Save Log Job] 2024-10-31 12:32:17.680 LOG.INFO YZQZFabAuto.cs Line:97 GetRecipeByMultipleLot() - GetRecipeByMultipleLot|The request was aborted: The operation has timed out.
    444. 

  444. [Save Log Job] 2024-10-31 12:32:29.048 LOG.INFO YZQZFabAuto.cs Line:95 GetRecipeByMultipleLot() - GetRecipeByMultipleLot|http://192.168.1.207:86/api/mes/GetRecipeByMultipleLot?strQuery=[{"LotId":"SFC240912810","MachineNumber":"22","MachineType":"稷以打胶机"}]
    445. 

  445. [Save Log Job] 2024-10-31 12:32:29.112 LOG.INFO YZQZFabAuto.cs Line:97 GetRecipeByMultipleLot() - GetRecipeByMultipleLot|{"Status":200,"Message":"查询成功","Data":[{"LotId":"SFC240912810","DeviceName":"CPO4BCALO708U600HNA","RecipeName":"CACB","ComponentQty":13,"Operation":"P极光刻"}]}
    446. 

  446. [Save Log Job] 2024-10-31 12:33:15.393 LOG.INFO UiEvent.cs Line:51 Event() - Operation RunRecipe(CACB, SFC240912810/)
    447. 

  447. [Save Log Job] 2024-10-31 12:33:15.494 LOG.INFO UiEvent.cs Line:51 Event() - EventLotStart
    448. 

  448. [Save Log Job] 2024-10-31 12:33:15.495 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check chamber door。
    449. 

  449. [Save Log Job] 2024-10-31 12:33:15.495 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check door status。
    450. 

  450. [Save Log Job] 2024-10-31 12:33:15.495 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check backpanel door。
    451. 

  451. [Save Log Job] 2024-10-31 12:33:15.495 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check pump status。
    452. 

  452. [Save Log Job] 2024-10-31 12:33:15.497 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Close all the valves。
    453. 

  453. [Save Log Job] 2024-10-31 12:33:15.497 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    454. 

  454. [Save Log Job] 2024-10-31 12:33:15.594 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Open pumping valve。
    455. 

  455. [Save Log Job] 2024-10-31 12:33:17.605 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门Chamber pumping valveOpen失败，原因：Valve keep closed 。
    456. 

  456. [Save Log Job] 2024-10-31 12:33:19.419 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check chamber pressure。
    457. 

  457. [Save Log Job] 2024-10-31 12:33:54.378 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Pump below 100mTorr。
    458. 

  458. [Save Log Job] 2024-10-31 12:33:54.479 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：PreProcess Finished in 0.6 minitues。
    459. 

  459. [Save Log Job] 2024-10-31 12:33:54.479 LOG.INFO UiEvent.cs Line:51 Event() - System complete run 'PreProcess'.
    460. 

  460. [Save Log Job] 2024-10-31 12:33:54.479 LOG.INFO UiEvent.cs Line:51 Event() - Run Recipe 20241031123315-CACB
    461. 

  461. [Save Log Job] 2024-10-31 12:33:54.481 LOG.INFO UiEvent.cs Line:51 Event() - System recipe start run'20241031123315-CACB'
    462. 

  462. [Save Log Job] 2024-10-31 12:33:54.482 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。
    463. 

  463. [Save Log Job] 2024-10-31 12:33:54.482 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241031123315-CACB' start run step 1：initial。
    464. 

  464. [Save Log Job] 2024-10-31 12:33:54.482 LOG.INFO UiEvent.cs Line:51 Event() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。
    465. 

  465. [Save Log Job] 2024-10-31 12:33:54.482 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。
    466. 

  466. [Save Log Job] 2024-10-31 12:33:54.482 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。
    467. 

  467. [Save Log Job] 2024-10-31 12:33:54.482 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。
    468. 

  468. [Save Log Job] 2024-10-31 12:33:54.485 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPower，RF set Power:0。
    469. 

  469. [Save Log Job] 2024-10-31 12:33:54.485 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。
    470. 

  470. [Save Log Job] 2024-10-31 12:33:54.485 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。
    471. 

  471. [Save Log Job] 2024-10-31 12:33:54.485 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。
    472. 

  472. [Save Log Job] 2024-10-31 12:33:54.486 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。
    473. 

  473. [Save Log Job] 2024-10-31 12:33:54.486 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。
    474. 

  474. [Save Log Job] 2024-10-31 12:33:54.486 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas1， ramp to 45sccm。
    475. 

  475. [Save Log Job] 2024-10-31 12:33:54.486 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas2， ramp to 56sccm。
    476. 

  476. [Save Log Job] 2024-10-31 12:33:54.488 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas5， ramp to 86sccm。
    477. 

  477. [Save Log Job] 2024-10-31 12:33:54.488 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPowerOnOff，Set RF power Off。
    478. 

  478. [Save Log Job] 2024-10-31 12:33:54.488 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas4， ramp to 76sccm。
    479. 

  479. [Save Log Job] 2024-10-31 12:33:54.489 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas3， ramp to 66sccm。
    480. 

  480. [Save Log Job] 2024-10-31 12:33:54.579 LOG.INFO UiEvent.cs Line:51 Event() - Start monitor pressure stability
    481. 

  481. [Save Log Job] 2024-10-31 12:34:24.564 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241031123315-CACB' end step 1
    482. 

  482. [Save Log Job] 2024-10-31 12:34:24.564 LOG.INFO UiEvent.cs Line:51 Event() - Stop monitor pressure stability
    483. 

  483. [Save Log Job] 2024-10-31 12:34:24.566 LOG.INFO UiEvent.cs Line:51 Event() - System Recipe run completed，Recipe：20241031123315-CACB
    484. 

  484. Start time：2024/10/31 12:33:54
    485. 

  485. End time：2024/10/31 12:34:24
    486. 

  486. Total time：0:0:30
    487. 

  487. [Save Log Job] 2024-10-31 12:34:24.566 LOG.INFO UiEvent.cs Line:51 Event() - System Recipe completely run
    488. 

  488. [Save Log Job] 2024-10-31 12:34:24.566 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, wait for 10 seconds
    489. 

  489. [Save Log Job] 2024-10-31 12:34:56.834 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC1 ValveClose失败，原因：Valve keep open。
    490. 

  490. [Save Log Job] 2024-10-31 12:34:56.836 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC2 ValveClose失败，原因：Valve keep open。
    491. 

  491. [Save Log Job] 2024-10-31 12:34:56.837 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC3 ValveClose失败，原因：Valve keep open。
    492. 

  492. [Save Log Job] 2024-10-31 12:34:56.838 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC4 ValveClose失败，原因：Valve keep open。
    493. 

  493. [Save Log Job] 2024-10-31 12:34:56.838 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC5 ValveClose失败，原因：Valve keep open。
    494. 

  494. [Save Log Job] 2024-10-31 12:34:56.845 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门Process gas final valveClose失败，原因：Valve keep open。
    495. 

  495. [Save Log Job] 2024-10-31 12:34:56.847 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, RF Power Off
    496. 

  496. [Save Log Job] 2024-10-31 12:34:56.932 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, Stop all the gas flow
    497. 

  497. [Save Log Job] 2024-10-31 12:35:17.910 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, Close all the valves
    498. 

  498. [Save Log Job] 2024-10-31 12:35:18.011 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, close pump valve
    499. 

  499. [Save Log Job] 2024-10-31 12:35:20.032 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门Chamber pumping valveClose失败，原因：Valve keep open。
    500. 

  500. [Save Log Job] 2024-10-31 12:35:21.339 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, delay 3 seconds
    501. 

  501. [Save Log Job] 2024-10-31 12:35:24.467 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, vent 50 seconds
    502. 

  502. [Save Log Job] 2024-10-31 12:36:14.538 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, Close vent valve
    503. 

  503. [Save Log Job] 2024-10-31 12:36:15.347 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, PostProcess Finished in 1.8 minitues
    504. 

  504. [Save Log Job] 2024-10-31 12:36:15.347 LOG.INFO UiEvent.cs Line:51 Event() - System complete run 'PostProcess'.
    505. 

  505. [Save Log Job] 2024-10-31 12:36:15.347 LOG.INFO UiEvent.cs Line:51 Event() - EventLotFinished
    506. 

  506. [Save Log Job] 2024-10-31 12:36:20.279 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    507. 

  507. [Save Log Job] 2024-10-31 12:36:20.281 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    508. 

  508. --------------------------------[Header Log]----------------------------------------- [Save Log Job] 2024-10-31 12:41:26.173 LOG.INFO UiEvent.cs Line:57 Event() - 已经连接上设备实时控制系统
    509. 

  509. [Save Log Job] 2024-10-31 12:41:26.174 LOG.INFO UiEvent.cs Line:58 Event() - 已经连接上设备实时控制系统
    510. 

  510. [Save Log Job] 2024-10-31 12:41:27.538 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(System_IsMesMode, True)
    511. 

  511. [Save Log Job] 2024-10-31 12:41:27.538 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    512. 

  512. [Save Log Job] 2024-10-31 12:41:31.100 LOG.INFO UiEvent.cs Line:51 Event() - Software will be expired in -7 days, at 10/24/2024 12:00:00 AM 。
    513. 

  513. [Save Log Job] 2024-10-31 12:41:33.110 LOG.INFO UiEvent.cs Line:51 Event() - User admin login
    514. 

  514. [Save Log Job] 2024-10-31 12:41:59.277 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetAutoMode()
    515. 

  515. [Save Log Job] 2024-10-31 12:41:59.277 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentModeChanged
    516. 

  516. [Save Log Job] 2024-10-31 12:41:59.277 LOG.INFO UiEvent.cs Line:51 Event() - System running mode changed to Auto Mode
    517. 

  517. [Save Log Job] 2024-10-31 12:42:09.498 LOG.INFO YZQZFabAuto.cs Line:57 GetRecipeByMultipleLot() - GetRecipeByMultipleLot|http://192.168.1.207:86/api/mes/GetRecipeByMultipleLot?strQuery=[{"LotId":"SFC240912810","MachineNumber":"22","MachineType":"稷以打胶机"}]
    518. 

  518. [Save Log Job] 2024-10-31 12:42:09.553 LOG.INFO YZQZFabAuto.cs Line:59 GetRecipeByMultipleLot() - GetRecipeByMultipleLot|{"Status":200,"Message":"查询成功","Data":[{"LotId":"SFC240912810","DeviceName":"CPO4BCALO708U600HNA","RecipeName":"CACB","ComponentQty":13,"Operation":"P极光刻"}]}
    519. 

  519. [Save Log Job] 2024-10-31 12:42:15.134 LOG.INFO UiEvent.cs Line:51 Event() - Operation RunRecipe(CACB, SFC240912810/)
    520. 

  520. [Save Log Job] 2024-10-31 12:42:15.134 LOG.INFO UiEvent.cs Line:51 Event() - EventLotStart
    521. 

  521. [Save Log Job] 2024-10-31 12:42:15.234 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check door status。
    522. 

  522. [Save Log Job] 2024-10-31 12:42:15.234 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check chamber door。
    523. 

  523. [Save Log Job] 2024-10-31 12:42:15.234 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check backpanel door。
    524. 

  524. [Save Log Job] 2024-10-31 12:42:15.234 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check pump status。
    525. 

  525. [Save Log Job] 2024-10-31 12:42:15.235 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Close all the valves。
    526. 

  526. [Save Log Job] 2024-10-31 12:42:15.235 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    527. 

  527. [Save Log Job] 2024-10-31 12:42:15.235 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Open pumping valve。
    528. 

  528. [Save Log Job] 2024-10-31 12:42:16.340 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check chamber pressure。
    529. 

  529. [Save Log Job] 2024-10-31 12:42:58.848 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Pump below 100mTorr。
    530. 

  530. [Save Log Job] 2024-10-31 12:42:58.949 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：PreProcess Finished in 0.7 minitues。
    531. 

  531. [Save Log Job] 2024-10-31 12:42:58.949 LOG.INFO UiEvent.cs Line:51 Event() - System complete run 'PreProcess'.
    532. 

  532. [Save Log Job] 2024-10-31 12:42:58.950 LOG.INFO UiEvent.cs Line:51 Event() - Run Recipe 20241031124215-CACB
    533. 

  533. [Save Log Job] 2024-10-31 12:42:58.950 LOG.INFO UiEvent.cs Line:51 Event() - System recipe start run'20241031124215-CACB'
    534. 

  534. [Save Log Job] 2024-10-31 12:42:58.950 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241031124215-CACB' start run step 1：initial。
    535. 

  535. [Save Log Job] 2024-10-31 12:42:58.951 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。
    536. 

  536. [Save Log Job] 2024-10-31 12:42:58.951 LOG.INFO UiEvent.cs Line:51 Event() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。
    537. 

  537. [Save Log Job] 2024-10-31 12:42:58.952 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。
    538. 

  538. [Save Log Job] 2024-10-31 12:42:58.952 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。
    539. 

  539. [Save Log Job] 2024-10-31 12:42:58.952 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。
    540. 

  540. [Save Log Job] 2024-10-31 12:42:58.953 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。
    541. 

  541. [Save Log Job] 2024-10-31 12:42:58.953 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。
    542. 

  542. [Save Log Job] 2024-10-31 12:42:58.953 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPower，RF set Power:0。
    543. 

  543. [Save Log Job] 2024-10-31 12:42:58.954 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。
    544. 

  544. [Save Log Job] 2024-10-31 12:42:58.954 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。
    545. 

  545. [Save Log Job] 2024-10-31 12:42:58.954 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。
    546. 

  546. [Save Log Job] 2024-10-31 12:42:58.955 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas1， ramp to 45sccm。
    547. 

  547. [Save Log Job] 2024-10-31 12:42:58.955 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas2， ramp to 56sccm。
    548. 

  548. [Save Log Job] 2024-10-31 12:42:58.956 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas3， ramp to 66sccm。
    549. 

  549. [Save Log Job] 2024-10-31 12:42:58.956 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas4， ramp to 76sccm。
    550. 

  550. [Save Log Job] 2024-10-31 12:42:58.956 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas5， ramp to 86sccm。
    551. 

  551. [Save Log Job] 2024-10-31 12:42:58.957 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPowerOnOff，Set RF power Off。
    552. 

  552. [Save Log Job] 2024-10-31 12:42:59.049 LOG.INFO UiEvent.cs Line:51 Event() - Start monitor pressure stability
    553. 

  553. [Save Log Job] 2024-10-31 12:43:29.032 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241031124215-CACB' end step 1
    554. 

  554. [Save Log Job] 2024-10-31 12:43:29.032 LOG.INFO UiEvent.cs Line:51 Event() - Stop monitor pressure stability
    555. 

  555. [Save Log Job] 2024-10-31 12:43:29.032 LOG.INFO UiEvent.cs Line:51 Event() - System Recipe run completed，Recipe：20241031124215-CACB
    556. 

  556. Start time：2024/10/31 12:42:58
    557. 

  557. End time：2024/10/31 12:43:28
    558. 

  558. Total time：0:0:30
    559. 

  559. [Save Log Job] 2024-10-31 12:43:29.033 LOG.INFO UiEvent.cs Line:51 Event() - System Recipe completely run
    560. 

  560. [Save Log Job] 2024-10-31 12:43:29.132 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, wait for 10 seconds
    561. 

  561. [Save Log Job] 2024-10-31 12:43:31.145 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC1 ValveClose失败，原因：Valve keep open。
    562. 

  562. [Save Log Job] 2024-10-31 12:43:31.145 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC2 ValveClose失败，原因：Valve keep open。
    563. 

  563. [Save Log Job] 2024-10-31 12:43:31.145 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC3 ValveClose失败，原因：Valve keep open。
    564. 

  564. [Save Log Job] 2024-10-31 12:43:31.145 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC4 ValveClose失败，原因：Valve keep open。
    565. 

  565. [Save Log Job] 2024-10-31 12:43:31.146 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC5 ValveClose失败，原因：Valve keep open。
    566. 

  566. [Save Log Job] 2024-10-31 12:43:31.146 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门Process gas final valveClose失败，原因：Valve keep open。
    567. 

  567. [Save Log Job] 2024-10-31 12:43:39.207 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, RF Power Off
    568. 

  568. [Save Log Job] 2024-10-31 12:43:39.207 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, Stop all the gas flow
    569. 

  569. [Save Log Job] 2024-10-31 12:43:45.052 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, Close all the valves
    570. 

  570. [Save Log Job] 2024-10-31 12:43:45.151 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, close pump valve
    571. 

  571. [Save Log Job] 2024-10-31 12:43:47.168 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门Chamber pumping valveClose失败，原因：Valve keep open。
    572. 

  572. [Save Log Job] 2024-10-31 12:43:48.476 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, delay 3 seconds
    573. 

  573. [Save Log Job] 2024-10-31 12:43:51.622 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, vent 50 seconds
    574. 

  574. [Save Log Job] 2024-10-31 12:44:41.709 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, Close vent valve
    575. 

  575. [Save Log Job] 2024-10-31 12:52:31.992 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, PostProcess Finished in 1.2 minitues
    576. 

  576. [Save Log Job] 2024-10-31 12:52:32.773 LOG.INFO UiEvent.cs Line:51 Event() - System complete run 'PostProcess'.
    577. 

  577. [Save Log Job] 2024-10-31 12:52:33.234 LOG.INFO UiEvent.cs Line:51 Event() - EventLotFinished
    578. 

  578. [Save Log Job] 2024-10-31 12:52:34.654 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    579. 

  579. [Save Log Job] 2024-10-31 12:52:34.663 LOG.INFO UiEvent.cs Line:51 Event() - System PLC heart beat check failed，please confirm PLC still running
    580. 

  580. [Save Log Job] 2024-10-31 12:52:35.077 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    581. 

  581. [Save Log Job] 2024-10-31 12:52:36.121 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    582. 

  582. --------------------------------[Header Log]----------------------------------------- [Save Log Job] 2024-10-31 13:01:59.980 LOG.INFO UiEvent.cs Line:58 Event() - 已经连接上设备实时控制系统
    583. 

  583. [Save Log Job] 2024-10-31 13:02:01.252 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    584. 

  584. [Save Log Job] 2024-10-31 13:02:01.297 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(System_IsMesMode, True)
    585. 

  585. [Save Log Job] 2024-10-31 13:02:04.918 LOG.INFO UiEvent.cs Line:51 Event() - Software will be expired in -7 days, at 10/24/2024 12:00:00 AM 。
    586. 

  586. [Save Log Job] 2024-10-31 13:02:11.276 LOG.INFO UiEvent.cs Line:51 Event() - User admin login
    587. 

  587. [Save Log Job] 2024-10-31 13:02:14.468 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetAutoMode()
    588. 

  588. [Save Log Job] 2024-10-31 13:02:14.468 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentModeChanged
    589. 

  589. [Save Log Job] 2024-10-31 13:02:14.468 LOG.INFO UiEvent.cs Line:51 Event() - System running mode changed to Auto Mode
    590. 

  590. [Save Log Job] 2024-10-31 13:02:43.452 LOG.INFO YZQZFabAuto.cs Line:57 GetRecipeByMultipleLot() - GetRecipeByMultipleLot|http://192.168.1.207:86/api/mes/GetRecipeByMultipleLot?strQuery=[{"LotId":"SFC240912810","MachineNumber":"22","MachineType":"稷以打胶机"}]
    591. 

  591. [Save Log Job] 2024-10-31 13:02:43.870 LOG.INFO YZQZFabAuto.cs Line:59 GetRecipeByMultipleLot() - GetRecipeByMultipleLot|{"Status":200,"Message":"查询成功","Data":[{"LotId":"SFC240912810","DeviceName":"CPO4BCALO708U600HNA","RecipeName":"CACB","ComponentQty":13,"Operation":"P极光刻"}]}
    592. 

  592. [Save Log Job] 2024-10-31 13:02:46.264 LOG.INFO UiEvent.cs Line:51 Event() - Operation RunRecipe(CACB, SFC240912810/)
    593. 

  593. [Save Log Job] 2024-10-31 13:02:46.364 LOG.INFO UiEvent.cs Line:51 Event() - EventLotStart
    594. 

  594. [Save Log Job] 2024-10-31 13:02:46.365 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    595. 

  595. [Save Log Job] 2024-10-31 13:02:46.367 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check door status。
    596. 

  596. [Save Log Job] 2024-10-31 13:02:46.367 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check chamber door。
    597. 

  597. [Save Log Job] 2024-10-31 13:02:46.367 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check backpanel door。
    598. 

  598. [Save Log Job] 2024-10-31 13:02:46.368 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check pump status。
    599. 

  599. [Save Log Job] 2024-10-31 13:02:46.368 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Close all the valves。
    600. 

  600. [Save Log Job] 2024-10-31 13:02:46.467 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Open pumping valve。
    601. 

  601. [Save Log Job] 2024-10-31 13:02:48.481 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门Chamber pumping valveOpen失败，原因：Valve keep closed 。
    602. 

  602. [Save Log Job] 2024-10-31 13:02:48.582 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check chamber pressure。
    603. 

  603. [Save Log Job] 2024-10-31 13:03:31.321 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Pump below 100mTorr。
    604. 

  604. [Save Log Job] 2024-10-31 13:03:31.321 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：PreProcess Finished in 0.7 minitues。
    605. 

  605. [Save Log Job] 2024-10-31 13:03:31.321 LOG.INFO UiEvent.cs Line:51 Event() - System complete run 'PreProcess'.
    606. 

  606. [Save Log Job] 2024-10-31 13:03:31.322 LOG.INFO UiEvent.cs Line:51 Event() - Run Recipe 20241031130246-CACB
    607. 

  607. [Save Log Job] 2024-10-31 13:03:31.322 LOG.INFO UiEvent.cs Line:51 Event() - System recipe start run'20241031130246-CACB'
    608. 

  608. [Save Log Job] 2024-10-31 13:03:31.423 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241031130246-CACB' start run step 1：initial。
    609. 

  609. [Save Log Job] 2024-10-31 13:03:31.423 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。
    610. 

  610. [Save Log Job] 2024-10-31 13:03:31.423 LOG.INFO UiEvent.cs Line:51 Event() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。
    611. 

  611. [Save Log Job] 2024-10-31 13:03:31.424 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。
    612. 

  612. [Save Log Job] 2024-10-31 13:03:31.424 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。
    613. 

  613. [Save Log Job] 2024-10-31 13:03:31.424 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。
    614. 

  614. [Save Log Job] 2024-10-31 13:03:31.425 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。
    615. 

  615. [Save Log Job] 2024-10-31 13:03:31.425 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。
    616. 

  616. [Save Log Job] 2024-10-31 13:03:31.425 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPower，RF set Power:0。
    617. 

  617. [Save Log Job] 2024-10-31 13:03:31.426 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。
    618. 

  618. [Save Log Job] 2024-10-31 13:03:31.426 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。
    619. 

  619. [Save Log Job] 2024-10-31 13:03:31.426 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。
    620. 

  620. [Save Log Job] 2024-10-31 13:03:31.427 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas1， ramp to 45sccm。
    621. 

  621. [Save Log Job] 2024-10-31 13:03:31.427 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas2， ramp to 56sccm。
    622. 

  622. [Save Log Job] 2024-10-31 13:03:31.427 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas3， ramp to 66sccm。
    623. 

  623. [Save Log Job] 2024-10-31 13:03:31.428 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas4， ramp to 76sccm。
    624. 

  624. [Save Log Job] 2024-10-31 13:03:31.428 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas5， ramp to 86sccm。
    625. 

  625. [Save Log Job] 2024-10-31 13:03:31.428 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPowerOnOff，Set RF power Off。
    626. 

  626. [Save Log Job] 2024-10-31 13:03:31.429 LOG.INFO UiEvent.cs Line:51 Event() - Start monitor pressure stability
    627. 

  627. [Save Log Job] 2024-10-31 13:04:01.425 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241031130246-CACB' end step 1
    628. 

  628. [Save Log Job] 2024-10-31 13:04:01.425 LOG.INFO UiEvent.cs Line:51 Event() - Stop monitor pressure stability
    629. 

  629. [Save Log Job] 2024-10-31 13:04:01.425 LOG.INFO UiEvent.cs Line:51 Event() - System Recipe run completed，Recipe：20241031130246-CACB
    630. 

  630. Start time：2024/10/31 13:03:31
    631. 

  631. End time：2024/10/31 13:04:01
    632. 

  632. Total time：0:0:30
    633. 

  633. [Save Log Job] 2024-10-31 13:04:01.426 LOG.INFO UiEvent.cs Line:51 Event() - System Recipe completely run
    634. 

  634. [Save Log Job] 2024-10-31 13:04:01.526 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, wait for 10 seconds
    635. 

  635. [Save Log Job] 2024-10-31 13:04:03.441 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC1 ValveClose失败，原因：Valve keep open。
    636. 

  636. [Save Log Job] 2024-10-31 13:04:03.441 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC2 ValveClose失败，原因：Valve keep open。
    637. 

  637. [Save Log Job] 2024-10-31 13:04:03.441 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC3 ValveClose失败，原因：Valve keep open。
    638. 

  638. [Save Log Job] 2024-10-31 13:04:03.442 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC4 ValveClose失败，原因：Valve keep open。
    639. 

  639. [Save Log Job] 2024-10-31 13:04:03.442 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC5 ValveClose失败，原因：Valve keep open。
    640. 

  640. [Save Log Job] 2024-10-31 13:04:03.444 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门Process gas final valveClose失败，原因：Valve keep open。
    641. 

  641. [Save Log Job] 2024-10-31 13:04:11.601 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, RF Power Off
    642. 

  642. [Save Log Job] 2024-10-31 13:04:11.702 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, Stop all the gas flow
    643. 

  643. [Save Log Job] 2024-10-31 13:04:17.451 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, Close all the valves
    644. 

  644. [Save Log Job] 2024-10-31 13:04:17.550 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, close pump valve
    645. 

  645. [Save Log Job] 2024-10-31 13:04:19.564 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门Chamber pumping valveClose失败，原因：Valve keep open。
    646. 

  646. [Save Log Job] 2024-10-31 13:04:20.872 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, delay 3 seconds
    647. 

  647. [Save Log Job] 2024-10-31 13:04:23.997 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, vent 50 seconds
    648. 

  648. [Save Log Job] 2024-10-31 13:05:13.981 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, Close vent valve
    649. 

  649. [Save Log Job] 2024-10-31 13:05:19.114 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, PostProcess Finished in 1.2 minitues
    650. 

  650. [Save Log Job] 2024-10-31 13:05:19.116 LOG.INFO UiEvent.cs Line:51 Event() - System complete run 'PostProcess'.
    651. 

  651. [Save Log Job] 2024-10-31 13:05:19.578 LOG.INFO UiEvent.cs Line:51 Event() - EventLotFinished
    652. 

  652. [Save Log Job] 2024-10-31 13:05:32.188 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    653. 

  653. [Save Log Job] 2024-10-31 13:05:32.726 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    654. 

  654. [Save Log Job] 2024-10-31 13:06:34.839 LOG.INFO YZQZFabAuto.cs Line:57 GetRecipeByMultipleLot() - GetRecipeByMultipleLot|http://192.168.1.207:86/api/mes/GetRecipeByMultipleLot?strQuery=[{"LotId":"EFC241014689","MachineNumber":"22","MachineType":"稷以打胶机"}]
    655. 

  655. [Save Log Job] 2024-10-31 13:06:34.893 LOG.INFO YZQZFabAuto.cs Line:59 GetRecipeByMultipleLot() - GetRecipeByMultipleLot|{"Status":200,"Message":"查询成功","Data":[{"LotId":"EFC241014689","DeviceName":"CPX4BCAYG606L400HNA","RecipeName":"CACB","ComponentQty":11,"Operation":"P极光刻"}]}
    656. 

  656. [Save Log Job] 2024-10-31 13:06:36.891 LOG.INFO UiEvent.cs Line:51 Event() - Operation RunRecipe(CACB, EFC241014689/)
    657. 

  657. [Save Log Job] 2024-10-31 13:06:36.891 LOG.INFO UiEvent.cs Line:51 Event() - EventLotStart
    658. 

  658. [Save Log Job] 2024-10-31 13:06:36.994 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    659. 

  659. [Save Log Job] 2024-10-31 13:06:36.994 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check door status。
    660. 

  660. [Save Log Job] 2024-10-31 13:06:36.994 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check chamber door。
    661. 

  661. [Save Log Job] 2024-10-31 13:06:36.994 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check backpanel door。
    662. 

  662. [Save Log Job] 2024-10-31 13:06:36.995 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check pump status。
    663. 

  663. [Save Log Job] 2024-10-31 13:06:36.995 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Close all the valves。
    664. 

  664. [Save Log Job] 2024-10-31 13:06:36.995 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Open pumping valve。
    665. 

  665. [Save Log Job] 2024-10-31 13:06:39.106 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门Chamber pumping valveOpen失败，原因：Valve keep closed 。
    666. 

  666. [Save Log Job] 2024-10-31 13:06:39.712 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check chamber pressure。
    667. 

  667. [Save Log Job] 2024-10-31 13:07:11.360 LOG.INFO UiEvent.cs Line:51 Event() - Operation AbortRecipe()
    668. 

  668. [Save Log Job] 2024-10-31 13:07:11.460 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    669. 

  669. [Save Log Job] 2024-10-31 13:07:23.783 LOG.INFO YZQZFabAuto.cs Line:57 GetRecipeByMultipleLot() - GetRecipeByMultipleLot|http://192.168.1.207:86/api/mes/GetRecipeByMultipleLot?strQuery=[{"LotId":"EFC241014689","MachineNumber":"22","MachineType":"稷以打胶机"}]
    670. 

  670. [Save Log Job] 2024-10-31 13:07:23.831 LOG.INFO YZQZFabAuto.cs Line:59 GetRecipeByMultipleLot() - GetRecipeByMultipleLot|{"Status":200,"Message":"查询成功","Data":[{"LotId":"EFC241014689","DeviceName":"CPX4BCAYG606L400HNA","RecipeName":"CACB","ComponentQty":11,"Operation":"P极光刻"}]}
    671. 

  671. [Save Log Job] 2024-10-31 13:08:33.914 LOG.INFO UiEvent.cs Line:51 Event() - Operation RunRecipe(CACB, EFC241014689/)
    672. 

  672. [Save Log Job] 2024-10-31 13:08:33.915 LOG.INFO UiEvent.cs Line:51 Event() - EventLotStart
    673. 

  673. [Save Log Job] 2024-10-31 13:08:34.016 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check door status。
    674. 

  674. [Save Log Job] 2024-10-31 13:08:34.016 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check chamber door。
    675. 

  675. [Save Log Job] 2024-10-31 13:08:34.016 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check backpanel door。
    676. 

  676. [Save Log Job] 2024-10-31 13:08:34.017 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check pump status。
    677. 

  677. [Save Log Job] 2024-10-31 13:08:34.017 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Close all the valves。
    678. 

  678. [Save Log Job] 2024-10-31 13:08:34.116 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Open pumping valve。
    679. 

  679. [Save Log Job] 2024-10-31 13:08:34.116 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    680. 

  680. [Save Log Job] 2024-10-31 13:08:34.116 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check chamber pressure。
    681. 

  681. [Save Log Job] 2024-10-31 13:08:34.117 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Pump below 100mTorr。
    682. 

  682. [Save Log Job] 2024-10-31 13:08:34.217 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：PreProcess Finished in 0.0 minitues。
    683. 

  683. [Save Log Job] 2024-10-31 13:08:34.217 LOG.INFO UiEvent.cs Line:51 Event() - System complete run 'PreProcess'.
    684. 

  684. [Save Log Job] 2024-10-31 13:08:34.217 LOG.INFO UiEvent.cs Line:51 Event() - Run Recipe 20241031130833-CACB
    685. 

  685. [Save Log Job] 2024-10-31 13:08:34.218 LOG.INFO UiEvent.cs Line:51 Event() - System recipe start run'20241031130833-CACB'
    686. 

  686. [Save Log Job] 2024-10-31 13:08:34.218 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241031130833-CACB' start run step 1：initial。
    687. 

  687. [Save Log Job] 2024-10-31 13:08:34.218 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。
    688. 

  688. [Save Log Job] 2024-10-31 13:08:34.219 LOG.INFO UiEvent.cs Line:51 Event() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。
    689. 

  689. [Save Log Job] 2024-10-31 13:08:34.219 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。
    690. 

  690. [Save Log Job] 2024-10-31 13:08:34.219 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。
    691. 

  691. [Save Log Job] 2024-10-31 13:08:34.220 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。
    692. 

  692. [Save Log Job] 2024-10-31 13:08:34.220 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。
    693. 

  693. [Save Log Job] 2024-10-31 13:08:34.220 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。
    694. 

  694. [Save Log Job] 2024-10-31 13:08:34.221 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPower，RF set Power:0。
    695. 

  695. [Save Log Job] 2024-10-31 13:08:34.221 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。
    696. 

  696. [Save Log Job] 2024-10-31 13:08:34.221 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。
    697. 

  697. [Save Log Job] 2024-10-31 13:08:34.221 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。
    698. 

  698. [Save Log Job] 2024-10-31 13:08:34.222 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas1， ramp to 45sccm。
    699. 

  699. [Save Log Job] 2024-10-31 13:08:34.222 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas2， ramp to 56sccm。
    700. 

  700. [Save Log Job] 2024-10-31 13:08:34.222 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas3， ramp to 66sccm。
    701. 

  701. [Save Log Job] 2024-10-31 13:08:34.223 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas4， ramp to 76sccm。
    702. 

  702. [Save Log Job] 2024-10-31 13:08:34.223 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas5， ramp to 86sccm。
    703. 

  703. [Save Log Job] 2024-10-31 13:08:34.223 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPowerOnOff，Set RF power Off。
    704. 

  704. [Save Log Job] 2024-10-31 13:08:34.317 LOG.INFO UiEvent.cs Line:51 Event() - Start monitor pressure stability
    705. 

  705. --------------------------------[Header Log]----------------------------------------- [Save Log Job] 2024-10-31 13:10:13.282 LOG.INFO UiEvent.cs Line:58 Event() - 已经连接上设备实时控制系统
    706. 

  706. [Save Log Job] 2024-10-31 13:10:14.606 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(System_IsMesMode, True)
    707. 

  707. [Save Log Job] 2024-10-31 13:10:14.754 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    708. 

  708. [Save Log Job] 2024-10-31 13:10:18.476 LOG.INFO UiEvent.cs Line:51 Event() - Software will be expired in -7 days, at 10/24/2024 12:00:00 AM 。
    709. 

  709. --------------------------------[Header Log]----------------------------------------- [Save Log Job] 2024-10-31 13:10:29.716 LOG.INFO UiEvent.cs Line:58 Event() - 已经连接上设备实时控制系统
    710. 

  710. [Save Log Job] 2024-10-31 13:10:29.718 LOG.INFO UiEvent.cs Line:57 Event() - 已经连接上设备实时控制系统
    711. 

  711. [Save Log Job] 2024-10-31 13:10:31.032 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(System_IsMesMode, True)
    712. 

  712. [Save Log Job] 2024-10-31 13:10:31.032 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    713. 

  713. [Save Log Job] 2024-10-31 13:10:34.667 LOG.INFO UiEvent.cs Line:51 Event() - Software will be expired in -7 days, at 10/24/2024 12:00:00 AM 。
    714. 

  714. [Save Log Job] 2024-10-31 13:10:40.299 LOG.INFO UiEvent.cs Line:51 Event() - User admin login
    715. 

  715. [Save Log Job] 2024-10-31 13:11:19.836 LOG.INFO UiEvent.cs Line:51 Event() - recipe file  CACB  save completed
    716. 

  716. [Save Log Job] 2024-10-31 13:11:19.836 LOG.INFO UiEvent.cs Line:51 Event() - System Information
    717. 

  717. [Save Log Job] 2024-10-31 13:11:30.885 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(System_RfPowerAlarmRange, 1)
    718. 

  718. [Save Log Job] 2024-10-31 13:11:32.696 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(System_RfPowerAlarmTime, 2)
    719. 

  719. [Save Log Job] 2024-10-31 13:12:00.481 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetAutoMode()
    720. 

  720. [Save Log Job] 2024-10-31 13:12:00.481 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentModeChanged
    721. 

  721. [Save Log Job] 2024-10-31 13:12:00.481 LOG.INFO UiEvent.cs Line:51 Event() - System running mode changed to Auto Mode
    722. 

  722. [Save Log Job] 2024-10-31 13:12:09.214 LOG.INFO YZQZFabAuto.cs Line:57 GetRecipeByMultipleLot() - GetRecipeByMultipleLot|http://192.168.1.207:86/api/mes/GetRecipeByMultipleLot?strQuery=[{"LotId":"SFC240912810","MachineNumber":"22","MachineType":"稷以打胶机"}]
    723. 

  723. [Save Log Job] 2024-10-31 13:12:09.315 LOG.INFO YZQZFabAuto.cs Line:59 GetRecipeByMultipleLot() - GetRecipeByMultipleLot|{"Status":200,"Message":"查询成功","Data":[{"LotId":"SFC240912810","DeviceName":"CPO4BCALO708U600HNA","RecipeName":"CACB","ComponentQty":13,"Operation":"P极光刻"}]}
    724. 

  724. [Save Log Job] 2024-10-31 13:13:07.483 LOG.INFO UiEvent.cs Line:51 Event() - Operation RunRecipe(CACB, SFC240912810/)
    725. 

  725. [Save Log Job] 2024-10-31 13:13:07.483 LOG.INFO UiEvent.cs Line:51 Event() - EventLotStart
    726. 

  726. [Save Log Job] 2024-10-31 13:13:07.588 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    727. 

  727. [Save Log Job] 2024-10-31 13:13:07.588 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check door status。
    728. 

  728. [Save Log Job] 2024-10-31 13:13:07.588 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check chamber door。
    729. 

  729. [Save Log Job] 2024-10-31 13:13:07.589 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check backpanel door。
    730. 

  730. [Save Log Job] 2024-10-31 13:13:07.589 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check pump status。
    731. 

  731. [Save Log Job] 2024-10-31 13:13:07.590 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Close all the valves。
    732. 

  732. [Save Log Job] 2024-10-31 13:13:07.590 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Open pumping valve。
    733. 

  733. [Save Log Job] 2024-10-31 13:13:09.199 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check chamber pressure。
    734. 

  734. [Save Log Job] 2024-10-31 13:13:48.016 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Pump below 100mTorr。
    735. 

  735. [Save Log Job] 2024-10-31 13:13:48.016 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：PreProcess Finished in 0.7 minitues。
    736. 

  736. [Save Log Job] 2024-10-31 13:13:48.016 LOG.INFO UiEvent.cs Line:51 Event() - System complete run 'PreProcess'.
    737. 

  737. [Save Log Job] 2024-10-31 13:13:48.017 LOG.INFO UiEvent.cs Line:51 Event() - Run Recipe 20241031131307-CACB
    738. 

  738. [Save Log Job] 2024-10-31 13:13:48.017 LOG.INFO UiEvent.cs Line:51 Event() - System recipe start run'20241031131307-CACB'
    739. 

  739. [Save Log Job] 2024-10-31 13:13:48.117 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241031131307-CACB' start run step 1：initial。
    740. 

  740. [Save Log Job] 2024-10-31 13:13:48.117 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。
    741. 

  741. [Save Log Job] 2024-10-31 13:13:48.118 LOG.INFO UiEvent.cs Line:51 Event() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。
    742. 

  742. [Save Log Job] 2024-10-31 13:13:48.118 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。
    743. 

  743. [Save Log Job] 2024-10-31 13:13:48.119 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。
    744. 

  744. [Save Log Job] 2024-10-31 13:13:48.119 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。
    745. 

  745. [Save Log Job] 2024-10-31 13:13:48.119 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。
    746. 

  746. [Save Log Job] 2024-10-31 13:13:48.120 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。
    747. 

  747. [Save Log Job] 2024-10-31 13:13:48.120 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPower，RF set Power:0。
    748. 

  748. [Save Log Job] 2024-10-31 13:13:48.120 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。
    749. 

  749. [Save Log Job] 2024-10-31 13:13:48.121 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。
    750. 

  750. [Save Log Job] 2024-10-31 13:13:48.121 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。
    751. 

  751. [Save Log Job] 2024-10-31 13:13:48.121 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas1， ramp to 45sccm。
    752. 

  752. [Save Log Job] 2024-10-31 13:13:48.122 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas2， ramp to 56sccm。
    753. 

  753. [Save Log Job] 2024-10-31 13:13:48.122 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas3， ramp to 66sccm。
    754. 

  754. [Save Log Job] 2024-10-31 13:13:48.122 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas4， ramp to 76sccm。
    755. 

  755. [Save Log Job] 2024-10-31 13:13:48.123 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas5， ramp to 86sccm。
    756. 

  756. [Save Log Job] 2024-10-31 13:13:48.123 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPowerOnOff，Set RF power Off。
    757. 

  757. [Save Log Job] 2024-10-31 13:13:48.123 LOG.INFO UiEvent.cs Line:51 Event() - Start monitor pressure stability
    758. 

  758. [Save Log Job] 2024-10-31 13:14:18.204 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241031131307-CACB' end step 1
    759. 

  759. [Save Log Job] 2024-10-31 13:14:18.204 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241031131307-CACB' start run step 2：initial。
    760. 

  760. [Save Log Job] 2024-10-31 13:14:18.205 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。
    761. 

  761. [Save Log Job] 2024-10-31 13:14:18.205 LOG.INFO UiEvent.cs Line:51 Event() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。
    762. 

  762. [Save Log Job] 2024-10-31 13:14:18.206 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。
    763. 

  763. [Save Log Job] 2024-10-31 13:14:18.206 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。
    764. 

  764. [Save Log Job] 2024-10-31 13:14:18.206 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。
    765. 

  765. [Save Log Job] 2024-10-31 13:14:18.207 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。
    766. 

  766. [Save Log Job] 2024-10-31 13:14:18.207 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。
    767. 

  767. [Save Log Job] 2024-10-31 13:14:18.207 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPower，RF set Power:190。
    768. 

  768. [Save Log Job] 2024-10-31 13:14:18.208 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。
    769. 

  769. [Save Log Job] 2024-10-31 13:14:18.208 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。
    770. 

  770. [Save Log Job] 2024-10-31 13:14:18.208 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。
    771. 

  771. [Save Log Job] 2024-10-31 13:14:18.209 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas1， ramp to 45sccm。
    772. 

  772. [Save Log Job] 2024-10-31 13:14:18.209 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas2， ramp to 56sccm。
    773. 

  773. [Save Log Job] 2024-10-31 13:14:18.209 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas3， ramp to 66sccm。
    774. 

  774. [Save Log Job] 2024-10-31 13:14:18.210 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas4， ramp to 76sccm。
    775. 

  775. [Save Log Job] 2024-10-31 13:14:18.210 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas5， ramp to 86sccm。
    776. 

  776. [Save Log Job] 2024-10-31 13:14:18.210 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPowerOnOff，Set RF power On。
    777. 

  777. [Save Log Job] 2024-10-31 13:14:28.441 LOG.INFO UiEvent.cs Line:51 Event() - System RF GeneratorTolerance alarm：Forward power 18 out of range[189,191] in 2 seconds.
    778. 

  778. [Save Log Job] 2024-10-31 13:14:28.447 LOG.INFO UiEvent.cs Line:51 Event() - System recipe was aborted: user aborted recipe
    779. 

  779. [Save Log Job] 2024-10-31 13:14:28.448 LOG.INFO UiEvent.cs Line:51 Event() - Stop monitor pressure stability
    780. 

  780. [Save Log Job] 2024-10-31 13:14:28.449 LOG.INFO UiEvent.cs Line:51 Event() - System Recipe run completed，Recipe：20241031131307-CACB
    781. 

  781. Start time：2024/10/31 13:13:47
    782. 

  782. End time：2024/10/31 13:14:20
    783. 

  783. Total time：0:0:32
    784. 

  784. [Save Log Job] 2024-10-31 13:14:28.449 LOG.INFO UiEvent.cs Line:51 Event() - System Recipe completely run
    785. 

  785. [Save Log Job] 2024-10-31 13:14:28.449 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    786. 

  786. [Save Log Job] 2024-10-31 13:14:28.450 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    787. 

  787. [Save Log Job] 2024-10-31 13:14:28.450 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC1 ValveClose失败，原因：Valve keep open。
    788. 

  788. [Save Log Job] 2024-10-31 13:14:28.451 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC2 ValveClose失败，原因：Valve keep open。
    789. 

  789. [Save Log Job] 2024-10-31 13:14:28.455 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC4 ValveClose失败，原因：Valve keep open。
    790. 

  790. [Save Log Job] 2024-10-31 13:14:28.455 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC3 ValveClose失败，原因：Valve keep open。
    791. 

  791. [Save Log Job] 2024-10-31 13:14:28.456 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC5 ValveClose失败，原因：Valve keep open。
    792. 

  792. [Save Log Job] 2024-10-31 13:14:28.456 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门Process gas final valveClose失败，原因：Valve keep open。
    793. 

  793. [Save Log Job] 2024-10-31 13:17:45.232 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    794. 

  794. [Save Log Job] 2024-10-31 13:18:03.387 LOG.INFO YZQZFabAuto.cs Line:57 GetRecipeByMultipleLot() - GetRecipeByMultipleLot|http://192.168.1.207:86/api/mes/GetRecipeByMultipleLot?strQuery=[{"LotId":"SFC240912810","MachineNumber":"22","MachineType":"稷以打胶机"}]
    795. 

  795. [Save Log Job] 2024-10-31 13:18:03.440 LOG.INFO YZQZFabAuto.cs Line:59 GetRecipeByMultipleLot() - GetRecipeByMultipleLot|{"Status":200,"Message":"查询成功","Data":[{"LotId":"SFC240912810","DeviceName":"CPO4BCALO708U600HNA","RecipeName":"CACB","ComponentQty":13,"Operation":"P极光刻"}]}
    796. 

  796. [Save Log Job] 2024-10-31 13:18:07.359 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check door status。
    797. 

  797. [Save Log Job] 2024-10-31 13:18:07.381 LOG.INFO UiEvent.cs Line:51 Event() - EventLotStart
    798. 

  798. [Save Log Job] 2024-10-31 13:18:07.381 LOG.INFO UiEvent.cs Line:51 Event() - Operation RunRecipe(CACB, SFC240912810/)
    799. 

  799. [Save Log Job] 2024-10-31 13:18:07.381 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check backpanel door。
    800. 

  800. [Save Log Job] 2024-10-31 13:18:07.381 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check pump status。
    801. 

  801. [Save Log Job] 2024-10-31 13:18:07.381 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check chamber door。
    802. 

  802. [Save Log Job] 2024-10-31 13:18:07.382 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Close all the valves。
    803. 

  803. [Save Log Job] 2024-10-31 13:18:07.457 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    804. 

  804. [Save Log Job] 2024-10-31 13:18:07.457 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Open pumping valve。
    805. 

  805. [Save Log Job] 2024-10-31 13:18:07.558 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check chamber pressure。
    806. 

  806. [Save Log Job] 2024-10-31 13:18:09.070 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Pump below 100mTorr。
    807. 

  807. [Save Log Job] 2024-10-31 13:18:09.171 LOG.INFO UiEvent.cs Line:51 Event() - System complete run 'PreProcess'.
    808. 

  808. [Save Log Job] 2024-10-31 13:18:09.171 LOG.INFO UiEvent.cs Line:51 Event() - Run Recipe 20241031131807-CACB
    809. 

  809. [Save Log Job] 2024-10-31 13:18:09.171 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：PreProcess Finished in 0.0 minitues。
    810. 

  810. [Save Log Job] 2024-10-31 13:18:09.171 LOG.INFO UiEvent.cs Line:51 Event() - System recipe start run'20241031131807-CACB'
    811. 

  811. [Save Log Job] 2024-10-31 13:18:09.171 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241031131807-CACB' start run step 1：initial。
    812. 

  812. [Save Log Job] 2024-10-31 13:18:09.171 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。
    813. 

  813. [Save Log Job] 2024-10-31 13:18:09.175 LOG.INFO UiEvent.cs Line:51 Event() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。
    814. 

  814. [Save Log Job] 2024-10-31 13:18:09.175 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。
    815. 

  815. [Save Log Job] 2024-10-31 13:18:09.175 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。
    816. 

  816. [Save Log Job] 2024-10-31 13:18:09.176 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。
    817. 

  817. [Save Log Job] 2024-10-31 13:18:09.176 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPower，RF set Power:0。
    818. 

  818. [Save Log Job] 2024-10-31 13:18:09.176 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。
    819. 

  819. [Save Log Job] 2024-10-31 13:18:09.176 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。
    820. 

  820. [Save Log Job] 2024-10-31 13:18:09.176 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。
    821. 

  821. [Save Log Job] 2024-10-31 13:18:09.176 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas1， ramp to 45sccm。
    822. 

  822. [Save Log Job] 2024-10-31 13:18:09.176 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas2， ramp to 56sccm。
    823. 

  823. [Save Log Job] 2024-10-31 13:18:09.176 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas3， ramp to 66sccm。
    824. 

  824. [Save Log Job] 2024-10-31 13:18:09.176 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas4， ramp to 76sccm。
    825. 

  825. [Save Log Job] 2024-10-31 13:18:09.176 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas5， ramp to 86sccm。
    826. 

  826. [Save Log Job] 2024-10-31 13:18:09.198 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPowerOnOff，Set RF power Off。
    827. 

  827. [Save Log Job] 2024-10-31 13:18:09.198 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。
    828. 

  828. [Save Log Job] 2024-10-31 13:18:09.198 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。
    829. 

  829. [Save Log Job] 2024-10-31 13:18:09.272 LOG.INFO UiEvent.cs Line:51 Event() - Start monitor pressure stability
    830. 

  830. [Save Log Job] 2024-10-31 13:18:39.252 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241031131807-CACB' end step 1
    831. 

  831. [Save Log Job] 2024-10-31 13:18:39.351 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241031131807-CACB' start run step 2：initial。
    832. 

  832. [Save Log Job] 2024-10-31 13:18:39.351 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。
    833. 

  833. [Save Log Job] 2024-10-31 13:18:39.351 LOG.INFO UiEvent.cs Line:51 Event() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。
    834. 

  834. [Save Log Job] 2024-10-31 13:18:39.351 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。
    835. 

  835. [Save Log Job] 2024-10-31 13:18:39.351 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。
    836. 

  836. [Save Log Job] 2024-10-31 13:18:39.352 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。
    837. 

  837. [Save Log Job] 2024-10-31 13:18:39.352 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。
    838. 

  838. [Save Log Job] 2024-10-31 13:18:39.352 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。
    839. 

  839. [Save Log Job] 2024-10-31 13:18:39.352 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPower，RF set Power:190。
    840. 

  840. [Save Log Job] 2024-10-31 13:18:39.353 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。
    841. 

  841. [Save Log Job] 2024-10-31 13:18:39.353 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。
    842. 

  842. [Save Log Job] 2024-10-31 13:18:39.353 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。
    843. 

  843. [Save Log Job] 2024-10-31 13:18:39.353 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas1， ramp to 45sccm。
    844. 

  844. [Save Log Job] 2024-10-31 13:18:39.353 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas2， ramp to 56sccm。
    845. 

  845. [Save Log Job] 2024-10-31 13:18:39.353 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas3， ramp to 66sccm。
    846. 

  846. [Save Log Job] 2024-10-31 13:18:39.354 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas4， ramp to 76sccm。
    847. 

  847. [Save Log Job] 2024-10-31 13:18:39.354 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas5， ramp to 86sccm。
    848. 

  848. [Save Log Job] 2024-10-31 13:18:39.354 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPowerOnOff，Set RF power On。
    849. 

  849. [Save Log Job] 2024-10-31 13:19:06.705 LOG.INFO UiEvent.cs Line:51 Event() - System RF GeneratorTolerance alarm：Forward power 18 out of range[189,191] in 2 seconds.
    850. 

  850. [Save Log Job] 2024-10-31 13:19:17.857 LOG.INFO UiEvent.cs Line:51 Event() - System recipe was aborted: user aborted recipe
    851. 

  851. [Save Log Job] 2024-10-31 13:19:17.858 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC1 ValveClose失败，原因：Valve keep open。
    852. 

  852. [Save Log Job] 2024-10-31 13:19:17.858 LOG.INFO UiEvent.cs Line:51 Event() - Stop monitor pressure stability
    853. 

  853. [Save Log Job] 2024-10-31 13:19:17.858 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC2 ValveClose失败，原因：Valve keep open。
    854. 

  854. [Save Log Job] 2024-10-31 13:19:17.865 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC3 ValveClose失败，原因：Valve keep open。
    855. 

  855. [Save Log Job] 2024-10-31 13:19:17.866 LOG.INFO UiEvent.cs Line:51 Event() - System Recipe run completed，Recipe：20241031131807-CACB
    856. 

  856. Start time：2024/10/31 13:18:09
    857. 

  857. End time：2024/10/31 13:19:06
    858. 

  858. Total time：0:0:57
    859. 

  859. [Save Log Job] 2024-10-31 13:19:17.871 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    860. 

  860. [Save Log Job] 2024-10-31 13:19:17.871 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC4 ValveClose失败，原因：Valve keep open。
    861. 

  861. [Save Log Job] 2024-10-31 13:19:17.871 LOG.INFO UiEvent.cs Line:51 Event() - System Recipe completely run
    862. 

  862. [Save Log Job] 2024-10-31 13:19:17.873 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    863. 

  863. [Save Log Job] 2024-10-31 13:19:39.274 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC1 ValveClose失败，原因：Valve keep open。
    864. 

  864. [Save Log Job] 2024-10-31 13:19:39.284 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC2 ValveClose失败，原因：Valve keep open。
    865. 

  865. [Save Log Job] 2024-10-31 13:19:39.285 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC3 ValveClose失败，原因：Valve keep open。
    866. 

  866. [Save Log Job] 2024-10-31 13:19:39.285 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC5 ValveClose失败，原因：Valve keep open。
    867. 

  867. [Save Log Job] 2024-10-31 13:19:39.285 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门Process gas final valveClose失败，原因：Valve keep open。
    868. 

  868. --------------------------------[Header Log]----------------------------------------- [Save Log Job] 2024-10-31 13:21:48.187 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(System_IsMesMode, True)
    869. 

  869. [Save Log Job] 2024-10-31 13:21:48.330 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    870. 

  870. [Save Log Job] 2024-10-31 13:21:52.051 LOG.INFO UiEvent.cs Line:51 Event() - Software will be expired in -7 days, at 10/24/2024 12:00:00 AM 。
    871. 

  871. [Save Log Job] 2024-10-31 13:21:56.675 LOG.INFO UiEvent.cs Line:51 Event() - User admin login
    872. 

  872. [Save Log Job] 2024-10-31 13:22:10.367 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetAutoMode()
    873. 

  873. [Save Log Job] 2024-10-31 13:22:10.367 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentModeChanged
    874. 

  874. [Save Log Job] 2024-10-31 13:22:10.369 LOG.INFO UiEvent.cs Line:51 Event() - System running mode changed to Auto Mode
    875. 

  875. [Save Log Job] 2024-10-31 13:22:21.732 LOG.INFO YZQZFabAuto.cs Line:57 GetRecipeByMultipleLot() - GetRecipeByMultipleLot|http://192.168.1.207:86/api/mes/GetRecipeByMultipleLot?strQuery=[{"LotId":"SFC240912810","MachineNumber":"22","MachineType":"稷以打胶机"}]
    876. 

  876. [Save Log Job] 2024-10-31 13:22:21.789 LOG.INFO YZQZFabAuto.cs Line:59 GetRecipeByMultipleLot() - GetRecipeByMultipleLot|{"Status":200,"Message":"查询成功","Data":[{"LotId":"SFC240912810","DeviceName":"CPO4BCALO708U600HNA","RecipeName":"CACB","ComponentQty":13,"Operation":"P极光刻"}]}
    877. 

  877. [Save Log Job] 2024-10-31 13:22:23.142 LOG.INFO UiEvent.cs Line:51 Event() - Operation RunRecipe(CACB, SFC240912810/)
    878. 

  878. [Save Log Job] 2024-10-31 13:22:23.242 LOG.INFO UiEvent.cs Line:51 Event() - EventLotStart
    879. 

  879. [Save Log Job] 2024-10-31 13:22:23.242 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check door status。
    880. 

  880. [Save Log Job] 2024-10-31 13:22:23.243 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check chamber door。
    881. 

  881. [Save Log Job] 2024-10-31 13:22:23.245 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check backpanel door。
    882. 

  882. [Save Log Job] 2024-10-31 13:22:23.245 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check pump status。
    883. 

  883. [Save Log Job] 2024-10-31 13:22:23.245 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    884. 

  884. [Save Log Job] 2024-10-31 13:22:23.247 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Close all the valves。
    885. 

  885. [Save Log Job] 2024-10-31 13:22:23.344 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Open pumping valve。
    886. 

  886. [Save Log Job] 2024-10-31 13:22:24.250 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check chamber pressure。
    887. 

  887. [Save Log Job] 2024-10-31 13:23:02.960 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Pump below 100mTorr。
    888. 

  888. [Save Log Job] 2024-10-31 13:23:03.061 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：PreProcess Finished in 0.7 minitues。
    889. 

  889. [Save Log Job] 2024-10-31 13:23:03.061 LOG.INFO UiEvent.cs Line:51 Event() - System complete run 'PreProcess'.
    890. 

  890. [Save Log Job] 2024-10-31 13:23:03.062 LOG.INFO UiEvent.cs Line:51 Event() - Run Recipe 20241031132223-CACB
    891. 

  891. [Save Log Job] 2024-10-31 13:23:03.062 LOG.INFO UiEvent.cs Line:51 Event() - System recipe start run'20241031132223-CACB'
    892. 

  892. [Save Log Job] 2024-10-31 13:23:03.161 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241031132223-CACB' start run step 1：initial。
    893. 

  893. [Save Log Job] 2024-10-31 13:23:03.163 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。
    894. 

  894. [Save Log Job] 2024-10-31 13:23:03.163 LOG.INFO UiEvent.cs Line:51 Event() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。
    895. 

  895. [Save Log Job] 2024-10-31 13:23:03.163 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。
    896. 

  896. [Save Log Job] 2024-10-31 13:23:03.164 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。
    897. 

  897. [Save Log Job] 2024-10-31 13:23:03.164 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。
    898. 

  898. [Save Log Job] 2024-10-31 13:23:03.164 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。
    899. 

  899. [Save Log Job] 2024-10-31 13:23:03.164 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。
    900. 

  900. [Save Log Job] 2024-10-31 13:23:03.165 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPower，RF set Power:0。
    901. 

  901. [Save Log Job] 2024-10-31 13:23:03.165 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。
    902. 

  902. [Save Log Job] 2024-10-31 13:23:03.165 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。
    903. 

  903. [Save Log Job] 2024-10-31 13:23:03.166 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。
    904. 

  904. [Save Log Job] 2024-10-31 13:23:03.166 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas1， ramp to 45sccm。
    905. 

  905. [Save Log Job] 2024-10-31 13:23:03.166 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas2， ramp to 56sccm。
    906. 

  906. [Save Log Job] 2024-10-31 13:23:03.167 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas3， ramp to 66sccm。
    907. 

  907. [Save Log Job] 2024-10-31 13:23:03.167 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas4， ramp to 76sccm。
    908. 

  908. [Save Log Job] 2024-10-31 13:23:03.168 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas5， ramp to 86sccm。
    909. 

  909. [Save Log Job] 2024-10-31 13:23:03.168 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPowerOnOff，Set RF power Off。
    910. 

  910. [Save Log Job] 2024-10-31 13:23:03.168 LOG.INFO UiEvent.cs Line:51 Event() - Start monitor pressure stability
    911. 

  911. [Save Log Job] 2024-10-31 13:23:33.143 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241031132223-CACB' end step 1
    912. 

  912. [Save Log Job] 2024-10-31 13:23:33.244 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241031132223-CACB' start run step 2：initial。
    913. 

  913. [Save Log Job] 2024-10-31 13:23:33.244 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。
    914. 

  914. [Save Log Job] 2024-10-31 13:23:33.245 LOG.INFO UiEvent.cs Line:51 Event() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。
    915. 

  915. [Save Log Job] 2024-10-31 13:23:33.245 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。
    916. 

  916. [Save Log Job] 2024-10-31 13:23:33.246 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。
    917. 

  917. [Save Log Job] 2024-10-31 13:23:33.246 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。
    918. 

  918. [Save Log Job] 2024-10-31 13:23:33.246 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。
    919. 

  919. [Save Log Job] 2024-10-31 13:23:33.247 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。
    920. 

  920. [Save Log Job] 2024-10-31 13:23:33.247 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPower，RF set Power:190。
    921. 

  921. [Save Log Job] 2024-10-31 13:23:33.247 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。
    922. 

  922. [Save Log Job] 2024-10-31 13:23:33.248 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。
    923. 

  923. [Save Log Job] 2024-10-31 13:23:33.248 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。
    924. 

  924. [Save Log Job] 2024-10-31 13:23:33.248 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas1， ramp to 45sccm。
    925. 

  925. [Save Log Job] 2024-10-31 13:23:33.249 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas2， ramp to 56sccm。
    926. 

  926. [Save Log Job] 2024-10-31 13:23:33.249 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas3， ramp to 66sccm。
    927. 

  927. [Save Log Job] 2024-10-31 13:23:33.250 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas4， ramp to 76sccm。
    928. 

  928. [Save Log Job] 2024-10-31 13:23:33.250 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas5， ramp to 86sccm。
    929. 

  929. [Save Log Job] 2024-10-31 13:23:33.251 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPowerOnOff，Set RF power On。
    930. 

  930. [Save Log Job] 2024-10-31 13:23:35.758 LOG.INFO UiEvent.cs Line:51 Event() - System RF GeneratorTolerance alarm：Forward power 18 out of range[189,191] in 2 seconds.
    931. 

  931. [Save Log Job] 2024-10-31 13:23:35.765 LOG.INFO UiEvent.cs Line:51 Event() - System recipe was aborted: user aborted recipe
    932. 

  932. [Save Log Job] 2024-10-31 13:23:39.707 LOG.INFO UiEvent.cs Line:51 Event() - Stop monitor pressure stability
    933. 

  933. [Save Log Job] 2024-10-31 13:23:39.711 LOG.INFO UiEvent.cs Line:51 Event() - System Recipe run completed，Recipe：20241031132223-CACB
    934. 

  934. Start time：2024/10/31 13:23:03
    935. 

  935. End time：2024/10/31 13:23:35
    936. 

  936. Total time：0:0:32
    937. 

  937. [Save Log Job] 2024-10-31 13:23:39.712 LOG.INFO UiEvent.cs Line:51 Event() - System Recipe completely run
    938. 

  938. [Save Log Job] 2024-10-31 13:23:39.714 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    939. 

  939. [Save Log Job] 2024-10-31 13:23:39.714 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    940. 

  940. [Save Log Job] 2024-10-31 13:23:39.716 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC1 ValveClose失败，原因：Valve keep open。
    941. 

  941. [Save Log Job] 2024-10-31 13:23:39.716 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC2 ValveClose失败，原因：Valve keep open。
    942. 

  942. [Save Log Job] 2024-10-31 13:23:39.716 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC4 ValveClose失败，原因：Valve keep open。
    943. 

  943. [Save Log Job] 2024-10-31 13:23:39.716 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC5 ValveClose失败，原因：Valve keep open。
    944. 

  944. [Save Log Job] 2024-10-31 13:23:39.718 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC3 ValveClose失败，原因：Valve keep open。
    945. 

  945. [Save Log Job] 2024-10-31 13:23:39.723 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门Process gas final valveClose失败，原因：Valve keep open。
    946. 

  946. --------------------------------[Header Log]----------------------------------------- [Save Log Job] 2024-10-31 13:26:29.079 LOG.INFO UiEvent.cs Line:58 Event() - 已经连接上设备实时控制系统
    947. 

  947. [Save Log Job] 2024-10-31 13:26:29.079 LOG.INFO UiEvent.cs Line:58 Event() - 已经连接上设备实时控制系统
    948. 

  948. --------------------------------[Header Log]----------------------------------------- [Save Log Job] 2024-10-31 13:26:59.322 LOG.INFO UiEvent.cs Line:58 Event() - 已经连接上设备实时控制系统
    949. 

  949. [Save Log Job] 2024-10-31 13:26:59.324 LOG.INFO UiEvent.cs Line:57 Event() - 已经连接上设备实时控制系统
    950. 

  950. [Save Log Job] 2024-10-31 13:27:00.585 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(System_IsMesMode, True)
    951. 

  951. [Save Log Job] 2024-10-31 13:27:00.637 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    952. 

  952. [Save Log Job] 2024-10-31 13:27:04.357 LOG.INFO UiEvent.cs Line:51 Event() - Software will be expired in -7 days, at 10/24/2024 12:00:00 AM 。
    953. 

  953. [Save Log Job] 2024-10-31 13:27:06.776 LOG.INFO UiEvent.cs Line:51 Event() - User admin login
    954. 

  954. [Save Log Job] 2024-10-31 13:27:11.303 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetAutoMode()
    955. 

  955. [Save Log Job] 2024-10-31 13:27:11.304 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentModeChanged
    956. 

  956. [Save Log Job] 2024-10-31 13:27:11.304 LOG.INFO UiEvent.cs Line:51 Event() - System running mode changed to Auto Mode
    957. 

  957. [Save Log Job] 2024-10-31 13:27:35.186 LOG.INFO YZQZFabAuto.cs Line:57 GetRecipeByMultipleLot() - GetRecipeByMultipleLot|http://192.168.1.207:86/api/mes/GetRecipeByMultipleLot?strQuery=[{"LotId":"SFC240912810","MachineNumber":"22","MachineType":"稷以打胶机"}]
    958. 

  958. [Save Log Job] 2024-10-31 13:27:35.245 LOG.INFO YZQZFabAuto.cs Line:59 GetRecipeByMultipleLot() - GetRecipeByMultipleLot|{"Status":200,"Message":"查询成功","Data":[{"LotId":"SFC240912810","DeviceName":"CPO4BCALO708U600HNA","RecipeName":"CACB","ComponentQty":13,"Operation":"P极光刻"}]}
    959. 

  959. [Save Log Job] 2024-10-31 13:27:36.560 LOG.INFO UiEvent.cs Line:51 Event() - Operation RunRecipe(CACB, SFC240912810/)
    960. 

  960. [Save Log Job] 2024-10-31 13:27:36.560 LOG.INFO UiEvent.cs Line:51 Event() - EventLotStart
    961. 

  961. [Save Log Job] 2024-10-31 13:27:36.560 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    962. 

  962. [Save Log Job] 2024-10-31 13:27:36.560 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check door status。
    963. 

  963. [Save Log Job] 2024-10-31 13:27:36.566 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check chamber door。
    964. 

  964. [Save Log Job] 2024-10-31 13:27:36.567 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check backpanel door。
    965. 

  965. [Save Log Job] 2024-10-31 13:27:36.568 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check pump status。
    966. 

  966. [Save Log Job] 2024-10-31 13:27:36.569 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Close all the valves。
    967. 

  967. [Save Log Job] 2024-10-31 13:27:36.662 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Open pumping valve。
    968. 

  968. [Save Log Job] 2024-10-31 13:27:38.677 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门Chamber pumping valveOpen失败，原因：Valve keep closed 。
    969. 

  969. [Save Log Job] 2024-10-31 13:27:40.393 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check chamber pressure。
    970. 

  970. [Save Log Job] 2024-10-31 13:28:15.364 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Pump below 100mTorr。
    971. 

  971. [Save Log Job] 2024-10-31 13:28:15.364 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：PreProcess Finished in 0.6 minitues。
    972. 

  972. [Save Log Job] 2024-10-31 13:28:15.364 LOG.INFO UiEvent.cs Line:51 Event() - System complete run 'PreProcess'.
    973. 

  973. [Save Log Job] 2024-10-31 13:28:15.365 LOG.INFO UiEvent.cs Line:51 Event() - Run Recipe 20241031132736-CACB
    974. 

  974. [Save Log Job] 2024-10-31 13:28:15.365 LOG.INFO UiEvent.cs Line:51 Event() - System recipe start run'20241031132736-CACB'
    975. 

  975. [Save Log Job] 2024-10-31 13:28:15.465 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241031132736-CACB' start run step 1：initial。
    976. 

  976. [Save Log Job] 2024-10-31 13:28:15.465 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。
    977. 

  977. [Save Log Job] 2024-10-31 13:28:15.467 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。
    978. 

  978. [Save Log Job] 2024-10-31 13:28:15.467 LOG.INFO UiEvent.cs Line:51 Event() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。
    979. 

  979. [Save Log Job] 2024-10-31 13:28:15.468 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。
    980. 

  980. [Save Log Job] 2024-10-31 13:28:15.469 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。
    981. 

  981. [Save Log Job] 2024-10-31 13:28:15.469 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。
    982. 

  982. [Save Log Job] 2024-10-31 13:28:15.474 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。
    983. 

  983. [Save Log Job] 2024-10-31 13:28:15.474 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPower，RF set Power:0。
    984. 

  984. [Save Log Job] 2024-10-31 13:28:15.474 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。
    985. 

  985. [Save Log Job] 2024-10-31 13:28:15.474 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。
    986. 

  986. [Save Log Job] 2024-10-31 13:28:15.475 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。
    987. 

  987. [Save Log Job] 2024-10-31 13:28:15.475 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas2， ramp to 56sccm。
    988. 

  988. [Save Log Job] 2024-10-31 13:28:15.475 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas3， ramp to 66sccm。
    989. 

  989. [Save Log Job] 2024-10-31 13:28:15.475 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas4， ramp to 76sccm。
    990. 

  990. [Save Log Job] 2024-10-31 13:28:15.475 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas5， ramp to 86sccm。
    991. 

  991. [Save Log Job] 2024-10-31 13:28:15.475 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPowerOnOff，Set RF power Off。
    992. 

  992. [Save Log Job] 2024-10-31 13:28:15.475 LOG.INFO UiEvent.cs Line:51 Event() - Start monitor pressure stability
    993. 

  993. [Save Log Job] 2024-10-31 13:28:15.476 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas1， ramp to 45sccm。
    994. 

  994. [Save Log Job] 2024-10-31 13:28:45.540 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241031132736-CACB' end step 1
    995. 

  995. [Save Log Job] 2024-10-31 13:28:45.540 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241031132736-CACB' start run step 2：initial。
    996. 

  996. [Save Log Job] 2024-10-31 13:28:45.541 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。
    997. 

  997. [Save Log Job] 2024-10-31 13:28:45.541 LOG.INFO UiEvent.cs Line:51 Event() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。
    998. 

  998. [Save Log Job] 2024-10-31 13:28:45.541 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。
    999. 

  999. [Save Log Job] 2024-10-31 13:28:45.542 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。
    1000. 

  1000. [Save Log Job] 2024-10-31 13:28:45.542 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。
    1001. 

  1001. [Save Log Job] 2024-10-31 13:28:45.542 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。
    1002. 

  1002. [Save Log Job] 2024-10-31 13:28:45.543 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。
    1003. 

  1003. [Save Log Job] 2024-10-31 13:28:45.543 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPower，RF set Power:190。
    1004. 

  1004. [Save Log Job] 2024-10-31 13:28:45.544 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。
    1005. 

  1005. [Save Log Job] 2024-10-31 13:28:45.544 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。
    1006. 

  1006. [Save Log Job] 2024-10-31 13:28:45.544 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。
    1007. 

  1007. [Save Log Job] 2024-10-31 13:28:45.545 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas1， ramp to 45sccm。
    1008. 

  1008. [Save Log Job] 2024-10-31 13:28:45.545 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas2， ramp to 56sccm。
    1009. 

  1009. [Save Log Job] 2024-10-31 13:28:45.545 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas3， ramp to 66sccm。
    1010. 

  1010. [Save Log Job] 2024-10-31 13:28:45.546 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas4， ramp to 76sccm。
    1011. 

  1011. [Save Log Job] 2024-10-31 13:28:45.546 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas5， ramp to 86sccm。
    1012. 

  1012. [Save Log Job] 2024-10-31 13:28:45.546 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPowerOnOff，Set RF power On。
    1013. 

  1013. [Save Log Job] 2024-10-31 13:28:50.496 LOG.INFO UiEvent.cs Line:51 Event() - System RF GeneratorTolerance alarm：Forward power 18 out of range[189,191] in 2 seconds.
    1014. 

  1014. [Save Log Job] 2024-10-31 13:28:50.496 LOG.INFO UiEvent.cs Line:51 Event() - Stop monitor pressure stability
    1015. 

  1015. [Save Log Job] 2024-10-31 13:28:50.496 LOG.INFO UiEvent.cs Line:51 Event() - System recipe was aborted: user aborted recipe
    1016. 

  1016. [Save Log Job] 2024-10-31 13:28:50.497 LOG.INFO UiEvent.cs Line:51 Event() - System Recipe run completed，Recipe：20241031132736-CACB
    1017. 

  1017. Start time：2024/10/31 13:28:15
    1018. 

  1018. End time：2024/10/31 13:28:48
    1019. 

  1019. Total time：0:0:32
    1020. 

  1020. [Save Log Job] 2024-10-31 13:28:50.497 LOG.INFO UiEvent.cs Line:51 Event() - System Recipe completely run
    1021. 

  1021. [Save Log Job] 2024-10-31 13:28:50.500 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC1 ValveClose失败，原因：Valve keep open。
    1022. 

  1022. [Save Log Job] 2024-10-31 13:28:50.500 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    1023. 

  1023. [Save Log Job] 2024-10-31 13:28:50.501 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC2 ValveClose失败，原因：Valve keep open。
    1024. 

  1024. [Save Log Job] 2024-10-31 13:28:50.501 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    1025. 

  1025. [Save Log Job] 2024-10-31 13:28:50.502 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC4 ValveClose失败，原因：Valve keep open。
    1026. 

  1026. [Save Log Job] 2024-10-31 13:28:50.502 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC5 ValveClose失败，原因：Valve keep open。
    1027. 

  1027. [Save Log Job] 2024-10-31 13:28:50.502 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门Process gas final valveClose失败，原因：Valve keep open。
    1028. 

  1028. [Save Log Job] 2024-10-31 13:28:50.506 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC3 ValveClose失败，原因：Valve keep open。
    1029. 

  1029. --------------------------------[Header Log]----------------------------------------- [Save Log Job] 2024-10-31 13:41:36.643 LOG.INFO UiEvent.cs Line:58 Event() - 已经连接上设备实时控制系统
    1030. 

  1030. [Save Log Job] 2024-10-31 13:41:36.646 LOG.INFO UiEvent.cs Line:57 Event() - 已经连接上设备实时控制系统
    1031. 

  1031. [Save Log Job] 2024-10-31 13:41:37.874 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(System_IsMesMode, True)
    1032. 

  1032. [Save Log Job] 2024-10-31 13:41:38.031 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    1033. 

  1033. [Save Log Job] 2024-10-31 13:41:41.652 LOG.INFO UiEvent.cs Line:51 Event() - Software will be expired in -7 days, at 10/24/2024 12:00:00 AM 。
    1034. 

  1034. [Save Log Job] 2024-10-31 13:41:43.571 LOG.INFO UiEvent.cs Line:51 Event() - User admin login
    1035. 

  1035. [Save Log Job] 2024-10-31 13:42:03.596 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetAutoMode()
    1036. 

  1036. [Save Log Job] 2024-10-31 13:42:03.596 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentModeChanged
    1037. 

  1037. [Save Log Job] 2024-10-31 13:42:03.596 LOG.INFO UiEvent.cs Line:51 Event() - System running mode changed to Auto Mode
    1038. 

  1038. [Save Log Job] 2024-10-31 13:42:06.549 LOG.INFO YZQZFabAuto.cs Line:57 GetRecipeByMultipleLot() - GetRecipeByMultipleLot|http://192.168.1.207:86/api/mes/GetRecipeByMultipleLot?strQuery=[]
    1039. 

  1039. [Save Log Job] 2024-10-31 13:42:06.573 LOG.INFO YZQZFabAuto.cs Line:59 GetRecipeByMultipleLot() - GetRecipeByMultipleLot|{"Status":205,"Message":"参数不能为空","Data":[]}
    1040. 

  1040. [Save Log Job] 2024-10-31 13:42:14.055 LOG.INFO YZQZFabAuto.cs Line:57 GetRecipeByMultipleLot() - GetRecipeByMultipleLot|http://192.168.1.207:86/api/mes/GetRecipeByMultipleLot?strQuery=[{"LotId":"SFC240912810","MachineNumber":"22","MachineType":"稷以打胶机"}]
    1041. 

  1041. [Save Log Job] 2024-10-31 13:42:14.115 LOG.INFO YZQZFabAuto.cs Line:59 GetRecipeByMultipleLot() - GetRecipeByMultipleLot|{"Status":200,"Message":"查询成功","Data":[{"LotId":"SFC240912810","DeviceName":"CPO4BCALO708U600HNA","RecipeName":"CACB","ComponentQty":13,"Operation":"P极光刻"}]}
    1042. 

  1042. [Save Log Job] 2024-10-31 13:42:15.874 LOG.INFO UiEvent.cs Line:51 Event() - Operation RunRecipe(CACB, SFC240912810/)
    1043. 

  1043. [Save Log Job] 2024-10-31 13:42:15.874 LOG.INFO UiEvent.cs Line:51 Event() - EventLotStart
    1044. 

  1044. [Save Log Job] 2024-10-31 13:42:15.976 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check door status。
    1045. 

  1045. [Save Log Job] 2024-10-31 13:42:15.976 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check chamber door。
    1046. 

  1046. [Save Log Job] 2024-10-31 13:42:15.976 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check backpanel door。
    1047. 

  1047. [Save Log Job] 2024-10-31 13:42:15.977 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check pump status。
    1048. 

  1048. [Save Log Job] 2024-10-31 13:42:15.977 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Close all the valves。
    1049. 

  1049. [Save Log Job] 2024-10-31 13:42:16.076 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Open pumping valve。
    1050. 

  1050. [Save Log Job] 2024-10-31 13:42:16.076 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    1051. 

  1051. [Save Log Job] 2024-10-31 13:42:17.686 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check chamber pressure。
    1052. 

  1052. [Save Log Job] 2024-10-31 13:42:52.660 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Pump below 100mTorr。
    1053. 

  1053. [Save Log Job] 2024-10-31 13:42:52.759 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：PreProcess Finished in 0.6 minitues。
    1054. 

  1054. [Save Log Job] 2024-10-31 13:42:52.760 LOG.INFO UiEvent.cs Line:51 Event() - System complete run 'PreProcess'.
    1055. 

  1055. [Save Log Job] 2024-10-31 13:42:52.760 LOG.INFO UiEvent.cs Line:51 Event() - Run Recipe 20241031134215-CACB
    1056. 

  1056. [Save Log Job] 2024-10-31 13:42:52.760 LOG.INFO UiEvent.cs Line:51 Event() - System recipe start run'20241031134215-CACB'
    1057. 

  1057. [Save Log Job] 2024-10-31 13:42:52.761 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241031134215-CACB' start run step 1：initial。
    1058. 

  1058. [Save Log Job] 2024-10-31 13:42:52.761 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。
    1059. 

  1059. [Save Log Job] 2024-10-31 13:42:52.761 LOG.INFO UiEvent.cs Line:51 Event() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。
    1060. 

  1060. [Save Log Job] 2024-10-31 13:42:52.762 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。
    1061. 

  1061. [Save Log Job] 2024-10-31 13:42:52.762 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。
    1062. 

  1062. [Save Log Job] 2024-10-31 13:42:52.762 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。
    1063. 

  1063. [Save Log Job] 2024-10-31 13:42:52.762 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。
    1064. 

  1064. [Save Log Job] 2024-10-31 13:42:52.762 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。
    1065. 

  1065. [Save Log Job] 2024-10-31 13:42:52.763 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPower，RF set Power:0。
    1066. 

  1066. [Save Log Job] 2024-10-31 13:42:52.763 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。
    1067. 

  1067. [Save Log Job] 2024-10-31 13:42:52.763 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。
    1068. 

  1068. [Save Log Job] 2024-10-31 13:42:52.764 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。
    1069. 

  1069. [Save Log Job] 2024-10-31 13:42:52.764 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas1， ramp to 45sccm。
    1070. 

  1070. [Save Log Job] 2024-10-31 13:42:52.765 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas2， ramp to 56sccm。
    1071. 

  1071. [Save Log Job] 2024-10-31 13:42:52.765 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas3， ramp to 66sccm。
    1072. 

  1072. [Save Log Job] 2024-10-31 13:42:52.765 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas4， ramp to 76sccm。
    1073. 

  1073. [Save Log Job] 2024-10-31 13:42:52.766 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas5， ramp to 86sccm。
    1074. 

  1074. [Save Log Job] 2024-10-31 13:42:52.768 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPowerOnOff，Set RF power Off。
    1075. 

  1075. [Save Log Job] 2024-10-31 13:42:52.860 LOG.INFO UiEvent.cs Line:51 Event() - Start monitor pressure stability
    1076. 

  1076. [Save Log Job] 2024-10-31 13:43:22.855 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241031134215-CACB' end step 1
    1077. 

  1077. [Save Log Job] 2024-10-31 13:43:22.956 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241031134215-CACB' start run step 2：initial。
    1078. 

  1078. [Save Log Job] 2024-10-31 13:43:22.956 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。
    1079. 

  1079. [Save Log Job] 2024-10-31 13:43:22.957 LOG.INFO UiEvent.cs Line:51 Event() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。
    1080. 

  1080. [Save Log Job] 2024-10-31 13:43:22.957 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。
    1081. 

  1081. [Save Log Job] 2024-10-31 13:43:22.958 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。
    1082. 

  1082. [Save Log Job] 2024-10-31 13:43:22.958 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。
    1083. 

  1083. [Save Log Job] 2024-10-31 13:43:22.958 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。
    1084. 

  1084. [Save Log Job] 2024-10-31 13:43:22.959 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。
    1085. 

  1085. [Save Log Job] 2024-10-31 13:43:22.959 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPower，RF set Power:190。
    1086. 

  1086. [Save Log Job] 2024-10-31 13:43:22.959 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。
    1087. 

  1087. [Save Log Job] 2024-10-31 13:43:22.959 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。
    1088. 

  1088. [Save Log Job] 2024-10-31 13:43:22.960 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。
    1089. 

  1089. [Save Log Job] 2024-10-31 13:43:22.960 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas1， ramp to 45sccm。
    1090. 

  1090. [Save Log Job] 2024-10-31 13:43:22.961 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas2， ramp to 56sccm。
    1091. 

  1091. [Save Log Job] 2024-10-31 13:43:22.961 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas3， ramp to 66sccm。
    1092. 

  1092. [Save Log Job] 2024-10-31 13:43:22.961 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas4， ramp to 76sccm。
    1093. 

  1093. [Save Log Job] 2024-10-31 13:43:22.962 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas5， ramp to 86sccm。
    1094. 

  1094. [Save Log Job] 2024-10-31 13:43:22.962 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPowerOnOff，Set RF power On。
    1095. 

  1095. --------------------------------[Header Log]----------------------------------------- [Save Log Job] 2024-10-31 13:59:12.224 LOG.INFO UiEvent.cs Line:58 Event() - 已经连接上设备实时控制系统
    1096. 

  1096. [Save Log Job] 2024-10-31 13:59:12.226 LOG.INFO UiEvent.cs Line:57 Event() - 已经连接上设备实时控制系统
    1097. 

  1097. [Save Log Job] 2024-10-31 13:59:13.524 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(System_IsMesMode, True)
    1098. 

  1098. [Save Log Job] 2024-10-31 13:59:13.525 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    1099. 

  1099. [Save Log Job] 2024-10-31 13:59:17.199 LOG.INFO UiEvent.cs Line:51 Event() - Software will be expired in -7 days, at 10/24/2024 12:00:00 AM 。
    1100. 

  1100. [Save Log Job] 2024-10-31 13:59:20.215 LOG.INFO UiEvent.cs Line:51 Event() - User admin login
    1101. 

  1101. [Save Log Job] 2024-10-31 14:00:34.466 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetAutoMode()
    1102. 

  1102. [Save Log Job] 2024-10-31 14:00:34.466 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentModeChanged
    1103. 

  1103. [Save Log Job] 2024-10-31 14:00:34.466 LOG.INFO UiEvent.cs Line:51 Event() - System running mode changed to Auto Mode
    1104. 

  1104. [Save Log Job] 2024-10-31 14:00:59.620 LOG.INFO YZQZFabAuto.cs Line:57 GetRecipeByMultipleLot() - GetRecipeByMultipleLot|http://192.168.1.207:86/api/mes/GetRecipeByMultipleLot?strQuery=[{"LotId":"EFC241014689","MachineNumber":"22","MachineType":"稷以打胶机"},{"LotId":"SFC240912810","MachineNumber":"22","MachineType":"稷以打胶机"}]
    1105. 

  1105. [Save Log Job] 2024-10-31 14:00:59.712 LOG.INFO YZQZFabAuto.cs Line:59 GetRecipeByMultipleLot() - GetRecipeByMultipleLot|{"Status":200,"Message":"查询成功","Data":[{"LotId":"EFC241014689","DeviceName":"CPX4BCAYG606L400HNA","RecipeName":"CACB","ComponentQty":11,"Operation":"P极光刻"},{"LotId":"SFC240912810","DeviceName":"CPO4BCALO708U600HNA","RecipeName":"CACB","ComponentQty":13,"Operation":"P极光刻"}]}
    1106. 

  1106. [Save Log Job] 2024-10-31 14:01:01.843 LOG.INFO UiEvent.cs Line:51 Event() - Operation RunRecipe(CACB, SFC240912810/EFC241014689/)
    1107. 

  1107. [Save Log Job] 2024-10-31 14:01:01.844 LOG.INFO UiEvent.cs Line:51 Event() - EventLotStart
    1108. 

  1108. [Save Log Job] 2024-10-31 14:01:01.943 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check door status。
    1109. 

  1109. [Save Log Job] 2024-10-31 14:01:01.944 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check chamber door。
    1110. 

  1110. [Save Log Job] 2024-10-31 14:01:01.944 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check backpanel door。
    1111. 

  1111. [Save Log Job] 2024-10-31 14:01:01.948 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check pump status。
    1112. 

  1112. [Save Log Job] 2024-10-31 14:01:01.948 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Open pumping valve。
    1113. 

  1113. [Save Log Job] 2024-10-31 14:01:01.948 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Close all the valves。
    1114. 

  1114. [Save Log Job] 2024-10-31 14:01:01.948 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    1115. 

  1115. [Save Log Job] 2024-10-31 14:01:03.959 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门Chamber pumping valveOpen失败，原因：Valve keep closed 。
    1116. 

  1116. [Save Log Job] 2024-10-31 14:01:06.176 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check chamber pressure。
    1117. 

  1117. [Save Log Job] 2024-10-31 14:01:41.041 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Pump below 100mTorr。
    1118. 

  1118. [Save Log Job] 2024-10-31 14:01:41.041 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：PreProcess Finished in 0.7 minitues。
    1119. 

  1119. [Save Log Job] 2024-10-31 14:01:41.042 LOG.INFO UiEvent.cs Line:51 Event() - System complete run 'PreProcess'.
    1120. 

  1120. [Save Log Job] 2024-10-31 14:01:41.042 LOG.INFO UiEvent.cs Line:51 Event() - Run Recipe 20241031140101-CACB
    1121. 

  1121. [Save Log Job] 2024-10-31 14:01:41.042 LOG.INFO UiEvent.cs Line:51 Event() - System recipe start run'20241031140101-CACB'
    1122. 

  1122. [Save Log Job] 2024-10-31 14:01:41.142 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241031140101-CACB' start run step 1：initial。
    1123. 

  1123. [Save Log Job] 2024-10-31 14:01:41.142 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。
    1124. 

  1124. [Save Log Job] 2024-10-31 14:01:41.142 LOG.INFO UiEvent.cs Line:51 Event() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。
    1125. 

  1125. [Save Log Job] 2024-10-31 14:01:41.143 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。
    1126. 

  1126. [Save Log Job] 2024-10-31 14:01:41.143 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。
    1127. 

  1127. [Save Log Job] 2024-10-31 14:01:41.143 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。
    1128. 

  1128. [Save Log Job] 2024-10-31 14:01:41.144 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。
    1129. 

  1129. [Save Log Job] 2024-10-31 14:01:41.144 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。
    1130. 

  1130. [Save Log Job] 2024-10-31 14:01:41.145 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPower，RF set Power:0。
    1131. 

  1131. [Save Log Job] 2024-10-31 14:01:41.145 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。
    1132. 

  1132. [Save Log Job] 2024-10-31 14:01:41.145 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。
    1133. 

  1133. [Save Log Job] 2024-10-31 14:01:41.146 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。
    1134. 

  1134. [Save Log Job] 2024-10-31 14:01:41.146 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas1， ramp to 45sccm。
    1135. 

  1135. [Save Log Job] 2024-10-31 14:01:41.146 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas2， ramp to 56sccm。
    1136. 

  1136. [Save Log Job] 2024-10-31 14:01:41.147 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas3， ramp to 66sccm。
    1137. 

  1137. [Save Log Job] 2024-10-31 14:01:41.147 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas4， ramp to 76sccm。
    1138. 

  1138. [Save Log Job] 2024-10-31 14:01:41.147 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas5， ramp to 86sccm。
    1139. 

  1139. [Save Log Job] 2024-10-31 14:01:41.148 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPowerOnOff，Set RF power Off。
    1140. 

  1140. [Save Log Job] 2024-10-31 14:01:41.148 LOG.INFO UiEvent.cs Line:51 Event() - Start monitor pressure stability
    1141. 

  1141. [Save Log Job] 2024-10-31 14:02:11.230 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241031140101-CACB' end step 1
    1142. 

  1142. [Save Log Job] 2024-10-31 14:02:11.230 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241031140101-CACB' start run step 2：initial。
    1143. 

  1143. [Save Log Job] 2024-10-31 14:02:11.230 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。
    1144. 

  1144. [Save Log Job] 2024-10-31 14:02:11.231 LOG.INFO UiEvent.cs Line:51 Event() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。
    1145. 

  1145. [Save Log Job] 2024-10-31 14:02:11.231 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。
    1146. 

  1146. [Save Log Job] 2024-10-31 14:02:11.231 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。
    1147. 

  1147. [Save Log Job] 2024-10-31 14:02:11.232 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。
    1148. 

  1148. [Save Log Job] 2024-10-31 14:02:11.232 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。
    1149. 

  1149. [Save Log Job] 2024-10-31 14:02:11.232 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。
    1150. 

  1150. [Save Log Job] 2024-10-31 14:02:11.233 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPower，RF set Power:190。
    1151. 

  1151. [Save Log Job] 2024-10-31 14:02:11.233 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。
    1152. 

  1152. [Save Log Job] 2024-10-31 14:02:11.233 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。
    1153. 

  1153. [Save Log Job] 2024-10-31 14:02:11.234 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。
    1154. 

  1154. [Save Log Job] 2024-10-31 14:02:11.234 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas1， ramp to 45sccm。
    1155. 

  1155. [Save Log Job] 2024-10-31 14:02:11.235 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas2， ramp to 56sccm。
    1156. 

  1156. [Save Log Job] 2024-10-31 14:02:11.235 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas3， ramp to 66sccm。
    1157. 

  1157. [Save Log Job] 2024-10-31 14:02:11.235 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas4， ramp to 76sccm。
    1158. 

  1158. [Save Log Job] 2024-10-31 14:02:11.236 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas5， ramp to 86sccm。
    1159. 

  1159. [Save Log Job] 2024-10-31 14:02:11.236 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPowerOnOff，Set RF power On。
    1160. 

  1160. [Save Log Job] 2024-10-31 14:02:19.404 LOG.INFO UiEvent.cs Line:51 Event() - System RF GeneratorTolerance alarm：Forward power 18 out of range[189,191] in 2 seconds.
    1161. 

  1161. --------------------------------[Header Log]----------------------------------------- [Save Log Job] 2024-10-31 14:03:25.795 LOG.INFO UiEvent.cs Line:58 Event() - 已经连接上设备实时控制系统
    1162. 

  1162. [Save Log Job] 2024-10-31 14:03:25.795 LOG.INFO UiEvent.cs Line:58 Event() - 已经连接上设备实时控制系统
    1163. 

  1163. [Save Log Job] 2024-10-31 14:03:27.064 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(System_IsMesMode, True)
    1164. 

  1164. [Save Log Job] 2024-10-31 14:03:27.313 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    1165. 

  1165. [Save Log Job] 2024-10-31 14:03:31.037 LOG.INFO UiEvent.cs Line:51 Event() - Software will be expired in -7 days, at 10/24/2024 12:00:00 AM 。
    1166. 

  1166. [Save Log Job] 2024-10-31 14:04:02.752 LOG.INFO UiEvent.cs Line:51 Event() - User admin login
    1167. 

  1167. [Save Log Job] 2024-10-31 14:04:16.225 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetAutoMode()
    1168. 

  1168. [Save Log Job] 2024-10-31 14:04:16.225 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentModeChanged
    1169. 

  1169. [Save Log Job] 2024-10-31 14:04:16.227 LOG.INFO UiEvent.cs Line:51 Event() - System running mode changed to Auto Mode
    1170. 

  1170. [Save Log Job] 2024-10-31 14:04:42.254 LOG.INFO YZQZFabAuto.cs Line:57 GetRecipeByMultipleLot() - GetRecipeByMultipleLot|http://192.168.1.207:86/api/mes/GetRecipeByMultipleLot?strQuery=[{"LotId":"EFC241014689","MachineNumber":"22","MachineType":"稷以打胶机"},{"LotId":"SFC240912810","MachineNumber":"22","MachineType":"稷以打胶机"}]
    1171. 

  1171. [Save Log Job] 2024-10-31 14:04:42.393 LOG.INFO YZQZFabAuto.cs Line:59 GetRecipeByMultipleLot() - GetRecipeByMultipleLot|{"Status":200,"Message":"查询成功","Data":[{"LotId":"EFC241014689","DeviceName":"CPX4BCAYG606L400HNA","RecipeName":"CACB","ComponentQty":11,"Operation":"P极光刻"},{"LotId":"SFC240912810","DeviceName":"CPO4BCALO708U600HNA","RecipeName":"CACB","ComponentQty":13,"Operation":"P极光刻"}]}
    1172. 

  1172. [Save Log Job] 2024-10-31 14:04:47.506 LOG.INFO UiEvent.cs Line:51 Event() - Operation RunRecipe(CACB, SFC240912810/EFC241014689/)
    1173. 

  1173. [Save Log Job] 2024-10-31 14:04:47.607 LOG.INFO UiEvent.cs Line:51 Event() - EventLotStart
    1174. 

  1174. [Save Log Job] 2024-10-31 14:04:47.607 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    1175. 

  1175. [Save Log Job] 2024-10-31 14:04:47.608 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check door status。
    1176. 

  1176. [Save Log Job] 2024-10-31 14:04:47.608 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check chamber door。
    1177. 

  1177. [Save Log Job] 2024-10-31 14:04:47.609 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check backpanel door。
    1178. 

  1178. [Save Log Job] 2024-10-31 14:04:47.609 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check pump status。
    1179. 

  1179. [Save Log Job] 2024-10-31 14:04:47.609 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Close all the valves。
    1180. 

  1180. [Save Log Job] 2024-10-31 14:04:47.707 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Open pumping valve。
    1181. 

  1181. [Save Log Job] 2024-10-31 14:04:49.220 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check chamber pressure。
    1182. 

  1182. [Save Log Job] 2024-10-31 14:05:28.126 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Pump below 100mTorr。
    1183. 

  1183. [Save Log Job] 2024-10-31 14:05:28.226 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：PreProcess Finished in 0.7 minitues。
    1184. 

  1184. [Save Log Job] 2024-10-31 14:05:28.227 LOG.INFO UiEvent.cs Line:51 Event() - System complete run 'PreProcess'.
    1185. 

  1185. [Save Log Job] 2024-10-31 14:05:28.227 LOG.INFO UiEvent.cs Line:51 Event() - Run Recipe 20241031140447-CACB
    1186. 

  1186. [Save Log Job] 2024-10-31 14:05:28.228 LOG.INFO UiEvent.cs Line:51 Event() - System recipe start run'20241031140447-CACB'
    1187. 

  1187. [Save Log Job] 2024-10-31 14:05:28.228 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241031140447-CACB' start run step 1：initial。
    1188. 

  1188. [Save Log Job] 2024-10-31 14:05:28.228 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。
    1189. 

  1189. [Save Log Job] 2024-10-31 14:05:28.229 LOG.INFO UiEvent.cs Line:51 Event() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。
    1190. 

  1190. [Save Log Job] 2024-10-31 14:05:28.229 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。
    1191. 

  1191. [Save Log Job] 2024-10-31 14:05:28.229 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。
    1192. 

  1192. [Save Log Job] 2024-10-31 14:05:28.229 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。
    1193. 

  1193. [Save Log Job] 2024-10-31 14:05:28.230 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。
    1194. 

  1194. [Save Log Job] 2024-10-31 14:05:28.230 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。
    1195. 

  1195. [Save Log Job] 2024-10-31 14:05:28.231 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPower，RF set Power:0。
    1196. 

  1196. [Save Log Job] 2024-10-31 14:05:28.231 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。
    1197. 

  1197. [Save Log Job] 2024-10-31 14:05:28.231 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。
    1198. 

  1198. [Save Log Job] 2024-10-31 14:05:28.232 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。
    1199. 

  1199. [Save Log Job] 2024-10-31 14:05:28.232 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas1， ramp to 45sccm。
    1200. 

  1200. [Save Log Job] 2024-10-31 14:05:28.232 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas2， ramp to 56sccm。
    1201. 

  1201. [Save Log Job] 2024-10-31 14:05:28.233 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas3， ramp to 66sccm。
    1202. 

  1202. [Save Log Job] 2024-10-31 14:05:28.233 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas4， ramp to 76sccm。
    1203. 

  1203. [Save Log Job] 2024-10-31 14:05:28.233 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas5， ramp to 86sccm。
    1204. 

  1204. [Save Log Job] 2024-10-31 14:05:28.234 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPowerOnOff，Set RF power Off。
    1205. 

  1205. [Save Log Job] 2024-10-31 14:05:28.327 LOG.INFO UiEvent.cs Line:51 Event() - Start monitor pressure stability
    1206. 

  1206. [Save Log Job] 2024-10-31 14:05:58.320 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241031140447-CACB' end step 1
    1207. 

  1207. [Save Log Job] 2024-10-31 14:05:58.322 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241031140447-CACB' start run step 2：initial。
    1208. 

  1208. [Save Log Job] 2024-10-31 14:05:58.322 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。
    1209. 

  1209. [Save Log Job] 2024-10-31 14:05:58.324 LOG.INFO UiEvent.cs Line:51 Event() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。
    1210. 

  1210. [Save Log Job] 2024-10-31 14:05:58.324 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。
    1211. 

  1211. [Save Log Job] 2024-10-31 14:05:58.324 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。
    1212. 

  1212. [Save Log Job] 2024-10-31 14:05:58.326 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。
    1213. 

  1213. [Save Log Job] 2024-10-31 14:05:58.326 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。
    1214. 

  1214. [Save Log Job] 2024-10-31 14:05:58.326 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。
    1215. 

  1215. [Save Log Job] 2024-10-31 14:05:58.326 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPower，RF set Power:190。
    1216. 

  1216. [Save Log Job] 2024-10-31 14:05:58.326 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。
    1217. 

  1217. [Save Log Job] 2024-10-31 14:05:58.326 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas1， ramp to 45sccm。
    1218. 

  1218. [Save Log Job] 2024-10-31 14:05:58.326 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。
    1219. 

  1219. [Save Log Job] 2024-10-31 14:05:58.326 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas3， ramp to 66sccm。
    1220. 

  1220. [Save Log Job] 2024-10-31 14:05:58.326 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas2， ramp to 56sccm。
    1221. 

  1221. [Save Log Job] 2024-10-31 14:05:58.326 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas4， ramp to 76sccm。
    1222. 

  1222. [Save Log Job] 2024-10-31 14:05:58.327 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。
    1223. 

  1223. [Save Log Job] 2024-10-31 14:05:58.327 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas5， ramp to 86sccm。
    1224. 

  1224. [Save Log Job] 2024-10-31 14:05:58.327 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPowerOnOff，Set RF power On。
    1225. 

  1225. [Save Log Job] 2024-10-31 14:06:04.812 LOG.INFO UiEvent.cs Line:51 Event() - System RF GeneratorTolerance alarm：Forward power 18 out of range[189,191] in 2 seconds.
    1226. 

  1226. [Save Log Job] 2024-10-31 14:06:09.503 LOG.INFO UiEvent.cs Line:51 Event() - System recipe was aborted: user aborted recipe
    1227. 

  1227. [Save Log Job] 2024-10-31 14:06:11.250 LOG.INFO UiEvent.cs Line:51 Event() - Stop monitor pressure stability
    1228. 

  1228. [Save Log Job] 2024-10-31 14:06:11.251 LOG.INFO UiEvent.cs Line:51 Event() - System Recipe run completed，Recipe：20241031140447-CACB
    1229. 

  1229. Start time：2024/10/31 14:05:28
    1230. 

  1230. End time：2024/10/31 14:06:05
    1231. 

  1231. Total time：0:0:37
    1232. 

  1232. [Save Log Job] 2024-10-31 14:06:11.252 LOG.INFO UiEvent.cs Line:51 Event() - System Recipe completely run
    1233. 

  1233. [Save Log Job] 2024-10-31 14:06:11.254 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC1 ValveClose失败，原因：Valve keep open。
    1234. 

  1234. [Save Log Job] 2024-10-31 14:06:12.288 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC2 ValveClose失败，原因：Valve keep open。
    1235. 

  1235. [Save Log Job] 2024-10-31 14:06:14.326 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    1236. 

  1236. [Save Log Job] 2024-10-31 14:06:14.326 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC1 ValveClose失败，原因：Valve keep open。
    1237. 

  1237. [Save Log Job] 2024-10-31 14:06:14.326 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC2 ValveClose失败，原因：Valve keep open。
    1238. 

  1238. [Save Log Job] 2024-10-31 14:06:14.831 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC3 ValveClose失败，原因：Valve keep open。
    1239. 

  1239. --------------------------------[Header Log]----------------------------------------- [Save Log Job] 2024-10-31 14:29:01.683 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    1240. 

  1240. [Save Log Job] 2024-10-31 14:29:01.791 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(System_IsMesMode, True)
    1241. 

  1241. [Save Log Job] 2024-10-31 14:29:05.209 LOG.INFO UiEvent.cs Line:51 Event() - Software will be expired in -7 days, at 10/24/2024 12:00:00 AM 。
    1242. 

  1242. [Save Log Job] 2024-10-31 14:29:10.810 LOG.INFO UiEvent.cs Line:51 Event() - User admin login
    1243. 

  1243. [Save Log Job] 2024-10-31 14:29:24.669 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetAutoMode()
    1244. 

  1244. [Save Log Job] 2024-10-31 14:29:24.670 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentModeChanged
    1245. 

  1245. [Save Log Job] 2024-10-31 14:29:24.670 LOG.INFO UiEvent.cs Line:51 Event() - System running mode changed to Auto Mode
    1246. 

  1246. [Save Log Job] 2024-10-31 14:29:40.338 LOG.INFO YZQZFabAuto.cs Line:57 GetRecipeByMultipleLot() - GetRecipeByMultipleLot|http://192.168.1.207:86/api/mes/GetRecipeByMultipleLot?strQuery=[{"LotId":"EFC241014689","MachineNumber":"22","MachineType":"稷以打胶机"},{"LotId":"SFC240912810","MachineNumber":"22","MachineType":"稷以打胶机"}]
    1247. 

  1247. [Save Log Job] 2024-10-31 14:29:40.596 LOG.INFO YZQZFabAuto.cs Line:59 GetRecipeByMultipleLot() - GetRecipeByMultipleLot|{"Status":200,"Message":"查询成功","Data":[{"LotId":"EFC241014689","DeviceName":"CPX4BCAYG606L400HNA","RecipeName":"CACB","ComponentQty":11,"Operation":"P极光刻"},{"LotId":"SFC240912810","DeviceName":"CPO4BCALO708U600HNA","RecipeName":"CACB","ComponentQty":13,"Operation":"P极光刻"}]}
    1248. 

  1248. [Save Log Job] 2024-10-31 14:29:43.088 LOG.INFO UiEvent.cs Line:51 Event() - EventLotStart
    1249. 

  1249. [Save Log Job] 2024-10-31 14:29:43.088 LOG.INFO UiEvent.cs Line:51 Event() - Operation RunRecipe(CACB, SFC240912810/EFC241014689)
    1250. 

  1250. [Save Log Job] 2024-10-31 14:29:43.185 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check door status。
    1251. 

  1251. [Save Log Job] 2024-10-31 14:29:43.186 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check chamber door。
    1252. 

  1252. [Save Log Job] 2024-10-31 14:29:43.186 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check backpanel door。
    1253. 

  1253. [Save Log Job] 2024-10-31 14:29:43.187 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check pump status。
    1254. 

  1254. [Save Log Job] 2024-10-31 14:29:43.187 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    1255. 

  1255. [Save Log Job] 2024-10-31 14:29:43.188 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Close all the valves。
    1256. 

  1256. [Save Log Job] 2024-10-31 14:29:43.285 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Open pumping valve。
    1257. 

  1257. [Save Log Job] 2024-10-31 14:29:45.103 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check chamber pressure。
    1258. 

  1258. [Save Log Job] 2024-10-31 14:30:27.904 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Pump below 100mTorr。
    1259. 

  1259. [Save Log Job] 2024-10-31 14:30:27.904 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：PreProcess Finished in 0.7 minitues。
    1260. 

  1260. [Save Log Job] 2024-10-31 14:30:27.904 LOG.INFO UiEvent.cs Line:51 Event() - System complete run 'PreProcess'.
    1261. 

  1261. [Save Log Job] 2024-10-31 14:30:27.904 LOG.INFO UiEvent.cs Line:51 Event() - Run Recipe 20241031142943-CACB
    1262. 

  1262. [Save Log Job] 2024-10-31 14:30:27.905 LOG.INFO UiEvent.cs Line:51 Event() - System recipe start run'20241031142943-CACB'
    1263. 

  1263. [Save Log Job] 2024-10-31 14:30:28.004 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241031142943-CACB' start run step 1：initial。
    1264. 

  1264. [Save Log Job] 2024-10-31 14:30:28.007 LOG.INFO UiEvent.cs Line:51 Event() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。
    1265. 

  1265. [Save Log Job] 2024-10-31 14:30:28.007 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。
    1266. 

  1266. [Save Log Job] 2024-10-31 14:30:28.010 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。
    1267. 

  1267. [Save Log Job] 2024-10-31 14:30:28.010 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。
    1268. 

  1268. [Save Log Job] 2024-10-31 14:30:28.010 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。
    1269. 

  1269. [Save Log Job] 2024-10-31 14:30:28.012 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。
    1270. 

  1270. [Save Log Job] 2024-10-31 14:30:28.013 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。
    1271. 

  1271. [Save Log Job] 2024-10-31 14:30:28.014 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPower，RF set Power:0。
    1272. 

  1272. [Save Log Job] 2024-10-31 14:30:28.014 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。
    1273. 

  1273. [Save Log Job] 2024-10-31 14:30:28.014 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。
    1274. 

  1274. [Save Log Job] 2024-10-31 14:30:28.016 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。
    1275. 

  1275. [Save Log Job] 2024-10-31 14:30:28.017 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas2， ramp to 56sccm。
    1276. 

  1276. [Save Log Job] 2024-10-31 14:30:28.018 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas4， ramp to 76sccm。
    1277. 

  1277. [Save Log Job] 2024-10-31 14:30:28.018 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas5， ramp to 86sccm。
    1278. 

  1278. [Save Log Job] 2024-10-31 14:30:28.018 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas3， ramp to 66sccm。
    1279. 

  1279. [Save Log Job] 2024-10-31 14:30:28.018 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPowerOnOff，Set RF power Off。
    1280. 

  1280. [Save Log Job] 2024-10-31 14:30:28.018 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas1， ramp to 45sccm。
    1281. 

  1281. [Save Log Job] 2024-10-31 14:30:28.020 LOG.INFO UiEvent.cs Line:51 Event() - Start monitor pressure stability
    1282. 

  1282. [Save Log Job] 2024-10-31 14:30:58.117 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241031142943-CACB' end step 1
    1283. 

  1283. [Save Log Job] 2024-10-31 14:30:58.117 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241031142943-CACB' start run step 2：initial。
    1284. 

  1284. [Save Log Job] 2024-10-31 14:30:58.118 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。
    1285. 

  1285. [Save Log Job] 2024-10-31 14:30:58.118 LOG.INFO UiEvent.cs Line:51 Event() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。
    1286. 

  1286. [Save Log Job] 2024-10-31 14:30:58.119 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。
    1287. 

  1287. [Save Log Job] 2024-10-31 14:30:58.119 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。
    1288. 

  1288. [Save Log Job] 2024-10-31 14:30:58.120 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。
    1289. 

  1289. [Save Log Job] 2024-10-31 14:30:58.121 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。
    1290. 

  1290. [Save Log Job] 2024-10-31 14:30:58.122 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。
    1291. 

  1291. [Save Log Job] 2024-10-31 14:30:58.123 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPower，RF set Power:190。
    1292. 

  1292. [Save Log Job] 2024-10-31 14:30:58.123 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。
    1293. 

  1293. [Save Log Job] 2024-10-31 14:30:58.124 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。
    1294. 

  1294. [Save Log Job] 2024-10-31 14:30:58.124 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。
    1295. 

  1295. [Save Log Job] 2024-10-31 14:30:58.125 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas1， ramp to 45sccm。
    1296. 

  1296. [Save Log Job] 2024-10-31 14:30:58.125 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas2， ramp to 56sccm。
    1297. 

  1297. [Save Log Job] 2024-10-31 14:30:58.126 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas3， ramp to 66sccm。
    1298. 

  1298. [Save Log Job] 2024-10-31 14:30:58.126 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas4， ramp to 76sccm。
    1299. 

  1299. [Save Log Job] 2024-10-31 14:30:58.128 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas5， ramp to 86sccm。
    1300. 

  1300. [Save Log Job] 2024-10-31 14:30:58.128 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPowerOnOff，Set RF power On。
    1301. 

  1301. [Save Log Job] 2024-10-31 14:31:05.117 LOG.INFO UiEvent.cs Line:51 Event() - System RF GeneratorTolerance alarm：Forward power 18 out of range[189,191] in 2 seconds.
    1302. 

  1302. [Save Log Job] 2024-10-31 14:31:05.124 LOG.INFO UiEvent.cs Line:51 Event() - System recipe was aborted: user aborted recipe
    1303. 

  1303. [Save Log Job] 2024-10-31 14:31:05.930 LOG.INFO UiEvent.cs Line:51 Event() - Stop monitor pressure stability
    1304. 

  1304. [Save Log Job] 2024-10-31 14:31:07.371 LOG.INFO UiEvent.cs Line:51 Event() - System Recipe run completed，Recipe：20241031142943-CACB
    1305. 

  1305. Start time：2024/10/31 14:30:27
    1306. 

  1306. End time：2024/10/31 14:31:04
    1307. 

  1307. Total time：0:0:36
    1308. 

  1308. [Save Log Job] 2024-10-31 14:31:07.371 LOG.INFO UiEvent.cs Line:51 Event() - System Recipe completely run
    1309. 

  1309. [Save Log Job] 2024-10-31 14:31:07.378 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    1310. 

  1310. [Save Log Job] 2024-10-31 14:31:10.953 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC1 ValveClose失败，原因：Valve keep open。
    1311. 

  1311. [Save Log Job] 2024-10-31 14:31:11.526 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC2 ValveClose失败，原因：Valve keep open。
    1312. 

  1312. [Save Log Job] 2024-10-31 14:31:11.534 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC3 ValveClose失败，原因：Valve keep open。
    1313. 

  1313. --------------------------------[Header Log]----------------------------------------- [Save Log Job] 2024-10-31 14:33:18.836 LOG.INFO UiEvent.cs Line:58 Event() - 已经连接上设备实时控制系统
    1314. 

  1314. [Save Log Job] 2024-10-31 14:33:18.837 LOG.INFO UiEvent.cs Line:57 Event() - 已经连接上设备实时控制系统
    1315. 

  1315. [Save Log Job] 2024-10-31 14:33:20.295 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(System_IsMesMode, True)
    1316. 

  1316. [Save Log Job] 2024-10-31 14:33:20.336 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    1317. 

  1317. [Save Log Job] 2024-10-31 14:33:23.956 LOG.INFO UiEvent.cs Line:51 Event() - Software will be expired in -7 days, at 10/24/2024 12:00:00 AM 。
    1318. 

  1318. --------------------------------[Header Log]----------------------------------------- [Save Log Job] 2024-10-31 15:04:42.265 LOG.INFO UiEvent.cs Line:58 Event() - 已经连接上设备实时控制系统
    1319. 

  1319. [Save Log Job] 2024-10-31 15:04:42.267 LOG.INFO UiEvent.cs Line:57 Event() - 已经连接上设备实时控制系统
    1320. 

  1320. [Save Log Job] 2024-10-31 15:04:43.766 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    1321. 

  1321. [Save Log Job] 2024-10-31 15:04:43.789 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(System_IsMesMode, True)
    1322. 

  1322. [Save Log Job] 2024-10-31 15:04:47.410 LOG.INFO UiEvent.cs Line:51 Event() - Software will be expired in -7 days, at 10/24/2024 12:00:00 AM 。
    1323. 

  1323. [Save Log Job] 2024-10-31 15:04:49.950 LOG.INFO UiEvent.cs Line:51 Event() - User admin login
    1324. 

  1324. [Save Log Job] 2024-10-31 15:05:03.130 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetAutoMode()
    1325. 

  1325. [Save Log Job] 2024-10-31 15:05:03.131 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentModeChanged
    1326. 

  1326. [Save Log Job] 2024-10-31 15:05:03.131 LOG.INFO UiEvent.cs Line:51 Event() - System running mode changed to Auto Mode
    1327. 

  1327. [Save Log Job] 2024-10-31 15:05:17.043 LOG.INFO YZQZFabAuto.cs Line:57 GetRecipeByMultipleLot() - GetRecipeByMultipleLot|http://192.168.1.207:86/api/mes/GetRecipeByMultipleLot?strQuery=[{"LotId":"EFC241014689","MachineNumber":"22","MachineType":"稷以打胶机"},{"LotId":"SFC240912810","MachineNumber":"22","MachineType":"稷以打胶机"}]
    1328. 

  1328. [Save Log Job] 2024-10-31 15:05:21.457 LOG.INFO YZQZFabAuto.cs Line:59 GetRecipeByMultipleLot() - GetRecipeByMultipleLot|The request was aborted: The operation has timed out.
    1329. 

  1329. [Save Log Job] 2024-10-31 15:06:01.224 LOG.INFO YZQZFabAuto.cs Line:57 GetRecipeByMultipleLot() - GetRecipeByMultipleLot|http://192.168.1.207:86/api/mes/GetRecipeByMultipleLot?strQuery=[{"LotId":"EFC241014689","MachineNumber":"22","MachineType":"稷以打胶机"},{"LotId":"SFC240912810","MachineNumber":"22","MachineType":"稷以打胶机"}]
    1330. 

  1330. [Save Log Job] 2024-10-31 15:06:43.129 LOG.INFO YZQZFabAuto.cs Line:59 GetRecipeByMultipleLot() - GetRecipeByMultipleLot|The request was aborted: The operation has timed out.
    1331. 

  1331. [Save Log Job] 2024-10-31 15:07:01.271 LOG.INFO YZQZFabAuto.cs Line:57 GetRecipeByMultipleLot() - GetRecipeByMultipleLot|http://192.168.1.207:86/api/mes/GetRecipeByMultipleLot?strQuery=[{"LotId":"EFC241014689","MachineNumber":"22","MachineType":"稷以打胶机"},{"LotId":"SFC240912810","MachineNumber":"22","MachineType":"稷以打胶机"}]
    1332. 

  1332. [Save Log Job] 2024-10-31 15:07:01.525 LOG.INFO YZQZFabAuto.cs Line:59 GetRecipeByMultipleLot() - GetRecipeByMultipleLot|{"Status":200,"Message":"查询成功","Data":[{"LotId":"EFC241014689","DeviceName":"CPX4BCAYG606L400HNA","RecipeName":"CACB","ComponentQty":11,"Operation":"P极光刻"},{"LotId":"SFC240912810","DeviceName":"CPO4BCALO708U600HNA","RecipeName":"CACB","ComponentQty":13,"Operation":"P极光刻"}]}
    1333. 

  1333. [Save Log Job] 2024-10-31 15:07:06.779 LOG.INFO UiEvent.cs Line:51 Event() - Operation RunRecipe(CACB, SFC240912810/EFC241014689)
    1334. 

  1334. [Save Log Job] 2024-10-31 15:07:06.779 LOG.INFO UiEvent.cs Line:51 Event() - EventLotStart
    1335. 

  1335. [Save Log Job] 2024-10-31 15:07:06.886 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check door status。
    1336. 

  1336. [Save Log Job] 2024-10-31 15:07:06.887 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check chamber door。
    1337. 

  1337. [Save Log Job] 2024-10-31 15:07:06.887 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check backpanel door。
    1338. 

  1338. [Save Log Job] 2024-10-31 15:07:06.888 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check pump status。
    1339. 

  1339. [Save Log Job] 2024-10-31 15:07:06.888 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Close all the valves。
    1340. 

  1340. [Save Log Job] 2024-10-31 15:07:06.889 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Open pumping valve。
    1341. 

  1341. [Save Log Job] 2024-10-31 15:07:06.984 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    1342. 

  1342. [Save Log Job] 2024-10-31 15:07:09.002 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门Chamber pumping valveOpen失败，原因：Valve keep closed 。
    1343. 

  1343. [Save Log Job] 2024-10-31 15:07:10.517 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check chamber pressure。
    1344. 

  1344. [Save Log Job] 2024-10-31 15:07:45.559 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Pump below 100mTorr。
    1345. 

  1345. [Save Log Job] 2024-10-31 15:07:45.660 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：PreProcess Finished in 0.6 minitues。
    1346. 

  1346. [Save Log Job] 2024-10-31 15:07:45.660 LOG.INFO UiEvent.cs Line:51 Event() - System complete run 'PreProcess'.
    1347. 

  1347. [Save Log Job] 2024-10-31 15:07:45.660 LOG.INFO UiEvent.cs Line:51 Event() - Run Recipe 20241031150706-CACB
    1348. 

  1348. [Save Log Job] 2024-10-31 15:07:45.661 LOG.INFO UiEvent.cs Line:51 Event() - System recipe start run'20241031150706-CACB'
    1349. 

  1349. [Save Log Job] 2024-10-31 15:07:45.763 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241031150706-CACB' start run step 1：initial。
    1350. 

  1350. [Save Log Job] 2024-10-31 15:07:45.763 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。
    1351. 

  1351. [Save Log Job] 2024-10-31 15:07:45.764 LOG.INFO UiEvent.cs Line:51 Event() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。
    1352. 

  1352. [Save Log Job] 2024-10-31 15:07:45.764 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。
    1353. 

  1353. [Save Log Job] 2024-10-31 15:07:45.765 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。
    1354. 

  1354. [Save Log Job] 2024-10-31 15:07:45.765 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。
    1355. 

  1355. [Save Log Job] 2024-10-31 15:07:45.766 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。
    1356. 

  1356. [Save Log Job] 2024-10-31 15:07:45.766 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。
    1357. 

  1357. [Save Log Job] 2024-10-31 15:07:45.767 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPower，RF set Power:0。
    1358. 

  1358. [Save Log Job] 2024-10-31 15:07:45.767 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。
    1359. 

  1359. [Save Log Job] 2024-10-31 15:07:45.768 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。
    1360. 

  1360. [Save Log Job] 2024-10-31 15:07:45.769 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。
    1361. 

  1361. [Save Log Job] 2024-10-31 15:07:45.769 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas1， ramp to 45sccm。
    1362. 

  1362. [Save Log Job] 2024-10-31 15:07:45.770 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas2， ramp to 56sccm。
    1363. 

  1363. [Save Log Job] 2024-10-31 15:07:45.770 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas3， ramp to 66sccm。
    1364. 

  1364. [Save Log Job] 2024-10-31 15:07:45.770 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas4， ramp to 76sccm。
    1365. 

  1365. [Save Log Job] 2024-10-31 15:07:45.771 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas5， ramp to 86sccm。
    1366. 

  1366. [Save Log Job] 2024-10-31 15:07:45.771 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPowerOnOff，Set RF power Off。
    1367. 

  1367. [Save Log Job] 2024-10-31 15:07:45.772 LOG.INFO UiEvent.cs Line:51 Event() - Start monitor pressure stability
    1368. 

  1368. [Save Log Job] 2024-10-31 15:08:15.766 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241031150706-CACB' end step 1
    1369. 

  1369. [Save Log Job] 2024-10-31 15:08:15.867 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241031150706-CACB' start run step 2：initial。
    1370. 

  1370. [Save Log Job] 2024-10-31 15:08:15.868 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。
    1371. 

  1371. [Save Log Job] 2024-10-31 15:08:15.868 LOG.INFO UiEvent.cs Line:51 Event() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。
    1372. 

  1372. [Save Log Job] 2024-10-31 15:08:15.869 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。
    1373. 

  1373. [Save Log Job] 2024-10-31 15:08:15.869 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。
    1374. 

  1374. [Save Log Job] 2024-10-31 15:08:15.870 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。
    1375. 

  1375. [Save Log Job] 2024-10-31 15:08:15.870 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。
    1376. 

  1376. [Save Log Job] 2024-10-31 15:08:15.871 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。
    1377. 

  1377. [Save Log Job] 2024-10-31 15:08:15.871 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPower，RF set Power:190。
    1378. 

  1378. [Save Log Job] 2024-10-31 15:08:15.872 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。
    1379. 

  1379. [Save Log Job] 2024-10-31 15:08:15.872 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。
    1380. 

  1380. [Save Log Job] 2024-10-31 15:08:15.873 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。
    1381. 

  1381. [Save Log Job] 2024-10-31 15:08:15.873 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas1， ramp to 45sccm。
    1382. 

  1382. [Save Log Job] 2024-10-31 15:08:15.874 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas2， ramp to 56sccm。
    1383. 

  1383. [Save Log Job] 2024-10-31 15:08:15.874 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas3， ramp to 66sccm。
    1384. 

  1384. [Save Log Job] 2024-10-31 15:08:15.875 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas4， ramp to 76sccm。
    1385. 

  1385. [Save Log Job] 2024-10-31 15:08:15.875 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas5， ramp to 86sccm。
    1386. 

  1386. [Save Log Job] 2024-10-31 15:08:15.876 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPowerOnOff，Set RF power On。
    1387. 

  1387. [Save Log Job] 2024-10-31 15:08:22.519 LOG.INFO UiEvent.cs Line:51 Event() - System RF GeneratorTolerance alarm：Forward power 18 out of range[189,191] in 2 seconds.
    1388. 

  1388. [Save Log Job] 2024-10-31 15:08:25.928 LOG.INFO UiEvent.cs Line:51 Event() - System recipe was aborted: user aborted recipe
    1389. 

  1389. [Save Log Job] 2024-10-31 15:08:37.410 LOG.INFO UiEvent.cs Line:51 Event() - Stop monitor pressure stability
    1390. 

  1390. [Save Log Job] 2024-10-31 15:08:37.433 LOG.INFO UiEvent.cs Line:51 Event() - System Recipe run completed，Recipe：20241031150706-CACB
    1391. 

  1391. Start time：2024/10/31 15:07:45
    1392. 

  1392. End time：2024/10/31 15:08:22
    1393. 

  1393. Total time：0:0:36
    1394. 

  1394. [Save Log Job] 2024-10-31 15:08:37.433 LOG.INFO UiEvent.cs Line:51 Event() - System Recipe completely run
    1395. 

  1395. [Save Log Job] 2024-10-31 15:08:37.433 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    1396. 

  1396. [Save Log Job] 2024-10-31 15:08:37.433 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC1 ValveClose失败，原因：Valve keep open。
    1397. 

  1397. [Save Log Job] 2024-10-31 15:08:37.487 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC2 ValveClose失败，原因：Valve keep open。
    1398. 

  1398. [Save Log Job] 2024-10-31 15:08:37.539 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC3 ValveClose失败，原因：Valve keep open。
    1399. 

  1399. [Save Log Job] 2024-10-31 15:08:37.541 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC4 ValveClose失败，原因：Valve keep open。
    1400. 

  1400. [Save Log Job] 2024-10-31 15:08:37.541 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC5 ValveClose失败，原因：Valve keep open。
    1401. 

  1401. [Save Log Job] 2024-10-31 15:08:37.542 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门Process gas final valveClose失败，原因：Valve keep open。
    1402. 

  1402. --------------------------------[Header Log]----------------------------------------- [Save Log Job] 2024-10-31 15:42:02.636 LOG.INFO UiEvent.cs Line:57 Event() - 已经连接上设备实时控制系统
    1403. 

  1403. [Save Log Job] 2024-10-31 15:42:02.640 LOG.INFO UiEvent.cs Line:58 Event() - 已经连接上设备实时控制系统
    1404. 

  1404. [Save Log Job] 2024-10-31 15:42:04.125 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    1405. 

  1405. [Save Log Job] 2024-10-31 15:42:04.344 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(System_IsMesMode, True)
    1406. 

  1406. [Save Log Job] 2024-10-31 15:42:07.664 LOG.INFO UiEvent.cs Line:51 Event() - Software will be expired in -7 days, at 10/24/2024 12:00:00 AM 。
    1407. 

  1407. [Save Log Job] 2024-10-31 15:42:50.044 LOG.INFO UiEvent.cs Line:51 Event() - User admin login
    1408. 

  1408. [Save Log Job] 2024-10-31 15:44:58.916 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetAutoMode()
    1409. 

  1409. [Save Log Job] 2024-10-31 15:44:58.916 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentModeChanged
    1410. 

  1410. [Save Log Job] 2024-10-31 15:44:58.919 LOG.INFO UiEvent.cs Line:51 Event() - System running mode changed to Auto Mode
    1411. 

  1411. [Save Log Job] 2024-10-31 15:45:19.957 LOG.INFO UiEvent.cs Line:51 Event() - Operation RunRecipe(CACB, )
    1412. 

  1412. [Save Log Job] 2024-10-31 15:45:20.059 LOG.INFO UiEvent.cs Line:51 Event() - EventLotStart
    1413. 

  1413. [Save Log Job] 2024-10-31 15:45:20.059 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check door status。
    1414. 

  1414. [Save Log Job] 2024-10-31 15:45:20.061 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check backpanel door。
    1415. 

  1415. [Save Log Job] 2024-10-31 15:45:20.061 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check chamber door。
    1416. 

  1416. [Save Log Job] 2024-10-31 15:45:20.062 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check pump status。
    1417. 

  1417. [Save Log Job] 2024-10-31 15:45:20.062 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Close all the valves。
    1418. 

  1418. [Save Log Job] 2024-10-31 15:45:20.063 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    1419. 

  1419. [Save Log Job] 2024-10-31 15:45:20.158 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Open pumping valve。
    1420. 

  1420. [Save Log Job] 2024-10-31 15:45:21.574 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check chamber pressure。
    1421. 

  1421. [Save Log Job] 2024-10-31 15:46:52.177 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Pump below 100mTorr。
    1422. 

  1422. [Save Log Job] 2024-10-31 15:47:05.725 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：PreProcess Finished in 1.6 minitues。
    1423. 

  1423. [Save Log Job] 2024-10-31 15:47:06.291 LOG.INFO UiEvent.cs Line:51 Event() - System complete run 'PreProcess'.
    1424. 

  1424. [Save Log Job] 2024-10-31 15:47:06.888 LOG.INFO UiEvent.cs Line:51 Event() - Run Recipe 20241031154519-CACB
    1425. 

  1425. [Save Log Job] 2024-10-31 15:47:06.889 LOG.INFO UiEvent.cs Line:51 Event() - System recipe start run'20241031154519-CACB'
    1426. 

  1426. [Save Log Job] 2024-10-31 15:51:07.670 LOG.INFO UiEvent.cs Line:51 Event() - System PLC heart beat check failed，please confirm PLC still running
    1427. 

  1427. [Save Log Job] 2024-10-31 15:51:13.904 LOG.INFO UiEvent.cs Line:51 Event() - System recipe was aborted: user aborted recipe
    1428. 

  1428. [Save Log Job] 2024-10-31 15:51:14.000 LOG.INFO UiEvent.cs Line:51 Event() - System Recipe run completed，Recipe：20241031154519-CACB
    1429. 

  1429. Start time：2024/10/31 15:46:53
    1430. 

  1430. End time：2024/10/31 15:51:13
    1431. 

  1431. Total time：0:4:20
    1432. 

  1432. [Save Log Job] 2024-10-31 15:51:14.006 LOG.INFO UiEvent.cs Line:51 Event() - System Recipe completely run
    1433. 

  1433. [Save Log Job] 2024-10-31 15:51:19.784 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    1434. 

  1434. [Save Log Job] 2024-10-31 15:51:19.784 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    1435. 

  1435. [Save Log Job] 2024-10-31 15:51:49.983 LOG.INFO UiEvent.cs Line:51 Event() - recipe file  CACB  save completed
    1436. 

  1436. [Save Log Job] 2024-10-31 15:51:49.983 LOG.INFO UiEvent.cs Line:51 Event() - System Information
    1437. 

  1437. [Save Log Job] 2024-10-31 15:52:04.682 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(System_RfPowerAlarmRange, 100)
    1438. 

  1438. [Save Log Job] 2024-10-31 15:52:05.085 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(System_RfPowerAlarmTime, 100)
    1439. 

  1439. [Save Log Job] 2024-10-31 15:52:30.653 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    1440. 

  1440. [Save Log Job] 2024-10-31 15:54:21.882 LOG.INFO UiEvent.cs Line:51 Event() - Operation RunRecipe(CACB, )
    1441. 

  1441. [Save Log Job] 2024-10-31 15:56:05.230 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    1442. 

  1442. [Save Log Job] 2024-10-31 15:56:05.343 LOG.INFO UiEvent.cs Line:51 Event() - EventLotStart
    1443. 

  1443. [Save Log Job] 2024-10-31 15:56:05.345 LOG.INFO UiEvent.cs Line:51 Event() - System PLC heart beat check failed，please confirm PLC still running
    1444. 

  1444. --------------------------------[Header Log]----------------------------------------- [Save Log Job] 2024-10-31 16:44:38.846 LOG.INFO UiEvent.cs Line:58 Event() - 已经连接上设备实时控制系统
    1445. 

  1445. [Save Log Job] 2024-10-31 16:44:50.781 LOG.INFO UiEvent.cs Line:51 Event() - Software will be expired in -7 days, at 10/24/2024 12:00:00 AM 。
    1446. 

  1446. [Save Log Job] 2024-10-31 16:45:25.188 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    1447. 

  1447. [Save Log Job] 2024-10-31 16:45:33.865 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    1448. 

  1448. [Save Log Job] 2024-10-31 16:45:33.900 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(System_IsMesMode, True)
    1449. 

  1449. [Save Log Job] 2024-10-31 16:46:29.558 LOG.INFO UiEvent.cs Line:51 Event() - User admin login
    1450. 

  1450. [Save Log Job] 2024-10-31 16:46:43.919 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetAutoMode()
    1451. 

  1451. [Save Log Job] 2024-10-31 16:46:43.919 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentModeChanged
    1452. 

  1452. [Save Log Job] 2024-10-31 16:46:43.920 LOG.INFO UiEvent.cs Line:51 Event() - System running mode changed to Auto Mode
    1453. 

  1453. [Save Log Job] 2024-10-31 16:47:05.707 LOG.INFO UiEvent.cs Line:51 Event() - Operation RunRecipe(CACB, )
    1454. 

  1454. [Save Log Job] 2024-10-31 16:47:05.709 LOG.INFO UiEvent.cs Line:51 Event() - EventLotStart
    1455. 

  1455. [Save Log Job] 2024-10-31 16:47:05.709 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    1456. 

  1456. [Save Log Job] 2024-10-31 16:47:20.827 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check door status。
    1457. 

  1457. [Save Log Job] 2024-10-31 16:47:20.827 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check chamber door。
    1458. 

  1458. [Save Log Job] 2024-10-31 16:47:20.828 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check backpanel door。
    1459. 

  1459. [Save Log Job] 2024-10-31 16:47:20.828 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check pump status。
    1460. 

  1460. [Save Log Job] 2024-10-31 16:47:20.829 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Close all the valves。
    1461. 

  1461. [Save Log Job] 2024-10-31 16:47:20.830 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Open pumping valve。
    1462. 

  1462. [Save Log Job] 2024-10-31 16:47:21.928 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check chamber pressure。
    1463. 

  1463. [Save Log Job] 2024-10-31 16:47:57.030 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Pump below 100mTorr。
    1464. 

  1464. [Save Log Job] 2024-10-31 16:47:57.031 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：PreProcess Finished in 0.9 minitues。
    1465. 

  1465. [Save Log Job] 2024-10-31 16:47:57.031 LOG.INFO UiEvent.cs Line:51 Event() - System complete run 'PreProcess'.
    1466. 

  1466. [Save Log Job] 2024-10-31 16:47:57.032 LOG.INFO UiEvent.cs Line:51 Event() - Run Recipe 20241031164703-CACB
    1467. 

  1467. [Save Log Job] 2024-10-31 16:47:57.032 LOG.INFO UiEvent.cs Line:51 Event() - System recipe start run'20241031164703-CACB'
    1468. 

  1468. [Save Log Job] 2024-10-31 16:47:57.131 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241031164703-CACB' start run step 1：initial。
    1469. 

  1469. [Save Log Job] 2024-10-31 16:47:57.131 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。
    1470. 

  1470. [Save Log Job] 2024-10-31 16:47:57.132 LOG.INFO UiEvent.cs Line:51 Event() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。
    1471. 

  1471. [Save Log Job] 2024-10-31 16:47:57.132 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。
    1472. 

  1472. [Save Log Job] 2024-10-31 16:47:57.133 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。
    1473. 

  1473. [Save Log Job] 2024-10-31 16:47:57.133 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。
    1474. 

  1474. [Save Log Job] 2024-10-31 16:47:57.134 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。
    1475. 

  1475. [Save Log Job] 2024-10-31 16:47:57.134 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。
    1476. 

  1476. [Save Log Job] 2024-10-31 16:47:57.135 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPower，RF set Power:0。
    1477. 

  1477. [Save Log Job] 2024-10-31 16:47:57.135 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。
    1478. 

  1478. [Save Log Job] 2024-10-31 16:47:57.136 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。
    1479. 

  1479. [Save Log Job] 2024-10-31 16:47:57.137 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。
    1480. 

  1480. [Save Log Job] 2024-10-31 16:47:57.137 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas1， ramp to 45sccm。
    1481. 

  1481. [Save Log Job] 2024-10-31 16:47:57.138 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas2， ramp to 56sccm。
    1482. 

  1482. [Save Log Job] 2024-10-31 16:47:57.138 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas3， ramp to 66sccm。
    1483. 

  1483. [Save Log Job] 2024-10-31 16:47:57.138 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas4， ramp to 76sccm。
    1484. 

  1484. [Save Log Job] 2024-10-31 16:47:57.139 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas5， ramp to 86sccm。
    1485. 

  1485. [Save Log Job] 2024-10-31 16:47:57.140 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPowerOnOff，Set RF power Off。
    1486. 

  1486. [Save Log Job] 2024-10-31 16:47:57.140 LOG.INFO UiEvent.cs Line:51 Event() - Start monitor pressure stability
    1487. 

  1487. [Save Log Job] 2024-10-31 16:48:27.146 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241031164703-CACB' end step 1
    1488. 

  1488. [Save Log Job] 2024-10-31 16:48:27.147 LOG.INFO UiEvent.cs Line:51 Event() - Stop monitor pressure stability
    1489. 

  1489. [Save Log Job] 2024-10-31 16:48:27.148 LOG.INFO UiEvent.cs Line:51 Event() - System Recipe run completed，Recipe：20241031164703-CACB
    1490. 

  1490. Start time：2024/10/31 16:47:56
    1491. 

  1491. End time：2024/10/31 16:48:27
    1492. 

  1492. Total time：0:0:30
    1493. 

  1493. [Save Log Job] 2024-10-31 16:48:27.148 LOG.INFO UiEvent.cs Line:51 Event() - System Recipe completely run
    1494. 

  1494. [Save Log Job] 2024-10-31 16:48:27.247 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, wait for 10 seconds
    1495. 

  1495. [Save Log Job] 2024-10-31 16:48:29.265 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC1 ValveClose失败，原因：Valve keep open。
    1496. 

  1496. [Save Log Job] 2024-10-31 16:48:29.266 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC2 ValveClose失败，原因：Valve keep open。
    1497. 

  1497. [Save Log Job] 2024-10-31 16:48:29.266 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC3 ValveClose失败，原因：Valve keep open。
    1498. 

  1498. [Save Log Job] 2024-10-31 16:48:29.266 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC4 ValveClose失败，原因：Valve keep open。
    1499. 

  1499. [Save Log Job] 2024-10-31 16:48:29.267 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC5 ValveClose失败，原因：Valve keep open。
    1500. 

  1500. [Save Log Job] 2024-10-31 16:48:29.271 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门Process gas final valveClose失败，原因：Valve keep open。
    1501. 

  1501. [Save Log Job] 2024-10-31 16:48:37.358 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, RF Power Off
    1502. 

  1502. [Save Log Job] 2024-10-31 16:48:37.358 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, Stop all the gas flow
    1503. 

  1503. [Save Log Job] 2024-10-31 16:48:43.249 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, Close all the valves
    1504. 

  1504. [Save Log Job] 2024-10-31 16:48:43.347 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, close pump valve
    1505. 

  1505. [Save Log Job] 2024-10-31 16:48:45.363 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门Chamber pumping valveClose失败，原因：Valve keep open。
    1506. 

  1506. [Save Log Job] 2024-10-31 16:48:46.771 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, delay 3 seconds
    1507. 

  1507. [Save Log Job] 2024-10-31 16:48:49.792 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, vent 50 seconds
    1508. 

  1508. [Save Log Job] 2024-10-31 16:49:39.869 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, Close vent valve
    1509. 

  1509. [Save Log Job] 2024-10-31 16:49:40.775 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, PostProcess Finished in 1.2 minitues
    1510. 

  1510. [Save Log Job] 2024-10-31 16:49:40.776 LOG.INFO UiEvent.cs Line:51 Event() - System complete run 'PostProcess'.
    1511. 

  1511. [Save Log Job] 2024-10-31 16:49:40.777 LOG.INFO UiEvent.cs Line:51 Event() - EventLotFinished
    1512. 

  1512. [Save Log Job] 2024-10-31 16:49:40.875 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    1513. 

  1513. --------------------------------[Header Log]----------------------------------------- [Save Log Job] 2024-10-31 17:07:14.008 LOG.INFO UiEvent.cs Line:58 Event() - 已经连接上设备实时控制系统
    1514. 

  1514. [Save Log Job] 2024-10-31 17:07:14.011 LOG.INFO UiEvent.cs Line:57 Event() - 已经连接上设备实时控制系统
    1515. 

  1515. [Save Log Job] 2024-10-31 17:07:15.465 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(System_IsMesMode, True)
    1516. 

  1516. [Save Log Job] 2024-10-31 17:07:15.465 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    1517. 

  1517. [Save Log Job] 2024-10-31 17:07:18.926 LOG.INFO UiEvent.cs Line:51 Event() - Software will be expired in -7 days, at 10/24/2024 12:00:00 AM 。
    1518. 

  1518. [Save Log Job] 2024-10-31 17:07:24.365 LOG.INFO UiEvent.cs Line:51 Event() - User admin login
    1519. 

  1519. [Save Log Job] 2024-10-31 17:07:43.185 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetAutoMode()
    1520. 

  1520. [Save Log Job] 2024-10-31 17:07:43.186 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentModeChanged
    1521. 

  1521. [Save Log Job] 2024-10-31 17:07:43.186 LOG.INFO UiEvent.cs Line:51 Event() - System running mode changed to Auto Mode
    1522. 

  1522. [Save Log Job] 2024-10-31 17:07:47.123 LOG.INFO UiEvent.cs Line:51 Event() - Operation RunRecipe(CACB, )
    1523. 

  1523. [Save Log Job] 2024-10-31 17:07:47.225 LOG.INFO UiEvent.cs Line:51 Event() - EventLotStart
    1524. 

  1524. [Save Log Job] 2024-10-31 17:07:47.225 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check door status。
    1525. 

  1525. [Save Log Job] 2024-10-31 17:07:47.226 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check chamber door。
    1526. 

  1526. [Save Log Job] 2024-10-31 17:07:47.227 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check backpanel door。
    1527. 

  1527. [Save Log Job] 2024-10-31 17:07:47.227 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check pump status。
    1528. 

  1528. [Save Log Job] 2024-10-31 17:07:47.228 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Close all the valves。
    1529. 

  1529. [Save Log Job] 2024-10-31 17:07:47.326 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    1530. 

  1530. [Save Log Job] 2024-10-31 17:07:47.327 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Open pumping valve。
    1531. 

  1531. [Save Log Job] 2024-10-31 17:07:49.341 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门Chamber pumping valveOpen失败，原因：Valve keep closed 。
    1532. 

  1532. [Save Log Job] 2024-10-31 17:07:51.256 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check chamber pressure。
    1533. 

  1533. [Save Log Job] 2024-10-31 17:08:26.179 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Pump below 100mTorr。
    1534. 

  1534. [Save Log Job] 2024-10-31 17:08:26.280 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：PreProcess Finished in 0.7 minitues。
    1535. 

  1535. [Save Log Job] 2024-10-31 17:08:26.280 LOG.INFO UiEvent.cs Line:51 Event() - System complete run 'PreProcess'.
    1536. 

  1536. [Save Log Job] 2024-10-31 17:08:26.281 LOG.INFO UiEvent.cs Line:51 Event() - Run Recipe 20241031170747-CACB
    1537. 

  1537. [Save Log Job] 2024-10-31 17:08:26.281 LOG.INFO UiEvent.cs Line:51 Event() - System recipe start run'20241031170747-CACB'
    1538. 

  1538. [Save Log Job] 2024-10-31 17:08:26.282 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241031170747-CACB' start run step 1：initial。
    1539. 

  1539. [Save Log Job] 2024-10-31 17:08:26.283 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。
    1540. 

  1540. [Save Log Job] 2024-10-31 17:08:26.283 LOG.INFO UiEvent.cs Line:51 Event() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。
    1541. 

  1541. [Save Log Job] 2024-10-31 17:08:26.284 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。
    1542. 

  1542. [Save Log Job] 2024-10-31 17:08:26.285 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。
    1543. 

  1543. [Save Log Job] 2024-10-31 17:08:26.286 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。
    1544. 

  1544. [Save Log Job] 2024-10-31 17:08:26.286 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。
    1545. 

  1545. [Save Log Job] 2024-10-31 17:08:26.287 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。
    1546. 

  1546. [Save Log Job] 2024-10-31 17:08:26.287 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPower，RF set Power:0。
    1547. 

  1547. [Save Log Job] 2024-10-31 17:08:26.288 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。
    1548. 

  1548. [Save Log Job] 2024-10-31 17:08:26.288 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。
    1549. 

  1549. [Save Log Job] 2024-10-31 17:08:26.289 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。
    1550. 

  1550. [Save Log Job] 2024-10-31 17:08:26.291 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas1， ramp to 45sccm。
    1551. 

  1551. [Save Log Job] 2024-10-31 17:08:26.293 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas2， ramp to 56sccm。
    1552. 

  1552. [Save Log Job] 2024-10-31 17:08:26.294 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas3， ramp to 66sccm。
    1553. 

  1553. [Save Log Job] 2024-10-31 17:08:26.294 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas4， ramp to 76sccm。
    1554. 

  1554. [Save Log Job] 2024-10-31 17:08:26.295 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas5， ramp to 86sccm。
    1555. 

  1555. [Save Log Job] 2024-10-31 17:08:26.295 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPowerOnOff，Set RF power Off。
    1556. 

  1556. [Save Log Job] 2024-10-31 17:08:26.382 LOG.INFO UiEvent.cs Line:51 Event() - Start monitor pressure stability
    1557. 

  1557. [Save Log Job] 2024-10-31 17:08:56.386 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241031170747-CACB' end step 1
    1558. 

  1558. [Save Log Job] 2024-10-31 17:08:56.387 LOG.INFO UiEvent.cs Line:51 Event() - Stop monitor pressure stability
    1559. 

  1559. [Save Log Job] 2024-10-31 17:08:56.389 LOG.INFO UiEvent.cs Line:51 Event() - System Recipe completely run
    1560. 

  1560. [Save Log Job] 2024-10-31 17:08:56.389 LOG.INFO UiEvent.cs Line:51 Event() - System Recipe run completed，Recipe：20241031170747-CACB
    1561. 

  1561. Start time：2024/10/31 17:08:26
    1562. 

  1562. End time：2024/10/31 17:08:56
    1563. 

  1563. Total time：0:0:30
    1564. 

  1564. [Save Log Job] 2024-10-31 17:08:56.494 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, wait for 10 seconds
    1565. 

  1565. [Save Log Job] 2024-10-31 17:08:58.500 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC1 ValveClose失败，原因：Valve keep open。
    1566. 

  1566. [Save Log Job] 2024-10-31 17:08:58.501 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC2 ValveClose失败，原因：Valve keep open。
    1567. 

  1567. [Save Log Job] 2024-10-31 17:08:58.501 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC3 ValveClose失败，原因：Valve keep open。
    1568. 

  1568. [Save Log Job] 2024-10-31 17:08:58.502 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC4 ValveClose失败，原因：Valve keep open。
    1569. 

  1569. [Save Log Job] 2024-10-31 17:08:58.502 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC5 ValveClose失败，原因：Valve keep open。
    1570. 

  1570. [Save Log Job] 2024-10-31 17:08:58.503 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门Process gas final valveClose失败，原因：Valve keep open。
    1571. 

  1571. [Save Log Job] 2024-10-31 17:09:06.590 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, RF Power Off
    1572. 

  1572. [Save Log Job] 2024-10-31 17:09:06.591 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, Stop all the gas flow
    1573. 

  1573. [Save Log Job] 2024-10-31 17:09:12.460 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, Close all the valves
    1574. 

  1574. [Save Log Job] 2024-10-31 17:09:12.460 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, close pump valve
    1575. 

  1575. [Save Log Job] 2024-10-31 17:09:14.483 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门Chamber pumping valveClose失败，原因：Valve keep open。
    1576. 

  1576. [Save Log Job] 2024-10-31 17:09:15.892 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, delay 3 seconds
    1577. 

  1577. [Save Log Job] 2024-10-31 17:09:18.927 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, vent 50 seconds
    1578. 

  1578. [Save Log Job] 2024-10-31 17:10:09.093 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, Close vent valve
    1579. 

  1579. [Save Log Job] 2024-10-31 17:10:10.000 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, PostProcess Finished in 1.2 minitues
    1580. 

  1580. [Save Log Job] 2024-10-31 17:10:10.000 LOG.INFO UiEvent.cs Line:51 Event() - System complete run 'PostProcess'.
    1581. 

  1581. [Save Log Job] 2024-10-31 17:10:10.002 LOG.INFO UiEvent.cs Line:51 Event() - EventLotFinished
    1582. 

  1582. [Save Log Job] 2024-10-31 17:10:10.002 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    1583. 

  1583. [Save Log Job] 2024-10-31 17:14:28.260 LOG.INFO UiEvent.cs Line:51 Event() - recipe file  CACB  save completed
    1584. 

  1584. [Save Log Job] 2024-10-31 17:14:28.260 LOG.INFO UiEvent.cs Line:51 Event() - System Information
    1585. 

  1585. [Save Log Job] 2024-10-31 17:14:33.090 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(System_RfPowerAlarmTime, 1)
    1586. 

  1586. [Save Log Job] 2024-10-31 17:14:34.298 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(System_RfPowerAlarmRange, 1)
    1587. 

  1587. [Save Log Job] 2024-10-31 17:14:37.016 LOG.INFO UiEvent.cs Line:51 Event() - recipe file  CACB  save completed
    1588. 

  1588. [Save Log Job] 2024-10-31 17:14:37.016 LOG.INFO UiEvent.cs Line:51 Event() - System Information
    1589. 

  1589. [Save Log Job] 2024-10-31 17:14:54.521 LOG.INFO UiEvent.cs Line:51 Event() - Operation RunRecipe(CACB, )
    1590. 

  1590. [Save Log Job] 2024-10-31 17:14:54.521 LOG.INFO UiEvent.cs Line:51 Event() - EventLotStart
    1591. 

  1591. [Save Log Job] 2024-10-31 17:14:54.523 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check door status。
    1592. 

  1592. [Save Log Job] 2024-10-31 17:14:54.524 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check chamber door。
    1593. 

  1593. [Save Log Job] 2024-10-31 17:14:54.524 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check pump status。
    1594. 

  1594. [Save Log Job] 2024-10-31 17:14:54.524 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check backpanel door。
    1595. 

  1595. [Save Log Job] 2024-10-31 17:14:54.524 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Close all the valves。
    1596. 

  1596. [Save Log Job] 2024-10-31 17:14:54.524 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    1597. 

  1597. [Save Log Job] 2024-10-31 17:14:54.622 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Open pumping valve。
    1598. 

  1598. [Save Log Job] 2024-10-31 17:14:56.639 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门Chamber pumping valveOpen失败，原因：Valve keep closed 。
    1599. 

  1599. [Save Log Job] 2024-10-31 17:14:58.243 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check chamber pressure。
    1600. 

  1600. [Save Log Job] 2024-10-31 17:15:48.778 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Pump below 100mTorr。
    1601. 

  1601. [Save Log Job] 2024-10-31 17:15:48.778 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：PreProcess Finished in 0.9 minitues。
    1602. 

  1602. [Save Log Job] 2024-10-31 17:15:48.779 LOG.INFO UiEvent.cs Line:51 Event() - System complete run 'PreProcess'.
    1603. 

  1603. [Save Log Job] 2024-10-31 17:15:48.781 LOG.INFO UiEvent.cs Line:51 Event() - Run Recipe 20241031171454-CACB
    1604. 

  1604. [Save Log Job] 2024-10-31 17:15:48.781 LOG.INFO UiEvent.cs Line:51 Event() - System recipe start run'20241031171454-CACB'
    1605. 

  1605. [Save Log Job] 2024-10-31 17:15:48.879 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241031171454-CACB' start run step 1：initial。
    1606. 

  1606. [Save Log Job] 2024-10-31 17:15:48.879 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。
    1607. 

  1607. [Save Log Job] 2024-10-31 17:15:48.879 LOG.INFO UiEvent.cs Line:51 Event() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。
    1608. 

  1608. [Save Log Job] 2024-10-31 17:15:48.879 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。
    1609. 

  1609. [Save Log Job] 2024-10-31 17:15:48.879 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。
    1610. 

  1610. [Save Log Job] 2024-10-31 17:15:48.880 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。
    1611. 

  1611. [Save Log Job] 2024-10-31 17:15:48.880 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。
    1612. 

  1612. [Save Log Job] 2024-10-31 17:15:48.880 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。
    1613. 

  1613. [Save Log Job] 2024-10-31 17:15:48.881 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPower，RF set Power:0。
    1614. 

  1614. [Save Log Job] 2024-10-31 17:15:48.881 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。
    1615. 

  1615. [Save Log Job] 2024-10-31 17:15:48.881 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。
    1616. 

  1616. [Save Log Job] 2024-10-31 17:15:48.882 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。
    1617. 

  1617. [Save Log Job] 2024-10-31 17:15:48.882 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas1， ramp to 45sccm。
    1618. 

  1618. [Save Log Job] 2024-10-31 17:15:48.882 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas2， ramp to 56sccm。
    1619. 

  1619. [Save Log Job] 2024-10-31 17:15:48.882 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas3， ramp to 66sccm。
    1620. 

  1620. [Save Log Job] 2024-10-31 17:15:48.883 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas4， ramp to 76sccm。
    1621. 

  1621. [Save Log Job] 2024-10-31 17:15:48.883 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas5， ramp to 86sccm。
    1622. 

  1622. [Save Log Job] 2024-10-31 17:15:48.884 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPowerOnOff，Set RF power Off。
    1623. 

  1623. [Save Log Job] 2024-10-31 17:15:48.884 LOG.INFO UiEvent.cs Line:51 Event() - Start monitor pressure stability
    1624. 

  1624. [Save Log Job] 2024-10-31 17:16:18.962 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241031171454-CACB' end step 1
    1625. 

  1625. [Save Log Job] 2024-10-31 17:16:18.962 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241031171454-CACB' start run step 2：initial。
    1626. 

  1626. [Save Log Job] 2024-10-31 17:16:18.964 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。
    1627. 

  1627. [Save Log Job] 2024-10-31 17:16:18.964 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。
    1628. 

  1628. [Save Log Job] 2024-10-31 17:16:18.964 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。
    1629. 

  1629. [Save Log Job] 2024-10-31 17:16:18.964 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。
    1630. 

  1630. [Save Log Job] 2024-10-31 17:16:18.964 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。
    1631. 

  1631. [Save Log Job] 2024-10-31 17:16:18.964 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。
    1632. 

  1632. [Save Log Job] 2024-10-31 17:16:18.965 LOG.INFO UiEvent.cs Line:51 Event() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。
    1633. 

  1633. [Save Log Job] 2024-10-31 17:16:18.965 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPower，RF set Power:150。
    1634. 

  1634. [Save Log Job] 2024-10-31 17:16:18.965 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。
    1635. 

  1635. [Save Log Job] 2024-10-31 17:16:18.965 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。
    1636. 

  1636. [Save Log Job] 2024-10-31 17:16:18.966 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas1， ramp to 45sccm。
    1637. 

  1637. [Save Log Job] 2024-10-31 17:16:18.966 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas2， ramp to 56sccm。
    1638. 

  1638. [Save Log Job] 2024-10-31 17:16:18.966 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas3， ramp to 66sccm。
    1639. 

  1639. [Save Log Job] 2024-10-31 17:16:18.966 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas5， ramp to 86sccm。
    1640. 

  1640. [Save Log Job] 2024-10-31 17:16:18.966 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas4， ramp to 76sccm。
    1641. 

  1641. [Save Log Job] 2024-10-31 17:16:18.967 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。
    1642. 

  1642. [Save Log Job] 2024-10-31 17:16:18.967 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPowerOnOff，Set RF power On。
    1643. 

  1643. [Save Log Job] 2024-10-31 17:16:20.469 LOG.INFO UiEvent.cs Line:51 Event() - System RF GeneratorTolerance alarm：Forward power 18 out of range[149,151] in 1 seconds.
    1644. 

  1644. [Save Log Job] 2024-10-31 17:16:20.469 LOG.INFO UiEvent.cs Line:51 Event() - System recipe was aborted: user aborted recipe
    1645. 

  1645. [Save Log Job] 2024-10-31 17:16:20.469 LOG.INFO UiEvent.cs Line:51 Event() - Stop monitor pressure stability
    1646. 

  1646. [Save Log Job] 2024-10-31 17:16:20.469 LOG.INFO UiEvent.cs Line:51 Event() - System Recipe run completed，Recipe：20241031171454-CACB
    1647. 

  1647. Start time：2024/10/31 17:15:48
    1648. 

  1648. End time：2024/10/31 17:16:20
    1649. 

  1649. Total time：0:0:31
    1650. 

  1650. [Save Log Job] 2024-10-31 17:16:20.469 LOG.INFO UiEvent.cs Line:51 Event() - System Recipe completely run
    1651. 

  1651. [Save Log Job] 2024-10-31 17:16:20.569 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    1652. 

  1652. [Save Log Job] 2024-10-31 17:16:22.479 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门Process gas final valveClose失败，原因：Valve keep open。
    1653. 

  1653. --------------------------------[Footer Log]----------------------------------------- --------------------------------[Header Log]----------------------------------------- [Save Log Job] 2024-10-31 17:57:49.886 LOG.INFO UiEvent.cs Line:58 Event() - 已经连接上设备实时控制系统
    1654. 

  1654. --------------------------------[Header Log]----------------------------------------- [Save Log Job] 2024-10-31 17:57:54.565 LOG.INFO UiEvent.cs Line:58 Event() - 已经连接上设备实时控制系统
    1655. 

  1655. [Save Log Job] 2024-10-31 17:57:54.565 LOG.INFO UiEvent.cs Line:57 Event() - 已经连接上设备实时控制系统
    1656. 

  1656. [Save Log Job] 2024-10-31 17:57:56.079 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
    1657. 

  1657. [Save Log Job] 2024-10-31 17:57:56.603 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(System_IsMesMode, True)
    1658. 

  1658. [Save Log Job] 2024-10-31 17:57:59.625 LOG.INFO UiEvent.cs Line:51 Event() - Software will be expired in -7 days, at 10/24/2024 12:00:00 AM 。
    1659. 

  1659.