--------------------------------[Header Log]----------------------------------------- [Save Log Job] 2024-10-31 07:00:53.597 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged [Save Log Job] 2024-10-31 07:00:53.902 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(System_IsMesMode, True) [Save Log Job] 2024-10-31 07:00:57.043 LOG.INFO UiEvent.cs Line:51 Event() - Software will be expired in -7 days, at 10/24/2024 12:00:00 AM 。 [Save Log Job] 2024-10-31 07:01:22.107 LOG.INFO UiEvent.cs Line:51 Event() - User admin login --------------------------------[Footer Log]----------------------------------------- --------------------------------[Header Log]----------------------------------------- [Save Log Job] 2024-10-31 07:02:49.282 LOG.INFO UiEvent.cs Line:58 Event() - 已经连接上设备实时控制系统 [Save Log Job] 2024-10-31 07:02:49.291 LOG.INFO UiEvent.cs Line:57 Event() - 已经连接上设备实时控制系统 [Save Log Job] 2024-10-31 07:02:51.043 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged [Save Log Job] 2024-10-31 07:02:51.375 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(System_IsMesMode, True) [Save Log Job] 2024-10-31 07:02:54.507 LOG.INFO UiEvent.cs Line:51 Event() - Software will be expired in -7 days, at 10/24/2024 12:00:00 AM 。 [Save Log Job] 2024-10-31 07:03:00.140 LOG.INFO UiEvent.cs Line:51 Event() - User admin login [Save Log Job] 2024-10-31 07:03:05.072 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetAutoMode() [Save Log Job] 2024-10-31 07:03:05.072 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentModeChanged [Save Log Job] 2024-10-31 07:03:05.072 LOG.INFO UiEvent.cs Line:51 Event() - System running mode changed to Auto Mode --------------------------------[Header Log]----------------------------------------- [Save Log Job] 2024-10-31 07:08:28.101 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged [Save Log Job] 2024-10-31 07:08:28.317 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(System_IsMesMode, True) [Save Log Job] 2024-10-31 07:08:31.736 LOG.INFO UiEvent.cs Line:51 Event() - Software will be expired in -7 days, at 10/24/2024 12:00:00 AM 。 [Save Log Job] 2024-10-31 07:08:34.972 LOG.INFO UiEvent.cs Line:51 Event() - User admin login [Save Log Job] 2024-10-31 07:08:37.485 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetAutoMode() [Save Log Job] 2024-10-31 07:08:37.485 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentModeChanged [Save Log Job] 2024-10-31 07:08:37.486 LOG.INFO UiEvent.cs Line:51 Event() - System running mode changed to Auto Mode [Save Log Job] 2024-10-31 07:11:34.113 LOG.INFO UiEvent.cs Line:51 Event() - System PLC heart beat check failed，please confirm PLC still running [Save Log Job] 2024-10-31 07:11:34.645 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged [Save Log Job] 2024-10-31 07:11:34.646 LOG.ERROR LOG.cs Line:56 Write() - UI exception Newtonsoft.Json.JsonReaderException: Unexpected character encountered while parsing value: <. Path '', line 0, position 0. 在 Newtonsoft.Json.JsonTextReader.ParseValue() 在 Newtonsoft.Json.JsonTextReader.Read() 在 Newtonsoft.Json.JsonReader.ReadForType(JsonContract contract, Boolean hasConverter) 在 Newtonsoft.Json.Serialization.JsonSerializerInternalReader.Deserialize(JsonReader reader, Type objectType, Boolean checkAdditionalContent) 在 Newtonsoft.Json.JsonSerializer.DeserializeInternal(JsonReader reader, Type objectType) 在 Newtonsoft.Json.JsonConvert.DeserializeObject(String value, Type type, JsonSerializerSettings settings) 在 Newtonsoft.Json.JsonConvert.DeserializeObject[T](String value, JsonSerializerSettings settings) 在 Newtonsoft.Json.JsonConvert.DeserializeObject[T](String value) 在 Aitex.Core.MES.JC.JCFabAuto.b__6_0(String x) 位置 D:\jet.plasma\trunk\Triton160\Common\Core\MES\JC\JCFabAuto.cs:行号 44 在 System.Collections.Generic.List`1.ForEach(Action`1 action) 在 Aitex.Core.MES.JC.JCFabAuto.GetRecipeByLot(List`1 list) 位置 D:\jet.plasma\trunk\Triton160\Common\Core\MES\JC\JCFabAuto.cs:行号 36 在 Triton160.UI.ViewModel.OverviewViewModel.GetRecipeByMES(Object obj) 位置 D:\jet.plasma\trunk\Triton160\Triton160UI\ViewModel\OverviewViewModel.cs:行号 2268 在 Aitex.Core.UI.MVVM.DelegateCommand`1.Execute(Object parameter) 位置 D:\jet.plasma\trunk\Triton160\Common\Core\UI\MVVM\DelegateCommand.cs:行号 46 在 MS.Internal.Commands.CommandHelpers.CriticalExecuteCommandSource(ICommandSource commandSource, Boolean userInitiated) 在 System.Windows.Controls.Primitives.ButtonBase.OnClick() 在 System.Windows.Controls.Button.OnClick() 在 System.Windows.Controls.Primitives.ButtonBase.OnMouseLeftButtonUp(MouseButtonEventArgs e) 在 System.Windows.UIElement.OnMouseLeftButtonUpThunk(Object sender, MouseButtonEventArgs e) 在 System.Windows.Input.MouseButtonEventArgs.InvokeEventHandler(Delegate genericHandler, Object genericTarget) 在 System.Windows.RoutedEventArgs.InvokeHandler(Delegate handler, Object target) 在 System.Windows.RoutedEventHandlerInfo.InvokeHandler(Object target, RoutedEventArgs routedEventArgs) 在 System.Windows.EventRoute.InvokeHandlersImpl(Object source, RoutedEventArgs args, Boolean reRaised) 在 System.Windows.UIElement.ReRaiseEventAs(DependencyObject sender, RoutedEventArgs args, RoutedEvent newEvent) 在 System.Windows.UIElement.OnMouseUpThunk(Object sender, MouseButtonEventArgs e) 在 System.Windows.Input.MouseButtonEventArgs.InvokeEventHandler(Delegate genericHandler, Object genericTarget) 在 System.Windows.RoutedEventArgs.InvokeHandler(Delegate handler, Object target) 在 System.Windows.RoutedEventHandlerInfo.InvokeHandler(Object target, RoutedEventArgs routedEventArgs) 在 System.Windows.EventRoute.InvokeHandlersImpl(Object source, RoutedEventArgs args, Boolean reRaised) 在 System.Windows.UIElement.RaiseEventImpl(DependencyObject sender, RoutedEventArgs args) 在 System.Windows.UIElement.RaiseTrustedEvent(RoutedEventArgs args) 在 System.Windows.UIElement.RaiseEvent(RoutedEventArgs args, Boolean trusted) 在 System.Windows.Input.InputManager.ProcessStagingArea() 在 System.Windows.Input.InputManager.ProcessInput(InputEventArgs input) 在 System.Windows.Input.InputProviderSite.ReportInput(InputReport inputReport) 在 System.Windows.Interop.HwndMouseInputProvider.ReportInput(IntPtr hwnd, InputMode mode, Int32 timestamp, RawMouseActions actions, Int32 x, Int32 y, Int32 wheel) 在 System.Windows.Interop.HwndMouseInputProvider.FilterMessage(IntPtr hwnd, WindowMessage msg, IntPtr wParam, IntPtr lParam, Boolean& handled) 在 System.Windows.Interop.HwndSource.InputFilterMessage(IntPtr hwnd, Int32 msg, IntPtr wParam, IntPtr lParam, Boolean& handled) 在 MS.Win32.HwndWrapper.WndProc(IntPtr hwnd, Int32 msg, IntPtr wParam, IntPtr lParam, Boolean& handled) 在 MS.Win32.HwndSubclass.DispatcherCallbackOperation(Object o) 在 System.Windows.Threading.ExceptionWrapper.InternalRealCall(Delegate callback, Object args, Int32 numArgs) 在 System.Windows.Threading.ExceptionWrapper.TryCatchWhen(Object source, Delegate callback, Object args, Int32 numArgs, Delegate catchHandler) --------------------------------[Footer Log]----------------------------------------- --------------------------------[Header Log]----------------------------------------- [Save Log Job] 2024-10-31 07:13:07.421 LOG.INFO UiEvent.cs Line:58 Event() - 已经连接上设备实时控制系统 [Save Log Job] 2024-10-31 07:13:07.423 LOG.INFO UiEvent.cs Line:58 Event() - 已经连接上设备实时控制系统 [Save Log Job] 2024-10-31 07:13:08.927 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(System_IsMesMode, True) [Save Log Job] 2024-10-31 07:13:08.927 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged [Save Log Job] 2024-10-31 07:13:12.481 LOG.INFO UiEvent.cs Line:51 Event() - Software will be expired in -7 days, at 10/24/2024 12:00:00 AM 。 [Save Log Job] 2024-10-31 07:13:15.919 LOG.INFO UiEvent.cs Line:51 Event() - User admin login [Save Log Job] 2024-10-31 07:13:18.332 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetAutoMode() [Save Log Job] 2024-10-31 07:13:18.332 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentModeChanged [Save Log Job] 2024-10-31 07:13:18.333 LOG.INFO UiEvent.cs Line:51 Event() - System running mode changed to Auto Mode --------------------------------[Header Log]----------------------------------------- [Save Log Job] 2024-10-31 07:15:38.169 LOG.INFO UiEvent.cs Line:58 Event() - 已经连接上设备实时控制系统 [Save Log Job] 2024-10-31 07:15:38.171 LOG.INFO UiEvent.cs Line:57 Event() - 已经连接上设备实时控制系统 [Save Log Job] 2024-10-31 07:15:39.669 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(System_IsMesMode, True) [Save Log Job] 2024-10-31 07:15:39.712 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged [Save Log Job] 2024-10-31 07:15:43.332 LOG.INFO UiEvent.cs Line:51 Event() - Software will be expired in -7 days, at 10/24/2024 12:00:00 AM 。 [Save Log Job] 2024-10-31 07:15:48.191 LOG.INFO UiEvent.cs Line:51 Event() - User admin login [Save Log Job] 2024-10-31 07:15:50.605 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetAutoMode() [Save Log Job] 2024-10-31 07:15:50.606 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentModeChanged [Save Log Job] 2024-10-31 07:15:50.606 LOG.INFO UiEvent.cs Line:51 Event() - System running mode changed to Auto Mode --------------------------------[Header Log]----------------------------------------- [Save Log Job] 2024-10-31 07:17:35.186 LOG.INFO UiEvent.cs Line:58 Event() - 已经连接上设备实时控制系统 [Save Log Job] 2024-10-31 07:17:35.186 LOG.INFO UiEvent.cs Line:57 Event() - 已经连接上设备实时控制系统 [Save Log Job] 2024-10-31 07:17:36.681 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged [Save Log Job] 2024-10-31 07:17:36.681 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(System_IsMesMode, True) [Save Log Job] 2024-10-31 07:17:40.247 LOG.INFO UiEvent.cs Line:51 Event() - Software will be expired in -7 days, at 10/24/2024 12:00:00 AM 。 [Save Log Job] 2024-10-31 07:17:43.705 LOG.INFO UiEvent.cs Line:51 Event() - User admin login [Save Log Job] 2024-10-31 07:17:55.240 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetAutoMode() [Save Log Job] 2024-10-31 07:17:55.240 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentModeChanged [Save Log Job] 2024-10-31 07:17:55.244 LOG.INFO UiEvent.cs Line:51 Event() - System running mode changed to Auto Mode --------------------------------[Header Log]----------------------------------------- [Save Log Job] 2024-10-31 07:19:14.060 LOG.INFO UiEvent.cs Line:57 Event() - 已经连接上设备实时控制系统 [Save Log Job] 2024-10-31 07:19:14.061 LOG.INFO UiEvent.cs Line:58 Event() - 已经连接上设备实时控制系统 [Save Log Job] 2024-10-31 07:19:15.591 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(System_IsMesMode, True) [Save Log Job] 2024-10-31 07:19:15.617 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged [Save Log Job] 2024-10-31 07:19:19.233 LOG.INFO UiEvent.cs Line:51 Event() - Software will be expired in -7 days, at 10/24/2024 12:00:00 AM 。 [Save Log Job] 2024-10-31 07:19:25.874 LOG.INFO UiEvent.cs Line:51 Event() - User admin login [Save Log Job] 2024-10-31 07:19:28.588 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetAutoMode() [Save Log Job] 2024-10-31 07:19:28.588 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentModeChanged [Save Log Job] 2024-10-31 07:19:28.589 LOG.INFO UiEvent.cs Line:51 Event() - System running mode changed to Auto Mode [Save Log Job] 2024-10-31 07:29:50.030 LOG.INFO UiEvent.cs Line:51 Event() - System PLC heart beat check failed，please confirm PLC still running [Save Log Job] 2024-10-31 07:29:50.032 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged --------------------------------[Header Log]----------------------------------------- [Save Log Job] 2024-10-31 07:58:08.809 LOG.INFO UiEvent.cs Line:58 Event() - 已经连接上设备实时控制系统 [Save Log Job] 2024-10-31 07:58:10.321 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged [Save Log Job] 2024-10-31 07:58:10.436 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(System_IsMesMode, True) [Save Log Job] 2024-10-31 07:58:13.853 LOG.INFO UiEvent.cs Line:51 Event() - Software will be expired in -7 days, at 10/24/2024 12:00:00 AM 。 [Save Log Job] 2024-10-31 07:58:15.560 LOG.INFO UiEvent.cs Line:51 Event() - User admin login --------------------------------[Footer Log]----------------------------------------- --------------------------------[Header Log]----------------------------------------- [Save Log Job] 2024-10-31 08:21:04.809 LOG.INFO UiEvent.cs Line:57 Event() - 已经连接上设备实时控制系统 [Save Log Job] 2024-10-31 08:21:04.811 LOG.INFO UiEvent.cs Line:58 Event() - 已经连接上设备实时控制系统 [Save Log Job] 2024-10-31 08:21:06.285 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(System_IsMesMode, True) [Save Log Job] 2024-10-31 08:21:16.800 LOG.INFO UiEvent.cs Line:51 Event() - 'admin' 退出系统。 [Save Log Job] 2024-10-31 08:21:16.800 LOG.INFO UiEvent.cs Line:51 Event() - 用户admin强制注销登录,账号admin在其他地点登录 [Save Log Job] 2024-10-31 08:21:17.894 LOG.INFO UiEvent.cs Line:51 Event() - User admin login [Save Log Job] 2024-10-31 08:21:24.032 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetAutoMode() [Save Log Job] 2024-10-31 08:21:24.034 LOG.INFO UiEvent.cs Line:51 Event() - System running mode changed to Auto Mode [Save Log Job] 2024-10-31 08:21:24.035 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentModeChanged --------------------------------[Header Log]----------------------------------------- [Save Log Job] 2024-10-31 08:22:34.384 LOG.INFO UiEvent.cs Line:57 Event() - 已经连接上设备实时控制系统 [Save Log Job] 2024-10-31 08:22:34.387 LOG.INFO UiEvent.cs Line:58 Event() - 已经连接上设备实时控制系统 [Save Log Job] 2024-10-31 08:22:53.818 LOG.INFO UiEvent.cs Line:51 Event() - Software will be expired in -7 days, at 10/24/2024 12:00:00 AM 。 [Save Log Job] 2024-10-31 08:23:35.707 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(System_IsMesMode, True) [Save Log Job] 2024-10-31 08:23:47.574 LOG.INFO UiEvent.cs Line:51 Event() - User admin login [Save Log Job] 2024-10-31 08:24:04.986 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetAutoMode() [Save Log Job] 2024-10-31 08:24:04.986 LOG.INFO UiEvent.cs Line:51 Event() - Chamber is in Init，can not do SetAutoMode。 [Save Log Job] 2024-10-31 08:24:17.062 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetAutoMode() [Save Log Job] 2024-10-31 08:24:17.062 LOG.INFO UiEvent.cs Line:51 Event() - Chamber is in Init，can not do SetAutoMode。 [Save Log Job] 2024-10-31 08:24:26.021 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetAutoMode() [Save Log Job] 2024-10-31 08:24:26.021 LOG.INFO UiEvent.cs Line:51 Event() - Chamber is in Init，can not do SetAutoMode。 [Save Log Job] 2024-10-31 08:24:26.624 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetAutoMode() [Save Log Job] 2024-10-31 08:24:26.624 LOG.INFO UiEvent.cs Line:51 Event() - Chamber is in Init，can not do SetAutoMode。 [Save Log Job] 2024-10-31 08:24:26.826 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetAutoMode() [Save Log Job] 2024-10-31 08:24:26.826 LOG.INFO UiEvent.cs Line:51 Event() - Chamber is in Init，can not do SetAutoMode。 [Save Log Job] 2024-10-31 08:24:27.029 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetAutoMode() [Save Log Job] 2024-10-31 08:24:27.029 LOG.INFO UiEvent.cs Line:51 Event() - Chamber is in Init，can not do SetAutoMode。 [Save Log Job] 2024-10-31 08:24:27.230 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetAutoMode() [Save Log Job] 2024-10-31 08:24:27.230 LOG.INFO UiEvent.cs Line:51 Event() - Chamber is in Init，can not do SetAutoMode。 [Save Log Job] 2024-10-31 08:24:27.431 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetAutoMode() [Save Log Job] 2024-10-31 08:24:27.431 LOG.INFO UiEvent.cs Line:51 Event() - Chamber is in Init，can not do SetAutoMode。 [Save Log Job] 2024-10-31 08:24:27.633 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetAutoMode() [Save Log Job] 2024-10-31 08:24:27.634 LOG.INFO UiEvent.cs Line:51 Event() - Chamber is in Init，can not do SetAutoMode。 [Save Log Job] 2024-10-31 08:24:27.834 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetAutoMode() [Save Log Job] 2024-10-31 08:24:27.834 LOG.INFO UiEvent.cs Line:51 Event() - Chamber is in Init，can not do SetAutoMode。 [Save Log Job] 2024-10-31 08:25:03.659 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetAutoMode() [Save Log Job] 2024-10-31 08:25:03.661 LOG.INFO UiEvent.cs Line:51 Event() - Chamber is in Init，can not do SetAutoMode。 --------------------------------[Footer Log]----------------------------------------- --------------------------------[Header Log]----------------------------------------- [Save Log Job] 2024-10-31 08:25:29.115 LOG.INFO UiEvent.cs Line:58 Event() - 已经连接上设备实时控制系统 [Save Log Job] 2024-10-31 08:25:30.587 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(System_IsMesMode, True) [Save Log Job] 2024-10-31 08:25:30.632 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged [Save Log Job] 2024-10-31 08:25:34.247 LOG.INFO UiEvent.cs Line:51 Event() - Software will be expired in -7 days, at 10/24/2024 12:00:00 AM 。 [Save Log Job] 2024-10-31 08:25:39.439 LOG.INFO UiEvent.cs Line:51 Event() - User admin login [Save Log Job] 2024-10-31 08:26:00.341 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetAutoMode() [Save Log Job] 2024-10-31 08:26:00.342 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentModeChanged [Save Log Job] 2024-10-31 08:26:00.342 LOG.INFO UiEvent.cs Line:51 Event() - System running mode changed to Auto Mode [Save Log Job] 2024-10-31 08:26:25.554 LOG.INFO UiEvent.cs Line:51 Event() - Operation RunRecipe(123, ) [Save Log Job] 2024-10-31 08:26:25.557 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged [Save Log Job] 2024-10-31 08:27:07.007 LOG.INFO UiEvent.cs Line:51 Event() - EventLotStart [Save Log Job] 2024-10-31 08:27:27.469 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check door status。 [Save Log Job] 2024-10-31 08:27:27.470 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check backpanel door。 [Save Log Job] 2024-10-31 08:27:27.470 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check chamber door。 [Save Log Job] 2024-10-31 08:27:27.472 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check pump status。 [Save Log Job] 2024-10-31 08:27:27.472 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Close all the valves。 [Save Log Job] 2024-10-31 08:27:27.570 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Open pumping valve。 [Save Log Job] 2024-10-31 08:27:28.685 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check chamber pressure。 [Save Log Job] 2024-10-31 08:28:03.668 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Pump below 100mTorr。 [Save Log Job] 2024-10-31 08:28:09.953 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：PreProcess Finished in 1.0 minitues。 [Save Log Job] 2024-10-31 08:28:34.216 LOG.INFO UiEvent.cs Line:51 Event() - System complete run 'PreProcess'. [Save Log Job] 2024-10-31 08:28:35.092 LOG.INFO UiEvent.cs Line:51 Event() - Run Recipe 20241031082614-123 [Save Log Job] 2024-10-31 08:28:35.096 LOG.INFO UiEvent.cs Line:51 Event() - System recipe start run'20241031082614-123' [Save Log Job] 2024-10-31 08:28:59.145 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241031082614-123' start run step 1：initial。 [Save Log Job] 2024-10-31 08:28:59.145 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。 [Save Log Job] 2024-10-31 08:28:59.145 LOG.INFO UiEvent.cs Line:51 Event() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。 [Save Log Job] 2024-10-31 08:28:59.146 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。 [Save Log Job] 2024-10-31 08:28:59.147 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。 [Save Log Job] 2024-10-31 08:28:59.147 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。 [Save Log Job] 2024-10-31 08:28:59.148 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。 [Save Log Job] 2024-10-31 08:28:59.148 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。 [Save Log Job] 2024-10-31 08:28:59.149 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPower，RF set Power:0。 [Save Log Job] 2024-10-31 08:28:59.149 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。 [Save Log Job] 2024-10-31 08:28:59.150 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。 [Save Log Job] 2024-10-31 08:28:59.150 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。 [Save Log Job] 2024-10-31 08:28:59.151 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas1， ramp to 45sccm。 [Save Log Job] 2024-10-31 08:28:59.152 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas2， ramp to 56sccm。 [Save Log Job] 2024-10-31 08:28:59.153 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas3， ramp to 66sccm。 [Save Log Job] 2024-10-31 08:28:59.154 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas4， ramp to 76sccm。 [Save Log Job] 2024-10-31 08:28:59.154 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas5， ramp to 86sccm。 [Save Log Job] 2024-10-31 08:28:59.155 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPowerOnOff，Set RF power Off。 [Save Log Job] 2024-10-31 08:28:59.155 LOG.INFO UiEvent.cs Line:51 Event() - Start monitor pressure stability --------------------------------[Header Log]----------------------------------------- [Save Log Job] 2024-10-31 09:29:19.100 LOG.INFO UiEvent.cs Line:58 Event() - 已经连接上设备实时控制系统 [Save Log Job] 2024-10-31 09:29:19.101 LOG.INFO UiEvent.cs Line:57 Event() - 已经连接上设备实时控制系统 [Save Log Job] 2024-10-31 09:29:26.125 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(System_IsMesMode, True) [Save Log Job] 2024-10-31 09:29:26.149 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged [Save Log Job] 2024-10-31 09:29:26.850 LOG.INFO UiEvent.cs Line:51 Event() - Software will be expired in -7 days, at 10/24/2024 12:00:00 AM 。 --------------------------------[Header Log]----------------------------------------- [Save Log Job] 2024-10-31 10:25:19.964 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged [Save Log Job] 2024-10-31 10:25:20.718 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(System_IsMesMode, True) [Save Log Job] 2024-10-31 10:25:23.642 LOG.INFO UiEvent.cs Line:51 Event() - Software will be expired in -7 days, at 10/24/2024 12:00:00 AM 。 [Save Log Job] 2024-10-31 10:25:32.918 LOG.INFO UiEvent.cs Line:51 Event() - User admin login [Save Log Job] 2024-10-31 10:25:53.026 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetAutoMode() [Save Log Job] 2024-10-31 10:25:53.026 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentModeChanged [Save Log Job] 2024-10-31 10:25:53.027 LOG.INFO UiEvent.cs Line:51 Event() - System running mode changed to Auto Mode --------------------------------[Header Log]----------------------------------------- [Save Log Job] 2024-10-31 10:39:01.211 LOG.INFO UiEvent.cs Line:58 Event() - 已经连接上设备实时控制系统 [Save Log Job] 2024-10-31 10:39:01.212 LOG.INFO UiEvent.cs Line:57 Event() - 已经连接上设备实时控制系统 [Save Log Job] 2024-10-31 10:39:02.503 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged [Save Log Job] 2024-10-31 10:39:02.854 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(System_IsMesMode, True) [Save Log Job] 2024-10-31 10:39:06.065 LOG.INFO UiEvent.cs Line:51 Event() - Software will be expired in -7 days, at 10/24/2024 12:00:00 AM 。 [Save Log Job] 2024-10-31 10:39:08.207 LOG.INFO UiEvent.cs Line:51 Event() - User admin login [Save Log Job] 2024-10-31 10:39:21.521 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetAutoMode() [Save Log Job] 2024-10-31 10:39:21.521 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentModeChanged [Save Log Job] 2024-10-31 10:39:21.521 LOG.INFO UiEvent.cs Line:51 Event() - System running mode changed to Auto Mode [Save Log Job] 2024-10-31 10:40:22.545 LOG.INFO YZQZFabAuto.cs Line:95 GetRecipeByMultipleLot() - GetRecipeByMultipleLot|http://192.168.1.207:86/api/mes/GetRecipeByMultipleLot?strQuery=[{"LotId":"EFC241014689","MachineNumber":"22","MachineType":"稷以打胶机"}] [Save Log Job] 2024-10-31 10:40:35.717 LOG.INFO YZQZFabAuto.cs Line:97 GetRecipeByMultipleLot() - GetRecipeByMultipleLot|{"Status":200,"Message":"查询成功","Data":[{"LotId":"EFC241014689","DeviceName":"CPX4BCAYG606L400HNA","RecipeName":"CACB","ComponentQty":11,"Operation":"P极光刻"}]} --------------------------------[Header Log]----------------------------------------- [Save Log Job] 2024-10-31 10:55:41.507 LOG.INFO UiEvent.cs Line:58 Event() - 已经连接上设备实时控制系统 [Save Log Job] 2024-10-31 10:55:41.509 LOG.INFO UiEvent.cs Line:57 Event() - 已经连接上设备实时控制系统 [Save Log Job] 2024-10-31 10:55:42.545 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged [Save Log Job] 2024-10-31 10:55:43.005 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(System_IsMesMode, True) [Save Log Job] 2024-10-31 10:55:46.315 LOG.INFO UiEvent.cs Line:51 Event() - Software will be expired in -7 days, at 10/24/2024 12:00:00 AM 。 [Save Log Job] 2024-10-31 11:07:10.303 LOG.ERROR LOG.cs Line:51 Write() - System.NullReferenceException: Object reference not set to an instance of an object. 在 Aitex.Triton160.UI.UiEvent.Stop() 位置 D:\jet.plasma\trunk\Triton160\Triton160UI\UiEvent.cs:行号 32 在 Aitex.Triton160.UI.Triton160UiSystem.Terminate() 位置 D:\jet.plasma\trunk\Triton160\Triton160UI\Triton160UiSystem.cs:行号 134 --------------------------------[Footer Log]----------------------------------------- --------------------------------[Header Log]----------------------------------------- [Save Log Job] 2024-10-31 11:35:30.936 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged [Save Log Job] 2024-10-31 11:35:31.272 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(System_IsMesMode, True) [Save Log Job] 2024-10-31 11:35:34.490 LOG.INFO UiEvent.cs Line:51 Event() - Software will be expired in -7 days, at 10/24/2024 12:00:00 AM 。 [Save Log Job] 2024-10-31 11:35:37.815 LOG.INFO UiEvent.cs Line:51 Event() - User admin login [Save Log Job] 2024-10-31 11:35:40.729 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetAutoMode() [Save Log Job] 2024-10-31 11:35:40.729 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentModeChanged [Save Log Job] 2024-10-31 11:35:40.730 LOG.INFO UiEvent.cs Line:51 Event() - System running mode changed to Auto Mode [Save Log Job] 2024-10-31 11:36:24.591 LOG.INFO UiEvent.cs Line:51 Event() - recipe file 123 renamed CACB [Save Log Job] 2024-10-31 11:36:24.591 LOG.INFO UiEvent.cs Line:51 Event() - System Information --------------------------------[Footer Log]----------------------------------------- --------------------------------[Header Log]----------------------------------------- [Save Log Job] 2024-10-31 11:36:37.953 LOG.INFO UiEvent.cs Line:58 Event() - 已经连接上设备实时控制系统 [Save Log Job] 2024-10-31 11:36:37.954 LOG.INFO UiEvent.cs Line:57 Event() - 已经连接上设备实时控制系统 [Save Log Job] 2024-10-31 11:36:39.272 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(System_IsMesMode, True) [Save Log Job] 2024-10-31 11:36:39.522 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged [Save Log Job] 2024-10-31 11:36:43.140 LOG.INFO UiEvent.cs Line:51 Event() - Software will be expired in -7 days, at 10/24/2024 12:00:00 AM 。 [Save Log Job] 2024-10-31 11:36:44.748 LOG.INFO UiEvent.cs Line:51 Event() - User admin login [Save Log Job] 2024-10-31 11:36:59.527 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetAutoMode() [Save Log Job] 2024-10-31 11:36:59.528 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentModeChanged [Save Log Job] 2024-10-31 11:36:59.528 LOG.INFO UiEvent.cs Line:51 Event() - System running mode changed to Auto Mode [Save Log Job] 2024-10-31 11:37:33.396 LOG.INFO YZQZFabAuto.cs Line:95 GetRecipeByMultipleLot() - GetRecipeByMultipleLot|http://192.168.1.207:86/api/mes/GetRecipeByMultipleLot?strQuery=[{"LotId":"SFC240912810","MachineNumber":"22","MachineType":"稷以打胶机"}] [Save Log Job] 2024-10-31 11:37:33.457 LOG.INFO YZQZFabAuto.cs Line:97 GetRecipeByMultipleLot() - GetRecipeByMultipleLot|{"Status":200,"Message":"查询成功","Data":[{"LotId":"SFC240912810","DeviceName":"CPO4BCALO708U600HNA","RecipeName":"CACB","ComponentQty":13,"Operation":"P极光刻"}]} [Save Log Job] 2024-10-31 11:37:37.346 LOG.INFO UiEvent.cs Line:51 Event() - Operation RunRecipe(CACB, SFC240912810/) [Save Log Job] 2024-10-31 11:37:37.347 LOG.INFO UiEvent.cs Line:51 Event() - EventLotStart [Save Log Job] 2024-10-31 11:37:37.348 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged [Save Log Job] 2024-10-31 11:37:37.348 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check door status。 [Save Log Job] 2024-10-31 11:37:37.348 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check chamber door。 [Save Log Job] 2024-10-31 11:37:37.349 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check backpanel door。 [Save Log Job] 2024-10-31 11:37:37.349 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check pump status。 [Save Log Job] 2024-10-31 11:37:37.349 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Close all the valves。 [Save Log Job] 2024-10-31 11:37:37.452 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Open pumping valve。 [Save Log Job] 2024-10-31 11:37:38.355 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check chamber pressure。 [Save Log Job] 2024-10-31 11:38:13.317 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Pump below 100mTorr。 [Save Log Job] 2024-10-31 11:38:13.317 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：PreProcess Finished in 0.6 minitues。 [Save Log Job] 2024-10-31 11:38:13.319 LOG.INFO UiEvent.cs Line:51 Event() - System complete run 'PreProcess'. [Save Log Job] 2024-10-31 11:38:13.320 LOG.INFO UiEvent.cs Line:51 Event() - Run Recipe 20241031113737-CACB [Save Log Job] 2024-10-31 11:38:13.320 LOG.INFO UiEvent.cs Line:51 Event() - System recipe start run'20241031113737-CACB' [Save Log Job] 2024-10-31 11:38:13.416 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241031113737-CACB' start run step 1：initial。 [Save Log Job] 2024-10-31 11:38:13.416 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。 [Save Log Job] 2024-10-31 11:38:13.417 LOG.INFO UiEvent.cs Line:51 Event() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。 [Save Log Job] 2024-10-31 11:38:13.417 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。 [Save Log Job] 2024-10-31 11:38:13.417 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。 [Save Log Job] 2024-10-31 11:38:13.418 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。 [Save Log Job] 2024-10-31 11:38:13.418 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。 [Save Log Job] 2024-10-31 11:38:13.419 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。 [Save Log Job] 2024-10-31 11:38:13.419 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPower，RF set Power:0。 [Save Log Job] 2024-10-31 11:38:13.420 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。 [Save Log Job] 2024-10-31 11:38:13.420 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。 [Save Log Job] 2024-10-31 11:38:13.421 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。 [Save Log Job] 2024-10-31 11:38:13.421 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas1， ramp to 45sccm。 [Save Log Job] 2024-10-31 11:38:13.421 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas2， ramp to 56sccm。 [Save Log Job] 2024-10-31 11:38:13.422 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas3， ramp to 66sccm。 [Save Log Job] 2024-10-31 11:38:13.422 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas4， ramp to 76sccm。 [Save Log Job] 2024-10-31 11:38:13.423 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas5， ramp to 86sccm。 [Save Log Job] 2024-10-31 11:38:13.423 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPowerOnOff，Set RF power Off。 [Save Log Job] 2024-10-31 11:38:13.423 LOG.INFO UiEvent.cs Line:51 Event() - Start monitor pressure stability [Save Log Job] 2024-10-31 11:38:43.491 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241031113737-CACB' end step 1 [Save Log Job] 2024-10-31 11:38:43.491 LOG.INFO UiEvent.cs Line:51 Event() - Stop monitor pressure stability [Save Log Job] 2024-10-31 11:38:43.491 LOG.INFO UiEvent.cs Line:51 Event() - System Recipe run completed，Recipe：20241031113737-CACB Start time：2024/10/31 11:38:13 End time：2024/10/31 11:38:43 Total time：0:0:30 [Save Log Job] 2024-10-31 11:38:43.492 LOG.INFO UiEvent.cs Line:51 Event() - System Recipe completely run [Save Log Job] 2024-10-31 11:38:43.492 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, wait for 10 seconds [Save Log Job] 2024-10-31 11:38:45.503 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC1 ValveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-31 11:38:45.503 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC2 ValveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-31 11:38:45.504 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC3 ValveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-31 11:38:45.505 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC4 ValveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-31 11:38:45.505 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC5 ValveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-31 11:38:45.505 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门Process gas final valveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-31 11:38:53.574 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, RF Power Off [Save Log Job] 2024-10-31 11:38:53.668 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, Stop all the gas flow [Save Log Job] 2024-10-31 11:38:59.505 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, Close all the valves [Save Log Job] 2024-10-31 11:38:59.605 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, close pump valve [Save Log Job] 2024-10-31 11:39:01.618 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门Chamber pumping valveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-31 11:39:02.933 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, delay 3 seconds [Save Log Job] 2024-10-31 11:39:06.059 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, vent 50 seconds [Save Log Job] 2024-10-31 11:39:56.169 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, Close vent valve [Save Log Job] 2024-10-31 11:39:56.974 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, PostProcess Finished in 1.2 minitues [Save Log Job] 2024-10-31 11:39:56.974 LOG.INFO UiEvent.cs Line:51 Event() - System complete run 'PostProcess'. [Save Log Job] 2024-10-31 11:39:56.975 LOG.INFO UiEvent.cs Line:51 Event() - EventLotFinished [Save Log Job] 2024-10-31 11:39:57.075 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged --------------------------------[Header Log]----------------------------------------- [Save Log Job] 2024-10-31 11:49:40.138 LOG.INFO UiEvent.cs Line:58 Event() - 已经连接上设备实时控制系统 [Save Log Job] 2024-10-31 11:49:40.139 LOG.INFO UiEvent.cs Line:57 Event() - 已经连接上设备实时控制系统 [Save Log Job] 2024-10-31 11:49:41.487 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged [Save Log Job] 2024-10-31 11:49:41.916 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(System_IsMesMode, True) [Save Log Job] 2024-10-31 11:49:45.133 LOG.INFO UiEvent.cs Line:51 Event() - Software will be expired in -7 days, at 10/24/2024 12:00:00 AM 。 [Save Log Job] 2024-10-31 11:49:51.594 LOG.INFO UiEvent.cs Line:51 Event() - User admin login [Save Log Job] 2024-10-31 11:50:04.346 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetAutoMode() [Save Log Job] 2024-10-31 11:50:04.346 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentModeChanged [Save Log Job] 2024-10-31 11:50:04.346 LOG.INFO UiEvent.cs Line:51 Event() - System running mode changed to Auto Mode [Save Log Job] 2024-10-31 11:50:15.108 LOG.INFO YZQZFabAuto.cs Line:95 GetRecipeByMultipleLot() - GetRecipeByMultipleLot|http://192.168.1.207:86/api/mes/GetRecipeByMultipleLot?strQuery=[{"LotId":"SFC240912810","MachineNumber":"22","MachineType":"稷以打胶机"}] [Save Log Job] 2024-10-31 11:50:15.163 LOG.INFO YZQZFabAuto.cs Line:97 GetRecipeByMultipleLot() - GetRecipeByMultipleLot|{"Status":200,"Message":"查询成功","Data":[{"LotId":"SFC240912810","DeviceName":"CPO4BCALO708U600HNA","RecipeName":"CACB","ComponentQty":13,"Operation":"P极光刻"}]} [Save Log Job] 2024-10-31 11:50:17.426 LOG.INFO UiEvent.cs Line:51 Event() - Operation RunRecipe(CACB, SFC240912810/) [Save Log Job] 2024-10-31 11:50:17.426 LOG.INFO UiEvent.cs Line:51 Event() - EventLotStart [Save Log Job] 2024-10-31 11:50:17.526 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check door status。 [Save Log Job] 2024-10-31 11:50:17.526 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check chamber door。 [Save Log Job] 2024-10-31 11:50:17.526 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check backpanel door。 [Save Log Job] 2024-10-31 11:50:17.530 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check pump status。 [Save Log Job] 2024-10-31 11:50:17.530 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Close all the valves。 [Save Log Job] 2024-10-31 11:50:17.530 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged [Save Log Job] 2024-10-31 11:50:17.530 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Open pumping valve。 [Save Log Job] 2024-10-31 11:50:19.544 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门Chamber pumping valveOpen失败，原因：Valve keep closed 。 [Save Log Job] 2024-10-31 11:50:21.161 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check chamber pressure。 [Save Log Job] 2024-10-31 11:51:03.770 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Pump below 100mTorr。 [Save Log Job] 2024-10-31 11:51:03.871 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：PreProcess Finished in 0.8 minitues。 [Save Log Job] 2024-10-31 11:51:03.871 LOG.INFO UiEvent.cs Line:51 Event() - System complete run 'PreProcess'. [Save Log Job] 2024-10-31 11:51:03.871 LOG.INFO UiEvent.cs Line:51 Event() - Run Recipe 20241031115017-CACB [Save Log Job] 2024-10-31 11:51:03.872 LOG.INFO UiEvent.cs Line:51 Event() - System recipe start run'20241031115017-CACB' [Save Log Job] 2024-10-31 11:51:03.872 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241031115017-CACB' start run step 1：initial。 [Save Log Job] 2024-10-31 11:51:03.873 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。 [Save Log Job] 2024-10-31 11:51:03.873 LOG.INFO UiEvent.cs Line:51 Event() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。 [Save Log Job] 2024-10-31 11:51:03.874 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。 [Save Log Job] 2024-10-31 11:51:03.874 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。 [Save Log Job] 2024-10-31 11:51:03.874 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。 [Save Log Job] 2024-10-31 11:51:03.875 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。 [Save Log Job] 2024-10-31 11:51:03.875 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。 [Save Log Job] 2024-10-31 11:51:03.875 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPower，RF set Power:0。 [Save Log Job] 2024-10-31 11:51:03.875 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。 [Save Log Job] 2024-10-31 11:51:03.876 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。 [Save Log Job] 2024-10-31 11:51:03.876 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。 [Save Log Job] 2024-10-31 11:51:03.877 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas1， ramp to 45sccm。 [Save Log Job] 2024-10-31 11:51:03.877 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas2， ramp to 56sccm。 [Save Log Job] 2024-10-31 11:51:03.877 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas3， ramp to 66sccm。 [Save Log Job] 2024-10-31 11:51:03.878 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas4， ramp to 76sccm。 [Save Log Job] 2024-10-31 11:51:03.878 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas5， ramp to 86sccm。 [Save Log Job] 2024-10-31 11:51:03.878 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPowerOnOff，Set RF power Off。 [Save Log Job] 2024-10-31 11:51:03.972 LOG.INFO UiEvent.cs Line:51 Event() - Start monitor pressure stability [Save Log Job] 2024-10-31 11:51:33.942 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241031115017-CACB' end step 1 [Save Log Job] 2024-10-31 11:51:33.942 LOG.INFO UiEvent.cs Line:51 Event() - Stop monitor pressure stability [Save Log Job] 2024-10-31 11:51:33.943 LOG.INFO UiEvent.cs Line:51 Event() - System Recipe run completed，Recipe：20241031115017-CACB Start time：2024/10/31 11:51:03 End time：2024/10/31 11:51:33 Total time：0:0:30 [Save Log Job] 2024-10-31 11:51:33.943 LOG.INFO UiEvent.cs Line:51 Event() - System Recipe completely run [Save Log Job] 2024-10-31 11:51:34.043 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, wait for 10 seconds [Save Log Job] 2024-10-31 11:51:35.959 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC1 ValveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-31 11:51:35.959 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC2 ValveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-31 11:51:35.959 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC3 ValveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-31 11:51:35.960 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC4 ValveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-31 11:51:35.960 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC5 ValveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-31 11:51:35.960 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门Process gas final valveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-31 11:51:44.114 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, RF Power Off [Save Log Job] 2024-10-31 11:51:44.116 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, Stop all the gas flow [Save Log Job] 2024-10-31 11:51:49.953 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, Close all the valves [Save Log Job] 2024-10-31 11:51:49.953 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, close pump valve [Save Log Job] 2024-10-31 11:51:51.967 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门Chamber pumping valveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-31 11:51:53.274 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, delay 3 seconds [Save Log Job] 2024-10-31 11:51:56.397 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, vent 50 seconds [Save Log Job] 2024-10-31 11:52:46.476 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, Close vent valve --------------------------------[Header Log]----------------------------------------- [Save Log Job] 2024-10-31 11:54:04.079 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(System_IsMesMode, True) [Save Log Job] 2024-10-31 11:54:04.079 LOG.INFO UiEvent.cs Line:50 Event() - EventEquipmentStatusChanged [Save Log Job] 2024-10-31 11:54:07.742 LOG.INFO UiEvent.cs Line:51 Event() - Software will be expired in -7 days, at 10/24/2024 12:00:00 AM 。 [Save Log Job] 2024-10-31 11:54:11.903 LOG.INFO UiEvent.cs Line:51 Event() - User admin login [Save Log Job] 2024-10-31 11:54:16.499 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetAutoMode() [Save Log Job] 2024-10-31 11:54:16.500 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentModeChanged [Save Log Job] 2024-10-31 11:54:16.500 LOG.INFO UiEvent.cs Line:51 Event() - System running mode changed to Auto Mode [Save Log Job] 2024-10-31 11:54:24.717 LOG.INFO YZQZFabAuto.cs Line:95 GetRecipeByMultipleLot() - GetRecipeByMultipleLot|http://192.168.1.207:86/api/mes/GetRecipeByMultipleLot?strQuery=[{"LotId":"SFC240912810","MachineNumber":"22","MachineType":"稷以打胶机"}] [Save Log Job] 2024-10-31 11:54:24.782 LOG.INFO YZQZFabAuto.cs Line:97 GetRecipeByMultipleLot() - GetRecipeByMultipleLot|{"Status":200,"Message":"查询成功","Data":[{"LotId":"SFC240912810","DeviceName":"CPO4BCALO708U600HNA","RecipeName":"CACB","ComponentQty":13,"Operation":"P极光刻"}]} [Save Log Job] 2024-10-31 11:54:26.366 LOG.INFO UiEvent.cs Line:51 Event() - Operation RunRecipe(CACB, SFC240912810/) [Save Log Job] 2024-10-31 11:54:26.366 LOG.INFO UiEvent.cs Line:51 Event() - EventLotStart [Save Log Job] 2024-10-31 11:54:26.466 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check door status。 [Save Log Job] 2024-10-31 11:54:26.466 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check chamber door。 [Save Log Job] 2024-10-31 11:54:26.466 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check backpanel door。 [Save Log Job] 2024-10-31 11:54:26.467 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check pump status。 [Save Log Job] 2024-10-31 11:54:26.467 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Close all the valves。 [Save Log Job] 2024-10-31 11:54:26.468 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Open pumping valve。 [Save Log Job] 2024-10-31 11:54:26.567 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged [Save Log Job] 2024-10-31 11:54:28.480 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check chamber pressure。 [Save Log Job] 2024-10-31 11:55:07.151 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Pump below 100mTorr。 [Save Log Job] 2024-10-31 11:55:07.251 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：PreProcess Finished in 0.7 minitues。 [Save Log Job] 2024-10-31 11:55:07.251 LOG.INFO UiEvent.cs Line:51 Event() - System complete run 'PreProcess'. [Save Log Job] 2024-10-31 11:55:07.253 LOG.INFO UiEvent.cs Line:51 Event() - System recipe start run'20241031115426-CACB' [Save Log Job] 2024-10-31 11:55:07.253 LOG.INFO UiEvent.cs Line:51 Event() - Run Recipe 20241031115426-CACB [Save Log Job] 2024-10-31 11:55:07.254 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241031115426-CACB' start run step 1：initial。 [Save Log Job] 2024-10-31 11:55:07.255 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。 [Save Log Job] 2024-10-31 11:55:07.255 LOG.INFO UiEvent.cs Line:51 Event() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。 [Save Log Job] 2024-10-31 11:55:07.257 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。 [Save Log Job] 2024-10-31 11:55:07.257 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。 [Save Log Job] 2024-10-31 11:55:07.257 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。 [Save Log Job] 2024-10-31 11:55:07.257 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。 [Save Log Job] 2024-10-31 11:55:07.259 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。 [Save Log Job] 2024-10-31 11:55:07.259 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。 [Save Log Job] 2024-10-31 11:55:07.259 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。 [Save Log Job] 2024-10-31 11:55:07.259 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPower，RF set Power:0。 [Save Log Job] 2024-10-31 11:55:07.259 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas1， ramp to 45sccm。 [Save Log Job] 2024-10-31 11:55:07.259 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。 [Save Log Job] 2024-10-31 11:55:07.259 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas2， ramp to 56sccm。 [Save Log Job] 2024-10-31 11:55:07.259 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas3， ramp to 66sccm。 [Save Log Job] 2024-10-31 11:55:07.260 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas4， ramp to 76sccm。 [Save Log Job] 2024-10-31 11:55:07.260 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas5， ramp to 86sccm。 [Save Log Job] 2024-10-31 11:55:07.260 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPowerOnOff，Set RF power Off。 [Save Log Job] 2024-10-31 11:55:07.354 LOG.INFO UiEvent.cs Line:51 Event() - Start monitor pressure stability [Save Log Job] 2024-10-31 11:55:37.343 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241031115426-CACB' end step 1 [Save Log Job] 2024-10-31 11:55:37.343 LOG.INFO UiEvent.cs Line:51 Event() - Stop monitor pressure stability [Save Log Job] 2024-10-31 11:55:37.344 LOG.INFO UiEvent.cs Line:51 Event() - System Recipe run completed，Recipe：20241031115426-CACB Start time：2024/10/31 11:55:07 End time：2024/10/31 11:55:37 Total time：0:0:30 [Save Log Job] 2024-10-31 11:55:37.344 LOG.INFO UiEvent.cs Line:51 Event() - System Recipe completely run [Save Log Job] 2024-10-31 11:55:37.444 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, wait for 10 seconds [Save Log Job] 2024-10-31 11:55:39.377 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC1 ValveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-31 11:55:39.378 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC2 ValveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-31 11:55:39.380 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC4 ValveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-31 11:55:39.380 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC3 ValveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-31 11:55:39.380 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC5 ValveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-31 11:55:39.380 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门Process gas final valveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-31 11:55:47.544 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, RF Power Off [Save Log Job] 2024-10-31 11:55:47.544 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, Stop all the gas flow [Save Log Job] 2024-10-31 11:55:53.390 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, Close all the valves [Save Log Job] 2024-10-31 11:55:53.390 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, close pump valve [Save Log Job] 2024-10-31 11:55:55.412 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门Chamber pumping valveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-31 11:55:56.714 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, delay 3 seconds [Save Log Job] 2024-10-31 11:55:59.840 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, vent 50 seconds [Save Log Job] 2024-10-31 11:56:49.933 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, Close vent valve [Save Log Job] 2024-10-31 11:56:55.245 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, PostProcess Finished in 1.2 minitues --------------------------------[Header Log]----------------------------------------- [Save Log Job] 2024-10-31 12:31:07.371 LOG.INFO UiEvent.cs Line:57 Event() - 已经连接上设备实时控制系统 [Save Log Job] 2024-10-31 12:31:07.372 LOG.INFO UiEvent.cs Line:58 Event() - 已经连接上设备实时控制系统 [Save Log Job] 2024-10-31 12:31:08.640 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged [Save Log Job] 2024-10-31 12:31:09.089 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(System_IsMesMode, True) [Save Log Job] 2024-10-31 12:31:12.310 LOG.INFO UiEvent.cs Line:51 Event() - Software will be expired in -7 days, at 10/24/2024 12:00:00 AM 。 [Save Log Job] 2024-10-31 12:31:15.944 LOG.INFO UiEvent.cs Line:51 Event() - User admin login [Save Log Job] 2024-10-31 12:31:27.422 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetAutoMode() [Save Log Job] 2024-10-31 12:31:27.422 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentModeChanged [Save Log Job] 2024-10-31 12:31:27.422 LOG.INFO UiEvent.cs Line:51 Event() - System running mode changed to Auto Mode [Save Log Job] 2024-10-31 12:31:51.887 LOG.INFO YZQZFabAuto.cs Line:95 GetRecipeByMultipleLot() - GetRecipeByMultipleLot|http://192.168.1.207:86/api/mes/GetRecipeByMultipleLot?strQuery=[{"LotId":"SFC240912810","MachineNumber":"22","MachineType":"稷以打胶机"}] [Save Log Job] 2024-10-31 12:32:17.680 LOG.INFO YZQZFabAuto.cs Line:97 GetRecipeByMultipleLot() - GetRecipeByMultipleLot|The request was aborted: The operation has timed out. [Save Log Job] 2024-10-31 12:32:29.048 LOG.INFO YZQZFabAuto.cs Line:95 GetRecipeByMultipleLot() - GetRecipeByMultipleLot|http://192.168.1.207:86/api/mes/GetRecipeByMultipleLot?strQuery=[{"LotId":"SFC240912810","MachineNumber":"22","MachineType":"稷以打胶机"}] [Save Log Job] 2024-10-31 12:32:29.112 LOG.INFO YZQZFabAuto.cs Line:97 GetRecipeByMultipleLot() - GetRecipeByMultipleLot|{"Status":200,"Message":"查询成功","Data":[{"LotId":"SFC240912810","DeviceName":"CPO4BCALO708U600HNA","RecipeName":"CACB","ComponentQty":13,"Operation":"P极光刻"}]} [Save Log Job] 2024-10-31 12:33:15.393 LOG.INFO UiEvent.cs Line:51 Event() - Operation RunRecipe(CACB, SFC240912810/) [Save Log Job] 2024-10-31 12:33:15.494 LOG.INFO UiEvent.cs Line:51 Event() - EventLotStart [Save Log Job] 2024-10-31 12:33:15.495 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check chamber door。 [Save Log Job] 2024-10-31 12:33:15.495 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check door status。 [Save Log Job] 2024-10-31 12:33:15.495 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check backpanel door。 [Save Log Job] 2024-10-31 12:33:15.495 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check pump status。 [Save Log Job] 2024-10-31 12:33:15.497 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Close all the valves。 [Save Log Job] 2024-10-31 12:33:15.497 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged [Save Log Job] 2024-10-31 12:33:15.594 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Open pumping valve。 [Save Log Job] 2024-10-31 12:33:17.605 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门Chamber pumping valveOpen失败，原因：Valve keep closed 。 [Save Log Job] 2024-10-31 12:33:19.419 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check chamber pressure。 [Save Log Job] 2024-10-31 12:33:54.378 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Pump below 100mTorr。 [Save Log Job] 2024-10-31 12:33:54.479 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：PreProcess Finished in 0.6 minitues。 [Save Log Job] 2024-10-31 12:33:54.479 LOG.INFO UiEvent.cs Line:51 Event() - System complete run 'PreProcess'. [Save Log Job] 2024-10-31 12:33:54.479 LOG.INFO UiEvent.cs Line:51 Event() - Run Recipe 20241031123315-CACB [Save Log Job] 2024-10-31 12:33:54.481 LOG.INFO UiEvent.cs Line:51 Event() - System recipe start run'20241031123315-CACB' [Save Log Job] 2024-10-31 12:33:54.482 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。 [Save Log Job] 2024-10-31 12:33:54.482 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241031123315-CACB' start run step 1：initial。 [Save Log Job] 2024-10-31 12:33:54.482 LOG.INFO UiEvent.cs Line:51 Event() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。 [Save Log Job] 2024-10-31 12:33:54.482 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。 [Save Log Job] 2024-10-31 12:33:54.482 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。 [Save Log Job] 2024-10-31 12:33:54.482 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。 [Save Log Job] 2024-10-31 12:33:54.485 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPower，RF set Power:0。 [Save Log Job] 2024-10-31 12:33:54.485 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。 [Save Log Job] 2024-10-31 12:33:54.485 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。 [Save Log Job] 2024-10-31 12:33:54.485 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。 [Save Log Job] 2024-10-31 12:33:54.486 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。 [Save Log Job] 2024-10-31 12:33:54.486 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。 [Save Log Job] 2024-10-31 12:33:54.486 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas1， ramp to 45sccm。 [Save Log Job] 2024-10-31 12:33:54.486 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas2， ramp to 56sccm。 [Save Log Job] 2024-10-31 12:33:54.488 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas5， ramp to 86sccm。 [Save Log Job] 2024-10-31 12:33:54.488 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPowerOnOff，Set RF power Off。 [Save Log Job] 2024-10-31 12:33:54.488 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas4， ramp to 76sccm。 [Save Log Job] 2024-10-31 12:33:54.489 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas3， ramp to 66sccm。 [Save Log Job] 2024-10-31 12:33:54.579 LOG.INFO UiEvent.cs Line:51 Event() - Start monitor pressure stability [Save Log Job] 2024-10-31 12:34:24.564 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241031123315-CACB' end step 1 [Save Log Job] 2024-10-31 12:34:24.564 LOG.INFO UiEvent.cs Line:51 Event() - Stop monitor pressure stability [Save Log Job] 2024-10-31 12:34:24.566 LOG.INFO UiEvent.cs Line:51 Event() - System Recipe run completed，Recipe：20241031123315-CACB Start time：2024/10/31 12:33:54 End time：2024/10/31 12:34:24 Total time：0:0:30 [Save Log Job] 2024-10-31 12:34:24.566 LOG.INFO UiEvent.cs Line:51 Event() - System Recipe completely run [Save Log Job] 2024-10-31 12:34:24.566 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, wait for 10 seconds [Save Log Job] 2024-10-31 12:34:56.834 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC1 ValveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-31 12:34:56.836 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC2 ValveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-31 12:34:56.837 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC3 ValveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-31 12:34:56.838 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC4 ValveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-31 12:34:56.838 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC5 ValveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-31 12:34:56.845 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门Process gas final valveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-31 12:34:56.847 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, RF Power Off [Save Log Job] 2024-10-31 12:34:56.932 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, Stop all the gas flow [Save Log Job] 2024-10-31 12:35:17.910 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, Close all the valves [Save Log Job] 2024-10-31 12:35:18.011 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, close pump valve [Save Log Job] 2024-10-31 12:35:20.032 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门Chamber pumping valveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-31 12:35:21.339 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, delay 3 seconds [Save Log Job] 2024-10-31 12:35:24.467 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, vent 50 seconds [Save Log Job] 2024-10-31 12:36:14.538 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, Close vent valve [Save Log Job] 2024-10-31 12:36:15.347 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, PostProcess Finished in 1.8 minitues [Save Log Job] 2024-10-31 12:36:15.347 LOG.INFO UiEvent.cs Line:51 Event() - System complete run 'PostProcess'. [Save Log Job] 2024-10-31 12:36:15.347 LOG.INFO UiEvent.cs Line:51 Event() - EventLotFinished [Save Log Job] 2024-10-31 12:36:20.279 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged [Save Log Job] 2024-10-31 12:36:20.281 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged --------------------------------[Header Log]----------------------------------------- [Save Log Job] 2024-10-31 12:41:26.173 LOG.INFO UiEvent.cs Line:57 Event() - 已经连接上设备实时控制系统 [Save Log Job] 2024-10-31 12:41:26.174 LOG.INFO UiEvent.cs Line:58 Event() - 已经连接上设备实时控制系统 [Save Log Job] 2024-10-31 12:41:27.538 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(System_IsMesMode, True) [Save Log Job] 2024-10-31 12:41:27.538 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged [Save Log Job] 2024-10-31 12:41:31.100 LOG.INFO UiEvent.cs Line:51 Event() - Software will be expired in -7 days, at 10/24/2024 12:00:00 AM 。 [Save Log Job] 2024-10-31 12:41:33.110 LOG.INFO UiEvent.cs Line:51 Event() - User admin login [Save Log Job] 2024-10-31 12:41:59.277 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetAutoMode() [Save Log Job] 2024-10-31 12:41:59.277 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentModeChanged [Save Log Job] 2024-10-31 12:41:59.277 LOG.INFO UiEvent.cs Line:51 Event() - System running mode changed to Auto Mode [Save Log Job] 2024-10-31 12:42:09.498 LOG.INFO YZQZFabAuto.cs Line:57 GetRecipeByMultipleLot() - GetRecipeByMultipleLot|http://192.168.1.207:86/api/mes/GetRecipeByMultipleLot?strQuery=[{"LotId":"SFC240912810","MachineNumber":"22","MachineType":"稷以打胶机"}] [Save Log Job] 2024-10-31 12:42:09.553 LOG.INFO YZQZFabAuto.cs Line:59 GetRecipeByMultipleLot() - GetRecipeByMultipleLot|{"Status":200,"Message":"查询成功","Data":[{"LotId":"SFC240912810","DeviceName":"CPO4BCALO708U600HNA","RecipeName":"CACB","ComponentQty":13,"Operation":"P极光刻"}]} [Save Log Job] 2024-10-31 12:42:15.134 LOG.INFO UiEvent.cs Line:51 Event() - Operation RunRecipe(CACB, SFC240912810/) [Save Log Job] 2024-10-31 12:42:15.134 LOG.INFO UiEvent.cs Line:51 Event() - EventLotStart [Save Log Job] 2024-10-31 12:42:15.234 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check door status。 [Save Log Job] 2024-10-31 12:42:15.234 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check chamber door。 [Save Log Job] 2024-10-31 12:42:15.234 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check backpanel door。 [Save Log Job] 2024-10-31 12:42:15.234 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check pump status。 [Save Log Job] 2024-10-31 12:42:15.235 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Close all the valves。 [Save Log Job] 2024-10-31 12:42:15.235 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged [Save Log Job] 2024-10-31 12:42:15.235 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Open pumping valve。 [Save Log Job] 2024-10-31 12:42:16.340 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check chamber pressure。 [Save Log Job] 2024-10-31 12:42:58.848 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Pump below 100mTorr。 [Save Log Job] 2024-10-31 12:42:58.949 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：PreProcess Finished in 0.7 minitues。 [Save Log Job] 2024-10-31 12:42:58.949 LOG.INFO UiEvent.cs Line:51 Event() - System complete run 'PreProcess'. [Save Log Job] 2024-10-31 12:42:58.950 LOG.INFO UiEvent.cs Line:51 Event() - Run Recipe 20241031124215-CACB [Save Log Job] 2024-10-31 12:42:58.950 LOG.INFO UiEvent.cs Line:51 Event() - System recipe start run'20241031124215-CACB' [Save Log Job] 2024-10-31 12:42:58.950 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241031124215-CACB' start run step 1：initial。 [Save Log Job] 2024-10-31 12:42:58.951 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。 [Save Log Job] 2024-10-31 12:42:58.951 LOG.INFO UiEvent.cs Line:51 Event() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。 [Save Log Job] 2024-10-31 12:42:58.952 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。 [Save Log Job] 2024-10-31 12:42:58.952 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。 [Save Log Job] 2024-10-31 12:42:58.952 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。 [Save Log Job] 2024-10-31 12:42:58.953 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。 [Save Log Job] 2024-10-31 12:42:58.953 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。 [Save Log Job] 2024-10-31 12:42:58.953 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPower，RF set Power:0。 [Save Log Job] 2024-10-31 12:42:58.954 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。 [Save Log Job] 2024-10-31 12:42:58.954 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。 [Save Log Job] 2024-10-31 12:42:58.954 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。 [Save Log Job] 2024-10-31 12:42:58.955 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas1， ramp to 45sccm。 [Save Log Job] 2024-10-31 12:42:58.955 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas2， ramp to 56sccm。 [Save Log Job] 2024-10-31 12:42:58.956 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas3， ramp to 66sccm。 [Save Log Job] 2024-10-31 12:42:58.956 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas4， ramp to 76sccm。 [Save Log Job] 2024-10-31 12:42:58.956 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas5， ramp to 86sccm。 [Save Log Job] 2024-10-31 12:42:58.957 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPowerOnOff，Set RF power Off。 [Save Log Job] 2024-10-31 12:42:59.049 LOG.INFO UiEvent.cs Line:51 Event() - Start monitor pressure stability [Save Log Job] 2024-10-31 12:43:29.032 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241031124215-CACB' end step 1 [Save Log Job] 2024-10-31 12:43:29.032 LOG.INFO UiEvent.cs Line:51 Event() - Stop monitor pressure stability [Save Log Job] 2024-10-31 12:43:29.032 LOG.INFO UiEvent.cs Line:51 Event() - System Recipe run completed，Recipe：20241031124215-CACB Start time：2024/10/31 12:42:58 End time：2024/10/31 12:43:28 Total time：0:0:30 [Save Log Job] 2024-10-31 12:43:29.033 LOG.INFO UiEvent.cs Line:51 Event() - System Recipe completely run [Save Log Job] 2024-10-31 12:43:29.132 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, wait for 10 seconds [Save Log Job] 2024-10-31 12:43:31.145 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC1 ValveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-31 12:43:31.145 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC2 ValveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-31 12:43:31.145 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC3 ValveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-31 12:43:31.145 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC4 ValveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-31 12:43:31.146 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC5 ValveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-31 12:43:31.146 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门Process gas final valveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-31 12:43:39.207 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, RF Power Off [Save Log Job] 2024-10-31 12:43:39.207 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, Stop all the gas flow [Save Log Job] 2024-10-31 12:43:45.052 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, Close all the valves [Save Log Job] 2024-10-31 12:43:45.151 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, close pump valve [Save Log Job] 2024-10-31 12:43:47.168 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门Chamber pumping valveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-31 12:43:48.476 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, delay 3 seconds [Save Log Job] 2024-10-31 12:43:51.622 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, vent 50 seconds [Save Log Job] 2024-10-31 12:44:41.709 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, Close vent valve [Save Log Job] 2024-10-31 12:52:31.992 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, PostProcess Finished in 1.2 minitues [Save Log Job] 2024-10-31 12:52:32.773 LOG.INFO UiEvent.cs Line:51 Event() - System complete run 'PostProcess'. [Save Log Job] 2024-10-31 12:52:33.234 LOG.INFO UiEvent.cs Line:51 Event() - EventLotFinished [Save Log Job] 2024-10-31 12:52:34.654 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged [Save Log Job] 2024-10-31 12:52:34.663 LOG.INFO UiEvent.cs Line:51 Event() - System PLC heart beat check failed，please confirm PLC still running [Save Log Job] 2024-10-31 12:52:35.077 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged [Save Log Job] 2024-10-31 12:52:36.121 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged --------------------------------[Header Log]----------------------------------------- [Save Log Job] 2024-10-31 13:01:59.980 LOG.INFO UiEvent.cs Line:58 Event() - 已经连接上设备实时控制系统 [Save Log Job] 2024-10-31 13:02:01.252 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged [Save Log Job] 2024-10-31 13:02:01.297 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(System_IsMesMode, True) [Save Log Job] 2024-10-31 13:02:04.918 LOG.INFO UiEvent.cs Line:51 Event() - Software will be expired in -7 days, at 10/24/2024 12:00:00 AM 。 [Save Log Job] 2024-10-31 13:02:11.276 LOG.INFO UiEvent.cs Line:51 Event() - User admin login [Save Log Job] 2024-10-31 13:02:14.468 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetAutoMode() [Save Log Job] 2024-10-31 13:02:14.468 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentModeChanged [Save Log Job] 2024-10-31 13:02:14.468 LOG.INFO UiEvent.cs Line:51 Event() - System running mode changed to Auto Mode [Save Log Job] 2024-10-31 13:02:43.452 LOG.INFO YZQZFabAuto.cs Line:57 GetRecipeByMultipleLot() - GetRecipeByMultipleLot|http://192.168.1.207:86/api/mes/GetRecipeByMultipleLot?strQuery=[{"LotId":"SFC240912810","MachineNumber":"22","MachineType":"稷以打胶机"}] [Save Log Job] 2024-10-31 13:02:43.870 LOG.INFO YZQZFabAuto.cs Line:59 GetRecipeByMultipleLot() - GetRecipeByMultipleLot|{"Status":200,"Message":"查询成功","Data":[{"LotId":"SFC240912810","DeviceName":"CPO4BCALO708U600HNA","RecipeName":"CACB","ComponentQty":13,"Operation":"P极光刻"}]} [Save Log Job] 2024-10-31 13:02:46.264 LOG.INFO UiEvent.cs Line:51 Event() - Operation RunRecipe(CACB, SFC240912810/) [Save Log Job] 2024-10-31 13:02:46.364 LOG.INFO UiEvent.cs Line:51 Event() - EventLotStart [Save Log Job] 2024-10-31 13:02:46.365 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged [Save Log Job] 2024-10-31 13:02:46.367 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check door status。 [Save Log Job] 2024-10-31 13:02:46.367 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check chamber door。 [Save Log Job] 2024-10-31 13:02:46.367 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check backpanel door。 [Save Log Job] 2024-10-31 13:02:46.368 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check pump status。 [Save Log Job] 2024-10-31 13:02:46.368 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Close all the valves。 [Save Log Job] 2024-10-31 13:02:46.467 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Open pumping valve。 [Save Log Job] 2024-10-31 13:02:48.481 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门Chamber pumping valveOpen失败，原因：Valve keep closed 。 [Save Log Job] 2024-10-31 13:02:48.582 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check chamber pressure。 [Save Log Job] 2024-10-31 13:03:31.321 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Pump below 100mTorr。 [Save Log Job] 2024-10-31 13:03:31.321 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：PreProcess Finished in 0.7 minitues。 [Save Log Job] 2024-10-31 13:03:31.321 LOG.INFO UiEvent.cs Line:51 Event() - System complete run 'PreProcess'. [Save Log Job] 2024-10-31 13:03:31.322 LOG.INFO UiEvent.cs Line:51 Event() - Run Recipe 20241031130246-CACB [Save Log Job] 2024-10-31 13:03:31.322 LOG.INFO UiEvent.cs Line:51 Event() - System recipe start run'20241031130246-CACB' [Save Log Job] 2024-10-31 13:03:31.423 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241031130246-CACB' start run step 1：initial。 [Save Log Job] 2024-10-31 13:03:31.423 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。 [Save Log Job] 2024-10-31 13:03:31.423 LOG.INFO UiEvent.cs Line:51 Event() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。 [Save Log Job] 2024-10-31 13:03:31.424 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。 [Save Log Job] 2024-10-31 13:03:31.424 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。 [Save Log Job] 2024-10-31 13:03:31.424 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。 [Save Log Job] 2024-10-31 13:03:31.425 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。 [Save Log Job] 2024-10-31 13:03:31.425 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。 [Save Log Job] 2024-10-31 13:03:31.425 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPower，RF set Power:0。 [Save Log Job] 2024-10-31 13:03:31.426 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。 [Save Log Job] 2024-10-31 13:03:31.426 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。 [Save Log Job] 2024-10-31 13:03:31.426 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。 [Save Log Job] 2024-10-31 13:03:31.427 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas1， ramp to 45sccm。 [Save Log Job] 2024-10-31 13:03:31.427 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas2， ramp to 56sccm。 [Save Log Job] 2024-10-31 13:03:31.427 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas3， ramp to 66sccm。 [Save Log Job] 2024-10-31 13:03:31.428 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas4， ramp to 76sccm。 [Save Log Job] 2024-10-31 13:03:31.428 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas5， ramp to 86sccm。 [Save Log Job] 2024-10-31 13:03:31.428 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPowerOnOff，Set RF power Off。 [Save Log Job] 2024-10-31 13:03:31.429 LOG.INFO UiEvent.cs Line:51 Event() - Start monitor pressure stability [Save Log Job] 2024-10-31 13:04:01.425 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241031130246-CACB' end step 1 [Save Log Job] 2024-10-31 13:04:01.425 LOG.INFO UiEvent.cs Line:51 Event() - Stop monitor pressure stability [Save Log Job] 2024-10-31 13:04:01.425 LOG.INFO UiEvent.cs Line:51 Event() - System Recipe run completed，Recipe：20241031130246-CACB Start time：2024/10/31 13:03:31 End time：2024/10/31 13:04:01 Total time：0:0:30 [Save Log Job] 2024-10-31 13:04:01.426 LOG.INFO UiEvent.cs Line:51 Event() - System Recipe completely run [Save Log Job] 2024-10-31 13:04:01.526 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, wait for 10 seconds [Save Log Job] 2024-10-31 13:04:03.441 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC1 ValveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-31 13:04:03.441 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC2 ValveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-31 13:04:03.441 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC3 ValveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-31 13:04:03.442 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC4 ValveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-31 13:04:03.442 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC5 ValveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-31 13:04:03.444 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门Process gas final valveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-31 13:04:11.601 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, RF Power Off [Save Log Job] 2024-10-31 13:04:11.702 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, Stop all the gas flow [Save Log Job] 2024-10-31 13:04:17.451 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, Close all the valves [Save Log Job] 2024-10-31 13:04:17.550 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, close pump valve [Save Log Job] 2024-10-31 13:04:19.564 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门Chamber pumping valveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-31 13:04:20.872 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, delay 3 seconds [Save Log Job] 2024-10-31 13:04:23.997 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, vent 50 seconds [Save Log Job] 2024-10-31 13:05:13.981 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, Close vent valve [Save Log Job] 2024-10-31 13:05:19.114 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, PostProcess Finished in 1.2 minitues [Save Log Job] 2024-10-31 13:05:19.116 LOG.INFO UiEvent.cs Line:51 Event() - System complete run 'PostProcess'. [Save Log Job] 2024-10-31 13:05:19.578 LOG.INFO UiEvent.cs Line:51 Event() - EventLotFinished [Save Log Job] 2024-10-31 13:05:32.188 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged [Save Log Job] 2024-10-31 13:05:32.726 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged [Save Log Job] 2024-10-31 13:06:34.839 LOG.INFO YZQZFabAuto.cs Line:57 GetRecipeByMultipleLot() - GetRecipeByMultipleLot|http://192.168.1.207:86/api/mes/GetRecipeByMultipleLot?strQuery=[{"LotId":"EFC241014689","MachineNumber":"22","MachineType":"稷以打胶机"}] [Save Log Job] 2024-10-31 13:06:34.893 LOG.INFO YZQZFabAuto.cs Line:59 GetRecipeByMultipleLot() - GetRecipeByMultipleLot|{"Status":200,"Message":"查询成功","Data":[{"LotId":"EFC241014689","DeviceName":"CPX4BCAYG606L400HNA","RecipeName":"CACB","ComponentQty":11,"Operation":"P极光刻"}]} [Save Log Job] 2024-10-31 13:06:36.891 LOG.INFO UiEvent.cs Line:51 Event() - Operation RunRecipe(CACB, EFC241014689/) [Save Log Job] 2024-10-31 13:06:36.891 LOG.INFO UiEvent.cs Line:51 Event() - EventLotStart [Save Log Job] 2024-10-31 13:06:36.994 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged [Save Log Job] 2024-10-31 13:06:36.994 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check door status。 [Save Log Job] 2024-10-31 13:06:36.994 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check chamber door。 [Save Log Job] 2024-10-31 13:06:36.994 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check backpanel door。 [Save Log Job] 2024-10-31 13:06:36.995 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check pump status。 [Save Log Job] 2024-10-31 13:06:36.995 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Close all the valves。 [Save Log Job] 2024-10-31 13:06:36.995 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Open pumping valve。 [Save Log Job] 2024-10-31 13:06:39.106 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门Chamber pumping valveOpen失败，原因：Valve keep closed 。 [Save Log Job] 2024-10-31 13:06:39.712 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check chamber pressure。 [Save Log Job] 2024-10-31 13:07:11.360 LOG.INFO UiEvent.cs Line:51 Event() - Operation AbortRecipe() [Save Log Job] 2024-10-31 13:07:11.460 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged [Save Log Job] 2024-10-31 13:07:23.783 LOG.INFO YZQZFabAuto.cs Line:57 GetRecipeByMultipleLot() - GetRecipeByMultipleLot|http://192.168.1.207:86/api/mes/GetRecipeByMultipleLot?strQuery=[{"LotId":"EFC241014689","MachineNumber":"22","MachineType":"稷以打胶机"}] [Save Log Job] 2024-10-31 13:07:23.831 LOG.INFO YZQZFabAuto.cs Line:59 GetRecipeByMultipleLot() - GetRecipeByMultipleLot|{"Status":200,"Message":"查询成功","Data":[{"LotId":"EFC241014689","DeviceName":"CPX4BCAYG606L400HNA","RecipeName":"CACB","ComponentQty":11,"Operation":"P极光刻"}]} [Save Log Job] 2024-10-31 13:08:33.914 LOG.INFO UiEvent.cs Line:51 Event() - Operation RunRecipe(CACB, EFC241014689/) [Save Log Job] 2024-10-31 13:08:33.915 LOG.INFO UiEvent.cs Line:51 Event() - EventLotStart [Save Log Job] 2024-10-31 13:08:34.016 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check door status。 [Save Log Job] 2024-10-31 13:08:34.016 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check chamber door。 [Save Log Job] 2024-10-31 13:08:34.016 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check backpanel door。 [Save Log Job] 2024-10-31 13:08:34.017 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check pump status。 [Save Log Job] 2024-10-31 13:08:34.017 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Close all the valves。 [Save Log Job] 2024-10-31 13:08:34.116 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Open pumping valve。 [Save Log Job] 2024-10-31 13:08:34.116 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged [Save Log Job] 2024-10-31 13:08:34.116 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check chamber pressure。 [Save Log Job] 2024-10-31 13:08:34.117 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Pump below 100mTorr。 [Save Log Job] 2024-10-31 13:08:34.217 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：PreProcess Finished in 0.0 minitues。 [Save Log Job] 2024-10-31 13:08:34.217 LOG.INFO UiEvent.cs Line:51 Event() - System complete run 'PreProcess'. [Save Log Job] 2024-10-31 13:08:34.217 LOG.INFO UiEvent.cs Line:51 Event() - Run Recipe 20241031130833-CACB [Save Log Job] 2024-10-31 13:08:34.218 LOG.INFO UiEvent.cs Line:51 Event() - System recipe start run'20241031130833-CACB' [Save Log Job] 2024-10-31 13:08:34.218 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241031130833-CACB' start run step 1：initial。 [Save Log Job] 2024-10-31 13:08:34.218 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。 [Save Log Job] 2024-10-31 13:08:34.219 LOG.INFO UiEvent.cs Line:51 Event() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。 [Save Log Job] 2024-10-31 13:08:34.219 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。 [Save Log Job] 2024-10-31 13:08:34.219 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。 [Save Log Job] 2024-10-31 13:08:34.220 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。 [Save Log Job] 2024-10-31 13:08:34.220 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。 [Save Log Job] 2024-10-31 13:08:34.220 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。 [Save Log Job] 2024-10-31 13:08:34.221 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPower，RF set Power:0。 [Save Log Job] 2024-10-31 13:08:34.221 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。 [Save Log Job] 2024-10-31 13:08:34.221 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。 [Save Log Job] 2024-10-31 13:08:34.221 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。 [Save Log Job] 2024-10-31 13:08:34.222 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas1， ramp to 45sccm。 [Save Log Job] 2024-10-31 13:08:34.222 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas2， ramp to 56sccm。 [Save Log Job] 2024-10-31 13:08:34.222 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas3， ramp to 66sccm。 [Save Log Job] 2024-10-31 13:08:34.223 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas4， ramp to 76sccm。 [Save Log Job] 2024-10-31 13:08:34.223 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas5， ramp to 86sccm。 [Save Log Job] 2024-10-31 13:08:34.223 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPowerOnOff，Set RF power Off。 [Save Log Job] 2024-10-31 13:08:34.317 LOG.INFO UiEvent.cs Line:51 Event() - Start monitor pressure stability --------------------------------[Header Log]----------------------------------------- [Save Log Job] 2024-10-31 13:10:13.282 LOG.INFO UiEvent.cs Line:58 Event() - 已经连接上设备实时控制系统 [Save Log Job] 2024-10-31 13:10:14.606 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(System_IsMesMode, True) [Save Log Job] 2024-10-31 13:10:14.754 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged [Save Log Job] 2024-10-31 13:10:18.476 LOG.INFO UiEvent.cs Line:51 Event() - Software will be expired in -7 days, at 10/24/2024 12:00:00 AM 。 --------------------------------[Header Log]----------------------------------------- [Save Log Job] 2024-10-31 13:10:29.716 LOG.INFO UiEvent.cs Line:58 Event() - 已经连接上设备实时控制系统 [Save Log Job] 2024-10-31 13:10:29.718 LOG.INFO UiEvent.cs Line:57 Event() - 已经连接上设备实时控制系统 [Save Log Job] 2024-10-31 13:10:31.032 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(System_IsMesMode, True) [Save Log Job] 2024-10-31 13:10:31.032 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged [Save Log Job] 2024-10-31 13:10:34.667 LOG.INFO UiEvent.cs Line:51 Event() - Software will be expired in -7 days, at 10/24/2024 12:00:00 AM 。 [Save Log Job] 2024-10-31 13:10:40.299 LOG.INFO UiEvent.cs Line:51 Event() - User admin login [Save Log Job] 2024-10-31 13:11:19.836 LOG.INFO UiEvent.cs Line:51 Event() - recipe file CACB save completed [Save Log Job] 2024-10-31 13:11:19.836 LOG.INFO UiEvent.cs Line:51 Event() - System Information [Save Log Job] 2024-10-31 13:11:30.885 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(System_RfPowerAlarmRange, 1) [Save Log Job] 2024-10-31 13:11:32.696 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(System_RfPowerAlarmTime, 2) [Save Log Job] 2024-10-31 13:12:00.481 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetAutoMode() [Save Log Job] 2024-10-31 13:12:00.481 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentModeChanged [Save Log Job] 2024-10-31 13:12:00.481 LOG.INFO UiEvent.cs Line:51 Event() - System running mode changed to Auto Mode [Save Log Job] 2024-10-31 13:12:09.214 LOG.INFO YZQZFabAuto.cs Line:57 GetRecipeByMultipleLot() - GetRecipeByMultipleLot|http://192.168.1.207:86/api/mes/GetRecipeByMultipleLot?strQuery=[{"LotId":"SFC240912810","MachineNumber":"22","MachineType":"稷以打胶机"}] [Save Log Job] 2024-10-31 13:12:09.315 LOG.INFO YZQZFabAuto.cs Line:59 GetRecipeByMultipleLot() - GetRecipeByMultipleLot|{"Status":200,"Message":"查询成功","Data":[{"LotId":"SFC240912810","DeviceName":"CPO4BCALO708U600HNA","RecipeName":"CACB","ComponentQty":13,"Operation":"P极光刻"}]} [Save Log Job] 2024-10-31 13:13:07.483 LOG.INFO UiEvent.cs Line:51 Event() - Operation RunRecipe(CACB, SFC240912810/) [Save Log Job] 2024-10-31 13:13:07.483 LOG.INFO UiEvent.cs Line:51 Event() - EventLotStart [Save Log Job] 2024-10-31 13:13:07.588 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged [Save Log Job] 2024-10-31 13:13:07.588 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check door status。 [Save Log Job] 2024-10-31 13:13:07.588 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check chamber door。 [Save Log Job] 2024-10-31 13:13:07.589 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check backpanel door。 [Save Log Job] 2024-10-31 13:13:07.589 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check pump status。 [Save Log Job] 2024-10-31 13:13:07.590 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Close all the valves。 [Save Log Job] 2024-10-31 13:13:07.590 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Open pumping valve。 [Save Log Job] 2024-10-31 13:13:09.199 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check chamber pressure。 [Save Log Job] 2024-10-31 13:13:48.016 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Pump below 100mTorr。 [Save Log Job] 2024-10-31 13:13:48.016 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：PreProcess Finished in 0.7 minitues。 [Save Log Job] 2024-10-31 13:13:48.016 LOG.INFO UiEvent.cs Line:51 Event() - System complete run 'PreProcess'. [Save Log Job] 2024-10-31 13:13:48.017 LOG.INFO UiEvent.cs Line:51 Event() - Run Recipe 20241031131307-CACB [Save Log Job] 2024-10-31 13:13:48.017 LOG.INFO UiEvent.cs Line:51 Event() - System recipe start run'20241031131307-CACB' [Save Log Job] 2024-10-31 13:13:48.117 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241031131307-CACB' start run step 1：initial。 [Save Log Job] 2024-10-31 13:13:48.117 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。 [Save Log Job] 2024-10-31 13:13:48.118 LOG.INFO UiEvent.cs Line:51 Event() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。 [Save Log Job] 2024-10-31 13:13:48.118 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。 [Save Log Job] 2024-10-31 13:13:48.119 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。 [Save Log Job] 2024-10-31 13:13:48.119 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。 [Save Log Job] 2024-10-31 13:13:48.119 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。 [Save Log Job] 2024-10-31 13:13:48.120 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。 [Save Log Job] 2024-10-31 13:13:48.120 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPower，RF set Power:0。 [Save Log Job] 2024-10-31 13:13:48.120 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。 [Save Log Job] 2024-10-31 13:13:48.121 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。 [Save Log Job] 2024-10-31 13:13:48.121 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。 [Save Log Job] 2024-10-31 13:13:48.121 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas1， ramp to 45sccm。 [Save Log Job] 2024-10-31 13:13:48.122 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas2， ramp to 56sccm。 [Save Log Job] 2024-10-31 13:13:48.122 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas3， ramp to 66sccm。 [Save Log Job] 2024-10-31 13:13:48.122 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas4， ramp to 76sccm。 [Save Log Job] 2024-10-31 13:13:48.123 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas5， ramp to 86sccm。 [Save Log Job] 2024-10-31 13:13:48.123 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPowerOnOff，Set RF power Off。 [Save Log Job] 2024-10-31 13:13:48.123 LOG.INFO UiEvent.cs Line:51 Event() - Start monitor pressure stability [Save Log Job] 2024-10-31 13:14:18.204 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241031131307-CACB' end step 1 [Save Log Job] 2024-10-31 13:14:18.204 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241031131307-CACB' start run step 2：initial。 [Save Log Job] 2024-10-31 13:14:18.205 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。 [Save Log Job] 2024-10-31 13:14:18.205 LOG.INFO UiEvent.cs Line:51 Event() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。 [Save Log Job] 2024-10-31 13:14:18.206 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。 [Save Log Job] 2024-10-31 13:14:18.206 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。 [Save Log Job] 2024-10-31 13:14:18.206 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。 [Save Log Job] 2024-10-31 13:14:18.207 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。 [Save Log Job] 2024-10-31 13:14:18.207 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。 [Save Log Job] 2024-10-31 13:14:18.207 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPower，RF set Power:190。 [Save Log Job] 2024-10-31 13:14:18.208 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。 [Save Log Job] 2024-10-31 13:14:18.208 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。 [Save Log Job] 2024-10-31 13:14:18.208 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。 [Save Log Job] 2024-10-31 13:14:18.209 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas1， ramp to 45sccm。 [Save Log Job] 2024-10-31 13:14:18.209 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas2， ramp to 56sccm。 [Save Log Job] 2024-10-31 13:14:18.209 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas3， ramp to 66sccm。 [Save Log Job] 2024-10-31 13:14:18.210 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas4， ramp to 76sccm。 [Save Log Job] 2024-10-31 13:14:18.210 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas5， ramp to 86sccm。 [Save Log Job] 2024-10-31 13:14:18.210 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPowerOnOff，Set RF power On。 [Save Log Job] 2024-10-31 13:14:28.441 LOG.INFO UiEvent.cs Line:51 Event() - System RF GeneratorTolerance alarm：Forward power 18 out of range[189,191] in 2 seconds. [Save Log Job] 2024-10-31 13:14:28.447 LOG.INFO UiEvent.cs Line:51 Event() - System recipe was aborted: user aborted recipe [Save Log Job] 2024-10-31 13:14:28.448 LOG.INFO UiEvent.cs Line:51 Event() - Stop monitor pressure stability [Save Log Job] 2024-10-31 13:14:28.449 LOG.INFO UiEvent.cs Line:51 Event() - System Recipe run completed，Recipe：20241031131307-CACB Start time：2024/10/31 13:13:47 End time：2024/10/31 13:14:20 Total time：0:0:32 [Save Log Job] 2024-10-31 13:14:28.449 LOG.INFO UiEvent.cs Line:51 Event() - System Recipe completely run [Save Log Job] 2024-10-31 13:14:28.449 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged [Save Log Job] 2024-10-31 13:14:28.450 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged [Save Log Job] 2024-10-31 13:14:28.450 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC1 ValveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-31 13:14:28.451 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC2 ValveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-31 13:14:28.455 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC4 ValveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-31 13:14:28.455 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC3 ValveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-31 13:14:28.456 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC5 ValveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-31 13:14:28.456 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门Process gas final valveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-31 13:17:45.232 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged [Save Log Job] 2024-10-31 13:18:03.387 LOG.INFO YZQZFabAuto.cs Line:57 GetRecipeByMultipleLot() - GetRecipeByMultipleLot|http://192.168.1.207:86/api/mes/GetRecipeByMultipleLot?strQuery=[{"LotId":"SFC240912810","MachineNumber":"22","MachineType":"稷以打胶机"}] [Save Log Job] 2024-10-31 13:18:03.440 LOG.INFO YZQZFabAuto.cs Line:59 GetRecipeByMultipleLot() - GetRecipeByMultipleLot|{"Status":200,"Message":"查询成功","Data":[{"LotId":"SFC240912810","DeviceName":"CPO4BCALO708U600HNA","RecipeName":"CACB","ComponentQty":13,"Operation":"P极光刻"}]} [Save Log Job] 2024-10-31 13:18:07.359 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check door status。 [Save Log Job] 2024-10-31 13:18:07.381 LOG.INFO UiEvent.cs Line:51 Event() - EventLotStart [Save Log Job] 2024-10-31 13:18:07.381 LOG.INFO UiEvent.cs Line:51 Event() - Operation RunRecipe(CACB, SFC240912810/) [Save Log Job] 2024-10-31 13:18:07.381 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check backpanel door。 [Save Log Job] 2024-10-31 13:18:07.381 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check pump status。 [Save Log Job] 2024-10-31 13:18:07.381 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check chamber door。 [Save Log Job] 2024-10-31 13:18:07.382 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Close all the valves。 [Save Log Job] 2024-10-31 13:18:07.457 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged [Save Log Job] 2024-10-31 13:18:07.457 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Open pumping valve。 [Save Log Job] 2024-10-31 13:18:07.558 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check chamber pressure。 [Save Log Job] 2024-10-31 13:18:09.070 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Pump below 100mTorr。 [Save Log Job] 2024-10-31 13:18:09.171 LOG.INFO UiEvent.cs Line:51 Event() - System complete run 'PreProcess'. [Save Log Job] 2024-10-31 13:18:09.171 LOG.INFO UiEvent.cs Line:51 Event() - Run Recipe 20241031131807-CACB [Save Log Job] 2024-10-31 13:18:09.171 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：PreProcess Finished in 0.0 minitues。 [Save Log Job] 2024-10-31 13:18:09.171 LOG.INFO UiEvent.cs Line:51 Event() - System recipe start run'20241031131807-CACB' [Save Log Job] 2024-10-31 13:18:09.171 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241031131807-CACB' start run step 1：initial。 [Save Log Job] 2024-10-31 13:18:09.171 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。 [Save Log Job] 2024-10-31 13:18:09.175 LOG.INFO UiEvent.cs Line:51 Event() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。 [Save Log Job] 2024-10-31 13:18:09.175 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。 [Save Log Job] 2024-10-31 13:18:09.175 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。 [Save Log Job] 2024-10-31 13:18:09.176 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。 [Save Log Job] 2024-10-31 13:18:09.176 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPower，RF set Power:0。 [Save Log Job] 2024-10-31 13:18:09.176 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。 [Save Log Job] 2024-10-31 13:18:09.176 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。 [Save Log Job] 2024-10-31 13:18:09.176 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。 [Save Log Job] 2024-10-31 13:18:09.176 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas1， ramp to 45sccm。 [Save Log Job] 2024-10-31 13:18:09.176 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas2， ramp to 56sccm。 [Save Log Job] 2024-10-31 13:18:09.176 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas3， ramp to 66sccm。 [Save Log Job] 2024-10-31 13:18:09.176 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas4， ramp to 76sccm。 [Save Log Job] 2024-10-31 13:18:09.176 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas5， ramp to 86sccm。 [Save Log Job] 2024-10-31 13:18:09.198 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPowerOnOff，Set RF power Off。 [Save Log Job] 2024-10-31 13:18:09.198 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。 [Save Log Job] 2024-10-31 13:18:09.198 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。 [Save Log Job] 2024-10-31 13:18:09.272 LOG.INFO UiEvent.cs Line:51 Event() - Start monitor pressure stability [Save Log Job] 2024-10-31 13:18:39.252 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241031131807-CACB' end step 1 [Save Log Job] 2024-10-31 13:18:39.351 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241031131807-CACB' start run step 2：initial。 [Save Log Job] 2024-10-31 13:18:39.351 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。 [Save Log Job] 2024-10-31 13:18:39.351 LOG.INFO UiEvent.cs Line:51 Event() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。 [Save Log Job] 2024-10-31 13:18:39.351 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。 [Save Log Job] 2024-10-31 13:18:39.351 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。 [Save Log Job] 2024-10-31 13:18:39.352 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。 [Save Log Job] 2024-10-31 13:18:39.352 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。 [Save Log Job] 2024-10-31 13:18:39.352 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。 [Save Log Job] 2024-10-31 13:18:39.352 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPower，RF set Power:190。 [Save Log Job] 2024-10-31 13:18:39.353 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。 [Save Log Job] 2024-10-31 13:18:39.353 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。 [Save Log Job] 2024-10-31 13:18:39.353 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。 [Save Log Job] 2024-10-31 13:18:39.353 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas1， ramp to 45sccm。 [Save Log Job] 2024-10-31 13:18:39.353 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas2， ramp to 56sccm。 [Save Log Job] 2024-10-31 13:18:39.353 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas3， ramp to 66sccm。 [Save Log Job] 2024-10-31 13:18:39.354 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas4， ramp to 76sccm。 [Save Log Job] 2024-10-31 13:18:39.354 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas5， ramp to 86sccm。 [Save Log Job] 2024-10-31 13:18:39.354 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPowerOnOff，Set RF power On。 [Save Log Job] 2024-10-31 13:19:06.705 LOG.INFO UiEvent.cs Line:51 Event() - System RF GeneratorTolerance alarm：Forward power 18 out of range[189,191] in 2 seconds. [Save Log Job] 2024-10-31 13:19:17.857 LOG.INFO UiEvent.cs Line:51 Event() - System recipe was aborted: user aborted recipe [Save Log Job] 2024-10-31 13:19:17.858 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC1 ValveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-31 13:19:17.858 LOG.INFO UiEvent.cs Line:51 Event() - Stop monitor pressure stability [Save Log Job] 2024-10-31 13:19:17.858 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC2 ValveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-31 13:19:17.865 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC3 ValveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-31 13:19:17.866 LOG.INFO UiEvent.cs Line:51 Event() - System Recipe run completed，Recipe：20241031131807-CACB Start time：2024/10/31 13:18:09 End time：2024/10/31 13:19:06 Total time：0:0:57 [Save Log Job] 2024-10-31 13:19:17.871 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged [Save Log Job] 2024-10-31 13:19:17.871 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC4 ValveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-31 13:19:17.871 LOG.INFO UiEvent.cs Line:51 Event() - System Recipe completely run [Save Log Job] 2024-10-31 13:19:17.873 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged [Save Log Job] 2024-10-31 13:19:39.274 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC1 ValveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-31 13:19:39.284 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC2 ValveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-31 13:19:39.285 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC3 ValveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-31 13:19:39.285 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC5 ValveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-31 13:19:39.285 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门Process gas final valveClose失败，原因：Valve keep open。 --------------------------------[Header Log]----------------------------------------- [Save Log Job] 2024-10-31 13:21:48.187 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(System_IsMesMode, True) [Save Log Job] 2024-10-31 13:21:48.330 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged [Save Log Job] 2024-10-31 13:21:52.051 LOG.INFO UiEvent.cs Line:51 Event() - Software will be expired in -7 days, at 10/24/2024 12:00:00 AM 。 [Save Log Job] 2024-10-31 13:21:56.675 LOG.INFO UiEvent.cs Line:51 Event() - User admin login [Save Log Job] 2024-10-31 13:22:10.367 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetAutoMode() [Save Log Job] 2024-10-31 13:22:10.367 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentModeChanged [Save Log Job] 2024-10-31 13:22:10.369 LOG.INFO UiEvent.cs Line:51 Event() - System running mode changed to Auto Mode [Save Log Job] 2024-10-31 13:22:21.732 LOG.INFO YZQZFabAuto.cs Line:57 GetRecipeByMultipleLot() - GetRecipeByMultipleLot|http://192.168.1.207:86/api/mes/GetRecipeByMultipleLot?strQuery=[{"LotId":"SFC240912810","MachineNumber":"22","MachineType":"稷以打胶机"}] [Save Log Job] 2024-10-31 13:22:21.789 LOG.INFO YZQZFabAuto.cs Line:59 GetRecipeByMultipleLot() - GetRecipeByMultipleLot|{"Status":200,"Message":"查询成功","Data":[{"LotId":"SFC240912810","DeviceName":"CPO4BCALO708U600HNA","RecipeName":"CACB","ComponentQty":13,"Operation":"P极光刻"}]} [Save Log Job] 2024-10-31 13:22:23.142 LOG.INFO UiEvent.cs Line:51 Event() - Operation RunRecipe(CACB, SFC240912810/) [Save Log Job] 2024-10-31 13:22:23.242 LOG.INFO UiEvent.cs Line:51 Event() - EventLotStart [Save Log Job] 2024-10-31 13:22:23.242 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check door status。 [Save Log Job] 2024-10-31 13:22:23.243 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check chamber door。 [Save Log Job] 2024-10-31 13:22:23.245 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check backpanel door。 [Save Log Job] 2024-10-31 13:22:23.245 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check pump status。 [Save Log Job] 2024-10-31 13:22:23.245 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged [Save Log Job] 2024-10-31 13:22:23.247 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Close all the valves。 [Save Log Job] 2024-10-31 13:22:23.344 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Open pumping valve。 [Save Log Job] 2024-10-31 13:22:24.250 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check chamber pressure。 [Save Log Job] 2024-10-31 13:23:02.960 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Pump below 100mTorr。 [Save Log Job] 2024-10-31 13:23:03.061 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：PreProcess Finished in 0.7 minitues。 [Save Log Job] 2024-10-31 13:23:03.061 LOG.INFO UiEvent.cs Line:51 Event() - System complete run 'PreProcess'. [Save Log Job] 2024-10-31 13:23:03.062 LOG.INFO UiEvent.cs Line:51 Event() - Run Recipe 20241031132223-CACB [Save Log Job] 2024-10-31 13:23:03.062 LOG.INFO UiEvent.cs Line:51 Event() - System recipe start run'20241031132223-CACB' [Save Log Job] 2024-10-31 13:23:03.161 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241031132223-CACB' start run step 1：initial。 [Save Log Job] 2024-10-31 13:23:03.163 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。 [Save Log Job] 2024-10-31 13:23:03.163 LOG.INFO UiEvent.cs Line:51 Event() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。 [Save Log Job] 2024-10-31 13:23:03.163 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。 [Save Log Job] 2024-10-31 13:23:03.164 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。 [Save Log Job] 2024-10-31 13:23:03.164 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。 [Save Log Job] 2024-10-31 13:23:03.164 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。 [Save Log Job] 2024-10-31 13:23:03.164 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。 [Save Log Job] 2024-10-31 13:23:03.165 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPower，RF set Power:0。 [Save Log Job] 2024-10-31 13:23:03.165 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。 [Save Log Job] 2024-10-31 13:23:03.165 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。 [Save Log Job] 2024-10-31 13:23:03.166 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。 [Save Log Job] 2024-10-31 13:23:03.166 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas1， ramp to 45sccm。 [Save Log Job] 2024-10-31 13:23:03.166 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas2， ramp to 56sccm。 [Save Log Job] 2024-10-31 13:23:03.167 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas3， ramp to 66sccm。 [Save Log Job] 2024-10-31 13:23:03.167 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas4， ramp to 76sccm。 [Save Log Job] 2024-10-31 13:23:03.168 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas5， ramp to 86sccm。 [Save Log Job] 2024-10-31 13:23:03.168 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPowerOnOff，Set RF power Off。 [Save Log Job] 2024-10-31 13:23:03.168 LOG.INFO UiEvent.cs Line:51 Event() - Start monitor pressure stability [Save Log Job] 2024-10-31 13:23:33.143 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241031132223-CACB' end step 1 [Save Log Job] 2024-10-31 13:23:33.244 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241031132223-CACB' start run step 2：initial。 [Save Log Job] 2024-10-31 13:23:33.244 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。 [Save Log Job] 2024-10-31 13:23:33.245 LOG.INFO UiEvent.cs Line:51 Event() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。 [Save Log Job] 2024-10-31 13:23:33.245 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。 [Save Log Job] 2024-10-31 13:23:33.246 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。 [Save Log Job] 2024-10-31 13:23:33.246 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。 [Save Log Job] 2024-10-31 13:23:33.246 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。 [Save Log Job] 2024-10-31 13:23:33.247 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。 [Save Log Job] 2024-10-31 13:23:33.247 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPower，RF set Power:190。 [Save Log Job] 2024-10-31 13:23:33.247 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。 [Save Log Job] 2024-10-31 13:23:33.248 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。 [Save Log Job] 2024-10-31 13:23:33.248 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。 [Save Log Job] 2024-10-31 13:23:33.248 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas1， ramp to 45sccm。 [Save Log Job] 2024-10-31 13:23:33.249 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas2， ramp to 56sccm。 [Save Log Job] 2024-10-31 13:23:33.249 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas3， ramp to 66sccm。 [Save Log Job] 2024-10-31 13:23:33.250 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas4， ramp to 76sccm。 [Save Log Job] 2024-10-31 13:23:33.250 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas5， ramp to 86sccm。 [Save Log Job] 2024-10-31 13:23:33.251 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPowerOnOff，Set RF power On。 [Save Log Job] 2024-10-31 13:23:35.758 LOG.INFO UiEvent.cs Line:51 Event() - System RF GeneratorTolerance alarm：Forward power 18 out of range[189,191] in 2 seconds. [Save Log Job] 2024-10-31 13:23:35.765 LOG.INFO UiEvent.cs Line:51 Event() - System recipe was aborted: user aborted recipe [Save Log Job] 2024-10-31 13:23:39.707 LOG.INFO UiEvent.cs Line:51 Event() - Stop monitor pressure stability [Save Log Job] 2024-10-31 13:23:39.711 LOG.INFO UiEvent.cs Line:51 Event() - System Recipe run completed，Recipe：20241031132223-CACB Start time：2024/10/31 13:23:03 End time：2024/10/31 13:23:35 Total time：0:0:32 [Save Log Job] 2024-10-31 13:23:39.712 LOG.INFO UiEvent.cs Line:51 Event() - System Recipe completely run [Save Log Job] 2024-10-31 13:23:39.714 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged [Save Log Job] 2024-10-31 13:23:39.714 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged [Save Log Job] 2024-10-31 13:23:39.716 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC1 ValveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-31 13:23:39.716 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC2 ValveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-31 13:23:39.716 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC4 ValveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-31 13:23:39.716 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC5 ValveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-31 13:23:39.718 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC3 ValveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-31 13:23:39.723 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门Process gas final valveClose失败，原因：Valve keep open。 --------------------------------[Header Log]----------------------------------------- [Save Log Job] 2024-10-31 13:26:29.079 LOG.INFO UiEvent.cs Line:58 Event() - 已经连接上设备实时控制系统 [Save Log Job] 2024-10-31 13:26:29.079 LOG.INFO UiEvent.cs Line:58 Event() - 已经连接上设备实时控制系统 --------------------------------[Header Log]----------------------------------------- [Save Log Job] 2024-10-31 13:26:59.322 LOG.INFO UiEvent.cs Line:58 Event() - 已经连接上设备实时控制系统 [Save Log Job] 2024-10-31 13:26:59.324 LOG.INFO UiEvent.cs Line:57 Event() - 已经连接上设备实时控制系统 [Save Log Job] 2024-10-31 13:27:00.585 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(System_IsMesMode, True) [Save Log Job] 2024-10-31 13:27:00.637 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged [Save Log Job] 2024-10-31 13:27:04.357 LOG.INFO UiEvent.cs Line:51 Event() - Software will be expired in -7 days, at 10/24/2024 12:00:00 AM 。 [Save Log Job] 2024-10-31 13:27:06.776 LOG.INFO UiEvent.cs Line:51 Event() - User admin login [Save Log Job] 2024-10-31 13:27:11.303 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetAutoMode() [Save Log Job] 2024-10-31 13:27:11.304 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentModeChanged [Save Log Job] 2024-10-31 13:27:11.304 LOG.INFO UiEvent.cs Line:51 Event() - System running mode changed to Auto Mode [Save Log Job] 2024-10-31 13:27:35.186 LOG.INFO YZQZFabAuto.cs Line:57 GetRecipeByMultipleLot() - GetRecipeByMultipleLot|http://192.168.1.207:86/api/mes/GetRecipeByMultipleLot?strQuery=[{"LotId":"SFC240912810","MachineNumber":"22","MachineType":"稷以打胶机"}] [Save Log Job] 2024-10-31 13:27:35.245 LOG.INFO YZQZFabAuto.cs Line:59 GetRecipeByMultipleLot() - GetRecipeByMultipleLot|{"Status":200,"Message":"查询成功","Data":[{"LotId":"SFC240912810","DeviceName":"CPO4BCALO708U600HNA","RecipeName":"CACB","ComponentQty":13,"Operation":"P极光刻"}]} [Save Log Job] 2024-10-31 13:27:36.560 LOG.INFO UiEvent.cs Line:51 Event() - Operation RunRecipe(CACB, SFC240912810/) [Save Log Job] 2024-10-31 13:27:36.560 LOG.INFO UiEvent.cs Line:51 Event() - EventLotStart [Save Log Job] 2024-10-31 13:27:36.560 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged [Save Log Job] 2024-10-31 13:27:36.560 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check door status。 [Save Log Job] 2024-10-31 13:27:36.566 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check chamber door。 [Save Log Job] 2024-10-31 13:27:36.567 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check backpanel door。 [Save Log Job] 2024-10-31 13:27:36.568 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check pump status。 [Save Log Job] 2024-10-31 13:27:36.569 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Close all the valves。 [Save Log Job] 2024-10-31 13:27:36.662 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Open pumping valve。 [Save Log Job] 2024-10-31 13:27:38.677 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门Chamber pumping valveOpen失败，原因：Valve keep closed 。 [Save Log Job] 2024-10-31 13:27:40.393 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check chamber pressure。 [Save Log Job] 2024-10-31 13:28:15.364 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Pump below 100mTorr。 [Save Log Job] 2024-10-31 13:28:15.364 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：PreProcess Finished in 0.6 minitues。 [Save Log Job] 2024-10-31 13:28:15.364 LOG.INFO UiEvent.cs Line:51 Event() - System complete run 'PreProcess'. [Save Log Job] 2024-10-31 13:28:15.365 LOG.INFO UiEvent.cs Line:51 Event() - Run Recipe 20241031132736-CACB [Save Log Job] 2024-10-31 13:28:15.365 LOG.INFO UiEvent.cs Line:51 Event() - System recipe start run'20241031132736-CACB' [Save Log Job] 2024-10-31 13:28:15.465 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241031132736-CACB' start run step 1：initial。 [Save Log Job] 2024-10-31 13:28:15.465 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。 [Save Log Job] 2024-10-31 13:28:15.467 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。 [Save Log Job] 2024-10-31 13:28:15.467 LOG.INFO UiEvent.cs Line:51 Event() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。 [Save Log Job] 2024-10-31 13:28:15.468 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。 [Save Log Job] 2024-10-31 13:28:15.469 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。 [Save Log Job] 2024-10-31 13:28:15.469 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。 [Save Log Job] 2024-10-31 13:28:15.474 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。 [Save Log Job] 2024-10-31 13:28:15.474 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPower，RF set Power:0。 [Save Log Job] 2024-10-31 13:28:15.474 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。 [Save Log Job] 2024-10-31 13:28:15.474 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。 [Save Log Job] 2024-10-31 13:28:15.475 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。 [Save Log Job] 2024-10-31 13:28:15.475 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas2， ramp to 56sccm。 [Save Log Job] 2024-10-31 13:28:15.475 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas3， ramp to 66sccm。 [Save Log Job] 2024-10-31 13:28:15.475 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas4， ramp to 76sccm。 [Save Log Job] 2024-10-31 13:28:15.475 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas5， ramp to 86sccm。 [Save Log Job] 2024-10-31 13:28:15.475 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPowerOnOff，Set RF power Off。 [Save Log Job] 2024-10-31 13:28:15.475 LOG.INFO UiEvent.cs Line:51 Event() - Start monitor pressure stability [Save Log Job] 2024-10-31 13:28:15.476 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas1， ramp to 45sccm。 [Save Log Job] 2024-10-31 13:28:45.540 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241031132736-CACB' end step 1 [Save Log Job] 2024-10-31 13:28:45.540 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241031132736-CACB' start run step 2：initial。 [Save Log Job] 2024-10-31 13:28:45.541 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。 [Save Log Job] 2024-10-31 13:28:45.541 LOG.INFO UiEvent.cs Line:51 Event() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。 [Save Log Job] 2024-10-31 13:28:45.541 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。 [Save Log Job] 2024-10-31 13:28:45.542 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。 [Save Log Job] 2024-10-31 13:28:45.542 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。 [Save Log Job] 2024-10-31 13:28:45.542 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。 [Save Log Job] 2024-10-31 13:28:45.543 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。 [Save Log Job] 2024-10-31 13:28:45.543 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPower，RF set Power:190。 [Save Log Job] 2024-10-31 13:28:45.544 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。 [Save Log Job] 2024-10-31 13:28:45.544 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。 [Save Log Job] 2024-10-31 13:28:45.544 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。 [Save Log Job] 2024-10-31 13:28:45.545 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas1， ramp to 45sccm。 [Save Log Job] 2024-10-31 13:28:45.545 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas2， ramp to 56sccm。 [Save Log Job] 2024-10-31 13:28:45.545 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas3， ramp to 66sccm。 [Save Log Job] 2024-10-31 13:28:45.546 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas4， ramp to 76sccm。 [Save Log Job] 2024-10-31 13:28:45.546 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas5， ramp to 86sccm。 [Save Log Job] 2024-10-31 13:28:45.546 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPowerOnOff，Set RF power On。 [Save Log Job] 2024-10-31 13:28:50.496 LOG.INFO UiEvent.cs Line:51 Event() - System RF GeneratorTolerance alarm：Forward power 18 out of range[189,191] in 2 seconds. [Save Log Job] 2024-10-31 13:28:50.496 LOG.INFO UiEvent.cs Line:51 Event() - Stop monitor pressure stability [Save Log Job] 2024-10-31 13:28:50.496 LOG.INFO UiEvent.cs Line:51 Event() - System recipe was aborted: user aborted recipe [Save Log Job] 2024-10-31 13:28:50.497 LOG.INFO UiEvent.cs Line:51 Event() - System Recipe run completed，Recipe：20241031132736-CACB Start time：2024/10/31 13:28:15 End time：2024/10/31 13:28:48 Total time：0:0:32 [Save Log Job] 2024-10-31 13:28:50.497 LOG.INFO UiEvent.cs Line:51 Event() - System Recipe completely run [Save Log Job] 2024-10-31 13:28:50.500 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC1 ValveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-31 13:28:50.500 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged [Save Log Job] 2024-10-31 13:28:50.501 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC2 ValveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-31 13:28:50.501 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged [Save Log Job] 2024-10-31 13:28:50.502 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC4 ValveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-31 13:28:50.502 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC5 ValveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-31 13:28:50.502 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门Process gas final valveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-31 13:28:50.506 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC3 ValveClose失败，原因：Valve keep open。 --------------------------------[Header Log]----------------------------------------- [Save Log Job] 2024-10-31 13:41:36.643 LOG.INFO UiEvent.cs Line:58 Event() - 已经连接上设备实时控制系统 [Save Log Job] 2024-10-31 13:41:36.646 LOG.INFO UiEvent.cs Line:57 Event() - 已经连接上设备实时控制系统 [Save Log Job] 2024-10-31 13:41:37.874 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(System_IsMesMode, True) [Save Log Job] 2024-10-31 13:41:38.031 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged [Save Log Job] 2024-10-31 13:41:41.652 LOG.INFO UiEvent.cs Line:51 Event() - Software will be expired in -7 days, at 10/24/2024 12:00:00 AM 。 [Save Log Job] 2024-10-31 13:41:43.571 LOG.INFO UiEvent.cs Line:51 Event() - User admin login [Save Log Job] 2024-10-31 13:42:03.596 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetAutoMode() [Save Log Job] 2024-10-31 13:42:03.596 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentModeChanged [Save Log Job] 2024-10-31 13:42:03.596 LOG.INFO UiEvent.cs Line:51 Event() - System running mode changed to Auto Mode [Save Log Job] 2024-10-31 13:42:06.549 LOG.INFO YZQZFabAuto.cs Line:57 GetRecipeByMultipleLot() - GetRecipeByMultipleLot|http://192.168.1.207:86/api/mes/GetRecipeByMultipleLot?strQuery=[] [Save Log Job] 2024-10-31 13:42:06.573 LOG.INFO YZQZFabAuto.cs Line:59 GetRecipeByMultipleLot() - GetRecipeByMultipleLot|{"Status":205,"Message":"参数不能为空","Data":[]} [Save Log Job] 2024-10-31 13:42:14.055 LOG.INFO YZQZFabAuto.cs Line:57 GetRecipeByMultipleLot() - GetRecipeByMultipleLot|http://192.168.1.207:86/api/mes/GetRecipeByMultipleLot?strQuery=[{"LotId":"SFC240912810","MachineNumber":"22","MachineType":"稷以打胶机"}] [Save Log Job] 2024-10-31 13:42:14.115 LOG.INFO YZQZFabAuto.cs Line:59 GetRecipeByMultipleLot() - GetRecipeByMultipleLot|{"Status":200,"Message":"查询成功","Data":[{"LotId":"SFC240912810","DeviceName":"CPO4BCALO708U600HNA","RecipeName":"CACB","ComponentQty":13,"Operation":"P极光刻"}]} [Save Log Job] 2024-10-31 13:42:15.874 LOG.INFO UiEvent.cs Line:51 Event() - Operation RunRecipe(CACB, SFC240912810/) [Save Log Job] 2024-10-31 13:42:15.874 LOG.INFO UiEvent.cs Line:51 Event() - EventLotStart [Save Log Job] 2024-10-31 13:42:15.976 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check door status。 [Save Log Job] 2024-10-31 13:42:15.976 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check chamber door。 [Save Log Job] 2024-10-31 13:42:15.976 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check backpanel door。 [Save Log Job] 2024-10-31 13:42:15.977 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check pump status。 [Save Log Job] 2024-10-31 13:42:15.977 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Close all the valves。 [Save Log Job] 2024-10-31 13:42:16.076 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Open pumping valve。 [Save Log Job] 2024-10-31 13:42:16.076 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged [Save Log Job] 2024-10-31 13:42:17.686 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check chamber pressure。 [Save Log Job] 2024-10-31 13:42:52.660 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Pump below 100mTorr。 [Save Log Job] 2024-10-31 13:42:52.759 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：PreProcess Finished in 0.6 minitues。 [Save Log Job] 2024-10-31 13:42:52.760 LOG.INFO UiEvent.cs Line:51 Event() - System complete run 'PreProcess'. [Save Log Job] 2024-10-31 13:42:52.760 LOG.INFO UiEvent.cs Line:51 Event() - Run Recipe 20241031134215-CACB [Save Log Job] 2024-10-31 13:42:52.760 LOG.INFO UiEvent.cs Line:51 Event() - System recipe start run'20241031134215-CACB' [Save Log Job] 2024-10-31 13:42:52.761 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241031134215-CACB' start run step 1：initial。 [Save Log Job] 2024-10-31 13:42:52.761 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。 [Save Log Job] 2024-10-31 13:42:52.761 LOG.INFO UiEvent.cs Line:51 Event() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。 [Save Log Job] 2024-10-31 13:42:52.762 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。 [Save Log Job] 2024-10-31 13:42:52.762 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。 [Save Log Job] 2024-10-31 13:42:52.762 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。 [Save Log Job] 2024-10-31 13:42:52.762 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。 [Save Log Job] 2024-10-31 13:42:52.762 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。 [Save Log Job] 2024-10-31 13:42:52.763 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPower，RF set Power:0。 [Save Log Job] 2024-10-31 13:42:52.763 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。 [Save Log Job] 2024-10-31 13:42:52.763 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。 [Save Log Job] 2024-10-31 13:42:52.764 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。 [Save Log Job] 2024-10-31 13:42:52.764 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas1， ramp to 45sccm。 [Save Log Job] 2024-10-31 13:42:52.765 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas2， ramp to 56sccm。 [Save Log Job] 2024-10-31 13:42:52.765 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas3， ramp to 66sccm。 [Save Log Job] 2024-10-31 13:42:52.765 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas4， ramp to 76sccm。 [Save Log Job] 2024-10-31 13:42:52.766 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas5， ramp to 86sccm。 [Save Log Job] 2024-10-31 13:42:52.768 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPowerOnOff，Set RF power Off。 [Save Log Job] 2024-10-31 13:42:52.860 LOG.INFO UiEvent.cs Line:51 Event() - Start monitor pressure stability [Save Log Job] 2024-10-31 13:43:22.855 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241031134215-CACB' end step 1 [Save Log Job] 2024-10-31 13:43:22.956 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241031134215-CACB' start run step 2：initial。 [Save Log Job] 2024-10-31 13:43:22.956 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。 [Save Log Job] 2024-10-31 13:43:22.957 LOG.INFO UiEvent.cs Line:51 Event() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。 [Save Log Job] 2024-10-31 13:43:22.957 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。 [Save Log Job] 2024-10-31 13:43:22.958 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。 [Save Log Job] 2024-10-31 13:43:22.958 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。 [Save Log Job] 2024-10-31 13:43:22.958 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。 [Save Log Job] 2024-10-31 13:43:22.959 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。 [Save Log Job] 2024-10-31 13:43:22.959 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPower，RF set Power:190。 [Save Log Job] 2024-10-31 13:43:22.959 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。 [Save Log Job] 2024-10-31 13:43:22.959 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。 [Save Log Job] 2024-10-31 13:43:22.960 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。 [Save Log Job] 2024-10-31 13:43:22.960 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas1， ramp to 45sccm。 [Save Log Job] 2024-10-31 13:43:22.961 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas2， ramp to 56sccm。 [Save Log Job] 2024-10-31 13:43:22.961 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas3， ramp to 66sccm。 [Save Log Job] 2024-10-31 13:43:22.961 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas4， ramp to 76sccm。 [Save Log Job] 2024-10-31 13:43:22.962 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas5， ramp to 86sccm。 [Save Log Job] 2024-10-31 13:43:22.962 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPowerOnOff，Set RF power On。 --------------------------------[Header Log]----------------------------------------- [Save Log Job] 2024-10-31 13:59:12.224 LOG.INFO UiEvent.cs Line:58 Event() - 已经连接上设备实时控制系统 [Save Log Job] 2024-10-31 13:59:12.226 LOG.INFO UiEvent.cs Line:57 Event() - 已经连接上设备实时控制系统 [Save Log Job] 2024-10-31 13:59:13.524 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(System_IsMesMode, True) [Save Log Job] 2024-10-31 13:59:13.525 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged [Save Log Job] 2024-10-31 13:59:17.199 LOG.INFO UiEvent.cs Line:51 Event() - Software will be expired in -7 days, at 10/24/2024 12:00:00 AM 。 [Save Log Job] 2024-10-31 13:59:20.215 LOG.INFO UiEvent.cs Line:51 Event() - User admin login [Save Log Job] 2024-10-31 14:00:34.466 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetAutoMode() [Save Log Job] 2024-10-31 14:00:34.466 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentModeChanged [Save Log Job] 2024-10-31 14:00:34.466 LOG.INFO UiEvent.cs Line:51 Event() - System running mode changed to Auto Mode [Save Log Job] 2024-10-31 14:00:59.620 LOG.INFO YZQZFabAuto.cs Line:57 GetRecipeByMultipleLot() - GetRecipeByMultipleLot|http://192.168.1.207:86/api/mes/GetRecipeByMultipleLot?strQuery=[{"LotId":"EFC241014689","MachineNumber":"22","MachineType":"稷以打胶机"},{"LotId":"SFC240912810","MachineNumber":"22","MachineType":"稷以打胶机"}] [Save Log Job] 2024-10-31 14:00:59.712 LOG.INFO YZQZFabAuto.cs Line:59 GetRecipeByMultipleLot() - GetRecipeByMultipleLot|{"Status":200,"Message":"查询成功","Data":[{"LotId":"EFC241014689","DeviceName":"CPX4BCAYG606L400HNA","RecipeName":"CACB","ComponentQty":11,"Operation":"P极光刻"},{"LotId":"SFC240912810","DeviceName":"CPO4BCALO708U600HNA","RecipeName":"CACB","ComponentQty":13,"Operation":"P极光刻"}]} [Save Log Job] 2024-10-31 14:01:01.843 LOG.INFO UiEvent.cs Line:51 Event() - Operation RunRecipe(CACB, SFC240912810/EFC241014689/) [Save Log Job] 2024-10-31 14:01:01.844 LOG.INFO UiEvent.cs Line:51 Event() - EventLotStart [Save Log Job] 2024-10-31 14:01:01.943 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check door status。 [Save Log Job] 2024-10-31 14:01:01.944 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check chamber door。 [Save Log Job] 2024-10-31 14:01:01.944 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check backpanel door。 [Save Log Job] 2024-10-31 14:01:01.948 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check pump status。 [Save Log Job] 2024-10-31 14:01:01.948 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Open pumping valve。 [Save Log Job] 2024-10-31 14:01:01.948 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Close all the valves。 [Save Log Job] 2024-10-31 14:01:01.948 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged [Save Log Job] 2024-10-31 14:01:03.959 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门Chamber pumping valveOpen失败，原因：Valve keep closed 。 [Save Log Job] 2024-10-31 14:01:06.176 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check chamber pressure。 [Save Log Job] 2024-10-31 14:01:41.041 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Pump below 100mTorr。 [Save Log Job] 2024-10-31 14:01:41.041 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：PreProcess Finished in 0.7 minitues。 [Save Log Job] 2024-10-31 14:01:41.042 LOG.INFO UiEvent.cs Line:51 Event() - System complete run 'PreProcess'. [Save Log Job] 2024-10-31 14:01:41.042 LOG.INFO UiEvent.cs Line:51 Event() - Run Recipe 20241031140101-CACB [Save Log Job] 2024-10-31 14:01:41.042 LOG.INFO UiEvent.cs Line:51 Event() - System recipe start run'20241031140101-CACB' [Save Log Job] 2024-10-31 14:01:41.142 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241031140101-CACB' start run step 1：initial。 [Save Log Job] 2024-10-31 14:01:41.142 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。 [Save Log Job] 2024-10-31 14:01:41.142 LOG.INFO UiEvent.cs Line:51 Event() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。 [Save Log Job] 2024-10-31 14:01:41.143 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。 [Save Log Job] 2024-10-31 14:01:41.143 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。 [Save Log Job] 2024-10-31 14:01:41.143 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。 [Save Log Job] 2024-10-31 14:01:41.144 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。 [Save Log Job] 2024-10-31 14:01:41.144 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。 [Save Log Job] 2024-10-31 14:01:41.145 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPower，RF set Power:0。 [Save Log Job] 2024-10-31 14:01:41.145 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。 [Save Log Job] 2024-10-31 14:01:41.145 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。 [Save Log Job] 2024-10-31 14:01:41.146 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。 [Save Log Job] 2024-10-31 14:01:41.146 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas1， ramp to 45sccm。 [Save Log Job] 2024-10-31 14:01:41.146 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas2， ramp to 56sccm。 [Save Log Job] 2024-10-31 14:01:41.147 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas3， ramp to 66sccm。 [Save Log Job] 2024-10-31 14:01:41.147 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas4， ramp to 76sccm。 [Save Log Job] 2024-10-31 14:01:41.147 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas5， ramp to 86sccm。 [Save Log Job] 2024-10-31 14:01:41.148 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPowerOnOff，Set RF power Off。 [Save Log Job] 2024-10-31 14:01:41.148 LOG.INFO UiEvent.cs Line:51 Event() - Start monitor pressure stability [Save Log Job] 2024-10-31 14:02:11.230 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241031140101-CACB' end step 1 [Save Log Job] 2024-10-31 14:02:11.230 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241031140101-CACB' start run step 2：initial。 [Save Log Job] 2024-10-31 14:02:11.230 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。 [Save Log Job] 2024-10-31 14:02:11.231 LOG.INFO UiEvent.cs Line:51 Event() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。 [Save Log Job] 2024-10-31 14:02:11.231 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。 [Save Log Job] 2024-10-31 14:02:11.231 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。 [Save Log Job] 2024-10-31 14:02:11.232 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。 [Save Log Job] 2024-10-31 14:02:11.232 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。 [Save Log Job] 2024-10-31 14:02:11.232 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。 [Save Log Job] 2024-10-31 14:02:11.233 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPower，RF set Power:190。 [Save Log Job] 2024-10-31 14:02:11.233 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。 [Save Log Job] 2024-10-31 14:02:11.233 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。 [Save Log Job] 2024-10-31 14:02:11.234 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。 [Save Log Job] 2024-10-31 14:02:11.234 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas1， ramp to 45sccm。 [Save Log Job] 2024-10-31 14:02:11.235 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas2， ramp to 56sccm。 [Save Log Job] 2024-10-31 14:02:11.235 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas3， ramp to 66sccm。 [Save Log Job] 2024-10-31 14:02:11.235 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas4， ramp to 76sccm。 [Save Log Job] 2024-10-31 14:02:11.236 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas5， ramp to 86sccm。 [Save Log Job] 2024-10-31 14:02:11.236 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPowerOnOff，Set RF power On。 [Save Log Job] 2024-10-31 14:02:19.404 LOG.INFO UiEvent.cs Line:51 Event() - System RF GeneratorTolerance alarm：Forward power 18 out of range[189,191] in 2 seconds. --------------------------------[Header Log]----------------------------------------- [Save Log Job] 2024-10-31 14:03:25.795 LOG.INFO UiEvent.cs Line:58 Event() - 已经连接上设备实时控制系统 [Save Log Job] 2024-10-31 14:03:25.795 LOG.INFO UiEvent.cs Line:58 Event() - 已经连接上设备实时控制系统 [Save Log Job] 2024-10-31 14:03:27.064 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(System_IsMesMode, True) [Save Log Job] 2024-10-31 14:03:27.313 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged [Save Log Job] 2024-10-31 14:03:31.037 LOG.INFO UiEvent.cs Line:51 Event() - Software will be expired in -7 days, at 10/24/2024 12:00:00 AM 。 [Save Log Job] 2024-10-31 14:04:02.752 LOG.INFO UiEvent.cs Line:51 Event() - User admin login [Save Log Job] 2024-10-31 14:04:16.225 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetAutoMode() [Save Log Job] 2024-10-31 14:04:16.225 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentModeChanged [Save Log Job] 2024-10-31 14:04:16.227 LOG.INFO UiEvent.cs Line:51 Event() - System running mode changed to Auto Mode [Save Log Job] 2024-10-31 14:04:42.254 LOG.INFO YZQZFabAuto.cs Line:57 GetRecipeByMultipleLot() - GetRecipeByMultipleLot|http://192.168.1.207:86/api/mes/GetRecipeByMultipleLot?strQuery=[{"LotId":"EFC241014689","MachineNumber":"22","MachineType":"稷以打胶机"},{"LotId":"SFC240912810","MachineNumber":"22","MachineType":"稷以打胶机"}] [Save Log Job] 2024-10-31 14:04:42.393 LOG.INFO YZQZFabAuto.cs Line:59 GetRecipeByMultipleLot() - GetRecipeByMultipleLot|{"Status":200,"Message":"查询成功","Data":[{"LotId":"EFC241014689","DeviceName":"CPX4BCAYG606L400HNA","RecipeName":"CACB","ComponentQty":11,"Operation":"P极光刻"},{"LotId":"SFC240912810","DeviceName":"CPO4BCALO708U600HNA","RecipeName":"CACB","ComponentQty":13,"Operation":"P极光刻"}]} [Save Log Job] 2024-10-31 14:04:47.506 LOG.INFO UiEvent.cs Line:51 Event() - Operation RunRecipe(CACB, SFC240912810/EFC241014689/) [Save Log Job] 2024-10-31 14:04:47.607 LOG.INFO UiEvent.cs Line:51 Event() - EventLotStart [Save Log Job] 2024-10-31 14:04:47.607 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged [Save Log Job] 2024-10-31 14:04:47.608 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check door status。 [Save Log Job] 2024-10-31 14:04:47.608 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check chamber door。 [Save Log Job] 2024-10-31 14:04:47.609 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check backpanel door。 [Save Log Job] 2024-10-31 14:04:47.609 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check pump status。 [Save Log Job] 2024-10-31 14:04:47.609 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Close all the valves。 [Save Log Job] 2024-10-31 14:04:47.707 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Open pumping valve。 [Save Log Job] 2024-10-31 14:04:49.220 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check chamber pressure。 [Save Log Job] 2024-10-31 14:05:28.126 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Pump below 100mTorr。 [Save Log Job] 2024-10-31 14:05:28.226 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：PreProcess Finished in 0.7 minitues。 [Save Log Job] 2024-10-31 14:05:28.227 LOG.INFO UiEvent.cs Line:51 Event() - System complete run 'PreProcess'. [Save Log Job] 2024-10-31 14:05:28.227 LOG.INFO UiEvent.cs Line:51 Event() - Run Recipe 20241031140447-CACB [Save Log Job] 2024-10-31 14:05:28.228 LOG.INFO UiEvent.cs Line:51 Event() - System recipe start run'20241031140447-CACB' [Save Log Job] 2024-10-31 14:05:28.228 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241031140447-CACB' start run step 1：initial。 [Save Log Job] 2024-10-31 14:05:28.228 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。 [Save Log Job] 2024-10-31 14:05:28.229 LOG.INFO UiEvent.cs Line:51 Event() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。 [Save Log Job] 2024-10-31 14:05:28.229 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。 [Save Log Job] 2024-10-31 14:05:28.229 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。 [Save Log Job] 2024-10-31 14:05:28.229 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。 [Save Log Job] 2024-10-31 14:05:28.230 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。 [Save Log Job] 2024-10-31 14:05:28.230 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。 [Save Log Job] 2024-10-31 14:05:28.231 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPower，RF set Power:0。 [Save Log Job] 2024-10-31 14:05:28.231 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。 [Save Log Job] 2024-10-31 14:05:28.231 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。 [Save Log Job] 2024-10-31 14:05:28.232 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。 [Save Log Job] 2024-10-31 14:05:28.232 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas1， ramp to 45sccm。 [Save Log Job] 2024-10-31 14:05:28.232 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas2， ramp to 56sccm。 [Save Log Job] 2024-10-31 14:05:28.233 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas3， ramp to 66sccm。 [Save Log Job] 2024-10-31 14:05:28.233 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas4， ramp to 76sccm。 [Save Log Job] 2024-10-31 14:05:28.233 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas5， ramp to 86sccm。 [Save Log Job] 2024-10-31 14:05:28.234 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPowerOnOff，Set RF power Off。 [Save Log Job] 2024-10-31 14:05:28.327 LOG.INFO UiEvent.cs Line:51 Event() - Start monitor pressure stability [Save Log Job] 2024-10-31 14:05:58.320 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241031140447-CACB' end step 1 [Save Log Job] 2024-10-31 14:05:58.322 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241031140447-CACB' start run step 2：initial。 [Save Log Job] 2024-10-31 14:05:58.322 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。 [Save Log Job] 2024-10-31 14:05:58.324 LOG.INFO UiEvent.cs Line:51 Event() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。 [Save Log Job] 2024-10-31 14:05:58.324 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。 [Save Log Job] 2024-10-31 14:05:58.324 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。 [Save Log Job] 2024-10-31 14:05:58.326 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。 [Save Log Job] 2024-10-31 14:05:58.326 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。 [Save Log Job] 2024-10-31 14:05:58.326 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。 [Save Log Job] 2024-10-31 14:05:58.326 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPower，RF set Power:190。 [Save Log Job] 2024-10-31 14:05:58.326 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。 [Save Log Job] 2024-10-31 14:05:58.326 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas1， ramp to 45sccm。 [Save Log Job] 2024-10-31 14:05:58.326 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。 [Save Log Job] 2024-10-31 14:05:58.326 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas3， ramp to 66sccm。 [Save Log Job] 2024-10-31 14:05:58.326 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas2， ramp to 56sccm。 [Save Log Job] 2024-10-31 14:05:58.326 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas4， ramp to 76sccm。 [Save Log Job] 2024-10-31 14:05:58.327 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。 [Save Log Job] 2024-10-31 14:05:58.327 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas5， ramp to 86sccm。 [Save Log Job] 2024-10-31 14:05:58.327 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPowerOnOff，Set RF power On。 [Save Log Job] 2024-10-31 14:06:04.812 LOG.INFO UiEvent.cs Line:51 Event() - System RF GeneratorTolerance alarm：Forward power 18 out of range[189,191] in 2 seconds. [Save Log Job] 2024-10-31 14:06:09.503 LOG.INFO UiEvent.cs Line:51 Event() - System recipe was aborted: user aborted recipe [Save Log Job] 2024-10-31 14:06:11.250 LOG.INFO UiEvent.cs Line:51 Event() - Stop monitor pressure stability [Save Log Job] 2024-10-31 14:06:11.251 LOG.INFO UiEvent.cs Line:51 Event() - System Recipe run completed，Recipe：20241031140447-CACB Start time：2024/10/31 14:05:28 End time：2024/10/31 14:06:05 Total time：0:0:37 [Save Log Job] 2024-10-31 14:06:11.252 LOG.INFO UiEvent.cs Line:51 Event() - System Recipe completely run [Save Log Job] 2024-10-31 14:06:11.254 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC1 ValveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-31 14:06:12.288 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC2 ValveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-31 14:06:14.326 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged [Save Log Job] 2024-10-31 14:06:14.326 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC1 ValveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-31 14:06:14.326 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC2 ValveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-31 14:06:14.831 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC3 ValveClose失败，原因：Valve keep open。 --------------------------------[Header Log]----------------------------------------- [Save Log Job] 2024-10-31 14:29:01.683 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged [Save Log Job] 2024-10-31 14:29:01.791 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(System_IsMesMode, True) [Save Log Job] 2024-10-31 14:29:05.209 LOG.INFO UiEvent.cs Line:51 Event() - Software will be expired in -7 days, at 10/24/2024 12:00:00 AM 。 [Save Log Job] 2024-10-31 14:29:10.810 LOG.INFO UiEvent.cs Line:51 Event() - User admin login [Save Log Job] 2024-10-31 14:29:24.669 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetAutoMode() [Save Log Job] 2024-10-31 14:29:24.670 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentModeChanged [Save Log Job] 2024-10-31 14:29:24.670 LOG.INFO UiEvent.cs Line:51 Event() - System running mode changed to Auto Mode [Save Log Job] 2024-10-31 14:29:40.338 LOG.INFO YZQZFabAuto.cs Line:57 GetRecipeByMultipleLot() - GetRecipeByMultipleLot|http://192.168.1.207:86/api/mes/GetRecipeByMultipleLot?strQuery=[{"LotId":"EFC241014689","MachineNumber":"22","MachineType":"稷以打胶机"},{"LotId":"SFC240912810","MachineNumber":"22","MachineType":"稷以打胶机"}] [Save Log Job] 2024-10-31 14:29:40.596 LOG.INFO YZQZFabAuto.cs Line:59 GetRecipeByMultipleLot() - GetRecipeByMultipleLot|{"Status":200,"Message":"查询成功","Data":[{"LotId":"EFC241014689","DeviceName":"CPX4BCAYG606L400HNA","RecipeName":"CACB","ComponentQty":11,"Operation":"P极光刻"},{"LotId":"SFC240912810","DeviceName":"CPO4BCALO708U600HNA","RecipeName":"CACB","ComponentQty":13,"Operation":"P极光刻"}]} [Save Log Job] 2024-10-31 14:29:43.088 LOG.INFO UiEvent.cs Line:51 Event() - EventLotStart [Save Log Job] 2024-10-31 14:29:43.088 LOG.INFO UiEvent.cs Line:51 Event() - Operation RunRecipe(CACB, SFC240912810/EFC241014689) [Save Log Job] 2024-10-31 14:29:43.185 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check door status。 [Save Log Job] 2024-10-31 14:29:43.186 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check chamber door。 [Save Log Job] 2024-10-31 14:29:43.186 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check backpanel door。 [Save Log Job] 2024-10-31 14:29:43.187 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check pump status。 [Save Log Job] 2024-10-31 14:29:43.187 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged [Save Log Job] 2024-10-31 14:29:43.188 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Close all the valves。 [Save Log Job] 2024-10-31 14:29:43.285 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Open pumping valve。 [Save Log Job] 2024-10-31 14:29:45.103 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check chamber pressure。 [Save Log Job] 2024-10-31 14:30:27.904 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Pump below 100mTorr。 [Save Log Job] 2024-10-31 14:30:27.904 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：PreProcess Finished in 0.7 minitues。 [Save Log Job] 2024-10-31 14:30:27.904 LOG.INFO UiEvent.cs Line:51 Event() - System complete run 'PreProcess'. [Save Log Job] 2024-10-31 14:30:27.904 LOG.INFO UiEvent.cs Line:51 Event() - Run Recipe 20241031142943-CACB [Save Log Job] 2024-10-31 14:30:27.905 LOG.INFO UiEvent.cs Line:51 Event() - System recipe start run'20241031142943-CACB' [Save Log Job] 2024-10-31 14:30:28.004 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241031142943-CACB' start run step 1：initial。 [Save Log Job] 2024-10-31 14:30:28.007 LOG.INFO UiEvent.cs Line:51 Event() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。 [Save Log Job] 2024-10-31 14:30:28.007 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。 [Save Log Job] 2024-10-31 14:30:28.010 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。 [Save Log Job] 2024-10-31 14:30:28.010 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。 [Save Log Job] 2024-10-31 14:30:28.010 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。 [Save Log Job] 2024-10-31 14:30:28.012 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。 [Save Log Job] 2024-10-31 14:30:28.013 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。 [Save Log Job] 2024-10-31 14:30:28.014 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPower，RF set Power:0。 [Save Log Job] 2024-10-31 14:30:28.014 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。 [Save Log Job] 2024-10-31 14:30:28.014 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。 [Save Log Job] 2024-10-31 14:30:28.016 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。 [Save Log Job] 2024-10-31 14:30:28.017 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas2， ramp to 56sccm。 [Save Log Job] 2024-10-31 14:30:28.018 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas4， ramp to 76sccm。 [Save Log Job] 2024-10-31 14:30:28.018 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas5， ramp to 86sccm。 [Save Log Job] 2024-10-31 14:30:28.018 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas3， ramp to 66sccm。 [Save Log Job] 2024-10-31 14:30:28.018 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPowerOnOff，Set RF power Off。 [Save Log Job] 2024-10-31 14:30:28.018 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas1， ramp to 45sccm。 [Save Log Job] 2024-10-31 14:30:28.020 LOG.INFO UiEvent.cs Line:51 Event() - Start monitor pressure stability [Save Log Job] 2024-10-31 14:30:58.117 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241031142943-CACB' end step 1 [Save Log Job] 2024-10-31 14:30:58.117 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241031142943-CACB' start run step 2：initial。 [Save Log Job] 2024-10-31 14:30:58.118 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。 [Save Log Job] 2024-10-31 14:30:58.118 LOG.INFO UiEvent.cs Line:51 Event() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。 [Save Log Job] 2024-10-31 14:30:58.119 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。 [Save Log Job] 2024-10-31 14:30:58.119 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。 [Save Log Job] 2024-10-31 14:30:58.120 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。 [Save Log Job] 2024-10-31 14:30:58.121 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。 [Save Log Job] 2024-10-31 14:30:58.122 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。 [Save Log Job] 2024-10-31 14:30:58.123 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPower，RF set Power:190。 [Save Log Job] 2024-10-31 14:30:58.123 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。 [Save Log Job] 2024-10-31 14:30:58.124 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。 [Save Log Job] 2024-10-31 14:30:58.124 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。 [Save Log Job] 2024-10-31 14:30:58.125 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas1， ramp to 45sccm。 [Save Log Job] 2024-10-31 14:30:58.125 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas2， ramp to 56sccm。 [Save Log Job] 2024-10-31 14:30:58.126 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas3， ramp to 66sccm。 [Save Log Job] 2024-10-31 14:30:58.126 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas4， ramp to 76sccm。 [Save Log Job] 2024-10-31 14:30:58.128 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas5， ramp to 86sccm。 [Save Log Job] 2024-10-31 14:30:58.128 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPowerOnOff，Set RF power On。 [Save Log Job] 2024-10-31 14:31:05.117 LOG.INFO UiEvent.cs Line:51 Event() - System RF GeneratorTolerance alarm：Forward power 18 out of range[189,191] in 2 seconds. [Save Log Job] 2024-10-31 14:31:05.124 LOG.INFO UiEvent.cs Line:51 Event() - System recipe was aborted: user aborted recipe [Save Log Job] 2024-10-31 14:31:05.930 LOG.INFO UiEvent.cs Line:51 Event() - Stop monitor pressure stability [Save Log Job] 2024-10-31 14:31:07.371 LOG.INFO UiEvent.cs Line:51 Event() - System Recipe run completed，Recipe：20241031142943-CACB Start time：2024/10/31 14:30:27 End time：2024/10/31 14:31:04 Total time：0:0:36 [Save Log Job] 2024-10-31 14:31:07.371 LOG.INFO UiEvent.cs Line:51 Event() - System Recipe completely run [Save Log Job] 2024-10-31 14:31:07.378 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged [Save Log Job] 2024-10-31 14:31:10.953 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC1 ValveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-31 14:31:11.526 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC2 ValveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-31 14:31:11.534 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC3 ValveClose失败，原因：Valve keep open。 --------------------------------[Header Log]----------------------------------------- [Save Log Job] 2024-10-31 14:33:18.836 LOG.INFO UiEvent.cs Line:58 Event() - 已经连接上设备实时控制系统 [Save Log Job] 2024-10-31 14:33:18.837 LOG.INFO UiEvent.cs Line:57 Event() - 已经连接上设备实时控制系统 [Save Log Job] 2024-10-31 14:33:20.295 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(System_IsMesMode, True) [Save Log Job] 2024-10-31 14:33:20.336 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged [Save Log Job] 2024-10-31 14:33:23.956 LOG.INFO UiEvent.cs Line:51 Event() - Software will be expired in -7 days, at 10/24/2024 12:00:00 AM 。 --------------------------------[Header Log]----------------------------------------- [Save Log Job] 2024-10-31 15:04:42.265 LOG.INFO UiEvent.cs Line:58 Event() - 已经连接上设备实时控制系统 [Save Log Job] 2024-10-31 15:04:42.267 LOG.INFO UiEvent.cs Line:57 Event() - 已经连接上设备实时控制系统 [Save Log Job] 2024-10-31 15:04:43.766 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged [Save Log Job] 2024-10-31 15:04:43.789 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(System_IsMesMode, True) [Save Log Job] 2024-10-31 15:04:47.410 LOG.INFO UiEvent.cs Line:51 Event() - Software will be expired in -7 days, at 10/24/2024 12:00:00 AM 。 [Save Log Job] 2024-10-31 15:04:49.950 LOG.INFO UiEvent.cs Line:51 Event() - User admin login [Save Log Job] 2024-10-31 15:05:03.130 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetAutoMode() [Save Log Job] 2024-10-31 15:05:03.131 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentModeChanged [Save Log Job] 2024-10-31 15:05:03.131 LOG.INFO UiEvent.cs Line:51 Event() - System running mode changed to Auto Mode [Save Log Job] 2024-10-31 15:05:17.043 LOG.INFO YZQZFabAuto.cs Line:57 GetRecipeByMultipleLot() - GetRecipeByMultipleLot|http://192.168.1.207:86/api/mes/GetRecipeByMultipleLot?strQuery=[{"LotId":"EFC241014689","MachineNumber":"22","MachineType":"稷以打胶机"},{"LotId":"SFC240912810","MachineNumber":"22","MachineType":"稷以打胶机"}] [Save Log Job] 2024-10-31 15:05:21.457 LOG.INFO YZQZFabAuto.cs Line:59 GetRecipeByMultipleLot() - GetRecipeByMultipleLot|The request was aborted: The operation has timed out. [Save Log Job] 2024-10-31 15:06:01.224 LOG.INFO YZQZFabAuto.cs Line:57 GetRecipeByMultipleLot() - GetRecipeByMultipleLot|http://192.168.1.207:86/api/mes/GetRecipeByMultipleLot?strQuery=[{"LotId":"EFC241014689","MachineNumber":"22","MachineType":"稷以打胶机"},{"LotId":"SFC240912810","MachineNumber":"22","MachineType":"稷以打胶机"}] [Save Log Job] 2024-10-31 15:06:43.129 LOG.INFO YZQZFabAuto.cs Line:59 GetRecipeByMultipleLot() - GetRecipeByMultipleLot|The request was aborted: The operation has timed out. [Save Log Job] 2024-10-31 15:07:01.271 LOG.INFO YZQZFabAuto.cs Line:57 GetRecipeByMultipleLot() - GetRecipeByMultipleLot|http://192.168.1.207:86/api/mes/GetRecipeByMultipleLot?strQuery=[{"LotId":"EFC241014689","MachineNumber":"22","MachineType":"稷以打胶机"},{"LotId":"SFC240912810","MachineNumber":"22","MachineType":"稷以打胶机"}] [Save Log Job] 2024-10-31 15:07:01.525 LOG.INFO YZQZFabAuto.cs Line:59 GetRecipeByMultipleLot() - GetRecipeByMultipleLot|{"Status":200,"Message":"查询成功","Data":[{"LotId":"EFC241014689","DeviceName":"CPX4BCAYG606L400HNA","RecipeName":"CACB","ComponentQty":11,"Operation":"P极光刻"},{"LotId":"SFC240912810","DeviceName":"CPO4BCALO708U600HNA","RecipeName":"CACB","ComponentQty":13,"Operation":"P极光刻"}]} [Save Log Job] 2024-10-31 15:07:06.779 LOG.INFO UiEvent.cs Line:51 Event() - Operation RunRecipe(CACB, SFC240912810/EFC241014689) [Save Log Job] 2024-10-31 15:07:06.779 LOG.INFO UiEvent.cs Line:51 Event() - EventLotStart [Save Log Job] 2024-10-31 15:07:06.886 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check door status。 [Save Log Job] 2024-10-31 15:07:06.887 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check chamber door。 [Save Log Job] 2024-10-31 15:07:06.887 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check backpanel door。 [Save Log Job] 2024-10-31 15:07:06.888 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check pump status。 [Save Log Job] 2024-10-31 15:07:06.888 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Close all the valves。 [Save Log Job] 2024-10-31 15:07:06.889 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Open pumping valve。 [Save Log Job] 2024-10-31 15:07:06.984 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged [Save Log Job] 2024-10-31 15:07:09.002 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门Chamber pumping valveOpen失败，原因：Valve keep closed 。 [Save Log Job] 2024-10-31 15:07:10.517 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check chamber pressure。 [Save Log Job] 2024-10-31 15:07:45.559 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Pump below 100mTorr。 [Save Log Job] 2024-10-31 15:07:45.660 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：PreProcess Finished in 0.6 minitues。 [Save Log Job] 2024-10-31 15:07:45.660 LOG.INFO UiEvent.cs Line:51 Event() - System complete run 'PreProcess'. [Save Log Job] 2024-10-31 15:07:45.660 LOG.INFO UiEvent.cs Line:51 Event() - Run Recipe 20241031150706-CACB [Save Log Job] 2024-10-31 15:07:45.661 LOG.INFO UiEvent.cs Line:51 Event() - System recipe start run'20241031150706-CACB' [Save Log Job] 2024-10-31 15:07:45.763 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241031150706-CACB' start run step 1：initial。 [Save Log Job] 2024-10-31 15:07:45.763 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。 [Save Log Job] 2024-10-31 15:07:45.764 LOG.INFO UiEvent.cs Line:51 Event() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。 [Save Log Job] 2024-10-31 15:07:45.764 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。 [Save Log Job] 2024-10-31 15:07:45.765 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。 [Save Log Job] 2024-10-31 15:07:45.765 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。 [Save Log Job] 2024-10-31 15:07:45.766 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。 [Save Log Job] 2024-10-31 15:07:45.766 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。 [Save Log Job] 2024-10-31 15:07:45.767 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPower，RF set Power:0。 [Save Log Job] 2024-10-31 15:07:45.767 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。 [Save Log Job] 2024-10-31 15:07:45.768 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。 [Save Log Job] 2024-10-31 15:07:45.769 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。 [Save Log Job] 2024-10-31 15:07:45.769 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas1， ramp to 45sccm。 [Save Log Job] 2024-10-31 15:07:45.770 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas2， ramp to 56sccm。 [Save Log Job] 2024-10-31 15:07:45.770 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas3， ramp to 66sccm。 [Save Log Job] 2024-10-31 15:07:45.770 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas4， ramp to 76sccm。 [Save Log Job] 2024-10-31 15:07:45.771 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas5， ramp to 86sccm。 [Save Log Job] 2024-10-31 15:07:45.771 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPowerOnOff，Set RF power Off。 [Save Log Job] 2024-10-31 15:07:45.772 LOG.INFO UiEvent.cs Line:51 Event() - Start monitor pressure stability [Save Log Job] 2024-10-31 15:08:15.766 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241031150706-CACB' end step 1 [Save Log Job] 2024-10-31 15:08:15.867 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241031150706-CACB' start run step 2：initial。 [Save Log Job] 2024-10-31 15:08:15.868 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。 [Save Log Job] 2024-10-31 15:08:15.868 LOG.INFO UiEvent.cs Line:51 Event() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。 [Save Log Job] 2024-10-31 15:08:15.869 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。 [Save Log Job] 2024-10-31 15:08:15.869 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。 [Save Log Job] 2024-10-31 15:08:15.870 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。 [Save Log Job] 2024-10-31 15:08:15.870 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。 [Save Log Job] 2024-10-31 15:08:15.871 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。 [Save Log Job] 2024-10-31 15:08:15.871 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPower，RF set Power:190。 [Save Log Job] 2024-10-31 15:08:15.872 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。 [Save Log Job] 2024-10-31 15:08:15.872 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。 [Save Log Job] 2024-10-31 15:08:15.873 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。 [Save Log Job] 2024-10-31 15:08:15.873 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas1， ramp to 45sccm。 [Save Log Job] 2024-10-31 15:08:15.874 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas2， ramp to 56sccm。 [Save Log Job] 2024-10-31 15:08:15.874 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas3， ramp to 66sccm。 [Save Log Job] 2024-10-31 15:08:15.875 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas4， ramp to 76sccm。 [Save Log Job] 2024-10-31 15:08:15.875 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas5， ramp to 86sccm。 [Save Log Job] 2024-10-31 15:08:15.876 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPowerOnOff，Set RF power On。 [Save Log Job] 2024-10-31 15:08:22.519 LOG.INFO UiEvent.cs Line:51 Event() - System RF GeneratorTolerance alarm：Forward power 18 out of range[189,191] in 2 seconds. [Save Log Job] 2024-10-31 15:08:25.928 LOG.INFO UiEvent.cs Line:51 Event() - System recipe was aborted: user aborted recipe [Save Log Job] 2024-10-31 15:08:37.410 LOG.INFO UiEvent.cs Line:51 Event() - Stop monitor pressure stability [Save Log Job] 2024-10-31 15:08:37.433 LOG.INFO UiEvent.cs Line:51 Event() - System Recipe run completed，Recipe：20241031150706-CACB Start time：2024/10/31 15:07:45 End time：2024/10/31 15:08:22 Total time：0:0:36 [Save Log Job] 2024-10-31 15:08:37.433 LOG.INFO UiEvent.cs Line:51 Event() - System Recipe completely run [Save Log Job] 2024-10-31 15:08:37.433 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged [Save Log Job] 2024-10-31 15:08:37.433 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC1 ValveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-31 15:08:37.487 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC2 ValveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-31 15:08:37.539 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC3 ValveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-31 15:08:37.541 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC4 ValveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-31 15:08:37.541 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC5 ValveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-31 15:08:37.542 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门Process gas final valveClose失败，原因：Valve keep open。 --------------------------------[Header Log]----------------------------------------- [Save Log Job] 2024-10-31 15:42:02.636 LOG.INFO UiEvent.cs Line:57 Event() - 已经连接上设备实时控制系统 [Save Log Job] 2024-10-31 15:42:02.640 LOG.INFO UiEvent.cs Line:58 Event() - 已经连接上设备实时控制系统 [Save Log Job] 2024-10-31 15:42:04.125 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged [Save Log Job] 2024-10-31 15:42:04.344 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(System_IsMesMode, True) [Save Log Job] 2024-10-31 15:42:07.664 LOG.INFO UiEvent.cs Line:51 Event() - Software will be expired in -7 days, at 10/24/2024 12:00:00 AM 。 [Save Log Job] 2024-10-31 15:42:50.044 LOG.INFO UiEvent.cs Line:51 Event() - User admin login [Save Log Job] 2024-10-31 15:44:58.916 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetAutoMode() [Save Log Job] 2024-10-31 15:44:58.916 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentModeChanged [Save Log Job] 2024-10-31 15:44:58.919 LOG.INFO UiEvent.cs Line:51 Event() - System running mode changed to Auto Mode [Save Log Job] 2024-10-31 15:45:19.957 LOG.INFO UiEvent.cs Line:51 Event() - Operation RunRecipe(CACB, ) [Save Log Job] 2024-10-31 15:45:20.059 LOG.INFO UiEvent.cs Line:51 Event() - EventLotStart [Save Log Job] 2024-10-31 15:45:20.059 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check door status。 [Save Log Job] 2024-10-31 15:45:20.061 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check backpanel door。 [Save Log Job] 2024-10-31 15:45:20.061 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check chamber door。 [Save Log Job] 2024-10-31 15:45:20.062 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check pump status。 [Save Log Job] 2024-10-31 15:45:20.062 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Close all the valves。 [Save Log Job] 2024-10-31 15:45:20.063 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged [Save Log Job] 2024-10-31 15:45:20.158 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Open pumping valve。 [Save Log Job] 2024-10-31 15:45:21.574 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check chamber pressure。 [Save Log Job] 2024-10-31 15:46:52.177 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Pump below 100mTorr。 [Save Log Job] 2024-10-31 15:47:05.725 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：PreProcess Finished in 1.6 minitues。 [Save Log Job] 2024-10-31 15:47:06.291 LOG.INFO UiEvent.cs Line:51 Event() - System complete run 'PreProcess'. [Save Log Job] 2024-10-31 15:47:06.888 LOG.INFO UiEvent.cs Line:51 Event() - Run Recipe 20241031154519-CACB [Save Log Job] 2024-10-31 15:47:06.889 LOG.INFO UiEvent.cs Line:51 Event() - System recipe start run'20241031154519-CACB' [Save Log Job] 2024-10-31 15:51:07.670 LOG.INFO UiEvent.cs Line:51 Event() - System PLC heart beat check failed，please confirm PLC still running [Save Log Job] 2024-10-31 15:51:13.904 LOG.INFO UiEvent.cs Line:51 Event() - System recipe was aborted: user aborted recipe [Save Log Job] 2024-10-31 15:51:14.000 LOG.INFO UiEvent.cs Line:51 Event() - System Recipe run completed，Recipe：20241031154519-CACB Start time：2024/10/31 15:46:53 End time：2024/10/31 15:51:13 Total time：0:4:20 [Save Log Job] 2024-10-31 15:51:14.006 LOG.INFO UiEvent.cs Line:51 Event() - System Recipe completely run [Save Log Job] 2024-10-31 15:51:19.784 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged [Save Log Job] 2024-10-31 15:51:19.784 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged [Save Log Job] 2024-10-31 15:51:49.983 LOG.INFO UiEvent.cs Line:51 Event() - recipe file CACB save completed [Save Log Job] 2024-10-31 15:51:49.983 LOG.INFO UiEvent.cs Line:51 Event() - System Information [Save Log Job] 2024-10-31 15:52:04.682 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(System_RfPowerAlarmRange, 100) [Save Log Job] 2024-10-31 15:52:05.085 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(System_RfPowerAlarmTime, 100) [Save Log Job] 2024-10-31 15:52:30.653 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged [Save Log Job] 2024-10-31 15:54:21.882 LOG.INFO UiEvent.cs Line:51 Event() - Operation RunRecipe(CACB, ) [Save Log Job] 2024-10-31 15:56:05.230 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged [Save Log Job] 2024-10-31 15:56:05.343 LOG.INFO UiEvent.cs Line:51 Event() - EventLotStart [Save Log Job] 2024-10-31 15:56:05.345 LOG.INFO UiEvent.cs Line:51 Event() - System PLC heart beat check failed，please confirm PLC still running --------------------------------[Header Log]----------------------------------------- [Save Log Job] 2024-10-31 16:44:38.846 LOG.INFO UiEvent.cs Line:58 Event() - 已经连接上设备实时控制系统 [Save Log Job] 2024-10-31 16:44:50.781 LOG.INFO UiEvent.cs Line:51 Event() - Software will be expired in -7 days, at 10/24/2024 12:00:00 AM 。 [Save Log Job] 2024-10-31 16:45:25.188 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged [Save Log Job] 2024-10-31 16:45:33.865 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged [Save Log Job] 2024-10-31 16:45:33.900 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(System_IsMesMode, True) [Save Log Job] 2024-10-31 16:46:29.558 LOG.INFO UiEvent.cs Line:51 Event() - User admin login [Save Log Job] 2024-10-31 16:46:43.919 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetAutoMode() [Save Log Job] 2024-10-31 16:46:43.919 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentModeChanged [Save Log Job] 2024-10-31 16:46:43.920 LOG.INFO UiEvent.cs Line:51 Event() - System running mode changed to Auto Mode [Save Log Job] 2024-10-31 16:47:05.707 LOG.INFO UiEvent.cs Line:51 Event() - Operation RunRecipe(CACB, ) [Save Log Job] 2024-10-31 16:47:05.709 LOG.INFO UiEvent.cs Line:51 Event() - EventLotStart [Save Log Job] 2024-10-31 16:47:05.709 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged [Save Log Job] 2024-10-31 16:47:20.827 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check door status。 [Save Log Job] 2024-10-31 16:47:20.827 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check chamber door。 [Save Log Job] 2024-10-31 16:47:20.828 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check backpanel door。 [Save Log Job] 2024-10-31 16:47:20.828 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check pump status。 [Save Log Job] 2024-10-31 16:47:20.829 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Close all the valves。 [Save Log Job] 2024-10-31 16:47:20.830 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Open pumping valve。 [Save Log Job] 2024-10-31 16:47:21.928 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check chamber pressure。 [Save Log Job] 2024-10-31 16:47:57.030 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Pump below 100mTorr。 [Save Log Job] 2024-10-31 16:47:57.031 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：PreProcess Finished in 0.9 minitues。 [Save Log Job] 2024-10-31 16:47:57.031 LOG.INFO UiEvent.cs Line:51 Event() - System complete run 'PreProcess'. [Save Log Job] 2024-10-31 16:47:57.032 LOG.INFO UiEvent.cs Line:51 Event() - Run Recipe 20241031164703-CACB [Save Log Job] 2024-10-31 16:47:57.032 LOG.INFO UiEvent.cs Line:51 Event() - System recipe start run'20241031164703-CACB' [Save Log Job] 2024-10-31 16:47:57.131 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241031164703-CACB' start run step 1：initial。 [Save Log Job] 2024-10-31 16:47:57.131 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。 [Save Log Job] 2024-10-31 16:47:57.132 LOG.INFO UiEvent.cs Line:51 Event() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。 [Save Log Job] 2024-10-31 16:47:57.132 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。 [Save Log Job] 2024-10-31 16:47:57.133 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。 [Save Log Job] 2024-10-31 16:47:57.133 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。 [Save Log Job] 2024-10-31 16:47:57.134 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。 [Save Log Job] 2024-10-31 16:47:57.134 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。 [Save Log Job] 2024-10-31 16:47:57.135 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPower，RF set Power:0。 [Save Log Job] 2024-10-31 16:47:57.135 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。 [Save Log Job] 2024-10-31 16:47:57.136 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。 [Save Log Job] 2024-10-31 16:47:57.137 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。 [Save Log Job] 2024-10-31 16:47:57.137 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas1， ramp to 45sccm。 [Save Log Job] 2024-10-31 16:47:57.138 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas2， ramp to 56sccm。 [Save Log Job] 2024-10-31 16:47:57.138 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas3， ramp to 66sccm。 [Save Log Job] 2024-10-31 16:47:57.138 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas4， ramp to 76sccm。 [Save Log Job] 2024-10-31 16:47:57.139 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas5， ramp to 86sccm。 [Save Log Job] 2024-10-31 16:47:57.140 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPowerOnOff，Set RF power Off。 [Save Log Job] 2024-10-31 16:47:57.140 LOG.INFO UiEvent.cs Line:51 Event() - Start monitor pressure stability [Save Log Job] 2024-10-31 16:48:27.146 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241031164703-CACB' end step 1 [Save Log Job] 2024-10-31 16:48:27.147 LOG.INFO UiEvent.cs Line:51 Event() - Stop monitor pressure stability [Save Log Job] 2024-10-31 16:48:27.148 LOG.INFO UiEvent.cs Line:51 Event() - System Recipe run completed，Recipe：20241031164703-CACB Start time：2024/10/31 16:47:56 End time：2024/10/31 16:48:27 Total time：0:0:30 [Save Log Job] 2024-10-31 16:48:27.148 LOG.INFO UiEvent.cs Line:51 Event() - System Recipe completely run [Save Log Job] 2024-10-31 16:48:27.247 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, wait for 10 seconds [Save Log Job] 2024-10-31 16:48:29.265 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC1 ValveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-31 16:48:29.266 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC2 ValveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-31 16:48:29.266 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC3 ValveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-31 16:48:29.266 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC4 ValveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-31 16:48:29.267 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC5 ValveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-31 16:48:29.271 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门Process gas final valveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-31 16:48:37.358 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, RF Power Off [Save Log Job] 2024-10-31 16:48:37.358 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, Stop all the gas flow [Save Log Job] 2024-10-31 16:48:43.249 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, Close all the valves [Save Log Job] 2024-10-31 16:48:43.347 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, close pump valve [Save Log Job] 2024-10-31 16:48:45.363 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门Chamber pumping valveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-31 16:48:46.771 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, delay 3 seconds [Save Log Job] 2024-10-31 16:48:49.792 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, vent 50 seconds [Save Log Job] 2024-10-31 16:49:39.869 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, Close vent valve [Save Log Job] 2024-10-31 16:49:40.775 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, PostProcess Finished in 1.2 minitues [Save Log Job] 2024-10-31 16:49:40.776 LOG.INFO UiEvent.cs Line:51 Event() - System complete run 'PostProcess'. [Save Log Job] 2024-10-31 16:49:40.777 LOG.INFO UiEvent.cs Line:51 Event() - EventLotFinished [Save Log Job] 2024-10-31 16:49:40.875 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged --------------------------------[Header Log]----------------------------------------- [Save Log Job] 2024-10-31 17:07:14.008 LOG.INFO UiEvent.cs Line:58 Event() - 已经连接上设备实时控制系统 [Save Log Job] 2024-10-31 17:07:14.011 LOG.INFO UiEvent.cs Line:57 Event() - 已经连接上设备实时控制系统 [Save Log Job] 2024-10-31 17:07:15.465 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(System_IsMesMode, True) [Save Log Job] 2024-10-31 17:07:15.465 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged [Save Log Job] 2024-10-31 17:07:18.926 LOG.INFO UiEvent.cs Line:51 Event() - Software will be expired in -7 days, at 10/24/2024 12:00:00 AM 。 [Save Log Job] 2024-10-31 17:07:24.365 LOG.INFO UiEvent.cs Line:51 Event() - User admin login [Save Log Job] 2024-10-31 17:07:43.185 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetAutoMode() [Save Log Job] 2024-10-31 17:07:43.186 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentModeChanged [Save Log Job] 2024-10-31 17:07:43.186 LOG.INFO UiEvent.cs Line:51 Event() - System running mode changed to Auto Mode [Save Log Job] 2024-10-31 17:07:47.123 LOG.INFO UiEvent.cs Line:51 Event() - Operation RunRecipe(CACB, ) [Save Log Job] 2024-10-31 17:07:47.225 LOG.INFO UiEvent.cs Line:51 Event() - EventLotStart [Save Log Job] 2024-10-31 17:07:47.225 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check door status。 [Save Log Job] 2024-10-31 17:07:47.226 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check chamber door。 [Save Log Job] 2024-10-31 17:07:47.227 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check backpanel door。 [Save Log Job] 2024-10-31 17:07:47.227 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check pump status。 [Save Log Job] 2024-10-31 17:07:47.228 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Close all the valves。 [Save Log Job] 2024-10-31 17:07:47.326 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged [Save Log Job] 2024-10-31 17:07:47.327 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Open pumping valve。 [Save Log Job] 2024-10-31 17:07:49.341 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门Chamber pumping valveOpen失败，原因：Valve keep closed 。 [Save Log Job] 2024-10-31 17:07:51.256 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check chamber pressure。 [Save Log Job] 2024-10-31 17:08:26.179 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Pump below 100mTorr。 [Save Log Job] 2024-10-31 17:08:26.280 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：PreProcess Finished in 0.7 minitues。 [Save Log Job] 2024-10-31 17:08:26.280 LOG.INFO UiEvent.cs Line:51 Event() - System complete run 'PreProcess'. [Save Log Job] 2024-10-31 17:08:26.281 LOG.INFO UiEvent.cs Line:51 Event() - Run Recipe 20241031170747-CACB [Save Log Job] 2024-10-31 17:08:26.281 LOG.INFO UiEvent.cs Line:51 Event() - System recipe start run'20241031170747-CACB' [Save Log Job] 2024-10-31 17:08:26.282 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241031170747-CACB' start run step 1：initial。 [Save Log Job] 2024-10-31 17:08:26.283 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。 [Save Log Job] 2024-10-31 17:08:26.283 LOG.INFO UiEvent.cs Line:51 Event() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。 [Save Log Job] 2024-10-31 17:08:26.284 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。 [Save Log Job] 2024-10-31 17:08:26.285 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。 [Save Log Job] 2024-10-31 17:08:26.286 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。 [Save Log Job] 2024-10-31 17:08:26.286 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。 [Save Log Job] 2024-10-31 17:08:26.287 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。 [Save Log Job] 2024-10-31 17:08:26.287 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPower，RF set Power:0。 [Save Log Job] 2024-10-31 17:08:26.288 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。 [Save Log Job] 2024-10-31 17:08:26.288 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。 [Save Log Job] 2024-10-31 17:08:26.289 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。 [Save Log Job] 2024-10-31 17:08:26.291 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas1， ramp to 45sccm。 [Save Log Job] 2024-10-31 17:08:26.293 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas2， ramp to 56sccm。 [Save Log Job] 2024-10-31 17:08:26.294 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas3， ramp to 66sccm。 [Save Log Job] 2024-10-31 17:08:26.294 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas4， ramp to 76sccm。 [Save Log Job] 2024-10-31 17:08:26.295 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas5， ramp to 86sccm。 [Save Log Job] 2024-10-31 17:08:26.295 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPowerOnOff，Set RF power Off。 [Save Log Job] 2024-10-31 17:08:26.382 LOG.INFO UiEvent.cs Line:51 Event() - Start monitor pressure stability [Save Log Job] 2024-10-31 17:08:56.386 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241031170747-CACB' end step 1 [Save Log Job] 2024-10-31 17:08:56.387 LOG.INFO UiEvent.cs Line:51 Event() - Stop monitor pressure stability [Save Log Job] 2024-10-31 17:08:56.389 LOG.INFO UiEvent.cs Line:51 Event() - System Recipe completely run [Save Log Job] 2024-10-31 17:08:56.389 LOG.INFO UiEvent.cs Line:51 Event() - System Recipe run completed，Recipe：20241031170747-CACB Start time：2024/10/31 17:08:26 End time：2024/10/31 17:08:56 Total time：0:0:30 [Save Log Job] 2024-10-31 17:08:56.494 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, wait for 10 seconds [Save Log Job] 2024-10-31 17:08:58.500 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC1 ValveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-31 17:08:58.501 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC2 ValveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-31 17:08:58.501 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC3 ValveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-31 17:08:58.502 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC4 ValveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-31 17:08:58.502 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC5 ValveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-31 17:08:58.503 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门Process gas final valveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-31 17:09:06.590 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, RF Power Off [Save Log Job] 2024-10-31 17:09:06.591 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, Stop all the gas flow [Save Log Job] 2024-10-31 17:09:12.460 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, Close all the valves [Save Log Job] 2024-10-31 17:09:12.460 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, close pump valve [Save Log Job] 2024-10-31 17:09:14.483 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门Chamber pumping valveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-31 17:09:15.892 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, delay 3 seconds [Save Log Job] 2024-10-31 17:09:18.927 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, vent 50 seconds [Save Log Job] 2024-10-31 17:10:09.093 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, Close vent valve [Save Log Job] 2024-10-31 17:10:10.000 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, PostProcess Finished in 1.2 minitues [Save Log Job] 2024-10-31 17:10:10.000 LOG.INFO UiEvent.cs Line:51 Event() - System complete run 'PostProcess'. [Save Log Job] 2024-10-31 17:10:10.002 LOG.INFO UiEvent.cs Line:51 Event() - EventLotFinished [Save Log Job] 2024-10-31 17:10:10.002 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged [Save Log Job] 2024-10-31 17:14:28.260 LOG.INFO UiEvent.cs Line:51 Event() - recipe file CACB save completed [Save Log Job] 2024-10-31 17:14:28.260 LOG.INFO UiEvent.cs Line:51 Event() - System Information [Save Log Job] 2024-10-31 17:14:33.090 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(System_RfPowerAlarmTime, 1) [Save Log Job] 2024-10-31 17:14:34.298 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(System_RfPowerAlarmRange, 1) [Save Log Job] 2024-10-31 17:14:37.016 LOG.INFO UiEvent.cs Line:51 Event() - recipe file CACB save completed [Save Log Job] 2024-10-31 17:14:37.016 LOG.INFO UiEvent.cs Line:51 Event() - System Information [Save Log Job] 2024-10-31 17:14:54.521 LOG.INFO UiEvent.cs Line:51 Event() - Operation RunRecipe(CACB, ) [Save Log Job] 2024-10-31 17:14:54.521 LOG.INFO UiEvent.cs Line:51 Event() - EventLotStart [Save Log Job] 2024-10-31 17:14:54.523 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check door status。 [Save Log Job] 2024-10-31 17:14:54.524 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check chamber door。 [Save Log Job] 2024-10-31 17:14:54.524 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check pump status。 [Save Log Job] 2024-10-31 17:14:54.524 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check backpanel door。 [Save Log Job] 2024-10-31 17:14:54.524 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Close all the valves。 [Save Log Job] 2024-10-31 17:14:54.524 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged [Save Log Job] 2024-10-31 17:14:54.622 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Open pumping valve。 [Save Log Job] 2024-10-31 17:14:56.639 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门Chamber pumping valveOpen失败，原因：Valve keep closed 。 [Save Log Job] 2024-10-31 17:14:58.243 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check chamber pressure。 [Save Log Job] 2024-10-31 17:15:48.778 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Pump below 100mTorr。 [Save Log Job] 2024-10-31 17:15:48.778 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：PreProcess Finished in 0.9 minitues。 [Save Log Job] 2024-10-31 17:15:48.779 LOG.INFO UiEvent.cs Line:51 Event() - System complete run 'PreProcess'. [Save Log Job] 2024-10-31 17:15:48.781 LOG.INFO UiEvent.cs Line:51 Event() - Run Recipe 20241031171454-CACB [Save Log Job] 2024-10-31 17:15:48.781 LOG.INFO UiEvent.cs Line:51 Event() - System recipe start run'20241031171454-CACB' [Save Log Job] 2024-10-31 17:15:48.879 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241031171454-CACB' start run step 1：initial。 [Save Log Job] 2024-10-31 17:15:48.879 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。 [Save Log Job] 2024-10-31 17:15:48.879 LOG.INFO UiEvent.cs Line:51 Event() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。 [Save Log Job] 2024-10-31 17:15:48.879 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。 [Save Log Job] 2024-10-31 17:15:48.879 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。 [Save Log Job] 2024-10-31 17:15:48.880 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。 [Save Log Job] 2024-10-31 17:15:48.880 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。 [Save Log Job] 2024-10-31 17:15:48.880 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。 [Save Log Job] 2024-10-31 17:15:48.881 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPower，RF set Power:0。 [Save Log Job] 2024-10-31 17:15:48.881 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。 [Save Log Job] 2024-10-31 17:15:48.881 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。 [Save Log Job] 2024-10-31 17:15:48.882 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。 [Save Log Job] 2024-10-31 17:15:48.882 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas1， ramp to 45sccm。 [Save Log Job] 2024-10-31 17:15:48.882 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas2， ramp to 56sccm。 [Save Log Job] 2024-10-31 17:15:48.882 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas3， ramp to 66sccm。 [Save Log Job] 2024-10-31 17:15:48.883 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas4， ramp to 76sccm。 [Save Log Job] 2024-10-31 17:15:48.883 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas5， ramp to 86sccm。 [Save Log Job] 2024-10-31 17:15:48.884 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPowerOnOff，Set RF power Off。 [Save Log Job] 2024-10-31 17:15:48.884 LOG.INFO UiEvent.cs Line:51 Event() - Start monitor pressure stability [Save Log Job] 2024-10-31 17:16:18.962 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241031171454-CACB' end step 1 [Save Log Job] 2024-10-31 17:16:18.962 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241031171454-CACB' start run step 2：initial。 [Save Log Job] 2024-10-31 17:16:18.964 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。 [Save Log Job] 2024-10-31 17:16:18.964 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。 [Save Log Job] 2024-10-31 17:16:18.964 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。 [Save Log Job] 2024-10-31 17:16:18.964 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。 [Save Log Job] 2024-10-31 17:16:18.964 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。 [Save Log Job] 2024-10-31 17:16:18.964 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。 [Save Log Job] 2024-10-31 17:16:18.965 LOG.INFO UiEvent.cs Line:51 Event() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。 [Save Log Job] 2024-10-31 17:16:18.965 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPower，RF set Power:150。 [Save Log Job] 2024-10-31 17:16:18.965 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。 [Save Log Job] 2024-10-31 17:16:18.965 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。 [Save Log Job] 2024-10-31 17:16:18.966 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas1， ramp to 45sccm。 [Save Log Job] 2024-10-31 17:16:18.966 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas2， ramp to 56sccm。 [Save Log Job] 2024-10-31 17:16:18.966 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas3， ramp to 66sccm。 [Save Log Job] 2024-10-31 17:16:18.966 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas5， ramp to 86sccm。 [Save Log Job] 2024-10-31 17:16:18.966 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas4， ramp to 76sccm。 [Save Log Job] 2024-10-31 17:16:18.967 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。 [Save Log Job] 2024-10-31 17:16:18.967 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPowerOnOff，Set RF power On。 [Save Log Job] 2024-10-31 17:16:20.469 LOG.INFO UiEvent.cs Line:51 Event() - System RF GeneratorTolerance alarm：Forward power 18 out of range[149,151] in 1 seconds. [Save Log Job] 2024-10-31 17:16:20.469 LOG.INFO UiEvent.cs Line:51 Event() - System recipe was aborted: user aborted recipe [Save Log Job] 2024-10-31 17:16:20.469 LOG.INFO UiEvent.cs Line:51 Event() - Stop monitor pressure stability [Save Log Job] 2024-10-31 17:16:20.469 LOG.INFO UiEvent.cs Line:51 Event() - System Recipe run completed，Recipe：20241031171454-CACB Start time：2024/10/31 17:15:48 End time：2024/10/31 17:16:20 Total time：0:0:31 [Save Log Job] 2024-10-31 17:16:20.469 LOG.INFO UiEvent.cs Line:51 Event() - System Recipe completely run [Save Log Job] 2024-10-31 17:16:20.569 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged [Save Log Job] 2024-10-31 17:16:22.479 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门Process gas final valveClose失败，原因：Valve keep open。 --------------------------------[Footer Log]----------------------------------------- --------------------------------[Header Log]----------------------------------------- [Save Log Job] 2024-10-31 17:57:49.886 LOG.INFO UiEvent.cs Line:58 Event() - 已经连接上设备实时控制系统 --------------------------------[Header Log]----------------------------------------- [Save Log Job] 2024-10-31 17:57:54.565 LOG.INFO UiEvent.cs Line:58 Event() - 已经连接上设备实时控制系统 [Save Log Job] 2024-10-31 17:57:54.565 LOG.INFO UiEvent.cs Line:57 Event() - 已经连接上设备实时控制系统 [Save Log Job] 2024-10-31 17:57:56.079 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged [Save Log Job] 2024-10-31 17:57:56.603 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(System_IsMesMode, True) [Save Log Job] 2024-10-31 17:57:59.625 LOG.INFO UiEvent.cs Line:51 Event() - Software will be expired in -7 days, at 10/24/2024 12:00:00 AM 。