appLog20241030.txt 33 KB

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  1. --------------------------------[Header Log]----------------------------------------- [Save Log Job] 2024-10-30 10:28:03.501 LOG.INFO UiEvent.cs Line:58 Event() - 已经连接上设备实时控制系统
  2. [Save Log Job] 2024-10-30 10:28:03.504 LOG.INFO UiEvent.cs Line:58 Event() - 已经连接上设备实时控制系统
  3. [Save Log Job] 2024-10-30 10:28:05.605 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(System_IsMesMode, True)
  4. [Save Log Job] 2024-10-30 10:28:05.670 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
  5. [Save Log Job] 2024-10-30 10:29:28.906 LOG.INFO UiEvent.cs Line:51 Event() - User admin login
  6. --------------------------------[Footer Log]----------------------------------------- --------------------------------[Header Log]----------------------------------------- [Save Log Job] 2024-10-30 10:31:59.964 LOG.INFO UiEvent.cs Line:57 Event() - 已经连接上设备实时控制系统
  7. [Save Log Job] 2024-10-30 10:31:59.966 LOG.INFO UiEvent.cs Line:58 Event() - 已经连接上设备实时控制系统
  8. [Save Log Job] 2024-10-30 10:32:01.398 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(System_IsMesMode, True)
  9. [Save Log Job] 2024-10-30 10:32:02.265 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
  10. [Save Log Job] 2024-10-30 10:32:16.941 LOG.INFO UiEvent.cs Line:51 Event() - User admin login
  11. [Save Log Job] 2024-10-30 10:32:32.373 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetAutoMode()
  12. [Save Log Job] 2024-10-30 10:32:32.379 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentModeChanged
  13. [Save Log Job] 2024-10-30 10:32:32.379 LOG.INFO UiEvent.cs Line:51 Event() - System running mode changed to Auto Mode
  14. --------------------------------[Footer Log]----------------------------------------- --------------------------------[Header Log]----------------------------------------- [Save Log Job] 2024-10-30 11:17:54.048 LOG.INFO UiEvent.cs Line:57 Event() - 已经连接上设备实时控制系统
  15. [Save Log Job] 2024-10-30 11:17:54.050 LOG.INFO UiEvent.cs Line:58 Event() - 已经连接上设备实时控制系统
  16. [Save Log Job] 2024-10-30 11:17:55.461 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(System_IsMesMode, True)
  17. [Save Log Job] 2024-10-30 11:17:56.306 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
  18. [Save Log Job] 2024-10-30 11:18:29.000 LOG.INFO UiEvent.cs Line:51 Event() - User admin login
  19. --------------------------------[Header Log]----------------------------------------- [Save Log Job] 2024-10-30 11:21:40.637 LOG.INFO UiEvent.cs Line:58 Event() - 已经连接上设备实时控制系统
  20. [Save Log Job] 2024-10-30 11:21:40.637 LOG.INFO UiEvent.cs Line:57 Event() - 已经连接上设备实时控制系统
  21. [Save Log Job] 2024-10-30 11:21:42.141 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
  22. [Save Log Job] 2024-10-30 11:21:42.294 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(System_IsMesMode, True)
  23. [Save Log Job] 2024-10-30 11:21:45.806 LOG.INFO UiEvent.cs Line:51 Event() - Software will be expired in -6 days, at 10/24/2024 12:00:00 AM 。
  24. [Save Log Job] 2024-10-30 11:21:49.233 LOG.INFO UiEvent.cs Line:51 Event() - User admin login
  25. --------------------------------[Header Log]----------------------------------------- [Save Log Job] 2024-10-30 11:41:10.251 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(System_IsMesMode, True)
  26. [Save Log Job] 2024-10-30 11:41:10.296 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
  27. [Save Log Job] 2024-10-30 11:41:13.903 LOG.INFO UiEvent.cs Line:51 Event() - Software will be expired in -6 days, at 10/24/2024 12:00:00 AM 。
  28. [Save Log Job] 2024-10-30 11:54:16.108 LOG.INFO UiEvent.cs Line:51 Event() - User admin login
  29. [Save Log Job] 2024-10-30 13:09:43.102 LOG.INFO UiEvent.cs Line:51 Event() - System PLC heart beat check failed,please confirm PLC still running
  30. [Save Log Job] 2024-10-30 13:09:43.229 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
  31. [Save Log Job] 2024-10-30 13:17:48.046 LOG.INFO UiEvent.cs Line:51 Event() - System PLC heart beat check failed,please confirm PLC still running
  32. --------------------------------[Header Log]----------------------------------------- [Save Log Job] 2024-10-30 13:22:42.631 LOG.INFO UiEvent.cs Line:57 Event() - 已经连接上设备实时控制系统
  33. [Save Log Job] 2024-10-30 13:22:42.631 LOG.INFO UiEvent.cs Line:58 Event() - 已经连接上设备实时控制系统
  34. [Save Log Job] 2024-10-30 13:22:44.015 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(System_IsMesMode, True)
  35. [Save Log Job] 2024-10-30 13:22:44.166 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
  36. [Save Log Job] 2024-10-30 13:22:47.773 LOG.INFO UiEvent.cs Line:51 Event() - Software will be expired in -6 days, at 10/24/2024 12:00:00 AM 。
  37. [Save Log Job] 2024-10-30 13:22:59.518 LOG.INFO UiEvent.cs Line:51 Event() - User admin login
  38. --------------------------------[Header Log]----------------------------------------- [Save Log Job] 2024-10-30 13:24:36.224 LOG.INFO UiEvent.cs Line:57 Event() - 已经连接上设备实时控制系统
  39. [Save Log Job] 2024-10-30 13:24:36.225 LOG.INFO UiEvent.cs Line:58 Event() - 已经连接上设备实时控制系统
  40. [Save Log Job] 2024-10-30 13:24:37.461 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
  41. [Save Log Job] 2024-10-30 13:24:37.461 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(System_IsMesMode, True)
  42. [Save Log Job] 2024-10-30 13:24:41.127 LOG.INFO UiEvent.cs Line:51 Event() - Software will be expired in -6 days, at 10/24/2024 12:00:00 AM 。
  43. [Save Log Job] 2024-10-30 13:24:42.532 LOG.INFO UiEvent.cs Line:51 Event() - User admin login
  44. --------------------------------[Header Log]----------------------------------------- [Save Log Job] 2024-10-30 13:34:10.892 LOG.INFO UiEvent.cs Line:58 Event() - 已经连接上设备实时控制系统
  45. [Save Log Job] 2024-10-30 13:34:10.893 LOG.INFO UiEvent.cs Line:57 Event() - 已经连接上设备实时控制系统
  46. [Save Log Job] 2024-10-30 13:34:12.139 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
  47. [Save Log Job] 2024-10-30 13:34:12.193 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(System_IsMesMode, True)
  48. [Save Log Job] 2024-10-30 13:34:15.807 LOG.INFO UiEvent.cs Line:51 Event() - Software will be expired in -6 days, at 10/24/2024 12:00:00 AM 。
  49. [Save Log Job] 2024-10-30 13:34:16.912 LOG.INFO UiEvent.cs Line:51 Event() - User admin login
  50. --------------------------------[Header Log]----------------------------------------- [Save Log Job] 2024-10-30 13:41:43.702 LOG.INFO UiEvent.cs Line:58 Event() - 已经连接上设备实时控制系统
  51. [Save Log Job] 2024-10-30 13:41:43.702 LOG.INFO UiEvent.cs Line:57 Event() - 已经连接上设备实时控制系统
  52. [Save Log Job] 2024-10-30 13:41:45.137 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
  53. [Save Log Job] 2024-10-30 13:41:45.137 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(System_IsMesMode, True)
  54. [Save Log Job] 2024-10-30 13:41:48.654 LOG.INFO UiEvent.cs Line:51 Event() - Software will be expired in -6 days, at 10/24/2024 12:00:00 AM 。
  55. [Save Log Job] 2024-10-30 13:41:54.880 LOG.INFO UiEvent.cs Line:51 Event() - User admin login
  56. --------------------------------[Header Log]----------------------------------------- [Save Log Job] 2024-10-30 13:56:41.262 LOG.INFO UiEvent.cs Line:58 Event() - 已经连接上设备实时控制系统
  57. [Save Log Job] 2024-10-30 13:56:41.263 LOG.INFO UiEvent.cs Line:58 Event() - 已经连接上设备实时控制系统
  58. [Save Log Job] 2024-10-30 13:56:42.597 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(System_IsMesMode, True)
  59. [Save Log Job] 2024-10-30 13:56:42.597 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
  60. [Save Log Job] 2024-10-30 13:56:46.053 LOG.INFO UiEvent.cs Line:51 Event() - Software will be expired in -6 days, at 10/24/2024 12:00:00 AM 。
  61. [Save Log Job] 2024-10-30 13:56:50.470 LOG.INFO UiEvent.cs Line:51 Event() - User admin login
  62. [Save Log Job] 2024-10-30 13:56:52.775 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetAutoMode()
  63. [Save Log Job] 2024-10-30 13:56:52.775 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentModeChanged
  64. [Save Log Job] 2024-10-30 13:56:52.776 LOG.INFO UiEvent.cs Line:51 Event() - System running mode changed to Auto Mode
  65. [Save Log Job] 2024-10-30 13:56:55.082 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetManualMode()
  66. [Save Log Job] 2024-10-30 13:56:55.083 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentModeChanged
  67. [Save Log Job] 2024-10-30 13:56:55.083 LOG.INFO UiEvent.cs Line:51 Event() - System running mode changed to Manual Mode
  68. --------------------------------[Header Log]----------------------------------------- [Save Log Job] 2024-10-30 13:59:27.121 LOG.INFO UiEvent.cs Line:58 Event() - 已经连接上设备实时控制系统
  69. [Save Log Job] 2024-10-30 13:59:27.122 LOG.INFO UiEvent.cs Line:58 Event() - 已经连接上设备实时控制系统
  70. [Save Log Job] 2024-10-30 13:59:28.477 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(System_IsMesMode, True)
  71. [Save Log Job] 2024-10-30 13:59:28.477 LOG.INFO UiEvent.cs Line:50 Event() - EventEquipmentStatusChanged
  72. [Save Log Job] 2024-10-30 13:59:32.112 LOG.INFO UiEvent.cs Line:51 Event() - Software will be expired in -6 days, at 10/24/2024 12:00:00 AM 。
  73. [Save Log Job] 2024-10-30 13:59:36.342 LOG.INFO UiEvent.cs Line:51 Event() - User admin login
  74. --------------------------------[Header Log]----------------------------------------- [Save Log Job] 2024-10-30 14:02:26.220 LOG.INFO UiEvent.cs Line:58 Event() - 已经连接上设备实时控制系统
  75. [Save Log Job] 2024-10-30 14:02:26.221 LOG.INFO UiEvent.cs Line:58 Event() - 已经连接上设备实时控制系统
  76. [Save Log Job] 2024-10-30 14:02:27.485 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
  77. [Save Log Job] 2024-10-30 14:02:27.485 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(System_IsMesMode, True)
  78. [Save Log Job] 2024-10-30 14:02:31.039 LOG.INFO UiEvent.cs Line:51 Event() - Software will be expired in -6 days, at 10/24/2024 12:00:00 AM 。
  79. [Save Log Job] 2024-10-30 14:02:37.159 LOG.INFO UiEvent.cs Line:51 Event() - User admin login
  80. --------------------------------[Header Log]----------------------------------------- [Save Log Job] 2024-10-30 14:11:05.641 LOG.INFO UiEvent.cs Line:57 Event() - 已经连接上设备实时控制系统
  81. [Save Log Job] 2024-10-30 14:11:05.643 LOG.INFO UiEvent.cs Line:58 Event() - 已经连接上设备实时控制系统
  82. [Save Log Job] 2024-10-30 14:11:06.922 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(System_IsMesMode, True)
  83. [Save Log Job] 2024-10-30 14:11:07.279 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
  84. [Save Log Job] 2024-10-30 14:11:10.890 LOG.INFO UiEvent.cs Line:51 Event() - Software will be expired in -6 days, at 10/24/2024 12:00:00 AM 。
  85. [Save Log Job] 2024-10-30 14:11:12.401 LOG.INFO UiEvent.cs Line:51 Event() - User admin login
  86. --------------------------------[Header Log]----------------------------------------- [Save Log Job] 2024-10-30 14:13:14.772 LOG.INFO UiEvent.cs Line:58 Event() - 已经连接上设备实时控制系统
  87. [Save Log Job] 2024-10-30 14:13:16.163 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(System_IsMesMode, True)
  88. [Save Log Job] 2024-10-30 14:13:16.298 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
  89. [Save Log Job] 2024-10-30 14:13:19.908 LOG.INFO UiEvent.cs Line:51 Event() - Software will be expired in -6 days, at 10/24/2024 12:00:00 AM 。
  90. [Save Log Job] 2024-10-30 14:13:21.210 LOG.INFO UiEvent.cs Line:51 Event() - User admin login
  91. --------------------------------[Header Log]----------------------------------------- [Save Log Job] 2024-10-30 14:20:10.600 LOG.INFO UiEvent.cs Line:58 Event() - 已经连接上设备实时控制系统
  92. [Save Log Job] 2024-10-30 14:20:10.601 LOG.INFO UiEvent.cs Line:57 Event() - 已经连接上设备实时控制系统
  93. [Save Log Job] 2024-10-30 14:20:11.916 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(System_IsMesMode, True)
  94. [Save Log Job] 2024-10-30 14:20:11.970 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
  95. [Save Log Job] 2024-10-30 14:20:15.578 LOG.INFO UiEvent.cs Line:51 Event() - Software will be expired in -6 days, at 10/24/2024 12:00:00 AM 。
  96. [Save Log Job] 2024-10-30 14:20:17.185 LOG.INFO UiEvent.cs Line:51 Event() - User admin login
  97. --------------------------------[Header Log]----------------------------------------- [Save Log Job] 2024-10-30 14:42:03.245 LOG.INFO UiEvent.cs Line:58 Event() - 已经连接上设备实时控制系统
  98. [Save Log Job] 2024-10-30 14:42:03.245 LOG.INFO UiEvent.cs Line:57 Event() - 已经连接上设备实时控制系统
  99. [Save Log Job] 2024-10-30 14:42:04.640 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
  100. [Save Log Job] 2024-10-30 14:42:04.640 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(System_IsMesMode, True)
  101. [Save Log Job] 2024-10-30 14:42:08.303 LOG.INFO UiEvent.cs Line:51 Event() - Software will be expired in -6 days, at 10/24/2024 12:00:00 AM 。
  102. [Save Log Job] 2024-10-30 14:42:09.919 LOG.INFO UiEvent.cs Line:51 Event() - User admin login
  103. [Save Log Job] 2024-10-30 14:44:26.326 LOG.INFO UiEvent.cs Line:51 Event() - System PLC heart beat check failed,please confirm PLC still running
  104. [Save Log Job] 2024-10-30 14:44:26.326 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
  105. --------------------------------[Header Log]----------------------------------------- [Save Log Job] 2024-10-30 15:11:24.998 LOG.INFO UiEvent.cs Line:57 Event() - 已经连接上设备实时控制系统
  106. [Save Log Job] 2024-10-30 15:11:25.001 LOG.INFO UiEvent.cs Line:58 Event() - 已经连接上设备实时控制系统
  107. [Save Log Job] 2024-10-30 15:11:26.273 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
  108. [Save Log Job] 2024-10-30 15:11:26.323 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(System_IsMesMode, True)
  109. [Save Log Job] 2024-10-30 15:11:29.833 LOG.INFO UiEvent.cs Line:51 Event() - Software will be expired in -6 days, at 10/24/2024 12:00:00 AM 。
  110. [Save Log Job] 2024-10-30 15:11:34.352 LOG.INFO UiEvent.cs Line:51 Event() - User admin login
  111. [Save Log Job] 2024-10-30 15:11:40.477 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetAutoMode()
  112. [Save Log Job] 2024-10-30 15:11:40.477 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentModeChanged
  113. [Save Log Job] 2024-10-30 15:11:40.477 LOG.INFO UiEvent.cs Line:51 Event() - System running mode changed to Auto Mode
  114. [Save Log Job] 2024-10-30 15:11:45.793 LOG.INFO UiEvent.cs Line:51 Event() - Operation RunRecipe(123, )
  115. [Save Log Job] 2024-10-30 15:11:45.793 LOG.INFO UiEvent.cs Line:51 Event() - EventLotStart
  116. [Save Log Job] 2024-10-30 15:11:45.893 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
  117. [Save Log Job] 2024-10-30 15:11:45.893 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe:Check door status。
  118. [Save Log Job] 2024-10-30 15:11:45.893 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe:check chamber door。
  119. [Save Log Job] 2024-10-30 15:11:45.894 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe:check backpanel door。
  120. [Save Log Job] 2024-10-30 15:11:45.894 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe:Check pump status。
  121. [Save Log Job] 2024-10-30 15:11:45.894 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe:Close all the valves。
  122. [Save Log Job] 2024-10-30 15:11:45.994 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe:Open pumping valve。
  123. [Save Log Job] 2024-10-30 15:11:46.697 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe:Check chamber pressure。
  124. [Save Log Job] 2024-10-30 15:12:21.662 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe:Pump below 100mTorr。
  125. [Save Log Job] 2024-10-30 15:12:21.662 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe:PreProcess Finished in 0.6 minitues。
  126. [Save Log Job] 2024-10-30 15:12:21.664 LOG.INFO UiEvent.cs Line:51 Event() - System recipe start run'20241030151145-123'
  127. [Save Log Job] 2024-10-30 15:12:21.664 LOG.INFO UiEvent.cs Line:51 Event() - System complete run 'PreProcess'.
  128. [Save Log Job] 2024-10-30 15:12:21.664 LOG.INFO UiEvent.cs Line:51 Event() - Run Recipe 20241030151145-123
  129. [Save Log Job] 2024-10-30 15:12:21.764 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute:PressureControl.SetTVMode,TV mode set to TVPressureCtrl。
  130. [Save Log Job] 2024-10-30 15:12:21.764 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute:PressureControl.SetBoostPressure,Boost pump pressure set to 100 mTorr。
  131. [Save Log Job] 2024-10-30 15:12:21.764 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241030151145-123' start run step 1:initial。
  132. [Save Log Job] 2024-10-30 15:12:21.764 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute:PressureControl.SetTVPressure,TV pressure set to 50 mtorr。
  133. [Save Log Job] 2024-10-30 15:12:21.764 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute:Rf.SetPulsingFrequency,RF set Frequency:0。
  134. [Save Log Job] 2024-10-30 15:12:21.764 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute:Rf.SetPulsingDuty,RF set Duty:0 。
  135. [Save Log Job] 2024-10-30 15:12:21.764 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute:Rf.SetMode,Set RF work mode to ContinuousWaveMode。
  136. [Save Log Job] 2024-10-30 15:12:21.764 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute:Rf.SetPower,RF set Power:0。
  137. [Save Log Job] 2024-10-30 15:12:21.764 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute:Rf.SetMatchProcessMode,Match mode set to PresetMode。
  138. [Save Log Job] 2024-10-30 15:12:21.765 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute:Rf.SetMatchPositionC1,Set RF match position c1 :50。
  139. [Save Log Job] 2024-10-30 15:12:21.765 LOG.INFO UiEvent.cs Line:51 Event() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。
  140. [Save Log Job] 2024-10-30 15:12:21.765 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute:Rf.SetMatchPositionC2,Set RF match position c2 :50。
  141. [Save Log Job] 2024-10-30 15:12:21.765 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute:MfcGas1, ramp to 45sccm。
  142. [Save Log Job] 2024-10-30 15:12:21.765 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute:MfcGas3, ramp to 66sccm。
  143. [Save Log Job] 2024-10-30 15:12:21.765 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute:MfcGas4, ramp to 76sccm。
  144. [Save Log Job] 2024-10-30 15:12:21.765 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute:MfcGas2, ramp to 56sccm。
  145. [Save Log Job] 2024-10-30 15:12:21.766 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute:MfcGas5, ramp to 86sccm。
  146. [Save Log Job] 2024-10-30 15:12:21.766 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute:Rf.SetPowerOnOff,Set RF power Off。
  147. [Save Log Job] 2024-10-30 15:12:21.767 LOG.INFO UiEvent.cs Line:51 Event() - Start monitor pressure stability
  148. [Save Log Job] 2024-10-30 15:12:51.765 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241030151145-123' end step 1
  149. [Save Log Job] 2024-10-30 15:12:51.864 LOG.INFO UiEvent.cs Line:51 Event() - Stop monitor pressure stability
  150. [Save Log Job] 2024-10-30 15:12:51.864 LOG.INFO UiEvent.cs Line:51 Event() - System Recipe run completed,Recipe:20241030151145-123
  151. Start time:2024/10/30 15:12:21
  152. End time:2024/10/30 15:12:51
  153. Total time:0:0:30
  154. [Save Log Job] 2024-10-30 15:12:51.864 LOG.INFO UiEvent.cs Line:51 Event() - System Recipe completely run
  155. [Save Log Job] 2024-10-30 15:12:51.865 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, wait for 10 seconds
  156. [Save Log Job] 2024-10-30 15:12:53.871 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC1 ValveClose失败,原因:Valve keep open。
  157. [Save Log Job] 2024-10-30 15:12:53.871 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC2 ValveClose失败,原因:Valve keep open。
  158. [Save Log Job] 2024-10-30 15:12:53.871 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC3 ValveClose失败,原因:Valve keep open。
  159. [Save Log Job] 2024-10-30 15:12:53.872 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC4 ValveClose失败,原因:Valve keep open。
  160. [Save Log Job] 2024-10-30 15:12:53.872 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC5 ValveClose失败,原因:Valve keep open。
  161. [Save Log Job] 2024-10-30 15:12:53.873 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门Process gas final valveClose失败,原因:Valve keep open。
  162. [Save Log Job] 2024-10-30 15:13:01.997 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, RF Power Off
  163. [Save Log Job] 2024-10-30 15:13:01.999 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, Stop all the gas flow
  164. [Save Log Job] 2024-10-30 15:13:07.719 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, Close all the valves
  165. [Save Log Job] 2024-10-30 15:13:07.820 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, close pump valve
  166. [Save Log Job] 2024-10-30 15:13:09.831 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门Chamber pumping valveClose失败,原因:Valve keep open。
  167. [Save Log Job] 2024-10-30 15:13:11.237 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, delay 3 seconds
  168. [Save Log Job] 2024-10-30 15:13:14.350 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, vent 50 seconds
  169. [Save Log Job] 2024-10-30 15:14:04.437 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, Close vent valve
  170. --------------------------------[Header Log]----------------------------------------- [Save Log Job] 2024-10-30 15:22:13.728 LOG.INFO UiEvent.cs Line:58 Event() - 已经连接上设备实时控制系统
  171. [Save Log Job] 2024-10-30 15:22:15.038 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(System_IsMesMode, True)
  172. [Save Log Job] 2024-10-30 15:22:15.294 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
  173. [Save Log Job] 2024-10-30 15:22:19.005 LOG.INFO UiEvent.cs Line:51 Event() - Software will be expired in -6 days, at 10/24/2024 12:00:00 AM 。
  174. [Save Log Job] 2024-10-30 15:22:21.814 LOG.INFO UiEvent.cs Line:51 Event() - User admin login
  175. [Save Log Job] 2024-10-30 15:22:32.549 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetAutoMode()
  176. [Save Log Job] 2024-10-30 15:22:32.549 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentModeChanged
  177. [Save Log Job] 2024-10-30 15:22:32.549 LOG.INFO UiEvent.cs Line:51 Event() - System running mode changed to Auto Mode
  178. [Save Log Job] 2024-10-30 15:24:58.202 LOG.INFO UiEvent.cs Line:51 Event() - Operation RunRecipe(123, )
  179. [Save Log Job] 2024-10-30 15:24:58.202 LOG.INFO UiEvent.cs Line:51 Event() - EventLotStart
  180. [Save Log Job] 2024-10-30 15:24:58.203 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
  181. [Save Log Job] 2024-10-30 15:24:58.303 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe:Check door status。
  182. [Save Log Job] 2024-10-30 15:24:58.303 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe:check chamber door。
  183. [Save Log Job] 2024-10-30 15:24:58.303 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe:check backpanel door。
  184. [Save Log Job] 2024-10-30 15:24:58.304 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe:Check pump status。
  185. [Save Log Job] 2024-10-30 15:24:58.304 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe:Close all the valves。
  186. [Save Log Job] 2024-10-30 15:24:58.304 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe:Open pumping valve。
  187. [Save Log Job] 2024-10-30 15:25:00.312 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门Chamber pumping valveOpen失败,原因:Valve keep closed 。
  188. [Save Log Job] 2024-10-30 15:25:01.818 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe:Check chamber pressure。
  189. [Save Log Job] 2024-10-30 15:25:36.794 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe:Pump below 100mTorr。
  190. [Save Log Job] 2024-10-30 15:25:36.794 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe:PreProcess Finished in 0.6 minitues。
  191. [Save Log Job] 2024-10-30 15:25:36.795 LOG.INFO UiEvent.cs Line:51 Event() - System complete run 'PreProcess'.
  192. [Save Log Job] 2024-10-30 15:25:36.795 LOG.INFO UiEvent.cs Line:51 Event() - Run Recipe 20241030152458-123
  193. [Save Log Job] 2024-10-30 15:25:36.795 LOG.INFO UiEvent.cs Line:51 Event() - System recipe start run'20241030152458-123'
  194. [Save Log Job] 2024-10-30 15:25:36.896 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241030152458-123' start run step 1:initial。
  195. [Save Log Job] 2024-10-30 15:25:36.896 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute:PressureControl.SetTVMode,TV mode set to TVPressureCtrl。
  196. [Save Log Job] 2024-10-30 15:25:36.896 LOG.INFO UiEvent.cs Line:51 Event() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。
  197. [Save Log Job] 2024-10-30 15:25:36.897 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute:PressureControl.SetTVPressure,TV pressure set to 50 mtorr。
  198. [Save Log Job] 2024-10-30 15:25:36.897 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute:PressureControl.SetBoostPressure,Boost pump pressure set to 100 mTorr。
  199. [Save Log Job] 2024-10-30 15:25:36.897 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute:Rf.SetMode,Set RF work mode to ContinuousWaveMode。
  200. [Save Log Job] 2024-10-30 15:25:36.898 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute:Rf.SetPulsingFrequency,RF set Frequency:0。
  201. [Save Log Job] 2024-10-30 15:25:36.898 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute:Rf.SetPulsingDuty,RF set Duty:0 。
  202. [Save Log Job] 2024-10-30 15:25:36.898 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute:Rf.SetPower,RF set Power:0。
  203. [Save Log Job] 2024-10-30 15:25:36.899 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute:Rf.SetMatchProcessMode,Match mode set to PresetMode。
  204. [Save Log Job] 2024-10-30 15:25:36.899 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute:Rf.SetMatchPositionC1,Set RF match position c1 :50。
  205. [Save Log Job] 2024-10-30 15:25:36.900 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute:Rf.SetMatchPositionC2,Set RF match position c2 :50。
  206. [Save Log Job] 2024-10-30 15:25:36.900 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute:MfcGas1, ramp to 45sccm。
  207. [Save Log Job] 2024-10-30 15:25:36.901 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute:MfcGas2, ramp to 56sccm。
  208. [Save Log Job] 2024-10-30 15:25:36.901 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute:MfcGas3, ramp to 66sccm。
  209. [Save Log Job] 2024-10-30 15:25:36.901 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute:MfcGas4, ramp to 76sccm。
  210. [Save Log Job] 2024-10-30 15:25:36.902 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute:MfcGas5, ramp to 86sccm。
  211. [Save Log Job] 2024-10-30 15:25:36.902 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute:Rf.SetPowerOnOff,Set RF power Off。
  212. [Save Log Job] 2024-10-30 15:25:36.902 LOG.INFO UiEvent.cs Line:51 Event() - Start monitor pressure stability
  213. [Save Log Job] 2024-10-30 15:26:06.990 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241030152458-123' end step 1
  214. [Save Log Job] 2024-10-30 15:26:06.990 LOG.INFO UiEvent.cs Line:51 Event() - Stop monitor pressure stability
  215. [Save Log Job] 2024-10-30 15:26:06.990 LOG.INFO UiEvent.cs Line:51 Event() - System Recipe run completed,Recipe:20241030152458-123
  216. Start time:2024/10/30 15:25:36
  217. End time:2024/10/30 15:26:06
  218. Total time:0:0:30
  219. [Save Log Job] 2024-10-30 15:26:06.992 LOG.INFO UiEvent.cs Line:51 Event() - System Recipe completely run
  220. [Save Log Job] 2024-10-30 15:26:06.992 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, wait for 10 seconds
  221. [Save Log Job] 2024-10-30 15:26:08.996 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC1 ValveClose失败,原因:Valve keep open。
  222. [Save Log Job] 2024-10-30 15:26:08.996 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC2 ValveClose失败,原因:Valve keep open。
  223. [Save Log Job] 2024-10-30 15:26:08.996 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC3 ValveClose失败,原因:Valve keep open。
  224. [Save Log Job] 2024-10-30 15:26:08.996 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC4 ValveClose失败,原因:Valve keep open。
  225. [Save Log Job] 2024-10-30 15:26:08.997 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC5 ValveClose失败,原因:Valve keep open。
  226. [Save Log Job] 2024-10-30 15:26:08.997 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门Process gas final valveClose失败,原因:Valve keep open。
  227. [Save Log Job] 2024-10-30 15:26:17.042 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, RF Power Off
  228. [Save Log Job] 2024-10-30 15:26:17.141 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, Stop all the gas flow
  229. [Save Log Job] 2024-10-30 15:26:22.869 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, Close all the valves
  230. [Save Log Job] 2024-10-30 15:26:22.967 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, close pump valve
  231. [Save Log Job] 2024-10-30 15:26:24.983 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门Chamber pumping valveClose失败,原因:Valve keep open。
  232. [Save Log Job] 2024-10-30 15:26:26.395 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, delay 3 seconds
  233. [Save Log Job] 2024-10-30 15:26:29.509 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, vent 50 seconds
  234. [Save Log Job] 2024-10-30 15:27:19.653 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, Close vent valve
  235. [Save Log Job] 2024-10-30 15:27:23.645 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, PostProcess Finished in 1.2 minitues
  236. [Save Log Job] 2024-10-30 15:27:24.093 LOG.INFO UiEvent.cs Line:51 Event() - System complete run 'PostProcess'.
  237. [Save Log Job] 2024-10-30 15:27:46.955 LOG.INFO UiEvent.cs Line:51 Event() - EventLotFinished
  238. [Save Log Job] 2024-10-30 15:27:46.958 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
  239. [Save Log Job] 2024-10-30 15:27:49.012 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
  240. --------------------------------[Header Log]----------------------------------------- [Save Log Job] 2024-10-30 15:34:30.983 LOG.INFO UiEvent.cs Line:58 Event() - 已经连接上设备实时控制系统
  241. [Save Log Job] 2024-10-30 15:34:30.983 LOG.INFO UiEvent.cs Line:57 Event() - 已经连接上设备实时控制系统
  242. [Save Log Job] 2024-10-30 15:34:32.263 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(System_IsMesMode, True)
  243. [Save Log Job] 2024-10-30 15:34:32.263 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
  244. [Save Log Job] 2024-10-30 15:34:35.928 LOG.INFO UiEvent.cs Line:51 Event() - Software will be expired in -6 days, at 10/24/2024 12:00:00 AM 。
  245. [Save Log Job] 2024-10-30 15:34:38.235 LOG.INFO UiEvent.cs Line:51 Event() - User admin login
  246. [Save Log Job] 2024-10-30 15:34:50.780 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetAutoMode()
  247. [Save Log Job] 2024-10-30 15:34:50.780 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentModeChanged
  248. [Save Log Job] 2024-10-30 15:34:50.780 LOG.INFO UiEvent.cs Line:51 Event() - System running mode changed to Auto Mode
  249. --------------------------------[Footer Log]----------------------------------------- --------------------------------[Header Log]----------------------------------------- [Save Log Job] 2024-10-30 17:33:06.195 LOG.INFO UiEvent.cs Line:57 Event() - 已经连接上设备实时控制系统
  250. [Save Log Job] 2024-10-30 17:33:06.195 LOG.INFO UiEvent.cs Line:58 Event() - 已经连接上设备实时控制系统
  251. [Save Log Job] 2024-10-30 17:33:07.454 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
  252. [Save Log Job] 2024-10-30 17:33:07.580 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(System_IsMesMode, True)
  253. --------------------------------[Header Log]----------------------------------------- [Save Log Job] 2024-10-30 17:33:43.720 LOG.INFO UiEvent.cs Line:58 Event() - 已经连接上设备实时控制系统
  254. [Save Log Job] 2024-10-30 17:33:43.721 LOG.INFO UiEvent.cs Line:57 Event() - 已经连接上设备实时控制系统
  255. [Save Log Job] 2024-10-30 17:33:45.048 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
  256. [Save Log Job] 2024-10-30 17:33:45.178 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(System_IsMesMode, True)
  257. [Save Log Job] 2024-10-30 17:33:48.511 LOG.INFO UiEvent.cs Line:51 Event() - Software will be expired in -6 days, at 10/24/2024 12:00:00 AM 。
  258. [Save Log Job] 2024-10-30 17:33:52.943 LOG.INFO UiEvent.cs Line:51 Event() - User admin login
  259. [Save Log Job] 2024-10-30 17:34:27.772 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetAutoMode()
  260. [Save Log Job] 2024-10-30 17:34:27.773 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentModeChanged
  261. [Save Log Job] 2024-10-30 17:34:27.774 LOG.INFO UiEvent.cs Line:51 Event() - System running mode changed to Auto Mode
  262. --------------------------------[Footer Log]----------------------------------------- --------------------------------[Header Log]----------------------------------------- [Save Log Job] 2024-10-30 17:36:04.282 LOG.INFO UiEvent.cs Line:57 Event() - 已经连接上设备实时控制系统
  263. [Save Log Job] 2024-10-30 17:36:04.283 LOG.INFO UiEvent.cs Line:58 Event() - 已经连接上设备实时控制系统
  264. [Save Log Job] 2024-10-30 17:36:05.741 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
  265. [Save Log Job] 2024-10-30 17:36:06.175 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(System_IsMesMode, True)
  266. [Save Log Job] 2024-10-30 17:36:09.286 LOG.INFO UiEvent.cs Line:51 Event() - Software will be expired in -6 days, at 10/24/2024 12:00:00 AM 。
  267. [Save Log Job] 2024-10-30 17:36:13.357 LOG.INFO UiEvent.cs Line:51 Event() - User admin login
  268. [Save Log Job] 2024-10-30 17:36:16.625 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetAutoMode()
  269. [Save Log Job] 2024-10-30 17:36:16.626 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentModeChanged
  270. [Save Log Job] 2024-10-30 17:36:16.626 LOG.INFO UiEvent.cs Line:51 Event() - System running mode changed to Auto Mode
  271. --------------------------------[Footer Log]-----------------------------------------