--------------------------------[Header Log]----------------------------------------- [Save Log Job] 2024-10-30 10:28:03.501 LOG.INFO UiEvent.cs Line:58 Event() - 已经连接上设备实时控制系统
[Save Log Job] 2024-10-30 10:28:03.504 LOG.INFO UiEvent.cs Line:58 Event() - 已经连接上设备实时控制系统
[Save Log Job] 2024-10-30 10:28:05.605 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(System_IsMesMode, True)
[Save Log Job] 2024-10-30 10:28:05.670 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-10-30 10:29:28.906 LOG.INFO UiEvent.cs Line:51 Event() - User admin login
--------------------------------[Footer Log]----------------------------------------- --------------------------------[Header Log]----------------------------------------- [Save Log Job] 2024-10-30 10:31:59.964 LOG.INFO UiEvent.cs Line:57 Event() - 已经连接上设备实时控制系统
[Save Log Job] 2024-10-30 10:31:59.966 LOG.INFO UiEvent.cs Line:58 Event() - 已经连接上设备实时控制系统
[Save Log Job] 2024-10-30 10:32:01.398 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(System_IsMesMode, True)
[Save Log Job] 2024-10-30 10:32:02.265 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-10-30 10:32:16.941 LOG.INFO UiEvent.cs Line:51 Event() - User admin login
[Save Log Job] 2024-10-30 10:32:32.373 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetAutoMode()
[Save Log Job] 2024-10-30 10:32:32.379 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentModeChanged
[Save Log Job] 2024-10-30 10:32:32.379 LOG.INFO UiEvent.cs Line:51 Event() - System running mode changed to Auto Mode
--------------------------------[Footer Log]----------------------------------------- --------------------------------[Header Log]----------------------------------------- [Save Log Job] 2024-10-30 11:17:54.048 LOG.INFO UiEvent.cs Line:57 Event() - 已经连接上设备实时控制系统
[Save Log Job] 2024-10-30 11:17:54.050 LOG.INFO UiEvent.cs Line:58 Event() - 已经连接上设备实时控制系统
[Save Log Job] 2024-10-30 11:17:55.461 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(System_IsMesMode, True)
[Save Log Job] 2024-10-30 11:17:56.306 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-10-30 11:18:29.000 LOG.INFO UiEvent.cs Line:51 Event() - User admin login
--------------------------------[Header Log]----------------------------------------- [Save Log Job] 2024-10-30 11:21:40.637 LOG.INFO UiEvent.cs Line:58 Event() - 已经连接上设备实时控制系统
[Save Log Job] 2024-10-30 11:21:40.637 LOG.INFO UiEvent.cs Line:57 Event() - 已经连接上设备实时控制系统
[Save Log Job] 2024-10-30 11:21:42.141 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-10-30 11:21:42.294 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(System_IsMesMode, True)
[Save Log Job] 2024-10-30 11:21:45.806 LOG.INFO UiEvent.cs Line:51 Event() - Software will be expired in -6 days, at 10/24/2024 12:00:00 AM 。
[Save Log Job] 2024-10-30 11:21:49.233 LOG.INFO UiEvent.cs Line:51 Event() - User admin login
--------------------------------[Header Log]----------------------------------------- [Save Log Job] 2024-10-30 11:41:10.251 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(System_IsMesMode, True)
[Save Log Job] 2024-10-30 11:41:10.296 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-10-30 11:41:13.903 LOG.INFO UiEvent.cs Line:51 Event() - Software will be expired in -6 days, at 10/24/2024 12:00:00 AM 。
[Save Log Job] 2024-10-30 11:54:16.108 LOG.INFO UiEvent.cs Line:51 Event() - User admin login
[Save Log Job] 2024-10-30 13:09:43.102 LOG.INFO UiEvent.cs Line:51 Event() - System PLC heart beat check failed，please confirm PLC still running
[Save Log Job] 2024-10-30 13:09:43.229 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-10-30 13:17:48.046 LOG.INFO UiEvent.cs Line:51 Event() - System PLC heart beat check failed，please confirm PLC still running
--------------------------------[Header Log]----------------------------------------- [Save Log Job] 2024-10-30 13:22:42.631 LOG.INFO UiEvent.cs Line:57 Event() - 已经连接上设备实时控制系统
[Save Log Job] 2024-10-30 13:22:42.631 LOG.INFO UiEvent.cs Line:58 Event() - 已经连接上设备实时控制系统
[Save Log Job] 2024-10-30 13:22:44.015 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(System_IsMesMode, True)
[Save Log Job] 2024-10-30 13:22:44.166 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-10-30 13:22:47.773 LOG.INFO UiEvent.cs Line:51 Event() - Software will be expired in -6 days, at 10/24/2024 12:00:00 AM 。
[Save Log Job] 2024-10-30 13:22:59.518 LOG.INFO UiEvent.cs Line:51 Event() - User admin login
--------------------------------[Header Log]----------------------------------------- [Save Log Job] 2024-10-30 13:24:36.224 LOG.INFO UiEvent.cs Line:57 Event() - 已经连接上设备实时控制系统
[Save Log Job] 2024-10-30 13:24:36.225 LOG.INFO UiEvent.cs Line:58 Event() - 已经连接上设备实时控制系统
[Save Log Job] 2024-10-30 13:24:37.461 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-10-30 13:24:37.461 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(System_IsMesMode, True)
[Save Log Job] 2024-10-30 13:24:41.127 LOG.INFO UiEvent.cs Line:51 Event() - Software will be expired in -6 days, at 10/24/2024 12:00:00 AM 。
[Save Log Job] 2024-10-30 13:24:42.532 LOG.INFO UiEvent.cs Line:51 Event() - User admin login
--------------------------------[Header Log]----------------------------------------- [Save Log Job] 2024-10-30 13:34:10.892 LOG.INFO UiEvent.cs Line:58 Event() - 已经连接上设备实时控制系统
[Save Log Job] 2024-10-30 13:34:10.893 LOG.INFO UiEvent.cs Line:57 Event() - 已经连接上设备实时控制系统
[Save Log Job] 2024-10-30 13:34:12.139 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-10-30 13:34:12.193 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(System_IsMesMode, True)
[Save Log Job] 2024-10-30 13:34:15.807 LOG.INFO UiEvent.cs Line:51 Event() - Software will be expired in -6 days, at 10/24/2024 12:00:00 AM 。
[Save Log Job] 2024-10-30 13:34:16.912 LOG.INFO UiEvent.cs Line:51 Event() - User admin login
--------------------------------[Header Log]----------------------------------------- [Save Log Job] 2024-10-30 13:41:43.702 LOG.INFO UiEvent.cs Line:58 Event() - 已经连接上设备实时控制系统
[Save Log Job] 2024-10-30 13:41:43.702 LOG.INFO UiEvent.cs Line:57 Event() - 已经连接上设备实时控制系统
[Save Log Job] 2024-10-30 13:41:45.137 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-10-30 13:41:45.137 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(System_IsMesMode, True)
[Save Log Job] 2024-10-30 13:41:48.654 LOG.INFO UiEvent.cs Line:51 Event() - Software will be expired in -6 days, at 10/24/2024 12:00:00 AM 。
[Save Log Job] 2024-10-30 13:41:54.880 LOG.INFO UiEvent.cs Line:51 Event() - User admin login
--------------------------------[Header Log]----------------------------------------- [Save Log Job] 2024-10-30 13:56:41.262 LOG.INFO UiEvent.cs Line:58 Event() - 已经连接上设备实时控制系统
[Save Log Job] 2024-10-30 13:56:41.263 LOG.INFO UiEvent.cs Line:58 Event() - 已经连接上设备实时控制系统
[Save Log Job] 2024-10-30 13:56:42.597 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(System_IsMesMode, True)
[Save Log Job] 2024-10-30 13:56:42.597 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-10-30 13:56:46.053 LOG.INFO UiEvent.cs Line:51 Event() - Software will be expired in -6 days, at 10/24/2024 12:00:00 AM 。
[Save Log Job] 2024-10-30 13:56:50.470 LOG.INFO UiEvent.cs Line:51 Event() - User admin login
[Save Log Job] 2024-10-30 13:56:52.775 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetAutoMode()
[Save Log Job] 2024-10-30 13:56:52.775 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentModeChanged
[Save Log Job] 2024-10-30 13:56:52.776 LOG.INFO UiEvent.cs Line:51 Event() - System running mode changed to Auto Mode
[Save Log Job] 2024-10-30 13:56:55.082 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetManualMode()
[Save Log Job] 2024-10-30 13:56:55.083 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentModeChanged
[Save Log Job] 2024-10-30 13:56:55.083 LOG.INFO UiEvent.cs Line:51 Event() - System running mode changed to Manual Mode
--------------------------------[Header Log]----------------------------------------- [Save Log Job] 2024-10-30 13:59:27.121 LOG.INFO UiEvent.cs Line:58 Event() - 已经连接上设备实时控制系统
[Save Log Job] 2024-10-30 13:59:27.122 LOG.INFO UiEvent.cs Line:58 Event() - 已经连接上设备实时控制系统
[Save Log Job] 2024-10-30 13:59:28.477 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(System_IsMesMode, True)
[Save Log Job] 2024-10-30 13:59:28.477 LOG.INFO UiEvent.cs Line:50 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-10-30 13:59:32.112 LOG.INFO UiEvent.cs Line:51 Event() - Software will be expired in -6 days, at 10/24/2024 12:00:00 AM 。
[Save Log Job] 2024-10-30 13:59:36.342 LOG.INFO UiEvent.cs Line:51 Event() - User admin login
--------------------------------[Header Log]----------------------------------------- [Save Log Job] 2024-10-30 14:02:26.220 LOG.INFO UiEvent.cs Line:58 Event() - 已经连接上设备实时控制系统
[Save Log Job] 2024-10-30 14:02:26.221 LOG.INFO UiEvent.cs Line:58 Event() - 已经连接上设备实时控制系统
[Save Log Job] 2024-10-30 14:02:27.485 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-10-30 14:02:27.485 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(System_IsMesMode, True)
[Save Log Job] 2024-10-30 14:02:31.039 LOG.INFO UiEvent.cs Line:51 Event() - Software will be expired in -6 days, at 10/24/2024 12:00:00 AM 。
[Save Log Job] 2024-10-30 14:02:37.159 LOG.INFO UiEvent.cs Line:51 Event() - User admin login
--------------------------------[Header Log]----------------------------------------- [Save Log Job] 2024-10-30 14:11:05.641 LOG.INFO UiEvent.cs Line:57 Event() - 已经连接上设备实时控制系统
[Save Log Job] 2024-10-30 14:11:05.643 LOG.INFO UiEvent.cs Line:58 Event() - 已经连接上设备实时控制系统
[Save Log Job] 2024-10-30 14:11:06.922 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(System_IsMesMode, True)
[Save Log Job] 2024-10-30 14:11:07.279 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-10-30 14:11:10.890 LOG.INFO UiEvent.cs Line:51 Event() - Software will be expired in -6 days, at 10/24/2024 12:00:00 AM 。
[Save Log Job] 2024-10-30 14:11:12.401 LOG.INFO UiEvent.cs Line:51 Event() - User admin login
--------------------------------[Header Log]----------------------------------------- [Save Log Job] 2024-10-30 14:13:14.772 LOG.INFO UiEvent.cs Line:58 Event() - 已经连接上设备实时控制系统
[Save Log Job] 2024-10-30 14:13:16.163 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(System_IsMesMode, True)
[Save Log Job] 2024-10-30 14:13:16.298 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-10-30 14:13:19.908 LOG.INFO UiEvent.cs Line:51 Event() - Software will be expired in -6 days, at 10/24/2024 12:00:00 AM 。
[Save Log Job] 2024-10-30 14:13:21.210 LOG.INFO UiEvent.cs Line:51 Event() - User admin login
--------------------------------[Header Log]----------------------------------------- [Save Log Job] 2024-10-30 14:20:10.600 LOG.INFO UiEvent.cs Line:58 Event() - 已经连接上设备实时控制系统
[Save Log Job] 2024-10-30 14:20:10.601 LOG.INFO UiEvent.cs Line:57 Event() - 已经连接上设备实时控制系统
[Save Log Job] 2024-10-30 14:20:11.916 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(System_IsMesMode, True)
[Save Log Job] 2024-10-30 14:20:11.970 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-10-30 14:20:15.578 LOG.INFO UiEvent.cs Line:51 Event() - Software will be expired in -6 days, at 10/24/2024 12:00:00 AM 。
[Save Log Job] 2024-10-30 14:20:17.185 LOG.INFO UiEvent.cs Line:51 Event() - User admin login
--------------------------------[Header Log]----------------------------------------- [Save Log Job] 2024-10-30 14:42:03.245 LOG.INFO UiEvent.cs Line:58 Event() - 已经连接上设备实时控制系统
[Save Log Job] 2024-10-30 14:42:03.245 LOG.INFO UiEvent.cs Line:57 Event() - 已经连接上设备实时控制系统
[Save Log Job] 2024-10-30 14:42:04.640 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-10-30 14:42:04.640 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(System_IsMesMode, True)
[Save Log Job] 2024-10-30 14:42:08.303 LOG.INFO UiEvent.cs Line:51 Event() - Software will be expired in -6 days, at 10/24/2024 12:00:00 AM 。
[Save Log Job] 2024-10-30 14:42:09.919 LOG.INFO UiEvent.cs Line:51 Event() - User admin login
[Save Log Job] 2024-10-30 14:44:26.326 LOG.INFO UiEvent.cs Line:51 Event() - System PLC heart beat check failed，please confirm PLC still running
[Save Log Job] 2024-10-30 14:44:26.326 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
--------------------------------[Header Log]----------------------------------------- [Save Log Job] 2024-10-30 15:11:24.998 LOG.INFO UiEvent.cs Line:57 Event() - 已经连接上设备实时控制系统
[Save Log Job] 2024-10-30 15:11:25.001 LOG.INFO UiEvent.cs Line:58 Event() - 已经连接上设备实时控制系统
[Save Log Job] 2024-10-30 15:11:26.273 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-10-30 15:11:26.323 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(System_IsMesMode, True)
[Save Log Job] 2024-10-30 15:11:29.833 LOG.INFO UiEvent.cs Line:51 Event() - Software will be expired in -6 days, at 10/24/2024 12:00:00 AM 。
[Save Log Job] 2024-10-30 15:11:34.352 LOG.INFO UiEvent.cs Line:51 Event() - User admin login
[Save Log Job] 2024-10-30 15:11:40.477 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetAutoMode()
[Save Log Job] 2024-10-30 15:11:40.477 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentModeChanged
[Save Log Job] 2024-10-30 15:11:40.477 LOG.INFO UiEvent.cs Line:51 Event() - System running mode changed to Auto Mode
[Save Log Job] 2024-10-30 15:11:45.793 LOG.INFO UiEvent.cs Line:51 Event() - Operation RunRecipe(123, )
[Save Log Job] 2024-10-30 15:11:45.793 LOG.INFO UiEvent.cs Line:51 Event() - EventLotStart
[Save Log Job] 2024-10-30 15:11:45.893 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-10-30 15:11:45.893 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check door status。
[Save Log Job] 2024-10-30 15:11:45.893 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check chamber door。
[Save Log Job] 2024-10-30 15:11:45.894 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check backpanel door。
[Save Log Job] 2024-10-30 15:11:45.894 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check pump status。
[Save Log Job] 2024-10-30 15:11:45.894 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Close all the valves。
[Save Log Job] 2024-10-30 15:11:45.994 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Open pumping valve。
[Save Log Job] 2024-10-30 15:11:46.697 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check chamber pressure。
[Save Log Job] 2024-10-30 15:12:21.662 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Pump below 100mTorr。
[Save Log Job] 2024-10-30 15:12:21.662 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：PreProcess Finished in 0.6 minitues。
[Save Log Job] 2024-10-30 15:12:21.664 LOG.INFO UiEvent.cs Line:51 Event() - System recipe start run'20241030151145-123'
[Save Log Job] 2024-10-30 15:12:21.664 LOG.INFO UiEvent.cs Line:51 Event() - System complete run 'PreProcess'.
[Save Log Job] 2024-10-30 15:12:21.664 LOG.INFO UiEvent.cs Line:51 Event() - Run Recipe 20241030151145-123
[Save Log Job] 2024-10-30 15:12:21.764 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。
[Save Log Job] 2024-10-30 15:12:21.764 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。
[Save Log Job] 2024-10-30 15:12:21.764 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241030151145-123' start run step 1：initial。
[Save Log Job] 2024-10-30 15:12:21.764 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。
[Save Log Job] 2024-10-30 15:12:21.764 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。
[Save Log Job] 2024-10-30 15:12:21.764 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。
[Save Log Job] 2024-10-30 15:12:21.764 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。
[Save Log Job] 2024-10-30 15:12:21.764 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPower，RF set Power:0。
[Save Log Job] 2024-10-30 15:12:21.764 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。
[Save Log Job] 2024-10-30 15:12:21.765 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。
[Save Log Job] 2024-10-30 15:12:21.765 LOG.INFO UiEvent.cs Line:51 Event() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。
[Save Log Job] 2024-10-30 15:12:21.765 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。
[Save Log Job] 2024-10-30 15:12:21.765 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas1， ramp to 45sccm。
[Save Log Job] 2024-10-30 15:12:21.765 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas3， ramp to 66sccm。
[Save Log Job] 2024-10-30 15:12:21.765 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas4， ramp to 76sccm。
[Save Log Job] 2024-10-30 15:12:21.765 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas2， ramp to 56sccm。
[Save Log Job] 2024-10-30 15:12:21.766 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas5， ramp to 86sccm。
[Save Log Job] 2024-10-30 15:12:21.766 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPowerOnOff，Set RF power Off。
[Save Log Job] 2024-10-30 15:12:21.767 LOG.INFO UiEvent.cs Line:51 Event() - Start monitor pressure stability
[Save Log Job] 2024-10-30 15:12:51.765 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241030151145-123' end step 1
[Save Log Job] 2024-10-30 15:12:51.864 LOG.INFO UiEvent.cs Line:51 Event() - Stop monitor pressure stability
[Save Log Job] 2024-10-30 15:12:51.864 LOG.INFO UiEvent.cs Line:51 Event() - System Recipe run completed，Recipe：20241030151145-123
Start time：2024/10/30 15:12:21
End time：2024/10/30 15:12:51
Total time：0:0:30
[Save Log Job] 2024-10-30 15:12:51.864 LOG.INFO UiEvent.cs Line:51 Event() - System Recipe completely run
[Save Log Job] 2024-10-30 15:12:51.865 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, wait for 10 seconds
[Save Log Job] 2024-10-30 15:12:53.871 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC1 ValveClose失败，原因：Valve keep open。
[Save Log Job] 2024-10-30 15:12:53.871 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC2 ValveClose失败，原因：Valve keep open。
[Save Log Job] 2024-10-30 15:12:53.871 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC3 ValveClose失败，原因：Valve keep open。
[Save Log Job] 2024-10-30 15:12:53.872 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC4 ValveClose失败，原因：Valve keep open。
[Save Log Job] 2024-10-30 15:12:53.872 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC5 ValveClose失败，原因：Valve keep open。
[Save Log Job] 2024-10-30 15:12:53.873 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门Process gas final valveClose失败，原因：Valve keep open。
[Save Log Job] 2024-10-30 15:13:01.997 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, RF Power Off
[Save Log Job] 2024-10-30 15:13:01.999 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, Stop all the gas flow
[Save Log Job] 2024-10-30 15:13:07.719 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, Close all the valves
[Save Log Job] 2024-10-30 15:13:07.820 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, close pump valve
[Save Log Job] 2024-10-30 15:13:09.831 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门Chamber pumping valveClose失败，原因：Valve keep open。
[Save Log Job] 2024-10-30 15:13:11.237 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, delay 3 seconds
[Save Log Job] 2024-10-30 15:13:14.350 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, vent 50 seconds
[Save Log Job] 2024-10-30 15:14:04.437 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, Close vent valve
--------------------------------[Header Log]----------------------------------------- [Save Log Job] 2024-10-30 15:22:13.728 LOG.INFO UiEvent.cs Line:58 Event() - 已经连接上设备实时控制系统
[Save Log Job] 2024-10-30 15:22:15.038 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(System_IsMesMode, True)
[Save Log Job] 2024-10-30 15:22:15.294 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-10-30 15:22:19.005 LOG.INFO UiEvent.cs Line:51 Event() - Software will be expired in -6 days, at 10/24/2024 12:00:00 AM 。
[Save Log Job] 2024-10-30 15:22:21.814 LOG.INFO UiEvent.cs Line:51 Event() - User admin login
[Save Log Job] 2024-10-30 15:22:32.549 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetAutoMode()
[Save Log Job] 2024-10-30 15:22:32.549 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentModeChanged
[Save Log Job] 2024-10-30 15:22:32.549 LOG.INFO UiEvent.cs Line:51 Event() - System running mode changed to Auto Mode
[Save Log Job] 2024-10-30 15:24:58.202 LOG.INFO UiEvent.cs Line:51 Event() - Operation RunRecipe(123, )
[Save Log Job] 2024-10-30 15:24:58.202 LOG.INFO UiEvent.cs Line:51 Event() - EventLotStart
[Save Log Job] 2024-10-30 15:24:58.203 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-10-30 15:24:58.303 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check door status。
[Save Log Job] 2024-10-30 15:24:58.303 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check chamber door。
[Save Log Job] 2024-10-30 15:24:58.303 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：check backpanel door。
[Save Log Job] 2024-10-30 15:24:58.304 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check pump status。
[Save Log Job] 2024-10-30 15:24:58.304 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Close all the valves。
[Save Log Job] 2024-10-30 15:24:58.304 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Open pumping valve。
[Save Log Job] 2024-10-30 15:25:00.312 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门Chamber pumping valveOpen失败，原因：Valve keep closed 。
[Save Log Job] 2024-10-30 15:25:01.818 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Check chamber pressure。
[Save Log Job] 2024-10-30 15:25:36.794 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：Pump below 100mTorr。
[Save Log Job] 2024-10-30 15:25:36.794 LOG.INFO UiEvent.cs Line:51 Event() - System Prepare for running recipe：PreProcess Finished in 0.6 minitues。
[Save Log Job] 2024-10-30 15:25:36.795 LOG.INFO UiEvent.cs Line:51 Event() - System complete run 'PreProcess'.
[Save Log Job] 2024-10-30 15:25:36.795 LOG.INFO UiEvent.cs Line:51 Event() - Run Recipe 20241030152458-123
[Save Log Job] 2024-10-30 15:25:36.795 LOG.INFO UiEvent.cs Line:51 Event() - System recipe start run'20241030152458-123'
[Save Log Job] 2024-10-30 15:25:36.896 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241030152458-123' start run step 1：initial。
[Save Log Job] 2024-10-30 15:25:36.896 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。
[Save Log Job] 2024-10-30 15:25:36.896 LOG.INFO UiEvent.cs Line:51 Event() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。
[Save Log Job] 2024-10-30 15:25:36.897 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。
[Save Log Job] 2024-10-30 15:25:36.897 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。
[Save Log Job] 2024-10-30 15:25:36.897 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。
[Save Log Job] 2024-10-30 15:25:36.898 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。
[Save Log Job] 2024-10-30 15:25:36.898 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。
[Save Log Job] 2024-10-30 15:25:36.898 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPower，RF set Power:0。
[Save Log Job] 2024-10-30 15:25:36.899 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。
[Save Log Job] 2024-10-30 15:25:36.899 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。
[Save Log Job] 2024-10-30 15:25:36.900 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。
[Save Log Job] 2024-10-30 15:25:36.900 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas1， ramp to 45sccm。
[Save Log Job] 2024-10-30 15:25:36.901 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas2， ramp to 56sccm。
[Save Log Job] 2024-10-30 15:25:36.901 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas3， ramp to 66sccm。
[Save Log Job] 2024-10-30 15:25:36.901 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas4， ramp to 76sccm。
[Save Log Job] 2024-10-30 15:25:36.902 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：MfcGas5， ramp to 86sccm。
[Save Log Job] 2024-10-30 15:25:36.902 LOG.INFO UiEvent.cs Line:51 Event() - Device Execute：Rf.SetPowerOnOff，Set RF power Off。
[Save Log Job] 2024-10-30 15:25:36.902 LOG.INFO UiEvent.cs Line:51 Event() - Start monitor pressure stability
[Save Log Job] 2024-10-30 15:26:06.990 LOG.INFO UiEvent.cs Line:51 Event() - System recipe'20241030152458-123' end step 1
[Save Log Job] 2024-10-30 15:26:06.990 LOG.INFO UiEvent.cs Line:51 Event() - Stop monitor pressure stability
[Save Log Job] 2024-10-30 15:26:06.990 LOG.INFO UiEvent.cs Line:51 Event() - System Recipe run completed，Recipe：20241030152458-123
Start time：2024/10/30 15:25:36
End time：2024/10/30 15:26:06
Total time：0:0:30
[Save Log Job] 2024-10-30 15:26:06.992 LOG.INFO UiEvent.cs Line:51 Event() - System Recipe completely run
[Save Log Job] 2024-10-30 15:26:06.992 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, wait for 10 seconds
[Save Log Job] 2024-10-30 15:26:08.996 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC1 ValveClose失败，原因：Valve keep open。
[Save Log Job] 2024-10-30 15:26:08.996 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC2 ValveClose失败，原因：Valve keep open。
[Save Log Job] 2024-10-30 15:26:08.996 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC3 ValveClose失败，原因：Valve keep open。
[Save Log Job] 2024-10-30 15:26:08.996 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC4 ValveClose失败，原因：Valve keep open。
[Save Log Job] 2024-10-30 15:26:08.997 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门MFC5 ValveClose失败，原因：Valve keep open。
[Save Log Job] 2024-10-30 15:26:08.997 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门Process gas final valveClose失败，原因：Valve keep open。
[Save Log Job] 2024-10-30 15:26:17.042 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, RF Power Off
[Save Log Job] 2024-10-30 15:26:17.141 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, Stop all the gas flow
[Save Log Job] 2024-10-30 15:26:22.869 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, Close all the valves
[Save Log Job] 2024-10-30 15:26:22.967 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, close pump valve
[Save Log Job] 2024-10-30 15:26:24.983 LOG.INFO UiEvent.cs Line:51 Event() - System 阀门Chamber pumping valveClose失败，原因：Valve keep open。
[Save Log Job] 2024-10-30 15:26:26.395 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, delay 3 seconds
[Save Log Job] 2024-10-30 15:26:29.509 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, vent 50 seconds
[Save Log Job] 2024-10-30 15:27:19.653 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, Close vent valve
[Save Log Job] 2024-10-30 15:27:23.645 LOG.INFO UiEvent.cs Line:51 Event() - System recipe after running, PostProcess Finished in 1.2 minitues
[Save Log Job] 2024-10-30 15:27:24.093 LOG.INFO UiEvent.cs Line:51 Event() - System complete run 'PostProcess'.
[Save Log Job] 2024-10-30 15:27:46.955 LOG.INFO UiEvent.cs Line:51 Event() - EventLotFinished
[Save Log Job] 2024-10-30 15:27:46.958 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-10-30 15:27:49.012 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
--------------------------------[Header Log]----------------------------------------- [Save Log Job] 2024-10-30 15:34:30.983 LOG.INFO UiEvent.cs Line:58 Event() - 已经连接上设备实时控制系统
[Save Log Job] 2024-10-30 15:34:30.983 LOG.INFO UiEvent.cs Line:57 Event() - 已经连接上设备实时控制系统
[Save Log Job] 2024-10-30 15:34:32.263 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(System_IsMesMode, True)
[Save Log Job] 2024-10-30 15:34:32.263 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-10-30 15:34:35.928 LOG.INFO UiEvent.cs Line:51 Event() - Software will be expired in -6 days, at 10/24/2024 12:00:00 AM 。
[Save Log Job] 2024-10-30 15:34:38.235 LOG.INFO UiEvent.cs Line:51 Event() - User admin login
[Save Log Job] 2024-10-30 15:34:50.780 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetAutoMode()
[Save Log Job] 2024-10-30 15:34:50.780 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentModeChanged
[Save Log Job] 2024-10-30 15:34:50.780 LOG.INFO UiEvent.cs Line:51 Event() - System running mode changed to Auto Mode
--------------------------------[Footer Log]----------------------------------------- --------------------------------[Header Log]----------------------------------------- [Save Log Job] 2024-10-30 17:33:06.195 LOG.INFO UiEvent.cs Line:57 Event() - 已经连接上设备实时控制系统
[Save Log Job] 2024-10-30 17:33:06.195 LOG.INFO UiEvent.cs Line:58 Event() - 已经连接上设备实时控制系统
[Save Log Job] 2024-10-30 17:33:07.454 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-10-30 17:33:07.580 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(System_IsMesMode, True)
--------------------------------[Header Log]----------------------------------------- [Save Log Job] 2024-10-30 17:33:43.720 LOG.INFO UiEvent.cs Line:58 Event() - 已经连接上设备实时控制系统
[Save Log Job] 2024-10-30 17:33:43.721 LOG.INFO UiEvent.cs Line:57 Event() - 已经连接上设备实时控制系统
[Save Log Job] 2024-10-30 17:33:45.048 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-10-30 17:33:45.178 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(System_IsMesMode, True)
[Save Log Job] 2024-10-30 17:33:48.511 LOG.INFO UiEvent.cs Line:51 Event() - Software will be expired in -6 days, at 10/24/2024 12:00:00 AM 。
[Save Log Job] 2024-10-30 17:33:52.943 LOG.INFO UiEvent.cs Line:51 Event() - User admin login
[Save Log Job] 2024-10-30 17:34:27.772 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetAutoMode()
[Save Log Job] 2024-10-30 17:34:27.773 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentModeChanged
[Save Log Job] 2024-10-30 17:34:27.774 LOG.INFO UiEvent.cs Line:51 Event() - System running mode changed to Auto Mode
--------------------------------[Footer Log]----------------------------------------- --------------------------------[Header Log]----------------------------------------- [Save Log Job] 2024-10-30 17:36:04.282 LOG.INFO UiEvent.cs Line:57 Event() - 已经连接上设备实时控制系统
[Save Log Job] 2024-10-30 17:36:04.283 LOG.INFO UiEvent.cs Line:58 Event() - 已经连接上设备实时控制系统
[Save Log Job] 2024-10-30 17:36:05.741 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentStatusChanged
[Save Log Job] 2024-10-30 17:36:06.175 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetConfig(System_IsMesMode, True)
[Save Log Job] 2024-10-30 17:36:09.286 LOG.INFO UiEvent.cs Line:51 Event() - Software will be expired in -6 days, at 10/24/2024 12:00:00 AM 。
[Save Log Job] 2024-10-30 17:36:13.357 LOG.INFO UiEvent.cs Line:51 Event() - User admin login
[Save Log Job] 2024-10-30 17:36:16.625 LOG.INFO UiEvent.cs Line:51 Event() - Operation SetAutoMode()
[Save Log Job] 2024-10-30 17:36:16.626 LOG.INFO UiEvent.cs Line:51 Event() - EventEquipmentModeChanged
[Save Log Job] 2024-10-30 17:36:16.626 LOG.INFO UiEvent.cs Line:51 Event() - System running mode changed to Auto Mode
--------------------------------[Footer Log]-----------------------------------------