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- <== [Save Log Job] 2024-12-26 08:57:55.915 LOG.INFO LOG.cs Line:61 Write() - 完成对数据库表格的更新操作
- [Save Log Job] 2024-12-26 08:57:56.740 LOG.INFO EventService.cs Line:60 Register() - 客户端4bde1808-a4cd-48e0-b739-8ecf38907e11已连接
- [Save Log Job] 2024-12-26 08:57:56.741 LOG.INFO EventService.cs Line:60 Register() - 客户端4bde1808-a4cd-48e0-b739-8ecf38907e11已连接
- [Save Log Job] 2024-12-26 08:57:57.016 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, <IoSensor id="SensorBackPanelDoor" display="" schematicId="" unit="" di="DI_back_panle_door_sw" isLowAsNormal="false" infoText="BackPanel door is opened" warningText="" alarmText="" />
- [Save Log Job] 2024-12-26 08:57:57.016 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, <IoSensor id="SensorPumpDoor" display="" schematicId="" unit="" di="DI_pump_door_sw" isLowAsNormal="false" infoText="" warningText="" alarmText="" />
- [Save Log Job] 2024-12-26 08:57:57.090 LOG.INFO LOG.cs Line:61 Write() - Routine System 初始化 Start
- [Save Log Job] 2024-12-26 08:57:58.176 LOG.INFO YZQZFabAuto.cs Line:117 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle
- [Save Log Job] 2024-12-26 08:57:58.180 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle
- [Save Log Job] 2024-12-26 08:57:58.298 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle
- [Save Log Job] 2024-12-26 08:57:58.322 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
- [Save Log Job] 2024-12-26 08:57:58.346 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle
- [Save Log Job] 2024-12-26 08:57:59.323 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetConfig(System_IsMesMode, True)
- [Save Log Job] 2024-12-26 08:58:02.099 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Software will be expired in -63 days, at 10/24/2024 12:00:00 AM 。
- [Save Log Job] 2024-12-26 08:58:16.547 LOG.INFO LOG.cs Line:61 Write() - 用户admin尝试登录系统
- [Save Log Job] 2024-12-26 08:58:16.548 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin
- [Save Log Job] 2024-12-26 08:58:16.563 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - User admin login
- [Save Log Job] 2024-12-26 08:58:16.699 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin
- [Save Log Job] 2024-12-26 08:58:19.258 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
- [Save Log Job] 2024-12-26 08:58:19.306 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
- [Save Log Job] 2024-12-26 08:58:19.364 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
- <== [Save Log Job] 2024-12-26 09:43:32.196 LOG.INFO LOG.cs Line:61 Write() - 完成对数据库表格的更新操作
- [Save Log Job] 2024-12-26 09:43:33.220 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, <IoSensor id="SensorBackPanelDoor" display="" schematicId="" unit="" di="DI_back_panle_door_sw" isLowAsNormal="false" infoText="BackPanel door is opened" warningText="" alarmText="" />
- [Save Log Job] 2024-12-26 09:43:33.221 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, <IoSensor id="SensorPumpDoor" display="" schematicId="" unit="" di="DI_pump_door_sw" isLowAsNormal="false" infoText="" warningText="" alarmText="" />
- [Save Log Job] 2024-12-26 09:43:33.276 LOG.INFO LOG.cs Line:61 Write() - Routine System 初始化 Start
- [Save Log Job] 2024-12-26 09:43:33.393 LOG.INFO EventService.cs Line:60 Register() - 客户端1e5be2ed-7244-491c-8cc7-0e98b05eddc2已连接
- [Save Log Job] 2024-12-26 09:43:33.393 LOG.INFO EventService.cs Line:60 Register() - 客户端1e5be2ed-7244-491c-8cc7-0e98b05eddc2已连接
- [Save Log Job] 2024-12-26 09:43:34.272 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle
- [Save Log Job] 2024-12-26 09:43:34.328 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle
- [Save Log Job] 2024-12-26 09:43:34.512 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle
- [Save Log Job] 2024-12-26 09:43:34.556 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle
- [Save Log Job] 2024-12-26 09:43:34.704 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
- [Save Log Job] 2024-12-26 09:43:34.884 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetConfig(System_IsMesMode, True)
- [Save Log Job] 2024-12-26 09:43:38.290 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Software will be expired in -63 days, at 10/24/2024 12:00:00 AM 。
- [Save Log Job] 2024-12-26 09:43:44.832 LOG.INFO LOG.cs Line:61 Write() - 用户admin尝试登录系统
- [Save Log Job] 2024-12-26 09:43:44.833 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin
- [Save Log Job] 2024-12-26 09:43:44.845 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - User admin login
- [Save Log Job] 2024-12-26 09:43:44.984 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin
- [Save Log Job] 2024-12-26 09:43:53.409 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetAutoMode()
- [Save Log Job] 2024-12-26 09:43:53.410 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentModeChanged
- [Save Log Job] 2024-12-26 09:43:53.410 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System running mode changed to Auto Mode
- [Save Log Job] 2024-12-26 09:43:55.325 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
- [Save Log Job] 2024-12-26 09:43:55.337 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
- [Save Log Job] 2024-12-26 09:43:55.520 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
- [Save Log Job] 2024-12-26 09:43:55.566 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
- [Save Log Job] 2024-12-26 09:43:56.530 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation RunRecipe(CACB, , , )
- [Save Log Job] 2024-12-26 09:43:56.562 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|LoadProcessRecipe
- [Save Log Job] 2024-12-26 09:43:56.564 LOG.INFO LOG.cs Line:61 Write() - System通知TM保存工艺程序20241226094356-CACB
- [Save Log Job] 2024-12-26 09:43:56.564 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventLotStart
- [Save Log Job] 2024-12-26 09:43:56.567 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|PreProcess
- [Save Log Job] 2024-12-26 09:43:56.567 LOG.INFO YZQZFabAuto.cs Line:165 StartJobRecord() - StartJobRecord|start||CACB
- [Save Log Job] 2024-12-26 09:43:56.568 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
- [Save Log Job] 2024-12-26 09:43:56.571 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
- [Save Log Job] 2024-12-26 09:43:56.579 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
- [Save Log Job] 2024-12-26 09:43:56.622 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe:Check door status。
- [Save Log Job] 2024-12-26 09:43:56.622 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe:check chamber door。
- [Save Log Job] 2024-12-26 09:43:56.622 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe:check backpanel door。
- [Save Log Job] 2024-12-26 09:43:56.623 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe:Check pump status。
- [Save Log Job] 2024-12-26 09:43:56.624 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe:Close all the valves。
- [Save Log Job] 2024-12-26 09:43:56.683 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe:Open pumping valve。
- [Save Log Job] 2024-12-26 09:43:58.728 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门Chamber pumping valveOpen失败,原因:Valve keep closed 。
- [Save Log Job] 2024-12-26 09:43:58.946 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe:Check chamber pressure。
- [Save Log Job] 2024-12-26 09:44:04.343 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation AbortRecipe()
- [Save Log Job] 2024-12-26 09:44:27.173 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
- [Save Log Job] 2024-12-26 09:44:30.991 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
- [Save Log Job] 2024-12-26 09:44:30.993 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
- [Save Log Job] 2024-12-26 09:50:01.310 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
- [Save Log Job] 2024-12-26 09:50:01.313 LOG.ERROR EventLogWriter.cs Line:14 WriteEvent() - System PLC heart beat check failed,please confirm PLC still running
- [Save Log Job] 2024-12-26 09:50:02.235 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Stop pump:Check if the rf is on。
- [Save Log Job] 2024-12-26 09:50:02.243 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle
- [Save Log Job] 2024-12-26 09:50:02.244 LOG.INFO YZQZFabAuto.cs Line:212 EndJobRecord() - EndJobRecord|
- [Save Log Job] 2024-12-26 09:50:02.244 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
- [Save Log Job] 2024-12-26 09:50:02.272 LOG.INFO YZQZFabAuto.cs Line:243 Export2CsvLocalFile() - Export2CsvLocalFileD:\jet.plasma\trunk\Triton160\Triton160RT\bin\Debug\Logs\.csv
- [Save Log Job] 2024-12-26 09:50:02.275 LOG.INFO YZQZFabAuto.cs Line:291 Export2CsvWanPanFile() - Export2CsvWanPanFile\\192.168.1.208\CHIP_LoaderPath\JetplasmaDaJiao\SourceFolder\.csv
- [Save Log Job] 2024-12-26 09:50:02.353 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
- [Save Log Job] 2024-12-26 09:50:12.667 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
- [Save Log Job] 2024-12-26 09:50:21.767 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation RunRecipe(CACB, , , )
- [Save Log Job] 2024-12-26 09:50:21.770 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|LoadProcessRecipe
- [Save Log Job] 2024-12-26 09:50:21.770 LOG.INFO LOG.cs Line:61 Write() - System通知TM保存工艺程序20241226095021-CACB
- [Save Log Job] 2024-12-26 09:50:21.770 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventLotStart
- [Save Log Job] 2024-12-26 09:50:21.770 LOG.INFO YZQZFabAuto.cs Line:165 StartJobRecord() - StartJobRecord|start||CACB
- [Save Log Job] 2024-12-26 09:50:21.770 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|PreProcess
- [Save Log Job] 2024-12-26 09:50:21.770 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
- [Save Log Job] 2024-12-26 09:50:21.773 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
- [Save Log Job] 2024-12-26 09:50:21.820 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe:Check door status。
- [Save Log Job] 2024-12-26 09:50:21.820 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe:check chamber door。
- [Save Log Job] 2024-12-26 09:50:21.820 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe:check backpanel door。
- [Save Log Job] 2024-12-26 09:50:21.820 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe:Check pump status。
- [Save Log Job] 2024-12-26 09:50:21.821 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe:Close all the valves。
- [Save Log Job] 2024-12-26 09:50:21.877 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe:Open pumping valve。
- [Save Log Job] 2024-12-26 09:50:21.893 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
- [Save Log Job] 2024-12-26 09:50:21.934 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe:Check chamber pressure。
- [Save Log Job] 2024-12-26 09:50:23.250 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
- [Save Log Job] 2024-12-26 09:50:28.803 LOG.INFO YZQZFabAuto.cs Line:327 Export2CsvWanPanFile() - 找不到网络路径。
- [Save Log Job] 2024-12-26 09:50:41.496 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe:Pump below 100mTorr。
- [Save Log Job] 2024-12-26 09:50:41.554 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe:PreProcess Finished in 0.3 minitues。
- [Save Log Job] 2024-12-26 09:50:41.554 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System complete run ''PreProcess''.
- [Save Log Job] 2024-12-26 09:50:41.560 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Run Recipe 20241226095021-CACB
- [Save Log Job] 2024-12-26 09:50:41.560 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe start run''20241226095021-CACB''
- [Save Log Job] 2024-12-26 09:50:41.561 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Processing
- [Save Log Job] 2024-12-26 09:50:41.613 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe''20241226095021-CACB'' start run step 1:initial。
- [Save Log Job] 2024-12-26 09:50:41.614 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute:PressureControl.SetTVMode,TV mode set to TVPressureCtrl。
- [Save Log Job] 2024-12-26 09:50:41.614 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。
- [Save Log Job] 2024-12-26 09:50:41.615 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute:PressureControl.SetTVPressure,TV pressure set to 50 mtorr。
- [Save Log Job] 2024-12-26 09:50:41.615 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute:PressureControl.SetBoostPressure,Boost pump pressure set to 100 mTorr。
- [Save Log Job] 2024-12-26 09:50:41.616 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute:Rf.SetMode,Set RF work mode to ContinuousWaveMode。
- [Save Log Job] 2024-12-26 09:50:41.616 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute:Rf.SetPulsingFrequency,RF set Frequency:0。
- [Save Log Job] 2024-12-26 09:50:41.616 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute:Rf.SetPulsingDuty,RF set Duty:0 。
- [Save Log Job] 2024-12-26 09:50:41.616 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute:Rf.SetPower,RF set Power:0。
- [Save Log Job] 2024-12-26 09:50:41.617 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute:Rf.SetMatchProcessMode,Match mode set to PresetMode。
- [Save Log Job] 2024-12-26 09:50:41.617 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute:Rf.SetMatchPositionC1,Set RF match position c1 :50。
- [Save Log Job] 2024-12-26 09:50:41.617 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute:Rf.SetMatchPositionC2,Set RF match position c2 :50。
- [Save Log Job] 2024-12-26 09:50:41.617 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute:MfcGas1, ramp to 45sccm。
- [Save Log Job] 2024-12-26 09:50:41.618 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute:MfcGas2, ramp to 56sccm。
- [Save Log Job] 2024-12-26 09:50:41.618 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute:MfcGas3, ramp to 66sccm。
- [Save Log Job] 2024-12-26 09:50:41.618 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute:MfcGas4, ramp to 76sccm。
- [Save Log Job] 2024-12-26 09:50:41.618 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute:MfcGas5, ramp to 86sccm。
- [Save Log Job] 2024-12-26 09:50:41.618 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute:Rf.SetPowerOnOff,Set RF power Off。
- [Save Log Job] 2024-12-26 09:50:41.668 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Start monitor pressure stability
- [Save Log Job] 2024-12-26 09:50:42.779 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
- [Save Log Job] 2024-12-26 09:50:42.784 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
- [Save Log Job] 2024-12-26 09:50:51.777 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
- <== [Save Log Job] 2024-12-26 09:52:27.020 LOG.INFO LOG.cs Line:61 Write() - 完成对数据库表格的更新操作
- [Save Log Job] 2024-12-26 09:52:27.805 LOG.INFO EventService.cs Line:60 Register() - 客户端522ff4da-e62f-4aee-8f55-416eeaa08e4f已连接
- [Save Log Job] 2024-12-26 09:52:27.954 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, <IoSensor id="SensorBackPanelDoor" display="" schematicId="" unit="" di="DI_back_panle_door_sw" isLowAsNormal="false" infoText="BackPanel door is opened" warningText="" alarmText="" />
- [Save Log Job] 2024-12-26 09:52:27.955 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, <IoSensor id="SensorPumpDoor" display="" schematicId="" unit="" di="DI_pump_door_sw" isLowAsNormal="false" infoText="" warningText="" alarmText="" />
- [Save Log Job] 2024-12-26 09:52:28.027 LOG.INFO LOG.cs Line:61 Write() - Routine System 初始化 Start
- [Save Log Job] 2024-12-26 09:52:29.021 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle
- [Save Log Job] 2024-12-26 09:52:29.087 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle
- [Save Log Job] 2024-12-26 09:52:29.244 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetConfig(System_IsMesMode, True)
- [Save Log Job] 2024-12-26 09:52:29.253 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle
- [Save Log Job] 2024-12-26 09:52:29.281 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
- [Save Log Job] 2024-12-26 09:52:29.308 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle
- <== [Save Log Job] 2024-12-26 09:53:23.380 LOG.INFO LOG.cs Line:61 Write() - 完成对数据库表格的更新操作
- [Save Log Job] 2024-12-26 09:53:24.240 LOG.INFO EventService.cs Line:60 Register() - 客户端9f06e823-37fc-4ad6-a1b4-b482173e76ee已连接
- [Save Log Job] 2024-12-26 09:53:24.438 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, <IoSensor id="SensorBackPanelDoor" display="" schematicId="" unit="" di="DI_back_panle_door_sw" isLowAsNormal="false" infoText="BackPanel door is opened" warningText="" alarmText="" />
- [Save Log Job] 2024-12-26 09:53:24.441 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, <IoSensor id="SensorPumpDoor" display="" schematicId="" unit="" di="DI_pump_door_sw" isLowAsNormal="false" infoText="" warningText="" alarmText="" />
- [Save Log Job] 2024-12-26 09:53:24.492 LOG.INFO LOG.cs Line:61 Write() - Routine System 初始化 Start
- [Save Log Job] 2024-12-26 09:53:25.472 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle
- [Save Log Job] 2024-12-26 09:53:25.527 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle
- [Save Log Job] 2024-12-26 09:53:25.637 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetConfig(System_IsMesMode, True)
- [Save Log Job] 2024-12-26 09:53:25.694 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle
- [Save Log Job] 2024-12-26 09:53:25.701 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
- [Save Log Job] 2024-12-26 09:53:25.743 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle
- [Save Log Job] 2024-12-26 09:53:29.502 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Software will be expired in -63 days, at 10/24/2024 12:00:00 AM 。
- [Save Log Job] 2024-12-26 09:53:34.499 LOG.INFO LOG.cs Line:61 Write() - 用户admin尝试登录系统
- [Save Log Job] 2024-12-26 09:53:34.500 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin
- [Save Log Job] 2024-12-26 09:53:34.505 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - User admin login
- [Save Log Job] 2024-12-26 09:53:34.638 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin
- [Save Log Job] 2024-12-26 09:53:46.523 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
- [Save Log Job] 2024-12-26 09:53:46.540 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
- [Save Log Job] 2024-12-26 09:53:46.702 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
- [Save Log Job] 2024-12-26 09:53:46.754 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
- [Save Log Job] 2024-12-26 09:53:47.509 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetAutoMode()
- [Save Log Job] 2024-12-26 09:53:47.511 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentModeChanged
- [Save Log Job] 2024-12-26 09:53:47.511 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System running mode changed to Auto Mode
- [Save Log Job] 2024-12-26 09:53:49.574 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation RunRecipe(CACB, , , )
- [Save Log Job] 2024-12-26 09:53:49.594 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|LoadProcessRecipe
- [Save Log Job] 2024-12-26 09:53:49.597 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
- [Save Log Job] 2024-12-26 09:53:49.598 LOG.INFO LOG.cs Line:61 Write() - System通知TM保存工艺程序20241226095349-CACB
- [Save Log Job] 2024-12-26 09:53:49.598 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventLotStart
- [Save Log Job] 2024-12-26 09:53:49.599 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|PreProcess
- [Save Log Job] 2024-12-26 09:53:49.600 LOG.INFO YZQZFabAuto.cs Line:165 StartJobRecord() - StartJobRecord|start||CACB
- [Save Log Job] 2024-12-26 09:53:49.600 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
- [Save Log Job] 2024-12-26 09:53:49.604 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
- [Save Log Job] 2024-12-26 09:53:49.653 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe:Check door status。
- [Save Log Job] 2024-12-26 09:53:49.654 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe:check chamber door。
- [Save Log Job] 2024-12-26 09:53:49.654 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe:check backpanel door。
- [Save Log Job] 2024-12-26 09:53:49.655 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe:Check pump status。
- [Save Log Job] 2024-12-26 09:53:49.656 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe:Close all the valves。
- [Save Log Job] 2024-12-26 09:53:49.716 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe:Open pumping valve。
- [Save Log Job] 2024-12-26 09:53:50.171 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe:Check chamber pressure。
- [Save Log Job] 2024-12-26 09:53:56.561 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation AbortRecipe()
- [Save Log Job] 2024-12-26 09:54:12.984 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
- [Save Log Job] 2024-12-26 09:54:12.989 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
- [Save Log Job] 2024-12-26 09:54:19.628 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
- [Save Log Job] 2024-12-26 09:54:49.761 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
- [Save Log Job] 2024-12-26 09:55:00.818 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门Chamber pumping valveClose失败,原因:Valve keep open。
- [Save Log Job] 2024-12-26 09:55:00.819 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Stop pump:Check if the rf is on。
- [Save Log Job] 2024-12-26 09:55:00.828 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle
- [Save Log Job] 2024-12-26 09:55:01.020 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
- [Save Log Job] 2024-12-26 09:55:19.767 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
- [Save Log Job] 2024-12-26 09:55:21.836 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
- [Save Log Job] 2024-12-26 09:55:31.981 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation RunRecipe(CACB, , , )
- [Save Log Job] 2024-12-26 09:55:31.983 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|LoadProcessRecipe
- [Save Log Job] 2024-12-26 09:55:31.983 LOG.INFO LOG.cs Line:61 Write() - System通知TM保存工艺程序20241226095531-CACB
- [Save Log Job] 2024-12-26 09:55:31.983 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventLotStart
- [Save Log Job] 2024-12-26 09:55:31.984 LOG.INFO YZQZFabAuto.cs Line:165 StartJobRecord() - StartJobRecord|start||CACB
- [Save Log Job] 2024-12-26 09:55:31.984 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|PreProcess
- [Save Log Job] 2024-12-26 09:55:32.034 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe:Check door status。
- [Save Log Job] 2024-12-26 09:55:32.034 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe:check chamber door。
- [Save Log Job] 2024-12-26 09:55:32.034 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe:check backpanel door。
- [Save Log Job] 2024-12-26 09:55:32.034 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe:Check pump status。
- [Save Log Job] 2024-12-26 09:55:32.034 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe:Close all the valves。
- [Save Log Job] 2024-12-26 09:55:32.090 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe:Open pumping valve。
- [Save Log Job] 2024-12-26 09:55:32.095 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
- [Save Log Job] 2024-12-26 09:55:34.130 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门Chamber pumping valveOpen失败,原因:Valve keep closed 。
- [Save Log Job] 2024-12-26 09:55:34.458 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe:Check chamber pressure。
- [Save Log Job] 2024-12-26 09:55:46.422 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe:Pump below 100mTorr。
- [Save Log Job] 2024-12-26 09:55:46.479 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe:PreProcess Finished in 0.2 minitues。
- [Save Log Job] 2024-12-26 09:55:46.479 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System complete run ''PreProcess''.
- [Save Log Job] 2024-12-26 09:55:46.481 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Run Recipe 20241226095531-CACB
- [Save Log Job] 2024-12-26 09:55:46.481 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe start run''20241226095531-CACB''
- [Save Log Job] 2024-12-26 09:55:46.482 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Processing
- [Save Log Job] 2024-12-26 09:55:46.535 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe''20241226095531-CACB'' start run step 1:initial。
- [Save Log Job] 2024-12-26 09:55:46.536 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute:PressureControl.SetTVMode,TV mode set to TVPressureCtrl。
- [Save Log Job] 2024-12-26 09:55:46.536 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。
- [Save Log Job] 2024-12-26 09:55:46.536 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute:PressureControl.SetTVPressure,TV pressure set to 50 mtorr。
- [Save Log Job] 2024-12-26 09:55:46.537 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute:PressureControl.SetBoostPressure,Boost pump pressure set to 100 mTorr。
- [Save Log Job] 2024-12-26 09:55:46.537 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute:Rf.SetMode,Set RF work mode to ContinuousWaveMode。
- [Save Log Job] 2024-12-26 09:55:46.537 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute:Rf.SetPulsingFrequency,RF set Frequency:0。
- [Save Log Job] 2024-12-26 09:55:46.537 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute:Rf.SetPulsingDuty,RF set Duty:0 。
- [Save Log Job] 2024-12-26 09:55:46.538 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute:Rf.SetPower,RF set Power:0。
- [Save Log Job] 2024-12-26 09:55:46.538 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute:Rf.SetMatchProcessMode,Match mode set to PresetMode。
- [Save Log Job] 2024-12-26 09:55:46.538 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute:Rf.SetMatchPositionC1,Set RF match position c1 :50。
- [Save Log Job] 2024-12-26 09:55:46.538 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute:Rf.SetMatchPositionC2,Set RF match position c2 :50。
- [Save Log Job] 2024-12-26 09:55:46.538 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute:MfcGas1, ramp to 45sccm。
- [Save Log Job] 2024-12-26 09:55:46.539 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute:MfcGas2, ramp to 56sccm。
- [Save Log Job] 2024-12-26 09:55:46.539 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute:MfcGas3, ramp to 66sccm。
- [Save Log Job] 2024-12-26 09:55:46.539 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute:MfcGas4, ramp to 76sccm。
- [Save Log Job] 2024-12-26 09:55:46.539 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute:MfcGas5, ramp to 86sccm。
- [Save Log Job] 2024-12-26 09:55:46.539 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute:Rf.SetPowerOnOff,Set RF power Off。
- [Save Log Job] 2024-12-26 09:55:46.590 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Start monitor pressure stability
- [Save Log Job] 2024-12-26 09:55:49.767 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
- [Save Log Job] 2024-12-26 09:55:50.561 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation AbortRecipe()
- [Save Log Job] 2024-12-26 09:55:57.416 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
- [Save Log Job] 2024-12-26 09:55:57.416 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
- [Save Log Job] 2024-12-26 09:56:05.446 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe was aborted: user aborted recipe
- [Save Log Job] 2024-12-26 09:56:06.121 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Stop pump:Check if the rf is on。
- [Save Log Job] 2024-12-26 09:56:06.132 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Stop monitor pressure stability
- [Save Log Job] 2024-12-26 09:56:06.132 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Recipe run completed,Recipe:20241226095531-CACB
- Start time:2024/12/26 09:55:46
- End time:2024/12/26 09:56:06
- Total time:0:0:19
- [Save Log Job] 2024-12-26 09:56:06.132 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Recipe completely run
- [Save Log Job] 2024-12-26 09:56:07.025 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|PostProcess
- [Save Log Job] 2024-12-26 09:56:07.077 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, wait for 10 seconds
- [Save Log Job] 2024-12-26 09:56:07.492 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
- [Save Log Job] 2024-12-26 09:56:09.054 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC1 ValveClose失败,原因:Valve keep open。
- [Save Log Job] 2024-12-26 09:56:09.054 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC2 ValveClose失败,原因:Valve keep open。
- [Save Log Job] 2024-12-26 09:56:09.056 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC3 ValveClose失败,原因:Valve keep open。
- [Save Log Job] 2024-12-26 09:56:09.056 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC4 ValveClose失败,原因:Valve keep open。
- [Save Log Job] 2024-12-26 09:56:09.056 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC5 ValveClose失败,原因:Valve keep open。
- [Save Log Job] 2024-12-26 09:56:17.161 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, RF Power Off
- [Save Log Job] 2024-12-26 09:56:17.219 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, Stop all the gas flow
- [Save Log Job] 2024-12-26 09:56:17.275 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, Close all the valves
- [Save Log Job] 2024-12-26 09:56:17.332 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, close pump valve
- [Save Log Job] 2024-12-26 09:56:20.522 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
- [Save Log Job] 2024-12-26 09:56:20.580 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, delay 3 seconds
- [Save Log Job] 2024-12-26 09:56:23.665 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, vent 50 seconds
- [Save Log Job] 2024-12-26 09:56:25.682 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门Chamber vent valveOpen失败,原因:Valve keep closed 。
- [Save Log Job] 2024-12-26 09:56:28.032 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
- [Save Log Job] 2024-12-26 09:56:50.524 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
- [Save Log Job] 2024-12-26 09:57:13.755 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, Close vent valve
- [Save Log Job] 2024-12-26 09:57:14.914 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation AbortRecipe()
- [Save Log Job] 2024-12-26 09:57:18.887 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门Chamber vent valveClose失败,原因:Valve keep open。
- [Save Log Job] 2024-12-26 09:57:20.004 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventLotFinished
- [Save Log Job] 2024-12-26 09:57:20.005 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle
- [Save Log Job] 2024-12-26 09:57:20.005 LOG.INFO YZQZFabAuto.cs Line:212 EndJobRecord() - EndJobRecord|
- [Save Log Job] 2024-12-26 09:57:20.005 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
- [Save Log Job] 2024-12-26 09:57:20.013 LOG.INFO YZQZFabAuto.cs Line:243 Export2CsvLocalFile() - Export2CsvLocalFileD:\jet.plasma\trunk\Triton160\Triton160RT\bin\Debug\Logs\.csv
- [Save Log Job] 2024-12-26 09:57:20.015 LOG.INFO YZQZFabAuto.cs Line:291 Export2CsvWanPanFile() - Export2CsvWanPanFile\\192.168.1.208\CHIP_LoaderPath\JetplasmaDaJiao\SourceFolder\.csv
- [Save Log Job] 2024-12-26 09:57:20.201 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
- [Save Log Job] 2024-12-26 09:57:41.012 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
- [Save Log Job] 2024-12-26 09:57:46.539 LOG.INFO YZQZFabAuto.cs Line:327 Export2CsvWanPanFile() - 找不到网络路径。
- [Save Log Job] 2024-12-26 09:59:08.834 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation RunRecipe(CACB, , , )
- [Save Log Job] 2024-12-26 09:59:08.837 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|LoadProcessRecipe
- [Save Log Job] 2024-12-26 09:59:08.837 LOG.INFO LOG.cs Line:61 Write() - System通知TM保存工艺程序20241226095908-CACB
- [Save Log Job] 2024-12-26 09:59:08.837 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventLotStart
- [Save Log Job] 2024-12-26 09:59:08.837 LOG.INFO YZQZFabAuto.cs Line:165 StartJobRecord() - StartJobRecord|start||CACB
- [Save Log Job] 2024-12-26 09:59:08.837 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|PreProcess
- [Save Log Job] 2024-12-26 09:59:08.837 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
- [Save Log Job] 2024-12-26 09:59:08.841 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
- [Save Log Job] 2024-12-26 09:59:08.849 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
- [Save Log Job] 2024-12-26 09:59:08.887 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe:Check door status。
- [Save Log Job] 2024-12-26 09:59:08.887 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe:check chamber door。
- [Save Log Job] 2024-12-26 09:59:08.887 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe:check backpanel door。
- [Save Log Job] 2024-12-26 09:59:08.887 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe:Check pump status。
- [Save Log Job] 2024-12-26 09:59:08.887 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe:Close all the valves。
- [Save Log Job] 2024-12-26 09:59:08.945 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe:Open pumping valve。
- [Save Log Job] 2024-12-26 09:59:10.980 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门Chamber pumping valveOpen失败,原因:Valve keep closed 。
- [Save Log Job] 2024-12-26 09:59:11.868 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe:Check chamber pressure。
- [Save Log Job] 2024-12-26 09:59:29.847 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
- [Save Log Job] 2024-12-26 09:59:29.852 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
- [Save Log Job] 2024-12-26 09:59:38.841 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
- [Save Log Job] 2024-12-26 09:59:51.900 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation AbortRecipe()
- [Save Log Job] 2024-12-26 09:59:51.900 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Stop pump:Check if the rf is on。
- [Save Log Job] 2024-12-26 09:59:51.907 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle
- [Save Log Job] 2024-12-26 09:59:51.970 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
- [Save Log Job] 2024-12-26 09:59:53.941 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门Chamber pumping valveClose失败,原因:Valve keep open。
- [Save Log Job] 2024-12-26 09:59:58.333 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation RunRecipe(CACB, , , )
- [Save Log Job] 2024-12-26 09:59:58.335 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|LoadProcessRecipe
- [Save Log Job] 2024-12-26 09:59:58.335 LOG.INFO LOG.cs Line:61 Write() - System通知TM保存工艺程序20241226095958-CACB
- [Save Log Job] 2024-12-26 09:59:58.335 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventLotStart
- [Save Log Job] 2024-12-26 09:59:58.335 LOG.INFO YZQZFabAuto.cs Line:165 StartJobRecord() - StartJobRecord|start||CACB
- [Save Log Job] 2024-12-26 09:59:58.335 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|PreProcess
- [Save Log Job] 2024-12-26 09:59:58.385 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe:Check door status。
- [Save Log Job] 2024-12-26 09:59:58.385 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe:check chamber door。
- [Save Log Job] 2024-12-26 09:59:58.385 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe:check backpanel door。
- [Save Log Job] 2024-12-26 09:59:58.385 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe:Check pump status。
- [Save Log Job] 2024-12-26 09:59:58.386 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe:Close all the valves。
- [Save Log Job] 2024-12-26 09:59:58.389 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
- [Save Log Job] 2024-12-26 09:59:58.443 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe:Open pumping valve。
- [Save Log Job] 2024-12-26 10:00:00.494 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门Chamber pumping valveOpen失败,原因:Valve keep closed 。
- [Save Log Job] 2024-12-26 10:00:01.826 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe:Check chamber pressure。
- [Save Log Job] 2024-12-26 10:00:08.842 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
- [Save Log Job] 2024-12-26 10:00:12.916 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
- [Save Log Job] 2024-12-26 10:00:13.733 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe:Pump below 100mTorr。
- [Save Log Job] 2024-12-26 10:00:13.789 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe:PreProcess Finished in 0.3 minitues。
- [Save Log Job] 2024-12-26 10:00:13.789 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System complete run ''PreProcess''.
- [Save Log Job] 2024-12-26 10:00:13.789 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Run Recipe 20241226095958-CACB
- [Save Log Job] 2024-12-26 10:00:13.789 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe start run''20241226095958-CACB''
- [Save Log Job] 2024-12-26 10:00:13.790 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Processing
- [Save Log Job] 2024-12-26 10:00:13.841 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe''20241226095958-CACB'' start run step 1:initial。
- [Save Log Job] 2024-12-26 10:00:13.841 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute:PressureControl.SetTVMode,TV mode set to TVPressureCtrl。
- [Save Log Job] 2024-12-26 10:00:13.841 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。
- [Save Log Job] 2024-12-26 10:00:13.841 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute:PressureControl.SetTVPressure,TV pressure set to 50 mtorr。
- [Save Log Job] 2024-12-26 10:00:13.841 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute:PressureControl.SetBoostPressure,Boost pump pressure set to 100 mTorr。
- [Save Log Job] 2024-12-26 10:00:13.841 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute:Rf.SetMode,Set RF work mode to ContinuousWaveMode。
- [Save Log Job] 2024-12-26 10:00:13.842 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute:Rf.SetPulsingFrequency,RF set Frequency:0。
- [Save Log Job] 2024-12-26 10:00:13.842 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute:Rf.SetPulsingDuty,RF set Duty:0 。
- [Save Log Job] 2024-12-26 10:00:13.842 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute:Rf.SetPower,RF set Power:0。
- [Save Log Job] 2024-12-26 10:00:13.842 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute:Rf.SetMatchProcessMode,Match mode set to PresetMode。
- [Save Log Job] 2024-12-26 10:00:13.842 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute:Rf.SetMatchPositionC1,Set RF match position c1 :50。
- [Save Log Job] 2024-12-26 10:00:13.842 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute:Rf.SetMatchPositionC2,Set RF match position c2 :50。
- [Save Log Job] 2024-12-26 10:00:13.842 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute:MfcGas1, ramp to 45sccm。
- [Save Log Job] 2024-12-26 10:00:13.842 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute:MfcGas2, ramp to 56sccm。
- [Save Log Job] 2024-12-26 10:00:13.842 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute:MfcGas3, ramp to 66sccm。
- [Save Log Job] 2024-12-26 10:00:13.842 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute:MfcGas4, ramp to 76sccm。
- [Save Log Job] 2024-12-26 10:00:13.842 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute:MfcGas5, ramp to 86sccm。
- [Save Log Job] 2024-12-26 10:00:13.843 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute:Rf.SetPowerOnOff,Set RF power Off。
- [Save Log Job] 2024-12-26 10:00:13.894 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Start monitor pressure stability
- [Save Log Job] 2024-12-26 10:00:19.344 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
- [Save Log Job] 2024-12-26 10:00:19.349 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
- [Save Log Job] 2024-12-26 10:00:34.799 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
- [Save Log Job] 2024-12-26 10:00:38.842 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
- [Save Log Job] 2024-12-26 10:00:43.938 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe''20241226095958-CACB'' end step 1
- [Save Log Job] 2024-12-26 10:00:43.988 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe''20241226095958-CACB'' start run step 2:initial。
- [Save Log Job] 2024-12-26 10:00:43.988 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute:PressureControl.SetTVMode,TV mode set to TVPressureCtrl。
- [Save Log Job] 2024-12-26 10:00:43.988 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。
- [Save Log Job] 2024-12-26 10:00:43.988 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute:PressureControl.SetTVPressure,TV pressure set to 50 mtorr。
- [Save Log Job] 2024-12-26 10:00:43.988 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute:PressureControl.SetBoostPressure,Boost pump pressure set to 100 mTorr。
- [Save Log Job] 2024-12-26 10:00:43.989 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute:Rf.SetMode,Set RF work mode to ContinuousWaveMode。
- [Save Log Job] 2024-12-26 10:00:43.989 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute:Rf.SetPulsingFrequency,RF set Frequency:0。
- [Save Log Job] 2024-12-26 10:00:43.989 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute:Rf.SetPulsingDuty,RF set Duty:0 。
- [Save Log Job] 2024-12-26 10:00:43.989 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute:Rf.SetPower,RF set Power:0。
- [Save Log Job] 2024-12-26 10:00:43.989 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute:Rf.SetMatchProcessMode,Match mode set to PresetMode。
- [Save Log Job] 2024-12-26 10:00:43.989 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute:Rf.SetMatchPositionC1,Set RF match position c1 :50。
- [Save Log Job] 2024-12-26 10:00:43.989 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute:Rf.SetMatchPositionC2,Set RF match position c2 :50。
- [Save Log Job] 2024-12-26 10:00:43.989 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute:MfcGas1, ramp to 45sccm。
- [Save Log Job] 2024-12-26 10:00:43.989 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute:MfcGas2, ramp to 56sccm。
- [Save Log Job] 2024-12-26 10:00:43.989 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute:MfcGas3, ramp to 66sccm。
- [Save Log Job] 2024-12-26 10:00:43.990 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute:MfcGas4, ramp to 76sccm。
- [Save Log Job] 2024-12-26 10:00:43.990 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute:MfcGas5, ramp to 86sccm。
- [Save Log Job] 2024-12-26 10:00:43.990 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute:Rf.SetPowerOnOff,Set RF power Off。
- [Save Log Job] 2024-12-26 10:01:08.842 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
- [Save Log Job] 2024-12-26 10:01:14.081 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe''20241226095958-CACB'' end step 2
- [Save Log Job] 2024-12-26 10:01:14.082 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Stop monitor pressure stability
- [Save Log Job] 2024-12-26 10:01:14.082 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Recipe run completed,Recipe:20241226095958-CACB
- Start time:2024/12/26 10:00:13
- End time:2024/12/26 10:01:14
- Total time:0:1:0
- [Save Log Job] 2024-12-26 10:01:14.082 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Recipe completely run
- [Save Log Job] 2024-12-26 10:01:14.082 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|PostProcess
- [Save Log Job] 2024-12-26 10:01:14.132 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, wait for 10 seconds
- [Save Log Job] 2024-12-26 10:01:16.097 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC1 ValveClose失败,原因:Valve keep open。
- [Save Log Job] 2024-12-26 10:01:16.099 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC2 ValveClose失败,原因:Valve keep open。
- [Save Log Job] 2024-12-26 10:01:16.099 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC3 ValveClose失败,原因:Valve keep open。
- [Save Log Job] 2024-12-26 10:01:16.099 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC4 ValveClose失败,原因:Valve keep open。
- [Save Log Job] 2024-12-26 10:01:16.099 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC5 ValveClose失败,原因:Valve keep open。
- [Save Log Job] 2024-12-26 10:01:24.230 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, RF Power Off
- [Save Log Job] 2024-12-26 10:01:24.287 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, Stop all the gas flow
- [Save Log Job] 2024-12-26 10:01:30.515 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, Close all the valves
- [Save Log Job] 2024-12-26 10:01:30.571 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, close pump valve
- [Save Log Job] 2024-12-26 10:01:30.628 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, delay 3 seconds
- [Save Log Job] 2024-12-26 10:01:33.729 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, vent 50 seconds
- [Save Log Job] 2024-12-26 10:01:35.090 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
- [Save Log Job] 2024-12-26 10:01:38.843 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
- [Save Log Job] 2024-12-26 10:02:08.843 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
- [Save Log Job] 2024-12-26 10:02:23.836 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, Close vent valve
- [Save Log Job] 2024-12-26 10:02:25.840 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门Chamber vent valveClose失败,原因:Valve keep open。
- [Save Log Job] 2024-12-26 10:02:28.041 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, PostProcess Finished in 1.2 minitues
- [Save Log Job] 2024-12-26 10:02:28.041 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System complete run ''PostProcess''.
- [Save Log Job] 2024-12-26 10:02:28.042 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventLotFinished
- [Save Log Job] 2024-12-26 10:02:28.042 LOG.INFO YZQZFabAuto.cs Line:212 EndJobRecord() - EndJobRecord|
- [Save Log Job] 2024-12-26 10:02:28.042 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle
- [Save Log Job] 2024-12-26 10:02:28.042 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
- [Save Log Job] 2024-12-26 10:02:28.047 LOG.INFO YZQZFabAuto.cs Line:243 Export2CsvLocalFile() - Export2CsvLocalFileD:\jet.plasma\trunk\Triton160\Triton160RT\bin\Debug\Logs\.csv
- [Save Log Job] 2024-12-26 10:02:28.048 LOG.INFO YZQZFabAuto.cs Line:291 Export2CsvWanPanFile() - Export2CsvWanPanFile\\192.168.1.208\CHIP_LoaderPath\JetplasmaDaJiao\SourceFolder\.csv
- [Save Log Job] 2024-12-26 10:02:28.150 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
- [Save Log Job] 2024-12-26 10:02:49.057 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
- [Save Log Job] 2024-12-26 10:02:54.563 LOG.INFO YZQZFabAuto.cs Line:327 Export2CsvWanPanFile() - 找不到网络路径。
- [Save Log Job] 2024-12-26 10:03:53.573 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation RunRecipe(CACB, , , )
- [Save Log Job] 2024-12-26 10:03:53.575 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|LoadProcessRecipe
- [Save Log Job] 2024-12-26 10:03:53.575 LOG.INFO LOG.cs Line:61 Write() - System通知TM保存工艺程序20241226100353-CACB
- [Save Log Job] 2024-12-26 10:03:53.575 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventLotStart
- [Save Log Job] 2024-12-26 10:03:53.576 LOG.INFO YZQZFabAuto.cs Line:165 StartJobRecord() - StartJobRecord|start||CACB
- [Save Log Job] 2024-12-26 10:03:53.576 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|PreProcess
- [Save Log Job] 2024-12-26 10:03:53.576 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
- [Save Log Job] 2024-12-26 10:03:53.578 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
- [Save Log Job] 2024-12-26 10:03:53.610 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe:Check door status。
- [Save Log Job] 2024-12-26 10:03:53.610 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe:check chamber door。
- [Save Log Job] 2024-12-26 10:03:53.610 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe:check backpanel door。
- [Save Log Job] 2024-12-26 10:03:53.610 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe:Check pump status。
- [Save Log Job] 2024-12-26 10:03:53.612 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe:Close all the valves。
- [Save Log Job] 2024-12-26 10:03:53.669 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe:Open pumping valve。
- [Save Log Job] 2024-12-26 10:03:53.713 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
- [Save Log Job] 2024-12-26 10:03:55.687 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门Chamber pumping valveOpen失败,原因:Valve keep closed 。
- [Save Log Job] 2024-12-26 10:03:56.071 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe:Check chamber pressure。
- [Save Log Job] 2024-12-26 10:04:07.533 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation AbortRecipe()
- [Save Log Job] 2024-12-26 10:04:07.533 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Stop pump:Check if the rf is on。
- [Save Log Job] 2024-12-26 10:04:07.543 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle
- [Save Log Job] 2024-12-26 10:04:07.552 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
- [Save Log Job] 2024-12-26 10:04:09.543 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门Chamber pumping valveClose失败,原因:Valve keep open。
- [Save Log Job] 2024-12-26 10:04:14.584 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
- [Save Log Job] 2024-12-26 10:04:14.589 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
- [Save Log Job] 2024-12-26 10:04:23.579 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
- [Save Log Job] 2024-12-26 10:04:28.550 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
- [Save Log Job] 2024-12-26 10:04:53.579 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
- [Save Log Job] 2024-12-26 10:05:23.580 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
- [Save Log Job] 2024-12-26 10:05:53.580 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
- [Save Log Job] 2024-12-26 10:06:23.580 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
- [Save Log Job] 2024-12-26 10:06:53.581 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
- [Save Log Job] 2024-12-26 10:07:23.582 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
- [Save Log Job] 2024-12-26 10:07:53.582 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
- [Save Log Job] 2024-12-26 10:08:23.584 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
- [Save Log Job] 2024-12-26 10:08:32.288 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation RunRecipe(CACB, , , )
- [Save Log Job] 2024-12-26 10:08:32.290 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|LoadProcessRecipe
- [Save Log Job] 2024-12-26 10:08:32.290 LOG.INFO LOG.cs Line:61 Write() - System通知TM保存工艺程序20241226100832-CACB
- [Save Log Job] 2024-12-26 10:08:32.290 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventLotStart
- [Save Log Job] 2024-12-26 10:08:32.290 LOG.INFO YZQZFabAuto.cs Line:165 StartJobRecord() - StartJobRecord|start||CACB
- [Save Log Job] 2024-12-26 10:08:32.290 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|PreProcess
- [Save Log Job] 2024-12-26 10:08:32.341 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe:Check door status。
- [Save Log Job] 2024-12-26 10:08:32.341 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe:check chamber door。
- [Save Log Job] 2024-12-26 10:08:32.341 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe:check backpanel door。
- [Save Log Job] 2024-12-26 10:08:32.341 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe:Check pump status。
- [Save Log Job] 2024-12-26 10:08:32.341 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe:Close all the valves。
- [Save Log Job] 2024-12-26 10:08:32.397 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe:Open pumping valve。
- [Save Log Job] 2024-12-26 10:08:32.447 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
- [Save Log Job] 2024-12-26 10:08:34.442 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门Chamber pumping valveOpen失败,原因:Valve keep closed 。
- [Save Log Job] 2024-12-26 10:08:36.274 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe:Check chamber pressure。
- [Save Log Job] 2024-12-26 10:08:40.036 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation AbortRecipe()
- [Save Log Job] 2024-12-26 10:08:40.037 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Stop pump:Check if the rf is on。
- [Save Log Job] 2024-12-26 10:08:40.043 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle
- [Save Log Job] 2024-12-26 10:08:40.075 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
- [Save Log Job] 2024-12-26 10:08:42.075 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门Chamber pumping valveClose失败,原因:Valve keep open。
- [Save Log Job] 2024-12-26 10:08:53.299 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
- [Save Log Job] 2024-12-26 10:08:53.304 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
- [Save Log Job] 2024-12-26 10:08:53.585 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
- [Save Log Job] 2024-12-26 10:09:01.052 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
- [Save Log Job] 2024-12-26 10:09:23.585 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
- [Save Log Job] 2024-12-26 10:09:53.585 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
- [Save Log Job] 2024-12-26 10:10:23.585 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
- [Save Log Job] 2024-12-26 10:10:53.586 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
- [Save Log Job] 2024-12-26 10:11:23.586 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
- [Save Log Job] 2024-12-26 10:11:53.587 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
- [Save Log Job] 2024-12-26 10:12:23.587 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
- [Save Log Job] 2024-12-26 10:12:53.588 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
- [Save Log Job] 2024-12-26 10:13:23.588 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
- [Save Log Job] 2024-12-26 10:13:53.589 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
- [Save Log Job] 2024-12-26 10:14:23.589 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
- [Save Log Job] 2024-12-26 10:14:53.590 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
- [Save Log Job] 2024-12-26 10:15:23.591 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
- [Save Log Job] 2024-12-26 10:15:53.591 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
- [Save Log Job] 2024-12-26 10:16:23.592 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
- [Save Log Job] 2024-12-26 10:16:53.592 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
- [Save Log Job] 2024-12-26 10:17:23.592 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
- [Save Log Job] 2024-12-26 10:17:53.593 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
- [Save Log Job] 2024-12-26 10:18:23.593 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
- [Save Log Job] 2024-12-26 10:18:53.594 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
- [Save Log Job] 2024-12-26 10:19:23.594 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
- [Save Log Job] 2024-12-26 10:19:53.594 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
- [Save Log Job] 2024-12-26 10:20:23.594 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
- [Save Log Job] 2024-12-26 10:20:53.595 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
- [Save Log Job] 2024-12-26 10:21:23.595 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
- [Save Log Job] 2024-12-26 10:21:53.596 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
- [Save Log Job] 2024-12-26 10:22:23.596 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
- [Save Log Job] 2024-12-26 10:22:53.597 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
- [Save Log Job] 2024-12-26 10:23:23.597 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
- [Save Log Job] 2024-12-26 10:23:53.597 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
- [Save Log Job] 2024-12-26 10:24:23.598 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
- [Save Log Job] 2024-12-26 10:24:53.599 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
- [Save Log Job] 2024-12-26 10:25:23.599 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
- [Save Log Job] 2024-12-26 10:25:53.600 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
- [Save Log Job] 2024-12-26 10:26:23.601 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
- [Save Log Job] 2024-12-26 10:26:53.601 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
- [Save Log Job] 2024-12-26 10:27:23.602 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
- [Save Log Job] 2024-12-26 10:27:53.602 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
- [Save Log Job] 2024-12-26 10:28:23.603 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
- [Save Log Job] 2024-12-26 10:28:53.604 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
- [Save Log Job] 2024-12-26 10:29:23.604 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
- [Save Log Job] 2024-12-26 10:29:53.605 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
- [Save Log Job] 2024-12-26 10:30:23.606 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
- [Save Log Job] 2024-12-26 10:30:53.607 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
- [Save Log Job] 2024-12-26 10:31:23.607 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
- [Save Log Job] 2024-12-26 10:31:53.607 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
- [Save Log Job] 2024-12-26 10:32:27.272 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
- [Save Log Job] 2024-12-26 10:32:27.272 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation RunRecipe(CACB, , , )
- [Save Log Job] 2024-12-26 10:32:27.294 LOG.INFO LOG.cs Line:61 Write() - System通知TM保存工艺程序20241226103227-CACB
- [Save Log Job] 2024-12-26 10:32:27.295 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|LoadProcessRecipe
- [Save Log Job] 2024-12-26 10:32:27.295 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventLotStart
- [Save Log Job] 2024-12-26 10:32:27.295 LOG.INFO YZQZFabAuto.cs Line:165 StartJobRecord() - StartJobRecord|start||CACB
- [Save Log Job] 2024-12-26 10:32:27.295 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|PreProcess
- [Save Log Job] 2024-12-26 10:32:27.346 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe:Check door status。
- [Save Log Job] 2024-12-26 10:32:27.346 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe:check chamber door。
- [Save Log Job] 2024-12-26 10:32:27.346 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe:check backpanel door。
- [Save Log Job] 2024-12-26 10:32:27.346 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe:Check pump status。
- [Save Log Job] 2024-12-26 10:32:27.346 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe:Close all the valves。
- [Save Log Job] 2024-12-26 10:32:27.403 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe:Open pumping valve。
- [Save Log Job] 2024-12-26 10:32:27.471 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
- [Save Log Job] 2024-12-26 10:32:29.444 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门Chamber pumping valveOpen失败,原因:Valve keep closed 。
- [Save Log Job] 2024-12-26 10:32:31.673 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe:Check chamber pressure。
- [Save Log Job] 2024-12-26 10:33:23.211 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation AbortRecipe()
- [Save Log Job] 2024-12-26 10:33:23.214 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
- [Save Log Job] 2024-12-26 10:36:15.440 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
- [Save Log Job] 2024-12-26 10:36:15.474 LOG.ERROR EventLogWriter.cs Line:14 WriteEvent() - System PLC heart beat check failed,please confirm PLC still running
- [Save Log Job] 2024-12-26 10:36:15.475 LOG.INFO YZQZFabAuto.cs Line:212 EndJobRecord() - EndJobRecord|
- [Save Log Job] 2024-12-26 10:36:15.475 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
- [Save Log Job] 2024-12-26 10:36:15.477 LOG.WARN StateMachine.cs Line:169 Loop() - 状态机Chamber FSM未定义在状态Error时处理方法。
- [Save Log Job] 2024-12-26 10:36:15.497 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
- [Save Log Job] 2024-12-26 10:36:15.497 LOG.INFO YZQZFabAuto.cs Line:243 Export2CsvLocalFile() - Export2CsvLocalFileD:\jet.plasma\trunk\Triton160\Triton160RT\bin\Debug\Logs\.csv
- [Save Log Job] 2024-12-26 10:36:15.500 LOG.INFO YZQZFabAuto.cs Line:291 Export2CsvWanPanFile() - Export2CsvWanPanFile\\192.168.1.208\CHIP_LoaderPath\JetplasmaDaJiao\SourceFolder\.csv
- [Save Log Job] 2024-12-26 10:36:15.503 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
- [Save Log Job] 2024-12-26 10:36:15.641 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
- [Save Log Job] 2024-12-26 10:36:20.970 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
- [Save Log Job] 2024-12-26 10:36:42.016 LOG.INFO YZQZFabAuto.cs Line:327 Export2CsvWanPanFile() - 找不到网络路径。
- [Save Log Job] 2024-12-26 10:36:44.839 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation RunRecipe(CACB, , , )
- [Save Log Job] 2024-12-26 10:36:44.841 LOG.INFO LOG.cs Line:61 Write() - System通知TM保存工艺程序20241226103644-CACB
- [Save Log Job] 2024-12-26 10:36:44.841 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|LoadProcessRecipe
- [Save Log Job] 2024-12-26 10:36:44.841 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventLotStart
- [Save Log Job] 2024-12-26 10:36:44.842 LOG.INFO YZQZFabAuto.cs Line:165 StartJobRecord() - StartJobRecord|start||CACB
- [Save Log Job] 2024-12-26 10:36:44.842 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|PreProcess
- [Save Log Job] 2024-12-26 10:36:44.842 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
- [Save Log Job] 2024-12-26 10:36:44.845 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
- [Save Log Job] 2024-12-26 10:36:44.893 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe:Check door status。
- [Save Log Job] 2024-12-26 10:36:44.893 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe:check chamber door。
- [Save Log Job] 2024-12-26 10:36:44.893 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe:check backpanel door。
- [Save Log Job] 2024-12-26 10:36:44.894 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe:Check pump status。
- [Save Log Job] 2024-12-26 10:36:44.894 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe:Close all the valves。
- [Save Log Job] 2024-12-26 10:36:45.014 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
- [Save Log Job] 2024-12-26 10:36:46.944 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门Chamber pumping valveClose失败,原因:Valve keep open。
- [Save Log Job] 2024-12-26 10:36:47.217 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe:Open pumping valve。
- [Save Log Job] 2024-12-26 10:36:49.218 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门Chamber pumping valveOpen失败,原因:Valve keep closed 。
- [Save Log Job] 2024-12-26 10:36:51.018 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe:Check chamber pressure。
- [Save Log Job] 2024-12-26 10:36:55.202 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe:Pump below 100mTorr。
- [Save Log Job] 2024-12-26 10:36:55.260 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe:PreProcess Finished in 0.2 minitues。
- [Save Log Job] 2024-12-26 10:36:55.260 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System complete run ''PreProcess''.
- [Save Log Job] 2024-12-26 10:36:55.260 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Run Recipe 20241226103644-CACB
- [Save Log Job] 2024-12-26 10:36:55.260 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe start run''20241226103644-CACB''
- [Save Log Job] 2024-12-26 10:36:55.261 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Processing
- [Save Log Job] 2024-12-26 10:36:55.312 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe''20241226103644-CACB'' start run step 1:initial。
- [Save Log Job] 2024-12-26 10:36:55.312 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute:PressureControl.SetTVMode,TV mode set to TVPressureCtrl。
- [Save Log Job] 2024-12-26 10:36:55.312 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。
- [Save Log Job] 2024-12-26 10:36:55.312 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute:PressureControl.SetTVPressure,TV pressure set to 50 mtorr。
- [Save Log Job] 2024-12-26 10:36:55.312 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute:PressureControl.SetBoostPressure,Boost pump pressure set to 100 mTorr。
- [Save Log Job] 2024-12-26 10:36:55.312 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute:Rf.SetMode,Set RF work mode to ContinuousWaveMode。
- [Save Log Job] 2024-12-26 10:36:55.312 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute:Rf.SetPulsingFrequency,RF set Frequency:0。
- [Save Log Job] 2024-12-26 10:36:55.312 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute:Rf.SetPulsingDuty,RF set Duty:0 。
- [Save Log Job] 2024-12-26 10:36:55.313 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute:Rf.SetPower,RF set Power:0。
- [Save Log Job] 2024-12-26 10:36:55.313 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute:Rf.SetMatchProcessMode,Match mode set to PresetMode。
- [Save Log Job] 2024-12-26 10:36:55.313 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute:Rf.SetMatchPositionC1,Set RF match position c1 :50。
- [Save Log Job] 2024-12-26 10:36:55.313 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute:Rf.SetMatchPositionC2,Set RF match position c2 :50。
- [Save Log Job] 2024-12-26 10:36:55.313 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute:MfcGas1, ramp to 45sccm。
- [Save Log Job] 2024-12-26 10:36:55.313 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute:MfcGas2, ramp to 56sccm。
- [Save Log Job] 2024-12-26 10:36:55.313 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute:MfcGas3, ramp to 66sccm。
- [Save Log Job] 2024-12-26 10:36:55.313 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute:MfcGas4, ramp to 76sccm。
- [Save Log Job] 2024-12-26 10:36:55.313 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute:MfcGas5, ramp to 86sccm。
- [Save Log Job] 2024-12-26 10:36:55.313 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute:Rf.SetPowerOnOff,Set RF power Off。
- [Save Log Job] 2024-12-26 10:36:55.364 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Start monitor pressure stability
- [Save Log Job] 2024-12-26 10:36:57.500 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation AbortRecipe()
- [Save Log Job] 2024-12-26 10:37:01.069 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC3 ValveOpen失败,原因:Valve keep closed 。
- [Save Log Job] 2024-12-26 10:37:01.069 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe was aborted: user aborted recipe
- [Save Log Job] 2024-12-26 10:37:01.070 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Stop pump:Check if the rf is on。
- [Save Log Job] 2024-12-26 10:37:01.079 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Stop monitor pressure stability
- [Save Log Job] 2024-12-26 10:37:01.079 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Recipe run completed,Recipe:20241226103644-CACB
- Start time:2024/12/26 10:36:55
- End time:2024/12/26 10:37:01
- Total time:0:0:5
- [Save Log Job] 2024-12-26 10:37:01.079 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Recipe completely run
- [Save Log Job] 2024-12-26 10:37:01.080 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|PostProcess
- [Save Log Job] 2024-12-26 10:37:01.130 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, wait for 10 seconds
- [Save Log Job] 2024-12-26 10:37:03.098 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC1 ValveClose失败,原因:Valve keep open。
- [Save Log Job] 2024-12-26 10:37:03.098 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC2 ValveClose失败,原因:Valve keep open。
- [Save Log Job] 2024-12-26 10:37:03.098 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC3 ValveClose失败,原因:Valve keep open。
- [Save Log Job] 2024-12-26 10:37:03.098 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC4 ValveClose失败,原因:Valve keep open。
- [Save Log Job] 2024-12-26 10:37:05.851 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
- [Save Log Job] 2024-12-26 10:37:05.856 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
- [Save Log Job] 2024-12-26 10:37:11.197 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, RF Power Off
- [Save Log Job] 2024-12-26 10:37:11.262 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, Stop all the gas flow
- [Save Log Job] 2024-12-26 10:37:11.318 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, Close all the valves
- [Save Log Job] 2024-12-26 10:37:11.376 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, close pump valve
- [Save Log Job] 2024-12-26 10:37:11.433 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, delay 3 seconds
- [Save Log Job] 2024-12-26 10:37:14.499 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, vent 50 seconds
- [Save Log Job] 2024-12-26 10:37:14.846 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
- [Save Log Job] 2024-12-26 10:37:16.283 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
- [Save Log Job] 2024-12-26 10:37:16.527 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门Chamber vent valveOpen失败,原因:Valve keep closed 。
- [Save Log Job] 2024-12-26 10:37:22.089 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
- [Save Log Job] 2024-12-26 10:37:44.847 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
- [Save Log Job] 2024-12-26 10:38:04.588 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, Close vent valve
- [Save Log Job] 2024-12-26 10:38:06.594 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门Chamber vent valveClose失败,原因:Valve keep open。
- [Save Log Job] 2024-12-26 10:38:07.770 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, PostProcess Finished in 1.1 minitues
- [Save Log Job] 2024-12-26 10:38:07.770 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System complete run ''PostProcess''.
- [Save Log Job] 2024-12-26 10:38:07.770 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventLotFinished
- [Save Log Job] 2024-12-26 10:38:07.771 LOG.INFO YZQZFabAuto.cs Line:212 EndJobRecord() - EndJobRecord|
- [Save Log Job] 2024-12-26 10:38:07.771 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
- [Save Log Job] 2024-12-26 10:38:07.771 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle
- [Save Log Job] 2024-12-26 10:38:07.776 LOG.INFO YZQZFabAuto.cs Line:243 Export2CsvLocalFile() - Export2CsvLocalFileD:\jet.plasma\trunk\Triton160\Triton160RT\bin\Debug\Logs\.csv
- [Save Log Job] 2024-12-26 10:38:07.777 LOG.INFO YZQZFabAuto.cs Line:291 Export2CsvWanPanFile() - Export2CsvWanPanFile\\192.168.1.208\CHIP_LoaderPath\JetplasmaDaJiao\SourceFolder\.csv
- [Save Log Job] 2024-12-26 10:38:07.900 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
- [Save Log Job] 2024-12-26 10:38:28.783 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
- [Save Log Job] 2024-12-26 10:38:34.295 LOG.INFO YZQZFabAuto.cs Line:327 Export2CsvWanPanFile() - 找不到网络路径。
- <== [Save Log Job] 2024-12-26 10:40:04.424 LOG.INFO LOG.cs Line:61 Write() - 完成对数据库表格的更新操作
- [Save Log Job] 2024-12-26 10:40:05.290 LOG.INFO EventService.cs Line:60 Register() - 客户端74aaf27b-fc1d-44f9-9737-36cfb856e99e已连接
- [Save Log Job] 2024-12-26 10:40:05.465 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, <IoSensor id="SensorBackPanelDoor" display="" schematicId="" unit="" di="DI_back_panle_door_sw" isLowAsNormal="false" infoText="BackPanel door is opened" warningText="" alarmText="" />
- [Save Log Job] 2024-12-26 10:40:05.465 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, <IoSensor id="SensorPumpDoor" display="" schematicId="" unit="" di="DI_pump_door_sw" isLowAsNormal="false" infoText="" warningText="" alarmText="" />
- [Save Log Job] 2024-12-26 10:40:05.536 LOG.INFO LOG.cs Line:61 Write() - Routine System 初始化 Start
- [Save Log Job] 2024-12-26 10:40:06.593 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle
- [Save Log Job] 2024-12-26 10:40:06.595 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle
- [Save Log Job] 2024-12-26 10:40:06.759 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle
- [Save Log Job] 2024-12-26 10:40:06.807 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle
- [Save Log Job] 2024-12-26 10:40:06.885 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
- [Save Log Job] 2024-12-26 10:40:07.276 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetConfig(System_IsMesMode, True)
- [Save Log Job] 2024-12-26 10:40:10.547 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Software will be expired in -63 days, at 10/24/2024 12:00:00 AM 。
- [Save Log Job] 2024-12-26 10:40:27.699 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
- [Save Log Job] 2024-12-26 10:40:27.769 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
- [Save Log Job] 2024-12-26 10:40:27.816 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
- [Save Log Job] 2024-12-26 10:40:48.693 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
- [Save Log Job] 2024-12-26 10:42:35.839 LOG.INFO LOG.cs Line:61 Write() - 用户admin尝试登录系统
- [Save Log Job] 2024-12-26 10:42:35.840 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin
- [Save Log Job] 2024-12-26 10:42:35.851 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - User admin login
- [Save Log Job] 2024-12-26 10:42:35.980 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin
- [Save Log Job] 2024-12-26 10:43:24.307 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetAutoMode()
- [Save Log Job] 2024-12-26 10:43:24.309 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentModeChanged
- [Save Log Job] 2024-12-26 10:43:24.309 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System running mode changed to Auto Mode
- [Save Log Job] 2024-12-26 10:43:26.301 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation RunRecipe(CACB, , , )
- [Save Log Job] 2024-12-26 10:43:26.321 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|LoadProcessRecipe
- [Save Log Job] 2024-12-26 10:43:26.324 LOG.INFO LOG.cs Line:61 Write() - System通知TM保存工艺程序20241226104326-CACB
- [Save Log Job] 2024-12-26 10:43:26.324 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventLotStart
- [Save Log Job] 2024-12-26 10:43:26.324 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|PreProcess
- [Save Log Job] 2024-12-26 10:43:26.325 LOG.INFO YZQZFabAuto.cs Line:165 StartJobRecord() - StartJobRecord|start||CACB
- [Save Log Job] 2024-12-26 10:43:26.326 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
- [Save Log Job] 2024-12-26 10:43:26.330 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
- [Save Log Job] 2024-12-26 10:43:26.335 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
- [Save Log Job] 2024-12-26 10:43:26.377 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe:Check door status。
- [Save Log Job] 2024-12-26 10:43:26.377 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe:check chamber door。
- [Save Log Job] 2024-12-26 10:43:26.377 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe:check backpanel door。
- [Save Log Job] 2024-12-26 10:43:26.378 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe:Check pump status。
- [Save Log Job] 2024-12-26 10:43:26.378 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe:Close all the valves。
- [Save Log Job] 2024-12-26 10:43:26.438 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe:Open pumping valve。
- [Save Log Job] 2024-12-26 10:43:27.782 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe:Check chamber pressure。
- [Save Log Job] 2024-12-26 10:43:32.382 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation AbortRecipe()
- [Save Log Job] 2024-12-26 10:43:36.060 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle
- [Save Log Job] 2024-12-26 10:43:36.258 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
- [Save Log Job] 2024-12-26 10:43:38.074 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门Chamber pumping valveClose失败,原因:Valve keep open。
- [Save Log Job] 2024-12-26 10:43:47.328 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
- [Save Log Job] 2024-12-26 10:43:47.332 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
- [Save Log Job] 2024-12-26 10:43:56.331 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
- [Save Log Job] 2024-12-26 10:43:57.070 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
- [Save Log Job] 2024-12-26 10:44:26.333 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
- [Save Log Job] 2024-12-26 10:44:56.339 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
- [Save Log Job] 2024-12-26 10:45:26.352 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
- [Save Log Job] 2024-12-26 10:45:56.358 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
- [Save Log Job] 2024-12-26 10:46:26.360 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
- [Save Log Job] 2024-12-26 10:46:56.368 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
- [Save Log Job] 2024-12-26 10:47:26.381 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
- [Save Log Job] 2024-12-26 10:47:56.382 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
- [Save Log Job] 2024-12-26 10:48:26.382 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
- [Save Log Job] 2024-12-26 10:48:56.382 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
- [Save Log Job] 2024-12-26 10:49:26.383 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
- [Save Log Job] 2024-12-26 10:49:56.383 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
- [Save Log Job] 2024-12-26 10:50:26.384 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
- [Save Log Job] 2024-12-26 10:50:56.384 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
- [Save Log Job] 2024-12-26 10:51:26.385 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
- [Save Log Job] 2024-12-26 10:51:56.386 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
- [Save Log Job] 2024-12-26 10:52:26.387 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
- [Save Log Job] 2024-12-26 10:52:56.387 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
- <== [Save Log Job] 2024-12-26 10:53:23.962 LOG.INFO LOG.cs Line:61 Write() - 完成对数据库表格的更新操作
- [Save Log Job] 2024-12-26 10:53:24.723 LOG.INFO EventService.cs Line:60 Register() - 客户端c7f632d3-d94c-4ee1-b93f-051b22dbebe1已连接
- [Save Log Job] 2024-12-26 10:53:24.972 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, <IoSensor id="SensorBackPanelDoor" display="" schematicId="" unit="" di="DI_back_panle_door_sw" isLowAsNormal="false" infoText="BackPanel door is opened" warningText="" alarmText="" />
- [Save Log Job] 2024-12-26 10:53:24.973 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, <IoSensor id="SensorPumpDoor" display="" schematicId="" unit="" di="DI_pump_door_sw" isLowAsNormal="false" infoText="" warningText="" alarmText="" />
- [Save Log Job] 2024-12-26 10:53:25.065 LOG.INFO LOG.cs Line:61 Write() - Routine System 初始化 Start
- [Save Log Job] 2024-12-26 10:53:26.052 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle
- [Save Log Job] 2024-12-26 10:53:26.109 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle
- [Save Log Job] 2024-12-26 10:53:26.146 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetConfig(System_IsMesMode, True)
- [Save Log Job] 2024-12-26 10:53:26.281 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle
- [Save Log Job] 2024-12-26 10:53:26.314 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
- [Save Log Job] 2024-12-26 10:53:26.332 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle
- [Save Log Job] 2024-12-26 10:53:30.075 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Software will be expired in -63 days, at 10/24/2024 12:00:00 AM 。
- [Save Log Job] 2024-12-26 10:53:32.931 LOG.INFO LOG.cs Line:61 Write() - 用户admin尝试登录系统
- [Save Log Job] 2024-12-26 10:53:32.932 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin
- [Save Log Job] 2024-12-26 10:53:32.936 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - User admin login
- [Save Log Job] 2024-12-26 10:53:33.064 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin
- [Save Log Job] 2024-12-26 10:53:39.348 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetAutoMode()
- [Save Log Job] 2024-12-26 10:53:39.349 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentModeChanged
- [Save Log Job] 2024-12-26 10:53:39.349 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System running mode changed to Auto Mode
- [Save Log Job] 2024-12-26 10:53:41.472 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation RunRecipe(CACB, , , )
- [Save Log Job] 2024-12-26 10:53:41.492 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|LoadProcessRecipe
- [Save Log Job] 2024-12-26 10:53:41.494 LOG.INFO LOG.cs Line:61 Write() - System通知TM保存工艺程序20241226105341-CACB
- [Save Log Job] 2024-12-26 10:53:41.494 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventLotStart
- [Save Log Job] 2024-12-26 10:53:41.495 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|PreProcess
- [Save Log Job] 2024-12-26 10:53:41.496 LOG.INFO YZQZFabAuto.cs Line:165 StartJobRecord() - StartJobRecord|start||CACB
- [Save Log Job] 2024-12-26 10:53:41.496 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
- [Save Log Job] 2024-12-26 10:53:41.499 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
- [Save Log Job] 2024-12-26 10:53:41.548 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe:Check door status。
- [Save Log Job] 2024-12-26 10:53:41.548 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe:check chamber door。
- [Save Log Job] 2024-12-26 10:53:41.548 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe:check backpanel door。
- [Save Log Job] 2024-12-26 10:53:41.549 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe:Check pump status。
- [Save Log Job] 2024-12-26 10:53:41.550 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe:Close all the valves。
- [Save Log Job] 2024-12-26 10:53:41.609 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe:Open pumping valve。
- [Save Log Job] 2024-12-26 10:53:41.679 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
- [Save Log Job] 2024-12-26 10:53:43.012 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe:Check chamber pressure。
- [Save Log Job] 2024-12-26 10:53:46.369 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation AbortRecipe()
- [Save Log Job] 2024-12-26 10:53:48.655 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle
- [Save Log Job] 2024-12-26 10:53:48.673 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
- [Save Log Job] 2024-12-26 10:53:48.678 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
- [Save Log Job] 2024-12-26 10:53:48.683 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
- [Save Log Job] 2024-12-26 10:53:48.689 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
- [Save Log Job] 2024-12-26 10:53:48.851 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
- [Save Log Job] 2024-12-26 10:53:50.660 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门Chamber pumping valveClose失败,原因:Valve keep open。
- <== [Save Log Job] 2024-12-26 11:01:28.561 LOG.INFO LOG.cs Line:61 Write() - 完成对数据库表格的更新操作
- [Save Log Job] 2024-12-26 11:01:29.606 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, <IoSensor id="SensorBackPanelDoor" display="" schematicId="" unit="" di="DI_back_panle_door_sw" isLowAsNormal="false" infoText="BackPanel door is opened" warningText="" alarmText="" />
- [Save Log Job] 2024-12-26 11:01:29.606 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, <IoSensor id="SensorPumpDoor" display="" schematicId="" unit="" di="DI_pump_door_sw" isLowAsNormal="false" infoText="" warningText="" alarmText="" />
- [Save Log Job] 2024-12-26 11:01:29.680 LOG.INFO LOG.cs Line:61 Write() - Routine System 初始化 Start
- [Save Log Job] 2024-12-26 11:01:29.768 LOG.INFO EventService.cs Line:60 Register() - 客户端c7c61fab-0b7a-41e5-aa7d-b533a2a1989f已连接
- [Save Log Job] 2024-12-26 11:01:30.679 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle
- [Save Log Job] 2024-12-26 11:01:30.726 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle
- [Save Log Job] 2024-12-26 11:01:30.914 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle
- [Save Log Job] 2024-12-26 11:01:30.961 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle
- [Save Log Job] 2024-12-26 11:01:31.072 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
- [Save Log Job] 2024-12-26 11:01:31.189 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetConfig(System_IsMesMode, True)
- [Save Log Job] 2024-12-26 11:01:31.317 LOG.ERROR DatabaseManager.cs Line:70 PeriodicRun() - 执行数据库操作错误, There is already an open DataReader associated with this Command which must be closed first., Insert into "EventManager"("ID","EventEnum","Type","Source","Description","Level","OccurTime") values(1000,'GeneralInfo','EventUI_Notify','System','Operation SetConfig(System_IsMesMode, True)','Information','2024-12-26 11:01:31.188')
- [Save Log Job] 2024-12-26 11:01:34.692 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Software will be expired in -63 days, at 10/24/2024 12:00:00 AM 。
- [Save Log Job] 2024-12-26 11:01:41.546 LOG.INFO LOG.cs Line:61 Write() - 用户admin尝试登录系统
- [Save Log Job] 2024-12-26 11:01:41.547 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin
- [Save Log Job] 2024-12-26 11:01:41.551 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - User admin login
- [Save Log Job] 2024-12-26 11:01:41.679 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin
- [Save Log Job] 2024-12-26 11:01:51.739 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
- [Save Log Job] 2024-12-26 11:01:51.743 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
- [Save Log Job] 2024-12-26 11:01:51.922 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
- [Save Log Job] 2024-12-26 11:01:51.970 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
- [Save Log Job] 2024-12-26 11:01:54.903 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetAutoMode()
- [Save Log Job] 2024-12-26 11:01:54.904 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentModeChanged
- [Save Log Job] 2024-12-26 11:01:54.905 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System running mode changed to Auto Mode
- [Save Log Job] 2024-12-26 11:01:57.160 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation RunRecipe(CACB, , , )
- [Save Log Job] 2024-12-26 11:01:57.183 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|LoadProcessRecipe
- [Save Log Job] 2024-12-26 11:01:57.185 LOG.INFO LOG.cs Line:61 Write() - System通知TM保存工艺程序20241226110157-CACB
- [Save Log Job] 2024-12-26 11:01:57.185 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventLotStart
- [Save Log Job] 2024-12-26 11:01:57.186 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|PreProcess
- [Save Log Job] 2024-12-26 11:01:57.186 LOG.INFO YZQZFabAuto.cs Line:165 StartJobRecord() - StartJobRecord|start||CACB
- [Save Log Job] 2024-12-26 11:01:57.187 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
- [Save Log Job] 2024-12-26 11:01:57.189 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
- [Save Log Job] 2024-12-26 11:01:57.238 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe:Check door status。
- [Save Log Job] 2024-12-26 11:01:57.238 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe:check chamber door。
- [Save Log Job] 2024-12-26 11:01:57.239 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe:check backpanel door。
- [Save Log Job] 2024-12-26 11:01:57.239 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe:Check pump status。
- [Save Log Job] 2024-12-26 11:01:57.241 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe:Close all the valves。
- [Save Log Job] 2024-12-26 11:01:57.303 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe:Open pumping valve。
- [Save Log Job] 2024-12-26 11:01:57.331 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
- [Save Log Job] 2024-12-26 11:01:59.166 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe:Check chamber pressure。
- [Save Log Job] 2024-12-26 11:02:01.956 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation AbortRecipe()
- [Save Log Job] 2024-12-26 11:02:04.496 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle
- [Save Log Job] 2024-12-26 11:02:04.694 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
- [Save Log Job] 2024-12-26 11:02:18.194 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
- [Save Log Job] 2024-12-26 11:02:18.199 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
- [Save Log Job] 2024-12-26 11:02:25.505 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
- [Save Log Job] 2024-12-26 11:02:27.190 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
- [Save Log Job] 2024-12-26 11:02:31.967 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation RunRecipe(CACB, , , )
- [Save Log Job] 2024-12-26 11:02:31.968 LOG.INFO LOG.cs Line:61 Write() - System通知TM保存工艺程序20241226110231-CACB
- [Save Log Job] 2024-12-26 11:02:31.968 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|LoadProcessRecipe
- [Save Log Job] 2024-12-26 11:02:31.969 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventLotStart
- [Save Log Job] 2024-12-26 11:02:31.969 LOG.INFO YZQZFabAuto.cs Line:165 StartJobRecord() - StartJobRecord|start||CACB
- [Save Log Job] 2024-12-26 11:02:31.970 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|PreProcess
- [Save Log Job] 2024-12-26 11:02:32.019 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe:Check door status。
- [Save Log Job] 2024-12-26 11:02:32.019 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe:check chamber door。
- [Save Log Job] 2024-12-26 11:02:32.019 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe:check backpanel door。
- [Save Log Job] 2024-12-26 11:02:32.019 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe:Check pump status。
- [Save Log Job] 2024-12-26 11:02:32.020 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe:Close all the valves。
- [Save Log Job] 2024-12-26 11:02:32.077 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe:Open pumping valve。
- [Save Log Job] 2024-12-26 11:02:32.160 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
- [Save Log Job] 2024-12-26 11:02:34.111 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门Chamber pumping valveOpen失败,原因:Valve keep closed 。
- [Save Log Job] 2024-12-26 11:02:36.179 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe:Check chamber pressure。
- [Save Log Job] 2024-12-26 11:02:52.981 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
- [Save Log Job] 2024-12-26 11:02:52.986 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
- [Save Log Job] 2024-12-26 11:02:57.191 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
- [Save Log Job] 2024-12-26 11:03:11.111 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe:Pump below 100mTorr。
- [Save Log Job] 2024-12-26 11:03:11.168 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe:PreProcess Finished in 0.7 minitues。
- [Save Log Job] 2024-12-26 11:03:11.168 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System complete run ''PreProcess''.
- [Save Log Job] 2024-12-26 11:03:11.170 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Run Recipe 20241226110231-CACB
- [Save Log Job] 2024-12-26 11:03:11.170 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe start run''20241226110231-CACB''
- [Save Log Job] 2024-12-26 11:03:11.170 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Processing
- [Save Log Job] 2024-12-26 11:03:11.223 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe''20241226110231-CACB'' start run step 1:initial。
- [Save Log Job] 2024-12-26 11:03:11.224 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute:PressureControl.SetTVMode,TV mode set to TVPressureCtrl。
- [Save Log Job] 2024-12-26 11:03:11.224 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。
- [Save Log Job] 2024-12-26 11:03:11.224 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute:PressureControl.SetTVPressure,TV pressure set to 50 mtorr。
- [Save Log Job] 2024-12-26 11:03:11.225 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute:PressureControl.SetBoostPressure,Boost pump pressure set to 100 mTorr。
- [Save Log Job] 2024-12-26 11:03:11.225 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute:Rf.SetMode,Set RF work mode to ContinuousWaveMode。
- [Save Log Job] 2024-12-26 11:03:11.225 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute:Rf.SetPulsingFrequency,RF set Frequency:0。
- [Save Log Job] 2024-12-26 11:03:11.225 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute:Rf.SetPulsingDuty,RF set Duty:0 。
- [Save Log Job] 2024-12-26 11:03:11.226 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute:Rf.SetPower,RF set Power:0。
- [Save Log Job] 2024-12-26 11:03:11.226 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute:Rf.SetMatchProcessMode,Match mode set to PresetMode。
- [Save Log Job] 2024-12-26 11:03:11.226 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute:Rf.SetMatchPositionC1,Set RF match position c1 :50。
- [Save Log Job] 2024-12-26 11:03:11.226 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute:Rf.SetMatchPositionC2,Set RF match position c2 :50。
- [Save Log Job] 2024-12-26 11:03:11.226 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute:MfcGas1, ramp to 45sccm。
- [Save Log Job] 2024-12-26 11:03:11.226 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute:MfcGas2, ramp to 56sccm。
- [Save Log Job] 2024-12-26 11:03:11.227 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute:MfcGas3, ramp to 66sccm。
- [Save Log Job] 2024-12-26 11:03:11.227 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute:MfcGas4, ramp to 76sccm。
- [Save Log Job] 2024-12-26 11:03:11.227 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute:MfcGas5, ramp to 86sccm。
- [Save Log Job] 2024-12-26 11:03:11.227 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute:Rf.SetPowerOnOff,Set RF power Off。
- [Save Log Job] 2024-12-26 11:03:11.277 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Start monitor pressure stability
- [Save Log Job] 2024-12-26 11:03:14.757 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation AbortRecipe()
- [Save Log Job] 2024-12-26 11:03:17.870 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe was aborted: user aborted recipe
- [Save Log Job] 2024-12-26 11:03:17.872 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Stop monitor pressure stability
- [Save Log Job] 2024-12-26 11:03:17.874 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Recipe run completed,Recipe:20241226110231-CACB
- Start time:2024/12/26 11:03:11
- End time:2024/12/26 11:03:17
- Total time:0:0:6
- [Save Log Job] 2024-12-26 11:03:17.875 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Recipe completely run
- [Save Log Job] 2024-12-26 11:03:17.875 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|PostProcess
- [Save Log Job] 2024-12-26 11:03:17.927 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, wait for 10 seconds
- [Save Log Job] 2024-12-26 11:03:19.893 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC1 ValveClose失败,原因:Valve keep open。
- [Save Log Job] 2024-12-26 11:03:19.895 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC2 ValveClose失败,原因:Valve keep open。
- [Save Log Job] 2024-12-26 11:03:19.895 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC3 ValveClose失败,原因:Valve keep open。
- [Save Log Job] 2024-12-26 11:03:19.895 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC4 ValveClose失败,原因:Valve keep open。
- [Save Log Job] 2024-12-26 11:03:19.895 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC5 ValveClose失败,原因:Valve keep open。
- [Save Log Job] 2024-12-26 11:03:19.895 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门Process gas final valveClose失败,原因:Valve keep open。
- [Save Log Job] 2024-12-26 11:03:27.192 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
- [Save Log Job] 2024-12-26 11:03:28.007 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, RF Power Off
- [Save Log Job] 2024-12-26 11:03:28.066 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, Stop all the gas flow
- [Save Log Job] 2024-12-26 11:03:28.124 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, Close all the valves
- [Save Log Job] 2024-12-26 11:03:28.182 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, close pump valve
- [Save Log Job] 2024-12-26 11:03:29.138 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, delay 3 seconds
- [Save Log Job] 2024-12-26 11:03:32.178 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
- [Save Log Job] 2024-12-26 11:03:32.244 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, vent 50 seconds
- [Save Log Job] 2024-12-26 11:03:38.885 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
- [Save Log Job] 2024-12-26 11:03:57.192 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
- [Save Log Job] 2024-12-26 11:04:22.350 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, Close vent valve
- [Save Log Job] 2024-12-26 11:04:23.170 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, PostProcess Finished in 1.1 minitues
- [Save Log Job] 2024-12-26 11:04:23.170 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System complete run ''PostProcess''.
- [Save Log Job] 2024-12-26 11:04:23.171 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventLotFinished
- [Save Log Job] 2024-12-26 11:04:23.172 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle
- [Save Log Job] 2024-12-26 11:04:23.172 LOG.INFO YZQZFabAuto.cs Line:212 EndJobRecord() - EndJobRecord|
- [Save Log Job] 2024-12-26 11:04:23.172 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
- [Save Log Job] 2024-12-26 11:04:23.179 LOG.INFO YZQZFabAuto.cs Line:243 Export2CsvLocalFile() - Export2CsvLocalFileD:\jet.plasma\trunk\Triton160\Triton160RT\bin\Debug\Logs\.csv
- [Save Log Job] 2024-12-26 11:04:23.181 LOG.INFO YZQZFabAuto.cs Line:291 Export2CsvWanPanFile() - Export2CsvWanPanFile\\192.168.1.208\CHIP_LoaderPath\JetplasmaDaJiao\SourceFolder\.csv
- [Save Log Job] 2024-12-26 11:04:23.291 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
- [Save Log Job] 2024-12-26 11:04:44.211 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
- [Save Log Job] 2024-12-26 11:04:49.707 LOG.INFO YZQZFabAuto.cs Line:327 Export2CsvWanPanFile() - 找不到网络路径。
- [Save Log Job] 2024-12-26 11:13:20.611 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetManualMode()
- [Save Log Job] 2024-12-26 11:13:20.612 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentModeChanged
- [Save Log Job] 2024-12-26 11:13:20.612 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System running mode changed to Manual Mode
- [Save Log Job] 2024-12-26 11:13:25.507 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation DeviceOperation(BoostPump, SetPressure, 100)
- [Save Log Job] 2024-12-26 11:13:25.508 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute:BoostPump.SetPressure,。
- [Save Log Job] 2024-12-26 11:13:25.509 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetConfig(System_PumpBasePressure, 500)
- [Save Log Job] 2024-12-26 11:13:25.509 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetConfig(System_PumpTimeLimit, 10)
- [Save Log Job] 2024-12-26 11:13:25.510 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation Pump()
- [Save Log Job] 2024-12-26 11:13:25.511 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Pumping
- [Save Log Job] 2024-12-26 11:13:25.563 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Pumping Down:Check door status。
- [Save Log Job] 2024-12-26 11:13:25.563 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Pumping Down:check chamber door。
- [Save Log Job] 2024-12-26 11:13:25.563 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Pumping Down:check backpanel door。
- [Save Log Job] 2024-12-26 11:13:25.563 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Pumping Down:Check pump status。
- [Save Log Job] 2024-12-26 11:13:25.563 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Pumping Down:Close all the valves。
- [Save Log Job] 2024-12-26 11:13:25.621 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Pumping Down:Open pumping valve。
- [Save Log Job] 2024-12-26 11:13:25.654 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
- [Save Log Job] 2024-12-26 11:13:27.654 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门Chamber pumping valveOpen失败,原因:Valve keep closed 。
- [Save Log Job] 2024-12-26 11:13:28.040 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Pumping Down:Wait chamber pressure until below 500。
- [Save Log Job] 2024-12-26 11:13:34.810 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation Abort()
- [Save Log Job] 2024-12-26 11:13:34.811 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle
- [Save Log Job] 2024-12-26 11:13:34.876 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
- [Save Log Job] 2024-12-26 11:13:42.835 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation DeviceOperation(BoostPump, SetPressure, 100)
- [Save Log Job] 2024-12-26 11:13:42.835 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute:BoostPump.SetPressure,。
- [Save Log Job] 2024-12-26 11:13:42.836 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetConfig(System_PumpBasePressure, 500)
- [Save Log Job] 2024-12-26 11:13:42.837 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetConfig(System_PumpTimeLimit, 10)
- [Save Log Job] 2024-12-26 11:13:42.838 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation Pump()
- [Save Log Job] 2024-12-26 11:13:42.838 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Pumping
- [Save Log Job] 2024-12-26 11:13:42.888 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Pumping Down:Check door status。
- [Save Log Job] 2024-12-26 11:13:42.889 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Pumping Down:check chamber door。
- [Save Log Job] 2024-12-26 11:13:42.889 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Pumping Down:check backpanel door。
- [Save Log Job] 2024-12-26 11:13:42.889 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Pumping Down:Check pump status。
- [Save Log Job] 2024-12-26 11:13:42.889 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Pumping Down:Close all the valves。
- [Save Log Job] 2024-12-26 11:13:42.893 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
- [Save Log Job] 2024-12-26 11:13:42.945 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Pumping Down:Open pumping valve。
- [Save Log Job] 2024-12-26 11:13:43.449 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Pumping Down:Wait chamber pressure until below 500。
- [Save Log Job] 2024-12-26 11:13:46.520 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
- [Save Log Job] 2024-12-26 11:13:53.469 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Can not pump to base pressure 500 in 10 seconds。
- [Save Log Job] 2024-12-26 11:13:53.476 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle
- [Save Log Job] 2024-12-26 11:13:53.525 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
- [Save Log Job] 2024-12-26 11:13:53.580 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation Abort()
- [Save Log Job] 2024-12-26 11:13:53.581 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Chamber is in Idle,can not do Abort。
- [Save Log Job] 2024-12-26 11:13:55.818 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
- [Save Log Job] 2024-12-26 11:14:02.651 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation StopPump()
- [Save Log Job] 2024-12-26 11:14:02.651 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|StopPumping
- [Save Log Job] 2024-12-26 11:14:02.702 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Stop pump:Check if the rf is on。
- [Save Log Job] 2024-12-26 11:14:02.741 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
- [Save Log Job] 2024-12-26 11:14:02.761 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Stop pump:Check if the gas stopped flowing。
- [Save Log Job] 2024-12-26 11:14:02.817 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Stop pump:Close close pump valve。
- [Save Log Job] 2024-12-26 11:14:03.848 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
- [Save Log Job] 2024-12-26 11:14:04.835 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门Chamber pumping valveClose失败,原因:Valve keep open。
- [Save Log Job] 2024-12-26 11:14:06.522 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Stop pump:Stop Pump Finished in 0.1 minitues。
- [Save Log Job] 2024-12-26 11:14:06.522 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System complete run ''Stop Pump''.
- [Save Log Job] 2024-12-26 11:14:06.522 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Stop Pump
- [Save Log Job] 2024-12-26 11:14:06.523 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle
- [Save Log Job] 2024-12-26 11:14:06.548 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
- [Save Log Job] 2024-12-26 11:14:14.485 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
- [Save Log Job] 2024-12-26 11:14:18.964 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation DeviceOperation(BoostPump, SetPressure, 100)
- [Save Log Job] 2024-12-26 11:14:18.964 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute:BoostPump.SetPressure,。
- [Save Log Job] 2024-12-26 11:14:18.965 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetConfig(System_PumpBasePressure, 500)
- [Save Log Job] 2024-12-26 11:14:18.965 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetConfig(System_PumpTimeLimit, 10)
- [Save Log Job] 2024-12-26 11:14:18.966 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation Pump()
- [Save Log Job] 2024-12-26 11:14:18.966 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Pumping
- [Save Log Job] 2024-12-26 11:14:18.977 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
- [Save Log Job] 2024-12-26 11:14:19.016 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Pumping Down:Check door status。
- [Save Log Job] 2024-12-26 11:14:19.016 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Pumping Down:check chamber door。
- [Save Log Job] 2024-12-26 11:14:19.016 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Pumping Down:check backpanel door。
- [Save Log Job] 2024-12-26 11:14:19.016 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Pumping Down:Check pump status。
- [Save Log Job] 2024-12-26 11:14:19.016 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Pumping Down:Close all the valves。
- [Save Log Job] 2024-12-26 11:14:19.073 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Pumping Down:Open pumping valve。
- [Save Log Job] 2024-12-26 11:14:21.108 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门Chamber pumping valveOpen失败,原因:Valve keep closed 。
- [Save Log Job] 2024-12-26 11:14:21.886 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Pumping Down:Wait chamber pressure until below 500。
- [Save Log Job] 2024-12-26 11:14:23.660 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
- [Save Log Job] 2024-12-26 11:14:27.532 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
- [Save Log Job] 2024-12-26 11:14:28.035 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation Abort()
- [Save Log Job] 2024-12-26 11:14:28.036 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle
- [Save Log Job] 2024-12-26 11:14:28.205 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
- [Save Log Job] 2024-12-26 11:14:39.974 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
- [Save Log Job] 2024-12-26 11:14:45.531 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation DeviceOperation(BoostPump, SetPressure, 100)
- [Save Log Job] 2024-12-26 11:14:45.531 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute:BoostPump.SetPressure,。
- [Save Log Job] 2024-12-26 11:14:45.532 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetConfig(System_PumpBasePressure, 500)
- [Save Log Job] 2024-12-26 11:14:45.533 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetConfig(System_PumpTimeLimit, 10)
- [Save Log Job] 2024-12-26 11:14:45.533 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation Pump()
- [Save Log Job] 2024-12-26 11:14:45.534 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Pumping
- [Save Log Job] 2024-12-26 11:14:45.585 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Pumping Down:Check door status。
- [Save Log Job] 2024-12-26 11:14:45.585 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Pumping Down:check chamber door。
- [Save Log Job] 2024-12-26 11:14:45.585 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Pumping Down:check backpanel door。
- [Save Log Job] 2024-12-26 11:14:45.585 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Pumping Down:Check pump status。
- [Save Log Job] 2024-12-26 11:14:45.585 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Pumping Down:Close all the valves。
- [Save Log Job] 2024-12-26 11:14:45.641 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
- [Save Log Job] 2024-12-26 11:14:45.641 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Pumping Down:Open pumping valve。
- [Save Log Job] 2024-12-26 11:14:47.674 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门Chamber pumping valveOpen失败,原因:Valve keep closed 。
- [Save Log Job] 2024-12-26 11:14:48.728 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Pumping Down:Wait chamber pressure until below 500。
- [Save Log Job] 2024-12-26 11:14:49.046 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
- [Save Log Job] 2024-12-26 11:14:53.755 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation Abort()
- [Save Log Job] 2024-12-26 11:14:53.755 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle
- [Save Log Job] 2024-12-26 11:14:53.867 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
- [Save Log Job] 2024-12-26 11:14:55.756 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门Chamber pumping valveClose失败,原因:Valve keep open。
- [Save Log Job] 2024-12-26 11:15:06.541 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
- [Save Log Job] 2024-12-26 11:15:14.762 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
- [Save Log Job] 2024-12-26 11:15:28.483 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation DeviceOperation(BoostPump, SetPressure, 100)
- [Save Log Job] 2024-12-26 11:15:28.483 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute:BoostPump.SetPressure,。
- [Save Log Job] 2024-12-26 11:15:28.484 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetConfig(System_PumpBasePressure, 500)
- [Save Log Job] 2024-12-26 11:15:28.484 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetConfig(System_PumpTimeLimit, 10)
- [Save Log Job] 2024-12-26 11:15:28.485 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation Pump()
- [Save Log Job] 2024-12-26 11:15:28.485 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Pumping
- [Save Log Job] 2024-12-26 11:15:28.535 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Pumping Down:Check door status。
- [Save Log Job] 2024-12-26 11:15:28.536 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
- [Save Log Job] 2024-12-26 11:15:28.536 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Pumping Down:check chamber door。
- [Save Log Job] 2024-12-26 11:15:28.536 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Pumping Down:check backpanel door。
- [Save Log Job] 2024-12-26 11:15:28.536 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Pumping Down:Check pump status。
- [Save Log Job] 2024-12-26 11:15:28.536 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Pumping Down:Close all the valves。
- [Save Log Job] 2024-12-26 11:15:28.593 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Pumping Down:Open pumping valve。
- [Save Log Job] 2024-12-26 11:15:30.636 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门Chamber pumping valveOpen失败,原因:Valve keep closed 。
- [Save Log Job] 2024-12-26 11:15:30.968 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Pumping Down:Wait chamber pressure until below 500。
- [Save Log Job] 2024-12-26 11:15:31.303 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Pumping Down:Pump below 500mTorr。
- [Save Log Job] 2024-12-26 11:15:31.360 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Pumping Down:Pump Finished in 0.0 minitues。
- [Save Log Job] 2024-12-26 11:15:31.360 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System complete run ''Pump''.
- [Save Log Job] 2024-12-26 11:15:31.360 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Pump
- [Save Log Job] 2024-12-26 11:15:31.361 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle
- [Save Log Job] 2024-12-26 11:15:31.547 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
- [Save Log Job] 2024-12-26 11:15:41.994 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation StopPump()
- [Save Log Job] 2024-12-26 11:15:41.995 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|StopPumping
- [Save Log Job] 2024-12-26 11:15:42.046 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
- [Save Log Job] 2024-12-26 11:15:42.046 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Stop pump:Check if the rf is on。
- [Save Log Job] 2024-12-26 11:15:42.102 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Stop pump:Check if the gas stopped flowing。
- [Save Log Job] 2024-12-26 11:15:42.160 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Stop pump:Close close pump valve。
- [Save Log Job] 2024-12-26 11:15:44.183 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门Chamber pumping valveClose失败,原因:Valve keep open。
- [Save Log Job] 2024-12-26 11:15:46.360 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Stop pump:Stop Pump Finished in 0.1 minitues。
- [Save Log Job] 2024-12-26 11:15:46.360 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System complete run ''Stop Pump''.
- [Save Log Job] 2024-12-26 11:15:46.360 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Stop Pump
- [Save Log Job] 2024-12-26 11:15:46.361 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle
- [Save Log Job] 2024-12-26 11:15:46.376 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
- [Save Log Job] 2024-12-26 11:15:49.493 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
- [Save Log Job] 2024-12-26 11:15:52.370 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
- [Save Log Job] 2024-12-26 11:16:03.008 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
- [Save Log Job] 2024-12-26 11:16:07.372 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
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