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log20241226.txt

log20241226.txt 125 KB
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  1. <==  [Save Log Job] 2024-12-26 08:57:55.915 LOG.INFO LOG.cs Line:61 Write() - 完成对数据库表格的更新操作
    2. 

  2. [Save Log Job] 2024-12-26 08:57:56.740 LOG.INFO EventService.cs Line:60 Register() - 客户端4bde1808-a4cd-48e0-b739-8ecf38907e11已连接
    3. 

  3. [Save Log Job] 2024-12-26 08:57:56.741 LOG.INFO EventService.cs Line:60 Register() - 客户端4bde1808-a4cd-48e0-b739-8ecf38907e11已连接
    4. 

  4. [Save Log Job] 2024-12-26 08:57:57.016 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, <IoSensor id="SensorBackPanelDoor" display=""  schematicId="" unit="" di="DI_back_panle_door_sw" isLowAsNormal="false" infoText="BackPanel door is opened" warningText="" alarmText="" />
    5. 

  5. [Save Log Job] 2024-12-26 08:57:57.016 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, <IoSensor id="SensorPumpDoor"      display=""  schematicId="" unit="" di="DI_pump_door_sw"    isLowAsNormal="false" infoText="" warningText="" alarmText="" />
    6. 

  6. [Save Log Job] 2024-12-26 08:57:57.090 LOG.INFO LOG.cs Line:61 Write() - Routine System 初始化 Start
    7. 

  7. [Save Log Job] 2024-12-26 08:57:58.176 LOG.INFO YZQZFabAuto.cs Line:117 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle
    8. 

  8. [Save Log Job] 2024-12-26 08:57:58.180 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle
    9. 

  9. [Save Log Job] 2024-12-26 08:57:58.298 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle
    10. 

  10. [Save Log Job] 2024-12-26 08:57:58.322 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
    11. 

  11. [Save Log Job] 2024-12-26 08:57:58.346 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle
    12. 

  12. [Save Log Job] 2024-12-26 08:57:59.323 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetConfig(System_IsMesMode, True)
    13. 

  13. [Save Log Job] 2024-12-26 08:58:02.099 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Software will be expired in -63 days, at 10/24/2024 12:00:00 AM 。
    14. 

  14. [Save Log Job] 2024-12-26 08:58:16.547 LOG.INFO LOG.cs Line:61 Write() - 用户admin尝试登录系统
    15. 

  15. [Save Log Job] 2024-12-26 08:58:16.548 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin
    16. 

  16. [Save Log Job] 2024-12-26 08:58:16.563 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - User admin login
    17. 

  17. [Save Log Job] 2024-12-26 08:58:16.699 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin
    18. 

  18. [Save Log Job] 2024-12-26 08:58:19.258 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
    19. 

  19. [Save Log Job] 2024-12-26 08:58:19.306 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
    20. 

  20. [Save Log Job] 2024-12-26 08:58:19.364 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
    21. 

  21. <==  [Save Log Job] 2024-12-26 09:43:32.196 LOG.INFO LOG.cs Line:61 Write() - 完成对数据库表格的更新操作
    22. 

  22. [Save Log Job] 2024-12-26 09:43:33.220 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, <IoSensor id="SensorBackPanelDoor" display=""  schematicId="" unit="" di="DI_back_panle_door_sw" isLowAsNormal="false" infoText="BackPanel door is opened" warningText="" alarmText="" />
    23. 

  23. [Save Log Job] 2024-12-26 09:43:33.221 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, <IoSensor id="SensorPumpDoor"      display=""  schematicId="" unit="" di="DI_pump_door_sw"    isLowAsNormal="false" infoText="" warningText="" alarmText="" />
    24. 

  24. [Save Log Job] 2024-12-26 09:43:33.276 LOG.INFO LOG.cs Line:61 Write() - Routine System 初始化 Start
    25. 

  25. [Save Log Job] 2024-12-26 09:43:33.393 LOG.INFO EventService.cs Line:60 Register() - 客户端1e5be2ed-7244-491c-8cc7-0e98b05eddc2已连接
    26. 

  26. [Save Log Job] 2024-12-26 09:43:33.393 LOG.INFO EventService.cs Line:60 Register() - 客户端1e5be2ed-7244-491c-8cc7-0e98b05eddc2已连接
    27. 

  27. [Save Log Job] 2024-12-26 09:43:34.272 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle
    28. 

  28. [Save Log Job] 2024-12-26 09:43:34.328 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle
    29. 

  29. [Save Log Job] 2024-12-26 09:43:34.512 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle
    30. 

  30. [Save Log Job] 2024-12-26 09:43:34.556 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle
    31. 

  31. [Save Log Job] 2024-12-26 09:43:34.704 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
    32. 

  32. [Save Log Job] 2024-12-26 09:43:34.884 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetConfig(System_IsMesMode, True)
    33. 

  33. [Save Log Job] 2024-12-26 09:43:38.290 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Software will be expired in -63 days, at 10/24/2024 12:00:00 AM 。
    34. 

  34. [Save Log Job] 2024-12-26 09:43:44.832 LOG.INFO LOG.cs Line:61 Write() - 用户admin尝试登录系统
    35. 

  35. [Save Log Job] 2024-12-26 09:43:44.833 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin
    36. 

  36. [Save Log Job] 2024-12-26 09:43:44.845 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - User admin login
    37. 

  37. [Save Log Job] 2024-12-26 09:43:44.984 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin
    38. 

  38. [Save Log Job] 2024-12-26 09:43:53.409 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetAutoMode()
    39. 

  39. [Save Log Job] 2024-12-26 09:43:53.410 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentModeChanged
    40. 

  40. [Save Log Job] 2024-12-26 09:43:53.410 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System running mode changed to Auto Mode
    41. 

  41. [Save Log Job] 2024-12-26 09:43:55.325 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
    42. 

  42. [Save Log Job] 2024-12-26 09:43:55.337 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
    43. 

  43. [Save Log Job] 2024-12-26 09:43:55.520 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
    44. 

  44. [Save Log Job] 2024-12-26 09:43:55.566 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
    45. 

  45. [Save Log Job] 2024-12-26 09:43:56.530 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation RunRecipe(CACB, , , )
    46. 

  46. [Save Log Job] 2024-12-26 09:43:56.562 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|LoadProcessRecipe
    47. 

  47. [Save Log Job] 2024-12-26 09:43:56.564 LOG.INFO LOG.cs Line:61 Write() - System通知TM保存工艺程序20241226094356-CACB
    48. 

  48. [Save Log Job] 2024-12-26 09:43:56.564 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventLotStart
    49. 

  49. [Save Log Job] 2024-12-26 09:43:56.567 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|PreProcess
    50. 

  50. [Save Log Job] 2024-12-26 09:43:56.567 LOG.INFO YZQZFabAuto.cs Line:165 StartJobRecord() - StartJobRecord|start||CACB
    51. 

  51. [Save Log Job] 2024-12-26 09:43:56.568 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    52. 

  52. [Save Log Job] 2024-12-26 09:43:56.571 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    53. 

  53. [Save Log Job] 2024-12-26 09:43:56.579 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
    54. 

  54. [Save Log Job] 2024-12-26 09:43:56.622 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check door status。
    55. 

  55. [Save Log Job] 2024-12-26 09:43:56.622 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：check chamber door。
    56. 

  56. [Save Log Job] 2024-12-26 09:43:56.622 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：check backpanel door。
    57. 

  57. [Save Log Job] 2024-12-26 09:43:56.623 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check pump status。
    58. 

  58. [Save Log Job] 2024-12-26 09:43:56.624 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Close all the valves。
    59. 

  59. [Save Log Job] 2024-12-26 09:43:56.683 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Open pumping valve。
    60. 

  60. [Save Log Job] 2024-12-26 09:43:58.728 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门Chamber pumping valveOpen失败，原因：Valve keep closed 。
    61. 

  61. [Save Log Job] 2024-12-26 09:43:58.946 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check chamber pressure。
    62. 

  62. [Save Log Job] 2024-12-26 09:44:04.343 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation AbortRecipe()
    63. 

  63. [Save Log Job] 2024-12-26 09:44:27.173 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    64. 

  64. [Save Log Job] 2024-12-26 09:44:30.991 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
    65. 

  65. [Save Log Job] 2024-12-26 09:44:30.993 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
    66. 

  66. [Save Log Job] 2024-12-26 09:50:01.310 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    67. 

  67. [Save Log Job] 2024-12-26 09:50:01.313 LOG.ERROR EventLogWriter.cs Line:14 WriteEvent() - System PLC heart beat check failed，please confirm PLC still running
    68. 

  68. [Save Log Job] 2024-12-26 09:50:02.235 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Stop pump：Check if the rf is on。
    69. 

  69. [Save Log Job] 2024-12-26 09:50:02.243 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle
    70. 

  70. [Save Log Job] 2024-12-26 09:50:02.244 LOG.INFO YZQZFabAuto.cs Line:212 EndJobRecord() - EndJobRecord|
    71. 

  71. [Save Log Job] 2024-12-26 09:50:02.244 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    72. 

  72. [Save Log Job] 2024-12-26 09:50:02.272 LOG.INFO YZQZFabAuto.cs Line:243 Export2CsvLocalFile() - Export2CsvLocalFileD:\jet.plasma\trunk\Triton160\Triton160RT\bin\Debug\Logs\.csv
    73. 

  73. [Save Log Job] 2024-12-26 09:50:02.275 LOG.INFO YZQZFabAuto.cs Line:291 Export2CsvWanPanFile() - Export2CsvWanPanFile\\192.168.1.208\CHIP_LoaderPath\JetplasmaDaJiao\SourceFolder\.csv
    74. 

  74. [Save Log Job] 2024-12-26 09:50:02.353 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
    75. 

  75. [Save Log Job] 2024-12-26 09:50:12.667 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
    76. 

  76. [Save Log Job] 2024-12-26 09:50:21.767 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation RunRecipe(CACB, , , )
    77. 

  77. [Save Log Job] 2024-12-26 09:50:21.770 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|LoadProcessRecipe
    78. 

  78. [Save Log Job] 2024-12-26 09:50:21.770 LOG.INFO LOG.cs Line:61 Write() - System通知TM保存工艺程序20241226095021-CACB
    79. 

  79. [Save Log Job] 2024-12-26 09:50:21.770 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventLotStart
    80. 

  80. [Save Log Job] 2024-12-26 09:50:21.770 LOG.INFO YZQZFabAuto.cs Line:165 StartJobRecord() - StartJobRecord|start||CACB
    81. 

  81. [Save Log Job] 2024-12-26 09:50:21.770 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|PreProcess
    82. 

  82. [Save Log Job] 2024-12-26 09:50:21.770 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    83. 

  83. [Save Log Job] 2024-12-26 09:50:21.773 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    84. 

  84. [Save Log Job] 2024-12-26 09:50:21.820 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check door status。
    85. 

  85. [Save Log Job] 2024-12-26 09:50:21.820 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：check chamber door。
    86. 

  86. [Save Log Job] 2024-12-26 09:50:21.820 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：check backpanel door。
    87. 

  87. [Save Log Job] 2024-12-26 09:50:21.820 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check pump status。
    88. 

  88. [Save Log Job] 2024-12-26 09:50:21.821 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Close all the valves。
    89. 

  89. [Save Log Job] 2024-12-26 09:50:21.877 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Open pumping valve。
    90. 

  90. [Save Log Job] 2024-12-26 09:50:21.893 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
    91. 

  91. [Save Log Job] 2024-12-26 09:50:21.934 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check chamber pressure。
    92. 

  92. [Save Log Job] 2024-12-26 09:50:23.250 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
    93. 

  93. [Save Log Job] 2024-12-26 09:50:28.803 LOG.INFO YZQZFabAuto.cs Line:327 Export2CsvWanPanFile() - 找不到网络路径。
    94. 

  94. 

  95. [Save Log Job] 2024-12-26 09:50:41.496 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Pump below 100mTorr。
    96. 

  96. [Save Log Job] 2024-12-26 09:50:41.554 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：PreProcess Finished in 0.3 minitues。
    97. 

  97. [Save Log Job] 2024-12-26 09:50:41.554 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System complete run ''PreProcess''.
    98. 

  98. [Save Log Job] 2024-12-26 09:50:41.560 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Run Recipe 20241226095021-CACB
    99. 

  99. [Save Log Job] 2024-12-26 09:50:41.560 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe start run''20241226095021-CACB''
    100. 

  100. [Save Log Job] 2024-12-26 09:50:41.561 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Processing
    101. 

  101. [Save Log Job] 2024-12-26 09:50:41.613 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe''20241226095021-CACB'' start run step 1：initial。
    102. 

  102. [Save Log Job] 2024-12-26 09:50:41.614 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。
    103. 

  103. [Save Log Job] 2024-12-26 09:50:41.614 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。
    104. 

  104. [Save Log Job] 2024-12-26 09:50:41.615 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。
    105. 

  105. [Save Log Job] 2024-12-26 09:50:41.615 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。
    106. 

  106. [Save Log Job] 2024-12-26 09:50:41.616 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。
    107. 

  107. [Save Log Job] 2024-12-26 09:50:41.616 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。
    108. 

  108. [Save Log Job] 2024-12-26 09:50:41.616 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。
    109. 

  109. [Save Log Job] 2024-12-26 09:50:41.616 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPower，RF set Power:0。
    110. 

  110. [Save Log Job] 2024-12-26 09:50:41.617 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。
    111. 

  111. [Save Log Job] 2024-12-26 09:50:41.617 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。
    112. 

  112. [Save Log Job] 2024-12-26 09:50:41.617 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。
    113. 

  113. [Save Log Job] 2024-12-26 09:50:41.617 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas1， ramp to 45sccm。
    114. 

  114. [Save Log Job] 2024-12-26 09:50:41.618 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas2， ramp to 56sccm。
    115. 

  115. [Save Log Job] 2024-12-26 09:50:41.618 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas3， ramp to 66sccm。
    116. 

  116. [Save Log Job] 2024-12-26 09:50:41.618 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas4， ramp to 76sccm。
    117. 

  117. [Save Log Job] 2024-12-26 09:50:41.618 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas5， ramp to 86sccm。
    118. 

  118. [Save Log Job] 2024-12-26 09:50:41.618 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPowerOnOff，Set RF power Off。
    119. 

  119. [Save Log Job] 2024-12-26 09:50:41.668 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Start monitor pressure stability
    120. 

  120. [Save Log Job] 2024-12-26 09:50:42.779 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
    121. 

  121. [Save Log Job] 2024-12-26 09:50:42.784 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
    122. 

  122. [Save Log Job] 2024-12-26 09:50:51.777 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    123. 

  123. <==  [Save Log Job] 2024-12-26 09:52:27.020 LOG.INFO LOG.cs Line:61 Write() - 完成对数据库表格的更新操作
    124. 

  124. [Save Log Job] 2024-12-26 09:52:27.805 LOG.INFO EventService.cs Line:60 Register() - 客户端522ff4da-e62f-4aee-8f55-416eeaa08e4f已连接
    125. 

  125. [Save Log Job] 2024-12-26 09:52:27.954 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, <IoSensor id="SensorBackPanelDoor" display=""  schematicId="" unit="" di="DI_back_panle_door_sw" isLowAsNormal="false" infoText="BackPanel door is opened" warningText="" alarmText="" />
    126. 

  126. [Save Log Job] 2024-12-26 09:52:27.955 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, <IoSensor id="SensorPumpDoor"      display=""  schematicId="" unit="" di="DI_pump_door_sw"    isLowAsNormal="false" infoText="" warningText="" alarmText="" />
    127. 

  127. [Save Log Job] 2024-12-26 09:52:28.027 LOG.INFO LOG.cs Line:61 Write() - Routine System 初始化 Start
    128. 

  128. [Save Log Job] 2024-12-26 09:52:29.021 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle
    129. 

  129. [Save Log Job] 2024-12-26 09:52:29.087 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle
    130. 

  130. [Save Log Job] 2024-12-26 09:52:29.244 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetConfig(System_IsMesMode, True)
    131. 

  131. [Save Log Job] 2024-12-26 09:52:29.253 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle
    132. 

  132. [Save Log Job] 2024-12-26 09:52:29.281 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
    133. 

  133. [Save Log Job] 2024-12-26 09:52:29.308 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle
    134. 

  134. <==  [Save Log Job] 2024-12-26 09:53:23.380 LOG.INFO LOG.cs Line:61 Write() - 完成对数据库表格的更新操作
    135. 

  135. [Save Log Job] 2024-12-26 09:53:24.240 LOG.INFO EventService.cs Line:60 Register() - 客户端9f06e823-37fc-4ad6-a1b4-b482173e76ee已连接
    136. 

  136. [Save Log Job] 2024-12-26 09:53:24.438 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, <IoSensor id="SensorBackPanelDoor" display=""  schematicId="" unit="" di="DI_back_panle_door_sw" isLowAsNormal="false" infoText="BackPanel door is opened" warningText="" alarmText="" />
    137. 

  137. [Save Log Job] 2024-12-26 09:53:24.441 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, <IoSensor id="SensorPumpDoor"      display=""  schematicId="" unit="" di="DI_pump_door_sw"    isLowAsNormal="false" infoText="" warningText="" alarmText="" />
    138. 

  138. [Save Log Job] 2024-12-26 09:53:24.492 LOG.INFO LOG.cs Line:61 Write() - Routine System 初始化 Start
    139. 

  139. [Save Log Job] 2024-12-26 09:53:25.472 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle
    140. 

  140. [Save Log Job] 2024-12-26 09:53:25.527 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle
    141. 

  141. [Save Log Job] 2024-12-26 09:53:25.637 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetConfig(System_IsMesMode, True)
    142. 

  142. [Save Log Job] 2024-12-26 09:53:25.694 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle
    143. 

  143. [Save Log Job] 2024-12-26 09:53:25.701 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
    144. 

  144. [Save Log Job] 2024-12-26 09:53:25.743 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle
    145. 

  145. [Save Log Job] 2024-12-26 09:53:29.502 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Software will be expired in -63 days, at 10/24/2024 12:00:00 AM 。
    146. 

  146. [Save Log Job] 2024-12-26 09:53:34.499 LOG.INFO LOG.cs Line:61 Write() - 用户admin尝试登录系统
    147. 

  147. [Save Log Job] 2024-12-26 09:53:34.500 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin
    148. 

  148. [Save Log Job] 2024-12-26 09:53:34.505 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - User admin login
    149. 

  149. [Save Log Job] 2024-12-26 09:53:34.638 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin
    150. 

  150. [Save Log Job] 2024-12-26 09:53:46.523 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
    151. 

  151. [Save Log Job] 2024-12-26 09:53:46.540 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
    152. 

  152. [Save Log Job] 2024-12-26 09:53:46.702 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
    153. 

  153. [Save Log Job] 2024-12-26 09:53:46.754 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
    154. 

  154. [Save Log Job] 2024-12-26 09:53:47.509 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetAutoMode()
    155. 

  155. [Save Log Job] 2024-12-26 09:53:47.511 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentModeChanged
    156. 

  156. [Save Log Job] 2024-12-26 09:53:47.511 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System running mode changed to Auto Mode
    157. 

  157. [Save Log Job] 2024-12-26 09:53:49.574 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation RunRecipe(CACB, , , )
    158. 

  158. [Save Log Job] 2024-12-26 09:53:49.594 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|LoadProcessRecipe
    159. 

  159. [Save Log Job] 2024-12-26 09:53:49.597 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
    160. 

  160. [Save Log Job] 2024-12-26 09:53:49.598 LOG.INFO LOG.cs Line:61 Write() - System通知TM保存工艺程序20241226095349-CACB
    161. 

  161. [Save Log Job] 2024-12-26 09:53:49.598 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventLotStart
    162. 

  162. [Save Log Job] 2024-12-26 09:53:49.599 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|PreProcess
    163. 

  163. [Save Log Job] 2024-12-26 09:53:49.600 LOG.INFO YZQZFabAuto.cs Line:165 StartJobRecord() - StartJobRecord|start||CACB
    164. 

  164. [Save Log Job] 2024-12-26 09:53:49.600 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    165. 

  165. [Save Log Job] 2024-12-26 09:53:49.604 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    166. 

  166. [Save Log Job] 2024-12-26 09:53:49.653 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check door status。
    167. 

  167. [Save Log Job] 2024-12-26 09:53:49.654 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：check chamber door。
    168. 

  168. [Save Log Job] 2024-12-26 09:53:49.654 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：check backpanel door。
    169. 

  169. [Save Log Job] 2024-12-26 09:53:49.655 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check pump status。
    170. 

  170. [Save Log Job] 2024-12-26 09:53:49.656 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Close all the valves。
    171. 

  171. [Save Log Job] 2024-12-26 09:53:49.716 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Open pumping valve。
    172. 

  172. [Save Log Job] 2024-12-26 09:53:50.171 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check chamber pressure。
    173. 

  173. [Save Log Job] 2024-12-26 09:53:56.561 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation AbortRecipe()
    174. 

  174. [Save Log Job] 2024-12-26 09:54:12.984 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
    175. 

  175. [Save Log Job] 2024-12-26 09:54:12.989 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
    176. 

  176. [Save Log Job] 2024-12-26 09:54:19.628 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    177. 

  177. [Save Log Job] 2024-12-26 09:54:49.761 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    178. 

  178. [Save Log Job] 2024-12-26 09:55:00.818 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门Chamber pumping valveClose失败，原因：Valve keep open。
    179. 

  179. [Save Log Job] 2024-12-26 09:55:00.819 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Stop pump：Check if the rf is on。
    180. 

  180. [Save Log Job] 2024-12-26 09:55:00.828 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle
    181. 

  181. [Save Log Job] 2024-12-26 09:55:01.020 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
    182. 

  182. [Save Log Job] 2024-12-26 09:55:19.767 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    183. 

  183. [Save Log Job] 2024-12-26 09:55:21.836 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
    184. 

  184. [Save Log Job] 2024-12-26 09:55:31.981 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation RunRecipe(CACB, , , )
    185. 

  185. [Save Log Job] 2024-12-26 09:55:31.983 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|LoadProcessRecipe
    186. 

  186. [Save Log Job] 2024-12-26 09:55:31.983 LOG.INFO LOG.cs Line:61 Write() - System通知TM保存工艺程序20241226095531-CACB
    187. 

  187. [Save Log Job] 2024-12-26 09:55:31.983 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventLotStart
    188. 

  188. [Save Log Job] 2024-12-26 09:55:31.984 LOG.INFO YZQZFabAuto.cs Line:165 StartJobRecord() - StartJobRecord|start||CACB
    189. 

  189. [Save Log Job] 2024-12-26 09:55:31.984 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|PreProcess
    190. 

  190. [Save Log Job] 2024-12-26 09:55:32.034 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check door status。
    191. 

  191. [Save Log Job] 2024-12-26 09:55:32.034 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：check chamber door。
    192. 

  192. [Save Log Job] 2024-12-26 09:55:32.034 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：check backpanel door。
    193. 

  193. [Save Log Job] 2024-12-26 09:55:32.034 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check pump status。
    194. 

  194. [Save Log Job] 2024-12-26 09:55:32.034 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Close all the valves。
    195. 

  195. [Save Log Job] 2024-12-26 09:55:32.090 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Open pumping valve。
    196. 

  196. [Save Log Job] 2024-12-26 09:55:32.095 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
    197. 

  197. [Save Log Job] 2024-12-26 09:55:34.130 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门Chamber pumping valveOpen失败，原因：Valve keep closed 。
    198. 

  198. [Save Log Job] 2024-12-26 09:55:34.458 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check chamber pressure。
    199. 

  199. [Save Log Job] 2024-12-26 09:55:46.422 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Pump below 100mTorr。
    200. 

  200. [Save Log Job] 2024-12-26 09:55:46.479 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：PreProcess Finished in 0.2 minitues。
    201. 

  201. [Save Log Job] 2024-12-26 09:55:46.479 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System complete run ''PreProcess''.
    202. 

  202. [Save Log Job] 2024-12-26 09:55:46.481 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Run Recipe 20241226095531-CACB
    203. 

  203. [Save Log Job] 2024-12-26 09:55:46.481 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe start run''20241226095531-CACB''
    204. 

  204. [Save Log Job] 2024-12-26 09:55:46.482 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Processing
    205. 

  205. [Save Log Job] 2024-12-26 09:55:46.535 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe''20241226095531-CACB'' start run step 1：initial。
    206. 

  206. [Save Log Job] 2024-12-26 09:55:46.536 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。
    207. 

  207. [Save Log Job] 2024-12-26 09:55:46.536 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。
    208. 

  208. [Save Log Job] 2024-12-26 09:55:46.536 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。
    209. 

  209. [Save Log Job] 2024-12-26 09:55:46.537 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。
    210. 

  210. [Save Log Job] 2024-12-26 09:55:46.537 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。
    211. 

  211. [Save Log Job] 2024-12-26 09:55:46.537 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。
    212. 

  212. [Save Log Job] 2024-12-26 09:55:46.537 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。
    213. 

  213. [Save Log Job] 2024-12-26 09:55:46.538 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPower，RF set Power:0。
    214. 

  214. [Save Log Job] 2024-12-26 09:55:46.538 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。
    215. 

  215. [Save Log Job] 2024-12-26 09:55:46.538 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。
    216. 

  216. [Save Log Job] 2024-12-26 09:55:46.538 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。
    217. 

  217. [Save Log Job] 2024-12-26 09:55:46.538 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas1， ramp to 45sccm。
    218. 

  218. [Save Log Job] 2024-12-26 09:55:46.539 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas2， ramp to 56sccm。
    219. 

  219. [Save Log Job] 2024-12-26 09:55:46.539 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas3， ramp to 66sccm。
    220. 

  220. [Save Log Job] 2024-12-26 09:55:46.539 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas4， ramp to 76sccm。
    221. 

  221. [Save Log Job] 2024-12-26 09:55:46.539 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas5， ramp to 86sccm。
    222. 

  222. [Save Log Job] 2024-12-26 09:55:46.539 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPowerOnOff，Set RF power Off。
    223. 

  223. [Save Log Job] 2024-12-26 09:55:46.590 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Start monitor pressure stability
    224. 

  224. [Save Log Job] 2024-12-26 09:55:49.767 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    225. 

  225. [Save Log Job] 2024-12-26 09:55:50.561 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation AbortRecipe()
    226. 

  226. [Save Log Job] 2024-12-26 09:55:57.416 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
    227. 

  227. [Save Log Job] 2024-12-26 09:55:57.416 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
    228. 

  228. [Save Log Job] 2024-12-26 09:56:05.446 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe was aborted: user aborted recipe
    229. 

  229. [Save Log Job] 2024-12-26 09:56:06.121 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Stop pump：Check if the rf is on。
    230. 

  230. [Save Log Job] 2024-12-26 09:56:06.132 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Stop monitor pressure stability
    231. 

  231. [Save Log Job] 2024-12-26 09:56:06.132 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Recipe run completed，Recipe：20241226095531-CACB
    232. 

  232. Start time：2024/12/26 09:55:46
    233. 

  233. End time：2024/12/26 09:56:06
    234. 

  234. Total time：0:0:19
    235. 

  235. [Save Log Job] 2024-12-26 09:56:06.132 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Recipe completely run
    236. 

  236. [Save Log Job] 2024-12-26 09:56:07.025 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|PostProcess
    237. 

  237. [Save Log Job] 2024-12-26 09:56:07.077 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, wait for 10 seconds
    238. 

  238. [Save Log Job] 2024-12-26 09:56:07.492 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
    239. 

  239. [Save Log Job] 2024-12-26 09:56:09.054 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC1 ValveClose失败，原因：Valve keep open。
    240. 

  240. [Save Log Job] 2024-12-26 09:56:09.054 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC2 ValveClose失败，原因：Valve keep open。
    241. 

  241. [Save Log Job] 2024-12-26 09:56:09.056 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC3 ValveClose失败，原因：Valve keep open。
    242. 

  242. [Save Log Job] 2024-12-26 09:56:09.056 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC4 ValveClose失败，原因：Valve keep open。
    243. 

  243. [Save Log Job] 2024-12-26 09:56:09.056 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC5 ValveClose失败，原因：Valve keep open。
    244. 

  244. [Save Log Job] 2024-12-26 09:56:17.161 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, RF Power Off
    245. 

  245. [Save Log Job] 2024-12-26 09:56:17.219 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, Stop all the gas flow
    246. 

  246. [Save Log Job] 2024-12-26 09:56:17.275 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, Close all the valves
    247. 

  247. [Save Log Job] 2024-12-26 09:56:17.332 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, close pump valve
    248. 

  248. [Save Log Job] 2024-12-26 09:56:20.522 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    249. 

  249. [Save Log Job] 2024-12-26 09:56:20.580 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, delay 3 seconds
    250. 

  250. [Save Log Job] 2024-12-26 09:56:23.665 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, vent 50 seconds
    251. 

  251. [Save Log Job] 2024-12-26 09:56:25.682 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门Chamber vent valveOpen失败，原因：Valve keep closed 。
    252. 

  252. [Save Log Job] 2024-12-26 09:56:28.032 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
    253. 

  253. [Save Log Job] 2024-12-26 09:56:50.524 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    254. 

  254. [Save Log Job] 2024-12-26 09:57:13.755 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, Close vent valve
    255. 

  255. [Save Log Job] 2024-12-26 09:57:14.914 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation AbortRecipe()
    256. 

  256. [Save Log Job] 2024-12-26 09:57:18.887 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门Chamber vent valveClose失败，原因：Valve keep open。
    257. 

  257. [Save Log Job] 2024-12-26 09:57:20.004 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventLotFinished
    258. 

  258. [Save Log Job] 2024-12-26 09:57:20.005 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle
    259. 

  259. [Save Log Job] 2024-12-26 09:57:20.005 LOG.INFO YZQZFabAuto.cs Line:212 EndJobRecord() - EndJobRecord|
    260. 

  260. [Save Log Job] 2024-12-26 09:57:20.005 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    261. 

  261. [Save Log Job] 2024-12-26 09:57:20.013 LOG.INFO YZQZFabAuto.cs Line:243 Export2CsvLocalFile() - Export2CsvLocalFileD:\jet.plasma\trunk\Triton160\Triton160RT\bin\Debug\Logs\.csv
    262. 

  262. [Save Log Job] 2024-12-26 09:57:20.015 LOG.INFO YZQZFabAuto.cs Line:291 Export2CsvWanPanFile() - Export2CsvWanPanFile\\192.168.1.208\CHIP_LoaderPath\JetplasmaDaJiao\SourceFolder\.csv
    263. 

  263. [Save Log Job] 2024-12-26 09:57:20.201 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
    264. 

  264. [Save Log Job] 2024-12-26 09:57:41.012 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
    265. 

  265. [Save Log Job] 2024-12-26 09:57:46.539 LOG.INFO YZQZFabAuto.cs Line:327 Export2CsvWanPanFile() - 找不到网络路径。
    266. 

  266. 

  267. [Save Log Job] 2024-12-26 09:59:08.834 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation RunRecipe(CACB, , , )
    268. 

  268. [Save Log Job] 2024-12-26 09:59:08.837 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|LoadProcessRecipe
    269. 

  269. [Save Log Job] 2024-12-26 09:59:08.837 LOG.INFO LOG.cs Line:61 Write() - System通知TM保存工艺程序20241226095908-CACB
    270. 

  270. [Save Log Job] 2024-12-26 09:59:08.837 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventLotStart
    271. 

  271. [Save Log Job] 2024-12-26 09:59:08.837 LOG.INFO YZQZFabAuto.cs Line:165 StartJobRecord() - StartJobRecord|start||CACB
    272. 

  272. [Save Log Job] 2024-12-26 09:59:08.837 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|PreProcess
    273. 

  273. [Save Log Job] 2024-12-26 09:59:08.837 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    274. 

  274. [Save Log Job] 2024-12-26 09:59:08.841 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    275. 

  275. [Save Log Job] 2024-12-26 09:59:08.849 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
    276. 

  276. [Save Log Job] 2024-12-26 09:59:08.887 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check door status。
    277. 

  277. [Save Log Job] 2024-12-26 09:59:08.887 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：check chamber door。
    278. 

  278. [Save Log Job] 2024-12-26 09:59:08.887 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：check backpanel door。
    279. 

  279. [Save Log Job] 2024-12-26 09:59:08.887 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check pump status。
    280. 

  280. [Save Log Job] 2024-12-26 09:59:08.887 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Close all the valves。
    281. 

  281. [Save Log Job] 2024-12-26 09:59:08.945 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Open pumping valve。
    282. 

  282. [Save Log Job] 2024-12-26 09:59:10.980 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门Chamber pumping valveOpen失败，原因：Valve keep closed 。
    283. 

  283. [Save Log Job] 2024-12-26 09:59:11.868 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check chamber pressure。
    284. 

  284. [Save Log Job] 2024-12-26 09:59:29.847 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
    285. 

  285. [Save Log Job] 2024-12-26 09:59:29.852 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
    286. 

  286. [Save Log Job] 2024-12-26 09:59:38.841 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    287. 

  287. [Save Log Job] 2024-12-26 09:59:51.900 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation AbortRecipe()
    288. 

  288. [Save Log Job] 2024-12-26 09:59:51.900 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Stop pump：Check if the rf is on。
    289. 

  289. [Save Log Job] 2024-12-26 09:59:51.907 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle
    290. 

  290. [Save Log Job] 2024-12-26 09:59:51.970 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
    291. 

  291. [Save Log Job] 2024-12-26 09:59:53.941 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门Chamber pumping valveClose失败，原因：Valve keep open。
    292. 

  292. [Save Log Job] 2024-12-26 09:59:58.333 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation RunRecipe(CACB, , , )
    293. 

  293. [Save Log Job] 2024-12-26 09:59:58.335 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|LoadProcessRecipe
    294. 

  294. [Save Log Job] 2024-12-26 09:59:58.335 LOG.INFO LOG.cs Line:61 Write() - System通知TM保存工艺程序20241226095958-CACB
    295. 

  295. [Save Log Job] 2024-12-26 09:59:58.335 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventLotStart
    296. 

  296. [Save Log Job] 2024-12-26 09:59:58.335 LOG.INFO YZQZFabAuto.cs Line:165 StartJobRecord() - StartJobRecord|start||CACB
    297. 

  297. [Save Log Job] 2024-12-26 09:59:58.335 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|PreProcess
    298. 

  298. [Save Log Job] 2024-12-26 09:59:58.385 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check door status。
    299. 

  299. [Save Log Job] 2024-12-26 09:59:58.385 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：check chamber door。
    300. 

  300. [Save Log Job] 2024-12-26 09:59:58.385 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：check backpanel door。
    301. 

  301. [Save Log Job] 2024-12-26 09:59:58.385 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check pump status。
    302. 

  302. [Save Log Job] 2024-12-26 09:59:58.386 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Close all the valves。
    303. 

  303. [Save Log Job] 2024-12-26 09:59:58.389 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
    304. 

  304. [Save Log Job] 2024-12-26 09:59:58.443 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Open pumping valve。
    305. 

  305. [Save Log Job] 2024-12-26 10:00:00.494 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门Chamber pumping valveOpen失败，原因：Valve keep closed 。
    306. 

  306. [Save Log Job] 2024-12-26 10:00:01.826 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check chamber pressure。
    307. 

  307. [Save Log Job] 2024-12-26 10:00:08.842 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    308. 

  308. [Save Log Job] 2024-12-26 10:00:12.916 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
    309. 

  309. [Save Log Job] 2024-12-26 10:00:13.733 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Pump below 100mTorr。
    310. 

  310. [Save Log Job] 2024-12-26 10:00:13.789 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：PreProcess Finished in 0.3 minitues。
    311. 

  311. [Save Log Job] 2024-12-26 10:00:13.789 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System complete run ''PreProcess''.
    312. 

  312. [Save Log Job] 2024-12-26 10:00:13.789 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Run Recipe 20241226095958-CACB
    313. 

  313. [Save Log Job] 2024-12-26 10:00:13.789 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe start run''20241226095958-CACB''
    314. 

  314. [Save Log Job] 2024-12-26 10:00:13.790 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Processing
    315. 

  315. [Save Log Job] 2024-12-26 10:00:13.841 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe''20241226095958-CACB'' start run step 1：initial。
    316. 

  316. [Save Log Job] 2024-12-26 10:00:13.841 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。
    317. 

  317. [Save Log Job] 2024-12-26 10:00:13.841 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。
    318. 

  318. [Save Log Job] 2024-12-26 10:00:13.841 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。
    319. 

  319. [Save Log Job] 2024-12-26 10:00:13.841 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。
    320. 

  320. [Save Log Job] 2024-12-26 10:00:13.841 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。
    321. 

  321. [Save Log Job] 2024-12-26 10:00:13.842 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。
    322. 

  322. [Save Log Job] 2024-12-26 10:00:13.842 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。
    323. 

  323. [Save Log Job] 2024-12-26 10:00:13.842 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPower，RF set Power:0。
    324. 

  324. [Save Log Job] 2024-12-26 10:00:13.842 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。
    325. 

  325. [Save Log Job] 2024-12-26 10:00:13.842 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。
    326. 

  326. [Save Log Job] 2024-12-26 10:00:13.842 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。
    327. 

  327. [Save Log Job] 2024-12-26 10:00:13.842 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas1， ramp to 45sccm。
    328. 

  328. [Save Log Job] 2024-12-26 10:00:13.842 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas2， ramp to 56sccm。
    329. 

  329. [Save Log Job] 2024-12-26 10:00:13.842 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas3， ramp to 66sccm。
    330. 

  330. [Save Log Job] 2024-12-26 10:00:13.842 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas4， ramp to 76sccm。
    331. 

  331. [Save Log Job] 2024-12-26 10:00:13.842 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas5， ramp to 86sccm。
    332. 

  332. [Save Log Job] 2024-12-26 10:00:13.843 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPowerOnOff，Set RF power Off。
    333. 

  333. [Save Log Job] 2024-12-26 10:00:13.894 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Start monitor pressure stability
    334. 

  334. [Save Log Job] 2024-12-26 10:00:19.344 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
    335. 

  335. [Save Log Job] 2024-12-26 10:00:19.349 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
    336. 

  336. [Save Log Job] 2024-12-26 10:00:34.799 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
    337. 

  337. [Save Log Job] 2024-12-26 10:00:38.842 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    338. 

  338. [Save Log Job] 2024-12-26 10:00:43.938 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe''20241226095958-CACB'' end step 1
    339. 

  339. [Save Log Job] 2024-12-26 10:00:43.988 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe''20241226095958-CACB'' start run step 2：initial。
    340. 

  340. [Save Log Job] 2024-12-26 10:00:43.988 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。
    341. 

  341. [Save Log Job] 2024-12-26 10:00:43.988 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。
    342. 

  342. [Save Log Job] 2024-12-26 10:00:43.988 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。
    343. 

  343. [Save Log Job] 2024-12-26 10:00:43.988 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。
    344. 

  344. [Save Log Job] 2024-12-26 10:00:43.989 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。
    345. 

  345. [Save Log Job] 2024-12-26 10:00:43.989 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。
    346. 

  346. [Save Log Job] 2024-12-26 10:00:43.989 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。
    347. 

  347. [Save Log Job] 2024-12-26 10:00:43.989 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPower，RF set Power:0。
    348. 

  348. [Save Log Job] 2024-12-26 10:00:43.989 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。
    349. 

  349. [Save Log Job] 2024-12-26 10:00:43.989 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。
    350. 

  350. [Save Log Job] 2024-12-26 10:00:43.989 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。
    351. 

  351. [Save Log Job] 2024-12-26 10:00:43.989 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas1， ramp to 45sccm。
    352. 

  352. [Save Log Job] 2024-12-26 10:00:43.989 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas2， ramp to 56sccm。
    353. 

  353. [Save Log Job] 2024-12-26 10:00:43.989 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas3， ramp to 66sccm。
    354. 

  354. [Save Log Job] 2024-12-26 10:00:43.990 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas4， ramp to 76sccm。
    355. 

  355. [Save Log Job] 2024-12-26 10:00:43.990 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas5， ramp to 86sccm。
    356. 

  356. [Save Log Job] 2024-12-26 10:00:43.990 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPowerOnOff，Set RF power Off。
    357. 

  357. [Save Log Job] 2024-12-26 10:01:08.842 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    358. 

  358. [Save Log Job] 2024-12-26 10:01:14.081 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe''20241226095958-CACB'' end step 2
    359. 

  359. [Save Log Job] 2024-12-26 10:01:14.082 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Stop monitor pressure stability
    360. 

  360. [Save Log Job] 2024-12-26 10:01:14.082 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Recipe run completed，Recipe：20241226095958-CACB
    361. 

  361. Start time：2024/12/26 10:00:13
    362. 

  362. End time：2024/12/26 10:01:14
    363. 

  363. Total time：0:1:0
    364. 

  364. [Save Log Job] 2024-12-26 10:01:14.082 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Recipe completely run
    365. 

  365. [Save Log Job] 2024-12-26 10:01:14.082 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|PostProcess
    366. 

  366. [Save Log Job] 2024-12-26 10:01:14.132 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, wait for 10 seconds
    367. 

  367. [Save Log Job] 2024-12-26 10:01:16.097 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC1 ValveClose失败，原因：Valve keep open。
    368. 

  368. [Save Log Job] 2024-12-26 10:01:16.099 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC2 ValveClose失败，原因：Valve keep open。
    369. 

  369. [Save Log Job] 2024-12-26 10:01:16.099 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC3 ValveClose失败，原因：Valve keep open。
    370. 

  370. [Save Log Job] 2024-12-26 10:01:16.099 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC4 ValveClose失败，原因：Valve keep open。
    371. 

  371. [Save Log Job] 2024-12-26 10:01:16.099 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC5 ValveClose失败，原因：Valve keep open。
    372. 

  372. [Save Log Job] 2024-12-26 10:01:24.230 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, RF Power Off
    373. 

  373. [Save Log Job] 2024-12-26 10:01:24.287 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, Stop all the gas flow
    374. 

  374. [Save Log Job] 2024-12-26 10:01:30.515 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, Close all the valves
    375. 

  375. [Save Log Job] 2024-12-26 10:01:30.571 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, close pump valve
    376. 

  376. [Save Log Job] 2024-12-26 10:01:30.628 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, delay 3 seconds
    377. 

  377. [Save Log Job] 2024-12-26 10:01:33.729 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, vent 50 seconds
    378. 

  378. [Save Log Job] 2024-12-26 10:01:35.090 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
    379. 

  379. [Save Log Job] 2024-12-26 10:01:38.843 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    380. 

  380. [Save Log Job] 2024-12-26 10:02:08.843 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    381. 

  381. [Save Log Job] 2024-12-26 10:02:23.836 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, Close vent valve
    382. 

  382. [Save Log Job] 2024-12-26 10:02:25.840 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门Chamber vent valveClose失败，原因：Valve keep open。
    383. 

  383. [Save Log Job] 2024-12-26 10:02:28.041 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, PostProcess Finished in 1.2 minitues
    384. 

  384. [Save Log Job] 2024-12-26 10:02:28.041 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System complete run ''PostProcess''.
    385. 

  385. [Save Log Job] 2024-12-26 10:02:28.042 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventLotFinished
    386. 

  386. [Save Log Job] 2024-12-26 10:02:28.042 LOG.INFO YZQZFabAuto.cs Line:212 EndJobRecord() - EndJobRecord|
    387. 

  387. [Save Log Job] 2024-12-26 10:02:28.042 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle
    388. 

  388. [Save Log Job] 2024-12-26 10:02:28.042 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    389. 

  389. [Save Log Job] 2024-12-26 10:02:28.047 LOG.INFO YZQZFabAuto.cs Line:243 Export2CsvLocalFile() - Export2CsvLocalFileD:\jet.plasma\trunk\Triton160\Triton160RT\bin\Debug\Logs\.csv
    390. 

  390. [Save Log Job] 2024-12-26 10:02:28.048 LOG.INFO YZQZFabAuto.cs Line:291 Export2CsvWanPanFile() - Export2CsvWanPanFile\\192.168.1.208\CHIP_LoaderPath\JetplasmaDaJiao\SourceFolder\.csv
    391. 

  391. [Save Log Job] 2024-12-26 10:02:28.150 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
    392. 

  392. [Save Log Job] 2024-12-26 10:02:49.057 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
    393. 

  393. [Save Log Job] 2024-12-26 10:02:54.563 LOG.INFO YZQZFabAuto.cs Line:327 Export2CsvWanPanFile() - 找不到网络路径。
    394. 

  394. 

  395. [Save Log Job] 2024-12-26 10:03:53.573 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation RunRecipe(CACB, , , )
    396. 

  396. [Save Log Job] 2024-12-26 10:03:53.575 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|LoadProcessRecipe
    397. 

  397. [Save Log Job] 2024-12-26 10:03:53.575 LOG.INFO LOG.cs Line:61 Write() - System通知TM保存工艺程序20241226100353-CACB
    398. 

  398. [Save Log Job] 2024-12-26 10:03:53.575 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventLotStart
    399. 

  399. [Save Log Job] 2024-12-26 10:03:53.576 LOG.INFO YZQZFabAuto.cs Line:165 StartJobRecord() - StartJobRecord|start||CACB
    400. 

  400. [Save Log Job] 2024-12-26 10:03:53.576 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|PreProcess
    401. 

  401. [Save Log Job] 2024-12-26 10:03:53.576 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    402. 

  402. [Save Log Job] 2024-12-26 10:03:53.578 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    403. 

  403. [Save Log Job] 2024-12-26 10:03:53.610 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check door status。
    404. 

  404. [Save Log Job] 2024-12-26 10:03:53.610 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：check chamber door。
    405. 

  405. [Save Log Job] 2024-12-26 10:03:53.610 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：check backpanel door。
    406. 

  406. [Save Log Job] 2024-12-26 10:03:53.610 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check pump status。
    407. 

  407. [Save Log Job] 2024-12-26 10:03:53.612 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Close all the valves。
    408. 

  408. [Save Log Job] 2024-12-26 10:03:53.669 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Open pumping valve。
    409. 

  409. [Save Log Job] 2024-12-26 10:03:53.713 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
    410. 

  410. [Save Log Job] 2024-12-26 10:03:55.687 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门Chamber pumping valveOpen失败，原因：Valve keep closed 。
    411. 

  411. [Save Log Job] 2024-12-26 10:03:56.071 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check chamber pressure。
    412. 

  412. [Save Log Job] 2024-12-26 10:04:07.533 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation AbortRecipe()
    413. 

  413. [Save Log Job] 2024-12-26 10:04:07.533 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Stop pump：Check if the rf is on。
    414. 

  414. [Save Log Job] 2024-12-26 10:04:07.543 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle
    415. 

  415. [Save Log Job] 2024-12-26 10:04:07.552 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
    416. 

  416. [Save Log Job] 2024-12-26 10:04:09.543 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门Chamber pumping valveClose失败，原因：Valve keep open。
    417. 

  417. [Save Log Job] 2024-12-26 10:04:14.584 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
    418. 

  418. [Save Log Job] 2024-12-26 10:04:14.589 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
    419. 

  419. [Save Log Job] 2024-12-26 10:04:23.579 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    420. 

  420. [Save Log Job] 2024-12-26 10:04:28.550 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
    421. 

  421. [Save Log Job] 2024-12-26 10:04:53.579 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    422. 

  422. [Save Log Job] 2024-12-26 10:05:23.580 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    423. 

  423. [Save Log Job] 2024-12-26 10:05:53.580 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    424. 

  424. [Save Log Job] 2024-12-26 10:06:23.580 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    425. 

  425. [Save Log Job] 2024-12-26 10:06:53.581 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    426. 

  426. [Save Log Job] 2024-12-26 10:07:23.582 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    427. 

  427. [Save Log Job] 2024-12-26 10:07:53.582 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    428. 

  428. [Save Log Job] 2024-12-26 10:08:23.584 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    429. 

  429. [Save Log Job] 2024-12-26 10:08:32.288 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation RunRecipe(CACB, , , )
    430. 

  430. [Save Log Job] 2024-12-26 10:08:32.290 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|LoadProcessRecipe
    431. 

  431. [Save Log Job] 2024-12-26 10:08:32.290 LOG.INFO LOG.cs Line:61 Write() - System通知TM保存工艺程序20241226100832-CACB
    432. 

  432. [Save Log Job] 2024-12-26 10:08:32.290 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventLotStart
    433. 

  433. [Save Log Job] 2024-12-26 10:08:32.290 LOG.INFO YZQZFabAuto.cs Line:165 StartJobRecord() - StartJobRecord|start||CACB
    434. 

  434. [Save Log Job] 2024-12-26 10:08:32.290 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|PreProcess
    435. 

  435. [Save Log Job] 2024-12-26 10:08:32.341 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check door status。
    436. 

  436. [Save Log Job] 2024-12-26 10:08:32.341 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：check chamber door。
    437. 

  437. [Save Log Job] 2024-12-26 10:08:32.341 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：check backpanel door。
    438. 

  438. [Save Log Job] 2024-12-26 10:08:32.341 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check pump status。
    439. 

  439. [Save Log Job] 2024-12-26 10:08:32.341 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Close all the valves。
    440. 

  440. [Save Log Job] 2024-12-26 10:08:32.397 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Open pumping valve。
    441. 

  441. [Save Log Job] 2024-12-26 10:08:32.447 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
    442. 

  442. [Save Log Job] 2024-12-26 10:08:34.442 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门Chamber pumping valveOpen失败，原因：Valve keep closed 。
    443. 

  443. [Save Log Job] 2024-12-26 10:08:36.274 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check chamber pressure。
    444. 

  444. [Save Log Job] 2024-12-26 10:08:40.036 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation AbortRecipe()
    445. 

  445. [Save Log Job] 2024-12-26 10:08:40.037 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Stop pump：Check if the rf is on。
    446. 

  446. [Save Log Job] 2024-12-26 10:08:40.043 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle
    447. 

  447. [Save Log Job] 2024-12-26 10:08:40.075 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
    448. 

  448. [Save Log Job] 2024-12-26 10:08:42.075 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门Chamber pumping valveClose失败，原因：Valve keep open。
    449. 

  449. [Save Log Job] 2024-12-26 10:08:53.299 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
    450. 

  450. [Save Log Job] 2024-12-26 10:08:53.304 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
    451. 

  451. [Save Log Job] 2024-12-26 10:08:53.585 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    452. 

  452. [Save Log Job] 2024-12-26 10:09:01.052 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
    453. 

  453. [Save Log Job] 2024-12-26 10:09:23.585 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    454. 

  454. [Save Log Job] 2024-12-26 10:09:53.585 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    455. 

  455. [Save Log Job] 2024-12-26 10:10:23.585 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    456. 

  456. [Save Log Job] 2024-12-26 10:10:53.586 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    457. 

  457. [Save Log Job] 2024-12-26 10:11:23.586 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    458. 

  458. [Save Log Job] 2024-12-26 10:11:53.587 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    459. 

  459. [Save Log Job] 2024-12-26 10:12:23.587 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    460. 

  460. [Save Log Job] 2024-12-26 10:12:53.588 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    461. 

  461. [Save Log Job] 2024-12-26 10:13:23.588 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    462. 

  462. [Save Log Job] 2024-12-26 10:13:53.589 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    463. 

  463. [Save Log Job] 2024-12-26 10:14:23.589 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    464. 

  464. [Save Log Job] 2024-12-26 10:14:53.590 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    465. 

  465. [Save Log Job] 2024-12-26 10:15:23.591 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    466. 

  466. [Save Log Job] 2024-12-26 10:15:53.591 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    467. 

  467. [Save Log Job] 2024-12-26 10:16:23.592 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    468. 

  468. [Save Log Job] 2024-12-26 10:16:53.592 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    469. 

  469. [Save Log Job] 2024-12-26 10:17:23.592 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    470. 

  470. [Save Log Job] 2024-12-26 10:17:53.593 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    471. 

  471. [Save Log Job] 2024-12-26 10:18:23.593 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    472. 

  472. [Save Log Job] 2024-12-26 10:18:53.594 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    473. 

  473. [Save Log Job] 2024-12-26 10:19:23.594 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    474. 

  474. [Save Log Job] 2024-12-26 10:19:53.594 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    475. 

  475. [Save Log Job] 2024-12-26 10:20:23.594 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    476. 

  476. [Save Log Job] 2024-12-26 10:20:53.595 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    477. 

  477. [Save Log Job] 2024-12-26 10:21:23.595 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    478. 

  478. [Save Log Job] 2024-12-26 10:21:53.596 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    479. 

  479. [Save Log Job] 2024-12-26 10:22:23.596 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    480. 

  480. [Save Log Job] 2024-12-26 10:22:53.597 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    481. 

  481. [Save Log Job] 2024-12-26 10:23:23.597 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    482. 

  482. [Save Log Job] 2024-12-26 10:23:53.597 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    483. 

  483. [Save Log Job] 2024-12-26 10:24:23.598 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    484. 

  484. [Save Log Job] 2024-12-26 10:24:53.599 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    485. 

  485. [Save Log Job] 2024-12-26 10:25:23.599 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    486. 

  486. [Save Log Job] 2024-12-26 10:25:53.600 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    487. 

  487. [Save Log Job] 2024-12-26 10:26:23.601 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    488. 

  488. [Save Log Job] 2024-12-26 10:26:53.601 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    489. 

  489. [Save Log Job] 2024-12-26 10:27:23.602 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    490. 

  490. [Save Log Job] 2024-12-26 10:27:53.602 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    491. 

  491. [Save Log Job] 2024-12-26 10:28:23.603 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    492. 

  492. [Save Log Job] 2024-12-26 10:28:53.604 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    493. 

  493. [Save Log Job] 2024-12-26 10:29:23.604 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    494. 

  494. [Save Log Job] 2024-12-26 10:29:53.605 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    495. 

  495. [Save Log Job] 2024-12-26 10:30:23.606 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    496. 

  496. [Save Log Job] 2024-12-26 10:30:53.607 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    497. 

  497. [Save Log Job] 2024-12-26 10:31:23.607 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    498. 

  498. [Save Log Job] 2024-12-26 10:31:53.607 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    499. 

  499. [Save Log Job] 2024-12-26 10:32:27.272 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    500. 

  500. [Save Log Job] 2024-12-26 10:32:27.272 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation RunRecipe(CACB, , , )
    501. 

  501. [Save Log Job] 2024-12-26 10:32:27.294 LOG.INFO LOG.cs Line:61 Write() - System通知TM保存工艺程序20241226103227-CACB
    502. 

  502. [Save Log Job] 2024-12-26 10:32:27.295 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|LoadProcessRecipe
    503. 

  503. [Save Log Job] 2024-12-26 10:32:27.295 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventLotStart
    504. 

  504. [Save Log Job] 2024-12-26 10:32:27.295 LOG.INFO YZQZFabAuto.cs Line:165 StartJobRecord() - StartJobRecord|start||CACB
    505. 

  505. [Save Log Job] 2024-12-26 10:32:27.295 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|PreProcess
    506. 

  506. [Save Log Job] 2024-12-26 10:32:27.346 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check door status。
    507. 

  507. [Save Log Job] 2024-12-26 10:32:27.346 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：check chamber door。
    508. 

  508. [Save Log Job] 2024-12-26 10:32:27.346 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：check backpanel door。
    509. 

  509. [Save Log Job] 2024-12-26 10:32:27.346 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check pump status。
    510. 

  510. [Save Log Job] 2024-12-26 10:32:27.346 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Close all the valves。
    511. 

  511. [Save Log Job] 2024-12-26 10:32:27.403 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Open pumping valve。
    512. 

  512. [Save Log Job] 2024-12-26 10:32:27.471 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
    513. 

  513. [Save Log Job] 2024-12-26 10:32:29.444 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门Chamber pumping valveOpen失败，原因：Valve keep closed 。
    514. 

  514. [Save Log Job] 2024-12-26 10:32:31.673 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check chamber pressure。
    515. 

  515. [Save Log Job] 2024-12-26 10:33:23.211 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation AbortRecipe()
    516. 

  516. [Save Log Job] 2024-12-26 10:33:23.214 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    517. 

  517. [Save Log Job] 2024-12-26 10:36:15.440 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    518. 

  518. [Save Log Job] 2024-12-26 10:36:15.474 LOG.ERROR EventLogWriter.cs Line:14 WriteEvent() - System PLC heart beat check failed，please confirm PLC still running
    519. 

  519. [Save Log Job] 2024-12-26 10:36:15.475 LOG.INFO YZQZFabAuto.cs Line:212 EndJobRecord() - EndJobRecord|
    520. 

  520. [Save Log Job] 2024-12-26 10:36:15.475 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    521. 

  521. [Save Log Job] 2024-12-26 10:36:15.477 LOG.WARN StateMachine.cs Line:169 Loop() - 状态机Chamber FSM未定义在状态Error时处理方法。
    522. 

  522. [Save Log Job] 2024-12-26 10:36:15.497 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
    523. 

  523. [Save Log Job] 2024-12-26 10:36:15.497 LOG.INFO YZQZFabAuto.cs Line:243 Export2CsvLocalFile() - Export2CsvLocalFileD:\jet.plasma\trunk\Triton160\Triton160RT\bin\Debug\Logs\.csv
    524. 

  524. [Save Log Job] 2024-12-26 10:36:15.500 LOG.INFO YZQZFabAuto.cs Line:291 Export2CsvWanPanFile() - Export2CsvWanPanFile\\192.168.1.208\CHIP_LoaderPath\JetplasmaDaJiao\SourceFolder\.csv
    525. 

  525. [Save Log Job] 2024-12-26 10:36:15.503 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
    526. 

  526. [Save Log Job] 2024-12-26 10:36:15.641 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
    527. 

  527. [Save Log Job] 2024-12-26 10:36:20.970 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
    528. 

  528. [Save Log Job] 2024-12-26 10:36:42.016 LOG.INFO YZQZFabAuto.cs Line:327 Export2CsvWanPanFile() - 找不到网络路径。
    529. 

  529. 

  530. [Save Log Job] 2024-12-26 10:36:44.839 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation RunRecipe(CACB, , , )
    531. 

  531. [Save Log Job] 2024-12-26 10:36:44.841 LOG.INFO LOG.cs Line:61 Write() - System通知TM保存工艺程序20241226103644-CACB
    532. 

  532. [Save Log Job] 2024-12-26 10:36:44.841 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|LoadProcessRecipe
    533. 

  533. [Save Log Job] 2024-12-26 10:36:44.841 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventLotStart
    534. 

  534. [Save Log Job] 2024-12-26 10:36:44.842 LOG.INFO YZQZFabAuto.cs Line:165 StartJobRecord() - StartJobRecord|start||CACB
    535. 

  535. [Save Log Job] 2024-12-26 10:36:44.842 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|PreProcess
    536. 

  536. [Save Log Job] 2024-12-26 10:36:44.842 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    537. 

  537. [Save Log Job] 2024-12-26 10:36:44.845 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    538. 

  538. [Save Log Job] 2024-12-26 10:36:44.893 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check door status。
    539. 

  539. [Save Log Job] 2024-12-26 10:36:44.893 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：check chamber door。
    540. 

  540. [Save Log Job] 2024-12-26 10:36:44.893 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：check backpanel door。
    541. 

  541. [Save Log Job] 2024-12-26 10:36:44.894 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check pump status。
    542. 

  542. [Save Log Job] 2024-12-26 10:36:44.894 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Close all the valves。
    543. 

  543. [Save Log Job] 2024-12-26 10:36:45.014 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
    544. 

  544. [Save Log Job] 2024-12-26 10:36:46.944 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门Chamber pumping valveClose失败，原因：Valve keep open。
    545. 

  545. [Save Log Job] 2024-12-26 10:36:47.217 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Open pumping valve。
    546. 

  546. [Save Log Job] 2024-12-26 10:36:49.218 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门Chamber pumping valveOpen失败，原因：Valve keep closed 。
    547. 

  547. [Save Log Job] 2024-12-26 10:36:51.018 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check chamber pressure。
    548. 

  548. [Save Log Job] 2024-12-26 10:36:55.202 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Pump below 100mTorr。
    549. 

  549. [Save Log Job] 2024-12-26 10:36:55.260 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：PreProcess Finished in 0.2 minitues。
    550. 

  550. [Save Log Job] 2024-12-26 10:36:55.260 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System complete run ''PreProcess''.
    551. 

  551. [Save Log Job] 2024-12-26 10:36:55.260 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Run Recipe 20241226103644-CACB
    552. 

  552. [Save Log Job] 2024-12-26 10:36:55.260 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe start run''20241226103644-CACB''
    553. 

  553. [Save Log Job] 2024-12-26 10:36:55.261 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Processing
    554. 

  554. [Save Log Job] 2024-12-26 10:36:55.312 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe''20241226103644-CACB'' start run step 1：initial。
    555. 

  555. [Save Log Job] 2024-12-26 10:36:55.312 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。
    556. 

  556. [Save Log Job] 2024-12-26 10:36:55.312 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。
    557. 

  557. [Save Log Job] 2024-12-26 10:36:55.312 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。
    558. 

  558. [Save Log Job] 2024-12-26 10:36:55.312 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。
    559. 

  559. [Save Log Job] 2024-12-26 10:36:55.312 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。
    560. 

  560. [Save Log Job] 2024-12-26 10:36:55.312 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。
    561. 

  561. [Save Log Job] 2024-12-26 10:36:55.312 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。
    562. 

  562. [Save Log Job] 2024-12-26 10:36:55.313 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPower，RF set Power:0。
    563. 

  563. [Save Log Job] 2024-12-26 10:36:55.313 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。
    564. 

  564. [Save Log Job] 2024-12-26 10:36:55.313 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。
    565. 

  565. [Save Log Job] 2024-12-26 10:36:55.313 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。
    566. 

  566. [Save Log Job] 2024-12-26 10:36:55.313 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas1， ramp to 45sccm。
    567. 

  567. [Save Log Job] 2024-12-26 10:36:55.313 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas2， ramp to 56sccm。
    568. 

  568. [Save Log Job] 2024-12-26 10:36:55.313 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas3， ramp to 66sccm。
    569. 

  569. [Save Log Job] 2024-12-26 10:36:55.313 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas4， ramp to 76sccm。
    570. 

  570. [Save Log Job] 2024-12-26 10:36:55.313 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas5， ramp to 86sccm。
    571. 

  571. [Save Log Job] 2024-12-26 10:36:55.313 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPowerOnOff，Set RF power Off。
    572. 

  572. [Save Log Job] 2024-12-26 10:36:55.364 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Start monitor pressure stability
    573. 

  573. [Save Log Job] 2024-12-26 10:36:57.500 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation AbortRecipe()
    574. 

  574. [Save Log Job] 2024-12-26 10:37:01.069 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC3 ValveOpen失败，原因：Valve keep closed 。
    575. 

  575. [Save Log Job] 2024-12-26 10:37:01.069 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe was aborted: user aborted recipe
    576. 

  576. [Save Log Job] 2024-12-26 10:37:01.070 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Stop pump：Check if the rf is on。
    577. 

  577. [Save Log Job] 2024-12-26 10:37:01.079 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Stop monitor pressure stability
    578. 

  578. [Save Log Job] 2024-12-26 10:37:01.079 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Recipe run completed，Recipe：20241226103644-CACB
    579. 

  579. Start time：2024/12/26 10:36:55
    580. 

  580. End time：2024/12/26 10:37:01
    581. 

  581. Total time：0:0:5
    582. 

  582. [Save Log Job] 2024-12-26 10:37:01.079 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Recipe completely run
    583. 

  583. [Save Log Job] 2024-12-26 10:37:01.080 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|PostProcess
    584. 

  584. [Save Log Job] 2024-12-26 10:37:01.130 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, wait for 10 seconds
    585. 

  585. [Save Log Job] 2024-12-26 10:37:03.098 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC1 ValveClose失败，原因：Valve keep open。
    586. 

  586. [Save Log Job] 2024-12-26 10:37:03.098 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC2 ValveClose失败，原因：Valve keep open。
    587. 

  587. [Save Log Job] 2024-12-26 10:37:03.098 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC3 ValveClose失败，原因：Valve keep open。
    588. 

  588. [Save Log Job] 2024-12-26 10:37:03.098 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC4 ValveClose失败，原因：Valve keep open。
    589. 

  589. [Save Log Job] 2024-12-26 10:37:05.851 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
    590. 

  590. [Save Log Job] 2024-12-26 10:37:05.856 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
    591. 

  591. [Save Log Job] 2024-12-26 10:37:11.197 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, RF Power Off
    592. 

  592. [Save Log Job] 2024-12-26 10:37:11.262 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, Stop all the gas flow
    593. 

  593. [Save Log Job] 2024-12-26 10:37:11.318 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, Close all the valves
    594. 

  594. [Save Log Job] 2024-12-26 10:37:11.376 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, close pump valve
    595. 

  595. [Save Log Job] 2024-12-26 10:37:11.433 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, delay 3 seconds
    596. 

  596. [Save Log Job] 2024-12-26 10:37:14.499 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, vent 50 seconds
    597. 

  597. [Save Log Job] 2024-12-26 10:37:14.846 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    598. 

  598. [Save Log Job] 2024-12-26 10:37:16.283 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
    599. 

  599. [Save Log Job] 2024-12-26 10:37:16.527 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门Chamber vent valveOpen失败，原因：Valve keep closed 。
    600. 

  600. [Save Log Job] 2024-12-26 10:37:22.089 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
    601. 

  601. [Save Log Job] 2024-12-26 10:37:44.847 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    602. 

  602. [Save Log Job] 2024-12-26 10:38:04.588 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, Close vent valve
    603. 

  603. [Save Log Job] 2024-12-26 10:38:06.594 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门Chamber vent valveClose失败，原因：Valve keep open。
    604. 

  604. [Save Log Job] 2024-12-26 10:38:07.770 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, PostProcess Finished in 1.1 minitues
    605. 

  605. [Save Log Job] 2024-12-26 10:38:07.770 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System complete run ''PostProcess''.
    606. 

  606. [Save Log Job] 2024-12-26 10:38:07.770 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventLotFinished
    607. 

  607. [Save Log Job] 2024-12-26 10:38:07.771 LOG.INFO YZQZFabAuto.cs Line:212 EndJobRecord() - EndJobRecord|
    608. 

  608. [Save Log Job] 2024-12-26 10:38:07.771 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    609. 

  609. [Save Log Job] 2024-12-26 10:38:07.771 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle
    610. 

  610. [Save Log Job] 2024-12-26 10:38:07.776 LOG.INFO YZQZFabAuto.cs Line:243 Export2CsvLocalFile() - Export2CsvLocalFileD:\jet.plasma\trunk\Triton160\Triton160RT\bin\Debug\Logs\.csv
    611. 

  611. [Save Log Job] 2024-12-26 10:38:07.777 LOG.INFO YZQZFabAuto.cs Line:291 Export2CsvWanPanFile() - Export2CsvWanPanFile\\192.168.1.208\CHIP_LoaderPath\JetplasmaDaJiao\SourceFolder\.csv
    612. 

  612. [Save Log Job] 2024-12-26 10:38:07.900 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
    613. 

  613. [Save Log Job] 2024-12-26 10:38:28.783 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
    614. 

  614. [Save Log Job] 2024-12-26 10:38:34.295 LOG.INFO YZQZFabAuto.cs Line:327 Export2CsvWanPanFile() - 找不到网络路径。
    615. 

  615. 

  616. <==  [Save Log Job] 2024-12-26 10:40:04.424 LOG.INFO LOG.cs Line:61 Write() - 完成对数据库表格的更新操作
    617. 

  617. [Save Log Job] 2024-12-26 10:40:05.290 LOG.INFO EventService.cs Line:60 Register() - 客户端74aaf27b-fc1d-44f9-9737-36cfb856e99e已连接
    618. 

  618. [Save Log Job] 2024-12-26 10:40:05.465 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, <IoSensor id="SensorBackPanelDoor" display=""  schematicId="" unit="" di="DI_back_panle_door_sw" isLowAsNormal="false" infoText="BackPanel door is opened" warningText="" alarmText="" />
    619. 

  619. [Save Log Job] 2024-12-26 10:40:05.465 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, <IoSensor id="SensorPumpDoor"      display=""  schematicId="" unit="" di="DI_pump_door_sw"    isLowAsNormal="false" infoText="" warningText="" alarmText="" />
    620. 

  620. [Save Log Job] 2024-12-26 10:40:05.536 LOG.INFO LOG.cs Line:61 Write() - Routine System 初始化 Start
    621. 

  621. [Save Log Job] 2024-12-26 10:40:06.593 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle
    622. 

  622. [Save Log Job] 2024-12-26 10:40:06.595 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle
    623. 

  623. [Save Log Job] 2024-12-26 10:40:06.759 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle
    624. 

  624. [Save Log Job] 2024-12-26 10:40:06.807 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle
    625. 

  625. [Save Log Job] 2024-12-26 10:40:06.885 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
    626. 

  626. [Save Log Job] 2024-12-26 10:40:07.276 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetConfig(System_IsMesMode, True)
    627. 

  627. [Save Log Job] 2024-12-26 10:40:10.547 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Software will be expired in -63 days, at 10/24/2024 12:00:00 AM 。
    628. 

  628. [Save Log Job] 2024-12-26 10:40:27.699 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
    629. 

  629. [Save Log Job] 2024-12-26 10:40:27.769 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
    630. 

  630. [Save Log Job] 2024-12-26 10:40:27.816 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
    631. 

  631. [Save Log Job] 2024-12-26 10:40:48.693 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
    632. 

  632. [Save Log Job] 2024-12-26 10:42:35.839 LOG.INFO LOG.cs Line:61 Write() - 用户admin尝试登录系统
    633. 

  633. [Save Log Job] 2024-12-26 10:42:35.840 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin
    634. 

  634. [Save Log Job] 2024-12-26 10:42:35.851 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - User admin login
    635. 

  635. [Save Log Job] 2024-12-26 10:42:35.980 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin
    636. 

  636. [Save Log Job] 2024-12-26 10:43:24.307 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetAutoMode()
    637. 

  637. [Save Log Job] 2024-12-26 10:43:24.309 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentModeChanged
    638. 

  638. [Save Log Job] 2024-12-26 10:43:24.309 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System running mode changed to Auto Mode
    639. 

  639. [Save Log Job] 2024-12-26 10:43:26.301 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation RunRecipe(CACB, , , )
    640. 

  640. [Save Log Job] 2024-12-26 10:43:26.321 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|LoadProcessRecipe
    641. 

  641. [Save Log Job] 2024-12-26 10:43:26.324 LOG.INFO LOG.cs Line:61 Write() - System通知TM保存工艺程序20241226104326-CACB
    642. 

  642. [Save Log Job] 2024-12-26 10:43:26.324 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventLotStart
    643. 

  643. [Save Log Job] 2024-12-26 10:43:26.324 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|PreProcess
    644. 

  644. [Save Log Job] 2024-12-26 10:43:26.325 LOG.INFO YZQZFabAuto.cs Line:165 StartJobRecord() - StartJobRecord|start||CACB
    645. 

  645. [Save Log Job] 2024-12-26 10:43:26.326 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    646. 

  646. [Save Log Job] 2024-12-26 10:43:26.330 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    647. 

  647. [Save Log Job] 2024-12-26 10:43:26.335 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
    648. 

  648. [Save Log Job] 2024-12-26 10:43:26.377 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check door status。
    649. 

  649. [Save Log Job] 2024-12-26 10:43:26.377 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：check chamber door。
    650. 

  650. [Save Log Job] 2024-12-26 10:43:26.377 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：check backpanel door。
    651. 

  651. [Save Log Job] 2024-12-26 10:43:26.378 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check pump status。
    652. 

  652. [Save Log Job] 2024-12-26 10:43:26.378 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Close all the valves。
    653. 

  653. [Save Log Job] 2024-12-26 10:43:26.438 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Open pumping valve。
    654. 

  654. [Save Log Job] 2024-12-26 10:43:27.782 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check chamber pressure。
    655. 

  655. [Save Log Job] 2024-12-26 10:43:32.382 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation AbortRecipe()
    656. 

  656. [Save Log Job] 2024-12-26 10:43:36.060 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle
    657. 

  657. [Save Log Job] 2024-12-26 10:43:36.258 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
    658. 

  658. [Save Log Job] 2024-12-26 10:43:38.074 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门Chamber pumping valveClose失败，原因：Valve keep open。
    659. 

  659. [Save Log Job] 2024-12-26 10:43:47.328 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
    660. 

  660. [Save Log Job] 2024-12-26 10:43:47.332 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
    661. 

  661. [Save Log Job] 2024-12-26 10:43:56.331 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    662. 

  662. [Save Log Job] 2024-12-26 10:43:57.070 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
    663. 

  663. [Save Log Job] 2024-12-26 10:44:26.333 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    664. 

  664. [Save Log Job] 2024-12-26 10:44:56.339 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    665. 

  665. [Save Log Job] 2024-12-26 10:45:26.352 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    666. 

  666. [Save Log Job] 2024-12-26 10:45:56.358 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    667. 

  667. [Save Log Job] 2024-12-26 10:46:26.360 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    668. 

  668. [Save Log Job] 2024-12-26 10:46:56.368 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    669. 

  669. [Save Log Job] 2024-12-26 10:47:26.381 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    670. 

  670. [Save Log Job] 2024-12-26 10:47:56.382 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    671. 

  671. [Save Log Job] 2024-12-26 10:48:26.382 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    672. 

  672. [Save Log Job] 2024-12-26 10:48:56.382 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    673. 

  673. [Save Log Job] 2024-12-26 10:49:26.383 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    674. 

  674. [Save Log Job] 2024-12-26 10:49:56.383 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    675. 

  675. [Save Log Job] 2024-12-26 10:50:26.384 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    676. 

  676. [Save Log Job] 2024-12-26 10:50:56.384 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    677. 

  677. [Save Log Job] 2024-12-26 10:51:26.385 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    678. 

  678. [Save Log Job] 2024-12-26 10:51:56.386 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    679. 

  679. [Save Log Job] 2024-12-26 10:52:26.387 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    680. 

  680. [Save Log Job] 2024-12-26 10:52:56.387 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    681. 

  681. <==  [Save Log Job] 2024-12-26 10:53:23.962 LOG.INFO LOG.cs Line:61 Write() - 完成对数据库表格的更新操作
    682. 

  682. [Save Log Job] 2024-12-26 10:53:24.723 LOG.INFO EventService.cs Line:60 Register() - 客户端c7f632d3-d94c-4ee1-b93f-051b22dbebe1已连接
    683. 

  683. [Save Log Job] 2024-12-26 10:53:24.972 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, <IoSensor id="SensorBackPanelDoor" display=""  schematicId="" unit="" di="DI_back_panle_door_sw" isLowAsNormal="false" infoText="BackPanel door is opened" warningText="" alarmText="" />
    684. 

  684. [Save Log Job] 2024-12-26 10:53:24.973 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, <IoSensor id="SensorPumpDoor"      display=""  schematicId="" unit="" di="DI_pump_door_sw"    isLowAsNormal="false" infoText="" warningText="" alarmText="" />
    685. 

  685. [Save Log Job] 2024-12-26 10:53:25.065 LOG.INFO LOG.cs Line:61 Write() - Routine System 初始化 Start
    686. 

  686. [Save Log Job] 2024-12-26 10:53:26.052 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle
    687. 

  687. [Save Log Job] 2024-12-26 10:53:26.109 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle
    688. 

  688. [Save Log Job] 2024-12-26 10:53:26.146 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetConfig(System_IsMesMode, True)
    689. 

  689. [Save Log Job] 2024-12-26 10:53:26.281 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle
    690. 

  690. [Save Log Job] 2024-12-26 10:53:26.314 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
    691. 

  691. [Save Log Job] 2024-12-26 10:53:26.332 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle
    692. 

  692. [Save Log Job] 2024-12-26 10:53:30.075 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Software will be expired in -63 days, at 10/24/2024 12:00:00 AM 。
    693. 

  693. [Save Log Job] 2024-12-26 10:53:32.931 LOG.INFO LOG.cs Line:61 Write() - 用户admin尝试登录系统
    694. 

  694. [Save Log Job] 2024-12-26 10:53:32.932 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin
    695. 

  695. [Save Log Job] 2024-12-26 10:53:32.936 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - User admin login
    696. 

  696. [Save Log Job] 2024-12-26 10:53:33.064 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin
    697. 

  697. [Save Log Job] 2024-12-26 10:53:39.348 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetAutoMode()
    698. 

  698. [Save Log Job] 2024-12-26 10:53:39.349 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentModeChanged
    699. 

  699. [Save Log Job] 2024-12-26 10:53:39.349 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System running mode changed to Auto Mode
    700. 

  700. [Save Log Job] 2024-12-26 10:53:41.472 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation RunRecipe(CACB, , , )
    701. 

  701. [Save Log Job] 2024-12-26 10:53:41.492 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|LoadProcessRecipe
    702. 

  702. [Save Log Job] 2024-12-26 10:53:41.494 LOG.INFO LOG.cs Line:61 Write() - System通知TM保存工艺程序20241226105341-CACB
    703. 

  703. [Save Log Job] 2024-12-26 10:53:41.494 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventLotStart
    704. 

  704. [Save Log Job] 2024-12-26 10:53:41.495 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|PreProcess
    705. 

  705. [Save Log Job] 2024-12-26 10:53:41.496 LOG.INFO YZQZFabAuto.cs Line:165 StartJobRecord() - StartJobRecord|start||CACB
    706. 

  706. [Save Log Job] 2024-12-26 10:53:41.496 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    707. 

  707. [Save Log Job] 2024-12-26 10:53:41.499 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    708. 

  708. [Save Log Job] 2024-12-26 10:53:41.548 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check door status。
    709. 

  709. [Save Log Job] 2024-12-26 10:53:41.548 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：check chamber door。
    710. 

  710. [Save Log Job] 2024-12-26 10:53:41.548 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：check backpanel door。
    711. 

  711. [Save Log Job] 2024-12-26 10:53:41.549 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check pump status。
    712. 

  712. [Save Log Job] 2024-12-26 10:53:41.550 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Close all the valves。
    713. 

  713. [Save Log Job] 2024-12-26 10:53:41.609 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Open pumping valve。
    714. 

  714. [Save Log Job] 2024-12-26 10:53:41.679 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
    715. 

  715. [Save Log Job] 2024-12-26 10:53:43.012 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check chamber pressure。
    716. 

  716. [Save Log Job] 2024-12-26 10:53:46.369 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation AbortRecipe()
    717. 

  717. [Save Log Job] 2024-12-26 10:53:48.655 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle
    718. 

  718. [Save Log Job] 2024-12-26 10:53:48.673 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
    719. 

  719. [Save Log Job] 2024-12-26 10:53:48.678 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
    720. 

  720. [Save Log Job] 2024-12-26 10:53:48.683 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
    721. 

  721. [Save Log Job] 2024-12-26 10:53:48.689 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
    722. 

  722. [Save Log Job] 2024-12-26 10:53:48.851 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
    723. 

  723. [Save Log Job] 2024-12-26 10:53:50.660 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门Chamber pumping valveClose失败，原因：Valve keep open。
    724. 

  724. <==  [Save Log Job] 2024-12-26 11:01:28.561 LOG.INFO LOG.cs Line:61 Write() - 完成对数据库表格的更新操作
    725. 

  725. [Save Log Job] 2024-12-26 11:01:29.606 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, <IoSensor id="SensorBackPanelDoor" display=""  schematicId="" unit="" di="DI_back_panle_door_sw" isLowAsNormal="false" infoText="BackPanel door is opened" warningText="" alarmText="" />
    726. 

  726. [Save Log Job] 2024-12-26 11:01:29.606 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, <IoSensor id="SensorPumpDoor"      display=""  schematicId="" unit="" di="DI_pump_door_sw"    isLowAsNormal="false" infoText="" warningText="" alarmText="" />
    727. 

  727. [Save Log Job] 2024-12-26 11:01:29.680 LOG.INFO LOG.cs Line:61 Write() - Routine System 初始化 Start
    728. 

  728. [Save Log Job] 2024-12-26 11:01:29.768 LOG.INFO EventService.cs Line:60 Register() - 客户端c7c61fab-0b7a-41e5-aa7d-b533a2a1989f已连接
    729. 

  729. [Save Log Job] 2024-12-26 11:01:30.679 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle
    730. 

  730. [Save Log Job] 2024-12-26 11:01:30.726 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle
    731. 

  731. [Save Log Job] 2024-12-26 11:01:30.914 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle
    732. 

  732. [Save Log Job] 2024-12-26 11:01:30.961 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle
    733. 

  733. [Save Log Job] 2024-12-26 11:01:31.072 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
    734. 

  734. [Save Log Job] 2024-12-26 11:01:31.189 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetConfig(System_IsMesMode, True)
    735. 

  735. [Save Log Job] 2024-12-26 11:01:31.317 LOG.ERROR DatabaseManager.cs Line:70 PeriodicRun() - 执行数据库操作错误, There is already an open DataReader associated with this Command which must be closed first., Insert into "EventManager"("ID","EventEnum","Type","Source","Description","Level","OccurTime") values(1000,'GeneralInfo','EventUI_Notify','System','Operation SetConfig(System_IsMesMode, True)','Information','2024-12-26 11:01:31.188')
    736. 

  736. [Save Log Job] 2024-12-26 11:01:34.692 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Software will be expired in -63 days, at 10/24/2024 12:00:00 AM 。
    737. 

  737. [Save Log Job] 2024-12-26 11:01:41.546 LOG.INFO LOG.cs Line:61 Write() - 用户admin尝试登录系统
    738. 

  738. [Save Log Job] 2024-12-26 11:01:41.547 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin
    739. 

  739. [Save Log Job] 2024-12-26 11:01:41.551 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - User admin login
    740. 

  740. [Save Log Job] 2024-12-26 11:01:41.679 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin
    741. 

  741. [Save Log Job] 2024-12-26 11:01:51.739 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
    742. 

  742. [Save Log Job] 2024-12-26 11:01:51.743 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
    743. 

  743. [Save Log Job] 2024-12-26 11:01:51.922 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
    744. 

  744. [Save Log Job] 2024-12-26 11:01:51.970 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
    745. 

  745. [Save Log Job] 2024-12-26 11:01:54.903 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetAutoMode()
    746. 

  746. [Save Log Job] 2024-12-26 11:01:54.904 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentModeChanged
    747. 

  747. [Save Log Job] 2024-12-26 11:01:54.905 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System running mode changed to Auto Mode
    748. 

  748. [Save Log Job] 2024-12-26 11:01:57.160 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation RunRecipe(CACB, , , )
    749. 

  749. [Save Log Job] 2024-12-26 11:01:57.183 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|LoadProcessRecipe
    750. 

  750. [Save Log Job] 2024-12-26 11:01:57.185 LOG.INFO LOG.cs Line:61 Write() - System通知TM保存工艺程序20241226110157-CACB
    751. 

  751. [Save Log Job] 2024-12-26 11:01:57.185 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventLotStart
    752. 

  752. [Save Log Job] 2024-12-26 11:01:57.186 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|PreProcess
    753. 

  753. [Save Log Job] 2024-12-26 11:01:57.186 LOG.INFO YZQZFabAuto.cs Line:165 StartJobRecord() - StartJobRecord|start||CACB
    754. 

  754. [Save Log Job] 2024-12-26 11:01:57.187 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    755. 

  755. [Save Log Job] 2024-12-26 11:01:57.189 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    756. 

  756. [Save Log Job] 2024-12-26 11:01:57.238 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check door status。
    757. 

  757. [Save Log Job] 2024-12-26 11:01:57.238 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：check chamber door。
    758. 

  758. [Save Log Job] 2024-12-26 11:01:57.239 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：check backpanel door。
    759. 

  759. [Save Log Job] 2024-12-26 11:01:57.239 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check pump status。
    760. 

  760. [Save Log Job] 2024-12-26 11:01:57.241 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Close all the valves。
    761. 

  761. [Save Log Job] 2024-12-26 11:01:57.303 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Open pumping valve。
    762. 

  762. [Save Log Job] 2024-12-26 11:01:57.331 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
    763. 

  763. [Save Log Job] 2024-12-26 11:01:59.166 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check chamber pressure。
    764. 

  764. [Save Log Job] 2024-12-26 11:02:01.956 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation AbortRecipe()
    765. 

  765. [Save Log Job] 2024-12-26 11:02:04.496 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle
    766. 

  766. [Save Log Job] 2024-12-26 11:02:04.694 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
    767. 

  767. [Save Log Job] 2024-12-26 11:02:18.194 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
    768. 

  768. [Save Log Job] 2024-12-26 11:02:18.199 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
    769. 

  769. [Save Log Job] 2024-12-26 11:02:25.505 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
    770. 

  770. [Save Log Job] 2024-12-26 11:02:27.190 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    771. 

  771. [Save Log Job] 2024-12-26 11:02:31.967 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation RunRecipe(CACB, , , )
    772. 

  772. [Save Log Job] 2024-12-26 11:02:31.968 LOG.INFO LOG.cs Line:61 Write() - System通知TM保存工艺程序20241226110231-CACB
    773. 

  773. [Save Log Job] 2024-12-26 11:02:31.968 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|LoadProcessRecipe
    774. 

  774. [Save Log Job] 2024-12-26 11:02:31.969 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventLotStart
    775. 

  775. [Save Log Job] 2024-12-26 11:02:31.969 LOG.INFO YZQZFabAuto.cs Line:165 StartJobRecord() - StartJobRecord|start||CACB
    776. 

  776. [Save Log Job] 2024-12-26 11:02:31.970 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|PreProcess
    777. 

  777. [Save Log Job] 2024-12-26 11:02:32.019 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check door status。
    778. 

  778. [Save Log Job] 2024-12-26 11:02:32.019 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：check chamber door。
    779. 

  779. [Save Log Job] 2024-12-26 11:02:32.019 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：check backpanel door。
    780. 

  780. [Save Log Job] 2024-12-26 11:02:32.019 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check pump status。
    781. 

  781. [Save Log Job] 2024-12-26 11:02:32.020 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Close all the valves。
    782. 

  782. [Save Log Job] 2024-12-26 11:02:32.077 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Open pumping valve。
    783. 

  783. [Save Log Job] 2024-12-26 11:02:32.160 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
    784. 

  784. [Save Log Job] 2024-12-26 11:02:34.111 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门Chamber pumping valveOpen失败，原因：Valve keep closed 。
    785. 

  785. [Save Log Job] 2024-12-26 11:02:36.179 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check chamber pressure。
    786. 

  786. [Save Log Job] 2024-12-26 11:02:52.981 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
    787. 

  787. [Save Log Job] 2024-12-26 11:02:52.986 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
    788. 

  788. [Save Log Job] 2024-12-26 11:02:57.191 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    789. 

  789. [Save Log Job] 2024-12-26 11:03:11.111 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Pump below 100mTorr。
    790. 

  790. [Save Log Job] 2024-12-26 11:03:11.168 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：PreProcess Finished in 0.7 minitues。
    791. 

  791. [Save Log Job] 2024-12-26 11:03:11.168 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System complete run ''PreProcess''.
    792. 

  792. [Save Log Job] 2024-12-26 11:03:11.170 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Run Recipe 20241226110231-CACB
    793. 

  793. [Save Log Job] 2024-12-26 11:03:11.170 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe start run''20241226110231-CACB''
    794. 

  794. [Save Log Job] 2024-12-26 11:03:11.170 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Processing
    795. 

  795. [Save Log Job] 2024-12-26 11:03:11.223 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe''20241226110231-CACB'' start run step 1：initial。
    796. 

  796. [Save Log Job] 2024-12-26 11:03:11.224 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。
    797. 

  797. [Save Log Job] 2024-12-26 11:03:11.224 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。
    798. 

  798. [Save Log Job] 2024-12-26 11:03:11.224 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。
    799. 

  799. [Save Log Job] 2024-12-26 11:03:11.225 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。
    800. 

  800. [Save Log Job] 2024-12-26 11:03:11.225 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。
    801. 

  801. [Save Log Job] 2024-12-26 11:03:11.225 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。
    802. 

  802. [Save Log Job] 2024-12-26 11:03:11.225 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。
    803. 

  803. [Save Log Job] 2024-12-26 11:03:11.226 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPower，RF set Power:0。
    804. 

  804. [Save Log Job] 2024-12-26 11:03:11.226 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。
    805. 

  805. [Save Log Job] 2024-12-26 11:03:11.226 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。
    806. 

  806. [Save Log Job] 2024-12-26 11:03:11.226 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。
    807. 

  807. [Save Log Job] 2024-12-26 11:03:11.226 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas1， ramp to 45sccm。
    808. 

  808. [Save Log Job] 2024-12-26 11:03:11.226 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas2， ramp to 56sccm。
    809. 

  809. [Save Log Job] 2024-12-26 11:03:11.227 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas3， ramp to 66sccm。
    810. 

  810. [Save Log Job] 2024-12-26 11:03:11.227 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas4， ramp to 76sccm。
    811. 

  811. [Save Log Job] 2024-12-26 11:03:11.227 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas5， ramp to 86sccm。
    812. 

  812. [Save Log Job] 2024-12-26 11:03:11.227 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPowerOnOff，Set RF power Off。
    813. 

  813. [Save Log Job] 2024-12-26 11:03:11.277 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Start monitor pressure stability
    814. 

  814. [Save Log Job] 2024-12-26 11:03:14.757 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation AbortRecipe()
    815. 

  815. [Save Log Job] 2024-12-26 11:03:17.870 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe was aborted: user aborted recipe
    816. 

  816. [Save Log Job] 2024-12-26 11:03:17.872 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Stop monitor pressure stability
    817. 

  817. [Save Log Job] 2024-12-26 11:03:17.874 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Recipe run completed，Recipe：20241226110231-CACB
    818. 

  818. Start time：2024/12/26 11:03:11
    819. 

  819. End time：2024/12/26 11:03:17
    820. 

  820. Total time：0:0:6
    821. 

  821. [Save Log Job] 2024-12-26 11:03:17.875 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Recipe completely run
    822. 

  822. [Save Log Job] 2024-12-26 11:03:17.875 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|PostProcess
    823. 

  823. [Save Log Job] 2024-12-26 11:03:17.927 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, wait for 10 seconds
    824. 

  824. [Save Log Job] 2024-12-26 11:03:19.893 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC1 ValveClose失败，原因：Valve keep open。
    825. 

  825. [Save Log Job] 2024-12-26 11:03:19.895 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC2 ValveClose失败，原因：Valve keep open。
    826. 

  826. [Save Log Job] 2024-12-26 11:03:19.895 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC3 ValveClose失败，原因：Valve keep open。
    827. 

  827. [Save Log Job] 2024-12-26 11:03:19.895 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC4 ValveClose失败，原因：Valve keep open。
    828. 

  828. [Save Log Job] 2024-12-26 11:03:19.895 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC5 ValveClose失败，原因：Valve keep open。
    829. 

  829. [Save Log Job] 2024-12-26 11:03:19.895 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门Process gas final valveClose失败，原因：Valve keep open。
    830. 

  830. [Save Log Job] 2024-12-26 11:03:27.192 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    831. 

  831. [Save Log Job] 2024-12-26 11:03:28.007 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, RF Power Off
    832. 

  832. [Save Log Job] 2024-12-26 11:03:28.066 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, Stop all the gas flow
    833. 

  833. [Save Log Job] 2024-12-26 11:03:28.124 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, Close all the valves
    834. 

  834. [Save Log Job] 2024-12-26 11:03:28.182 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, close pump valve
    835. 

  835. [Save Log Job] 2024-12-26 11:03:29.138 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, delay 3 seconds
    836. 

  836. [Save Log Job] 2024-12-26 11:03:32.178 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
    837. 

  837. [Save Log Job] 2024-12-26 11:03:32.244 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, vent 50 seconds
    838. 

  838. [Save Log Job] 2024-12-26 11:03:38.885 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
    839. 

  839. [Save Log Job] 2024-12-26 11:03:57.192 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    840. 

  840. [Save Log Job] 2024-12-26 11:04:22.350 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, Close vent valve
    841. 

  841. [Save Log Job] 2024-12-26 11:04:23.170 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, PostProcess Finished in 1.1 minitues
    842. 

  842. [Save Log Job] 2024-12-26 11:04:23.170 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System complete run ''PostProcess''.
    843. 

  843. [Save Log Job] 2024-12-26 11:04:23.171 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventLotFinished
    844. 

  844. [Save Log Job] 2024-12-26 11:04:23.172 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle
    845. 

  845. [Save Log Job] 2024-12-26 11:04:23.172 LOG.INFO YZQZFabAuto.cs Line:212 EndJobRecord() - EndJobRecord|
    846. 

  846. [Save Log Job] 2024-12-26 11:04:23.172 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    847. 

  847. [Save Log Job] 2024-12-26 11:04:23.179 LOG.INFO YZQZFabAuto.cs Line:243 Export2CsvLocalFile() - Export2CsvLocalFileD:\jet.plasma\trunk\Triton160\Triton160RT\bin\Debug\Logs\.csv
    848. 

  848. [Save Log Job] 2024-12-26 11:04:23.181 LOG.INFO YZQZFabAuto.cs Line:291 Export2CsvWanPanFile() - Export2CsvWanPanFile\\192.168.1.208\CHIP_LoaderPath\JetplasmaDaJiao\SourceFolder\.csv
    849. 

  849. [Save Log Job] 2024-12-26 11:04:23.291 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
    850. 

  850. [Save Log Job] 2024-12-26 11:04:44.211 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
    851. 

  851. [Save Log Job] 2024-12-26 11:04:49.707 LOG.INFO YZQZFabAuto.cs Line:327 Export2CsvWanPanFile() - 找不到网络路径。
    852. 

  852. 

  853. [Save Log Job] 2024-12-26 11:13:20.611 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetManualMode()
    854. 

  854. [Save Log Job] 2024-12-26 11:13:20.612 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentModeChanged
    855. 

  855. [Save Log Job] 2024-12-26 11:13:20.612 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System running mode changed to Manual Mode
    856. 

  856. [Save Log Job] 2024-12-26 11:13:25.507 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation DeviceOperation(BoostPump, SetPressure, 100)
    857. 

  857. [Save Log Job] 2024-12-26 11:13:25.508 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：BoostPump.SetPressure，。
    858. 

  858. [Save Log Job] 2024-12-26 11:13:25.509 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetConfig(System_PumpBasePressure, 500)
    859. 

  859. [Save Log Job] 2024-12-26 11:13:25.509 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetConfig(System_PumpTimeLimit, 10)
    860. 

  860. [Save Log Job] 2024-12-26 11:13:25.510 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation Pump()
    861. 

  861. [Save Log Job] 2024-12-26 11:13:25.511 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Pumping
    862. 

  862. [Save Log Job] 2024-12-26 11:13:25.563 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Pumping Down：Check door status。
    863. 

  863. [Save Log Job] 2024-12-26 11:13:25.563 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Pumping Down：check chamber door。
    864. 

  864. [Save Log Job] 2024-12-26 11:13:25.563 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Pumping Down：check backpanel door。
    865. 

  865. [Save Log Job] 2024-12-26 11:13:25.563 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Pumping Down：Check pump status。
    866. 

  866. [Save Log Job] 2024-12-26 11:13:25.563 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Pumping Down：Close all the valves。
    867. 

  867. [Save Log Job] 2024-12-26 11:13:25.621 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Pumping Down：Open pumping valve。
    868. 

  868. [Save Log Job] 2024-12-26 11:13:25.654 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
    869. 

  869. [Save Log Job] 2024-12-26 11:13:27.654 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门Chamber pumping valveOpen失败，原因：Valve keep closed 。
    870. 

  870. [Save Log Job] 2024-12-26 11:13:28.040 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Pumping Down：Wait chamber pressure until below 500。
    871. 

  871. [Save Log Job] 2024-12-26 11:13:34.810 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation Abort()
    872. 

  872. [Save Log Job] 2024-12-26 11:13:34.811 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle
    873. 

  873. [Save Log Job] 2024-12-26 11:13:34.876 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
    874. 

  874. [Save Log Job] 2024-12-26 11:13:42.835 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation DeviceOperation(BoostPump, SetPressure, 100)
    875. 

  875. [Save Log Job] 2024-12-26 11:13:42.835 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：BoostPump.SetPressure，。
    876. 

  876. [Save Log Job] 2024-12-26 11:13:42.836 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetConfig(System_PumpBasePressure, 500)
    877. 

  877. [Save Log Job] 2024-12-26 11:13:42.837 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetConfig(System_PumpTimeLimit, 10)
    878. 

  878. [Save Log Job] 2024-12-26 11:13:42.838 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation Pump()
    879. 

  879. [Save Log Job] 2024-12-26 11:13:42.838 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Pumping
    880. 

  880. [Save Log Job] 2024-12-26 11:13:42.888 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Pumping Down：Check door status。
    881. 

  881. [Save Log Job] 2024-12-26 11:13:42.889 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Pumping Down：check chamber door。
    882. 

  882. [Save Log Job] 2024-12-26 11:13:42.889 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Pumping Down：check backpanel door。
    883. 

  883. [Save Log Job] 2024-12-26 11:13:42.889 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Pumping Down：Check pump status。
    884. 

  884. [Save Log Job] 2024-12-26 11:13:42.889 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Pumping Down：Close all the valves。
    885. 

  885. [Save Log Job] 2024-12-26 11:13:42.893 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
    886. 

  886. [Save Log Job] 2024-12-26 11:13:42.945 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Pumping Down：Open pumping valve。
    887. 

  887. [Save Log Job] 2024-12-26 11:13:43.449 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Pumping Down：Wait chamber pressure until below 500。
    888. 

  888. [Save Log Job] 2024-12-26 11:13:46.520 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
    889. 

  889. [Save Log Job] 2024-12-26 11:13:53.469 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Can not pump to base pressure 500 in 10 seconds。
    890. 

  890. [Save Log Job] 2024-12-26 11:13:53.476 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle
    891. 

  891. [Save Log Job] 2024-12-26 11:13:53.525 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
    892. 

  892. [Save Log Job] 2024-12-26 11:13:53.580 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation Abort()
    893. 

  893. [Save Log Job] 2024-12-26 11:13:53.581 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Chamber is in Idle，can not do Abort。
    894. 

  894. [Save Log Job] 2024-12-26 11:13:55.818 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
    895. 

  895. [Save Log Job] 2024-12-26 11:14:02.651 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation StopPump()
    896. 

  896. [Save Log Job] 2024-12-26 11:14:02.651 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|StopPumping
    897. 

  897. [Save Log Job] 2024-12-26 11:14:02.702 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Stop pump：Check if the rf is on。
    898. 

  898. [Save Log Job] 2024-12-26 11:14:02.741 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
    899. 

  899. [Save Log Job] 2024-12-26 11:14:02.761 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Stop pump：Check if the gas stopped flowing。
    900. 

  900. [Save Log Job] 2024-12-26 11:14:02.817 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Stop pump：Close close pump valve。
    901. 

  901. [Save Log Job] 2024-12-26 11:14:03.848 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
    902. 

  902. [Save Log Job] 2024-12-26 11:14:04.835 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门Chamber pumping valveClose失败，原因：Valve keep open。
    903. 

  903. [Save Log Job] 2024-12-26 11:14:06.522 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Stop pump：Stop Pump Finished in 0.1 minitues。
    904. 

  904. [Save Log Job] 2024-12-26 11:14:06.522 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System complete run ''Stop Pump''.
    905. 

  905. [Save Log Job] 2024-12-26 11:14:06.522 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Stop Pump
    906. 

  906. [Save Log Job] 2024-12-26 11:14:06.523 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle
    907. 

  907. [Save Log Job] 2024-12-26 11:14:06.548 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
    908. 

  908. [Save Log Job] 2024-12-26 11:14:14.485 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
    909. 

  909. [Save Log Job] 2024-12-26 11:14:18.964 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation DeviceOperation(BoostPump, SetPressure, 100)
    910. 

  910. [Save Log Job] 2024-12-26 11:14:18.964 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：BoostPump.SetPressure，。
    911. 

  911. [Save Log Job] 2024-12-26 11:14:18.965 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetConfig(System_PumpBasePressure, 500)
    912. 

  912. [Save Log Job] 2024-12-26 11:14:18.965 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetConfig(System_PumpTimeLimit, 10)
    913. 

  913. [Save Log Job] 2024-12-26 11:14:18.966 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation Pump()
    914. 

  914. [Save Log Job] 2024-12-26 11:14:18.966 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Pumping
    915. 

  915. [Save Log Job] 2024-12-26 11:14:18.977 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
    916. 

  916. [Save Log Job] 2024-12-26 11:14:19.016 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Pumping Down：Check door status。
    917. 

  917. [Save Log Job] 2024-12-26 11:14:19.016 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Pumping Down：check chamber door。
    918. 

  918. [Save Log Job] 2024-12-26 11:14:19.016 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Pumping Down：check backpanel door。
    919. 

  919. [Save Log Job] 2024-12-26 11:14:19.016 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Pumping Down：Check pump status。
    920. 

  920. [Save Log Job] 2024-12-26 11:14:19.016 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Pumping Down：Close all the valves。
    921. 

  921. [Save Log Job] 2024-12-26 11:14:19.073 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Pumping Down：Open pumping valve。
    922. 

  922. [Save Log Job] 2024-12-26 11:14:21.108 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门Chamber pumping valveOpen失败，原因：Valve keep closed 。
    923. 

  923. [Save Log Job] 2024-12-26 11:14:21.886 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Pumping Down：Wait chamber pressure until below 500。
    924. 

  924. [Save Log Job] 2024-12-26 11:14:23.660 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
    925. 

  925. [Save Log Job] 2024-12-26 11:14:27.532 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
    926. 

  926. [Save Log Job] 2024-12-26 11:14:28.035 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation Abort()
    927. 

  927. [Save Log Job] 2024-12-26 11:14:28.036 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle
    928. 

  928. [Save Log Job] 2024-12-26 11:14:28.205 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
    929. 

  929. [Save Log Job] 2024-12-26 11:14:39.974 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
    930. 

  930. [Save Log Job] 2024-12-26 11:14:45.531 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation DeviceOperation(BoostPump, SetPressure, 100)
    931. 

  931. [Save Log Job] 2024-12-26 11:14:45.531 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：BoostPump.SetPressure，。
    932. 

  932. [Save Log Job] 2024-12-26 11:14:45.532 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetConfig(System_PumpBasePressure, 500)
    933. 

  933. [Save Log Job] 2024-12-26 11:14:45.533 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetConfig(System_PumpTimeLimit, 10)
    934. 

  934. [Save Log Job] 2024-12-26 11:14:45.533 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation Pump()
    935. 

  935. [Save Log Job] 2024-12-26 11:14:45.534 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Pumping
    936. 

  936. [Save Log Job] 2024-12-26 11:14:45.585 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Pumping Down：Check door status。
    937. 

  937. [Save Log Job] 2024-12-26 11:14:45.585 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Pumping Down：check chamber door。
    938. 

  938. [Save Log Job] 2024-12-26 11:14:45.585 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Pumping Down：check backpanel door。
    939. 

  939. [Save Log Job] 2024-12-26 11:14:45.585 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Pumping Down：Check pump status。
    940. 

  940. [Save Log Job] 2024-12-26 11:14:45.585 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Pumping Down：Close all the valves。
    941. 

  941. [Save Log Job] 2024-12-26 11:14:45.641 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
    942. 

  942. [Save Log Job] 2024-12-26 11:14:45.641 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Pumping Down：Open pumping valve。
    943. 

  943. [Save Log Job] 2024-12-26 11:14:47.674 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门Chamber pumping valveOpen失败，原因：Valve keep closed 。
    944. 

  944. [Save Log Job] 2024-12-26 11:14:48.728 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Pumping Down：Wait chamber pressure until below 500。
    945. 

  945. [Save Log Job] 2024-12-26 11:14:49.046 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
    946. 

  946. [Save Log Job] 2024-12-26 11:14:53.755 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation Abort()
    947. 

  947. [Save Log Job] 2024-12-26 11:14:53.755 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle
    948. 

  948. [Save Log Job] 2024-12-26 11:14:53.867 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
    949. 

  949. [Save Log Job] 2024-12-26 11:14:55.756 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门Chamber pumping valveClose失败，原因：Valve keep open。
    950. 

  950. [Save Log Job] 2024-12-26 11:15:06.541 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
    951. 

  951. [Save Log Job] 2024-12-26 11:15:14.762 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
    952. 

  952. [Save Log Job] 2024-12-26 11:15:28.483 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation DeviceOperation(BoostPump, SetPressure, 100)
    953. 

  953. [Save Log Job] 2024-12-26 11:15:28.483 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：BoostPump.SetPressure，。
    954. 

  954. [Save Log Job] 2024-12-26 11:15:28.484 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetConfig(System_PumpBasePressure, 500)
    955. 

  955. [Save Log Job] 2024-12-26 11:15:28.484 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetConfig(System_PumpTimeLimit, 10)
    956. 

  956. [Save Log Job] 2024-12-26 11:15:28.485 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation Pump()
    957. 

  957. [Save Log Job] 2024-12-26 11:15:28.485 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Pumping
    958. 

  958. [Save Log Job] 2024-12-26 11:15:28.535 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Pumping Down：Check door status。
    959. 

  959. [Save Log Job] 2024-12-26 11:15:28.536 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
    960. 

  960. [Save Log Job] 2024-12-26 11:15:28.536 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Pumping Down：check chamber door。
    961. 

  961. [Save Log Job] 2024-12-26 11:15:28.536 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Pumping Down：check backpanel door。
    962. 

  962. [Save Log Job] 2024-12-26 11:15:28.536 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Pumping Down：Check pump status。
    963. 

  963. [Save Log Job] 2024-12-26 11:15:28.536 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Pumping Down：Close all the valves。
    964. 

  964. [Save Log Job] 2024-12-26 11:15:28.593 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Pumping Down：Open pumping valve。
    965. 

  965. [Save Log Job] 2024-12-26 11:15:30.636 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门Chamber pumping valveOpen失败，原因：Valve keep closed 。
    966. 

  966. [Save Log Job] 2024-12-26 11:15:30.968 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Pumping Down：Wait chamber pressure until below 500。
    967. 

  967. [Save Log Job] 2024-12-26 11:15:31.303 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Pumping Down：Pump below 500mTorr。
    968. 

  968. [Save Log Job] 2024-12-26 11:15:31.360 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Pumping Down：Pump Finished in 0.0 minitues。
    969. 

  969. [Save Log Job] 2024-12-26 11:15:31.360 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System complete run ''Pump''.
    970. 

  970. [Save Log Job] 2024-12-26 11:15:31.360 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Pump
    971. 

  971. [Save Log Job] 2024-12-26 11:15:31.361 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle
    972. 

  972. [Save Log Job] 2024-12-26 11:15:31.547 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
    973. 

  973. [Save Log Job] 2024-12-26 11:15:41.994 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation StopPump()
    974. 

  974. [Save Log Job] 2024-12-26 11:15:41.995 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|StopPumping
    975. 

  975. [Save Log Job] 2024-12-26 11:15:42.046 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
    976. 

  976. [Save Log Job] 2024-12-26 11:15:42.046 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Stop pump：Check if the rf is on。
    977. 

  977. [Save Log Job] 2024-12-26 11:15:42.102 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Stop pump：Check if the gas stopped flowing。
    978. 

  978. [Save Log Job] 2024-12-26 11:15:42.160 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Stop pump：Close close pump valve。
    979. 

  979. [Save Log Job] 2024-12-26 11:15:44.183 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门Chamber pumping valveClose失败，原因：Valve keep open。
    980. 

  980. [Save Log Job] 2024-12-26 11:15:46.360 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Stop pump：Stop Pump Finished in 0.1 minitues。
    981. 

  981. [Save Log Job] 2024-12-26 11:15:46.360 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System complete run ''Stop Pump''.
    982. 

  982. [Save Log Job] 2024-12-26 11:15:46.360 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Stop Pump
    983. 

  983. [Save Log Job] 2024-12-26 11:15:46.361 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle
    984. 

  984. [Save Log Job] 2024-12-26 11:15:46.376 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
    985. 

  985. [Save Log Job] 2024-12-26 11:15:49.493 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
    986. 

  986. [Save Log Job] 2024-12-26 11:15:52.370 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
    987. 

  987. [Save Log Job] 2024-12-26 11:16:03.008 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
    988. 

  988. [Save Log Job] 2024-12-26 11:16:07.372 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
    989. 

  989.