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log20241216.txt

log20241216.txt 83 KB
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  1. <==  [Save Log Job] 2024-12-16 09:14:27.820 LOG.INFO LOG.cs Line:61 Write() - 完成对数据库表格的更新操作
    2. 

  2. [Save Log Job] 2024-12-16 09:14:28.859 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, <IoSensor id="SensorBackPanelDoor" display=""  schematicId="" unit="" di="DI_back_panle_door_sw" isLowAsNormal="false" infoText="BackPanel door is opened" warningText="" alarmText="" />
    3. 

  3. [Save Log Job] 2024-12-16 09:14:28.859 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, <IoSensor id="SensorPumpDoor"      display=""  schematicId="" unit="" di="DI_pump_door_sw"    isLowAsNormal="false" infoText="" warningText="" alarmText="" />
    4. 

  4. [Save Log Job] 2024-12-16 09:14:28.867 LOG.INFO EventService.cs Line:60 Register() - 客户端f16da987-8dc8-48e9-85c4-edb8826e907f已连接
    5. 

  5. [Save Log Job] 2024-12-16 09:14:28.936 LOG.INFO LOG.cs Line:61 Write() - Routine System 初始化 Start
    6. 

  6. [Save Log Job] 2024-12-16 09:14:30.024 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle
    7. 

  7. [Save Log Job] 2024-12-16 09:14:30.026 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle
    8. 

  8. [Save Log Job] 2024-12-16 09:14:30.180 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle
    9. 

  9. [Save Log Job] 2024-12-16 09:14:30.229 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle
    10. 

  10. [Save Log Job] 2024-12-16 09:14:30.295 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
    11. 

  11. [Save Log Job] 2024-12-16 09:14:36.051 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Software will be expired in -53 days, at 10/24/2024 12:00:00 AM 。
    12. 

  12. [Save Log Job] 2024-12-16 09:14:36.062 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetConfig(System_IsMesMode, True)
    13. 

  13. [Save Log Job] 2024-12-16 09:14:43.568 LOG.INFO LOG.cs Line:61 Write() - 用户admin尝试登录系统
    14. 

  14. [Save Log Job] 2024-12-16 09:14:43.569 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin
    15. 

  15. [Save Log Job] 2024-12-16 09:14:43.581 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - User admin login
    16. 

  16. [Save Log Job] 2024-12-16 09:14:43.710 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin
    17. 

  17. [Save Log Job] 2024-12-16 09:14:51.099 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
    18. 

  18. [Save Log Job] 2024-12-16 09:14:51.191 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
    19. 

  19. [Save Log Job] 2024-12-16 09:14:51.236 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
    20. 

  20. [Save Log Job] 2024-12-16 09:15:12.090 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
    21. 

  21. <==  [Save Log Job] 2024-12-16 10:29:06.681 LOG.INFO LOG.cs Line:61 Write() - 完成对数据库表格的更新操作
    22. 

  22. [Save Log Job] 2024-12-16 10:29:07.594 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, <IoSensor id="SensorBackPanelDoor" display=""  schematicId="" unit="" di="DI_back_panle_door_sw" isLowAsNormal="false" infoText="BackPanel door is opened" warningText="" alarmText="" />
    23. 

  23. [Save Log Job] 2024-12-16 10:29:07.595 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, <IoSensor id="SensorPumpDoor"      display=""  schematicId="" unit="" di="DI_pump_door_sw"    isLowAsNormal="false" infoText="" warningText="" alarmText="" />
    24. 

  24. [Save Log Job] 2024-12-16 10:29:07.671 LOG.INFO LOG.cs Line:61 Write() - Routine System 初始化 Start
    25. 

  25. [Save Log Job] 2024-12-16 10:29:07.684 LOG.INFO EventService.cs Line:60 Register() - 客户端028ffeca-e450-4b76-854d-2590c1c424f6已连接
    26. 

  26. [Save Log Job] 2024-12-16 10:29:07.684 LOG.INFO EventService.cs Line:60 Register() - 客户端028ffeca-e450-4b76-854d-2590c1c424f6已连接
    27. 

  27. [Save Log Job] 2024-12-16 10:29:08.725 LOG.INFO YZQZFabAuto.cs Line:116 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle
    28. 

  28. [Save Log Job] 2024-12-16 10:29:08.727 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle
    29. 

  29. [Save Log Job] 2024-12-16 10:29:08.894 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle
    30. 

  30. [Save Log Job] 2024-12-16 10:29:08.942 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle
    31. 

  31. [Save Log Job] 2024-12-16 10:29:09.021 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
    32. 

  32. [Save Log Job] 2024-12-16 10:29:09.455 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetConfig(System_IsMesMode, True)
    33. 

  33. [Save Log Job] 2024-12-16 10:29:12.684 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Software will be expired in -53 days, at 10/24/2024 12:00:00 AM 。
    34. 

  34. [Save Log Job] 2024-12-16 10:29:26.265 LOG.INFO LOG.cs Line:61 Write() - 用户admin尝试登录系统
    35. 

  35. [Save Log Job] 2024-12-16 10:29:26.266 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin
    36. 

  36. [Save Log Job] 2024-12-16 10:29:26.278 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - User admin login
    37. 

  37. [Save Log Job] 2024-12-16 10:29:26.399 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin
    38. 

  38. [Save Log Job] 2024-12-16 10:29:29.798 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
    39. 

  39. [Save Log Job] 2024-12-16 10:29:29.904 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
    40. 

  40. [Save Log Job] 2024-12-16 10:29:29.953 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
    41. 

  41. [Save Log Job] 2024-12-16 10:29:50.789 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
    42. 

  42. [Save Log Job] 2024-12-16 10:29:53.645 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetAutoMode()
    43. 

  43. [Save Log Job] 2024-12-16 10:29:53.647 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentModeChanged
    44. 

  44. [Save Log Job] 2024-12-16 10:29:53.647 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System running mode changed to Auto Mode
    45. 

  45. [Save Log Job] 2024-12-16 10:30:20.236 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation RunRecipe(CACB, 1111111111/, , )
    46. 

  46. [Save Log Job] 2024-12-16 10:30:48.075 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|LoadProcessRecipe
    47. 

  47. [Save Log Job] 2024-12-16 10:30:48.078 LOG.INFO LOG.cs Line:61 Write() - System通知TM保存工艺程序20241216103048-CACB
    48. 

  48. [Save Log Job] 2024-12-16 10:30:48.078 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventLotStart
    49. 

  49. [Save Log Job] 2024-12-16 10:30:48.079 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|PreProcess
    50. 

  50. [Save Log Job] 2024-12-16 10:30:50.940 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
    51. 

  51. [Save Log Job] 2024-12-16 10:30:50.941 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
    52. 

  52. [Save Log Job] 2024-12-16 10:30:50.942 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check door status。
    53. 

  53. [Save Log Job] 2024-12-16 10:30:50.943 LOG.INFO YZQZFabAuto.cs Line:165 StartJobRecord() - StartJobRecord|start|1111111111/|CACB
    54. 

  54. [Save Log Job] 2024-12-16 10:30:50.943 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：check chamber door。
    55. 

  55. [Save Log Job] 2024-12-16 10:30:50.943 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：check backpanel door。
    56. 

  56. [Save Log Job] 2024-12-16 10:30:50.943 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    57. 

  57. [Save Log Job] 2024-12-16 10:30:50.944 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check pump status。
    58. 

  58. [Save Log Job] 2024-12-16 10:30:50.945 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    59. 

  59. [Save Log Job] 2024-12-16 10:30:50.946 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Close all the valves。
    60. 

  60. [Save Log Job] 2024-12-16 10:30:51.008 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Open pumping valve。
    61. 

  61. [Save Log Job] 2024-12-16 10:30:53.016 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门Chamber pumping valveOpen失败，原因：Valve keep closed 。
    62. 

  62. [Save Log Job] 2024-12-16 10:30:54.748 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check chamber pressure。
    63. 

  63. [Save Log Job] 2024-12-16 10:31:09.085 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
    64. 

  64. [Save Log Job] 2024-12-16 10:31:11.948 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
    65. 

  65. [Save Log Job] 2024-12-16 10:31:20.946 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    66. 

  66. [Save Log Job] 2024-12-16 10:31:33.465 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Pump below 100mTorr。
    67. 

  67. [Save Log Job] 2024-12-16 10:31:33.523 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：PreProcess Finished in 0.8 minitues。
    68. 

  68. [Save Log Job] 2024-12-16 10:31:33.523 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System complete run ''PreProcess''.
    69. 

  69. [Save Log Job] 2024-12-16 10:31:33.525 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Run Recipe 20241216103048-CACB
    70. 

  70. [Save Log Job] 2024-12-16 10:31:33.525 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe start run''20241216103048-CACB''
    71. 

  71. [Save Log Job] 2024-12-16 10:31:33.526 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Processing
    72. 

  72. [Save Log Job] 2024-12-16 10:31:33.579 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe''20241216103048-CACB'' start run step 1：initial。
    73. 

  73. [Save Log Job] 2024-12-16 10:31:33.580 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。
    74. 

  74. [Save Log Job] 2024-12-16 10:31:33.580 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。
    75. 

  75. [Save Log Job] 2024-12-16 10:31:33.581 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。
    76. 

  76. [Save Log Job] 2024-12-16 10:31:33.581 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。
    77. 

  77. [Save Log Job] 2024-12-16 10:31:33.581 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。
    78. 

  78. [Save Log Job] 2024-12-16 10:31:33.581 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。
    79. 

  79. [Save Log Job] 2024-12-16 10:31:33.582 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。
    80. 

  80. [Save Log Job] 2024-12-16 10:31:33.582 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPower，RF set Power:0。
    81. 

  81. [Save Log Job] 2024-12-16 10:31:33.582 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。
    82. 

  82. [Save Log Job] 2024-12-16 10:31:33.582 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。
    83. 

  83. [Save Log Job] 2024-12-16 10:31:33.582 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。
    84. 

  84. [Save Log Job] 2024-12-16 10:31:33.583 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas1， ramp to 45sccm。
    85. 

  85. [Save Log Job] 2024-12-16 10:31:33.583 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas2， ramp to 56sccm。
    86. 

  86. [Save Log Job] 2024-12-16 10:31:33.583 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas3， ramp to 66sccm。
    87. 

  87. [Save Log Job] 2024-12-16 10:31:33.583 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas4， ramp to 76sccm。
    88. 

  88. [Save Log Job] 2024-12-16 10:31:33.583 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas5， ramp to 86sccm。
    89. 

  89. [Save Log Job] 2024-12-16 10:31:33.583 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPowerOnOff，Set RF power Off。
    90. 

  90. [Save Log Job] 2024-12-16 10:31:33.634 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Start monitor pressure stability
    91. 

  91. [Save Log Job] 2024-12-16 10:31:50.956 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    92. 

  92. [Save Log Job] 2024-12-16 10:31:54.538 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
    93. 

  93. [Save Log Job] 2024-12-16 10:32:03.645 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe''20241216103048-CACB'' end step 1
    94. 

  94. [Save Log Job] 2024-12-16 10:32:03.696 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe''20241216103048-CACB'' start run step 2：initial。
    95. 

  95. [Save Log Job] 2024-12-16 10:32:03.696 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。
    96. 

  96. [Save Log Job] 2024-12-16 10:32:03.696 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。
    97. 

  97. [Save Log Job] 2024-12-16 10:32:03.696 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。
    98. 

  98. [Save Log Job] 2024-12-16 10:32:03.696 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。
    99. 

  99. [Save Log Job] 2024-12-16 10:32:03.696 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。
    100. 

  100. [Save Log Job] 2024-12-16 10:32:03.696 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。
    101. 

  101. [Save Log Job] 2024-12-16 10:32:03.697 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。
    102. 

  102. [Save Log Job] 2024-12-16 10:32:03.697 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPower，RF set Power:150。
    103. 

  103. [Save Log Job] 2024-12-16 10:32:03.697 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。
    104. 

  104. [Save Log Job] 2024-12-16 10:32:03.697 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。
    105. 

  105. [Save Log Job] 2024-12-16 10:32:03.697 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。
    106. 

  106. [Save Log Job] 2024-12-16 10:32:03.697 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas1， ramp to 45sccm。
    107. 

  107. [Save Log Job] 2024-12-16 10:32:03.698 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas2， ramp to 56sccm。
    108. 

  108. [Save Log Job] 2024-12-16 10:32:03.698 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas3， ramp to 66sccm。
    109. 

  109. [Save Log Job] 2024-12-16 10:32:03.698 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas4， ramp to 76sccm。
    110. 

  110. [Save Log Job] 2024-12-16 10:32:03.698 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas5， ramp to 86sccm。
    111. 

  111. [Save Log Job] 2024-12-16 10:32:03.698 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPowerOnOff，Set RF power On。
    112. 

  112. [Save Log Job] 2024-12-16 10:32:09.411 LOG.ERROR EventLogWriter.cs Line:14 WriteEvent() - System RF GeneratorTolerance alarm：Forward power 18 out of range[149,151] in 1 seconds.
    113. 

  113. [Save Log Job] 2024-12-16 10:32:09.411 LOG.INFO YZQZFabAuto.cs Line:212 EndJobRecord() - EndJobRecord|
    114. 

  114. [Save Log Job] 2024-12-16 10:32:09.412 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    115. 

  115. [Save Log Job] 2024-12-16 10:32:09.427 LOG.INFO YZQZFabAuto.cs Line:243 Export2CsvLocalFile() - Export2CsvLocalFileD:\jet.plasma\trunk\Triton160\Triton160RT\bin\Debug\Logs\1111111111.csv
    116. 

  116. [Save Log Job] 2024-12-16 10:32:09.427 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe was aborted: user aborted recipe
    117. 

  117. [Save Log Job] 2024-12-16 10:32:09.429 LOG.INFO YZQZFabAuto.cs Line:291 Export2CsvWanPanFile() - Export2CsvWanPanFile\\192.168.1.208\CHIP_LoaderPath\JetplasmaDaJiao\SourceFolder\1111111111.csv
    118. 

  118. [Save Log Job] 2024-12-16 10:32:09.430 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Stop monitor pressure stability
    119. 

  119. [Save Log Job] 2024-12-16 10:32:09.451 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Recipe run completed，Recipe：20241216103048-CACB
    120. 

  120. Start time：2024/12/16 10:31:33
    121. 

  121. End time：2024/12/16 10:32:09
    122. 

  122. Total time：0:0:35
    123. 

  123. [Save Log Job] 2024-12-16 10:32:09.452 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Recipe completely run
    124. 

  124. [Save Log Job] 2024-12-16 10:32:09.453 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Error
    125. 

  125. [Save Log Job] 2024-12-16 10:32:09.611 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
    126. 

  126. [Save Log Job] 2024-12-16 10:32:11.481 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门Process gas final valveClose失败，原因：Valve keep open。
    127. 

  127. [Save Log Job] 2024-12-16 10:32:30.460 LOG.INFO YZQZFabAuto.cs Line:107 SaveMachineErrorRecord() - MES|ErrorResponse|One or more errors occurred.
    128. 

  128. [Save Log Job] 2024-12-16 10:32:30.464 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
    129. 

  129. [Save Log Job] 2024-12-16 10:32:35.951 LOG.INFO YZQZFabAuto.cs Line:327 Export2CsvWanPanFile() - 找不到网络路径。
    130. 

  130. 

  131. [Save Log Job] 2024-12-16 10:33:48.604 LOG.INFO LOG.cs Line:61 Write() - 获取所有的账号信息列表
    132. 

  132. [Save Log Job] 2024-12-16 10:33:48.605 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin
    133. 

  133. [Save Log Job] 2024-12-16 10:38:32.843 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - recipe file  CACB  save completed
    134. 

  134. [Save Log Job] 2024-12-16 10:38:32.843 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Information
    135. 

  135. [Save Log Job] 2024-12-16 10:39:15.438 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
    136. 

  136. [Save Log Job] 2024-12-16 10:39:36.152 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation RunRecipe(CACB, 2222222222/, , )
    137. 

  137. [Save Log Job] 2024-12-16 10:39:38.002 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|LoadProcessRecipe
    138. 

  138. [Save Log Job] 2024-12-16 10:39:38.002 LOG.INFO LOG.cs Line:61 Write() - System通知TM保存工艺程序20241216103938-CACB
    139. 

  139. [Save Log Job] 2024-12-16 10:39:38.002 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventLotStart
    140. 

  140. [Save Log Job] 2024-12-16 10:39:38.003 LOG.INFO YZQZFabAuto.cs Line:165 StartJobRecord() - StartJobRecord|start|2222222222/|CACB
    141. 

  141. [Save Log Job] 2024-12-16 10:39:38.003 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|PreProcess
    142. 

  142. [Save Log Job] 2024-12-16 10:39:38.003 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    143. 

  143. [Save Log Job] 2024-12-16 10:39:38.009 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    144. 

  144. [Save Log Job] 2024-12-16 10:39:38.054 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check door status。
    145. 

  145. [Save Log Job] 2024-12-16 10:39:38.054 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：check chamber door。
    146. 

  146. [Save Log Job] 2024-12-16 10:39:38.054 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：check backpanel door。
    147. 

  147. [Save Log Job] 2024-12-16 10:39:38.054 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check pump status。
    148. 

  148. [Save Log Job] 2024-12-16 10:39:38.054 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Close all the valves。
    149. 

  149. [Save Log Job] 2024-12-16 10:39:38.110 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Open pumping valve。
    150. 

  150. [Save Log Job] 2024-12-16 10:39:38.166 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check chamber pressure。
    151. 

  151. [Save Log Job] 2024-12-16 10:39:38.166 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Pump below 100mTorr。
    152. 

  152. [Save Log Job] 2024-12-16 10:39:38.201 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
    153. 

  153. [Save Log Job] 2024-12-16 10:39:38.223 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：PreProcess Finished in 0.0 minitues。
    154. 

  154. [Save Log Job] 2024-12-16 10:39:38.223 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System complete run ''PreProcess''.
    155. 

  155. [Save Log Job] 2024-12-16 10:39:38.223 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Run Recipe 20241216103938-CACB
    156. 

  156. [Save Log Job] 2024-12-16 10:39:38.223 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe start run''20241216103938-CACB''
    157. 

  157. [Save Log Job] 2024-12-16 10:39:38.224 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Processing
    158. 

  158. [Save Log Job] 2024-12-16 10:39:38.274 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe''20241216103938-CACB'' start run step 1：initial。
    159. 

  159. [Save Log Job] 2024-12-16 10:39:38.274 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。
    160. 

  160. [Save Log Job] 2024-12-16 10:39:38.274 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。
    161. 

  161. [Save Log Job] 2024-12-16 10:39:38.274 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。
    162. 

  162. [Save Log Job] 2024-12-16 10:39:38.274 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。
    163. 

  163. [Save Log Job] 2024-12-16 10:39:38.274 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。
    164. 

  164. [Save Log Job] 2024-12-16 10:39:38.275 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。
    165. 

  165. [Save Log Job] 2024-12-16 10:39:38.275 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。
    166. 

  166. [Save Log Job] 2024-12-16 10:39:38.275 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPower，RF set Power:0。
    167. 

  167. [Save Log Job] 2024-12-16 10:39:38.275 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。
    168. 

  168. [Save Log Job] 2024-12-16 10:39:38.275 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。
    169. 

  169. [Save Log Job] 2024-12-16 10:39:38.275 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。
    170. 

  170. [Save Log Job] 2024-12-16 10:39:38.275 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas1， ramp to 45sccm。
    171. 

  171. [Save Log Job] 2024-12-16 10:39:38.275 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas2， ramp to 56sccm。
    172. 

  172. [Save Log Job] 2024-12-16 10:39:38.275 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas3， ramp to 66sccm。
    173. 

  173. [Save Log Job] 2024-12-16 10:39:38.275 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas4， ramp to 76sccm。
    174. 

  174. [Save Log Job] 2024-12-16 10:39:38.275 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas5， ramp to 86sccm。
    175. 

  175. [Save Log Job] 2024-12-16 10:39:38.275 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPowerOnOff，Set RF power Off。
    176. 

  176. [Save Log Job] 2024-12-16 10:39:38.325 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Start monitor pressure stability
    177. 

  177. [Save Log Job] 2024-12-16 10:39:59.010 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
    178. 

  178. [Save Log Job] 2024-12-16 10:39:59.016 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
    179. 

  179. [Save Log Job] 2024-12-16 10:39:59.232 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
    180. 

  180. [Save Log Job] 2024-12-16 10:40:08.009 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    181. 

  181. [Save Log Job] 2024-12-16 10:40:08.335 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe''20241216103938-CACB'' end step 1
    182. 

  182. [Save Log Job] 2024-12-16 10:40:08.386 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe''20241216103938-CACB'' start run step 2：initial。
    183. 

  183. [Save Log Job] 2024-12-16 10:40:08.386 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。
    184. 

  184. [Save Log Job] 2024-12-16 10:40:08.386 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。
    185. 

  185. [Save Log Job] 2024-12-16 10:40:08.386 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。
    186. 

  186. [Save Log Job] 2024-12-16 10:40:08.386 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。
    187. 

  187. [Save Log Job] 2024-12-16 10:40:08.386 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。
    188. 

  188. [Save Log Job] 2024-12-16 10:40:08.386 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。
    189. 

  189. [Save Log Job] 2024-12-16 10:40:08.386 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。
    190. 

  190. [Save Log Job] 2024-12-16 10:40:08.387 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPower，RF set Power:0。
    191. 

  191. [Save Log Job] 2024-12-16 10:40:08.387 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。
    192. 

  192. [Save Log Job] 2024-12-16 10:40:08.387 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。
    193. 

  193. [Save Log Job] 2024-12-16 10:40:08.387 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。
    194. 

  194. [Save Log Job] 2024-12-16 10:40:08.387 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas1， ramp to 45sccm。
    195. 

  195. [Save Log Job] 2024-12-16 10:40:08.387 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas2， ramp to 56sccm。
    196. 

  196. [Save Log Job] 2024-12-16 10:40:08.387 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas3， ramp to 66sccm。
    197. 

  197. [Save Log Job] 2024-12-16 10:40:08.387 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas4， ramp to 76sccm。
    198. 

  198. [Save Log Job] 2024-12-16 10:40:08.387 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas5， ramp to 86sccm。
    199. 

  199. [Save Log Job] 2024-12-16 10:40:08.387 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPowerOnOff，Set RF power Off。
    200. 

  200. [Save Log Job] 2024-12-16 10:40:38.010 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    201. 

  201. [Save Log Job] 2024-12-16 10:40:38.477 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe''20241216103938-CACB'' end step 2
    202. 

  202. [Save Log Job] 2024-12-16 10:40:38.479 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Stop monitor pressure stability
    203. 

  203. [Save Log Job] 2024-12-16 10:40:38.479 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Recipe run completed，Recipe：20241216103938-CACB
    204. 

  204. Start time：2024/12/16 10:39:38
    205. 

  205. End time：2024/12/16 10:40:38
    206. 

  206. Total time：0:1:0
    207. 

  207. [Save Log Job] 2024-12-16 10:40:38.479 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Recipe completely run
    208. 

  208. [Save Log Job] 2024-12-16 10:40:38.479 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|PostProcess
    209. 

  209. [Save Log Job] 2024-12-16 10:40:38.531 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, wait for 10 seconds
    210. 

  210. [Save Log Job] 2024-12-16 10:40:40.524 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC1 ValveClose失败，原因：Valve keep open。
    211. 

  211. [Save Log Job] 2024-12-16 10:40:40.524 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC2 ValveClose失败，原因：Valve keep open。
    212. 

  212. [Save Log Job] 2024-12-16 10:40:48.631 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, RF Power Off
    213. 

  213. [Save Log Job] 2024-12-16 10:40:48.691 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, Stop all the gas flow
    214. 

  214. [Save Log Job] 2024-12-16 10:40:55.615 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, Close all the valves
    215. 

  215. [Save Log Job] 2024-12-16 10:40:55.673 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, close pump valve
    216. 

  216. [Save Log Job] 2024-12-16 10:40:57.704 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门Chamber pumping valveClose失败，原因：Valve keep open。
    217. 

  217. [Save Log Job] 2024-12-16 10:40:59.154 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, delay 3 seconds
    218. 

  218. [Save Log Job] 2024-12-16 10:40:59.488 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
    219. 

  219. [Save Log Job] 2024-12-16 10:41:02.234 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, vent 50 seconds
    220. 

  220. [Save Log Job] 2024-12-16 10:41:08.011 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    221. 

  221. [Save Log Job] 2024-12-16 10:41:38.011 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    222. 

  222. [Save Log Job] 2024-12-16 10:41:52.300 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, Close vent valve
    223. 

  223. [Save Log Job] 2024-12-16 10:41:53.028 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, PostProcess Finished in 1.2 minitues
    224. 

  224. [Save Log Job] 2024-12-16 10:41:53.028 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System complete run ''PostProcess''.
    225. 

  225. [Save Log Job] 2024-12-16 10:41:53.029 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventLotFinished
    226. 

  226. [Save Log Job] 2024-12-16 10:41:53.030 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle
    227. 

  227. [Save Log Job] 2024-12-16 10:43:02.937 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    228. 

  228. [Save Log Job] 2024-12-16 10:43:02.938 LOG.INFO YZQZFabAuto.cs Line:212 EndJobRecord() - EndJobRecord|
    229. 

  229. [Save Log Job] 2024-12-16 10:43:02.938 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    230. 

  230. [Save Log Job] 2024-12-16 10:43:02.939 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
    231. 

  231. [Save Log Job] 2024-12-16 10:43:03.015 LOG.INFO YZQZFabAuto.cs Line:243 Export2CsvLocalFile() - Export2CsvLocalFileD:\jet.plasma\trunk\Triton160\Triton160RT\bin\Debug\Logs\2222222222.csv
    232. 

  232. [Save Log Job] 2024-12-16 10:43:03.017 LOG.INFO YZQZFabAuto.cs Line:291 Export2CsvWanPanFile() - Export2CsvWanPanFile\\192.168.1.208\CHIP_LoaderPath\JetplasmaDaJiao\SourceFolder\2222222222.csv
    233. 

  233. [Save Log Job] 2024-12-16 10:43:24.010 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
    234. 

  234. [Save Log Job] 2024-12-16 10:43:29.536 LOG.INFO YZQZFabAuto.cs Line:327 Export2CsvWanPanFile() - 找不到网络路径。
    235. 

  235. 

  236. [Save Log Job] 2024-12-16 10:43:52.592 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation RunRecipe(CACB, 333333333/, , )
    237. 

  237. [Save Log Job] 2024-12-16 10:43:54.570 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|LoadProcessRecipe
    238. 

  238. [Save Log Job] 2024-12-16 10:43:54.570 LOG.INFO LOG.cs Line:61 Write() - System通知TM保存工艺程序20241216104354-CACB
    239. 

  239. [Save Log Job] 2024-12-16 10:43:54.571 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventLotStart
    240. 

  240. [Save Log Job] 2024-12-16 10:43:54.571 LOG.INFO YZQZFabAuto.cs Line:165 StartJobRecord() - StartJobRecord|start|333333333/|CACB
    241. 

  241. [Save Log Job] 2024-12-16 10:43:54.571 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|PreProcess
    242. 

  242. [Save Log Job] 2024-12-16 10:43:54.571 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    243. 

  243. [Save Log Job] 2024-12-16 10:43:54.573 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    244. 

  244. [Save Log Job] 2024-12-16 10:43:54.622 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check door status。
    245. 

  245. [Save Log Job] 2024-12-16 10:43:54.622 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：check chamber door。
    246. 

  246. [Save Log Job] 2024-12-16 10:43:54.622 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：check backpanel door。
    247. 

  247. [Save Log Job] 2024-12-16 10:43:54.622 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check pump status。
    248. 

  248. [Save Log Job] 2024-12-16 10:43:54.622 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Close all the valves。
    249. 

  249. [Save Log Job] 2024-12-16 10:43:54.680 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Open pumping valve。
    250. 

  250. [Save Log Job] 2024-12-16 10:43:54.767 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
    251. 

  251. [Save Log Job] 2024-12-16 10:43:56.690 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门Chamber pumping valveOpen失败，原因：Valve keep closed 。
    252. 

  252. [Save Log Job] 2024-12-16 10:43:58.360 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check chamber pressure。
    253. 

  253. [Save Log Job] 2024-12-16 10:44:15.578 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
    254. 

  254. [Save Log Job] 2024-12-16 10:44:15.583 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
    255. 

  255. [Save Log Job] 2024-12-16 10:44:24.574 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    256. 

  256. [Save Log Job] 2024-12-16 10:44:44.342 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation AbortRecipe()
    257. 

  257. [Save Log Job] 2024-12-16 10:44:44.343 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle
    258. 

  258. [Save Log Job] 2024-12-16 10:44:44.511 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
    259. 

  259. [Save Log Job] 2024-12-16 10:44:54.575 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    260. 

  260. [Save Log Job] 2024-12-16 10:45:05.350 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
    261. 

  261. [Save Log Job] 2024-12-16 10:45:12.889 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation RunRecipe(CACB, 33333333366/, , )
    262. 

  262. [Save Log Job] 2024-12-16 10:45:12.892 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|LoadProcessRecipe
    263. 

  263. [Save Log Job] 2024-12-16 10:45:12.892 LOG.INFO LOG.cs Line:61 Write() - System通知TM保存工艺程序20241216104512-CACB
    264. 

  264. [Save Log Job] 2024-12-16 10:45:12.892 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventLotStart
    265. 

  265. [Save Log Job] 2024-12-16 10:45:12.892 LOG.INFO YZQZFabAuto.cs Line:165 StartJobRecord() - StartJobRecord|start|33333333366/|CACB
    266. 

  266. [Save Log Job] 2024-12-16 10:45:12.892 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|PreProcess
    267. 

  267. [Save Log Job] 2024-12-16 10:45:12.942 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check door status。
    268. 

  268. [Save Log Job] 2024-12-16 10:45:12.942 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：check chamber door。
    269. 

  269. [Save Log Job] 2024-12-16 10:45:12.942 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：check backpanel door。
    270. 

  270. [Save Log Job] 2024-12-16 10:45:12.943 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check pump status。
    271. 

  271. [Save Log Job] 2024-12-16 10:45:12.943 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Close all the valves。
    272. 

  272. [Save Log Job] 2024-12-16 10:45:12.967 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
    273. 

  273. [Save Log Job] 2024-12-16 10:45:12.999 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Open pumping valve。
    274. 

  274. [Save Log Job] 2024-12-16 10:45:13.055 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check chamber pressure。
    275. 

  275. [Save Log Job] 2024-12-16 10:45:15.514 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Pump below 100mTorr。
    276. 

  276. [Save Log Job] 2024-12-16 10:45:15.570 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：PreProcess Finished in 0.0 minitues。
    277. 

  277. [Save Log Job] 2024-12-16 10:45:15.570 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System complete run ''PreProcess''.
    278. 

  278. [Save Log Job] 2024-12-16 10:45:15.570 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Run Recipe 20241216104512-CACB
    279. 

  279. [Save Log Job] 2024-12-16 10:45:15.570 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe start run''20241216104512-CACB''
    280. 

  280. [Save Log Job] 2024-12-16 10:45:15.571 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Processing
    281. 

  281. [Save Log Job] 2024-12-16 10:45:15.621 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe''20241216104512-CACB'' start run step 1：initial。
    282. 

  282. [Save Log Job] 2024-12-16 10:45:15.621 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。
    283. 

  283. [Save Log Job] 2024-12-16 10:45:15.621 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。
    284. 

  284. [Save Log Job] 2024-12-16 10:45:15.621 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。
    285. 

  285. [Save Log Job] 2024-12-16 10:45:15.621 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。
    286. 

  286. [Save Log Job] 2024-12-16 10:45:15.622 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。
    287. 

  287. [Save Log Job] 2024-12-16 10:45:15.622 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。
    288. 

  288. [Save Log Job] 2024-12-16 10:45:15.622 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。
    289. 

  289. [Save Log Job] 2024-12-16 10:45:15.622 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPower，RF set Power:0。
    290. 

  290. [Save Log Job] 2024-12-16 10:45:15.622 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。
    291. 

  291. [Save Log Job] 2024-12-16 10:45:15.622 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。
    292. 

  292. [Save Log Job] 2024-12-16 10:45:15.622 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。
    293. 

  293. [Save Log Job] 2024-12-16 10:45:15.622 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas1， ramp to 45sccm。
    294. 

  294. [Save Log Job] 2024-12-16 10:45:15.622 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas2， ramp to 56sccm。
    295. 

  295. [Save Log Job] 2024-12-16 10:45:15.622 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas3， ramp to 66sccm。
    296. 

  296. [Save Log Job] 2024-12-16 10:45:15.623 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas4， ramp to 76sccm。
    297. 

  297. [Save Log Job] 2024-12-16 10:45:15.623 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas5， ramp to 86sccm。
    298. 

  298. [Save Log Job] 2024-12-16 10:45:15.623 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPowerOnOff，Set RF power Off。
    299. 

  299. [Save Log Job] 2024-12-16 10:45:15.674 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Start monitor pressure stability
    300. 

  300. [Save Log Job] 2024-12-16 10:45:24.576 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    301. 

  301. [Save Log Job] 2024-12-16 10:45:32.870 LOG.INFO LOG.cs Line:61 Write() - 获取所有的账号信息列表
    302. 

  302. [Save Log Job] 2024-12-16 10:45:32.870 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin
    303. 

  303. [Save Log Job] 2024-12-16 10:45:33.900 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
    304. 

  304. [Save Log Job] 2024-12-16 10:45:33.906 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
    305. 

  305. [Save Log Job] 2024-12-16 10:45:36.580 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
    306. 

  306. [Save Log Job] 2024-12-16 10:45:45.706 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe''20241216104512-CACB'' end step 1
    307. 

  307. [Save Log Job] 2024-12-16 10:45:45.756 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe''20241216104512-CACB'' start run step 2：initial。
    308. 

  308. [Save Log Job] 2024-12-16 10:45:45.756 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。
    309. 

  309. [Save Log Job] 2024-12-16 10:45:45.757 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。
    310. 

  310. [Save Log Job] 2024-12-16 10:45:45.757 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。
    311. 

  311. [Save Log Job] 2024-12-16 10:45:45.757 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。
    312. 

  312. [Save Log Job] 2024-12-16 10:45:45.757 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。
    313. 

  313. [Save Log Job] 2024-12-16 10:45:45.757 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。
    314. 

  314. [Save Log Job] 2024-12-16 10:45:45.757 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。
    315. 

  315. [Save Log Job] 2024-12-16 10:45:45.757 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPower，RF set Power:0。
    316. 

  316. [Save Log Job] 2024-12-16 10:45:45.757 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。
    317. 

  317. [Save Log Job] 2024-12-16 10:45:45.757 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。
    318. 

  318. [Save Log Job] 2024-12-16 10:45:45.757 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。
    319. 

  319. [Save Log Job] 2024-12-16 10:45:45.757 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas1， ramp to 45sccm。
    320. 

  320. [Save Log Job] 2024-12-16 10:45:45.758 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas2， ramp to 56sccm。
    321. 

  321. [Save Log Job] 2024-12-16 10:45:45.758 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas3， ramp to 66sccm。
    322. 

  322. [Save Log Job] 2024-12-16 10:45:45.758 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas4， ramp to 76sccm。
    323. 

  323. [Save Log Job] 2024-12-16 10:45:45.758 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas5， ramp to 86sccm。
    324. 

  324. [Save Log Job] 2024-12-16 10:45:45.758 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPowerOnOff，Set RF power Off。
    325. 

  325. [Save Log Job] 2024-12-16 10:45:54.577 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    326. 

  326. [Save Log Job] 2024-12-16 10:46:15.847 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe''20241216104512-CACB'' end step 2
    327. 

  327. [Save Log Job] 2024-12-16 10:46:15.849 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Stop monitor pressure stability
    328. 

  328. [Save Log Job] 2024-12-16 10:46:15.849 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Recipe run completed，Recipe：20241216104512-CACB
    329. 

  329. Start time：2024/12/16 10:45:15
    330. 

  330. End time：2024/12/16 10:46:15
    331. 

  331. Total time：0:1:0
    332. 

  332. [Save Log Job] 2024-12-16 10:46:15.849 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Recipe completely run
    333. 

  333. [Save Log Job] 2024-12-16 10:46:15.849 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|PostProcess
    334. 

  334. [Save Log Job] 2024-12-16 10:46:15.899 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, wait for 10 seconds
    335. 

  335. [Save Log Job] 2024-12-16 10:46:17.872 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC1 ValveClose失败，原因：Valve keep open。
    336. 

  336. [Save Log Job] 2024-12-16 10:46:17.873 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC2 ValveClose失败，原因：Valve keep open。
    337. 

  337. [Save Log Job] 2024-12-16 10:46:17.873 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC3 ValveClose失败，原因：Valve keep open。
    338. 

  338. [Save Log Job] 2024-12-16 10:46:17.873 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC4 ValveClose失败，原因：Valve keep open。
    339. 

  339. [Save Log Job] 2024-12-16 10:46:17.873 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC5 ValveClose失败，原因：Valve keep open。
    340. 

  340. [Save Log Job] 2024-12-16 10:46:24.580 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    341. 

  341. [Save Log Job] 2024-12-16 10:46:25.981 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, RF Power Off
    342. 

  342. [Save Log Job] 2024-12-16 10:46:26.036 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, Stop all the gas flow
    343. 

  343. [Save Log Job] 2024-12-16 10:46:32.367 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, Close all the valves
    344. 

  344. [Save Log Job] 2024-12-16 10:46:32.424 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, close pump valve
    345. 

  345. [Save Log Job] 2024-12-16 10:46:34.426 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门Chamber pumping valveClose失败，原因：Valve keep open。
    346. 

  346. [Save Log Job] 2024-12-16 10:46:35.764 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, delay 3 seconds
    347. 

  347. [Save Log Job] 2024-12-16 10:46:36.857 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
    348. 

  348. [Save Log Job] 2024-12-16 10:46:38.855 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, vent 50 seconds
    349. 

  349. [Save Log Job] 2024-12-16 10:46:54.579 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    350. 

  350. [Save Log Job] 2024-12-16 10:47:24.579 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    351. 

  351. [Save Log Job] 2024-12-16 10:47:28.922 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, Close vent valve
    352. 

  352. [Save Log Job] 2024-12-16 10:47:29.773 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, PostProcess Finished in 1.2 minitues
    353. 

  353. [Save Log Job] 2024-12-16 10:47:29.773 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System complete run ''PostProcess''.
    354. 

  354. [Save Log Job] 2024-12-16 10:47:29.773 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventLotFinished
    355. 

  355. [Save Log Job] 2024-12-16 10:47:29.774 LOG.INFO YZQZFabAuto.cs Line:212 EndJobRecord() - EndJobRecord|
    356. 

  356. [Save Log Job] 2024-12-16 10:47:29.774 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle
    357. 

  357. [Save Log Job] 2024-12-16 10:47:29.774 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    358. 

  358. [Save Log Job] 2024-12-16 10:47:29.780 LOG.INFO YZQZFabAuto.cs Line:243 Export2CsvLocalFile() - Export2CsvLocalFileD:\jet.plasma\trunk\Triton160\Triton160RT\bin\Debug\Logs\333333333.csv
    359. 

  359. [Save Log Job] 2024-12-16 10:47:29.782 LOG.INFO YZQZFabAuto.cs Line:291 Export2CsvWanPanFile() - Export2CsvWanPanFile\\192.168.1.208\CHIP_LoaderPath\JetplasmaDaJiao\SourceFolder\333333333.csv
    360. 

  360. [Save Log Job] 2024-12-16 10:47:29.874 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
    361. 

  361. [Save Log Job] 2024-12-16 10:47:50.789 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
    362. 

  362. [Save Log Job] 2024-12-16 10:47:56.299 LOG.INFO YZQZFabAuto.cs Line:327 Export2CsvWanPanFile() - 找不到网络路径。
    363. 

  363. 

  364. [Save Log Job] 2024-12-16 10:47:57.929 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation RunRecipe(CACB, 444444444444/, , )
    365. 

  365. [Save Log Job] 2024-12-16 10:47:57.931 LOG.INFO LOG.cs Line:61 Write() - System通知TM保存工艺程序20241216104757-CACB
    366. 

  366. [Save Log Job] 2024-12-16 10:47:57.931 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|LoadProcessRecipe
    367. 

  367. [Save Log Job] 2024-12-16 10:47:57.931 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventLotStart
    368. 

  368. [Save Log Job] 2024-12-16 10:47:57.932 LOG.INFO YZQZFabAuto.cs Line:165 StartJobRecord() - StartJobRecord|start|444444444444/|CACB
    369. 

  369. [Save Log Job] 2024-12-16 10:47:57.932 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|PreProcess
    370. 

  370. [Save Log Job] 2024-12-16 10:47:57.932 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    371. 

  371. [Save Log Job] 2024-12-16 10:47:57.934 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    372. 

  372. [Save Log Job] 2024-12-16 10:47:57.982 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check door status。
    373. 

  373. [Save Log Job] 2024-12-16 10:47:57.982 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：check chamber door。
    374. 

  374. [Save Log Job] 2024-12-16 10:47:57.982 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：check backpanel door。
    375. 

  375. [Save Log Job] 2024-12-16 10:47:57.982 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check pump status。
    376. 

  376. [Save Log Job] 2024-12-16 10:47:57.983 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Close all the valves。
    377. 

  377. [Save Log Job] 2024-12-16 10:47:58.039 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Open pumping valve。
    378. 

  378. [Save Log Job] 2024-12-16 10:47:58.124 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
    379. 

  379. [Save Log Job] 2024-12-16 10:48:00.075 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门Chamber pumping valveOpen失败，原因：Valve keep closed 。
    380. 

  380. [Save Log Job] 2024-12-16 10:48:00.238 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check chamber pressure。
    381. 

  381. [Save Log Job] 2024-12-16 10:48:18.941 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
    382. 

  382. [Save Log Job] 2024-12-16 10:48:18.948 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
    383. 

  383. [Save Log Job] 2024-12-16 10:48:27.935 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    384. 

  384. [Save Log Job] 2024-12-16 10:48:46.712 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Pump below 100mTorr。
    385. 

  385. [Save Log Job] 2024-12-16 10:48:46.768 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：PreProcess Finished in 0.8 minitues。
    386. 

  386. [Save Log Job] 2024-12-16 10:48:46.768 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System complete run ''PreProcess''.
    387. 

  387. [Save Log Job] 2024-12-16 10:48:46.768 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Run Recipe 20241216104757-CACB
    388. 

  388. [Save Log Job] 2024-12-16 10:48:46.768 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe start run''20241216104757-CACB''
    389. 

  389. [Save Log Job] 2024-12-16 10:48:46.769 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Processing
    390. 

  390. [Save Log Job] 2024-12-16 10:48:46.803 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe''20241216104757-CACB'' start run step 1：initial。
    391. 

  391. [Save Log Job] 2024-12-16 10:48:46.803 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。
    392. 

  392. [Save Log Job] 2024-12-16 10:48:46.803 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。
    393. 

  393. [Save Log Job] 2024-12-16 10:48:46.803 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。
    394. 

  394. [Save Log Job] 2024-12-16 10:48:46.803 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。
    395. 

  395. [Save Log Job] 2024-12-16 10:48:46.804 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。
    396. 

  396. [Save Log Job] 2024-12-16 10:48:46.804 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。
    397. 

  397. [Save Log Job] 2024-12-16 10:48:46.804 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。
    398. 

  398. [Save Log Job] 2024-12-16 10:48:46.804 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPower，RF set Power:0。
    399. 

  399. [Save Log Job] 2024-12-16 10:48:46.804 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。
    400. 

  400. [Save Log Job] 2024-12-16 10:48:46.804 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。
    401. 

  401. [Save Log Job] 2024-12-16 10:48:46.804 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。
    402. 

  402. [Save Log Job] 2024-12-16 10:48:46.805 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas1， ramp to 45sccm。
    403. 

  403. [Save Log Job] 2024-12-16 10:48:46.805 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas2， ramp to 56sccm。
    404. 

  404. [Save Log Job] 2024-12-16 10:48:46.805 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas3， ramp to 66sccm。
    405. 

  405. [Save Log Job] 2024-12-16 10:48:46.805 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas4， ramp to 76sccm。
    406. 

  406. [Save Log Job] 2024-12-16 10:48:46.805 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas5， ramp to 86sccm。
    407. 

  407. [Save Log Job] 2024-12-16 10:48:46.805 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPowerOnOff，Set RF power Off。
    408. 

  408. [Save Log Job] 2024-12-16 10:48:46.856 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Start monitor pressure stability
    409. 

  409. [Save Log Job] 2024-12-16 10:48:57.936 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    410. 

  410. [Save Log Job] 2024-12-16 10:49:07.778 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
    411. 

  411. [Save Log Job] 2024-12-16 10:49:16.892 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe''20241216104757-CACB'' end step 1
    412. 

  412. [Save Log Job] 2024-12-16 10:49:16.942 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe''20241216104757-CACB'' start run step 2：initial。
    413. 

  413. [Save Log Job] 2024-12-16 10:49:16.942 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。
    414. 

  414. [Save Log Job] 2024-12-16 10:49:16.942 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。
    415. 

  415. [Save Log Job] 2024-12-16 10:49:16.942 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。
    416. 

  416. [Save Log Job] 2024-12-16 10:49:16.942 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。
    417. 

  417. [Save Log Job] 2024-12-16 10:49:16.942 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。
    418. 

  418. [Save Log Job] 2024-12-16 10:49:16.943 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。
    419. 

  419. [Save Log Job] 2024-12-16 10:49:16.943 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。
    420. 

  420. [Save Log Job] 2024-12-16 10:49:16.943 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPower，RF set Power:0。
    421. 

  421. [Save Log Job] 2024-12-16 10:49:16.943 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。
    422. 

  422. [Save Log Job] 2024-12-16 10:49:16.943 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。
    423. 

  423. [Save Log Job] 2024-12-16 10:49:16.943 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。
    424. 

  424. [Save Log Job] 2024-12-16 10:49:16.943 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas1， ramp to 45sccm。
    425. 

  425. [Save Log Job] 2024-12-16 10:49:16.943 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas2， ramp to 56sccm。
    426. 

  426. [Save Log Job] 2024-12-16 10:49:16.943 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas3， ramp to 66sccm。
    427. 

  427. [Save Log Job] 2024-12-16 10:49:16.943 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas4， ramp to 76sccm。
    428. 

  428. [Save Log Job] 2024-12-16 10:49:16.943 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas5， ramp to 86sccm。
    429. 

  429. [Save Log Job] 2024-12-16 10:49:16.943 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPowerOnOff，Set RF power Off。
    430. 

  430. [Save Log Job] 2024-12-16 10:49:27.937 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    431. 

  431. [Save Log Job] 2024-12-16 10:49:47.029 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe''20241216104757-CACB'' end step 2
    432. 

  432. [Save Log Job] 2024-12-16 10:49:47.030 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Stop monitor pressure stability
    433. 

  433. [Save Log Job] 2024-12-16 10:49:47.030 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Recipe run completed，Recipe：20241216104757-CACB
    434. 

  434. Start time：2024/12/16 10:48:46
    435. 

  435. End time：2024/12/16 10:49:47
    436. 

  436. Total time：0:1:0
    437. 

  437. [Save Log Job] 2024-12-16 10:49:47.030 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Recipe completely run
    438. 

  438. [Save Log Job] 2024-12-16 10:49:47.032 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|PostProcess
    439. 

  439. [Save Log Job] 2024-12-16 10:49:47.080 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, wait for 10 seconds
    440. 

  440. [Save Log Job] 2024-12-16 10:49:49.039 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC1 ValveClose失败，原因：Valve keep open。
    441. 

  441. [Save Log Job] 2024-12-16 10:49:49.039 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC2 ValveClose失败，原因：Valve keep open。
    442. 

  442. [Save Log Job] 2024-12-16 10:49:49.039 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC3 ValveClose失败，原因：Valve keep open。
    443. 

  443. [Save Log Job] 2024-12-16 10:49:49.039 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC4 ValveClose失败，原因：Valve keep open。
    444. 

  444. [Save Log Job] 2024-12-16 10:49:49.039 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC5 ValveClose失败，原因：Valve keep open。
    445. 

  445. [Save Log Job] 2024-12-16 10:49:57.152 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, RF Power Off
    446. 

  446. [Save Log Job] 2024-12-16 10:49:57.208 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, Stop all the gas flow
    447. 

  447. [Save Log Job] 2024-12-16 10:49:57.937 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    448. 

  448. [Save Log Job] 2024-12-16 10:50:03.529 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, Close all the valves
    449. 

  449. [Save Log Job] 2024-12-16 10:50:03.586 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, close pump valve
    450. 

  450. [Save Log Job] 2024-12-16 10:50:05.590 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门Chamber pumping valveClose失败，原因：Valve keep open。
    451. 

  451. [Save Log Job] 2024-12-16 10:50:06.941 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, delay 3 seconds
    452. 

  452. [Save Log Job] 2024-12-16 10:50:08.040 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
    453. 

  453. [Save Log Job] 2024-12-16 10:50:10.025 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, vent 50 seconds
    454. 

  454. [Save Log Job] 2024-12-16 10:50:27.937 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    455. 

  455. [Save Log Job] 2024-12-16 10:50:57.937 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    456. 

  456. [Save Log Job] 2024-12-16 10:51:00.084 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, Close vent valve
    457. 

  457. [Save Log Job] 2024-12-16 10:51:00.923 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, PostProcess Finished in 1.2 minitues
    458. 

  458. [Save Log Job] 2024-12-16 10:51:00.923 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System complete run ''PostProcess''.
    459. 

  459. [Save Log Job] 2024-12-16 10:51:00.923 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventLotFinished
    460. 

  460. [Save Log Job] 2024-12-16 10:51:00.924 LOG.INFO YZQZFabAuto.cs Line:212 EndJobRecord() - EndJobRecord|
    461. 

  461. [Save Log Job] 2024-12-16 10:51:00.924 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle
    462. 

  462. [Save Log Job] 2024-12-16 10:51:00.924 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    463. 

  463. [Save Log Job] 2024-12-16 10:51:00.929 LOG.INFO YZQZFabAuto.cs Line:243 Export2CsvLocalFile() - Export2CsvLocalFileD:\jet.plasma\trunk\Triton160\Triton160RT\bin\Debug\Logs\444444444444.csv
    464. 

  464. [Save Log Job] 2024-12-16 10:51:00.930 LOG.INFO YZQZFabAuto.cs Line:291 Export2CsvWanPanFile() - Export2CsvWanPanFile\\192.168.1.208\CHIP_LoaderPath\JetplasmaDaJiao\SourceFolder\444444444444.csv
    465. 

  465. [Save Log Job] 2024-12-16 10:51:01.013 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
    466. 

  466. [Save Log Job] 2024-12-16 10:51:21.941 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
    467. 

  467. [Save Log Job] 2024-12-16 10:51:27.446 LOG.INFO YZQZFabAuto.cs Line:327 Export2CsvWanPanFile() - 找不到网络路径。
    468. 

  468. 

  469. [Save Log Job] 2024-12-16 10:55:10.208 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation RunRecipe(CACB, 5555555555/666666666666/, , )
    470. 

  470. [Save Log Job] 2024-12-16 10:55:10.210 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|LoadProcessRecipe
    471. 

  471. [Save Log Job] 2024-12-16 10:55:10.211 LOG.INFO LOG.cs Line:61 Write() - System通知TM保存工艺程序20241216105510-CACB
    472. 

  472. [Save Log Job] 2024-12-16 10:55:10.211 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventLotStart
    473. 

  473. [Save Log Job] 2024-12-16 10:55:10.211 LOG.INFO YZQZFabAuto.cs Line:165 StartJobRecord() - StartJobRecord|start|5555555555/666666666666/|CACB
    474. 

  474. [Save Log Job] 2024-12-16 10:55:10.211 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|PreProcess
    475. 

  475. [Save Log Job] 2024-12-16 10:55:10.211 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    476. 

  476. [Save Log Job] 2024-12-16 10:55:10.215 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    477. 

  477. [Save Log Job] 2024-12-16 10:55:10.261 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check door status。
    478. 

  478. [Save Log Job] 2024-12-16 10:55:10.261 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：check chamber door。
    479. 

  479. [Save Log Job] 2024-12-16 10:55:10.261 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：check backpanel door。
    480. 

  480. [Save Log Job] 2024-12-16 10:55:10.261 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check pump status。
    481. 

  481. [Save Log Job] 2024-12-16 10:55:10.262 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Close all the valves。
    482. 

  482. [Save Log Job] 2024-12-16 10:55:10.318 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Open pumping valve。
    483. 

  483. [Save Log Job] 2024-12-16 10:55:10.401 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
    484. 

  484. [Save Log Job] 2024-12-16 10:55:12.367 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门Chamber pumping valveOpen失败，原因：Valve keep closed 。
    485. 

  485. [Save Log Job] 2024-12-16 10:55:13.926 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check chamber pressure。
    486. 

  486. [Save Log Job] 2024-12-16 10:55:31.219 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
    487. 

  487. [Save Log Job] 2024-12-16 10:55:31.225 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
    488. 

  488. [Save Log Job] 2024-12-16 10:55:40.237 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    489. 

  489. [Save Log Job] 2024-12-16 10:56:04.188 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Pump below 100mTorr。
    490. 

  490. [Save Log Job] 2024-12-16 10:56:04.244 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：PreProcess Finished in 0.9 minitues。
    491. 

  491. [Save Log Job] 2024-12-16 10:56:04.244 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System complete run ''PreProcess''.
    492. 

  492. [Save Log Job] 2024-12-16 10:56:04.244 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Run Recipe 20241216105510-CACB
    493. 

  493. [Save Log Job] 2024-12-16 10:56:04.244 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe start run''20241216105510-CACB''
    494. 

  494. [Save Log Job] 2024-12-16 10:56:04.245 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Processing
    495. 

  495. [Save Log Job] 2024-12-16 10:56:04.296 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe''20241216105510-CACB'' start run step 1：initial。
    496. 

  496. [Save Log Job] 2024-12-16 10:56:04.296 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。
    497. 

  497. [Save Log Job] 2024-12-16 10:56:04.296 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。
    498. 

  498. [Save Log Job] 2024-12-16 10:56:04.296 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。
    499. 

  499. [Save Log Job] 2024-12-16 10:56:04.296 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。
    500. 

  500. [Save Log Job] 2024-12-16 10:56:04.297 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。
    501. 

  501. [Save Log Job] 2024-12-16 10:56:04.297 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。
    502. 

  502. [Save Log Job] 2024-12-16 10:56:04.297 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。
    503. 

  503. [Save Log Job] 2024-12-16 10:56:04.297 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPower，RF set Power:0。
    504. 

  504. [Save Log Job] 2024-12-16 10:56:04.297 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。
    505. 

  505. [Save Log Job] 2024-12-16 10:56:04.297 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。
    506. 

  506. [Save Log Job] 2024-12-16 10:56:04.297 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。
    507. 

  507. [Save Log Job] 2024-12-16 10:56:04.297 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas1， ramp to 45sccm。
    508. 

  508. [Save Log Job] 2024-12-16 10:56:04.297 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas2， ramp to 56sccm。
    509. 

  509. [Save Log Job] 2024-12-16 10:56:04.297 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas3， ramp to 66sccm。
    510. 

  510. [Save Log Job] 2024-12-16 10:56:04.297 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas4， ramp to 76sccm。
    511. 

  511. [Save Log Job] 2024-12-16 10:56:04.297 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas5， ramp to 86sccm。
    512. 

  512. [Save Log Job] 2024-12-16 10:56:04.297 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPowerOnOff，Set RF power Off。
    513. 

  513. [Save Log Job] 2024-12-16 10:56:04.348 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Start monitor pressure stability
    514. 

  514. [Save Log Job] 2024-12-16 10:56:10.216 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    515. 

  515. [Save Log Job] 2024-12-16 10:56:25.257 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
    516. 

  516. [Save Log Job] 2024-12-16 10:56:34.370 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe''20241216105510-CACB'' end step 1
    517. 

  517. [Save Log Job] 2024-12-16 10:56:34.421 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe''20241216105510-CACB'' start run step 2：initial。
    518. 

  518. [Save Log Job] 2024-12-16 10:56:34.421 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。
    519. 

  519. [Save Log Job] 2024-12-16 10:56:34.421 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。
    520. 

  520. [Save Log Job] 2024-12-16 10:56:34.421 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。
    521. 

  521. [Save Log Job] 2024-12-16 10:56:34.421 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。
    522. 

  522. [Save Log Job] 2024-12-16 10:56:34.421 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。
    523. 

  523. [Save Log Job] 2024-12-16 10:56:34.421 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。
    524. 

  524. [Save Log Job] 2024-12-16 10:56:34.421 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。
    525. 

  525. [Save Log Job] 2024-12-16 10:56:34.422 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPower，RF set Power:0。
    526. 

  526. [Save Log Job] 2024-12-16 10:56:34.422 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。
    527. 

  527. [Save Log Job] 2024-12-16 10:56:34.422 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。
    528. 

  528. [Save Log Job] 2024-12-16 10:56:34.422 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。
    529. 

  529. [Save Log Job] 2024-12-16 10:56:34.422 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas1， ramp to 45sccm。
    530. 

  530. [Save Log Job] 2024-12-16 10:56:34.422 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas2， ramp to 56sccm。
    531. 

  531. [Save Log Job] 2024-12-16 10:56:34.422 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas3， ramp to 66sccm。
    532. 

  532. [Save Log Job] 2024-12-16 10:56:34.422 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas4， ramp to 76sccm。
    533. 

  533. [Save Log Job] 2024-12-16 10:56:34.422 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas5， ramp to 86sccm。
    534. 

  534. [Save Log Job] 2024-12-16 10:56:34.422 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPowerOnOff，Set RF power Off。
    535. 

  535. [Save Log Job] 2024-12-16 10:56:40.216 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    536. 

  536. [Save Log Job] 2024-12-16 10:57:04.507 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe''20241216105510-CACB'' end step 2
    537. 

  537. [Save Log Job] 2024-12-16 10:57:04.509 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Stop monitor pressure stability
    538. 

  538. [Save Log Job] 2024-12-16 10:57:04.509 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Recipe run completed，Recipe：20241216105510-CACB
    539. 

  539. Start time：2024/12/16 10:56:04
    540. 

  540. End time：2024/12/16 10:57:04
    541. 

  541. Total time：0:1:0
    542. 

  542. [Save Log Job] 2024-12-16 10:57:04.509 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Recipe completely run
    543. 

  543. [Save Log Job] 2024-12-16 10:57:04.509 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|PostProcess
    544. 

  544. [Save Log Job] 2024-12-16 10:57:04.559 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, wait for 10 seconds
    545. 

  545. [Save Log Job] 2024-12-16 10:57:06.526 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC1 ValveClose失败，原因：Valve keep open。
    546. 

  546. [Save Log Job] 2024-12-16 10:57:06.526 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC2 ValveClose失败，原因：Valve keep open。
    547. 

  547. [Save Log Job] 2024-12-16 10:57:06.526 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC3 ValveClose失败，原因：Valve keep open。
    548. 

  548. [Save Log Job] 2024-12-16 10:57:06.526 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC4 ValveClose失败，原因：Valve keep open。
    549. 

  549. [Save Log Job] 2024-12-16 10:57:06.526 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC5 ValveClose失败，原因：Valve keep open。
    550. 

  550. [Save Log Job] 2024-12-16 10:57:10.217 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    551. 

  551. [Save Log Job] 2024-12-16 10:57:14.671 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, RF Power Off
    552. 

  552. [Save Log Job] 2024-12-16 10:57:14.727 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, Stop all the gas flow
    553. 

  553. [Save Log Job] 2024-12-16 10:57:21.014 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, Close all the valves
    554. 

  554. [Save Log Job] 2024-12-16 10:57:21.070 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, close pump valve
    555. 

  555. [Save Log Job] 2024-12-16 10:57:23.076 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门Chamber pumping valveClose失败，原因：Valve keep open。
    556. 

  556. [Save Log Job] 2024-12-16 10:57:24.413 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, delay 3 seconds
    557. 

  557. [Save Log Job] 2024-12-16 10:57:25.520 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
    558. 

  558. [Save Log Job] 2024-12-16 10:57:27.487 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, vent 50 seconds
    559. 

  559. [Save Log Job] 2024-12-16 10:57:40.220 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    560. 

  560. [Save Log Job] 2024-12-16 10:58:10.218 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    561. 

  561. [Save Log Job] 2024-12-16 10:58:17.553 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, Close vent valve
    562. 

  562. [Save Log Job] 2024-12-16 10:58:18.403 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, PostProcess Finished in 1.2 minitues
    563. 

  563. [Save Log Job] 2024-12-16 10:58:18.403 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System complete run ''PostProcess''.
    564. 

  564. [Save Log Job] 2024-12-16 10:58:18.403 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventLotFinished
    565. 

  565. [Save Log Job] 2024-12-16 10:58:18.404 LOG.INFO YZQZFabAuto.cs Line:212 EndJobRecord() - EndJobRecord|
    566. 

  566. [Save Log Job] 2024-12-16 10:58:18.404 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle
    567. 

  567. [Save Log Job] 2024-12-16 10:58:18.404 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0
    568. 

  568. [Save Log Job] 2024-12-16 10:58:18.409 LOG.INFO YZQZFabAuto.cs Line:243 Export2CsvLocalFile() - Export2CsvLocalFileD:\jet.plasma\trunk\Triton160\Triton160RT\bin\Debug\Logs\5555555555-666666666666.csv
    569. 

  569. [Save Log Job] 2024-12-16 10:58:18.409 LOG.INFO YZQZFabAuto.cs Line:291 Export2CsvWanPanFile() - Export2CsvWanPanFile\\192.168.1.208\CHIP_LoaderPath\JetplasmaDaJiao\SourceFolder\5555555555-666666666666.csv
    570. 

  570. [Save Log Job] 2024-12-16 10:58:18.420 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
    571. 

  571. [Save Log Job] 2024-12-16 10:58:39.415 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
    572. 

  572. [Save Log Job] 2024-12-16 10:58:44.925 LOG.INFO YZQZFabAuto.cs Line:327 Export2CsvWanPanFile() - 找不到网络路径。
    573. 

  573. 

  574. <==  [Save Log Job] 2024-12-16 11:04:08.925 LOG.INFO LOG.cs Line:61 Write() - 完成对数据库表格的更新操作
    575. 

  575. [Save Log Job] 2024-12-16 11:04:09.899 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, <IoSensor id="SensorBackPanelDoor" display=""  schematicId="" unit="" di="DI_back_panle_door_sw" isLowAsNormal="false" infoText="BackPanel door is opened" warningText="" alarmText="" />
    576. 

  576. [Save Log Job] 2024-12-16 11:04:09.900 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, <IoSensor id="SensorPumpDoor"      display=""  schematicId="" unit="" di="DI_pump_door_sw"    isLowAsNormal="false" infoText="" warningText="" alarmText="" />
    577. 

  577. [Save Log Job] 2024-12-16 11:04:09.973 LOG.INFO LOG.cs Line:61 Write() - Routine System 初始化 Start
    578. 

  578. [Save Log Job] 2024-12-16 11:04:10.001 LOG.INFO EventService.cs Line:60 Register() - 客户端322a6d8e-ff3d-4cd7-9ed8-a01a79cb11a8已连接
    579. 

  579. [Save Log Job] 2024-12-16 11:04:11.038 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle
    580. 

  580. [Save Log Job] 2024-12-16 11:04:11.040 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle
    581. 

  581. [Save Log Job] 2024-12-16 11:04:11.210 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle
    582. 

  582. [Save Log Job] 2024-12-16 11:04:11.258 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle
    583. 

  583. [Save Log Job] 2024-12-16 11:04:11.314 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
    584. 

  584. [Save Log Job] 2024-12-16 11:04:11.836 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetConfig(System_IsMesMode, True)
    585. 

  585. [Save Log Job] 2024-12-16 11:04:14.985 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Software will be expired in -53 days, at 10/24/2024 12:00:00 AM 。
    586. 

  586. [Save Log Job] 2024-12-16 11:04:17.896 LOG.INFO LOG.cs Line:61 Write() - 用户admin尝试登录系统
    587. 

  587. [Save Log Job] 2024-12-16 11:04:17.897 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin
    588. 

  588. [Save Log Job] 2024-12-16 11:04:17.902 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - User admin login
    589. 

  589. [Save Log Job] 2024-12-16 11:04:18.029 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin
    590. 

  590. [Save Log Job] 2024-12-16 11:04:32.134 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
    591. 

  591. [Save Log Job] 2024-12-16 11:04:32.219 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
    592. 

  592. [Save Log Job] 2024-12-16 11:04:32.266 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
    593. 

  593. [Save Log Job] 2024-12-16 11:04:53.119 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
    594. 

  594. <==  [Save Log Job] 2024-12-16 11:07:01.455 LOG.INFO LOG.cs Line:61 Write() - 完成对数据库表格的更新操作
    595. 

  595. [Save Log Job] 2024-12-16 11:07:02.499 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, <IoSensor id="SensorBackPanelDoor" display=""  schematicId="" unit="" di="DI_back_panle_door_sw" isLowAsNormal="false" infoText="BackPanel door is opened" warningText="" alarmText="" />
    596. 

  596. [Save Log Job] 2024-12-16 11:07:02.500 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, <IoSensor id="SensorPumpDoor"      display=""  schematicId="" unit="" di="DI_pump_door_sw"    isLowAsNormal="false" infoText="" warningText="" alarmText="" />
    597. 

  597. [Save Log Job] 2024-12-16 11:07:02.574 LOG.INFO LOG.cs Line:61 Write() - Routine System 初始化 Start
    598. 

  598. [Save Log Job] 2024-12-16 11:07:02.668 LOG.INFO EventService.cs Line:60 Register() - 客户端02797170-7e2f-4483-9dee-db15ac733db0已连接
    599. 

  599. [Save Log Job] 2024-12-16 11:07:02.668 LOG.INFO EventService.cs Line:60 Register() - 客户端02797170-7e2f-4483-9dee-db15ac733db0已连接
    600. 

  600. [Save Log Job] 2024-12-16 11:07:03.636 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle
    601. 

  601. [Save Log Job] 2024-12-16 11:07:03.637 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle
    602. 

  602. [Save Log Job] 2024-12-16 11:07:03.774 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle
    603. 

  603. [Save Log Job] 2024-12-16 11:07:03.800 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
    604. 

  604. [Save Log Job] 2024-12-16 11:07:03.827 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle
    605. 

  605. [Save Log Job] 2024-12-16 11:07:04.509 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetConfig(System_IsMesMode, True)
    606. 

  606. [Save Log Job] 2024-12-16 11:07:07.586 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Software will be expired in -53 days, at 10/24/2024 12:00:00 AM 。
    607. 

  607. [Save Log Job] 2024-12-16 11:07:12.520 LOG.INFO LOG.cs Line:61 Write() - 用户admin尝试登录系统
    608. 

  608. [Save Log Job] 2024-12-16 11:07:12.521 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin
    609. 

  609. [Save Log Job] 2024-12-16 11:07:12.534 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - User admin login
    610. 

  610. [Save Log Job] 2024-12-16 11:07:12.664 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin
    611. 

  611. <==  [Save Log Job] 2024-12-16 11:07:38.483 LOG.INFO LOG.cs Line:61 Write() - 完成对数据库表格的更新操作
    612. 

  612. [Save Log Job] 2024-12-16 11:07:39.228 LOG.INFO EventService.cs Line:60 Register() - 客户端3b760335-c9be-44b1-8a50-bd8f06d4ca05已连接
    613. 

  613. [Save Log Job] 2024-12-16 11:07:39.428 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, <IoSensor id="SensorBackPanelDoor" display=""  schematicId="" unit="" di="DI_back_panle_door_sw" isLowAsNormal="false" infoText="BackPanel door is opened" warningText="" alarmText="" />
    614. 

  614. [Save Log Job] 2024-12-16 11:07:39.429 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, <IoSensor id="SensorPumpDoor"      display=""  schematicId="" unit="" di="DI_pump_door_sw"    isLowAsNormal="false" infoText="" warningText="" alarmText="" />
    615. 

  615. [Save Log Job] 2024-12-16 11:07:39.475 LOG.INFO LOG.cs Line:61 Write() - Routine System 初始化 Start
    616. 

  616. [Save Log Job] 2024-12-16 11:07:40.455 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle
    617. 

  617. [Save Log Job] 2024-12-16 11:07:40.524 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle
    618. 

  618. [Save Log Job] 2024-12-16 11:07:40.586 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetConfig(System_IsMesMode, True)
    619. 

  619. [Save Log Job] 2024-12-16 11:07:40.695 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle
    620. 

  620. [Save Log Job] 2024-12-16 11:07:40.743 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle
    621. 

  621. [Save Log Job] 2024-12-16 11:07:40.856 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
    622. 

  622. [Save Log Job] 2024-12-16 11:07:44.485 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Software will be expired in -53 days, at 10/24/2024 12:00:00 AM 。
    623. 

  623. [Save Log Job] 2024-12-16 11:07:48.555 LOG.INFO LOG.cs Line:61 Write() - 用户admin尝试登录系统
    624. 

  624. [Save Log Job] 2024-12-16 11:07:48.556 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin
    625. 

  625. [Save Log Job] 2024-12-16 11:07:48.573 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - User admin login
    626. 

  626. [Save Log Job] 2024-12-16 11:07:48.698 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin
    627. 

  627. [Save Log Job] 2024-12-16 11:08:01.510 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
    628. 

  628. [Save Log Job] 2024-12-16 11:08:01.533 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
    629. 

  629. [Save Log Job] 2024-12-16 11:08:01.710 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
    630. 

  630. [Save Log Job] 2024-12-16 11:08:01.752 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
    631. 

  631.