<== [Save Log Job] 2024-12-16 09:14:27.820 LOG.INFO LOG.cs Line:61 Write() - 完成对数据库表格的更新操作 [Save Log Job] 2024-12-16 09:14:28.859 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, [Save Log Job] 2024-12-16 09:14:28.859 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, [Save Log Job] 2024-12-16 09:14:28.867 LOG.INFO EventService.cs Line:60 Register() - 客户端f16da987-8dc8-48e9-85c4-edb8826e907f已连接 [Save Log Job] 2024-12-16 09:14:28.936 LOG.INFO LOG.cs Line:61 Write() - Routine System 初始化 Start [Save Log Job] 2024-12-16 09:14:30.024 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle [Save Log Job] 2024-12-16 09:14:30.026 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle [Save Log Job] 2024-12-16 09:14:30.180 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle [Save Log Job] 2024-12-16 09:14:30.229 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle [Save Log Job] 2024-12-16 09:14:30.295 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged [Save Log Job] 2024-12-16 09:14:36.051 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Software will be expired in -53 days, at 10/24/2024 12:00:00 AM 。 [Save Log Job] 2024-12-16 09:14:36.062 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetConfig(System_IsMesMode, True) [Save Log Job] 2024-12-16 09:14:43.568 LOG.INFO LOG.cs Line:61 Write() - 用户admin尝试登录系统 [Save Log Job] 2024-12-16 09:14:43.569 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin [Save Log Job] 2024-12-16 09:14:43.581 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - User admin login [Save Log Job] 2024-12-16 09:14:43.710 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin [Save Log Job] 2024-12-16 09:14:51.099 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred. [Save Log Job] 2024-12-16 09:14:51.191 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred. [Save Log Job] 2024-12-16 09:14:51.236 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred. [Save Log Job] 2024-12-16 09:15:12.090 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred. <== [Save Log Job] 2024-12-16 10:29:06.681 LOG.INFO LOG.cs Line:61 Write() - 完成对数据库表格的更新操作 [Save Log Job] 2024-12-16 10:29:07.594 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, [Save Log Job] 2024-12-16 10:29:07.595 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, [Save Log Job] 2024-12-16 10:29:07.671 LOG.INFO LOG.cs Line:61 Write() - Routine System 初始化 Start [Save Log Job] 2024-12-16 10:29:07.684 LOG.INFO EventService.cs Line:60 Register() - 客户端028ffeca-e450-4b76-854d-2590c1c424f6已连接 [Save Log Job] 2024-12-16 10:29:07.684 LOG.INFO EventService.cs Line:60 Register() - 客户端028ffeca-e450-4b76-854d-2590c1c424f6已连接 [Save Log Job] 2024-12-16 10:29:08.725 LOG.INFO YZQZFabAuto.cs Line:116 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle [Save Log Job] 2024-12-16 10:29:08.727 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle [Save Log Job] 2024-12-16 10:29:08.894 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle [Save Log Job] 2024-12-16 10:29:08.942 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle [Save Log Job] 2024-12-16 10:29:09.021 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged [Save Log Job] 2024-12-16 10:29:09.455 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetConfig(System_IsMesMode, True) [Save Log Job] 2024-12-16 10:29:12.684 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Software will be expired in -53 days, at 10/24/2024 12:00:00 AM 。 [Save Log Job] 2024-12-16 10:29:26.265 LOG.INFO LOG.cs Line:61 Write() - 用户admin尝试登录系统 [Save Log Job] 2024-12-16 10:29:26.266 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin [Save Log Job] 2024-12-16 10:29:26.278 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - User admin login [Save Log Job] 2024-12-16 10:29:26.399 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin [Save Log Job] 2024-12-16 10:29:29.798 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred. [Save Log Job] 2024-12-16 10:29:29.904 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred. [Save Log Job] 2024-12-16 10:29:29.953 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred. [Save Log Job] 2024-12-16 10:29:50.789 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred. [Save Log Job] 2024-12-16 10:29:53.645 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetAutoMode() [Save Log Job] 2024-12-16 10:29:53.647 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentModeChanged [Save Log Job] 2024-12-16 10:29:53.647 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System running mode changed to Auto Mode [Save Log Job] 2024-12-16 10:30:20.236 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation RunRecipe(CACB, 1111111111/, , ) [Save Log Job] 2024-12-16 10:30:48.075 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|LoadProcessRecipe [Save Log Job] 2024-12-16 10:30:48.078 LOG.INFO LOG.cs Line:61 Write() - System通知TM保存工艺程序20241216103048-CACB [Save Log Job] 2024-12-16 10:30:48.078 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventLotStart [Save Log Job] 2024-12-16 10:30:48.079 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|PreProcess [Save Log Job] 2024-12-16 10:30:50.940 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged [Save Log Job] 2024-12-16 10:30:50.941 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged [Save Log Job] 2024-12-16 10:30:50.942 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check door status。 [Save Log Job] 2024-12-16 10:30:50.943 LOG.INFO YZQZFabAuto.cs Line:165 StartJobRecord() - StartJobRecord|start|1111111111/|CACB [Save Log Job] 2024-12-16 10:30:50.943 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：check chamber door。 [Save Log Job] 2024-12-16 10:30:50.943 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：check backpanel door。 [Save Log Job] 2024-12-16 10:30:50.943 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-16 10:30:50.944 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check pump status。 [Save Log Job] 2024-12-16 10:30:50.945 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-16 10:30:50.946 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Close all the valves。 [Save Log Job] 2024-12-16 10:30:51.008 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Open pumping valve。 [Save Log Job] 2024-12-16 10:30:53.016 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门Chamber pumping valveOpen失败，原因：Valve keep closed 。 [Save Log Job] 2024-12-16 10:30:54.748 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check chamber pressure。 [Save Log Job] 2024-12-16 10:31:09.085 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred. [Save Log Job] 2024-12-16 10:31:11.948 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred. [Save Log Job] 2024-12-16 10:31:20.946 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-16 10:31:33.465 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Pump below 100mTorr。 [Save Log Job] 2024-12-16 10:31:33.523 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：PreProcess Finished in 0.8 minitues。 [Save Log Job] 2024-12-16 10:31:33.523 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System complete run ''PreProcess''. [Save Log Job] 2024-12-16 10:31:33.525 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Run Recipe 20241216103048-CACB [Save Log Job] 2024-12-16 10:31:33.525 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe start run''20241216103048-CACB'' [Save Log Job] 2024-12-16 10:31:33.526 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Processing [Save Log Job] 2024-12-16 10:31:33.579 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe''20241216103048-CACB'' start run step 1：initial。 [Save Log Job] 2024-12-16 10:31:33.580 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。 [Save Log Job] 2024-12-16 10:31:33.580 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。 [Save Log Job] 2024-12-16 10:31:33.581 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。 [Save Log Job] 2024-12-16 10:31:33.581 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。 [Save Log Job] 2024-12-16 10:31:33.581 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。 [Save Log Job] 2024-12-16 10:31:33.581 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。 [Save Log Job] 2024-12-16 10:31:33.582 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。 [Save Log Job] 2024-12-16 10:31:33.582 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPower，RF set Power:0。 [Save Log Job] 2024-12-16 10:31:33.582 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。 [Save Log Job] 2024-12-16 10:31:33.582 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。 [Save Log Job] 2024-12-16 10:31:33.582 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。 [Save Log Job] 2024-12-16 10:31:33.583 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas1， ramp to 45sccm。 [Save Log Job] 2024-12-16 10:31:33.583 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas2， ramp to 56sccm。 [Save Log Job] 2024-12-16 10:31:33.583 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas3， ramp to 66sccm。 [Save Log Job] 2024-12-16 10:31:33.583 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas4， ramp to 76sccm。 [Save Log Job] 2024-12-16 10:31:33.583 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas5， ramp to 86sccm。 [Save Log Job] 2024-12-16 10:31:33.583 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPowerOnOff，Set RF power Off。 [Save Log Job] 2024-12-16 10:31:33.634 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Start monitor pressure stability [Save Log Job] 2024-12-16 10:31:50.956 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-16 10:31:54.538 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred. [Save Log Job] 2024-12-16 10:32:03.645 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe''20241216103048-CACB'' end step 1 [Save Log Job] 2024-12-16 10:32:03.696 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe''20241216103048-CACB'' start run step 2：initial。 [Save Log Job] 2024-12-16 10:32:03.696 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。 [Save Log Job] 2024-12-16 10:32:03.696 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。 [Save Log Job] 2024-12-16 10:32:03.696 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。 [Save Log Job] 2024-12-16 10:32:03.696 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。 [Save Log Job] 2024-12-16 10:32:03.696 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。 [Save Log Job] 2024-12-16 10:32:03.696 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。 [Save Log Job] 2024-12-16 10:32:03.697 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。 [Save Log Job] 2024-12-16 10:32:03.697 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPower，RF set Power:150。 [Save Log Job] 2024-12-16 10:32:03.697 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。 [Save Log Job] 2024-12-16 10:32:03.697 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。 [Save Log Job] 2024-12-16 10:32:03.697 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。 [Save Log Job] 2024-12-16 10:32:03.697 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas1， ramp to 45sccm。 [Save Log Job] 2024-12-16 10:32:03.698 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas2， ramp to 56sccm。 [Save Log Job] 2024-12-16 10:32:03.698 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas3， ramp to 66sccm。 [Save Log Job] 2024-12-16 10:32:03.698 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas4， ramp to 76sccm。 [Save Log Job] 2024-12-16 10:32:03.698 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas5， ramp to 86sccm。 [Save Log Job] 2024-12-16 10:32:03.698 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPowerOnOff，Set RF power On。 [Save Log Job] 2024-12-16 10:32:09.411 LOG.ERROR EventLogWriter.cs Line:14 WriteEvent() - System RF GeneratorTolerance alarm：Forward power 18 out of range[149,151] in 1 seconds. [Save Log Job] 2024-12-16 10:32:09.411 LOG.INFO YZQZFabAuto.cs Line:212 EndJobRecord() - EndJobRecord| [Save Log Job] 2024-12-16 10:32:09.412 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-16 10:32:09.427 LOG.INFO YZQZFabAuto.cs Line:243 Export2CsvLocalFile() - Export2CsvLocalFileD:\jet.plasma\trunk\Triton160\Triton160RT\bin\Debug\Logs\1111111111.csv [Save Log Job] 2024-12-16 10:32:09.427 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe was aborted: user aborted recipe [Save Log Job] 2024-12-16 10:32:09.429 LOG.INFO YZQZFabAuto.cs Line:291 Export2CsvWanPanFile() - Export2CsvWanPanFile\\192.168.1.208\CHIP_LoaderPath\JetplasmaDaJiao\SourceFolder\1111111111.csv [Save Log Job] 2024-12-16 10:32:09.430 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Stop monitor pressure stability [Save Log Job] 2024-12-16 10:32:09.451 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Recipe run completed，Recipe：20241216103048-CACB Start time：2024/12/16 10:31:33 End time：2024/12/16 10:32:09 Total time：0:0:35 [Save Log Job] 2024-12-16 10:32:09.452 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Recipe completely run [Save Log Job] 2024-12-16 10:32:09.453 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Error [Save Log Job] 2024-12-16 10:32:09.611 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged [Save Log Job] 2024-12-16 10:32:11.481 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门Process gas final valveClose失败，原因：Valve keep open。 [Save Log Job] 2024-12-16 10:32:30.460 LOG.INFO YZQZFabAuto.cs Line:107 SaveMachineErrorRecord() - MES|ErrorResponse|One or more errors occurred. [Save Log Job] 2024-12-16 10:32:30.464 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred. [Save Log Job] 2024-12-16 10:32:35.951 LOG.INFO YZQZFabAuto.cs Line:327 Export2CsvWanPanFile() - 找不到网络路径。 [Save Log Job] 2024-12-16 10:33:48.604 LOG.INFO LOG.cs Line:61 Write() - 获取所有的账号信息列表 [Save Log Job] 2024-12-16 10:33:48.605 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin [Save Log Job] 2024-12-16 10:38:32.843 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - recipe file CACB save completed [Save Log Job] 2024-12-16 10:38:32.843 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Information [Save Log Job] 2024-12-16 10:39:15.438 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged [Save Log Job] 2024-12-16 10:39:36.152 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation RunRecipe(CACB, 2222222222/, , ) [Save Log Job] 2024-12-16 10:39:38.002 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|LoadProcessRecipe [Save Log Job] 2024-12-16 10:39:38.002 LOG.INFO LOG.cs Line:61 Write() - System通知TM保存工艺程序20241216103938-CACB [Save Log Job] 2024-12-16 10:39:38.002 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventLotStart [Save Log Job] 2024-12-16 10:39:38.003 LOG.INFO YZQZFabAuto.cs Line:165 StartJobRecord() - StartJobRecord|start|2222222222/|CACB [Save Log Job] 2024-12-16 10:39:38.003 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|PreProcess [Save Log Job] 2024-12-16 10:39:38.003 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-16 10:39:38.009 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-16 10:39:38.054 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check door status。 [Save Log Job] 2024-12-16 10:39:38.054 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：check chamber door。 [Save Log Job] 2024-12-16 10:39:38.054 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：check backpanel door。 [Save Log Job] 2024-12-16 10:39:38.054 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check pump status。 [Save Log Job] 2024-12-16 10:39:38.054 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Close all the valves。 [Save Log Job] 2024-12-16 10:39:38.110 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Open pumping valve。 [Save Log Job] 2024-12-16 10:39:38.166 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check chamber pressure。 [Save Log Job] 2024-12-16 10:39:38.166 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Pump below 100mTorr。 [Save Log Job] 2024-12-16 10:39:38.201 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged [Save Log Job] 2024-12-16 10:39:38.223 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：PreProcess Finished in 0.0 minitues。 [Save Log Job] 2024-12-16 10:39:38.223 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System complete run ''PreProcess''. [Save Log Job] 2024-12-16 10:39:38.223 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Run Recipe 20241216103938-CACB [Save Log Job] 2024-12-16 10:39:38.223 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe start run''20241216103938-CACB'' [Save Log Job] 2024-12-16 10:39:38.224 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Processing [Save Log Job] 2024-12-16 10:39:38.274 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe''20241216103938-CACB'' start run step 1：initial。 [Save Log Job] 2024-12-16 10:39:38.274 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。 [Save Log Job] 2024-12-16 10:39:38.274 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。 [Save Log Job] 2024-12-16 10:39:38.274 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。 [Save Log Job] 2024-12-16 10:39:38.274 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。 [Save Log Job] 2024-12-16 10:39:38.274 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。 [Save Log Job] 2024-12-16 10:39:38.275 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。 [Save Log Job] 2024-12-16 10:39:38.275 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。 [Save Log Job] 2024-12-16 10:39:38.275 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPower，RF set Power:0。 [Save Log Job] 2024-12-16 10:39:38.275 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。 [Save Log Job] 2024-12-16 10:39:38.275 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。 [Save Log Job] 2024-12-16 10:39:38.275 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。 [Save Log Job] 2024-12-16 10:39:38.275 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas1， ramp to 45sccm。 [Save Log Job] 2024-12-16 10:39:38.275 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas2， ramp to 56sccm。 [Save Log Job] 2024-12-16 10:39:38.275 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas3， ramp to 66sccm。 [Save Log Job] 2024-12-16 10:39:38.275 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas4， ramp to 76sccm。 [Save Log Job] 2024-12-16 10:39:38.275 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas5， ramp to 86sccm。 [Save Log Job] 2024-12-16 10:39:38.275 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPowerOnOff，Set RF power Off。 [Save Log Job] 2024-12-16 10:39:38.325 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Start monitor pressure stability [Save Log Job] 2024-12-16 10:39:59.010 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred. [Save Log Job] 2024-12-16 10:39:59.016 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred. [Save Log Job] 2024-12-16 10:39:59.232 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred. [Save Log Job] 2024-12-16 10:40:08.009 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-16 10:40:08.335 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe''20241216103938-CACB'' end step 1 [Save Log Job] 2024-12-16 10:40:08.386 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe''20241216103938-CACB'' start run step 2：initial。 [Save Log Job] 2024-12-16 10:40:08.386 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。 [Save Log Job] 2024-12-16 10:40:08.386 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。 [Save Log Job] 2024-12-16 10:40:08.386 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。 [Save Log Job] 2024-12-16 10:40:08.386 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。 [Save Log Job] 2024-12-16 10:40:08.386 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。 [Save Log Job] 2024-12-16 10:40:08.386 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。 [Save Log Job] 2024-12-16 10:40:08.386 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。 [Save Log Job] 2024-12-16 10:40:08.387 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPower，RF set Power:0。 [Save Log Job] 2024-12-16 10:40:08.387 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。 [Save Log Job] 2024-12-16 10:40:08.387 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。 [Save Log Job] 2024-12-16 10:40:08.387 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。 [Save Log Job] 2024-12-16 10:40:08.387 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas1， ramp to 45sccm。 [Save Log Job] 2024-12-16 10:40:08.387 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas2， ramp to 56sccm。 [Save Log Job] 2024-12-16 10:40:08.387 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas3， ramp to 66sccm。 [Save Log Job] 2024-12-16 10:40:08.387 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas4， ramp to 76sccm。 [Save Log Job] 2024-12-16 10:40:08.387 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas5， ramp to 86sccm。 [Save Log Job] 2024-12-16 10:40:08.387 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPowerOnOff，Set RF power Off。 [Save Log Job] 2024-12-16 10:40:38.010 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-16 10:40:38.477 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe''20241216103938-CACB'' end step 2 [Save Log Job] 2024-12-16 10:40:38.479 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Stop monitor pressure stability [Save Log Job] 2024-12-16 10:40:38.479 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Recipe run completed，Recipe：20241216103938-CACB Start time：2024/12/16 10:39:38 End time：2024/12/16 10:40:38 Total time：0:1:0 [Save Log Job] 2024-12-16 10:40:38.479 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Recipe completely run [Save Log Job] 2024-12-16 10:40:38.479 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|PostProcess [Save Log Job] 2024-12-16 10:40:38.531 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, wait for 10 seconds [Save Log Job] 2024-12-16 10:40:40.524 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC1 ValveClose失败，原因：Valve keep open。 [Save Log Job] 2024-12-16 10:40:40.524 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC2 ValveClose失败，原因：Valve keep open。 [Save Log Job] 2024-12-16 10:40:48.631 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, RF Power Off [Save Log Job] 2024-12-16 10:40:48.691 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, Stop all the gas flow [Save Log Job] 2024-12-16 10:40:55.615 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, Close all the valves [Save Log Job] 2024-12-16 10:40:55.673 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, close pump valve [Save Log Job] 2024-12-16 10:40:57.704 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门Chamber pumping valveClose失败，原因：Valve keep open。 [Save Log Job] 2024-12-16 10:40:59.154 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, delay 3 seconds [Save Log Job] 2024-12-16 10:40:59.488 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred. [Save Log Job] 2024-12-16 10:41:02.234 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, vent 50 seconds [Save Log Job] 2024-12-16 10:41:08.011 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-16 10:41:38.011 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-16 10:41:52.300 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, Close vent valve [Save Log Job] 2024-12-16 10:41:53.028 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, PostProcess Finished in 1.2 minitues [Save Log Job] 2024-12-16 10:41:53.028 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System complete run ''PostProcess''. [Save Log Job] 2024-12-16 10:41:53.029 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventLotFinished [Save Log Job] 2024-12-16 10:41:53.030 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle [Save Log Job] 2024-12-16 10:43:02.937 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-16 10:43:02.938 LOG.INFO YZQZFabAuto.cs Line:212 EndJobRecord() - EndJobRecord| [Save Log Job] 2024-12-16 10:43:02.938 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-16 10:43:02.939 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged [Save Log Job] 2024-12-16 10:43:03.015 LOG.INFO YZQZFabAuto.cs Line:243 Export2CsvLocalFile() - Export2CsvLocalFileD:\jet.plasma\trunk\Triton160\Triton160RT\bin\Debug\Logs\2222222222.csv [Save Log Job] 2024-12-16 10:43:03.017 LOG.INFO YZQZFabAuto.cs Line:291 Export2CsvWanPanFile() - Export2CsvWanPanFile\\192.168.1.208\CHIP_LoaderPath\JetplasmaDaJiao\SourceFolder\2222222222.csv [Save Log Job] 2024-12-16 10:43:24.010 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred. [Save Log Job] 2024-12-16 10:43:29.536 LOG.INFO YZQZFabAuto.cs Line:327 Export2CsvWanPanFile() - 找不到网络路径。 [Save Log Job] 2024-12-16 10:43:52.592 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation RunRecipe(CACB, 333333333/, , ) [Save Log Job] 2024-12-16 10:43:54.570 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|LoadProcessRecipe [Save Log Job] 2024-12-16 10:43:54.570 LOG.INFO LOG.cs Line:61 Write() - System通知TM保存工艺程序20241216104354-CACB [Save Log Job] 2024-12-16 10:43:54.571 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventLotStart [Save Log Job] 2024-12-16 10:43:54.571 LOG.INFO YZQZFabAuto.cs Line:165 StartJobRecord() - StartJobRecord|start|333333333/|CACB [Save Log Job] 2024-12-16 10:43:54.571 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|PreProcess [Save Log Job] 2024-12-16 10:43:54.571 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-16 10:43:54.573 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-16 10:43:54.622 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check door status。 [Save Log Job] 2024-12-16 10:43:54.622 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：check chamber door。 [Save Log Job] 2024-12-16 10:43:54.622 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：check backpanel door。 [Save Log Job] 2024-12-16 10:43:54.622 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check pump status。 [Save Log Job] 2024-12-16 10:43:54.622 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Close all the valves。 [Save Log Job] 2024-12-16 10:43:54.680 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Open pumping valve。 [Save Log Job] 2024-12-16 10:43:54.767 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged [Save Log Job] 2024-12-16 10:43:56.690 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门Chamber pumping valveOpen失败，原因：Valve keep closed 。 [Save Log Job] 2024-12-16 10:43:58.360 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check chamber pressure。 [Save Log Job] 2024-12-16 10:44:15.578 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred. [Save Log Job] 2024-12-16 10:44:15.583 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred. [Save Log Job] 2024-12-16 10:44:24.574 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-16 10:44:44.342 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation AbortRecipe() [Save Log Job] 2024-12-16 10:44:44.343 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle [Save Log Job] 2024-12-16 10:44:44.511 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged [Save Log Job] 2024-12-16 10:44:54.575 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-16 10:45:05.350 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred. [Save Log Job] 2024-12-16 10:45:12.889 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation RunRecipe(CACB, 33333333366/, , ) [Save Log Job] 2024-12-16 10:45:12.892 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|LoadProcessRecipe [Save Log Job] 2024-12-16 10:45:12.892 LOG.INFO LOG.cs Line:61 Write() - System通知TM保存工艺程序20241216104512-CACB [Save Log Job] 2024-12-16 10:45:12.892 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventLotStart [Save Log Job] 2024-12-16 10:45:12.892 LOG.INFO YZQZFabAuto.cs Line:165 StartJobRecord() - StartJobRecord|start|33333333366/|CACB [Save Log Job] 2024-12-16 10:45:12.892 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|PreProcess [Save Log Job] 2024-12-16 10:45:12.942 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check door status。 [Save Log Job] 2024-12-16 10:45:12.942 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：check chamber door。 [Save Log Job] 2024-12-16 10:45:12.942 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：check backpanel door。 [Save Log Job] 2024-12-16 10:45:12.943 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check pump status。 [Save Log Job] 2024-12-16 10:45:12.943 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Close all the valves。 [Save Log Job] 2024-12-16 10:45:12.967 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged [Save Log Job] 2024-12-16 10:45:12.999 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Open pumping valve。 [Save Log Job] 2024-12-16 10:45:13.055 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check chamber pressure。 [Save Log Job] 2024-12-16 10:45:15.514 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Pump below 100mTorr。 [Save Log Job] 2024-12-16 10:45:15.570 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：PreProcess Finished in 0.0 minitues。 [Save Log Job] 2024-12-16 10:45:15.570 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System complete run ''PreProcess''. [Save Log Job] 2024-12-16 10:45:15.570 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Run Recipe 20241216104512-CACB [Save Log Job] 2024-12-16 10:45:15.570 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe start run''20241216104512-CACB'' [Save Log Job] 2024-12-16 10:45:15.571 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Processing [Save Log Job] 2024-12-16 10:45:15.621 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe''20241216104512-CACB'' start run step 1：initial。 [Save Log Job] 2024-12-16 10:45:15.621 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。 [Save Log Job] 2024-12-16 10:45:15.621 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。 [Save Log Job] 2024-12-16 10:45:15.621 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。 [Save Log Job] 2024-12-16 10:45:15.621 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。 [Save Log Job] 2024-12-16 10:45:15.622 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。 [Save Log Job] 2024-12-16 10:45:15.622 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。 [Save Log Job] 2024-12-16 10:45:15.622 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。 [Save Log Job] 2024-12-16 10:45:15.622 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPower，RF set Power:0。 [Save Log Job] 2024-12-16 10:45:15.622 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。 [Save Log Job] 2024-12-16 10:45:15.622 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。 [Save Log Job] 2024-12-16 10:45:15.622 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。 [Save Log Job] 2024-12-16 10:45:15.622 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas1， ramp to 45sccm。 [Save Log Job] 2024-12-16 10:45:15.622 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas2， ramp to 56sccm。 [Save Log Job] 2024-12-16 10:45:15.622 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas3， ramp to 66sccm。 [Save Log Job] 2024-12-16 10:45:15.623 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas4， ramp to 76sccm。 [Save Log Job] 2024-12-16 10:45:15.623 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas5， ramp to 86sccm。 [Save Log Job] 2024-12-16 10:45:15.623 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPowerOnOff，Set RF power Off。 [Save Log Job] 2024-12-16 10:45:15.674 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Start monitor pressure stability [Save Log Job] 2024-12-16 10:45:24.576 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-16 10:45:32.870 LOG.INFO LOG.cs Line:61 Write() - 获取所有的账号信息列表 [Save Log Job] 2024-12-16 10:45:32.870 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin [Save Log Job] 2024-12-16 10:45:33.900 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred. [Save Log Job] 2024-12-16 10:45:33.906 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred. [Save Log Job] 2024-12-16 10:45:36.580 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred. [Save Log Job] 2024-12-16 10:45:45.706 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe''20241216104512-CACB'' end step 1 [Save Log Job] 2024-12-16 10:45:45.756 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe''20241216104512-CACB'' start run step 2：initial。 [Save Log Job] 2024-12-16 10:45:45.756 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。 [Save Log Job] 2024-12-16 10:45:45.757 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。 [Save Log Job] 2024-12-16 10:45:45.757 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。 [Save Log Job] 2024-12-16 10:45:45.757 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。 [Save Log Job] 2024-12-16 10:45:45.757 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。 [Save Log Job] 2024-12-16 10:45:45.757 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。 [Save Log Job] 2024-12-16 10:45:45.757 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。 [Save Log Job] 2024-12-16 10:45:45.757 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPower，RF set Power:0。 [Save Log Job] 2024-12-16 10:45:45.757 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。 [Save Log Job] 2024-12-16 10:45:45.757 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。 [Save Log Job] 2024-12-16 10:45:45.757 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。 [Save Log Job] 2024-12-16 10:45:45.757 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas1， ramp to 45sccm。 [Save Log Job] 2024-12-16 10:45:45.758 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas2， ramp to 56sccm。 [Save Log Job] 2024-12-16 10:45:45.758 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas3， ramp to 66sccm。 [Save Log Job] 2024-12-16 10:45:45.758 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas4， ramp to 76sccm。 [Save Log Job] 2024-12-16 10:45:45.758 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas5， ramp to 86sccm。 [Save Log Job] 2024-12-16 10:45:45.758 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPowerOnOff，Set RF power Off。 [Save Log Job] 2024-12-16 10:45:54.577 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-16 10:46:15.847 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe''20241216104512-CACB'' end step 2 [Save Log Job] 2024-12-16 10:46:15.849 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Stop monitor pressure stability [Save Log Job] 2024-12-16 10:46:15.849 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Recipe run completed，Recipe：20241216104512-CACB Start time：2024/12/16 10:45:15 End time：2024/12/16 10:46:15 Total time：0:1:0 [Save Log Job] 2024-12-16 10:46:15.849 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Recipe completely run [Save Log Job] 2024-12-16 10:46:15.849 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|PostProcess [Save Log Job] 2024-12-16 10:46:15.899 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, wait for 10 seconds [Save Log Job] 2024-12-16 10:46:17.872 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC1 ValveClose失败，原因：Valve keep open。 [Save Log Job] 2024-12-16 10:46:17.873 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC2 ValveClose失败，原因：Valve keep open。 [Save Log Job] 2024-12-16 10:46:17.873 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC3 ValveClose失败，原因：Valve keep open。 [Save Log Job] 2024-12-16 10:46:17.873 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC4 ValveClose失败，原因：Valve keep open。 [Save Log Job] 2024-12-16 10:46:17.873 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC5 ValveClose失败，原因：Valve keep open。 [Save Log Job] 2024-12-16 10:46:24.580 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-16 10:46:25.981 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, RF Power Off [Save Log Job] 2024-12-16 10:46:26.036 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, Stop all the gas flow [Save Log Job] 2024-12-16 10:46:32.367 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, Close all the valves [Save Log Job] 2024-12-16 10:46:32.424 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, close pump valve [Save Log Job] 2024-12-16 10:46:34.426 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门Chamber pumping valveClose失败，原因：Valve keep open。 [Save Log Job] 2024-12-16 10:46:35.764 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, delay 3 seconds [Save Log Job] 2024-12-16 10:46:36.857 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred. [Save Log Job] 2024-12-16 10:46:38.855 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, vent 50 seconds [Save Log Job] 2024-12-16 10:46:54.579 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-16 10:47:24.579 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-16 10:47:28.922 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, Close vent valve [Save Log Job] 2024-12-16 10:47:29.773 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, PostProcess Finished in 1.2 minitues [Save Log Job] 2024-12-16 10:47:29.773 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System complete run ''PostProcess''. [Save Log Job] 2024-12-16 10:47:29.773 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventLotFinished [Save Log Job] 2024-12-16 10:47:29.774 LOG.INFO YZQZFabAuto.cs Line:212 EndJobRecord() - EndJobRecord| [Save Log Job] 2024-12-16 10:47:29.774 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle [Save Log Job] 2024-12-16 10:47:29.774 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-16 10:47:29.780 LOG.INFO YZQZFabAuto.cs Line:243 Export2CsvLocalFile() - Export2CsvLocalFileD:\jet.plasma\trunk\Triton160\Triton160RT\bin\Debug\Logs\333333333.csv [Save Log Job] 2024-12-16 10:47:29.782 LOG.INFO YZQZFabAuto.cs Line:291 Export2CsvWanPanFile() - Export2CsvWanPanFile\\192.168.1.208\CHIP_LoaderPath\JetplasmaDaJiao\SourceFolder\333333333.csv [Save Log Job] 2024-12-16 10:47:29.874 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged [Save Log Job] 2024-12-16 10:47:50.789 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred. [Save Log Job] 2024-12-16 10:47:56.299 LOG.INFO YZQZFabAuto.cs Line:327 Export2CsvWanPanFile() - 找不到网络路径。 [Save Log Job] 2024-12-16 10:47:57.929 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation RunRecipe(CACB, 444444444444/, , ) [Save Log Job] 2024-12-16 10:47:57.931 LOG.INFO LOG.cs Line:61 Write() - System通知TM保存工艺程序20241216104757-CACB [Save Log Job] 2024-12-16 10:47:57.931 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|LoadProcessRecipe [Save Log Job] 2024-12-16 10:47:57.931 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventLotStart [Save Log Job] 2024-12-16 10:47:57.932 LOG.INFO YZQZFabAuto.cs Line:165 StartJobRecord() - StartJobRecord|start|444444444444/|CACB [Save Log Job] 2024-12-16 10:47:57.932 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|PreProcess [Save Log Job] 2024-12-16 10:47:57.932 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-16 10:47:57.934 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-16 10:47:57.982 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check door status。 [Save Log Job] 2024-12-16 10:47:57.982 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：check chamber door。 [Save Log Job] 2024-12-16 10:47:57.982 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：check backpanel door。 [Save Log Job] 2024-12-16 10:47:57.982 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check pump status。 [Save Log Job] 2024-12-16 10:47:57.983 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Close all the valves。 [Save Log Job] 2024-12-16 10:47:58.039 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Open pumping valve。 [Save Log Job] 2024-12-16 10:47:58.124 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged [Save Log Job] 2024-12-16 10:48:00.075 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门Chamber pumping valveOpen失败，原因：Valve keep closed 。 [Save Log Job] 2024-12-16 10:48:00.238 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check chamber pressure。 [Save Log Job] 2024-12-16 10:48:18.941 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred. [Save Log Job] 2024-12-16 10:48:18.948 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred. [Save Log Job] 2024-12-16 10:48:27.935 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-16 10:48:46.712 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Pump below 100mTorr。 [Save Log Job] 2024-12-16 10:48:46.768 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：PreProcess Finished in 0.8 minitues。 [Save Log Job] 2024-12-16 10:48:46.768 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System complete run ''PreProcess''. [Save Log Job] 2024-12-16 10:48:46.768 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Run Recipe 20241216104757-CACB [Save Log Job] 2024-12-16 10:48:46.768 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe start run''20241216104757-CACB'' [Save Log Job] 2024-12-16 10:48:46.769 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Processing [Save Log Job] 2024-12-16 10:48:46.803 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe''20241216104757-CACB'' start run step 1：initial。 [Save Log Job] 2024-12-16 10:48:46.803 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。 [Save Log Job] 2024-12-16 10:48:46.803 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。 [Save Log Job] 2024-12-16 10:48:46.803 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。 [Save Log Job] 2024-12-16 10:48:46.803 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。 [Save Log Job] 2024-12-16 10:48:46.804 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。 [Save Log Job] 2024-12-16 10:48:46.804 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。 [Save Log Job] 2024-12-16 10:48:46.804 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。 [Save Log Job] 2024-12-16 10:48:46.804 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPower，RF set Power:0。 [Save Log Job] 2024-12-16 10:48:46.804 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。 [Save Log Job] 2024-12-16 10:48:46.804 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。 [Save Log Job] 2024-12-16 10:48:46.804 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。 [Save Log Job] 2024-12-16 10:48:46.805 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas1， ramp to 45sccm。 [Save Log Job] 2024-12-16 10:48:46.805 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas2， ramp to 56sccm。 [Save Log Job] 2024-12-16 10:48:46.805 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas3， ramp to 66sccm。 [Save Log Job] 2024-12-16 10:48:46.805 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas4， ramp to 76sccm。 [Save Log Job] 2024-12-16 10:48:46.805 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas5， ramp to 86sccm。 [Save Log Job] 2024-12-16 10:48:46.805 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPowerOnOff，Set RF power Off。 [Save Log Job] 2024-12-16 10:48:46.856 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Start monitor pressure stability [Save Log Job] 2024-12-16 10:48:57.936 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-16 10:49:07.778 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred. [Save Log Job] 2024-12-16 10:49:16.892 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe''20241216104757-CACB'' end step 1 [Save Log Job] 2024-12-16 10:49:16.942 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe''20241216104757-CACB'' start run step 2：initial。 [Save Log Job] 2024-12-16 10:49:16.942 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。 [Save Log Job] 2024-12-16 10:49:16.942 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。 [Save Log Job] 2024-12-16 10:49:16.942 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。 [Save Log Job] 2024-12-16 10:49:16.942 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。 [Save Log Job] 2024-12-16 10:49:16.942 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。 [Save Log Job] 2024-12-16 10:49:16.943 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。 [Save Log Job] 2024-12-16 10:49:16.943 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。 [Save Log Job] 2024-12-16 10:49:16.943 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPower，RF set Power:0。 [Save Log Job] 2024-12-16 10:49:16.943 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。 [Save Log Job] 2024-12-16 10:49:16.943 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。 [Save Log Job] 2024-12-16 10:49:16.943 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。 [Save Log Job] 2024-12-16 10:49:16.943 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas1， ramp to 45sccm。 [Save Log Job] 2024-12-16 10:49:16.943 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas2， ramp to 56sccm。 [Save Log Job] 2024-12-16 10:49:16.943 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas3， ramp to 66sccm。 [Save Log Job] 2024-12-16 10:49:16.943 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas4， ramp to 76sccm。 [Save Log Job] 2024-12-16 10:49:16.943 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas5， ramp to 86sccm。 [Save Log Job] 2024-12-16 10:49:16.943 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPowerOnOff，Set RF power Off。 [Save Log Job] 2024-12-16 10:49:27.937 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-16 10:49:47.029 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe''20241216104757-CACB'' end step 2 [Save Log Job] 2024-12-16 10:49:47.030 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Stop monitor pressure stability [Save Log Job] 2024-12-16 10:49:47.030 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Recipe run completed，Recipe：20241216104757-CACB Start time：2024/12/16 10:48:46 End time：2024/12/16 10:49:47 Total time：0:1:0 [Save Log Job] 2024-12-16 10:49:47.030 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Recipe completely run [Save Log Job] 2024-12-16 10:49:47.032 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|PostProcess [Save Log Job] 2024-12-16 10:49:47.080 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, wait for 10 seconds [Save Log Job] 2024-12-16 10:49:49.039 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC1 ValveClose失败，原因：Valve keep open。 [Save Log Job] 2024-12-16 10:49:49.039 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC2 ValveClose失败，原因：Valve keep open。 [Save Log Job] 2024-12-16 10:49:49.039 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC3 ValveClose失败，原因：Valve keep open。 [Save Log Job] 2024-12-16 10:49:49.039 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC4 ValveClose失败，原因：Valve keep open。 [Save Log Job] 2024-12-16 10:49:49.039 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC5 ValveClose失败，原因：Valve keep open。 [Save Log Job] 2024-12-16 10:49:57.152 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, RF Power Off [Save Log Job] 2024-12-16 10:49:57.208 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, Stop all the gas flow [Save Log Job] 2024-12-16 10:49:57.937 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-16 10:50:03.529 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, Close all the valves [Save Log Job] 2024-12-16 10:50:03.586 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, close pump valve [Save Log Job] 2024-12-16 10:50:05.590 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门Chamber pumping valveClose失败，原因：Valve keep open。 [Save Log Job] 2024-12-16 10:50:06.941 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, delay 3 seconds [Save Log Job] 2024-12-16 10:50:08.040 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred. [Save Log Job] 2024-12-16 10:50:10.025 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, vent 50 seconds [Save Log Job] 2024-12-16 10:50:27.937 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-16 10:50:57.937 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-16 10:51:00.084 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, Close vent valve [Save Log Job] 2024-12-16 10:51:00.923 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, PostProcess Finished in 1.2 minitues [Save Log Job] 2024-12-16 10:51:00.923 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System complete run ''PostProcess''. [Save Log Job] 2024-12-16 10:51:00.923 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventLotFinished [Save Log Job] 2024-12-16 10:51:00.924 LOG.INFO YZQZFabAuto.cs Line:212 EndJobRecord() - EndJobRecord| [Save Log Job] 2024-12-16 10:51:00.924 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle [Save Log Job] 2024-12-16 10:51:00.924 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-16 10:51:00.929 LOG.INFO YZQZFabAuto.cs Line:243 Export2CsvLocalFile() - Export2CsvLocalFileD:\jet.plasma\trunk\Triton160\Triton160RT\bin\Debug\Logs\444444444444.csv [Save Log Job] 2024-12-16 10:51:00.930 LOG.INFO YZQZFabAuto.cs Line:291 Export2CsvWanPanFile() - Export2CsvWanPanFile\\192.168.1.208\CHIP_LoaderPath\JetplasmaDaJiao\SourceFolder\444444444444.csv [Save Log Job] 2024-12-16 10:51:01.013 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged [Save Log Job] 2024-12-16 10:51:21.941 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred. [Save Log Job] 2024-12-16 10:51:27.446 LOG.INFO YZQZFabAuto.cs Line:327 Export2CsvWanPanFile() - 找不到网络路径。 [Save Log Job] 2024-12-16 10:55:10.208 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation RunRecipe(CACB, 5555555555/666666666666/, , ) [Save Log Job] 2024-12-16 10:55:10.210 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|LoadProcessRecipe [Save Log Job] 2024-12-16 10:55:10.211 LOG.INFO LOG.cs Line:61 Write() - System通知TM保存工艺程序20241216105510-CACB [Save Log Job] 2024-12-16 10:55:10.211 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventLotStart [Save Log Job] 2024-12-16 10:55:10.211 LOG.INFO YZQZFabAuto.cs Line:165 StartJobRecord() - StartJobRecord|start|5555555555/666666666666/|CACB [Save Log Job] 2024-12-16 10:55:10.211 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|PreProcess [Save Log Job] 2024-12-16 10:55:10.211 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-16 10:55:10.215 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-16 10:55:10.261 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check door status。 [Save Log Job] 2024-12-16 10:55:10.261 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：check chamber door。 [Save Log Job] 2024-12-16 10:55:10.261 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：check backpanel door。 [Save Log Job] 2024-12-16 10:55:10.261 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check pump status。 [Save Log Job] 2024-12-16 10:55:10.262 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Close all the valves。 [Save Log Job] 2024-12-16 10:55:10.318 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Open pumping valve。 [Save Log Job] 2024-12-16 10:55:10.401 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged [Save Log Job] 2024-12-16 10:55:12.367 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门Chamber pumping valveOpen失败，原因：Valve keep closed 。 [Save Log Job] 2024-12-16 10:55:13.926 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check chamber pressure。 [Save Log Job] 2024-12-16 10:55:31.219 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred. [Save Log Job] 2024-12-16 10:55:31.225 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred. [Save Log Job] 2024-12-16 10:55:40.237 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-16 10:56:04.188 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Pump below 100mTorr。 [Save Log Job] 2024-12-16 10:56:04.244 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：PreProcess Finished in 0.9 minitues。 [Save Log Job] 2024-12-16 10:56:04.244 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System complete run ''PreProcess''. [Save Log Job] 2024-12-16 10:56:04.244 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Run Recipe 20241216105510-CACB [Save Log Job] 2024-12-16 10:56:04.244 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe start run''20241216105510-CACB'' [Save Log Job] 2024-12-16 10:56:04.245 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Processing [Save Log Job] 2024-12-16 10:56:04.296 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe''20241216105510-CACB'' start run step 1：initial。 [Save Log Job] 2024-12-16 10:56:04.296 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。 [Save Log Job] 2024-12-16 10:56:04.296 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。 [Save Log Job] 2024-12-16 10:56:04.296 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。 [Save Log Job] 2024-12-16 10:56:04.296 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。 [Save Log Job] 2024-12-16 10:56:04.297 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。 [Save Log Job] 2024-12-16 10:56:04.297 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。 [Save Log Job] 2024-12-16 10:56:04.297 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。 [Save Log Job] 2024-12-16 10:56:04.297 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPower，RF set Power:0。 [Save Log Job] 2024-12-16 10:56:04.297 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。 [Save Log Job] 2024-12-16 10:56:04.297 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。 [Save Log Job] 2024-12-16 10:56:04.297 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。 [Save Log Job] 2024-12-16 10:56:04.297 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas1， ramp to 45sccm。 [Save Log Job] 2024-12-16 10:56:04.297 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas2， ramp to 56sccm。 [Save Log Job] 2024-12-16 10:56:04.297 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas3， ramp to 66sccm。 [Save Log Job] 2024-12-16 10:56:04.297 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas4， ramp to 76sccm。 [Save Log Job] 2024-12-16 10:56:04.297 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas5， ramp to 86sccm。 [Save Log Job] 2024-12-16 10:56:04.297 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPowerOnOff，Set RF power Off。 [Save Log Job] 2024-12-16 10:56:04.348 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Start monitor pressure stability [Save Log Job] 2024-12-16 10:56:10.216 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-16 10:56:25.257 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred. [Save Log Job] 2024-12-16 10:56:34.370 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe''20241216105510-CACB'' end step 1 [Save Log Job] 2024-12-16 10:56:34.421 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe''20241216105510-CACB'' start run step 2：initial。 [Save Log Job] 2024-12-16 10:56:34.421 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。 [Save Log Job] 2024-12-16 10:56:34.421 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。 [Save Log Job] 2024-12-16 10:56:34.421 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。 [Save Log Job] 2024-12-16 10:56:34.421 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。 [Save Log Job] 2024-12-16 10:56:34.421 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。 [Save Log Job] 2024-12-16 10:56:34.421 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。 [Save Log Job] 2024-12-16 10:56:34.421 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。 [Save Log Job] 2024-12-16 10:56:34.422 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPower，RF set Power:0。 [Save Log Job] 2024-12-16 10:56:34.422 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。 [Save Log Job] 2024-12-16 10:56:34.422 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。 [Save Log Job] 2024-12-16 10:56:34.422 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。 [Save Log Job] 2024-12-16 10:56:34.422 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas1， ramp to 45sccm。 [Save Log Job] 2024-12-16 10:56:34.422 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas2， ramp to 56sccm。 [Save Log Job] 2024-12-16 10:56:34.422 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas3， ramp to 66sccm。 [Save Log Job] 2024-12-16 10:56:34.422 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas4， ramp to 76sccm。 [Save Log Job] 2024-12-16 10:56:34.422 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas5， ramp to 86sccm。 [Save Log Job] 2024-12-16 10:56:34.422 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPowerOnOff，Set RF power Off。 [Save Log Job] 2024-12-16 10:56:40.216 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-16 10:57:04.507 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe''20241216105510-CACB'' end step 2 [Save Log Job] 2024-12-16 10:57:04.509 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Stop monitor pressure stability [Save Log Job] 2024-12-16 10:57:04.509 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Recipe run completed，Recipe：20241216105510-CACB Start time：2024/12/16 10:56:04 End time：2024/12/16 10:57:04 Total time：0:1:0 [Save Log Job] 2024-12-16 10:57:04.509 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Recipe completely run [Save Log Job] 2024-12-16 10:57:04.509 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|PostProcess [Save Log Job] 2024-12-16 10:57:04.559 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, wait for 10 seconds [Save Log Job] 2024-12-16 10:57:06.526 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC1 ValveClose失败，原因：Valve keep open。 [Save Log Job] 2024-12-16 10:57:06.526 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC2 ValveClose失败，原因：Valve keep open。 [Save Log Job] 2024-12-16 10:57:06.526 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC3 ValveClose失败，原因：Valve keep open。 [Save Log Job] 2024-12-16 10:57:06.526 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC4 ValveClose失败，原因：Valve keep open。 [Save Log Job] 2024-12-16 10:57:06.526 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC5 ValveClose失败，原因：Valve keep open。 [Save Log Job] 2024-12-16 10:57:10.217 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-16 10:57:14.671 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, RF Power Off [Save Log Job] 2024-12-16 10:57:14.727 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, Stop all the gas flow [Save Log Job] 2024-12-16 10:57:21.014 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, Close all the valves [Save Log Job] 2024-12-16 10:57:21.070 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, close pump valve [Save Log Job] 2024-12-16 10:57:23.076 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门Chamber pumping valveClose失败，原因：Valve keep open。 [Save Log Job] 2024-12-16 10:57:24.413 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, delay 3 seconds [Save Log Job] 2024-12-16 10:57:25.520 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred. [Save Log Job] 2024-12-16 10:57:27.487 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, vent 50 seconds [Save Log Job] 2024-12-16 10:57:40.220 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-16 10:58:10.218 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-16 10:58:17.553 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, Close vent valve [Save Log Job] 2024-12-16 10:58:18.403 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, PostProcess Finished in 1.2 minitues [Save Log Job] 2024-12-16 10:58:18.403 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System complete run ''PostProcess''. [Save Log Job] 2024-12-16 10:58:18.403 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventLotFinished [Save Log Job] 2024-12-16 10:58:18.404 LOG.INFO YZQZFabAuto.cs Line:212 EndJobRecord() - EndJobRecord| [Save Log Job] 2024-12-16 10:58:18.404 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle [Save Log Job] 2024-12-16 10:58:18.404 LOG.INFO YZQZFabAuto.cs Line:190 work() - work |0 [Save Log Job] 2024-12-16 10:58:18.409 LOG.INFO YZQZFabAuto.cs Line:243 Export2CsvLocalFile() - Export2CsvLocalFileD:\jet.plasma\trunk\Triton160\Triton160RT\bin\Debug\Logs\5555555555-666666666666.csv [Save Log Job] 2024-12-16 10:58:18.409 LOG.INFO YZQZFabAuto.cs Line:291 Export2CsvWanPanFile() - Export2CsvWanPanFile\\192.168.1.208\CHIP_LoaderPath\JetplasmaDaJiao\SourceFolder\5555555555-666666666666.csv [Save Log Job] 2024-12-16 10:58:18.420 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged [Save Log Job] 2024-12-16 10:58:39.415 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred. [Save Log Job] 2024-12-16 10:58:44.925 LOG.INFO YZQZFabAuto.cs Line:327 Export2CsvWanPanFile() - 找不到网络路径。 <== [Save Log Job] 2024-12-16 11:04:08.925 LOG.INFO LOG.cs Line:61 Write() - 完成对数据库表格的更新操作 [Save Log Job] 2024-12-16 11:04:09.899 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, [Save Log Job] 2024-12-16 11:04:09.900 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, [Save Log Job] 2024-12-16 11:04:09.973 LOG.INFO LOG.cs Line:61 Write() - Routine System 初始化 Start [Save Log Job] 2024-12-16 11:04:10.001 LOG.INFO EventService.cs Line:60 Register() - 客户端322a6d8e-ff3d-4cd7-9ed8-a01a79cb11a8已连接 [Save Log Job] 2024-12-16 11:04:11.038 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle [Save Log Job] 2024-12-16 11:04:11.040 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle [Save Log Job] 2024-12-16 11:04:11.210 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle [Save Log Job] 2024-12-16 11:04:11.258 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle [Save Log Job] 2024-12-16 11:04:11.314 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged [Save Log Job] 2024-12-16 11:04:11.836 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetConfig(System_IsMesMode, True) [Save Log Job] 2024-12-16 11:04:14.985 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Software will be expired in -53 days, at 10/24/2024 12:00:00 AM 。 [Save Log Job] 2024-12-16 11:04:17.896 LOG.INFO LOG.cs Line:61 Write() - 用户admin尝试登录系统 [Save Log Job] 2024-12-16 11:04:17.897 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin [Save Log Job] 2024-12-16 11:04:17.902 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - User admin login [Save Log Job] 2024-12-16 11:04:18.029 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin [Save Log Job] 2024-12-16 11:04:32.134 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred. [Save Log Job] 2024-12-16 11:04:32.219 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred. [Save Log Job] 2024-12-16 11:04:32.266 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred. [Save Log Job] 2024-12-16 11:04:53.119 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred. <== [Save Log Job] 2024-12-16 11:07:01.455 LOG.INFO LOG.cs Line:61 Write() - 完成对数据库表格的更新操作 [Save Log Job] 2024-12-16 11:07:02.499 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, [Save Log Job] 2024-12-16 11:07:02.500 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, [Save Log Job] 2024-12-16 11:07:02.574 LOG.INFO LOG.cs Line:61 Write() - Routine System 初始化 Start [Save Log Job] 2024-12-16 11:07:02.668 LOG.INFO EventService.cs Line:60 Register() - 客户端02797170-7e2f-4483-9dee-db15ac733db0已连接 [Save Log Job] 2024-12-16 11:07:02.668 LOG.INFO EventService.cs Line:60 Register() - 客户端02797170-7e2f-4483-9dee-db15ac733db0已连接 [Save Log Job] 2024-12-16 11:07:03.636 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle [Save Log Job] 2024-12-16 11:07:03.637 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle [Save Log Job] 2024-12-16 11:07:03.774 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle [Save Log Job] 2024-12-16 11:07:03.800 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged [Save Log Job] 2024-12-16 11:07:03.827 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle [Save Log Job] 2024-12-16 11:07:04.509 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetConfig(System_IsMesMode, True) [Save Log Job] 2024-12-16 11:07:07.586 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Software will be expired in -53 days, at 10/24/2024 12:00:00 AM 。 [Save Log Job] 2024-12-16 11:07:12.520 LOG.INFO LOG.cs Line:61 Write() - 用户admin尝试登录系统 [Save Log Job] 2024-12-16 11:07:12.521 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin [Save Log Job] 2024-12-16 11:07:12.534 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - User admin login [Save Log Job] 2024-12-16 11:07:12.664 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin <== [Save Log Job] 2024-12-16 11:07:38.483 LOG.INFO LOG.cs Line:61 Write() - 完成对数据库表格的更新操作 [Save Log Job] 2024-12-16 11:07:39.228 LOG.INFO EventService.cs Line:60 Register() - 客户端3b760335-c9be-44b1-8a50-bd8f06d4ca05已连接 [Save Log Job] 2024-12-16 11:07:39.428 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, [Save Log Job] 2024-12-16 11:07:39.429 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, [Save Log Job] 2024-12-16 11:07:39.475 LOG.INFO LOG.cs Line:61 Write() - Routine System 初始化 Start [Save Log Job] 2024-12-16 11:07:40.455 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle [Save Log Job] 2024-12-16 11:07:40.524 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle [Save Log Job] 2024-12-16 11:07:40.586 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetConfig(System_IsMesMode, True) [Save Log Job] 2024-12-16 11:07:40.695 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle [Save Log Job] 2024-12-16 11:07:40.743 LOG.INFO YZQZFabAuto.cs Line:150 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle [Save Log Job] 2024-12-16 11:07:40.856 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged [Save Log Job] 2024-12-16 11:07:44.485 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Software will be expired in -53 days, at 10/24/2024 12:00:00 AM 。 [Save Log Job] 2024-12-16 11:07:48.555 LOG.INFO LOG.cs Line:61 Write() - 用户admin尝试登录系统 [Save Log Job] 2024-12-16 11:07:48.556 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin [Save Log Job] 2024-12-16 11:07:48.573 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - User admin login [Save Log Job] 2024-12-16 11:07:48.698 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin [Save Log Job] 2024-12-16 11:08:01.510 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred. [Save Log Job] 2024-12-16 11:08:01.533 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred. [Save Log Job] 2024-12-16 11:08:01.710 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred. [Save Log Job] 2024-12-16 11:08:01.752 LOG.INFO YZQZFabAuto.cs Line:158 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.