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log20241115.txt

log20241115.txt 34 KB
Історія Запис

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  1. <==  [Save Log Job] 2024-11-15 00:21:50.148 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Software will be expired in -21 days, at 10/24/2024 12:00:00 AM。
    2. 

  2. [Save Log Job] 2024-11-15 03:21:50.937 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Software will be expired in -21 days, at 10/24/2024 12:00:00 AM。
    3. 

  3. [Save Log Job] 2024-11-15 06:21:51.686 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Software will be expired in -21 days, at 10/24/2024 12:00:00 AM。
    4. 

  4. [Save Log Job] 2024-11-15 09:21:52.435 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Software will be expired in -21 days, at 10/24/2024 12:00:00 AM。
    5. 

  5. <==  [Save Log Job] 2024-11-15 13:38:18.675 LOG.INFO LOG.cs Line:61 Write() - 完成对数据库表格的更新操作
    6. 

  6. [Save Log Job] 2024-11-15 13:38:19.852 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, <IoSensor id="SensorBackPanelDoor" display=""  schematicId="" unit="" di="DI_back_panle_door_sw" isLowAsNormal="false" infoText="BackPanel door is opened" warningText="" alarmText="" />
    7. 

  7. [Save Log Job] 2024-11-15 13:38:19.852 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, <IoSensor id="SensorPumpDoor"      display=""  schematicId="" unit="" di="DI_pump_door_sw"    isLowAsNormal="false" infoText="" warningText="" alarmText="" />
    8. 

  8. [Save Log Job] 2024-11-15 13:38:19.939 LOG.INFO LOG.cs Line:61 Write() - Routine System 初始化 Start
    9. 

  9. [Save Log Job] 2024-11-15 13:38:19.980 LOG.INFO EventService.cs Line:60 Register() - 客户端c2b8a212-5687-4b2f-bd81-7b663fb380f0已连接
    10. 

  10. [Save Log Job] 2024-11-15 13:38:21.074 LOG.INFO YZQZFabAuto.cs Line:149 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle
    11. 

  11. [Save Log Job] 2024-11-15 13:38:21.075 LOG.INFO YZQZFabAuto.cs Line:149 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle
    12. 

  12. [Save Log Job] 2024-11-15 13:38:21.171 LOG.INFO YZQZFabAuto.cs Line:149 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle
    13. 

  13. [Save Log Job] 2024-11-15 13:38:21.175 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
    14. 

  14. [Save Log Job] 2024-11-15 13:38:21.219 LOG.INFO YZQZFabAuto.cs Line:149 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle
    15. 

  15. [Save Log Job] 2024-11-15 13:38:22.359 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetConfig(System_IsMesMode, True)
    16. 

  16. [Save Log Job] 2024-11-15 13:38:24.952 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Software will be expired in -22 days, at 10/24/2024 12:00:00 AM 。
    17. 

  17. [Save Log Job] 2024-11-15 13:38:33.229 LOG.INFO LOG.cs Line:61 Write() - 用户admin尝试登录系统
    18. 

  18. [Save Log Job] 2024-11-15 13:38:33.230 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin
    19. 

  19. [Save Log Job] 2024-11-15 13:38:33.251 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - User admin login
    20. 

  20. [Save Log Job] 2024-11-15 13:38:33.402 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin
    21. 

  21. [Save Log Job] 2024-11-15 13:38:42.164 LOG.INFO YZQZFabAuto.cs Line:157 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
    22. 

  22. [Save Log Job] 2024-11-15 13:38:42.170 LOG.INFO YZQZFabAuto.cs Line:157 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
    23. 

  23. [Save Log Job] 2024-11-15 13:38:42.181 LOG.INFO YZQZFabAuto.cs Line:157 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
    24. 

  24. [Save Log Job] 2024-11-15 13:38:42.230 LOG.INFO YZQZFabAuto.cs Line:157 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
    25. 

  25. [Save Log Job] 2024-11-15 13:38:43.890 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetAutoMode()
    26. 

  26. [Save Log Job] 2024-11-15 13:38:43.892 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentModeChanged
    27. 

  27. [Save Log Job] 2024-11-15 13:38:43.893 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System running mode changed to Auto Mode
    28. 

  28. <==  [Save Log Job] 2024-11-15 13:40:42.007 LOG.INFO LOG.cs Line:61 Write() - 完成对数据库表格的更新操作
    29. 

  29. [Save Log Job] 2024-11-15 13:40:43.025 LOG.INFO EventService.cs Line:60 Register() - 客户端d0cfb461-f705-4aa5-8e35-c8df79fee1b6已连接
    30. 

  30. [Save Log Job] 2024-11-15 13:40:43.198 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, <IoSensor id="SensorBackPanelDoor" display=""  schematicId="" unit="" di="DI_back_panle_door_sw" isLowAsNormal="false" infoText="BackPanel door is opened" warningText="" alarmText="" />
    31. 

  31. [Save Log Job] 2024-11-15 13:40:43.199 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, <IoSensor id="SensorPumpDoor"      display=""  schematicId="" unit="" di="DI_pump_door_sw"    isLowAsNormal="false" infoText="" warningText="" alarmText="" />
    32. 

  32. [Save Log Job] 2024-11-15 13:40:43.265 LOG.INFO LOG.cs Line:61 Write() - Routine System 初始化 Start
    33. 

  33. [Save Log Job] 2024-11-15 13:40:44.320 LOG.INFO YZQZFabAuto.cs Line:149 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle
    34. 

  34. [Save Log Job] 2024-11-15 13:40:44.338 LOG.INFO YZQZFabAuto.cs Line:149 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle
    35. 

  35. [Save Log Job] 2024-11-15 13:40:44.513 LOG.INFO YZQZFabAuto.cs Line:149 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle
    36. 

  36. [Save Log Job] 2024-11-15 13:40:44.568 LOG.INFO YZQZFabAuto.cs Line:149 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle
    37. 

  37. [Save Log Job] 2024-11-15 13:40:44.659 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
    38. 

  38. [Save Log Job] 2024-11-15 13:40:44.716 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetConfig(System_IsMesMode, True)
    39. 

  39. [Save Log Job] 2024-11-15 13:40:48.281 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Software will be expired in -22 days, at 10/24/2024 12:00:00 AM 。
    40. 

  40. [Save Log Job] 2024-11-15 13:40:50.477 LOG.INFO LOG.cs Line:61 Write() - 用户admin尝试登录系统
    41. 

  41. [Save Log Job] 2024-11-15 13:40:50.478 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin
    42. 

  42. [Save Log Job] 2024-11-15 13:40:50.485 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - User admin login
    43. 

  43. [Save Log Job] 2024-11-15 13:40:50.632 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin
    44. 

  44. [Save Log Job] 2024-11-15 13:40:53.803 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetAutoMode()
    45. 

  45. [Save Log Job] 2024-11-15 13:40:53.804 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentModeChanged
    46. 

  46. [Save Log Job] 2024-11-15 13:40:53.805 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System running mode changed to Auto Mode
    47. 

  47. [Save Log Job] 2024-11-15 13:41:05.411 LOG.INFO YZQZFabAuto.cs Line:157 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
    48. 

  48. [Save Log Job] 2024-11-15 13:41:05.523 LOG.INFO YZQZFabAuto.cs Line:157 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
    49. 

  49. [Save Log Job] 2024-11-15 13:41:05.577 LOG.INFO YZQZFabAuto.cs Line:157 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
    50. 

  50. [Save Log Job] 2024-11-15 13:41:26.403 LOG.INFO YZQZFabAuto.cs Line:157 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
    51. 

  51. [Save Log Job] 2024-11-15 13:41:32.250 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation RunRecipe(CACB, 12332432434324/)
    52. 

  52. [Save Log Job] 2024-11-15 13:41:32.286 LOG.INFO YZQZFabAuto.cs Line:149 SaveMachineStatusRecord() - SaveMachineStatusRecord|LoadProcessRecipe
    53. 

  53. [Save Log Job] 2024-11-15 13:41:32.289 LOG.INFO LOG.cs Line:61 Write() - System通知TM保存工艺程序20241115134132-CACB
    54. 

  54. [Save Log Job] 2024-11-15 13:41:32.289 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventLotStart
    55. 

  55. [Save Log Job] 2024-11-15 13:41:32.290 LOG.INFO YZQZFabAuto.cs Line:149 SaveMachineStatusRecord() - SaveMachineStatusRecord|PreProcess
    56. 

  56. [Save Log Job] 2024-11-15 13:41:32.291 LOG.INFO YZQZFabAuto.cs Line:164 StartJobRecord() - StartJobRecord|start|12332432434324/|CACB
    57. 

  57. [Save Log Job] 2024-11-15 13:41:32.292 LOG.INFO YZQZFabAuto.cs Line:187 work() - work |0
    58. 

  58. [Save Log Job] 2024-11-15 13:41:32.295 LOG.INFO YZQZFabAuto.cs Line:187 work() - work |0
    59. 

  59. [Save Log Job] 2024-11-15 13:41:32.343 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check door status。
    60. 

  60. [Save Log Job] 2024-11-15 13:41:32.344 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：check chamber door。
    61. 

  61. [Save Log Job] 2024-11-15 13:41:32.344 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：check backpanel door。
    62. 

  62. [Save Log Job] 2024-11-15 13:41:32.345 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check pump status。
    63. 

  63. [Save Log Job] 2024-11-15 13:41:32.347 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Close all the valves。
    64. 

  64. [Save Log Job] 2024-11-15 13:41:32.409 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Open pumping valve。
    65. 

  65. [Save Log Job] 2024-11-15 13:41:32.446 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
    66. 

  66. [Save Log Job] 2024-11-15 13:41:34.413 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门Chamber pumping valveOpen失败，原因：Valve keep closed 。
    67. 

  67. [Save Log Job] 2024-11-15 13:41:35.031 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check chamber pressure。
    68. 

  68. [Save Log Job] 2024-11-15 13:41:53.294 LOG.INFO YZQZFabAuto.cs Line:157 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
    69. 

  69. [Save Log Job] 2024-11-15 13:41:53.299 LOG.INFO YZQZFabAuto.cs Line:157 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
    70. 

  70. [Save Log Job] 2024-11-15 13:42:02.297 LOG.INFO YZQZFabAuto.cs Line:187 work() - work |0
    71. 

  71. [Save Log Job] 2024-11-15 13:42:10.037 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Pump below 100mTorr。
    72. 

  72. [Save Log Job] 2024-11-15 13:42:10.095 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：PreProcess Finished in 0.6 minitues。
    73. 

  73. [Save Log Job] 2024-11-15 13:42:10.096 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System complete run ''PreProcess''.
    74. 

  74. [Save Log Job] 2024-11-15 13:42:10.102 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Run Recipe 20241115134132-CACB
    75. 

  75. [Save Log Job] 2024-11-15 13:42:10.102 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe start run''20241115134132-CACB''
    76. 

  76. [Save Log Job] 2024-11-15 13:42:10.103 LOG.INFO YZQZFabAuto.cs Line:149 SaveMachineStatusRecord() - SaveMachineStatusRecord|Processing
    77. 

  77. [Save Log Job] 2024-11-15 13:42:10.156 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe''20241115134132-CACB'' start run step 1：initial。
    78. 

  78. [Save Log Job] 2024-11-15 13:42:10.157 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。
    79. 

  79. [Save Log Job] 2024-11-15 13:42:10.158 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。
    80. 

  80. [Save Log Job] 2024-11-15 13:42:10.158 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。
    81. 

  81. [Save Log Job] 2024-11-15 13:42:10.159 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。
    82. 

  82. [Save Log Job] 2024-11-15 13:42:10.159 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。
    83. 

  83. [Save Log Job] 2024-11-15 13:42:10.160 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。
    84. 

  84. [Save Log Job] 2024-11-15 13:42:10.160 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。
    85. 

  85. [Save Log Job] 2024-11-15 13:42:10.161 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPower，RF set Power:0。
    86. 

  86. [Save Log Job] 2024-11-15 13:42:10.161 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。
    87. 

  87. [Save Log Job] 2024-11-15 13:42:10.162 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。
    88. 

  88. [Save Log Job] 2024-11-15 13:42:10.162 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。
    89. 

  89. [Save Log Job] 2024-11-15 13:42:10.163 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas1， ramp to 45sccm。
    90. 

  90. [Save Log Job] 2024-11-15 13:42:10.163 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas2， ramp to 56sccm。
    91. 

  91. [Save Log Job] 2024-11-15 13:42:10.163 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas3， ramp to 66sccm。
    92. 

  92. [Save Log Job] 2024-11-15 13:42:10.163 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas4， ramp to 76sccm。
    93. 

  93. [Save Log Job] 2024-11-15 13:42:10.163 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas5， ramp to 86sccm。
    94. 

  94. [Save Log Job] 2024-11-15 13:42:10.164 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPowerOnOff，Set RF power Off。
    95. 

  95. [Save Log Job] 2024-11-15 13:42:10.214 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Start monitor pressure stability
    96. 

  96. [Save Log Job] 2024-11-15 13:42:31.113 LOG.INFO YZQZFabAuto.cs Line:157 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
    97. 

  97. [Save Log Job] 2024-11-15 13:42:32.299 LOG.INFO YZQZFabAuto.cs Line:187 work() - work |0
    98. 

  98. [Save Log Job] 2024-11-15 13:42:40.221 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe''20241115134132-CACB'' end step 1
    99. 

  99. [Save Log Job] 2024-11-15 13:42:40.271 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe''20241115134132-CACB'' start run step 2：initial。
    100. 

  100. [Save Log Job] 2024-11-15 13:42:40.271 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。
    101. 

  101. [Save Log Job] 2024-11-15 13:42:40.271 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。
    102. 

  102. [Save Log Job] 2024-11-15 13:42:40.271 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。
    103. 

  103. [Save Log Job] 2024-11-15 13:42:40.271 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。
    104. 

  104. [Save Log Job] 2024-11-15 13:42:40.271 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。
    105. 

  105. [Save Log Job] 2024-11-15 13:42:40.272 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。
    106. 

  106. [Save Log Job] 2024-11-15 13:42:40.272 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。
    107. 

  107. [Save Log Job] 2024-11-15 13:42:40.272 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPower，RF set Power:150。
    108. 

  108. [Save Log Job] 2024-11-15 13:42:40.272 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。
    109. 

  109. [Save Log Job] 2024-11-15 13:42:40.272 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。
    110. 

  110. [Save Log Job] 2024-11-15 13:42:40.272 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。
    111. 

  111. [Save Log Job] 2024-11-15 13:42:40.272 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas1， ramp to 45sccm。
    112. 

  112. [Save Log Job] 2024-11-15 13:42:40.272 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas2， ramp to 56sccm。
    113. 

  113. [Save Log Job] 2024-11-15 13:42:40.273 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas3， ramp to 66sccm。
    114. 

  114. [Save Log Job] 2024-11-15 13:42:40.273 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas4， ramp to 76sccm。
    115. 

  115. [Save Log Job] 2024-11-15 13:42:40.273 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas5， ramp to 86sccm。
    116. 

  116. [Save Log Job] 2024-11-15 13:42:40.273 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPowerOnOff，Set RF power On。
    117. 

  117. [Save Log Job] 2024-11-15 13:42:41.779 LOG.ERROR EventLogWriter.cs Line:14 WriteEvent() - System RF GeneratorTolerance alarm：Forward power 18 out of range[149,151] in 1 seconds.
    118. 

  118. [Save Log Job] 2024-11-15 13:42:41.779 LOG.INFO YZQZFabAuto.cs Line:212 EndJobRecord() - EndJobRecord|
    119. 

  119. [Save Log Job] 2024-11-15 13:42:41.779 LOG.INFO YZQZFabAuto.cs Line:187 work() - work |0
    120. 

  120. [Save Log Job] 2024-11-15 13:42:41.782 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe was aborted: user aborted recipe
    121. 

  121. [Save Log Job] 2024-11-15 13:42:41.784 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Stop monitor pressure stability
    122. 

  122. [Save Log Job] 2024-11-15 13:42:41.789 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Recipe run completed，Recipe：20241115134132-CACB
    123. 

  123. Start time：2024/11/15 13:42:10
    124. 

  124. End time：2024/11/15 13:42:41
    125. 

  125. Total time：0:0:31
    126. 

  126. [Save Log Job] 2024-11-15 13:42:41.790 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Recipe completely run
    127. 

  127. [Save Log Job] 2024-11-15 13:51:03.951 LOG.INFO YZQZFabAuto.cs Line:149 SaveMachineStatusRecord() - SaveMachineStatusRecord|Error
    128. 

  128. [Save Log Job] 2024-11-15 13:51:03.975 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
    129. 

  129. [Save Log Job] 2024-11-15 13:51:03.975 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
    130. 

  130. [Save Log Job] 2024-11-15 13:51:03.975 LOG.INFO YZQZFabAuto.cs Line:241 Export2CsvLocalFile() - Export2CsvLocalFileD:\jet.plasma\trunk\Triton160\Triton160RT\bin\Debug\Logs\202411151342—12332432434324.csv
    131. 

  131. [Save Log Job] 2024-11-15 13:51:03.978 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC1 ValveClose失败，原因：Valve keep open。
    132. 

  132. [Save Log Job] 2024-11-15 13:51:03.979 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC2 ValveClose失败，原因：Valve keep open。
    133. 

  133. [Save Log Job] 2024-11-15 13:51:03.979 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC3 ValveClose失败，原因：Valve keep open。
    134. 

  134. [Save Log Job] 2024-11-15 13:51:03.980 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC4 ValveClose失败，原因：Valve keep open。
    135. 

  135. [Save Log Job] 2024-11-15 13:51:03.980 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC5 ValveClose失败，原因：Valve keep open。
    136. 

  136. [Save Log Job] 2024-11-15 13:51:03.980 LOG.INFO YZQZFabAuto.cs Line:291 Export2CsvWanPanFile() - Export2CsvWanPanFile\\192.168.1.208\CHIP_LoaderPath\JetplasmaDaJiao\SourceFolder\202411151342—12332432434324.csv
    137. 

  137. [Save Log Job] 2024-11-15 13:51:03.982 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门Process gas final valveClose失败，原因：Valve keep open。
    138. 

  138. [Save Log Job] 2024-11-15 13:51:03.984 LOG.ERROR EventLogWriter.cs Line:14 WriteEvent() - System PLC heart beat check failed，please confirm PLC still running
    139. 

  139. [Save Log Job] 2024-11-15 13:51:03.989 LOG.INFO YZQZFabAuto.cs Line:212 EndJobRecord() - EndJobRecord|
    140. 

  140. <==  [Save Log Job] 2024-11-15 13:52:54.396 LOG.INFO LOG.cs Line:61 Write() - 完成对数据库表格的更新操作
    141. 

  141. [Save Log Job] 2024-11-15 13:52:55.401 LOG.INFO EventService.cs Line:60 Register() - 客户端995ee41a-b67d-4bdd-b208-4fc162550688已连接
    142. 

  142. [Save Log Job] 2024-11-15 13:52:55.402 LOG.INFO EventService.cs Line:60 Register() - 客户端995ee41a-b67d-4bdd-b208-4fc162550688已连接
    143. 

  143. [Save Log Job] 2024-11-15 13:52:55.530 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, <IoSensor id="SensorBackPanelDoor" display=""  schematicId="" unit="" di="DI_back_panle_door_sw" isLowAsNormal="false" infoText="BackPanel door is opened" warningText="" alarmText="" />
    144. 

  144. [Save Log Job] 2024-11-15 13:52:55.531 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, <IoSensor id="SensorPumpDoor"      display=""  schematicId="" unit="" di="DI_pump_door_sw"    isLowAsNormal="false" infoText="" warningText="" alarmText="" />
    145. 

  145. [Save Log Job] 2024-11-15 13:52:55.621 LOG.INFO LOG.cs Line:61 Write() - Routine System 初始化 Start
    146. 

  146. [Save Log Job] 2024-11-15 13:52:56.663 LOG.INFO YZQZFabAuto.cs Line:149 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle
    147. 

  147. [Save Log Job] 2024-11-15 13:52:56.684 LOG.INFO YZQZFabAuto.cs Line:149 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle
    148. 

  148. [Save Log Job] 2024-11-15 13:52:56.859 LOG.INFO YZQZFabAuto.cs Line:149 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle
    149. 

  149. [Save Log Job] 2024-11-15 13:52:56.870 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
    150. 

  150. [Save Log Job] 2024-11-15 13:52:56.905 LOG.INFO YZQZFabAuto.cs Line:149 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle
    151. 

  151. [Save Log Job] 2024-11-15 13:52:57.093 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetConfig(System_IsMesMode, True)
    152. 

  152. [Save Log Job] 2024-11-15 13:53:00.637 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Software will be expired in -22 days, at 10/24/2024 12:00:00 AM 。
    153. 

  153. [Save Log Job] 2024-11-15 13:53:04.593 LOG.INFO LOG.cs Line:61 Write() - 用户admin尝试登录系统
    154. 

  154. [Save Log Job] 2024-11-15 13:53:04.595 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin
    155. 

  155. [Save Log Job] 2024-11-15 13:53:04.602 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - User admin login
    156. 

  156. [Save Log Job] 2024-11-15 13:53:04.764 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin
    157. 

  157. [Save Log Job] 2024-11-15 13:53:08.686 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetAutoMode()
    158. 

  158. [Save Log Job] 2024-11-15 13:53:08.688 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentModeChanged
    159. 

  159. [Save Log Job] 2024-11-15 13:53:08.689 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System running mode changed to Auto Mode
    160. 

  160. [Save Log Job] 2024-11-15 13:53:26.513 LOG.INFO YZQZFabAuto.cs Line:157 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
    161. 

  161. [Save Log Job] 2024-11-15 13:53:26.520 LOG.INFO YZQZFabAuto.cs Line:157 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
    162. 

  162. [Save Log Job] 2024-11-15 13:53:26.528 LOG.INFO YZQZFabAuto.cs Line:157 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
    163. 

  163. [Save Log Job] 2024-11-15 13:53:47.510 LOG.INFO YZQZFabAuto.cs Line:157 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
    164. 

  164. [Save Log Job] 2024-11-15 13:54:12.742 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation RunRecipe(CACB, 32423423423/)
    165. 

  165. [Save Log Job] 2024-11-15 13:54:12.780 LOG.INFO YZQZFabAuto.cs Line:149 SaveMachineStatusRecord() - SaveMachineStatusRecord|LoadProcessRecipe
    166. 

  166. [Save Log Job] 2024-11-15 13:54:12.783 LOG.INFO LOG.cs Line:61 Write() - System通知TM保存工艺程序20241115135412-CACB
    167. 

  167. [Save Log Job] 2024-11-15 13:54:12.783 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventLotStart
    168. 

  168. [Save Log Job] 2024-11-15 13:54:12.785 LOG.INFO YZQZFabAuto.cs Line:149 SaveMachineStatusRecord() - SaveMachineStatusRecord|PreProcess
    169. 

  169. [Save Log Job] 2024-11-15 13:54:12.785 LOG.INFO YZQZFabAuto.cs Line:164 StartJobRecord() - StartJobRecord|start|32423423423/|CACB
    170. 

  170. [Save Log Job] 2024-11-15 13:54:12.787 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
    171. 

  171. [Save Log Job] 2024-11-15 13:54:12.789 LOG.INFO YZQZFabAuto.cs Line:187 work() - work |0
    172. 

  172. [Save Log Job] 2024-11-15 13:54:12.792 LOG.INFO YZQZFabAuto.cs Line:187 work() - work |0
    173. 

  173. [Save Log Job] 2024-11-15 13:54:12.837 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check door status。
    174. 

  174. [Save Log Job] 2024-11-15 13:54:12.837 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：check chamber door。
    175. 

  175. [Save Log Job] 2024-11-15 13:54:12.837 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：check backpanel door。
    176. 

  176. [Save Log Job] 2024-11-15 13:54:12.838 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check pump status。
    177. 

  177. [Save Log Job] 2024-11-15 13:54:12.840 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Close all the valves。
    178. 

  178. [Save Log Job] 2024-11-15 13:54:12.903 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Open pumping valve。
    179. 

  179. [Save Log Job] 2024-11-15 13:54:14.922 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门Chamber pumping valveOpen失败，原因：Valve keep closed 。
    180. 

  180. [Save Log Job] 2024-11-15 13:54:16.783 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check chamber pressure。
    181. 

  181. [Save Log Job] 2024-11-15 13:54:33.787 LOG.INFO YZQZFabAuto.cs Line:157 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
    182. 

  182. [Save Log Job] 2024-11-15 13:54:33.794 LOG.INFO YZQZFabAuto.cs Line:157 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
    183. 

  183. [Save Log Job] 2024-11-15 13:54:42.793 LOG.INFO YZQZFabAuto.cs Line:187 work() - work |0
    184. 

  184. [Save Log Job] 2024-11-15 13:55:07.192 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Pump below 100mTorr。
    185. 

  185. [Save Log Job] 2024-11-15 13:55:07.250 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：PreProcess Finished in 0.9 minitues。
    186. 

  186. [Save Log Job] 2024-11-15 13:55:07.250 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System complete run ''PreProcess''.
    187. 

  187. [Save Log Job] 2024-11-15 13:55:07.252 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Run Recipe 20241115135412-CACB
    188. 

  188. [Save Log Job] 2024-11-15 13:55:07.253 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe start run''20241115135412-CACB''
    189. 

  189. [Save Log Job] 2024-11-15 13:55:07.253 LOG.INFO YZQZFabAuto.cs Line:149 SaveMachineStatusRecord() - SaveMachineStatusRecord|Processing
    190. 

  190. [Save Log Job] 2024-11-15 13:55:07.305 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe''20241115135412-CACB'' start run step 1：initial。
    191. 

  191. [Save Log Job] 2024-11-15 13:55:07.306 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。
    192. 

  192. [Save Log Job] 2024-11-15 13:55:07.307 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。
    193. 

  193. [Save Log Job] 2024-11-15 13:55:07.308 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。
    194. 

  194. [Save Log Job] 2024-11-15 13:55:07.308 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。
    195. 

  195. [Save Log Job] 2024-11-15 13:55:07.309 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。
    196. 

  196. [Save Log Job] 2024-11-15 13:55:07.309 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。
    197. 

  197. [Save Log Job] 2024-11-15 13:55:07.310 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。
    198. 

  198. [Save Log Job] 2024-11-15 13:55:07.310 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPower，RF set Power:0。
    199. 

  199. [Save Log Job] 2024-11-15 13:55:07.310 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。
    200. 

  200. [Save Log Job] 2024-11-15 13:55:07.311 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。
    201. 

  201. [Save Log Job] 2024-11-15 13:55:07.311 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。
    202. 

  202. [Save Log Job] 2024-11-15 13:55:07.312 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas1， ramp to 45sccm。
    203. 

  203. [Save Log Job] 2024-11-15 13:55:07.312 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas2， ramp to 56sccm。
    204. 

  204. [Save Log Job] 2024-11-15 13:55:07.312 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas3， ramp to 66sccm。
    205. 

  205. [Save Log Job] 2024-11-15 13:55:07.312 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas4， ramp to 76sccm。
    206. 

  206. [Save Log Job] 2024-11-15 13:55:07.312 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas5， ramp to 86sccm。
    207. 

  207. [Save Log Job] 2024-11-15 13:55:07.313 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPowerOnOff，Set RF power Off。
    208. 

  208. [Save Log Job] 2024-11-15 13:55:07.365 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Start monitor pressure stability
    209. 

  209. [Save Log Job] 2024-11-15 13:55:12.795 LOG.INFO YZQZFabAuto.cs Line:187 work() - work |0
    210. 

  210. [Save Log Job] 2024-11-15 13:55:28.265 LOG.INFO YZQZFabAuto.cs Line:157 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred.
    211. 

  211. [Save Log Job] 2024-11-15 13:55:37.367 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe''20241115135412-CACB'' end step 1
    212. 

  212. [Save Log Job] 2024-11-15 13:55:37.418 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe''20241115135412-CACB'' start run step 2：initial。
    213. 

  213. [Save Log Job] 2024-11-15 13:55:37.418 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。
    214. 

  214. [Save Log Job] 2024-11-15 13:55:37.418 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。
    215. 

  215. [Save Log Job] 2024-11-15 13:55:37.418 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。
    216. 

  216. [Save Log Job] 2024-11-15 13:55:37.418 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。
    217. 

  217. [Save Log Job] 2024-11-15 13:55:37.419 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。
    218. 

  218. [Save Log Job] 2024-11-15 13:55:37.419 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。
    219. 

  219. [Save Log Job] 2024-11-15 13:55:37.419 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。
    220. 

  220. [Save Log Job] 2024-11-15 13:55:37.419 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPower，RF set Power:150。
    221. 

  221. [Save Log Job] 2024-11-15 13:55:37.419 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。
    222. 

  222. [Save Log Job] 2024-11-15 13:55:37.419 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。
    223. 

  223. [Save Log Job] 2024-11-15 13:55:37.419 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。
    224. 

  224. [Save Log Job] 2024-11-15 13:55:37.419 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas1， ramp to 45sccm。
    225. 

  225. [Save Log Job] 2024-11-15 13:55:37.421 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas2， ramp to 56sccm。
    226. 

  226. [Save Log Job] 2024-11-15 13:55:37.421 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas3， ramp to 66sccm。
    227. 

  227. [Save Log Job] 2024-11-15 13:55:37.421 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas4， ramp to 76sccm。
    228. 

  228. [Save Log Job] 2024-11-15 13:55:37.421 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas5， ramp to 86sccm。
    229. 

  229. [Save Log Job] 2024-11-15 13:55:37.421 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPowerOnOff，Set RF power On。
    230. 

  230. [Save Log Job] 2024-11-15 13:55:38.851 LOG.INFO YZQZFabAuto.cs Line:212 EndJobRecord() - EndJobRecord|
    231. 

  231. [Save Log Job] 2024-11-15 13:55:38.851 LOG.ERROR EventLogWriter.cs Line:14 WriteEvent() - System RF GeneratorTolerance alarm：Forward power 18 out of range[149,151] in 1 seconds.
    232. 

  232. [Save Log Job] 2024-11-15 13:55:38.851 LOG.INFO YZQZFabAuto.cs Line:187 work() - work |0
    233. 

  233. [Save Log Job] 2024-11-15 13:55:38.854 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe was aborted: user aborted recipe
    234. 

  234. [Save Log Job] 2024-11-15 13:55:38.860 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Stop monitor pressure stability
    235. 

  235. [Save Log Job] 2024-11-15 13:55:44.853 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Recipe run completed，Recipe：20241115135412-CACB
    236. 

  236. Start time：2024/11/15 13:55:07
    237. 

  237. End time：2024/11/15 13:55:38
    238. 

  238. Total time：0:0:31
    239. 

  239. [Save Log Job] 2024-11-15 13:55:44.853 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC1 ValveClose失败，原因：Valve keep open。
    240. 

  240. [Save Log Job] 2024-11-15 13:55:44.854 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC2 ValveClose失败，原因：Valve keep open。
    241. 

  241. [Save Log Job] 2024-11-15 13:55:44.854 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC3 ValveClose失败，原因：Valve keep open。
    242. 

  242. [Save Log Job] 2024-11-15 13:55:44.854 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC4 ValveClose失败，原因：Valve keep open。
    243. 

  243. [Save Log Job] 2024-11-15 13:55:44.854 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Recipe completely run
    244. 

  244. [Save Log Job] 2024-11-15 13:55:44.854 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC5 ValveClose失败，原因：Valve keep open。
    245. 

  245. [Save Log Job] 2024-11-15 13:55:44.854 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门Process gas final valveClose失败，原因：Valve keep open。
    246. 

  246. [Save Log Job] 2024-11-15 13:55:44.859 LOG.INFO YZQZFabAuto.cs Line:149 SaveMachineStatusRecord() - SaveMachineStatusRecord|Error
    247. 

  247. [Save Log Job] 2024-11-15 13:55:45.179 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
    248. 

  248. [Save Log Job] 2024-11-15 13:55:46.022 LOG.INFO YZQZFabAuto.cs Line:241 Export2CsvLocalFile() - Export2CsvLocalFileD:\jet.plasma\trunk\Triton160\Triton160RT\bin\Debug\Logs\202411151355—32423423423.csv
    249. 

  249. [Save Log Job] 2024-11-15 13:55:47.139 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC3 ValveClose失败，原因：Valve keep open。
    250. 

  250. [Save Log Job] 2024-11-15 13:55:47.517 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC4 ValveClose失败，原因：Valve keep open。
    251. 

  251. [Save Log Job] 2024-11-15 13:55:47.518 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC5 ValveClose失败，原因：Valve keep open。
    252. 

  252. [Save Log Job] 2024-11-15 13:55:47.518 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门Process gas final valveClose失败，原因：Valve keep open。
    253. 

  253.