<== [Save Log Job] 2024-11-15 00:21:50.148 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Software will be expired in -21 days, at 10/24/2024 12:00:00 AM。 [Save Log Job] 2024-11-15 03:21:50.937 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Software will be expired in -21 days, at 10/24/2024 12:00:00 AM。 [Save Log Job] 2024-11-15 06:21:51.686 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Software will be expired in -21 days, at 10/24/2024 12:00:00 AM。 [Save Log Job] 2024-11-15 09:21:52.435 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Software will be expired in -21 days, at 10/24/2024 12:00:00 AM。 <== [Save Log Job] 2024-11-15 13:38:18.675 LOG.INFO LOG.cs Line:61 Write() - 完成对数据库表格的更新操作 [Save Log Job] 2024-11-15 13:38:19.852 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, [Save Log Job] 2024-11-15 13:38:19.852 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, [Save Log Job] 2024-11-15 13:38:19.939 LOG.INFO LOG.cs Line:61 Write() - Routine System 初始化 Start [Save Log Job] 2024-11-15 13:38:19.980 LOG.INFO EventService.cs Line:60 Register() - 客户端c2b8a212-5687-4b2f-bd81-7b663fb380f0已连接 [Save Log Job] 2024-11-15 13:38:21.074 LOG.INFO YZQZFabAuto.cs Line:149 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle [Save Log Job] 2024-11-15 13:38:21.075 LOG.INFO YZQZFabAuto.cs Line:149 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle [Save Log Job] 2024-11-15 13:38:21.171 LOG.INFO YZQZFabAuto.cs Line:149 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle [Save Log Job] 2024-11-15 13:38:21.175 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged [Save Log Job] 2024-11-15 13:38:21.219 LOG.INFO YZQZFabAuto.cs Line:149 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle [Save Log Job] 2024-11-15 13:38:22.359 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetConfig(System_IsMesMode, True) [Save Log Job] 2024-11-15 13:38:24.952 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Software will be expired in -22 days, at 10/24/2024 12:00:00 AM 。 [Save Log Job] 2024-11-15 13:38:33.229 LOG.INFO LOG.cs Line:61 Write() - 用户admin尝试登录系统 [Save Log Job] 2024-11-15 13:38:33.230 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin [Save Log Job] 2024-11-15 13:38:33.251 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - User admin login [Save Log Job] 2024-11-15 13:38:33.402 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin [Save Log Job] 2024-11-15 13:38:42.164 LOG.INFO YZQZFabAuto.cs Line:157 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred. [Save Log Job] 2024-11-15 13:38:42.170 LOG.INFO YZQZFabAuto.cs Line:157 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred. [Save Log Job] 2024-11-15 13:38:42.181 LOG.INFO YZQZFabAuto.cs Line:157 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred. [Save Log Job] 2024-11-15 13:38:42.230 LOG.INFO YZQZFabAuto.cs Line:157 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred. [Save Log Job] 2024-11-15 13:38:43.890 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetAutoMode() [Save Log Job] 2024-11-15 13:38:43.892 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentModeChanged [Save Log Job] 2024-11-15 13:38:43.893 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System running mode changed to Auto Mode <== [Save Log Job] 2024-11-15 13:40:42.007 LOG.INFO LOG.cs Line:61 Write() - 完成对数据库表格的更新操作 [Save Log Job] 2024-11-15 13:40:43.025 LOG.INFO EventService.cs Line:60 Register() - 客户端d0cfb461-f705-4aa5-8e35-c8df79fee1b6已连接 [Save Log Job] 2024-11-15 13:40:43.198 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, [Save Log Job] 2024-11-15 13:40:43.199 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, [Save Log Job] 2024-11-15 13:40:43.265 LOG.INFO LOG.cs Line:61 Write() - Routine System 初始化 Start [Save Log Job] 2024-11-15 13:40:44.320 LOG.INFO YZQZFabAuto.cs Line:149 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle [Save Log Job] 2024-11-15 13:40:44.338 LOG.INFO YZQZFabAuto.cs Line:149 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle [Save Log Job] 2024-11-15 13:40:44.513 LOG.INFO YZQZFabAuto.cs Line:149 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle [Save Log Job] 2024-11-15 13:40:44.568 LOG.INFO YZQZFabAuto.cs Line:149 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle [Save Log Job] 2024-11-15 13:40:44.659 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged [Save Log Job] 2024-11-15 13:40:44.716 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetConfig(System_IsMesMode, True) [Save Log Job] 2024-11-15 13:40:48.281 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Software will be expired in -22 days, at 10/24/2024 12:00:00 AM 。 [Save Log Job] 2024-11-15 13:40:50.477 LOG.INFO LOG.cs Line:61 Write() - 用户admin尝试登录系统 [Save Log Job] 2024-11-15 13:40:50.478 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin [Save Log Job] 2024-11-15 13:40:50.485 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - User admin login [Save Log Job] 2024-11-15 13:40:50.632 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin [Save Log Job] 2024-11-15 13:40:53.803 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetAutoMode() [Save Log Job] 2024-11-15 13:40:53.804 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentModeChanged [Save Log Job] 2024-11-15 13:40:53.805 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System running mode changed to Auto Mode [Save Log Job] 2024-11-15 13:41:05.411 LOG.INFO YZQZFabAuto.cs Line:157 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred. [Save Log Job] 2024-11-15 13:41:05.523 LOG.INFO YZQZFabAuto.cs Line:157 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred. [Save Log Job] 2024-11-15 13:41:05.577 LOG.INFO YZQZFabAuto.cs Line:157 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred. [Save Log Job] 2024-11-15 13:41:26.403 LOG.INFO YZQZFabAuto.cs Line:157 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred. [Save Log Job] 2024-11-15 13:41:32.250 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation RunRecipe(CACB, 12332432434324/) [Save Log Job] 2024-11-15 13:41:32.286 LOG.INFO YZQZFabAuto.cs Line:149 SaveMachineStatusRecord() - SaveMachineStatusRecord|LoadProcessRecipe [Save Log Job] 2024-11-15 13:41:32.289 LOG.INFO LOG.cs Line:61 Write() - System通知TM保存工艺程序20241115134132-CACB [Save Log Job] 2024-11-15 13:41:32.289 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventLotStart [Save Log Job] 2024-11-15 13:41:32.290 LOG.INFO YZQZFabAuto.cs Line:149 SaveMachineStatusRecord() - SaveMachineStatusRecord|PreProcess [Save Log Job] 2024-11-15 13:41:32.291 LOG.INFO YZQZFabAuto.cs Line:164 StartJobRecord() - StartJobRecord|start|12332432434324/|CACB [Save Log Job] 2024-11-15 13:41:32.292 LOG.INFO YZQZFabAuto.cs Line:187 work() - work |0 [Save Log Job] 2024-11-15 13:41:32.295 LOG.INFO YZQZFabAuto.cs Line:187 work() - work |0 [Save Log Job] 2024-11-15 13:41:32.343 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check door status。 [Save Log Job] 2024-11-15 13:41:32.344 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：check chamber door。 [Save Log Job] 2024-11-15 13:41:32.344 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：check backpanel door。 [Save Log Job] 2024-11-15 13:41:32.345 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check pump status。 [Save Log Job] 2024-11-15 13:41:32.347 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Close all the valves。 [Save Log Job] 2024-11-15 13:41:32.409 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Open pumping valve。 [Save Log Job] 2024-11-15 13:41:32.446 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged [Save Log Job] 2024-11-15 13:41:34.413 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门Chamber pumping valveOpen失败，原因：Valve keep closed 。 [Save Log Job] 2024-11-15 13:41:35.031 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check chamber pressure。 [Save Log Job] 2024-11-15 13:41:53.294 LOG.INFO YZQZFabAuto.cs Line:157 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred. [Save Log Job] 2024-11-15 13:41:53.299 LOG.INFO YZQZFabAuto.cs Line:157 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred. [Save Log Job] 2024-11-15 13:42:02.297 LOG.INFO YZQZFabAuto.cs Line:187 work() - work |0 [Save Log Job] 2024-11-15 13:42:10.037 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Pump below 100mTorr。 [Save Log Job] 2024-11-15 13:42:10.095 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：PreProcess Finished in 0.6 minitues。 [Save Log Job] 2024-11-15 13:42:10.096 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System complete run ''PreProcess''. [Save Log Job] 2024-11-15 13:42:10.102 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Run Recipe 20241115134132-CACB [Save Log Job] 2024-11-15 13:42:10.102 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe start run''20241115134132-CACB'' [Save Log Job] 2024-11-15 13:42:10.103 LOG.INFO YZQZFabAuto.cs Line:149 SaveMachineStatusRecord() - SaveMachineStatusRecord|Processing [Save Log Job] 2024-11-15 13:42:10.156 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe''20241115134132-CACB'' start run step 1：initial。 [Save Log Job] 2024-11-15 13:42:10.157 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。 [Save Log Job] 2024-11-15 13:42:10.158 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。 [Save Log Job] 2024-11-15 13:42:10.158 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。 [Save Log Job] 2024-11-15 13:42:10.159 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。 [Save Log Job] 2024-11-15 13:42:10.159 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。 [Save Log Job] 2024-11-15 13:42:10.160 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。 [Save Log Job] 2024-11-15 13:42:10.160 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。 [Save Log Job] 2024-11-15 13:42:10.161 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPower，RF set Power:0。 [Save Log Job] 2024-11-15 13:42:10.161 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。 [Save Log Job] 2024-11-15 13:42:10.162 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。 [Save Log Job] 2024-11-15 13:42:10.162 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。 [Save Log Job] 2024-11-15 13:42:10.163 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas1， ramp to 45sccm。 [Save Log Job] 2024-11-15 13:42:10.163 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas2， ramp to 56sccm。 [Save Log Job] 2024-11-15 13:42:10.163 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas3， ramp to 66sccm。 [Save Log Job] 2024-11-15 13:42:10.163 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas4， ramp to 76sccm。 [Save Log Job] 2024-11-15 13:42:10.163 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas5， ramp to 86sccm。 [Save Log Job] 2024-11-15 13:42:10.164 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPowerOnOff，Set RF power Off。 [Save Log Job] 2024-11-15 13:42:10.214 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Start monitor pressure stability [Save Log Job] 2024-11-15 13:42:31.113 LOG.INFO YZQZFabAuto.cs Line:157 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred. [Save Log Job] 2024-11-15 13:42:32.299 LOG.INFO YZQZFabAuto.cs Line:187 work() - work |0 [Save Log Job] 2024-11-15 13:42:40.221 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe''20241115134132-CACB'' end step 1 [Save Log Job] 2024-11-15 13:42:40.271 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe''20241115134132-CACB'' start run step 2：initial。 [Save Log Job] 2024-11-15 13:42:40.271 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。 [Save Log Job] 2024-11-15 13:42:40.271 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。 [Save Log Job] 2024-11-15 13:42:40.271 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。 [Save Log Job] 2024-11-15 13:42:40.271 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。 [Save Log Job] 2024-11-15 13:42:40.271 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。 [Save Log Job] 2024-11-15 13:42:40.272 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。 [Save Log Job] 2024-11-15 13:42:40.272 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。 [Save Log Job] 2024-11-15 13:42:40.272 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPower，RF set Power:150。 [Save Log Job] 2024-11-15 13:42:40.272 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。 [Save Log Job] 2024-11-15 13:42:40.272 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。 [Save Log Job] 2024-11-15 13:42:40.272 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。 [Save Log Job] 2024-11-15 13:42:40.272 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas1， ramp to 45sccm。 [Save Log Job] 2024-11-15 13:42:40.272 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas2， ramp to 56sccm。 [Save Log Job] 2024-11-15 13:42:40.273 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas3， ramp to 66sccm。 [Save Log Job] 2024-11-15 13:42:40.273 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas4， ramp to 76sccm。 [Save Log Job] 2024-11-15 13:42:40.273 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas5， ramp to 86sccm。 [Save Log Job] 2024-11-15 13:42:40.273 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPowerOnOff，Set RF power On。 [Save Log Job] 2024-11-15 13:42:41.779 LOG.ERROR EventLogWriter.cs Line:14 WriteEvent() - System RF GeneratorTolerance alarm：Forward power 18 out of range[149,151] in 1 seconds. [Save Log Job] 2024-11-15 13:42:41.779 LOG.INFO YZQZFabAuto.cs Line:212 EndJobRecord() - EndJobRecord| [Save Log Job] 2024-11-15 13:42:41.779 LOG.INFO YZQZFabAuto.cs Line:187 work() - work |0 [Save Log Job] 2024-11-15 13:42:41.782 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe was aborted: user aborted recipe [Save Log Job] 2024-11-15 13:42:41.784 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Stop monitor pressure stability [Save Log Job] 2024-11-15 13:42:41.789 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Recipe run completed，Recipe：20241115134132-CACB Start time：2024/11/15 13:42:10 End time：2024/11/15 13:42:41 Total time：0:0:31 [Save Log Job] 2024-11-15 13:42:41.790 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Recipe completely run [Save Log Job] 2024-11-15 13:51:03.951 LOG.INFO YZQZFabAuto.cs Line:149 SaveMachineStatusRecord() - SaveMachineStatusRecord|Error [Save Log Job] 2024-11-15 13:51:03.975 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged [Save Log Job] 2024-11-15 13:51:03.975 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged [Save Log Job] 2024-11-15 13:51:03.975 LOG.INFO YZQZFabAuto.cs Line:241 Export2CsvLocalFile() - Export2CsvLocalFileD:\jet.plasma\trunk\Triton160\Triton160RT\bin\Debug\Logs\202411151342—12332432434324.csv [Save Log Job] 2024-11-15 13:51:03.978 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC1 ValveClose失败，原因：Valve keep open。 [Save Log Job] 2024-11-15 13:51:03.979 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC2 ValveClose失败，原因：Valve keep open。 [Save Log Job] 2024-11-15 13:51:03.979 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC3 ValveClose失败，原因：Valve keep open。 [Save Log Job] 2024-11-15 13:51:03.980 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC4 ValveClose失败，原因：Valve keep open。 [Save Log Job] 2024-11-15 13:51:03.980 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC5 ValveClose失败，原因：Valve keep open。 [Save Log Job] 2024-11-15 13:51:03.980 LOG.INFO YZQZFabAuto.cs Line:291 Export2CsvWanPanFile() - Export2CsvWanPanFile\\192.168.1.208\CHIP_LoaderPath\JetplasmaDaJiao\SourceFolder\202411151342—12332432434324.csv [Save Log Job] 2024-11-15 13:51:03.982 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门Process gas final valveClose失败，原因：Valve keep open。 [Save Log Job] 2024-11-15 13:51:03.984 LOG.ERROR EventLogWriter.cs Line:14 WriteEvent() - System PLC heart beat check failed，please confirm PLC still running [Save Log Job] 2024-11-15 13:51:03.989 LOG.INFO YZQZFabAuto.cs Line:212 EndJobRecord() - EndJobRecord| <== [Save Log Job] 2024-11-15 13:52:54.396 LOG.INFO LOG.cs Line:61 Write() - 完成对数据库表格的更新操作 [Save Log Job] 2024-11-15 13:52:55.401 LOG.INFO EventService.cs Line:60 Register() - 客户端995ee41a-b67d-4bdd-b208-4fc162550688已连接 [Save Log Job] 2024-11-15 13:52:55.402 LOG.INFO EventService.cs Line:60 Register() - 客户端995ee41a-b67d-4bdd-b208-4fc162550688已连接 [Save Log Job] 2024-11-15 13:52:55.530 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, [Save Log Job] 2024-11-15 13:52:55.531 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, [Save Log Job] 2024-11-15 13:52:55.621 LOG.INFO LOG.cs Line:61 Write() - Routine System 初始化 Start [Save Log Job] 2024-11-15 13:52:56.663 LOG.INFO YZQZFabAuto.cs Line:149 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle [Save Log Job] 2024-11-15 13:52:56.684 LOG.INFO YZQZFabAuto.cs Line:149 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle [Save Log Job] 2024-11-15 13:52:56.859 LOG.INFO YZQZFabAuto.cs Line:149 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle [Save Log Job] 2024-11-15 13:52:56.870 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged [Save Log Job] 2024-11-15 13:52:56.905 LOG.INFO YZQZFabAuto.cs Line:149 SaveMachineStatusRecord() - SaveMachineStatusRecord|Idle [Save Log Job] 2024-11-15 13:52:57.093 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetConfig(System_IsMesMode, True) [Save Log Job] 2024-11-15 13:53:00.637 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Software will be expired in -22 days, at 10/24/2024 12:00:00 AM 。 [Save Log Job] 2024-11-15 13:53:04.593 LOG.INFO LOG.cs Line:61 Write() - 用户admin尝试登录系统 [Save Log Job] 2024-11-15 13:53:04.595 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin [Save Log Job] 2024-11-15 13:53:04.602 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - User admin login [Save Log Job] 2024-11-15 13:53:04.764 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin [Save Log Job] 2024-11-15 13:53:08.686 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetAutoMode() [Save Log Job] 2024-11-15 13:53:08.688 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentModeChanged [Save Log Job] 2024-11-15 13:53:08.689 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System running mode changed to Auto Mode [Save Log Job] 2024-11-15 13:53:26.513 LOG.INFO YZQZFabAuto.cs Line:157 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred. [Save Log Job] 2024-11-15 13:53:26.520 LOG.INFO YZQZFabAuto.cs Line:157 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred. [Save Log Job] 2024-11-15 13:53:26.528 LOG.INFO YZQZFabAuto.cs Line:157 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred. [Save Log Job] 2024-11-15 13:53:47.510 LOG.INFO YZQZFabAuto.cs Line:157 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred. [Save Log Job] 2024-11-15 13:54:12.742 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation RunRecipe(CACB, 32423423423/) [Save Log Job] 2024-11-15 13:54:12.780 LOG.INFO YZQZFabAuto.cs Line:149 SaveMachineStatusRecord() - SaveMachineStatusRecord|LoadProcessRecipe [Save Log Job] 2024-11-15 13:54:12.783 LOG.INFO LOG.cs Line:61 Write() - System通知TM保存工艺程序20241115135412-CACB [Save Log Job] 2024-11-15 13:54:12.783 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventLotStart [Save Log Job] 2024-11-15 13:54:12.785 LOG.INFO YZQZFabAuto.cs Line:149 SaveMachineStatusRecord() - SaveMachineStatusRecord|PreProcess [Save Log Job] 2024-11-15 13:54:12.785 LOG.INFO YZQZFabAuto.cs Line:164 StartJobRecord() - StartJobRecord|start|32423423423/|CACB [Save Log Job] 2024-11-15 13:54:12.787 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged [Save Log Job] 2024-11-15 13:54:12.789 LOG.INFO YZQZFabAuto.cs Line:187 work() - work |0 [Save Log Job] 2024-11-15 13:54:12.792 LOG.INFO YZQZFabAuto.cs Line:187 work() - work |0 [Save Log Job] 2024-11-15 13:54:12.837 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check door status。 [Save Log Job] 2024-11-15 13:54:12.837 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：check chamber door。 [Save Log Job] 2024-11-15 13:54:12.837 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：check backpanel door。 [Save Log Job] 2024-11-15 13:54:12.838 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check pump status。 [Save Log Job] 2024-11-15 13:54:12.840 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Close all the valves。 [Save Log Job] 2024-11-15 13:54:12.903 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Open pumping valve。 [Save Log Job] 2024-11-15 13:54:14.922 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门Chamber pumping valveOpen失败，原因：Valve keep closed 。 [Save Log Job] 2024-11-15 13:54:16.783 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check chamber pressure。 [Save Log Job] 2024-11-15 13:54:33.787 LOG.INFO YZQZFabAuto.cs Line:157 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred. [Save Log Job] 2024-11-15 13:54:33.794 LOG.INFO YZQZFabAuto.cs Line:157 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred. [Save Log Job] 2024-11-15 13:54:42.793 LOG.INFO YZQZFabAuto.cs Line:187 work() - work |0 [Save Log Job] 2024-11-15 13:55:07.192 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Pump below 100mTorr。 [Save Log Job] 2024-11-15 13:55:07.250 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：PreProcess Finished in 0.9 minitues。 [Save Log Job] 2024-11-15 13:55:07.250 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System complete run ''PreProcess''. [Save Log Job] 2024-11-15 13:55:07.252 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Run Recipe 20241115135412-CACB [Save Log Job] 2024-11-15 13:55:07.253 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe start run''20241115135412-CACB'' [Save Log Job] 2024-11-15 13:55:07.253 LOG.INFO YZQZFabAuto.cs Line:149 SaveMachineStatusRecord() - SaveMachineStatusRecord|Processing [Save Log Job] 2024-11-15 13:55:07.305 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe''20241115135412-CACB'' start run step 1：initial。 [Save Log Job] 2024-11-15 13:55:07.306 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。 [Save Log Job] 2024-11-15 13:55:07.307 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。 [Save Log Job] 2024-11-15 13:55:07.308 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。 [Save Log Job] 2024-11-15 13:55:07.308 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。 [Save Log Job] 2024-11-15 13:55:07.309 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。 [Save Log Job] 2024-11-15 13:55:07.309 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。 [Save Log Job] 2024-11-15 13:55:07.310 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。 [Save Log Job] 2024-11-15 13:55:07.310 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPower，RF set Power:0。 [Save Log Job] 2024-11-15 13:55:07.310 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。 [Save Log Job] 2024-11-15 13:55:07.311 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。 [Save Log Job] 2024-11-15 13:55:07.311 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。 [Save Log Job] 2024-11-15 13:55:07.312 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas1， ramp to 45sccm。 [Save Log Job] 2024-11-15 13:55:07.312 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas2， ramp to 56sccm。 [Save Log Job] 2024-11-15 13:55:07.312 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas3， ramp to 66sccm。 [Save Log Job] 2024-11-15 13:55:07.312 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas4， ramp to 76sccm。 [Save Log Job] 2024-11-15 13:55:07.312 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas5， ramp to 86sccm。 [Save Log Job] 2024-11-15 13:55:07.313 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPowerOnOff，Set RF power Off。 [Save Log Job] 2024-11-15 13:55:07.365 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Start monitor pressure stability [Save Log Job] 2024-11-15 13:55:12.795 LOG.INFO YZQZFabAuto.cs Line:187 work() - work |0 [Save Log Job] 2024-11-15 13:55:28.265 LOG.INFO YZQZFabAuto.cs Line:157 SaveMachineStatusRecord() - MES|ErrorResponse|One or more errors occurred. [Save Log Job] 2024-11-15 13:55:37.367 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe''20241115135412-CACB'' end step 1 [Save Log Job] 2024-11-15 13:55:37.418 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe''20241115135412-CACB'' start run step 2：initial。 [Save Log Job] 2024-11-15 13:55:37.418 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。 [Save Log Job] 2024-11-15 13:55:37.418 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。 [Save Log Job] 2024-11-15 13:55:37.418 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。 [Save Log Job] 2024-11-15 13:55:37.418 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。 [Save Log Job] 2024-11-15 13:55:37.419 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。 [Save Log Job] 2024-11-15 13:55:37.419 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。 [Save Log Job] 2024-11-15 13:55:37.419 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。 [Save Log Job] 2024-11-15 13:55:37.419 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPower，RF set Power:150。 [Save Log Job] 2024-11-15 13:55:37.419 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。 [Save Log Job] 2024-11-15 13:55:37.419 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。 [Save Log Job] 2024-11-15 13:55:37.419 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。 [Save Log Job] 2024-11-15 13:55:37.419 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas1， ramp to 45sccm。 [Save Log Job] 2024-11-15 13:55:37.421 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas2， ramp to 56sccm。 [Save Log Job] 2024-11-15 13:55:37.421 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas3， ramp to 66sccm。 [Save Log Job] 2024-11-15 13:55:37.421 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas4， ramp to 76sccm。 [Save Log Job] 2024-11-15 13:55:37.421 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas5， ramp to 86sccm。 [Save Log Job] 2024-11-15 13:55:37.421 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPowerOnOff，Set RF power On。 [Save Log Job] 2024-11-15 13:55:38.851 LOG.INFO YZQZFabAuto.cs Line:212 EndJobRecord() - EndJobRecord| [Save Log Job] 2024-11-15 13:55:38.851 LOG.ERROR EventLogWriter.cs Line:14 WriteEvent() - System RF GeneratorTolerance alarm：Forward power 18 out of range[149,151] in 1 seconds. [Save Log Job] 2024-11-15 13:55:38.851 LOG.INFO YZQZFabAuto.cs Line:187 work() - work |0 [Save Log Job] 2024-11-15 13:55:38.854 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe was aborted: user aborted recipe [Save Log Job] 2024-11-15 13:55:38.860 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Stop monitor pressure stability [Save Log Job] 2024-11-15 13:55:44.853 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Recipe run completed，Recipe：20241115135412-CACB Start time：2024/11/15 13:55:07 End time：2024/11/15 13:55:38 Total time：0:0:31 [Save Log Job] 2024-11-15 13:55:44.853 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC1 ValveClose失败，原因：Valve keep open。 [Save Log Job] 2024-11-15 13:55:44.854 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC2 ValveClose失败，原因：Valve keep open。 [Save Log Job] 2024-11-15 13:55:44.854 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC3 ValveClose失败，原因：Valve keep open。 [Save Log Job] 2024-11-15 13:55:44.854 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC4 ValveClose失败，原因：Valve keep open。 [Save Log Job] 2024-11-15 13:55:44.854 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Recipe completely run [Save Log Job] 2024-11-15 13:55:44.854 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC5 ValveClose失败，原因：Valve keep open。 [Save Log Job] 2024-11-15 13:55:44.854 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门Process gas final valveClose失败，原因：Valve keep open。 [Save Log Job] 2024-11-15 13:55:44.859 LOG.INFO YZQZFabAuto.cs Line:149 SaveMachineStatusRecord() - SaveMachineStatusRecord|Error [Save Log Job] 2024-11-15 13:55:45.179 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged [Save Log Job] 2024-11-15 13:55:46.022 LOG.INFO YZQZFabAuto.cs Line:241 Export2CsvLocalFile() - Export2CsvLocalFileD:\jet.plasma\trunk\Triton160\Triton160RT\bin\Debug\Logs\202411151355—32423423423.csv [Save Log Job] 2024-11-15 13:55:47.139 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC3 ValveClose失败，原因：Valve keep open。 [Save Log Job] 2024-11-15 13:55:47.517 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC4 ValveClose失败，原因：Valve keep open。 [Save Log Job] 2024-11-15 13:55:47.518 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC5 ValveClose失败，原因：Valve keep open。 [Save Log Job] 2024-11-15 13:55:47.518 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门Process gas final valveClose失败，原因：Valve keep open。