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log20241029.txt

log20241029.txt 59 KB
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  1. <==  [Save Log Job] 2024-10-29 18:57:45.485 LOG.INFO LOG.cs Line:61 Write() - 完成对数据库表格的更新操作
    2. 

  2. [Save Log Job] 2024-10-29 18:57:46.880 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, <IoSensor id="SensorBackPanelDoor" display=""  schematicId="" unit="" di="DI_back_panle_door_sw" isLowAsNormal="false" infoText="BackPanel door is opened" warningText="" alarmText="" />
    3. 

  3. [Save Log Job] 2024-10-29 18:57:46.881 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, <IoSensor id="SensorPumpDoor"      display=""  schematicId="" unit="" di="DI_pump_door_sw"    isLowAsNormal="false" infoText="" warningText="" alarmText="" />
    4. 

  4. [Save Log Job] 2024-10-29 18:57:46.894 LOG.INFO EventService.cs Line:60 Register() - 客户端e8b54775-89ae-4aff-9abe-249b9b16d97a已连接
    5. 

  5. [Save Log Job] 2024-10-29 18:57:46.954 LOG.INFO LOG.cs Line:61 Write() - Routine System 初始化 Start
    6. 

  6. [Save Log Job] 2024-10-29 18:57:48.261 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
    7. 

  7. [Save Log Job] 2024-10-29 18:57:49.704 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetConfig(System_IsMesMode, True)
    8. 

  8. [Save Log Job] 2024-10-29 18:57:51.968 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Software will be expired in -5 days, at 10/24/2024 12:00:00 AM 。
    9. 

  9. [Save Log Job] 2024-10-29 18:58:00.749 LOG.INFO LOG.cs Line:61 Write() - 用户admin尝试登录系统
    10. 

  10. [Save Log Job] 2024-10-29 18:58:00.751 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin
    11. 

  11. [Save Log Job] 2024-10-29 18:58:00.758 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - User admin login
    12. 

  12. [Save Log Job] 2024-10-29 18:58:00.942 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin
    13. 

  13. <==  [Save Log Job] 2024-10-29 20:37:13.371 LOG.INFO LOG.cs Line:61 Write() - 完成对数据库表格的更新操作
    14. 

  14. [Save Log Job] 2024-10-29 20:37:14.192 LOG.INFO EventService.cs Line:60 Register() - 客户端0725865a-20c8-4be8-9579-0ebe69486361已连接
    15. 

  15. [Save Log Job] 2024-10-29 20:37:14.383 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, <IoSensor id="SensorBackPanelDoor" display=""  schematicId="" unit="" di="DI_back_panle_door_sw" isLowAsNormal="false" infoText="BackPanel door is opened" warningText="" alarmText="" />
    16. 

  16. [Save Log Job] 2024-10-29 20:37:14.383 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, <IoSensor id="SensorPumpDoor"      display=""  schematicId="" unit="" di="DI_pump_door_sw"    isLowAsNormal="false" infoText="" warningText="" alarmText="" />
    17. 

  17. [Save Log Job] 2024-10-29 20:37:14.448 LOG.INFO LOG.cs Line:61 Write() - Routine System 初始化 Start
    18. 

  18. [Save Log Job] 2024-10-29 20:37:15.806 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
    19. 

  19. [Save Log Job] 2024-10-29 20:37:16.287 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetConfig(System_IsMesMode, True)
    20. 

  20. [Save Log Job] 2024-10-29 20:37:19.463 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Software will be expired in -5 days, at 10/24/2024 12:00:00 AM 。
    21. 

  21. [Save Log Job] 2024-10-29 20:37:24.676 LOG.INFO LOG.cs Line:61 Write() - 用户admin尝试登录系统
    22. 

  22. [Save Log Job] 2024-10-29 20:37:24.676 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin
    23. 

  23. [Save Log Job] 2024-10-29 20:37:24.690 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - User admin login
    24. 

  24. [Save Log Job] 2024-10-29 20:37:24.868 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin
    25. 

  25. [Save Log Job] 2024-10-29 20:37:41.851 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetAutoMode()
    26. 

  26. [Save Log Job] 2024-10-29 20:37:41.853 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentModeChanged
    27. 

  27. [Save Log Job] 2024-10-29 20:37:41.853 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System running mode changed to Auto Mode
    28. 

  28. [Save Log Job] 2024-10-29 20:37:51.708 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation RunRecipe(123, )
    29. 

  29. [Save Log Job] 2024-10-29 20:37:51.768 LOG.INFO LOG.cs Line:61 Write() - System通知TM保存工艺程序20241029203751-123
    30. 

  30. [Save Log Job] 2024-10-29 20:37:51.768 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventLotStart
    31. 

  31. [Save Log Job] 2024-10-29 20:37:51.824 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check door status。
    32. 

  32. [Save Log Job] 2024-10-29 20:37:51.824 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：check chamber door。
    33. 

  33. [Save Log Job] 2024-10-29 20:37:51.825 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：check backpanel door。
    34. 

  34. [Save Log Job] 2024-10-29 20:37:51.826 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check pump status。
    35. 

  35. [Save Log Job] 2024-10-29 20:37:51.827 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Close all the valves。
    36. 

  36. [Save Log Job] 2024-10-29 20:37:51.890 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Open pumping valve。
    37. 

  37. [Save Log Job] 2024-10-29 20:37:51.947 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
    38. 

  38. [Save Log Job] 2024-10-29 20:37:53.945 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门Chamber pumping valveOpen失败，原因：Valve keep closed 。
    39. 

  39. [Save Log Job] 2024-10-29 20:37:55.536 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check chamber pressure。
    40. 

  40. [Save Log Job] 2024-10-29 20:38:30.456 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Pump below 100mTorr。
    41. 

  41. [Save Log Job] 2024-10-29 20:38:30.516 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：PreProcess Finished in 0.6 minitues。
    42. 

  42. [Save Log Job] 2024-10-29 20:38:30.516 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System complete run ''PreProcess''.
    43. 

  43. [Save Log Job] 2024-10-29 20:38:30.519 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Run Recipe 20241029203751-123
    44. 

  44. [Save Log Job] 2024-10-29 20:38:30.519 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe start run''20241029203751-123''
    45. 

  45. [Save Log Job] 2024-10-29 20:38:30.573 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe''20241029203751-123'' start run step 1：initial。
    46. 

  46. [Save Log Job] 2024-10-29 20:38:30.574 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。
    47. 

  47. [Save Log Job] 2024-10-29 20:38:30.574 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。
    48. 

  48. [Save Log Job] 2024-10-29 20:38:30.575 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。
    49. 

  49. [Save Log Job] 2024-10-29 20:38:30.575 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。
    50. 

  50. [Save Log Job] 2024-10-29 20:38:30.576 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。
    51. 

  51. [Save Log Job] 2024-10-29 20:38:30.576 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。
    52. 

  52. [Save Log Job] 2024-10-29 20:38:30.576 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。
    53. 

  53. [Save Log Job] 2024-10-29 20:38:30.577 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPower，RF set Power:0。
    54. 

  54. [Save Log Job] 2024-10-29 20:38:30.577 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。
    55. 

  55. [Save Log Job] 2024-10-29 20:38:30.577 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。
    56. 

  56. [Save Log Job] 2024-10-29 20:38:30.578 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。
    57. 

  57. [Save Log Job] 2024-10-29 20:38:30.578 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas1， ramp to 45sccm。
    58. 

  58. [Save Log Job] 2024-10-29 20:38:30.578 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas2， ramp to 56sccm。
    59. 

  59. [Save Log Job] 2024-10-29 20:38:30.578 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas3， ramp to 66sccm。
    60. 

  60. [Save Log Job] 2024-10-29 20:38:30.578 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas4， ramp to 76sccm。
    61. 

  61. [Save Log Job] 2024-10-29 20:38:30.578 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas5， ramp to 86sccm。
    62. 

  62. [Save Log Job] 2024-10-29 20:38:30.579 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPowerOnOff，Set RF power Off。
    63. 

  63. [Save Log Job] 2024-10-29 20:38:30.631 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Start monitor pressure stability
    64. 

  64. [Save Log Job] 2024-10-29 20:39:00.627 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe''20241029203751-123'' end step 1
    65. 

  65. [Save Log Job] 2024-10-29 20:39:00.629 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Stop monitor pressure stability
    66. 

  66. [Save Log Job] 2024-10-29 20:39:00.629 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Recipe run completed，Recipe：20241029203751-123
    67. 

  67. Start time：2024/10/29 20:38:30
    68. 

  68. End time：2024/10/29 20:39:00
    69. 

  69. Total time：0:0:30
    70. 

  70. [Save Log Job] 2024-10-29 20:39:00.630 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Recipe completely run
    71. 

  71. [Save Log Job] 2024-10-29 20:39:00.684 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, wait for 10 seconds
    72. 

  72. [Save Log Job] 2024-10-29 20:39:02.667 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC1 ValveClose失败，原因：Valve keep open。
    73. 

  73. [Save Log Job] 2024-10-29 20:39:02.667 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC2 ValveClose失败，原因：Valve keep open。
    74. 

  74. [Save Log Job] 2024-10-29 20:39:02.667 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC3 ValveClose失败，原因：Valve keep open。
    75. 

  75. [Save Log Job] 2024-10-29 20:39:02.668 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC4 ValveClose失败，原因：Valve keep open。
    76. 

  76. [Save Log Job] 2024-10-29 20:39:02.668 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC5 ValveClose失败，原因：Valve keep open。
    77. 

  77. [Save Log Job] 2024-10-29 20:39:02.668 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门Process gas final valveClose失败，原因：Valve keep open。
    78. 

  78. [Save Log Job] 2024-10-29 20:39:10.757 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, RF Power Off
    79. 

  79. [Save Log Job] 2024-10-29 20:39:10.819 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, Stop all the gas flow
    80. 

  80. [Save Log Job] 2024-10-29 20:39:16.715 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, Close all the valves
    81. 

  81. [Save Log Job] 2024-10-29 20:39:16.776 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, close pump valve
    82. 

  82. [Save Log Job] 2024-10-29 20:39:18.782 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门Chamber pumping valveClose失败，原因：Valve keep open。
    83. 

  83. [Save Log Job] 2024-10-29 20:39:20.188 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, delay 3 seconds
    84. 

  84. [Save Log Job] 2024-10-29 20:39:23.292 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, vent 50 seconds
    85. 

  85. [Save Log Job] 2024-10-29 20:40:13.379 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, Close vent valve
    86. 

  86. [Save Log Job] 2024-10-29 20:40:14.198 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, PostProcess Finished in 1.2 minitues
    87. 

  87. [Save Log Job] 2024-10-29 20:40:14.199 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System complete run ''PostProcess''.
    88. 

  88. [Save Log Job] 2024-10-29 20:40:19.361 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventLotFinished
    89. 

  89. [Save Log Job] 2024-10-29 20:40:47.003 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
    90. 

  90. <==  [Save Log Job] 2024-10-29 20:43:40.043 LOG.INFO LOG.cs Line:61 Write() - 完成对数据库表格的更新操作
    91. 

  91. [Save Log Job] 2024-10-29 20:43:41.056 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, <IoSensor id="SensorBackPanelDoor" display=""  schematicId="" unit="" di="DI_back_panle_door_sw" isLowAsNormal="false" infoText="BackPanel door is opened" warningText="" alarmText="" />
    92. 

  92. [Save Log Job] 2024-10-29 20:43:41.057 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, <IoSensor id="SensorPumpDoor"      display=""  schematicId="" unit="" di="DI_pump_door_sw"    isLowAsNormal="false" infoText="" warningText="" alarmText="" />
    93. 

  93. [Save Log Job] 2024-10-29 20:43:41.079 LOG.INFO EventService.cs Line:60 Register() - 客户端ec99f926-b669-4e44-a5f4-a71ffd99268f已连接
    94. 

  94. [Save Log Job] 2024-10-29 20:43:41.079 LOG.INFO EventService.cs Line:60 Register() - 客户端ec99f926-b669-4e44-a5f4-a71ffd99268f已连接
    95. 

  95. [Save Log Job] 2024-10-29 20:43:41.143 LOG.INFO LOG.cs Line:61 Write() - Routine System 初始化 Start
    96. 

  96. [Save Log Job] 2024-10-29 20:43:42.569 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
    97. 

  97. [Save Log Job] 2024-10-29 20:43:42.585 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetConfig(System_IsMesMode, True)
    98. 

  98. [Save Log Job] 2024-10-29 20:43:46.155 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Software will be expired in -5 days, at 10/24/2024 12:00:00 AM 。
    99. 

  99. [Save Log Job] 2024-10-29 20:44:00.057 LOG.INFO LOG.cs Line:61 Write() - 用户admin尝试登录系统
    100. 

  100. [Save Log Job] 2024-10-29 20:44:00.059 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin
    101. 

  101. [Save Log Job] 2024-10-29 20:44:00.066 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - User admin login
    102. 

  102. [Save Log Job] 2024-10-29 20:44:00.246 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin
    103. 

  103. [Save Log Job] 2024-10-29 20:44:10.300 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetAutoMode()
    104. 

  104. [Save Log Job] 2024-10-29 20:44:10.302 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentModeChanged
    105. 

  105. [Save Log Job] 2024-10-29 20:44:10.302 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System running mode changed to Auto Mode
    106. 

  106. [Save Log Job] 2024-10-29 20:44:14.349 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation RunRecipe(123, )
    107. 

  107. [Save Log Job] 2024-10-29 20:44:14.371 LOG.INFO LOG.cs Line:61 Write() - System通知TM保存工艺程序20241029204414-123
    108. 

  108. [Save Log Job] 2024-10-29 20:44:14.371 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventLotStart
    109. 

  109. [Save Log Job] 2024-10-29 20:44:14.427 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check door status。
    110. 

  110. [Save Log Job] 2024-10-29 20:44:14.427 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：check chamber door。
    111. 

  111. [Save Log Job] 2024-10-29 20:44:14.427 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：check backpanel door。
    112. 

  112. [Save Log Job] 2024-10-29 20:44:14.428 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check pump status。
    113. 

  113. [Save Log Job] 2024-10-29 20:44:14.430 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Close all the valves。
    114. 

  114. [Save Log Job] 2024-10-29 20:44:14.483 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
    115. 

  115. [Save Log Job] 2024-10-29 20:44:14.494 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Open pumping valve。
    116. 

  116. [Save Log Job] 2024-10-29 20:44:16.521 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门Chamber pumping valveOpen失败，原因：Valve keep closed 。
    117. 

  117. [Save Log Job] 2024-10-29 20:44:18.409 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check chamber pressure。
    118. 

  118. [Save Log Job] 2024-10-29 20:44:57.310 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Pump below 100mTorr。
    119. 

  119. [Save Log Job] 2024-10-29 20:44:57.370 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：PreProcess Finished in 0.7 minitues。
    120. 

  120. [Save Log Job] 2024-10-29 20:44:57.370 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System complete run ''PreProcess''.
    121. 

  121. [Save Log Job] 2024-10-29 20:44:57.372 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Run Recipe 20241029204414-123
    122. 

  122. [Save Log Job] 2024-10-29 20:44:57.373 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe start run''20241029204414-123''
    123. 

  123. [Save Log Job] 2024-10-29 20:44:57.426 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe''20241029204414-123'' start run step 1：initial。
    124. 

  124. [Save Log Job] 2024-10-29 20:44:57.427 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。
    125. 

  125. [Save Log Job] 2024-10-29 20:44:57.428 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。
    126. 

  126. [Save Log Job] 2024-10-29 20:44:57.428 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。
    127. 

  127. [Save Log Job] 2024-10-29 20:44:57.429 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。
    128. 

  128. [Save Log Job] 2024-10-29 20:44:57.429 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。
    129. 

  129. [Save Log Job] 2024-10-29 20:44:57.430 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。
    130. 

  130. [Save Log Job] 2024-10-29 20:44:57.430 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。
    131. 

  131. [Save Log Job] 2024-10-29 20:44:57.431 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPower，RF set Power:0。
    132. 

  132. [Save Log Job] 2024-10-29 20:44:57.431 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。
    133. 

  133. [Save Log Job] 2024-10-29 20:44:57.432 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。
    134. 

  134. [Save Log Job] 2024-10-29 20:44:57.432 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。
    135. 

  135. [Save Log Job] 2024-10-29 20:44:57.432 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas1， ramp to 45sccm。
    136. 

  136. [Save Log Job] 2024-10-29 20:44:57.432 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas2， ramp to 56sccm。
    137. 

  137. [Save Log Job] 2024-10-29 20:44:57.433 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas3， ramp to 66sccm。
    138. 

  138. [Save Log Job] 2024-10-29 20:44:57.433 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas4， ramp to 76sccm。
    139. 

  139. [Save Log Job] 2024-10-29 20:44:57.433 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas5， ramp to 86sccm。
    140. 

  140. [Save Log Job] 2024-10-29 20:44:57.433 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPowerOnOff，Set RF power Off。
    141. 

  141. [Save Log Job] 2024-10-29 20:44:57.484 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Start monitor pressure stability
    142. 

  142. [Save Log Job] 2024-10-29 20:45:27.515 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe''20241029204414-123'' end step 1
    143. 

  143. [Save Log Job] 2024-10-29 20:45:27.518 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Stop monitor pressure stability
    144. 

  144. [Save Log Job] 2024-10-29 20:45:27.518 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Recipe run completed，Recipe：20241029204414-123
    145. 

  145. Start time：2024/10/29 20:44:57
    146. 

  146. End time：2024/10/29 20:45:27
    147. 

  147. Total time：0:0:30
    148. 

  148. [Save Log Job] 2024-10-29 20:45:27.519 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Recipe completely run
    149. 

  149. [Save Log Job] 2024-10-29 20:45:27.573 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, wait for 10 seconds
    150. 

  150. [Save Log Job] 2024-10-29 20:45:29.524 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC1 ValveClose失败，原因：Valve keep open。
    151. 

  151. [Save Log Job] 2024-10-29 20:45:29.524 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC2 ValveClose失败，原因：Valve keep open。
    152. 

  152. [Save Log Job] 2024-10-29 20:45:29.524 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC3 ValveClose失败，原因：Valve keep open。
    153. 

  153. [Save Log Job] 2024-10-29 20:45:29.524 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC4 ValveClose失败，原因：Valve keep open。
    154. 

  154. [Save Log Job] 2024-10-29 20:45:29.524 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC5 ValveClose失败，原因：Valve keep open。
    155. 

  155. [Save Log Job] 2024-10-29 20:45:29.524 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门Process gas final valveClose失败，原因：Valve keep open。
    156. 

  156. [Save Log Job] 2024-10-29 20:45:37.652 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, RF Power Off
    157. 

  157. [Save Log Job] 2024-10-29 20:45:37.713 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, Stop all the gas flow
    158. 

  158. [Save Log Job] 2024-10-29 20:45:43.420 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, Close all the valves
    159. 

  159. [Save Log Job] 2024-10-29 20:45:43.482 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, close pump valve
    160. 

  160. [Save Log Job] 2024-10-29 20:45:45.492 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门Chamber pumping valveClose失败，原因：Valve keep open。
    161. 

  161. [Save Log Job] 2024-10-29 20:45:46.890 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, delay 3 seconds
    162. 

  162. [Save Log Job] 2024-10-29 20:45:49.995 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, vent 50 seconds
    163. 

  163. [Save Log Job] 2024-10-29 20:46:40.083 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, Close vent valve
    164. 

  164. [Save Log Job] 2024-10-29 20:46:41.025 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, PostProcess Finished in 1.2 minitues
    165. 

  165. [Save Log Job] 2024-10-29 20:46:41.025 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System complete run ''PostProcess''.
    166. 

  166. [Save Log Job] 2024-10-29 20:46:41.026 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventLotFinished
    167. 

  167. [Save Log Job] 2024-10-29 20:46:41.191 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
    168. 

  168. [Save Log Job] 2024-10-29 20:47:44.418 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation RunRecipe(123, )
    169. 

  169. [Save Log Job] 2024-10-29 20:47:44.420 LOG.INFO LOG.cs Line:61 Write() - System通知TM保存工艺程序20241029204744-123
    170. 

  170. [Save Log Job] 2024-10-29 20:47:44.420 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventLotStart
    171. 

  171. [Save Log Job] 2024-10-29 20:47:44.471 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check door status。
    172. 

  172. [Save Log Job] 2024-10-29 20:47:44.471 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：check chamber door。
    173. 

  173. [Save Log Job] 2024-10-29 20:47:44.472 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：check backpanel door。
    174. 

  174. [Save Log Job] 2024-10-29 20:47:44.472 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check pump status。
    175. 

  175. [Save Log Job] 2024-10-29 20:47:44.472 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Close all the valves。
    176. 

  176. [Save Log Job] 2024-10-29 20:47:44.533 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Open pumping valve。
    177. 

  177. [Save Log Job] 2024-10-29 20:47:44.605 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
    178. 

  178. [Save Log Job] 2024-10-29 20:47:46.149 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check chamber pressure。
    179. 

  179. [Save Log Job] 2024-10-29 20:48:36.493 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Pump below 100mTorr。
    180. 

  180. [Save Log Job] 2024-10-29 20:48:36.552 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：PreProcess Finished in 0.9 minitues。
    181. 

  181. [Save Log Job] 2024-10-29 20:48:36.553 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System complete run ''PreProcess''.
    182. 

  182. [Save Log Job] 2024-10-29 20:48:36.553 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Run Recipe 20241029204744-123
    183. 

  183. [Save Log Job] 2024-10-29 20:48:36.553 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe start run''20241029204744-123''
    184. 

  184. [Save Log Job] 2024-10-29 20:48:36.605 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe''20241029204744-123'' start run step 1：initial。
    185. 

  185. [Save Log Job] 2024-10-29 20:48:36.605 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。
    186. 

  186. [Save Log Job] 2024-10-29 20:48:36.605 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。
    187. 

  187. [Save Log Job] 2024-10-29 20:48:36.605 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。
    188. 

  188. [Save Log Job] 2024-10-29 20:48:36.605 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。
    189. 

  189. [Save Log Job] 2024-10-29 20:48:36.606 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。
    190. 

  190. [Save Log Job] 2024-10-29 20:48:36.606 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。
    191. 

  191. [Save Log Job] 2024-10-29 20:48:36.606 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。
    192. 

  192. [Save Log Job] 2024-10-29 20:48:36.606 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPower，RF set Power:0。
    193. 

  193. [Save Log Job] 2024-10-29 20:48:36.606 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。
    194. 

  194. [Save Log Job] 2024-10-29 20:48:36.606 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。
    195. 

  195. [Save Log Job] 2024-10-29 20:48:36.606 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。
    196. 

  196. [Save Log Job] 2024-10-29 20:48:36.606 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas1， ramp to 45sccm。
    197. 

  197. [Save Log Job] 2024-10-29 20:48:36.607 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas2， ramp to 56sccm。
    198. 

  198. [Save Log Job] 2024-10-29 20:48:36.607 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas3， ramp to 66sccm。
    199. 

  199. [Save Log Job] 2024-10-29 20:48:36.608 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas4， ramp to 76sccm。
    200. 

  200. [Save Log Job] 2024-10-29 20:48:36.608 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas5， ramp to 86sccm。
    201. 

  201. [Save Log Job] 2024-10-29 20:48:36.608 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPowerOnOff，Set RF power Off。
    202. 

  202. [Save Log Job] 2024-10-29 20:48:36.658 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Start monitor pressure stability
    203. 

  203. [Save Log Job] 2024-10-29 20:49:06.696 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe''20241029204744-123'' end step 1
    204. 

  204. [Save Log Job] 2024-10-29 20:49:06.697 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Stop monitor pressure stability
    205. 

  205. [Save Log Job] 2024-10-29 20:49:06.698 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Recipe run completed，Recipe：20241029204744-123
    206. 

  206. Start time：2024/10/29 20:48:36
    207. 

  207. End time：2024/10/29 20:49:06
    208. 

  208. Total time：0:0:30
    209. 

  209. [Save Log Job] 2024-10-29 20:49:06.698 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Recipe completely run
    210. 

  210. [Save Log Job] 2024-10-29 20:49:06.748 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, wait for 10 seconds
    211. 

  211. [Save Log Job] 2024-10-29 20:49:08.703 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC1 ValveClose失败，原因：Valve keep open。
    212. 

  212. [Save Log Job] 2024-10-29 20:49:08.703 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC2 ValveClose失败，原因：Valve keep open。
    213. 

  213. [Save Log Job] 2024-10-29 20:49:08.703 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC3 ValveClose失败，原因：Valve keep open。
    214. 

  214. [Save Log Job] 2024-10-29 20:49:08.704 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC4 ValveClose失败，原因：Valve keep open。
    215. 

  215. [Save Log Job] 2024-10-29 20:49:08.704 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC5 ValveClose失败，原因：Valve keep open。
    216. 

  216. [Save Log Job] 2024-10-29 20:49:08.704 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门Process gas final valveClose失败，原因：Valve keep open。
    217. 

  217. [Save Log Job] 2024-10-29 20:49:16.868 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, RF Power Off
    218. 

  218. [Save Log Job] 2024-10-29 20:49:16.927 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, Stop all the gas flow
    219. 

  219. [Save Log Job] 2024-10-29 20:49:22.740 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, Close all the valves
    220. 

  220. [Save Log Job] 2024-10-29 20:49:22.800 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, close pump valve
    221. 

  221. [Save Log Job] 2024-10-29 20:49:24.848 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门Chamber pumping valveClose失败，原因：Valve keep open。
    222. 

  222. [Save Log Job] 2024-10-29 20:49:26.186 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, delay 3 seconds
    223. 

  223. [Save Log Job] 2024-10-29 20:49:29.251 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, vent 50 seconds
    224. 

  224. [Save Log Job] 2024-10-29 20:50:19.341 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, Close vent valve
    225. 

  225. [Save Log Job] 2024-10-29 20:50:20.217 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, PostProcess Finished in 1.2 minitues
    226. 

  226. [Save Log Job] 2024-10-29 20:50:20.217 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System complete run ''PostProcess''.
    227. 

  227. [Save Log Job] 2024-10-29 20:50:20.218 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventLotFinished
    228. 

  228. [Save Log Job] 2024-10-29 20:50:23.974 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
    229. 

  229. <==  [Save Log Job] 2024-10-29 20:54:58.393 LOG.INFO LOG.cs Line:61 Write() - 完成对数据库表格的更新操作
    230. 

  230. [Save Log Job] 2024-10-29 20:54:59.494 LOG.INFO EventService.cs Line:60 Register() - 客户端168547b7-ec75-4da8-9bbb-75228dc66f88已连接
    231. 

  231. [Save Log Job] 2024-10-29 20:54:59.494 LOG.INFO EventService.cs Line:60 Register() - 客户端168547b7-ec75-4da8-9bbb-75228dc66f88已连接
    232. 

  232. [Save Log Job] 2024-10-29 20:54:59.662 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, <IoSensor id="SensorBackPanelDoor" display=""  schematicId="" unit="" di="DI_back_panle_door_sw" isLowAsNormal="false" infoText="BackPanel door is opened" warningText="" alarmText="" />
    233. 

  233. [Save Log Job] 2024-10-29 20:54:59.663 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, <IoSensor id="SensorPumpDoor"      display=""  schematicId="" unit="" di="DI_pump_door_sw"    isLowAsNormal="false" infoText="" warningText="" alarmText="" />
    234. 

  234. [Save Log Job] 2024-10-29 20:54:59.739 LOG.INFO LOG.cs Line:61 Write() - Routine System 初始化 Start
    235. 

  235. [Save Log Job] 2024-10-29 20:55:01.042 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetConfig(System_IsMesMode, True)
    236. 

  236. [Save Log Job] 2024-10-29 20:55:01.137 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
    237. 

  237. [Save Log Job] 2024-10-29 20:55:04.760 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Software will be expired in -5 days, at 10/24/2024 12:00:00 AM 。
    238. 

  238. [Save Log Job] 2024-10-29 20:55:10.846 LOG.INFO LOG.cs Line:61 Write() - 用户admin尝试登录系统
    239. 

  239. [Save Log Job] 2024-10-29 20:55:10.847 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin
    240. 

  240. [Save Log Job] 2024-10-29 20:55:10.861 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - User admin login
    241. 

  241. [Save Log Job] 2024-10-29 20:55:11.035 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin
    242. 

  242. [Save Log Job] 2024-10-29 20:55:15.293 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetAutoMode()
    243. 

  243. [Save Log Job] 2024-10-29 20:55:15.295 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentModeChanged
    244. 

  244. [Save Log Job] 2024-10-29 20:55:15.295 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System running mode changed to Auto Mode
    245. 

  245. [Save Log Job] 2024-10-29 20:55:19.087 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation RunRecipe(123, )
    246. 

  246. [Save Log Job] 2024-10-29 20:55:19.112 LOG.INFO LOG.cs Line:61 Write() - System通知TM保存工艺程序20241029205519-123
    247. 

  247. [Save Log Job] 2024-10-29 20:55:19.112 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventLotStart
    248. 

  248. [Save Log Job] 2024-10-29 20:55:19.166 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check door status。
    249. 

  249. [Save Log Job] 2024-10-29 20:55:19.166 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：check chamber door。
    250. 

  250. [Save Log Job] 2024-10-29 20:55:19.167 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：check backpanel door。
    251. 

  251. [Save Log Job] 2024-10-29 20:55:19.168 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check pump status。
    252. 

  252. [Save Log Job] 2024-10-29 20:55:19.170 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Close all the valves。
    253. 

  253. [Save Log Job] 2024-10-29 20:55:19.216 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
    254. 

  254. [Save Log Job] 2024-10-29 20:55:19.235 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Open pumping valve。
    255. 

  255. [Save Log Job] 2024-10-29 20:55:21.243 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门Chamber pumping valveOpen失败，原因：Valve keep closed 。
    256. 

  256. [Save Log Job] 2024-10-29 20:55:21.649 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check chamber pressure。
    257. 

  257. [Save Log Job] 2024-10-29 20:55:56.634 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Pump below 100mTorr。
    258. 

  258. [Save Log Job] 2024-10-29 20:55:56.696 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：PreProcess Finished in 0.6 minitues。
    259. 

  259. [Save Log Job] 2024-10-29 20:55:56.697 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System complete run ''PreProcess''.
    260. 

  260. [Save Log Job] 2024-10-29 20:55:56.698 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Run Recipe 20241029205519-123
    261. 

  261. [Save Log Job] 2024-10-29 20:55:56.699 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe start run''20241029205519-123''
    262. 

  262. [Save Log Job] 2024-10-29 20:55:56.753 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe''20241029205519-123'' start run step 1：initial。
    263. 

  263. [Save Log Job] 2024-10-29 20:55:56.754 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。
    264. 

  264. [Save Log Job] 2024-10-29 20:55:56.755 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。
    265. 

  265. [Save Log Job] 2024-10-29 20:55:56.756 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。
    266. 

  266. [Save Log Job] 2024-10-29 20:55:56.757 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。
    267. 

  267. [Save Log Job] 2024-10-29 20:55:56.757 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。
    268. 

  268. [Save Log Job] 2024-10-29 20:55:56.758 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。
    269. 

  269. [Save Log Job] 2024-10-29 20:55:56.758 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。
    270. 

  270. [Save Log Job] 2024-10-29 20:55:56.758 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPower，RF set Power:0。
    271. 

  271. [Save Log Job] 2024-10-29 20:55:56.759 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。
    272. 

  272. [Save Log Job] 2024-10-29 20:55:56.759 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。
    273. 

  273. [Save Log Job] 2024-10-29 20:55:56.759 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。
    274. 

  274. [Save Log Job] 2024-10-29 20:55:56.760 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas1， ramp to 45sccm。
    275. 

  275. [Save Log Job] 2024-10-29 20:55:56.760 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas2， ramp to 56sccm。
    276. 

  276. [Save Log Job] 2024-10-29 20:55:56.760 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas3， ramp to 66sccm。
    277. 

  277. [Save Log Job] 2024-10-29 20:55:56.760 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas4， ramp to 76sccm。
    278. 

  278. [Save Log Job] 2024-10-29 20:55:56.761 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas5， ramp to 86sccm。
    279. 

  279. [Save Log Job] 2024-10-29 20:55:56.761 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPowerOnOff，Set RF power Off。
    280. 

  280. [Save Log Job] 2024-10-29 20:55:56.814 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Start monitor pressure stability
    281. 

  281. [Save Log Job] 2024-10-29 20:56:26.825 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe''20241029205519-123'' end step 1
    282. 

  282. [Save Log Job] 2024-10-29 20:56:26.829 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Stop monitor pressure stability
    283. 

  283. [Save Log Job] 2024-10-29 20:56:26.829 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Recipe run completed，Recipe：20241029205519-123
    284. 

  284. Start time：2024/10/29 20:55:56
    285. 

  285. End time：2024/10/29 20:56:26
    286. 

  286. Total time：0:0:30
    287. 

  287. [Save Log Job] 2024-10-29 20:56:26.830 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Recipe completely run
    288. 

  288. [Save Log Job] 2024-10-29 20:56:26.883 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, wait for 10 seconds
    289. 

  289. [Save Log Job] 2024-10-29 20:56:28.842 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC1 ValveClose失败，原因：Valve keep open。
    290. 

  290. [Save Log Job] 2024-10-29 20:56:28.842 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC2 ValveClose失败，原因：Valve keep open。
    291. 

  291. [Save Log Job] 2024-10-29 20:56:28.842 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC3 ValveClose失败，原因：Valve keep open。
    292. 

  292. [Save Log Job] 2024-10-29 20:56:28.842 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC4 ValveClose失败，原因：Valve keep open。
    293. 

  293. [Save Log Job] 2024-10-29 20:56:28.842 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC5 ValveClose失败，原因：Valve keep open。
    294. 

  294. [Save Log Job] 2024-10-29 20:56:28.842 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门Process gas final valveClose失败，原因：Valve keep open。
    295. 

  295. [Save Log Job] 2024-10-29 20:56:36.970 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, RF Power Off
    296. 

  296. [Save Log Job] 2024-10-29 20:56:37.031 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, Stop all the gas flow
    297. 

  297. [Save Log Job] 2024-10-29 20:56:42.786 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, Close all the valves
    298. 

  298. [Save Log Job] 2024-10-29 20:56:42.847 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, close pump valve
    299. 

  299. [Save Log Job] 2024-10-29 20:56:44.851 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门Chamber pumping valveClose失败，原因：Valve keep open。
    300. 

  300. [Save Log Job] 2024-10-29 20:56:46.246 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, delay 3 seconds
    301. 

  301. [Save Log Job] 2024-10-29 20:56:49.355 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, vent 50 seconds
    302. 

  302. [Save Log Job] 2024-10-29 20:57:39.466 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, Close vent valve
    303. 

  303. [Save Log Job] 2024-10-29 20:57:40.343 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, PostProcess Finished in 1.2 minitues
    304. 

  304. [Save Log Job] 2024-10-29 20:57:40.343 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System complete run ''PostProcess''.
    305. 

  305. [Save Log Job] 2024-10-29 20:57:40.344 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventLotFinished
    306. 

  306. [Save Log Job] 2024-10-29 20:57:40.443 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
    307. 

  307. <==  [Save Log Job] 2024-10-29 21:27:31.997 LOG.INFO LOG.cs Line:61 Write() - 完成对数据库表格的更新操作
    308. 

  308. [Save Log Job] 2024-10-29 21:27:33.045 LOG.INFO EventService.cs Line:60 Register() - 客户端3699434d-33a0-43d9-b8cf-a6964ba7204a已连接
    309. 

  309. [Save Log Job] 2024-10-29 21:27:33.104 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, <IoSensor id="SensorBackPanelDoor" display=""  schematicId="" unit="" di="DI_back_panle_door_sw" isLowAsNormal="false" infoText="BackPanel door is opened" warningText="" alarmText="" />
    310. 

  310. [Save Log Job] 2024-10-29 21:27:33.105 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, <IoSensor id="SensorPumpDoor"      display=""  schematicId="" unit="" di="DI_pump_door_sw"    isLowAsNormal="false" infoText="" warningText="" alarmText="" />
    311. 

  311. [Save Log Job] 2024-10-29 21:27:33.209 LOG.INFO LOG.cs Line:61 Write() - Routine System 初始化 Start
    312. 

  312. [Save Log Job] 2024-10-29 21:27:34.471 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
    313. 

  313. [Save Log Job] 2024-10-29 21:27:34.549 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetConfig(System_IsMesMode, True)
    314. 

  314. [Save Log Job] 2024-10-29 21:27:38.222 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Software will be expired in -5 days, at 10/24/2024 12:00:00 AM 。
    315. 

  315. [Save Log Job] 2024-10-29 21:27:41.082 LOG.INFO LOG.cs Line:61 Write() - 用户admin尝试登录系统
    316. 

  316. [Save Log Job] 2024-10-29 21:27:41.083 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin
    317. 

  317. [Save Log Job] 2024-10-29 21:27:41.088 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - User admin login
    318. 

  318. [Save Log Job] 2024-10-29 21:27:41.252 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin
    319. 

  319. [Save Log Job] 2024-10-29 21:27:47.836 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetAutoMode()
    320. 

  320. [Save Log Job] 2024-10-29 21:27:47.837 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentModeChanged
    321. 

  321. [Save Log Job] 2024-10-29 21:27:47.837 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System running mode changed to Auto Mode
    322. 

  322. [Save Log Job] 2024-10-29 21:27:49.572 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation RunRecipe(123, )
    323. 

  323. [Save Log Job] 2024-10-29 21:27:49.597 LOG.INFO LOG.cs Line:61 Write() - System通知TM保存工艺程序20241029212749-123
    324. 

  324. [Save Log Job] 2024-10-29 21:27:49.597 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventLotStart
    325. 

  325. [Save Log Job] 2024-10-29 21:27:52.658 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
    326. 

  326. [Save Log Job] 2024-10-29 21:27:52.664 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
    327. 

  327. [Save Log Job] 2024-10-29 21:27:53.555 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check door status。
    328. 

  328. [Save Log Job] 2024-10-29 21:27:53.556 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：check chamber door。
    329. 

  329. [Save Log Job] 2024-10-29 21:27:53.556 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：check backpanel door。
    330. 

  330. [Save Log Job] 2024-10-29 21:27:53.567 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check pump status。
    331. 

  331. [Save Log Job] 2024-10-29 21:27:58.825 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Close all the valves。
    332. 

  332. [Save Log Job] 2024-10-29 21:28:01.225 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Open pumping valve。
    333. 

  333. [Save Log Job] 2024-10-29 21:28:02.060 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check chamber pressure。
    334. 

  334. [Save Log Job] 2024-10-29 21:28:40.852 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Pump below 100mTorr。
    335. 

  335. [Save Log Job] 2024-10-29 21:28:40.912 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：PreProcess Finished in 0.9 minitues。
    336. 

  336. [Save Log Job] 2024-10-29 21:28:40.912 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System complete run ''PreProcess''.
    337. 

  337. [Save Log Job] 2024-10-29 21:28:40.915 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Run Recipe 20241029212749-123
    338. 

  338. [Save Log Job] 2024-10-29 21:28:40.915 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe start run''20241029212749-123''
    339. 

  339. [Save Log Job] 2024-10-29 21:28:40.969 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe''20241029212749-123'' start run step 1：initial。
    340. 

  340. [Save Log Job] 2024-10-29 21:28:40.971 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。
    341. 

  341. [Save Log Job] 2024-10-29 21:28:40.971 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。
    342. 

  342. [Save Log Job] 2024-10-29 21:28:40.972 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。
    343. 

  343. [Save Log Job] 2024-10-29 21:28:40.972 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。
    344. 

  344. [Save Log Job] 2024-10-29 21:28:40.972 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。
    345. 

  345. [Save Log Job] 2024-10-29 21:28:40.973 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。
    346. 

  346. [Save Log Job] 2024-10-29 21:28:40.973 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。
    347. 

  347. [Save Log Job] 2024-10-29 21:28:40.973 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPower，RF set Power:0。
    348. 

  348. [Save Log Job] 2024-10-29 21:28:40.974 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。
    349. 

  349. [Save Log Job] 2024-10-29 21:28:40.974 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。
    350. 

  350. [Save Log Job] 2024-10-29 21:28:40.975 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。
    351. 

  351. [Save Log Job] 2024-10-29 21:28:40.975 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas1， ramp to 45sccm。
    352. 

  352. [Save Log Job] 2024-10-29 21:28:40.975 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas2， ramp to 56sccm。
    353. 

  353. [Save Log Job] 2024-10-29 21:28:40.975 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas3， ramp to 66sccm。
    354. 

  354. [Save Log Job] 2024-10-29 21:28:40.976 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas4， ramp to 76sccm。
    355. 

  355. [Save Log Job] 2024-10-29 21:28:40.976 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas5， ramp to 86sccm。
    356. 

  356. [Save Log Job] 2024-10-29 21:28:40.976 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPowerOnOff，Set RF power Off。
    357. 

  357. [Save Log Job] 2024-10-29 21:28:41.026 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Start monitor pressure stability
    358. 

  358. [Save Log Job] 2024-10-29 21:29:11.028 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe''20241029212749-123'' end step 1
    359. 

  359. [Save Log Job] 2024-10-29 21:29:11.031 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Stop monitor pressure stability
    360. 

  360. [Save Log Job] 2024-10-29 21:29:11.032 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Recipe run completed，Recipe：20241029212749-123
    361. 

  361. Start time：2024/10/29 21:28:40
    362. 

  362. End time：2024/10/29 21:29:11
    363. 

  363. Total time：0:0:30
    364. 

  364. [Save Log Job] 2024-10-29 21:29:11.032 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Recipe completely run
    365. 

  365. [Save Log Job] 2024-10-29 21:29:11.087 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, wait for 10 seconds
    366. 

  366. [Save Log Job] 2024-10-29 21:29:13.064 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC1 ValveClose失败，原因：Valve keep open。
    367. 

  367. [Save Log Job] 2024-10-29 21:29:13.064 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC2 ValveClose失败，原因：Valve keep open。
    368. 

  368. [Save Log Job] 2024-10-29 21:29:13.064 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC3 ValveClose失败，原因：Valve keep open。
    369. 

  369. [Save Log Job] 2024-10-29 21:29:13.064 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC4 ValveClose失败，原因：Valve keep open。
    370. 

  370. [Save Log Job] 2024-10-29 21:29:13.065 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC5 ValveClose失败，原因：Valve keep open。
    371. 

  371. [Save Log Job] 2024-10-29 21:29:13.065 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门Process gas final valveClose失败，原因：Valve keep open。
    372. 

  372. [Save Log Job] 2024-10-29 21:29:21.169 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, RF Power Off
    373. 

  373. [Save Log Job] 2024-10-29 21:29:21.233 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, Stop all the gas flow
    374. 

  374. [Save Log Job] 2024-10-29 21:29:27.096 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, Close all the valves
    375. 

  375. [Save Log Job] 2024-10-29 21:29:27.156 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, close pump valve
    376. 

  376. [Save Log Job] 2024-10-29 21:29:29.197 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门Chamber pumping valveClose失败，原因：Valve keep open。
    377. 

  377. [Save Log Job] 2024-10-29 21:29:30.520 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, delay 3 seconds
    378. 

  378. [Save Log Job] 2024-10-29 21:29:33.638 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, vent 50 seconds
    379. 

  379. [Save Log Job] 2024-10-29 21:30:23.731 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, Close vent valve
    380. 

  380. [Save Log Job] 2024-10-29 21:30:24.671 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, PostProcess Finished in 1.2 minitues
    381. 

  381. [Save Log Job] 2024-10-29 21:30:24.671 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System complete run ''PostProcess''.
    382. 

  382. [Save Log Job] 2024-10-29 21:30:24.672 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventLotFinished
    383. 

  383. [Save Log Job] 2024-10-29 21:30:24.767 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
    384. 

  384. [Save Log Job] 2024-10-29 21:32:05.480 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation RunRecipe(123, )
    385. 

  385. [Save Log Job] 2024-10-29 21:32:05.482 LOG.INFO LOG.cs Line:61 Write() - System通知TM保存工艺程序20241029213205-123
    386. 

  386. [Save Log Job] 2024-10-29 21:32:05.482 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventLotStart
    387. 

  387. [Save Log Job] 2024-10-29 21:32:05.485 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged
    388. 

  388. [Save Log Job] 2024-10-29 21:32:05.533 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check door status。
    389. 

  389. [Save Log Job] 2024-10-29 21:32:05.533 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：check chamber door。
    390. 

  390. [Save Log Job] 2024-10-29 21:32:05.534 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：check backpanel door。
    391. 

  391. [Save Log Job] 2024-10-29 21:32:05.534 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check pump status。
    392. 

  392. [Save Log Job] 2024-10-29 21:32:05.534 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Close all the valves。
    393. 

  393. [Save Log Job] 2024-10-29 21:32:05.592 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Open pumping valve。
    394. 

  394. [Save Log Job] 2024-10-29 21:32:07.634 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门Chamber pumping valveOpen失败，原因：Valve keep closed 。
    395. 

  395. [Save Log Job] 2024-10-29 21:32:08.210 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check chamber pressure。
    396. 

  396. [Save Log Job] 2024-10-29 21:33:02.387 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Pump below 100mTorr。
    397. 

  397. [Save Log Job] 2024-10-29 21:33:02.432 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：PreProcess Finished in 0.9 minitues。
    398. 

  398. [Save Log Job] 2024-10-29 21:33:02.432 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System complete run ''PreProcess''.
    399. 

  399. [Save Log Job] 2024-10-29 21:33:02.433 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Run Recipe 20241029213205-123
    400. 

  400. [Save Log Job] 2024-10-29 21:33:02.433 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe start run''20241029213205-123''
    401. 

  401. [Save Log Job] 2024-10-29 21:33:02.484 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe''20241029213205-123'' start run step 1：initial。
    402. 

  402. [Save Log Job] 2024-10-29 21:33:02.484 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。
    403. 

  403. [Save Log Job] 2024-10-29 21:33:02.484 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。
    404. 

  404. [Save Log Job] 2024-10-29 21:33:02.485 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。
    405. 

  405. [Save Log Job] 2024-10-29 21:33:02.485 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。
    406. 

  406. [Save Log Job] 2024-10-29 21:33:02.485 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。
    407. 

  407. [Save Log Job] 2024-10-29 21:33:02.485 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。
    408. 

  408. [Save Log Job] 2024-10-29 21:33:02.485 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。
    409. 

  409. [Save Log Job] 2024-10-29 21:33:02.485 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPower，RF set Power:0。
    410. 

  410. [Save Log Job] 2024-10-29 21:33:02.485 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。
    411. 

  411. [Save Log Job] 2024-10-29 21:33:02.485 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。
    412. 

  412. [Save Log Job] 2024-10-29 21:33:02.485 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。
    413. 

  413. [Save Log Job] 2024-10-29 21:33:02.485 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas1， ramp to 45sccm。
    414. 

  414. [Save Log Job] 2024-10-29 21:33:02.485 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas2， ramp to 56sccm。
    415. 

  415. [Save Log Job] 2024-10-29 21:33:02.486 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas3， ramp to 66sccm。
    416. 

  416. [Save Log Job] 2024-10-29 21:33:02.486 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas4， ramp to 76sccm。
    417. 

  417. [Save Log Job] 2024-10-29 21:33:02.486 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas5， ramp to 86sccm。
    418. 

  418. [Save Log Job] 2024-10-29 21:33:02.487 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPowerOnOff，Set RF power Off。
    419. 

  419. [Save Log Job] 2024-10-29 21:33:02.537 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Start monitor pressure stability
    420. 

  420. [Save Log Job] 2024-10-29 21:33:32.540 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe''20241029213205-123'' end step 1
    421. 

  421. [Save Log Job] 2024-10-29 21:33:32.543 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Stop monitor pressure stability
    422. 

  422. [Save Log Job] 2024-10-29 21:33:32.543 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Recipe run completed，Recipe：20241029213205-123
    423. 

  423. Start time：2024/10/29 21:33:02
    424. 

  424. End time：2024/10/29 21:33:32
    425. 

  425. Total time：0:0:30
    426. 

  426. [Save Log Job] 2024-10-29 21:33:32.543 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Recipe completely run
    427. 

  427. [Save Log Job] 2024-10-29 21:33:32.593 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, wait for 10 seconds
    428. 

  428. [Save Log Job] 2024-10-29 21:33:34.570 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC1 ValveClose失败，原因：Valve keep open。
    429. 

  429. [Save Log Job] 2024-10-29 21:33:34.570 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC2 ValveClose失败，原因：Valve keep open。
    430. 

  430. [Save Log Job] 2024-10-29 21:33:34.570 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC3 ValveClose失败，原因：Valve keep open。
    431. 

  431. [Save Log Job] 2024-10-29 21:33:34.570 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC4 ValveClose失败，原因：Valve keep open。
    432. 

  432. [Save Log Job] 2024-10-29 21:33:34.570 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC5 ValveClose失败，原因：Valve keep open。
    433. 

  433. [Save Log Job] 2024-10-29 21:33:34.570 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门Process gas final valveClose失败，原因：Valve keep open。
    434. 

  434. [Save Log Job] 2024-10-29 21:33:42.655 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, RF Power Off
    435. 

  435. [Save Log Job] 2024-10-29 21:33:42.713 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, Stop all the gas flow
    436. 

  436. [Save Log Job] 2024-10-29 21:33:48.516 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, Close all the valves
    437. 

  437. [Save Log Job] 2024-10-29 21:33:48.575 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, close pump valve
    438. 

  438. [Save Log Job] 2024-10-29 21:33:50.601 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门Chamber pumping valveClose失败，原因：Valve keep open。
    439. 

  439. [Save Log Job] 2024-10-29 21:33:52.061 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, delay 3 seconds
    440. 

  440. [Save Log Job] 2024-10-29 21:33:55.158 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, vent 50 seconds
    441. 

  441. [Save Log Job] 2024-10-29 21:34:45.267 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, Close vent valve
    442. 

  442. [Save Log Job] 2024-10-29 21:34:46.090 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, PostProcess Finished in 1.2 minitues
    443. 

  443. [Save Log Job] 2024-10-29 21:34:46.090 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System complete run ''PostProcess''.
    444. 

  444. [Save Log Job] 2024-10-29 21:34:46.090 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventLotFinished
    445. 

  445.