<== [Save Log Job] 2024-10-29 18:57:45.485 LOG.INFO LOG.cs Line:61 Write() - 完成对数据库表格的更新操作 [Save Log Job] 2024-10-29 18:57:46.880 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, [Save Log Job] 2024-10-29 18:57:46.881 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, [Save Log Job] 2024-10-29 18:57:46.894 LOG.INFO EventService.cs Line:60 Register() - 客户端e8b54775-89ae-4aff-9abe-249b9b16d97a已连接 [Save Log Job] 2024-10-29 18:57:46.954 LOG.INFO LOG.cs Line:61 Write() - Routine System 初始化 Start [Save Log Job] 2024-10-29 18:57:48.261 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged [Save Log Job] 2024-10-29 18:57:49.704 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetConfig(System_IsMesMode, True) [Save Log Job] 2024-10-29 18:57:51.968 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Software will be expired in -5 days, at 10/24/2024 12:00:00 AM 。 [Save Log Job] 2024-10-29 18:58:00.749 LOG.INFO LOG.cs Line:61 Write() - 用户admin尝试登录系统 [Save Log Job] 2024-10-29 18:58:00.751 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin [Save Log Job] 2024-10-29 18:58:00.758 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - User admin login [Save Log Job] 2024-10-29 18:58:00.942 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin <== [Save Log Job] 2024-10-29 20:37:13.371 LOG.INFO LOG.cs Line:61 Write() - 完成对数据库表格的更新操作 [Save Log Job] 2024-10-29 20:37:14.192 LOG.INFO EventService.cs Line:60 Register() - 客户端0725865a-20c8-4be8-9579-0ebe69486361已连接 [Save Log Job] 2024-10-29 20:37:14.383 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, [Save Log Job] 2024-10-29 20:37:14.383 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, [Save Log Job] 2024-10-29 20:37:14.448 LOG.INFO LOG.cs Line:61 Write() - Routine System 初始化 Start [Save Log Job] 2024-10-29 20:37:15.806 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged [Save Log Job] 2024-10-29 20:37:16.287 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetConfig(System_IsMesMode, True) [Save Log Job] 2024-10-29 20:37:19.463 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Software will be expired in -5 days, at 10/24/2024 12:00:00 AM 。 [Save Log Job] 2024-10-29 20:37:24.676 LOG.INFO LOG.cs Line:61 Write() - 用户admin尝试登录系统 [Save Log Job] 2024-10-29 20:37:24.676 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin [Save Log Job] 2024-10-29 20:37:24.690 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - User admin login [Save Log Job] 2024-10-29 20:37:24.868 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin [Save Log Job] 2024-10-29 20:37:41.851 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetAutoMode() [Save Log Job] 2024-10-29 20:37:41.853 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentModeChanged [Save Log Job] 2024-10-29 20:37:41.853 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System running mode changed to Auto Mode [Save Log Job] 2024-10-29 20:37:51.708 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation RunRecipe(123, ) [Save Log Job] 2024-10-29 20:37:51.768 LOG.INFO LOG.cs Line:61 Write() - System通知TM保存工艺程序20241029203751-123 [Save Log Job] 2024-10-29 20:37:51.768 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventLotStart [Save Log Job] 2024-10-29 20:37:51.824 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check door status。 [Save Log Job] 2024-10-29 20:37:51.824 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：check chamber door。 [Save Log Job] 2024-10-29 20:37:51.825 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：check backpanel door。 [Save Log Job] 2024-10-29 20:37:51.826 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check pump status。 [Save Log Job] 2024-10-29 20:37:51.827 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Close all the valves。 [Save Log Job] 2024-10-29 20:37:51.890 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Open pumping valve。 [Save Log Job] 2024-10-29 20:37:51.947 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged [Save Log Job] 2024-10-29 20:37:53.945 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门Chamber pumping valveOpen失败，原因：Valve keep closed 。 [Save Log Job] 2024-10-29 20:37:55.536 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check chamber pressure。 [Save Log Job] 2024-10-29 20:38:30.456 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Pump below 100mTorr。 [Save Log Job] 2024-10-29 20:38:30.516 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：PreProcess Finished in 0.6 minitues。 [Save Log Job] 2024-10-29 20:38:30.516 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System complete run ''PreProcess''. [Save Log Job] 2024-10-29 20:38:30.519 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Run Recipe 20241029203751-123 [Save Log Job] 2024-10-29 20:38:30.519 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe start run''20241029203751-123'' [Save Log Job] 2024-10-29 20:38:30.573 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe''20241029203751-123'' start run step 1：initial。 [Save Log Job] 2024-10-29 20:38:30.574 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。 [Save Log Job] 2024-10-29 20:38:30.574 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。 [Save Log Job] 2024-10-29 20:38:30.575 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。 [Save Log Job] 2024-10-29 20:38:30.575 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。 [Save Log Job] 2024-10-29 20:38:30.576 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。 [Save Log Job] 2024-10-29 20:38:30.576 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。 [Save Log Job] 2024-10-29 20:38:30.576 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。 [Save Log Job] 2024-10-29 20:38:30.577 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPower，RF set Power:0。 [Save Log Job] 2024-10-29 20:38:30.577 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。 [Save Log Job] 2024-10-29 20:38:30.577 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。 [Save Log Job] 2024-10-29 20:38:30.578 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。 [Save Log Job] 2024-10-29 20:38:30.578 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas1， ramp to 45sccm。 [Save Log Job] 2024-10-29 20:38:30.578 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas2， ramp to 56sccm。 [Save Log Job] 2024-10-29 20:38:30.578 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas3， ramp to 66sccm。 [Save Log Job] 2024-10-29 20:38:30.578 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas4， ramp to 76sccm。 [Save Log Job] 2024-10-29 20:38:30.578 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas5， ramp to 86sccm。 [Save Log Job] 2024-10-29 20:38:30.579 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPowerOnOff，Set RF power Off。 [Save Log Job] 2024-10-29 20:38:30.631 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Start monitor pressure stability [Save Log Job] 2024-10-29 20:39:00.627 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe''20241029203751-123'' end step 1 [Save Log Job] 2024-10-29 20:39:00.629 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Stop monitor pressure stability [Save Log Job] 2024-10-29 20:39:00.629 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Recipe run completed，Recipe：20241029203751-123 Start time：2024/10/29 20:38:30 End time：2024/10/29 20:39:00 Total time：0:0:30 [Save Log Job] 2024-10-29 20:39:00.630 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Recipe completely run [Save Log Job] 2024-10-29 20:39:00.684 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, wait for 10 seconds [Save Log Job] 2024-10-29 20:39:02.667 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC1 ValveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-29 20:39:02.667 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC2 ValveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-29 20:39:02.667 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC3 ValveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-29 20:39:02.668 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC4 ValveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-29 20:39:02.668 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC5 ValveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-29 20:39:02.668 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门Process gas final valveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-29 20:39:10.757 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, RF Power Off [Save Log Job] 2024-10-29 20:39:10.819 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, Stop all the gas flow [Save Log Job] 2024-10-29 20:39:16.715 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, Close all the valves [Save Log Job] 2024-10-29 20:39:16.776 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, close pump valve [Save Log Job] 2024-10-29 20:39:18.782 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门Chamber pumping valveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-29 20:39:20.188 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, delay 3 seconds [Save Log Job] 2024-10-29 20:39:23.292 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, vent 50 seconds [Save Log Job] 2024-10-29 20:40:13.379 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, Close vent valve [Save Log Job] 2024-10-29 20:40:14.198 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, PostProcess Finished in 1.2 minitues [Save Log Job] 2024-10-29 20:40:14.199 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System complete run ''PostProcess''. [Save Log Job] 2024-10-29 20:40:19.361 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventLotFinished [Save Log Job] 2024-10-29 20:40:47.003 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged <== [Save Log Job] 2024-10-29 20:43:40.043 LOG.INFO LOG.cs Line:61 Write() - 完成对数据库表格的更新操作 [Save Log Job] 2024-10-29 20:43:41.056 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, [Save Log Job] 2024-10-29 20:43:41.057 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, [Save Log Job] 2024-10-29 20:43:41.079 LOG.INFO EventService.cs Line:60 Register() - 客户端ec99f926-b669-4e44-a5f4-a71ffd99268f已连接 [Save Log Job] 2024-10-29 20:43:41.079 LOG.INFO EventService.cs Line:60 Register() - 客户端ec99f926-b669-4e44-a5f4-a71ffd99268f已连接 [Save Log Job] 2024-10-29 20:43:41.143 LOG.INFO LOG.cs Line:61 Write() - Routine System 初始化 Start [Save Log Job] 2024-10-29 20:43:42.569 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged [Save Log Job] 2024-10-29 20:43:42.585 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetConfig(System_IsMesMode, True) [Save Log Job] 2024-10-29 20:43:46.155 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Software will be expired in -5 days, at 10/24/2024 12:00:00 AM 。 [Save Log Job] 2024-10-29 20:44:00.057 LOG.INFO LOG.cs Line:61 Write() - 用户admin尝试登录系统 [Save Log Job] 2024-10-29 20:44:00.059 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin [Save Log Job] 2024-10-29 20:44:00.066 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - User admin login [Save Log Job] 2024-10-29 20:44:00.246 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin [Save Log Job] 2024-10-29 20:44:10.300 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetAutoMode() [Save Log Job] 2024-10-29 20:44:10.302 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentModeChanged [Save Log Job] 2024-10-29 20:44:10.302 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System running mode changed to Auto Mode [Save Log Job] 2024-10-29 20:44:14.349 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation RunRecipe(123, ) [Save Log Job] 2024-10-29 20:44:14.371 LOG.INFO LOG.cs Line:61 Write() - System通知TM保存工艺程序20241029204414-123 [Save Log Job] 2024-10-29 20:44:14.371 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventLotStart [Save Log Job] 2024-10-29 20:44:14.427 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check door status。 [Save Log Job] 2024-10-29 20:44:14.427 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：check chamber door。 [Save Log Job] 2024-10-29 20:44:14.427 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：check backpanel door。 [Save Log Job] 2024-10-29 20:44:14.428 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check pump status。 [Save Log Job] 2024-10-29 20:44:14.430 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Close all the valves。 [Save Log Job] 2024-10-29 20:44:14.483 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged [Save Log Job] 2024-10-29 20:44:14.494 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Open pumping valve。 [Save Log Job] 2024-10-29 20:44:16.521 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门Chamber pumping valveOpen失败，原因：Valve keep closed 。 [Save Log Job] 2024-10-29 20:44:18.409 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check chamber pressure。 [Save Log Job] 2024-10-29 20:44:57.310 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Pump below 100mTorr。 [Save Log Job] 2024-10-29 20:44:57.370 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：PreProcess Finished in 0.7 minitues。 [Save Log Job] 2024-10-29 20:44:57.370 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System complete run ''PreProcess''. [Save Log Job] 2024-10-29 20:44:57.372 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Run Recipe 20241029204414-123 [Save Log Job] 2024-10-29 20:44:57.373 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe start run''20241029204414-123'' [Save Log Job] 2024-10-29 20:44:57.426 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe''20241029204414-123'' start run step 1：initial。 [Save Log Job] 2024-10-29 20:44:57.427 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。 [Save Log Job] 2024-10-29 20:44:57.428 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。 [Save Log Job] 2024-10-29 20:44:57.428 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。 [Save Log Job] 2024-10-29 20:44:57.429 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。 [Save Log Job] 2024-10-29 20:44:57.429 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。 [Save Log Job] 2024-10-29 20:44:57.430 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。 [Save Log Job] 2024-10-29 20:44:57.430 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。 [Save Log Job] 2024-10-29 20:44:57.431 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPower，RF set Power:0。 [Save Log Job] 2024-10-29 20:44:57.431 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。 [Save Log Job] 2024-10-29 20:44:57.432 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。 [Save Log Job] 2024-10-29 20:44:57.432 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。 [Save Log Job] 2024-10-29 20:44:57.432 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas1， ramp to 45sccm。 [Save Log Job] 2024-10-29 20:44:57.432 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas2， ramp to 56sccm。 [Save Log Job] 2024-10-29 20:44:57.433 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas3， ramp to 66sccm。 [Save Log Job] 2024-10-29 20:44:57.433 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas4， ramp to 76sccm。 [Save Log Job] 2024-10-29 20:44:57.433 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas5， ramp to 86sccm。 [Save Log Job] 2024-10-29 20:44:57.433 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPowerOnOff，Set RF power Off。 [Save Log Job] 2024-10-29 20:44:57.484 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Start monitor pressure stability [Save Log Job] 2024-10-29 20:45:27.515 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe''20241029204414-123'' end step 1 [Save Log Job] 2024-10-29 20:45:27.518 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Stop monitor pressure stability [Save Log Job] 2024-10-29 20:45:27.518 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Recipe run completed，Recipe：20241029204414-123 Start time：2024/10/29 20:44:57 End time：2024/10/29 20:45:27 Total time：0:0:30 [Save Log Job] 2024-10-29 20:45:27.519 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Recipe completely run [Save Log Job] 2024-10-29 20:45:27.573 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, wait for 10 seconds [Save Log Job] 2024-10-29 20:45:29.524 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC1 ValveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-29 20:45:29.524 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC2 ValveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-29 20:45:29.524 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC3 ValveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-29 20:45:29.524 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC4 ValveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-29 20:45:29.524 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC5 ValveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-29 20:45:29.524 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门Process gas final valveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-29 20:45:37.652 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, RF Power Off [Save Log Job] 2024-10-29 20:45:37.713 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, Stop all the gas flow [Save Log Job] 2024-10-29 20:45:43.420 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, Close all the valves [Save Log Job] 2024-10-29 20:45:43.482 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, close pump valve [Save Log Job] 2024-10-29 20:45:45.492 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门Chamber pumping valveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-29 20:45:46.890 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, delay 3 seconds [Save Log Job] 2024-10-29 20:45:49.995 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, vent 50 seconds [Save Log Job] 2024-10-29 20:46:40.083 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, Close vent valve [Save Log Job] 2024-10-29 20:46:41.025 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, PostProcess Finished in 1.2 minitues [Save Log Job] 2024-10-29 20:46:41.025 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System complete run ''PostProcess''. [Save Log Job] 2024-10-29 20:46:41.026 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventLotFinished [Save Log Job] 2024-10-29 20:46:41.191 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged [Save Log Job] 2024-10-29 20:47:44.418 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation RunRecipe(123, ) [Save Log Job] 2024-10-29 20:47:44.420 LOG.INFO LOG.cs Line:61 Write() - System通知TM保存工艺程序20241029204744-123 [Save Log Job] 2024-10-29 20:47:44.420 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventLotStart [Save Log Job] 2024-10-29 20:47:44.471 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check door status。 [Save Log Job] 2024-10-29 20:47:44.471 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：check chamber door。 [Save Log Job] 2024-10-29 20:47:44.472 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：check backpanel door。 [Save Log Job] 2024-10-29 20:47:44.472 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check pump status。 [Save Log Job] 2024-10-29 20:47:44.472 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Close all the valves。 [Save Log Job] 2024-10-29 20:47:44.533 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Open pumping valve。 [Save Log Job] 2024-10-29 20:47:44.605 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged [Save Log Job] 2024-10-29 20:47:46.149 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check chamber pressure。 [Save Log Job] 2024-10-29 20:48:36.493 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Pump below 100mTorr。 [Save Log Job] 2024-10-29 20:48:36.552 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：PreProcess Finished in 0.9 minitues。 [Save Log Job] 2024-10-29 20:48:36.553 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System complete run ''PreProcess''. [Save Log Job] 2024-10-29 20:48:36.553 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Run Recipe 20241029204744-123 [Save Log Job] 2024-10-29 20:48:36.553 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe start run''20241029204744-123'' [Save Log Job] 2024-10-29 20:48:36.605 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe''20241029204744-123'' start run step 1：initial。 [Save Log Job] 2024-10-29 20:48:36.605 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。 [Save Log Job] 2024-10-29 20:48:36.605 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。 [Save Log Job] 2024-10-29 20:48:36.605 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。 [Save Log Job] 2024-10-29 20:48:36.605 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。 [Save Log Job] 2024-10-29 20:48:36.606 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。 [Save Log Job] 2024-10-29 20:48:36.606 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。 [Save Log Job] 2024-10-29 20:48:36.606 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。 [Save Log Job] 2024-10-29 20:48:36.606 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPower，RF set Power:0。 [Save Log Job] 2024-10-29 20:48:36.606 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。 [Save Log Job] 2024-10-29 20:48:36.606 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。 [Save Log Job] 2024-10-29 20:48:36.606 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。 [Save Log Job] 2024-10-29 20:48:36.606 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas1， ramp to 45sccm。 [Save Log Job] 2024-10-29 20:48:36.607 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas2， ramp to 56sccm。 [Save Log Job] 2024-10-29 20:48:36.607 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas3， ramp to 66sccm。 [Save Log Job] 2024-10-29 20:48:36.608 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas4， ramp to 76sccm。 [Save Log Job] 2024-10-29 20:48:36.608 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas5， ramp to 86sccm。 [Save Log Job] 2024-10-29 20:48:36.608 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPowerOnOff，Set RF power Off。 [Save Log Job] 2024-10-29 20:48:36.658 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Start monitor pressure stability [Save Log Job] 2024-10-29 20:49:06.696 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe''20241029204744-123'' end step 1 [Save Log Job] 2024-10-29 20:49:06.697 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Stop monitor pressure stability [Save Log Job] 2024-10-29 20:49:06.698 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Recipe run completed，Recipe：20241029204744-123 Start time：2024/10/29 20:48:36 End time：2024/10/29 20:49:06 Total time：0:0:30 [Save Log Job] 2024-10-29 20:49:06.698 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Recipe completely run [Save Log Job] 2024-10-29 20:49:06.748 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, wait for 10 seconds [Save Log Job] 2024-10-29 20:49:08.703 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC1 ValveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-29 20:49:08.703 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC2 ValveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-29 20:49:08.703 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC3 ValveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-29 20:49:08.704 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC4 ValveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-29 20:49:08.704 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC5 ValveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-29 20:49:08.704 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门Process gas final valveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-29 20:49:16.868 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, RF Power Off [Save Log Job] 2024-10-29 20:49:16.927 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, Stop all the gas flow [Save Log Job] 2024-10-29 20:49:22.740 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, Close all the valves [Save Log Job] 2024-10-29 20:49:22.800 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, close pump valve [Save Log Job] 2024-10-29 20:49:24.848 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门Chamber pumping valveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-29 20:49:26.186 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, delay 3 seconds [Save Log Job] 2024-10-29 20:49:29.251 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, vent 50 seconds [Save Log Job] 2024-10-29 20:50:19.341 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, Close vent valve [Save Log Job] 2024-10-29 20:50:20.217 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, PostProcess Finished in 1.2 minitues [Save Log Job] 2024-10-29 20:50:20.217 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System complete run ''PostProcess''. [Save Log Job] 2024-10-29 20:50:20.218 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventLotFinished [Save Log Job] 2024-10-29 20:50:23.974 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged <== [Save Log Job] 2024-10-29 20:54:58.393 LOG.INFO LOG.cs Line:61 Write() - 完成对数据库表格的更新操作 [Save Log Job] 2024-10-29 20:54:59.494 LOG.INFO EventService.cs Line:60 Register() - 客户端168547b7-ec75-4da8-9bbb-75228dc66f88已连接 [Save Log Job] 2024-10-29 20:54:59.494 LOG.INFO EventService.cs Line:60 Register() - 客户端168547b7-ec75-4da8-9bbb-75228dc66f88已连接 [Save Log Job] 2024-10-29 20:54:59.662 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, [Save Log Job] 2024-10-29 20:54:59.663 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, [Save Log Job] 2024-10-29 20:54:59.739 LOG.INFO LOG.cs Line:61 Write() - Routine System 初始化 Start [Save Log Job] 2024-10-29 20:55:01.042 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetConfig(System_IsMesMode, True) [Save Log Job] 2024-10-29 20:55:01.137 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged [Save Log Job] 2024-10-29 20:55:04.760 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Software will be expired in -5 days, at 10/24/2024 12:00:00 AM 。 [Save Log Job] 2024-10-29 20:55:10.846 LOG.INFO LOG.cs Line:61 Write() - 用户admin尝试登录系统 [Save Log Job] 2024-10-29 20:55:10.847 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin [Save Log Job] 2024-10-29 20:55:10.861 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - User admin login [Save Log Job] 2024-10-29 20:55:11.035 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin [Save Log Job] 2024-10-29 20:55:15.293 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetAutoMode() [Save Log Job] 2024-10-29 20:55:15.295 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentModeChanged [Save Log Job] 2024-10-29 20:55:15.295 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System running mode changed to Auto Mode [Save Log Job] 2024-10-29 20:55:19.087 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation RunRecipe(123, ) [Save Log Job] 2024-10-29 20:55:19.112 LOG.INFO LOG.cs Line:61 Write() - System通知TM保存工艺程序20241029205519-123 [Save Log Job] 2024-10-29 20:55:19.112 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventLotStart [Save Log Job] 2024-10-29 20:55:19.166 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check door status。 [Save Log Job] 2024-10-29 20:55:19.166 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：check chamber door。 [Save Log Job] 2024-10-29 20:55:19.167 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：check backpanel door。 [Save Log Job] 2024-10-29 20:55:19.168 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check pump status。 [Save Log Job] 2024-10-29 20:55:19.170 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Close all the valves。 [Save Log Job] 2024-10-29 20:55:19.216 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged [Save Log Job] 2024-10-29 20:55:19.235 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Open pumping valve。 [Save Log Job] 2024-10-29 20:55:21.243 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门Chamber pumping valveOpen失败，原因：Valve keep closed 。 [Save Log Job] 2024-10-29 20:55:21.649 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check chamber pressure。 [Save Log Job] 2024-10-29 20:55:56.634 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Pump below 100mTorr。 [Save Log Job] 2024-10-29 20:55:56.696 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：PreProcess Finished in 0.6 minitues。 [Save Log Job] 2024-10-29 20:55:56.697 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System complete run ''PreProcess''. [Save Log Job] 2024-10-29 20:55:56.698 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Run Recipe 20241029205519-123 [Save Log Job] 2024-10-29 20:55:56.699 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe start run''20241029205519-123'' [Save Log Job] 2024-10-29 20:55:56.753 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe''20241029205519-123'' start run step 1：initial。 [Save Log Job] 2024-10-29 20:55:56.754 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。 [Save Log Job] 2024-10-29 20:55:56.755 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。 [Save Log Job] 2024-10-29 20:55:56.756 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。 [Save Log Job] 2024-10-29 20:55:56.757 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。 [Save Log Job] 2024-10-29 20:55:56.757 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。 [Save Log Job] 2024-10-29 20:55:56.758 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。 [Save Log Job] 2024-10-29 20:55:56.758 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。 [Save Log Job] 2024-10-29 20:55:56.758 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPower，RF set Power:0。 [Save Log Job] 2024-10-29 20:55:56.759 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。 [Save Log Job] 2024-10-29 20:55:56.759 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。 [Save Log Job] 2024-10-29 20:55:56.759 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。 [Save Log Job] 2024-10-29 20:55:56.760 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas1， ramp to 45sccm。 [Save Log Job] 2024-10-29 20:55:56.760 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas2， ramp to 56sccm。 [Save Log Job] 2024-10-29 20:55:56.760 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas3， ramp to 66sccm。 [Save Log Job] 2024-10-29 20:55:56.760 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas4， ramp to 76sccm。 [Save Log Job] 2024-10-29 20:55:56.761 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas5， ramp to 86sccm。 [Save Log Job] 2024-10-29 20:55:56.761 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPowerOnOff，Set RF power Off。 [Save Log Job] 2024-10-29 20:55:56.814 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Start monitor pressure stability [Save Log Job] 2024-10-29 20:56:26.825 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe''20241029205519-123'' end step 1 [Save Log Job] 2024-10-29 20:56:26.829 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Stop monitor pressure stability [Save Log Job] 2024-10-29 20:56:26.829 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Recipe run completed，Recipe：20241029205519-123 Start time：2024/10/29 20:55:56 End time：2024/10/29 20:56:26 Total time：0:0:30 [Save Log Job] 2024-10-29 20:56:26.830 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Recipe completely run [Save Log Job] 2024-10-29 20:56:26.883 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, wait for 10 seconds [Save Log Job] 2024-10-29 20:56:28.842 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC1 ValveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-29 20:56:28.842 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC2 ValveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-29 20:56:28.842 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC3 ValveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-29 20:56:28.842 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC4 ValveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-29 20:56:28.842 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC5 ValveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-29 20:56:28.842 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门Process gas final valveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-29 20:56:36.970 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, RF Power Off [Save Log Job] 2024-10-29 20:56:37.031 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, Stop all the gas flow [Save Log Job] 2024-10-29 20:56:42.786 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, Close all the valves [Save Log Job] 2024-10-29 20:56:42.847 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, close pump valve [Save Log Job] 2024-10-29 20:56:44.851 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门Chamber pumping valveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-29 20:56:46.246 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, delay 3 seconds [Save Log Job] 2024-10-29 20:56:49.355 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, vent 50 seconds [Save Log Job] 2024-10-29 20:57:39.466 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, Close vent valve [Save Log Job] 2024-10-29 20:57:40.343 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, PostProcess Finished in 1.2 minitues [Save Log Job] 2024-10-29 20:57:40.343 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System complete run ''PostProcess''. [Save Log Job] 2024-10-29 20:57:40.344 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventLotFinished [Save Log Job] 2024-10-29 20:57:40.443 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged <== [Save Log Job] 2024-10-29 21:27:31.997 LOG.INFO LOG.cs Line:61 Write() - 完成对数据库表格的更新操作 [Save Log Job] 2024-10-29 21:27:33.045 LOG.INFO EventService.cs Line:60 Register() - 客户端3699434d-33a0-43d9-b8cf-a6964ba7204a已连接 [Save Log Job] 2024-10-29 21:27:33.104 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, [Save Log Job] 2024-10-29 21:27:33.105 LOG.INFO LOG.cs Line:61 Write() - Device Model File contains non element node, [Save Log Job] 2024-10-29 21:27:33.209 LOG.INFO LOG.cs Line:61 Write() - Routine System 初始化 Start [Save Log Job] 2024-10-29 21:27:34.471 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged [Save Log Job] 2024-10-29 21:27:34.549 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetConfig(System_IsMesMode, True) [Save Log Job] 2024-10-29 21:27:38.222 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Software will be expired in -5 days, at 10/24/2024 12:00:00 AM 。 [Save Log Job] 2024-10-29 21:27:41.082 LOG.INFO LOG.cs Line:61 Write() - 用户admin尝试登录系统 [Save Log Job] 2024-10-29 21:27:41.083 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin [Save Log Job] 2024-10-29 21:27:41.088 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - User admin login [Save Log Job] 2024-10-29 21:27:41.252 LOG.INFO LOG.cs Line:61 Write() - 获取账号信息admin [Save Log Job] 2024-10-29 21:27:47.836 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation SetAutoMode() [Save Log Job] 2024-10-29 21:27:47.837 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentModeChanged [Save Log Job] 2024-10-29 21:27:47.837 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System running mode changed to Auto Mode [Save Log Job] 2024-10-29 21:27:49.572 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation RunRecipe(123, ) [Save Log Job] 2024-10-29 21:27:49.597 LOG.INFO LOG.cs Line:61 Write() - System通知TM保存工艺程序20241029212749-123 [Save Log Job] 2024-10-29 21:27:49.597 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventLotStart [Save Log Job] 2024-10-29 21:27:52.658 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged [Save Log Job] 2024-10-29 21:27:52.664 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged [Save Log Job] 2024-10-29 21:27:53.555 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check door status。 [Save Log Job] 2024-10-29 21:27:53.556 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：check chamber door。 [Save Log Job] 2024-10-29 21:27:53.556 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：check backpanel door。 [Save Log Job] 2024-10-29 21:27:53.567 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check pump status。 [Save Log Job] 2024-10-29 21:27:58.825 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Close all the valves。 [Save Log Job] 2024-10-29 21:28:01.225 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Open pumping valve。 [Save Log Job] 2024-10-29 21:28:02.060 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check chamber pressure。 [Save Log Job] 2024-10-29 21:28:40.852 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Pump below 100mTorr。 [Save Log Job] 2024-10-29 21:28:40.912 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：PreProcess Finished in 0.9 minitues。 [Save Log Job] 2024-10-29 21:28:40.912 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System complete run ''PreProcess''. [Save Log Job] 2024-10-29 21:28:40.915 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Run Recipe 20241029212749-123 [Save Log Job] 2024-10-29 21:28:40.915 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe start run''20241029212749-123'' [Save Log Job] 2024-10-29 21:28:40.969 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe''20241029212749-123'' start run step 1：initial。 [Save Log Job] 2024-10-29 21:28:40.971 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。 [Save Log Job] 2024-10-29 21:28:40.971 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。 [Save Log Job] 2024-10-29 21:28:40.972 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。 [Save Log Job] 2024-10-29 21:28:40.972 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。 [Save Log Job] 2024-10-29 21:28:40.972 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。 [Save Log Job] 2024-10-29 21:28:40.973 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。 [Save Log Job] 2024-10-29 21:28:40.973 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。 [Save Log Job] 2024-10-29 21:28:40.973 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPower，RF set Power:0。 [Save Log Job] 2024-10-29 21:28:40.974 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。 [Save Log Job] 2024-10-29 21:28:40.974 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。 [Save Log Job] 2024-10-29 21:28:40.975 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。 [Save Log Job] 2024-10-29 21:28:40.975 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas1， ramp to 45sccm。 [Save Log Job] 2024-10-29 21:28:40.975 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas2， ramp to 56sccm。 [Save Log Job] 2024-10-29 21:28:40.975 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas3， ramp to 66sccm。 [Save Log Job] 2024-10-29 21:28:40.976 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas4， ramp to 76sccm。 [Save Log Job] 2024-10-29 21:28:40.976 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas5， ramp to 86sccm。 [Save Log Job] 2024-10-29 21:28:40.976 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPowerOnOff，Set RF power Off。 [Save Log Job] 2024-10-29 21:28:41.026 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Start monitor pressure stability [Save Log Job] 2024-10-29 21:29:11.028 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe''20241029212749-123'' end step 1 [Save Log Job] 2024-10-29 21:29:11.031 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Stop monitor pressure stability [Save Log Job] 2024-10-29 21:29:11.032 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Recipe run completed，Recipe：20241029212749-123 Start time：2024/10/29 21:28:40 End time：2024/10/29 21:29:11 Total time：0:0:30 [Save Log Job] 2024-10-29 21:29:11.032 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Recipe completely run [Save Log Job] 2024-10-29 21:29:11.087 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, wait for 10 seconds [Save Log Job] 2024-10-29 21:29:13.064 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC1 ValveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-29 21:29:13.064 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC2 ValveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-29 21:29:13.064 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC3 ValveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-29 21:29:13.064 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC4 ValveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-29 21:29:13.065 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC5 ValveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-29 21:29:13.065 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门Process gas final valveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-29 21:29:21.169 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, RF Power Off [Save Log Job] 2024-10-29 21:29:21.233 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, Stop all the gas flow [Save Log Job] 2024-10-29 21:29:27.096 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, Close all the valves [Save Log Job] 2024-10-29 21:29:27.156 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, close pump valve [Save Log Job] 2024-10-29 21:29:29.197 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门Chamber pumping valveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-29 21:29:30.520 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, delay 3 seconds [Save Log Job] 2024-10-29 21:29:33.638 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, vent 50 seconds [Save Log Job] 2024-10-29 21:30:23.731 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, Close vent valve [Save Log Job] 2024-10-29 21:30:24.671 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, PostProcess Finished in 1.2 minitues [Save Log Job] 2024-10-29 21:30:24.671 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System complete run ''PostProcess''. [Save Log Job] 2024-10-29 21:30:24.672 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventLotFinished [Save Log Job] 2024-10-29 21:30:24.767 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged [Save Log Job] 2024-10-29 21:32:05.480 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Operation RunRecipe(123, ) [Save Log Job] 2024-10-29 21:32:05.482 LOG.INFO LOG.cs Line:61 Write() - System通知TM保存工艺程序20241029213205-123 [Save Log Job] 2024-10-29 21:32:05.482 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventLotStart [Save Log Job] 2024-10-29 21:32:05.485 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventEquipmentStatusChanged [Save Log Job] 2024-10-29 21:32:05.533 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check door status。 [Save Log Job] 2024-10-29 21:32:05.533 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：check chamber door。 [Save Log Job] 2024-10-29 21:32:05.534 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：check backpanel door。 [Save Log Job] 2024-10-29 21:32:05.534 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check pump status。 [Save Log Job] 2024-10-29 21:32:05.534 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Close all the valves。 [Save Log Job] 2024-10-29 21:32:05.592 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Open pumping valve。 [Save Log Job] 2024-10-29 21:32:07.634 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门Chamber pumping valveOpen失败，原因：Valve keep closed 。 [Save Log Job] 2024-10-29 21:32:08.210 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Check chamber pressure。 [Save Log Job] 2024-10-29 21:33:02.387 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：Pump below 100mTorr。 [Save Log Job] 2024-10-29 21:33:02.432 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Prepare for running recipe：PreProcess Finished in 0.9 minitues。 [Save Log Job] 2024-10-29 21:33:02.432 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System complete run ''PreProcess''. [Save Log Job] 2024-10-29 21:33:02.433 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Run Recipe 20241029213205-123 [Save Log Job] 2024-10-29 21:33:02.433 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe start run''20241029213205-123'' [Save Log Job] 2024-10-29 21:33:02.484 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe''20241029213205-123'' start run step 1：initial。 [Save Log Job] 2024-10-29 21:33:02.484 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetTVMode，TV mode set to TVPressureCtrl。 [Save Log Job] 2024-10-29 21:33:02.484 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - Device Failed to do PressureControl.SetTVPosition, Throttle valve is in pressure conrol mode, can not set position。 [Save Log Job] 2024-10-29 21:33:02.485 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetTVPressure，TV pressure set to 50 mtorr。 [Save Log Job] 2024-10-29 21:33:02.485 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：PressureControl.SetBoostPressure，Boost pump pressure set to 100 mTorr。 [Save Log Job] 2024-10-29 21:33:02.485 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMode，Set RF work mode to ContinuousWaveMode。 [Save Log Job] 2024-10-29 21:33:02.485 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPulsingFrequency，RF set Frequency:0。 [Save Log Job] 2024-10-29 21:33:02.485 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPulsingDuty，RF set Duty:0 。 [Save Log Job] 2024-10-29 21:33:02.485 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPower，RF set Power:0。 [Save Log Job] 2024-10-29 21:33:02.485 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchProcessMode，Match mode set to PresetMode。 [Save Log Job] 2024-10-29 21:33:02.485 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchPositionC1，Set RF match position c1 :50。 [Save Log Job] 2024-10-29 21:33:02.485 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetMatchPositionC2，Set RF match position c2 :50。 [Save Log Job] 2024-10-29 21:33:02.485 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas1， ramp to 45sccm。 [Save Log Job] 2024-10-29 21:33:02.485 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas2， ramp to 56sccm。 [Save Log Job] 2024-10-29 21:33:02.486 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas3， ramp to 66sccm。 [Save Log Job] 2024-10-29 21:33:02.486 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas4， ramp to 76sccm。 [Save Log Job] 2024-10-29 21:33:02.486 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：MfcGas5， ramp to 86sccm。 [Save Log Job] 2024-10-29 21:33:02.487 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Device Execute：Rf.SetPowerOnOff，Set RF power Off。 [Save Log Job] 2024-10-29 21:33:02.537 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Start monitor pressure stability [Save Log Job] 2024-10-29 21:33:32.540 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe''20241029213205-123'' end step 1 [Save Log Job] 2024-10-29 21:33:32.543 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - Stop monitor pressure stability [Save Log Job] 2024-10-29 21:33:32.543 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Recipe run completed，Recipe：20241029213205-123 Start time：2024/10/29 21:33:02 End time：2024/10/29 21:33:32 Total time：0:0:30 [Save Log Job] 2024-10-29 21:33:32.543 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System Recipe completely run [Save Log Job] 2024-10-29 21:33:32.593 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, wait for 10 seconds [Save Log Job] 2024-10-29 21:33:34.570 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC1 ValveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-29 21:33:34.570 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC2 ValveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-29 21:33:34.570 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC3 ValveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-29 21:33:34.570 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC4 ValveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-29 21:33:34.570 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门MFC5 ValveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-29 21:33:34.570 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门Process gas final valveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-29 21:33:42.655 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, RF Power Off [Save Log Job] 2024-10-29 21:33:42.713 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, Stop all the gas flow [Save Log Job] 2024-10-29 21:33:48.516 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, Close all the valves [Save Log Job] 2024-10-29 21:33:48.575 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, close pump valve [Save Log Job] 2024-10-29 21:33:50.601 LOG.WARN EventLogWriter.cs Line:17 WriteEvent() - System 阀门Chamber pumping valveClose失败，原因：Valve keep open。 [Save Log Job] 2024-10-29 21:33:52.061 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, delay 3 seconds [Save Log Job] 2024-10-29 21:33:55.158 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, vent 50 seconds [Save Log Job] 2024-10-29 21:34:45.267 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, Close vent valve [Save Log Job] 2024-10-29 21:34:46.090 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System recipe after running, PostProcess Finished in 1.2 minitues [Save Log Job] 2024-10-29 21:34:46.090 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - System complete run ''PostProcess''. [Save Log Job] 2024-10-29 21:34:46.090 LOG.INFO EventLogWriter.cs Line:21 WriteEvent() - EventLotFinished