202410311314206598—SFC240912810.csv 608 B

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  1. 【批号】,【机台号】,【程序名称】,【工序】,【开始时间】,【结束时间】,【氧气浓度】,【腔体压力】,【功率】
  2. SFC240912810/,22,CACB,,10/31/2024 1:13:07 PM,,0.2770519,50000,0
  3. SFC240912810/,22,CACB,,,,0.2770519,50000,0
  4. SFC240912810/,22,CACB,,,,0.686825,35006,0
  5. SFC240912810/,22,CACB,,,,0.04307189,24995,0
  6. SFC240912810/,22,CACB,,,,0.3414374,10008,0
  7. SFC240912810/,22,CACB,,,,0.216126,100,0
  8. SFC240912810/,22,CACB,,,,41.40633,92,0
  9. SFC240912810/,22,CACB,,,,45.73711,103,0
  10. SFC240912810/,22,CACB,,,,45.32931,92,0
  11. SFC240912810/,22,CACB,,,10/31/2024 1:14:20 PM,45.23955,98,18