【批号】,【机台号】,【程序名称】,【工序】,【开始时间】,【结束时间】,【氧气浓度】,【腔体压力】,【功率】
SFC240912810/,22,CACB,,10/31/2024 1:13:07 PM,,0.2770519,50000,0
SFC240912810/,22,CACB,,,,0.2770519,50000,0
SFC240912810/,22,CACB,,,,0.686825,35006,0
SFC240912810/,22,CACB,,,,0.04307189,24995,0
SFC240912810/,22,CACB,,,,0.3414374,10008,0
SFC240912810/,22,CACB,,,,0.216126,100,0
SFC240912810/,22,CACB,,,,41.40633,92,0
SFC240912810/,22,CACB,,,,45.73711,103,0
SFC240912810/,22,CACB,,,,45.32931,92,0
SFC240912810/,22,CACB,,,10/31/2024 1:14:20 PM,45.23955,98,18