PunkHPX8/PunkHPX8_RT/Config/Layout/ToolLayoutConfiguration.xml

<?xml version="1.0" encoding="utf-8"?>
<ToolLayoutXmlRoot xmlns:i="http://www.w3.org/2001/XMLSchema-instance">
	<Items>
		<!-- PLATING POWER SUPPLIES -->
		<Item i:type="PlatingPowerSupply">
			<Installed>true</Installed>
			<PowerSupplyID>1</PowerSupplyID>
			<Count>1</Count>
			<SubType>Lumina1ChannelCurrent</SubType>
		</Item>
		<Item i:type="PlatingPowerSupply">
			<Installed>true</Installed>
			<PowerSupplyID>2</PowerSupplyID>
			<Count>1</Count>
			<SubType>Lumina1ChannelCurrent</SubType>
		</Item>
		<Item i:type="PlatingPowerSupply">
			<Installed>true</Installed>
			<PowerSupplyID>3</PowerSupplyID>
			<Count>1</Count>
			<SubType>Lumina1ChannelCurrent</SubType>
		</Item>
		<Item i:type="PlatingPowerSupply">
			<Installed>true</Installed>
			<PowerSupplyID>4</PowerSupplyID>
			<Count>1</Count>
			<SubType>Lumina1ChannelCurrent</SubType>
		</Item>
		<Item i:type="PlatingPowerSupply">
			<Installed>true</Installed>
			<PowerSupplyID>5</PowerSupplyID>
			<Count>1</Count>
			<SubType>Lumina1ChannelCurrent</SubType>
		</Item>
		<Item i:type="PlatingPowerSupply">
			<Installed>true</Installed>
			<PowerSupplyID>6</PowerSupplyID>
			<Count>1</Count>
			<SubType>Lumina1ChannelCurrent</SubType>
		</Item>
		<Item i:type="PlatingPowerSupply">
			<Installed>true</Installed>
			<PowerSupplyID>7</PowerSupplyID>
			<Count>1</Count>
			<SubType>Lumina1ChannelCurrent</SubType>
		</Item>
		<Item i:type="PlatingPowerSupply">
			<Installed>true</Installed>
			<PowerSupplyID>8</PowerSupplyID>
			<Count>1</Count>
			<SubType>Lumina1ChannelCurrent</SubType>
		</Item>
		<Item i:type="PlatingPowerSupply">
			<Installed>true</Installed>
			<PowerSupplyID>9</PowerSupplyID>
			<Count>1</Count>
			<SubType>Lumina1ChannelCurrent</SubType>
		</Item>
		<Item i:type="PlatingPowerSupply">
			<Installed>true</Installed>
			<PowerSupplyID>10</PowerSupplyID>
			<Count>1</Count>
			<SubType>Lumina1ChannelCurrent</SubType>
		</Item>
		<Item i:type="PlatingPowerSupply">
			<Installed>true</Installed>
			<PowerSupplyID>11</PowerSupplyID>
			<Count>1</Count>
			<SubType>Lumina1ChannelCurrent</SubType>
		</Item>
		<Item i:type="PlatingPowerSupply">
			<Installed>true</Installed>
			<PowerSupplyID>12</PowerSupplyID>
			<Count>1</Count>
			<SubType>Lumina1ChannelCurrent</SubType>
		</Item>
		<Item i:type="PlatingPowerSupply">
			<Installed>true</Installed>
			<PowerSupplyID>13</PowerSupplyID>
			<Count>1</Count>
			<SubType>Lumina1ChannelCurrent</SubType>
		</Item>
		
		<Item i:type="PlatingPowerSupply">
			<Installed>true</Installed>
			<PowerSupplyID>14</PowerSupplyID>
			<Count>1</Count>
			<SubType>Lumina2ChannelCurrent</SubType>
		</Item>
		

		<!-- CMM POWER SUPPLIES -->

		<Item i:type="CMMPowerSupply">
			<Installed>true</Installed>
			<PowerSupplyID>1</PowerSupplyID>
			<Count>1</Count>
			<SubType>Lumina1ChannelCurrent</SubType>
		</Item>

		<!-- UPS -->

		<Item i:type="UPS">
			<Installed>false</Installed>
			<SubType>Eaton5PX</SubType>
		</Item>
		<!-- HEDs -->

		<Item i:type="TempControl">
			<Installed>true</Installed>
			<Count>4</Count>
			<TCID>1</TCID>
			<SubType>SMC</SubType>
		</Item>

		<!-- RESISTIVITY PROBES -->
		<Item i:type="ResistivityProbe">
			<Installed>true</Installed>
			<Count>2</Count>
			<ResistivityProbeID>1</ResistivityProbeID>
			<SubType>STDThornton</SubType>
		</Item>
		<!-- FFU -->

		<Item i:type="FFU">
			<Installed>true</Installed>
			<FFUID>1</FFUID>
			<SubType>FFUType2</SubType>
		</Item>

		<!--VPW-->
		<Item i:type="VpwMain">
			<Installed>true</Installed>
			<CellID>20</CellID>
			<NominalGantryPositionInMilliMeters>1135</NominalGantryPositionInMilliMeters>
			<VpwMainID>1</VpwMainID>
			<SubType>Scanning</SubType>
			<Cells>
				<Item i:type="VpwCell">
					<Installed>true</Installed>
					<CellID>14</CellID>
					<NominalGantryPositionInMilliMeters>2219</NominalGantryPositionInMilliMeters>
					<VpwCellID>1</VpwCellID>
					<ResistivityID>RP1-1</ResistivityID>
					<SubType>Stratus</SubType>
				</Item>
				<Item i:type="VpwCell">
					<Installed>true</Installed>
					<CellID>15</CellID>
					<NominalGantryPositionInMilliMeters>2219</NominalGantryPositionInMilliMeters>
					<VpwCellID>2</VpwCellID>
					<ResistivityID>RP1-2</ResistivityID>
					<SubType>Stratus</SubType>
				</Item>
			</Cells>
		</Item>

		<!-- HEDs -->

		<Item i:type="TempControl">
			<Installed>true</Installed>
			<Count>4</Count>
			<TCID>1</TCID>
			<SubType>SMC</SubType>
		</Item>


		<Item i:type="Reservoir">
			<Installed>true</Installed>
			<ReservoirID>1</ReservoirID>
			<Size>2</Size>
			<TCID>TC1-1</TCID>
			<SubType>DegasMembrance</SubType>
			<PHProbeChannelNumber>1</PHProbeChannelNumber>
			<PlannedInitialChemistry>Ni</PlannedInitialChemistry>
			<PlatingCells>
				<Item i:type="PlatingCell">
					<Installed>true</Installed>
					<PermittedWaferSizeInMM>300</PermittedWaferSizeInMM>
					<CellID>1</CellID>
					<NominalGantryPositionInMilliMeters>2219</NominalGantryPositionInMilliMeters>
					<PlatingCellID>1</PlatingCellID>
					<PlatingPowerSupplyAID>Power13-1</PlatingPowerSupplyAID>
					<PlatingPowerSupplyBID>Power14-1</PlatingPowerSupplyBID>
					<SubType>DegasMembrance</SubType>
				</Item>
			</PlatingCells>
			<CellPosition>13</CellPosition>
			<PositionInMilliMeters>2000</PositionInMilliMeters>
			<LengthInMilliMeters>340</LengthInMilliMeters>
			<ChemicalReplenishmentEnable>true</ChemicalReplenishmentEnable>
			<DIReplenType>Level</DIReplenType>
			<ANDIReplenType>Level</ANDIReplenType>
			<PHProbeType>Standard</PHProbeType>
			<CrossDoseType>None</CrossDoseType>
			<ChemReplenType>Peristaltic</ChemReplenType>
			<ChemReplenPumps>2</ChemReplenPumps>
			<AutoDrainsInstalled>false</AutoDrainsInstalled>
			<SlipstreamType>None</SlipstreamType>
			<CMMType>Standard</CMMType>
			<CMMSupplyID>CMMPower1-1</CMMSupplyID>
			<EvaporatorType></EvaporatorType>
		</Item>
		<Item i:type="Reservoir">
			<Installed>true</Installed>
			<ReservoirID>2</ReservoirID>
			<Size>2</Size>
			<TCID>TC1-2</TCID>
			<SubType>DegasMembrance</SubType>
			<PHProbeChannelNumber>1</PHProbeChannelNumber>
			<PlannedInitialChemistry>Cu</PlannedInitialChemistry>
			<PlatingCells>
				<Item i:type="PlatingCel2">
					<Installed>true</Installed>
					<PermittedWaferSizeInMM>300</PermittedWaferSizeInMM>
					<CellID>2</CellID>
					<NominalGantryPositionInMilliMeters>2219</NominalGantryPositionInMilliMeters>
					<PlatingCellID>2</PlatingCellID>
					<PlatingPowerSupplyAID></PlatingPowerSupplyAID>
					<PlatingPowerSupplyBID></PlatingPowerSupplyBID>
					<SubType>DegasMembrance</SubType>
				</Item>
			</PlatingCells>
			<CellPosition>14</CellPosition>
			<PositionInMilliMeters>2000</PositionInMilliMeters>
			<LengthInMilliMeters>340</LengthInMilliMeters>
			<ChemicalReplenishmentEnable>true</ChemicalReplenishmentEnable>
			<DIReplenType>Level</DIReplenType>
			<ANDIReplenType>Level</ANDIReplenType>
			<PHProbeType>Standard</PHProbeType>
			<CrossDoseType>None</CrossDoseType>
			<ChemReplenType>Peristaltic</ChemReplenType>
			<ChemReplenPumps>2</ChemReplenPumps>
			<AutoDrainsInstalled>false</AutoDrainsInstalled>
			<SlipstreamType>None</SlipstreamType>
			<CMMType></CMMType>
			<CMMSupplyID></CMMSupplyID>
			<EvaporatorType></EvaporatorType>
		</Item>
		<Item i:type="Reservoir">
			<Installed>true</Installed>
			<ReservoirID>3</ReservoirID>
			<Size>2</Size>
			<TCID>TC1-3</TCID>
			<SubType>DegasMembrance</SubType>
			<PHProbeChannelNumber>1</PHProbeChannelNumber>
			<PlannedInitialChemistry>Cu</PlannedInitialChemistry>
			<PlatingCells>
				<Item i:type="PlatingCel3">
					<Installed>true</Installed>
					<PermittedWaferSizeInMM>300</PermittedWaferSizeInMM>
					<CellID>3</CellID>
					<NominalGantryPositionInMilliMeters>2219</NominalGantryPositionInMilliMeters>
					<PlatingCellID>3</PlatingCellID>
					<PlatingPowerSupplyAID></PlatingPowerSupplyAID>
					<PlatingPowerSupplyBID></PlatingPowerSupplyBID>
					<SubType>DegasMembrance</SubType>
				</Item>
			</PlatingCells>
			<CellPosition>15</CellPosition>
			<PositionInMilliMeters>2000</PositionInMilliMeters>
			<LengthInMilliMeters>340</LengthInMilliMeters>
			<ChemicalReplenishmentEnable>true</ChemicalReplenishmentEnable>
			<DIReplenType>Level</DIReplenType>
			<ANDIReplenType>Level</ANDIReplenType>
			<PHProbeType>Standard</PHProbeType>
			<CrossDoseType>None</CrossDoseType>
			<ChemReplenType>Peristaltic</ChemReplenType>
			<ChemReplenPumps>2</ChemReplenPumps>
			<AutoDrainsInstalled>false</AutoDrainsInstalled>
			<SlipstreamType>None</SlipstreamType>
			<CMMType></CMMType>
			<CMMSupplyID></CMMSupplyID>
			<EvaporatorType></EvaporatorType>
		</Item>
		<Item i:type="Reservoir">
			<Installed>true</Installed>
			<ReservoirID>4</ReservoirID>
			<Size>2</Size>
			<TCID>TC1-4</TCID>
			<SubType>DegasMembrance</SubType>
			<PHProbeChannelNumber>1</PHProbeChannelNumber>
			<PlannedInitialChemistry>Cu</PlannedInitialChemistry>
			<PlatingCells>
				<Item i:type="PlatingCel3">
					<Installed>true</Installed>
					<PermittedWaferSizeInMM>300</PermittedWaferSizeInMM>
					<CellID>4</CellID>
					<NominalGantryPositionInMilliMeters>2219</NominalGantryPositionInMilliMeters>
					<PlatingCellID>4</PlatingCellID>
					<PlatingPowerSupplyAID></PlatingPowerSupplyAID>
					<PlatingPowerSupplyBID></PlatingPowerSupplyBID>
					<SubType>DegasMembrance</SubType>
				</Item>
			</PlatingCells>
			<CellPosition>16</CellPosition>
			<PositionInMilliMeters>2000</PositionInMilliMeters>
			<LengthInMilliMeters>340</LengthInMilliMeters>
			<ChemicalReplenishmentEnable>true</ChemicalReplenishmentEnable>
			<DIReplenType>Level</DIReplenType>
			<ANDIReplenType>Level</ANDIReplenType>
			<PHProbeType>Standard</PHProbeType>
			<CrossDoseType>None</CrossDoseType>
			<ChemReplenType>Peristaltic</ChemReplenType>
			<ChemReplenPumps>2</ChemReplenPumps>
			<AutoDrainsInstalled>false</AutoDrainsInstalled>
			<SlipstreamType>None</SlipstreamType>
			<CMMType></CMMType>
			<CMMSupplyID></CMMSupplyID>
			<EvaporatorType></EvaporatorType>
		</Item>
		<!-- SRDs -->

		<Item i:type="SRD">
			<Installed>true</Installed>
			<PermittedWaferSizeInMM>200</PermittedWaferSizeInMM>
			<ResourceID>SRD1</ResourceID>
			<Type>SRD</Type>
			<SRDID>1</SRDID>
			<SubType>VacuumChuckWithFan</SubType>
		</Item>
		<Item i:type="SRD">
			<Installed>true</Installed>
			<PermittedWaferSizeInMM>200</PermittedWaferSizeInMM>
			<ResourceID>SRD2</ResourceID>
			<Type>SRD</Type>
			<SRDID>2</SRDID>
			<SubType>VacuumChuckWithFan</SubType>
		</Item>

		<!-- SYSTEM FACILITIES -->

		<Item i:type="SystemFacilities">
			<Installed>true</Installed>
			<Type>SystemFacilities</Type>
			<ExternalPumpBox>false</ExternalPumpBox>	  	 
			<SampleStation1Installed>true</SampleStation1Installed>
			<SampleStation2Installed>false</SampleStation2Installed>
			<SlipstreamInterfaceInstalled>true</SlipstreamInterfaceInstalled>
			<RecirculationFlowPressure>false</RecirculationFlowPressure>
		</Item>

		<Item i:type="EFEM">
			<Installed>True</Installed>
			<Type>EFEM</Type>
		</Item>
		
		<!-- SAFETY -->
		
		<!-- LOAD PORTS -->

		<Item i:type="LoadPort">
			<Installed>true</Installed>
			<Type>LoadPort</Type>
			<PortID>1</PortID>
			<SubType>BrooksVision</SubType>
		</Item>
		<Item i:type="LoadPort">
			<Installed>true</Installed>
			<Type>LoadPort</Type>
			<PortID>2</PortID>
			<SubType>BrooksVision</SubType>
		</Item>

		<Item i:type="SystemSafety">
			<Installed>true</Installed>
			<Type>SystemSafety</Type>
			<ReservoirOverflowSensor>true</ReservoirOverflowSensor>
		</Item>

		<!-- DUMMYs -->

		<Item i:type="DummyCassette">
			<Installed>true</Installed>
			<PermittedWaferSizeInMM>200</PermittedWaferSizeInMM>
			<ResourceID>Dummy1</ResourceID>
			<Type>Dummy</Type>
			<MaxNumberOfSlots>3</MaxNumberOfSlots>
			<DummyCassetteID>1</DummyCassetteID>
		</Item>
		<Item i:type="DummyCassette">
			<Installed>true</Installed>
			<PermittedWaferSizeInMM>200</PermittedWaferSizeInMM>
			<ResourceID>Dummy1</ResourceID>
			<Type>Dummy</Type>
			<MaxNumberOfSlots>3</MaxNumberOfSlots>
			<DummyCassetteID>2</DummyCassetteID>
		</Item>

	</Items>

</ToolLayoutXmlRoot>