true 1 1 Lumina1ChannelCurrent true 2 1 Lumina1ChannelCurrent true 3 1 Lumina1ChannelCurrent true 4 1 Lumina1ChannelCurrent true 5 1 Lumina1ChannelCurrent true 6 1 Lumina1ChannelCurrent true 7 1 Lumina1ChannelCurrent true 8 1 Lumina1ChannelCurrent true 9 1 Lumina1ChannelCurrent true 10 1 Lumina1ChannelCurrent true 11 1 Lumina1ChannelCurrent true 12 1 Lumina1ChannelCurrent true 13 1 Lumina1ChannelCurrent true 14 1 Lumina2ChannelCurrent true 1 1 Lumina1ChannelCurrent false Eaton5PX true 4 1 SMC true 2 1 STDThornton true 1 FFUType2 true 20 1135 1 Scanning true 14 2219 1 RP1-1 Stratus true 15 2219 2 RP1-2 Stratus true 4 1 SMC true 1 2 TC1-1 DegasMembrance 1 Ni true 300 1 2219 1 Power13-1 Power14-1 DegasMembrance 13 2000 340 true Level Level Standard None Peristaltic 2 false None Standard CMMPower1-1 true 2 2 TC1-2 DegasMembrance 1 Cu true 300 2 2219 2 DegasMembrance 14 2000 340 true Level Level Standard None Peristaltic 2 false None true 3 2 TC1-3 DegasMembrance 1 Cu true 300 3 2219 3 DegasMembrance 15 2000 340 true Level Level Standard None Peristaltic 2 false None true 4 2 TC1-4 DegasMembrance 1 Cu true 300 4 2219 4 DegasMembrance 16 2000 340 true Level Level Standard None Peristaltic 2 false None true 200 SRD1 SRD 1 VacuumChuckWithFan true 200 SRD2 SRD 2 VacuumChuckWithFan true SystemFacilities false true false true false True EFEM true LoadPort 1 BrooksVision true LoadPort 2 BrooksVision true SystemSafety true true 200 Dummy1 Dummy 3 1 true 200 Dummy1 Dummy 3 2