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- using System;
- using System.Collections.Generic;
- using System.Linq;
- using System.Text;
- using System.Threading.Tasks;
- namespace MECF.Framework.Common.CommonData.Vpw
- {
- public class VpwLotTrackData
- {
- public DateTime TimeStamp { get; set; }
- /// <summary>
- /// 状态机
- /// </summary>
- public string StateMachine { get; set; }
- /// <summary>
- /// 真空值
- /// </summary>
- public double VacuumPressure { get; set; }
- /// <summary>
- /// cell流量
- /// </summary>
- public double CellFlow { get; set; }
- /// <summary>
- /// DO
- /// </summary>
- public double DiwLoopDo { get; set; }
- /// <summary>
- /// 水压
- /// </summary>
- public double WaterPressure { get; set; }
- /// <summary>
- /// DripValve
- /// </summary>
- public bool DripValve { get; set; }
- /// <summary>
- /// SmallValve
- /// </summary>
- public bool SmallValve { get; set; }
- /// <summary>
- /// LargeValve
- /// </summary>
- public bool LargeValve { get; set; }
- /// <summary>
- /// chamber closed
- /// </summary>
- public bool ChamberClosed { get; set; }
- }
- }
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