using System;
using System.Collections.Generic;
using System.Linq;
using System.Text;
using System.Threading.Tasks;

namespace MECF.Framework.Common.CommonData.Vpw
{
    public class VpwLotTrackData
    {
        public DateTime TimeStamp { get; set; }
        /// <summary>
        /// 状态机
        /// </summary>
        public string StateMachine { get; set; }
        /// <summary>
        /// 真空值
        /// </summary>
        public double VacuumPressure { get; set; }
        /// <summary>
        /// cell流量
        /// </summary>
        public double CellFlow { get; set; }
        /// <summary>
        /// DO
        /// </summary>
        public double DiwLoopDo { get; set; }
        /// <summary>
        /// 水压
        /// </summary>
        public double WaterPressure { get; set; }
        /// <summary>
        /// DripValve
        /// </summary>
        public bool DripValve { get; set; }
        /// <summary>
        /// SmallValve
        /// </summary>
        public bool SmallValve { get; set; }
        /// <summary>
        /// LargeValve
        /// </summary>
        public bool LargeValve { get; set; }
        /// <summary>
        /// chamber closed
        /// </summary>
        public bool ChamberClosed { get; set; }
    }
}