 chenzk
|
fd895d2038
add interval rinse routine
|
4 dienas atpakaļ |
 chenkui
|
4feb3d9e24
update plating cell run recipe
|
4 dienas atpakaļ |
|
chenzk
|
d49038500b
1 add platingcell run recipe pre check
|
5 dienas atpakaļ |
|
chenzk
|
0f907ac87e
1revise platingcell init routine
|
5 dienas atpakaļ |
|
chenkui
|
de63db15fc
update vertical position
|
5 dienas atpakaļ |
|
chenkui
|
314d538524
add vertical routine into plating cell recipe
|
5 dienas atpakaļ |
|
chenkui
|
b11c469645
add Plating cell vertical Module
|
5 dienas atpakaļ |
|
chenzk
|
19158728c5
add reservoir/platingcell persistent releated
|
1 nedēļu atpakaļ |
|
chenkui
|
3eca239970
update scheduler
|
1 nedēļu atpakaļ |
|
chenzk
|
0599ba5489
revise vpw releated bug
|
1 nedēļu atpakaļ |
|
chenzk
|
160bb916f7
1revise axis run timeout
|
1 nedēļu atpakaļ |
|
chenkui
|
d2df24ff44
update VPW Home
|
1 nedēļu atpakaļ |
|
chenzk
|
b1596be753
add efem/operation view aligner wafer module
|
1 nedēļu atpakaļ |
|
chenkui
|
e0e29761ad
robot scheduler add vpw prepare
|
2 nedēļas atpakaļ |
|
chenzk
|
4917ae0176
add beckhoff
|
2 nedēļas atpakaļ |
|
chenzk
|
39d520ecab
add srd2 beckhoff and safety power status
|
2 nedēļas atpakaļ |
|
chenzk
|
716a44e7ff
revise efem robot view
|
2 nedēļas atpakaļ |
|
chenzk
|
5c2acda55f
add platingcell/vpw wafersize
|
2 nedēļas atpakaļ |
|
chenkui
|
494e4efb12
update scheduler sequence
|
2 nedēļas atpakaļ |
|
chenzk
|
4dd2120614
revise sequence recipe and srd facility check not
|
2 nedēļas atpakaļ |
|
chenzk
|
b46edee329
revise efem simulation
|
2 nedēļas atpakaļ |
|
chenzk
|
8c714316dc
releated power supply and simulator
|
2 nedēļas atpakaļ |
|
chenkui
|
d8a916beb6
start develop scheduler
|
2 nedēļas atpakaļ |
|
chenkui
|
8a6a157a2b
update top view;
|
3 nedēļas atpakaļ |
|
chenzk
|
08107a729c
add power manual adjust power grade
|
3 nedēļas atpakaļ |
|
chenzk
|
ed769dc4ec
revise ui menu
|
3 nedēļas atpakaļ |
|
chenzk
|
2106d9df67
add ccr timeremain and step
|
3 nedēļas atpakaļ |
|
chenzk
|
cf2e7df7e5
add platingcell ccr
|
1 mēnesi atpakaļ |
|
chenzk
|
3f42924935
add platingcell rotation axis reletaed
|
1 mēnesi atpakaļ |
|
chenzk
|
90051f8533
add platingcell setup view
|
1 mēnesi atpakaļ |
